Space inertial sensor amplitude and phase adaptive ac feedback control method and system

Abstract

The application belongs to the field of space inertial sensors, and specifically discloses a space inertial sensor amplitude-phase adaptive AC feedback control method and system. In the method, an AC bias voltage, an AC feedback voltage for controlling translational degrees of freedom and an AC feedback voltage for controlling rotational degrees of freedom are simultaneously applied to the same electrode plate, the three have the same frequency, and instruction force and instruction torque equations are constructed based on this. In the control process, two adjustment methods are adopted: one is to keep the amplitude of the three AC feedback voltages unchanged, and to realize the control target by respectively adjusting the phase difference between the translational degrees of freedom AC feedback voltage and the bias voltage and the phase difference between the rotational degrees of freedom AC feedback voltage and the bias voltage; the other is to fix the phase difference and adjust the amplitude of the feedback voltage to realize the control target. Through the amplitude-phase adaptive AC feedback control of the space inertial sensor, the dynamic range of AC electrostatic control can be effectively expanded, so that the inertial sensor can better adapt to sudden external disturbances.

Description

Technical Field

[0001] This application belongs to the field of space inertial sensors, and more specifically, relates to a method and system for amplitude-phase adaptive AC feedback control of space inertial sensors. Background Technology

[0002] Space inertial sensors are one of the core payloads for space gravitational wave detection. They are mainly used to detect the position information between the satellite platform and the internal test mass and keep it at the nominal position. Their core task is to provide a clean free-fall environment for the internal test mass, so that the test mass can fall freely without being affected by external disturbances, thereby providing a stable inertial reference for gravitational wave detection.

[0003] by x Taking four feedback plates as an example, the feedback voltage of each plate is composed of a sinusoidal (cosine) AC feedback voltage controlling the translational degree of freedom and a sinusoidal (cosine) AC feedback voltage controlling the rotational degree of freedom. In counter-clockwise order, the generalized expression for the feedback voltage of the four plates is:

[0004] (1);

[0005] in, and for x The feedback voltage on the two feedback plates on one side of the direction; and They are respectively x The feedback voltage on the two feedback plates on the other side of the direction; for x The angular frequency of the AC control voltage for translational degrees of freedom. for φ The angular frequency of the AC control voltage for rotational degrees of freedom; Control of the first and second plates x The amplitude of the feedback voltage for the translational degree of freedom. Then the control on the corresponding third and fourth plates x The amplitude of the feedback voltage for the translational degree of freedom; similarly. This indicates that the first and third plates control the inspection quality. φ The amplitude of the feedback voltage for the rotational degree of freedom. This indicates the amplitude of the feedback voltage that controls the rotational degrees of freedom of the second and fourth plates. , , and The magnitude of the feedback voltage is calculated by the controller in the closed-loop system based on the changes in the inspection quality location information. That is, the feedback voltage amplitude is constantly changing. According to the design criteria, the feedback voltage amplitude at the equilibrium position can be calculated to satisfy the expression:

[0006] (2);

[0007] in, for x Directional nominal plate capacitance; for x The directional electrode plate and the balance distance between the inspection quality; for x Half the distance between the centers of the two plates on the same side of the direction; represent x Command force for translational degrees of freedom; Indicates that the plates can provide x The maximum electrostatic force provided by the translational degree of freedom; similarly represent φ The maximum electrostatic torque for the rotational degree of freedom; The representative electrode plate can provide φ The maximum electrostatic torque of the rotational degree of freedom; as shown in the expression, the relationship between the feedback voltage and the command force is nonlinear. Furthermore, since four plates in the same direction simultaneously control two degrees of freedom for quality inspection, different AC feedback control frequencies are required for different degrees of freedom to achieve decoupling. Meanwhile, the control range of this AC feedback control method is relatively limited, and its ability to control inspection quality is limited when faced with sudden external disturbances. In this case, the translational freedom range... With rotational freedom range The expression is as follows:

[0008] (3);

[0009] The subscript 'max' represents the maximum value of the corresponding variable. Generally speaking, it is denoted as 'max'. , Furthermore, the maximum amplitude of the translational degree of freedom feedback voltage and the maximum amplitude of the rotational degree of freedom feedback voltage satisfy the following relationship:

[0010] (4);

[0011] It is the maximum output voltage amplitude of the driving amplifier circuit, which is determined by the circuit structure; when the hardware circuit structure is determined, this value remains unchanged. Therefore, substituting formula (4) into the range formula (3) yields:

[0012] (5);

[0013] It is known from equation (5) that the electrostatic force and the torque range are proportional to the square of the maximum output voltage of the amplification circuit V max , and more precisely linearly related to 1 / 8 of the square V max . Therefore, it is an urgent need to reduce the number of different frequencies required for control as much as possible, while achieving decoupling of different degrees of freedom, effectively simplifying the calculation of feedback voltage instructions, and improving the control range of inertial sensor execution machines. SUMMARY

[0014] In view of the defects of the prior art, the purpose of the present application is to provide a space inertial sensor amplitude and phase adaptive AC feedback control method and system, which aims to solve the problem that in the existing space inertial sensor, the feedback voltage of each plate is composed of a sine (cosine) AC feedback voltage controlling the translational degree of freedom and a sine (cosine) AC feedback voltage controlling the rotational degree of freedom, and the control range of the AC feedback control method is limited, which cannot adapt to sudden external disturbances.

