Detection device and detection method for detecting precision of main shaft of CVD (Chemical Vapor Deposition) equipment

Abstract

The invention discloses a detection device and a detection method for precision detection of a main shaft of CVD equipment, and the detection device comprises a dial indicator supporting seat which can be fixedly connected with a main shaft housing installation reference surface of the main shaft of the CVD equipment and is used for installing a first dial indicator and a second dial indicator; the first dial indicator is fixed on the dial indicator supporting seat and is used for fitting a pointer with the side surface of the main shaft of the CVD equipment so as to detect the circular run-out of the main shaft; and the second dial indicator is fixed on the dial indicator supporting seat and is used for fitting the indicator hand with the end surface of the main shaft of the CVD equipment so as to detect the jumping of the end surface of the main shaft. The detection device for detecting the precision of the main shaft of the CVD equipment has the advantages of being simple in structure, convenient to operate, high in detection precision and the like.

Description

Technical Field

[0001] This invention relates to the field of CVD equipment maintenance technology, and in particular to a testing device and method for detecting the spindle accuracy of CVD equipment. Background Technology

[0002] A transfer tray is installed above the spindle of a chemical vapor deposition (CVD) machine. The lifting and rotation of the spindle drives the lifting and rotation of the transfer tray, thereby realizing the transfer of wafers. During the wafer transfer process, it is necessary to ensure the precise positional accuracy of the wafers. That is, when the transfer tray is connected to the spindle, a certain installation accuracy needs to be ensured. In order to ensure the installation accuracy of the transfer tray and the spindle, it is necessary to detect the circular runout and spindle end face runout of the CVD machine spindle during the processing or maintenance of the CVD machine spindle. How to conveniently detect the circular runout and spindle end face runout of the CVD machine spindle is a technical problem that urgently needs to be solved. Summary of the Invention

[0003] In response to the above-mentioned problems, this invention proposes a detection device for detecting the spindle accuracy of CVD equipment. The technical means employed in this invention are as follows: A testing device for detecting the spindle accuracy of CVD equipment, comprising: It can be fixedly connected to the spindle housing mounting reference surface of the CVD equipment spindle, and is used to install the first and second dial indicators; A first dial indicator, fixed to the dial indicator support, for contacting the indicator needle with the side of the CVD equipment spindle to detect spindle runout; and... A second dial indicator is fixed on the dial indicator support base and used to attach the indicator needle to the spindle end face of the CVD equipment to detect spindle end face runout.

[0004] Furthermore, the dial indicator support base includes a support base body with a flat plate structure. One side of the support base body is provided with a first reference surface that is fitted and fixed to the mounting reference surface of the spindle housing of the CVD equipment spindle. One end of the support base body that contacts the spindle of the CVD equipment is provided with an arc-shaped receiving groove that fits and contacts the outer wall of the spindle of the CVD equipment. The support base body is also provided with bolt through holes for fixed connection with the mounting reference surface of the spindle housing of the CVD equipment spindle. Furthermore, the first dial indicator is a magnetic dial indicator; The second percentile is a leverage percentile.

[0005] Furthermore, the support body is also provided with a second reference surface for contacting the end face of the spindle, and the second reference surface is also provided with a second through hole for fixing to the end face of the spindle by bolts.

[0006] Furthermore, a second arc-shaped groove is also provided on the second reference surface of the support body. A method for detecting the spindle accuracy of a CVD equipment using the detection device for detecting the spindle accuracy of a CVD equipment as described in this application includes the following steps: Step 1: Fix the dial indicator support to the mounting reference surface of the spindle housing of the CVD equipment spindle; Step 2: Fix the first dial indicator to one side of the upper surface of the dial indicator support, adjust the position of the first dial indicator needle so that the first dial indicator needle is in contact with the side of the CVD equipment spindle, and zero the first dial indicator. Step 3: Fix the second dial indicator to the other side of the upper surface of the dial indicator support, adjust the position of the pointer of the second dial indicator so that the pointer of the second dial indicator contacts the end face of the CVD equipment spindle, and zero the second dial indicator. Step 4: Reciprocate the spindle of the CVD equipment and observe whether there is a deviation in the zero point value of the pointers of the first and second dial indicators. If so, readjust the pointers and zero point of the dial indicators; if not, proceed to the next step. Step 5: Rotate the CVD equipment spindle one revolution, read the runout values ​​of the first and second dial indicators, and obtain the spindle circular runout value and end face runout value of the CVD equipment spindle.

[0007] Furthermore, it also includes determining whether the CVD equipment spindle has reached the set accuracy based on the obtained spindle circular runout and end face runout values. If yes, the accuracy data is recorded; if not, the CVD equipment spindle is further adjusted.

