Laminar flow element, flow control device, and semiconductor device

Abstract

The invention provides a laminar flow element, a flow control device and semiconductor equipment, relates to the technical field of semiconductor equipment, and is used for solving the problem of how to improve the application convenience of the laminar flow element. Specifically, the laminar flow element comprises a plurality of runner plates which are arranged in a stacked mode, each runner plate comprises a solid structure and a runner group, and each runner group comprises runners; in any two adjacent flow channel plates, each first flow channel group of the upper flow channel plate corresponds to at least one second flow channel group of the lower flow channel plate, so that a corresponding group is formed; in each corresponding group, the orthographic projection of the first flow channel group on a first plane perpendicular to the thickness direction is partially overlapped with at least one orthographic projection of the corresponding at least one second flow channel group on the first plane; the at least one second flow channel group is blocked by the solid structure part around the first flow channel group, so that the part of the first flow channel group is communicated with the part of the corresponding at least one second flow channel group to form at least one shunting channel.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a laminar flow element, a flow control device and a semiconductor equipment. BACKGROUND

[0002] The fluid is divided and rectified by the laminar flow element during the process of flowing through the laminar flow element, so that the laminar flow element has the functions of limiting flow and forming laminar flow.

[0003] In the prior art, the laminar flow element has a large volume, which leads to inconvenient use of the laminar flow element. SUMMARY

[0004] The present application discloses a laminar flow element, a flow control device and a semiconductor equipment, and aims to solve the technical problem of how to improve the application convenience of the laminar flow element.

[0005] In a first aspect, the present application provides a laminar flow element, which comprises a plurality of flow channel plates arranged in a stack, each flow channel plate comprising a solid structure and one or more flow channel groups, each flow channel group comprising at least one flow channel; in any two adjacent flow channel plates, the flow channel plate located above comprises a plurality of first flow channel groups arranged in a circumferential direction, and the flow channel plate located below comprises a plurality of second flow channel groups, each first flow channel group corresponds to at least one second flow channel group, and each first flow channel group and the corresponding at least one second flow channel group form a corresponding group; in each corresponding group, the projection of the first flow channel group on a first plane perpendicular to the thickness direction of the flow channel plate along the thickness direction of the flow channel plate partially overlaps at least one projection of the corresponding at least one second flow channel group on the first plane; the at least one second flow channel group is partially blocked by the solid structure around the first flow channel group, so that part of the first flow channel group and part of the corresponding at least one second flow channel group are connected to form at least one shunt channel.

[0006] According to the laminar flow element provided in the present application, since the plurality of flow channel plates are stacked, at least one second flow channel group located in a lower flow channel plate is blocked by the solid structure part around the first flow channel group in the flow channel plate located above, so that part of the first flow channel group is in communication with part of the corresponding at least one second flow channel group to form at least one shunt channel, and the parts of the shunt channel located on different flow channel plates are arranged and in communication along the thickness of the flow channel plate, and the fluid can flow along the thickness direction of the flow channel plate in the shunt channel. In this way, the fluid can flow in the flow channel of one of the flow channel plates (the first flow channel plate) for a certain distance, enter the flow channel of the flow channel plate adjacent to the first flow channel plate (the second flow channel plate), then flow in the flow channel of the second flow channel plate for a certain distance, enter the flow channel of the flow channel plate adjacent to the second flow channel plate and located on the side of the second flow channel plate away from the first flow channel plate (the third flow channel plate), and continue to flow after flowing in the flow channel of the third flow channel plate for a certain distance, so that the fluid can flow in the flow channel of each flow channel plate for a certain distance, and the flow resistance of the fluid increases after being shunted by the shunt channel, so as to match the relationship between the flow and the flow resistance, achieve the purpose of controlling the fluid flow, and form laminar flow.

[0007] In addition, in each corresponding group, the projection of the first flow channel group along the thickness direction of the flow channel plate on the first plane perpendicular to the thickness direction coincides with part of the at least one projection of the corresponding at least one second flow channel group along the thickness direction of the flow channel plate on the first plane, and the at least one second flow channel group is blocked by the solid structure part around the first flow channel group. Therefore, the solid structure around the first flow channel group functions as a spacer to a certain extent. There is no need to arrange a spacer between the flow channel plates to separate the adjacent flow channel plates, so that the space occupied by the spacer can be saved, the height dimension of the laminar flow element in the thickness direction of the flow channel plate is reduced, the volume of the laminar flow element is reduced, and the use convenience of the laminar flow element is improved. For example, the laminar flow element is convenient to arrange in a flow control device.

[0008] In addition, since the laminar flow effect is related to the length of the fluid channel, in order to guarantee the laminar flow effect, the length of the fluid channel needs to be set to be relatively long. Compared with the scheme in which two laminar flow plates are separated by a spacer so that the fluid flows out only through the fluid channel on one laminar flow plate, in the scheme of the present application, the fluid flows out through the shunt channel formed by the communication of the flow channels on at least two flow channel plates, so that even if the cross-sectional area of the flow channel plate in the direction perpendicular to the thickness direction is small, resulting in a small length of a single flow channel, considering that the fluid flows through more than one flow channel, after flowing through multiple flow channels, a good laminar flow effect can also be achieved. Therefore, the scheme of the present application is beneficial to reduce the cross-sectional area of the flow channel plate in the direction perpendicular to the thickness direction, is beneficial to reduce the volume of the laminar flow element, and improves the use convenience of the laminar flow element.

[0009] In a possible implementation, each flow channel plate is rotationally symmetrical. In this way, the flow channels on the flow channel plate can be distributed more regularly, so that the flow channels are more convenient to set, and the multiple distribution channels formed after the flow channels of adjacent flow channel plates are communicated can be distributed more regularly, so that the different distribution channels are convenient to form, and the flow of fluid is convenient to control.

[0010] In a possible implementation, the multiple flow channel plates are of the same shape. In this way, the flow channel plates are convenient to process.

[0011] In a possible implementation, the outer contour of each flow channel plate is circular in the projection on the first plane, and each flow channel is a circular ring segment in the projection on the first plane. In this way, the shape of the flow channel plate can be more regular, and the laminar flow element formed by the multiple flow channel plates can also be more regular. Compared with other shapes, the outer contour of the flow channel plate is circular, so that the flow channel plate occupies less space, so that the laminar flow element occupies less space, and the flow channel plate is convenient to process. The projection of each flow channel on the first plane is a circular ring segment, so that the length of the flow channel is as long as possible while ensuring that the laminar flow element occupies less space, so that the fluid is better distributed and rectified.

[0012] In a possible implementation, each flow channel group includes a first outer layer flow channel and a first inner layer flow channel, the first inner layer flow channel is arranged on the inner side of the first outer layer flow channel, and the length of the first inner layer flow channel in the circumferential direction of the flow channel plate is less than the length of the first outer layer flow channel. By arranging the length of the first inner layer flow channel in the first direction to be less than the length of the first outer layer flow channel in the first direction, the area between the two adjacent flow channel groups can be relatively spacious, so that the deviation of the flow channel plates in the circumferential direction after the flow channel plates are stacked does not cause the different distribution channels to be communicated, so that the distribution effect of the laminar flow element is ensured.

[0013] In a possible implementation, the two flow channel plates located at the outermost layers in the flow channel plate are respectively a first end flow channel plate and a second end flow channel plate; the laminar flow element further includes a first end plate connected to the side of the first end flow channel plate away from the second end flow channel plate, and the first end plate is provided with an outlet channel communicated with the flow channels of the first end flow channel plate, the outlet channel includes multiple branch channels, the multiple branch channels correspond to and are communicated with the multiple flow channel groups in the first end flow channel plate in one-to-one manner, and the branch channels extend to the outer surface of the first end plate in the radial direction of the first end plate. In this way, the fluid in the multiple flow channel plates can flow out of the outlet channel, and the multiple branch channels can be arranged, so that the fluid flowing out of the different distribution channels can enter the different branch channels after flowing out of the outlet channel, and then flow out of the laminar flow element, so that the fluid flows out more smoothly. In addition, the fluid flows out through the branch channels on the first end plate, so that the flow direction can be adjusted by adjusting the positions of the branch channels on the first end plate, so that the outlet direction of the laminar flow element is conveniently and flexibly designed.

[0014] In a possible implementation, the outlet channel further comprises a collecting groove recessed from the side surface of the first end plate facing away from the first end flow channel plate, the collecting groove is located at the radially inner side of the first end plate, and the plurality of branch channels are in communication with the collecting groove. Through the arrangement of the collecting groove, the fluid in the plurality of branch channels can be gathered and buffered in the collecting groove. When the flow rates of the fluid in the plurality of branch channels are greatly different, the collecting groove can redistribute the fluid to make the fluid flow more evenly in the plurality of branch channels.

