Self-alignment MEMS micromirror based on electrostatic driving
By designing an electrostatically driven self-aligned MEMS micromirror and adopting a novel structure to achieve multi-axis motion of the mirror surface, the problem of low light source utilization in existing MEMS micromirrors is solved, and the stable positioning of the beam at the center of the mirror surface is achieved, thereby improving the utilization efficiency of the light source.
Patent Information
- Application Number
- CN202511576622.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-31
- Publication Date
- 2026-01-23
AI Technical Summary
Existing MEMS micromirrors can only achieve torsional motion, which cannot guarantee that the light beam will always hit the center of the mirror, resulting in low light source utilization.
Design a self-aligned MEMS micromirror based on electrostatic drive. Through a novel structure, the mirror surface can achieve both torsional and translational motion. It includes an inner and outer structure. By using a combination of comb beams and isolation gaps, multi-axis motion is achieved to keep the beam at the center of the mirror surface.
It significantly improves the utilization rate of the light source. The mirror can move on multiple axes to ensure that the light beam always hits the center of the mirror, thus improving the utilization efficiency of the light source.
Smart Images
Figure CN121386178A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application relates to a MEMS micromirror, in particular to a self-alignment MEMS micromirror based on electrostatic driving. BACKGROUND
[0002] The MEMS micromirror is a micro-driven mirror based on micro-electro-mechanical system technology, which realizes the deflection or scanning of a light beam by controlling the torsion of the mirror surface through electrostatic driving or other ways, and is widely applied to the fields of projection display, laser radar, optical communication and the like. However, in actual application, the mirror surface of the existing MEMS micromirror can only realize the torsion movement due to the limitation of the structure, and cannot realize the translation movement, so that the light beam cannot always hit the center of the mirror surface, thereby resulting in low utilization rate of the light source. Based on this, it is necessary to invent a self-alignment MEMS micromirror based on electrostatic driving to solve the problem of low utilization rate of the light source of the existing MEMS micromirror. SUMMARY
[0003] The application provides a self-alignment MEMS micromirror based on electrostatic driving to solve the problem of low utilization rate of the light source of the existing MEMS micromirror.
[0004] The application is implemented by adopting the following technical scheme: A self-alignment MEMS micromirror based on electrostatic driving comprises an inner layer structure and an outer layer structure. The inner layer structure comprises a rectangular mirror surface, a rectangular inner frame sleeved outside the rectangular mirror surface and a rectangular outer frame sleeved outside the rectangular inner frame. The left and right sides of the rectangular mirror surface are each provided with a mirror boss; each mirror boss is connected with a straight beam A arranged horizontally between the mirror boss and the rectangular inner frame; the side of each mirror boss is provided with two comb tooth beams A, and the two comb tooth beams A are arranged on the front and back sides of the corresponding straight beam A; the inner side of the rectangular inner frame is provided with four rows of driving combs A, and the four rows of driving combs A and the four comb tooth beams A correspondingly form four comb tooth capacitors A. The front and back outer sides of the rectangular inner frame are each provided with an inner frame boss; each inner frame boss is connected with a straight beam B arranged vertically between the inner frame boss and the rectangular outer frame; the side of each inner frame boss is provided with two comb tooth beams B, and the two comb tooth beams B are arranged on the left and right sides of the corresponding straight beam B; the inner side of the rectangular outer frame is provided with four rows of driving combs B, and the four rows of driving combs B and the four comb tooth beams B correspondingly form four comb tooth capacitors B. The front, back, left and right outer sides of the rectangular outer frame are each provided with an outer frame boss; the side of each outer frame boss is provided with a gap A; the side of each gap A is provided with a U-shaped beam A. The outer layer structure comprises four comb tooth beams C and a rectangular bottom frame. The back surface of each comb beam C is provided with a U-shaped beam B and two L-shaped beams, and the two L-shaped beams are oppositely arranged on the two sides of the corresponding U-shaped beam B; the two ends of each U-shaped beam B extend into the corresponding U-shaped beam A and are fixed with the bottom edge thereof; a gap B is formed between each L-shaped beam and the corresponding comb beam C; the side surface of each gap B is provided with a U-shaped beam C; The upper surface of each frame edge of the rectangular bottom frame is fixed with a rectangular anchor block; the inner side surface of each rectangular anchor block is provided with a row of driving combs C; the four rows of driving combs C and the four comb beams C correspondingly form four comb capacitors C; the upper surface of each corner of the rectangular bottom frame is fixed with two triangular anchor blocks; the side surface of each triangular anchor block is provided with a U-shaped beam D; the two ends of each U-shaped beam D extend into the corresponding U-shaped beam C and are fixed with the bottom edge thereof; The upper and lower surfaces of the rectangular inner frame are provided with a U-shaped isolation gap and two serpentine isolation gaps; the upper and lower surfaces of the rectangular outer frame are provided with four straight isolation gaps; the upper and lower surfaces of each comb beam C are provided with an L-shaped isolation gap; the U-shaped isolation gap, the two serpentine isolation gaps, the four straight isolation gaps and the four L-shaped isolation gaps are filled with insulating material.
