OHT crown block track cleaning system

Abstract

The invention provides an OHT crown block rail cleaning system which comprises a cleaning trolley, a tractor and a frame, the cleaning trolley and the tractor are located above a crown block rail, and the frame is located below the crown block rail; a dust collecting device is arranged on the frame; the dust collecting device comprises a hose, a fan, a dust collecting pipeline and a dust collecting bag or a dust collecting box; the cleaning vehicle comprises a vehicle body. A cleaning pipeline system is further arranged in the vehicle body and comprises an air inlet channel, an air outlet channel and a cleaning pipeline, the air inlet channel comprises an air inlet part, a turning transition part and a flow dividing connecting part, and the turning transition part is connected with the air inlet part and the flow dividing connecting part; the air outlet channel comprises a hose connecting part, an air duct straight-through part and an air duct shunting part; the shunting connecting part is connected to the air duct shunting part; the hose connecting part is located below the vehicle body and connected with a hose of the dust collecting device. The invention provides a brand new air flow pipeline path, the pipeline is more concise and smoother, the dust collection capability of the dust collector can be improved, the pipeline is expanded, the through-flow area is adjustable, and the noise is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor wafer transportation, and more particularly to an OHT overhead crane track cleaning system. BACKGROUND

[0002] OHT (Overhead Hoist Transporter) is an automatic logistics transportation equipment. It is commonly used in the industrial production line of semiconductor factory, and is also commonly used in the warehouse, logistics center and other places of related industries for handling, transporting and stacking goods. In the process of semiconductor production, manual handling of wafer boxes and other goods is often required. At present, the semiconductor factory gradually begins to use automatic transportation equipment, i.e. OHT overhead crane, to replace manual work for transporting semiconductor raw materials between various machines.

[0003] The OHT overhead crane is usually composed of a set of track system placed on the upper layer of the factory building, one or more moving automatic handling vehicles and a set of control system. The handling vehicle can advance along the track according to the given advancing direction of the instruction, and the hook can be extended or lifted left and right at the designated position so as to handle and stack goods between different levels of shelves or storage areas.

[0004] In the semiconductor factory, dust is easily accumulated on the OHT overhead crane track. The frequent acceleration and deceleration of the trolley causes wheel wear and dust, which affects the normal operation of the overhead crane and the positioning accuracy of the trolley, and pollutes the environment. Therefore, the dust on the OHT overhead crane track needs to be cleaned every certain period of time.

[0005] The existing sweeper product has weak dust suction capacity. In order to improve the dust suction capacity, an improved sweeper air suction flow channel design is needed to meet the dust suction requirement. SUMMARY

[0006] The present application aims at least to solve one of the problems in the prior art or related art.

[0007] To this end, the present application provides an OHT overhead crane track cleaning system, which comprises a cleaning vehicle, a towing vehicle and a frame, the cleaning vehicle and the towing vehicle are located above the overhead crane track, and the frame is located below the overhead crane track; a dust collecting device is arranged on the frame; The dust collecting device comprises a hose, a fan, a dust collecting pipeline, a dust collecting bag or a dust collecting box; The cleaning vehicle comprises a vehicle body; a cleaning pipeline system is arranged in the vehicle body, and the cleaning pipeline system comprises: an air inlet channel comprising an air inlet portion, a curved transition portion and a shunt connection portion, the curved transition portion connecting the air inlet portion and the shunt connection portion; an air outlet channel comprising a hose connection portion, a straight air duct portion and an air duct shunt portion; the shunt connection portion is connected to the air duct shunt portion; The hose connecting part is located below the vehicle body and is connected with the hose of the dust collecting device.

[0008] Preferably, the hose connecting part, the air duct straight-through part and the air duct shunt part are located at the center of the vehicle body, forming a straight-through channel in the vertical direction.

[0009] Preferably, the air inlet part comprises an air inlet and an air inlet interface, and the elbow transition part connects the air inlet interface and the shunt connecting part. The air inlet comprises a first air inlet and a second air inlet, and the openings of the first air inlet and the second air inlet are both downward and located at different heights.

