Multifunctional gluing mechanism and wafer spin-coating device comprising same

Abstract

The invention relates to the technical field of wafer gluing, and discloses a wafer gluing device which comprises a fixing frame and further comprises a carrying disc rotationally mounted on the fixing frame, and a plurality of glue outlet pipes are arranged above the carrying disc; the glue solution recycling assembly comprises a recycling opening formed in the fixing frame, a rotating frame is rotationally installed on the fixing frame, a plurality of cleaning plates are arranged on the rotating frame, a transmission part is arranged between the extraction equipment and the rotating frame, the rotating frame is driven to rotate through the transmission part, and scraping plates are installed on the cleaning plates in a sliding mode; when the rotating frame rotates, airflow facing the recycling opening is generated on the cleaning plate, and the scraping plate slides on the cleaning plate in a reciprocating mode. According to the glue solution recycling device, the glue solution recycling assembly is arranged on the fixing frame, wind power for sucking the glue solution is used for driving the rotating frame to rotate, the glue solution is collected through the cleaning plate when the rotating frame rotates, and for the glue solution with high viscosity, the recycling efficiency and quality of the glue solution are further improved in an auxiliary mode of a scraping plate and air blowing.

Description

Technical Field

[0001] This invention relates to the field of wafer coating technology, and more specifically to a multifunctional coating mechanism and a wafer spin coating apparatus containing the mechanism. Background Technology

[0002] Spin coating method: This method includes four steps: dispensing, high-speed rotation, spin coating, and solvent evaporation. The coating is dispensed when the wafer is stationary or at low speed. High-speed rotation (usually 3000-6000 rpm) is used to spread the coating evenly. Centrifugal force is used to remove excess coating, and finally, the wafer is dried at a fixed speed.

[0003] In existing technologies, excess adhesive needs to be recycled in a timely manner. Generally, it is recycled by gravity, with a negative pressure fan assisting in the recycling process. However, for some highly viscous adhesives, the above recycling method is inefficient and of low quality. Summary of the Invention

[0004] In view of the above-mentioned shortcomings of the prior art, the present invention provides a multifunctional coating mechanism and a wafer spin coating device containing the mechanism, which can effectively solve the problems of low recycling efficiency and quality of adhesive in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: This invention provides a multifunctional coating mechanism and a wafer spin coating apparatus containing the mechanism, comprising a fixing frame, characterized in that it further comprises: A carrier tray is rotatably mounted on a fixed frame, and at least one set of glue dispensing components is provided above the carrier tray; The adhesive recovery assembly includes a recovery port mounted on a fixed frame, with an external suction device connected to the recovery port. A rotating frame is rotatably mounted on the fixed frame, and multiple cleaning plates are provided on the rotating frame. A transmission component is provided between the suction device and the rotating frame to drive the rotating frame to rotate. A scraper is slidably mounted on the cleaning plate. When the rotating frame rotates, an airflow is generated on the cleaning plate toward the recovery port, and the scraper slides back and forth on the cleaning plate.

[0006] Furthermore, the fixing frame is provided with a guide ring, the inner wall of the guide ring is provided with an inclined surface, and the outer wall of the cleaning plate is adapted to and in full contact with the inclined surface, and the cleaning plate is in an inclined state.

[0007] Furthermore, a ring frame is fixedly installed on the fixed frame, and the rotating frame is rotatably installed on the ring frame. The transmission component includes a plurality of first impellers distributed in a ring on the bottom wall of the rotating frame, and a first air inlet pipe is connected between the ring frame and the air outlet of the extraction device.

[0008] Furthermore, an installation pipe is fixedly installed on the top wall of the rotating frame, a cleaning frame is connected to the installation pipe, a cleaning plate is installed on the bottom wall of the cleaning frame, an air outlet frame is installed on the cleaning plate, the air outlet frame is provided with multiple air outlets, and the air outlet frame and the installation pipe are connected.

[0009] Furthermore, a slider is slidably mounted on the cleaning frame, a right-angle plate is elastically mounted on the bottom wall of the slider, the scraper is slidably mounted on the bottom wall of the right-angle plate, a reciprocating screw is rotatably mounted on the cleaning frame, a threaded hole adapted to the reciprocating screw is opened on the slider, and a transmission box for driving the reciprocating screw to rotate is provided on the cleaning frame.

