Disc traction vacuum pump stage, vacuum pump, composite vacuum pump and semiconductor device

Abstract

The invention discloses a disc type traction vacuum pump stage, a vacuum pump, a composite vacuum pump and semiconductor equipment, relates to the technical field of vacuum pumps, and aims to solve the problem that an existing disc type traction pump is not high in performance. The pump stage comprises a rotor and a stator, the stator is provided with at least one stator disc, and the rotor is provided with at least one rotor disc; at least one through hole is formed in the outer edge of each rotor disc, the rotor discs and the stator discs are alternately arranged at intervals in the axial direction of the rotor, at least one group of gas channels used for pumping gas are formed between the rotor discs and the adjacent stator discs in the axial direction of the rotor, and each group of gas channels comprises at least one gas channel; when gas enters the gas channel from one side of the stator close to the central shaft of the rotor and is discharged from one side of the rotor far away from the central shaft, the outlet of the gas channel is at least one through hole corresponding to the rotor disc; when gas enters from the side, away from the center shaft, of the rotor and is exhausted from the side, close to the center shaft, of the stator, the inlet of the gas channel is at least one through hole in the corresponding rotor disc.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum pumps, in particular to a disc type drag vacuum pump stage, a vacuum pump, a composite vacuum pump and a semiconductor equipment. BACKGROUND

[0002] In the field of vacuum technology, molecular pumps are one of the key devices for achieving high vacuum environments. Molecular pumps transport gas molecules from low pressure areas to high pressure areas through different momentum transfer mechanisms, thereby achieving gas compression and pumping. Common molecular pumps include turbo molecular pumps, drag molecular pumps, etc., which play an important role in the fields of semiconductor manufacturing, scientific research, aerospace technology, etc.

[0003] Among them, the disc type drag pump, as an important drag molecular pump, occupies an important position in the field of vacuum technology due to its unique structure and working principle. The rotor disc and the stator disc of the disc type drag pump adopt a laminated structure, making the entire pump more compact in volume. This compact design allows the disc type drag pump to construct a longer compression flow path under the same height space conditions. The longer compression flow path allows the gas to be more fully compressed in the pump, thereby improving the performance of the pump.

[0004] However, the disc type drag pump also has some shortcomings. The disc type drag pump includes both centripetal and centrifugal types. The gas inlet of the compression flow path of the centripetal disc type drag pump is a gap between the outer edge of the rotor disc and the side wall surface of the adjacent stator or the inner wall surface of the molecular pump housing, and the gas outlet is a gap between the inner edge of the stator disc and the rotor outer wall. The gas inlet of the compression flow path of the centrifugal disc type drag pump is a gap between the inner edge of the stator disc and the rotor outer wall, and the gas outlet is a gap between the outer edge of the rotor disc and the side wall surface of the adjacent stator or the inner wall surface of the molecular pump housing. However, the pumping gas flow will be limited by the width of these gaps, which can easily lead to a decrease in the performance of the disc type drag pump.

[0005] Therefore, how to solve the problem of low performance of the existing disc type drag pump is a problem that needs to be solved by the technical personnel in the field at present. SUMMARY

[0006] The present application discloses a disc type drag vacuum pump stage, a vacuum pump, a composite vacuum pump and a semiconductor equipment, which is used to solve the problem of low performance of the existing disc type drag pump. By opening a through hole on the rotor disc, the amount of gas passing through the rotor disc and the stator disc per unit time is increased, the pumping speed of the disc type drag pump is improved, and the performance of the disc type drag pump is improved.

[0007] In a first aspect, this application provides a disc-type traction vacuum pump stage, including a stator and a rotor. The stator is provided with one or more stator discs; the rotor is provided with one or more rotor discs, each rotor disc having one or more through holes on its outer edge. The one or more rotor discs and one or more stator discs are alternately arranged at intervals along the axial direction of the rotor. Each rotor disc and its adjacent stator disc have at least one set of gas channels along the axial direction of the rotor for pumping gas. Each set of gas channels includes one or more gas channels. When gas enters one set of gas channels from the side of the stator near the central axis of the rotor and exits the set of gas channels from the side of the rotor away from the central axis, the outlet of the set of gas channels includes one or more through holes of the rotor disc corresponding to the set of gas channels. When gas enters one set of gas channels from the side of the rotor away from the central axis and exits the set of gas channels from the side of the stator near the central axis, the inlet of the set of gas channels includes one or more through holes of the rotor disc corresponding to the set of gas channels.

[0008] Thus, by setting through holes on the outer edge of the rotor disc and forming a gas channel with the stator disc, an additional flow path is provided for the pumped gas. Compared to a design without through holes, when the rotor and stator discs move relative to each other, the through holes act as gas outlets when gas enters the gas channel from the side of the stator closer to the central shaft of the rotor, allowing the gas to be discharged more quickly. Conversely, when gas enters the gas channel from the side of the rotor away from the central shaft, the through holes act as gas inlets, allowing the gas to be drawn in more quickly. This reduces the pressure drop that occurs during the gas entering or exiting the compression flow path, making gas delivery smoother and improving pumping efficiency. Due to the presence of through holes, the amount of gas that can pass through the rotor and stator discs per unit time increases, allowing the disc traction pump to handle more gas in the same working time, increasing the pumping speed of the disc traction pump, and thus improving the performance of the disc traction pump.

[0009] In one possible implementation, at least one rotor disk has one or more through holes, which are multiple through holes, with the center point of the multiple through holes located on the same circumference coaxial with the rotor disk containing the multiple through holes.

[0010] In this way, by setting multiple through holes, more flow paths can be provided for the gas, making the transmission of gas between the rotor disc and the stator disc smoother, thereby improving the pumping speed of the disc traction pump stage.

[0011] In one possible implementation, multiple through holes are evenly distributed on the same circumference coaxial with the rotor disk containing the multiple through holes.

[0012] In this way, the through holes are evenly distributed, which helps to distribute the gas flow path evenly between the rotor and stator discs. This allows the gas to be drawn in and discharged from the gas channel more evenly, avoiding situations where the local gas flow is too fast or too slow. This improves the overall uniformity of gas flow and reduces the unbalanced radial force on the rotor assembly, which helps to extend the service life of the vacuum pump and reduce maintenance costs.