[0015] In a possible implementation, along the circumference of the first end plate, the length of each branch channel is less than the length of the corresponding flow channel in the first end flow channel plate. In this way, after the fluid enters the flow channel of the first end flow channel plate, the fluid flows a certain distance in the first end flow channel plate before entering the branch channel, thereby further increasing the flow path length of the fluid to improve the flow dividing effect of the laminar flow element.

[0016] In a possible implementation, the two flow channel plates located at the outermost layers of the flow channel plates are the first end flow channel plate and the second end flow channel plate respectively; the laminar flow element further comprises a second end plate connected to the side of the second end flow channel plate facing away from the first end flow channel plate, and the second end plate is provided with an inlet channel in communication with the flow channels of the second end flow channel plate. The inlet channel comprises a main channel located at the radially inner side of the second end plate and a plurality of branch flow channels in communication with the main channel, and the plurality of branch flow channels correspond to and are in communication with the plurality of flow channel groups in the second end flow channel plate. In this way, the fluid can enter the plurality of flow channel plates through the inlet channel to be divided by the plurality of flow channel plates, and the cooperation of the main channel and the plurality of branch flow channels can distribute the fluid to each branch flow channel to make the fluid flow more evenly in each branch flow channel to improve the flow dividing effect of the laminar flow element.

[0017] In a possible implementation, along the circumference of the second end plate, the length of each branch flow channel is less than the length of the corresponding flow channel in the second end flow channel plate. In this way, when the fluid enters the corresponding flow channel in the second end flow channel plate from the branch flow channel, the fluid is located in a partial area of the corresponding flow channel in the second end flow channel plate, and then flows a certain distance in the corresponding flow channel in the second end flow channel plate before entering the flow channel in the lower flow channel plate of the second end flow channel plate. In this way, the flow path length of the fluid can be further increased to improve the flow dividing effect of the laminar flow element.

[0018] Secondly, this application provides a flow control device, which includes the laminar flow element and sensing component mentioned in the first aspect. The laminar flow element includes an inlet channel and an outlet channel, both of which are connected to the sensing component. The sensing component is used to measure the flow rate of the fluid flowing through the laminar flow element.

[0019] Since the flow control device provided in this application includes the laminar flow element of the first aspect, it is advantageous to reduce the size of the flow control device and also to more rationally design the layout of the laminar flow element and sensing element within the flow control device.

[0020] Thirdly, this application provides a semiconductor device, which includes the flow control device described in the second aspect.

[0021] Since the semiconductor device provided in this application includes a flow control device in the second aspect, and the flow control device can be relatively small, it is beneficial to leave more space for other components in the semiconductor device besides the flow control device, so that the structural layout of the semiconductor device is more reasonable. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a flow control device provided in an embodiment of this application;

[0024] Figure 2 for Figure 1 A schematic diagram of a sensing component in the flow control device shown;

[0025] Figure 3 This is a cross-sectional structural diagram of a laminar flow element;

[0026] Figure 4 for Figure 3 The diagram shows the structure of the flow channel plate in the laminar flow element.

[0027] Figure 5 for Figure 3 A schematic diagram of the spacer plate in the laminar flow element is shown;

[0028] Figure 6 This is a schematic diagram of the structure of a laminar flow element provided in an embodiment of this application;

[0029] Figure 7 forFigure 6 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0030] Figure 8 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 6 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0031] Figure 9 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 8 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0032] Figure 10 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 6 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0033] Figure 11 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 10 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0034] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 12 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 6 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0035] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 13 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 12 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0036] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 14 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 6 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0037] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 15 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 14 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0038] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; Figure 16 An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0039] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0040] 10- flow control device; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0041] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0042] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0043] An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1; An exploded view of the plurality of flow channel plates in the laminar flow element shown in FIG. 1;

[0044] 300 - delivery conduit; 301 - first conduit section; 302 - second conduit section;

[0045] 110 - first end plate; 111 - branch passage; 112 - confluence groove;

[0046] 120 - second end plate; 121 - main passage; 122 - branch passage;

[0047] 130 - flow channel plate;

[0048] 131 - second end flow channel plate; 132 - first end flow channel plate;

[0049] 133A - first flow channel group; 133B - second flow channel group; 1330 - flow channel; 1331 - first outer layer flow channel; 1332 - first inner layer flow channel; 1333 - first flow channel; 1334 - second flow channel; 1335 - solid structure;

[0050] 134 - branch passage;

[0051] 135 - flow channel area; 1351 - first edge; 1352 - second edge; 1353 - third flow channel area; 1354 - fourth flow channel area; 1355 - fifth flow channel area; 1356 - sixth flow channel area; 135A - flow channel group; 135B - flow channel group;

[0052] 136 - first flow channel plate; 137 - second flow channel plate; 138 - third flow channel plate. DETAILED DESCRIPTION

[0053] In the embodiments of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting" should be understood in a broad sense, for example, "connecting" can be detachably connecting, or can be non-detachably connecting; can be directly connecting, or can be indirectly connecting through an intermediate medium.

[0054] In the embodiments of the present application, it should be understood that the mentioned positional terms, for example, "upper", "lower", "inner", "outer" and the like, are only the directions of the reference drawings, therefore, the positional terms used are for better, clearer illustration and understanding of the embodiments of the present application, and are not indicative or implied that the indicated devices or elements must have a specific orientation, be constructed and operated in a specific orientation, therefore, cannot be understood as a limitation to the embodiments of the present application.

[0055] In the embodiments of this application, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," "third," and "fourth" may explicitly or implicitly include one or more of that feature.

[0056] In the embodiments of this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0057] In the embodiments of this application, "and / or" is merely a description of the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone.

[0058] This application provides a semiconductor device, which can be an etching machine, a chemical vapor deposition (CVD) machine, a physical vapor deposition (PVD) machine, an epitaxial (EPI) machine, etc.

[0059] Semiconductor equipment may include a working chamber and gas conduits connected to the working chamber. The gas conduits may be connected to a gas source to supply working gas into the working chamber. For example, if the semiconductor equipment is an etching machine, the working gas supplied through the gas conduit could be hydrogen fluoride, oxygen, argon, etc. As another example, if the semiconductor equipment is a chemical vapor deposition (CVD) machine, the working gas supplied through the gas conduit could be hydrogen, nitrogen, argon, etc.

[0060] In some embodiments, please refer to Figure 1 , Figure 1 This is a schematic diagram of a flow control device 10 provided in an embodiment of this application. The semiconductor device may further include the flow control device 10, which can be disposed on a gas pipeline to control the flow rate of gas within the gas pipeline. This ensures that the gas flow rate remains stable when pressure or temperature changes, thereby guaranteeing the stability of the gas entering the working chamber and preventing gas fluctuations from affecting the semiconductor device.

[0061] In some examples, the flow control device 10 can be a mass flow control device or a volume flow control device, and the present application does not make a specific limitation thereon.

[0062] In some embodiments, please refer to Figure 1 The flow control device 10 can include a laminar flow element 100 and a sensing assembly 200. The laminar flow element 100 is used for fluid flowing therethrough to adjust the flow rate of the fluid and form a laminar flow. The fluid can be a liquid, a gas, etc., for example, the fluid can be the working gas in the semiconductor equipment as described above. The laminar flow element 100 can include an inlet passage 101 and an outlet passage 102, both of which are used for connecting to a pipe for fluid flow.

[0063] For example, the pipe for fluid flow is a delivery pipe 300 for delivering fluid, for example, the delivery pipe can be the gas pipe of the semiconductor equipment as described above. The delivery pipe 300 can include a first pipe section 301 and a second pipe section 302, and the laminar flow element 100 can be connected between the first pipe section 301 and the second pipe section 302, and the inlet passage 101 of the laminar flow element 100 is in communication with the outlet of the first pipe section 301, and the outlet passage 102 of the laminar flow element 100 is in communication with the inlet of the second pipe section 302.

[0064] In this way, the fluid needs to flow through the laminar flow element 100 when flowing from the first pipe section 301 to the second pipe section 302, so that the laminar flow element 100 adjusts the flow rate of the fluid to achieve the purpose of controlling the flow rate.

[0065] Please refer to Figure 1 The sensing assembly 200 is used for measuring the flow rate of the fluid flowing through the laminar flow element 100. The inlet passage 101 and the outlet passage 102 of the laminar flow element 100 are both in communication with the sensing assembly 200. For example, the sensing assembly 200 can be connected to the first pipe section 301 to be in communication with the inlet passage 101 of the laminar flow element 100 through the first pipe section 301. The sensing assembly 200 can also be directly connected to the inlet passage 101 of the laminar flow element 100 to be in communication with the inlet passage 101 of the laminar flow element 100. The communication mode of the sensing assembly 200 and the outlet passage 102 of the laminar flow element 100 can refer to any of the above communication modes of the sensing assembly 200 and the inlet passage 101 of the laminar flow element 100, which will not be described in detail here.

