Analog signal calibration method, controller and system suitable for semiconductor equipment

Abstract

The invention discloses an analog signal calibration method, controller and system suitable for semiconductor equipment. The method comprises the following steps: controlling an analog signal output module to output a first preset electric signal; acquiring a first preset electric signal through an analog signal input module to obtain a first electric parameter acquisition value; measuring the first preset electric signal through an analog electric parameter measurement device to obtain a first electric parameter measurement value; calibrating the analog signal input module according to the first electrical parameter acquisition value and the first electrical parameter measurement value; controlling the analog signal output module to output a second preset electric signal corresponding to the first preset electric parameter value; acquiring a second preset electric signal through the calibrated analog signal input module to obtain a second electric parameter acquisition value; and calibrating the signal output by the analog signal output module according to the first preset electrical parameter value and the second electrical parameter acquisition value. Through the mode, the analog input signal and the analog output signal can be calibrated, so that the precision is improved.

Description

TECHNICAL FIELD

[0001] Embodiments of the present application relate to the technical field of analog calibration of semiconductor equipment, and particularly relate to an analog signal calibration method, a controller and a system controller suitable for semiconductor equipment. BACKGROUND

[0002] In the fields of industrial automation, precision instruments, medical electronics and test measurement, analog signal processing systems widely use analog-to-digital converters (ADC) to realize digitization of analog input signals, and digital-to-analog converters (DAC) to realize analog output of digital control signals. However, due to factors such as limitations of semiconductor manufacturing processes, component parameter tolerances, environmental temperature changes and long-term aging, ADCs and DACs generally have inherent defects such as offset errors and gain errors in actual applications, which directly affect signal processing accuracy. In the process of signal transmission in semiconductor equipment applications, the existence of related signal errors can affect multiple semiconductor manufacturing process links such as lithography, etching and ion implantation, thereby reducing wafer yield and quality. SUMMARY

[0003] Embodiments of the present application provide an analog signal calibration method, a controller and a system suitable for semiconductor equipment, which can calibrate analog input signals and analog output signals to improve accuracy.

[0004] In a first aspect, embodiments of the present application provide an analog signal calibration method suitable for semiconductor equipment, applied to a signal processing system and an analog electrical parameter measurement device. The signal processing system includes an analog signal input module and an analog signal output module electrically connected to the analog signal input module. The analog signal calibration method includes: controlling the analog signal output module to sequentially output first preset electrical signals of a first target interval to the analog signal input module and the analog electrical parameter measurement device; collecting the first preset electrical signals through the analog signal input module to obtain corresponding first electrical parameter collection values; measuring the first preset electrical signals through the analog electrical parameter measurement device to obtain corresponding first electrical parameter measurement values; calibrating the signals collected by the analog signal input module according to the first electrical parameter collection values and the first electrical parameter measurement values; controlling the analog signal output module to sequentially output second preset electrical signals of the first target interval to the calibrated analog signal input module, wherein the second preset electrical signals correspond to first preset electrical parameter values of the first target interval in sequence; collecting the second preset electrical signals through the calibrated analog signal input module to obtain corresponding second electrical parameter collection values; and calibrating the signals output by the analog signal output module according to the first preset electrical parameter values and the second electrical parameter collection values.

[0005] In one or more embodiments, the signal collected by the analog signal input module is calibrated according to the first electric parameter collection value and the first electric parameter measurement value, including: establishing a first mapping relationship between the first electric parameter collection value and the first electric parameter measurement value; and calibrating the signal collected by the analog signal input module according to the first mapping relationship.

[0006] In one or more embodiments, the signal output by the analog signal output module is calibrated according to the first preset electric parameter value and the second electric parameter collection value, including: establishing a second mapping relationship between the first preset electric parameter value and the second electric parameter collection value; and calibrating the signal output by the analog signal output module according to the second mapping relationship.

[0007] In a second aspect, the embodiments of the present application provide an analog signal calibration method suitable for a semiconductor device, applied to a signal processing system and an analog electric parameter measurement device, the signal processing system including an analog signal input module and an analog signal output module electrically connected to the analog signal input module, and the analog signal calibration method including: controlling the analog signal output module to sequentially output third preset electric signals of a second target interval to the analog electric parameter measurement device, wherein the third preset electric signals sequentially correspond to second preset electric parameter values of the second target interval; measuring the third preset electric signals by the analog electric parameter measurement device to obtain corresponding second electric parameter measurement values; calibrating the signal output by the analog signal output module according to the second preset electric parameter values and the second electric parameter measurement values; controlling the calibrated analog signal output module to sequentially output fourth preset electric signals of the second target interval to the analog signal input module, wherein the fourth preset electric signals sequentially correspond to third preset electric parameter values of the second target interval; collecting the fourth preset electric signals by the analog signal input module to obtain corresponding third electric parameter collection values; and calibrating the signal collected by the analog signal input module according to the third preset electric parameter values and the third electric parameter collection values.

[0008] In one or more embodiments, the signal output by the analog signal output module is calibrated according to the second preset electric parameter value and the second electric parameter measurement value, including: establishing a third mapping relationship between the second preset electric parameter value and the second electric parameter measurement value; and calibrating the signal output by the analog signal output module according to the third mapping relationship.

[0009] In one or more embodiments, the signal collected by the analog signal input module is calibrated according to the third preset electric parameter value and the third electric parameter collection value, including: establishing a fourth mapping relationship between the third preset electric parameter value and the third electric parameter collection value; and calibrating the signal collected by the analog signal input module according to the fourth mapping relationship.

[0010] In a third aspect, an embodiment of the present application provides a controller, comprising: at least one processor and a memory; the memory is coupled to the processor, and the memory is configured to store instructions or programs, when the instructions or programs are executed by the at least one processor, the at least one processor is caused to perform the analog signal calibration method suitable for a semiconductor device as in the first aspect and the second aspect.

[0011] In a fourth aspect, an embodiment of the present application provides a signal processing system, comprising: an analog signal input module; an analog signal output module; and a controller as in the third aspect, the controller is electrically connected to the analog signal input module and the analog signal output module respectively, to control the analog signal output module to output a signal or receive a signal collected by the analog signal input module.

