Element composition analysis method, device, storage medium, and product

Abstract

This application discloses an elemental composition analysis method, apparatus, storage medium, and product, relating to the field of laser technology. It controls a galvanometer scanning optical path to guide a pulsed laser into an array of fiber optic bundles to excite plasmas at multiple spatial points on the sample surface. The compositional spectral signals generated by each plasma are collected, and spatial distribution information of the sample's elemental composition is generated based on these signals. The array of fiber optic bundles improves collection efficiency by collecting the emitted plasma light, and the combination of the fiber optic bundles and fiber optic probes enables spatial scanning of the sample surface, obtaining the elemental composition distribution of the sample within a spatial range, thus improving the accuracy of sample composition analysis.

Description

Technical Field

[0001] This application relates to the field of laser technology, and in particular to a method, apparatus, storage medium and product for elemental composition analysis. Background Technology

[0002] LIBS (Laser-Induced Breakdown Spectroscopy) is a technique for elemental analysis. It uses laser pulses to excite a sample, generating plasma, and analyzes the spectrum emitted by the plasma to determine the sample's chemical composition. Fiber optic LIBS technology introduces optical fibers into LIBS, using fiber optics to transmit laser light and signals. This allows the laser and spectrometer to be located far from the detection point, making it suitable for elemental analysis in harsh, hazardous, or space-constrained environments.

[0003] Currently, fiber optic LIBS technology typically employs a single excitation fiber and a single collection fiber. A pulsed laser is transmitted through the fiber and focused onto a fixed point on the sample surface. By exciting this fixed point with a laser pulse and collecting and analyzing the emission spectrum of the plasma generated at that point, the elemental composition of that point can be obtained. However, in practical applications, this measurement method suffers from significant limitations in light throughput due to the single-fiber structure. The pulsed laser energy that can be safely transmitted through a single fiber is low, and the laser energy decreases during transmission due to fiber losses, resulting in insufficient energy for exciting the plasma. Furthermore, because single-fiber detection technology focuses on a fixed point on the sample surface, each laser pulse can only acquire elemental spectral information from a single spatial point on the sample surface, ultimately leading to low accuracy in overall sample composition analysis.

[0004] The above content is only used to help understand the technical solution of this application and does not represent an admission that the above content is prior art. Summary of the Invention

[0005] The main objective of this application is to provide a method, device, storage medium, and product for elemental composition analysis, aiming to solve the technical problem that traditional fiber optic LIBS technology is difficult to achieve efficient and accurate scanning of samples, resulting in low accuracy of sample composition analysis.

[0006] To achieve the above objectives, this application proposes an elemental composition analysis method applied to an elemental composition analyzer, the elemental composition analyzer including an array of fiber bundles and a galvanometer scanning optical path for guiding pulsed laser light, the elemental composition analysis method comprising:

[0007] The galvanometer scanning optical path is controlled to guide the pulsed laser to each fiber channel in the array fiber bundle, so as to excite plasma at the corresponding spatial points of each fiber channel on the sample surface;

[0008] The component spectral signals generated by each plasma are acquired based on each of the optical fiber channels, and the spatial distribution information of the elemental composition of the sample is generated based on the component spectral signals.

[0009] In one embodiment, the arrayed fiber bundle is disposed in the fiber optic probe of the elemental composition analyzer, and the fiber optic probe further includes a fiber optic converging mirror located at the exit of the arrayed fiber bundle; prior to the step of controlling the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the arrayed fiber bundle, the method further includes:

[0010] The fiber optic converging mirror in the fiber optic probe is moved to determine the target focusing position for focusing the pulsed laser onto the sample surface.

[0011] The fiber converging mirror is adjusted to the target focusing position to focus the pulsed laser from the outlet of the array fiber bundle.

[0012] In one embodiment, the step of moving the fiber optic converging mirror in the fiber optic probe to determine the target focusing position for focusing the pulsed laser onto the sample surface includes:

[0013] The fiber optic focusing mirror in the fiber optic probe is driven to move in a direction perpendicular to the sample surface;

[0014] The pulsed laser is guided into the fiber optic probe to excite plasma on the sample surface, and the focused spectral signal generated by the plasma is collected through the fiber optic probe.

[0015] The target focusing position of the fiber optic converging lens is determined based on the intensity of the characteristic spectral lines in the focusing spectral signal.

[0016] In one embodiment, the step of determining the target focusing position of the fiber optic converging lens based on the characteristic spectral line intensity of the focusing spectral signal includes:

[0017] Calculate the intensity of each characteristic spectral line of the focused spectral signal acquired at different positions of the optical fiber converging mirror;

[0018] The intensity of each characteristic spectral line is compared, and the position corresponding to the maximum value among the characteristic spectral line intensities is determined as the target focusing position.

[0019] In one embodiment, the galvanometer scanning optical path further includes a scanning converging mirror, a first deflecting galvanometer, and a second deflecting galvanometer. The step of controlling the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the array fiber bundle includes:

[0020] The deflection angle of the first deflection mirror and the second deflection mirror is controlled to deflect the pulsed laser.

[0021] The deflection-controlled pulsed laser is focused by the scanning converging mirror so that the deflection-controlled pulsed laser is sequentially incident on each fiber channel in the input end face of the array fiber bundle in a preset scanning order.

