Rotary heater anti-interference slip ring system and vapor deposition equipment

Abstract

This invention relates to the field of semiconductor equipment technology, and discloses a rotary heater anti-interference slip ring system and a vapor deposition apparatus. The rotary heater anti-interference slip ring system includes a rotor, a stator, and conductive slip rings. The top end of the rotor is connected to the rotary heater to drive its rotation. The stator includes a base and multiple annular components. The base has a first cavity inside, and the bottom end of the rotor is rotatably inserted into the first cavity. Multiple annular components are disposed on the base and rotatably fitted around the outer periphery of the rotor, forming multiple mutually isolated second cavities with the rotor. Multiple conductive slip rings are present, with at most one conductive slip ring disposed in each of the first cavity and the multiple second cavities. Each conductive slip ring includes a rotatable conductive ring and a brush, one of which is fixed to the stator and the other to the rotor.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a rotary heater anti-interference slip ring system and a vapor deposition equipment. Background Technology

[0002] Thin film fabrication processes have wide applications in very large-scale integrated circuit (VLSI) technology. Based on their film formation methods, they can be divided into two main categories: chemical vapor deposition (CVD) and physical vapor deposition (PVD). Both methods require placing a wafer on a heater for support and heating. To improve the circumferential uniformity of the film, the heater supporting the wafer needs to be able to rotate. The interfaces for heater power cables, thermocouple cables, and radio frequency (RF) cables are all located at the mounting flange. Maintaining a stable and reliable connection to these signals while the heater rotates presents a challenge. Furthermore, the heater is in direct contact with plasma, and the thermocouple signals are exposed to electromagnetic and radio frequency fields composed of RF signals and heater power signals, making them highly susceptible to signal interference.

[0003] Therefore, there is an urgent need to design a rotary heater anti-interference slip ring system and a vapor deposition equipment to solve the above technical problems. Summary of the Invention

[0004] One objective of this invention is to provide a rotary heater anti-interference slip ring system that can ensure the stable and reliable connection of multiple signal transmission cables while satisfying the requirements of rotating and heating the wafer, and avoid mutual interference between multiple signals.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A rotary heater anti-interference slip ring system is provided, comprising:

[0007] A rotor, the top of which is connected to a rotary heater to drive the rotary heater to rotate;

[0008] The stator includes a base and multiple annular components; the base has a first cavity inside, and the bottom end of the rotor is rotatably inserted into the first cavity; the multiple annular components are all disposed on the base and rotatably sleeved on the outer periphery of the rotor, and the multiple annular components cooperate with the rotor to form multiple mutually isolated second cavities;

[0009] A conductive slip ring is provided in a plurality of them, with at most one conductive slip ring disposed in each of the first cavity and the plurality of second cavities; the conductive slip ring includes a conductive ring and a brush that are rotatable relative to each other, one of the conductive ring and the brush being fixed to the stator and the other being fixed to the rotor.

[0010] Optionally, the base includes a bottom and an isolation plate. The bottom has the first cavity, and the isolation plate covers the opening of the first cavity. The isolation plate is provided with a rotating hole, and the rotor passes through the rotating hole so that the bottom end of the rotor is rotatably inserted into the first cavity. A plurality of the annular members are provided on the isolation plate and rotatably sleeved on the outer periphery of the rotor.

[0011] Optionally, the annular component includes a first annular portion and a second annular portion. The first annular portion is coaxially disposed with the rotor and connected to the isolation plate. The second annular portion is connected to the first annular portion and extends to the outer periphery of the rotor. The second annular portion is rotatably connected to the outer periphery of the rotor.

[0012] Optionally, the first annular portions of the plurality of annular members are arranged radially spaced along the rotor and connected to the isolation plate, and the second annular portions of the plurality of annular members are sequentially rotatably connected to the outer periphery of the rotor along the axial direction of the rotor to form a plurality of mutually isolated and sequentially nested second cavities.

[0013] Optionally, the rotor includes a body and a top cover plate. The top end of the body is connected to the rotary heater. The body passes through the rotating hole so that the bottom end of the body can be rotatably inserted into the first cavity. The top cover plate is disposed on the outer periphery of the body and extends radially along the body.

[0014] The annular component includes a first annular component and a second annular component. The first annular portion of the first annular component is spaced apart from the inner periphery of the first annular portion of the second annular component. The second annular portion of the first annular component is rotatably connected to the outer periphery of the body. The second annular portion of the second annular component is rotatably connected to the outer periphery of the top cover plate to form two mutually isolated and nested second cavities.

[0015] Optionally, the first annular portions of the plurality of annular members are sequentially arranged along the axial direction of the rotor and connected to the isolation plate, and the second annular portions of the plurality of annular members are sequentially rotatably connected to the outer periphery of the rotor along the axial direction of the rotor to form a plurality of second cavities sequentially arranged along the axial direction of the rotor.