[0012] In one or more embodiments, the signal processing system further comprises a switch module; the switch module is electrically connected to the analog signal input module, the analog signal output module and the controller respectively; the switch module is controlled by the controller, to establish or break the electrical connection between the analog signal input module and the analog signal output module.

[0013] In a fifth aspect, an embodiment of the present application provides a computer readable storage medium, the computer readable storage medium stores a computer program, when the computer program is executed, the analog signal calibration method suitable for a semiconductor device as in the first aspect and the second aspect is implemented.

[0014] The beneficial effects of the present application are: the analog signal calibration method suitable for a semiconductor device in the embodiments of the present application first collects a first preset electrical signal output by the analog signal output module according to the analog signal input module, obtains a first electrical parameter collection value, and measures the first preset electrical signal according to an analog electrical parameter measuring device, obtains a first electrical parameter measurement value, and then calibrates the signal collected by the analog signal input module according to the first electrical parameter collection value and the first electrical parameter measurement value, so as to complete the calibration of the analog input signal. Then, the analog signal output module is calibrated according to the calibrated analog signal input module, so as to complete the calibration of the analog output signal. In this way, the calibration process of the analog input signal and the analog output signal is completed, which is beneficial to improve the precision. Secondly, only one analog electrical parameter measuring device is used to complete the calibration of the analog input signal and the analog output signal, the cost of procurement and maintenance is low, and the complexity of carrying and deploying the equipment is reduced. In addition, the entire calibration process is basically automatically operated, and the manual operation link is less, which is beneficial to reduce the calibration error caused by wiring errors, data recording deviations and the like. BRIEF DESCRIPTION OF DRAWINGS

[0015] One or more embodiments are illustrated by way of example in the figures that form a part of this disclosure and which demonstrate aspects of the embodiments. It is to be understood that the same or similar elements shown in different embodiments can be referenced with a common numeral for the sake of brevity.

[0016] Figure 1 is a schematic diagram of a component block diagram of a signal processing system provided by embodiments of the present application Figure 1 ; Figure 2 is a schematic diagram of a component block diagram of a signal processing system provided by embodiments of the present application Figure 2 ; Figure 3 is a flowchart of a method for analog signal calibration applicable to semiconductor equipment provided by embodiments of the present application Figure 1 ; Figure 4 is a schematic diagram of a functional block diagram of a signal processing system provided by embodiments of the present application Figure 1 ; Figure 5 is a schematic diagram of an embodiment of step S340 shown in Figure 3 ; Figure 6 is a schematic diagram of an embodiment of step S520 shown in Figure 5 ; Figure 7 is a schematic diagram of a functional block diagram of a signal processing system provided by embodiments of the present application Figure 2 ; Figure 8 is a schematic diagram of an embodiment of step S370 shown in Figure 3 ; Figure 9 is a schematic diagram of an embodiment of step S820 shown in Figure 8 ; Figure 10 is a flowchart of a method for analog signal calibration applicable to semiconductor equipment provided by embodiments of the present application Figure 2 ; Figure 11 is a schematic diagram of a functional block diagram of a signal processing system provided by embodiments of the present application Figure 3 ; Figure 12 is a schematic diagram of an embodiment of step S1030 shown in Figure 10 ; Figure 13 is a schematic diagram of an embodiment of step S1220 shown in Figure 12 ; Figure 14is an embodiment provided by the present application Figure 10 is a schematic diagram of one embodiment of step S1060 shown in Figure 15 is an embodiment provided by the present application Figure 14 is a schematic diagram of one embodiment of step S1420 shown in DETAILED DESCRIPTION

[0017] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and in detail below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. It should be understood that the specific embodiments described herein are only used to explain the present application and should not be used to limit the present application.

[0018] It should be noted that when one element is described as being "connected" to another element, it can be directly connected to the other element or one or more intermediate elements can be present therebetween.

[0019] In addition, the technical features involved in each of the embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0020] Please refer to Figure 1 , Figure 1 is a schematic diagram of a composition block diagram of a signal processing system provided by the embodiments of the present application. As shown in Figure 1 , the signal processing system 100 includes an analog signal input module 110, an analog signal output module 120 and a controller 130.

[0021] Among them, the signal processing system 100 is an electronic system for receiving, conditioning, converting, amplifying, filtering or otherwise processing continuous-time analog electrical signals, and outputting the processed signals in analog form. The signal processing system 100 is applied to various engineering and scientific fields that need to collect, condition, process and feedback real-world physical quantities. It can be understood that the signal processing system 100 is applicable to any application scenario that needs to "perceive" the physical world (analog input) or "influence / control" the physical world (analog output).

[0022] For example, in one specific embodiment, the signal processing system 100 is applied to a vapor deposition apparatus. The vapor deposition apparatus is used to deposit materials (such as metals, dielectrics, semiconductors) on a wafer surface with atomic / molecular / ionic precision using physical or chemical means, forming a thin film of uniform thickness and controllable performance. The signal processing system is used to achieve closed-loop precision control of multiple parameters such as temperature, pressure, and gas concentration, for example, by real-time acquisition of various analog sensor signals such as temperature from the reaction chamber; or, the signal processing system is used to drive actuators, such as controlling the valve opening of a mass flow meter by outputting analog signals (such as 0-5V or 4-20mA).

[0023] For example, in one specific embodiment, the signal processing system 100 is applied to a gas flow control system, wherein the signal processing system 100 is used to realize fully automatic high-precision control from flow measurement to valve regulation, such as: receiving feedback signals from flow / pressure / temperature sensors; or, the signal processing system 100 is used to generate drive signals output to control valves (such as MFC internal valves or external valves).

[0024] The analog signal input module 110 is used to receive external analog electrical signals (such as voltage, current, etc.). The analog signal output module 120 is used to output the processed analog signal, which can be used to drive display devices, recording instruments, or other control systems.

[0025] The controller 130 is electrically connected to the analog signal input module 110 and the analog signal output module 120 respectively, so as to control the analog signal output module 120 to output signals or receive signals collected by the analog signal input module 110. The controller 130 can be a microcontroller unit (MCU) or a digital signal processing (DSP) controller, etc.

