Compact large-light-spot high-precision white light water-cooling diaphragm device

Abstract

The invention discloses a compact large-light-spot high-precision white light water-cooling diaphragm device, which is characterized by comprising a vacuum cavity component, a core component and a stability supporting component, the core component comprises light limiting assemblies and driving mechanisms, the light limiting assemblies comprise two vertical light limiting assemblies and two horizontal light limiting assemblies, the driving mechanisms comprise two vertical driving mechanisms and two horizontal driving mechanisms, each vertical light limiting assembly is connected with one vertical driving mechanism, and each horizontal light limiting assembly is connected with one horizontal driving mechanism; the vacuum cavity component is installed on the stability supporting component. A core component is arranged in the vacuum cavity component, the vertical light limiting component is connected with a vertical supporting component of the vacuum cavity component, the horizontal light limiting component is connected with a horizontal supporting component of the vacuum cavity component, and the driving mechanism is connected with a cavity door component on the vacuum cavity component. The vacuum cavity part is used for providing a vacuum environment for incident high-energy X-rays; and the driving mechanism is used for driving the light limiting assembly to move to modulate the spot size of the high-energy X-ray.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of synchrotron radiation, and relates to a compact large-spot high-precision white light water-cooled light barrier device, which is applied to a beam line of a synchrotron radiation device and is used in an ultrahigh vacuum environment. In a limited space in the beam direction, four light limiting components are used to realize the large-spot size conditioning problem under the high-energy high-heat load requirement of the HEPS fourth-generation light source, so as to reduce the total heat load of downstream optical equipment and protect the downstream optical equipment. BACKGROUND

[0002] At present, the first high-energy synchrotron radiation light source (HEPS) under construction in China is one of the fourth-generation synchrotron radiation light sources with the highest brightness in the world, which can emit light 100 billion times brighter than the sun, and is helpful for deeper analysis of the microstructure and evolution mechanism of matter. The HEPS mainly comprises an accelerator, beam lines, experimental stations and related supporting facilities. The first batch of beam line stations of the HEPS include 14 public beam line stations such as a hard X-ray nanometer probe line station, an engineering material line station and a hard X-ray coherent scattering line station, and one optical test beam line. One to three insertions are arranged in each beam line, and the length of each device in the beam direction in the beam line is also strictly controlled due to the limitation of the beam space in the beam line. For example, the hard X-ray imaging line station needs to meet the requirements of three types of insertions with different performance, i.e., a conventional wiggler, a low-temperature undulator and a mango wiggler. The peak power density, total power and required spot size of different insertions are different. In view of different requirements of different users on the performance of synchrotron radiation, different spot sizes need to be modulated in the limited space by a white light water-cooled light barrier on the beam line, and different peak power densities and total powers can be carried.

[0003] The commonly used white light water-cooled light barrier in the synchrotron radiation device is a four-blade type, that is, the modulation of the light spot is realized by four independent blades. Usually, the heat load required to be carried by this type of light barrier is small, and the light spot modulation range is also small.

[0004] In order to meet the requirements of high energy and high heat load in the fourth-generation light source, a rotating type and an L-shaped white light water-cooled light barrier are also used. These two types of light barriers have strict requirements on the performance of materials, and the commonly used material is dispersed copper which needs to be imported from abroad and the size of the material is limited. The rotating type white light water-cooled light barrier realizes the modulation of the light spot by rotating an absorber; the L-shaped white light water-cooled light barrier needs to realize the modulation of the light spot by two long absorbers, and the length in the beam direction is 2000mm.

[0005] The aforementioned four-blade white light water-cooled aperture is only suitable for small spot and low load requirements; the aforementioned rotary white light water-cooled aperture can effectively shorten the beam direction length, but due to material size limitations, the modulated spot size is limited and it is not suitable for large spot requirements; the aforementioned L-shaped white light water-cooled adjustable aperture can achieve large spot modulation, but it increases the size of the device in the beam direction and has a large number of bellows, which is not conducive to obtaining and maintaining an ultra-high vacuum environment. Summary of the Invention

[0006] To address the problems existing in the prior art, the present invention aims to provide a compact, large-spot, high-precision white light water-cooled aperture device. This invention achieves beam spot modulation through four independent blades and is applicable to three different insert types. It boasts a maximum heat load of 8300W, an energy range of 25~300keV, and achieves large-range beam spot modulation of 0~390mm (horizontal) × 0~280mm (vertical) within a beam size of 700mm.

[0007] The compact, large-spot, high-precision white light water-cooled aperture device of the present invention includes a vacuum cavity component, a core component, and a stability support component. The core component includes a light-limiting assembly and a driving mechanism, which enables the light-limiting assembly to move, thereby achieving adjustment of the adjustable aperture diameter.

[0008] The vacuum chamber component consists of a chamber door assembly, a horizontal support assembly, a vertical support assembly, and a chamber welding assembly. The chamber door assembly and the chamber welding assembly are sealed with aluminum wire to achieve the required ultra-high vacuum environment inside the chamber.

[0009] The core component consists of two sets of vertical light-limiting assemblies, two sets of vertical drive mechanisms, two sets of horizontal light-limiting assemblies, and two sets of horizontal drive mechanisms. The vertical light-limiting assemblies and vertical drive mechanisms, as well as the horizontal light-limiting assemblies and horizontal drive mechanisms, are all connected together via custom-shaped flanges. The design of these flanges reduces the size of the bellows and motor, significantly saving costs. The drive mechanisms move the light-limiting assemblies, and a flexible hinge connects them, allowing for the modulation of high-precision light spot sizes.

[0010] The stability support component comprises a support base plate, caster assembly, ion pump assembly, cavity door X-direction slide rail, cavity door rotation hinge assembly, cavity adjustment support base assembly, self-lubricating base plate, height adjustment seat, lifting ring, support damping wedge, and marble base. The design of the cavity door X-direction slide rail and cavity door rotation hinge assembly ensures smoother movement of the cavity door assembly, facilitating the installation and maintenance of core components. The marble base also ensures the stability of the device.

[0011] This invention utilizes a serpentine cooling channel machined inside the light-receiving copper component to increase heat exchange, thereby enabling it to withstand high thermal loads; the flexible hinge can provide three-dimensional angle compensation, ensuring high-precision movement of the vertical light-limiting component.

[0012] The present invention, through the design of the irregular CF25 loose flange, can effectively reduce the size of the bellows, facilitate motor selection, and save costs; the cavity door rotating hinge assembly can ensure the reliability of the vacuum cavity component sealing, which is conducive to achieving the requirements of ultra-high vacuum.

[0013] The white light water-cooled adjustable aperture described in this paper is applied to the beamline of a synchrotron radiation facility for use in an ultra-high vacuum environment. By using four independent light-limiting components, the large spot size conditioning problem under the high-energy, high-heat-load requirements of the HEPS fourth-generation light source can be solved, reducing the total heat load on downstream optical equipment and protecting it.

