Film coating equipment for processing flexible and straight metallized film

Abstract

The invention discloses coating equipment for processing a flexible and straight metallized film, and belongs to the technical field of coating of metal materials. The problem that the evaporation coating efficiency is reduced due to the fact that existing coating equipment needs to be shut down to clean a coating baffle is solved. The evaporation source evaporates materials, the flexible base film is wound around the coating main roller for evaporation coating, when the evaporation materials are attached to the part, located in the vacuum coating cavity, of the coating baffle, the part, located outside the vacuum coating cavity, of the coating baffle is switched to the interior of the vacuum coating cavity, and the part, located in the vacuum coating cavity, of the coating baffle is switched to the exterior of the vacuum coating cavity; in the continuous production process of evaporation coating, the baffle cleaning mechanism can clean evaporation materials attached to the coating baffle. According to the invention, the length of the coating baffle is increased and the coating baffle is driven to reciprocate inside and outside, so that the coating baffle part to which an evaporation material is attached and the cleaned coating baffle part are switched inside and outside, and meanwhile, the baffle cleaning mechanism is externally arranged, so that the coating baffle is cleaned under the condition that the coating equipment does not stop.

Description

Technical Field

[0001] This invention belongs to the field of metal coating technology, and particularly relates to coating equipment for processing metallized films for flexible straight surfaces. Background Technology

[0002] Evaporation coating is a technique that uses a material heated and evaporated in a vacuum environment to form gaseous atoms or molecules. These particles then splash onto the surface of a target object, condense, and deposit to form a thin, uniform film. It is widely used in optics, microelectronics, decoration, packaging, and scientific research. During the evaporation coating process, baffles are typically installed in the roll-to-roll coating equipment to separate the evaporation coating area from other areas. However, a certain thickness of evaporated material also adheres to the baffles, requiring periodic cleaning. For example, a roll-to-roll coating device disclosed in publication number CN113621934B includes a movable baffle system within a vacuum chamber. This system comprises movable baffles and a cleaning module. The movable baffles within the vacuum chamber are configured with a coating shielding phase, an evaporation source shielding phase, and a cleaning phase. The movable baffles can move vertically and laterally to either the coating shielding phase, the evaporation source shielding phase, or the cleaning phase. The cleaning module is located below the movable baffles. When the movable baffles are in the cleaning phase, the cleaning module performs online cleaning of the deposits on the movable baffles under vacuum conditions. However, the moving baffle is completed in the vacuum chamber of the vacuum coating machine, which requires the machine to be stopped for cleaning, resulting in a decrease in the efficiency of evaporation coating and making it impossible to achieve continuous production of evaporation coating. Summary of the Invention

[0003] In view of this, the present invention provides a coating equipment for processing flexible metallized films, which can clean the evaporation material adhering to the coating baffle during the continuous production of evaporation coating.

[0004] To achieve the above objectives, the present invention provides the following technical solutions.

[0005] 1. Coating equipment for processing flexible metallized films, including: Vacuum coating chamber; The coating main roller is set inside the vacuum coating chamber, and the flexible base film is fed continuously around the coating main roller; The evaporation source, located below the coating main roller, is used to evaporate the material; There are four coating baffles. One end of the coating baffle is inserted into the vacuum coating chamber, and the other end is outside the vacuum coating chamber. Each coating baffle can move along its own length. The parts of the four coating baffles inside the vacuum coating chamber are located on the front and rear sides and the left and right sides of the coating main roller, respectively, to block the area outside the evaporation coating. The baffle cleaning mechanism is located outside the vacuum coating chamber and is used to clean the evaporated material adhering to the coating baffle. The evaporation source evaporates the material, and the flexible base film is evaporated and coated by the coating main roller. When the part of the coating baffle inside the vacuum coating chamber is covered with evaporating material, the part of the coating baffle outside the vacuum coating chamber is switched to the vacuum coating chamber, and the part inside the vacuum coating chamber is switched to the outside of the vacuum coating chamber. In order to allow the baffle cleaning mechanism to clean the evaporating material attached to the coating baffle during the continuous evaporation coating process.

[0006] This application extends the length of the coating baffle and drives the coating baffle to move back and forth, so as to switch the coating baffle part with the evaporation material attached to it with the clean coating baffle part. At the same time, the baffle cleaning mechanism is placed externally, so as to achieve the cleaning of the coating baffle without stopping the coating equipment.

[0007] 2. Based on technical solution 1, the baffle cleaning mechanism includes: The nozzle can spray dry ice particles; Nozzle drive cylinder, used to drive the nozzle to move; When the portion of the coating baffle that was inside the vacuum coating chamber is switched to the outside of the vacuum coating chamber, the nozzle drive cylinder drives the nozzle to move along the length of the coating baffle, and the nozzle sprays dry ice particles to clean the evaporated material attached to the coating baffle.

[0008] 3. Based on technical solution 2, each coating baffle includes a first baffle and a second baffle, which are located inside and outside the vacuum coating cavity, respectively. When a layer of evaporation material is attached to the first baffle, the first baffle moves out of the vacuum coating cavity and the second baffle moves into the vacuum coating cavity. When the second baffle is in place, the first baffle continues to move so that a gap is left between the first baffle and the second baffle.

