A magnetic field polarity monitoring system applied to a plasma etching machine

Abstract

The application provides a magnetic field polarity monitoring system applied to a plasma etching machine, relates to the technical field of magnetic field polarity monitoring, and is used for monitoring whether the magnetic field polarity is successfully switched. The magnetic field polarity monitoring system comprises a controller, a coil and a constant current source device. The controller is configured to send a magnetic field polarity switching instruction to a power output circuit. The power output circuit is configured to output a target driving signal to the coil. The coil is configured to switch the magnetic field polarity in an etching cavity in response to the target driving signal. A polarity monitoring circuit is configured to monitor the target driving signal output by the power output circuit and feed back a magnetic field polarity switching result to the controller according to the target driving signal and the magnetic field polarity switching instruction. The application can realize active monitoring of the magnetic field polarity output by the constant current source device by adding the polarity monitoring circuit, improve the accuracy of the constant current source device output, improve the working efficiency of the coil, and improve the safety of the constant current source device and the coil operation.

Description

Technical Field

[0001] This invention relates to the field of current polarity monitoring technology, specifically to a magnetic field polarity monitoring system applied to a plasma etching machine. Background Technology

[0002] During the wafer etching process, a constant current source device provides a continuous and stable driving current to the coil of the etching cavity to drive the coil to generate a specific magnetic field. The magnetic field guides the ion beam to bombard the surface of the wafer, thereby completing the wafer etching operation.

[0003] The existing coil magnetic field direction switching process has the following drawbacks: after the controller issues the magnetic field direction switching command, the controller cannot obtain the magnetic field direction status after the switch in a timely manner, that is, it cannot confirm whether the magnetic field polarity has been successfully switched. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a magnetic field polarity monitoring system for plasma etching machines. By adding a polarity monitoring circuit, the polarity of the output magnetic field of the constant current source device can be actively monitored, which improves the accuracy of the constant current source device output, increases the working efficiency of the focusing coil, and also enhances the safety of the constant current source device and the focusing coil operation.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] Firstly, in a first aspect, this application provides a magnetic field polarity monitoring system for use in a plasma etching machine. The plasma etching machine includes an etching cavity, and the magnetic field polarity monitoring system includes: a controller, a coil, and a constant current source device. The constant current source device includes a power output circuit and a polarity monitoring circuit. The controller, the power output circuit, and the polarity monitoring circuit are electrically connected to each other, and the power output circuit is electrically connected to the coil.

[0007] The controller is configured to send a magnetic field polarity switching command to the power output circuit;

[0008] The power output circuit is configured to output a target drive signal to the coil according to the magnetic field polarity switching command;

[0009] The coil is disposed outside the etching cavity and electrically connected to the power output circuit. It is configured to switch the magnetic field polarity within the etching cavity in response to the target driving signal.

[0010] The polarity monitoring circuit is configured to monitor the target drive signal output by the power output circuit;

[0011] The polarity monitoring circuit is also configured to feed back the magnetic field polarity switching result to the controller based on the target drive signal and the magnetic field polarity switching command.

[0012] In some embodiments of this application, the power output circuit includes:

[0013] The system includes a polarity switching module, a power output module, and a relay drive module. The polarity switching module is electrically connected to both the power output module and the relay drive module. The relay drive module is electrically connected to the controller. The polarity switching module is electrically connected to the coil.

[0014] The relay drive module is configured to generate a relay drive signal according to the magnetic field polarity switching command received from the controller, and send it to the polarity switching module.

[0015] The polarity switching module is configured to switch the power supply line according to the relay drive signal;

[0016] The power output module is configured to output a target drive signal to the coil based on the switched power supply line.

[0017] In some embodiments of this application, the polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target driving signal and the magnetic field polarity switching command, including:

[0018] The polarity monitoring circuit is further configured to: if the relay drive signal is acquired, detect whether the target drive signal has undergone a potential change;

[0019] If the target drive signal undergoes a potential change, then the presence of a constant output current in the power output module is detected.

[0020] If the power output module has a constant output current, it will send feedback to the controller that the magnetic field polarity switching was successful.

[0021] In some embodiments of this application, the polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target driving signal and the magnetic field polarity switching command, and further includes:

[0022] If the relay drive signal is not received, it is determined that the magnetic field polarity switching has failed, and the relay drive module is reported as faulty to the controller.

[0023] If the target driving signal does not change in potential, it is determined that the magnetic field polarity switching has failed, and the controller is informed of the polarity switching module failure.

[0024] If the power output module does not output current, it is determined that the magnetic field polarity switching has failed, and the power output module fault is reported to the controller.

