Balancing method large pumping speed vacuum system and its application method

Abstract

The present application belongs to the technical field of liquid variable volume mechanical, and particularly relates to a balanced method large pumping speed vacuum system and an application method thereof. The balanced method large pumping speed vacuum system comprises a vacuum pump, a vacuum main pipeline connected with the vacuum pump, a negative pressure cabin and a balance pipeline. The volume of the negative pressure cabin is larger than that of the vacuum cabin. Two ends of the balance pipeline are connected with the negative pressure cabin and the vacuum cabin respectively. The vacuum main pipeline, a first branch pipeline and the balance pipeline are sequentially communicated with the vacuum cabin. The first branch pipeline is provided with a first vacuum valve. The vacuum main pipeline, a second branch pipeline and the balance pipeline are sequentially communicated with the negative pressure cabin. The second branch pipeline is provided with a second vacuum valve. The balance pipeline is provided with a balance adjusting valve. The application method comprises the following steps: S1, pre-pumping the negative pressure cabin; S2, pre-pumping the vacuum cabin; S3, rapid balancing; and S4, supplementing pumping to a target pressure. The present application can meet the demand of rapid pumping of the vacuum cabin and reduce energy consumption.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of liquid variable volume mechanical technology, and particularly relates to a balanced method large pumping speed vacuum system and an application method thereof. BACKGROUND

[0002] As a core supporting device for high-end manufacturing and scientific research innovation, the vacuum system is widely used in the fields of semiconductor manufacturing, photovoltaic component production, vacuum heat test, material science experiment and the like. With the continuous improvement of the requirement for vacuum degree of the downstream industry and the continuous expansion of the volume of the vacuum chamber, the technical bottleneck of the traditional vacuum system is increasingly prominent, which is specifically embodied in three aspects: first, in order to meet the demand of large volume, short time and large pumping speed, an ultra-high power vacuum pump needs to be configured, which not only has high energy consumption, but also has problems of large equipment volume and high installation and maintenance cost, and the scenes of laboratories, small and medium-sized enterprises and the like are limited by the infrastructure conditions and are difficult to land, forming obvious technical barriers; second, the existing double-chamber auxiliary vacuum pumping structure in the industry can improve production efficiency and stabilize the vacuum environment, but still relies on a large power pump group, and is only applicable to batch production lines; third, the existing technology cannot simultaneously consider large pumping speed and low energy consumption, and lacks a pumping speed vacuum system which can meet the rapid pumping demand of large vacuum chamber without relying on an ultra-high power vacuum pump and can adapt to the infrastructure of small and medium-sized sites.

[0003] A new type of rapid pumping method is disclosed in Chinese Patent CN1032382A, which adopts a pump, a vacuum container and a multi-way valve, a plurality of vacuum containers are first pumped to vacuum levels with sequentially increasing vacuum degrees in order, and then the multi-way valve is used to connect the pumped member and the series of vacuum containers, when the multi-way valve is sequentially connected to the vacuum containers, according to the balance principle, the pumped member can reach the required vacuum degree in a very short time. The patent process is simple, and is suitable for rapid pumping or negative pressure leak detection of products on the production line. However, the patent is only applicable to medium and low vacuum and small volume scenes, and cannot meet the use demand of high vacuum; and the patent needs to pre-pump each vacuum container to a set vacuum degree one by one, the pre-pumping process is complicated and has poor flexibility, once the volume and vacuum level of the vacuum container are fixed, it is difficult to adapt to the use demand of different specifications of the pumped member, and when a larger volume pumped member is replaced, an additional vacuum container needs to be added. SUMMARY

[0004] The purpose of the present application is to provide a balanced method large pumping speed vacuum system, which can replace the direct pumping mode of the traditional ultra-high power vacuum pump, meet the demand of rapid pumping of the vacuum chamber, greatly reduce the energy consumption and equipment cost, and has a simple pre-pumping process and low operation difficulty. The present application also provides an application method of the balanced method large pumping speed vacuum system.