[0010] Preferably, the first air inlet and the second air inlet are integrally formed, and the air inlet interface is fixedly connected with the elbow transition part through a clamping mode.

[0011] Preferably, a first sweeper is arranged on one side of the first air inlet, and a second sweeper is arranged on one side of the second air inlet.

[0012] Preferably, the cleaning pipeline system comprises two groups of air inlet channels, and the two groups of air inlet channels are connected to the air outlet channel through respective shunt connecting parts, and the two groups of air inlet channels are symmetrically arranged.

[0013] Preferably, an air inlet nozzle is further arranged on the air inlet, and the air inlet flow is adjusted through the air inlet nozzle.

[0014] Preferably, the air duct shunt part is close to the top of the vehicle body, and a detachable cover is arranged on the top of the vehicle body.

[0015] Preferably, an adjustable pipeline is arranged on the air inlet part, and the adjustable pipeline itself can adjust the size of the air inlet flow.

[0016] The present application provides a brand-new air flow pipeline path, the pipeline is more simple and smooth, can improve the dust collection capacity of the dust collector, expand the pipeline, and make the flow area adjustable and reduce the noise. BRIEF DESCRIPTION OF DRAWINGS

[0017] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are included to provide a better understanding of the preferred embodiments and are not intended to be limiting of the application. Moreover, the same reference numerals are used throughout the accompanying drawings and the following description to refer to the same parts. In the drawings: Figure 1 The structure schematic diagram of the OHT crown block track cleaning system of the application is shown. Figure 2 The structure schematic diagram of the cleaning trolley of the application is shown. Figure 3 The cleaning trolley of the application is shown. Figure 2 The cross-sectional view of the cleaning trolley along A-A is shown. DETAILED DESCRIPTION

[0018] In order to better understand the above technical solutions, the technical solutions of the embodiments of the present application are described in detail below through the drawings and specific embodiments. It should be understood that the specific features in the embodiments of the present application and the embodiments are detailed descriptions of the technical solutions of the embodiments of the present application, and are not limitations of the technical solutions of the present application. In the case of no conflict, the technical features in the embodiments of the present application and the embodiments can be combined with each other.

[0019] As shown in Figures 1-3 The present embodiment provides an OHT crane rail cleaning system, which includes a cleaning vehicle 10, a towing vehicle 20, and a frame 40. The cleaning vehicle and the towing vehicle are located above the crane rail 30, and the frame 40 is located below the crane rail. A dust collecting device (not shown) is arranged on the frame 40. The frame is a functional frame which is suitable for different functional requirements and is matched with different devices. In the present application, a dust collecting device is matched in the middle of the frame. The dust collecting device includes a hose, a fan, a dust collecting pipeline, a dust collecting bag or a dust collecting box. The dust collecting device draws air through the fan, and the hose is connected to the cleaning vehicle. The collected dust is stored in the dust collecting bag or the dust collecting box through the dust collecting pipeline. The towing vehicle 20 drives the cleaning vehicle 10 and the frame 40 to travel on the rail. The towing vehicle 20 serves as a power source, and the cleaning vehicle itself can not be provided with a motor. Of course, in other embodiments, the cleaning vehicle can also be provided with a motor and travel on the rail by itself.

[0020] In the present embodiment, the cleaning vehicle 10 includes a vehicle body. Driving wheels 111 and guide wheels 112 are arranged on both sides of the vehicle body. The driving wheels 111 are in contact with the upper surface of the rail. The guide wheels 112 are in contact with the inner side of the rail. The driving wheels are arranged on the upper surface of the rail, and the cleaning vehicle 10 travels on the rail by relying on the driving wheels. Here, although it is defined as a driving wheel, it does not necessarily need to be driven by a motor. In the present embodiment, the cleaning vehicle itself has no power source and is driven by the towing vehicle.

[0021] The present application is characterized in that a set of cleaning pipeline system is redesigned, which can adapt to different requirements and is described in detail.