[0025] In some embodiments of this application, the polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target driving signal and the magnetic field polarity switching command, including:

[0026] The polarity monitoring circuit is further configured to: acquire the polarity of the target driving signal and the polarity of the magnetic field polarity switching command;

[0027] Determine whether the polarity of the target driving signal is consistent with the polarity of the magnetic field polarity switching command;

[0028] If they match, the controller is informed that the magnetic field polarity switch was successful.

[0029] If there is a discrepancy, the controller will be notified of a failure to switch the magnetic field polarity.

[0030] In some embodiments of this application, the relay drive module includes:

[0031] The system comprises a first amplifying resistor RA1, a second amplifying resistor RA2, a third amplifying resistor RA3, a fourth amplifying resistor RA4, a first capacitor CA1, a first MOSFET QA1, and a second MOSFET QA2. The first terminal of the first amplifying resistor RA1 is connected to the first terminal of the second amplifying resistor RA2 and the gate of the first MOSFET QA1. The second terminal of the first amplifying resistor RA1 is electrically connected to the signal input terminal. The second terminal of the second amplifying resistor RA2 and the source of the first MOSFET QA1 are grounded. The drain of the first MOSFET QA1 is connected to the gate of the second MOSFET QA2 and the first terminal of the third amplifying resistor RA3. The drain of the second MOSFET QA2 and the second terminal of the third amplifying resistor RA3 are connected to a first power supply. The source of the second MOSFET QA2 is connected to the first terminal of the fourth amplifying resistor RA4. The second terminal of the fourth amplifying resistor RA4 is connected to the first terminal of the first capacitor CA1 and the signal output terminal. The second terminal of the first capacitor CA1 is grounded.

[0032] In some embodiments of this application, the relay drive module includes:

[0033] The system comprises a first amplifying capacitor CB1, a first amplifying resistor RB1, a second amplifying resistor RB2, a third amplifying resistor RB3, a fourth amplifying resistor RB4, a fifth amplifying resistor RB5, a sixth amplifying resistor RB6, a seventh amplifying resistor RB7, a first MOSFET QB1, and a second MOSFET QB2. The first terminal of the first amplifying resistor RB1 is connected to the first terminal of the second amplifying resistor RB2 and its signal input terminal. The second terminal of the second amplifying resistor RB2 is connected to the first terminal of the third amplifying resistor RB3 and the gate of the first MOSFET QB1. The drain of the first MOSFET QB1 is connected to the first terminal of the fourth amplifying resistor RB4. The second terminal of the fourth amplifying resistor RB4 is connected to the gate of the fifth amplifying resistor RB7. The first terminal of resistor RB5 is connected to the gate of the second MOSFET QB2. The source of the second MOSFET QB2 is connected to the first terminal of the sixth amplifying resistor RB6. The second terminal of the sixth amplifying resistor RB6 is connected to the second terminal of the fifth amplifying resistor RB5 and connected to the first power supply. The drain of the second MOSFET QB2 is connected to the first terminal of the seventh amplifying resistor RB7. The second terminal of the seventh amplifying resistor RB7 is connected to the first terminal and the signal output terminal of the first amplifying capacitor CB1. The second terminal of the first amplifying capacitor CB1, the source of the first MOSFET QB1, the second terminal of the first amplifying resistor RB1, and the second terminal of the third amplifying resistor RB3 are respectively grounded.

[0034] In some embodiments of this application, the polarity switching module includes:

[0035] The system comprises a first relay K1, a first freewheeling diode D1, a second relay K2, and a second freewheeling diode D2. The first relay K1 includes a first actuator and a first relay coil, which are coupled together. The second relay K2 includes a second actuator and a second relay coil, which are coupled together. The first end of the first relay coil and the first end of the second relay coil are respectively grounded. The first freewheeling diode D1 is connected in parallel across the two ends of the first relay coil, and the second freewheeling diode D2 is connected in parallel across the two ends of the second relay coil.

[0036] The second end of the first relay coil and the second end of the second relay coil are connected to the relay drive module;

[0037] The first end of the first actuator is connected to the first output end of the power output module, the second end of the first actuator is connected to the first end of the coil, the third end of the first actuator is connected to the second end of the coil, the first end of the second actuator is connected to the second output end of the power output module, the second end of the second actuator is connected to the second end of the coil, and the third end of the second actuator is connected to the first end of the coil.