[0026] like Figure 1 As shown, the controller 130 includes at least one processor 131 and a memory 132. The memory 132 can be built into the controller 130 or external to the controller 130. The memory 132 can also be a remotely configured memory connected to the controller 130 via a network.

[0027] Memory 132, as a non-volatile computer-readable storage medium, can be used to store non-volatile software programs, non-volatile computer-executable programs, and modules. Memory 132 may include a program storage area and a data storage area, wherein the program storage area may store the operating system and application programs required for at least one function; the data storage area may store data created based on the use of the terminal, etc. Furthermore, memory 132 may include high-speed random access memory and may also include non-volatile memory, such as at least one disk storage device, flash memory device, or other non-volatile solid-state storage device. In some embodiments, memory 132 may optionally include memory remotely located relative to processor 131, and these remote memories can be connected to the terminal via a network. Examples of such networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0028] The processor 131 performs various functions of the terminal and processes data by running or executing software programs and / or modules stored in the memory 132 and calling data stored in the memory 132, thereby performing overall monitoring of the terminal, such as implementing the analog signal calibration method for semiconductor devices in any embodiment of this application.

[0029] Processor 131 can be one or more. Figure 1 The example provided uses a processor 131. Processor 131 and memory 132 can be connected via a bus or other means. Processor 131 may include a central processing unit (CPU), a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a controller, a field-programmable gate array (FPGA) device, etc. Processor 131 can also be implemented as a combination of computing devices, such as a combination of a DSP and a microprocessor, multiple microprocessors, one or more microprocessors combined with a DSP core, or any other such configuration.

[0030] In some embodiments, such as Figure 2 As shown, the signal processing system 100 also includes a switch module 140. The switch module 140 is electrically connected to the analog signal input module 110, the analog signal output module 120, and the controller 130, respectively.

[0031] Specifically, the switch module 140 is controlled by the controller 130 to establish or disconnect the electrical connection between the analog signal input module 110 and the analog signal output module 120. When the controller 130 determines that analog signal calibration is required, the controller 130 controls the switch module 140 to establish the electrical connection between the analog signal input module 110 and the analog signal output module 120, forming an internal signal transmission loop to achieve analog signal calibration. When the controller 130 determines that the analog signal input module 110 and the analog signal output module 120 need to operate normally, the controller 130 controls the switch module 140 to disconnect the electrical connection between the analog signal input module 110 and the analog signal output module 120, so that the analog signal input module 110 can receive external analog electrical signals, and the analog signal output module 120 can output continuous analog voltage or current to drive an external load.

[0032] In some embodiments, please continue to refer to Figure 2 The controller 130 also establishes bidirectional communication with the analog electrical parameter measuring device 200 via Ethernet protocol. The controller 130 can receive high-precision measurement results returned by the analog electrical parameter measuring device 200 in real time, which is beneficial to realizing the automated control process of analog signal calibration.

[0033] In some embodiments, the host computer includes a controller 130. The host computer also includes an Ethernet communication module, through which the controller 130 establishes a communication connection with the analog electrical parameter measuring device 200. Thus, the controller 130 can receive high-precision measurement results returned by the analog electrical parameter measuring device 200 in real time. This communication mechanism provides strong support for the automated control of the analog signal calibration process.

[0034] Analog electrical parameter measuring devices are electronic measuring devices used to continuously, in real-time, and non-digitally acquire and indicate basic electrical parameters (such as voltage and current) in circuits or electrical equipment. Analog electrical parameter measuring devices are based on analog signal processing technology and typically use analog sensors, conditioning circuits, pointer instruments, or analog output interfaces to directly reflect the amplitude, waveform, or dynamic changes of the measured electrical quantity.

[0035] In related technologies, due to limitations in semiconductor manufacturing processes, component parameter tolerances, environmental temperature variations, and long-term aging, analog signal input and output modules commonly exhibit inherent defects such as offset and gain errors in practical applications, severely affecting the overall system accuracy. Offset error refers to the phenomenon where the output remains non-zero even when the input signal is zero, typically caused by operational amplifier input offset voltage, reference voltage drift, or circuit asymmetry. Gain error manifests as the slope of the system's actual transfer function deviating from the ideal value, resulting in a non-strict proportional relationship between the output signal amplitude and the input. Its causes include resistor matching deviations, limited open-loop gain of the amplifier, and temperature drift.

[0036] Based on this, embodiments of this application provide an analog signal calibration method suitable for semiconductor devices, which improves accuracy by calibrating analog input signals and analog output signals.

[0037] Please refer to Figure 3 , Figure 3 This is a flowchart illustrating an analog signal calibration method for semiconductor devices provided in an embodiment of this application. The analog signal calibration method is applied to a signal processing system and an analog electrical parameter measuring device. The signal processing system includes an analog signal input module and an analog signal output module electrically connected to the analog signal input module. The signal processing system and the analog electrical parameter measuring device can be used to calibrate a reference signal. Figure 1 and Figure 2 The explanation will not be repeated here.

[0038] like Figure 3 As shown, the analog signal calibration method includes the following steps S310 to S370.

[0039] Step S310: Control the analog signal output module to sequentially output the first preset electrical signal of the first target interval to the analog signal input module and the analog electrical parameter measuring device.

[0040] Step S320: Acquire the first preset electrical signal through the analog signal input module to obtain the corresponding first electrical parameter acquisition value.

[0041] Step S330: Measure the first preset electrical signal using a simulated electrical parameter measuring device to obtain the corresponding first electrical parameter measurement value.

[0042] Step S340: Calibrate the signal acquired by the analog signal input module based on the first electrical parameter acquisition value and the first electrical parameter measurement value.

[0043] The first target interval is a pre-defined continuous range of electrical signal values ​​used to define the upper and lower boundaries of the output signal. The first target interval is the range within the output range of the analog signal output module; that is, the minimum value of the first target interval is not lower than the minimum output capability of the analog signal output module, and the maximum value does not exceed the maximum output capability of the analog signal output module, ensuring that all first preset electrical signals can be generated safely and effectively. In a specific embodiment, the first target interval is the maximum range within the output range of the analog signal output module, covering the entire working range, ensuring full-range accuracy, and eliminating the need for dynamic determination of the user's operating range. Calibration is uniformly performed based on the maximum range, reducing software complexity and simplifying system design and testing processes.