[0005] Further, the two ends of the U-shaped isolation gap penetrate the left inner side surface of the rectangular inner frame, and the two penetration positions are respectively located on the front and rear sides of the corresponding straight beam A.
[0006] Further, the leading ends of the two serpentine isolation gaps penetrate the right inner side surface of the rectangular inner frame, and the two penetration positions are respectively located on the front and rear sides of the corresponding straight beam A; the trailing ends of the two serpentine isolation gaps penetrate the front side surface of the front inner frame boss, and the two penetration positions are respectively located on the left and right sides of the corresponding straight beam B.
[0007] Further, the leading ends of the two straight isolation gaps penetrate the front inner side surface of the rectangular outer frame, and the two penetration positions are respectively located on the left and right sides of the corresponding straight beam B; the trailing ends of the two straight isolation gaps penetrate the front outer side surface of the rectangular outer frame, and the two penetration positions are respectively located on the left and right sides of the corresponding outer frame boss; the leading ends of the other two straight isolation gaps penetrate the rear inner side surface of the rectangular outer frame, and the two penetration positions are respectively located on the left and right sides of the corresponding straight beam B; the trailing ends of the two straight isolation gaps penetrate the rear outer side surface of the rectangular outer frame, and the two penetration positions are respectively located on the left and right sides of the corresponding outer frame boss.
[0008] Further, the head end of the L-shaped isolation gap in the front position penetrates the back of the corresponding comb tooth beam C, and the penetration is located at the left side of the corresponding U-shaped beam B; the tail end of the L-shaped isolation gap penetrates the right side of the corresponding comb tooth beam C; the head end of the L-shaped isolation gap in the rear position penetrates the back of the corresponding comb tooth beam C, and the penetration is located at the right side of the corresponding U-shaped beam B; the tail end of the L-shaped isolation gap penetrates the left side of the corresponding comb tooth beam C; the head end of the L-shaped isolation gap in the left position penetrates the back of the corresponding comb tooth beam C, and the penetration is located at the back side of the corresponding U-shaped beam B; the tail end of the L-shaped isolation gap penetrates the front side of the corresponding comb tooth beam C; the head end of the L-shaped isolation gap in the right position penetrates the back of the corresponding comb tooth beam C, and the penetration is located at the front side of the corresponding U-shaped beam B; the tail end of the L-shaped isolation gap penetrates the back side of the corresponding comb tooth beam C.
[0009] Further, the upper surface of each rectangular anchor block is fixed with an electric connection pad A; the upper surface of each triangular anchor block is fixed with an electric connection pad B.
[0010] Compared with the existing MEMS micromirror, the self-alignment MEMS micromirror based on electrostatic driving can realize both torsional motion (reciprocal torsional motion around the x-axis and the y-axis) and translational motion (translational motion along the x-axis and the y-axis), so that the light beam can always hit the center of the mirror surface, thereby significantly improving the utilization rate of the light source.