[0038] In some embodiments of this application, the polarity monitoring circuit includes:

[0039] First processing unit U1, first monitoring resistor RC1, second monitoring resistor RC2, third monitoring resistor RC3, fourth monitoring resistor RC4, fifth monitoring resistor RC5, sixth monitoring resistor RC6, seventh monitoring resistor RC7, first monitoring capacitor CC1, second monitoring capacitor CC2;

[0040] The first end of the first monitoring resistor RC1 is connected to the first end of the second monitoring resistor RC2 and the first end of the fourth monitoring resistor RC4. The second end of the second monitoring resistor RC2 is connected to the first end of the third monitoring resistor RC3 and the first end of the fifth monitoring resistor RC5. The second end of the fourth monitoring resistor RC4 is connected to the first input terminal of the first processing unit U1. The second end of the fifth monitoring resistor RC5 is connected to the second input terminal of the first processing unit U1 and the first end of the sixth monitoring resistor RC6. The second end of the sixth monitoring resistor RC6 is connected to the first end of the seventh monitoring resistor RC7 and the first output terminal of the first processing unit U1. The second end of the seventh monitoring resistor RC7 is connected to the first end and the polarized output terminal of the first monitoring capacitor CC1. The second end of the first monitoring capacitor CC1 is grounded. The first power supply terminal of the first processing unit U1 is grounded. The second power supply terminal of the first processing unit U1 is connected to the second monitoring capacitor CC2, the first power supply, and the second power supply. The second end of the first monitoring capacitor CC1 is grounded.

[0041] The second end of the first monitoring resistor RC1 and the second end of the second monitoring resistor RC2 are respectively connected to the two output ports of the power output circuit.

[0042] In some embodiments of this application, the controller is further configured to:

[0043] Obtain the magnetic field polarity switching result fed back by the polarity monitoring circuit;

[0044] If the magnetic field polarity switching result is a successful magnetic field polarity switching, then a command to maintain the current output is sent to the power output circuit.

[0045] If the magnetic field polarity switching result is a failure, a stop power output command is sent to the power output circuit and an alarm is triggered.

[0046] This application provides a magnetic field polarity monitoring system for a plasma etching machine. The plasma etching machine includes an etching cavity. The magnetic field polarity monitoring system includes a controller, a coil, and a constant current source device. The constant current source device includes a power output circuit and a polarity monitoring circuit. The controller, the power output circuit, and the polarity monitoring circuit are electrically connected to each other. The power output circuit is electrically connected to the coil. The controller is configured to send a magnetic field polarity switching command to the power output circuit. The power output circuit is configured to output a target drive signal to the coil according to preset etching process parameters and the magnetic field polarity switching command. The coil is disposed outside the etching cavity and electrically connected to the power output circuit. It is configured to switch the magnetic field polarity within the etching cavity in response to the target drive signal. The polarity monitoring circuit is configured to monitor the target drive signal output by the power output circuit. The polarity monitoring circuit is also configured to feed back the magnetic field polarity switching result to the controller according to the target drive signal and the magnetic field polarity switching command. In this embodiment, a polarity monitoring circuit is added, configured to monitor the target drive signal output by the power supply output circuit. This circuit outputs the target drive signal to the coil according to preset etching process parameters and the magnetic field polarity switching command. It is also configured to feed back the magnetic field polarity switching result to the controller based on the target drive signal and the magnetic field polarity switching command. By adding the polarity monitoring circuit, active monitoring of the magnetic field polarity output by the constant current source device can be achieved, improving the accuracy of the constant current source device output, increasing the working efficiency of the coil, and enhancing the safety of the constant current source device and coil operation. Attached Figure Description

[0047] Figure 1 This is a schematic diagram of an embodiment of the magnetic field polarity monitoring system applied to a plasma etching machine in this application.

[0048] Figure 2 This is a schematic diagram of another embodiment of the magnetic field polarity monitoring system applied to a plasma etching machine in this application.

[0049] Figure 3 This is a schematic diagram of one embodiment of the relay drive module in this application;

[0050] Figure 4 This is a schematic diagram of another embodiment of the relay drive module in this application;

[0051] Figure 5 This is a schematic diagram of one embodiment of the polarity switching module in this application;

[0052] Figure 6 This is a schematic diagram of one embodiment of the polarity monitoring circuit in this application. Detailed Implementation

[0053] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0054] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0055] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0056] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0057] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0058] This application provides a magnetic field polarity monitoring system for a plasma etching machine, the plasma etching machine including an etching cavity, such as... Figure 1As shown, the magnetic field polarity monitoring system includes: a controller, a coil, and a constant current source device. The constant current source device includes a power output circuit and a polarity monitoring circuit. The controller, the power output circuit, and the polarity monitoring circuit are electrically connected to each other, and the power output circuit is electrically connected to the coil.

[0059] The controller is configured to send a magnetic field polarity switching command to the power output circuit; the power output circuit is configured to output a target drive signal to the coil according to the magnetic field polarity switching command; the coil, disposed outside the etching cavity and electrically connected to the power output circuit, is configured to switch the magnetic field polarity within the etching cavity in response to the target drive signal; the polarity monitoring circuit is configured to monitor the target drive signal output by the power output circuit; the polarity monitoring circuit is also configured to feed back the magnetic field polarity switching result to the controller according to the target drive signal and the magnetic field polarity switching command.

