Bottom mechanism of fluidized bed reactor

Abstract

The invention discloses a fluidized bed reactor bottom mechanism, which comprises a bottom flange, a through feeding assembly, a through pressing cap, a stirring paddle and a driving assembly, the bottom flange comprises a through main body part and a cylindrical mounting part convexly extending to the top surface of the main body part, the top surface of the main body part is concavely provided with an arc-shaped groove, the mounting part convexly extends to the middle of the arc-shaped groove, and the driving assembly is arranged in the arc-shaped groove. A plurality of air outlet holes are uniformly distributed in the side wall of the mounting part; the feeding assembly is connected to and communicated with the bottom flange and comprises an air inlet communicated with the air outlet and used for being externally connected with a precursor; the pressing cap covers the mounting part, and gaps are respectively formed between the pressing cap and the arc-shaped groove and between the pressing cap and the side wall of the mounting part; the stirring paddle is arranged above the bottom flange and partially extends into the arc-shaped groove; the driving assembly is connected to the feeding assembly and connected with and drives the stirring paddle to rotate. According to the bottom mechanism, the precursor can be uniformly diffused into the fluidized bed reactor, so that the precursor accumulation and channeling phenomena are avoided.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor equipment, and particularly relates to a bottom mechanism of a fluidized bed reactor. BACKGROUND

[0002] Fluidized bed, for short, fluidized bed, is a kind of reactor which utilizes gas or liquid to pass through granular solid layer to make solid particles in suspended motion state and carry out gas-solid phase reaction process or liquid-solid phase reaction process. When working, the precursor is input into the reactor, and the mechanism responsible for input is usually installed at the bottom of the reactor, which may cause insufficient diffusion of the precursor or channeling, thereby affecting the normal gas-solid phase reaction.

[0003] The information disclosed in this BACKGROUND section is only for the purpose of increasing the understanding of the background of the present application and should not be taken as an acknowledgment or any form of suggestion that this information forms prior art that is publicly known. SUMMARY

[0004] The present application aims to provide a bottom mechanism of a fluidized bed reactor for uniformly diffusing the precursor into the reactor to avoid precursor accumulation and channeling.

[0005] In order to achieve the above-mentioned purpose, one embodiment of the present application provides a bottom mechanism of a fluidized bed reactor, comprising a bottom flange, a through feed assembly, a through pressure cap, a stirring paddle and a driving assembly. The bottom flange comprises a through main body and a cylindrical mounting portion protruding from the top surface of the main body and communicating with the main body. An arc-shaped groove is recessed in the top surface of the main body. The mounting portion protrudes from the middle position of the arc-shaped groove, and a plurality of through gas outlets are uniformly distributed on the side wall of the mounting portion. The feed assembly is connected to and communicates with the bottom flange, and comprises a gas inlet communicating with the gas outlet and used for connecting the precursor. The pressure cap is arranged on the mounting portion and forms a gap with the arc-shaped groove and the side wall of the mounting portion, respectively. The stirring paddle is arranged above the bottom flange and partially extends into the arc-shaped groove. The driving assembly is connected to the feed assembly, passes through the feed assembly, the bottom flange and the pressure cap, and connects and drives the stirring paddle to rotate.

[0006] In one or more embodiments of the present application, the pressure cap is threadedly connected with the mounting portion, and the gap between the pressure cap and the arc-shaped groove is adjustable.

[0007] In one or more embodiments of the present application, the inner diameter of the opening below the pressure cap is greater than the inner diameter of the opening above and the diameter of the mounting portion.

[0008] In one or more embodiments of the present invention, the feeding assembly includes a through feeding flange connected to and communicating with the bottom surface of a bottom flange, the air inlet being formed on the side wall of the feeding flange, the driving assembly including a main shaft and a drive motor connected to the feeding flange, the main shaft passing through the feeding flange, the bottom flange and the pressure cap and connecting to and driving the stirring paddle to rotate, the drive motor connecting to and driving the main shaft to rotate, the air inlet, the gap between the feeding flange and the bottom flange and the main shaft, and the air outlet forming a transmission channel for the precursor.