[0009] 4. Based on technical solution 3, the first baffle and the second baffle are each driven to move by a baffle driving mechanism. When the baffle driving mechanism corresponding to the second baffle drives the second baffle to switch into the vacuum coating chamber, the driving stops. The baffle driving mechanism corresponding to the first baffle continues to drive the first baffle so that there is a gap between the first baffle and the second baffle.

[0010] 5. Based on technical solution 3, a through hole is formed along the length direction on the second baffle, and a limit block is provided on the second baffle; a slot is formed on the first baffle; the first baffle and the second baffle are jointly driven to move by a baffle driving mechanism, the baffle driving mechanism including: A drive rod passes through a through hole in the second baffle and is inserted into a slot in the first baffle. The outer diameter of the drive rod is smaller than the inner diameter of the through hole and the slot. A baffle-driven cylinder is used to move the drive rod. A drive ring, sleeved on the drive rod and positioned between the first and second baffles, is used for resetting the second baffle. A tension spring connects the first baffle and the second baffle; The baffle drive cylinder drives the first baffle to move via the drive rod. The first baffle pulls the second baffle to move synchronously via the tension spring. When the second baffle switches into the vacuum coating chamber, the limit block limits the second baffle to stop its movement. The baffle drive cylinder continues to drive the first baffle to move via the drive rod to maintain a gap between the first baffle and the second baffle.

[0011] 6. Based on technical solution 4 or 5, a heat exchange mechanism is also included. This heat exchange mechanism is arranged outside the vacuum coating chamber and is used for heat exchange between the first baffle or second baffle that has been switched out from the vacuum coating chamber and the first baffle or second baffle that has been cleaned.

[0012] 7. Based on technical solution 6, the heat exchange mechanism includes: The heat exchange assembly is provided in four sets, with one set on each of the left and right sides and the front and rear sides of the vacuum coating chamber. The heat exchange assemblies on the left and right sides are respectively arranged on the first and second baffles of the coating baffles on the front and rear sides of the coating main roller, and the heat exchange assemblies on the front and rear sides are respectively arranged on the first and second baffles of the coating baffles on the left and right sides of the coating main roller. Each heat exchange assembly includes a heat exchange drive cylinder and a heat exchange plate. The heat exchange drive cylinder can drive the heat exchange plate to move up and down. The heat exchange plate is provided with a heat exchange cavity, and a heat exchange working fluid is injected into the heat exchange cavity. The liquid storage tank has two heat exchange chambers that are connected to all the heat exchange plates. One liquid storage tank is used to store the cooling heat exchange medium, and the other liquid storage tank is used to store the heating heat exchange medium.

[0013] 8. Based on technical solution 7, the heat exchange medium is heat exchange oil. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the coating equipment for processing flexible metallized films according to the present invention.

[0015] Figure 2 This is a cross-sectional view of the coating equipment for processing flexible metallized films according to the present invention.

[0016] Figure 3 This is a schematic diagram of the coating equipment for processing flexible metallized films according to the present invention. Figure 1 (Remove the base film portion).

[0017] Figure 4 This is a schematic diagram of the coating equipment for processing flexible metallized films according to the present invention. Figure 2 (Remove the base film portion).

[0018] Figure 5 Assembly of the coating baffle, baffle cleaning mechanism and baffle driving mechanism Figure 1 .

[0019] Figure 6 Assembly of the coating baffle, baffle cleaning mechanism and baffle driving mechanism Figure 2 .

[0020] Figure 7 This is an assembly drawing of the coating baffle and the baffle drive mechanism.

[0021] Figure 8 This is an assembly drawing of the coating baffle, baffle cleaning mechanism, baffle driving mechanism and heat exchange mechanism.

[0022] Figure 9 This is a schematic diagram of the heat exchange mechanism.

[0023] Figure 10 for Figure 2 A magnified view of a portion of point A in the middle.

[0024] The attached figures are labeled as follows: Vacuum coating box 1, vacuum coating chamber 11; 2. Coating main roller; 3. Evaporation source; 4. Base film feeding mechanism; 5. Base film winding mechanism; 6. Baffle cleaning mechanism, 61. Cleaning box, 62. Spray head, 63. Spray head drive cylinder, 64. Debris collection tank, 65. Debris drive cylinder; 7. Baffle drive mechanism, 71. Baffle drive cylinder, 72. Connecting rod, 73. Drive ring, 74. Drive rod, 75. Tension spring; Coated baffle 8, slot 811, first receiving groove 812, second baffle 82, through hole 821, second receiving groove 822, limiting block 823, sliding groove 83; Sealing mechanism 9, sealing block 91, sealing drive cylinder 92; Heat exchange mechanism 10, liquid storage tank 101, heat exchange pump 102, heat exchange drive cylinder 103, heat exchange plate 104, valve 105; Flexible base film 100. Detailed Implementation