[0013] In one possible implementation, the sidewall of at least one of the one or more through holes of at least one rotor disk is configured to have an angle of less than or equal to 90 degrees with the forward direction of rotor rotation.

[0014] Thus, the inclined wall design of the through hole allows the gas to be actively guided through the through hole during the rotation of the rotor disk, reducing the resistance of the gas at the inlet of the through hole and allowing the gas to pass through the through hole more smoothly. This enables the disc traction vacuum pump stage to process more gas in the same working time, thereby improving the pumping speed of the traction pump stage.

[0015] In one possible implementation, one or more gas channels are multiple gas channels arranged radially along the circumferential direction of one or more stator disks.

[0016] Thus, setting up multiple gas channels improves the utilization rate of the stator disc. In other words, by creating more gas channels within the limited area of ​​the end face of the stator disc where the gas channels are located, the area available for gas flow (the sum of the cross-sectional areas of all gas channels) is increased. This increases the amount of gas that can pass through the gas channels per unit time, thereby increasing the pumping speed of the disc traction pump stage. The radial gas channel design guides the gas as it enters or exits the gas channels, allowing for smoother flow.

[0017] In one possible implementation, the area of ​​the cross-section of each of the plurality of gas channels along the gas transmission direction of the gas channel gradually decreases, the cross-section being parallel to the rotor axis and perpendicular to the gas transmission direction of the gas channel.

[0018] Thus, the cross-sectional area of ​​the gas channel gradually decreases along the transmission direction, matching the trend of volume reduction during gas compression. This design helps the gas maintain a certain state of compression within the channel, preventing re-expansion and improving gas compression efficiency. This makes gas transmission within the channel more efficient, improving the pumping speed and ultimate vacuum of the disc-type traction vacuum pump stage.

[0019] In one possible implementation, one or more rotor disks are multiple rotor disks, and one or more stator disks are multiple stator disks.

[0020] Thus, the arrangement of multiple rotor and stator discs increases the overall length of the gas passage, extends the compression flow path of the gas in the vacuum pump, and allows the gas to be more fully compressed between the rotor and stator discs, thereby increasing the compression ratio and improving the ultimate vacuum of the disc traction vacuum pump stage.

[0021] Secondly, this application provides a vacuum pump, including: a gas inlet, a gas outlet, and a disc-type traction vacuum pump stage as described in any of the above embodiments, disposed between the gas inlet and the gas outlet, the disc-type traction vacuum pump stage being used to compress gas from the gas inlet and pump it out of the gas outlet.

[0022] In this way, by introducing a disc-type traction vacuum pump stage, the gas can flow along an optimized path after entering the vacuum pump, making the gas transmission within the vacuum pump smoother, thereby increasing the gas pumping speed, improving the ultimate vacuum level and overall performance.

[0023] In one possible implementation, the disc-type traction vacuum pump stage includes at least one centripetal pump stage and / or at least one centrifugal pump stage, with the centripetal and centrifugal pump stages alternating and connected in series.

[0024] Thus, the alternating centrifugal and radial pump stages can extend the flow path of the gas within the vacuum pump, allowing the gas to be more fully compressed within the pump, thereby increasing the compression ratio and ultimately improving the ultimate vacuum of the vacuum pump.

[0025] In one possible implementation, one or more stator disks include a first stator disk, one or more rotor disks include a first rotor disk, the first stator disk and the first rotor disk are adjacent to each other, the first rotor disk is disposed near the vacuum pump inlet, the centripetal pump stage includes the first rotor disk and the first stator disk, in the centripetal pump stage, gas enters from the side of the rotor away from the central axis into a set of gas channels between the first rotor disk and the first stator disk, and is pumped out from the side of the stator near the central axis.

[0026] Thus, in the centrifugal pump stage, the interconnected design of the gas channel and the through hole allows gas to quickly enter the gas channel through the through hole, increasing the cross-sectional area of ​​the gas entry channel path and increasing the amount of gas that can pass through the compression flow path per unit time, thereby improving the gas intake efficiency and thus increasing the pumping speed of the vacuum pump.

[0027] In one possible implementation, one or more stator disks include a second stator disk, one or more rotor disks include a second rotor disk, the second stator disk and the second rotor disk are adjacent to each other, the second stator disk is disposed near the vacuum pump inlet, the centrifugal pump stage includes the second stator disk and the second rotor disk, in the centrifugal pump stage, gas enters from the side of the stator near the central axis of the rotor into a set of gas channels between the second stator disk and the second rotor disk from the side of the rotor away from the central axis, and the set of gas channels is pumped out from the side of the rotor away from the central axis.

[0028] Thus, in the centrifugal pump stage, due to the interconnected design of the gas channel and the through hole, gas can quickly pass through the gas channel and be discharged through the through hole. The amount of gas that can pass through the compression flow path per unit time increases, thereby improving the gas discharge efficiency and thus increasing the pumping speed of the vacuum pump.

[0029] Thirdly, this application provides a composite vacuum pump, including a turbomolecular pump stage, wherein the outlet of the turbomolecular pump stage is connected in series with the inlet of a disc-type traction vacuum pump stage as described in any of the above embodiments.

[0030] Thus, after the gas undergoes initial compression and transmission in the turbomolecular pump stage, it can be discharged to the pump outlet more quickly through the gas channels and orifices of the disc-type traction vacuum pump stage, thereby increasing the pumping speed of the vacuum pump. The orifices of the disc-type traction vacuum pump stage reduce the pressure drop that occurs during the gas entry or exit from the compression flow path, improving the compression ratio and ultimate vacuum of the vacuum pump. The series combination of the turbomolecular pump stage and the disc-type traction vacuum pump stage can exert a synergistic effect, significantly improving the pumping speed of the composite vacuum pump, improving the ultimate vacuum, and significantly increasing the back pressure of the vacuum pump through further compression of the gas by the disc-type traction pump stage, thus broadening the applicable pressure and flow range of the vacuum pump.