[0060] Generally, after issuing a magnetic field polarity switching command, the controller cannot confirm whether the magnetic field polarity switching of the constant current source device is successful. If the constant current source device automatically switches the magnetic field polarity due to a fault in its own relay switch, the controller cannot obtain the status of the magnetic field polarity change of the constant current source device in a timely manner. At the same time, the existing monitoring method is to monitor whether the signal transmitting end sends a magnetic field polarity switching command, or only send a magnetic field polarity switching command, without monitoring whether the magnetic field polarity switching is successful.

[0061] In this embodiment, a polarity monitoring circuit is added, which is configured to monitor the target drive signal output by the power supply output circuit. This signal is used to output the target drive signal to the coil according to the magnetic field polarity switching command. The circuit is also configured to feed back the magnetic field polarity switching result to the controller based on the target drive signal and the magnetic field polarity switching command. By adding the polarity monitoring circuit, the active monitoring of the magnetic field polarity output by the constant current source device can be realized, which improves the accuracy of the constant current source device output, improves the working efficiency of the focusing coil, and also improves the safety of the constant current source device and the focusing coil operation.

[0062] The power output circuit is configured to output a target drive signal to the coil according to the magnetic field polarity switching command. Alternatively, the power output circuit can be configured to output a target drive signal to the coil according to preset etching process parameters and the magnetic field polarity switching command. The preset etching process parameters may include the output current intensity and the output current polarity.

[0063] In this embodiment, the coil can be a focusing coil, which is an electronic component used to generate a strong magnetic field. It contains multiple coils and can generate a magnetic field by changing the magnitude and direction of the current. When the current inside the focusing coil changes, a changing magnetic field is generated.

[0064] like Figure 2 As shown, in some embodiments of this application, the power output circuit may further include: a polarity switching module, a power output module, and a relay drive module, wherein the polarity switching module is electrically connected to the power output module and the relay drive module respectively, the relay drive module is electrically connected to the controller, and the polarity switching module is electrically connected to the coil; the relay drive module is configured to generate a relay drive signal according to the magnetic field polarity switching command received from the controller, and send it to the polarity switching module; the polarity switching module is configured to switch the power supply line according to the relay drive signal; and the power output module is configured to output a target drive signal to the coil based on the switched power supply line.

[0065] In some embodiments of this application, the polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target driving signal and the magnetic field polarity switching command. This may further include: the polarity monitoring circuit is also configured to: if a relay driving signal is obtained, detect whether the target driving signal has undergone a potential change; if the target driving signal has undergone a potential change, detect whether the power output module has a constant output current; if the power output module has a constant output current, feed back to the controller that the magnetic field polarity switching was successful.

[0066] In some embodiments of this application, the polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target driving signal and the magnetic field polarity switching command. It may further include: if no relay driving signal is obtained, determining that the magnetic field polarity switching has failed, and feeding back a fault report to the controller regarding the relay driving module; if no potential change occurs in the target driving signal, determining that the magnetic field polarity switching has failed, and feeding back a fault report to the controller regarding the polarity switching module; if the power output module has no output current, determining that the magnetic field polarity switching has failed, and feeding back a fault report to the controller regarding the power output module.

[0067] In some embodiments of this application, the polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target driving signal and the magnetic field polarity switching command. This may further include: the polarity monitoring circuit is also configured to: acquire the polarity of the target driving signal and the polarity of the magnetic field polarity switching command; determine whether the polarity of the target driving signal is consistent with the polarity of the magnetic field polarity switching command; if consistent, feed back to the controller that the magnetic field polarity switching was successful; if inconsistent, feed back to the controller that the magnetic field polarity switching failed.

[0068] In this application embodiment, the driver module can be implemented in multiple ways, which are illustrated below:

[0069] like Figure 3 As shown in some embodiments of this application, the relay driving module may further include: a first amplifying resistor RA1, a second amplifying resistor RA2, a third amplifying resistor RA3, a fourth amplifying resistor RA4, a first capacitor CA1, a first MOSFET QA1, and a second MOSFET QA2. The first end of the first amplifying resistor RA1 is connected to the first end of the second amplifying resistor RA2 and the gate of the first MOSFET QA1. The second end of the first amplifying resistor RA1 is electrically connected to the signal input terminal. The second end of the second amplifying resistor RA2 and the source of the first MOSFET QA1 are grounded. The drain of the first MOSFET QA1 is connected to the gate of the second MOSFET QA2 and the first end of the third amplifying resistor RA3. The drain of the second MOSFET QA2 and the second end of the third amplifying resistor RA3 are connected to a first power supply. The source of the second MOSFET QA2 is connected to the first end of the fourth amplifying resistor RA4. The second end of the fourth amplifying resistor RA4 is connected to the first end of the first capacitor CA1 and the signal output terminal. The second end of the first capacitor CA1 is grounded.