[0009] In one or more embodiments of the present invention, the feed flange includes a first sleeve and a second sleeve coaxially sleeved with the first sleeve, the air inlet is opened on the second sleeve, a first cooling channel is formed between the outer wall of the first sleeve and the inner wall of the second sleeve, and a first water inlet and a first water outlet communicating with the first cooling channel are opened on the outer wall of the second sleeve.

[0010] In one or more embodiments of the present invention, an annular groove is recessed on the surface of the second sleeve near the bottom flange, and a connecting channel is provided between the annular groove and the first cooling channel, and the first water inlet is connected to the annular groove.

[0011] In one or more embodiments of the present invention, the feeding assembly further includes a partition fixed in the annular groove, the partition dividing the annular groove into an upper region and a lower region, the lower region being connected to a first cooling channel through the connecting channel, the upper region being an explosion-proof cavity, and the first water inlet being connected to the lower region.

[0012] In one or more embodiments of the present invention, a plurality of bearings are provided between the spindle and the inner wall of the first sleeve.

[0013] In one or more embodiments of the present invention, a rotary shaft seal is fixed on the inner wall of the top of the first sleeve, and the rotary shaft seal is sleeved on the main shaft.

[0014] In one or more embodiments of the present invention, a plurality of sealing rings are provided between the first sleeve and the second sleeve.

[0015] In one or more embodiments of the present invention, a bushing is fitted on the main shaft, one end of the bushing extends above the air outlet and the other end extends below the air inlet. A first air seal port communicating with the inner wall is provided on the side wall of the second sleeve. The first air seal port is located below the bushing and is used to connect to an external air seal gas source.

[0016] In one or more embodiments of the present invention, the drive assembly further includes a connecting flange connected between the drive motor and the feed flange, wherein a magnetic coupler for connecting the main shaft is disposed within the connecting flange, and the drive motor drives the main shaft to rotate through the magnetic coupler.

[0017] In one or more embodiments of the present invention, a speed reducer is provided between the drive motor and the magnetic coupler.

[0018] In one or more embodiments of the present invention, a discharge assembly for extracting the material after the reaction is completed is further included. The discharge assembly includes a discharge flange connected to a bottom flange and a valve assembly fixed to the discharge flange. The bottom flange is provided with a discharge port communicating with the bottom wall of an arc-shaped groove. The discharge flange communicates with the discharge port, and a discharge port communicating with the inner wall is opened on the side wall of the discharge flange. The valve assembly includes a cylinder fixed to the discharge flange and a valve core movable within the discharge flange. The cylinder is connected to and drives the valve core to move within the discharge flange to block or move away from the discharge port.

[0019] In one or more embodiments of the present invention, the discharge flange includes a third sleeve and a fourth sleeve coaxially sleeved with the third sleeve, the valve core is disposed inside the third sleeve, the cylinder is connected to the fourth sleeve, a second cooling channel is formed between the outer wall of the third sleeve and the inner wall of the fourth sleeve, and a second water inlet and a second water outlet communicating with the second cooling channel are provided on the outer wall of the fourth sleeve.

[0020] In one or more embodiments of the present invention, the valve assembly further includes an air-sealing flange fixed between the discharge flange and the cylinder and coaxially connected with the discharge flange. The outer wall of the air-sealing flange is provided with a second air-sealing port that connects to its inner wall. The second air-sealing port is used to connect to an external air-sealing gas source.

[0021] Compared with the prior art, the bottom mechanism of the present invention can uniformly diffuse the precursor into the interior of the fluidized bed reactor, avoiding precursor accumulation and channeling. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the bottom mechanism in one embodiment of the present invention;

[0024] Figure 2This is a cross-sectional view of the bottom mechanism in one embodiment of the present invention;

[0025] Figure 3 for Figure 2 A magnified view of a portion of the image;

[0026] Figure 4 This is a cross-sectional view of the feeding assembly in one embodiment of the present invention;

[0027] Figure 5 This is a cross-sectional view of the feeding assembly from another angle in one embodiment of the present invention;

[0028] Figure 6 This is a cross-sectional view of the discharge assembly in one embodiment of the present invention.