[0044] The first preset electrical signal is a set of discrete, ordered electrical signal values ​​predefined by the user within a first target interval. Each first preset electrical signal can be uniformly distributed or non-uniformly distributed. For example, if the first target interval is [0, 5V], each first preset electrical signal can be uniformly distributed as {0mV, 4.883mV, 9.766mV, 14.648mV, ..., 4995.117mV, 5V} (with a resolution of 2). 10 For example, it can also be a non-uniform distribution of {0mV, 3mV, 4.883mV, 6mV, 14.648mV, ..., 5V}.

[0045] The first electrical parameter acquisition value refers to the digital measurement result obtained by the analog signal input module after sampling and analog-to-digital conversion of the first preset electrical signal upon receiving it. The generated digital measurement result is read and stored by the controller.

[0046] The first electrical parameter measurement value refers to the high-precision, traceable measured value obtained by the analog electrical parameter measuring device when it receives the first preset electrical signal. The first electrical parameter measurement value has high precision and high reliability and can be used as a reference benchmark for calibration.

[0047] The following combination Figure 4The functional block diagram of the signal processing system is illustrated below. This diagram describes the functional modules and data flow of the signal processing system 100. Specifically, firstly, the analog signal output module 120 outputs the first preset electrical signal one by one in a preset order (e.g., ascending order or a specific sequence), outputting only one value at a time and maintaining that value for a period of time for reception by the analog signal input module 110 and the analog electrical parameter measuring device 200. Then, on one hand, the analog signal input module 110 samples and performs analog-to-digital conversion on the first preset electrical signal after receiving it to obtain the first electrical parameter acquisition value; on the other hand, the analog electrical parameter measuring device 200 obtains the first electrical parameter measurement value, which can be used as a reference, upon receiving the first preset electrical signal. Finally, the controller 130 receives the first electrical parameter acquisition value and the first electrical parameter measurement value, and analyzes each pair of data (including one first electrical parameter acquisition value and one first electrical parameter measurement value), thereby calibrating the signal acquired by the analog signal input module 110.

[0048] In some embodiments, such as Figure 5 As shown, the specific implementation process of step S340 includes the following steps S510 to S520.

[0049] Step S510: Establish the first mapping relationship between the first electrical parameter acquisition value and the first electrical parameter measurement value.

[0050] Step S520: According to the first mapping relationship, calibrate the signal acquired by the analog signal input module.

[0051] Specifically, each pair of data (x1) i y1 i ) form a mapping relationship, where x1 i Let y1 be the i-th first electrical parameter acquisition value. i Let be the measured value of the i-th electrical parameter. Based on all data points, establish a first mapping relationship, such as a linear mapping relationship of y=kx+b, where k is a coefficient and b is a constant. In subsequent operation, when the analog signal input module acquires any electrical signal and outputs the original acquired value, the calibrated electrical parameter value can be calculated through the first mapping relationship, thereby achieving systematic error compensation for the analog signal input module and improving its measurement accuracy.

[0052] In some embodiments, such as Figure 6 As shown, the specific implementation process of step S520 may include the following steps S610 to S620.

[0053] Step S610: Fit the first mapping relationship using the first preset fitting model to obtain the first fitting curve.

[0054] Step S620: Based on the first fitting curve, calibrate the signal acquired by the analog signal input module.

[0055] Among them, the first preset fitting model and the predefined fitting model, such as a linear model (y=ax+b) or a quadratic polynomial model (y=ax), are used. 2 (+bx+c), etc.

[0056] A predefined first fitting model is selected to fit the first mapping relationship. Then, the parameters of the first predefined fitting model are solved using the least squares method, weighted regression, or other optimization algorithms to obtain the first fitting curve. The first fitting curve represents the calibration function from the "original acquired value" to the "true electrical parameter value". In subsequent operation, when the analog signal input module acquires any electrical signal and outputs the original acquired value, the calibrated electrical parameter value can be calculated using the first fitting curve. This achieves systematic error compensation for the analog signal input module and improves its measurement accuracy.

[0057] Step S350: Control the analog signal output module to sequentially output the second preset electrical signal of the first target interval to the calibrated analog signal input module, wherein the second preset electrical signal corresponds to the first preset electrical parameter value of the first target interval.

[0058] Step S360: Acquire the second preset electrical signal through the calibrated analog signal input module to obtain the corresponding second electrical parameter acquisition value.

[0059] Step S370: Calibrate the signal output by the analog signal output module according to the first preset electrical parameter value and the second electrical parameter acquisition value.

[0060] The second preset electrical signal is a set of discrete, ordered electrical signal values ​​predefined by the user within the first target interval. Each second preset electrical signal can be uniformly or non-uniformly distributed. The division method of the second preset electrical signal can be the same as or different from that of the first preset electrical signal. When the division method of the second preset electrical signal is the same as that of the first preset electrical signal, the number of signals and the signal distribution logic of the second preset electrical signal are the same as those of the first preset electrical signal; conversely, when the division method of the second preset electrical signal is different from that of the first preset electrical signal, the number of signals or the signal distribution logic of the second preset electrical signal are different from those of the first preset electrical signal.

[0061] The first preset electrical parameter values ​​are a set of desired physical quantity values ​​(i.e., target output values) pre-set within the first target interval, used to guide the analog signal output module to generate the corresponding electrical signal. The second preset electrical signal corresponds sequentially to the first preset electrical parameter values ​​within the first target interval, meaning that there is a one-to-one mapping relationship, and each first preset electrical parameter value is used as an instruction in sequence to drive the analog signal output module to generate a second preset electrical signal.

[0062] The second electrical parameter acquisition value refers to the digital measurement result obtained by the analog signal input module after sampling and analog-to-digital conversion of the second preset electrical signal upon receiving it. The generated digital measurement result is read and stored by the controller.

