Surface emitting laser, related device and design method thereof

Abstract

The invention relates to the technical field of semiconductor devices, and discloses a surface emitting laser, a related device and a design method thereof. The surface emitting laser comprises a surface emitting laser unit and a light beam shaping structure, the surface emitting laser unit is immersed in the light beam shaping structure, and the refractive index of the light beam shaping structure is larger than that of air so that the divergence angle of laser emitted by the surface emitting laser unit located in the light beam shaping structure can be compressed. The side, away from the surface emitting laser unit, of the light beam shaping structure is designed to be a micro curved surface, and optical curved surface parameters of the micro curved surface are designed so that compressed laser can be emitted after being shaped through the micro curved surface. The built-in light beam shaping structure replaces an external lens, so that the optical coupling efficiency is improved, the structure is remarkably simplified, the cost is reduced, and high-density array integration can be realized.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device technology, and in particular to a surface-emitting laser, related devices, and design methods thereof. Background Technology

[0002] The back-emission technology of VCSEL (Vertical-Cavity Surface-Emitting Laser) chips exhibits significant advantages, with their inherent two-dimensional arraying capability providing a feasible technical path to substantially increase the number of parallel transmission channels. By integrating multiple VCSEL units onto a single chip to form a dense array, and combining it with two-dimensional optical interfaces such as multi-core optical fibers or planar waveguides, the number of transmission channels can theoretically be multiplied, effectively meeting the urgent need for high-throughput data exchange in artificial intelligence computing clusters.

[0003] However, the practical application of this technology faces severe optical coupling challenges. The inherent large beam divergence angle of back-emitting VCSEL chips means that a simple coupling scheme that directly connects the fiber end face to the chip surface will result in severe insertion loss and inter-channel crosstalk, leading to a significant reduction in coupling efficiency and drastic performance fluctuations.

[0004] To address beam divergence, existing technologies typically employ optical coupling solutions that involve attaching microlenses or lens arrays external to the chip. While this method improves coupling efficiency to some extent, it inevitably introduces additional optical components, complex assembly processes, and precise alignment procedures, leading to a simultaneous increase in material and manufacturing costs. External optical solutions lack the necessary scalability and flexibility. When communication system upgrades require changes to the number of channels or adjustments to the array arrangement, entirely new lens assemblies must be redesigned and manufactured to match, extending product development cycles and resulting in redundant investment of R&D resources and time. Summary of the Invention

[0005] Based on this, it is necessary to address the technical problems of low coupling efficiency and poor scalability of VCSEL chips in the existing technology, and propose a surface-emitting laser, related devices and their design method.

[0006] In a first aspect, a surface-emitting laser is provided, comprising: a surface-emitting laser unit and a beam-shaping structure, wherein the surface-emitting laser unit is immersed in the beam-shaping structure, the refractive index of the beam-shaping structure is greater than that of air so that the divergence angle of the laser emitted by the surface-emitting laser unit located inside the beam-shaping structure is compressed, and the side of the beam-shaping structure opposite to the surface-emitting laser unit is designed as a micro-curved surface, the optical surface parameters of the micro-curved surface being designed so that the compressed laser is shaped and emitted after being emitted.

[0007] Secondly, this application provides an optical communication transmitting module, including at least one optical communication transmitting unit, wherein the optical communication transmitting unit employs the aforementioned surface-emitting laser.

[0008] Thirdly, this application provides an optical coupling system, including an optical emitting unit and an optical waveguide, wherein the optical emitting unit is optically coupled to the optical waveguide, and the optical emitting unit is the aforementioned optical communication transmitting module.

[0009] Fourthly, this application provides a high-speed optical interconnect module, including a transmitter, a coupling end, and a receiver. The transmitter adopts the aforementioned optical communication transmitter module, and the coupling end adopts the aforementioned optical coupling system.

[0010] Fifthly, this application provides a design method for a surface-emitting laser, comprising: a surface-emitting laser unit and a beam shaping structure, wherein the surface-emitting laser unit is immersed in the beam shaping structure, the refractive index of the beam shaping structure is greater than that of air so that the divergence angle of the laser emitted by the surface-emitting laser unit located inside the beam shaping structure is compressed, and the side of the beam shaping structure opposite to the surface-emitting laser unit is designed as a micro-curved surface, the optical surface parameters of the micro-curved surface are designed so that the compressed laser is shaped and emitted after being emitted; The method includes: Obtain the overall thickness of the beam shaping structure and the refractive index of the beam shaping structure; The optical surface parameters of the micro-surface are calculated based on the obtained overall thickness and refractive index.

[0011] Sixthly, this application discloses a design apparatus for a surface-emitting laser, the apparatus comprising: The acquisition module is used to acquire the overall thickness and refractive index of the beam shaping structure; The calculation module is used to calculate the optical surface parameters of the micro-surface based on the overall thickness and the refractive index.

[0012] In a seventh aspect, a computer device is provided, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the steps of the above-described surface-emitting laser design method.

[0013] Eighthly, a computer-readable storage medium is provided, the computer-readable storage medium storing a computer program that, when executed by a processor, implements the steps of the above-described design method for a surface-emitting laser.

[0014] Beneficial effects: First, this application immerses a surface-emitting laser unit within a beam-shaping structure. The refractive index of the beam-shaping structure is greater than that of air, thus compressing the divergence angle of the laser emitted by the surface-emitting laser unit located inside the beam-shaping structure. Furthermore, the side of the beam-shaping structure facing away from the surface-emitting laser unit is designed as a micro-curved surface. The optical surface parameters of the micro-curved surface are designed so that the compressed laser beam is shaped and then emitted. The performance of the shaped output beam is optimized, resulting in a better match with the receiving parameters of the optical waveguide. This allows the beam to be injected into the transmission medium more efficiently, with a coupling efficiency significantly higher than that of the unshaped, directly incident, divergent beam.

[0015] Secondly, the beam shaping structure and the surface-emitting laser unit are integrated in an immersion manner, and the key optical parameters determining the shape of the micro-curved surface are directly determined by the structure's own physical properties. This design makes beam shaping an inherent and inseparable part of the laser, thus eliminating the need for a separate external lens assembly in traditional solutions. This not only eliminates the material cost of external lenses and the associated precision assembly costs and time, but also avoids the additional losses and alignment error risks introduced by multiple discrete component interfaces, significantly improving the device's reliability, stability, and production consistency.

[0016] Finally, the aforementioned integrated, built-in beam control architecture removes the obstacles to high-density, large-scale array integration of surface-emitting lasers. Since each emitting unit has its own miniaturized, custom optical system, there is no need to design complex external conformal optical components for the array, allowing for a further reduction in the center-to-center distance between multiple emitting units on the chip. This lays the foundation for manufacturing multi-channel optical emitting chips and modules with more channels, higher integration, and more compact package sizes. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] in: Figure 1 This is a schematic diagram of the structure of a surface-emitting laser in one embodiment; Figure 2 This is a schematic diagram of another structure of a surface-emitting laser in one embodiment; Figure 3 This is a schematic diagram of a single-spherical paraxial system in one embodiment; Figure 4 This is a schematic diagram illustrating the effect of collimating light rays under the overall thickness of different beam shaping structures in one embodiment. Figure 5 This is another structural schematic diagram of a surface-emitting laser in one embodiment; Figure 6 A flowchart illustrating a design method for a surface-emitting laser in one embodiment; Figure 7 This is a structural block diagram of a surface-emitting laser design device in one embodiment; Figure 8 This is a structural block diagram of a computer device in one embodiment. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] See Figure 1 This is a schematic diagram of the surface-emitting laser provided in this application. The surface-emitting laser 1 transmits the shaped output beam to the optical waveguide 2. The surface-emitting laser 1 includes: The surface-emitting laser 1 comprises two parts: a surface-emitting laser unit 11 and a beam-shaping structure 12. The surface-emitting laser unit 11 is typically a semiconductor laser chip, with its emitting surface facing the beam-shaping structure 12. The beam-shaping structure 12 is made of an optical material with a refractive index higher than that of air, such as common optical plastics like silicon nitride, gallium arsenide, or optical glass. This structure completely surrounds the emitting area of ​​the surface-emitting laser unit, ensuring that the laser beam emitted by the unit propagates entirely within the solid-state optical medium.

[0021] The fabrication process of the beam shaping structure 12 can be as follows: A beam shaping structure preform with a flat bottom surface is prepared. The refractive index of the preform material needs to be selected according to the divergence angle compression requirements, for example, a refractive index greater than 1.5. The surface-emitting laser unit is fixed to the flat bottom surface of the preform using a die-bonding process, ensuring that its emitting surface is in close contact with the optical material and avoiding air gaps. Subsequently, a complete optical structure is formed around the laser unit through an encapsulation process, such as molding or injection molding, so that it is completely immersed in the optical material.

[0022] Because the refractive index of optical materials is higher than that of air, when a laser beam enters a high-refractive-index medium from its emission point, its full-angle divergence angle will decrease due to the refraction effect, thereby achieving initial beam compression.

[0023] On the side of the beam shaping structure 12 facing away from the laser unit, a micro-curved surface 121 is formed through processing. This micro-curved surface 121 is a rotationally symmetric sphere or a freeform surface, and its specific surface shape is determined by optical design software. The design goal is to further shape the internally refracted and compressed beam to output a collimated beam, a focused beam, or a beam with a specific divergence angle that meets the requirements.

[0024] The optical surface parameters of micro-surface 121 mainly include one or more of the following: radius of curvature, conic coefficient, and higher-order coefficients. During the design, the actual luminescence characteristics of the laser unit should be used as the light source model. Combined with the refractive index and thickness of the beam shaping structure material, the surface shape data of the micro-surface is obtained through iterative optimization calculations or empirical formulas, so that the beam reaches the expected spot size and far-field divergence angle after being refracted and emitted by the surface.

[0025] The surface-emitting laser unit 11 serves as the optical signal generation source and can be a vertical-cavity surface-emitting laser (VCSEL) structure. It incorporates multiple semiconductor epitaxial layers, specifically including a lower distributed Bragg mirror, a quantum well active region, an oxide confinement layer, and an upper distributed Bragg mirror. When a forward bias voltage is applied, this unit generates a divergent laser beam perpendicular to the chip surface (i.e., the laser emitted by the surface-emitting laser unit).