[0010] Furthermore, the reciprocating lead screw rotates through the outer wall of the transmission box, and a second impeller is fixedly installed at one end of the reciprocating lead screw located inside the transmission box. A second air inlet pipe is connected between the transmission box and the mounting pipe.

[0011] Furthermore, a telescopic slide rod is installed on the scraper, and a set of slide grooves for guiding the telescopic slide rod is provided on the bottom wall of the cleaning frame. The set of slide grooves is triangular in shape and includes a first slide groove, a second slide groove, and a third slide groove. The telescopic slide rod slides in the set of slide grooves in a circular motion.

[0012] Furthermore, the cleaning plate is provided with a guide groove, and the right-angle plate is provided with a guide block that matches the guide groove.

[0013] Furthermore, the fixing frame is provided with a retaining ring, and the inner wall of the retaining ring is inclined towards the recycling port.

[0014] Furthermore, the fixing frame is provided with a retaining ring, and the inner wall of the retaining ring is inclined towards the recycling port.

[0015] Furthermore, the dispensing assembly includes two dispensing tubes, which are positioned above the carrier tray via a movable assembly.

[0016] Furthermore, the two dispensing tubes have different diameters.

[0017] A wafer spin coating apparatus employs the aforementioned multifunctional coating mechanism. A wafer is placed on a carrier tray, and the carrier tray is equipped with multiple suction cups. A vacuum pump is located at the bottom of the mounting frame, and a vacuum conduit is provided between the vacuum pump and the suction cups.

[0018] Furthermore, the bottom of the fixed frame is provided with a rotating mechanism for driving the carrier plate to rotate, and a lifting mechanism for driving the rotating mechanism and lifting the fixed frame is also provided below the fixed frame.

[0019] Furthermore, the fixed frame is provided with an adjustment assembly, including a plurality of centrally symmetrical positioning frames that are slidably mounted on the fixed frame, and the fixed frame is also provided with an electric push rod for driving the positioning frames to slide towards the center of the carrier.

[0020] The technical solution provided by this invention has the following advantages compared with the known prior art: By installing an adhesive recovery component on the fixed frame, the rotating frame is driven to rotate by the air force that sucks up the adhesive. When the rotating frame rotates, the adhesive is collected by a cleaning plate. For adhesives with strong viscosity, the recovery efficiency and quality are further improved by the assistance of scrapers and air blowing. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0022] Figure 1 This is an overall schematic diagram of the present invention; Figure 2 This is a schematic diagram of the rotating frame and the ring frame; Figure 3 This is a sectional view of the rotating frame and the ring frame section; Figure 4 for Figure 2 The front view; Figure 5 for Figure 2 A bottom view; Figure 6 A front view of the cleaned-up plate section; Figure 7 This is a structural diagram of the cleaning plate section; Figure 8 A bottom view of the cleaned-up panel section; Figure 9 This is a schematic diagram of the internal structure of the transmission box.

[0023] The labels in the diagram represent: 1. Fixing frame; 2. Fixing tube; 3. Carrier tray; 4. Wafer; 5. Rotation mechanism; 6. Lifting mechanism; 7. Vacuum pump; 8. Vacuum conduit; 9. Retaining ring; 10. Recovery port; 11. First air inlet pipe; 12. Ring frame; 13. Rotating frame; 14. First impeller; 15. Mounting tube; 16. First chute; 17. Second chute; 18. Third chute; 19. Second impeller; 20. Cleaning frame; 21. Cleaning plate; 22. Scraper; 23. Right angle plate; 24. Slider; 25. Reciprocating lead screw; 26. Transmission box; 27. Telescopic slide bar; 28. Guide groove; 29. ​​Air outlet frame; 30. Second air inlet pipe; 31. Discharge tube. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0025] The present invention will be further described below with reference to embodiments.