[0015] The first aspect of the present application relates to a space inertial sensor amplitude and phase adaptive AC feedback control method, comprising the following steps:

[0016] Step one: applying a feedback signal containing a first AC voltage, a second AC voltage and a third AC voltage with the same frequency on the same plate; the second AC voltage and the third AC voltage are respectively set with a phase difference relative to the first AC voltage;

[0017] Step two: combining the electrostatic force calculation equation and the feedback signal to construct the translational degree of freedom instruction force equation and the rotational degree of freedom instruction torque equation;

[0018] Step three: based on the translational degree of freedom instruction force equation and the rotational degree of freedom instruction torque equation, adopting the adaptive electrostatic control method of the phase difference of the second AC voltage and the third AC voltage relative to the first AC voltage to realize electrostatic control, or adopting the adaptive electrostatic control method of the amplitude of the second AC voltage and the amplitude of the third AC voltage to realize electrostatic control.

[0019] In some embodiments, the adaptive electrostatic control method of the phase difference of the second AC voltage and the third AC voltage relative to the first AC voltage is specifically:

[0020] When the feedback signal amplitude is constant and the sum of the feedback signals is the maximum output voltage of the driving amplification circuit, the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage are adjusted to realize electrostatic control;

[0021] The adaptive electrostatic control method adopts a second AC voltage amplitude and a third AC voltage amplitude, and specifically comprises the following steps:

[0022] Based on the translational degree of freedom command force equation and the rotational degree of freedom command torque equation, when the first AC voltage is half of the maximum output voltage of the driving amplifier circuit, the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage are fixed, and the electrostatic control is realized by adjusting the second AC voltage and the third AC voltage amplitude.

[0023] In some embodiments, the AC feedback voltage applied to the four electrode plates in the same direction in step one is:

[0024] ;

[0025] The translational degree of freedom command force equation and the rotational degree of freedom command torque equation in step two are:

[0026] ;

[0027] wherein, and are the feedback voltages on the two feedback electrode plates on one side in the same direction; and are the feedback voltages on the two feedback electrode plates on the other side in the same direction; is the first AC voltage amplitude; is the second AC voltage amplitude; is the third AC voltage amplitude; is the angular frequency of the AC feedback control; is time; is the phase difference between the second AC voltage and the first AC voltage; is the phase difference between the third AC voltage and the first AC voltage; the first AC voltage is an AC bias voltage, the second AC voltage is an AC feedback voltage for controlling the translational degree of freedom, and the third AC voltage is an AC feedback voltage for controlling the rotational degree of freedom; is the command force in the translational direction; is the command force in the rotational direction; is the nominal capacitance of the electrode plate; is the balance distance between the electrode plate and the proof mass; is half of the distance between the electrode plates on the same side.

[0028] In some embodiments, under the condition that the feedback signal amplitude is kept unchanged and the sum of the feedback signals is equal to the maximum output voltage of the driving amplifier circuit , when When the translational degree-of-freedom instruction force and the rotational degree-of-freedom instruction torque correspond to the AC electrostatic control range, the phase difference between the first AC voltage and the second AC voltage is

[0029]

[0030] wherein, Vmax is the maximum output voltage of the driving amplification circuit; Vmax is the maximum output voltage of the driving amplification circuit; Vmax is the maximum output voltage of the driving amplification circuit; Vmax is the maximum output voltage of the driving amplification circuit.

[0031] In some embodiments, when the first AC voltage is half of the maximum output voltage of the driving amplification circuit, the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage are fixed, when , and , the AC electrostatic control range corresponding to the translational degree-of-freedom instruction force and the rotational degree-of-freedom instruction torque satisfies:

[0032]

[0033] wherein, Vmax is the maximum output voltage of the driving amplification circuit; Vmax is the maximum output voltage of the driving amplification circuit; Vmax is the maximum output voltage of the driving amplification circuit; Vmax is the maximum output voltage of the driving amplification circuit; Vmax is the maximum output voltage of the driving amplification circuit.