[0031] In one possible implementation, the outlet of the disc traction vacuum pump stage is connected in series with the inlet of the Gaede traction pump stage and / or the inlet of the Holweck traction pump stage.

[0032] In this way, the outlet of the disc traction vacuum pump stage is connected in series with the Gaede traction pump stage and / or the Holweck traction pump stage, forming a multi-stage pumping system. This allows the gas to be further compressed by the Gaede traction pump stage and / or the Holweck traction pump stage after being compressed by the disc traction vacuum pump stage, thereby significantly improving the overall pump compression capacity, improving the pumping speed and compression ratio, and enabling more effective handling of gases under different pressure and flow conditions, thus broadening the applicable pressure and flow range of the vacuum pump.

[0033] Fourthly, this application provides a semiconductor device, including: a vacuum pump as described in any of the above embodiments; or a composite vacuum pump as described in any of the above embodiments.

[0034] Thus, the equipment uses an optimized vacuum pump or a composite vacuum pump, which improves the gas transmission efficiency, enabling it to process more gas per unit time. This not only speeds up the vacuuming process but also improves the efficiency of the entire semiconductor manufacturing process. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the structure of the first disc-type traction vacuum pump stage provided in the embodiments of this application;

[0037] Figure 2 This is a schematic diagram of the structure of the second disc-type traction vacuum pump stage provided in the embodiments of this application;

[0038] Figure 3 This is a schematic diagram of the structure of the third disc-type traction vacuum pump stage provided in the embodiments of this application;

[0039] Figure 4 This is a schematic diagram of the rotor disk structure provided in an embodiment of this application;

[0040] Figure 5 for Figure 1 A schematic diagram of the structure of one embodiment;

[0041] Figure 6 for Figure 3 A schematic diagram of the structure of one embodiment;

[0042] Figure 7 A top view of the stator disk provided in an embodiment of this application;

[0043] Figure 8 This is a schematic diagram of the structure of the vacuum pump provided in the embodiment of this application;

[0044] Figure 9 for Figure 8 A partial sectional view.

[0045] Explanation of reference numerals in the attached figures:

[0046] 1-Rotor;

[0047] 2-Rotor disc; 21-Through hole;

[0048] 3-Stator;

[0049] 4-Stator plate;

[0050] 5-Gas Channel;

[0051] 6-First slit;

[0052] 7-Second slit;

[0053] 8-Gas inlet;

[0054] 9-Gas outlet. Detailed Implementation

[0055] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0056] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0057] This application provides a disc-type traction vacuum pump stage, a vacuum pump, a compound vacuum pump, and a semiconductor device to solve the problem of low performance of existing disc-type traction pumps. By opening through holes 21 on the rotor disc 2, the amount of gas passing through the rotor disc 2 and stator disc 4 per unit time is increased, thereby improving the pumping speed of the disc-type traction pump and thus improving its performance.

[0058] Example 1

[0059] Please refer to Figure 1 , Figure 2 and Figure 3A disc-type traction vacuum pump stage includes a rotor 1 and a stator 3. The stator 3 is provided with one or more stator discs 4. The rotor 1 is provided with one or more rotor discs 2. The outer edge of each rotor disc 2 is provided with one or more through holes 21. The one or more rotor discs 2 and the one or more stator discs 4 are alternately arranged at intervals along the axial direction of the rotor 1. Each rotor disc 2 and the adjacent stator disc 4 have at least one set of gas channels 5 for pumping gas along the axial direction of the rotor 1. Each set of gas channels 5 includes one or more gas channels 5. When gas enters at least one set of gas channels 5 from the side of the stator 3 near the central axis of the rotor 1 and is pumped out from the side of the rotor 1 away from the central axis, the outlet of the set of gas channels 5 includes one or more through holes 21 of the rotor disc 2 corresponding to the set of gas channels 5. When gas enters at least one set of gas channels 5 from the side of the rotor 1 away from the central axis and is pumped out from the side of the stator 3 near the central axis, the inlet of the set of gas channels 5 includes one or more through holes 21 of the rotor disc 2 corresponding to the set of gas channels 5.

[0060] By providing through holes 21 on the outer edge of the rotor disk 2 and forming a gas channel 5 with the stator disk 4, an additional flow path is provided for the pumped gas. Compared to a design without through holes 21, when the rotor disk 2 and stator disk 4 move relative to each other, the through holes 21 can act as gas outlets when gas enters the gas channel 5 from the side of the stator 3 near the central shaft of the rotor 1, allowing the gas to be discharged more quickly. When gas enters the gas channel 5 from the side of the rotor 1 away from the central shaft, the through holes 21 act as gas inlets, allowing the gas to be drawn in more quickly. This reduces the pressure drop that occurs during the gas entering or exiting the compression flow path, making the gas delivery smoother and thus improving the pumping efficiency. Due to the presence of through holes 21, the amount of gas that can pass through the rotor disk 2 and stator disk 4 per unit time increases, allowing the disc traction pump to handle more gas in the same working time, increasing the pumping speed of the disc traction pump, and thus improving the performance of the disc traction pump.

[0061] It should be noted that in the disc-type traction vacuum pump stage of this application, the rotor disc 2 is circular, mounted on the rotor shaft, and can rotate with the rotor shaft. The number of rotor discs 2 can be one or more, the specific number determined according to the design requirements of the vacuum pump. The stator disc 4 is circular, fixed inside the pump casing, and alternately arranged with the rotor discs 2 along the axial direction. The number of stator discs 4 can also be one or more, matching the number of rotor discs 2. A first slit 6 for gas flow is formed between the outer edge of the rotor disc 2 and the side wall of the adjacent stator 3 or the inner wall of the molecular pump casing. A second slit 7 for gas flow is formed between the inner edge of the stator disc 4 and the outer wall of the rotor 1. The stator discs 4 and rotor discs 2 are spaced apart axially to form a space for gas flow. Within this space, gas channels 5 are formed by providing baffles (ribs) on the stator discs 4. These ribs are arranged at intervals along a specific geometric layout on the stator discs 4, thereby forming gas channels 5 for gas flow between adjacent ribs. This design not only provides a clear flow path for the gas, but also effectively guides and controls the flow direction and speed of the gas by optimizing the shape and spacing of the ribs, thereby improving the pumping efficiency and performance of the vacuum pump.