[0026] Example 1: refer to Figure 1A multifunctional adhesive coating mechanism includes a fixed frame 1, with a fixed tube 2 below the fixed frame 1, mainly used for sealing (subsequent vacuuming and clamping of the wafer), and a carrier tray 3, which is rotatably mounted on the fixed frame 1. At least one set of adhesive dispensing components is provided above the carrier tray 3. The adhesive dispensing components include two adhesive dispensing tubes 31, which are positioned above the carrier tray via a moving component. The moving component uses an electric guide rail, which facilitates the adjustment of the position of the adhesive dispensing tubes 31 above the carrier tray. In use, the two dispensing tubes 31 can be connected to independently configured adhesive coating systems, allowing the use of two different adhesives. One of the dispensing tubes 31 performs the first coating with a higher viscosity adhesive, which forms the main part of the adhesive layer and is easier to accumulate. The other dispensing tube 31 then performs the second coating with a lower viscosity adhesive, which is easier to spread. During this process, the positions of the two dispensing tubes 31 are adjusted sequentially by an electric guide rail, ensuring that both dispensing tubes 31 are applied above the center of the carrier disk. The dispensing tubes 31 do not move during dispensing. This coating method can obtain better TTV data, providing higher quality bonding sheets for subsequent thinning processes. Alternatively, the two dispensing tubes 31 can use the same adhesive, but with different diameters. The thicker tube is positioned above the center of the tray to apply the adhesive first, while the thinner tube is used as an auxiliary dispensing tube. This method of dispensing adhesive, due to the inclusion of the thinner tube, can be applied to products with high bumps. It also solves the problem of adhesive not being easily spin-coated and filling the grooves. The thinner tube 31 can be used to directly and precisely dispense adhesive into the deep grooves.To improve the efficiency and quality of adhesive recovery, an adhesive recovery assembly is installed on the fixed frame 1. This assembly includes a recovery port 10 on the fixed frame 1, with an external suction device connected to the recovery port 10. A rotating frame 13 is rotatably mounted on the fixed frame 1, and multiple cleaning plates 21 are provided on the rotating frame 13. A guide ring is provided on the fixed frame 1, with an inclined surface on the inner wall of the guide ring. The outer wall of the cleaning plates 21 is adapted to and in full contact with the inclined surface, and the cleaning plates 21 are in an inclined state. A transmission component is provided between the extraction device (the extraction device can be an air pump, centrifugal fan, etc., as long as airflow can be achieved to complete the suction of the recovery port 10) and the rotating frame 13, which drives the rotating frame 13 to rotate. A ring frame 12 is fixedly mounted on the fixed frame 1, and the rotating frame 13 is rotatably mounted on the ring frame 12. On the frame 12, the transmission components include multiple first impellers 14 arranged in a ring on the bottom wall of the rotating frame 13. A first air inlet pipe 11 is connected between the ring frame 12 and the air outlet of the extraction device. After the two are connected, the air drawn by the extraction device enters the ring frame 12 and blows the first impellers 14 to rotate, thereby driving the rotating frame 13 to rotate. During the rotation of the frame 13, the adhesive on the guide ring is collected by the cleaning plate 21. The inclined guidance of the cleaning plate 21 and the inclined guidance of the inner wall of the guide ring accelerates the adhesive into the recycling port 10, speeds up the recycling of the adhesive, and reduces production costs. At the same time, the above-mentioned drive does not add any additional drive components. It uses the predetermined airflow generated by the recycled adhesive to complete the scraping of adhesive, thereby achieving cost reduction and efficiency improvement.

[0027] Example 2: refer to Figure 6 and Figure 7 A scraper 22 is slidably mounted on the cleaning plate 21. When the rotating frame 13 rotates, airflow is generated on the cleaning plate 21 toward the recovery port 10, and the scraper 22 slides back and forth on the cleaning plate 21. An installation pipe 15 is fixedly mounted on the top wall of the rotating frame 13, and a cleaning frame 20 is connected to the installation pipe 15. The cleaning plate 21 is mounted on the bottom wall of the cleaning frame 20. An air outlet frame 29 is mounted on the cleaning plate 21, and the air outlet frame 29 has multiple air outlets. The air outlet frame 29 and the installation pipe 15 are connected. A slider 24 is slidably mounted on the cleaning frame 20. A right-angle plate 23 is elastically installed on the bottom wall of block 24. The scraper 22 is slidably installed on the bottom wall of the right-angle plate 23. A reciprocating screw 25 is rotatably installed on the cleaning frame 20. A threaded hole adapted to the reciprocating screw 25 is opened on the slider 24. A transmission box 26 for driving the reciprocating screw 25 to rotate is provided on the cleaning frame 20. The reciprocating screw 25 rotates through the outer wall of the transmission box 26. A second impeller 19 is fixedly installed at one end of the reciprocating screw 25 located inside the transmission box 26. A second air inlet pipe 30 is connected between the transmission box 26 and the mounting pipe 15.