[0034] The second aspect of the present application relates to a spatial inertia sensor amplitude-phase adaptive AC feedback control system, comprising:

[0035] a feedback signal construction module for applying a feedback signal with the same frequency and containing a first AC voltage, a second AC voltage and a third AC voltage on the same electrode plate; the second AC voltage and the third AC voltage are respectively set with a phase difference relative to the first AC voltage;

[0036] an instruction construction module for combining the electrostatic force calculation equation and the feedback signal to construct a translational degree-of-freedom instruction force equation and a rotational degree-of-freedom instruction torque equation;

[0037] an electrostatic control module for adopting an adaptive electrostatic control method of the phase difference between the second AC voltage and the third AC voltage relative to the first AC voltage to realize electrostatic control based on the translational degree-of-freedom instruction force and the rotational degree-of-freedom instruction torque equation, or adopting an adaptive electrostatic control method of the amplitude of the second AC voltage and the amplitude of the third AC voltage to realize electrostatic control.

[0038] ​​In some embodiments, the electrostatic control module comprises: a phase difference adaptive adjustment unit and a feedback signal adjustment unit;

[0039] The phase difference adaptive adjustment unit is used to adjust the phase difference between the second alternating voltage and the first alternating voltage and the phase difference between the third alternating voltage and the first alternating voltage to achieve electrostatic control when the feedback signal amplitude is constant and the sum of the feedback signals is the maximum output voltage of the driving amplification circuit;

[0040] The feedback signal adjustment unit is used to fix the phase difference between the second alternating voltage and the first alternating voltage and the phase difference between the third alternating voltage and the first alternating voltage by adjusting the amplitudes of the second alternating voltage and the third alternating voltage to achieve electrostatic control when the first alternating voltage is half of the maximum output voltage of the driving amplification circuit based on the translational degree of freedom command force equation and the rotational degree of freedom command torque equation.

[0041] In some embodiments, the alternating feedback voltages applied to the four electrode plates in the same direction in the feedback signal construction module are:

[0042] ;

[0043] The translational degree of freedom command force equation and the rotational degree of freedom command torque equation in the command construction module are:

[0044] ;

[0045] wherein, and are the feedback voltages on the two feedback electrode plates on one side of the same direction; and are the feedback voltages on the two feedback electrode plates on the other side of the same direction, respectively; is the amplitude of the first alternating voltage; is the amplitude of the second alternating voltage; is the amplitude of the third alternating voltage; is the angular frequency of the alternating feedback control; is the time; is the phase difference between the second alternating voltage and the first alternating voltage; is the phase difference between the third alternating voltage and the first alternating voltage; the first alternating voltage is an alternating bias voltage, the second alternating voltage is an alternating feedback voltage for controlling the translational degree of freedom, and the third alternating voltage is an alternating feedback voltage for controlling the rotational degree of freedom; is the command force in the translational direction; is the command force in the rotational direction; is the nominal capacitance of the electrode plate; is the balance distance between the electrode plate and the proof mass; is half of the distance between the same side plates.

[0046] In some embodiments, in the phase difference adaptive adjustment unit, under the condition that the amplitude of the feedback signal is kept unchanged and the sum of the feedback signals satisfies the maximum output voltage of the driving amplification circuit , when , the AC electrostatic control range corresponding to the translational degree of freedom instruction force and the rotational degree of freedom instruction torque is:

[0047] ;

[0048] wherein, is the maximum output voltage of the driving amplification circuit; is the AC electrostatic control range corresponding to the translational degree of freedom instruction force; is the AC electrostatic control range corresponding to the rotational degree of freedom instruction force.

[0049] In some embodiments, in the feedback signal adjustment unit, when the first AC voltage is half of the maximum output voltage of the driving amplification circuit, the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage is fixed, when , and , the AC electrostatic control range corresponding to the translational degree of freedom instruction force and the rotational degree of freedom instruction torque satisfies:

[0050] ;

[0051] wherein, is the maximum value of the amplitude of the second AC voltage; is the maximum value of the amplitude of the third AC voltage; is the AC electrostatic control range corresponding to the translational degree of freedom instruction force; is the AC electrostatic control range corresponding to the rotational degree of freedom instruction force.

[0052] In a third aspect, the present application provides an electronic device, comprising: at least one memory for storing a program; and at least one processor for executing the program stored in the memory, wherein when the program stored in the memory is executed, the processor is configured to execute the method described in the first aspect or any possible implementation manner of the first aspect.

[0053] In a fourth aspect, the present application provides a computer readable storage medium, wherein the computer readable storage medium stores a computer program, and when the computer program is run on a processor, the processor is configured to execute the method described in the first aspect or any possible implementation manner of the first aspect.

[0054] In a fifth aspect, the present application provides a computer program product, which, when executed on a processor, causes the processor to perform the method described in the first aspect or any possible implementation manner of the first aspect.

[0055] It can be understood that the beneficial effects of the second aspect to the fifth aspect described above can be referred to the related description in the first aspect, which will not be repeated here.