[0066] The inlet channel 101 and the outlet channel 102 of the laminar flow element 100 are both communicated with the sensing assembly 200. During the fluid flowing through the laminar flow element 100, the fluid before entering the laminar flow element 100 and the fluid after flowing through the laminar flow element 100 can both enter the sensing assembly 200, so that the sensing assembly 200 detects the state parameters of the fluid before entering the laminar flow element 100 and the state parameters of the fluid after flowing through the laminar flow element 100, thereby facilitating the calculation of the flow change of the fluid through the state parameters of the fluid before entering the laminar flow element 100 and the state parameters of the fluid after flowing through the laminar flow element 100. The state parameters can be pressure, temperature, etc., which are not limited in the present application.

[0067] In some examples, the sensing assembly 200 can be connected with a controller. The controller can accept the state parameters detected by the sensing assembly 200 to calculate the flow change of the fluid through the state parameters. In this way, the flow change of the fluid can be calculated conveniently. The controller can be a component independent of the sensing assembly 200, or can be a control module integrated in the sensing assembly 200, which is not limited in the present application.

[0068] In some examples, the sensing assembly 200 can be a differential pressure sensor. The inlet of the differential pressure sensor is communicated with the inlet channel 101 of the laminar flow element 100, and the outlet of the differential pressure sensor is communicated with the outlet channel 102 of the laminar flow element 100, so as to calculate the flow change of the fluid through the differential pressure of the fluid at both ends of the laminar flow element 100. The sensing assembly 200 being the differential pressure sensor can improve the control accuracy and stability of the flow control device 10.

[0069] In other embodiments, please refer to Figure 2 , Figure 2 for Figure 1 a structural schematic diagram of the sensing assembly 200 in the flow control device 10. The sensing assembly 200 can include a first pressure gauge 201 and a second pressure gauge 202. The first pressure gauge 201 is communicated with the inlet channel 101 of the laminar flow element 100, and is used to detect the fluid pressure of the inlet channel 101 of the laminar flow element 100. The second pressure gauge 202 is communicated with the outlet channel 102 of the laminar flow element 100, and is used to detect the fluid pressure of the outlet channel 102 of the laminar flow element 100. In this way, the flow change of the fluid can be calculated through the changes of the fluid pressure of the inlet channel 101 and the outlet channel 102 of the laminar flow element 100. This kind of way has simple structure and is convenient for detecting the flow change of the fluid.

[0070] In some other examples, the sensing assembly 200 can also be a thermal sensor, the inlet of the thermal sensor is in communication with the inlet channel 101 of the laminar flow element 100, and the outlet of the thermal sensor is in communication with the outlet channel 102 of the laminar flow element 100. The heating element of the thermal sensor changes with the flow rate of the fluid, so that the inlet temperature and the outlet temperature of the thermal sensor will produce a temperature difference after the fluid passes through the laminar flow element 100 to adjust the flow rate, so that the flow rate change of the fluid can be calculated by the temperature difference. The sensing assembly 200 as a thermal sensor can also improve the control accuracy and stability of the flow control device 10.

[0071] In some embodiments, please refer to Figure 3 、 Figure 4 and Figure 5 , Figure 3 is a schematic view of a cross-sectional structure of a laminar flow element 100, Figure 4 is Figure 3 a schematic view of the structure of the flow channel sheet in the laminar flow element 100 shown in Figure 5 is Figure 3 a schematic view of the structure of the spacer plate in the laminar flow element 100 shown in. In the related art, the laminar flow element 100 includes a plurality of flow channel sheets 103 and a plurality of spacer plates 104. The plurality of flow channel sheets 103 and the plurality of spacer plates 104 are arranged in layers and alternately arranged. That is, one flow channel sheet 103 is arranged between any two adjacent spacer plates 104.

[0072] Please continue to refer to Figure 3 、 Figure 4 and Figure 5 , the flow channel sheet 103 is provided with a plurality of fluid channels 103A penetrating the flow channel sheet 103 in the thickness direction of the flow channel sheet 103, and the two adjacent spacer plates 104 clamp the flow channel sheet 103 to block the fluid channels 103A on the flow channel sheet 103 on both sides of the flow channel sheet 103 in the thickness direction of the flow channel sheet 103. The middle position of the flow channel sheet 103 is provided with a first channel 103B penetrating the flow channel sheet 103 in the thickness direction of the flow channel sheet 103, and the middle position of the spacer plate 104 is provided with a second channel 104A penetrating the spacer plate 104 in the thickness direction of the spacer plate 104. The first channel 103B and the second channel 104A are in communication to form a liquid inlet channel 105 of the laminar flow element 100, and the liquid inlet channel 105 is in communication with each fluid channel 103A of the flow channel sheet 103. In this way, the fluid entering the laminar flow element 100 enters the liquid inlet channel 105 and is distributed to each fluid channel 103A, and then flows out from the fluid channel 103A of each flow channel sheet 103 in the radial direction of the flow channel sheet 103. Among them, the flow direction of the fluid can refer to the direction indicated by the arrow in Figure 5 .

[0073] The inventor finds that the laminar flow element 100 has a large length in the thickness direction of the flow channel sheet 103 due to the need to arrange multiple partition plates 104, and thus the application convenience of the laminar flow element 100 is poor.

[0074] Based on this, in some embodiments, referring to Figure 6 , Figure 6 A structural schematic diagram of a laminar flow element 100 provided by the embodiments of the present application is shown in FIG. 1. As shown in FIG. 1, the laminar flow element 100 includes multiple flow channel sheets 130 arranged in a stack. Figure 6

[0075] In some embodiments, referring to Figure 7 , Figure 7 A structural schematic diagram of the laminar flow element 100 is shown in FIG. 2. As shown in FIG. 2, each flow channel sheet 130 includes a solid structure 1335 and one or more flow channel groups, each flow channel group including at least one flow channel 1330. The flow channel 1330 is used for fluid flow and performs flow splitting and flow rectification to regulate the flow of the fluid and form laminar flow. Figure 6 The solid structure 1335 can be a part of the flow channel sheet 130 other than the flow channel 1330. In some examples, the solid structure 1335 can have a central region, and the flow channel 1330 is arranged on the periphery of the central region. The central region can be provided with a through hole penetrating through the flow channel sheet 130 in the thickness direction of the flow channel sheet 130, and the through hole is spaced apart from the multiple flow channels 1330, i.e., the through hole is not in communication with the multiple flow channels 1330. The through hole can be a cylindrical through hole, or other shapes, for example, the through hole includes a cylindrical hole and multiple arc-shaped holes arranged around the cylindrical hole, and the arc-shaped holes are in communication with the cylindrical hole.

[0076] In any two adjacent flow channel sheets 130, the flow channel sheet 130 on the upper side includes multiple first flow channel groups 133A arranged in a circumferential direction, and the flow channel sheet 130 on the lower side includes multiple second flow channel groups 133B. Each first flow channel group 133A corresponds to at least one second flow channel group 133B, and each first flow channel group 133A and the corresponding at least one second flow channel group 133B form a corresponding group. That is, the multiple first flow channel groups 133A in the flow channel sheet 130 on the upper side can correspond to the multiple second flow channel groups 133B in the flow channel sheet 130 on the lower side one by one, or one first flow channel group 133A in the flow channel sheet 130 on the upper side can correspond to at least two second flow channel groups 133B in the flow channel sheet 130 on the lower side.

[0077]

[0078] ​​In each corresponding group, the projection of the first flow channel group 133A on the first plane perpendicular to the thickness direction along the thickness direction of the flow channel plate 130 partially overlaps with at least one projection of the corresponding at least one second flow channel group 133B on the first plane along the thickness direction of the flow channel plate 130, that is, the circumferential displacement. That is, when the plurality of first flow channel groups 133A in the upper flow channel plate 130 correspond to the plurality of second flow channel groups 133B in the lower flow channel plate 130 one by one, the projection of one first flow channel group 133A on the first plane along the thickness direction partially overlaps with the projection of the corresponding one second flow channel group 133B on the first plane along the thickness direction. When one first flow channel group 133A in the upper flow channel plate 130 corresponds to at least two second flow channel groups 133B in the lower flow channel plate 130, the projection of one first flow channel group 133A on the first plane along the thickness direction partially overlaps with the projection of the corresponding at least two second flow channel groups 133B on the first plane along the thickness direction. As shown in Figure 7 The plurality of flow channel plates 130 include a first flow channel plate 136, a second flow channel plate 137, and a third flow channel plate 138, and the second flow channel plate 137 is connected between the first flow channel plate 136 and the third flow channel plate 138. The second flow channel plate 137 is adjacent to the first flow channel plate 136 and adjacent to the third flow channel plate 138. The first flow channel group 133A of the first flow channel plate 136 is circumferentially displaced by a certain angle relative to the second flow channel group 133B of the second flow channel plate 137, and the first flow channel group 133A of the second flow channel plate 137 is also circumferentially displaced by a certain angle relative to the second flow channel group 133B of the third flow channel plate 138.