[0028] The scraper 22 is equipped with a telescopic slide rod 27. The bottom wall of the cleaning frame 20 is provided with a set of sliding grooves to guide the telescopic slide rod 27. The set of sliding grooves is triangular in shape and includes a first sliding groove 16, a second sliding groove 17 and a third sliding groove 18. The telescopic slide rod 27 slides in the set of sliding grooves in a cycle. The cleaning plate 21 is provided with a guide groove 28. The right angle plate 23 is provided with a guide block that matches the guide groove 28. The fixed frame 1 is provided with a retaining ring 9. The inner wall of the retaining ring 9 is inclined towards the recovery port 10.

[0029] To handle highly viscous adhesives, a scraper 22 is installed on the cleaning plate 21. When the cleaning plate 21 scrapes the adhesive, some air enters the air outlet frame 29 through the mounting pipe 15. The air outlet frame 29 blows air onto the adhesive scraped off by the cleaning plate 21 through its air outlet. Simultaneously, some air enters the transmission box 26, which contains a second impeller 19. The second impeller 19 drives the reciprocating screw 25 to rotate. During the rotation of the reciprocating screw 25, the slider 24 slides back and forth. With the guidance of the guide groove 28, the scraper 22 slides back and forth on the cleaning plate 21, and its bottom end remains in contact with the bottom wall of the cleaning plate 21. This pushes the adhesive accumulated on the cleaning plate 21 towards the collection port 10.

[0030] Secondly, a set of sliding grooves is formed on the bottom wall of the transmission frame 20. The set of sliding grooves is triangular in shape and includes a first sliding groove 16, a second sliding groove 17, and a third sliding groove 18. The telescopic slide rod 27 slides cyclically within the set of sliding grooves. The sliding direction is sequentially first sliding groove 16 → second sliding groove 17 → third sliding groove 18, and then returns to the first sliding groove 16, repeating the cycle.

[0031] The aforementioned cyclic sliding is so that when the scraper 22 slides towards the recovery port 10, the scraper 22 will be in close contact with the cleaning plate 21, which can push the adhesive towards the recovery port. When the scraper 22 moves away from the recovery port 10, the scraper 22 slides along the second groove 17 and the third groove 18, so that the scraper 22 is separated from the outer wall of the cleaning plate 21, and no adhesive will adhere to the back of the scraper 22.

[0032] To achieve the aforementioned unidirectional cyclic sliding method, a one-way plate is rotatably installed at the connection of adjacent slides. This one-way plate can only rotate in one direction, and a torsion spring is provided at the rotatable connection (to achieve the effect of resetting). The unidirectional rotation can be achieved by a baffle, which can limit the rotation range and reverse direction of the one-way plate to complete the aforementioned cyclic unidirectional sliding.

[0033] A wafer spin coating apparatus employing the aforementioned multifunctional coating mechanism is characterized in that a wafer 4 is placed on a carrier 3, a plurality of suction cups are provided in the carrier 3, a vacuum pump 7 is provided at the bottom of a fixing frame 1, and a vacuum conduit 8 is provided between the vacuum pump 7 and the suction cups, a rotating mechanism 5 for driving the carrier 3 to rotate is provided at the bottom of the fixing frame 1, and a lifting mechanism 6 for driving the rotating mechanism 5 and lifting the fixing frame 1 is also provided below the fixing frame 1, and an adjustment assembly is provided on the fixing frame 1, including a plurality of centrally symmetrical positioning frames slidably mounted on the fixing frame 1, and an electric push rod for driving the positioning frames to slide towards the center of the carrier 3 is also provided on the fixing frame 1.