[0005] To achieve the above-mentioned purpose, the technical scheme of the present application is as follows:

[0006] The balanced method high pumping speed vacuum system of the application, comprising a vacuum pump and a vacuum main pipeline connected with the vacuum pump, further comprising a negative pressure cabin and a balance pipeline, the volume of the negative pressure cabin is greater than that of the vacuum cabin, the two ends of the balance pipeline are connected with the negative pressure cabin and the vacuum cabin respectively, the vacuum main pipeline, the first branch pipeline and the balance pipeline are communicated with the vacuum cabin in sequence, the first vacuum valve is arranged on the first branch pipeline, the vacuum main pipeline, the second branch pipeline and the balance pipeline are communicated with the negative pressure cabin in sequence, the second vacuum valve is arranged on the second branch pipeline, the balance adjusting valve is arranged on the balance pipeline, and the pump port valve is arranged on the vacuum pump.

[0007] Further, the first pressure gauge is arranged on the balance pipeline matched with the vacuum cabin, and the second pressure gauge is arranged on the balance pipeline matched with the negative pressure cabin.

[0008] The application method of the balanced method high pumping speed vacuum system of the application, comprising the following steps:

[0009] S1: pre-extracting the negative pressure cabin

[0010] The balance adjusting valve, the first vacuum valve, the second vacuum valve and the pump port valve are closed, the vacuum pump is started, and the pump port valve and the second vacuum valve are opened, the negative pressure cabin is vacuumized, until the pressure reaches the initial pressure of the negative pressure cabin, and the second vacuum valve is closed.

[0011] S2: pre-extracting the vacuum cabin

[0012] The vacuum pump is kept running, the pump port valve is kept open, the first vacuum valve is opened, the vacuum cabin is vacuumized, until the pressure reaches the initial pressure of the vacuum cabin, and the running of the vacuum pump is continued.

[0013] S3: rapid balancing

[0014] The pump port valve is kept open, the balance adjusting valve is opened, the negative pressure cabin and the vacuum cabin are communicated through the balance pipeline, the negative pressure cabin extracts air from the vacuum cabin through the balance pipeline, and the vacuum pump extracts air from the vacuum cabin through the vacuum main pipeline, the first branch pipeline and the balance pipeline, until the pressure difference between the vacuum cabin and the negative pressure cabin is 0-2.6kPa.

[0015] S4: supplement extraction to the target pressure

[0016] When the pressure difference between the vacuum cabin and the negative pressure cabin is 0-2.6kPa, the balance adjusting valve is closed, the vacuum pump continues to supplement the vacuum cabin, until the pressure in the vacuum cabin reaches the final target pressure.

[0017] Further, in step S3, when the pressure difference between the vacuum cabin and the negative pressure cabin is 0, the vacuum cabin and the negative pressure cabin reach the balanced state, and the pressure of the balanced state is determined by the following formula:

[0018]

[0019]

[0020] wherein V A is the volume of the negative pressure chamber, V B is the volume of the vacuum chamber, P A is the pressure of the negative pressure chamber, P B is the pressure of the vacuum chamber, P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber to the vacuum chamber.

[0021] Alternatively, in step S3, when the pressure difference between the vacuum chamber and the negative pressure chamber is 0, the vacuum chamber and the negative pressure chamber reach the equilibrium state, and the volume of the negative pressure chamber is determined by calculation according to the following formula:

[0022]

[0023] wherein V A is the volume of the negative pressure chamber, V B is the volume of the vacuum chamber, P A is the pressure of the negative pressure chamber, P B is the pressure of the vacuum chamber, P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber to the vacuum chamber.

[0024] Alternatively, in step S3, when the pressure difference between the vacuum chamber and the negative pressure chamber is 0, the vacuum chamber and the negative pressure chamber reach the equilibrium state, and the volume of the negative pressure chamber is determined by calculation according to the following formula:

[0025]

[0026] wherein V A is the volume of the negative pressure chamber, V B is the volume of the vacuum chamber, P A is the pressure of the negative pressure chamber, P B is the pressure of the vacuum chamber, P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber to the vacuum chamber.