[0011] The self-alignment MEMS micromirror based on electrostatic driving has reasonable structure and ingenious design, and effectively solves the problem of low utilization rate of the light source of the existing MEMS micromirror, and is suitable for the fields of projection display, laser radar, optical communication and the like. BRIEF DESCRIPTION OF DRAWINGS
[0012] Figure 1 is a perspective structural schematic diagram of the application.
[0013] Figure 2 is another angle structural schematic diagram of Figure 1 .
[0014] Figure 3 is a planar structural schematic diagram of the application.
[0015] Figure 4 is a partial structural schematic diagram of Figure 3 . Figure 1 .
[0016] Figure 5 is a partial structural schematic diagram of Figure 4 . Figure 1 .
[0017] Figure 6 is a partial structural schematic diagram of Figure 4 . Figure 2 .
[0018] Figure 7 is a partial structural diagram of Figure 3 Figure 2 .
[0019] Figure 8 is a partial structural diagram of Figure 7 Figure 1 .
[0020] Figure 9 is a partial structural diagram of Figure 7 Figure 2 .
[0021] Figure 10 is a partial structural diagram of Figure 7 Figure 3 .
[0022] Figure 11 is a schematic diagram of the first to eighth potential regions in the application.
[0023] In the figure: 101-rectangular mirror surface, 102-rectangular inner frame, 103-rectangular outer frame, 104-mirror surface boss, 105-straight beam A, 106-comb tooth beam A, 107-driving comb tooth A, 108-inner frame boss, 109-straight beam B, 110-comb tooth beam B, 111-driving comb tooth B, 112-outer frame boss, 113-U-shaped beam A, 114-U-shaped isolation gap, 115-snake-shaped isolation gap, 116-straight isolation gap, 201-comb tooth beam C, 202-rectangular bottom frame, 203-U-shaped beam B, 204-L-shaped beam, 205-U-shaped beam C, 206-rectangular anchor block, 207-driving comb tooth C, 208-triangle anchor block, 209-U-shaped beam D, 210-L-shaped isolation gap, 211-electric connection pad A, 212-electric connection pad B. DETAILED DESCRIPTION
[0024] A self-aligned MEMS micro-mirror based on electrostatic driving, comprising an inner layer structure and an outer layer structure; The inner layer structure comprises a rectangular mirror surface 101, a rectangular inner frame 102 sleeved outside the rectangular mirror surface 101, and a rectangular outer frame 103 sleeved outside the rectangular inner frame 102. The left and right sides of the rectangular mirror surface 101 each extend to be provided with a mirror surface boss 104; each mirror surface boss 104 is connected with a straight beam A 105 arranged horizontally between the mirror surface boss 104 and the rectangular inner frame 102; the side surface of each mirror surface boss 104 extends to be provided with two comb tooth beams A 106, and the two comb tooth beams A 106 are arranged opposite to each other on the front and back sides of the corresponding straight beam A 105; the inner side surface of the rectangular inner frame 102 extends to be provided with four rows of driving comb teeth A 107, and the four rows of driving comb teeth A 107 and the four comb tooth beams A 106 one-to-one correspondingly form four comb tooth capacitors A; The front and rear outer sides of the rectangular inner frame 102 are each provided with an inner frame boss 108; each inner frame boss 108 is connected with the rectangular outer frame 103 through a straight beam B 109 arranged in the longitudinal direction; the side surface of each inner frame boss 108 is provided with two comb tooth beams B 110, and the two comb tooth beams B 110 are arranged on the left and right sides of the corresponding straight beam B 109; the inner side surface of the rectangular outer frame 103 is provided with four rows of driving combs B 111, and the four rows of driving combs B 111 and the four comb tooth beams B 110 correspondingly form four comb capacitances B; The front, rear, left and right outer sides of the rectangular outer frame 103 are each provided with an outer frame boss 112; the side surface of each outer frame boss 112 is provided with a gap A; the side surface of each gap A is provided with a U-shaped beam A 113; The outer layer structure includes four comb tooth