[0025] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] See Figure 1 and Figure 2The coating equipment for processing flexible metallized films in this embodiment mainly deposits thin films on the surface of a substrate to improve material properties, prepare functional coatings, and enhance surface treatment effects. It includes a vacuum coating chamber 1, a coating main roller 2, a base film feeding mechanism 4, a base film winding mechanism 5, an evaporation source 3, a coating baffle 8, a baffle cleaning mechanism 6, and a baffle driving mechanism 7. Combined with... Figure 2 The vacuum coating chamber 1 contains a vacuum coating cavity 11, and the main coating roller 2 is installed inside the vacuum coating cavity 11. A recirculating coolant is injected into the main coating roller 2. An evaporation source 3 is located below the main coating roller 2 and is used to evaporate the material. A base film feeding mechanism 4 and a base film winding mechanism 5 are respectively located on the left and right sides of the vacuum coating chamber 1. One end of the flexible base film 100 is wound onto the base film feeding mechanism 4, and the other end passes through the body of the vacuum coating chamber 1, wraps around the main coating roller 2, then exits the body of the vacuum coating chamber 1 and is wound onto the base film winding mechanism 5. Figure 3 and Figure 4 The coating baffles 8 are provided in two sets, with two coating baffles 8 in each set, for a total of four coating baffles 8. Combined with... Figure 10 One end of the coating baffle 8 passes through the vacuum coating chamber 1 and is inserted into the vacuum coating cavity 11, while the other end is outside the vacuum coating chamber 1. Two of the coating baffles 8 in one set are located inside the vacuum coating cavity 11, on the front and rear sides of the coating main roller 2, respectively. Two of the coating baffles 8 in the other set are located inside the vacuum coating cavity 11, on the left and right sides of the coating main roller 2, respectively. These four coating baffles 8 can shield areas outside the evaporation coating process. Figure 2 and Figure 10 The baffle drive mechanism 7 can drive the coating baffle 8 to move along its own length. Combined with... Figure 1 and Figure 8 Four baffle cleaning mechanisms 6 are provided, and are respectively set on the left and right sides and the front and rear sides outside the vacuum coating box 1. The baffle cleaning mechanisms 6 on the left and right sides are respectively set on the two coating baffles 8 on the front and rear sides of the coating main roller 2, and the baffle cleaning mechanisms 6 on the front and rear sides are respectively set on the two coating baffles 8 on the left and right sides of the coating main roller 2. Each baffle cleaning mechanism 6 is used to clean the evaporating material attached to the corresponding coating baffle 8.

[0027] Before evaporation coating, the vacuum coating chamber 11 is evaporated and maintained. During the evaporation coating process, the evaporation source 3 evaporates the material, the base film feeding mechanism 4 feeds the material, and at the same time, the base film winding mechanism 5 winds up the flexible base film 100 so that the flexible base film 100 is continuously fed around the coating main roller 2. As the evaporation coating time increases, a layer of evaporated material adheres to the part of the coating baffle 8 inside the vacuum coating chamber 11. The baffle driving mechanism 7 drives the coating baffle 8 to move, switching the part of the coating baffle 8 outside the vacuum coating chamber 11 to inside the vacuum coating chamber 11, and the part inside the vacuum coating chamber 11 to outside the vacuum coating chamber 11. The baffle cleaning mechanism 6 cleans the evaporated material adhering to the coating baffle 8.

[0028] This cycle repeats continuously, allowing the coating equipment to operate without stopping and enabling continuous evaporation coating, thus improving the efficiency of evaporation coating. It can be seen that this embodiment increases the length of the coating baffle 8 and drives it to move back and forth, switching between the portion of the coating baffle 8 with the evaporation material and the clean portion. Simultaneously, the baffle cleaning mechanism 6 is externally mounted, thereby achieving cleaning of the coating baffle 8 without stopping the coating equipment.

[0029] See Figure 3 and Figure 8 The baffle cleaning mechanism 6 in this embodiment includes a cleaning box 61, a dry ice bucket (not shown in the figure), a spray head 62, a spray head drive cylinder 63, a debris collection tank 64, and a debris drive cylinder 65. The cleaning box 61 is installed on the outer wall of the vacuum coating box 1, and a slider (not shown in the figure) is provided on the inner wall of the cleaning box 61. Each coating baffle 8 is provided with a sliding groove 83 that cooperates with the slider. The coating baffle 8 is slidably connected to the cleaning box 61 through the cooperation of the slider and the sliding groove 83. The spray head drive cylinder 63 is installed on the cleaning box 61 and connected to the spray head 62. The spray head drive cylinder 63 can drive the spray head 62 to move along the length direction of the coating baffle 8. The spray head 62 is connected to the dry ice bucket through a pipe. The spray head 62 has a plurality of nozzles arrayed on it, and the nozzles can spray dry ice particles. The debris collection trough 64 is located inside the cleaning box 61 and below the spray head 62. There are two debris drive cylinders 65, which are located on the left and right sides of the debris collection trough 64 respectively. The piston rods of the two debris drive cylinders 65 are connected to the debris collection trough 64 and can drive the debris collection trough 64 to extend out of the cleaning box 61 to clean the debris in the debris collection trough 64.