[0026] The determination and acquisition of the optical surface parameters of the micro-curved surface structure in this application are diverse. Various feasible technical paths can be selected according to design requirements, process conditions and available tools. This application does not restrict which method to use for calculation.

[0027] The overall thickness of the beam shaping structure 12 represents the axial straight-line distance along the optical axis of the surface-emitting laser (SEL), from the emission center of the SEL unit 11 (typically the center of the active region) to the optical vertex of the micro-surface 121. The refractive index refers to the optical constant exhibited by the optical medium material constituting the beam shaping structure 12 for light of a specific operating wavelength emitted by the SEL unit 11. Its physical meaning is: the ratio of the speed of light in a vacuum to the speed of light in the medium material, numerically equal to the ratio of the sine of the angle of incidence to the sine of the angle of refraction when light enters the medium from a vacuum.

[0028] Specifically, the optical surface parameters can be calculated in the following way.

[0029] 1. Calculation based on empirical formulas or analytical models. For example, under the paraxial condition or specific simplification assumptions, calculations can be performed using explicit mathematical formulas derived from geometric optics and the laws of refraction.

[0030] Second, the system model is established by simulation and optimization using professional optical design software, and the optical surface parameters that meet the performance indicators are automatically solved through its built-in optimization function.

[0031] Third, use custom or general optimization algorithms for iterative numerical calculations. For example, by writing or calling optimization algorithm programs (such as gradient descent, global search algorithm, etc.), construct an optimization process with coupling efficiency or spot quality as the objective function, and iteratively solve for the optimal parameters.

[0032] In one possible embodiment, the divergence angle of the laser emitted by the surface-emitting laser unit is in the range of 23°±2°; the range of the compressed divergence angle is 7°±1°. The inherent divergence angle range of the surface-emitting laser unit is determined by the internal resonant cavity structure and the emission aperture of the chip. To achieve an initial divergence angle of 23 degrees ± 2 degrees, a standard commercial laser chip can be selected or the chip's epitaxial growth parameters can be adjusted, such as adjusting the reflectivity and cavity length of the Bragg reflector layer, so that the far-field divergence angle of the laser beam in air falls within this specified range. Before packaging, the laser unit must be tested using a beam profiler to ensure that its divergence angle meets the requirements. When the laser beam enters the high-refractive-index medium from the surface-emitting laser unit, its divergence angle will decrease for the first time according to Snell's law. For a beam with an initial divergence angle of 23 degrees, if the refractive index of the medium is 1.8, the full-angle divergence angle of the beam within the medium will drop to approximately 13 degrees. This calculation is based on an approximate estimate using the law of refraction; the actual value can be accurately simulated using ray tracing software. This initial compression is fundamental to achieving the final goal.

[0033] To achieve the stringent requirement of 7 degrees ± 1 degree after compression, the micro-curved surface on the output side of the beam shaping structure plays a crucial role. This micro-curved surface needs to be designed as a rotationally symmetric aspherical surface, and its shape is defined by the radius of curvature, conic constant, and higher-order polynomial coefficients. The design process is as follows: Using the actual emission model of the laser unit within the medium as the light source, the target divergence angle of the output beam is set to 7 degrees. A system model including the material refractive index, structural thickness, and micro-curved surface is established in the optical design software. The optical surface parameters of the micro-curved surface are repeatedly adjusted through optimization algorithms so that the far-field divergence angle of the beam emitted from the micro-curved surface in air falls within the range of 7 degrees ± 1 degree.

[0034] In one possible embodiment, the optical surface parameters of the micro-surface are designed such that the laser beam exits in an extension direction parallel to the optical axis; or The optical surface parameters of the micro-surface are designed to focus the laser beam to a single point.

[0035] The optical surface parameters of the micro-curved surface have two different optical design objectives: one is to make the laser beam emerge in an extension direction parallel to the optical axis, and the other is to focus the laser beam to a single point. The common technical basis of both schemes lies in the fact that the surface-emitting laser unit is immersed inside the high-refractive-index material of the beam-shaping structure, and the emitted divergent beam has been initially compressed within the medium. The micro-curved surface is the only optical interface located on the light-emitting side of this structure, and its surface shape directly determines the final emission shape of the beam.

[0036] The optical axis of this application is a spatial reference line that passes through the emission center of the surface-emitting laser unit and coincides with the axis of symmetry of the beam-shaping structure. In the physical layout of the device, the optical axis is typically perpendicular to the emission surface of the surface-emitting laser unit and extends along the center of the beam-shaping structure, ultimately passing through the vertex of the micro-curved surface. This axis represents the core reference for the entire optical system during design, fabrication, and alignment.

[0037] For the first approach, which requires the emitted beam to be parallel to the optical axis, the goal is to achieve collimation of the internal beam. In this case, the micro-surface acts as a collimating lens. The optimization objective is either "zero far-field divergence angle of the emitted beam" or "plane wavefront". The micro-surface typically requires a spherical design to correct for spherical aberration and other aberrations introduced by large-angle incident light and material properties. During the design process, the software automatically adjusts the radius of curvature of the sphere so that the light rays refracted from each point on the micro-surface extend in a direction parallel to the system's principal optical axis. After optimization and precision machining, the beam emitted from this micro-surface will have high collimation and a very small divergence angle, and can be considered a parallel beam.

[0038] For the second approach, which requires focusing the beam to a single point, converging the laser beam into a focal spot, the micro-surface acts as a focusing lens. In practice, designers must first define the target focal length, i.e., the distance from the vertex of the micro-surface to the focal spot. The optimization goal is set as "all outgoing rays intersect at a specified axial position to form a minimum-sized spot." To achieve this, the curvature of the micro-surface typically needs to be designed to be more curved than in a collimation scheme to provide sufficient optical power. This application can use aspherical surfaces to correct aberrations, ensuring the focused spot size is close to the diffraction limit. The optical surface parameters of the micro-surface will be determined through optimization calculations to ensure that the internally diverging beams, after refraction, can accurately converge to the preset focal position.

[0039] Further, see Figure 1 As shown, this application, based on focusing the light beam to a single point, can further configure an optical waveguide 2 to receive the focused beam. Specifically, the input end face of the optical waveguide 2 is positioned within a predetermined spatial range centered on the aforementioned focal point. This range is a finite spatial region, the size of which is determined by the depth of focus and aberration tolerance of the optical system to ensure that a sufficient proportion of optical power can be effectively coupled into the fiber core. The predetermined range can be determined by analyzing the energy distribution and spot size variation of the light beam near the focal point, or by experimentally measuring the offset curves of the coupling efficiency with the axial and lateral positions of the fiber end face, thereby determining the allowable offset range of the fiber end face when the coupling efficiency is not lower than a certain acceptable threshold (e.g., 80% of the maximum efficiency). This three-dimensional spatial range is the "preset range".

[0040] Optionally, to achieve optimal coupling efficiency, the optimal position of the input end face of optical waveguide 2 should be precisely set at the location of the focal point. At this point, the focused spot size is minimized, the energy is most concentrated, and it achieves optimal matching with the mode field of the optical fiber, thereby maximizing the laser power entering the fiber.

[0041] In one possible embodiment, the micro-surface is sized to fully receive the laser emitted by the surface-emitting laser unit, and the projection of the micro-surface in the direction perpendicular to the optical axis completely covers the maximum spot area of ​​the laser emitted by the surface-emitting laser unit.

[0042] In this embodiment, specific design constraints are imposed on the physical dimensions of the micro-surface: the actual opening of the micro-surface in three-dimensional space must be able to completely accommodate all light rays emitted from the surface-emitting laser unit and reaching the light-emitting side, meaning that no part of the light beam is blocked by the physical edges of the micro-surface. The cross-section (i.e., the maximum spot area) of the laser emitted by the surface-emitting laser unit at the position of the micro-surface is projected onto a plane perpendicular to the optical axis; the projection area of ​​the micro-surface on this plane must completely cover this spot area.

[0043] If the micro-curved surface is too small, its edges will block some large-angle light rays, resulting in beam energy loss; this phenomenon is called vignetting. Vignetting directly reduces the luminous flux of the system and may alter the beam intensity distribution, thereby impairing the shaping effect and the final coupling efficiency.

[0044] The micro-curved surface forms the exit aperture of this immersion optical system. Its size must be no smaller than the natural spread of the beam at that location to ensure that all light rays can pass through the aperture and participate in the subsequent refraction and shaping process. This is a prerequisite for achieving the theoretically designed performance (such as the expected divergence angle and convergence point size).

[0045] Designers can determine and configure the dimensions of micro-curved surfaces in the following ways: By simulating with optical software, all light rays emitted from the light-emitting unit are traced (typically considering a sufficient field of view), and the set of intersection points between the light rays and the plane where the micro-curved surface is designed is found. The outer boundary of this set defines the size and shape of the "maximum spot area." In actual design, the projected dimensions of the micro-curved surface (such as diameter or length and width) should be based on the maximum spot area, with an additional allowance for manufacturing and alignment tolerances (e.g., an increase of 5-10 micrometers on one side) to ensure complete coverage during actual manufacturing and assembly. The size of the micro-curved surface (aperture size) and its optical surface parameters are two independent design dimensions. The former ensures that light rays are not lost, while the latter determines how the light rays are deflected. Both need to be considered collaboratively in the design, serving the overall goal of improving coupling efficiency.

[0046] By configuring the micro-curved surface dimensions as described above, this application ensures that all light energy emitted from the light source can be effectively utilized and participate in the beam shaping process, avoiding unnecessary energy loss caused by aperture limitations.

[0047] In one possible embodiment, the size of the micro-surface at the entrance to receive the laser emitted by the surface-emitting laser unit satisfies: D≥2×L×tan(θ / 2), where D is the minimum size of the micro-surface in the direction perpendicular to the optical axis, L is the distance between the surface-emitting laser unit and the vertex of the micro-surface, and θ is the divergence angle of the laser emitted by the surface-emitting laser unit.

[0048] Where D represents the minimum characteristic dimension of the micro-surface on the plane perpendicular to the optical axis of the system. If the micro-surface is a circular aperture, then D is its diameter; if it is rectangular or other shapes, then D is its minimum circumcircle diameter or the minimum directional dimension that ensures the beam is not blocked.

[0049] L represents the axial distance from the emission center of the surface-emitting laser unit to the optical vertex of the micro-curved surface. This distance is the overall thickness of the beam-shaping structure defined in the aforementioned embodiments, and also the effective focal length f in the optical design.