beams C 201, a rectangular bottom frame 202; The back surface of each comb tooth beam C 201 is provided with a U-shaped beam B 203 and two L-shaped beams 204, and the two L-shaped beams 204 are arranged on the two sides of the corresponding U-shaped beam B 203; the two ends of each U-shaped beam B 203 extend into the corresponding U-shaped beam A 113 and are fixed with the bottom edge thereof; a gap B is formed between each L-shaped beam 204 and the corresponding comb tooth beam C 201; the side surface of each gap B is provided with a U-shaped beam C 205; The upper surface of each frame edge of the rectangular bottom frame 202 is fixed with a rectangular anchor block 206; the inner side surface of each rectangular anchor block 206 is provided with a row of driving combs C 207; the four rows of driving combs C 203 and the four comb tooth beams C 201 correspondingly form four comb capacitances C; the upper surface of each corner of the rectangular bottom frame 202 is fixed with two triangular anchor blocks 208; the side surface of each triangular anchor block 208 is provided with a U-shaped beam D 209; the two ends of each U-shaped beam D 209 extend into the corresponding U-shaped beam C 205 and are fixed with the bottom edge thereof; U-shaped isolation gaps 114 and two snake-shaped isolation gaps 115 are provided between the upper and lower surfaces of the rectangular inner frame 102; four straight isolation gaps 116 are provided between the upper and lower surfaces of the rectangular outer frame 103; an L-shaped isolation gap 210 is provided between the upper and lower surfaces of each comb tooth beam C 201; the U-shaped isolation gap 114, the two snake-shaped isolation gaps 115, the four straight isolation gaps 116 and the four L-shaped isolation gaps 210 are filled with insulating material.
[0025] In operation, the U-shaped isolation gap 114, the two snake-shaped isolation gaps 115, the four straight isolation gaps 116 and the four L-shaped isolation gaps 210 jointly divide the present application into first to eighth potential areas, as shown in Figure 11 .
[0026] The first potential area includes four rectangular anchor blocks 206, four rows of driving comb teeth C207, a left triangular anchor block 208 of the two rear triangular anchor blocks 208, a left U-shaped beam D209 of the two rear U-shaped beams D209, a left U-shaped beam C205 of the two rear U-shaped beams C205, a left L-shaped beam 204 of the two rear L-shaped beams 204, a partial area of the comb beam C201 at the rear position, a rear U-shaped beam B203, a rear U-shaped beam A113, a rear outer frame boss 112, a partial area of the rectangular outer frame 103, a rear straight beam B109, a rear inner frame boss 108, a partial area of the front inner frame boss 108, four comb beams B110, a partial area of the rectangular inner frame 102, and four rows of driving comb teeth A107.
[0027] The second potential area includes a right triangular anchor block 208 of the two front triangular anchor blocks 208, a right U-shaped beam D209 of the two front U-shaped beams D209, a right U-shaped beam C205 of the two front U-shaped beams C205, a right L-shaped beam 204 of the two front L-shaped beams 204, a partial area of the comb beam C201 at the front position, a front U-shaped beam B203, a front U-shaped beam A113, a front outer frame boss 112, a partial area of the rectangular outer frame 103, a front straight beam B109, a partial area of the front inner frame boss 108, a partial area of the rectangular inner frame 102, two straight beams A105, two mirror bosses 104, four comb beams A106, and a rectangular mirror 101.
[0028] The third potential area includes a front triangular anchor block 208 of the two left triangular anchor blocks 208, a front U-shaped beam D209 of the two left U-shaped beams D209, a front U-shaped beam C205 of the two left U-shaped beams C205, a front L-shaped beam 204 of the two left L-shaped beams 204, a partial area of the comb beam C201 at the left position, a left U-shaped beam B203, a left U-shaped beam A113, a left outer frame boss 112, a partial area of the rectangular outer frame 103, and two rows of left driving comb teeth B111.