[0034] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multifunctional adhesive application mechanism, comprising a fixing frame, characterized in that, Also includes: A carrier tray is rotatably mounted on a fixed frame, and at least one set of glue dispensing components is provided above the carrier tray; The adhesive recovery assembly includes a recovery port mounted on a fixed frame, with an external suction device connected to the recovery port. A rotating frame is rotatably mounted on the fixed frame, and multiple cleaning plates are provided on the rotating frame. A transmission component is provided between the suction device and the rotating frame to drive the rotating frame to rotate. A scraper is slidably mounted on the cleaning plate. When the rotating frame rotates, an airflow is generated on the cleaning plate toward the recovery port, and the scraper slides back and forth on the cleaning plate.

2. The multifunctional adhesive applicator according to claim 1, characterized in that, The fixing frame is provided with a guide ring, the inner wall of the guide ring is provided with an inclined surface, and the outer wall of the cleaning plate is adapted to and in full contact with the inclined surface, and the cleaning plate is in an inclined state.

3. The multifunctional adhesive applicator according to claim 1, characterized in that, A ring frame is fixedly installed on the fixed frame, and the rotating frame is rotatably installed on the ring frame. The transmission component includes a plurality of first impellers distributed in a ring on the bottom wall of the rotating frame. A first air inlet pipe is connected between the ring frame and the air outlet of the extraction device.

4. The multifunctional adhesive applicator according to claim 1, characterized in that, An installation pipe is fixedly installed on the top wall of the rotating frame, and a cleaning frame is connected to the installation pipe. The cleaning plate is installed on the bottom wall of the cleaning frame, and an air outlet frame is installed on the cleaning plate. The air outlet frame is provided with multiple air outlets, and the air outlet frame and the installation pipe are connected.

5. The multifunctional adhesive applicator according to claim 1, characterized in that, A slider is slidably mounted on the cleaning frame, and a right-angle plate is elastically mounted on the bottom wall of the slider. The scraper is slidably mounted on the bottom wall of the right-angle plate. A reciprocating screw is rotatably mounted on the cleaning frame. A threaded hole adapted to the reciprocating screw is opened on the slider. A transmission box for driving the reciprocating screw to rotate is provided on the cleaning frame.

6. A multifunctional adhesive applicator according to claim 5, characterized in that, The reciprocating lead screw rotates through the outer wall of the transmission box. A second impeller is fixedly installed at one end of the reciprocating lead screw inside the transmission box. A second air inlet pipe is connected between the transmission box and the mounting pipe.

7. The multifunctional adhesive applicator according to claim 1, characterized in that, The scraper is equipped with a telescopic slide rod, and the bottom wall of the cleaning frame is provided with a set of slide grooves to guide the telescopic slide rod. The set of slide grooves is triangular in shape and includes a first slide groove, a second slide groove, and a third slide groove. The telescopic slide rod slides in the set of slide grooves in a circular motion.

8. The multifunctional adhesive applicator according to claim 1, characterized in that, The cleaning plate is provided with a guide groove, and the right-angle plate is provided with a guide block that matches the guide groove.

9. A multifunctional adhesive applicator according to claim 1, characterized in that, The fixing frame is provided with a retaining ring, and the inner wall of the retaining ring is inclined towards the recycling port.

10. A multifunctional adhesive applicator according to claim 1, characterized in that, The dispensing assembly includes two dispensing tubes, which are positioned above the carrier tray via a movable assembly.

11. A multifunctional adhesive applicator according to claim 10, characterized in that, The two dispensing tubes have different diameters.

12. A wafer spin coating apparatus, employing the multifunctional coating mechanism as described in claim 1, characterized in that, The wafer is placed on the carrier disk, and the carrier disk is provided with multiple suction cups. The bottom of the fixing frame is provided with a vacuum pump, and a vacuum conduit is provided between the vacuum pump and the suction cups.

13. A wafer spin coating apparatus according to claim 12, characterized in that, The bottom of the fixed frame is provided with a rotating mechanism for driving the carrier plate to rotate, and a lifting mechanism for driving the rotating mechanism and lifting the fixed frame is also provided below the fixed frame.

14. A wafer spin coating apparatus according to claim 13, characterized in that, The fixed frame is equipped with an adjustment assembly, including multiple centrally symmetrical positioning frames that are slidably mounted on the fixed frame, and the fixed frame is also equipped with an electric push rod for driving the positioning frames to slide towards the center of the carrier.

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