[0056] Overall, compared with the prior art, the above technical solutions conceived by the present application have the following beneficial effects:

[0057] The present application provides a space inertia sensor amplitude-phase adaptive AC feedback control method, three same-frequency AC feedback voltages are applied on the same polar plate, including an AC bias voltage, an AC feedback voltage of the translational degree of freedom and an AC feedback voltage of the rotational degree of freedom; the phase difference between the translational degree of freedom AC feedback voltage and the bias voltage is introduced in the translational degree of freedom AC feedback voltage; the phase difference between the rotational degree of freedom AC feedback voltage and the bias voltage is introduced in the rotational degree of freedom AC feedback voltage; based on this, the amplitude of the AC feedback voltage is kept unchanged, and the phase difference between the translational degree of freedom AC feedback voltage and the bias voltage and the phase difference between the rotational degree of freedom AC feedback voltage and the bias voltage are adjusted; or the phase difference between the translational degree of freedom AC feedback voltage and the bias voltage and the phase difference between the rotational degree of freedom AC feedback voltage and the bias voltage are kept unchanged, and the amplitude of the AC feedback voltage is adjusted; both ways can realize a larger AC electrostatic control range of the translational degree of freedom command force and the rotational degree of freedom command moment, so that the inertia sensor can better adapt to sudden external disturbances. BRIEF DESCRIPTION OF DRAWINGS

[0058] Figure 1 is an inertia sensor provided by the embodiment of the present application x direction side view.

[0059] Figure 2 is a flow chart of the space inertia sensor amplitude-phase adaptive AC feedback control method provided by the embodiment of the present application.

[0060] Figure 3 is the application manner of the control method on the polar plate provided by the embodiment of the present application.

[0061] Figure 4 (a) is a time-domain closed-loop control curve schematic diagram of the test mass three translational degrees of freedom provided by the embodiment of the present application. x, y, z

[0062] Figure 4 (b) is a time-domain closed-loop control curve schematic diagram of the test mass three rotational degrees of freedom provided by the embodiment of the present application. θ, η, φ DETAILED DESCRIPTION ​​

[0063] In order to make the purposes, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not intended to limit the present application.

[0064] The term "and / or" in the present application is used to describe the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of A alone, A and B together, and B alone. The symbol " / " in the present application represents the relationship of or, for example, A / B represents A or B.

[0065] The terms "first" and "second" and the like in the present application are used to distinguish different objects, not to describe a specific order of the objects.

[0066] The term "electrically connected" in the present application can be direct circuit connection or signal transmission through a communication protocol.

[0067] In the embodiments of the present application, the words such as "exemplary" or "for example" are used to mean an example, illustration or description. Any embodiment or design scheme described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as more preferred or more advantageous than other embodiments or design schemes. Rather, the words such as "exemplary" or "for example" are intended to present the relevant concept in a specific manner.

[0068] In the description of the embodiments of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0069] The embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.

[0070] Embodiment 1

[0071] As shown in Figure 1 , an inertial sensor x direction side view is provided in the present application, four pieces of capacitor plate are distributed around the middle proof mass, which are respectively coded as 1, 2, 3 and 4 in the counterclockwise direction, the distance between the nominal position proof mass and the plate is denoted as , and the center distance between the two plates on the same side is denoted as , The offset amount when the proof mass is in an unbalanced position is marked as x and y are self-defined sensor coordinate directions;

[0072] As shown in Figure 2 , the present application provides a space inertial sensor amplitude-phase adaptive AC feedback control method, which specifically includes the following steps:

[0073] Step 1: With x Taking direction as an example, this method applies three AC feedback voltages of the same frequency to each plate, all with an angular frequency of 100 MHz. To achieve decoupled control of different degrees of freedom in inspection quality, an AC bias voltage is introduced. Its amplitude It can be adjusted according to actual needs, and at the same time x Translational degrees of freedom and Phase quantities are introduced into the AC feedback voltage of the rotational degree of freedom. and More specifically, The phase difference between the AC feedback voltage and the bias voltage for the translational degree of freedom; The phase difference between the AC feedback voltage and the bias voltage for the rotational degree of freedom is expressed mathematically as follows:

[0074] (6);

[0075] in, and for x The feedback voltage on the two feedback plates on one side of the direction; and They are respectively x The feedback voltage on the two feedback plates on the other side of the direction; This refers to the amplitude of the AC bias voltage. To inspect quality x The amplitude of the feedback voltage for the translational degree of freedom; To inspect quality The amplitude of the feedback voltage for the rotational degree of freedom; The angular frequency for AC feedback control; For time;

[0076] Step 2: Obtain the translational force according to the electrostatic force formula. and torque The generalized expression is:

[0077] (7);

[0078] in, This represents the surface potential of the test mass, which is taken here. , They represent x The capacitance of the four capacitor plates at the equilibrium position is... = = = = ,at this time i The value range is 1~4; substituting formula (6) into formula (7) and taking the DC component, the translational degree of freedom command force can be obtained. and rotational degree of freedom command torque The relationship between it and the other variables is as follows:

[0079] (8);