[0016] Optionally, each of the annular components has two second annular portions, which are respectively connected to the top and bottom of the first annular portion. The two second annular portions, the first annular portion, and the outer periphery of the rotor form a second cavity.

[0017] Optionally, the rotary heater anti-interference slip ring system further includes a temperature transmitter, which is fixed to the rotor; the conductive slip ring includes a first conductive slip ring for transmitting thermocouple signals, and the thermocouple of the rotary heater is connected to the first conductive slip ring through the temperature transmitter.

[0018] Optionally, the rotary heater anti-interference slip ring system further includes a twisted-pair shielded cable and a thermocouple signal connector. The thermocouple signal connector is disposed on the stator. One end of the twisted-pair shielded cable is connected to the thermocouple signal connector, and the other end is connected to the temperature controller of the rotary heater. The conductive ring or conductive brush of the first conductive slip ring fixed to the stator is connected to the thermocouple signal connector via a cable.

[0019] Optionally, the stator is provided with a flange-type radio frequency coaxial connector, and the conductive slip ring includes a second conductive slip ring for transmitting heater power signals and a third conductive slip ring for transmitting radio frequency signals. The second conductive slip ring and the third conductive slip ring are connected to the flange-type radio frequency coaxial connector via a cable.

[0020] The rotary heater anti-interference slip ring system also includes a filter assembly and a power supply system, wherein the power supply system is connected to the flange-type radio frequency coaxial connector through the filter assembly.

[0021] Optionally, the conductive slip ring includes at least one multi-channel conductive slip ring, which is provided with a grounding loop, and the grounding node of the rotor and the grounding node of the stator are electrically connected through the grounding loop.

[0022] Optionally, the rotor has a first wire hole and a second wire hole arranged separately along its axial direction inside, and a cable is respectively threaded through the first wire hole and the second wire hole;

[0023] A first cable passing through the first through hole has one end connected to the rotary heater and the other end connected to the conductive slip ring in the first cavity; a second cable passing through the second through hole has one end connected to the rotary heater and the other end connected to the conductive slip ring in the second cavity.

[0024] Another objective of this invention is to provide a vapor deposition apparatus that can ensure stable and reliable connection of multiple signal transmission cables while simultaneously rotating and heating the wafer, thus avoiding mutual interference between the multiple signals.

[0025] To achieve this objective, the present invention adopts the following technical solution:

[0026] A vapor deposition apparatus is provided, comprising a deposition chamber, a rotary heater, and the aforementioned rotary heater anti-interference slip ring system, wherein the rotor of the rotary heater anti-interference slip ring system is connected to the rotary heater, and the rotary heater is rotatably disposed within the deposition chamber.

[0027] The beneficial effects of the present invention include at least the following:

[0028] This invention provides a rotary heater anti-interference slip ring system, including a rotor, a stator, and conductive slip rings. The top end of the rotor is connected to the rotary heater to drive the rotary heater to rotate. The stator includes a base and multiple annular components. The base has a first cavity inside, and the bottom end of the rotor is rotatably inserted into the first cavity. Multiple annular components are disposed on the base and rotatably fitted around the outer periphery of the rotor, forming multiple isolated second cavities with the rotor. Multiple conductive slip rings are present, with at most one conductive slip ring disposed in each of the first cavity and multiple second cavities. Each conductive slip ring includes a rotatable conductive ring and a brush, one of which is fixed to the stator and the other to the rotor. When the rotary heater anti-interference slip ring system is applied to a vapor deposition apparatus, the conductive slip rings are used to transmit at least thermocouple signals, heater power signals, and radio frequency signals. The at least three conductive slip rings configured therein can be located in the mutually separated first cavity and multiple second cavities to achieve signal isolation during transmission, thereby preventing interference from the electromagnetic fields and radio frequency fields composed of radio frequency signals and heater power signals to the thermocouple signals. In addition, thermocouple signals, heater power signals, and radio frequency signals are all transmitted through conductive slip rings, and the rotor is connected to the rotating heater and can rotate synchronously. The cables for thermocouple signals, heater power signals, and radio frequency signals connected to the external system are connected to the stator. The signals are transmitted to the stator through the relative rotation of the conductive rings and brushes. The cables connected to the external system are connected to the stator without rotating with the rotating heater. The cables connected to the rotating heater rotate synchronously with the rotating heater and remain relatively stationary. This avoids problems such as cable tangling and achieves a stable and reliable cable connection.

[0029] This invention provides a vapor deposition apparatus, including a deposition chamber, a rotary heater, and a rotary heater anti-interference slip ring system. The rotor of the rotary heater anti-interference slip ring system is connected to the rotary heater, which is rotatably disposed within the deposition chamber. This vapor deposition apparatus, utilizing the rotary heater anti-interference slip ring system, can ensure stable and reliable connections of multiple signal transmission cables while simultaneously rotating and heating the wafer, avoiding mutual interference between multiple signals. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the anti-interference slip ring system for a rotary heater provided in Embodiment 1 of the present invention;

[0031] Figure 2 This is a schematic diagram of the anti-interference slip ring system for a rotary heater provided in Embodiment 2 of the present invention;

[0032] Figure 3 This is a partial structural diagram of the stator outer peripheral surface provided in Embodiment 2 of the present invention.