[0022] A cleaning pipeline system is also arranged in the vehicle body. The cleaning pipeline system includes an air outlet channel, which includes a hose connection part 12, an air duct straight-through part 121, and an air duct shunt part 17. The hose connection part 12, the air duct straight-through part 121, and the air duct shunt part 17 are all located in the center of the vehicle body, forming a straight-through channel in the vertical direction. The straight-through air outlet channel allows air to flow more smoothly, with large flow capacity and fast flow speed, and also prevents dust from accumulating in the channel.

[0023] The hose connecting part 12 is located below the vehicle body and is connected with the dust collecting device; specifically, the hose connecting part 12 is connected with the hose of the dust collecting device, and the dust collecting device is connected with the cleaning trolley through the hose and the hose connecting part 12.

[0024] The air inlet channel comprises an air inlet part 13, a turning transition part 16 and a shunt connecting part 15. The air inlet part comprises an air inlet and an air inlet interface 133, and the turning transition part 16 is connected with the air inlet interface 133 and the shunt connecting part 15.

[0025] The turning transition part 16 is mainly used for realizing the turning of the air duct, and the air inlet end is in the vertical direction, and the air outlet end is in the horizontal direction.

[0026] During the working process, the air flow enters from the air inlet at the lower side, enters the turning transition part 16 from the air inlet interface 133, enters the shunt connecting part 15 after the turning, and finally enters the air outlet channel through the air duct shunt part 17.

[0027] The application provides a novel air flow pipeline path, realizes the air inlet from the lower side and the air outlet from the lower side through twice turning of the air duct, the pipeline is more simple and smooth, the dust collecting capacity of the dust collector can be improved, the pipeline is expanded, the through-flow area is adjustable, the noise is reduced, and the simple design facilitates the maintenance and debugging.

[0028] In the embodiment, the air inlet comprises a first air inlet 131 and a second air inlet 132, the first air inlet 131 and the second air inlet 132 are both downwardly opened, and are located at different heights.

[0029] The first air inlet and the second air inlet are communicated at the upper sides to form the air inlet interface 133.

[0030] The track of the embodiment is an L-shaped track, the first air inlet corresponds to the upper surface of the track, and the second air inlet corresponds to the inner lower surface of the track, so that the track can be cleaned in all directions.

[0031] Meanwhile, a first sweeper 141 is arranged at the side of the first air inlet 131, and a second sweeper 142 is arranged at the side of the second air inlet 132, the first sweeper and the second sweeper directly contact the track to clean the track, the sweeper is a brush, and the cleaning and dust collecting are simultaneously performed, so that the cleaning efficiency is improved.

[0032] Since the crown block track is composed of two parallel tracks, in the embodiment, two groups of air inlet channels are provided, each including an air inlet part 13, a turning transition part 16, and a shunt connection part 15, and the two groups of air inlet channels are connected to the air outlet channel through the respective shunt connection parts. The two groups of air inlet channels are symmetrically arranged. The symmetric arrangement can keep the center of gravity of the car body stable, and the air ducts on both sides are uniform.

[0033] The air duct shunt part is provided with two interfaces respectively connected to the two shunt connection parts of the two groups of air inlet channels.

[0034] The air duct shunt part is close to the top of the car body, and the top of the car body is provided with a detachable cover 113. After the detachable cover is removed, the air outlet channel can be detected and maintained.

[0035] In the present application, a sealing member 18 is arranged between each interface, such as the air inlet interface 133, the turning transition part 16, the shunt connection part 15, the air duct shunt part 17, and the air duct straight-through part 121, which can effectively prevent gap noise and achieve silent operation.

[0036] In the present application, the air inlet channel airflow flow rate is matched with the air outlet channel flow rate, which is mainly realized by controlling the size of the air inlet.

[0037] Preferably, the first air inlet and the second air inlet are integrally formed, i.e., the first air inlet and the second air inlet are part of the whole component of the air inlet part. The air inlet part is arranged as an integrated component to reduce the interface and facilitate maintenance, replacement, and debugging.

[0038] The air inlet interface 133 and the turning transition part 16 are fixedly connected by clamping (insertion), and the clamping mode allows the air inlet part to be replaced as needed, such as replacing the air inlet part with different airflow flow rates, which is also convenient for debugging and matching different dust collection devices.