[0030] When the portion of the coating baffle 8 that was inside the vacuum coating chamber 11 is switched to the outside of the vacuum coating chamber 11, the nozzle drive cylinder 63 drives the spray head 62 to move along the length of the coating baffle 8. At the same time, the spray head 62 sprays dry ice particles and high-pressure gas onto the lower surface of the coating baffle 8. The spray speed of the dry ice particles is not less than 9 m / s. The evaporated material attached to the coating baffle 8 peels off from the lower surface of the coating baffle 8 and forms debris. The high-pressure gas blows the debris off the coating baffle 8, and the fallen debris is collected in the debris collection tank 64. The debris drive cylinder 65 drives the debris collection tank 64 to move out of the cleaning box 61 to achieve the cleaning and collection of debris. Since dry ice particles can evaporate into carbon dioxide gas, using dry ice particles to clean the evaporated material attached to the coating baffle 8 eliminates the need for impurity removal of the cleaned debris after collection, achieving secondary recycling of the evaporated material.

[0031] It should be noted that the coating baffle 8, to which the evaporation material is attached, needs to be removed from the vacuum coating chamber 1 during cleaning. Therefore, an opening needs to be made in the vacuum coating chamber 1. This could cause gas from the cleaning chamber 61 to enter the vacuum coating chamber 11 through the opening in the vacuum coating chamber 1, making it impossible for the vacuum coating chamber 11 to maintain a vacuum. Therefore, this embodiment also includes a sealing mechanism 9. (See also...) Figure 5 , Figure 6 and Figure 8 A gate is opened on the cleaning box 61, and a sealing mechanism 9 is installed at the gate. Combined with... Figure 8 The sealing mechanism 9 includes a sealing block 91 and a sealing drive cylinder 92. The sealing block 91 is disposed inside the gate, and the piston rod of the sealing drive cylinder 92 is connected to the sealing block 91 and can drive the sealing block 91 to move up and down. When the portion of the coating baffle 8 inside the vacuum coating chamber 11 is coated with a layer of evaporation material, the cleaning chamber 61 is first evacuated, and then the sealing drive cylinder 92 drives the sealing block 91 to move downward, so that the baffle drive mechanism 7 can drive the coating baffle 8 to switch between inside and outside. After the coating baffle 8 has switched, the sealing drive cylinder 92 drives the sealing block 91 to move upward, and the sealing block 91 abuts against the coating baffle 8, thereby sealing the gate on the cleaning chamber 61 and reducing the amount of gas entering the vacuum coating chamber 11 from the cleaning chamber 61.

[0032] See Figure 7 and Figure 8In this embodiment, each coating baffle 8 includes a first baffle 81 and a second baffle 82, which are located inside and outside the vacuum coating chamber 11, respectively. When a layer of evaporation material is attached to the lower surface of the first baffle 81, the baffle driving mechanism 7 drives the first baffle 81 to move out of the vacuum coating chamber 11, and the second baffle 82 to move in. When the second baffle 82 is in position, the baffle driving mechanism 7 continues to drive the first baffle 81 to move, so that a gap is left between the first baffle 81 and the second baffle 82. It can be seen that the first baffle 81 and the second baffle 82 are separated when they are in position. This can prevent the impact vibration of the first baffle 81 when dry ice particles are sprayed onto the first baffle 81 from being transmitted to the second baffle 82, causing the second baffle 82 to vibrate as well, resulting in poor sealing of the gate on the cleaning box 61 and vacuum leakage in the vacuum coating chamber 11. Meanwhile, the first baffle 81 has a lower temperature after being cleaned by dry ice particles, while the second baffle 82 has a higher temperature. The first baffle 81 and the second baffle 82 are designed separately, which can avoid the problem of cracks or even breakage of the coating baffle 8 under uneven heating.

[0033] In this embodiment, the first baffle 81 and the second baffle 82 can each be driven to move by a baffle driving mechanism 7, thereby achieving synchronous movement and separation of the two. However, this design increases the control cost of the coating equipment, and if the control of the first baffle 81 and the second baffle 82 is not synchronized during the switching process, the first baffle 81 and the second baffle 82 will separate, and the material evaporated by the evaporation source 3 will leak upward through the gap between the first baffle 81 and the second baffle 82, affecting the coating quality. Therefore, in this embodiment, the first baffle 81 and the second baffle 82 are driven to move by a single baffle driving mechanism 7, and the two coating baffles 8 in the same group are driven to move by the same baffle driving mechanism 7.