[0029] Explanation of key figure labels:

[0030] 100-Bottom Mechanism, 10-Bottom Flange, 11-Main Body, 12-Mounting Part, 13-Arc-shaped Groove, 14-Air Outlet, 15-Discharge Port, 16-Sealing Ring, 20-Feeding Assembly, 21-Air Inlet, 22-Feeding Flange, 221-First Sleeve, 222-Second Sleeve, 2221-First Water Inlet, 2222-First Water Outlet, 2223-Annular Groove, 2224-Connecting Channel, 2225-First Air Seal, 223-First Cooling Channel, 224-Baffle Plate, 225-Bearing 226-Rotary shaft seal, 30-Pressure cap, 40-Agitator, 50-Drive assembly, 51-Main shaft, 52-Drive motor, 53-Shaft sleeve, 54-Connecting flange, 55-Magnetic coupler, 56-Reducer, 60-Discharge assembly, 61-Discharge flange, 611-Third sleeve, 612-Fourth sleeve, 6121-Second water inlet, 6122-Second water outlet, 621-Cylinder, 622-Valve core, 63-Discharge port, 64-Second cooling channel, 65-Air seal flange, 651-Second air seal port. Detailed Implementation

[0031] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0032] like Figures 1-6As shown, in one embodiment of the present invention, a bottom mechanism 100 of a fluidized bed reactor is fixed to the bottom of the fluidized bed reactor and is used at least for conveying precursors into the fluidized bed reactor. The bottom mechanism 100 includes a bottom flange 10, a feed assembly 20, a pressure cap 30, a stirring paddle 40, and a drive assembly 50. The bottom flange 10 includes a through main body 11 and a mounting portion 12 protruding from the top surface of the main body 11. An arc-shaped groove 13 is provided on the top surface of the main body 11, and the mounting portion 12 protrudes from the center of the arc-shaped groove 13. For example, it can be a hollow cylinder protruding around the top opening of the main body 11. A plurality of through air outlets 14 are provided on the side wall of the mounting portion 12.

[0033] The feeding assembly 20 is connected to and axially extends through the bottom flange 10. The feeding assembly 20 is installed on the bottom surface of the bottom flange 10 and communicates with the bottom flange 10. The feeding assembly 20 is provided with an air inlet 21, which communicates with an air outlet 14. The precursor can be conveyed to the air outlet 14 through the air inlet 21.

[0034] The pressure cap 30 is axially continuous and is sleeved and fixed on the mounting part 12 without contacting the arc-shaped groove 13. Therefore, there is a gap between the pressure cap 30 and the arc-shaped groove 13. At the same time, a gap is also formed between it and the mounting part 12. The vent 14 corresponds exactly to this gap, so the precursor can flow into the gap between the mounting part 12 and the pressure cap 30 through the vent 14.

[0035] A gap is formed between the pressure cap 30, the arc-shaped groove 13, and the mounting part 12. The stirring paddle 40 is positioned above the bottom flange 10 and extends partially into the arc-shaped groove 13. The drive assembly 50 is connected to the feed assembly 20, passes through the bottom flange 10, the feed assembly 20, and the pressure cap 30, and then connects to and drives the stirring paddle 40 to rotate.

[0036] In this embodiment, the bottom mechanism 100, wherein the pressure cap 30, the agitator 40, and at least part of the bottom flange 10 are located inside the fluidized bed reactor, the precursor is input through the air inlet 21, flows out from the air outlet 14, flows into the gap between the pressure cap 30 and the side wall of the mounting part 12, and finally diffuses into the interior of the fluidized bed reactor through the gap between the pressure cap 30 and the arc-shaped groove 13. The rotating agitator 40 can accelerate and improve the diffusion effect of the precursor.