[0008] Furthermore, the specific process of fixing the dial indicator support to the spindle housing mounting reference surface of the CVD equipment spindle is as follows: The first reference surface of the support body is fitted and fixed to the mounting reference surface of the spindle housing of the CVD equipment spindle, and the arc-shaped receiving groove of the support body is fitted to the outer wall of the CVD equipment spindle. Bolts are installed in the bolt through holes on the mounting reference surfaces of the support body and the spindle housing of the CVD equipment spindle. Nuts are screwed into the bolts using a torque wrench with the torque set to 25 N.m.

[0009] Furthermore, it also includes contacting the second reference surface of the support body with the spindle end face and fixing the support body to the spindle end face with bolts, fixing the first dial indicator to the lower surface of the dial indicator support, adjusting the position of the first dial indicator needle so that the first dial indicator needle is in contact with the side of the spindle housing mounting reference surface of the CVD equipment spindle and zeroing the first dial indicator; Fix the second dial indicator to the upper surface of the dial indicator support, adjust the position of the dial indicator needle so that the needle of the second dial indicator contacts the end face of the mounting reference surface of the spindle housing of the CVD equipment spindle, and zero the second dial indicator. Rotate the CVD equipment spindle back and forth and observe whether there is a deviation in the zero point value of the pointers of the first and second dial indicators. If so, readjust the pointers and zero point of the dial indicators; if not, proceed to the next step. Rotate the CVD equipment spindle one revolution and read the runout values ​​of the first and second dial indicators to obtain the circular runout value and end face runout value of the CVD equipment spindle housing mounting reference surface.

[0010] Compared with the prior art, the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention has the following beneficial effects: By setting a dial indicator support base, a first dial indicator and a second dial indicator, the first dial indicator and the second dial indicator can be installed on the dial indicator support base at the same time, so that the first dial indicator and the second dial indicator can conveniently detect the spindle runout and end face runout of CVD equipment. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the first direction structure of the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention; Figure 2 This is a schematic diagram of the second direction structure of the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention; Figure 3 This is a front view of the dial indicator support base of the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention; Figure 4 This is a cross-sectional view of the dial indicator support base of the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention. Figure 5 for Figure 3 The left view; Figure 6 This is a schematic diagram of the first direction structure of the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention for detecting the spindle housing mounting reference surface; Figure 7 This is a schematic diagram of the second direction structure of the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention, which performs the detection of the spindle housing mounting reference surface. Figure 8 This is a flowchart of a method for detecting the spindle accuracy of a CVD equipment using a detection device for detecting the spindle accuracy of a CVD equipment, as disclosed in this invention. In the diagram: 1. Dial indicator support base; 10. Support base body; 11. First reference surface; 12. Arc-shaped receiving groove; 13. Bolt through hole; 14. Second reference surface; 15. Second arc-shaped groove; 16. Second through hole; 2. First dial indicator; 3. Second dial indicator; 4. CVD equipment spindle; 40. Spindle housing; 41. Spindle; 42. Spindle housing mounting reference surface; 44. Connecting flange; 45. Positioning boss. Detailed Implementation

[0012] like Figure 1 As shown, the detection device for detecting the spindle accuracy of CVD equipment disclosed in this invention includes: It can be fixedly connected to the spindle housing mounting reference surface 42 of the CVD equipment spindle 4, and is used to install the first dial indicator 2 and the second dial indicator 3; A first dial indicator 2, fixed to the dial indicator support 1, for attaching the indicator needle to the side of the CVD equipment spindle to detect spindle runout; and... A second dial indicator 3 is fixed on the dial indicator support 1 and is used to attach the indicator needle to the spindle end face of the CVD equipment to detect the runout of the spindle end face.