[0034] For details, see Figure 7 and Figure 8 The second baffle 82 has two through holes 821 along its length, and a step is provided at the end of each through hole 821 near the first baffle 81. A second receiving groove 822 is provided between the two through holes 821, and a limiting block 823 is provided at the end of the second baffle 82 away from the first baffle 81. The first baffle 81 has two slots 811 at the end facing the second baffle 82, and a first receiving groove 812 is provided between the two slots 811. Figure 7The baffle drive mechanism 7 includes a baffle drive cylinder 71, a connecting rod 72, and two drive units, each drive unit corresponding to a coating baffle 8. Two connecting rods 72 are provided, one connecting rod 72 connecting to the first baffle 81 in the same group of coating baffles 8, and the other connecting rod 72 connecting to the second baffle 82 in the same group of coating baffles 8. The cylinder body of the baffle drive cylinder 71 is fixed to the cleaning box 61, and the piston rod of the baffle drive cylinder 71 is connected to the other connecting rod 72. Each drive unit includes a drive ring 73, a drive rod 74, and a tension spring 75. Two drive rods 74 are provided, each drive rod 74 corresponding to a through hole 821 of a second baffle 82. One end of the drive rod 74 is connected to the other connecting rod 72, and the other end passes through the corresponding through hole 821 on the second baffle 82 and is inserted into a slot 811 on the first baffle 81. The outer diameter of the drive rod 74 is smaller than the inner diameter of the through hole 821 and the slot 811. The drive ring 73 is sleeved on the drive rod 74 and located between the first baffle 81 and the second baffle 82. The drive ring 73 is used to reset the second baffle 82. One end of the tension spring 75 is located in the first receiving groove 812 and connected to the first baffle 81, and the other end is located in the second receiving groove 822 and connected to the second baffle 82.

[0035] When the second baffle 82 is pre-switched into the vacuum coating chamber 11 and the first baffle 81 is switched out of the vacuum coating chamber 11, the piston rod of the baffle drive cylinder 71 extends and pushes the drive rod 74 to move through the other connecting rod 72. The end of the drive rod 74 abuts against the first baffle 81 and pushes the first baffle 81 to move out of the vacuum coating chamber 11. The first baffle 81 pulls the second baffle 82 to move synchronously through the tension spring 75. During this process, the end faces of the first baffle 81 and the second baffle 82 remain in close contact under the action of the tension spring 75. When the second baffle 82 is switched into the vacuum coating chamber 11, the limiting block 823 on the second baffle 82 abuts against the vacuum coating box 1, thereby limiting the second baffle 82. At this time, the second baffle 82 stops moving. The piston rod of the baffle drive cylinder 71 continues to extend and pushes the drive rod 74 to continue moving through the other connecting rod 72. The drive rod 74 overcomes the elastic force of the tension spring 75 and continues to push the first baffle 81 to move, thereby achieving the purpose of leaving a gap between the first baffle 81 and the second baffle 82. When the first baffle 81 is pre-switched into the vacuum coating chamber 11 and the second baffle 82 is switched out of the vacuum coating chamber 11, the piston rod of the baffle drive cylinder 71 retracts and pulls the drive rod 74 back through the other connecting rod 72. The drive ring 73 is inserted into the through hole 821 of the second baffle 82 and abuts against the stepped surface inside the through hole 821. The drive rod 74 pulls the second baffle 82 out of the vacuum coating chamber 11 through the drive ring 73. The second baffle 82 pulls the first baffle 81 into the vacuum coating chamber 11 through the tension spring 75. Similarly, during this process, the end faces of the first baffle 81 and the second baffle 82 remain in close contact under the action of the tension spring 75. When the first baffle 81 is switched into the vacuum coating chamber 11, the connecting rod 72 connecting the two first baffles 81 abuts against the vacuum coating box 1, thereby limiting the movement of the first baffle 81. At this time, the first baffle 81 stops moving. The piston rod of the baffle drive cylinder 71 continues to retract and pulls the drive rod 74 to continue moving via the other connecting rod 72. The drive rod 74 overcomes the elastic force of the tension spring 75 and continues to pull the second baffle 82 to move via the drive ring 73, thereby achieving the purpose of leaving a gap between the first baffle 81 and the second baffle 82. In this embodiment, during the synchronous movement of the first baffle 81 and the second baffle 82, the tension spring 75 is located in the first receiving groove 812 and the second receiving groove 822, while the drive ring 73 is located in the slot 811 of the first baffle 81 and the through hole 821 of the second baffle 82. Therefore, the design of the tension spring 75 and the drive ring 73 will not cause the first baffle 81 and the second baffle 82 to separate, that is, their end faces are tightly fitted during synchronous movement.When the second baffle 82 moves into position, after the first baffle 81 separates from the second baffle 82, since the outer diameter of the drive rod 74 is smaller than the outer diameter of the slot 811 of the first baffle 81 and the through hole 821 of the second baffle 82, the vibration of the first baffle 81 will not be transmitted to the second baffle 82 through the drive rod 74. Similarly, when the second baffle 82 is outside the vacuum coating chamber 11 and is being cleaned, the vibration of the second baffle 82 will not be transmitted to the first baffle 81 through the drive rod 74. In other words, the baffle drive mechanism 7, through the design of the baffle drive cylinder 71, drive ring 73, drive rod 74, tension spring 75, and slot 811 on the first baffle 81 and through hole 821 on the second baffle 82, can achieve synchronous movement and separation of the first baffle 81 and the second baffle 82 while avoiding the transfer of vibration and heat. In addition, the baffle drive mechanism 7 is driven by a purely mechanical means, with a simple overall structure and no need to add electrical components.