[0022] In one embodiment, the elemental composition analyzer further includes a time-series pulse generator, a pulsed laser, and a spectrometer;

[0023] The step of acquiring the component spectral signals of each plasma based on each of the optical fiber channels includes:

[0024] The timing pulse generator performs timing control on the pulsed laser and the spectrometer, so that the spectrometer acquires the component spectral signal through each optical fiber channel after the sample surface has been continuously excited by the pulsed laser for a preset time.

[0025] In one embodiment, the step of generating the spatial distribution information of the elemental composition of the sample based on the component spectral signal includes:

[0026] From the component spectral signals corresponding to each spatial point, identify and calculate the intensity values ​​of each characteristic spectral line of the sample surface element;

[0027] The coordinate information of each spatial point is associated with the intensity value of each feature spectral line to form a dataset;

[0028] The dataset is processed into an image to generate and output the spatial distribution information of the elemental composition of the sample surface elements.

[0029] In addition, to achieve the above objectives, this application also proposes an electronic device, the device comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, the computer program being configured to implement the steps of the elemental composition analysis method as described above.

[0030] In addition, to achieve the above objectives, this application also proposes a storage medium, which is a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, it implements the steps of the elemental composition analysis method described above.

[0031] In addition, to achieve the above objectives, this application also provides a computer program product, which includes a computer program that, when executed by a processor, implements the steps of the elemental composition analysis method described above.

[0032] One or more technical solutions proposed in this application have at least the following technical effects:

[0033] In this embodiment, the galvanometer scanning optical path is controlled to guide the pulsed laser to each fiber channel in the arrayed fiber bundle, thereby exciting plasma at corresponding spatial points on the sample surface. The component spectral signals generated by each plasma are acquired based on each fiber channel, and the spatial distribution information of the elemental composition of the sample is generated based on these component spectral signals. In other words, in this embodiment, by controlling the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the arrayed fiber bundle, and by using the arrayed fiber bundle to collect the plasma emitted light, the collection efficiency is improved. The combination of the arrayed fiber bundle and the fiber optic probe enables spatial scanning of the sample surface, obtaining the elemental composition distribution of the sample within a spatial range, thus improving the accuracy of sample composition analysis. Attached Figure Description

[0034] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0035] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a flowchart illustrating the elemental composition analysis method of this application in Embodiment 1.

[0037] Figure 2 This is a schematic diagram of the structure of the array fiber bundle provided in Embodiment 1 of this application;

[0038] Figure 3 This is a schematic diagram of focused spectral signals collected at different locations as provided in Embodiment 1 of this application;

[0039] Figure 4 This is a flowchart illustrating the elemental composition analysis method of this application in Embodiment 2.

[0040] Figure 5 This is a schematic diagram of a fluorite LIBS spectrum provided in Embodiment 2 of this application;

[0041] Figure 6 This is a schematic diagram of the intensity distribution of the spectral peaks provided in Embodiment 2 of this application;

[0042] Figure 7 This is a schematic diagram of the optical path structure of the elemental composition analyzer of this application;

[0043] Figure 8This is a schematic diagram of the hardware operating environment involved in the elemental composition analysis method in the embodiments of this application.

[0044] Controller-1, Timing Pulse Generator-2, Pulsed Laser-3, Spectrometer-4, Galvanometer Scanning Optical Path-5, Array Fiber Bundle-6, Fiber Optic Probe-7, Sample-8, Mirror-9, Notch Filter-10, First Deflecting Galvanometer-11, Second Deflecting Galvanometer-12, Scanning Converging Mirror-13, Collimating Mirror-14, Voice Coil Motor-15, Fiber Optic Converging Mirror-16, Plasma-17, Reverse Converging Mirror-18.

[0045] The purpose, features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0046] It should be understood that the specific embodiments described herein are merely illustrative of the technical solutions of this application and are not intended to limit this application.

[0047] To better understand the technical solution of this application, a detailed description will be provided below in conjunction with the accompanying drawings and specific embodiments.

[0048] The main solution of this application embodiment is: controlling the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the array fiber bundle, so as to excite the plasma at the corresponding spatial point of each fiber channel on the sample surface; acquiring the component spectral signal generated by each plasma based on each fiber channel, and generating the spatial distribution information of the elemental composition of the sample based on the component spectral signal.

[0049] LIBS (Laser-Induced Breakdown Spectroscopy) is a technique for elemental analysis. It uses laser pulses to excite a sample, generating plasma, and analyzes the spectrum emitted by the plasma to determine the sample's chemical composition. Fiber optic LIBS technology introduces optical fibers into LIBS, using fiber optics to transmit laser light and signals. This allows the laser and spectrometer to be located far from the detection point, making it suitable for elemental analysis in harsh, hazardous, or space-constrained environments.

[0050] Currently, fiber optic LIBS technology typically employs a single excitation fiber and a single collection fiber. A pulsed laser is transmitted through the fiber and focused onto a fixed point on the sample surface. By exciting this fixed point with a laser pulse and collecting and analyzing the emission spectrum of the plasma generated at that point, the elemental composition of that point can be obtained. However, in practical applications, this measurement method suffers from significant limitations in light throughput due to the single-fiber structure. The pulsed laser energy that can be safely transmitted through a single fiber is low, and the laser energy decreases during transmission due to fiber losses, resulting in insufficient energy for exciting the plasma. Furthermore, because single-fiber detection technology focuses on a fixed point on the sample surface, each laser pulse can only acquire elemental spectral information from a single spatial point on the sample surface, ultimately leading to low accuracy in overall sample composition analysis.