[0070] like Figure 4 As shown, in some other embodiments of this application, the relay drive module may include: a first amplifying capacitor CB1, a first amplifying resistor RB1, a second amplifying resistor RB2, a third amplifying resistor RB3, a fourth amplifying resistor RB4, a fifth amplifying resistor RB5, a sixth amplifying resistor RB6, a seventh amplifying resistor RB7, a first MOSFET QB1, and a second MOSFET QB2. The first terminal of the first amplifying resistor RB1 is connected to the first terminal and signal input terminal of the second amplifying resistor RB2. The second terminal of the second amplifying resistor RB2 is connected to the first terminal and gate of the first MOSFET QB1. The drain of the first MOSFET QB1 is connected to the first terminal of the fourth amplifying resistor RB4. The fourth amplifying resistor RB5... The second terminal of B4 is connected to the first terminal of the fifth amplifying resistor RB5 and the gate of the second MOS transistor QB2. The source of the second MOS transistor QB2 is connected to the first terminal of the sixth amplifying resistor RB6. The second terminal of the sixth amplifying resistor RB6 is connected to the second terminal of the fifth amplifying resistor RB5 and connected to the first power supply. The drain of the second MOS transistor QB2 is connected to the first terminal of the seventh amplifying resistor RB7. The second terminal of the seventh amplifying resistor RB7 is connected to the first terminal of the first amplifying capacitor CB1 and the signal output terminal. The second terminal of the first amplifying capacitor CB1, the source of the first MOS transistor QB1, the second terminal of the first amplifying resistor RB1, and the second terminal of the third amplifying resistor RB3 are respectively grounded.

[0071] like Figure 5As shown, in some embodiments of this application, the polarity switching module may further include:

[0072] The system comprises a first relay K1, a first freewheeling diode D1, a second relay K2, and a second freewheeling diode D2. The first relay K1 includes a first actuator and a first relay coil, which are coupled together. The second relay K2 includes a second actuator and a second relay coil, which are coupled together. The first end of the first relay coil and the first end of the second relay coil are respectively grounded. The first freewheeling diode D1 is connected in parallel across the two ends of the first relay coil, and the second freewheeling diode D2 is connected in parallel across the two ends of the second relay coil.

[0073] The second end of the first relay coil and the second end of the second relay coil are connected to the relay drive module; the first end of the first actuator is connected to the first output end of the power output module, the second end of the first actuator is connected to the first end of the coil, the third end of the first actuator is connected to the second end of the coil, the first end of the second actuator is connected to the second output end of the power output module, the second end of the second actuator is connected to the second end of the coil, and the third end of the second actuator is connected to the first end of the coil.

[0074] Figure 5 In the process, the polarity switching module may also include a terminal block J3. One pin of the terminal block J3 is connected to one end of the fuse F2, and the other end of the fuse F2 is connected to the first power supply V1 (such as a 24V power supply). The fuse is equivalent to a circuit breaker, and its core function is overload protection. That is, when an abnormal overcurrent (such as a short circuit or overload) occurs in the circuit, it breaks the circuit by melting itself, protecting subsequent components and equipment from damage. Its working principle is based on Joule's law. When the current exceeds the rated value, the fuse generates a lot of heat due to resistance, causing the low melting point material to melt and thus blocking the current.

[0075] It should be noted that the first relay K1 and the second relay K2 are related to... Figure 4 The relay drive circuit is connected to receive and execute the magnetic field polarity switching. When it is necessary to switch the output magnetic field polarity, the first relay K1 and the second relay K2 are energized to generate a magnetic field that attracts the first actuator and the second actuator, respectively connecting the switches 1 and 3 of the first actuator and the second actuator to complete the output magnetic polarity switching.