[0033] Figure Labels

[0034] 1. Rotor; 11. Body; 111. First wire hole; 112. Second wire hole; 12. Top cover plate; 13. Connecting plate;

[0035] 2. Stator; 21. Base; 211. Bottom; 212. Isolation plate; 213. Metal tube; 214. Mechanical labyrinth plate; 22. First annular component; 221. First annular portion; 222. Second annular portion; 23. Second annular component;

[0036] 3. Temperature transmitter;

[0037] 4. Twisted-pair shielded cable;

[0038] 5. Cable connector; 51. Thermocouple signal connector; 52. Power signal connector; 53. Radio frequency signal connector;

[0039] 6. First conductive slip ring; 61. Conductive ring; 62. Brush;

[0040] 7. Second conductive slip ring;

[0041] 8. Third conductive slip ring;

[0042] 101. First cavity; 102. Second cavity. Detailed Implementation

[0043] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining the present invention and are not intended to limit the present invention. Furthermore, it should be noted that, for ease of description, only the parts related to the present invention are shown in the accompanying drawings, not all of them.

[0044] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0045] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0046] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0047] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0048] This invention provides a vapor deposition apparatus, including a deposition chamber (not shown), a rotary heater (not shown), and a rotary heater anti-interference slip ring system. The rotor of the rotary heater anti-interference slip ring system is connected to the rotary heater, which is rotatably disposed within the deposition chamber. A wafer can be placed on the rotary heater. This vapor deposition apparatus utilizes the rotary heater anti-interference slip ring system to ensure stable and reliable connections of multiple signal transmission cables while simultaneously rotating and heating the wafer, avoiding mutual interference between multiple signals. It should be noted that the rotary heater can be a conventional heater or a heater with an electrostatic chuck or vacuum chuck. If wafer heating is not required, it can also be an electrostatic chuck or vacuum chuck, or simply a tray for holding the wafer.

[0049] The rotary heater anti-interference slip ring system includes a rotor 1, a stator 2, and conductive slip rings. The top end of the rotor 1 is connected to the rotary heater to drive it to rotate. The stator 2 includes a base 21 and multiple annular components. The base 21 has a first cavity 101 inside, and the bottom end of the rotor 1 is rotatably inserted into the first cavity 101. Multiple annular components are disposed on the base 21 and rotatably fitted around the outer periphery of the rotor 1. The multiple annular components cooperate with the rotor 1 to form multiple mutually isolated second cavities 102. Multiple conductive slip rings are provided, with at most one conductive slip ring disposed in each of the first cavity 101 and the multiple second cavities 102. The conductive slip ring includes a conductive ring 61 and a brush 62 that can rotate relative to each other. One of the conductive ring 61 and the brush 62 is fixed to the stator 2, and the other is fixed to the rotor 1.

[0050] When the rotary heater anti-interference slip ring system is applied to a vapor deposition equipment, the conductive slip rings can be used to transmit thermocouple signals, heater power signals, and radio frequency signals. Multiple conductive slip rings are configured to be located in mutually separated first cavities 101 and multiple second cavities 102 to achieve signal isolation during transmission, thereby preventing interference from electromagnetic and radio frequency fields composed of radio frequency signals and heater power signals to the thermocouple signals. Furthermore, the thermocouple signals, heater power signals, and radio frequency signals are all transmitted through the conductive slip rings, and the rotor 1 is connected to the rotary heater and can rotate synchronously. The cables connecting the thermocouple signals, heater power signals, and radio frequency signals to the external system are connected to the stator 2. The signals are transmitted to the stator 2 through the relative rotation of the conductive rings 61 and brushes 62. The cables connected to the external system are connected to the stator 2 without rotating with the rotary heater. The cables connected to the rotary heater rotate synchronously with the rotary heater while remaining relatively stationary, both of which avoid problems such as cable tangling, thus achieving a stable and reliable cable connection.

[0051] Optionally, such as Figure 1 and Figure 2As shown, the base 21 includes a bottom 211 and an isolation plate 212. The bottom 211 has a first cavity 101, and the isolation plate 212 covers the opening of the first cavity 101. The isolation plate 212 has a rotating hole, and the rotor 1 passes through the rotating hole so that the bottom end of the rotor 1 can rotate and be inserted into the first cavity 101. For example, a bearing is installed at the rotating hole, the rotor 1 is connected to the inner ring of the bearing, and the isolation plate 212 is connected to the outer ring of the bearing. The isolation plate 212 and the bottom 211 are connected by fasteners, that is, the bottom 211 and the isolation plate 212 are fixed, while the rotor 1 can rotate within the rotating hole. In this embodiment, the base 21 also includes a mechanical labyrinth plate 214, which is disposed on the outer periphery of the rotor 1 and has a concave-convex fit with the isolation plate 212, thereby improving the isolation effect at the bearing location in the first cavity 101 and preventing the signal transmitted in the first cavity 101 from leaking out from the rotating hole. Multiple annular components are disposed on the isolation plate 212 and rotatably sleeved on the outer periphery of the rotor 1 to form multiple second cavities 102 in the radial direction of the rotor 1 or in the axial direction of the rotor 1.