[0063] The following combination Figure 7 The functional block diagram of the signal processing system is shown below. Specifically, the connection between the analog electrical parameter measuring device 200 and the analog signal output module 120 is first disconnected. At this time, the analog signal output module 120 outputs the second preset electrical signal one by one in a preset order, and outputs only one value at a time, holding the value for a period of time so that it can be received by the calibrated analog signal input module 110. Then, using the analog signal input module 110, which has completed input channel calibration (i.e., has established a high-precision mapping relationship between "raw quantized value → real physical quantity"), the second preset electrical signal generated by the analog signal output module 120 is measured, and a highly reliable physical quantity estimate is output according to its internal calibration model, which is recorded as the second electrical parameter acquisition value. Then, by analyzing each pair of data (including a second electrical parameter acquisition value and a first preset electrical parameter value), the signal output by the analog signal output module 120 can be calibrated.

[0064] In some embodiments, such as Figure 8 As shown, the specific implementation process of step S370 includes the following steps S810 to S820.

[0065] Step S810: Establish a second mapping relationship between the first preset electrical parameter value and the second electrical parameter acquisition value.

[0066] Step S820: According to the second mapping relationship, calibrate the signal output by the analog signal output module.

[0067] Specifically, each pair of data (x2) i y2 i ) form a mapping relationship, where x2 i For the i-th first preset electrical parameter value, y2 iLet be the i-th acquired value of the second electrical parameter. Based on all data points, a second mapping relationship is established. In subsequent operation, when the analog signal output module outputs the original acquired value, the calibrated electrical parameter value can be calculated through the second mapping relationship, thereby achieving systematic error compensation for the analog signal output module and improving its measurement accuracy.

[0068] In some embodiments, such as Figure 9 As shown, the specific implementation process of step S820 may include the following steps S910 to S920.

[0069] Step S910: Fit the second mapping relationship using the second preset fitting model to obtain the second fitting curve.

[0070] Step S920: Based on the second fitting curve, calibrate the signal output by the analog signal output module.

[0071] The second preset fitting model is a predefined fitting model, such as a linear model or a quadratic polynomial model. The second preset fitting model can be the same as or different from the first preset fitting model.

[0072] A predefined second preset fitting model is selected to fit the second mapping relationship. Then, the parameters of the second preset fitting model are solved using the least squares method, weighted regression, or other optimization algorithms to obtain the second fitting curve. In subsequent operation, when the analog signal output module sequentially outputs the second preset electrical signal within the first target interval, the first preset electrical parameter value corresponding to the second preset electrical signal is calibrated using the second fitting curve. This yields the calibrated electrical parameter value, thereby achieving systematic error compensation for the analog signal output module and improving its measurement accuracy.

[0073] In this way, the calibrated, high-reliability analog input channel is used as an "internal standard table" to identify and correct the output error of the analog signal output module 120, achieving closed-loop calibration at the output end. Secondly, this calibration process eliminates the need for the analog electrical parameter measuring device 200, reducing cost and complexity. Furthermore, since this embodiment calibrates the analog signal input module 110 first and then the analog signal output module 120, it is particularly suitable for signal processing systems 100 where the number of input terminals of the analog signal input module 110 is less than the number of output terminals of the analog signal output module 120, thereby reducing the use of the analog electrical parameter measuring device 200 and improving work efficiency.

[0074] In one specific embodiment, the semiconductor equipment to which this analog signal calibration method is applicable is a plasma-enhanced chemical vapor deposition (PECVD) or physical vapor deposition (PVD) equipment. In vapor deposition equipment, components such as the mass flow control system, moving part drive system, process monitoring system, and internal control system require precise control signals to ultimately transmit accurate flow values, position signals, process information, and internal command transmissions. Therefore, both the input and output of voltage signals need to maintain high accuracy to ensure the quality of the semiconductor equipment process.

[0075] Therefore, this application embodiment further sets the first preset electrical signal to cover the full range of 0-15V (this embodiment uses 2...). 12 That is, a resolution of 4096 levels), with calibration points set in a step size of 15 / 4095V (approximately {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V}, uniformly distributed across the entire range. The second preset electrical signal also covers the full range of 0-15V (in this embodiment, 2...). 12 (i.e., 4096 levels of resolution), and set calibration points uniformly distributed across the entire range with a step size of 15 / 4095V (i.e., approximately equal to {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V}).

[0076] Furthermore, by receiving the first preset voltage signal {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V} through the analog electrical parameter measuring device and the analog signal input module, based on the mapping relationship between the measurement results of the analog electrical parameter measuring device and the acquisition results of the analog signal input module, the following can be obtained: the actual acquisition value corresponding to 0mV received by the analog signal input module (i.e., in practical applications, when the analog signal input module receives 0mV, the controller can obtain the actual acquisition value corresponding to 0mV); the actual acquisition value corresponding to 3.663mV received by the analog signal input module; ...; and the actual acquisition value corresponding to 15V received by the analog signal input module.

[0077] Subsequently, since the actual acquired values ​​corresponding to the signals received by the analog signal input module can be obtained, the analog signal input module can be used to receive the second preset electrical signals {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V}. Based on the mapping relationship between the electrical parameter values ​​corresponding to the second preset electrical signals and the acquisition results of the analog signal input module, the following can be obtained: the actual output value corresponding to 0mV output by the analog signal output module (i.e., in practical applications, when it is necessary to control the analog signal output module to output 0mV, the controller should output the actual output value corresponding to 0mV); the actual output value corresponding to 3.663mV output by the analog signal output module; ...; the actual output value corresponding to 15V output by the analog signal output module.

[0078] Thus, this comprehensive, high-density calibration strategy ensures that the analog signal input module and analog signal output module have high-precision response capability under all voltage conditions required by the semiconductor process, thereby significantly improving the stability, consistency, repeatability and process robustness of the semiconductor process and meeting the stringent requirements of advanced processes for precision process control.

[0079] Furthermore, the above process calibrates both the analog input and output signals, which improves accuracy. Moreover, since only one analog electrical parameter measuring device is used to calibrate both signals, procurement and maintenance costs are low, and the complexity of carrying and deploying the equipment is reduced. Simultaneously, the entire calibration process is largely automated, minimizing manual intervention and reducing calibration errors caused by wiring mistakes, data recording deviations, etc.