[0036] See Figure 4 , Figure 8 and Figure 9 This embodiment also includes a heat exchange mechanism 10, which is arranged outside the vacuum coating chamber 11 for heat exchange between the first baffle 81 or the second baffle 82 switched out from the vacuum coating chamber 11 and the first baffle 81 or the second baffle 82 that has been cleaned. Since the coating baffle 8 switched out from the vacuum coating chamber 11 has a high temperature, and dry ice cleaning accelerates the sublimation rate on the surface of the high-temperature coating baffle 8, the cleaning effect is poor. Therefore, it is necessary to wait for the temperature of the coating baffle 8 to drop before cleaning. However, the cleaned coating baffle 8 has a low temperature, and when switched back into the high-temperature vacuum coating chamber 11, the large temperature difference can cause the coating baffle 8 to crack due to thermal stress. Waiting for the coating baffle 8 to reach room temperature before cleaning or switching back into the vacuum coating chamber 11 would reduce cleaning efficiency. Therefore, this embodiment uses the heat exchange mechanism 10 to exchange heat between the switched-out coating baffle 8 and the cleaned coating baffle 8, meeting their respective temperature requirements.

[0037] For details, see Figure 8 and Figure 9 The heat exchange mechanism 10 in this embodiment includes a heat exchange component, a liquid storage tank 101, and a heat exchange pump 102. Four sets of heat exchange components are provided and respectively disposed in four cleaning chambers 61. One set is disposed on each of the left and right sides and the front and rear sides of the vacuum coating chamber 1. The heat exchange component on the left side is arranged corresponding to the first baffle 81 of the coating baffle 8 on the front and rear sides of the coating main roller 2; the heat exchange component on the right side is arranged corresponding to the second baffle 82 of the coating baffle 8 on the front and rear sides of the coating main roller 2; the heat exchange component on the front side is arranged corresponding to the first baffle 81 of the coating baffle 8 on the left and right sides of the coating main roller 2; and the heat exchange component on the rear side is arranged corresponding to the second baffle 82 of the coating baffle 8 on the left and right sides of the coating main roller 2. (Combined with...) Figure 9Each heat exchange assembly includes a heat exchange drive cylinder 103, heat exchange plates 104, and valves 105. Two heat exchange plates 104 are provided, each corresponding to either the first baffle 81 or the second baffle 82 in the same group. Each heat exchange plate 104 corresponds to one valve 105. The heat exchange drive cylinder 103 can drive the two heat exchange plates 104 to move up and down. Each heat exchange plate 104 has a heat exchange chamber filled with a heat exchange medium, which is heat exchange oil. Two storage tanks 101 are provided, connecting to the heat exchange chambers of all heat exchange plates 104. One storage tank 101 stores the cooling heat exchange medium, and the other storage tank 101 stores the heating heat exchange medium. A heat exchange pump 102 is installed on the pipe connected to each storage tank 101.

[0038] The heat exchange process is described in detail using the heat exchange components located on the front and right sides of the vacuum coating chamber 1 as an example. When the second baffle 82 in the coating baffles 8 on both sides of the main coating roller 2 switches to the outside of the vacuum coating chamber 11, and the first baffle 81 in the coating baffles 8 on both sides of the main coating roller 2 has been cleaned outside the vacuum coating chamber 11, the heat exchange drive cylinder 103 in the heat exchange components on the front and right sides of the vacuum coating chamber 1 drives the corresponding heat exchange plate 104 to move upward and adhere to the second baffle 82. The heat exchange plate 104 on the right side exchanges heat with the second baffle 82 to obtain a heated heat exchange medium, which is pumped to the other storage tank 101 by the heat exchange pump 102. The heat exchange plate 104 on the front side exchanges heat with the first baffle 81 to obtain a cooled heat exchange medium, which is pumped to one of the storage tanks 101. At this time, the heat exchange chambers of the right-side heat exchange plate 104 and the front-side heat exchange plate 104 are in an empty cavity state. The heated heat exchange medium is pumped into the front-side heat exchange plate 104, thereby heating the first baffle 81. This heated first baffle 81 can be directly switched into the vacuum coating chamber 11. Similarly, the cooled heat exchange medium is pumped into the right-side heat exchange plate 104, thereby cooling the second baffle 82 on the right side. After the second baffle 82 cools down, the heat exchange drive cylinder 103 drives the heat exchange plate 104 to reset, and the nozzle drive cylinder 63 drives the spray head 62 to move. Dry ice particles can directly clean the second baffle 82 on the right side, ensuring a good cleaning effect. This embodiment utilizes the residual heat of the coating baffle 8 switched out from the vacuum coating chamber 11 and the low temperature of the coating baffle 8 after being cleaned by dry ice particles to achieve heat exchange, meeting the temperature requirements of different baffles and improving cleaning efficiency.