[0079] The at least one second flow channel group 133B is partially blocked by the solid structure 1335 around the first flow channel group 133A, so that part of the first flow channel group 133A and part of the corresponding at least one second flow channel group 133B are in communication to form at least one shunt channel 134. It should be understood that the parts of the shunt channel 134 on different flow channel plates 130 are arranged along the thickness of the flow channel plate 130 and are in communication, and the fluid can flow along the thickness direction of the flow channel plate 130 in the shunt channel 134. For the shunt channel 134, see the description of the shunt channel 134 below Figure 10 and Figure 11 .

[0080] In the above embodiments, first, see Figure 7The fluid can flow a certain distance in the channel 1330 of the first flow channel plate 136 and then enter the channel 1330 of the second flow channel plate 137. After flowing a certain distance in the channel 1330 of the second flow channel plate 137, it enters the channel 1330 of the third flow channel plate 138 and flows a certain distance in the channel 1330 of the third flow channel plate 138 before continuing to flow. In this way, the fluid can flow a certain distance in the channel 1330 of each flow channel plate 130, thereby increasing the flow path of the fluid, increasing the resistance of the diversion channel 134 to the fluid, improving the control effect of the laminar flow element 100 on the flow rate of the fluid, and forming laminar flow.

[0081] Secondly, since in each corresponding group, the projection of the first flow channel group 133A along the thickness direction of the flow channel plate 130 onto a first plane perpendicular to the thickness direction partially overlaps with at least one projection of the corresponding second flow channel group 133B along the thickness direction of the flow channel plate 130 onto at least one plane, and the at least one second flow channel group 133B is partially blocked by the solid structure surrounding the first flow channel group 133A, the solid structure 1335 surrounding the first flow channel group 133A effectively acts as a partition to some extent. Since there is no need to set partitions between adjacent flow channel plates 130 to separate them, the space occupied by the partitions of the flow channel plates 130 can be saved, thereby reducing the height dimension of the laminar flow element 100 in the thickness direction of the flow channel plate 130, thus reducing the volume of the laminar flow element 100 and improving its ease of use. For example, it facilitates the arrangement of the laminar flow element 100 in the flow control device 10.

[0082] at last, Figure 3-5 In the illustrated scheme, the fluid flows out only through the fluid channel 103A on one flow channel plate 103, and does not pass through the fluid channels 103A on multiple flow channel plates 103. Since the laminar flow effect is related to the length of the fluid channel 103A, the length of the fluid channel 103A needs to be set relatively long to ensure the laminar flow effect. Because the length of the fluid channel 103A is positively correlated with the diameter of the flow channel plate 103, therefore... Figure 3-5 In the illustrated scheme, the diameter of the flow channel plate 103 is set to be relatively large. In the above embodiment, the fluid flows out through the diversion channel 134 formed by connecting the flow channels 1330 on at least two flow channel plates 130. Therefore, even if the cross-sectional area of ​​the flow channel plate 130 in the direction perpendicular to the thickness is small, resulting in a shorter length of the flow channel 1330, considering that the fluid flows through more than one flow channel 1330, a good laminar flow effect can still be achieved after flowing through multiple flow channels 1330. Therefore, the above embodiment is beneficial to reducing the cross-sectional area of ​​the flow channel plate 130 in the direction perpendicular to the thickness, which is beneficial to reducing the volume of the laminar flow element 100 and improving the ease of use of the laminar flow element 100.

[0083] In some examples, in any two adjacent flow channel plates 130, a flow channel 1330 of the upper flow channel plate 130 can be connected to a flow channel 1330 of the lower flow channel plate 130. That is, the first flow channel group 133A and the second flow channel group 133B in any two adjacent flow channel plates 130 correspond one-to-one, and the flow channels 1330 in the first flow channel group 133A are connected one-to-one with the flow channels 1330 in the second flow channel group 133B. This makes it easy to form multiple flow distribution channels 134 from the flow channels 1330 of multiple flow channel plates 130.

[0084] In other examples, in any two adjacent flow channels 130, a flow channel 1330 of the upper flow channel 130 may communicate with multiple flow channels 1330 of the lower flow channel 130. For instance, in two adjacent flow channels 130, a flow channel 1330 of the upper flow channel 130 may communicate with multiple flow channels 1330 of the lower flow channel 130, such as two, three, etc. For example, multiple first flow channel groups 133A in the upper flow channel 130 may correspond one-to-one with multiple second flow channel groups 133B in the lower flow channel 130, and a flow channel 1330 of the first flow channel group 133A may communicate with multiple flow channels 1330 of the corresponding second flow channel group 133B. For example, a first flow channel group 133A in the upper flow channel plate 130 corresponds to at least two second flow channel groups 133B in the lower flow channel plate 130, and a flow channel 1330 in the first flow channel group 133A can be connected to at least one flow channel 1330 in each of the corresponding at least two second flow channel groups 133B. Such a plurality of flow channel plates 130 can also achieve fluid diversion, and along the direction from the second end plate 120 toward the first end plate 110, the fluid can be diverted layer by layer to gradually adjust the fluid flow rate and form laminar flow.

[0085] The accompanying drawings of this application are illustrated by way of example, in any two adjacent flow channel plates 130, one flow channel 1330 of one flow channel plate 130 is connected to one flow channel 1330 of the other flow channel plate 130.

[0086] In some embodiments, please refer to Figure 8 , Figure 8 for Figure 6 The diagram shows the structure of the flow channel plate 130 in the laminar flow element 100. The flow channel plate 130 has multiple flow channels 1330, including multiple sets of flow channels spaced apart, each set constituting a flow channel group. Specifically, in any two adjacent flow channel plates, the multiple sets of flow channels in the upper flow channel plate 130 constitute multiple first flow channel groups 133A, and the multiple sets of flow channels in the lower flow channel plate 130 constitute multiple second flow channel groups 133B.

[0087] like Figure 8The area where each group of flow channels is located is a flow channel area 135, and the plurality of flow channels 1330 in one flow channel area 135 is a group of flow channels. Each group of flow channels includes at least one flow channel 1330, that is, the number of flow channels 1330 in each group of flow channels can be one or more, and the present application is exemplarily illustrated by taking each group of flow channels 1330 as including a plurality of flow channels 1330. By arranging the plurality of flow channels 1330 of the flow channel plate 130 into groups, the plurality of flow channels 1330 can be distributed on the flow channel plate 130 in groups, so that the plurality of flow channels 1330 are more orderly distributed, thereby facilitating the arrangement of the flow channels 1330.

[0088] In some examples, please continue to refer to Figure 8 , the plurality of groups of flow channels in the flow channel plate 130 can be arranged at intervals along the circumferential direction of the flow channel plate 130, and the plurality of flow channels 1330 in each group of flow channels can be arranged at intervals along the radial direction of the flow channel plate 130. In this way, the flow channels 1330 on the flow channel plate 130 can be more regularly distributed, thereby facilitating the arrangement of the flow channels 1330 and the arrangement of different flow distribution channels 134.

[0089] In some examples, the shapes of the plurality of flow channel plates 130 can be the same. In this way, the processing of the flow channel plate 130 can be facilitated.

[0090] For example, the projection of the outer contour of each flow channel plate 130 on a first plane perpendicular to the thickness direction can be circular, that is, the flow channel plate 130 is a cylindrical structure. In this way, the shape of the flow channel plate 130 can be more regular, and the laminar flow element 100 formed by the plurality of flow channel plates 130 is a cylinder, which is also more regular. Moreover, compared with other shapes, the outer contour of the flow channel plate 130 is circular, which can make the flow channel plate 130 occupy less space, thereby making the laminar flow element 100 occupy less space and facilitating the processing of the flow channel plate 130. Among them, the projection of each flow channel 1330 on the first plane can be a circular segment, that is, each flow channel 1330 extends along the circumferential direction of the flow channel plate 130. The length of the flow channel 1330 can be as long as possible while ensuring that the laminar flow element 100 occupies less space, so as to better distribute and rectify the fluid.

[0091] For another example, each flow channel plate 130 can also be a square structure, etc. Among them, when the flow channel plate 130 is a square structure, the circumferential direction of the flow channel plate 130 is the direction around the two surfaces in the length direction and the two surfaces in the width direction of the flow channel plate 130, and the radial direction of the flow channel plate 130 is the direction perpendicular to the thickness direction of the flow channel plate 130 and intersecting the central axis of the flow channel plate 130.

