Trolley for disassembling and assembling motor of semiconductor equipment and disassembling and assembling method

Abstract

The invention relates to the technical field of semiconductor equipment maintenance devices, in particular to a trolley for disassembling and assembling a motor of semiconductor equipment and a disassembling and assembling method. The trolley comprises a base, a supporting guide column, a lifting mechanism, a trapezoidal lead screw, a driving device, a sliding arm and a two-half type fast-assembly fixing clamp. The lifting mechanism is sleeved outside the supporting guide post, can slide up and down along the supporting guide post, and is provided with an internal thread matched with the trapezoidal screw rod; the driving device comprises a hand-cranking turntable and a first gear which are meshed with a second gear at the top end of the trapezoidal screw rod to form a gear speed change mechanism; the sliding arm is arranged on the lifting mechanism in a front-back sliding mode through a pulley assembly. The two-half type fast-assembly fixing clamp is arranged at the front end of the sliding arm and used for clamping and fixing the motor. The invention aims to solve the problems of difficult operation, safety risk, space limitation and the like in the motor disassembly and assembly process, and realizes safe and convenient motor disassembly and assembly operation.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment maintenance device, in particular to a trolley for disassembling and assembling semiconductor equipment motor and a disassembling and assembling method. BACKGROUND

[0002] The motor of a semiconductor equipment is a core power component of the semiconductor equipment, and its disassembling and assembling is particularly important. At present, the disassembling and assembling of the motor of a semiconductor equipment is mainly completed by manual operation or with the help of simple tools. However, due to the large weight of the motor body and its accessory components, there are many safety hazards and operation difficulties in the disassembling and assembling process.

[0003] The main problems existing in the prior art are: on the one hand, the total weight of the motor body and the gearbox base of a semiconductor equipment is about 130 kg, and there is a serious risk of being squeezed and injured during manual operation; on the other hand, the existing lifting tools are inconvenient to use and difficult to operate, and usually require multiple people to work together, which is low in efficiency; in addition, in the environment with a narrow gap between semiconductor equipments, the conventional hydraulic lifting vehicle often cannot be effectively used. These problems seriously affect the maintenance efficiency of the semiconductor equipment and the safety of the operators.

[0004] Therefore, there is an urgent need for a trolley specially used for disassembling and assembling the motor of a semiconductor equipment, which should have the characteristics of simple structure, convenient operation and adaptability to narrow space operation, and can safely and efficiently complete the disassembling and assembling of the motor, reduce the labor intensity of the operators and improve the operation safety. SUMMARY

[0005] The present application aims to solve the problems of operation difficulty, safety risk and space limitation in the process of disassembling and assembling the motor, and to realize safe and convenient disassembling and assembling of the motor.

[0006] To achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0007] According to the first aspect of the present application, a trolley for disassembling and assembling the motor of a semiconductor equipment is provided, which comprises: a base provided with moving wheels at the bottom; at least one supporting guide column fixedly arranged on the base; a lifting mechanism sleeved on the supporting guide column and slidable up and down along the supporting guide column; the lifting mechanism is provided with an internal thread; a trapezoidal screw rod matched with the internal thread of the lifting mechanism; a second gear fixedly installed at the top end of the trapezoidal screw rod; a driving device comprising a hand rotating disc and a first gear fixedly arranged at the bottom of the hand rotating disc; the first gear is engaged with the second gear at the top end of the trapezoidal screw rod to form a gear speed change mechanism; a sliding arm is slidably arranged on the lifting mechanism through a pulley assembly arranged on the lifting mechanism; a two-piece quick-mounting fixed clamp is arranged at the front end of the sliding arm for clamping and fixing the motor.

[0008] Optionally, the pulley assembly comprises an upper pulley and a lower pulley arranged on the upper and lower sides of the sliding arm respectively, and the upper and lower surfaces of the sliding arm are matched with the clamping grooves of the pulleys respectively.

[0009] Optionally, the trolley further comprises a handle locking screw for locking the position of the sliding arm.

[0010] Optionally, the two half quick-mounting fixing clamps comprise a front end fixing clamp and a rear end fixing clamp, and the front end fixing clamp and the rear end fixing clamp are quickly connected and separated by at least one positioning pin.

[0011] Optionally, the trolley further comprises an expandable support structure, which comprises: a side support leg rotatably arranged on the side surface of the base, and the side support leg is fixed by a positioning pin; and / or a front support rod slidably arranged on the front part of the base, and the base bottom is provided with a front support rod guide groove for accommodating the front support rod, and the front support rod is fixed by a positioning pin.

[0012] Optionally, a machine table leakage-proof disc is connected to the front end of the front support rod, and a roller is further arranged at the bottom of the front end of the front support rod.