[0013] Specifically, the CVD equipment spindle 4 includes a spindle housing 40, a spindle 41, a linear drive mechanism, and a rotary drive mechanism. The linear drive mechanism, the rotary drive mechanism, and the spindle are housed within the spindle housing 40. The spindle housing 40 has a spindle housing mounting reference surface 42 for fixed connection with the frame of the CVD equipment. The output end of the linear drive mechanism is connected to the rotary drive mechanism, and the output end of the rotary drive mechanism is connected to the spindle 41. The end of the spindle 41 is provided with a connecting flange 44 structure, and the connecting flange 44 is provided with a positioning boss 45. The end of the spindle 41 is connected to the transfer tray. The linear drive mechanism can drive the rotary drive mechanism (spindle) to move linearly within the spindle housing 40, and the rotary drive mechanism can drive the spindle 41 to rotate, thereby realizing the lifting and rotation of the transfer tray. Before installing the CVD equipment spindle 4 to the frame, it is necessary to test the spindle's circular runout and end face runout, specifically the end face runout of the connecting flange 44 and the circular runout of the positioning boss 45. This application incorporates a dial indicator support 1, which can be fixed to the spindle housing mounting reference surface 42 of the CVD equipment spindle 4. Simultaneously, the dial indicator support 1 can also fix a first dial indicator 2 and a second dial indicator 3. The first and second dial indicators include a dial indicator base, a dial indicator bracket, and a dial indicator head. The dial indicator base is used for fixed connection with the dial indicator support 1, and an adjustable dial indicator support frame is fixed on the base. The dial indicator support frame is equipped with... The dial indicator head, through the dial indicator support frame, allows for adjustment of its position, enabling the needle of the first dial indicator 2 to align with the side of the main shaft 41 (the side of the positioning boss), and the needle of the second dial indicator to align with the end face of the main shaft (the end face of the connecting flange). This facilitates the simultaneous detection of the spindle's circular runout and end face runout during spindle rotation, ensuring the accuracy of the subsequent drive of the transmission tray. The detection device disclosed in this application, because it is mounted on the spindle housing mounting reference surface and can simultaneously detect circular runout and end face runout, has a simple structure and is easy to operate. Furthermore, the simultaneous detection of circular runout and end face runout improves detection accuracy.

[0014] Furthermore, the dial indicator support 1 includes a support body 10 with a flat plate structure. One side of the support body 10 is provided with a first reference surface 11 that is fitted and fixed to the spindle housing mounting reference surface 4 of the CVD equipment spindle 4. The end of the support body 10 that contacts the CVD equipment spindle 4 is provided with an arc-shaped receiving groove 12 that is fitted and contacted to the outer wall of the CVD equipment spindle. The support body 10 is also provided with bolt through holes for fixed connection with the spindle housing mounting reference surface 42 of the CVD equipment spindle 4.

[0015] Specifically, in this embodiment, such as Figure 2As shown, the dial indicator support 1 is a flat support body 10 that can be magnetically attracted. One side of the support body 10 has a first reference surface 11, which fits against the spindle housing mounting reference surface 42. The end of the support body 10 that contacts the CVD equipment spindle has an arc-shaped receiving groove 12, which fits against the outer wall of the spindle. The support body 10 also has bolt through holes 13, and the spindle housing 40 of the CVD equipment spindle has through holes for fixed connection with the frame (the spindle housing can...). (Fixed to the frame by bolts) When the support body 10 is installed on the spindle housing mounting reference surface 42, the bolt through holes 13 on the support body 10 correspond to some through holes (generally two through holes) on the spindle housing 40. Thus, the dial indicator support can be fixedly connected to the spindle housing 40 by bolts and nuts. The dial indicator support structure disclosed in this application can effectively fix the dial indicator support 1 to the spindle housing 40 and allows for easy disassembly for use in inspecting spindles of different CVD equipment. Furthermore, the dial indicator support is made of a magnetically attractable metal plate, allowing the dial indicator to be easily fixed to the support via a magnetic base, facilitating adjustment and removal of the dial indicator's position on the support.

[0016] Furthermore, the first dial indicator 2 is a magnetic dial indicator; The second percentage table 3 is a leverage percentage table.

[0017] Specifically, in this embodiment, the first dial indicator 2 is a magnetic dial indicator, and the second dial indicator 3 is a lever dial indicator, so as to facilitate the detection of spindle runout and spindle end face runout.

[0018] Furthermore, the support body is also provided with a second reference surface for contacting the end face of the spindle, and the second reference surface is also provided with a second through hole for fixing to the end face of the spindle by bolts.

[0019] Specifically, a second reference surface for contacting the spindle end face is provided on the support body, and a second through hole is provided on the support body, so that the support body can be accurately fixed on the end face of the CVD equipment spindle. Then, the first dial indicator and the second dial indicator provided on the support body can be used to detect the circular runout and end face runout of the spindle housing mounting reference surface of the CVD equipment spindle, that is, to detect the circular runout of the positioning boss 45 of the spindle and the end face runout of the connecting flange 44.

[0020] Furthermore, a second arc-shaped groove is also provided on the second reference surface of the support body. Specifically, a second arc-shaped groove is provided on the second reference surface of the support body, which enables the support body to be effectively positioned and fixed with the spindle end face, thereby improving the detection accuracy of the circular runout and end face runout of the spindle housing mounting reference surface.