[0092] In some examples, each flow channel group (i.e., each group of flow channels 1330) includes a first outer layer flow channel 1331 and a first inner layer flow channel 1332, the first inner layer flow channel 1332 is arranged inside the first outer layer flow channel 1331 and has a length smaller than that of the first outer layer flow channel 1331 along the circumferential direction of the flow channel plate 130. For example, please continue to refer to Figure 8 The area where each group of flow channels is located is a flow channel area 135, and the flow channel area 135 has a structure of a sector area, two edges of the sector area are a first edge 1351 and a second edge 1352 along the circumferential direction of the flow channel plate 130, the first outer layer flow channel 1331 extends from the first edge 1351 to the second edge 1352 along the circumferential direction of the flow channel plate 130, and the second outer layer flow channel 1330 also extends from the first edge 1351 to the second edge 1352 along the circumferential direction of the flow channel plate 130. In this way, the length of the first outer layer flow channel 1331 can be greater than that of the first inner layer flow channel 1332, and at this time, each flow channel 1330 has a concentric arc structure.

[0093] In addition, the flow channel 1330 can also extend from the first edge 1351 to the second edge 1352 along a straight line direction parallel to the flow channel plate 130, and the first outer layer flow channel 1331 and the first inner layer flow channel 1332 are parallel, so that the length of the first outer layer flow channel 1331 can be greater than that of the first inner layer flow channel 1332.

[0094] By making the length of the first inner layer flow channel 1332 in the first direction smaller than that of the first outer layer flow channel 1331 in the first direction, the area between the two adjacent groups of flow channels can be relatively spacious, avoiding the deviation of the flow channel plate 130 in the circumferential direction after the different flow channel plates 130 are stacked, so as to prevent the different flow distribution channels 134 from being connected, and to ensure the flow distribution effect of the flow layer element 100.

[0095] In other examples, the plurality of groups of flow channels in the flow channel plate 130 can also be arranged in a first direction perpendicular to the thickness direction of the flow channel plate 130, for example, the first direction is the length direction of the flow channel plate. The plurality of flow channels in each group of flow channels can be arranged in a second direction perpendicular to the thickness direction of the flow channel plate and perpendicular to the first direction, for example, the second direction is the width direction of the flow channel plate. In this way, the flow channels 1330 on the flow channel plate 130 can be more regular, so that the flow channels 1330 are more convenient to set, and the different flow distribution channels 134 are more convenient to set.

[0096] In some embodiments, please refer to Figure 9 , Figure 9 To Figure 8A top view structural schematic diagram of the flow channel plate 130 is shown. For any one flow channel plate 130, two adjacent groups of flow channels in the plurality of groups of flow channels are flow channel group 135A and flow channel group 135B, and one flow channel in the flow channel group 135A corresponds to one flow channel in the flow channel group 135B. For example, one flow channel 1330 in the flow channel group 135A is a first flow channel 1333, and one flow channel 1330 in the flow channel group 135B is a second flow channel 1334; along the circumferential direction of the flow channel plate 130, the first flow channel 1333 corresponds to the second flow channel 1334. For example, the distance between the first flow channel 1333 and the center axis of the flow channel plate 130 is equal to the distance between the second flow channel 1334 and the center axis of the flow channel plate 130. For example, any flow channel 1330 in the flow channel group 135A has a corresponding flow channel 1330 in the flow channel group 135B.

[0097] The length of one flow channel 1330 in the flow channel group 135A along the circumferential direction of the flow channel plate 130 is equal to the length of one flow channel 1330 in the flow channel group 135B corresponding to the flow channel 1330 in the flow channel group 135A. Thus, when the flow channels 1330 are processed on the flow channel plate 130, the same set of processing molds can be used to process each group of flow channels on the flow channel plate 130, without the need for frequent replacement of processing molds, thereby improving processing efficiency.

[0098] In some embodiments, each flow channel plate 130 can be rotationally symmetrical. That is, one group of flow channels in each flow channel plate 130 can coincide with another group of flow channels after rotating around the axis of the flow channel plate by a certain angle. In this way, the flow channels 1330 on the flow channel plate 130 can be more regularly distributed, thereby facilitating the arrangement of the flow channels 1330, and the flow channels 1330 of adjacent flow channel plates 130 after being connected form a plurality of shunt passages 134 which are more regularly distributed, thereby facilitating the formation of different shunt passages 134 and facilitating the control of the flow of fluid.

[0099] As some implementations, each flow channel plate 130 is rotationally symmetrical, and the plurality of flow channel plates are identical in shape. In this way, when the plurality of flow channel plates 130 are assembled, only the plurality of groups of flow channels of two adjacent flow channel plates 130 need to be aligned, and then one of the flow channel plates 130 is moved relative to the other flow channel plate 130 along the circumferential direction of the flow channel plate 130, for example, rotated by a certain angle along the circumferential direction of the flow channel plate 130 (for example, the X1 direction shown in the figure), so that the part between the two adjacent groups of flow channels in one flow channel plate 130 blocks part of the flow channels 1330 in one group of flow channels in the other flow channel plate 130, so that part of one group of flow channels in one flow channel plate 130 is opposite to part of the corresponding group of flow channels in the other flow channel plate 130 to form at least one shunt passage 134. In this way, the assembly of two adjacent flow channel plates 130 is facilitated, and the formation of the shunt passage 134 is facilitated. Figure 7 ​

[0100] In some embodiments, the length of the diversion channel 134 can be adjusted by controlling the rotation angle of two adjacent flow channel plates along the circumference of the flow channel plate 130, thereby meeting different flow requirements. For example, a smaller rotation angle results in a shorter length of the diversion channel 134.

[0101] Furthermore, through the aforementioned method, the flow-diverting channel 134 allows the fluid to flow a certain distance within the flow channel 1330 of one flow channel plate 130 before entering the flow channel 1330 of the next flow channel plate 130. The fluid then flows a certain distance within the flow channel 1330 of the next flow channel plate 130 before continuing its flow. This increases the length of the flow-diverting channel 134, thereby increasing its resistance to the fluid and better controlling the flow rate. Moreover, it eliminates the need for numerous flow channel plates 130 to increase the length of the flow-diverting channel 134, thus reducing the volume of the laminar flow element 100.

[0102] Furthermore, the length of the flow divider channel 134 can be adjusted by adjusting the circumferential angle of one flow divider plate 130 relative to the other in the flow divider plate 130, thereby adjusting the overlap area between a set of flow channels in one flow divider plate 130 and a corresponding set of flow channels in the other flow divider plate 130, and thus adjusting the flow rate of the fluid flowing through the laminar flow element 100. The length of the connecting channel 1330 can also be adjusted by increasing or decreasing the number of flow dividers 130, thereby adjusting the flow rate of the fluid flowing through the laminar flow element 100.

[0103] Specifically, such as Figure 7 As shown, during assembly, multiple flow channel plates 130 can be assembled by stacking a second flow channel plate 137 on top of a first flow channel plate 136, ensuring that the multiple sets of flow channels in the first flow channel plate 136 correspond and align with the multiple sets of flow channels in the second flow channel plate 137, and then rotating the second flow channel plate 137 clockwise by a preset angle. Next, a third flow channel plate 138 is stacked on the side of the second flow channel plate 137 facing away from the first flow channel plate 136, ensuring that the multiple sets of flow channels in the third flow channel plate 138 correspond and align with the multiple sets of flow channels in the second flow channel plate 137, and then rotating the third flow channel plate 138 clockwise by a preset angle. This process is repeated to assemble the multiple flow channel plates 130.

[0104] The clockwise direction refers to the direction viewed from the first flow channel plate 136 towards the second flow channel plate 137. The preset angle can be 5°, 8°, 10°, 12°, 15°, etc. This application does not make specific limitations on this, as long as it can satisfy the requirement that a portion of the flow channel 1330 of the first flow channel group 133A overlaps with a portion of the flow channel 1330 of the second flow channel group 133B along the thickness direction of the flow channel plate 130.

[0105] In some other embodiments, the plurality of flow channel plates 130 can also form the flow distribution channels 134 in other staggered manners. For example, as viewed from the first flow channel plate 136 toward the second flow channel plate 137, the set of flow channels of the second flow channel plate 137 is staggered at an angle in a clockwise direction relative to the corresponding set of flow channels of the first flow channel plate 136, and the set of flow channels of the third flow channel plate 138 is staggered at an angle in a counterclockwise direction relative to the corresponding set of flow channels of the second flow channel plate 137. In this way, the plurality of flow distribution channels 134 can also be formed to distribute the fluid.