[0062] For example, the ribs can be integrally formed with the stator disk 4 to improve the structural strength and sealing between the ribs and the stator disk 4. Integral ribs are typically manufactured using precision casting or machining processes, enabling high-precision geometric and dimensional control. Alternatively, the ribs can be fixed to the stator disk 4 by subsequent welding or gluing. This manufacturing method offers greater design flexibility, allowing adjustments to the shape and position of the ribs during manufacturing. Welding or gluing processes contribute to a strong connection between the ribs and the stator disk 4 while maintaining good sealing performance.

[0063] As one implementation, the ribs can be disposed on one end face of the stator disk 4 or on both end faces of the stator disk 4. This flexible arrangement provides more possibilities for optimizing the gas flow path and improving the performance of the vacuum pump.

[0064] For example, a rib is set on one end face of the stator disk 4. This arrangement is suitable for scenarios with unidirectional gas flow, such as in a centrifugal pump stage or a radial pump stage, where gas enters from one direction and exits from another.

[0065] For example, ribs are set on the two end faces of stator disk 4. This arrangement is suitable for bidirectional gas flow scenarios, such as in a compound pump stage, where the gas needs to be compressed and discharged in both directions.

[0066] It should be understood that the location of the ribs can be flexibly adjusted according to specific design requirements.

[0067] Please refer to some implementation methods. Figure 1 and Figure 8 When rotor disk 2 and stator disk 4 are each set to one, and rotor disk 2 is located above stator disk 4, the disc-type traction vacuum pump stage has a centripetal structure. Rotor disk 2 is located near the gas inlet 8 of the vacuum pump. The inlet of gas channel 5 is the first slit 6 between rotor disk 2 and the inner wall of stator 3 and the through hole 21 on rotor disk 2. The outlet of gas channel 5 is the second slit 7 between the central axis of stator 3 and rotor 1. When rotor disk 2 rotates, the gas channel 5 set on stator disk 4 is arranged to advance towards the center of stator disk 4 along the rotation direction of rotor disk 2. Gas can be quickly drawn into the gas channel 5 through the first slit 6 and through hole 21 on the outer edge of the rotor disk 2, thereby reducing the pressure drop that occurs when the gas enters the compression flow path, making the gas delivery smoother. After passing through the gas channel 5, the gas is discharged from the second slit 7. The through hole 21 provides an additional channel for pumped gas to enter the compression flow path, increasing the amount of gas that can pass through the rotor disk 2 and stator disk 4 per unit time, improving the pumping efficiency, thereby increasing the pumping speed of the disc traction vacuum pump stage, and enabling the disc traction vacuum pump stage to reduce the pressure in the working chamber more quickly.

[0068] Please refer to some implementation methods. Figure 2 and Figure 8 When rotor disk 2 and stator disk 4 are each set to one, and rotor disk 2 is located below stator disk 4, the disc-type traction vacuum pump stage has a centrifugal structure. Rotor disk 2 is located near the gas outlet 9 of the vacuum pump. The inlet of gas channel 5 is the second slit 7 between the central axis of stator 3 and rotor 1, and the outlet of gas channel 5 is the first slit 6 between rotor disk 2 and the inner wall of stator 3 and the through hole 21 on rotor disk 2. When rotor disk 2 rotates, the gas channel 5 on stator disk 4 is arranged to advance towards the outer edge of stator disk 4 along the rotation direction of rotor disk 2. Gas can pass through the stator 3 and the... The gas is drawn into the gas passage 5 through the second slit 7 between the central shafts of rotor 1. After passing through the gas passage 5, the gas can be quickly discharged through the first slit 6 and through hole 21 between rotor disk 2 and the inner wall of stator 3, thereby reducing the pressure drop that occurs during the gas discharge compression flow path and making the gas delivery smoother. Through hole 21 provides an additional channel for pumping gas to be discharged from the compression flow path, increasing the amount of gas that can pass through rotor disk 2 and stator disk 4 per unit time, improving the pumping efficiency, thereby increasing the pumping speed of the disc traction vacuum pump stage, and enabling the disc traction vacuum pump stage to reduce the pressure in the working chamber more quickly.

[0069] Please refer to some implementation methods. Figure 3 and Figure 8When there are two rotor disks 2 and one stator disk 4, with the stator disk 4 located between the two rotor disks 2, the disc-type traction vacuum pump stage has a composite structure. One rotor disk 2 is located near the gas inlet 8 of the vacuum pump, and the other rotor disk 2 is located near the gas outlet 9 of the vacuum pump. A first gas channel is provided on the end face of the stator disk 4 opposite to the rotor disk 2 near the gas inlet 8 of the vacuum pump. The inlet of the first gas channel is the first slit 6 between the rotor disk 2 and the inner wall of the stator 3 and the through hole 21 on the rotor disk 2. The outlet of the first gas channel is between the central shaft of the stator 3 and the rotor 1. The second slit 7 and the first gas passage are arranged to advance toward the center of the stator disk 4 along the rotation direction of the rotor disk 2, forming a centrifugal pump stage; the stator disk 4 and the rotor disk 2 opposite to the gas outlet 9 of the vacuum pump are provided with a second gas passage. The inlet of the second gas passage is the second slit 7 between the central shaft of the stator 3 and the rotor 1, and the outlet of the second gas passage is the first slit 6 between the rotor disk 2 and the inner wall of the stator 3 and the through hole 21 on the rotor disk 2. The second gas passage is arranged to advance toward the outer edge of the stator disk 4 along the rotation direction of the rotor disk 2, forming a centrifugal pump stage. When the rotor disk 2 rotates, gas can be quickly drawn into the first gas channel through the first slit 6 and through hole 21 on the inner wall of the rotor disk 2 and stator 3 near the gas inlet 8 of the vacuum pump. After passing through the first gas channel, it enters the second gas channel through the second slit 7 between the central shaft of the stator 3 and the rotor 1. After passing through the second gas channel, it is quickly discharged from the first slit 6 and through hole 21 on the inner wall of the rotor disk 2 and stator 3 near the gas outlet 9 of the vacuum pump. This reduces the pressure drop that occurs during the gas entry and discharge of the compression flow path, making the gas delivery smoother. The through hole 21 provides an additional channel for the pumped gas to enter or exit the compression flow path, increasing the amount of gas that can pass through the rotor disk 2 and stator disk 4 per unit time, improving the pumping efficiency, and thus increasing the pumping speed of the disc traction vacuum pump stage, enabling the disc traction vacuum pump stage to reduce the pressure in the working chamber more quickly.