[0027] Further, in step S3, the flow conductance of the equilibrium adjusting valve is determined by calculation according to the following formula:

[0028]

[0029]

[0030]

[0031] wherein U is the flow conductance of the equilibrium adjusting valve, P A0 is the initial pressure of the negative pressure chamber, P B0 is the initial pressure of the vacuum chamber, ΔP0 is the initial pressure difference between the vacuum chamber and the negative pressure chamber, P AP is the real-time pressure of the negative pressure chamber in the balancing process B P is the real-time pressure of the vacuum chamber in the balancing process, and ΔP is the real-time pressure difference between the vacuum chamber and the negative pressure chamber in the balancing process B V is the volume of the vacuum chamber, i is the volume ratio of the negative pressure chamber to the vacuum chamber, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber is communicated with the vacuum chamber.

[0032] Further, in step S3, the time required for the pressure difference to change from the initial pressure difference to the real-time pressure difference after the negative pressure chamber is communicated with the vacuum chamber is determined by the following formula:

[0033]

[0034]

[0035]

[0036] P is the initial pressure of the negative pressure chamber, P A0 is the initial pressure of the negative pressure chamber, P B0 is the initial pressure of the vacuum chamber, and ΔP0 is the initial pressure difference between the vacuum chamber and the negative pressure chamber A P is the real-time pressure of the negative pressure chamber in the balancing process B P is the real-time pressure of the vacuum chamber in the balancing process, and ΔP is the real-time pressure difference between the vacuum chamber and the negative pressure chamber in the balancing process B V is the volume of the vacuum chamber, i is the volume ratio of the negative pressure chamber to the vacuum chamber, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber is communicated with the vacuum chamber.

[0037] Further, the real-time pressure P B of the vacuum chamber in the balancing process is detected by the first pressure gauge.

[0038] Further, the real-time pressure P A of the negative pressure chamber in the balancing process is detected by the second pressure gauge.

[0039] The beneficial effects of the present application are:

[0040] The present application cooperates with the vacuum pump to extract air, without configuring a super-large power vacuum pump corresponding to the traditional large extraction speed requirement, and only a conventional vacuum pump can meet the rapid air extraction requirement of the vacuum chamber. Compared with the traditional large power vacuum system, the energy consumption is reduced, the equipment volume is more compact, the installation and maintenance are simple, the infrastructure investment threshold of laboratory, small and medium-sized enterprises and other scenes is effectively reduced, the technical barriers of high cost and difficult landing of the traditional large power vacuum system are solved, and the long-term operation of electricity and maintenance expenses is reduced.

[0041] The present application drives the air extraction by means of the initial pressure difference between the negative pressure cabin and the vacuum cabin, cooperates with the balance regulating valve, forms the double-way collaborative air extraction of the vacuum pump and the negative pressure cabin, greatly shortens the core air extraction time. At the same time, through the accurate formula parameter calculation, the high vacuum target can be stably realized, and the limitation that the existing similar double-cavity technology is only suitable for medium-low vacuum and small volume scene is overcome, and the large pumping speed and high vacuum demand are considered.

[0042] The pre-extraction process of the present application only needs two steps to complete the pre-extraction of the negative pressure cabin and the vacuum cabin, and does not need to pre-extract a plurality of staged vacuum containers one by one, so the process is simplified and the operation difficulty is low. Through the formula calculation of pumping speed, flow guide and time, the present application can adapt to the use demand of different volume vacuum cabins and different target vacuum degrees, without the need of additional new containers or the need of greatly adjusting the equipment structure, solving the problems of poor adaptability and complicated parameter adjustment of the traditional technology, and the operation is simple and the adaptability is strong, with outstanding flexibility.

[0043] The first pressure gauge and the second pressure gauge can detect the pressure of the vacuum cabin and the negative pressure cabin in real time and calculate the pressure difference, providing accurate basis for the flow guide adjustment of the balance regulating valve, ensuring that the air extraction process is stable and reliable; the target pressure of the vacuum cabin is calculated by formula, so that the final vacuum degree is accurately controllable.

[0044] The negative pressure cabin can be arranged as a static device in the non-core area such as underground or the top of the plant house, which not only greatly releases the workshop ground space, but also avoids the high noise and strong vibration problems caused by the huge power dynamic equipment in the traditional scheme, significantly reduces the harsh requirements on the construction area environment and engineering conditions, and widens the applicable scenarios.