[0039] Meanwhile, the hose connection part 12 and the air duct straight-through part 121 can be designed integrally, and the air duct straight-through part and the air duct shunt part 17 can be fixed by clamping or screwing. Under this design structure, the hose connection part 12 and the air duct straight-through part 121 can be replaced and maintained. For example, different flow rates of the hose connection part 12 and the air duct straight-through part 121 can be selected to match the air inlet volume of the air inlet according to the actual flow demand.

[0040] As another embodiment of the present application, a second air duct straight-through part can be additionally arranged beside the air duct straight-through part 121, which is connected to the hose connection part 12 and the air duct shunt part 17 and can be closed and opened for debugging or adjusting the flow rate.

[0041] Of course, the first air inlet and the second air inlet can also be independently arranged, such as arranging an opening on the upper part of the first air inlet, and additionally connecting the second air inlet.

[0042] As another embodiment of the present application, the air inlet of the air inlet part can also be arranged in a detachable and replaceable manner, and the gas flow or flow rate can be adjusted by directly replacing the air inlets of different sizes.

[0043] In another embodiment of the present application, an air inlet nozzle is further arranged on the air inlet, and the air inlet flow is adjusted through the air inlet nozzle. Different air inlet nozzles can realize different flow and flow rate to meet different actual needs.

[0044] In another embodiment of the present application, an adjustable pipeline is additionally arranged on the air inlet part, the adjustable pipeline itself can adjust the size of the air inlet flow, and is specifically arranged on the upper part of the second air inlet or the upper part of the first air inlet. The adjustable pipeline is connected with the air duct of the air inlet part, and can be used for adjusting and supplementing the air inlet flow of the first air inlet or the second air inlet, so that controllability and adjustability are realized.

[0045] In the description of the present application, the terms "one embodiment", "some embodiments", "a specific embodiment", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The above is only the preferred embodiment of the present application, and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. The dust collection device includes a flexible hose, a fan, dust collection pipelines, dust collection bags, or a dust collection box; Its features are, The cleaning vehicle includes a vehicle body; inside the vehicle body is a cleaning pipeline system, which includes: The air inlet duct includes an air inlet section, a bend transition section, and a flow splitting connection section, with the bend transition section connecting the air inlet section and the flow splitting connection section; the air outlet duct includes a flexible hose connection section, a straight section of the air duct, and a flow splitting section of the air duct; the flow splitting connection section connects to the flow splitting section of the air duct. The hose connection is located under the vehicle body and is connected to the hose of the dust collection device.

2. The cleaning system as described in claim 1, characterized in that, The hose connection, the straight section of the air duct, and the air duct branch section are all located at the center of the vehicle body, forming a straight channel in the vertical direction.

3. The cleaning system as described in claim 1, characterized in that, The air intake section includes an air inlet and an air inlet interface, and the bend transition section connects the air inlet interface and the diversion connection section; The air inlet includes a first air inlet and a second air inlet, both of which open downwards and are located at different heights.

4. The cleaning system as described in claim 3, characterized in that, The first and second air inlets are integrated into one unit, and the air inlet interface is fixedly connected to the bend transition section by a snap-fit ​​method.

5. The cleaning system as described in claim 3, characterized in that, A first cleaner is provided on one side of the first air inlet, and a second cleaner is provided on one side of the second air inlet.

6. The cleaning system as described in claim 3, characterized in that, The cleaning pipeline system includes two sets of air inlet channels, which are connected to the air outlet channel through their respective diversion connections. The two sets of air inlet channels are arranged symmetrically.

7. The cleaning system as described in claim 3, characterized in that, An air inlet nozzle is also provided at the air inlet, and the airflow is adjusted by the air inlet nozzle.

8. The cleaning system as claimed in claim 1, characterized in that, The air duct splitter is located near the top of the vehicle body, which is equipped with a removable cover.

9. The cleaning system as claimed in claim 1, characterized in that, An adjustable duct is provided on the air inlet, which can adjust the air intake volume.

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