[0039] The following further explains the working process of the present invention to further demonstrate its working principle and advantages: Before evaporation coating, the vacuum coating chamber 11 is evacuated and a certain vacuum level is maintained. During the evaporation coating process, the evaporation source 3 evaporates the material, the base film feeding mechanism 4 feeds the material, and at the same time, the base film winding mechanism 5 winds up the flexible base film 100 so that the flexible base film 100 can be continuously fed around the coating main roller 2. As the evaporation coating time increases, a layer of evaporation material adheres to the first baffle 81. First, the two cleaning chambers 61 corresponding to the first baffle 81 and the second baffle 82 are evacuated. Then, the two sealing drive cylinders 92 corresponding to the two baffles drive their respective sealing blocks 91 downward. The piston rod of the baffle drive cylinder 71 extends and pushes the drive rod 74 to move through the other connecting rod 72. The end of the drive rod 74 abuts against the first baffle 81 and pushes the first baffle 81 to move out of the vacuum coating chamber 11. The first baffle 81 pulls the second baffle 82 to move synchronously through the tension spring 75. When the second baffle 82 switches into the vacuum coating chamber 11, the limiting block 823 on the second baffle 82 abuts against the vacuum coating chamber 1, thereby limiting the second baffle 82. At this time, the second baffle 82 stops moving. The piston rod of the baffle drive cylinder 71 continues to extend and pushes the drive rod 74 to continue moving through the other connecting rod 72. The drive rod 74 overcomes the elastic force of the tension spring 75 and continues to push the first baffle 81 to move. There is a gap between the first baffle 81 and the second baffle 82.

[0040] The sealing drive cylinders 92 on both sides drive their respective sealing blocks 91 to move upwards, and the sealing blocks 91 abut against the second baffle 82, thereby blocking the gates on the cleaning boxes 61 on both sides and reducing the amount of gas entering the vacuum coating chamber 11 from the cleaning box 61. The nozzle drive cylinder 63 drives the nozzle 62 to move along the length of the coating baffle 8. At the same time, the nozzle 62 sprays dry ice particles and high-pressure gas onto the lower surface of the coating baffle 8. The dry ice particle spraying speed is not less than 9m / s. The evaporated material attached to the coating baffle 8 peels off from the lower surface of the coating baffle 8 and forms debris. The high-pressure gas blows the debris off the coating baffle 8, and the fallen debris is collected in the debris collection tank 64. The debris drive cylinder 65 drives the debris collection tank 64 to move out of the cleaning box 61 to achieve the cleaning and collection of debris.

[0041] After the first baffle 81 is cleaned, the nozzle drive cylinder 63 drives the spray head 62 to reset. The heat exchange component corresponding to the first baffle 81 is activated, and the heat exchange drive cylinder 103 drives the corresponding heat exchange plate 104 to move upward and adhere to the first baffle 81. The heat exchange medium in the heat exchange plate 104 exchanges heat with the second baffle 82 to obtain a cooled heat exchange medium, which is then pumped into the storage tank 101 for storing the cooled heat exchange medium. At the same time, the first baffle 81 / second baffle 82 in another set of coating baffles 8 are switched out from the vacuum heat exchange chamber. The heat exchange drive cylinder 103 corresponding to the first baffle 81 / second baffle 82 drives the corresponding heat exchange plate 104 to move upward and adhere to the first baffle 81 / second baffle 82. The heat exchange medium in the heat exchange plate 104 exchanges heat with the first baffle 81 / second baffle 82 to obtain a heated heat exchange medium. The heat exchange medium is pumped by heat pump 102 into a storage tank 101 for storing the heated heat exchange medium. The heated heat exchange medium is then pumped into the heat exchange plate 104 corresponding to the cleaned first baffle 81, thereby heating the first baffle 81. This heated first baffle 81 can be directly switched into the vacuum coating chamber 11. The cooled heat exchange medium is pumped into the heat exchange plate 104 corresponding to the first baffle 81 / second baffle 82 that has been switched out from the vacuum coating chamber 11, thereby cooling the first baffle 81 / second baffle 82.

[0042] After the first baffle 81 is heated and a layer of evaporation material is attached to the lower surface of the second baffle 82, the two cleaning chambers 61 corresponding to the first baffle 81 and the second baffle 82 are evacuated again. Then, the two sealing drive cylinders 92 corresponding to the two baffles drive their respective sealing blocks 91 downward. The piston rod of the baffle drive cylinder 71 retracts and pulls the drive rod 74 back through the other connecting rod 72. The drive ring 73 is inserted into the through hole 821 of the second baffle 82 and abuts against the stepped surface in the through hole 821. The drive rod 74 pulls the second baffle 82 out of the vacuum coating chamber 11 through the drive ring 73. The second baffle 82 pulls the first baffle 81 into the vacuum coating chamber 11 through the tension spring 75. When the first baffle 81 is switched into the vacuum coating chamber 11, the connecting rod 72 connecting the two first baffles 81 abuts against the vacuum coating chamber 1, thereby limiting the first baffle 81. At this time, the first baffle 81 stops moving. The piston rod of the baffle drive cylinder 71 continues to retract and pulls the drive rod 74 to continue moving via the other connecting rod 72. The drive rod 74 overcomes the elastic force of the tension spring 75 and continues to pull the second baffle 82 to move via the drive ring 73. At this time, the first baffle 81 and the second baffle 82 separate again. The first baffle 81 and the second baffle 82 alternately switch into the vacuum coating chamber 11 to realize continuous vacuum coating of the coating equipment.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions created by the present invention, and are not intended to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions created by the present invention without departing from the essence and scope of the technical solutions created by the present invention.