[0080] in, The command force is in the translational direction; The command force is in the direction of rotation; The nominal capacitance of the electrode plate; This is the bias voltage; To inspect quality x The amplitude of the feedback voltage for the translational degree of freedom; The phase difference between the AC feedback voltage and the bias voltage for the translational degree of freedom; This is the balance distance between the electrode plate and the inspection quality; It is half the distance between the centers of the plates on the same side; To inspect quality The amplitude of the feedback voltage for the rotational degree of freedom; The phase difference between the AC feedback voltage and the bias voltage for the rotational degree of freedom;

[0081] Step 3: As Figure 3 As shown, Figure 3 The upper part shows the phase-change control method, and the lower part shows the control method of the linearized actuator. The arrow between the two indicates that the two methods can be converted into each other.

[0082] The following is a categorized discussion:

[0083] (1) When maintaining the amplitude of the three AC voltages on the plates Unchanged, only allowed When the two phase differences change, the right side of formula (8) only shows the phase difference. The cosine value changes with the magnitude of the command force, meaning that AC feedback control of the inspection quality can be achieved by changing the phase, which is different from the previous method of changing the amplitude of the feedback voltage; at the same time, the amplitudes of the three AC voltages in this control method still satisfy the premise relationship:

[0084] (9);

[0085] in, This is the maximum voltage that can be output from a single electrode.

[0086] when Substitute equation (8) into equation (7), it is not difficult to obtain the control method of x degree of freedom and The AC electrostatic control range of

[0087] (10);

[0088] At this time and Take the maximum value 1; compared with equation (5), obviously the control method of the range is doubled, which can effectively improve the ability of inertial sensor to deal with sudden state; at the same time, since the feedback voltage amplitude remains unchanged, the corresponding electrostatic stiffness of the control method is constant, that is:

[0089] (11);

[0090] It means that the command force (torque) and displacement maintain a good linear relationship, which simplifies the design of closed-loop control loop and can effectively improve the response stability of the system at the equilibrium position.

[0091] (2) when keeping change, and , while Remain unchanged, the control method of x degree of freedom and The AC electrostatic control range of

[0092] (12);

[0093] Indicates the absolute value, obviously, when keeping At this time, the control method range can still be greater than the traditional control method, especially when At this time, the range can reach twice that of the traditional control method, that is, the same effect as the variable phase control, that is:

[0094] (13);

[0095] At the same time, this method has another advantage, that is, the linearization of the executor. According to Newton's second law F = ma, divide both sides of equation (8) by the mass of the test mass and the moment of inertia , the expression of the test mass feedback x degree of freedom acceleration and degree of freedom angular acceleration is as follows:

[0096] (14);

[0097] At this time, since the variable on the right side of the equation is only the amplitude of the feedback voltage and , the rest are constants, that is, the feedback acceleration of different degrees of freedom of the test mass is in linear relationship with the amplitude of the feedback voltage, that is, the linearized alternating current feedback execution machine, which is called the sensitivity coefficient, at this time, the feedback acceleration can be represented by the amplitude of the feedback voltage and , that is, when the test mass is stably working at the balance position, the disturbance acceleration of the test mass can be obtained by reading the amplitude of the feedback voltage and calculated by the controller and operating with the rest of the fixed parameters of the inertial sensor.

[0098] FIGS. 4(a) and 4(b) are time-domain variation curves of six degrees of freedom of the test mass under the control of the present application, more specifically, FIG. 4(a) shows the time-domain closed-loop control curves of three degrees of freedom of translation of the test mass x , y , z , and FIG. 4(b) shows the time-domain closed-loop control curves of three degrees of freedom of rotation of the test mass , and the six degrees of freedom can converge to zero position, verifying the feasibility of the control method of the present application.

[0099] In summary, the variable phase control method and the variable amplitude control method proposed can both expand the range of alternating current electrostatic control of the inertial sensor, and the variable amplitude control method can linearize the alternating current execution machine in principle, making the measurement of acceleration simpler.

[0100] Embodiment 2. The following describes a spatial inertial sensor amplitude and phase adaptive alternating current feedback control system provided by the present application, and the spatial inertial sensor amplitude and phase adaptive alternating current feedback control system described below can be correspondingly referred to the spatial inertial sensor amplitude and phase adaptive alternating current feedback control method described above.

[0101] The second aspect of the present application relates to a spatial inertial sensor amplitude and phase adaptive alternating current feedback control system, comprising:

[0102] a feedback signal construction module for applying a feedback signal comprising a first alternating current voltage, a second alternating current voltage and a third alternating current voltage with the same frequency on the same electrode plate; the second alternating current voltage and the third alternating current voltage are respectively provided with a phase difference relative to the first alternating current voltage;

[0103] ​An instruction construction module is configured to construct a translational degree-of-freedom instruction force equation and a rotational degree-of-freedom instruction torque equation in combination with the electrostatic force calculation equation and the feedback signal;

[0104] An electrostatic control module is configured to implement electrostatic control by adopting an adaptive electrostatic control method of a phase difference between the second AC voltage and the third AC voltage relative to the first AC voltage, or by adopting an adaptive electrostatic control method of magnitudes of the second AC voltage and the third AC voltage, based on the translational degree-of-freedom instruction force equation and the rotational degree-of-freedom instruction torque equation.