[0014] The advantages of this invention are mainly as follows: First, the cooling and welding copper parts in this invention are made of chromium zirconium copper, which is readily available. Furthermore, by processing serpentine cooling channels on the cooling and welding copper parts, heat exchange can be increased and high heat can be absorbed while greatly reducing the cost of use. Second, the flexible hinge is used to connect the drive mechanism and the light limiting component, which can play the role of angle compensation, thereby ensuring the high-precision movement of the vertical light limiting component. Third, the drive mechanism and the light limiting component are connected by a special-shaped CF25 loose flange, which can effectively reduce the size of the bellows, thereby reducing the vacuum force that the motor needs to overcome when driving the light limiting component, making it easier to select a motor and saving costs. Fourth, the chamber door rotation hinge assembly can ensure the reliability of the vacuum chamber components' sealing, which is beneficial for achieving ultra-high vacuum requirements. Attached Figure Description

[0015] Figure 1 This is a structural diagram of a compact, large-spot, high-precision white light water-cooled aperture device.

[0016] Figure 2 This is a front view of the vacuum cavity component structure of the present invention.

[0017] Figure 3 This is a front sectional view of the vacuum cavity component structure of the present invention.

[0018] Figure 4 This is a left sectional view of the structure of the vacuum cavity component of the present invention.

[0019] Figure 5 This is a front view of the cavity door assembly structure of the present invention.

[0020] Figure 6This is a left view of the cavity door assembly structure of the present invention.

[0021] Figure 7 This is a structural diagram of the cavity welding assembly of the present invention.

[0022] Figure 8 This is a rear view of the cavity welding assembly structure of the present invention.

[0023] Figure 9 This is a right view of the cavity welding assembly structure of the present invention.

[0024] Figure 10 This is a structural diagram of the vertical support component of the present invention.

[0025] Figure 11 This is a structural diagram of the horizontal support component of the present invention.

[0026] Figure 12 This is a structural diagram of the core components of this invention.

[0027] Figure 13 This is a structural diagram of the vertical light-limiting component of the present invention.

[0028] Figure 14 This is a front view of the vertical cooling and welding copper component structure of the present invention.

[0029] Figure 15 This is a rear view of the vertical cooling and welding copper component structure of the present invention.

[0030] Figure 16 This is a structural diagram of the vertical cooling and light-receiving copper component of the present invention.

[0031] Figure 17 This is a structural diagram of the welded component of the vertical cooling water pipe of the present invention.

[0032] Figure 18 This is a structural diagram of the vertical flexible hinge of the present invention.

[0033] Figure 19 This is a cross-sectional view of the vertical flexible hinge structure of the present invention.

[0034] Figure 20 This is a structural diagram of the vertical drive mechanism of the present invention.

[0035] Figure 21 This is a front view of the vertical drive mechanism structure of the present invention.

[0036] Figure 22 This is a structural diagram of the vertical drive tube weldment of the present invention.

[0037] Figure 23 This is a front view of the vertical drive pipe weldment structure of the present invention.

[0038] Figure 24 This is a structural diagram of the horizontal light-limiting component of the present invention.

[0039] Figure 25 This is a top view of the stability support component structure of the present invention.

[0040] Figure 26 This is a front view of the stability support component structure of the present invention.

[0041] Figure 27 This is a front view of the cavity door rotating hinge assembly structure of the present invention.

[0042] Figure 28 This is a structural diagram of the base plate weldment of the cavity door rotating hinge of the present invention.

[0043] Figure 29 This is a structural diagram of the welded component of the top plate of the cavity door rotating hinge of the present invention. Detailed Implementation

[0044] The present invention will now be described in further detail with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0045] like Figure 1 The diagram illustrates a compact, large-spot, high-precision white light water-cooled aperture device according to an example of the present invention. It mainly comprises a vacuum cavity component 1, a core component 2, and a stability support component 3. The vacuum cavity component ensures that high-energy X-rays pass through in an ultra-high vacuum environment, effectively preventing absorption of the X-rays by the air and guaranteeing high intensity and brightness. The vertical beam-limiting component in the core component 2 is fixed to the vertical support component of the vacuum cavity component 1 by screws. The horizontal beam-limiting component in the core component 2 is also fixed to the horizontal support component of the vacuum cavity component 1 by screws. The drive mechanism in the core component 2 is fixed to the cavity door component on the vacuum cavity component 1 by screws. When high-energy X-rays pass through the device, the drive mechanism moves the beam-limiting component, modulating the spot size. The vacuum cavity component 1 is located on the stability support component 3 and connected by screws. The stability of the stability support component 3 directly determines the accuracy and repeatability of the spot size.

[0046] like Figure 2 , Figure 3 and Figure 4 As shown, the vacuum chamber component 1 consists of a chamber door assembly 101, a chamber welding assembly 102, a vertical support assembly 103, and a horizontal support assembly 104. Both the vertical support assembly 103 and the horizontal support assembly 104 are fixed to the inner base plate of the chamber welding assembly 102 by screws. The chamber door assembly 101 and the chamber welding assembly 102 are sealed with aluminum wire and fixed with screws and nuts.

[0047] like Figure 5 and Figure 6As shown, the cavity door assembly 101 consists of a cavity welding front cover plate mounting plate 101a, a CF500 fixing flange 101b, a CF500 fixing flange welding pipe 101c, an M12 lifting ring 101d, and a handle 101e. One end of the CF500 fixing flange welding pipe 101c is inserted into the hole of the cavity welding front cover plate mounting plate 101a, flush with the surface of the cavity welding front cover plate mounting plate 101a, and the other end is inserted into the CF500 fixing flange 101b, and then brazed together. The M12 lifting ring 101d and the handle 101e are both fixed to the cavity welding front cover plate mounting plate 101a with screws, which facilitates the installation or opening of the cavity door assembly 101.