[0076] It should be noted that the first resistor RD1 is a sampling resistor, and it is electrically connected between the current loops of the power output module and the polarity switching module. The first end of the seventh resistor RD7 is electrically connected to the first end of the first resistor RD1. The first end of the sixth resistor RD6 is electrically connected to the second end of the first resistor RD1. The second end of the seventh resistor RD7 is electrically connected to the first ends of the fourth capacitor CD4 and the fourth resistor RD4, respectively. The second end of the sixth resistor RD6 is electrically connected to the second ends of the fourth capacitor CD4 and the first end of the fifth resistor RD5, respectively. The second end of the fourth resistor RD4 is electrically connected to the fourth input terminal of the operational amplifier and the first end of the third capacitor CD3, respectively. The second end of the fifth resistor RD5 is electrically connected to the first input terminal of the operational amplifier and the second end of the third capacitor CD3, respectively. The third resistor RD3 is electrically connected between the second and third input terminals of the operational amplifier. The seventh output terminal of the operational amplifier is electrically connected to the first end of the second resistor RD2. The second end of the second resistor RD2 is electrically connected to the first end of the first capacitor CD1. The second end of the first capacitor CD1 is grounded. The positive terminal of the operational amplifier's power supply is electrically connected to the first end of the second capacitor CD2 and is subjected to a preset voltage value. The second end of the second capacitor CD2 is grounded. The drive current is transmitted to the polarity switching module through the first resistor RD1. The voltage across the first resistor RD1 is applied to the operational amplifier through the sixth resistor RD6, the seventh resistor RD7, the fourth resistor RD4, and the fifth resistor RD5. The operational amplifier amplifies the voltage across the first resistor RD1 to obtain the sampling voltage, which is the output voltage data of the constant current source device.

[0077] like Figure 6As shown in some embodiments of this application, the polarity monitoring circuit may further include: a first processing unit U1, a first monitoring resistor RC1, a second monitoring resistor RC2, a third monitoring resistor RC3, a fourth monitoring resistor RC4, a fifth monitoring resistor RC5, a sixth monitoring resistor RC6, a seventh monitoring resistor RC7, a first monitoring capacitor CC1, and a second monitoring capacitor CC2; the first terminal of the first monitoring resistor RC1 is connected to the first terminal of the second monitoring resistor RC2 and the first terminal of the fourth monitoring resistor RC4; the second terminal of the second monitoring resistor RC2 is connected to the first terminal of the third monitoring resistor RC3 and the first terminal of the fifth monitoring resistor RC5; the second terminal of the fourth monitoring resistor RC4 is connected to the first input terminal of the first processing unit U1; and the fifth monitoring resistor RC5... The second terminal is connected to the second input terminal of the first processing unit U1 and the first terminal of the sixth monitoring resistor RC6. The second terminal of the sixth monitoring resistor RC6 is connected to the first terminal of the seventh monitoring resistor RC7 and the first output terminal of the first processing unit U1. The second terminal of the seventh monitoring resistor RC7 is connected to the first terminal and the polarized output terminal of the first monitoring capacitor CC1. The second terminal of the first monitoring capacitor CC1 is grounded. The first power supply terminal of the first processing unit U1 is grounded. The second power supply terminal of the first processing unit U1 is connected to the second monitoring capacitor CC2, the first power supply V1, and the second power supply V2. The second terminal of the first monitoring capacitor CC1 is grounded. The second terminals of the first monitoring resistor RC1 and the second terminals of the second monitoring resistor RC2 are respectively connected to the two output ports of the power output circuit.

[0078] In this embodiment of the application, the voltage of the first power supply V1 is greater than the voltage of the second power supply V2. For example, the first power supply V1 is a 24V power supply, and the second power supply V2 is a 20.5V power supply.

[0079] In some embodiments of this application, the controller may also be configured to: acquire the magnetic field polarity switching result fed back by the polarity monitoring circuit; if the magnetic field polarity switching result is a successful magnetic field polarity switching, send a command to the power output circuit to maintain the current output; if the magnetic field polarity switching result is a failed magnetic field polarity switching, send a command to the power output circuit to stop the power output and issue an alarm.

[0080] By configuring the circuit in the above embodiments, the problem of the MOS transistor in the internal circuit of the constant current source device switching the magnetic field polarity on its own during operation due to component failure is avoided, thus preventing timely feedback to the controller. This further enables active monitoring of the output magnetic field polarity of the constant current source device, improves the accuracy of the output of the constant current source device, and enhances the safety of the constant current source device and coil operation.

[0081] In this embodiment, the polarity monitoring module and the relay drive module work together to monitor the magnetic field polarity switching action, thereby improving the stability of the magnetic field switching action monitoring. The polarity monitoring module ensures the accuracy of the acquisition of the "command signal" and the "actual magnetic field polarity" through the voltage division and current limiting design of the resistor and the filtering design of the capacitor. The modular circuit design in the above embodiment not only reduces the difficulty of circuit debugging and maintenance, but also allows for the replacement of a single module according to different power and accuracy requirements (such as replacing the relay with a higher current-resistant one or the voltage divider resistor with a higher precision), which greatly improves the scalability of the module.

[0082] The following points should be noted in this article:

[0083] 1. The accompanying drawings of the embodiments of this application only involve the structures involved in the embodiments of this application; other structures can refer to general designs.