[0050] θ represents the full-angle divergence angle of the laser emitted by the surface-emitting laser unit within the beam-shaping structure medium. This angle is the far-field divergence characteristic of the light source (VCSEL) itself in a given medium, and is usually determined by the chip structure; it is a known or measurable parameter.

[0051] The calculation result on the right side of the formula represents the theoretical maximum diameter of the light spot formed on a plane perpendicular to the optical axis after a beam of light with a full-angle divergence angle θ is emitted from the light source and propagates for a distance L.

[0052] The inequality requires that the physical opening of the microsurface must be greater than or equal to the theoretical maximum size of the light beam at that location. This is the mathematical condition that ensures all light rays (including edge rays emitted at the maximum angle) can be incident on the effective region of the microsurface without obstruction.

[0053] Meeting this condition is the minimum dimensional requirement for the beam shaping structure to fully receive the laser emitted by the surface-emitting laser unit, avoiding light energy loss (vignetting) due to aperture limitations. If D is smaller than the calculated value, some large-angle light rays will be blocked by the edge of the micro-curved surface, resulting in a decrease in the final output optical power and potentially disrupting the beam symmetry.

[0054] In one possible embodiment of this application, the material of the beam shaping structure is any one of silicon dioxide, silicon nitride, and gallium arsenide.

[0055] Among them, the beam shaping structure, as the carrier of the immersion medium and the micro-curved surface, has a decisive influence on optical performance, manufacturing cost, and system integration by its material selection. Silica, silicon nitride, and gallium arsenide are three representative materials, each with its own characteristics.

[0056] Silicon dioxide is low-cost and highly compatible, exhibiting extremely low loss in communication bands and seamless integration with standard silicon chip processes, making it the optimal choice for economical, large-scale production. Silicon nitride offers a trade-off between performance and integration density, with a higher refractive index that allows for the fabrication of smaller, more compact microlenses, making it ideal for implementing high-density optical element arrays on a chip. Gallium arsenide offers the highest performance and extreme miniaturization. As the material for VCSEL chips, it enables the most compact monolithic integration, and its extremely high refractive index allows for the thinnest overall thickness of beam-shaping structures.

[0057] See Figure 2 See also another structural schematic diagram of the surface-emitting laser provided in this application. Figure 2 As shown in the schematic diagram of the structure of a surface-emitting laser provided in this application embodiment, it includes: a beam shaping structure 21, which is used as an immersion medium, and a micro-curved surface 211 is formed on the light-emitting side surface; and a surface-emitting laser unit 22, which is embedded in the beam shaping structure and is used to emit laser light emitted by the surface-emitting laser unit 22.

[0058] The optical surface parameters of the micro-surface 211 are related to the refractive index of the beam shaping structure and the overall thickness of the beam shaping structure. The overall thickness of the beam shaping structure represents the distance between the surface-emitting laser unit and the vertex of the micro-surface. The optical surface parameters are configured such that the micro-surface converts the laser emitted by the surface-emitting laser unit 22 into a parallel or collimated output beam.

[0059] The beam shaping structure 21 is a flat, transparent medium structure with specific optical functions. A surface-emitting laser unit 22 is embedded within the beam shaping structure 21. The beam shaping structure 21 acts as an immersion medium, covering the surface-emitting laser unit to form an immersion optical structure. This allows the laser emitted by the surface-emitting laser unit 22 to be emitted through the immersion medium. The beam shaping structure 21 has an incident light-side surface and an exit light-side surface arranged opposite to each other. The incident light-side surface can be an optically flat surface, while the exit light-side surface is a functionalized surface with micro-curves. The peripheral contour of the beam shaping structure 21 can be set to a rectangular or circular geometric shape according to packaging requirements. Its core function is to provide a continuous optical propagation path as an immersion medium.

[0060] The surface-emitting laser unit 22 of this application is a semiconductor device that generates and amplifies laser light through stimulated emission within a vertical resonant cavity via current injection. The surface-emitting laser unit 22 is integrated onto the carrier surface of the beam-shaping structure material using an epitaxial growth process. This carrier surface constitutes the optical functional reference plane in the chip structure. The center of the active region of the surface-emitting laser unit is perpendicularly aligned with the optical axis of the beam-shaping structure and maintains a precise axial distance from the light-emitting surface of the beam-shaping structure.

[0061] In spatial coordinates, the center point of the surface-emitting laser unit 22 is located on the initial reference plane along the overall thickness 21 of the beam-shaping structure. With the vertex of the beam-emitting side surface of the beam-shaping structure as the origin of the three-dimensional coordinate system, the center coordinates of the surface-emitting laser unit can be expressed as (0, 0, -f), where f represents the focal length, which is the overall thickness of the beam-shaping structure. This positional arrangement ensures that the surface-emitting laser unit 22 is located at the object-side focal point of the optical system. In back-emission mode, the beam generated by the surface-emitting laser unit 22 first propagates within the medium of the beam-shaping structure 21, and then undergoes optical transformation into parallel light via the beam-emitting side micro-surface 211. This structural arrangement allows the surface-emitting laser unit 22 to be physically protected by the material of the beam-shaping structure 21 while fully utilizing the high refractive index characteristics of the immersion medium to improve optical extraction efficiency.

[0062] In one possible embodiment of this application, the optical surface parameters include the radius of curvature, R = f·(n - 1) / n, where R represents the radius of curvature, f represents the overall thickness of the beam shaping structure, and n represents the refractive index of the beam shaping structure.

[0063] Here, the micro-surface is a sphere, and its radius of curvature represents the radius of the complete sphere to which the sphere belongs. From a geometric point of view, any point on the sphere can be found to have a unique center. The radius of curvature is the distance from any point on the sphere (especially its optical vertex, i.e., the intersection of the optical axis and the surface) to the center of the sphere.

[0064] The absolute value of the radius of curvature directly reflects the degree of curvature of a sphere. The smaller the absolute value (e.g., R = 0.1 mm), the more severe the curvature of the sphere; the larger the absolute value (e.g., R = 10 mm), the flatter the sphere. When the radius of curvature approaches infinity, the sphere degenerates into a plane.

[0065] According to the general notation rules for optical design, the radius of curvature can have a positive or negative sign to distinguish the type of sphere. It is usually agreed that: Positive value (R>0): indicates that the sphere is convex when viewed from the direction of beam propagation (the center of the sphere is located on the same side as the direction of beam propagation).

[0066] Negative value (R<0): indicates that the sphere is concave when viewed from the direction of beam propagation (the center of the sphere is located on the opposite side of the direction of beam propagation).

[0067] In the back-emitting immersion structure of this application, in order to achieve the collimation or focusing function of the beam, the micro-curved surface is usually concave, so its radius of curvature is often negative under strict sign convention.

[0068] f represents the effective focal length of the target. In a surface-emitting laser, the straight-line distance along the optical axis from the emitting center of the surface-emitting laser unit (physically usually the center point of the active region) to the optical vertex of the light-emitting micro-curved surface of the beam-shaping structure is directly equal to the overall thickness of the beam-shaping structure. The surface-emitting laser unit is set at the position of the effective focal length of the target.

[0069] See Figure 3 As shown, Figure 3 This is a schematic diagram of a single-spherical paraxial system. The following section focuses on... Figure 3 The diagram illustrates the derivation process of the calculation formula.

[0070] Figure 3 The parameters in the table are explained, where n represents the object-side refractive index. The image-side refractive index is represented by , and the angle of incidence is represented by . The angle of refraction is represented by s, and the object distance is represented by s. R represents the image distance, R represents the radius of curvature of the micro-surface, and f represents the effective focal length of the target, i.e., the overall thickness of the beam shaping structure of this application. denoted as the auxiliary angle variable introduced by applying the sine and cosine theorems, p represents the object-side slant distance, which is the straight-line distance from the object point to the point of incidence on the sphere. It represents the image-side slant distance, the straight-line distance from the image point to the point of incidence on the sphere.

[0071] The physical basis of the derivation is the law of refraction: Subsequently, the Law of Sines is applied to the triangle △QMC formed by object point Q, vertex M of the sphere, and center C of the sphere. According to the Law of Sines, in any triangle, the ratio of the length of each side to the sine of its opposite angle is equal, and the formula is a / sin(A) = b / sin(B) = c / sin(C).

[0072] In △QMC, applying the sine theorem yields p / sin( = (s + r) / sin(i).

[0073] Similarly, in the triangle of image space In the middle, applying the law of sines, we obtain Combining the two formulas obtained from the Law of Sines, we get... .

[0074] Applying the Law of Cosines in △QMC: Simplifying, we get .

[0075] exist Application of the Law of Cosines: Simplifying, we get: .

[0076] Combining the formulas obtained from the two cosine laws, we get: While the formula obtained from this simultaneous equation is accurate, it is complex and inconvenient for engineering applications. Therefore, the paraxial condition for optical system design is introduced, which assumes the angle between the ray and the optical axis. Very small. Under these conditions, the sine of a small angle is approximately equal to the angle itself, and The term approaches zero. Substituting this approximation into the above simultaneous formulas, all containing All higher-order terms are eliminated, greatly simplifying the equation, ultimately yielding the equation: .

[0077] The purpose of this application is to generate parallel light, i.e., image distance. As it approaches infinity, substituting this condition into the above equation... As the term approaches zero, the equation simplifies to .

[0078] In the back-emission model of this application, the object-side refractive index n is the refractive index of the beam shaping structure, and the image-side refractive index... Let the refractive index of air be 1. According to the definition of the coordinate system, the radius of curvature r in the formula takes a negative value. In order to obtain a positive radius of curvature R, we set r = -R and substitute it into the simplified equation: n / f = (1 - n) / (-R). Finally, after rearranging, we get R = f·(n-1) / n.

[0079] In one possible embodiment, the overall thickness of the beam shaping structure ranges from 0.1 mm to 0.5 mm.

[0080] The optimal focal length range strikes a balance between optical performance and module integration. The shorter 0.1 mm effective focal length supports an ultra-thin design for the optical module, meeting the stringent space requirements of modern communication equipment. Meanwhile, the 0.5 mm effective focal length provides ample optimization space for optical design, ensuring the collimated beam achieves a small divergence angle and good spot quality. Within this range, the beam will not suffer significant aberrations due to an excessively short focal length, nor will the module size exceed specifications due to an excessively long focal length.