[0048] like Figure 7 , Figure 8 and Figure 9As shown, the cavity welding assembly 102 is welded from the cavity lower bottom plate 102a, the cavity mounting bracket welding plate 102b, the cavity left side plate 102c, the cavity right side plate 102d, the cavity rear cover plate 102e, the cavity upper top plate 102f, the cavity front flange 102g, the CF63 pipe 102h, the CF63 inner welding flange 102i, the CF63 welding plate 102j, the CF500 pipe 102k, the CF500 inner welding flange 102l, the CF150 pipe 102m, the CF150 rotating flange 102n, the CF40 pipe 102o, the CF40 inner welding flange 102p, the cavity target seat welding base 102q, the cavity lifting ring welding base 102r, the short horizontal reinforcing rib 102s, the long horizontal reinforcing rib 102t, the vertical reinforcing rib 102u, the target seat 102v, and the cavity support frame 102w.The cavity mounting bracket welding plate 102b is placed on the cavity lower base plate 102a and fixed together by welding. The vertical support assembly 103 and the horizontal support assembly 104 are fixed to the cavity mounting bracket welding plate 102b by screws. After the cavity lower base plate 102a, cavity left side plate 102c, cavity right side plate 102d, and cavity upper top plate 102f are welded into a frame, the cavity front flange 102g is inserted into this frame and fixed by welding. The cavity front flange 102g and the cavity door assembly 101 can be fixed together by screw assembly. The cavity lower base plate 102a, cavity left side plate 102c, cavity right side plate 102d, cavity rear cover plate 102e, and cavity upper top plate 102f are also fixed together by screws. A through hole is machined on the f-shaped part to allow insertion of the CF63 pipe 102h. The CF63 inner welded flange 102i is then inserted into the other end of the CF63 pipe 102h, and these parts are fixed together by welding. CF63 welding plates 102j are welded onto the lower bottom plate 102a, left side plate 102c, right side plate 102d, and upper top plate 102f of the cavity. The CF63 inner welded flange 102i and the CF63 welding plate 102j are used to connect to the core component 2 via screws. One end of the CF150 pipe 102m and the CF40 pipe 102o are respectively inserted into the corresponding through holes on the right side plate 102d of the cavity. Then, the CF150 rotating flange 102n and the CF40 rotating flange 102m are... The inner welded flange 102p is inserted into the other ends of the CF150 pipe 102m and CF40 pipe 102o, respectively, and these parts are fixed together by welding. The CF150 rotary flange 102n and CF40 inner welded flange 102p are used to connect to equipment for obtaining and detecting vacuum. One end of the CF500 pipe 102k is inserted into the corresponding through hole of the cavity rear cover plate 102e, and the other end is inserted into the CF500 inner welded flange 102l, and these parts are fixed together by welding. The CF500 inner welded flange 102l is used to connect to other equipment on the cable. The short horizontal reinforcing rib 102s, long horizontal reinforcing rib 102t, vertical reinforcing rib 102u and cavity rear cover plate 102e are also connected. 2e are welded together to provide reinforcement; cavity target base welding base 102q and cavity lifting ring welding base 102r are welded to the left side plate 102c and the right side plate 102d of the cavity, and cavity target base welding base 102q is welded to the top plate 102f and the rear cover plate 102e of the cavity. Target base 102v is evenly spot-welded to cavity target base welding base 102q for alignment and calibration, making the device more accurate when in place; cavity lifting ring welding base 102r is used to connect lifting tools to facilitate the handling and placement of cavity welding assembly 102; cavity support frame 102w is welded together with cavity bottom plate 102a for connection with stability support component 3.

[0049] like Figure 10As shown, the vertical support assembly 103 consists of a left side plate welded bracket 103a, a right side welded bracket 103b, a vertical support base plate 103c, a vertical support top plate 103d, a vertical support back plate 103e, a vertical support stiffener 103f, and a vertical top plate reinforcing rib 103g. The bottom of the left side plate welding bracket 103a and the right side welding bracket 103b are connected to the bottom plate 103c of the vertical bracket, the top is connected to the top plate 103d of the vertical bracket, and the back is connected to the back plate 103e of the vertical bracket. The vertical bracket stiffener 103f is connected to the bottom plate 103c of the vertical bracket and the left side plate welding bracket 103a, the vertical bracket stiffener 103f is connected to the bottom plate 103c of the vertical bracket and the right side welding bracket 103b, the vertical top plate stiffener 103g is connected to the top plate 103d of the vertical bracket and the left side plate welding bracket 103a, the vertical top plate stiffener 103g is connected to the top plate 103d of the vertical bracket and the right side welding bracket 103b, and the vertical bracket stiffener 103f and the vertical top plate stiffener 103g play a reinforcing role. The assembled vertical support assembly 103 is fixed to the cavity mounting bracket welding plate 102b of the cavity welding assembly 102 by screws.

[0050] like Figure 11 As shown, the horizontal support assembly 104 is composed of a top plate 104a, two side plates 104b, two long side plates 104c, and a bottom plate 104d, which are welded together. The bottom plate 104d is fixed to the cavity mounting bracket welding plate 102b of the cavity welding assembly 102 by screws.

[0051] like Figure 12 As shown, the core component 2 consists of two sets of vertical light-limiting components 201, two sets of vertical drive mechanisms 202, two sets of horizontal light-limiting components 203, and two sets of horizontal drive mechanisms 204. The vertical light-limiting components 201 and vertical drive mechanisms 202, as well as the horizontal light-limiting components 203 and horizontal drive mechanisms 204, are all connected together by screws. The drive mechanisms drive the light-limiting components to move, thereby modulating a high-precision light spot size. Except for the size difference, the vertical drive mechanisms 202 and horizontal drive mechanisms 204 have the same design principle, as do the horizontal light-limiting components 203 and horizontal drive mechanisms 204.

[0052] like Figure 13As shown, the vertical light-limiting component 201 consists of a vertical cooling welded copper part 201a, a vertical light-limiting tungsten part 201b, a vertical hinge connecting seat 201c, a vertical cooling water pipe welded part 201d, a vertical flexible hinge 201e, a vertical splicing base plate 201f, two vertical splicing side plates 201g, a vertical absorber adapter plate welded part 201h, and a vacuum-insulated vertical slide 201i. The vertical cooling welded copper component 201a and the vertical light-limiting tungsten 201b are connected side-by-side along the light transmission direction by screws. After connection, the vertical absorber adapter plate weldment 201h is then connected to both sides by screws. Finally, the vertical absorber adapter plate weldment 201h is fixedly connected to the vertical slide table 201i in the vacuum. The bottom of the fixed vertical cooling welded copper component 201a and the vertical light-limiting tungsten 201b is fixedly connected to the side of the vertical hinge connecting seat 201c by screws. The bottom surface of the vertical hinge connecting seat 201c contacts the upper end surface of the vertical flexible hinge 201e and is fixedly connected by screws. The bottom surface of the vertical flexible hinge 201e contacts the upper end surface of the vertical splicing base plate 201f and is fixedly connected by screws. The vertical splicing base plate 201f is fixed to two vertical splicing side plates 201g on both sides by screws. The vertical cooling water pipe welded component 201d is inserted into the input and output holes of the serpentine cooling water channel of the vertical cooling welded copper component 201a and connected together by electron beam welding, thereby realizing the bearing of high energy and high heat load. The vertical cooling water pipe welded component 201d is also fixed to two vertical splicing side plates 201g by screws. After the vertical light limiting tungsten 201b is installed, it is 0.2mm higher than the vertical cooling welded copper component 201a. It is mainly used for light limiting and reducing stray light at the edge of the light spot. The vertical slide 201i in the vacuum plays a guiding role and is fixed to the vertical support component 103 by screws.

[0053] like Figure 14 and Figure 15 As shown, the vertically cooled welded copper component 201a consists of a vertically cooled welded copper component 201a_1 and a vertically cooled copper welding plate 201a_2. The serpentine cooling channels machined inside the vertically cooled welded copper component 201a_1 are used to increase heat exchange and bear high heat loads, such as... Figure 16 The vertical cooling copper brazing plate 201a_2 is embedded in the vertical cooling light-receiving copper component 201a_1 and fixed together by electron beam welding. The three protruding columns inside the vertical cooling light-receiving copper component 201a_1 are used to strengthen the welding with the vertical cooling copper brazing plate 201a_2 and prevent the vertical cooling light-receiving copper component 201a_1 and the vertical cooling copper brazing plate 201a_2 from protruding and deforming due to excessive water pressure in the serpentine cooling channel.