[0051] This application provides a solution in which, in this embodiment, the galvanometer scanning optical path is controlled to guide the pulsed laser to each fiber channel in the arrayed fiber bundle, thereby exciting plasma at corresponding spatial points on the sample surface. The component spectral signals generated by each plasma are acquired based on each fiber channel, and the spatial distribution information of the sample's elemental composition is generated based on these signals. Specifically, in this embodiment, by controlling the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the arrayed fiber bundle, and by using the arrayed fiber bundle to collect the plasma emitted light, the collection efficiency is improved. The combination of the arrayed fiber bundle and a fiber optic probe enables spatial scanning of the sample surface, obtaining the elemental composition distribution of the sample within a spatial range, thus improving the accuracy of sample composition analysis.

[0052] It should be noted that the execution subject of this embodiment can be a computing service device with data processing, network communication and program running functions, such as a tablet computer, personal computer, mobile phone, etc., or an electronic device capable of realizing the above functions.

[0053] Based on this, embodiments of this application provide a method for elemental composition analysis, referring to... Figure 1 , Figure 1 This is a flowchart illustrating the first embodiment of the elemental composition analysis method of this application.

[0054] In this embodiment, the elemental composition analysis method is applied to an elemental composition analyzer, which includes an array of fiber optic bundles and a galvanometer scanning optical path for guiding pulsed lasers. The elemental composition analysis method includes steps S10-S20:

[0055] Step S10: Control the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the array fiber bundle, so as to excite the plasma at the corresponding spatial point of each fiber channel on the sample surface.

[0056] It should be noted that the galvanometer scanning optical path is used to achieve rapid deflection and pointing control of the pulsed laser beam. It includes a first deflecting galvanometer, a second deflecting galvanometer, and a scanning converging mirror. The deflection axes of the first and second deflecting galvanometers are orthogonal to each other. By combining and controlling the deflection angle, precise deflection of the incident pulsed laser beam in two dimensions can be achieved. The array fiber bundle is composed of multiple tightly integrated single optical fibers, and its output end face is designed as a closely packed hexagonal structure. When this end face is placed inside the fiber optic probe, the emitted light from each fiber will form an independent excitation point on the sample surface. The arrangement of the output end faces of the array fiber corresponds one-to-one with the input end faces.

[0057] For example, see Figure 2 , Figure 2 This is a schematic diagram of the array fiber bundle provided in Embodiment 1 of this application, employing a serpentine scanning sequence. By controlling the scanning optical path of the galvanometer, the pulsed laser is initiated from the first column of the first row of the array fiber bundle input end face, scanning sequentially along the row direction to the last column of that row, and then moving to the next row, but in the opposite scanning direction (scanning from the last column to the first column). This process continues until all rows and columns have been traversed, covering every single fiber in the array fiber bundle.

[0058] Understandably, by rapidly controlling the direction of the pulsed laser through a galvanometer scanning optical path and utilizing the high-throughput optical signal transmission channel provided by the arrayed fiber bundle, the limitations of limited optical throughput and slow scanning speed in traditional single-fiber LIBS are solved. This enables rapid, accurate, and high-resolution scanning of the spatial elemental distribution on the sample surface, improving the efficiency of sample composition analysis.

[0059] In one feasible implementation, the arrayed fiber bundle is disposed in the fiber optic probe of the elemental composition analyzer, and the fiber optic probe further includes a fiber optic converging mirror located at the exit of the arrayed fiber bundle; prior to the step of controlling the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the arrayed fiber bundle, the method further includes:

[0060] The fiber optic converging mirror in the drive fiber optic probe is moved to determine the target focusing position for focusing the pulsed laser onto the sample surface.

[0061] Adjust the fiber optic converging lens to the target focusing position to focus the pulsed laser from the exit of the array fiber bundle.

[0062] It should be noted that the fiber optic probe is used to collimate and focus the pulsed laser emitted from the arrayed fiber bundle, concentrating it at a tiny focal point on the sample surface to generate plasma. Simultaneously, the fiber optic probe also collects the spectral signal generated by the plasma excited by the pulsed laser on the sample surface and transmits it back to the arrayed fiber bundle. The target focusing position is the location of the fiber optic converging lens, where the pulsed laser energy density on the sample surface is highest and the excited plasma temperature is highest after being focused by the fiber optic converging lens. By moving the fiber optic converging lens within the fiber optic probe, the actual focal point of the pulsed laser on the sample surface can be adjusted. Simultaneously, by collecting the spectral signal generated by the plasma and analyzing the intensity of characteristic spectral lines in the collected signal, the target focal length position can be determined. Determining the target focal length position completes the focusing process between the fiber optic probe and the sample surface, enabling the pulsed laser to be accurately focused on the sample surface, improving the excitation efficiency of the pulsed laser and the collection efficiency of the spectral signal.

[0063] Understandably, due to the undulations or tilt of the sample surface, the distance between the sample surface and the fiber optic probe is not constant. Directly scanning the sample surface would result in defocusing, significantly reducing excitation and signal collection efficiency. By moving the fiber optic converging lens within the fiber optic probe to excite and acquire spectral signals, and determining the target focusing position based on the intensity of characteristic spectral lines, the defocusing problem caused by uneven sample surface can be avoided, ensuring that the pulsed laser is accurately focused on the sample surface throughout the scanning process. Simultaneously, the efficient collection of plasma emitted light by the fiber optic probe ultimately improves the excitation efficiency of the pulsed laser and the collection efficiency of the spectral signal.