[0081] See Figure 4 The diagram illustrates the effect of collimated light. When the beam-shaping structure material is gallium arsenide and its refractive index is fixed at 3.52918, the radius of curvature R of the micro-surface can be calculated for different beam-shaping structures based on the optical collimation formula R = f · (n - 1) / n, for the overall thickness (i.e., the effective focal length f) of the target beam-shaping structure. The specific calculation process is as follows: First, calculate the constant coefficient in the formula: (n - 1) / n = (3.52918 - 1) / 3.52918 = 2.52918 / 3.52918 ≈ 0.7163. This coefficient will be used as the multiplier in subsequent calculations.

[0082] The overall thickness of the beam shaping structure is f = 100 micrometers, and R = 100 × 0.7163 = 71.63 micrometers.

[0083] The overall thickness of the beam shaping structure is f = 200 micrometers, and R = 200 × 0.7163 = 143.26 micrometers.

[0084] The overall thickness of the beam shaping structure is f = 300 micrometers, and R = 300 × 0.7163 = 214.89 micrometers.

[0085] The overall thickness of the beam shaping structure is f = 400 micrometers, and R = 400 × 0.7163 = 286.52 micrometers.

[0086] The overall thickness of the beam shaping structure is f = 500 micrometers, and R = 500 × 0.7163 = 358.15 micrometers.

[0087] See Figure 5 The diagram shown is another structural schematic of a surface-emitting laser provided in this application embodiment. The surface-emitting laser includes: A beam shaping structure 51, used as an immersion medium, has a micro-curved surface 511 formed on its light-emitting side surface; a surface-emitting laser unit 52 is disposed within the beam shaping structure 52 and is used to emit laser light emitted by the surface-emitting laser unit; the optical surface parameters of the micro-curved surface 511 are configured to focus the light emitted by the surface-emitting laser unit to a point outside the beam shaping structure after refraction, i.e., a preset position 53 located on the optical axis; the optical surface parameters are determined by the distance between the preset position 53 and the vertex of the micro-curved surface, as well as the overall thickness and refractive index of the beam shaping structure 51.

[0088] The beam shaping structure is a flat, transparent dielectric structure with specific optical functions. This beam shaping structure has an incident light-side surface and an exit light-side surface arranged opposite each other. The incident light-side surface is an optically flat surface, while the exit light-side surface is a functionalized surface with micro-curves. The peripheral contour of the beam shaping structure can be set to a rectangular or circular geometry, depending on the packaging requirements, and its function is to provide a continuous optical propagation path as an immersion medium.

[0089] The surface-emitting laser unit employs a vertical-cavity surface-emitting laser (VCSEL) structure, integrated within the beam-shaping structure material. This unit comprises a multilayer semiconductor epitaxial structure, specifically including upper and lower distributed Bragg mirrors, a quantum well active region, and a current-confining layer. When a forward bias voltage is applied between the P-type and N-type electrodes, charge carriers undergo radiative recombination within the quantum well region. The resulting photons oscillate and amplify within the resonant cavity formed by the Bragg mirrors, ultimately forming a laser beam emitted perpendicular to the chip surface.

[0090] The overall thickness of the beam shaping structure is defined as the axial distance from the center point of the active region of the surface-emitting laser unit to the vertex of the micro-surface. This parameter characterizes the optical path length in the object space of an optical system and is a critical dimension determining the beam propagation characteristics. The thickness is measured parallel to the optical axis, and its value directly affects the design parameters of the micro-surface and the final imaging quality.

[0091] The distance in this application refers to the linear spatial dimension from the optical vertex of the micro-curved surface to the preset position. This distance is measured along the principal optical axis of the optical system and characterizes the focusing position of the beam in the image space. In practical implementation, the input end face of the optical waveguide can be placed within a three-dimensional spatial range centered on the theoretical "preset position". For example, the size of the preset range can be determined through optical simulation or experiment based on the maximum allowable coupling efficiency attenuation value (e.g., a drop of no more than 1 dB).

[0092] The preset position set on the input end face of the optical waveguide refers to the point where the laser beam emitted by the surface-emitting laser unit is focused.

[0093] In this configuration, the input end face of the optical waveguide is aligned and fixed at a preset position. This preset position is the theoretical focal point position calculated based on the overall thickness, refractive index, and micro-surface parameters of the beam shaping structure. With this configuration, light emitted from the immersed light-emitting unit, after refraction by the micro-surface in the beam shaping structure, forms a converging beam whose focal point coincides precisely with the receiving surface of the optical waveguide. At this point, the beam energy is most concentrated, the mode field matching reaches its theoretical optimum, and thus the highest possible coupling efficiency can be achieved.

[0094] In one possible embodiment, the microsurface is aspherical in shape, and the optical surface parameters include the radius of curvature and the conic constant.

[0095] Among them, aspherical surfaces, through their continuous curvature changes, can ensure that light rays at different incident heights all point to the target focal point, thereby obtaining a smaller and sharper focal spot.

[0096] The radius of curvature refers to the reference radius of curvature of an aspherical surface at its vertex, defining the basic optical capability of the surface, that is, the strength of its basic focusing or collimating ability.

[0097] The conic constant is a dimensionless parameter that describes the degree and manner in which a surface deviates from a reference sphere. By adjusting the conic constant, the contour changes of the surface from the center to the edge can be systematically controlled, thereby precisely balancing and eliminating aberrations. For example, a specific negative conic constant can characterize an ellipsoid, which is beneficial for converging light beams more effectively.

[0098] In this embodiment, the specific values ​​of the radius of curvature and the conic constant are determined or optimized by at least the overall thickness and refractive index of the beam shaping structure, as well as the preset convergence point distance (working distance). By designing these two parameters as a set of correlated variables (e.g., through ray tracing and optimization algorithms), an optimal solution can be found, enabling the final aspherical microsurface to shape the beam into an output beam with highly concentrated energy and optimal matching with the fiber mode field.

[0099] In one possible embodiment, the radius of curvature ranges from (-0.2, 0) mm, and / or the conic constant ranges from (-2.5, 0).

[0100] The above-mentioned value range is the best practice area derived from theoretical calculations and performance optimization. It can provide designers with a clear starting point or search space for parameters, avoid blind trial and error, and significantly improve design efficiency and success.

[0101] Micro-surfaces designed and manufactured within this value range have been verified to stably achieve the core invention objective of "output beam coupling efficiency higher than that of directly incident diverging beams," ensuring reliable transfer of optical performance from theory to product.

[0102] The range of values ​​balances excellent optical performance with the feasibility of semiconductor microfabrication processes (such as photolithography and etching). Extremely small surface shapes (such as excessively small absolute values ​​of radius of curvature or excessively negative values ​​of conic constant) may be difficult to process or lead to a decrease in yield. This range represents the optimal balance between optical performance and process capability.

[0103] This application also provides an optical communication transmitting module, including at least one optical communication transmitting unit, wherein the optical communication transmitting unit adopts any of the above-mentioned surface-emitting lasers.

[0104] Each optical communication transmitting unit acts as an independent transmission channel. Thanks to the integrated collimation or focusing function of the laser itself, it can achieve efficient optical output without the need for external discrete optical components. This allows multiple transmitting units to be integrated into the same module at extremely high density (e.g., in the form of a two-dimensional array), easily realizing multi-channel, high-bandwidth parallel optical transmission, directly meeting the needs of artificial intelligence, data centers, and other fields for extremely high data throughput.

[0105] The optical performance of each emission channel within the module is achieved through chip-level integrated micro-curved surfaces, eliminating the risk of performance degradation caused by alignment failures of multiple discrete optical components in traditional modules. The monolithically integrated structure exhibits excellent thermal and mechanical stability.

[0106] By eliminating external lenses, lens holders, and complex active alignment processes, the module's structure is greatly simplified, and its size is significantly reduced. Furthermore, its manufacturing process is compatible with semiconductor technology, making it suitable for large-scale, standardized production, thus achieving low-cost, high-reliability manufacturing at the system level.

[0107] During module operation, the driving circuit independently or collaboratively modulates the surface-emitting lasers in each optical communication transmitting unit. Each laser converts an electrical signal into an optical signal, which is then immediately shaped by its integrated beam-shaping structure. The shaped, high-quality output beam (such as a collimated or focused beam) is directly guided to the corresponding optical coupling interface (such as a single fiber in an optical fiber array or a waveguide on a photonic chip), completing the efficient conversion and transmission from electrical to optical signals. Multiple channels can operate simultaneously, enabling high-speed parallel optical communication.

[0108] Furthermore, the optical communication transmission module includes several optical communication transmission units, each of which is arrayed and can be independently addressed.

[0109] In this context, array distribution refers to the arrangement of multiple optical communication transmitting units in a preset, ordered geometric pattern (e.g., an M×N two-dimensional matrix, a single-row linear array, or a ring arrangement) on the same substrate or package. Since the beam shaping function of each laser is achieved through a micro-curved surface on the chip, no external optical components are required, enabling multiple units to be integrated together with extremely small spacing and high density, achieving compact array packaging.

[0110] Independent addressability means that the module's drive and control circuitry can independently drive and modulate the signals of each optical communication transmitter unit in the array. This means that any one, a group, or all units can be controlled to operate independently with different timings and different data streams. This is typically achieved by configuring independent electrode contacts (such as independent anodes and / or common cathodes) for each transmitter unit during chip design and integrating or connecting corresponding multi-channel driver integrated circuits within the module package.

[0111] This application also provides an optical coupling system, including an optical transmitting unit and an optical waveguide, wherein the optical transmitting unit is optically coupled to the optical waveguide, and the optical transmitting unit is the aforementioned optical communication transmitting module.

[0112] The optical coupling system mainly includes an optical emitting unit and an optical waveguide.

[0113] The optical emitting unit is an optical communication transmitting module of any of the foregoing embodiments. That is, the unit includes at least one (preferably multiple arrayed) surface-emitting lasers with integrated beam shaping structures.

[0114] Optical waveguides are used to receive and transmit optical signals from optical transmitting units. Typical implementations include optical fibers, fiber arrays, planar optical waveguides, or input couplers on photonic integrated circuits.