[0054] like Figure 17As shown, the vertical cooling water pipe welded component 201d consists of two vertical cooling water pipes 201d_1, a flange welding plate 201d_2, and a CF25 cooling pipe welding flange 201d_3. The vertical cooling water pipes 201d_1 pass through the through holes of the CF25 cooling pipe welding flange 201d_3 and connect to the cooling water channels and cooling water circulation system of the vertical cooling welded copper component 201a. The CF25 cooling pipe welding flange 201d_3 is embedded in the holes of the flange welding plate 201d_2. Finally, the three components are fixedly connected by welding. The side of the flange welding plate 201d_2 is finally fixedly connected to the two vertical splicing side plates 201g by screws.

[0055] like Figure 18 and Figure 19 As shown, the vertical flexible hinge 201e consists of four hinge mounting bases 201e_1, a first hinge shaft 201e_2, a second hinge shaft 201e_3, a coated bushing 201e_4, a shaft C-type retaining ring 201e_5, and a screw assembly 201e_7. The first hinge shaft 201e_2 is tightly fitted into the perforated second hinge shaft 201e_3 to form a cross shape. Coated bushings 201e_4 are then tightly fitted onto each end of the two hinge shafts. A perforated hinge mounting base 201e_1 is then installed with a clearance fit (the coated bushing 201e_4 passes through the hole in the hinge mounting base 201e_1; the coating on the coated bushing 201e_4 provides self-lubrication, allowing it to rotate within the hole). The shafts are then secured with a C-shaped retaining ring 201e_5. Finally, screws are used to connect the shafts to the vertical flexible rotating hinge. Chain 201e_6 is fixed, thus enabling rotation in three dimensions (the first hinge axis 201e_2 achieves one dimension; the second hinge axis 201e_3 achieves one dimension; the vertical flexible rotation hinge 201e_6 achieves one dimension, and the milled thin sheet in the middle allows for small-angle rotation; because there is a slide rail inside the vacuum and another slide rail outside the vacuum, if the two slide rails are not on the same line or the same plane, the drive mechanism will cause the light-limiting component to jam, hence the need for three-dimensional rotation; the three-dimensional rotation can simultaneously compensate for errors in vertical or horizontal installation or machining). When the vertical drive mechanism 202 drives the vertical light-limiting component 201 to move, the angle can be finely adjusted while ensuring motion accuracy, preventing the light-limiting component from jamming during movement.

[0056] like Figure 20 and Figure 21As shown, the vertical drive mechanism 202 consists of a vertical support base 202a, a lead screw end fixing plate 202b, a vertical guide rail assembly 202c, a reading head assembly 202d, a drive rod clamping plate 202e, a motor end fixing base 202f, a coupling 202g, a handwheel 202h, a stepper motor 202i, a worm gear reducer 202j, a motor mounting base 202k, a limit switch assembly 202l, a lead screw assembly 202m, a guide rail lead screw connecting plate 202n, a vertical corrugated pipe weldment 202o, a vertical drive pipe weldment 202p, a grating ruler 202q, and a K-type thermocouple 202r. The motor end mounting base 202f is fixed to the vertical support base 202a with screws. Then, one end of the motor mounting base 202k is fixed to the motor end mounting base 202f and the vertical support base 202a with screws, and the other end is fixed to the worm gear reducer 202j with screws. The interior of the motor mounting base 202k is hollowed out to accommodate the coupling 202g. The guide rails in the screw end mounting plate 202b and the two sets of vertical guide rail assemblies 202c are fixed to the vertical support base 202a with screws. The guide rail and screw are connected... The connecting plate 202n is fixed on the slider of the two sets of vertical guide rail assemblies 202c. The first flange 202m_1 at one end of the lead screw assembly 202m is fixed to the motor end fixing seat 202f and the vertical support seat 202a by screws. One end of the lead screw shaft 202m_2 is connected to the first flange 202m_1. The lead screw shaft 202m_2 of the lead screw assembly 202m passes through the holes of the motor end fixing seat 202f, the guide rail lead screw connecting plate 202n, and the lead screw end fixing plate 202b. The other end of the lead screw shaft 202m_2 is connected to the third flange 202c. The second flange 202m_3 of the lead screw assembly 202m is connected to the guide rail lead screw connecting plate 202n by screws. The third flange 202m_4 of the lead screw assembly 202m is fixed to the lead screw end fixing plate 202b by screws. The shaft A of one end of the stepper motor 202i is inserted into the hole of the handwheel 202h. There is a threaded hole on the hole wall. The set screw pushes the shaft A through the threaded hole to fix it together. The shaft B of the other end of the stepper motor 202i is inserted into the hole of the worm gear reducer 202j. There are threaded holes. The set screws pass through the threaded holes and push onto the shaft B. The stepper motor 202i and the worm gear reducer 202j are then connected and fixed together by screws. The shaft of the worm gear reducer 202j passes through the hole of the motor mounting base 202k and is inserted into the hole at one end of the coupling 202g. The hole at the other end of the coupling 202g is inserted into the end shaft of the lead screw 202m. There are two threaded holes on the hole wall. The set screws are respectively inserted into the threaded holes and push onto the shaft of the worm gear reducer 202j and the end shaft of the lead screw 202m to fix them together.When the handwheel 202h rotates, it can drive the shaft of the stepper motor 202i to rotate, or energize the stepper motor 202i to make its shaft rotate, thereby driving the worm gear reducer 202j to rotate, causing the lead screw shaft 202m_2 of the lead screw assembly 202m to rotate. The gear on the lead screw shaft 202m_2 drives the second flange 202m_3 to move. The guide rail lead screw connecting plate 202n, which is indirectly fixed to the second flange 202m_3, can move linearly under the constraint of the vertical guide rail assembly 202c. The worm gear reducer 2... 02j itself has a self-locking function, which can prevent the vacuum suction from driving the guide rail screw connecting plate 202n to move when the power is off; the vertical drive tube welded part 202p passes through the drive rod clamping plate 202e and is pressed tightly against the guide rail screw connecting plate 202n by the drive rod clamping plate 202e, and the vertical drive tube welded part 202p and the drive rod clamping plate 202e are fixed together by spot welding, and then the drive rod clamping plate 202e is fixed to the guide rail screw connecting plate 202n by screws. When the guide rail screw connecting plate 202n moves linearly... When the vertical drive tube weldment 202p is in motion, it will also be driven to move. The vertical drive tube weldment 202p passes through the vertical bellows weldment 202o and is fixed together with screws. When the vertical drive tube weldment 202p moves, the vertical bellows weldment 202o will be compressed and stretched. The limit switch assembly 202l is fixed to the vertical support base 202a with screws to limit the movement stroke and protect the vertical bellows weldment 202o for safe use. The reading head assembly 202d is fixed to the guide rail screw connecting plate 202n with screws. The grating ruler 202q is attached to the vertical support 202a. The reading head assembly 202d is a moving part, and the grating ruler 202q is a fixed part. The installation of the reading head assembly 202d and the grating ruler 202q can ensure the movement accuracy of the light limiting component. The vertical drive tube weldment 202p and the K-type thermocouple 202r are fixed with screws. The K-type thermocouple 202r can be used to detect the temperature of the light limiting component to prevent damage to the light limiting component due to excessive temperature. Finally, the flange on the vertical corrugated pipe weldment 202o is fixedly connected to the flange of the cavity welding assembly 102 with screws.