[0052] Specifically, the annular component includes a first annular portion 221 and a second annular portion 222. The first annular portion 221 is coaxially arranged with the rotor 1 and connected to the isolation plate 212. The second annular portion 222 is connected to the first annular portion 221 and extends to the outer periphery of the rotor 1. The second annular portion 222 is rotatably connected to the outer periphery of the rotor 1. The annular component is connected to the isolation plate 212 through the first annular portion 221 to ensure that the annular component is relatively fixed to the stator 2. Since the second annular portion 222 is connected to the first annular portion 221, the first annular portion 221 supports the second annular portion 222 located on the outer periphery of the rotor 1. The second annular portion 222 can extend radially inward along the rotor 1, or the area on the outer periphery of the rotor 1 and the second annular portion 222 that are in the same plane can extend radially outward along the rotor 1. The cooperation of the two forms the top of the second cavity 102.

[0053] Example 1

[0054] In this embodiment, the first annular portions 221 of the plurality of annular members are arranged radially spaced along the rotor 1 and connected to the isolation plate 212, and the second annular portions 222 of the plurality of annular members are sequentially rotatably connected to the outer periphery of the rotor 1 along the axial direction of the rotor 1 to form a plurality of mutually isolated and sequentially nested second cavities 102.

[0055] For example, the number of annular components is the same as the number of second cavities 102. Multiple annular components are arranged at radial intervals along the rotor 1. In order to ensure that each second cavity 102 includes the outer periphery of the stator 2, the annular component located on the outer ring is higher than the annular component located on the inner ring in the axial direction of the stator 2, so as to form a nested arrangement of multiple second cavities 102.

[0056] Optionally, such as Figure 1As shown, the rotor 1 includes a body 11 and a top cover plate 12. The top end of the body 11 is connected to a rotary heater. The body 11 passes through a rotating hole so that the bottom end of the body 11 can be rotatably inserted into the first cavity 101. The top cover plate 12 is disposed on the outer periphery of the body 11 and extends radially along the body 11. That is, in this embodiment, by extending a portion of the rotor 1 radially outward, i.e., forming the top cover plate 12 on the outer periphery of the body 11 of the rotor 1, a rotatable connection is achieved between the annular member located on the outer ring and the rotor 1. In other embodiments, the second annular portion 222 of the annular member of the outer ring can also extend radially inward on the rotor 1, thereby achieving a rotatable connection between the annular member located on the outer ring and the stator 2. Both of these structures can ensure that each second cavity 102 contains the outer periphery of the rotor 1, so as to ensure that one of the conductive ring 61 and the brush 62 can be fixed to the rotor 1.

[0057] In this embodiment, the annular component includes a first annular component 22 and a second annular component 23. The first annular portion 221 of the first annular component 22 is spaced apart from the inner periphery of the first annular portion 221 of the second annular component 23. The second annular portion 222 of the first annular component 22 is rotatably connected to the outer periphery of the body 11, and the second annular portion 222 of the second annular component 23 is rotatably connected to the outer periphery of the top cover plate 12, thereby forming two mutually isolated and fitted second cavities 102. Specifically, the first annular component 22 includes a first annular portion 221 and a second annular portion 222. The first annular portion 221 is connected to the isolation plate 212 for fixation, and the second annular portion 222 is fitted onto the outer periphery of the rotor 1, allowing the rotor 1 to rotate relative to the second annular portion 222. A bearing is provided on the outer periphery of the rotor 1, and the outer periphery of the rotor 1 is connected to the inner ring of the bearing. The inner ring of the second annular portion 222 is connected to the outer ring of the bearing. The inner ring of the second annular portion 222 has a mounting groove, and the bearing is located in the mounting groove. The bottom 211 of the mounting groove can block the gap between the second annular portion 222 and the body 11, so as to prevent the signal transmitted in the second cavity 102 of the inner ring from overflowing from here. The first annular portion 221 and the second annular portion 222 of the first annular member 22 can be integrally provided or connected by fasteners. In addition, the second annular member 23 includes a first annular portion 221 and a second annular portion 222. The first annular portion 221 is connected to the isolation plate 212 for fixation. The second annular portion 222 is located on the outer periphery of the top cover plate 12, and the inner ring of the second annular portion 222 forms a concave-convex fit with the outer periphery of the top cover plate 12 to block the gap between the second annular portion 222 and the top cover plate 12, so as to prevent the signal transmitted in the second cavity 102 of the outer ring from overflowing from here.