[0106] For example, for any two adjacent sets of flow channels, the spacing between one flow channel 1330 of the flow channel set 135A and the corresponding flow channel 1330 of the flow channel set 135B along the circumferential direction of the flow channel plate 130 is a first spacing (e.g., the spacing L shown in the middle), and any two first spacings are equal. For example, any four flow channel regions 135 in the flow channel plate 130 are the third flow channel region 1353, the fourth flow channel region 1354, the fifth flow channel region 1355, and the sixth flow channel region 1356, the third flow channel region 1353 and the fourth flow channel region 1354 are adjacent, the fifth flow channel region 1355 and the sixth flow channel region 1356 are adjacent, and the spacing between the first flow channel 1333 of the set of flow channels in the third flow channel region 1353 (which can be the flow channel set 135A) and the second flow channel 1334 of the set of flow channels in the fourth flow channel region 1354 (which can be the flow channel set 135B), and the spacing between the first flow channel 1333 of the set of flow channels in the fifth flow channel region 1355 (which can be the flow channel set 135A) and the second flow channel 1334 of the set of flow channels in the sixth flow channel region 1356 (which can be the flow channel set 135B) are both the first spacing, and the two first spacings are equal. It should be understood that, taking the circular flow channel plate 130 as an example, “any two first spacings are equal” means that the spacings between several flow channels 1330 that are equal in distance from the center of the flow channel plate 130 are the first spacing, rather than the spacings between several flow channels 1330 that are not equal in distance from the center of the flow channel plate 130 are the first spacing. Figure 9 In this way, the plurality of sets of flow channels in each flow channel plate 130 can be evenly distributed in the radial direction of the flow channel plate 130, and the regions between any two adjacent sets of flow channels can also be evenly distributed in the circumferential direction of the flow channel plate 130, so that the flow channels 1330 on the flow channel plate 130 can be more conveniently machined.

[0107] In some examples, the first spacing can also be equal to the length of the first flow channel 1333 in the flow channel set 135A in the circumferential direction of the flow channel plate 130. That is, the plurality of sets of flow channels and the regions between any two adjacent sets of flow channels are alternately and evenly distributed in the circumferential direction of the flow channel plate 130. In this way, each set of flow channels can be more evenly distributed to further facilitate machining of the flow channels 1330.

[0108] In some examples, the first spacing can also be equal to the length of the first flow channel 1333 in the flow channel set 135A in the circumferential direction of the flow channel plate 130. That is, the plurality of sets of flow channels and the regions between any two adjacent sets of flow channels are alternately and evenly distributed in the circumferential direction of the flow channel plate 130. In this way, each set of flow channels can be more evenly distributed to further facilitate machining of the flow channels 1330.

[0109] In some other embodiments, the length of the first flow channels 1333 and the length of the second flow channels 1334 can also be unequal along the circumferential direction of the flow channel plate, so that a plurality of shunt passages 134 can also be formed to shunt the fluid. The different first intervals can also be unequal, so that the adjacent two groups of flow channels can be spaced apart to facilitate the formation of the shunt passage 134.

[0110] Please continue to refer to Figure 10 and Figure 11 , Figure 10 for Figure 6 the structure diagram of the laminated arrangement of the adjacent two flow channel plates 130 in the laminar flow element 100 shown, Figure 11 for Figure 10 the exploded structure diagram of the adjacent two flow channel plates 130. In any adjacent two flow channel plates 130, a group of flow channels in one of the flow channel plates 130 is arranged in a staggered manner along the circumferential direction of the flow channel plate with the corresponding group of flow channels in the other flow channel plate 130, and a part of the group of flow channels in one of the flow channel plates 130 is opposite to a part of the corresponding group of flow channels in the other flow channel plate 130 to communicate to form at least one shunt passage 134.

[0111] It should be noted that the part of the group of flow channels in one of the flow channel plates 130 opposite to the part of the corresponding group of flow channels in the other flow channel plate 130 refers to that along the thickness direction of the flow channel plate 130, the part of the projection of the group of flow channels in one of the flow channel plates 130 on the first plane coincides with the part of the projection of the corresponding group of flow channels in the other flow channel plate 130 on the first plane, and the first plane is perpendicular to the thickness direction of the flow channel plate 130.

[0112] For example, in any adjacent two flow channel plates 130, a group of flow channels of the upper flow channel plate 130 is a first flow channel group 133A, that is, the first flow channel group 133A is one of a plurality of first flow channel groups, and a group of flow channels of the lower flow channel plate 130 is a second flow channel group 133B, that is, the second flow channel group 133B is one of a plurality of second flow channel groups; the first flow channel group 133A corresponds to the second flow channel group 133B.

[0113] The first flow channel group 133A and the second flow channel group 133B are arranged in a staggered manner along the circumferential direction of the flow channel plate, and along the thickness direction of the flow channel plate 130, a part of the flow channel 1330 of the first flow channel group 133A overlaps a part of the flow channel 1330 of the second flow channel group 133B, so that the part of the flow channel 1330 of the first flow channel group 133A opposite to the part of the flow channel 1330 of the second flow channel group 133B can be realized, thereby realizing the communication of the flow channel 1330 of the first flow channel group 133A and the flow channel 1330 of the second flow channel group 133B, so that the first flow channel group 133A and the second flow channel group 133B form at least one shunt passage.

[0114] In some examples, please refer to Figure 8 The flow channel 1330 penetrates the flow channel plate 130 along the thickness direction of the flow channel plate 130. In this way, the flow channels 1330 of two adjacent flow channel plates 130 are connected.

[0115] In some examples, please refer to Figure 10 and Figure 11 In any two adjacent flow channel plates 130, the flow channels 1330 of a group of flow channels in one flow channel plate 130 correspond to the flow channels 1330 of a corresponding group of flow channels in the other flow channel plate 130 one by one and are arranged in a circumferential direction of the flow channel plate 130. The part of each flow channel 1330 of a group of flow channels in one flow channel plate 130 is opposite to the part of the corresponding flow channel 1330 of a corresponding group of flow channels in the other flow channel plate 130 to form a shunt channel 134.

[0116] It should be noted that the part of each flow channel 1330 of a group of flow channels in one flow channel plate 130 is opposite to the part of the corresponding flow channel 1330 of a corresponding group of flow channels in the other flow channel plate 130 refers to that, along the thickness direction of the flow channel plate 130, the part of the projection of each flow channel 1330 of a group of flow channels in one flow channel plate 130 on a first plane coincides with the part of the projection of the corresponding flow channel 1330 of a corresponding group of flow channels in the other flow channel plate 130 on the first plane.

[0117] For example, the first flow channel group 133A and the second flow channel group 133B are arranged in a circumferential direction of the flow channel plate 130, the flow channels 1330 in the first flow channel group 133A correspond to the flow channels 1330 in the second flow channel group 133B one by one, and along the thickness direction of the flow channel plate 130, one flow channel 1330 of the first flow channel group 133A overlaps with one flow channel 1330 of the second flow channel group 133B to form one shunt channel 134. In this way, a plurality of shunt channels 134 can be formed, and the length of each shunt channel 134 can also be guaranteed, so that the shunt effect on the fluid can be guaranteed.

[0118] In some embodiments, please refer to Figure 7 Corresponding groups of flow channels of a plurality of flow channel plates 130 are arranged in a circumferential direction of the flow channel plate 130. For example, the flow channel plate 130 is in a cylindrical structure, and the plurality of flow channel plates 130 includes a first flow channel plate 136, a second flow channel plate 137, and a third flow channel plate 138, and the second flow channel plate 137 is connected between the first flow channel plate 136 and the third flow channel plate 138. The second flow channel plate 137 is adjacent to the first flow channel plate 136 and adjacent to the third flow channel plate 138. As viewed from the first flow channel plate 136 toward the second flow channel plate 137, a group of flow channels of the second flow channel plate 137 is arranged in a clockwise direction (for example, as viewed from the first flow channel plate 136 toward the second flow channel plate 137, the group of flow channels of the second flow channel plate 137 is arranged in a clockwise direction, and the group of flow channels of the third flow channel plate 138 is arranged in a counterclockwise direction) relative to a corresponding group of flow channels of the first flow channel plate 136. Figure 7The third flow channel plate 138 is misaligned by an angle in the direction X1) shown in the figure, and a group of flow channels of the third flow channel plate 138 is also misaligned by an angle in the clockwise direction relative to the corresponding group of flow channels of the second flow channel plate 137.

[0119] In this way, the fluid flows in the flow channels 1330 of the first flow channel plate 136 for a certain distance, then enters the flow channels 1330 of the second flow channel plate 137, and then flows in the flow channels 1330 of the second flow channel plate 137 for a certain distance, and then enters the flow channels 1330 of the third flow channel plate 138, and then flows in the flow channels 1330 of the third flow channel plate 138 for a certain distance, and then continues to flow. In this way, the fluid can flow for a certain distance in the flow channels 1330 of each flow channel plate 130, so that the flow path of the fluid can be increased, and the resistance of the flow splitting channel 134 to the fluid can be further increased, and the control effect of the laminar flow element 100 on the flow of the fluid can be improved.