[0057] like Figure 22 and Figure 23As shown, the vertical drive tube weldment 202p consists of a CF25 loose flange 202p_1, a CF25 loose shoulder ring 202p_2, a vertical drive tube 202p_3, a CF40 flange 202p_4 for the drive rod, and a vertical thermocouple threading tube 202p_5. The CF25 loose shoulder ring 202p_2, the vertical drive tube 202p_3, and the CF40 flange 202p_4 for the drive rod are fixed by brazing; three vertical thermocouple threading tubes 202p_5 are evenly spot-welded around the vertical drive tube 202p_3. The vertical thermocouple threading tube 202p_5 is used to thread the extension wire of the K-type thermocouple 202r, ensuring neat wiring. The irregular CF25 loose flange 202p_1 is a spliced ​​structure. When the vertical drive tube weldment 202p passes through the vertical bellows weldment 202o, the irregular CF25 loose flange 202p_1 can be removed, effectively reducing the size of the bellows and the vacuum force that needs to be overcome when the motor drives the light-limiting component, thus reducing the size of the stepper motor. The CF25 cooling tube welded flange 201d_3 is connected to the irregular CF25 loose flange 202p_1 with screws.

[0058] like Figure 24 As shown, the horizontal light-limiting component 203 comprises a horizontal cooling welded copper part 203a, a horizontal light-limiting tungsten part 203b, a horizontal hinge connecting seat 203c, a horizontal cooling water pipe welded part 203d, a horizontal flexible hinge 203e, a horizontal splicing base plate 203f, two horizontal splicing side plates 203g, a spring 203h, a horizontal absorber adapter plate welded part 203i, and a vacuum-insulated horizontal slide 203j. The horizontal light-limiting component 203 and the vertical light-limiting component 201 have the same connection method. The horizontal cooling welded copper component 203a, the horizontal light-limiting tungsten component 203b, the horizontal hinge connector 203c, the horizontal cooling water pipe welded component 203d, the horizontal flexible hinge 203e, the spring 203h, the horizontal splicing base plate 203f, the two horizontal splicing side plates 203g, the horizontal absorber adapter plate welded component 203i, and the vacuum-insulated horizontal slide 203j are all fixed together with screws. The two ends of the spring 203h are respectively fixed to the horizontal hinge connector 203c and the horizontal flexible hinge 203e. The horizontal hinge connector 203... c and the horizontal flexible hinge 203e are tightly connected together to ensure high precision during the movement of the horizontal light limiting component 203; the horizontal cooling welded copper part 203a and the horizontal cooling water pipe welded part 203d are connected together by electron beam welding to achieve the bearing of high energy and high heat load; the horizontal light limiting tungsten 203b is 0.2mm higher than the horizontal cooling welded copper part 203a after installation, and is mainly used for light limiting to reduce stray light at the edge of the light spot; the horizontal slide 203j in the vacuum plays a guiding role and is fixed to the horizontal support component 104 by screws.

[0059] like Figure 25 and Figure 26As shown, the stability support component 3 consists of a support base plate 301, a caster assembly 302, an ion pump assembly 303, a cavity door X-direction slide rail 304, a cavity door rotation hinge assembly 305, a cavity adjustment support seat assembly 306, a self-lubricating base plate 307, a height adjustment seat 308, a lifting ring 309, a support and shock-absorbing wedge block 310, and a marble base 311. Both the caster assembly 302 and the lifting ring 309 are fixed to the marble base 311 with screws, allowing the marble base 311 to be moved manually or by a crane. The ion pump assembly 303 is also fixed to the support base plate 301 with screws. The pump in the ion pump assembly 303 is connected to the cavity welding assembly 102 to achieve the high vacuum requirement. The cavity door X-direction slide rail 304 is fixed to the support base plate 301 with screws, and the cavity door rotation hinge assembly 305 is fixed to the cavity door X-direction slide rail 304 with screws, enabling the cavity door rotation hinge assembly 305 to move in the horizontal direction. The self-lubricating base plate 307 is fixed to the support base plate 301 with screws, and the vacuum cavity component 1 rests on the self-lubricating base plate 307. The vacuum chamber component 1 is fixed to the support base plate 301 with screws. The set screw in the cavity adjustment support seat assembly 306 contacts the vacuum chamber component 1. The self-lubricating base plate 307 is composed of copper alloy and graphite. Adjusting the set screw makes it easier to adjust the vacuum chamber component 1 in two directions, thereby positioning the vacuum chamber component 1 in the required position. The height adjustment seat 308 is located on the marble base 311, and the support base plate 301 is located on the height adjustment seat 308. The height adjustment seat 308 has a through hole in the middle. The support base plate 301 is fixed to the marble base 311 by screws and nuts. The marble base 311 rests on the support damping wedge 310, which is located on the ground. The marble base 311 is fixed to the ground by the expansion bolt assembly. The cavity door rotating hinge assembly 305 is connected to the cavity door assembly 101 by screws. The cavity door X-direction slide rail 304 makes the movement of the cavity door assembly 101 more convenient and faster.

[0060] like Figure 27As shown, the cavity door rotating hinge assembly 305 comprises a cavity door rotating hinge base plate weldment 305a, a rotating hinge shaft 305b, a cavity door rotating hinge top plate weldment 305c, a cavity door Y-direction slide rail 305d, a cavity door connecting base plate 305e, and a cavity door connecting side plate 305f. The cavity door Y-direction slide rail 305d is fixed to the cavity door rotating hinge top plate weldment 305c with screws. The cavity door connecting base plate 305e is located on the cavity door Y-direction slide rail 305d and fixed with screws. The side of the cavity door connecting base plate 305e and the cavity door connecting side plate 305f are fixedly connected with screws. The rotating hinge shaft 305b passes through the holes in the cavity door rotating hinge base plate weldment 305a and the cavity door rotating hinge top plate weldment 305c, and is welded to the cavity door rotating hinge base plate using set screws. The cavity door is fixed by component 305a, and the top plate welded component 305c of the cavity door rotating hinge can rotate around the rotating hinge axis 305b; the cavity door connecting side plate 305f is fixedly connected to the cavity door assembly 101 by screws; the cavity door Y-direction slide rail 305d can adjust the distance of the cavity door assembly 101, and the rotating hinge axis 305b can realize the small-angle rotation of the cavity door assembly 101. When the cavity door assembly 101 and the cavity welding assembly 102 are sealed with aluminum wire, the sealing reliability is ensured, thereby achieving the ultra-high vacuum requirements.