[0045] The present application controls the on-off of the balance pipeline and the balance regulating valve, utilizes the pressure difference to quickly reduce the pressure of the vacuum cabin, and guarantees that the vacuum degree meets the standard through the supplementary extraction process, considering the efficiency and reliability, and the system components are all conventional vacuum equipment, which has strong popularization value and strong practicality. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 is a structural schematic diagram of the present application;

[0047] In the figure:

[0048] 1, vacuum pump; 2, vacuum main pipeline; 3, first vacuum valve; 4, first branch pipeline; 5, vacuum cabin; 6, negative pressure cabin; 7, balance pipeline; 8, second vacuum valve; 9, second branch pipeline; 10, balance regulating valve; 11, pump port valve; 12, first pressure gauge; 13, second pressure gauge. DETAILED DESCRIPTION

[0049] The present application will be specifically described and explained in combination with the embodiments.

[0050] Example 1

[0051] As Figure 1 shown, the balance method high pumping speed vacuum system includes a vacuum pump 1 and a vacuum main pipeline 2 connected with the vacuum pump 1, further includes a negative pressure cabin 6 and a balance pipeline 7, the volume of the negative pressure cabin 6 is greater than that of the vacuum cabin 5, two ends of the balance pipeline 7 are connected with the negative pressure cabin 6 and the vacuum cabin 5 respectively, the vacuum main pipeline 2, the first branch pipeline 4, the balance pipeline 7 and the vacuum cabin 5 are sequentially communicated, the first branch pipeline 4 is provided with a first vacuum valve 3, the vacuum main pipeline 2, the second branch pipeline 9, the balance pipeline 7 and the negative pressure cabin 6 are sequentially communicated, the second branch pipeline 9 is provided with a second vacuum valve 8, the balance pipeline 7 is provided with a balance adjusting valve 10, and the vacuum pump 1 is provided with a pump port valve 11.

[0052] The first pressure gauge 12 is arranged on the balance pipeline 7 in cooperation with the vacuum cabin 5, and the second pressure gauge 13 is arranged on the balance pipeline 7 in cooperation with the negative pressure cabin 6.

[0053] The volume V B of the vacuum cabin 5 is 110 m 3 , the total target pumping time t is 15 s, the initial pressure P B0 of the vacuum cabin is 75.28 kPa, and the target pressure P' B of the vacuum cabin is 18.74 kPa.

[0054] According to the above process parameter limitation, the following component selection is completed: the volume V A of the negative pressure cabin 6 is 430 m 3 , the volume ratio i is 3.9, the pumping speed Q of the vacuum pump 1 is 0.333 m 3 / h, the limit vacuum of the vacuum pump 1 is less than or equal to 10 Pa, the rated power of the vacuum pump 1 is 30 kW, and the flow conductance U of the balance adjusting valve 10 is 300 m 3 / s.

[0055] The application method of the balance method high pumping speed vacuum system includes the following steps:

[0056] S1: pre-pumping the negative pressure cabin 6

[0057] The balance adjusting valve 10, the first vacuum valve 3, the second vacuum valve 8 and the pump port valve 11 are closed, the vacuum pump 1 is started, and the pump port valve 11 and the second vacuum valve 8 are opened, the negative pressure cabin 6 is pumped, until the pressure reaches the preset initial pressure P A0 of the negative pressure cabin 6, which is 2 kPa, and the second vacuum valve 8 is closed.

[0058] S2: pre-pumping the vacuum cabin 5

[0059] Keep the vacuum pump 1 running, maintain the pump port valve 11 open, open the first vacuum valve 3, and vacuum the vacuum chamber 5 until its pressure reaches the set initial pressure P0 of the vacuum chamber 5 B0 = 75.28 kPa, continue to maintain the running of the vacuum pump 1;

[0060] S3: Rapid balancing

[0061] Keep the pump port valve 11 open, open the balancing regulating valve 10, and make the negative pressure chamber 6 and the vacuum chamber 5 communicate through the balancing pipeline 7 based on the initial pressure difference ΔP0 = P B0 -P A0 = 73.28 kPa, the negative pressure chamber 6 pumps the vacuum chamber 5 through the balancing pipeline 7, and the vacuum pump 1 pumps the vacuum chamber 5 through the vacuum main pipeline 2, the first branch pipeline 4, and the balancing pipeline 7;