[0021] A method for detecting the spindle accuracy of a CVD equipment using the detection device for detecting the spindle accuracy of a CVD equipment as described in this application includes the following steps: Step 1: Fix the dial indicator support to the mounting reference surface of the spindle housing of the CVD equipment spindle; Step 2: Fix the first dial indicator to one side of the upper surface of the dial indicator support, adjust the position of the first dial indicator needle so that the first dial indicator needle is in contact with the side of the CVD equipment spindle, and zero the first dial indicator. Step 3: Fix the second dial indicator to the other side of the upper surface of the dial indicator support, adjust the position of the pointer of the second dial indicator so that the pointer of the second dial indicator contacts the end face of the CVD equipment spindle, and zero the second dial indicator. Step 4: Reciprocate the spindle of the CVD equipment and observe whether there is a deviation in the zero point value of the pointers of the first and second dial indicators. If so, readjust the pointers and zero point of the dial indicators; if not, proceed to the next step. Step 5: Rotate the CVD equipment spindle one revolution, read the runout values ​​of the first and second dial indicators, and obtain the spindle circular runout value and end face runout value of the CVD equipment spindle.

[0022] Specifically, when using the detection device for CVD equipment spindle accuracy detection described in this application to detect the spindle accuracy of a CVD equipment, the dial indicator support is first fixed on the mounting reference surface of the spindle housing of the CVD equipment spindle. Then, the first and second dial indicators are fixed on the upper surfaces of the dial indicators, and the first and second dial indicators are adjusted so that their pointers contact the side and end face of the spindle, respectively, and the pointer readings are zeroed. Afterwards, the spindle can be reciprocated and rotated (by a small angle) by the spindle rotation drive mechanism to check for any deviation in the pointer zero point value. If a deviation exists, the pointer (zero point) of the dial indicator is readjusted. If no deviation exists, the spindle is rotated one revolution by the spindle rotation drive mechanism, and the runout values ​​of the first and second dial indicators are read. This yields the spindle circular runout value and the end face runout value of the CVD equipment spindle. Based on these values, the accuracy can be obtained, thus ensuring the accuracy of the subsequent drive of the transfer tray. This method has the advantages of convenient operation and high detection accuracy.

[0023] Furthermore, it also includes determining whether the CVD equipment spindle has reached the set accuracy based on the obtained spindle circular runout and end face runout values. If yes, the accuracy data is recorded; if not, the CVD equipment spindle is further adjusted to ensure the installation accuracy of all CVD equipment spindles, thereby ensuring the accuracy of the subsequent drive transfer tray.

[0024] Furthermore, the specific process of fixing the dial indicator support to the spindle housing mounting reference surface of the CVD equipment spindle is as follows: The first reference surface of the support body is fitted and fixed to the mounting reference surface of the spindle housing of the CVD equipment spindle, and the arc-shaped receiving groove of the support body is fitted to the outer wall of the CVD equipment spindle. Bolts are installed in the bolt through holes on the mounting reference surfaces of the support body and the spindle housing of the CVD equipment spindle. Nuts are screwed into the bolts using a torque wrench with a torque of 25 N·m. This ensures that the dial indicator support body is firmly installed with the spindle housing, thereby ensuring the detection accuracy of the first and second dial indicators for the spindle's circular runout and end face runout.

[0025] Furthermore, the process includes contacting the second reference surface of the support body with the spindle end face and fixing the support body to the spindle end face with bolts; fixing the first dial indicator to the lower surface of the dial indicator support; adjusting the position of the first dial indicator needle so that the needle of the first dial indicator is in contact with the side of the spindle housing mounting reference surface of the CVD equipment spindle and zeroing the first dial indicator; fixing the second dial indicator to the upper surface of the dial indicator support; adjusting the position of the second dial indicator needle so that the needle of the second dial indicator is in contact with the end face of the spindle housing mounting reference surface of the CVD equipment spindle and zeroing the second dial indicator; reciprocatingly rotating the CVD equipment spindle and observing whether there is a deviation in the zero point values ​​of the first and second dial indicators; if so, readjusting the dial indicator needle and zero point; if not, proceeding to the next step; rotating the CVD equipment spindle one revolution and reading the runout values ​​of the first and second dial indicators to obtain the circular runout value and end face runout value of the spindle housing mounting reference surface of the CVD equipment spindle. In other words, this step can effectively detect the circular runout and end face runout of the spindle housing mounting reference surface.