[0105] In some embodiments, the electrostatic control module comprises a phase difference adaptive adjustment unit and a feedback signal adjustment unit.

[0106] The phase difference adaptive adjustment unit is configured to adjust the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage to implement the electrostatic control when the feedback signal magnitude is unchanged and the sum of the feedback signals is the maximum output voltage of the driving amplification circuit.

[0107] The feedback signal adjustment unit is configured to fix the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage and adjust the magnitudes of the second AC voltage and the third AC voltage to implement the electrostatic control when the first AC voltage is half of the maximum output voltage of the driving amplification circuit, based on the translational degree-of-freedom instruction force equation and the rotational degree-of-freedom instruction torque equation.

[0108] In some embodiments, the AC feedback voltages applied to the four electrode plates in the same direction in the feedback signal construction module are:

[0109] ;

[0110] The translational degree-of-freedom instruction force equation and the rotational degree-of-freedom instruction torque equation in the instruction construction module are:

[0111] ;

[0112] wherein, and are the feedback voltages on the two feedback electrode plates on one side of the same direction; and are the feedback voltages on the two feedback electrode plates on the other side of the same direction; is the magnitude of the first AC voltage; is the magnitude of the second AC voltage; is the magnitude of the third AC voltage; is the angular frequency of the AC feedback control; is time; a phase difference between the second AC voltage and the first AC voltage; a phase difference between the third AC voltage and the first AC voltage; the first AC voltage an AC bias voltage; the second AC voltage an AC feedback voltage for controlling the translational degree of freedom; the third AC voltage an AC feedback voltage for controlling the rotational degree of freedom; a command force in the translational direction; a command force in the rotational direction; a nominal capacitance of the electrode plate; a balance distance between the electrode plate and the proof mass; half of the distance between the electrode plates on the same side.

[0113] In some embodiments, the phase difference self-adapting unit is configured to adaptively adjust the phase difference under the condition that the amplitude of the feedback signal is kept unchanged and the sum of the feedback signals satisfies the maximum output voltage of the driving amplification circuit , and when , the AC electrostatic control range corresponding to the translational degree of freedom command force and the rotational degree of freedom command torque is:

[0114] ;

[0115] wherein, is the maximum output voltage of the driving amplification circuit; is the AC electrostatic control range corresponding to the translational degree of freedom command force; is the AC electrostatic control range corresponding to the rotational degree of freedom command force.

[0116] In some embodiments, the feedback signal adjusting unit is configured to fix the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage unchanged when the first AC voltage is half of the maximum output voltage of the driving amplification circuit, and when , and , the AC electrostatic control range corresponding to the translational degree of freedom command force and the rotational degree of freedom command torque satisfies:

[0117] ;

[0118] wherein, is the AC electrostatic control range corresponding to the translational degree of freedom command force; is the AC electrostatic control range corresponding to the rotational degree of freedom command force.

[0119] It can be understood that the detailed function implementation of each module can be referred to the foregoing description of the method embodiments, which will not be repeated here.

[0120] It should be understood that the above device is used to execute the method in the above embodiment, the corresponding program module in the device, the implementation principle and technical effect are similar to the description in the above method, the working process of the device can refer to the corresponding process in the above method, and details are not described here.

[0121] Based on the method in the above embodiment, the embodiment of the present application provides an electronic device, which can include a processor (Processor), a communication interface (Communications Interface), a memory (Memory) and a communication bus, wherein the processor, the communication interface and the memory complete mutual communication through the communication bus. The processor can call the logical instructions in the memory to execute the method in the above embodiment.

[0122] In addition, the logical instructions in the above memory can be realized in the form of a software functional unit and sold or used as an independent product, and can be stored in a computer readable storage medium. Based on such understanding, the technical solutions of the present application can be embodied in the form of a software product or part of the existing technology, and the computer software product is stored in a storage medium, including a plurality of instructions for making a computer device (which can be a personal computer, a server, or a network device, etc.) execute all or part of the steps of the method described in the embodiments of the present application.

[0123] Based on the method in the above embodiment, the embodiment of the present application provides a computer readable storage medium, and the computer readable storage medium stores a computer program, when the computer program runs on the processor, so that the processor executes the method in the above embodiment.

[0124] Based on the method in the above embodiment, the embodiment of the present application provides a computer program product, when the computer program product runs on the processor, so that the processor executes the method in the above embodiment.