[0029] The fourth potential area includes the triangle anchor block 208 located at the rear of the two triangle anchor blocks 208 located at the right, the U-shaped beam D 209 located at the rear of the two U-shaped beams D 209 located at the right, the U-shaped beam C 205 located at the rear of the two U-shaped beams C 205 located at the right, the L-shaped beam 204 located at the rear of the two L-shaped beams 204 located at the right, a partial area of the comb tooth beam C 201 located at the right, the U-shaped beam B 203 located at the right, the U-shaped beam A 113 located at the right, the outer frame boss 112 located at the right, a partial area of the rectangular outer frame 103, and the two rows of driving combs B 111 located at the right.
[0030] The fifth potential area includes the triangle anchor block 208 located at the rear of the two triangle anchor blocks 208 located at the left, the U-shaped beam D 209 located at the rear of the two U-shaped beams D 209 located at the left, the U-shaped beam C 205 located at the rear of the two U-shaped beams C 205 located at the left, the L-shaped beam 204 located at the rear of the two L-shaped beams 204 located at the left, and a partial area of the comb tooth beam C 201 located at the left.
[0031] The sixth potential area includes the triangle anchor block 208 located at the front of the two triangle anchor blocks 208 located at the right, the U-shaped beam D 209 located at the front of the two U-shaped beams D 209 located at the right, the U-shaped beam C 205 located at the front of the two U-shaped beams C 205 located at the right, the L-shaped beam 204 located at the front of the two L-shaped beams 204 located at the right, and a partial area of the comb tooth beam C 201 located at the right.
[0032] The seventh potential area includes the triangle anchor block 208 located at the right of the two triangle anchor blocks 208 located at the rear, the U-shaped beam D 209 located at the right of the two U-shaped beams D 209 located at the rear, the U-shaped beam C 205 located at the right of the two U-shaped beams C 205 located at the rear, the L-shaped beam 204 located at the right of the two L-shaped beams 204 located at the rear, and a partial area of the comb tooth beam C 201 located at the rear.
[0033] The eighth potential area includes the triangle anchor block 208 located at the left of the two triangle anchor blocks 208 located at the front, the U-shaped beam D 209 located at the left of the two U-shaped beams D 209 located at the front, the U-shaped beam C 205 located at the left of the two U-shaped beams C 205 located at the front, the L-shaped beam 204 located at the left of the two L-shaped beams 204 located at the front, and a partial area of the comb tooth beam C 201 located at the front.
[0034] Then, AC power supply A, AC power supply B, DC power supply A, and DC power supply B are selected respectively. The first potential area is grounded. One end of the AC power supply A is grounded, and the other end is connected with the second potential area. The AC power supply B is connected with the third potential area and the fourth potential area respectively. The positive output end (or the negative output end) of the DC power supply A is connected with the fifth potential area, and the negative output end (or the positive output end) of the DC power supply A is connected with the sixth potential area. The positive output end (or the negative output end) of the DC power supply B is connected with the seventh potential area, and the negative output end (or the positive output end) of the DC power supply B is connected with the eighth potential area.
[0035] When the AC power supply A is started, the AC power supply A generates an AC voltage signal, and loads the AC voltage signal to the second potential area. Under the drive of the AC voltage signal, the four comb tooth beams A 106 perform a reciprocating torsional motion around the x axis together, and drive the rectangular mirror surface 101 to perform a reciprocating torsional motion around the x axis. In this process, by regulating the AC voltage signal, the size of the torsional angle can be changed.
[0036] When the AC power supply B is started, the AC power supply B generates two AC voltage signals with the same amplitude, the same frequency and opposite phases, and loads the two AC voltage signals to the third potential area and the fourth potential area respectively. Under the action of the two AC voltage signals, the four comb tooth beams B 110 perform a reciprocating torsional motion around the y axis together, and drive the rectangular inner frame 102 and the rectangular mirror surface 101 to perform a reciprocating torsional motion around the y axis together. In this process, by regulating the two AC voltage signals, the size of the torsional angle can be changed.