[0084] 2. Where there is no conflict, the embodiments of this application and the features in the embodiments can be combined with each other to obtain new embodiments.

[0085] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

Claims

1. A magnetic field polarity monitoring system for use in a plasma etching machine, the plasma etching machine comprising an etching cavity, characterized in that, The magnetic field polarity monitoring system includes: a controller, a coil, and a constant current source device. The constant current source device includes a power output circuit and a polarity monitoring circuit. The controller, the power output circuit, and the polarity monitoring circuit are electrically connected to each other, and the power output circuit is electrically connected to the coil. The controller is configured to send a magnetic field polarity switching command to the power output circuit; The power output circuit is configured to output a target drive signal to the coil according to the magnetic field polarity switching command; The coil is disposed outside the etching cavity and electrically connected to the power output circuit. It is configured to switch the magnetic field polarity within the etching cavity in response to the target driving signal. The polarity monitoring circuit is configured to monitor the target drive signal output by the power output circuit; The polarity monitoring circuit is also configured to feed back the magnetic field polarity switching result to the controller based on the target driving signal and the magnetic field polarity switching command; The power output circuit includes: The system includes a polarity switching module, a power output module, and a relay drive module. The polarity switching module is electrically connected to both the power output module and the relay drive module. The relay drive module is electrically connected to the controller. The polarity switching module is electrically connected to the coil. The relay drive module is configured to generate a relay drive signal according to the magnetic field polarity switching command received from the controller, and send it to the polarity switching module. The polarity switching module is configured to switch the power supply line according to the relay drive signal; The power output module is configured to output a target drive signal to the coil based on the switched power supply line; The polarity monitoring circuit is connected to the two output ports of the power output circuit.

2. The magnetic field polarity monitoring system for a plasma etching machine according to claim 1, characterized in that, The polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target drive signal and the magnetic field polarity switching command, including: The polarity monitoring circuit is further configured to: if the relay drive signal is acquired, detect whether the target drive signal has undergone a potential change; If the target drive signal undergoes a potential change, then the presence of a constant output current in the power output module is detected. If the power output module has a constant output current, it will send feedback to the controller that the magnetic field polarity switching was successful.

3. The magnetic field polarity monitoring system for a plasma etching machine according to claim 2, characterized in that, The polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target drive signal and the magnetic field polarity switching command, and also includes: If the relay drive signal is not received, it is determined that the magnetic field polarity switching has failed, and the relay drive module is reported as faulty to the controller. If the target driving signal does not change in potential, it is determined that the magnetic field polarity switching has failed, and the polarity switching module is reported as faulty to the controller. If the power output module does not output current, it is determined that the magnetic field polarity switching has failed, and the power output module fault is reported to the controller.

4. The magnetic field polarity monitoring system for a plasma etching machine according to claim 1, characterized in that, The polarity monitoring circuit is further configured to feed back the magnetic field polarity switching result to the controller based on the target drive signal and the magnetic field polarity switching command, including: The polarity monitoring circuit is further configured to: acquire the polarity of the target driving signal and the polarity of the magnetic field polarity switching command; Determine whether the polarity of the target driving signal is consistent with the polarity of the magnetic field polarity switching command; If they match, the controller is informed that the magnetic field polarity switch was successful. If there is a discrepancy, the controller will be notified of a failure to switch the magnetic field polarity.

5. The magnetic field polarity monitoring system for a plasma etching machine according to claim 1, characterized in that, The relay drive module includes: The system comprises a first amplifying resistor RA1, a second amplifying resistor RA2, a third amplifying resistor RA3, a fourth amplifying resistor RA4, a first capacitor CA1, a first MOSFET QA1, and a second MOSFET QA2. The first terminal of the first amplifying resistor RA1 is connected to the first terminal of the second amplifying resistor RA2 and the gate of the first MOSFET QA1. The second terminal of the first amplifying resistor RA1 is electrically connected to the signal input terminal. The second terminal of the second amplifying resistor RA2 and the source of the first MOSFET QA1 are grounded. The drain of the first MOSFET QA1 is connected to the gate of the second MOSFET QA2 and the first terminal of the third amplifying resistor RA3. The drain of the second MOSFET QA2 and the second terminal of the third amplifying resistor RA3 are connected to a first power supply. The source of the second MOSFET QA2 is connected to the first terminal of the fourth amplifying resistor RA4. The second terminal of the fourth amplifying resistor RA4 is connected to the first terminal of the first capacitor CA1 and the signal output terminal. The second terminal of the first capacitor CA1 is grounded.