[0064] In one feasible implementation, the step of moving the fiber optic converging mirror in the fiber optic probe to determine the target focusing position for focusing the pulsed laser onto the sample surface includes:

[0065] The fiber optic focusing mirror in the driving fiber optic probe moves in a direction perpendicular to the sample surface;

[0066] A pulsed laser is guided into an optical fiber probe to excite plasma on the sample surface, and the focused spectral signal generated by the plasma is collected through the optical fiber probe.

[0067] The target focusing position of the fiber optic converging lens is determined based on the intensity of characteristic spectral lines in the focusing spectral signal.

[0068] It should be noted that the fiber optic converging lens in the fiber optic probe is driven by a voice coil motor, which is a direct-drive linear motor based on the principle of the Lorentz force generated by a current-carrying coil in a permanent magnetic field. Placing the voice coil motor inside the fiber optic probe allows for precise and rapid movement of the converging lens along a direction perpendicular to the sample surface. The fiber optic converging lens, located inside the fiber optic probe, is used to focus the collimated laser beam onto the sample surface; its position perpendicular to the sample surface determines the focal point's position on the sample. The focused spectral signal consists of at least one laser-induced breakdown spectrum acquired at different locations during the focusing calibration process. The characteristic spectral line intensity is extracted from the focused spectral signal, representing the intensity values ​​of one or more atomic or ion emission lines of a specific element.

[0069] Understandably, once the target focusing position is determined, the converging lens is quickly adjusted to that position via a voice coil motor, achieving rapid and precise scanning of the focusing position. This avoids the response delay and insufficient accuracy issues inherent in traditional methods using stepper motors or manual adjustments. It improves the speed and accuracy of focusing on the sample surface.

[0070] In one feasible implementation, the step of determining the target focusing position of the fiber optic converging lens based on the characteristic spectral line intensity of the focusing spectral signal includes:

[0071] Calculate the intensity of each characteristic spectral line in the focused spectral signal acquired at different positions of the fiber optic converging lens;

[0072] By comparing the intensity of each characteristic spectral line, the position corresponding to the maximum value of the characteristic spectral line intensity is determined as the target focusing position.

[0073] It should be noted that the intensity of each characteristic spectral line is obtained by integrating and summing the light intensity after background subtraction and noise filtering of each collected focused spectral signal.

[0074] For example, see Figure 3 , Figure 3 This is a schematic diagram of the focused spectral signals collected at different locations according to Embodiment 1 of this application. After calculating the characteristic spectral line intensity values ​​of the focused spectral signals collected at different locations, it can be found that the intensity value of the S3 spectral line is the largest. Therefore, the location corresponding to the S3 spectral line can be selected as the target focusing location.

[0075] In another preferred embodiment, to improve the accuracy of determination, the intensity of the characteristic spectral lines corresponding to the focused spectral signals collected at different locations is subjected to quadratic curve fitting, and the position corresponding to the vertex of the fitted curve is determined as the target focusing position, which can effectively smooth the fluctuations caused by random noise.

[0076] Understandably, the intensity of plasma emitted light is strongly correlated with the focused intensity of the pulsed laser on the sample surface. By moving the fiber optic converging lens to the target focusing position, the pulsed laser is in its optimal focusing state, with the highest energy density, the highest excited plasma temperature, and the strongest focused spectral signal. By determining the position corresponding to the maximum value in the characteristic spectral line intensity as the target focusing position, the location of the strongest focused spectral signal can be accurately found, improving the accuracy of focusing calibration. By focusing and calibrating the fiber optic probe, the excitation efficiency of the pulsed laser on the sample is improved.

[0077] In one feasible implementation, the galvanometer scanning optical path further includes a scanning converging mirror, a first deflecting galvanometer, and a second deflecting galvanometer. The step of controlling the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the array fiber bundle includes:

[0078] The deflection angle of the first and second deflection mirrors is controlled to deflect the pulsed laser.

[0079] The deflection-controlled pulsed laser is focused by a scanning converging mirror so that the deflection-controlled pulsed laser is sequentially incident on each fiber channel in the input end face of the array fiber bundle in a preset scanning order.

[0080] It should be noted that the first deflecting mirror is used to guide the pulsed laser in the X-axis direction, and the second deflecting mirror is used to guide the pulsed laser in the Y-axis direction. Their deflection axes are orthogonal, and working together, they can achieve arbitrary pointing of the pulsed laser in a two-dimensional plane. The scanning converging mirror is positioned after the first and second deflecting mirrors and is used to converge the parallel pulsed laser beam, after angle deflection, to a single focal point. The position of this focal point is determined by the deflection angle. The output end face of the array fiber bundle has a hexagonal close-packed structure. This hexagonal close-packed structure is a space-filling method that allows the array fiber bundle to accommodate the maximum number of individual fibers within a limited probe cross-sectional area, thereby achieving the highest spatial sampling density. The preset scanning sequence controls the sequential coupling of the pulsed laser into different individual fibers in the array fiber bundle. By corresponding to the arrangement structure of the array fiber bundle's output end face, the scanning pattern excited by the pulsed laser on the sample surface can be made consistent with the pattern at the output end of the array fiber bundle. By traversing each individual fiber in the array fiber bundle in a serpentine scanning sequence, it can be ensured that the pulsed laser focus sequentially excites all adjacent fibers during the scanning process, forming a continuous and complete scanning pattern on the sample surface.