[0080] Please refer to Figure 10 , Figure 10 A flowchart illustrating an analog signal calibration method for semiconductor devices according to another embodiment of this application is provided. The analog signal calibration method is applied to a signal processing system and an analog electrical parameter measuring device. The signal processing system includes an analog signal input module and an analog signal output module electrically connected to the analog signal input module. The signal processing system and the analog electrical parameter measuring device can be used to calibrate a reference signal. Figure 1 and Figure 2 The explanation will not be repeated here.

[0081] like Figure 10 As shown, the analog signal calibration method includes the following steps S1010 to S1060.

[0082] Step S1010: Control the analog signal output module to sequentially output the third preset electrical signal of the second target interval to the analog electrical parameter measuring device, wherein the third preset electrical signal corresponds sequentially to the second preset electrical parameter value of the second target interval.

[0083] Step S1020: Measure the third preset electrical signal using a simulated electrical parameter measuring device to obtain the corresponding second electrical parameter measurement value.

[0084] Step S1030: Calibrate the signal output by the analog signal output module according to the second preset electrical parameter value and the second electrical parameter measurement value.

[0085] The second target interval is a pre-defined continuous range of electrical signal values ​​used to define the upper and lower boundaries of the output signal. The second target interval is the range within the output range of the analog signal output module; that is, the minimum value of the first target interval is not lower than the minimum output capability of the analog signal output module, and the maximum value does not exceed the maximum output capability of the analog signal output module, ensuring that all first preset electrical signals can be generated safely and effectively. In a specific embodiment, the second target interval is the maximum range within the output range of the analog signal output module, covering the entire working range, ensuring full-range accuracy, and eliminating the need for dynamic determination of the user's operating range. Calibration is uniformly performed based on the maximum range, reducing software complexity and simplifying system design and testing processes.

[0086] The third preset electrical signal is a set of discrete, ordered electrical signal values ​​predefined by the user within the second target interval. Each third preset electrical signal can be uniformly distributed or non-uniformly distributed.

[0087] The second preset electrical parameter values ​​are a set of desired physical quantity values ​​(i.e., target output values) pre-set within the second target interval, used to guide the analog signal output module to generate the corresponding electrical signal. The third preset electrical signal corresponds sequentially to the second preset electrical parameter values ​​within the second target interval, meaning that there is a one-to-one mapping relationship, and each second preset electrical parameter value is used as an instruction in sequence to drive the analog signal output module to generate a third preset electrical signal.

[0088] The second electrical parameter measurement value refers to the high-precision, traceable measured value obtained by the analog electrical parameter measuring device when it receives the third preset electrical signal. The second electrical parameter measurement value has high precision and high reliability and can be used as a reference benchmark for calibration.

[0089] The following combination Figure 11The functional block diagram of the signal processing system is shown below. Specifically, firstly, the connection between the analog electrical parameter measuring device 200 and the analog signal output module 120 is established, and the connection between the analog signal input module 110 and the analog signal output module 120 is disconnected. At this time, the analog signal output module 120 is controlled to output the third preset electrical signal one by one in a preset order, and only one value is output at a time, which is maintained for a period of time so that the analog electrical parameter measuring device 200 can receive it. After that, the analog electrical parameter measuring device 200 obtains the second electrical parameter measurement value, which can be used as a reference, based on the received third preset electrical signal. Finally, the controller 130 receives the second preset electrical parameter value and the second electrical parameter measurement value, and then analyzes each pair of data (including a second preset electrical parameter value and a second electrical parameter measurement value) to calibrate the signal output by the analog signal output module 120.

[0090] In some embodiments, such as Figure 12 As shown, the specific implementation process of step S1030 includes the following steps S1210 to S1220.

[0091] Step S1210: Establish a third mapping relationship between the second preset electrical parameter value and the second electrical parameter measurement value.

[0092] Step S1220: According to the third mapping relationship, calibrate the signal output by the analog signal output module.

[0093] Specifically, each pair of data (x3) i y3 i This forms a mapping relationship, where x3 i For the i-th second preset electrical parameter value, y3 i Let be the measured value of the i-th second electrical parameter. Based on all data points, a third mapping relationship is established. In subsequent operation, when the analog signal output module outputs the original acquired value, the calibrated electrical parameter value can be calculated through the second mapping relationship, thereby achieving systematic error compensation for the analog signal output module and improving its measurement accuracy.

[0094] In some embodiments, such as Figure 13 As shown, the specific implementation process of step S1220 may include the following steps S1310 to S1320.

[0095] Step S1310: Fit the third mapping relationship using the third preset fitting model to obtain the third fitting curve.

[0096] Step S1320: Based on the third fitting curve, calibrate the signal output by the analog signal output module.

[0097] Among them, the third preset fitting model is compared with a predefined fitting model, such as a linear model or a quadratic polynomial model.

[0098] A predefined third preset fitting model is selected, and after fitting the third mapping relationship, the parameters of the third preset fitting model are solved using the least squares method, weighted regression, or other optimization algorithms to obtain the third fitting curve. In subsequent operation, when the analog signal output module sequentially outputs the third preset electrical signal within the second target interval, the second preset electrical parameter values ​​corresponding to the third preset electrical signal are calibrated using the third fitting curve to obtain the calibrated electrical parameter values. This achieves systematic error compensation for the analog signal output module and improves its measurement accuracy.

[0099] Step S1040: Control the calibrated analog signal output module to sequentially output the fourth preset electrical signal of the second target interval to the analog signal input module, wherein the fourth preset electrical signal corresponds to the third preset electrical parameter value of the second target interval.

[0100] Step S1050: Acquire the fourth preset electrical signal through the analog signal input module to obtain the corresponding third electrical parameter acquisition value.

[0101] Step S1060: Calibrate the signal acquired by the analog signal input module according to the third preset electrical parameter value and the third electrical parameter acquisition value.