[0120] In other embodiments, the flow channels 1330 can also not penetrate the flow channel plate 130 in the thickness direction of the flow channel plate 130. In this case, the flow channels 1330 of two adjacent flow channel plates 130 can be connected by a first communication channel provided on the flow channel plate 130, or can be connected by a first communication pipe or the like. In some examples, the first communication channel can be a through hole provided on the flow channel plate 130, which penetrates the flow channel plate 130 in the thickness direction of the flow channel plate 130. One end of the through hole on the upper flow channel plate 130 of the two adjacent flow channel plates 130 is in communication with the flow channel 1330 on the upper flow channel plate 130, and the other end of the through hole on the upper flow channel plate 130 is in communication with the flow channel 1330 on the lower flow channel plate 130.

[0121] In some examples, the first communication pipe can be a plastic pipe, a metal pipe or the like provided at the edge position of the two adjacent flow channel plates 130. One end of the first communication pipe extends into the upper flow channel plate 130 and is in communication with the flow channel 1330 of the upper flow channel plate 130, and the other end of the first communication pipe extends into the lower flow channel plate 130 and is in communication with the flow channel 1330 of the lower flow channel plate 130.

[0122] In some examples, the adjacent flow channel plates 130 can be connected by welding, bonding or the like. In some implementations, the adjacent flow channel plates are connected by diffusion welding. Diffusion welding has the advantages of high strength and can achieve defect-free connection.

[0123] In some embodiments, the laminar flow element 100 may include at least one of a second end plate 120 and a first end plate 110, and a plurality of flow channel plates 130. The plurality of flow channel plates 130 are stacked for diverting fluid to regulate the fluid flow rate. The plurality of flow channel plates 130 are connected between the second end plate 120 and the first end plate 110. For example, the two outermost flow channel plates 130 are a second end flow channel plate 131 and a first end flow channel plate 132, respectively. The second end plate 120 may be connected to the side of the second end flow channel plate 131 opposite to the first end flow channel plate 132; for example, the second end plate 120 and the second end flow channel plate 131 are stacked. The first end plate 110 may be connected to the side of the first end flow channel plate 132 opposite to the second end flow channel plate 131; for example, the first end plate 110 and the first end flow channel plate 132 are stacked. The second end plate 120 and the first end plate 110 can support and fix the multiple flow channel plates 130 to improve the structural stability of the laminar flow element 100.

[0124] In some embodiments, the second end plate 120 is provided with an inlet channel 101 and the first end plate 110 is provided with an outlet channel 102. Fluid can enter multiple flow channel plates 130 successively through the inlet channel 101 of the second end plate 120. After being diverted in the flow channel plate 130 to regulate the flow rate, it flows out from the outlet channel 102 of the first end plate 110. This facilitates the entry and exit of fluid into and out of multiple flow channel plates 130.

[0125] In some embodiments, please refer to Figure 12 and Figure 13 , Figure 12 for Figure 6 The schematic diagram of the structure of the second end plate 120 in the laminar flow element 100 is shown. Figure 13 for Figure 12 The diagram shows a top view of the second end plate 120. The inlet channel 101 includes a main channel 121 and multiple branch channels 122. The main channel 121 is located radially inside the second end plate 120, for example, in the central region of the second end plate 120. The multiple branch channels 122 are distributed circumferentially along the main channel 121. The main channel 121 is used to communicate with the first pipe section 301 so that the fluid in the first pipe section 301 enters the laminar flow element 100. The multiple branch channels 122 are all connected to the main channel 121, so that the fluid entering the main channel 121 can be diverted to the respective branch channels 122 for initial diversion of the fluid entering the main channel 121.

[0126] Please continue reading. Figure 6The second end flow channel plate 131 is provided with a plurality of flow channels 1330, and each flow channel 1330 is in communication with one branch flow channel 122. In other words, one branch flow channel 122 is in communication with one group of flow channels in the second end flow channel plate 131. In this way, the fluid in each branch flow channel 122 can enter one group of flow channels in the second end flow channel plate 131, so as to be transported into the distribution flow channel 134. In this way, the cooperation of the main flow channel 121 and the plurality of branch flow channels 122 can distribute the fluid into each distribution flow channel 134, so as to make the fluid flow more evenly in each distribution flow channel 134, thereby improving the distribution effect of the laminar flow element 100 on the fluid.

[0127] In some examples, the branch flow channel 122 can penetrate the second end plate 120 along the thickness direction of the second end plate 120, so as to facilitate the communication between the branch flow channel 122 and the flow channel 1330 of the second end flow channel plate 131. In other examples, the branch flow channel 122 can also not penetrate the second end plate 120 along the thickness direction of the second end plate 120, and in this case, the branch flow channel 122 can be in communication with the flow channel 1330 of the second end flow channel plate 131 through a second connecting channel provided on the second end plate 120 or through a second connecting pipe. The structure and arrangement of the second connecting channel can refer to the first connecting channel described above, and the structure and arrangement of the second connecting pipe can refer to the first connecting pipe described above, which are not limited in the present application.

[0128] In some examples, please continue to refer to Figure 12 and Figure 13 The plurality of groups of flow channels are arranged at intervals along the circumference of the flow channel plate 130, the plurality of branch flow channels 122 are arranged at intervals along the circumference of the main flow channel 121, and the branch flow channels 122 extend along the radial direction of the main flow channel 121. In this way, the arrangement of the main flow channel 121 and the plurality of branch flow channels 122 can be more reasonable, so that the cooperation of the main flow channel 121 and the plurality of branch flow channels 122 can more evenly distribute the fluid into each distribution flow channel 134. The flow channel plate 130 can be a cylindrical structure.

[0129] In other examples, the main flow channel 121 can also be an annular channel extending along the circumference of the flow channel plate 130, and the main flow channel 121 is arranged at the edge position of the flow channel plate 130. The branch flow channel 122 is arranged on the inner side of the main flow channel 121 and extends along the radial direction of the flow channel plate 130. In this way, the distribution of the fluid can also be realized.

[0130] In some embodiments, the length of each branch channel 122 along the circumference of the second end plate 120 is less than the length of the corresponding flow channel in the second end flow channel plate 131. In this way, when the fluid enters the corresponding flow channel 1330 in the second end flow channel plate 131 from the branch channel 122, the fluid is located in a partial area of the corresponding flow channel 1330 in the second end flow channel plate 131, and then flows in the corresponding flow channel 1330 in the second end flow channel plate 131 for a distance before entering the flow channel 1330 in the lower flow channel plate 130 under the second end flow channel plate 131. In this way, the length of the flow path of the fluid can be further increased to improve the flow splitting effect of the laminar flow element 100.

[0131] In other embodiments, the second end plate 120 can further be provided with a first through hole extending through the second end plate 120 along the thickness direction of the second end plate 120, so that the first through hole forms the inlet channel 101, and the first through hole is in communication with the plurality of flow channels 1330 of the second end flow channel plate 131. In this way, the fluid entering the laminar flow element 100 can be distributed to each branch channel 134.

[0132] In some embodiments, please refer to Figure 14 and Figure 15 , Figure 14 for the structural schematic diagram of the first end plate 110 of the laminar flow element 100, Figure 6 for the top view structural schematic diagram of the first end plate 110. The outlet channel 102 can include a plurality of branch channels 111, and the plurality of branch channels 111 can be in communication with the second pipe section 302, so that the fluid flowing out of the laminar flow element 100 enters the second pipe section 302. Figure 15 Figure 14 Please continue to refer to , a branch channel 111 is in communication with a group of flow channels in the first end flow channel plate 132, that is, the plurality of branch channels 111 are in one-to-one correspondence and communication with the plurality of flow channel groups in the first end flow channel plate 132. In this way, the fluid flowing out of the different branch channels 134 can enter different branch channels 111, and then flow out of the laminar flow element 100, so that the fluid can flow out more smoothly.

[0133] Figure 6 The branch channel 111 extends along the radial direction of the first end plate 110 to the outer surface of the first end plate 110. That is, the fluid flowing out of the laminar flow element 100 flows out along the radial direction of the first end plate 110 at the end of the laminar flow element 100.

[0134]

[0135] Figure 3-5 ​​In the laminar flow element shown, the fluid needs to flow out from the outer edge of each fluid passage 103A in the radial direction of the flow channel sheet 103, and each fluid flow channel on one flow channel sheet 103 corresponds to one fluid outlet, resulting in a relatively complex structure of the laminar flow element 100 and an inability to adjust the outflow direction. In the above embodiment, the fluid flows out through the branch passages 111 on the first end plate 110, and the outflow direction can be adjusted by adjusting the positions of the branch passages 111 on the second end plate 120, facilitating flexible design of the outlet orientation of the laminar flow element.