[0081] Understandably, after precise focusing calibration of the sample surface, the pulsed laser is ensured to act on the sample surface at the optimal focal point. By controlling the scanning optical path of the galvanometer to perform rapid and accurate secondary deflection of the pulsed laser, the pulsed laser energy can be efficiently guided to different individual fibers in the array fiber bundle in a preset sequence. This avoids the limitation of traditional single-fiber LIBS technology, which cannot obtain spatial composition distribution information of the sample due to fixed single-point excitation, and enables rapid spatial scanning of the sample surface, improving the accuracy and comprehensiveness of the analysis of the overall elemental composition distribution of the sample.

[0082] Step S20: Acquire the component spectral signals generated by each plasma based on each optical fiber channel, and generate the spatial distribution information of the elemental composition of the sample based on the component spectral signals.

[0083] It should be noted that the compositional spectral signal refers to the spectral signal emitted by the plasma generated by pulsed laser excitation at each spatial point after focusing calibration and entering the spatial scanning phase, and collected by the fiber optic probe. Each spatial point corresponds to the excitation region of a single fiber in the array of fiber bundles on the sample surface. Therefore, during the scanning process, multiple compositional spectral signals equal to the number of fibers will be obtained, and these compositional spectral signals include elemental characteristic information at different locations on the sample surface.

[0084] Additionally, it should be noted that generating spatial distribution information of elemental components requires extracting the characteristic spectral line intensities of each element from its spectral signal. This is accomplished by identifying a preset wavelength window, subtracting background data, and calculating the intensity values ​​through integration. After extraction, each characteristic spectral line intensity is associated with its corresponding spatial coordinates, which are determined by the scanning order and the arrangement of the array fiber bundles. A dataset including location coordinates and elemental intensities is constructed. Based on this dataset, image processing algorithms such as interpolation and mapping are used to generate an intuitive two-dimensional elemental distribution map, where the brightness or color of each pixel represents the relative abundance or intensity of the element at that location.

[0085] Understandably, the acquired compositional spectral signals, obtained through focused calibration of the sample surface and spatial sampling points provided by the array of fiber bundles, possess a high signal-to-noise ratio. Based on these high-quality compositional spectral signals, data extraction, correlation, and graphical processing can efficiently and accurately reconstruct the spectral information into an elemental spatial distribution image. This significantly improves the comprehensiveness, accuracy, and practicality of sample composition analysis.

[0086] In one feasible implementation, the elemental composition analyzer further includes a time-series pulse generator, a pulsed laser, and a spectrometer. The step of acquiring the compositional spectral signals generated by each plasma based on each fiber optic channel includes:

[0087] The timing control of the pulsed laser and spectrometer is achieved by a timing pulse generator, so that the spectrometer can collect the component spectral signals through each fiber optic channel after the sample surface has been continuously excited by the pulsed laser for a preset time.

[0088] It should be noted that the timing pulse generator is used to coordinate the control of the pulsed laser and the spectrometer for accurate acquisition of component spectral signals. The timing pulse generator is responsible for receiving the initial trigger, generating a precise delay, and outputting the acquisition signal. The laser signal is an electrically synchronized signal, synchronized with the pulsed laser. The preset delay is set based on the physical evolution of laser-induced plasma, used to avoid the intense continuous background light radiation stage in the early stages of plasma formation. After the preset delay, the plasma cools to the optimal acquisition time when atomic characteristic spectral line emission dominates and the signal is stable. The preset delay can be set to 1.5 nanoseconds. The preset delay and the spectrometer gate width parameters can be optimized according to the sample material and laser energy to achieve the best signal-to-noise ratio for different analytical needs.

[0089] Understandably, because the intensity and characteristics of the spectral signal of laser-induced plasma change drastically over time, improper acquisition timing will result in a spectrum with an extremely low signal-to-noise ratio, unusable for quantitative analysis. A timing pulse generator receives the laser signal emitted by the pulsed laser and sends the acquisition signal to the spectrometer after a preset delay. The spectrometer responds to the acquisition signal and acquires the component spectral signal, ensuring accurate acquisition of the component spectral signal after each laser excitation.

[0090] For example, the preset delay is set to a fixed value, such as 2 nanoseconds. This same delay value is used for acquisition at all spatial locations for the same sample or similar samples. The preset delay can also be dynamically determined by a timing pulse generator based on the monitored initial plasma emission signal (such as the attenuation curve of a specific broadband background light). For instance, the acquisition signal is only triggered when the monitored signal intensity attenuates to a threshold.

[0091] Based on the first embodiment of this application, in the second embodiment of this application, the content that is the same as or similar to that in the first embodiment described above can be referred to the above description, and will not be repeated hereafter. Based on this, please refer to... Figure 4 , Figure 4 This is a flowchart illustrating the elemental composition analysis method of Embodiment 2 of this application. The step of generating spatial distribution information of elemental composition of the sample based on the component spectral signal further includes steps S01 to S03:

[0092] Step S01: Identify and calculate the intensity values ​​of each characteristic spectral line of the sample surface element from the component spectral signals corresponding to each spatial point.

[0093] Step S02: Associate the coordinate information of each spatial point with the intensity value of each feature spectral line to form a dataset;

[0094] Step S03: Perform image processing on the dataset to generate and output the spatial distribution information of elemental composition of the sample surface elements.