[0070] Please refer to some implementation methods. Figure 1 , Figure 2 , Figure 3 and Figure 4 At least one rotor disk 2 has one or more through holes 21, which are multiple through holes 21, and the center point of the multiple through holes 21 is located on the same circumference coaxial with the rotor disk 2 on which the multiple through holes 21 are located. Multiple through holes 21 are provided on at least one rotor disk 2, and the number of these through holes 21 can be adjusted according to the gas flow rate and pump performance requirements. For example, 6, 8 or 12 through holes 21 can be provided.

[0071] By providing multiple through holes 21, more flow paths can be provided for the gas, making the gas transmission between the rotor disk 2 and the stator disk 4 smoother, thereby increasing the pumping speed of the disc traction pump stage. The center points of the multiple through holes are located on the same circumference coaxial with the rotor disk 2, which helps to evenly distribute the multiple through holes 21 on the rotor disk 2, so that the gas can be evenly distributed when entering or exiting, reducing the situation where the local gas flow is too fast or too slow.

[0072] In some implementations, multiple through holes 21 are evenly distributed on the same circumference coaxial with the rotor disk 2 where the multiple through holes 21 are located. The uniform distribution of the through holes 21 helps to evenly distribute the gas flow path between the rotor disk 2 and the stator disk 4, so that the gas can be drawn in and discharged from the gas channel 5 more evenly, avoiding situations where the local gas flow is too fast or too slow, thereby improving the overall uniformity of gas flow.

[0073] It should be noted that multiple through holes 21 are evenly distributed on the same circumference coaxial with the rotor disk 2, ensuring uniform gas distribution when entering or exiting the rotor disk 2. This uniform distribution reduces gas accumulation or obstructed flow in localized areas, thereby improving the overall uniformity of gas flow. During vacuum pump operation, gas can stably enter and exit the gas channel 5 through these evenly distributed through holes 21, reducing gas flow fluctuations and thus improving the stability of pumping efficiency. Moreover, the evenly distributed through hole design 21 makes gas flow smoother, reducing the impact of gas on the rotor disk 2 and stator disk 4, reducing unbalanced forces on the rotor assembly, which helps to improve the lifespan and reliability of the vacuum pump and reduce maintenance costs.

[0074] Please refer to some implementation methods. Figure 4 At least one sidewall of one or more through holes 21 of at least one rotor disk 2 is configured to have an angle of less than or equal to 90 degrees with the forward direction of rotation of rotor 1. The inclined wall design of the through hole 21 allows gas to be actively guided through the through hole 21 during the rotation of rotor disk 2, reducing the resistance of gas at the inlet of through hole 21, allowing gas to pass through through hole 21 more smoothly, improving gas intake efficiency, and enabling the disc traction vacuum pump stage to handle more gas in the same working time, thereby improving pumping efficiency and pumping speed of traction pump stage.

[0075] In some implementations, the through-hole 21 is arc-shaped, and the angles of the two sidewalls of the arc-shaped hole along the forward direction of rotor 1 are set to be the same, for example, both sidewalls form a 45-degree angle with the forward direction of rotor 1. This design allows gas to flow more smoothly when entering and exiting the through-hole 21, reducing gas resistance at the inlet and outlet of the through-hole 21. The angles of the two sidewalls of the arc-shaped hole along the forward direction of rotor 1 can also be different, for example, one sidewall forms a 30-degree angle with the forward direction of rotor 1, and the other sidewall forms a 60-degree angle with the forward direction of rotor 1. This design allows gas to flow more smoothly when entering and exiting the through-hole 21, reducing gas resistance at the inlet and outlet of the through-hole 21. In practical applications, the through-hole 21 can be circular, square, or fan-shaped, etc., and the specific shape is selected according to the gas flow characteristics and manufacturing process.

[0076] It should be noted that, please refer to Figure 5 and Figure 6 The inclined wall of the through hole 21 enables the rotor disk 2 to have active transmission capability, which can actively guide the gas through the through hole, so that the gas is effectively driven during the rotation of the rotor disk 2, reducing the pressure drop that occurs when the gas enters or exits the compression flow path, thereby improving the gas flow efficiency.

[0077] Please refer to some implementation methods. Figure 1 , Figure 2 , Figure 3 , Figure 5 , Figure 6 and Figure 7 One or more gas channels 5 are arranged radially along the circumference of one or more stator discs 4. The arrangement of multiple gas channels 5 improves the utilization rate of the stator discs 4. In other words, by creating more gas channels 5 within the limited area of ​​the end face of the stator disc 4 where the gas channels 5 are located, the area available for gas flow (the sum of the cross-sectional areas of all gas channels 5) is increased. Therefore, the amount of gas that can pass through the gas channels 5 per unit time is increased, thereby increasing the pumping speed of the disc traction pump stage. The radial gas channel design guides the gas as it enters or exits the gas channels 5, allowing for smoother flow.

[0078] For example, in practical applications, multiple gas channels 5 can be configured as straight lines, polygonal lines, Archimedean spirals, logarithmic spirals, hyperbolic spirals, circular arcs, etc. Different shapes of gas channels 5 can be optimized according to specific needs, without any limitations. For instance, logarithmic spiral and hyperbolic spiral gas channels 5 are more difficult to manufacture than straight / polygonal channels, but they can more effectively guide unidirectional gas flow and achieve a longer compression path length compared to straight / polygonal channels, thereby improving gas delivery efficiency and ultimate vacuum.