[0061] like Figure 28 As shown, the cavity door rotating hinge base plate weldment 305a consists of a cavity door rotating hinge base plate 305a_1 and three first cavity door rotating hinge connecting blocks 305a_2. The three first cavity door rotating hinge connecting blocks 305a_2 are embedded in three holes in the cavity door rotating hinge base plate 305a_1 and welded together. The middle hole of the first cavity door rotating hinge connecting block 305a_2 is used for the rotating hinge shaft 305b to pass through. The first cavity door rotating hinge connecting block 305a_2 is machined with a threaded hole. A set screw passes through the threaded hole of the first cavity door rotating hinge connecting block 305a_2 and presses against the rotating hinge shaft 305b, so that the two parts are connected together.

[0062] like Figure 29 As shown, the cavity door rotating hinge top plate weldment 305c consists of a cavity door rotating hinge top plate 305c_1 and three second cavity door rotating hinge connecting blocks 305c_2. The three second cavity door rotating hinge connecting blocks 305c_2 are embedded in three holes in the cavity door rotating hinge top plate 305c_1 and welded together. The middle hole of the second cavity door rotating hinge connecting block 305c_2 is used to pass through the rotating hinge shaft 305b and rotate around it.

[0063] The device can also be made into an L-shaped structure. However, compared with the structure of the present invention, although the L-shaped aperture effectively shortens the lateral space occupied by the beamline, it increases the size of the device in the beam direction. For devices with low requirements for the space size in the beam direction, an L-shaped aperture can be used.

[0064] Although specific embodiments of the invention have been disclosed for illustrative purposes and to aid in understanding and implementing the invention, those skilled in the art will understand that various substitutions, variations, and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the content disclosed in the preferred embodiments, and the scope of protection claimed by the invention is defined by the claims.

Claims

1. A compact, large-spot, high-precision white light water-cooled aperture device, characterized in that, It includes a vacuum cavity component (1), a core component (2), and a stability support component (3); the core component (2) includes a light limiting assembly and a driving mechanism. The light limiting assembly includes two vertical light limiting assemblies (201) placed opposite each other in the vertical direction and two horizontal light limiting assemblies (203) placed opposite each other in the horizontal direction. The driving mechanism includes two vertical driving mechanisms (202) and two horizontal driving mechanisms (204). Each vertical light limiting assembly (201) is connected to a vertical driving mechanism (202), and each horizontal light limiting assembly (203) is connected to a horizontal driving mechanism (204). The vacuum chamber component (1) is mounted on the stability support component (3); The vacuum chamber component (1) includes a chamber door assembly (101), a chamber welding assembly (102), a vertical support assembly (103), and a horizontal support assembly (104); the vertical support assembly (103) and the horizontal support assembly (104) are fixed on the inner bottom plate of the chamber welding assembly (102), and the chamber door assembly (101) and the chamber welding assembly (102) are sealed and fixed. The core component (2) is provided inside the vacuum cavity component (1); the vertical light limiting component (201) in the core component (2) is connected to the vertical support component (103) of the vacuum cavity component (1), the horizontal light limiting component (203) in the core component (2) is connected to the horizontal support component (104) of the vacuum cavity component (1), and the driving mechanism is connected to the cavity door component (101) on the vacuum cavity component (1); The vacuum chamber component (1) is used to provide a vacuum environment for incident high-energy X-rays; The driving mechanism is used to drive the light-limiting component to move, thereby modulating the size of the high-energy X-ray spot.

2. The apparatus according to claim 1, characterized in that, The vertical support assembly (103) includes a left side plate welding bracket (103a), a right side welding bracket (103b), a vertical support base plate (103c), a vertical support top plate (103d), a vertical support back plate (103e), two sets of vertical support stiffeners (103f), and two sets of vertical top plate reinforcing ribs (103g). The bottom of the left side plate welding bracket (103a) and the bottom of the right side welding bracket (103b) are respectively connected to the left and right ends of the vertical support base plate (103c). The top of the left side plate welding bracket (103a) and the right side welding bracket (103g) are connected to the left and right ends of the vertical support base plate (103c). The top of the bracket (103b) is connected to the left and right ends of the top plate (103d) of the vertical bracket, respectively. The back of the left side plate welded bracket (103a) and the back of the right side welded bracket (103b) are connected to the back plate (103e) of the vertical bracket, respectively. The left end of the bottom plate (103c) of the vertical bracket is connected to the left end of the left side plate welded bracket (103a) through a set of vertical bracket stiffeners (103f), and the right end of the bottom plate (103c) of the vertical bracket is connected to the right end of the right side welded bracket (103b) through another set of vertical bracket stiffeners (103f). The top plate of the vertical bracket... The left end of (103d) is connected to the left end of the left side plate welding bracket (103a) via a set of vertical top plate reinforcing ribs (103g), and the right end of the vertical bracket top plate (103d) is connected to the right end of the right side welding bracket (103b) via another set of vertical top plate reinforcing ribs (103g); the assembled vertical support assembly (103) is fixed on the cavity mounting bracket welding plate (102b) of the cavity welding assembly (102); the horizontal support assembly (104) includes a horizontal support assembly top plate (104a) and two horizontal support assembly side plates (104b). The horizontal support assembly consists of two long side plates (104c) and a bottom plate (104d). The top plate (104a) and the bottom plate (104d) of the horizontal support assembly are connected at both ends by two side plates (104b). The top plate (104a) and the bottom plate (104d) of the horizontal support assembly are connected at both sides by two long side plates (104c). The bottom plate (104d) of the horizontal support assembly is fixed on the welding plate (102b) of the cavity mounting bracket of the cavity welding assembly (102).

3. The apparatus according to claim 1, characterized in that, The vertical light-limiting component (201) includes a vertical cooling welded copper part (201a), a vertical light-limiting tungsten part (201b), a vertical hinge connector (201c), a vertical cooling water pipe welded part (201d), a vertical flexible hinge (201e), a vertical splicing base plate (201f), two vertical splicing side plates (201g), a vertical absorber adapter plate welded part (201h), and a vertical slide table in a vacuum (201i). Among them, the vertical cooling welded copper part (201a) and the vertical light-limiting tungsten (201b) are connected side by side along the light transmission direction, and their two ends are connected to the vertical absorber transition plate weldment (201h); the vertical absorber transition plate weldment (201h) is installed on the vertical slide table (201i) in the vacuum; the bottoms of the vertical cooling welded copper part (201a) and the vertical light-limiting tungsten (201b) are respectively connected to the vertical hinge connecting seat (201i). c) The side connection, the bottom surface of the vertical hinge connector (201c) is connected to the upper end of the vertical flexible hinge (201e), the bottom surface of the vertical flexible hinge (201e) is connected to the upper end of the vertical splicing base plate (201f), and the two sides of the vertical splicing base plate (201f) are respectively connected and fixed to the two vertical splicing side plates (201g); the vertical cooling water pipe welded part (201d) and the vertical cooling welded copper part (201a) The cooling water channel is connected, and the vertical cooling water pipe welded part (201d) is connected and fixed to the two vertical spliced ​​side plates (201g); the vertical light limiting tungsten (201b) is higher than the vertical cooling welded copper part (201a) and is used to limit light and reduce stray light at the edge of the light spot; the vacuum vertical slide (201i) is connected and fixed to the vertical support assembly (103); the vertical cooling water pipe welded part (201d) is connected to the vertical drive mechanism (202).