[0058] Furthermore, the rotary heater anti-interference slip ring system also includes a temperature transmitter 3, which is fixed to the rotor 1. For example... Figure 1As shown, in this embodiment, the temperature transmitter 3 is disposed above the top cover plate 12, and the stator 2 also includes a connecting plate 13. The connecting plate 13 is connected to the outer periphery of the body 11 and forms a receiving cavity with the top cover plate 12. The temperature transmitter 3 is located in this receiving cavity and can rotate synchronously with the rotor 1. The conductive slip ring includes a first conductive slip ring 6 for transmitting thermocouple signals. The thermocouple of the rotating heater is connected to the first conductive slip ring 6 through the temperature transmitter 3. The conductive ring 61 of the first conductive slip ring 6 is connected to the top cover plate 12, and the brush 62 of the first conductive slip ring 6 is connected to the isolation plate 212. The temperature transmitter 3 is connected to the conductive ring 61 of the first conductive slip ring 6 through a cable, and both rotate synchronously with the rotor 1. The brush 62 is connected to an external system through a cable, and both remain relatively fixed to the stator 2. Temperature transmitter 3 can convert weak thermocouple signals at the millivolt level into standard 4mA-20mA analog signals with strong anti-interference capabilities, and then transmit them stably and reliably from rotor 1 to stator 2 through conductive slip rings.

[0059] This embodiment can use an isolated temperature transmitter 3, which has excellent suppression capabilities for high and low frequency interference signals, such as Omega's TX13, which can isolate the thermocouple signal (the input signal of the temperature transmitter 3) and the output signal of the temperature transmitter 3 from each other, so that external interference will not affect the thermocouple signal.

[0060] Optionally, the rotary heater anti-interference slip ring system also includes a twisted-pair shielded cable 4 and a thermocouple signal connector 51. The thermocouple signal connector 51 is mounted on the stator 2. One end of the twisted-pair shielded cable 4 is connected to the thermocouple signal connector 51, and the other end is connected to the temperature controller of the rotary heater. The conductive ring 61 or conductive brush 62 of the first conductive slip ring 6, fixed to the stator 2, is connected to the thermocouple signal connector 51 via a cable. In this embodiment, the brush 62 of the first conductive slip ring 6 is connected to the thermocouple signal connector 51 via a cable, and then transmitted to the temperature controller via the twisted-pair shielded cable 4. The thermocouple signal is transmitted through the twisted-pair shielded cable 4, which can provide EMI (Electromagnetic Interference) shielding. A tinned copper wire braided sleeve or other metal wire braided sleeve can also be fitted onto the twisted-pair shielded cable 4 to further enhance shielding and protection. Figure 1 As shown, in this embodiment, the thermocouple signal connector 51 is disposed on the isolation plate 212 and communicates with the second cavity 102 located in the outer ring, so that the cable transmitting the thermocouple signal can be directly connected to the thermocouple signal connector 51. In this embodiment, the thermocouple signal connector 51 is a metal cable connector.

[0061] In addition to the thermocouple signal connector 51, the stator 2 is also provided with other cable interfaces 5. In this embodiment, the stator 2 is provided with a flange-type radio frequency coaxial connector, and the conductive slip rings include a second conductive slip ring 7 for transmitting heater power signals and a third conductive slip ring 8 for transmitting radio frequency signals. The second conductive slip ring 7 and the third conductive slip ring 8 are connected to the flange-type radio frequency coaxial connector via cables.

[0062] In this embodiment, the flange-type RF coaxial connector includes a heater power signal connector 52 and an RF signal connector 53. The brush 62 of the third conductive slip ring 8 is located within the first cavity 101, and the cable connected to it can be directly connected to the RF signal connector 53 located at the bottom 211 of the first cavity 101. The second conductive slip ring 7 is located within the second cavity 102 of the inner ring, and the cable connected to it can pass through the first cavity 101 to connect to the heater power signal connector 52 located at the bottom 211 of the first cavity 101. To avoid mutual interference between the heater power signal and the RF signal during transmission, a metal tube 213 is also provided within the first cavity 101. The cable connected to the second conductive slip ring 7 passes through the metal tube 213 when passing through the first cavity 101. The metal tube 213 can be made of aluminum or copper, etc.

[0063] Optionally, the rotary heater anti-interference slip ring system further includes a filter assembly and a power supply system. The power supply system is connected to the flange-type RF coaxial connector through the filter assembly. In this embodiment, the flange-type RF coaxial connector includes a heater power signal connector 52 and an RF signal connector 53. The brush 62 of the second conductive slip ring 7 is connected to the heater power signal connector 52 via a cable, and the heater power signal connector 52 is connected to the filter assembly via a coaxial cable. The brush 62 of the third conductive slip ring 8 is connected to the RF signal connector 53 via a cable, and the RF signal connector 53 is connected to the filter assembly via a coaxial cable. After the heater power signal and RF signal are transmitted to the filter assembly, they are isolated by the filter assembly before being transmitted to the power supply system.