[0115] Optical coupling connection refers to the optical alignment and fixation of the output end of the optical emitting unit and the input end of the optical waveguide to form a stable optical path channel, enabling the optical signal to be transmitted from the emitting end to the conducting medium with low loss.

[0116] In this system, the generation, shaping, and coupling processes of optical signals are as follows: After receiving an electrical signal, the optical transmitting unit (i.e., the optical communication transmitting module) converts the electrical signal into an optical signal using its internal surface-emitting laser. Crucially, this optical signal is immediately optically transformed at the chip level by a beam shaping structure (through its micro-curved surface) to form a collimated, focused, or low-divergence high-quality output beam. This shaped, high-quality output beam is directly guided and incident on the input end face of a closely aligned optical waveguide. Because the beam has been optimized (e.g., the spot size matches the fiber mode field or it converges at the fiber end face), it can couple into the optical waveguide with extremely high efficiency. After entering the fiber or waveguide, the optical signal propagates along that waveguide.

[0117] Furthermore, the optical waveguide can be a single-core fiber or a multi-core fiber.

[0118] In this configuration, the optical waveguide is a single, independent optical fiber. If the optical emitting unit is a single surface-emitting laser, its output beam is directly aligned with and coupled into the core of that single optical fiber. If the optical emitting unit is an array module containing multiple optical communication emitting units, it typically requires an optical fiber array (i.e., a component composed of multiple single-core optical fibers arranged in a regular pattern) to achieve a one-to-one coupling between each laser emitting unit in the array and an independent optical fiber.

[0119] Single-core fiber technology is mature and relatively inexpensive. It is widely used in high-speed point-to-point links or parallel links with a relatively small number of channels. When used in conjunction with array modules, it requires precise fiber array fabrication and collective alignment techniques.

[0120] In an optical waveguide configuration, a multi-core optical fiber is used. This type of fiber contains multiple (e.g., 4-core, 8-core, 16-core, or more) isolated independent cores within the same cladding. Each core can transmit an independent optical signal.

[0121] Multi-core optical fibers have a natural architectural advantage when paired with arrayed, independently addressable optical communication transmitter modules: Multi-core fiber is a high spatial density parallel transmission medium, with its multiple cores typically arranged at close spacing (e.g., 40 micrometers or less). This perfectly matches the high-density characteristics of on-chip integrated laser arrays that do not require external lenses, enabling a compact, integrated parallel optical connection between a transmitter array and a single multi-core fiber. Replacing a bundle of discrete single-core fibers or a fiber array assembly with a single multi-core fiber significantly simplifies the design of optical module output connectors, reduces packaging complexity, and improves reliability. It is also an ideal physical carrier for realizing spatial division multiplexing (SDM) technology. Each independently addressable transmitter channel in the array module couples its signal to an individual core of the multi-core fiber, thereby synchronously transmitting multiple independent data streams within a single physical fiber, greatly increasing the overall transmission capacity of a single fiber.

[0122] This application also provides a high-speed optical interconnect module, including a transmitter, a coupling end, and a receiver. The transmitter adopts the aforementioned optical communication transmitter module, and the coupling end adopts the aforementioned optical coupling system.

[0123] The transmitting end employs the optical communication transmitting module of any of the aforementioned embodiments. This transmitting end serves as the optical signal source for the entire interconnect module, and its core is at least one (preferably arrayed and independently addressable) surface-emitting laser with an integrated beam-shaping structure. Therefore, the transmitting end itself constitutes a highly efficient and compact optical transmitting unit.

[0124] The coupling end includes an optical waveguide, which, together with the transmitter, constitutes the aforementioned optical coupling system. Specifically, the transmitter (optical communication transmitter module) and the optical waveguide (such as a single-core fiber, multi-core fiber, or fiber array) in the coupling end form an optical coupling connection through precise optical alignment. This connection enables the high-quality light beam emitted from the transmitter, which has already undergone chip-level shaping, to enter the optical waveguide for transmission with extremely high efficiency.

[0125] The receiving end includes at least one optical receiving unit for receiving optical signals transmitted via the coupling end and converting them into electrical signals. The optical receiving unit can be a single photodetector (such as a PIN photodiode or avalanche photodiode) or an array of photodetectors arranged according to a certain rule to match the number of channels at the transmitting end and achieve parallel reception.

[0126] The working process of this high-speed optical interconnect module includes: An external electrical signal drives the transmitter (optical communication transmitter module) to work. Each surface-emitting laser in the module converts an independent electrical data stream into a corresponding optical intensity modulation signal, which is then immediately shaped by a micro-curved surface integrated on it to form a low divergence angle and highly directional output beam.

[0127] The shaped light beam is emitted from the transmitter and directly and efficiently coupled into the optical waveguide (transmission medium) at the coupling end. The optical signal is then transmitted with low loss and low crosstalk within the optical fiber or waveguide.

[0128] The optical signal transmitted to the receiving end is emitted from the optical waveguide and captured by the optical receiving unit (photodetector). The detector converts the change in optical power into a corresponding current signal, which, after subsequent transimpedance amplification and other processing, recovers the original electrical data stream.

[0129] Please see Figure 6 As shown, Figure 6 A flowchart illustrating a design method for a surface-emitting laser provided in an embodiment of the present invention includes the following steps: S1. Obtain the overall thickness of the beam shaping structure.

[0130] The computer equipment can obtain the overall thickness of the beam shaping structure based on manual input by the designer, or automatically determine the overall thickness of the beam shaping structure based on the packaging dimensions of the surface-emitting laser, or obtain the overall thickness of the beam shaping structure through other means. The surface-emitting laser unit is embedded in the beam shaping structure, and the beam shaping structure acts as an immersion medium to cover the surface-emitting laser unit, forming an immersion optical structure, so that the beam generated by the surface-emitting laser unit is emitted through the immersion medium.

[0131] In the manual input method, the computer device provides a human-computer interface to receive externally input parameter values. The human-computer interface can be a parameter input box in a graphical user interface or a parameter configuration window in professional design software. Designers, based on the overall layout requirements and package size limitations of the optical system, and combined with their understanding of optical performance, manually input the overall thickness value of the beam-shaping structure, determined after careful consideration. The computer device captures the user-inputted values ​​in real time through interface operations and stores them for subsequent calculations of the overall thickness of the beam-shaping structure. To ensure parameter validity, the computer device performs logical verification on the input values ​​in the background, including value range checks and format verification. If abnormal values ​​exceeding reasonable physical ranges are found, the interface will prompt for re-entry. The computer device in this application is a computer system configured with optical design software.

[0132] For example, when designing a surface-emitting laser with a wavelength of 850 nm, the designer determines that the available space height is 0.5 mm based on the packaging structure. Considering thermal expansion margin and adhesive layer thickness, the designer manually enters a value of 0.4 mm in the input box labeled "Overall thickness of beam shaping structure" in the parameter setting panel of the optical design software. The computer receives this input data in real time, verifies that the value is within a reasonable range of 0.1 to 0.8 mm, and then officially adopts it as the reference parameter for subsequent surface calculations. If the designer mistakenly enters an abnormal value such as 5 mm, a warning dialog box will pop up indicating "Input value exceeds the valid range," and the original setting will be maintained until a new input that meets the requirements is obtained.

[0133] When automatically determining the overall thickness of the beam shaping structure, the computer equipment obtains the allowable total chip thickness range by calling a preset packaging specification parameter database. At the same time, it combines the optical simulation module to systematically evaluate the beam quality and selects the overall thickness value of the beam shaping structure that can meet the collimated beam quality requirements within the mechanical limit boundary as the final determined overall thickness of the beam shaping structure.

[0134] For example, according to industry-standard packaging specifications, the total thickness of a chip in computer equipment should be kept within 0.5 mm. Under this constraint, the optical simulation module performs beam quality analysis on the overall thickness values ​​of multiple beam shaping structures within the 0.3 mm to 0.5 mm range. By comparing the spot diameter and energy distribution concentration corresponding to different thicknesses, 0.4 mm is ultimately selected as the optimal overall thickness for the beam shaping structure. This determined value not only meets the mechanical limitations of the package size but also ensures that the output beam meets the design requirements for parallelism.

[0135] S2. Obtain the refractive index of the beam shaping structure.

[0136] The computer equipment can obtain the refractive index of the beam shaping structure based on user manual input, automatic acquisition, or other methods.

[0137] In manual input mode, the computer receives refractive index parameters from external sources through a human-computer interface, typically integrated into the material property configuration module of optical design software. Designers input the determined refractive index values ​​into designated fields based on technical data provided by material suppliers or laboratory measurement reports. The system monitors the interface operations in real time to acquire input data and performs necessary data validity verification, including numerical range review and format compliance checks. For non-standard refractive index values, the system initiates a secondary verification mechanism to ensure the accuracy of the input parameters.

[0138] In the automated acquisition method, the computer accesses an integrated materials database to obtain this parameter. This database systematically records the refractive index characteristics of various semiconductor materials at different operating wavelengths. Based on the type of beam-shaping structure material and operating wavelength parameters selected by the designer, the system performs a matching query in the database to extract the corresponding precise refractive index value. For specially customized materials, the system supports incorporating experimentally determined optical parameters by expanding database entries. The entire acquisition process establishes a standardized mapping relationship from material selection to parameter determination, ensuring the reliability and consistency of the fundamental data for optical design.

[0139] S3. Calculate the optical surface parameters of the micro-surface based on the obtained thickness and refractive index.

[0140] The optical surface parameters are configured to convert the light emitted by the surface-emitting laser unit into parallel light emitted from the micro-surface. Optical surface parameters refer to a set of mathematical variables used to quantitatively describe the geometric characteristics of the optical surface. These parameters precisely define the three-dimensional morphology of the surface numerically, providing a data foundation for the design, analysis, and fabrication of optical components.

[0141] Computer devices can use pre-established computational models to calculate optical surface parameters, or calculate optical surface parameters iteratively.

[0142] The process of calculating optical surface parameters using a computational model includes: A computer device first establishes a computational model based on the laws of optical propagation. The overall thickness and refractive index of the beam-shaping structure are used as input variables. By solving the optical surface parameter equations that satisfy the beam collimation conditions, the geometric features of the surface required to achieve optical collimation are obtained. This calculation process establishes the mathematical relationship between incident and outgoing rays based on the fundamental laws governing light refraction at a medium interface. When the output is set to a parallel beam, the correspondence between the optical surface parameters and system parameters is derived. The optical equations are then solved analytically or numerically, ultimately outputting the optical surface parameters that ensure a parallel beam is formed after refraction when the light source is at the focal point.