[0037] Multiple air vents 14 are evenly distributed on the mounting section 12. After the precursor flows into the gap between the mounting section 12 and the pressure cap 30, it eventually flows evenly into the arc-shaped groove 13 through the gap between the pressure cap 30 and the arc-shaped groove 13. After flowing into the arc-shaped groove 13, under the rotation of the stirring paddle 40, some of the precursor diffuses directly into the reactor, while the remaining precursor flows along the bowl-shaped arc-shaped groove 13 and eventually flows into the reactor along the inclined sidewall of the arc-shaped groove 13. This improves the fluidity of the precursor at the bottom center of the reactor and avoids precursor agglomeration or even chain exothermic reactions. The arc-shaped surface of the arc-shaped groove 13 has no sharp corners, avoiding precursor accumulation and channeling phenomena, and ensuring uniform diffusion of the precursor.

[0038] For example Figure 2 In the illustrated embodiment, the arc-shaped groove 13 is a three-section design, including a bottom plane, a middle slope, and a top slope. The middle slope, bottom plane, and top slope are all connected by arc surfaces. The angle between the middle slope and the bottom plane can be, for example, 10-20°, while the angle between the middle slope and the top slope can be 30-50°. Of course, the above angles can also be set to other angles, and this embodiment is not limited thereto.

[0039] Preferably, the vertical distance between the bottom of the stirring paddle 40 and the bottom and side walls of the arc-shaped groove 13 is always the same, that is, the bottom shape of the stirring paddle 40 is the same as the cross-sectional shape of the arc-shaped groove 13. Therefore, the stirring effect of the stirring paddle 40 on the precursor is further improved, thereby improving the diffusion effect of the precursor. The gap between the pressure cap 30 and the arc-shaped groove 13 is smaller than the aperture of the air outlet 14, so that the precursor can diffuse more evenly into the arc-shaped groove 13.

[0040] The pressure cap 30 is threadedly connected to the mounting part 12, and its height can be adjusted by rotation. Therefore, the gap between its edge and the arc-shaped groove 13 is adjustable, and can be adjusted according to the properties and particle size of the precursor, providing high flexibility. For example, in one embodiment, the adjustment range of the gap between the pressure cap 30 and the arc-shaped groove 13 is 0.5-2.0 mm, while the diameter of the vent 14 is 5-12 mm, always larger than the gap between the pressure cap 30 and the arc-shaped groove 13.

[0041] In one embodiment, the pressure cap 30 has a two-section design. The inner diameter of the lower opening (corresponding to the position of the air outlet 14) is larger than the inner diameter of the upper opening. The narrower part of the upper inner diameter is connected and fixed to the mounting part 12, while the wider part of the lower inner diameter is used to form a gap with the mounting part 12, that is, the flow gap of the precursor.

[0042] Specifically, the feeding assembly 20 includes a through-feed flange 22, which is connected to and communicates with the bottom flange 10. An air inlet 21 is formed on the side wall of the feeding flange 22. The drive assembly 50 includes a main shaft 51 and a drive motor 52. The main shaft 51 passes through the feeding flange 22, the bottom flange 10, and the pressure cap 30, and then connects to and drives the top stirring paddle 40 to rotate. The drive motor 52 is fixed to the feeding flange 22, and connects to and drives the main shaft 51 to rotate. The air inlet 21, the gap between the feeding flange 22 and the bottom flange 10 and the main shaft 51, and the air outlet 14 constitute the transmission channel of the precursor. The precursor flows from the air inlet 21 into the gap between the feeding flange 22 and the main shaft 51, then flows upward into the gap between the bottom flange 10 and the main shaft 51, and finally flows out of the bottom flange 10 through the air outlet 41.

[0043] Preferably, a plurality of sealing rings 16 are provided on the inner wall of the top of the mounting part 12 to ensure that the precursor flows out only from the air outlet 14, and to prevent the precursor from overflowing from the top of the mounting part 12 and affecting the normal rotation of the agitator 40.

[0044] The feed flange 22 is composed of two parts: a first sleeve 221 and a second sleeve 222 coaxially fitted with the first sleeve 221. An air inlet 21 is formed on the second sleeve 222. A first cooling channel 223 is formed between the outer wall of the first sleeve 221 and the inner wall of the second sleeve 222. A first water inlet 2221 and a first water outlet 2222, connecting to the first cooling channel 223, are provided on the outer wall of the second sleeve 222. Since the fluidized bed reactor is a high-temperature environment, introducing cooling water into the first cooling channel 223 through the first water inlet 2221 and the first water outlet 2222 reduces the overall temperature of the feed flange 22, thereby reducing the impact of the high temperature inside the reactor on the drive assembly 50 below and improving overall stability.