[0026] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A detection device for detecting the spindle accuracy of CVD equipment, characterized in that, include: It can be fixedly connected to the spindle housing mounting reference surface of the CVD equipment spindle, and is used to install the first and second dial indicators; A first dial indicator fixed on the dial indicator support base, used to attach the indicator needle to the side of the CVD equipment spindle to detect spindle runout; as well as, A second dial indicator is fixed on the dial indicator support base and used to attach the indicator needle to the spindle end face of the CVD equipment to detect spindle end face runout.

2. The detection device for detecting the spindle accuracy of CVD equipment according to claim 1, characterized in that: The dial indicator support includes a support body with a flat plate structure. One side of the support body is provided with a first reference surface that is fitted and fixed to the mounting reference surface of the spindle housing of the CVD equipment spindle. The end of the support body that contacts the spindle of the CVD equipment is provided with an arc-shaped receiving groove that fits and contacts the outer wall of the spindle of the CVD equipment. The support body is also provided with bolt through holes for fixed connection with the mounting reference surface of the spindle housing of the CVD equipment spindle.

3. The detection device for detecting the spindle accuracy of CVD equipment according to claim 2, characterized in that: The first dial indicator is a magnetic dial indicator; The second percentile is a leverage percentile.

4. The detection device for detecting the spindle accuracy of CVD equipment according to claim 3, characterized in that: The support body is also provided with a second reference surface for contacting the end face of the spindle, and the second reference surface is also provided with a second through hole for fixing to the end face of the spindle by bolts.

5. The detection device for detecting the spindle accuracy of CVD equipment according to claim 4, characterized in that: The second reference surface of the support body is also provided with a second arc-shaped groove.

6. A method for detecting the spindle accuracy of a CVD equipment using the detection device for detecting the spindle accuracy of a CVD equipment as described in any one of claims 1 to 5, characterized in that, Includes the following steps: Step 1: Fix the dial indicator support to the mounting reference surface of the spindle housing of the CVD equipment spindle; Step 2: Fix the first dial indicator to one side of the upper surface of the dial indicator support, adjust the position of the first dial indicator needle so that the first dial indicator needle is in contact with the side of the CVD equipment spindle, and zero the first dial indicator. Step 3: Fix the second dial indicator to the other side of the upper surface of the dial indicator support, adjust the position of the pointer of the second dial indicator so that the pointer of the second dial indicator contacts the end face of the CVD equipment spindle, and zero the second dial indicator. Step 4: Reciprocate the spindle of the CVD equipment and observe whether there is a deviation in the zero point value of the pointers of the first and second dial indicators. If so, readjust the pointers and zero point of the dial indicators; if not, proceed to the next step. Step 5: Rotate the CVD equipment spindle one revolution, read the runout values ​​of the first and second dial indicators, and obtain the spindle circular runout value and end face runout value of the CVD equipment spindle.

7. The detection method according to claim 6, characterized in that: It also includes determining whether the CVD equipment spindle has reached the set accuracy based on the obtained spindle circular runout and end face runout values. If yes, the accuracy data is recorded; if not, the CVD equipment spindle is further adjusted.

8. The detection method according to claim 6, characterized in that: The specific process of fixing the dial indicator support to the spindle housing mounting reference surface of the CVD equipment spindle is as follows: The first reference surface of the support body is fitted and fixed to the mounting reference surface of the spindle housing of the CVD equipment spindle, and the arc-shaped receiving groove of the support body is fitted to the outer wall of the CVD equipment spindle. Bolts are installed in the bolt through holes on the mounting reference surfaces of the support body and the spindle housing of the CVD equipment spindle. Nuts are screwed into the bolts using a torque wrench with the torque set to 25 N.m.

9. The detection method according to claim 6, characterized in that: It also includes contacting the second reference surface of the support body with the spindle end face and fixing the support body to the spindle end face with bolts, fixing the first dial indicator to the lower surface of the dial indicator support, adjusting the position of the first dial indicator needle so that the first dial indicator needle is in contact with the side of the spindle housing mounting reference surface of the CVD equipment spindle and zeroing the first dial indicator; Fix the second dial indicator to the upper surface of the dial indicator support, adjust the position of the dial indicator needle so that the needle of the second dial indicator contacts the end face of the mounting reference surface of the spindle housing of the CVD equipment spindle, and zero the second dial indicator. Rotate the CVD equipment spindle back and forth and observe whether there is a deviation in the zero point value of the pointers of the first and second dial indicators. If so, readjust the pointers and zero point of the dial indicators; if not, proceed to the next step. Rotate the CVD equipment spindle one revolution and read the runout values ​​of the first and second dial indicators to obtain the circular runout value and end face runout value of the CVD equipment spindle housing mounting reference surface.

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