[0095] It should be noted that for elements on the sample surface, such as iron and copper, the corresponding characteristic peaks are located in the acquired second spectrum based on the atomic or ion emission spectral wavelengths, such as iron - 495.76 nm and copper - 324.75 nm. When calculating the intensity value of the characteristic spectral line, the signal under the characteristic peak is usually integrated within a preset wavelength window, and the background signal of the adjacent band is subtracted to obtain a characteristic spectral line intensity value representing the element on the sample surface at that point. In practical applications, an element may have multiple characteristic spectral lines; usually, one spectral line with no interference and a high signal-to-noise ratio is selected for analysis. The coordinate information is determined by the preset scanning order and the fixed arrangement of the output end faces of the array fiber bundle. Each component spectral signal is marked with its corresponding scan number during acquisition, and this number can be mapped to the two-dimensional spatial coordinates of the sample surface through a pre-calibrated mapping relationship. The coordinate-element intensity data pairs are obtained, and the dataset can be constructed from these data pairs. Image processing refers to converting the intensity data into a continuous or high-resolution two-dimensional grayscale image using mathematical methods such as bilinear interpolation. The brightness or color intensity of each pixel in an image directly reflects the intensity of the characteristic spectral lines of the element at that location, thus accurately reflecting the compositional distribution information of the element.

[0096] For example, refer to Figure 5 , Figure 5 This is a schematic diagram of a fluorite LIBS spectrum provided in Embodiment 2 of this application. As shown in the figure, a peak appears at 492.04 nm in the spectrum, which is initially identified as a Na spectral line. Based on the compositional spectral signal of each point in the spatial scan, the characteristic spectral line at 492.04 nm is identified and extracted, and its peak intensity is calculated. The (X,Y) coordinates of each point are correlated with its Na intensity, and the intensity distribution image of the peak is obtained after image processing. (Refer to...) Figure 6 , Figure 6 This is a schematic diagram of the intensity distribution of the spectral peaks provided in Embodiment 2 of this application. The areas with spectral intensity are distributed in a hexagonal pattern, which matches the shape of the output end face of the array fiber bundle. The segregation of Na at the grain boundaries or abnormal content can be visually observed, providing a valid basis for elemental composition analysis.

[0097] Please refer to Figure 7 , Figure 7This is a schematic diagram of the optical path structure of the elemental composition analyzer of this application. Specifically, the elemental composition analyzer includes a controller 1, a timing pulse generator 2, a pulsed laser 3, a spectrometer 4, a galvanometer scanning optical path 5, an array of fiber optic bundles 6, a fiber optic probe 7, a sample 8, a reflector 9, a notch filter 10, a first deflecting galvanometer 11, a second deflecting galvanometer 12, a scanning converging mirror 13, a collimating mirror 14, a voice coil motor 15, a fiber optic converging mirror 16, a plasma 17, and a reverse converging mirror 18. The pulsed laser 3 receives control commands from the controller 1 and emits a pulsed laser beam that enters the galvanometer scanning optical path 5. After being reflected by the reflector 9, it reaches the notch filter 10, which is placed at a small angle. The pulsed laser beam is then reflected along the X or Y axis by the first deflecting galvanometer 11 and the second deflecting galvanometer 12, and then focused by the scanning converging mirror 13 into the array of fiber optic bundles 6. It is then transmitted to the fiber optic probe 7, and after being collimated by the collimating mirror 14 inside the fiber optic probe 7, it is focused by the fiber optic converging mirror 16 onto the surface of the sample 8, exciting the plasma 17. The emitted light from plasma 17 travels back through the optical path to the notch filter 10, and after transmission, is focused into the spectrometer 4 by the reverse converging mirror 18 to obtain the spectral signal. The cutoff wavelength of the notch filter 10 matches the wavelength of the pulsed laser 3, and it is placed at a small angle to meet the incident conditions. The first deflecting mirror 11 and the second deflecting mirror 12 cooperate to converge the pulsed laser into the array fiber bundle 6 in a preset sequence, and, combined with the fiber optic probe 7, achieve spatial scanning on the sample 8.

[0098] For example, the spectrum excited by LIBS is a time-resolved spectrum, and its excitation and acquisition require strict timing control. The single-pulse laser energy of the pulsed laser 3 and the integration time of the spectrometer 4 are set in controller 1. The timing pulse generator 2 receives the laser emission signal fed back from the pulsed laser 3 and sends an acquisition signal to the spectrometer 4 after a preset delay time, controlling the spectrometer 4 to acquire the spectrum. The acquired spectral signal is transmitted to controller 1 for processing.