[0143] The iterative calculation process for optical surface parameters includes: First, the computer sets initial values ​​for the optical surface parameters based on empirical formulas or approximate solutions, constructing an initial surface model. Then, an iterative optimization process is initiated, performing complete ray tracing calculations in each iteration. By analyzing the propagation paths of multiple rays, the beam collimation quality under the current optical surface parameters is evaluated. A quantified objective function is constructed using spot radius and energy concentration as core evaluation indicators. The optimization algorithm automatically adjusts the optical surface parameter values ​​based on the gradient direction of the objective function, generating an improved surface scheme. This process is repeated until a preset convergence condition is met, ultimately outputting the optimized and verified combination of optical surface parameters. The objective function, as the core evaluation criterion, quantifies the optical performance requirements into a calculable numerical indicator. This function typically considers multiple optical performance parameters such as spot size, wavefront aberration, and energy concentration, combining them through weighted summations to form a single evaluation value. The magnitude of the objective function value directly reflects the optical performance of the current combination of optical surface parameters; a smaller or larger value indicates that the optical performance is closer to the expected target. Convergence criteria typically include multiple factors such as parameter change thresholds, improvement in the objective function, and maximum number of iterations. The optimization process is automatically considered complete when the change in optical surface parameters during continuous iterations is less than a preset small threshold, the improvement in the objective function is less than a specified limit, or the preset maximum number of iterations is reached.

[0144] For example, taking the radius of curvature and conic constant as optical surface parameters, the computer device defines the objective function as the root mean square radius of the output beam, requiring minimization of this value. The convergence condition is set as the improvement in the beam radius being less than 0.1 micrometers for three consecutive iterations, or a total of 50 iterations. Initially, the radius of curvature is set to 0.25 millimeters, and the conic constant to zero. After the first ray tracing calculation, an objective function value of 15 micrometers for the beam radius is obtained. The optimization algorithm adjusts the parameters accordingly. After five iterations, the beam radius is reduced to 2.1 micrometers, and the improvements in the subsequent three iterations are 0.08 micrometers, 0.05 micrometers, and 0.03 micrometers, respectively, all less than the threshold of 0.1 micrometers. The convergence condition is satisfied, the optimization automatically terminates, and the final optical surface parameters are output: radius of curvature 0.286 millimeters, conic constant -0.8. The entire iterative process ensures that the optimal surface morphology that meets the collimation requirements is obtained.

[0145] In one possible embodiment of this application, the micro-surface is a sphere, and the optical surface parameters include the radius of curvature; The optical surface parameters of the micro-surface are calculated based on the overall thickness and refractive index of the beam shaping structure, including: The optical surface parameters of the micro-surface are calculated using the formula R = f·(n - 1) / n, where R represents the radius of curvature, f represents the overall thickness of the beam shaping structure, and n represents the refractive index of the beam shaping structure.

[0146] In the design scenario of spherical micro-curved surfaces, the calculation of optical surface parameters can be accomplished using analytical formulas verified by optical theory. This calculation process is based on the principle of spherical refraction in geometrical optics. When the point light source is located inside the medium and the laser emitted by the surface-emitting laser unit is required to be parallel light, a definite mathematical relationship exists between the radius of curvature and the system parameters. The computer equipment substitutes the pre-acquired overall thickness and refractive index parameters of the beam-shaping structure into the dedicated calculation formula R = f·(n - 1) / n, and directly solves for the radius of curvature value through arithmetic operations. This calculation model establishes a quantitative relationship between the light source position, the refractive index of the medium, and the geometric characteristics of the surface, based on the paraxial imaging law satisfied by light refraction at the spherical interface, ensuring that the calculated optical surface parameters can achieve a strictly collimated optical effect.

[0147] For example, the overall thickness of the beam shaping structure obtained by the computer equipment is 0.40 mm, and the refractive index of the beam shaping structure is 3.52. Substituting these parameters into the spherical collimation calculation formula, the system obtains a radius of curvature of 0.286 mm. Optical simulation verification shows that the spherical structure processed with this radius of curvature can convert the beam emitted by the surface-emitting laser unit into a collimated beam with a divergence angle of less than 0.5 degrees. When the design parameters are changed to an effective focal length of 0.30 mm and a refractive index of 3.15, the same calculation process yields a radius of curvature of 0.205 mm.

[0148] This embodiment transforms complex optical design problems into deterministic arithmetic operations by establishing explicit calculation formulas, achieving efficient and accurate solutions for optical surface parameters. This method not only ensures the repeatability of the calculation process and the accuracy of the results, but also significantly improves optical design efficiency, providing a reliable technical foundation for mass chip design and manufacturing.

[0149] In one possible embodiment of this application, S1, obtaining the overall thickness of the beam shaping structure includes: S11. Determine the allowable range of the overall thickness of the beam shaping structure based on the package dimensions of the surface-emitting laser.

[0150] The computer equipment retrieves the three-dimensional dimensional parameters of the target package specification by accessing a predefined mechanical structure database. It then analyzes the internal cavity height data of the package shell, subtracts the thickness of the chip adhesive layer, the electrode interconnect layer, and the space occupied by other components, to calculate the theoretically permissible range of the overall thickness of the beamforming structure. This calculation process must comprehensively consider dimensional fluctuations caused by the material's thermal expansion coefficient and assembly tolerances, ultimately outputting a range of overall thickness values ​​for the beamforming structure with a safety margin.

[0151] S12. Based on the spot quality constraint of the collimated beam, determine the recommended thickness value within the allowable range.

[0152] Among them, the beam quality constraint refers to a series of quantitative technical indicators established to evaluate and guarantee the optical performance of the collimated beam. The beam quality constraint includes three key parameter dimensions: The beam divergence angle is a core indicator for measuring beam parallelism, defined as the width of the full angle when the peak intensity in the far-field light intensity distribution drops to 50%. This parameter directly determines the beam's propagation and distance characteristics; a smaller divergence angle indicates better collimation.

[0153] The ellipticity of a beam is used to quantify the symmetry of the beam shape; its value is the ratio of the minor axis to the major axis of the beam. An ideal circular beam has an ellipticity of one. This parameter reflects the level of astigmatism correction in the optical system, affecting beam availability and the matching efficiency of subsequent optical systems.

[0154] Energy concentration reflects the energy distribution characteristics of a light beam, referring to the percentage of light energy passing through a specified aperture relative to the total light energy. This parameter characterizes the usability of the light beam; higher energy concentration means less light energy wastage and higher optical system efficiency.

[0155] Within the overall thickness range determined in step S11, the computer device selects multiple candidate thickness values ​​using either equal-interval sampling or adaptive sampling strategies. The optical simulation module performs rigorous ray tracing calculations on each candidate thickness, and quantitatively evaluates the collimated beam quality corresponding to each thickness by analyzing key indicators such as the far-field divergence angle, spot ellipticity, and energy concentration of the output beam. A comprehensive beam quality evaluation function is established, and recommended thickness values ​​that meet preset optical indicators are determined through comparative analysis.

[0156] S13. Set the recommended thickness value to the overall thickness of the beam shaping structure.

[0157] In this process, the computer equipment assigns the recommended thickness value determined in step S12 to the overall thickness parameter of the beam shaping structure, establishing a one-dimensional dimensional reference for the optical system. This assignment operation synchronously updates the system's three-dimensional model database, ensuring data consistency between the optical design layer and the mechanical design layer. Simultaneously, the system performs parameter rationality verification, confirming that the overall thickness of the beam shaping structure matches the input requirements of the subsequent surface calculation module.

[0158] In one possible embodiment of this application, S2, obtaining the refractive index of the beam shaping structure, includes: S21. Obtain the beam shaping structure material and operating wavelength of the beam shaping structure.

[0159] The computer equipment obtains the user-specified beam shaping structure material type and laser operating wavelength parameters through a human-computer interface or system configuration file. The material type is selected from a predefined semiconductor material library, and the operating wavelength is input in nanometers. The input parameters undergo format validation and rationality assessment to ensure that the material is on the supported list and the wavelength is within a physically feasible range.

[0160] For example, in the material selection interface of optical design software, the designer selects gallium arsenide as the beam shaping structure material from the drop-down menu, and enters 850 nm in the wavelength input box of the parameter setting panel. The system verifies that gallium arsenide is an option included in the material library, and that 850 nm is within the optical transparency window range of this material. Then, these two parameters are passed as valid inputs to the subsequent processing module.

[0161] S22. Look up the corresponding refractive index in the preset mapping table according to the beam shaping structure material and the working wavelength.

[0162] The computer accesses a pre-set optical material property database (i.e., a mapping table). This database is stored in a two-dimensional mapping table structure, with row indices representing material types, column indices representing operating wavelengths, and cross cells storing the corresponding measured refractive index values. Based on the material and wavelength parameters obtained in step S21, an exact match query is performed in the mapping table, returning the corresponding refractive index values. For non-discrete wavelength points, a linear interpolation algorithm is used to calculate the refractive index values ​​between adjacent wavelength points.

[0163] For example, based on the input gallium arsenide material and 850 nm wavelength, the system locates the corresponding cell in the optical property mapping table and directly reads the refractive index value of 3.52. If the input wavelength is 855 nm, and the database stores the refractive indices of 3.52 and 3.51 for 850 nm and 860 nm respectively, the system calculates the refractive index value of 3.515 at 855 nm through linear interpolation.

[0164] This technical solution achieves precise and automated refractive index acquisition by establishing a standardized material optical parameter lookup process. This method effectively avoids errors that may be introduced by manual table lookups, ensuring the accuracy and consistency of fundamental optical design data.

[0165] Furthermore, the beam shaping structure is used to shape the laser emitted by the surface-emitting laser unit into an output beam focused at a preset position. In this case, the determination of the optical surface parameters depends at least on the overall thickness and refractive index of the beam shaping structure and the distance between the beam shaping structure and the preset position. The specific calculation process for the optical surface parameters includes: S4. Obtain the overall thickness and refractive index of the beam shaping structure.