[0037] When the DC power supply A is started, the DC power supply A generates a positive voltage signal and a negative voltage signal, and loads the positive voltage signal (or the negative voltage signal) to the fifth potential area, and loads the negative voltage signal (or the positive voltage signal) to the sixth potential area. Under the action of the positive voltage signal (or the negative voltage signal), the comb tooth beam C 201 on the left side moves towards (or away from) the corresponding driving comb tooth C 207. Under the action of the negative voltage signal (or the positive voltage signal), the comb tooth beam C 201 on the right side moves away from (or towards) the corresponding driving comb tooth C 207. Under the drive of the two comb tooth beams C 201, the rectangular outer frame 103, the rectangular inner frame 102 and the rectangular mirror surface 101 move left (or right) together, that is, move along the x axis together. In this process, by regulating the positive voltage signal and the negative voltage signal, the size of the translation can be changed.
[0038] When the direct current power supply B is started, the direct current power supply B generates a positive voltage signal and a negative voltage signal, and loads the positive voltage signal (or the negative voltage signal) to the seventh potential area, and loads the negative voltage signal (or the positive voltage signal) to the eighth potential area. Under the action of the positive voltage signal (or the negative voltage signal), the comb tooth beam C201 at the rear position moves towards (or away from) the corresponding driving comb tooth C207. Under the action of the negative voltage signal (or the positive voltage signal), the comb tooth beam C201 at the front position moves away from (or towards) the corresponding driving comb tooth C207. Under the driving of the two comb tooth beams C201, the rectangular outer frame 103, the rectangular inner frame 102 and the rectangular mirror surface 101 move together backward (or forward), that is, move together along the y-axis. In this process, by adjusting the positive voltage signal and the negative voltage signal, the size of the translation can be changed.
[0039] Both ends of the U-shaped isolation gap 114 penetrate the left inner side surface of the rectangular inner frame 102, and the two penetration positions are located on the front and rear sides of the corresponding straight beam A105.
[0040] The head ends of the two snake-shaped isolation gaps 115 penetrate the right inner side surface of the rectangular inner frame 102, and the two penetration positions are located on the front and rear sides of the corresponding straight beam A105; the tail ends of the two snake-shaped isolation gaps 115 penetrate the front side surface of the inner frame boss 108 at the front position, and the two penetration positions are located on the left and right sides of the corresponding straight beam B109.
[0041] The head ends of the two straight isolation gaps 116 penetrate the front inner side surface of the rectangular outer frame 103, and the two penetration positions are located on the left and right sides of the corresponding straight beam B109; the tail ends of the two straight isolation gaps 116 penetrate the front outer side surface of the rectangular outer frame 103, and the two penetration positions are located on the left and right sides of the corresponding outer frame boss 112; the head ends of the other two straight isolation gaps 116 penetrate the rear inner side surface of the rectangular outer frame 103, and the two penetration positions are located on the left and right sides of the corresponding straight beam B109; the tail ends of the two straight isolation gaps 116 penetrate the rear outer side surface of the rectangular outer frame 103, and the two penetration positions are located on the left and right sides of the corresponding outer frame boss 112.
[0042] The front end of the L-shaped isolation gap 210 in the front position penetrates the back of the corresponding comb tooth beam C201 and the penetration is located at the left side of the corresponding U-shaped beam B203; the tail end of the L-shaped isolation gap 210 penetrates the right side of the corresponding comb tooth beam C201; the front end of the L-shaped isolation gap 210 in the rear position penetrates the back of the corresponding comb tooth beam C201 and the penetration is located at the right side of the corresponding U-shaped beam B203; the tail end of the L-shaped isolation gap 210 penetrates the left side of the corresponding comb tooth beam C201; the front end of the L-shaped isolation gap 210 in the left position penetrates the back of the corresponding comb tooth beam C201 and the penetration is located at the back side of the corresponding U-shaped beam B203; the tail end of the L-shaped isolation gap 210 penetrates the front side of the corresponding comb tooth beam C201; the front end of the L-shaped isolation gap 210 in the right position penetrates the back of the corresponding comb tooth beam C201 and the penetration is located at the front side of the corresponding U-shaped beam B203; the tail end of the L-shaped isolation gap 210 penetrates the back side of the corresponding comb tooth beam C201.