[0099] In this embodiment, the fiber optic converging lens in the driving fiber optic probe moves along a direction perpendicular to the sample surface, exciting and acquiring focused spectral signals. The target focusing position is determined based on the characteristic spectral line intensity of the focused spectral signal. When the fiber optic converging lens moves to the target focusing position, the galvanometer scanning optical path is controlled to guide the pulsed laser into the array fiber bundle according to a preset scanning sequence, thereby exciting plasmas at multiple spatial points on the sample surface. The component spectral signals generated by each plasma are acquired, and the spatial distribution information of the sample's elemental composition is generated based on the component spectral signals. By driving the converging lens in the fiber optic probe along a direction perpendicular to the sample surface using a voice coil motor, the focused spectral signal induced by the pulsed laser in this direction is acquired. The target focal length position is determined based on this focused spectral signal, ensuring that the pulsed laser is accurately focused on the sample surface, improving the excitation efficiency of the pulsed laser, and thus improving the signal-to-noise ratio of the focused spectral signal. After focusing the sample, the pulsed laser is guided into the array fiber bundle by controlling the galvanometer scanning optical path, and the plasma emission light is collected by the array fiber bundle. Based on the structure of the arrayed fiber bundle, a uniform and dense scanning pattern is naturally formed on the sample surface, achieving high spatial resolution sampling. The parallel operation of multiple fibers significantly improves the transmission efficiency of the pulsed laser and the collection efficiency of the spectral signal. A timing pulse generator receives the laser signal emitted by the pulsed laser as a synchronization reference. After a preset delay time, the spectrometer is triggered to collect data within the optimal time window for plasma characteristic radiation, improving the accuracy of sample composition analysis.

[0100] It should be noted that the above examples are only for understanding this application and do not constitute a limitation on the elemental composition analysis method of this application. Any simple modifications based on this technical concept are within the protection scope of this application.

[0101] This application provides an electronic device, which includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, the instructions being executed by the at least one processor to enable the at least one processor to perform the elemental composition analysis method in Embodiment 1 above.

[0102] The following is for reference. Figure 8The diagram illustrates a structural schematic of an electronic device suitable for implementing embodiments of this application. The electronic devices in these embodiments may include, but are not limited to, mobile terminals such as mobile phones, laptops, digital broadcast receivers, PDAs (Personal Digital Assistants), PADs (Portable Application Descriptions), PMPs (Portable Media Players), in-vehicle terminals (e.g., in-vehicle navigation terminals), and fixed terminals such as digital TVs and desktop computers. Figure 8 The electronic device shown is merely an example and should not impose any limitation on the functionality and scope of use of the embodiments of this application.

[0103] like Figure 8 As shown, the electronic device may include a processing unit 1001 (e.g., a central processing unit, a graphics processing unit, etc.), which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 1002 or a program loaded from a storage device 1003 into a random access memory (RAM) 1004. The RAM 1004 also stores various programs and data required for the operation of the electronic device. The processing unit 1001, ROM 1002, and RAM 1004 are interconnected via a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus. Typically, the following systems can be connected to the I / O interface 1006: input devices 1007 including, for example, a touchscreen, touchpad, keyboard, mouse, image sensor, microphone, accelerometer, gyroscope, etc.; output devices 1008 including, for example, a liquid crystal display (LCD), speaker, vibrator, etc.; storage devices 1003 including, for example, magnetic tape, hard disk, etc.; and communication devices 1009. Communication device 1009 allows electronic devices to communicate wirelessly or wiredly with other devices to exchange data. While electronic devices with various systems are shown in the figures, it should be understood that implementation or possession of all the systems shown is not required. More or fewer systems may be implemented alternatively.

[0104] Specifically, according to the embodiments disclosed in this application, the processes described above with reference to the flowcharts can be implemented as computer software programs. For example, embodiments disclosed in this application include a computer program product comprising a computer program carried on a computer-readable medium, the computer program containing program code for performing the methods shown in the flowcharts. In such embodiments, the computer program can be downloaded and installed from a network via a communication device, or installed from storage device 1003, or installed from ROM 1002. When the computer program is executed by processing device 1001, it performs the functions defined in the methods of the embodiments disclosed in this application.

[0105] The electronic device provided in this application, employing the elemental composition analysis method described in the above embodiments, can solve the technical problem that traditional fiber optic LIBS technology struggles to achieve efficient and accurate scanning of samples, resulting in low accuracy in sample composition analysis. Compared with the prior art, the beneficial effects of the electronic device provided in this application are the same as those of the elemental composition analysis method provided in the above embodiments, and other technical features of this electronic device are the same as those disclosed in the previous embodiment method, and will not be repeated here.

[0106] It should be understood that the various parts disclosed in this application can be implemented using hardware, software, firmware, or a combination thereof. In the description of the above embodiments, specific features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0107] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

[0108] This application provides a computer-readable storage medium having computer-readable program instructions (i.e., a computer program) stored thereon, the computer-readable program instructions being used to execute the elemental composition analysis method in the above embodiments.

[0109] The computer-readable storage medium provided in this application may be, for example, a USB flash drive, but is not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices, or any combination thereof. More specific examples of computer-readable storage media may include, but are not limited to: electrical connections having one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof. In this embodiment, the computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, system, or device. The program code contained on the computer-readable storage medium may be transmitted using any suitable medium, including but not limited to: wires, optical cables, RF (Radio Frequency), etc., or any suitable combination thereof.

[0110] The aforementioned computer-readable storage medium may be included in an electronic device or may exist independently without being assembled into an electronic device.

[0111] The aforementioned computer-readable storage medium carries one or more programs that, when executed by an electronic device, cause the electronic device to: control the galvanometer scanning optical path to guide the pulsed laser to each fiber channel in the arrayed fiber bundle to excite plasma at corresponding spatial points on the sample surface; acquire the component spectral signal generated by each plasma based on each fiber channel, and generate the spatial distribution information of the elemental composition of the sample based on the component spectral signal.