[0136] In some embodiments, referring to Figure 14 and Figure 15 , the outlet passage 102 can further include a flow collection groove 112. The flow collection groove 112 is recessed from the side surface of the first end plate 110 facing the first end flow channel plate 132, and is located on the radial inner side of the first end plate 110, for example, the flow collection groove 112 is located in the central region of the first end plate 110. The plurality of branch passages 111 are in communication with the flow collection groove 112. By providing the flow collection groove 112, the fluid in the plurality of branch passages 111 can be collected and buffered in the flow collection groove 112, and when the flow rates of the fluids in the plurality of branch passages 111 differ greatly, the flow collection groove 112 can redistribute the fluids to make the fluids flow more uniformly in the plurality of branch passages 111.

[0137] In some embodiments, referring to Figure 14 and Figure 15 , the plurality of groups of flow channels are arranged along the circumference of the flow channel plate 130, and the plurality of branch passages 111 are arranged along the circumference of the flow collection groove 112. In this way, the arrangement of the plurality of branch passages 111 and the flow collection groove 112 can be more reasonable, facilitating the collection and buffering of the fluid in the flow collection groove 112 and the distribution of the fluid from the flow collection groove 112 to the plurality of branch passages 111. The flow channel plate 130 can have a cylindrical structure.

[0138] In some embodiments, along the circumference of the first end plate 110, the length of each branch passage 111 is less than the length of the corresponding flow channel 1330 in the first end flow channel plate 132. In this way, after the fluid enters the flow channel 1330 of the first end flow channel plate 132, it flows a certain distance in the first end flow channel plate 132 before entering the branch passage 111, thereby further increasing the flow path length of the fluid and improving the flow distribution effect of the laminar flow element 100.

[0139] In some other embodiments, the first end plate 110 can also be provided with a second through hole penetrating the first end plate 110 along the thickness direction of the first end plate 110, so that the second through hole forms the outlet channel 102, and the second through hole is in communication with all the flow channels 1330 in the first end flow channel plate 132, so that the fluid in the laminar flow element 100 can also be discharged, and the fluid flows out along the thickness direction of the flow channel plate 130.

[0140] In some other embodiments, the laminar flow element 100 can also only include a plurality of flow channel plates 130, and the flow channels 1330 of the second end flow channel plate 131 are in communication with the first pipe section 301, and the flow channels 1330 of the first end flow channel plate 132 are in communication with the second pipe section 302, so that the fluid can be divided in the plurality of flow channel plates 130 to adjust the flow rate of the fluid.

[0141] In some other embodiments, the laminar flow element 100 can also include the second end plate 120 and the plurality of flow channel plates 130. Or the laminar flow element 100 includes the plurality of flow channel plates 130 and the first end plate 110. In this way, the fluid can also be divided in the laminar flow element 100 to adjust the flow rate of the fluid.

[0142] In some embodiments, please refer to Figure 16 , Figure 16 The fluid resistance simulation curve of the laminar flow element 100 in the related art, the fluid resistance actual measurement curve of the laminar flow element 100 in the related art, and the fluid resistance simulation curve of the laminar flow element 100 of the present application are shown in the following figure. Figure 16 The abscissa of the figure is the flow rate, which is the volume of gas flowing through a certain cross section per minute under standard conditions, measured in cubic centimeters (SCCM). The standard conditions are usually 0°C and 1 atmosphere, i.e. STP standard conditions. The fluid inlet and outlet conditions of the laminar flow element 100 in the related art and the fluid inlet and outlet conditions of the laminar flow element 100 of the present application are the same, and the number of flow channel pieces 103 in the laminar flow element 100 in the related art and the number of flow channel plates 130 in the laminar flow element 100 of the present application are the same. The laminar flow element 100 of the present application is in a cylindrical structure and includes the second end plate 120, the plurality of flow channel plates 130, and the first end plate 110.

[0143] From Figure 16It can be seen that when the flow rate is small, the fluid resistance of the laminar flow element 100 of the present application is smaller than that of the laminar flow element 100 in the related art, but the difference is not large. And with the increase of the flow rate, the fluid resistance of the laminar flow element 100 of the present application gradually approaches the fluid resistance of the laminar flow element 100 in the related art. Therefore, the laminar flow element 100 of the present application has little effect on the resistance of the fluid, but can reduce the volume of the laminar flow element 100, facilitating the arrangement of the laminar flow element 100 in the flow control device 10.

[0144] In addition, since the thickness of the spacer plate in the related art is greater than the thickness of the flow channel sheet, after the laminar flow element 100 cancels the spacer plate, the thickness of the flow channel plate 130 can be increased on the basis of the flow channel sheet 103 in the related art. For example, the thickness of the flow channel sheet 103 in the related art is 0.025 mm, and the thickness of the flow channel plate 130 of the present application can be increased to 0.05 mm, so that the structural strength of the flow channel plate 130 can be increased, and the flow adjustment requirements of the flow channel plate 130 to the fluid can be ensured.

[0145] In the description of the present specification, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0146] The above preferred embodiments have further described the purposes, technical solutions and advantages of the present application. It should be understood that the above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A laminar flow element, characterized by The layer flow element comprises a plurality of flow channel plates arranged in a stack, each of the flow channel plates comprises a solid structure and one or more flow channel groups, each of the flow channel groups comprises at least one flow channel; In any two adjacent flow channel plates, the upper flow channel plate comprises a plurality of first flow channel groups arranged in a circumferential direction, the lower flow channel plate comprises a plurality of second flow channel groups, each of the first flow channel groups corresponds to at least one second flow channel group, each of the first flow channel group and the corresponding at least one second flow channel group forms a corresponding group; in each of the corresponding groups, the projection of the first flow channel group on a first plane perpendicular to the thickness direction of the flow channel plate along the thickness direction of the flow channel plate partially overlaps with at least one projection of the corresponding at least one second flow channel group on the first plane; the at least one second flow channel group is partially blocked by the solid structure around the first flow channel group, so that part of the first flow channel group and part of the corresponding at least one second flow channel group are connected to form at least one shunt channel.

2. The laminar flow element of claim 1, wherein, Each of the flow channel plates is rotationally symmetrical.

3. The laminar flow element according to claim 1 or 2, characterized in that The plurality of flow channel plates are identical in shape.

4. A laminar flow element according to any one of claims 1-3, characterised in that The projection of the outer contour of each of the flow channel plates on the first plane is circular, and the projection of each of the flow channels on the first plane is a circular segment.

5. A laminar flow element according to any one of claims 1-4, characterised in that Each of the flow channel groups comprises a first outer layer flow channel and a first inner layer flow channel, the first inner layer flow channel is arranged on the inner side of the first outer layer flow channel, and the length of the first inner layer flow channel is smaller than the length of the first outer layer flow channel along the circumferential direction of the flow channel plate.

6. The laminar flow element according to any one of claims 1-5, characterized in that The two outermost flow channel plates in the flow channel plates are respectively a first end flow channel plate and a second end flow channel plate. The layer flow element further comprises a first end plate connected to the side of the first end flow channel plate facing away from the second end flow channel plate, the first end plate is provided with an outlet passage communicating with the flow channels of the first end flow channel plate, the outlet passage comprises a plurality of branch passages, the plurality of branch passages correspond to and communicate with the plurality of flow channel groups in the first end flow channel plate one by one, and the branch passages extend to the outer surface of the first end plate along the radial direction of the first end plate.

7. The laminar flow element of claim 6, wherein, The outlet passage further comprises a converging groove recessed on the side surface of the first end plate facing the first end flow channel plate and facing away from the first end flow channel plate, the converging groove is located on the inner side of the radial direction of the first end plate, and the plurality of branch passages communicate with the converging groove.

8. A laminar flow element according to claim 6 or 7, characterised in that The length of each of the branch passages along the circumferential direction of the first end plate is smaller than the length of the corresponding flow channel in the first end flow channel plate.

9. The laminar flow element according to any one of claims 1-5, characterized in that The two outermost flow channel plates in the flow channel plates are respectively a first end flow channel plate and a second end flow channel plate. The layer flow element further comprises a second end plate connected to the side of the second end flow channel plate facing away from the first end flow channel plate, the second end plate is provided with an inlet passage communicating with the flow channels of the second end flow channel plate, The inlet channel includes a main channel located radially inward of the second end plate and a plurality of branch channels each in communication with the main channel and corresponding to and in communication with a plurality of flow channel groups in the second end flow channel plate.

10. The laminar flow element of claim 9, wherein, The length of each of the branch channels is less than the length of the corresponding flow channel in the second end flow channel plate along the circumference of the second end plate.

11. A flow control device, characterized by A flow control device comprising the laminar flow element of any one of claims 1-10 and a sensing assembly, the laminar flow element comprising an inlet channel and an outlet channel, at least one of the inlet channel and the outlet channel in communication with the sensing assembly, the sensing assembly for measuring a flow rate of a fluid flowing through the laminar flow element.

12. A semiconductor device, characterized by comprising: A flow control device comprising the flow control device of claim 11.

Images