[0013] Optionally, a limiting stopper is arranged on the sliding arm to limit the forward and backward sliding stroke of the sliding arm.

[0014] Optionally, a hand push rod is further arranged on the base to facilitate pushing the whole trolley.

[0015] Optionally, a handle is arranged on the sliding arm to facilitate pushing and pulling.

[0016] According to the second aspect of the present application, a dismounting method of a semiconductor equipment motor is provided, which uses the above-mentioned trolley, and the method comprises the following steps: moving the dismounting trolley to the vicinity of a motor to be dismounted, and expanding the side support leg and the front support rod to stabilize the trolley; operating the two half quick-mounting fixing clamps to fix the motor; rotating the hand-operated turntable to drive the first gear at the bottom of the hand-operated turntable, the first gear drives the second gear and the trapezoidal screw to rotate, so that the lifting mechanism with the internal thread is lifted along the supporting guide column and the rotating trapezoidal screw, and the lifting of the clamped motor is realized; the handle locking screw is unlocked, and the sliding arm is pushed and pulled to adjust the front and rear positions of the motor, and the installation or dismounting of the motor is completed.

[0017] The present application has the following advantages:

[0018] 1. The trolley has a small size and a compact overall structure, and is suitable for various narrow space working environments, and solves the problem that the hydraulic lifting vehicle cannot be used between equipment with small space;

[0019] 2. Through the cooperation of trapezoidal screw rod and gear shifting mechanism, the safe and reliable lifting of the motor is realized, and compared with the original lifting tool, the operation is more convenient, and multiple people are not needed to cooperate;

[0020] 3. The movable wheels at the bottom of the base and the expandable support structure design enable the trolley to flexibly change position under load, facilitating the disassembly and assembly of the motor, while ensuring the stability of the operation;

[0021] 4. The two half type quick mounting fixing clamps are quickly disassembled and assembled through the positioning latch, and the sliding arm can be adjusted in position, greatly improving the motor disassembly and assembly process and avoiding possible safety hazards. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0023] Figure 1 The structure diagram of the trolley for disassembling and assembling the motor of the semiconductor equipment according to the present application;

[0024] Figure 2 The structure diagram of the trolley for disassembling and assembling the motor of the semiconductor equipment according to the present application from another angle.

[0025] In the figure: 1, base; 2, movable wheel; 3, guide column; 4, lifting mechanism; 5, trapezoidal screw rod; 6, hand turning disc; 7, sliding arm; 8, first gear; 9, second gear; 10, upper pulley; 11, lower pulley; 12, handle stop screw; 13, front end fixing clamp; 14, rear end fixing clamp; 15, side support foot; 16, front support rod; 17, front support rod guide groove; 18, roller; 19, machine table leakproof disc; 20, limit block; 21, hand push rod; 22, handle. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0027] Embodiment one

[0028] As Figure 1 and Figure 2As shown, a trolley for disassembling and assembling motor of semiconductor equipment comprises a base 1, a supporting guide column 3, a lifting mechanism 4, a trapezoidal screw rod 5, a driving device, a sliding arm 7 and a two-halves quick-mounting fixing clamp.

[0029] The base 1 is provided with a moving wheel 2 at the bottom, so that the whole disassembling and assembling trolley can be conveniently moved in the area of semiconductor equipment. The base 1 is fixedly provided with at least one supporting guide column 3 extending upward perpendicularly to the surface of the base 1, which plays a role of supporting and guiding. The material of the supporting guide column 3 is high-strength alloy steel, which has good load-bearing capacity and durability.

[0030] The lifting mechanism 4 is sleeved outside the supporting guide column 3 and can slide up and down along the supporting guide column 3. The lifting mechanism 4 is internally provided with an internal thread, which is matched with the trapezoidal screw rod 5. The lifting mechanism 4 is made of high-strength material, which can bear the weight of the motor and ensure the stability during lifting.

[0031] The trapezoidal screw rod 5 is matched with the internal thread of the lifting mechanism 4 and can drive the lifting mechanism 4 to move up and down by rotating. The top end of the trapezoidal screw rod 5 is fixedly installed with a second gear 9, which is engaged with a first gear 8 of the driving device to form a gear speed change mechanism. The trapezoidal screw rod 5 adopts high-precision processing technology to ensure the stability and precision during lifting.

[0032] The driving device comprises a hand turning disc 6 and the first gear 8 fixed to the bottom of the hand turning disc 6. The hand turning disc 6 is located at the upper part of the disassembling and assembling trolley, which is convenient for operators to use. The first gear 8 is engaged with the second gear 9 at the top end of the trapezoidal screw rod 5 to form a gear speed change mechanism. By rotating the first gear 8 through the hand turning disc 6, the second gear 9 is rotated, and then the trapezoidal screw rod 5 is driven to rotate, so as to realize the up and down movement of the lifting mechanism 4. The design of the gear speed change mechanism enables the operator to realize larger lifting force with smaller force.