[0045] Because an air inlet 21 needs to be made on the second sleeve 222, the length of the second sleeve 222 is greater than that of the first sleeve 221, and the first cooling channel 223 is located below the air inlet 21. To further improve the cooling effect, an annular groove 2223 is recessed on the surface of the second sleeve 222 near the bottom flange 10. This annular groove is connected to the first cooling channel 223 via a connecting channel 2224, and the first water inlet 2221 is connected to the annular groove 2223. Cooling water flows into the annular groove 2223 through the first water inlet 2221, flows into the first cooling channel 223 below through the connecting channel 2224, and finally flows out through the first water outlet 2222. This arrangement increases the cooling volume of the feed flange 22 and shortens the distance between the cooling water and the bottom flange 10, thereby improving the cooling effect.

[0046] Furthermore, the feeding assembly 20 also includes a partition 224 fixed within the annular groove 2223, which divides the annular groove 2223 into upper and lower regions. The lower region is connected to the first cooling channel 223 via a connecting channel 2224, and the first water inlet 2221 is also connected to the lower region. The upper region is an explosion-proof cavity, which is not circulated with cooling water to prevent the bottom flange 10 from directly contacting the cooling water and cracking under thermal shock.

[0047] Preferably, a bushing 53 is fitted onto the main shaft 51. The bushing 53 covers at least the length of the main shaft 51 between the air inlet 21 and the air outlet 14. One end of the bushing 53 extends below the air inlet 21, and the other end extends above the air outlet 14. The bushing 53 does not extend to the bottom surface of the bottom flange 10. A first air seal port 2225 communicating with the inner wall is provided on the side wall of the second sleeve 2222 below the bushing 53. By connecting an external air seal air source, the gap between the second sleeve 2222 below the bushing 53 and the main shaft 51 is purged upward with positive pressure, further preventing the precursor from flowing downward into the first sleeve 2221.

[0048] Multiple bearings 225 are provided between the main shaft 51 and the inner wall of the first sleeve 2221, for example... Figure 4 In this design, bearings 225 are installed at both the upper and lower ends of the first sleeve 2221 to fix the main shaft 51. The bearings 225 are high-temperature resistant bearings to prevent high temperatures from affecting the stability of the rotation of the main shaft 51.

[0049] A rotary shaft seal 226 is also fixed on the inner wall of the top of the first sleeve 2221. The rotary shaft seal 226 is sleeved on the main shaft 51 to prevent the precursor from flowing into the lower first sleeve 2221.

[0050] To improve airtightness, multiple sealing rings can be provided between the first sleeve 2221 and the second sleeve 2222 to prevent cooling water from overflowing and the precursor from flowing downwards.

[0051] In one embodiment, the drive assembly 50 further includes a connecting flange 54 connected between the drive motor 52 and the feed flange 22. The connecting flange 54 has a built-in magnetic coupler 55 for connecting the main shaft 51, and the drive motor 52 drives the main shaft 51 to rotate through the magnetic coupler 55.

[0052] Preferably, a speed reducer 56 is provided between the drive motor 52 and the magnetic coupler 55 to adjust the output speed of the drive motor 52.

[0053] The bottom mechanism 100 of this invention is further provided with a discharge assembly 60 for extracting the material after the reaction is completed. Specifically, a discharge port 15 communicating with the arc-shaped groove 13 is provided on the bottom flange 10. The discharge assembly 60 includes a discharge flange 61 communicating with the discharge port 15 and a valve assembly fixed to the discharge flange 61. A discharge port 63 communicating with the inner wall is provided on the side wall of the discharge flange 61. The discharge port 63 extracts the material in the reactor after the reaction is completed by connecting an external negative pressure device. The valve assembly includes a cylinder 621 fixed to the discharge flange 61 and a valve core 622 that moves within the discharge flange 61. The output shaft of the cylinder 621 extends into the discharge flange 61, connecting to and driving the valve core 622 to move within the discharge flange 61. When the internal reaction is not complete, the valve core 622 blocks the discharge port 15. After the internal reaction is complete, the valve core 622 moves away from and releases the discharge port 15, allowing the material to flow into the discharge flange 61 through the discharge port 15 and finally out through the discharge port 63.