[0062] The first pressure gauge 12 detects the real-time pressure P B of the vacuum chamber 5, the second pressure gauge 13 detects the real-time pressure P A of the negative pressure chamber 6, and the real-time pressure difference ΔP = P B -P A is calculated according to the first pressure gauge 12 and the second pressure gauge 13;

[0063] Finally, the pressure of the negative pressure chamber 6 and the vacuum chamber 5 approaches the equilibrium state, and the pressure of the vacuum chamber 5 is 19.0 kPa at this time;

[0064] S4: Supplementary pumping to the target pressure

[0065] When the pressure of the vacuum chamber 5 reaches 19.0 kPa, the balancing regulating valve 10 is closed, and the vacuum pump 1 continues to supplement the pumping of the vacuum chamber 5 until the pressure in the vacuum chamber 5 reaches the final required target pressure P' B = 18.74 kPa.

[0066] In step S3, when the pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 is 0, the vacuum chamber 5 and the negative pressure chamber 6 reach the equilibrium state, and the pressure of the equilibrium state is determined by the following formula:

[0067]

[0068]

[0069] Wherein, V A is the volume of the negative pressure chamber 6, V B is the volume of the vacuum chamber 5, P A is the pressure of the negative pressure chamber 6, P B is the pressure of the vacuum chamber 5, P is the pressure of the equilibrium state, and i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5.

[0070] Alternatively, when the pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 is 0 in step S3, the vacuum chamber 5 and the negative pressure chamber 6 reach an equilibrium state, and the volume of the negative pressure chamber 6 is determined by the following formula:

[0071]

[0072] wherein V6 is the volume of the negative pressure chamber 6, V5 is the volume of the vacuum chamber 5, P6 is the pressure of the negative pressure chamber 6, P5 is the pressure of the vacuum chamber 5, P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5. A B A B A B A B

[0073] Alternatively, when the pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 is 0 in step S3, the vacuum chamber 5 and the negative pressure chamber 6 reach an equilibrium state, and the volume of the negative pressure chamber 6 is determined by the following formula:

[0074]

[0075] wherein V6 is the volume of the negative pressure chamber 6, V5 is the volume of the vacuum chamber 5, P6 is the pressure of the negative pressure chamber 6, P5 is the pressure of the vacuum chamber 5, P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5. A B A B

[0076] In step S3, the flow conductance of the equilibrium adjusting valve 10 is determined by the following formula:

[0077]

[0078]

[0079]

[0080] wherein U is the flow conductance of the equilibrium adjusting valve 10, P60 is the initial pressure of the negative pressure chamber 6, P50 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P6 is the real-time pressure of the negative pressure chamber 6 in the equilibrium process, P5 is the real-time pressure of the vacuum chamber 5 in the equilibrium process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the equilibrium process, V5 is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber 6 and the vacuum chamber 5 are connected. A0 B0 A B B ​​​​​​​​​

[0081] In step S3, the time required for the pressure difference to change from the initial pressure difference to the real-time pressure difference value after the negative pressure chamber 6 is communicated with the vacuum chamber 5 is calculated and determined by the following formula:

[0082]

[0083]

[0084]

[0085] wherein U is the flow conductance of the balance regulating valve 10, P A0 is the initial pressure of the negative pressure chamber 6, P B0 is the initial pressure of the vacuum chamber 5, ΔP0 is the initial pressure difference between the vacuum chamber 5 and the negative pressure chamber 6, P A is the real-time pressure of the negative pressure chamber 6 in the balancing process, P B is the real-time pressure of the vacuum chamber 5 in the balancing process, ΔP is the real-time pressure difference between the vacuum chamber 5 and the negative pressure chamber 6 in the balancing process, V B is the volume of the vacuum chamber 5, i is the volume ratio of the negative pressure chamber 6 to the vacuum chamber 5, and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference value ΔP after the negative pressure chamber 6 is communicated with the vacuum chamber 5.