[0043] The upper surface of each rectangular anchor block 206 is fixed with an electric connection pad A211; the upper surface of each triangular anchor block 208 is fixed with an electric connection pad B212.
[0044] In a specific implementation, the rectangular mirror surface 101, the rectangular inner frame 102, the rectangular outer frame 103, the mirror surface boss 104, the straight beam A105, the comb tooth beam A106, the driving comb tooth A107, the inner frame boss 108, the straight beam B109, the comb tooth beam B110, the driving comb tooth B111, the outer frame boss 112, the U-shaped beam A113, the comb tooth beam C201, the U-shaped beam B203, the L-shaped beam 204, the U-shaped beam C205, the rectangular anchor block 206, the driving comb tooth C207, and the triangular anchor block 208 are etched from the silicon structure layer (top layer) of the SOI wafer. The rectangular bottom frame 202 is etched from the silicon dioxide insulating layer (middle layer) and the silicon substrate layer (bottom layer) of the SOI wafer. The upper surface of the rectangular mirror surface 101 is plated with a gold film. The electric connection pad A211 and the electric connection pad B212 are made of gold. The insulating material is benzocyclobutene.
[0045] Although the specific embodiments of the present application are described above, those skilled in the art should understand that these are only illustrative, and the protection scope of the present application is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present application, and these changes and modifications all fall within the protection scope of the present application.
Claims
1. A self-aligned MEMS micromirror based on electrostatic actuation, characterized in that: Includes inner and outer structures; The inner structure includes a rectangular mirror (101), a rectangular inner frame (102) fitted outside the rectangular mirror (101), and a rectangular outer frame (103) fitted outside the rectangular inner frame (102). A mirror protrusion (104) extends from each of the left and right sides of the rectangular mirror (101); a horizontally arranged straight beam A (105) connects each mirror protrusion (104) to the rectangular inner frame (102); two comb beams A (106) extend from the side of each mirror protrusion (104), and the two comb beams A (106) are arranged opposite to each other on the front and back sides of the corresponding straight beam A (105); four rows of driving comb teeth A (107) extend from the inner side of the rectangular inner frame (102), and the four rows of driving comb teeth A (107) and the four comb beams A (106) correspond one-to-one to form four comb capacitors A; An inner frame boss (108) extends from the front and rear outer sides of the rectangular inner frame (102); a longitudinally arranged straight beam B (109) connects each inner frame boss (108) to the rectangular outer frame (103); two comb beams B (110) extend from the side of each inner frame boss (108), and the two comb beams B (110) are arranged opposite to each other on the left and right sides of the corresponding straight beam B (109); four rows of driving comb teeth B (111) extend from the inner side of the rectangular outer frame (103), and the four rows of driving comb teeth B (111) and the four comb beams B (110) correspond one-to-one to form four comb capacitors B; The rectangular outer frame (103) has an outer frame boss (112) extending from each of its front, back, left and right outer sides; each outer frame boss (112) has a notch A on its side; and each notch A has a U-shaped beam A (113) extending from its side. The outer structure includes four comb-tooth beams C (201) and a rectangular bottom frame (202); Each comb beam C (201) has a U-shaped beam B (203) and two L-shaped beams (204) extending from its back side, with the two L-shaped beams (204) positioned opposite each other on both sides of the corresponding U-shaped beam B (203); both ends of each U-shaped beam B (203) extend into the corresponding U-shaped beam A (113) and are fixed to its bottom edge; each L-shaped beam (204) forms a notch B between itself and the corresponding comb beam C (201); and a U-shaped beam C (205) extends from the side of each notch B. A rectangular anchor block (206) is fixed on the upper surface of each frame edge of the rectangular base frame (202); a row of driving comb teeth C (207) is extended from the inner side of each rectangular anchor block (206); the four rows of driving comb teeth C (203) and the four comb tooth beams C (201) correspond one-to-one to form four comb tooth capacitors C; two triangular anchor blocks (208) are fixed on the upper surface of each frame corner of the rectangular base frame (202); a U-shaped beam D (209) is extended from the side of each triangular anchor block (208); both ends of each U-shaped beam D (209) extend into the corresponding U-shaped beam C (205) and are fixed to its bottom edge; A U-shaped isolation gap (114) and two serpentine isolation gaps (115) are provided between the upper and lower surfaces of the rectangular inner frame (102); four straight isolation gaps (116) are provided between the upper and lower surfaces of the rectangular outer frame (103); an L-shaped isolation gap (210) is provided between the upper and lower surfaces of each comb beam C (201); the U-shaped isolation gap (114), the two serpentine isolation gaps (115), the four straight isolation gaps (116), and the four L-shaped isolation gaps (210) are all filled with insulating material.