[0033] The sliding arm 7 is movably arranged on the lifting mechanism 4 through a pulley assembly arranged on the lifting mechanism 4. The pulley assembly comprises an upper pulley 10 and a lower pulley 11 arranged on the upper and lower sides of the sliding arm 7 respectively, and the upper and lower surfaces of the sliding arm 7 are matched with the clamping grooves of the pulleys respectively. This design makes the sliding arm 7 move forward and backward more stably, reduces the friction force, and facilitates accurate positioning. The sliding arm 7 is provided with a limiting stopper 20 for limiting the stroke of the forward and backward sliding of the sliding arm 7, so as to prevent the sliding arm 7 from being separated from the pulley assembly. The sliding arm 7 is also provided with a handle 22, which is convenient for the operator to push and pull the sliding arm 7 to adjust the position thereof.

[0034] The trolley further comprises a handle fixing screw 12 for locking the position of the sliding arm 7. When the sliding arm 7 is adjusted to a suitable position, the sliding arm 7 can be fixed at the position by rotating the handle fixing screw 12, so as to prevent displacement during use.

[0035] Two half quick-fixing clamps are arranged at the front end of the sliding arm 7 for clamping and fixing the motor. The two half quick-fixing clamps include a front-end fixing clamp 13 and a rear-end fixing clamp 14, which are quickly connected and separated by at least one positioning pin.

[0036] The trolley further includes an expandable support structure to improve the stability of the entire trolley. The support structure includes a side support leg 15 rotatably arranged on the side of the base 1 and a front support rod 16 slidably arranged at the front of the base 1. The side support leg 15 is fixed by a positioning pin and can be retracted when not in use and expanded to increase the support area when in use. The bottom of the base 1 is provided with a front support rod guide groove 17 for accommodating the front support rod 16. The front support rod 16 is fixed by a positioning pin and can be pulled out for use when needed and stored in the guide groove when not needed.

[0037] The front end of the front support rod 16 is connected with a machine table leak-proof disc 19 for collecting oil or other liquid that may leak during disassembly and assembly to prevent environmental pollution. The front end of the front support rod 16 is also provided with a roller 18 at the bottom to make the front support rod 16 more smooth during expansion and retraction, reducing friction with the ground.

[0038] The base 1 is also provided with a hand push rod 21 for facilitating the movement of the entire trolley. The hand push rod 21 is located at the rear of the base 1 and has a moderate height for easy holding by the operator.

[0039] During use, the operator first pushes the disassembly trolley to the vicinity of the motor of the semiconductor equipment, expands the side support leg 15 and the front support rod 16 to increase the stability of the trolley. Then the height of the lifting mechanism 4 is adjusted by the hand-operated turntable 6 to make the sliding arm 7 equivalent to the height of the motor. Then the sliding arm 7 is pushed to make the two half quick-fixing clamps close to the motor, and the front-end fixing clamp 13 and the rear-end fixing clamp 14 are connected by the positioning pin to clamp and fix the motor. After the fixing is completed, the position of the sliding arm 7 is locked by tightening the handle stop screw 12. Finally, the height of the lifting mechanism 4 is adjusted by the hand-operated turntable 6 to lift the motor, and the disassembly of the motor is completed. When installing the motor, the operation is performed in the reverse order.

[0040] The disassembly trolley has a simple structure and is easy to operate, which can effectively reduce the labor intensity of the operator and improve the efficiency and safety of the disassembly and assembly of the motor of the semiconductor equipment.

[0041] Example Two

[0042] In example one, the structure and function of a trolley for disassembling and assembling a motor of a semiconductor equipment have been described in detail. This example will introduce a method for disassembling and assembling a motor of a semiconductor equipment using the disassembly trolley.

[0043] The method includes the following steps:

[0044] The disassembly / assembly trolley is moved to the vicinity of the motor to be disassembled / assembled, and its side support legs 15 and front support rod 16 are unfolded to stabilize the trolley. Specifically, the operator first pushes the disassembly / assembly trolley near the semiconductor device motor by holding the push rod 21 on the base 1. Then, the side support legs 15 on the side of the base 1 are rotated and unfolded, and secured with positioning pins. Next, the front support rod 16 is pulled out from the front support rod guide groove 17 at the front of the base 1 and secured with positioning pins. After unfolding these support structures, the disassembly / assembly trolley gains a larger support area, significantly improving stability and providing safety for subsequent operations.

[0045] The motor is secured using a two-piece quick-release clamp. In this step, the operator first separates the front clamp 13 and the rear clamp 14, then places them at the front and rear ends of the motor, respectively. Next, the front clamp 13 and the rear clamp 14 are connected by locating pins to form a complete clamping structure, firmly securing the motor. This quick-release design simplifies and speeds up the motor securing process, significantly improving work efficiency.