[0086] The real-time pressure P B of the vacuum chamber 5 in the balancing process is the detection value of the first pressure gauge 12.

[0087] The real-time pressure P A of the negative pressure chamber 6 in the balancing process is the detection value of the second pressure gauge 13.

[0088] Comparative Example 1

[0089] The comparative example adopts a traditional vacuum system scheme, and does not set the negative pressure chamber 6 in the embodiment 1, and other structures are the same as those in the embodiment 1, and only one vacuum pump 1 is used to directly pump the vacuum chamber 5. The configuration power of the vacuum pump 1 is 1400kW, a 10kV high-voltage power supply is required, and the cooling water consumption is 200m 3 / h.

[0090] The vacuum pump 1 is used to directly pump the vacuum chamber 5 to the target pressure, the configuration pumping speed of the vacuum pump 1 in the comparative example is 11.2m 3 / s, and the pumping speed Q is calculated by the following formula:

[0091]

[0092] wherein k is a redundancy coefficient, V B is the volume of the vacuum chamber 5, t is the total target pumping time, P B0 is the initial pressure of the vacuum chamber 5, and PB Target pressure of the vacuum chamber 5.

[0093] By comparison, the power of the vacuum pump 1 in Example 1 is 30 kW, which is 2.1% of the power of the vacuum pump 1 in Comparative Example 1, and the vacuum pump 1 in Example 1 is adapted to 380V civil power, 3m 3 / h conventional tap water, without the need for high-voltage power supply and large-flow cooling water; Example 1 can complete the target pressure reduction within 15 seconds, with controllable cost, only 10% of Comparative Example 1.

Claims

1. A method of using a balanced high-throughput vacuum system, characterized in that, The balanced method high pumping speed vacuum system comprises a vacuum pump (1), a vacuum main pipeline (2) connected with the vacuum pump (1), a negative pressure cabin (6) and a balance pipeline (7), the volume of the negative pressure cabin (6) is greater than that of a vacuum cabin (5), two ends of the balance pipeline (7) are connected with the negative pressure cabin (6) and the vacuum cabin (5) respectively, the vacuum main pipeline (2), a first branch pipeline (4), the balance pipeline (7) and the vacuum cabin (5) are sequentially communicated, the first branch pipeline (4) is provided with a first vacuum valve (3), the vacuum main pipeline (2), a second branch pipeline (9), the balance pipeline (7) and the negative pressure cabin (6) are sequentially communicated, the second branch pipeline (9) is provided with a second vacuum valve (8), the balance pipeline (7) is provided with a balance adjusting valve (10), the vacuum pump (1) is provided with a pump port valve (11), the balance pipeline (7) is provided with a first pressure gauge (12) matched with the vacuum cabin (5), and the balance pipeline (7) is provided with a second pressure gauge (13) matched with the negative pressure cabin (6); The application method of the balanced method high pumping speed vacuum system comprises the following steps: S1: pre-extracting the negative pressure cabin (6) The balance adjusting valve (10), the first vacuum valve (3), the second vacuum valve (8) and the pump port valve (11) are closed, the vacuum pump (1) is started and the pump port valve (11) and the second vacuum valve (8) are opened, the negative pressure cabin (6) is vacuumized, until the pressure reaches the initial pressure of the negative pressure cabin (6), and then the second vacuum valve (8) is closed; S2: pre-extracting the vacuum cabin (5) The vacuum pump (1) is kept running, the pump port valve (11) is kept open, the first vacuum valve (3) is opened, the vacuum cabin (5) is vacuumized, until the pressure reaches the initial pressure of the vacuum cabin (5), and then the running of the vacuum pump (1) is continued; S3: rapid balancing The pump port valve (11) is kept open, the balance adjusting valve (10) is opened, the negative pressure cabin (6) is communicated with the vacuum cabin (5) through the balance pipeline (7), the negative pressure cabin (6) extracts air from the vacuum cabin (5) through the balance pipeline (7), meanwhile, the vacuum pump (1) extracts air from the vacuum cabin (5) through the vacuum main pipeline (2), the first branch pipeline (4) and the balance pipeline (7), until the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0-2.6 kPa; S4: supplement extraction to the target pressure When the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0-2.6 kPa, the balance adjusting valve (10) is closed, the vacuum pump (1) continues to supplement the vacuum cabin (5), until the pressure in the vacuum cabin (5) reaches the final target pressure; In step S3, the flow guide of the balance adjusting valve (10) is determined by the following formula: Wherein, U is the flow conductance of the balance regulating valve (10), P A0 is the initial pressure of the negative pressure cabin (6), P B0 is the initial pressure of the vacuum cabin (5), ΔP0 is the initial pressure difference between the vacuum cabin (5) and the negative pressure cabin (6), P A is the real-time pressure of the negative pressure cabin (6) in the balancing process, P B is the real-time pressure of the vacuum cabin (5) in the balancing process, ΔP is the real-time pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) in the balancing process, V B is the volume of the vacuum cabin (5), i is the volume ratio of the negative pressure cabin (6) to the vacuum cabin (5), and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure cabin (6) and the vacuum cabin (5) are connected. In step S3, the time required for the pressure difference between the negative pressure cabin (6) and the vacuum cabin (5) to change from the initial pressure difference to the real-time pressure difference is determined by the following formula: wherein U is the flow conductance of the balance regulating valve (10), P A0 is the initial pressure of the negative pressure chamber (6), P B0 is the initial pressure of the vacuum chamber (5), ΔP0 is the initial pressure difference between the vacuum chamber (5) and the negative pressure chamber (6), P A is the real-time pressure of the negative pressure chamber (6) during the balancing process, P B is the real-time pressure of the vacuum chamber (5) during the balancing process, ΔP is the real-time pressure difference between the vacuum chamber (5) and the negative pressure chamber (6) during the balancing process, V B is the volume of the vacuum chamber (5), i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5), and t is the time required for the pressure difference to change from the initial pressure difference ΔP0 to the real-time pressure difference ΔP after the negative pressure chamber (6) and the vacuum chamber (5) are connected.