[0079] In some implementations, the cross-sectional area of ​​each gas channel 5 along the gas transmission direction gradually decreases. This cross-section is parallel to the axial direction of the rotor 1 and perpendicular to the gas transmission direction of the gas channel 5. For example, taking one gas channel 5 as an example, the top surface of the gas channel 5 is at the same height, and the bottom surface of the gas channel 5 is deepest on the side closer to the central axis of the rotor 1 and shallowest on the side farther from the central axis of the rotor 1. That is, the cross-sectional area of ​​the gas channel 5 along the gas transmission direction gradually decreases.

[0080] As the gas is transported, it is gradually compressed, and its volume decreases accordingly. The cross-sectional area of ​​gas channel 5 gradually decreases along the transport direction, matching the trend of volume reduction during gas compression. This design helps the gas maintain a certain state of compression within the channel, preventing re-expansion and thus improving gas compression efficiency. This makes gas transport within the channel more efficient, improving the pumping speed and ultimate vacuum of the disc traction pump stage.

[0081] Please refer to some implementation methods. Figure 8 One or more rotor disks 2 are considered multiple rotor disks 2, and one or more stator disks 4 are considered multiple stator disks 4. The multiple rotor disks 2 and stator disks 4 are arranged alternately at intervals along the axial direction, and the gas channels 5 are connected in series, extending the compression flow path of the gas within the disc-type traction vacuum pump stage. This allows the gas to pass through the gas channels 5 multiple times between the rotor disks 2 and stator disks 4, resulting in more thorough compression and thus improving the compression performance of the disc-type traction vacuum pump stage and enhancing its ultimate vacuum.

[0082] For example, two rotor disks 2 and two stator disks 4 are provided. The stator disks 4 and rotor disks 2 are alternately arranged along the axial direction of the rotor 1. One rotor disk 2 is located near the gas inlet 8 of the vacuum pump, and one stator disk 4 is located near the gas outlet 9 of the vacuum pump. When the rotor disk 2 rotates, gas can be quickly drawn in through the first slit 6 and through hole 21 on the outer edge of the rotor disk 2 near the gas inlet 8 of the vacuum pump. After passing through multiple gas channels 5, the gas is discharged from the second slit 7 between the inner edge of the stator disk 4 and the rotor 1. The gas passes through the gas channels 5 multiple times between the rotor disk 2 and the stator disk 4, allowing the gas to be compressed multiple times, which can more effectively reduce the pressure in the working chamber, thereby improving the ultimate vacuum. Furthermore, the staggered arrangement of the rotor disks 2 and stator disks 4 can reduce the backflow of gas in the gas channels 5, thereby improving the gas delivery efficiency and the ultimate vacuum.

[0083] Example 2

[0084] Based on the above embodiments, please refer to Figure 8 and Figure 9 This embodiment provides a vacuum pump, including: a gas inlet 8, a gas outlet 9, and a disc-type traction vacuum pump stage as described above, disposed between the gas inlet 8 and the gas outlet 9. The disc-type traction vacuum pump stage is used to compress the gas from the gas inlet 8 and pump it out of the gas outlet 9. By introducing the aforementioned disc-type traction vacuum pump stage, the gas can flow along an optimized path after entering the vacuum pump, making the gas transmission within the vacuum pump smoother, thereby improving the pumping speed, ultimate vacuum, and overall performance.

[0085] In some implementations, the disc-type traction vacuum pump stage includes at least one centripetal pump stage and / or at least one centrifugal pump stage, with the centripetal and centrifugal pump stages alternating and connected in series. The alternating centripetal and centrifugal pump stages extend the gas flow path within the vacuum pump, allowing for more thorough gas compression. Furthermore, this alternating series arrangement reduces backflow of the pumped gas within the gas channel 5, thereby improving the ultimate vacuum level of the vacuum pump.

[0086] For example, the vacuum pump includes only one centripetal pump stage, making the overall structure of the vacuum pump simpler. This design reduces the number of components and complexity, lowering manufacturing costs and maintenance difficulty. The aforementioned centripetal pump stage design optimizes the gas flow path. Gas can be quickly drawn into the gas channel 5 through the first slit 6 and through hole 21 on the outer edge of the rotor disk 2, thereby reducing the pressure drop that occurs when the gas enters the compression flow path, making the gas delivery smoother. Furthermore, the through hole 21 provides an additional flow path for the pumped gas to enter the gas channel 5, increasing the amount of gas that can pass through the rotor disk 2 and stator disk 4 per unit time, thus improving the pumping speed.

[0087] For example, the vacuum pump includes only one centrifugal pump stage, which is designed to optimize the gas flow path. Gas can be quickly discharged through the first slit 6 and through hole 21 on the outer edge of the rotor disk 2, thereby reducing the pressure drop that occurs during the gas discharge compression flow path, making the gas delivery smoother, increasing the amount of gas that can pass through the rotor disk 2 and stator disk 4 per unit time, improving the pumping efficiency, and thus increasing the pumping speed of the vacuum pump, enabling the centrifugal pump stage to reduce the pressure in the working chamber more quickly.

[0088] For example, the vacuum pump includes a centrifugal pump stage and a centrifugal pump stage. The centrifugal pump stage is located near the gas inlet 8 of the vacuum pump, and the centrifugal pump stage is located near the gas outlet 9 of the vacuum pump. After the gas is initially compressed by the centrifugal pump stage, it is further compressed by the centrifugal pump stage. This multi-stage processing can more effectively reduce the pressure in the working chamber, thereby improving the ultimate vacuum. The combination of the centrifugal pump stage and the centrifugal pump stage brings additional advantages. The combination of the centrifugal pump stage and the centrifugal pump stage makes the gas channel 5 have a tortuous shape. The gas undergoes a change in flow direction at the connection between the centrifugal pump stage and the centrifugal pump stage, which effectively increases the difficulty of gas backflow and thus reduces the performance loss caused by gas backflow leakage.

[0089] For example, the vacuum pump includes multiple centrifugal pump stages and multiple centrifugal pump stages, and the combination of multiple centrifugal pump stages forms a multi-stage pumping system. As the gas passes through multiple pump stages, it can be progressively compressed. This multi-stage processing significantly improves the pump's gas compression efficiency, more effectively reduces the pressure within the working chamber, and thus improves the ultimate vacuum level. The alternating arrangement of multiple centrifugal and centrifugal pump stages can reduce gas backflow within the channels, thereby minimizing performance loss caused by gas backflow leakage.