[0166] The computer equipment obtains the key dimensional parameter of the overall thickness of the beam-shaping structure by accessing an integrated chip structure database. This value represents the axial distance from the active region of the surface-emitting laser unit to the optical vertex of the micro-curved surface. Simultaneously, it retrieves the refractive index value corresponding to the currently selected beam-shaping structure material and specific operating wavelength from a materials optical properties database. These two parameters together constitute the basic elements describing the propagation characteristics of light waves within the medium, providing accurate input conditions for subsequent optical calculations. The entire acquisition process includes a data validity verification step to ensure that all parameters are within physically reasonable numerical ranges.

[0167] This application can also use a manual input method to obtain the overall thickness and refractive index of the beam-shaping structure. The computer device receives the externally input parameters of the overall thickness and refractive index of the beam-shaping structure through a human-computer interaction interface, which is typically integrated into the material property configuration module of optical design software. Based on the chip manufacturing process documents and material test reports, the designer inputs the determined values ​​of the overall thickness and refractive index of the beam-shaping structure into the corresponding parameter fields. The system acquires the input data by monitoring the interface operations in real time and performs necessary data validity verification, including numerical range review and physical rationality checks. For abnormal parameter values, the system will activate a prompt mechanism to ensure the accuracy of the parameter input.

[0168] S5. Obtain the distance between the preset position and the vertex of the micro-surface.

[0169] The computer equipment obtains the relative position coordinates between the fiber optic interface assembly reference surface and the chip optical surface by analyzing the mechanical structure design data of the optical module. Based on the 3D model data, it calculates the normal distance from the micro-curved optical vertex to a preset position. This distance parameter defines the precise position where the light beam needs to converge in the exit medium. The acquisition process includes coordinate transformation operations, converting the position parameters in the mechanical assembly coordinate system into the axial distance in the optical path coordinate system with the optical surface vertex as the origin.

[0170] This application can also obtain the distance manually. The computer device receives the axial distance parameter from an external input through a human-computer interaction interface, which is typically integrated into the mechanical structure configuration module of the optical design software. Based on the mechanical drawings of the optical module or actual measurement data, the designer inputs the determined distance value from the convergence point to the vertex of the micro-curved surface into the corresponding parameter field. The input data is acquired through real-time capture of interface operations, and data rationality verification is performed, including distance range checks and numerical validity judgments. For abnormal distance values, the system triggers an alert mechanism to ensure the engineering feasibility of the parameter input.

[0171] S6. Calculate the optical surface parameters of the micro-surface based on thickness, refractive index and distance.

[0172] In this application, the optical surface parameters are configured to converge the light emitted by the surface-emitting laser unit at a preset position. The optical surface parameters can be calculated iteratively, including the following process: a computer device establishes a complete optical propagation model based on the overall thickness, refractive index, and convergence point distance parameters of the beam shaping structure obtained in steps S4 and S5. An optical propagation model is a computational physics model used to simulate the propagation behavior of light waves. This model abstracts light energy transmission into the propagation paths of discrete light rays, simulating and predicting the overall performance of the optical system by calculating the behavior of a large number of light rays. In computer-aided optical design, this model is a fundamental tool for analyzing and optimizing optical systems.

[0173] The optical propagation model treats the surface-emitting laser unit as a point source. Based on the principle of non-sequential light propagation, it simulates the complete optical path of the beam after it is emitted from the surface-emitting laser unit, propagates within the beam-shaping structure medium, and converges to the convergence point after being refracted by the micro-curved surface.

[0174] An iterative optimization algorithm is used for automatic solution, with the radius of curvature at the surface vertex and the conic constant as the core optimization variables, and minimizing the spot size and maximizing the energy concentration at the convergence point as the optimization objectives. In each iteration, the combination of optical surface parameters is adjusted, large-scale ray tracing calculations are performed, the focusing performance under the current parameters is evaluated, and a new parameter combination is generated according to the search direction determined by the optimization algorithm, until the focusing performance meets the preset convergence condition. The convergence condition is a quantitative indicator that controls the termination of the optimization process, and mainly includes the following judgment elements: The parameter variation threshold sets the maximum allowable variation of the optical surface parameters during adjacent iteration cycles. When the variations in both the radius of curvature and the conic constant are less than the preset threshold, the parameter space search is considered to have reached a stable state. For example, typical thresholds are a radius of curvature variation of less than 0.1 micrometers and a conic constant variation of less than 0.01 micrometers.

[0175] The effectiveness of monitoring the optimization process is assessed by the improvement of the objective function. When the reduction in spot size is consistently below a specified limit across multiple iterations, the performance improvement is considered to have reached saturation. For example, setting an improvement of less than 0.1 micrometers for three consecutive iterations can be considered one of the convergence criteria.

[0176] The maximum number of iterations serves as a safety mechanism in the optimization process. The calculation is forcibly terminated when the preset limit is reached to prevent an infinite loop. For example, this value is typically set between 50 and 200 iterations, depending on the problem complexity. Optionally, this application can also use pre-established calculation formulas. In micro-surface design, when the optical system meets specific conditions, the optical surface parameters can be directly calculated using calculation formulas verified by optical theory. This calculation process is based on the imaging principle in geometrical optics. When a point light source is located inside a medium and needs to converge to a specific position in external space, there is a definite mathematical relationship between the surface radius and the system parameters. The computer device substitutes the pre-acquired overall thickness, refractive index, and convergence point distance parameters of the beam shaping structure into a dedicated calculation formula, and directly solves for the surface radius value through arithmetic operations. This calculation model establishes a quantitative relationship between the light source position, medium refractive index, preset position, and surface geometric features based on the imaging law satisfied when light refracts at a spherical interface, ensuring that the calculated optical surface parameters can achieve accurate beam converging function.

[0177] In one possible embodiment, S6, based on thickness, refractive index, and distance, calculate the optical surface parameters of the micro-surface, including: S61. An evaluation function is constructed with the goal of obtaining the minimum spot size at the image plane; where the micro-curved surface is the light-emitting surface, the image plane is located at a preset position, the object point is the surface-emitting laser unit, and the distance between the surface-emitting laser unit and the light-emitting surface is the overall thickness of the beam shaping structure.

[0178] The computer equipment uses obtaining the minimum spot size at the image plane as the core optimization objective, and constructs an evaluation function that can comprehensively reflect the beam convergence quality. The surface-emitting laser unit is set as a point source in the object space, and a preset position is defined as the image plane. A complete optical propagation model is established between the two.

[0179] The evaluation function is constructed based on large-scale ray tracing calculations. The computer simulates the complete path of multiple rays emanating from the object point, propagating through the beam-shaping structure medium, refracting at micro-curved surfaces, and finally reaching the image plane. The distribution of all rays on the image plane is statistically analyzed, and the geometric characteristic parameters of the light spot are extracted. The root-mean-square radius or energy ring diameter is used as a quantitative indicator of the light spot size, transforming these optical performance requirements into a computable numerical objective function.

[0180] S62. The optical surface parameters are iteratively optimized using an optimization algorithm. When the evaluation function meets the convergence condition, the optimized optical surface parameters are output.

[0181] The computer equipment employs an optimization algorithm to perform a directional search within a parameter space defined by the radius of curvature and the conic constant. Each iteration includes three basic steps: parameter update, ray tracing, and performance evaluation. The system first updates the optical model based on the parameter combinations generated by the optimization algorithm, then performs large-scale ray tracing calculations to acquire the distribution data of over ten thousand rays on the image plane, and subsequently calls an evaluation function to calculate the spot quality score under the current parameters. Based on the performance information fed back by the evaluation function and combined with historical iteration data, the optimization algorithm establishes a mapping relationship between parameters and performance, intelligently determining the next search direction and step size. This iterative process continues until the evaluation function value meets the preset convergence condition.

[0182] Optimization algorithms mainly include the following types: Gradient descent algorithms determine the parameter update path by calculating the gradient direction of the objective function. These algorithms first apply a small perturbation to the current combination of optical surface parameters, then calculate the rate of change of the objective function using ray tracing to establish a local mapping between the parameter space and the performance space. Subsequently, they adjust the parameters along the inverse direction of the gradient to quickly approximate a local optimum.

[0183] Global optimization algorithms provide solutions for situations where the parameter space may contain multiple extrema. Genetic algorithms simulate the natural selection process, maintaining a population of multiple parameter combinations and exploring the solution space through selection, crossover, and mutation operations. Particle swarm optimization, on the other hand, simulates swarm intelligence behavior, enabling multiple parameter particles to collaboratively search for the optimal region in the solution space.

[0184] For example, using the conjugate gradient optimization algorithm, the initial parameters are set to a radius of curvature of 0.20 mm and a conic constant of 0.00. After the first iteration, the evaluation function calculates the root mean square radius of the light spot to be 5.2 μm. The optimization algorithm adjusts the parameters to a radius of curvature of 0.18 mm and a conic constant of -0.50 based on the performance gradient. After 6 iterations, the light spot radius decreases to 1.5 μm. When the light spot radius reaches 1.1 μm in the 9th iteration and the improvement is less than 0.1 μm for 3 consecutive iterations, the convergence condition is met, and the optimal parameters of a radius of curvature of 0.175 mm and a conic constant of -1.20 are output.

[0185] Please see Figure 7 As shown, in one embodiment, a design apparatus for a surface-emitting laser is provided, the apparatus comprising: Acquisition module 701 is used to acquire the overall thickness of the beam shaping structure; The acquisition module 701 is also used to acquire the refractive index of the beam shaping structure; The calculation module 702 is used to calculate the optical surface parameters of the micro-surface based on the obtained overall thickness and refractive index.

[0186] In one possible embodiment, the microsurface is a sphere, and the optical surface parameters include the radius of curvature; The step of calculating the optical surface parameters of the micro-surface based on the overall thickness of the beam shaping structure and the refractive index includes: The optical surface parameters of the micro-surface are calculated according to the formula R = f·(n - 1) / n, where R represents the radius of curvature, f represents the overall thickness of the beam shaping structure, and n represents the refractive index.

[0187] In one possible embodiment, obtaining the overall thickness of the beam shaping structure includes: Based on the package dimensions of the surface-emitting laser, determine the allowable range of values ​​for the overall thickness of the beam shaping structure; Based on the spot quality constraints of the collimated beam, a recommended thickness value is determined within the allowable range. The recommended thickness value is set as the overall thickness of the beam shaping structure.