4. The apparatus according to claim 3, characterized in that, The vertical cooling welded copper component (201a) includes a vertical cooling light-receiving copper component (201a_1) and a vertical cooling copper welding plate (201a_2). The vertical cooling light-receiving copper component (201a_1) has a serpentine cooling water channel inside to increase heat exchange. The vertical cooling copper welding plate (201a_2) is embedded in the vertical cooling light-receiving copper component (201a_1) and fixed together by electron beam welding. The vertical cooling light-receiving copper component (201a_1) has multiple protruding columns inside to strengthen the welding with the vertical cooling copper welding plate (201a_2) and prevent excessive water pressure in the serpentine cooling water channel from causing the vertical cooling light-receiving copper component (201a_1) and the vertical cooling copper welding plate (201a_2) to protrude and deform.

5. The apparatus according to claim 3, characterized in that, The vertical cooling water pipe welding component (201d) includes two vertical cooling water pipes (201d_1), a flange welding plate (201d_2), and a CF25 cooling pipe welding flange (201d_3). The vertical cooling water pipe (201d_1) passes through the through hole of the CF25 cooling pipe welding flange (201d_3) and is connected to the cooling water channel and cooling water circulation system of the vertical cooling welded copper component (201a). The CF25 cooling pipe welding flange (201d_3) is embedded in the hole of the flange welding plate (201d_2). The side of the flange welding plate (201d_2) is connected and fixed to the two vertical splicing side plates (201g).

6. The apparatus according to claim 3, characterized in that, The vertical flexible hinge (201e) includes four hinge mounting seats (201e_1), a first hinge shaft (201e_2), a second hinge shaft (201e_3), a coated bushing (201e_4), a C-shaped buckle for the shaft (201e_5), and a vertical flexible rotating hinge (201e_6). The second hinge shaft (201e_3) has a hole in its center. The first hinge shaft (201e_2) passes through the holed second hinge shaft (201e_3) to form a cross shape. A coated bushing is inserted at each end of the first hinge shaft (201e_2) and the second hinge shaft (201e_3). The bushing (201e_4) is then installed onto the hinge mounting base (201e_1) with a clearance fit. The shaft is then fixed by a C-shaped buckle (201e_5) and finally connected and fixed to the vertical flexible rotating hinge (201e_6) to achieve rotation in three dimensions. When the vertical drive mechanism (202) drives the vertical light limiting component (201) to move, it is used to make fine-tuning of the angle while ensuring the motion accuracy and to prevent the light limiting component from jamming during movement. The vertical splicing base plate (201f) is connected to the vertical flexible rotating hinge (201e_6) of the vertical flexible hinge (201e).

7. The apparatus according to claim 1, characterized in that, The vertical drive mechanism (202) includes a vertical support base (202a), a lead screw end fixing plate (202b), a vertical guide rail assembly (202c), a reading head assembly (202d), a drive rod clamping plate (202e), a motor end fixing base (202f), a coupling (202g), a handwheel (202h), a stepper motor (202i), a worm gear reducer (202j), a motor mounting base (202k), a limit switch assembly (202l), a lead screw assembly (202m), a guide rail lead screw connecting plate (202n), and a vertical bellows weldment (202o). Vertical drive tube weldment (202p), grating ruler (202q), and K-type thermocouple (202r); wherein, the motor end fixing seat (202f) is fixed on the vertical support seat (202a), one end of the motor mounting base (202k) is fixed on the motor end fixing seat (202f) and the vertical support seat (202a), and the other end is connected and fixed to the worm gear reducer (202j), and the coupling (202g) is embedded inside the motor mounting base (202k); the guide rails in the screw end fixing plate (202b) and the two sets of vertical guide rail assemblies (202c) are fixed on the vertical support seat (202r). On 02a), the guide rail screw connecting plate (202n) is fixed on the slider of the two sets of vertical guide rail assemblies (202c). The first flange (202m_1) at one end of the screw assembly (202m) is connected and fixed on the motor end fixing seat (202f) and the vertical support seat (202a). One end of the screw shaft (202m_2) is connected to the first flange (202m_1). The screw shaft (202m_2) of the screw assembly (202m) passes through the holes of the motor end fixing seat (202f), the guide rail screw connecting plate (202n), and the screw end fixing plate (202b) in sequence. The other end of (202m_2) is connected to the third flange (202m_4); the second flange (202m3) of the lead screw assembly (202m) is connected and fixed to the guide rail lead screw connecting plate (202n), and the third flange (202m_4) of the lead screw assembly (202m) is connected and fixed to the lead screw end fixing plate (202b); the shaft A of one end of the stepper motor (202i) is inserted into the hole of the handwheel (202h), and the hole wall of the handwheel (202h) is provided with a first threaded hole. The set screw pushes onto the shaft A through the first threaded hole, so that the handwheel (202h) is fixed to the shaft A;The stepper motor (202i) has its shaft B inserted into the hole of the worm gear reducer (202j). The worm gear reducer (202j) has a second threaded hole on its wall. A set screw passes through this second threaded hole and pushes against shaft B. The stepper motor (202i) is connected to the worm gear reducer (202j). The shaft of the worm gear reducer (202j) passes through a pre-drilled hole in the motor mounting base (202k) and is inserted into the hole at one end of the coupling (202g). The hole at the other end of the coupling (202g) is inserted into the end shaft of the lead screw assembly (202m). The coupling (202g) has third threaded holes on the walls of its two ends, and set screws are respectively... The screw is inserted into the third threaded hole and pushed against the shaft of the worm gear reducer (202j) and the end shaft of the lead screw assembly (202m), fixing them together. When the handwheel (202h) rotates, it drives the shaft of the stepper motor (202i) to rotate, or the stepper motor (202i) is energized to make its shaft rotate, driving the worm gear reducer (202j) to rotate, which in turn causes the lead screw shaft (202m_2) of the lead screw assembly (202m) to rotate. The gear on the lead screw shaft (202m_2) drives the second flange (202m3) to move, thereby indirectly fixing the guide rail wire to the second flange (202m3). The lever connecting plate (202n) moves linearly under the constraint of the vertical guide rail assembly (202c); the vertical drive tube weldment (202p) passes through the drive rod clamping plate (202e) and contacts the guide rail screw connecting plate (202n) through the drive rod clamping plate (202e). The vertical drive tube weldment (202p) is connected and fixed to the drive rod clamping plate (202e), and the drive rod clamping plate (202e) is connected and fixed to the guide rail screw connecting plate (202n). When the guide rail screw connecting plate (202n) moves linearly, it drives the vertical drive tube weldment (202p) to move, thereby realizing the movement of the vertical corrugated pipe weldment (202o). The limit switch assembly (202l) is fixed on the vertical support base (202a) to limit the movement stroke and protect the vertical bellows weldment (202o) within a safe range; the reading head assembly (202d) is fixed on the guide rail screw connecting plate (202n), and the grating ruler (202q) is set on the vertical support base (202a) to ensure the movement accuracy of the light limiting component; a K-type thermocouple (202r) is provided on the vertical drive tube weldment (202p) to detect the temperature of the light limiting component; the vertical bellows weldment (202o) is connected and fixed to the cavity welding assembly (102).