2. The method of claim 1, wherein the method is used for a high-throughput vacuum system. In step S3, when the pressure difference between the vacuum cabin (5) and the negative pressure cabin (6) is 0, the vacuum cabin (5) and the negative pressure cabin (6) reach the balanced state, and the pressure of the balanced state is determined by the following formula: where V A is the volume of the negative pressure chamber (6), V B is the volume of the vacuum chamber (5), P A is the pressure of the negative pressure chamber (6), P B is the pressure of the vacuum chamber (5), P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5).

3. The method of claim 1, wherein the method is used for a high-throughput vacuum system. In step S3, when the pressure difference between the vacuum chamber (5) and the negative pressure chamber (6) is 0, the vacuum chamber (5) and the negative pressure chamber (6) reach an equilibrium state, and the pressure of the negative pressure chamber (6) is determined by calculation according to the following formula: where V A is the volume of the negative pressure chamber (6), V B is the volume of the vacuum chamber (5), P A is the pressure of the negative pressure chamber (6), P B is the pressure of the vacuum chamber (5), P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5).

4. The method of claim 1, wherein the method is used for a high-throughput vacuum system. In step S3, when the pressure difference between the vacuum chamber (5) and the negative pressure chamber (6) is 0, the vacuum chamber (5) and the negative pressure chamber (6) reach an equilibrium state, and the volume of the negative pressure chamber (6) is determined by calculation according to the following formula: where V A is the volume of the negative pressure chamber (6), V B is the volume of the vacuum chamber (5), P A is the pressure of the negative pressure chamber (6), P B is the pressure of the vacuum chamber (5), P is the pressure in the equilibrium state, and i is the volume ratio of the negative pressure chamber (6) to the vacuum chamber (5).

5. The method of claim 1, wherein the method is used for a balanced high-throughput vacuum system, and wherein the method comprises: Real-time pressure P of the vacuum chamber (5) during the balancing process B is the detected value of the first pressure gauge (12).

6. The method of claim 1, wherein the method is used for a balanced high-throughput vacuum system, and wherein the method comprises: Real-time pressure P of the negative pressure chamber (6) during the balancing process A is the detection value of the second pressure gauge (13).

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