[0054] Preferably, to avoid the high temperature affecting the cylinder 621, the discharge assembly 60 also has a water cooling mechanism. Specifically, the discharge flange 61 includes a third sleeve 611 and a fourth sleeve 612 coaxially sleeved with the third sleeve 611. The valve core 622 is disposed inside the fourth sleeve 612, and the cylinder 621 is fixed to the third sleeve 611. A second cooling channel 64 is formed between the outer wall of the third sleeve 611 and the inner wall of the fourth sleeve 612. A second water inlet 6121 and a second water outlet 6122 connected to the second cooling channel 64 are provided on the outer wall of the fourth sleeve 612. By introducing cooling water between the third sleeve 611 and the fourth sleeve 612, the heat of the discharge flange 61 is reduced, thereby reducing the impact of the high temperature of the bottom flange 10 on the cylinder 621 and ensuring the stable operation of the cylinder 621 for a long time.

[0055] Secondly, the discharge assembly 60 also includes an air-sealing flange 65 fixed between the discharge flange 61 and the cylinder 621. The air-sealing flange 65 is coaxially connected to the discharge flange 61 so that the output shaft of the cylinder 621 can pass through. A second air-sealing port 651 connected to the inner wall is provided on the side wall of the air-sealing flange 65. By connecting an external air-sealing air source, positive purging is performed in the gap between the output shaft of the cylinder 621 and the inner wall of the discharge flange 61 to prevent material from accumulating in the discharge flange 61 or even the air-sealing flange 65, causing material jamming, or even affecting the normal operation of the cylinder 621.

[0056] Preferably, to further improve the airtightness of the entire discharge assembly 60, sealing rings can be provided between the third sleeve 611 and the fourth sleeve 612, the bottom flange 10, and between the air-sealing flange 65 and the fourth sleeve 612, the cylinder 621, to prevent leakage of air-sealing gas, precursor or cooling water.

[0057] The valve core 622 is connected to the output shaft of the cylinder 621 by a thread. Its main body has a pot-shaped structure, and the discharge port 15 is set in a cone shape (the cone angle can be 20-40°). This setting improves the airtightness of the valve core 622 to the discharge port 15.

[0058] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0059] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A bottom mechanism for a fluidized bed reactor, fixed to the bottom of the fluidized bed reactor, for at least conveying precursors into the fluidized bed reactor, characterized in that, The bottom mechanism includes: The bottom flange includes a through main body and a columnar mounting part that protrudes from the top surface of the main body and communicates with the main body. The top surface of the main body is recessed with an arc-shaped groove, and the mounting part protrudes from the middle position of the arc-shaped groove. Multiple through air vents are evenly distributed on the side wall of the mounting part. A through-feed assembly is connected to and communicates with the bottom flange, including an air inlet that communicates with the air outlet and is used for connecting to an external precursor. A through-hole pressure cap is placed over the mounting part, and gaps are formed between the arc-shaped groove and the side wall of the mounting part, respectively. The stirring paddle is positioned above the bottom flange and extends partially into the arc-shaped groove; A drive assembly, connected to the feed assembly, passes through the feed assembly, the bottom flange, and the pressure cap, and connects to and drives the agitator to rotate.

2. The bottom mechanism according to claim 1, characterized in that, The pressure cap is threadedly connected to the mounting part, and the gap between it and the arc-shaped groove is adjustable.

3. The bottom mechanism according to claim 1, characterized in that, The inner diameter of the opening at the bottom of the pressure cap is greater than the inner diameter of the opening at the top and the diameter of the mounting part.

