Perovskite thin film quality management and control system integrating optical detection and data analysis

Abstract

The invention belongs to the technical field of semiconductor material detection, and relates to a perovskite film quality management and control system integrating optical detection and data analysis, which comprises a data acquisition and preprocessing module, a dynamic reference construction module, a defect index calculation module and a defect analysis and regulation module, the method comprises the following steps: acquiring photoluminescence intensity data and reflectivity data of the surface of a perovskite thin film, performing space pixel registration and preprocessing, constructing a two-dimensional feature space, and fitting a dynamic reference light intensity curve by using a dynamic sliding window algorithm; calculating a defect severity index of each pixel point by combining a nonlinear index mapping model based on the dynamic reference light intensity curve and the actually measured photoluminescence intensity; and rendering the defect severity index into a defect distribution thermodynamic diagram, and generating a production equipment regulation and control instruction according to the defect area proportion and the distribution form. According to the method, the interference of the film thickness on the photoluminescence signal is dynamically decoupled by using a data statistics rule, and the accuracy and the production yield of perovskite film defect detection are improved.