[0046] By rotating the hand crank 6, the first gear 8 at its bottom is driven. The first gear 8 drives the second gear 9 and the trapezoidal lead screw 5, which mesh with it, to rotate. This causes the lifting mechanism 4 with internal threads to rise and fall along the support guide post 3 and the rotating trapezoidal lead screw 5, thus raising and lowering the clamped motor. During this process, the operator can control the direction and height of the motor's lifting by rotating the hand crank 6 clockwise or counterclockwise. The gear transmission mechanism design allows the operator to achieve a large lifting force with a small amount of force, easily controlling the height of the motor.

[0047] Release the handle locking screw 12 and push or pull the sliding arm 7 to adjust the motor's forward and backward position to complete the motor's installation or removal. Once the motor has reached the appropriate height, the operator loosens the handle locking screw 12 to release the lock on the sliding arm 7. Then, using the handle 22 on the sliding arm 7, push or pull the sliding arm 7 forward and backward to precisely adjust the motor's horizontal position. Once the motor is aligned with the installation position on the equipment, the operator can install the motor onto the equipment; or, during disassembly, remove the motor from the equipment. After completing the operation, tighten the handle locking screw 12 again to lock the position of the sliding arm 7.

[0048] The above method simplifies, safes, and expedites the disassembly and assembly of semiconductor device motors. This method utilizes the various functions of the disassembly and assembly trolley, effectively reducing the workload of operators, avoiding potential safety hazards associated with traditional manual disassembly and assembly, while simultaneously improving work efficiency and reducing equipment maintenance costs.

[0049] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A trolley for assembling and disassembling motors in semiconductor equipment, characterized in that, include: The base has casters at its bottom; At least one supporting guide column is fixedly installed on the base; A lifting mechanism is sleeved on the support guide column and can slide up and down along it; the lifting mechanism is provided with internal threads. A trapezoidal lead screw engages with the internal thread of the lifting mechanism; a second gear is fixedly mounted at the top of the trapezoidal lead screw. The drive device includes a hand-cranked turntable and a first gear fixed to its bottom; the first gear meshes with a second gear at the top of the trapezoidal lead screw to form a gear transmission mechanism. The sliding arm is slidably mounted on the lifting mechanism via a pulley assembly mounted on the lifting mechanism; A two-part quick-release fixing clamp is located at the front end of the sliding arm and is used to clamp and fix the motor.

2. The trolley according to claim 1, characterized in that, The pulley assembly includes an upper pulley and a lower pulley respectively disposed on the upper and lower sides of the sliding arm, and the upper and lower surfaces of the sliding arm respectively cooperate with the grooves of the pulleys.

3. The trolley according to claim 1, characterized in that, The trolley also includes a handle locking screw for locking the position of the sliding arm.

4. The trolley according to claim 1, characterized in that, The two-part quick-release fixing clip includes a front fixing clip and a rear fixing clip, which are quickly connected and separated by at least one positioning pin.

5. The trolley according to claim 1, characterized in that, The trolley also includes a deployable support structure, which comprises: Side support feet are rotatably mounted on the side of the base, and the side support feet are fixed by positioning pins; And / or, a front support rod is slidably disposed at the front of the base, the bottom of the base is provided with a front support rod guide groove for receiving the front support rod, and the front support rod is fixed by a positioning pin.

6. The trolley according to claim 5, characterized in that, The front end of the front support rod is connected to the leak-proof plate of the organic platform, and a roller is also provided at the bottom of the front end of the front support rod.

7. The trolley according to claim 1, characterized in that, The sliding arm is equipped with a limit stop that restricts its forward and backward sliding stroke.

8. The trolley according to claim 1, characterized in that, The base is also equipped with a push rod to facilitate pushing the entire trolley.

9. The trolley according to claim 1, characterized in that, The sliding arm is equipped with handles for easy pushing and pulling.

10. A method for disassembling and assembling a motor in a semiconductor device, characterized in that, Using the vehicle as described in any one of claims 1-9, the method includes the following steps: Move the disassembly and assembly trolley to the vicinity of the motor to be disassembled and assembly, and unfold its side support feet and front support rod to stabilize the trolley; Operate the two-part quick-release clamp to secure the motor; By rotating the hand crank, the first gear at its bottom is driven, which in turn drives the second gear and the trapezoidal screw that mesh with it to rotate, thereby causing the lifting mechanism with the internal thread to rise and fall along the support guide column and the rotating trapezoidal screw, thus realizing the lifting and lowering of the clamped motor. Release the locking screws on the handle, push and pull the sliding arm to adjust the front and rear position of the motor, and complete the installation or removal of the motor.

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