[0064] Optionally, the conductive slip ring includes at least one multi-channel conductive slip ring, which is provided with a grounding loop. The grounding node of rotor 1 and the grounding node of stator 2 are electrically connected through the grounding loop. In this embodiment, the second conductive slip ring 7, which transmits the heater power signal, is a multi-channel conductive slip ring. While satisfying the power signal transmission, the second conductive slip ring 7 adds a grounding loop to enable rotor 1 and stator 2 to conduct and be grounded together. When the conductive slip ring is internally connected by a cable, a twisted-pair shielded cable or a coaxial cable can also be selected. The cable shielding layer is grounded through the grounding loop, which can further enhance the anti-interference capability.

[0065] Optionally, the rotor 1 has a first through hole 111 and a second through hole 112 separated along its axial direction inside, and cables are respectively threaded through the first through hole 111 and the second through hole 112. The first cable threaded through the first through hole 111 is connected at one end to the rotary heater and at the other end to a conductive slip ring located in the first cavity 101; the second cable threaded through the second through hole 112 is connected at one end to the rotary heater and at the other end to a conductive slip ring located in the second cavity 102. In this embodiment, a third conductive slip ring 8 is provided in the first cavity 101, and one end of the first cable is connected to the rotary heater and the other end is connected to the conductive ring 61 of the third conductive slip ring 8 to realize the transmission of radio frequency signals. A second conductive slip ring 7 is provided in the second cavity 102, and one end of the second cable is connected to the rotary heater and the other end is connected to the conductive slip ring located in the inner ring of the second cavity 102 to realize the transmission of heater power signals. This embodiment also includes a third cable, one end of which is connected to the temperature transmitter 3, and the other end is connected to the first conductive slip ring 6 located in the second cavity 102 of the outer ring, so as to realize the transmission of thermocouple signals. Other wiring holes are also provided on the rotor 1, and the cable connected to the temperature transmitter 3 extends upward through the other wiring holes to connect to the rotary heater.

[0066] Example 2

[0067] The main difference between the rotary heater anti-interference slip ring system provided in this embodiment and the rotary heater anti-interference slip ring system in Embodiment 1 is:

[0068] like Figure 2 As shown, the first annular portions 221 of multiple annular members are sequentially arranged along the axial direction of the rotor 1 and connected to the isolation plate 212. The second annular portions 222 of multiple annular members are sequentially rotatably connected to the outer periphery of the rotor 1 along the axial direction of the rotor 1 to form multiple second cavities 102 sequentially arranged along the axial direction of the rotor 1. The connection between the first annular portions 221 of the annular members and the isolation plate 212 ensures that the annular members are relatively fixed to the stator 2. Since the second annular portions 222 are connected to the first annular portions 221, the first annular portions 221 support the second annular portions 222 located on the outer periphery of the rotor 1. The second annular portions 222 can extend inward along the radial direction of the rotor 1, or the area on the outer periphery of the rotor 1 and the second annular portions 222 that are on the same plane can extend outward along the radial direction of the rotor 1. The cooperation of the two forms the second cavity 102. Since multiple annular components are arranged sequentially along the axial direction of rotor 1, and the second annular portion 222 divides the outer peripheral space of rotor 1 along the axial direction of rotor 1, multiple second cavities 102 are arranged sequentially along the axial direction of rotor 1. Each second cavity 102 covers the outer peripheral area of ​​rotor 1 so that one of the conductive ring 61 or brush 62 of the conductive slip ring can be connected to rotor 1 and thus rotate relative to stator 2, while the other is connected to the first annular portion 221 and thus remains relatively fixed to stator 2.

[0069] Optionally, each annular component has two second annular portions 222, which are respectively connected to the top and bottom of the first annular portion 221. The two second annular portions 222, the first annular portion 221, and the outer periphery of the rotor 1 form a second cavity 102. The two second annular portions 222 of the multiple annular components are fitted onto the outer periphery of the rotor 1 and are rotatably connected to the rotor 1 via bearings. The outer periphery of the rotor 1 is connected to the inner ring of the bearing, the inner ring of the second annular portion 222 is connected to the outer ring of the bearing, and the outer ring of the second annular portion 222 is fixedly connected to the first annular portion 221. The second annular portions 222 of adjacent annular components are also fixedly connected, thus relatively fixing the multiple second cavities 102. The fixed connection can be achieved using fastening screws or similar methods for easy assembly and disassembly. The inner ring of the second annular portion 222 has a mounting groove, and the bearing is located within the mounting groove. The second annular portion 222 forms a concave-convex fit with the outer periphery of the stator 2, thereby preventing signal leakage from the rotational connection area between the second annular portion 222 and the stator 2 within the second cavity 102.