6. The magnetic field polarity monitoring system for a plasma etching machine according to claim 1, characterized in that, The relay drive module includes: The system comprises a first amplifying capacitor CB1, a first amplifying resistor RB1, a second amplifying resistor RB2, a third amplifying resistor RB3, a fourth amplifying resistor RB4, a fifth amplifying resistor RB5, a sixth amplifying resistor RB6, a seventh amplifying resistor RB7, a first MOSFET QB1, and a second MOSFET QB2. The first terminal of the first amplifying resistor RB1 is connected to the first terminal of the second amplifying resistor RB2 and its signal input terminal. The second terminal of the second amplifying resistor RB2 is connected to the first terminal of the third amplifying resistor RB3 and the gate of the first MOSFET QB1. The drain of the first MOSFET QB1 is connected to the first terminal of the fourth amplifying resistor RB4. The second terminal of the fourth amplifying resistor RB4 is connected to the gate of the fifth amplifying resistor RB7. The first terminal of resistor RB5 is connected to the gate of the second MOSFET QB2. The source of the second MOSFET QB2 is connected to the first terminal of the sixth amplifying resistor RB6. The second terminal of the sixth amplifying resistor RB6 is connected to the second terminal of the fifth amplifying resistor RB5 and connected to the first power supply. The drain of the second MOSFET QB2 is connected to the first terminal of the seventh amplifying resistor RB7. The second terminal of the seventh amplifying resistor RB7 is connected to the first terminal and the signal output terminal of the first amplifying capacitor CB1. The second terminal of the first amplifying capacitor CB1, the source of the first MOSFET QB1, the second terminal of the first amplifying resistor RB1, and the second terminal of the third amplifying resistor RB3 are respectively grounded.

7. The magnetic field polarity monitoring system for a plasma etching machine according to claim 1, characterized in that, The polarity switching module includes: The system comprises a first relay K1, a first freewheeling diode D1, a second relay K2, and a second freewheeling diode D2. The first relay K1 includes a first actuator and a first relay coil, which are coupled together. The second relay K2 includes a second actuator and a second relay coil, which are coupled together. The first end of the first relay coil and the first end of the second relay coil are respectively grounded. The first freewheeling diode D1 is connected in parallel across the two ends of the first relay coil, and the second freewheeling diode D2 is connected in parallel across the two ends of the second relay coil. The second end of the first relay coil and the second end of the second relay coil are connected to the relay drive module; The first end of the first actuator is connected to the first output end of the power output module, the second end of the first actuator is connected to the first end of the coil, the third end of the first actuator is connected to the second end of the coil, the first end of the second actuator is connected to the second output end of the power output module, the second end of the second actuator is connected to the second end of the coil, and the third end of the second actuator is connected to the first end of the coil.

8. The magnetic field polarity monitoring system for a plasma etching machine according to claim 1, characterized in that, The polarity monitoring circuit includes: First processing unit U1, first monitoring resistor RC1, second monitoring resistor RC2, third monitoring resistor RC3, fourth monitoring resistor RC4, fifth monitoring resistor RC5, sixth monitoring resistor RC6, seventh monitoring resistor RC7, first monitoring capacitor CC1, second monitoring capacitor CC2; The first end of the first monitoring resistor RC1 is connected to the first end of the second monitoring resistor RC2 and the first end of the fourth monitoring resistor RC4. The second end of the second monitoring resistor RC2 is connected to the first end of the third monitoring resistor RC3 and the first end of the fifth monitoring resistor RC5. The second end of the fourth monitoring resistor RC4 is connected to the first input terminal of the first processing unit U1. The second end of the fifth monitoring resistor RC5 is connected to the second input terminal of the first processing unit U1 and the first end of the sixth monitoring resistor RC6. The second end of the sixth monitoring resistor RC6 is connected to the first end of the seventh monitoring resistor RC7 and the first output terminal of the first processing unit U1. The second end of the seventh monitoring resistor RC7 is connected to the first end and the polarized output terminal of the first monitoring capacitor CC1. The second end of the first monitoring capacitor CC1 is grounded. The first power supply terminal of the first processing unit U1 is grounded. The second power supply terminal of the first processing unit U1 is connected to the second monitoring capacitor CC2, the first power supply, and the second power supply. The second end of the first monitoring capacitor CC1 is grounded. The second end of the first monitoring resistor RC1 and the second end of the third monitoring resistor RC3 are respectively connected to the two output ports of the power output circuit.

9. The magnetic field polarity monitoring system for a plasma etching machine according to claim 1, characterized in that, The controller is also configured to: Obtain the magnetic field polarity switching result fed back by the polarity monitoring circuit; If the magnetic field polarity switching result is a successful magnetic field polarity switching, then a command to maintain the current output is sent to the power output circuit. If the magnetic field polarity switching result is a failure, a stop power output command is sent to the power output circuit and an alarm is triggered.

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