Claims

1. A coating device for processing metalized film for flexible straightening, comprising: a vacuum coating chamber; a coating main roller arranged in the vacuum coating chamber, a flexible base film being wound around the coating main roller and being continuously fed; an evaporation source located below the coating main roller for evaporating a material; characterized in that it further comprises: four coating baffles, one end of each of the coating baffles being inserted into the vacuum coating chamber and the other end being located outside the vacuum coating chamber, each of the coating baffles being movable along the length direction thereof, the portions of the four coating baffles located in the vacuum coating chamber being respectively located at the front and back sides and the left and right sides of the coating main roller so as to shield the areas other than the evaporation coating; a baffle cleaning mechanism arranged outside the vacuum coating chamber for cleaning the evaporated material adhered to the coating baffles; when the flexible base film is wound around the coating main roller for evaporation coating, the portions of the coating baffles located in the vacuum coating chamber are switched to outside the vacuum coating chamber and the portions of the coating baffles located outside the vacuum coating chamber are switched to inside the vacuum coating chamber so that the baffle cleaning mechanism can clean the evaporated material adhered to the coating baffles during the continuous production of the evaporation coating. The baffle cleaning mechanism comprises: a spray head capable of spraying dry ice particles; a spray head driving cylinder for driving the spray head to move; when the portions of the coating baffles located in the vacuum coating chamber are switched to outside the vacuum coating chamber, the spray head driving cylinder drives the spray head to move along the length direction of the coating baffles, and the spray head sprays dry ice particles to clean the evaporated material adhered to the coating baffles. Each of the coating baffles comprises a first baffle and a second baffle, the first baffle and the second baffle being respectively located in the vacuum coating chamber and outside the vacuum coating chamber; when the first baffle has a layer of evaporated material adhered thereto, the first baffle moves to outside the vacuum coating chamber and the second baffle moves to inside the vacuum coating chamber, and when the second baffle is moved into position, the first baffle continues to move so that a space is left between the first baffle and the second baffle. The first baffle and the second baffle are respectively driven to move by a baffle driving mechanism, the baffle driving mechanism corresponding to the second baffle stops driving when the second baffle is switched to inside the vacuum coating chamber, and the baffle driving mechanism corresponding to the first baffle continues to drive the first baffle so that a space is left between the first baffle and the second baffle. A through hole is formed in the length direction of the second baffle, a limiting block is arranged on the second baffle, and a slot is formed in the first baffle; the first baffle and the second baffle are driven to move by a baffle driving mechanism, the baffle driving mechanism comprising: a driving rod passing through the through hole of the second baffle and being inserted into the slot of the first baffle, the outer diameter of the driving rod being smaller than the inner diameter of the through hole and the slot; a baffle driving cylinder for realizing the movement of the driving rod; a driving ring being sleeved on the driving rod and being located between the first baffle and the second baffle for resetting the second baffle; a tension spring connecting the first baffle and the second baffle. ​ ​ ​ 2. The plating apparatus for processing a metalized film for a flexible flat cable according to claim 1, wherein ​ ​ ​ ​ 3. The plating apparatus for processing a metalized film for a flexible flat cable according to claim 2, wherein ​ 4. The plating apparatus for processing a metalized film for a flexible flat cable according to claim 3, wherein ​ 5. The plating apparatus for processing a metalized film for a flexible flat cable according to claim 3, wherein ​ ​ ​ ​ ​ The baffle driving cylinder drives the first baffle to move through the driving rod, the first baffle pulls the second baffle to move synchronously through the tension spring, when the second baffle switches into the vacuum coating cavity, the limiting block limits the second baffle to stop moving, the baffle driving cylinder continues to drive the first baffle to move through the driving rod, so that the first baffle and the second baffle have a spacing.

6. The plating apparatus for processing a metalized film for a flexible flat cable according to claim 4 or 5, wherein Further comprising a heat exchange mechanism arranged outside the vacuum coating cavity, for heat exchange of the first baffle or the second baffle switched out of the vacuum coating cavity and the first baffle or the second baffle which has been cleaned.

7. The plating apparatus for processing a metalized film for a flexible flat cable according to claim 6, wherein The heat exchange mechanism comprises: The heat exchange assembly is provided with four groups, one group is arranged on each of the left and right sides and the front and back sides of the vacuum coating cavity, the heat exchange assemblies on the left and right sides correspond to the first baffle and the second baffle of the coating baffle arranged on the front and back sides of the coating main roller respectively, and the heat exchange assemblies on the front and back sides correspond to the first baffle and the second baffle of the coating baffle arranged on the left and right sides of the coating main roller respectively; Each group of heat exchange assemblies comprises a heat exchange driving cylinder and a heat exchange plate, the heat exchange driving cylinder can drive the heat exchange plate to move up and down, the heat exchange plate is provided with a heat exchange cavity, and the heat exchange cavity is filled with a heat exchange working medium; Two liquid storage tanks are provided and are connected to all the heat exchange cavities, one of the liquid storage tanks is used to store cooled heat exchange working medium, and the other liquid storage tank is used to store heated heat exchange working medium.

8. The plating apparatus for processing a metalized film for a flexible flat cable according to claim 7, wherein The heat exchange working medium is heat exchange oil.

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