[0112] Computer program code for performing the operations of this application can be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, and C++, and conventional procedural programming languages ​​such as the "C" language or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving remote computers, the remote computer can be connected to the user's computer via any type of network—including a Local Area Network (LAN) or a Wide Area Network (WAN)—or can be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0113] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.

[0114] The modules described in the embodiments of this application can be implemented in software or hardware. The names of the modules do not necessarily limit the functionality of the unit itself.

[0115] The readable storage medium provided in this application is a computer-readable storage medium that stores computer-readable program instructions (i.e., a computer program) for executing the above-described elemental composition analysis method. This solves the technical problem that traditional fiber optic LIBS technology struggles to achieve efficient and accurate scanning of samples, resulting in low accuracy in sample composition analysis. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided in this application are the same as those of the elemental composition analysis method provided in the above embodiments, and will not be elaborated upon here.

[0116] This application also provides a computer program product, including a computer program that, when executed by a processor, implements the steps of the elemental composition analysis method described above.

[0117] The computer program product provided in this application can solve the technical problem that traditional fiber optic LIBS technology is unable to achieve efficient and accurate scanning of samples, resulting in low accuracy of sample composition analysis. Compared with the prior art, the beneficial effects of the computer program product provided in this application are the same as those of the elemental composition analysis method provided in the above embodiments, and will not be repeated here.

[0118] The above description is only a part of the embodiments of this application and does not limit the patent scope of this application. All equivalent structural transformations made under the technical concept of this application and using the contents of the specification and drawings of this application, or direct / indirect applications in other related technical fields, are included in the patent protection scope of this application.

Claims

1. A method for elemental composition analysis, characterized in that, An elemental composition analyzer is used, comprising an array of fiber optic bundles and a galvanometer scanning optical path for guiding pulsed laser light. The array of fiber optic bundles is disposed in the fiber optic probe of the elemental composition analyzer. The fiber optic probe further comprises a fiber optic converging mirror located at the exit of the array of fiber optic bundles. The galvanometer scanning optical path comprises a scanning converging mirror, a first deflecting mirror, and a second deflecting mirror. The elemental composition analysis method includes: The fiber optic converging mirror in the fiber optic probe is moved to determine the target focusing position for focusing the pulsed laser onto the sample surface. The fiber optic converging mirror is adjusted to the target focusing position to focus the pulsed laser from the outlet of the array fiber bundle; The deflection angle of the first deflection mirror and the second deflection mirror is controlled to deflect the pulsed laser. The deflection-controlled pulsed laser is focused by the scanning converging mirror so that the deflection-controlled pulsed laser is sequentially incident on each fiber channel in the input end face of the array fiber bundle in a preset scanning order, so as to excite plasma at the corresponding spatial points of each fiber channel on the sample surface. The component spectral signals generated by each plasma are acquired based on each of the optical fiber channels, and the spatial distribution information of the elemental composition of the sample is generated based on the component spectral signals.

2. The elemental composition analysis method as described in claim 1, characterized in that, The step of moving the fiber optic converging mirror in the fiber optic probe to determine the target focusing position for focusing the pulsed laser onto the sample surface includes: The fiber optic focusing mirror in the fiber optic probe is driven to move in a direction perpendicular to the sample surface; The pulsed laser is guided into the fiber optic probe to excite plasma on the sample surface, and the focused spectral signal generated by the plasma is collected through the fiber optic probe. The target focusing position of the fiber optic converging lens is determined based on the intensity of the characteristic spectral lines in the focusing spectral signal.

3. The elemental composition analysis method as described in claim 2, characterized in that, The step of determining the target focusing position of the fiber optic converging lens based on the characteristic spectral line intensity of the focusing spectral signal includes: Calculate the intensity of each characteristic spectral line of the focused spectral signal acquired at different positions of the optical fiber converging mirror; The intensity of each characteristic spectral line is compared, and the position corresponding to the maximum value among the characteristic spectral line intensities is determined as the target focusing position.

4. The elemental composition analysis method as described in claim 1, characterized in that, The elemental composition analyzer also includes a time-series pulse generator, a pulsed laser, and a spectrometer; The step of acquiring the component spectral signals of each plasma based on each of the optical fiber channels includes: The timing pulse generator performs timing control on the pulsed laser and the spectrometer, so that the spectrometer acquires the component spectral signal through each optical fiber channel after the sample surface has been continuously excited by the pulsed laser for a preset time.

5. The elemental composition analysis method as described in claim 1, characterized in that, The step of generating the spatial distribution information of the elemental composition of the sample based on the component spectral signal includes: From the component spectral signals corresponding to each spatial point, identify and calculate the intensity values ​​of each characteristic spectral line of the sample surface element; The coordinate information of each spatial point is associated with the intensity value of each feature spectral line to form a dataset; The dataset is processed into an image to generate and output the spatial distribution information of the elemental composition of the sample surface elements.

6. An electronic device, characterized in that, The device includes: a memory, a processor, and a computer program stored in the memory and executable on the processor, the computer program being configured to implement the steps of the elemental composition analysis method as described in any one of claims 1 to 5.

7. A storage medium, characterized in that, The storage medium is a computer-readable storage medium, and a computer program is stored on the storage medium. When the computer program is executed by a processor, it implements the steps of the elemental composition analysis method as described in any one of claims 1 to 5.

8. A computer program product, characterized in that, The computer program product includes a computer program that, when executed by a processor, implements the steps of the elemental composition analysis method as described in any one of claims 1 to 5.

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