8. The apparatus according to claim 7, characterized in that, The vertical drive tube weldment (202p) includes a special-shaped CF25 loose flange (202p_1), a CF25 loose shoulder ring (202p_2), a vertical drive tube (202p_3), a CF40 flange for the drive rod (202p_4), and a vertical thermocouple threading tube (202p_5); the CF25 loose shoulder ring (202p_2), the vertical drive tube (202p_3), and the CF40 flange for the drive rod (202p_4) are fixed by brazing; three vertical thermocouple threading tubes (202p_5) are evenly spot-welded around the vertical drive tube (202p_3); vertical The thin tube for direct thermocouple threading (202p_5) is used to thread the extension wire of the K-type thermocouple (202r) to keep the thermocouple wires neatly routed; the special-shaped CF25 loose flange (202p_1) is a spliced ​​structure used to remove the special-shaped CF25 loose flange (202p_1) when the vertical drive tube weldment (202p) passes through the vertical bellows weldment (202o), thereby reducing the size of the bellows and reducing the vacuum force that needs to be overcome when the motor drives the light limiting component to move; the CF25 cooling tube welding flange (201d_3) is connected to the special-shaped CF25 loose flange (202p_1).

9. The apparatus according to claim 1, characterized in that, The horizontal light-limiting component (203) includes a horizontally cooled welded copper part (203a), a horizontally light-limiting tungsten part (203b), a horizontal hinge connector (203c), a horizontal cooling water pipe welded part (203d), a horizontal flexible hinge (203e), a horizontal splicing base plate (203f), two horizontal splicing side plates (203g), a spring (203h), a horizontal absorber adapter plate welded part (203i), and a vacuum-insulated horizontal slide (203j); wherein The horizontally cooled welded copper component (203a) and the horizontally light-limiting tungsten (203b) are connected side-by-side along the light transmission direction and then connected to the horizontal absorber adapter plate component (203i); the horizontal absorber adapter plate component (203i) is installed on the horizontal slide table (203j) in the vacuum; the bottoms of the horizontally cooled welded copper component (203a) and the horizontally light-limiting tungsten (203b) are respectively connected to the sides of the horizontal hinge connecting seat (203c), and the horizontal hinge connecting seat (203c) is connected to the sides of the horizontally cooled welded copper component (203a) and the horizontally light-limiting tungsten (203b). The bottom surface of 03c) is connected to the upper end of the horizontal flexible hinge (203e), and the bottom surface of the horizontal flexible hinge (203e) is in contact with and fixed to the upper end of the horizontal splicing base plate (203f). The two sides of the horizontal splicing base plate (203f) are respectively connected and fixed to the two horizontal splicing side plates (203g); the two ends of the spring (203h) are respectively fixed to the horizontal hinge connecting seat (203c) and the horizontal flexible hinge (203e), and are used to connect the horizontal hinge connecting seat (203c) to the horizontal flexible hinge (203e). 203c) and the horizontal flexible hinge (203e) are closely connected to improve the motion accuracy of the horizontal light limiting component (203); the horizontal cooling water pipe welded part (203d) is connected to the cooling water channel of the horizontal cooling welded copper part (203a); the horizontal light limiting tungsten (203b) is higher than the horizontal cooling welded copper part (203a) and is used to limit light and reduce stray light at the edge of the light spot; the vacuum horizontal slide (203j) is connected and fixed to the horizontal support component (104).

10. The apparatus according to claim 1, characterized in that, The stability support component (3) includes a support base plate (301), a caster assembly (302), an ion pump assembly (303), a cavity door X-direction slide rail (304), a cavity door rotation hinge assembly (305), a cavity adjustment support base assembly (306), a self-lubricating base plate (307), a height adjustment seat (308), a lifting ring (309), a support damping wedge (310), and a marble base (311); wherein, the caster assembly (302) and the lifting ring (309) are both fixed on the marble base (311); the ion pump assembly (303) is fixed on the support base plate (301), and the pump in the ion pump assembly (303) is connected to the cavity welding assembly (102) for supporting the vacuum cavity component ( 1) Vacuuming is performed; the X-direction slide rail (304) of the cavity door is fixed on the support base plate (301), and the cavity door rotation hinge assembly (305) is fixed on the X-direction slide rail (304) of the cavity door to realize the horizontal movement of the cavity door rotation hinge assembly (305); the self-lubricating base plate (307) is fixed on the support base plate (301) to place the vacuum cavity component (1); the set screw in the cavity adjustment support assembly (306) contacts the vacuum cavity component (1), and the position of the vacuum cavity component (1) is adjusted by adjusting the set screw; the height adjustment seat (308) is located on the marble base (311), the support base plate (301) is fixed on the marble base (311), and the marble base (311) is provided with The marble base (311) is placed on the supporting shock-absorbing wedge (310) and fixed to the ground by expansion bolts; the cavity door rotating hinge assembly (305) is connected to the cavity door assembly (101); the cavity door rotating hinge assembly (305) includes a cavity door rotating hinge bottom plate weldment (305a), a rotating hinge shaft (305b), a cavity door rotating hinge top plate weldment (305c), a cavity door Y-direction slide rail (305d), a cavity door connecting bottom plate (305e), and a cavity door connecting side plate (305f); the cavity door Y-direction slide rail (305d) is fixed on the cavity door rotating hinge top plate weldment (305c), the cavity door connecting bottom plate (305e) is fixed on the cavity door Y-direction slide rail (305d), and the cavity door connecting bottom plate... The side of (305e) is connected to the cavity door connecting side plate (305f); the rotating hinge shaft (305b) passes through the holes of the cavity door rotating hinge bottom plate weldment (305a) and the cavity door rotating hinge top plate weldment (305c), and the rotating hinge shaft (305b) is fixed on the cavity door rotating hinge bottom plate weldment (305a) by a set screw, and the hole of the cavity door rotating hinge top plate weldment (305c) can rotate around the rotating hinge shaft (305b); the cavity door connecting side plate (305f) is fixedly connected to the cavity door assembly (101); the cavity door Y direction slide rail (305d) is used to adjust the distance of the cavity door assembly (101), and the rotating hinge shaft (305b) is used to realize the small angle rotation of the cavity door assembly (101).

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