[0090] In some embodiments, one or more stator disks 4 include a first stator disk 4, and one or more rotor disks 2 include a first rotor disk. The first stator disk and the first rotor disk are adjacent to each other, and the first rotor disk is located near the vacuum pump inlet. The centripetal pump stage includes the first rotor disk and the first stator disk. In the centripetal pump stage, gas enters from the side of the rotor 1 away from the central axis into a set of gas channels 5 between the first rotor disk and the first stator disk, and is pumped out from the side of the stator 3 near the central axis. The centripetal pump stage includes: rotor disk 2 and stator disk 4. The stator disk 4 and the rotor disk 2 are alternately arranged at intervals along the axial direction of the rotor 1. The rotor disk 2 is located closer to the gas inlet 8 than the stator disk 4. The end face of the stator disk 4 opposite to the rotor disk 2 is provided with at least one gas channel 5 for pumping gas. The outer edge of the rotor disk 2 is provided with at least one through hole 21, and the gas channel 5 communicates with the through hole 21. Because of the connection between the gas channel 5 and the through hole 21, the gas can quickly enter the gas channel 5 through the through hole 21, which increases the cross-sectional area of ​​the gas entering the channel and increases the amount of gas that can pass through the compression flow path per unit time, thereby improving the gas intake efficiency and thus increasing the pumping speed of the vacuum pump.

[0091] It should be noted that when the rotor disk 2 rotates, the gas channel 5 set on the stator disk 4 is arranged to move towards the center of the stator disk 4 along the rotation direction of the rotor disk 2. Gas can be quickly drawn into the gas channel 5 through the first slit 6 and through hole 21 on the outer edge of the rotor disk 2, thereby reducing the pressure drop that occurs when the gas enters the compression flow path, making the gas delivery smoother. The through hole 21 provides an additional channel for pumping gas to enter the compression flow path, increasing the amount of gas that can pass through the rotor disk 2 and stator disk 4 per unit time, thereby improving the pumping speed of the vacuum pump and enabling the vacuum pump to reduce the pressure in the working chamber more quickly.

[0092] In some embodiments, one or more stator disks 4 include a second stator disk, and one or more rotor disks 2 include a second rotor disk. The second stator disk and the second rotor disk are adjacent to each other, with the second stator disk positioned near the vacuum pump inlet. The centrifugal pump stage includes a second stator disk and a second rotor disk. In the centrifugal pump stage, gas enters from the side of the stator 3 near the central axis of the rotor 1 through a set of gas channels 5 between the second stator disk and the second rotor disk, and is pumped out from the side of the rotor 1 away from the central axis. The centrifugal pump stage includes a rotor disk 2 and a stator disk 4, with the stator disk 4 and rotor disk 2 alternately spaced along the axial direction of the rotor 1. The stator disk is positioned near the gas inlet 8, and at least one gas channel 5 for pumping gas is provided on the end face of the stator disk opposite to the rotor disk. At least one through hole 21 is provided on the outer edge of the rotor disk, and the gas channel 5 communicates with the through hole 21. Due to the connection design between the gas channel 5 and the through hole 21, the gas can quickly pass through the through hole and be discharged, reducing the pressure drop that occurs during the gas discharge compression flow path; the through hole 21 provides an additional channel for the pumped gas to be discharged from the compression flow path, increasing the amount of gas that can pass through the compression flow path per unit time, thereby increasing the pumping speed of the vacuum pump.

[0093] It should be noted that the rotor disk 2 is located near the gas outlet 9 of the vacuum pump. When the rotor disk 2 rotates, the gas channel 5 on the stator disk 4 is arranged to advance towards the outer edge of the stator disk 4 along the rotation direction of the rotor disk 2. Gas can be quickly discharged through the first slit 6 and through hole 21 on the outer edge of the rotor disk 2, thereby reducing the pressure drop that occurs during the gas discharge compression flow path and making the gas delivery smoother. The through hole 21 provides an additional channel for the pumped gas to be discharged from the compression flow path, increasing the amount of gas that can pass through the rotor disk 2 and stator disk 4 per unit time, thereby improving the pumping speed of the vacuum pump and enabling the vacuum pump to reduce the pressure in the working chamber more quickly.

[0094] Example 3

[0095] Based on the above embodiments, this embodiment provides a composite vacuum pump, including a turbomolecular pump stage, with the outlet of the turbomolecular pump stage connected in series with the inlet of the aforementioned disc-type traction vacuum pump stage. After the gas undergoes preliminary compression and transmission by the turbomolecular pump stage, it can be discharged to the pump outlet more quickly through the gas channel 5 and through hole 21 of the disc-type traction vacuum pump stage, thereby increasing the pumping speed of the vacuum pump, reducing the pressure drop that occurs during the gas entering or exiting the compression flow path, and improving the compression ratio and ultimate vacuum of the vacuum pump. The series combination of the turbomolecular pump stage and the disc-type traction vacuum pump stage can exert a synergistic effect, improving the ultimate vacuum of the composite vacuum pump, and the further compression of the gas by the disc-type traction pump stage significantly increases the fore-stage pressure of the vacuum pump, thus broadening the applicable pressure and flow range of the vacuum pump.

[0096] It should be noted that the turbomolecular pump stage is renowned for its high pumping speed under high vacuum conditions, enabling rapid transfer of gas from the gas inlet 8 to its outlet, while the disc traction pump stage provides higher gas compression capacity over a wider pressure range. The combination of the turbomolecular pump stage and the disc traction vacuum pump stage improves the overall pump's compression performance and increases the back pressure, thereby broadening the applicable pressure and flow range of the vacuum pump to meet diverse operating conditions and user needs.