[0125] It can be understood that the processor in the embodiments of the present application can be a central processing unit (CPU), and can also be other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, transistor logic devices, hardware components or any combination thereof. The general-purpose processor can be a microprocessor or any conventional processor.

[0126] The method steps in the embodiments of the present application can be implemented in the form of hardware or by a processor executing software instructions. The software instructions can be composed of corresponding software modules, and the software modules can be stored in a random access memory (RAM), a flash memory, a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically EPROM (EEPROM), a register, a hard disk, a mobile hard disk, a CD-ROM or any other form of storage medium well known in the art. An exemplary storage medium is coupled to the processor, so that the processor can read information from the storage medium and write information to the storage medium. Of course, the storage medium can also be an integral part of the processor. The processor and the storage medium can be located in an ASIC.

[0127] In the above embodiments, all or part of the embodiments can be implemented by software, hardware, firmware or any combination thereof. When implemented by software, all or part of the embodiments can be implemented in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of the present application are generated. The computer can be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions can be stored in or transmitted by a computer readable storage medium. The computer instructions can be transmitted from one website, computer, server or data center to another website, computer, server or data center through a wired (such as coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (such as infrared, wireless, microwave, etc.) manner. The computer readable storage medium can be any available medium accessible by a computer or a data storage device such as a server, data center, etc. integrated with one or more available media. The available media can be a magnetic medium (such as a floppy disk, a hard disk, a magnetic tape), an optical medium (such as a DVD), or a semiconductor medium (such as a solid state disk (SSD)), etc.

[0128] Those skilled in the art easily understand that the above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A method for amplitude-phase adaptive AC feedback control of a space inertial sensor, characterized in that, Includes the following steps: Step 1: Apply feedback signals of the same frequency and containing a first AC voltage, a second AC voltage, and a third AC voltage to the same electrode plate; the second AC voltage and the third AC voltage are respectively set with a phase difference relative to the first AC voltage; wherein, the first AC voltage is an AC bias voltage, the second AC voltage is an AC feedback voltage for controlling the translational degree of freedom, and the third AC voltage is an AC feedback voltage for controlling the rotational degree of freedom. Step 2: Combining the electrostatic force calculation equation and the feedback signal, construct the translational degree of freedom command force equation and the rotational degree of freedom command torque equation; Step 3: Based on the translational degree of freedom command force equation and the rotational degree of freedom command torque equation, adopt an adaptive electrostatic control method based on the phase difference between the second AC voltage and the third AC voltage relative to the first AC voltage to achieve electrostatic control, or adopt an adaptive electrostatic control method based on the amplitude of the second AC voltage and the amplitude of the third AC voltage to achieve electrostatic control. An adaptive electrostatic control method based on the phase difference between the second and third AC voltages relative to the first AC voltage is adopted, specifically as follows: When the amplitude of the feedback signal remains constant and the sum of the feedback signals is equal to the maximum output voltage of the drive amplifier circuit, electrostatic control is achieved by adjusting the phase difference between the second AC voltage and the first AC voltage, as well as the phase difference between the third AC voltage and the first AC voltage. An adaptive electrostatic control method using the second and third AC voltage amplitudes is adopted, specifically as follows: Based on the translational degree of freedom command force equation and the rotational degree of freedom command torque equation, when the first AC voltage is half of the maximum output voltage of the drive amplifier circuit, the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage are fixed, and electrostatic control is achieved by adjusting the amplitude of the second AC voltage and the third AC voltage.

2. The space inertial sensor amplitude-phase adaptive AC feedback control method according to claim 1, characterized in that, The AC feedback voltage applied to the four plates in the same direction in step one is: ； The equations for the commanded force in translational freedom and the equations for the commanded torque in rotational freedom in step two are as follows: ； in, and The feedback voltage is on two feedback plates on one side of the same direction. and These are the feedback voltages on the two feedback plates on the opposite side of the same direction; This is the amplitude of the first AC voltage. This is the amplitude of the second AC voltage; This is the third AC voltage amplitude; The angular frequency for AC feedback control; For time; The phase difference between the second AC voltage and the first AC voltage; This is the phase difference between the third AC voltage and the first AC voltage; The command force is in the translational direction; The command force is in the direction of rotation; The nominal capacitance of the electrode plate; This is the balance distance between the electrode plate and the inspection quality; It is half the distance between the plates on the same side.

3. The space inertial sensor amplitude-phase adaptive AC feedback control method according to claim 2, characterized in that, While keeping the amplitude of the feedback signal constant and ensuring that the sum of the feedback signals drives the amplifier circuit to its maximum output voltage. Under the condition that, when At that time, the AC electrostatic control ranges corresponding to the translational degree of freedom command force and the rotational degree of freedom command torque are: ； in, To drive the amplifier circuit to its maximum output voltage; The AC electrostatic control range corresponding to the translational degree of freedom command force; The range of AC electrostatic control corresponding to the command force for the rotational degree of freedom.