[0102] The fourth preset electrical signal is a set of discrete, ordered electrical signal values ​​predefined by the user within the second target interval. Each fourth preset electrical signal can be uniformly or non-uniformly distributed. The division method of the fourth preset electrical signal can be the same as or different from that of the third preset electrical signal. When the division methods of the fourth preset electrical signal and the third preset electrical signal are the same, the number of signals and the signal distribution logic of the fourth preset electrical signal and the third preset electrical signal are the same; conversely, when the division methods of the fourth preset electrical signal and the third preset electrical signal are different, the number of signals or the signal distribution logic of the fourth preset electrical signal and the third preset electrical signal are different.

[0103] The third preset electrical parameter value is a set of desired physical quantity values ​​pre-set within the second target interval, used to guide the analog signal output module to generate the corresponding electrical signal. The fourth preset electrical signal corresponds sequentially to the third preset electrical parameter value in the second target interval, meaning that there is a one-to-one mapping relationship, and each third preset electrical parameter value is used as an instruction to drive the analog signal output module to generate a fourth preset electrical signal.

[0104] The third electrical parameter acquisition value refers to the digital measurement result obtained by the analog signal input module after sampling and analog-to-digital conversion of the third preset electrical signal upon receiving the fourth preset electrical signal. The generated digital measurement result is read and stored by the controller.

[0105] At this time, the functional block diagram of the signal processing system 100 is as follows: Figure 7 As shown. Specifically, the connection between the analog electrical parameter measuring device 200 and the analog signal output module 120 is first disconnected. Then, using the analog signal output module 120, which has completed output channel calibration (i.e., has established a high-precision mapping relationship between "raw quantized value → real physical quantity"), the fourth preset electrical signal is output one by one in a preset order, with only one value output at a time, and the value is held for a period of time so that the calibrated analog signal input module 110 can receive it. The analog signal input module 110 measures the fourth preset electrical signal generated by the analog signal output module 120 and obtains the third electrical parameter acquisition value. Then, by analyzing each pair of data (including a third electrical parameter acquisition value and a third preset electrical parameter value), the signal acquired by the analog signal input module 110 can be calibrated.

[0106] In some embodiments, such as Figure 14 As shown, the specific implementation process of step S1060 includes the following steps S1410 to S1420.

[0107] Step S1410: Establish a fourth mapping relationship between the third preset electrical parameter value and the third electrical parameter acquisition value.

[0108] Step S1420: According to the fourth mapping relationship, calibrate the signal acquired by the analog signal input module.

[0109] Specifically, each pair of data (x4) i y4 i ) form a mapping relationship, where x4 i For the i-th third preset electrical parameter value, y4 i Let be the i-th third electrical parameter acquisition value. Based on all data points, a fourth mapping relationship is established. In subsequent operation, when the analog signal output module outputs the original acquisition value, the calibrated electrical parameter value can be calculated through the fourth mapping relationship, thereby achieving systematic error compensation for the analog signal input module and improving its measurement accuracy.

[0110] In some embodiments, such as Figure 15 As shown, the specific implementation process of step S1420 may include the following steps S1510 to S1520.

[0111] Step S1510: Use the fourth preset fitting model to fit the fourth mapping relationship to obtain the fourth fitting curve.

[0112] Step S1520: Based on the fourth fitting curve, calibrate the signal output by the analog signal output module.

[0113] The fourth preset fitting model is a predefined fitting model, such as a linear model or a quadratic polynomial model. The fourth preset fitting model can be the same as or different from the third preset fitting model.

[0114] A predefined fourth preset fitting model is selected to fit the fourth mapping relationship. Then, the parameters of the fourth preset fitting model are solved using the least squares method, weighted regression, or other optimization algorithms to obtain the fourth fitting curve. In subsequent operation, when the analog signal output module sequentially outputs the fourth preset electrical signal within the second target interval, the third preset electrical parameter value corresponding to the fourth preset electrical signal is calibrated using the second fitting curve. This yields the calibrated electrical parameter value, thereby achieving systematic error compensation for the analog signal output module and improving its measurement accuracy.

[0115] In this way, the calibrated, high-reliability analog output channel is used as an "internal standard table" to identify and correct the output error of the analog signal input module 110, achieving closed-loop calibration at the input end. Secondly, this calibration process eliminates the need for the analog electrical parameter measuring device 200, reducing cost and complexity. Furthermore, since this embodiment calibrates the analog signal output module 120 first, and then the analog signal input module 110, it is particularly suitable for signal processing systems 100 where the number of input terminals of the analog signal input module 110 is greater than the number of output terminals of the analog signal output module 120, thereby reducing the use of the analog electrical parameter measuring device 200 and improving work efficiency.

[0116] Furthermore, the above process calibrates both the analog input and output signals, which improves accuracy. Moreover, since only one analog electrical parameter measuring device is used to calibrate both signals, procurement and maintenance costs are low, and the complexity of carrying and deploying the equipment is reduced. Simultaneously, the entire calibration process is largely automated, minimizing manual intervention and reducing calibration errors caused by wiring mistakes, data recording deviations, etc.

[0117] To maintain high accuracy in the input and output of voltage signals and ensure the quality of semiconductor equipment processes, this embodiment further sets a third preset electrical signal covering the full range of 0-15V (this embodiment uses 2...). 12That is, a resolution of 4096 levels), with calibration points set in a step size of 15 / 4095V (approximately equal to {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V}, uniformly distributed across the entire range. The fourth preset electrical signal also covers the full range of 0-15V (in this embodiment, 2...). 12 (i.e., 4096 levels of resolution), and set calibration points uniformly distributed across the entire range with a step size of 15 / 4095V (i.e., approximately equal to {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V}).

[0118] Furthermore, by receiving a third preset voltage signal {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V} through an analog electrical parameter measuring device, and based on the mapping relationship between the measurement results of the analog electrical parameter measuring device and the electrical parameter values ​​corresponding to the second preset electrical signal, the following can be obtained: the actual output value corresponding to 0mV output by the analog signal output module; the actual output value corresponding to 3.663mV output by the analog signal output module; ...; and the actual output value corresponding to 15V output by the analog signal output module.