[0097] In some implementations, the outlet of the disc-type traction vacuum pump stage is connected in series with the inlet of a Gaede traction pump stage and / or a Holweck traction pump stage. This series connection of the disc-type traction vacuum pump stage's outlet with the Gaede and / or Holweck traction pump stages forms a multi-stage pumping system. This allows the gas, after initial compression by the disc-type traction vacuum pump stage, to be further processed by the Gaede and / or Holweck traction pump stages, significantly improving the gas compression effect of the composite vacuum pump. This enables higher vacuum levels and increases the pump's back pressure, thus further expanding the application range of the vacuum pump. For example, this combination can meet the requirements of high flow rates or high vacuum levels, thereby improving the adaptability of the vacuum pump.

[0098] Example 4

[0099] Based on the above embodiments, this embodiment provides a semiconductor device, including: a vacuum pump as described in any of the above embodiments; or a composite vacuum pump as described in any of the above embodiments. This device employs an optimized vacuum pump or composite vacuum pump, improving gas transfer efficiency and enabling the processing of more gas per unit time. This not only accelerates the vacuuming process but also enhances the overall efficiency of the semiconductor manufacturing process.

[0100] As some implementations, the semiconductor device is a semiconductor manufacturing apparatus. For example, the semiconductor manufacturing apparatus has a cavity for creating a vacuum environment, a gas inlet of a target pump connected to the cavity, and a gas outlet of the target pump located outside the cavity (e.g., at the atmosphere). The target pump is used to expel gas from the cavity to create a vacuum environment within the cavity. Here, the target pump is the gas inlet of a vacuum pump as described in any of the above embodiments or a composite vacuum pump as described in any of the above embodiments.

[0101] The foregoing preferred embodiments have further illustrated the objectives, technical solutions, and advantages of the present invention. It should be understood that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A disc-type traction vacuum pump stage, characterized in that, include: Stator, wherein one or more stator disks are provided on the stator; The rotor has one or more rotor disks, each rotor disk having one or more through holes on its outer edge. The one or more rotor disks and the one or more stator disks are alternately arranged at intervals along the axial direction of the rotor. Each rotor disk and the adjacent stator disk have at least one set of gas channels along the axial direction of the rotor for pumping gas. Each set of gas channels includes one or more gas channels. When the gas enters one of the at least one set of gas channels from the side of the stator near the central axis of the rotor and exits the gas channel from the side of the rotor away from the central axis, the outlet of the gas channel includes one or more through holes in the rotor disk corresponding to the gas channel. When the gas enters one of the at least one set of gas channels from the side of the rotor away from the central axis and exits the gas channel from the side of the stator near the central axis, the inlet of the gas channel includes one or more through holes in the rotor disk corresponding to the gas channel.

2. The disc-type traction vacuum pump stage according to claim 1, characterized in that, At least one rotor disk has one or more through holes, which are multiple through holes, and the center point of the multiple through holes is located on the same circumference coaxial with the rotor disk in which the multiple through holes are located.

3. The disc-type traction vacuum pump stage according to claim 2, characterized in that, The plurality of through holes are evenly distributed on the same circumference coaxial with the rotor disk in which the plurality of through holes are located.

4. The disc-type traction vacuum pump stage according to any one of claims 1-3, characterized in that, The sidewall of at least one of the one or more through holes of at least one rotor disk is configured to have an angle of less than or equal to 90 degrees with the forward direction of rotation of the rotor.

5. The disc-type traction vacuum pump stage according to any one of claims 1-4, characterized in that, The one or more gas channels are multiple gas channels, and the multiple gas channels are arranged radially along the circumferential direction of the one or more stator disks.

6. The disc-type traction vacuum pump stage according to claim 5, characterized in that, The cross-sectional area of ​​each of the plurality of gas channels gradually decreases along the gas transmission direction of the gas channel, and the cross-section is parallel to the axial direction of the rotor and perpendicular to the gas transmission direction.

7. The disc-type traction vacuum pump stage according to any one of claims 1-6, characterized in that, The one or more rotor disks are multiple rotor disks, and the one or more stator disks are multiple stator disks.

8. A vacuum pump, characterized in that, include: A gas inlet, a gas outlet, and a disc-type traction vacuum pump stage as described in any one of claims 1 to 7 disposed between the gas inlet and the gas outlet, the disc-type traction vacuum pump stage being used to compress gas from the gas inlet and pump it out of the gas outlet.

9. The vacuum pump according to claim 8, characterized in that, The disc-type traction vacuum pump stage includes at least one centripetal pump stage and / or at least one centrifugal pump stage, wherein the centripetal pump stage and the centrifugal pump stage are alternately distributed and connected in series.

10. The vacuum pump according to claim 9, characterized in that, The one or more stator disks include a first stator disk, the one or more rotor disks include a first rotor disk, the first stator disk and the first rotor disk are adjacent to each other, the first rotor disk is disposed near the vacuum pump inlet, the centripetal pump stage includes the first rotor disk and the first stator disk, in the centripetal pump stage, the gas enters from the side of the rotor away from the central axis into a set of gas channels between the first rotor disk and the first stator disk, and is pumped out from the side of the stator near the central axis.

11. The vacuum pump according to any one of claims 9 or 10, characterized in that, The one or more stator disks include a second stator disk, the one or more rotor disks include a second rotor disk, the second stator disk and the second rotor disk are adjacent to each other, the second stator disk is disposed near the vacuum pump inlet, the centrifugal pump stage includes the second stator disk and the second rotor disk, in the centrifugal pump stage, the gas enters from the side of the stator near the central axis of the rotor into a set of gas channels between the second stator disk and the second rotor disk from the side of the rotor away from the central axis, and the set of gas channels is pumped out from the side of the rotor away from the central axis.

12. A composite vacuum pump, characterized in that, It includes a turbomolecular pump stage, the outlet of which is connected in series with the inlet of a disc-type traction vacuum pump stage as described in any one of claims 1 to 7.

13. The composite vacuum pump according to claim 12, characterized in that, The outlet of the disc-type traction vacuum pump stage is connected in series with the inlet of the Gaide traction pump stage and / or the inlet of the Holwick traction pump stage.

14. A semiconductor device, characterized in that, include: The vacuum pump as described in any one of claims 8-11; or The composite vacuum pump as described in claim 12 or 13.

Images