[0070] In this embodiment, the flange-type RF coaxial connector is disposed on the outer periphery of the stator 2 and corresponds to the first cavity 101 and multiple second cavities 102 respectively. For example... Figure 2 and Figure 3 As shown, a first conductive slip ring 6 is installed in the first cavity 101 located at the bottom, and a thermocouple signal connector 51 is installed on the outer periphery of the stator 2 corresponding to the first cavity 101. A second conductive slip ring 7 is installed in the first second cavity 102 from bottom to top, and a heater power signal connector 52 is installed on the outer periphery of the stator 2 corresponding to the second cavity 102. A third conductive slip ring 8 is installed in the second second cavity 102 from bottom to top, and an radio frequency signal connector 53 is installed on the outer periphery of the stator 2 corresponding to the second cavity 102. The heater power signal connector 52 and the radio frequency signal connector 53 can be flange-type radio frequency coaxial connectors.

[0071] In this embodiment, a first cable passing through the first through hole 111 connects one end to the rotary heater and the other end to the third conductive slip ring 8 to transmit radio frequency signals. A second cable passing through the second through hole 112 connects one end to the rotary heater and the other end to the second conductive slip ring 7 to transmit heater power signals. This embodiment also includes a third cable, which can be passed through the second through hole 112 or other through holes on the rotor 1. One end of the third cable connects to the rotary heater and the other end connects to the first conductive slip ring 6.

[0072] In addition, the anti-interference slip ring system for the rotary heater provided in this embodiment is the same as that for the rotary heater anti-interference slip ring system in Embodiment 1, and will not be described again here.

[0073] The above embodiments merely illustrate the basic principles and characteristics of the present invention. The present invention is not limited to the above embodiments. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A rotary heater anti-interference slip ring system, characterized in that, include: Rotor (1), the top end of which is connected to a rotary heater to drive the rotary heater to rotate; The stator (2) includes a base (21) and multiple annular components; the base (21) has a first cavity (101) inside, and the bottom end of the rotor (1) is rotatably inserted into the first cavity (101); the multiple annular components are all disposed on the base (21) and rotatably sleeved on the outer periphery of the rotor (1), and the multiple annular components cooperate with the rotor (1) to form multiple mutually isolated second cavities (102). A plurality of conductive slip rings are provided in the first cavity (101) and the plurality of second cavities (102), and at most one of the conductive slip rings is provided in each cavity. The conductive slip ring includes a conductive ring (61) and a brush (62) that are rotatable relative to each other. One of the conductive ring (61) and the brush (62) is fixed to the stator (2) and the other is fixed to the rotor (1). The rotor (1) has a first wire hole (111) and a second wire hole (112) separated along its axial direction inside, and cables are respectively threaded through the first wire hole (111) and the second wire hole (112); A first cable passing through the first wire hole (111) is connected at one end to the rotary heater and at the other end to the conductive slip ring in the first cavity (101); a second cable passing through the second wire hole (112) is connected at one end to the rotary heater and at the other end to the conductive slip ring in the second cavity (102); The base (21) includes a bottom (211) and an isolation plate (212). The bottom (211) has the first cavity (101). The isolation plate (212) covers the opening of the first cavity (101). The isolation plate (212) is provided with a rotating hole. The rotor (1) passes through the rotating hole so that the bottom end of the rotor (1) is rotatably inserted into the first cavity (101). A plurality of the annular parts are provided on the isolation plate (212) and rotatably sleeved on the outer periphery of the rotor (1). The annular component includes a first annular portion (221) and a second annular portion (222). The first annular portion (221) is coaxially arranged with the rotor (1) and connected to the isolation plate (212). The second annular portion (222) is connected to the first annular portion (221) and extends to the outer periphery of the rotor (1). The second annular portion (222) is rotatably connected to the outer periphery of the rotor (1). The first annular portions (221) of the plurality of annular members are arranged radially spaced along the rotor (1) and connected to the isolation plate (212). The second annular portions (222) of the plurality of annular members are sequentially rotatably connected to the outer periphery of the rotor (1) along the axial direction of the rotor (1) to form a plurality of mutually isolated and sequentially nested second cavities (102). The rotor (1) includes a body (11) and a top cover plate (12). The top end of the body (11) is connected to the rotary heater. The body (11) passes through the rotating hole so that the bottom end of the body (11) is rotatably inserted into the first cavity (101). The top cover plate (12) is disposed on the outer periphery of the body (11) and extends radially along the body (11). The annular component includes a first annular component (22) and a second annular component (23). The first annular portion (221) of the first annular component (22) is spaced apart from the inner periphery of the first annular portion (221) of the second annular component (23). The second annular portion (222) of the first annular component (22) is rotatably connected to the outer periphery of the body (11). The second annular portion (222) of the second annular component (23) is rotatably connected to the outer periphery of the top cover plate (12) to form two mutually isolated and fitted second cavities (102).