[0119] Subsequently, since the actual output value corresponding to the signal output by the analog signal output module can be obtained, the fourth preset electrical signal {0mV, 3.663mV, 7.326mV, 10.989mV, ..., 14996.337mV, 15V} can be output using the analog signal output module. Based on the mapping relationship between the electrical parameter values ​​corresponding to the fourth preset electrical signal and the acquisition results of the analog signal input module, the following can be obtained: the actual acquisition value corresponding to 0mV received by the analog signal input module; the actual acquisition value corresponding to 3.663mV received by the analog signal input module; ...; and the actual acquisition value corresponding to 15V received by the analog signal input module.

[0120] Thus, this comprehensive, high-density calibration strategy ensures that the analog signal input module and analog signal output module have high-precision response capability under all voltage conditions required by the semiconductor process, thereby significantly improving the stability, consistency, repeatability and process robustness of the semiconductor process and meeting the stringent requirements of advanced processes for precision process control.

[0121] This application also provides a non-volatile computer-readable storage medium storing computer-executable instructions that are executed by one or more processors, for example, executing the instructions described above. Figure 3 , Figure 5 , Figure 6 ,Figure 8 to Figure 10 , Figure 12 to Figure 15 The method and steps.

[0122] This application also provides a computer program product, including a computing program stored on a non-volatile computer-readable storage medium. The computer program includes program instructions that, when executed by a computer, cause the computer to perform an analog signal calibration method suitable for semiconductor devices as described in any of the above method embodiments, for example, performing the above-described... Figure 3 , Figure 5 , Figure 6 , Figure 8 to Figure 10 , Figure 12 to Figure 15 The method and steps.

[0123] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

[0124] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, and the steps can be implemented in any order. Those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A method for calibrating analog signals for semiconductor devices, applied to signal processing systems and analog electrical parameter measuring devices, characterized in that, The signal processing system includes an analog signal input module and an analog signal output module electrically connected to the analog signal input module. The analog signal calibration method includes: The control analog signal output module sequentially outputs the first preset electrical signal of the first target interval to the analog signal input module and the analog electrical parameter measuring device; The first preset electrical signal is acquired through the analog signal input module to obtain the corresponding first electrical parameter acquisition value; The first preset electrical signal is measured by the analog electrical parameter measuring device to obtain the corresponding first electrical parameter measurement value; The signal acquired by the analog signal input module is calibrated based on the first electrical parameter acquisition value and the first electrical parameter measurement value. The analog signal output module is controlled to sequentially output a second preset electrical signal of the first target interval to the calibrated analog signal input module, wherein the second preset electrical signal corresponds sequentially to the first preset electrical parameter value of the first target interval; The second preset electrical signal is acquired by the calibrated analog signal input module to obtain the corresponding second electrical parameter acquisition value; The signal output by the analog signal output module is calibrated based on the first preset electrical parameter value and the second electrical parameter acquisition value.

2. The analog signal calibration method according to claim 1, characterized in that, The step of calibrating the signal acquired by the analog signal input module based on the first electrical parameter acquisition value and the first electrical parameter measurement value includes: Establish a first mapping relationship between the first electrical parameter acquisition value and the first electrical parameter measurement value; The signals acquired by the analog signal input module are calibrated according to the first mapping relationship.

3. The analog signal calibration method according to claim 1 or 2, characterized in that, The step of calibrating the signal output by the analog signal output module based on the first preset electrical parameter value and the second electrical parameter acquisition value includes: Establish a second mapping relationship between the first preset electrical parameter value and the second electrical parameter acquisition value; The signal output by the analog signal output module is calibrated according to the second mapping relationship.

4. A method for calibrating analog signals for semiconductor devices, applied to signal processing systems and analog electrical parameter measuring devices, characterized in that, The signal processing system includes an analog signal input module and an analog signal output module electrically connected to the analog signal input module. The analog signal calibration method includes: The control analog signal output module sequentially outputs a third preset electrical signal of the second target interval to the analog electrical parameter measuring device, wherein the third preset electrical signal corresponds sequentially to the second preset electrical parameter value of the second target interval; The third preset electrical signal is measured by the analog electrical parameter measuring device to obtain the corresponding second electrical parameter measurement value; The signal output by the analog signal output module is calibrated based on the second preset electrical parameter value and the second measured electrical parameter value. The controlled calibrated analog signal output module sequentially outputs the fourth preset electrical signal of the second target interval to the analog signal input module, wherein the fourth preset electrical signal corresponds sequentially to the third preset electrical parameter value of the second target interval; The analog signal input module acquires the fourth preset electrical signal to obtain the corresponding third electrical parameter acquisition value; The signal acquired by the analog signal input module is calibrated based on the third preset electrical parameter value and the third electrical parameter acquisition value.

5. The analog signal calibration method according to claim 4, characterized in that, The step of calibrating the signal output by the analog signal output module based on the second preset electrical parameter value and the second measured electrical parameter value includes: Establish a third mapping relationship between the second preset electrical parameter value and the second measured electrical parameter value; The signal output by the analog signal output module is calibrated according to the third mapping relationship.

6. The analog signal calibration method according to claim 4 or 5, characterized in that, The step of calibrating the signal acquired by the analog signal input module based on the third preset electrical parameter value and the third electrical parameter acquisition value includes: Establish a fourth mapping relationship between the third preset electrical parameter value and the third electrical parameter acquisition value; The signals acquired by the analog signal input module are calibrated according to the fourth mapping relationship.

7. A controller, characterized in that, include: At least one processor and memory; The memory is coupled to the processor and is used to store instructions or programs that, when executed by the at least one processor, cause the at least one processor to perform an analog signal calibration method for a semiconductor device as described in any one of claims 1-6.

8. A signal processing system, characterized in that, include: Analog signal input module; Analog signal output module; And, as described in claim 7, the controller is electrically connected to the analog signal input module and the analog signal output module respectively, so as to control the analog signal output module to output a signal or receive the signal collected by the analog signal input module.

9. The signal processing system according to claim 8, characterized in that, The signal processing system also includes a switching module; The switching module is electrically connected to the analog signal input module, the analog signal output module and the controller respectively; The switching module is controlled by the controller to establish or disconnect the electrical connection between the analog signal input module and the analog signal output module.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed, implements the analog signal calibration method for semiconductor devices as described in any one of claims 1-6.

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