4. The space inertial sensor amplitude-phase adaptive AC feedback control method according to claim 2, characterized in that, When the first AC voltage is half of the maximum output voltage of the drive amplifier circuit, the phase difference between the second AC voltage and the first AC voltage is fixed. and the phase difference between the third AC voltage and the first AC voltage Unchanged, when ,and At that time, the AC electrostatic control ranges corresponding to the translational degree of freedom command force and the rotational degree of freedom command torque satisfy: ； in, This is the maximum value of the second AC voltage amplitude; This represents the maximum value of the third AC voltage amplitude. The AC electrostatic control range corresponding to the translational degree of freedom command force; The range of AC electrostatic control corresponding to the command force for the rotational degree of freedom.

5. A space inertial sensor amplitude-phase adaptive AC feedback control system, characterized in that, include: The feedback signal construction module is used to apply feedback signals with the same frequency and containing a first AC voltage, a second AC voltage, and a third AC voltage on the same electrode plate; the second AC voltage and the third AC voltage are respectively set with a phase difference relative to the first AC voltage; wherein, the first AC voltage is an AC bias voltage, the second AC voltage is an AC feedback voltage for controlling the translational degree of freedom, and the third AC voltage is an AC feedback voltage for controlling the rotational degree of freedom. The instruction construction module is used to combine the electrostatic force calculation equation and the feedback signal to construct the translational degree of freedom instruction force equation and the rotational degree of freedom instruction torque equation; The electrostatic control module is used to achieve electrostatic control based on the translational degree of freedom command force equation and the rotational degree of freedom command torque equation, by adopting an adaptive electrostatic control method based on the phase difference between the second AC voltage and the third AC voltage relative to the first AC voltage, or by adopting an adaptive electrostatic control method based on the amplitude of the second AC voltage and the amplitude of the third AC voltage. The electrostatic control module includes: a phase difference adaptive adjustment unit and a feedback signal adjustment unit; The phase difference adaptive adjustment unit is used to achieve electrostatic control by adjusting the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage when the amplitude of the feedback signal remains unchanged and the sum of the feedback signals is equal to the maximum output voltage of the drive amplifier circuit. The feedback signal adjustment unit is used to fix the phase difference between the second AC voltage and the first AC voltage and the phase difference between the third AC voltage and the first AC voltage based on the translational degree of freedom command force equation and the rotational degree of freedom command torque equation. When the first AC voltage is half of the maximum output voltage of the drive amplifier circuit, the unit adjusts the amplitude of the second AC voltage and the third AC voltage to achieve electrostatic control.

6. The space inertial sensor amplitude-phase adaptive AC feedback control system according to claim 5, characterized in that, The AC feedback voltage applied to the four plates in the same direction in the feedback signal construction module is: ； The force equations for translational degrees of freedom and the torque equations for rotational degrees of freedom in the instruction construction module are as follows: ； in, and The feedback voltage is on two feedback plates on one side of the same direction. and These are the feedback voltages on the two feedback plates on the opposite side of the same direction; This is the amplitude of the first AC voltage. This is the amplitude of the second AC voltage; This is the third AC voltage amplitude; The angular frequency for AC feedback control; For time; The phase difference between the second AC voltage and the first AC voltage; This is the phase difference between the third AC voltage and the first AC voltage; The command force is in the translational direction; The command force is in the direction of rotation; The nominal capacitance of the electrode plate; This is the balance distance between the electrode plate and the inspection quality; It is half the distance between the plates on the same side.

7. The space inertial sensor amplitude-phase adaptive AC feedback control system according to claim 6, characterized in that, In the phase difference adaptive adjustment unit, the feedback signal amplitude remains constant while satisfying the condition that the sum of the feedback signals drives the maximum output voltage of the amplifier circuit. Under the condition that, when At that time, the AC electrostatic control ranges corresponding to the translational degree of freedom command force and the rotational degree of freedom command torque are: ； in, To drive the amplifier circuit to its maximum output voltage; The AC electrostatic control range corresponding to the translational degree of freedom command force; The range of AC electrostatic control corresponding to the command force for the rotational degree of freedom.

8. The space inertial sensor amplitude-phase adaptive AC feedback control system according to claim 6, characterized in that, In the feedback signal conditioning unit, when the first AC voltage is half of the maximum output voltage of the drive amplifier circuit, the phase difference between the second AC voltage and the first AC voltage is fixed. and the phase difference between the third AC voltage and the first AC voltage Unchanged, when ,and At that time, the AC electrostatic control ranges corresponding to the translational degree of freedom command force and the rotational degree of freedom command torque satisfy: ； in, This is the maximum value of the second AC voltage amplitude; This represents the maximum value of the third AC voltage amplitude. The AC electrostatic control range corresponding to the translational degree of freedom command force; The range of AC electrostatic control corresponding to the command force for the rotational degree of freedom.

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