2. The self-aligned MEMS micromirror based on electrostatic drive according to claim 1, characterized in that: Both ends of the U-shaped isolation gap (114) penetrate the left inner side of the rectangular inner frame (102), and the two penetration points are located on the front and rear sides of the corresponding straight beam A (105).
3. The self-aligned MEMS micromirror based on electrostatic drive according to claim 1, characterized in that: The first ends of the two serpentine isolation gaps (115) both penetrate the right inner side of the rectangular inner frame (102), and the two penetration points are located on the front and rear sides of the corresponding straight beam A (105); the tail ends of the two serpentine isolation gaps (115) both penetrate the front side of the inner frame boss (108) located at the front, and the two penetration points are located on the left and right sides of the corresponding straight beam B (109).
4. The self-aligned MEMS micromirror based on electrostatic drive according to claim 1, characterized in that: The first ends of two straight isolation gaps (116) penetrate the front inner side of the rectangular outer frame (103), and the two penetration points are located on the left and right sides of the corresponding straight beam B (109), respectively; the last ends of the two straight isolation gaps (116) penetrate the front outer side of the rectangular outer frame (103), and the two penetration points are located on the left and right sides of the corresponding outer frame boss (112), respectively; the first ends of the other two straight isolation gaps (116) penetrate the rear inner side of the rectangular outer frame (103), and the two penetration points are located on the left and right sides of the corresponding straight beam B (109), respectively; the last ends of the two straight isolation gaps (116) penetrate the rear outer side of the rectangular outer frame (103), and the two penetration points are located on the left and right sides of the corresponding outer frame boss (112), respectively.
5. A self-aligned MEMS micromirror based on electrostatic drive according to claim 1, characterized in that: The first end of the forward L-shaped isolation gap (210) penetrates the back of the corresponding comb beam C (201), and the penetration point is located on the left side of the corresponding U-shaped beam B (203); the tail end of the L-shaped isolation gap (210) penetrates the right side of the corresponding comb beam C (201); the first end of the rearward L-shaped isolation gap (210) penetrates the back of the corresponding comb beam C (201), and the penetration point is located on the right side of the corresponding U-shaped beam B (203); the tail end of the L-shaped isolation gap (210) penetrates the left side of the corresponding comb beam C (201); The first end of the L-shaped isolation gap (210) located on the left penetrates the back of the corresponding comb beam C (201), and the penetration point is located on the rear side of the corresponding U-shaped beam B (203); the tail end of the L-shaped isolation gap (210) penetrates the front side of the corresponding comb beam C (201); the first end of the L-shaped isolation gap (210) located on the right penetrates the back of the corresponding comb beam C (201), and the penetration point is located on the front side of the corresponding U-shaped beam B (203); the tail end of the L-shaped isolation gap (210) penetrates the rear side of the corresponding comb beam C (201).
6. The self-aligned MEMS micromirror based on electrostatic drive according to claim 1, characterized in that: Each rectangular anchor block (206) has an electrical connection pad A (211) fixed on its upper surface; each triangular anchor block (208) has an electrical connection pad B (212) fixed on its upper surface.