4. The bottom mechanism according to claim 1, characterized in that, The feeding assembly includes a through-feed flange, which is connected to and communicates with the bottom surface of the bottom flange. The air inlet is located on the side wall of the feeding flange. The drive assembly includes a main shaft and a drive motor connected to the feeding flange. The main shaft passes through the feeding flange, the bottom flange, and the pressure cap, and is connected to and drives the agitator to rotate. The drive motor is connected to and drives the main shaft to rotate. The air inlet, the gap between the feeding flange, the bottom flange, and the main shaft, and the air outlet constitute the transmission channel of the precursor.

5. The bottom mechanism according to claim 4, characterized in that, The feed flange includes a first sleeve and a second sleeve coaxially sleeved with the first sleeve. The air inlet is opened on the second sleeve. A first cooling channel is formed between the outer wall of the first sleeve and the inner wall of the second sleeve. A first water inlet and a first water outlet connected to the first cooling channel are opened on the outer wall of the second sleeve.

6. The bottom mechanism according to claim 5, characterized in that, The second sleeve has an annular groove recessed on the surface near the bottom flange end. A connecting channel is provided between the annular groove and the first cooling channel, and the first water inlet is connected to the annular groove.

7. The bottom mechanism according to claim 6, characterized in that, The feeding assembly also includes a partition fixed in the annular groove, which divides the annular groove into an upper region and a lower region. The lower region is connected to the first cooling channel through the connecting channel. The upper region is an explosion-proof cavity, and the first water inlet is connected to the lower region.

8. The bottom mechanism according to claim 5, characterized in that, Multiple bearings are provided between the main shaft and the inner wall of the first sleeve.

9. The bottom mechanism according to claim 5, characterized in that, A rotary shaft seal is fixed on the inner wall of the top of the first sleeve, and the rotary shaft seal is sleeved on the main shaft.

10. The bottom mechanism according to claim 5, characterized in that, Multiple sealing rings are provided between the first sleeve and the second sleeve.

11. The bottom mechanism according to claim 5, characterized in that, A bushing is fitted on the main shaft. One end of the bushing extends above the air outlet and the other end extends below the air inlet. A first air seal port communicating with the inner wall is provided on the side wall of the second sleeve. The first air seal port is located below the bushing and is used to connect to an external air seal gas source.

12. The bottom mechanism according to claim 4, characterized in that, The drive assembly also includes a connecting flange connected between the drive motor and the feed flange. A magnetic coupler for connecting the main shaft is provided inside the connecting flange, and the drive motor drives the main shaft to rotate through the magnetic coupler.

13. The bottom mechanism according to claim 12, characterized in that, A speed reducer is provided between the drive motor and the magnetic coupler.

14. The bottom mechanism according to claim 1, characterized in that, It also includes a discharge assembly for extracting the material after the reaction is complete. The discharge assembly includes a discharge flange connected to a bottom flange and a valve assembly fixed to the discharge flange. The bottom flange is provided with a discharge port communicating with the bottom wall of an arc-shaped groove. The discharge flange communicates with the discharge port, and a discharge port communicating with the inner wall is opened on the side wall of the discharge flange. The valve assembly includes a cylinder fixed to the discharge flange and a valve core that moves within the discharge flange. The cylinder is connected to and drives the valve core to move within the discharge flange to block or move away from the discharge port.

15. The bottom mechanism according to claim 14, characterized in that, The discharge flange includes a third sleeve and a fourth sleeve coaxially sleeved with the third sleeve. The valve core is disposed inside the third sleeve. The cylinder is connected to the fourth sleeve. A second cooling channel is formed between the outer wall of the third sleeve and the inner wall of the fourth sleeve. A second water inlet and a second water outlet communicating with the second cooling channel are provided on the outer wall of the fourth sleeve.

16. The bottom mechanism according to claim 15, characterized in that, The valve assembly also includes an air-sealing flange fixed between the discharge flange and the cylinder and coaxially connected to the discharge flange. The outer wall of the air-sealing flange is provided with a second air-sealing port that connects to its inner wall. This second air-sealing port is used to connect to an external air-sealing gas source.

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