2. A rotary heater anti-interference slip ring system, characterized in that, include: Rotor (1), the top end of which is connected to a rotary heater to drive the rotary heater to rotate; The stator (2) includes a base (21) and multiple annular components; the base (21) has a first cavity (101) inside, and the bottom end of the rotor (1) is rotatably inserted into the first cavity (101); the multiple annular components are all disposed on the base (21) and rotatably sleeved on the outer periphery of the rotor (1), and the multiple annular components cooperate with the rotor (1) to form multiple mutually isolated second cavities (102). A plurality of conductive slip rings are provided in the first cavity (101) and the plurality of second cavities (102), and at most one of the conductive slip rings is provided in each cavity. The conductive slip ring includes a conductive ring (61) and a brush (62) that are rotatable relative to each other. One of the conductive ring (61) and the brush (62) is fixed to the stator (2) and the other is fixed to the rotor (1). The rotor (1) has a first wire hole (111) and a second wire hole (112) separated along its axial direction inside, and cables are respectively threaded through the first wire hole (111) and the second wire hole (112); A first cable passing through the first wire hole (111) is connected at one end to the rotary heater and at the other end to the conductive slip ring in the first cavity (101); a second cable passing through the second wire hole (112) is connected at one end to the rotary heater and at the other end to the conductive slip ring in the second cavity (102); The base (21) includes a bottom (211) and an isolation plate (212). The bottom (211) has the first cavity (101). The isolation plate (212) covers the opening of the first cavity (101). The isolation plate (212) is provided with a rotating hole. The rotor (1) passes through the rotating hole so that the bottom end of the rotor (1) is rotatably inserted into the first cavity (101). A plurality of the annular parts are provided on the isolation plate (212) and rotatably sleeved on the outer periphery of the rotor (1). The annular component includes a first annular portion (221) and a second annular portion (222). The first annular portion (221) is coaxially arranged with the rotor (1) and connected to the isolation plate (212). The second annular portion (222) is connected to the first annular portion (221) and extends to the outer periphery of the rotor (1). The second annular portion (222) is rotatably connected to the outer periphery of the rotor (1). The first annular portions (221) of the plurality of annular members are arranged sequentially along the axial direction of the rotor (1) and connected to the isolation plate (212). The second annular portions (222) of the plurality of annular members are rotatably connected to the outer periphery of the rotor (1) along the axial direction of the rotor (1) to form a plurality of second cavities (102) arranged sequentially along the axial direction of the rotor (1). Each of the annular components has two second annular portions (222), which are respectively connected to the top and bottom of the first annular portion (221). The two second annular portions (222), the first annular portion (221), and the outer periphery of the rotor (1) form a second cavity (102).

3. The rotary heater anti-interference slip ring system according to any one of claims 1 or 2, characterized in that, The rotary heater anti-interference slip ring system also includes a temperature transmitter (3), which is fixed to the rotor (1); the conductive slip ring includes a first conductive slip ring (6) for transmitting thermocouple signals, and the thermocouple of the rotary heater is connected to the first conductive slip ring (6) through the temperature transmitter (3).

4. The rotary heater anti-interference slip ring system according to claim 3, characterized in that, The rotary heater anti-interference slip ring system also includes a twisted-pair shielded cable (4) and a thermocouple signal connector (51). The thermocouple signal connector (51) is located on the stator (2). One end of the twisted-pair shielded cable (4) is connected to the thermocouple signal connector (51), and the other end is connected to the temperature controller of the rotary heater. The conductive ring (61) or conductive brush (62) of the first conductive slip ring (6) fixed to the stator (2) is connected to the thermocouple signal connector (51) via a cable.

5. The rotary heater anti-interference slip ring system according to any one of claims 1 or 2, characterized in that, The stator (2) is provided with a flange-type radio frequency coaxial connector. The conductive slip ring includes a second conductive slip ring (7) for transmitting heater power signals and a third conductive slip ring (8) for transmitting radio frequency signals. The second conductive slip ring (7) and the third conductive slip ring (8) are connected to the flange-type radio frequency coaxial connector by a cable. The rotary heater anti-interference slip ring system also includes a filter assembly and a power supply system, wherein the power supply system is connected to the flange-type radio frequency coaxial connector through the filter assembly.

6. The rotary heater anti-interference slip ring system according to any one of claims 1 or 2, characterized in that, The conductive slip ring includes at least one multi-channel conductive slip ring, which is provided with a grounding loop. The grounding node of the rotor (1) and the grounding node of the stator (2) are electrically connected through the grounding loop.

7. A vapor deposition apparatus, characterized in that, It includes a deposition chamber, a rotary heater, and a rotary heater anti-interference slip ring system as described in any one of claims 1 or 2, wherein the rotor (1) of the rotary heater anti-interference slip ring system is connected to the rotary heater, and the rotary heater is rotatably disposed in the deposition chamber.

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