[0188] In one possible embodiment, obtaining the refractive index of the beam shaping structure includes: Obtain the beam shaping structure material and operating wavelength of the beam shaping structure; The corresponding refractive index is looked up in a preset mapping table based on the beam shaping structure material and the operating wavelength.

[0189] In one embodiment, a computer device is provided, which may be a client, and its internal structure diagram may be as follows: Figure 8 As shown, the computer device includes a processor, memory, network interface, display screen, and input devices connected via a system bus. The processor provides computational and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs stored in the non-volatile storage media. The network interface is used to communicate with an external server via a network connection. When executed by the processor, the computer program implements the functions or steps of a surface-emitting laser design method.

[0190] In one embodiment, a computer device is provided, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor, when executing the computer program, performs the following steps: Obtain the overall thickness of the beam shaping structure; Obtain the refractive index of the beam shaping structure; The optical surface parameters of the micro-surface are calculated based on the obtained overall thickness and refractive index.

[0191] This application eliminates the need for external, separate lens assemblies by directly constructing an integrated micro-surface on the light-emitting side of the beam-shaping structure. This design integrates optical functionality with the chip structure, significantly reducing material costs and assembly complexity, and enabling large-scale parallel manufacturing of the optical microstructure through semiconductor processes. When the number of channels or array arrangement needs to be changed, only the photolithographic mask pattern needs to be adjusted for a rapid response, completely solving the resource waste and time delay problems caused by re-molding in traditional external lens solutions, thus giving the optical module design a high degree of flexibility and scalability.

[0192] This application calculates optical surface parameters based on a physical optics model, achieving efficient and reliable beam control. For the collimation scheme, the optical surface parameters are determined according to the overall thickness and refractive index of the beam shaping structure, accurately converting the large divergence angle beam of the surface-emitting laser unit into low divergence angle parallel light, laying the foundation for subsequent high-efficiency coupling with optical fibers or waveguides. For the focusing scheme, the beam is directly focused onto the fiber end face by combining the characteristics of the beam shaping structure and the preset convergence point distance, greatly improving the coupling efficiency.

[0193] This application not only effectively solves the problems of low coupling efficiency and unstable performance caused by beam divergence in back-emitting chips, avoiding the waste of optical power; but also eliminates expensive external optical components and precision alignment processes through monolithic integrated design, significantly reducing manufacturing costs.

[0194] In one embodiment, a computer-readable storage medium is provided that stores a computer program, which, when executed by a processor, performs the following steps: Obtain the overall thickness of the beam shaping structure; Obtain the refractive index of the beam shaping structure; The optical surface parameters of the micro-surface are calculated based on the obtained overall thickness and refractive index.

[0195] This application eliminates the need for external, separate lens assemblies by directly constructing an integrated micro-surface on the light-emitting side of the beam-shaping structure. This design integrates optical functionality with the chip structure, significantly reducing material costs and assembly complexity, and enabling large-scale parallel manufacturing of the optical microstructure through semiconductor processes. When the number of channels or array arrangement needs to be changed, only the photolithographic mask pattern needs to be adjusted for a rapid response, completely solving the resource waste and time delay problems caused by re-molding in traditional external lens solutions, thus giving the optical module design a high degree of flexibility and scalability.

[0196] This application calculates optical surface parameters based on a physical optics model, achieving efficient and reliable beam control. For the collimation scheme, the optical surface parameters are determined according to the overall thickness and refractive index of the beam shaping structure, accurately converting the large divergence angle beam of the surface-emitting laser unit into low divergence angle parallel light, laying the foundation for subsequent high-efficiency coupling with optical fibers or waveguides. For the focusing scheme, the beam is directly focused onto the fiber end face by combining the characteristics of the beam shaping structure and the preset convergence point distance, greatly improving the coupling efficiency.

[0197] This application not only effectively solves the problems of low coupling efficiency and unstable performance caused by beam divergence in back-emitting chips, avoiding the waste of optical power; but also eliminates expensive external optical components and precision alignment processes through monolithic integrated design, significantly reducing manufacturing costs.

[0198] It should be noted that the functions or steps that can be implemented by the computer-readable storage medium or computer device described above can be referred to the relevant descriptions on the server side and client side in the foregoing method embodiments. To avoid repetition, they will not be described one by one here.

[0199] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments of the above methods. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in a variety of forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0200] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is used as an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above.

[0201] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included within the protection scope of the present invention.

Claims

1. A surface emitting laser characterized by, The surface emitting laser unit is immersed in the beam shaping structure, the refractive index of the beam shaping structure is greater than the refractive index of air, so that the divergence angle of the laser emitted by the surface emitting laser unit located inside the beam shaping structure is compressed, and the side of the beam shaping structure away from the surface emitting laser unit is designed as a micro-curved surface, and the optical surface parameter of the micro-curved surface is designed so that the compressed laser is shaped and exits through the micro-curved surface. The divergence angle of the laser emitted by the surface emitting laser unit ranges from 23°±2°, and the compressed divergence angle ranges from 7°±1°.

2. The surface emitting laser of claim 1, wherein The optical surface parameter of the micro-curved surface is designed so that the beam of the laser exits in an extension direction parallel to the optical axis; or 3. The surface emitting laser of claim 2, wherein, The optical surface parameter of the micro-curved surface is designed so that the beam of the laser is focused to a point. The optical surface parameter of the micro-curved surface includes a curvature radius, and the calculation formula of the curvature radius is:

4. The surface emitting laser of claim 3, wherein, R=f·(n-1) / n, wherein R represents the curvature radius, f is the overall thickness of the beam shaping structure, the surface emitting laser unit is located at the focal point position of the beam shaping structure, and n represents the refractive index of the beam shaping structure. The overall thickness of the beam shaping structure is between 0.1 mm and 0.5 mm.

5. The surface emitting laser of claim 4, wherein, When the beam of the laser is focused to a point, the optical surface parameter of the micro-curved surface is determined by the overall thickness and the refractive index of the beam shaping structure and the distance between the vertex of the micro-curved surface and the input end surface of the optical waveguide.

6. The surface emitting laser of claim 3, wherein, The input end surface of the optical waveguide is arranged at the point where the beam of the laser is focused.

7. The surface emitting laser of claim 6, wherein, The shape of the micro-curved surface is aspherical, and the optical surface parameter includes the curvature radius and the conic constant of the micro-curved surface.

8. The surface emitting laser of claim 7, wherein, The value range of the curvature radius is (-0.2, 0) mm, and / or the value range of the conic constant is (-2.5, 0).

9. The surface emitting laser of claim 7, wherein, The size of the micro-curved surface is configured to completely receive the laser emitted by the surface emitting laser unit, and the projection of the micro-curved surface in the direction perpendicular to the optical axis completely covers the maximum spot area of the laser.

10. The surface emitting laser according to any one of claims 8 or 9, wherein The size of the micro-curved surface at the entrance of the laser satisfies: D≥2×L×tan(θ / 2), D is the minimum size of the micro-curved surface in the direction perpendicular to the optical axis, L is the distance between the surface emitting laser unit and the vertex of the micro-curved surface, and θ is the divergence angle of the laser.

11. The surface emitting laser of claim 10, wherein, The material of the beam shaping structure is any one of silicon dioxide, silicon nitride, and gallium arsenide.

12. The surface emitting laser according to any one of claims 1 to 9, wherein The optical communication transmitting module includes at least one optical communication transmitting unit, and the optical communication transmitting unit adopts the surface emitting laser according to any one of claims 1-12.

13. An optical communication transmitting module, characterized by comprising: The optical communication transmitting module includes a plurality of optical communication transmitting units, and each optical communication transmitting unit is arrayed and independently addressable.

14. The optical communication transmitting module of claim 13, wherein, The surface emitting laser unit is immersed in the beam shaping structure, the refractive index of the beam shaping structure is greater than the refractive index of air, so that the divergence angle of the laser emitted by the surface emitting laser unit located inside the beam shaping structure is compressed, and the side of the beam shaping structure away from the surface emitting laser unit is designed as a micro-curved surface, and the optical surface parameter of the micro-curved surface is designed so that the compressed laser is shaped and exits through the micro-curved surface.

15. An optical coupling system, comprising: ​ The light emission unit is optically coupled with the optical waveguide, and the light emission unit is the optical communication transmission module according to claim 13 or 14.

16. The light coupling system of claim 15, wherein, The optical waveguide is a single-core optical fiber or a multi-core optical fiber.

17. A high-speed optical interconnection module, comprising a transmission end, a coupling end and a receiving end, wherein the transmission end is the optical communication transmission module according to claim 13, and the coupling end is the optical coupling system according to claim 15.

18. A method of designing a surface emitting laser, characterized by, Comprise: A surface emitting laser unit and a beam shaping structure, wherein the surface emitting laser unit is immersed in the beam shaping structure, the refractive index of the beam shaping structure is greater than that of air, so that the divergence angle of the laser emitted by the surface emitting laser unit located in the beam shaping structure is compressed, and the side of the beam shaping structure away from the surface emitting laser unit is designed as a micro-curved surface, and the optical surface parameters of the micro-curved surface are designed to make the compressed laser exit after being shaped by the micro-curved surface. The method comprises: Obtaining the overall thickness of the beam shaping structure and the refractive index of the beam shaping structure; According to the obtained overall thickness and refractive index, the optical surface parameters of the micro-curved surface are calculated.

19. The method of designing a surface emitting laser according to claim 18, wherein The optical surface parameters of the micro-curved surface include a curvature radius, and the calculation formula of the curvature radius is: R=f·(n-1) / n, wherein R represents the curvature radius, f is the overall thickness of the beam shaping structure, the surface emitting laser unit is located at the focal point position of the beam shaping structure, and n represents the refractive index of the beam shaping structure.

20. The method of designing a surface emitting laser as claimed in claim 18, wherein, The optical surface parameters of the micro-curved surface are designed to make the beam of the laser focus to a point, and the optical surface parameters include a curvature radius and a conic constant; The calculation of the optical surface parameters comprises: Taking obtaining the minimum spot size at the image plane as the optimization target, an evaluation function is constructed; wherein the micro-curved surface is an exit surface, the image plane is located at the input end surface position of the optical waveguide, the object point is the surface emitting laser unit, and the distance between the surface emitting laser unit and the exit surface is equal to the focal length; The optical surface parameters are iteratively optimized by an optimization algorithm, and when the evaluation function meets the convergence condition, the optimized optical surface parameters are output.

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