Automatic ash removal equipment capable of conveniently cleaning furnace bottom of monocrystalline silicon furnace

Abstract

The invention belongs to the technical field of single crystal furnaces, and particularly relates to automatic ash removal equipment convenient for cleaning the bottom of a monocrystalline silicon furnace, which comprises a shrinkage pipe communicated with the bottom of a waste discharge pipe and an ash removal module movably arranged in the waste discharge pipe and the shrinkage pipe, the ash removal module and the shrinkage pipe are coaxial, and an abutting support is arranged on the top of the waste discharge pipe. The ash removal module comprises a rotating shaft, a sleeve, a bearing part and an expansion arm; the telescopic expansion arm can enter the waste discharge pipe from the telescopic pipe under the driving of the sleeve, bonding impurities possibly existing on the inner wall of the waste discharge pipe can be cleaned under the non-stop condition, in addition, the expansion arm can be shrunk when entering the telescopic pipe from the waste discharge pipe, and the expansion arm is matched with the abutting support at the top of the waste discharge pipe to be fully expanded, so that the waste discharge pipe can be cleaned, and the service life of the waste discharge pipe is prolonged. The inner wall of the waste discharge pipe is effectively cleaned, the expansion arm can be contracted and expanded, the size of an opening in the connecting position of the contraction pipe and the waste discharge pipe can be reduced, and therefore the sealing effect is improved, and the risk is reduced.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of single crystal furnaces, in particular to an automatic dust cleaning equipment convenient for cleaning the bottom of a single crystal silicon furnace. BACKGROUND

[0002] A single crystal furnace is a device for growing a single crystal without dislocation by using a graphite heater to melt polycrystalline materials such as polycrystalline silicon in an inert gas (mainly nitrogen and helium) environment.

[0003] A single crystal furnace vacuum pipeline dust cleaning device is disclosed in a Chinese patent with the publication number CN117926408A. The device includes a vacuum pipeline with a dust cleaning pipe prefabricated on it. A vacuum dust cleaning mechanism is provided on the connecting flange at the end of the dust cleaning pipe. The vacuum dust cleaning mechanism includes a main connecting plate fixed to the flange. A center rod is sleeved on the main connecting plate. The center rod extends through the dust cleaning pipe and is fixed at the end of the vacuum pipeline. A dust scraping part is fixed to the end of the center rod. The other end of the center rod passes through a flexible bellows and is fixed to a driving plate. The two ends of the flexible bellows are respectively fixed to the main connecting plate and the driving plate. An extension cylinder is fixed to the main connecting plate to drive the driving plate to move. The center rod is sleeved in the flexible bellows to drive the dust scraping part to move. The dust scraping work on the vacuum pipeline is automatically completed without stopping the machine, solving the problem of the existing technology that the equipment needs to be stopped for dust cleaning, affecting the production efficiency of single crystal silicon rods.

[0004] In the above-mentioned prior art, although the center rod is driven by the extension cylinder to drive the dust scraping part into the vacuum pipeline, the inner wall of the vacuum pipeline is cleaned. However, due to the size limitation of the dust scraping part, the opening size of the connection between the dust cleaning pipe and the vacuum pipeline must be set larger. In order to accommodate the dust scraping part, the opening of the dust cleaning pipe must be made larger, which obviously increases the sealing difficulty and risk.

[0005] Therefore, the application provides an automatic dust cleaning equipment convenient for cleaning the bottom of a single crystal silicon furnace. SUMMARY

[0006] In order to make up for the shortcomings of the prior art and solve at least one technical problem raised in the background art.

[0007] The technical solution adopted by the application to solve its technical problems is as follows: the automatic dust cleaning equipment convenient for cleaning the bottom of a single crystal silicon furnace includes a converging pipe connected to the bottom of a waste pipe and a dust cleaning module movably arranged in the waste pipe and the converging pipe. The dust cleaning module is coaxial with the converging pipe, and an abutting support is arranged at the top of the waste pipe. The dust cleaning module includes a rotating shaft, a sleeve, a bearing part, and an expanding arm. The sleeve is sleeved on the outside of the rotating shaft, and the bearing part is elastically connected to the top of the sleeve. The expanding arm is hinged to the outer side wall of the bearing part. The driving module comprises a cylinder fixed on the fixed frame, and a supporting plate fixed on the output end of the cylinder; the rotating shaft is rotatably connected to the supporting plate; a bellows is further fixed between the supporting plate and the fixed frame; both ends of the bellows are sealingly connected to the fixed frame and the supporting plate; the bottom of the shrinkable tube is sealingly connected to the fixed frame; the bottom of the sleeve is arranged on the supporting plate; when the cylinder is started, the distance between the supporting plate and the fixed frame is reduced, the sleeve is driven by the supporting plate to enter the exhaust pipe from the shrinkable tube, and after contacting the abutting support, the expansion arm is unfolded to clean the inner wall of the exhaust pipe.

[0008] Preferably, the top of the exhaust pipe is an inlet, the bottom is an outlet, and the exhaust pipe has an L-shaped structure, the shrinkable tube is connected to the middle bending part of the exhaust pipe, a section of the exhaust pipe from the inlet to the middle bending part is coaxial with the shrinkable tube and the dust removal module, a section of the exhaust pipe from the middle bending part to the outlet intersects with the extension line of the shrinkable tube, and the abutting support is fixed to the inlet of the exhaust pipe.

[0009] Preferably, the bearing part comprises a bottom plate, a connecting column and a connecting seat; the bottom plate is elastically connected to the top of the sleeve, the connecting column is fixed above the bottom plate, and the connecting seat is elastically connected above the connecting column; the expansion arm is hingedly connected to the side wall of the connecting column, a hinge arm is arranged between the side wall of the expansion arm and the connecting seat, and the expansion arm and the connecting seat are hingedly connected through the hinge arm.

[0010] Preferably, a groove is formed in the side wall of the connecting column; a sliding rod is fixed on the bottom plate corresponding to the groove; a sliding block is slidingly connected to the sliding rod; the sliding block is retracted in the groove; a second spring is sleeved on the sliding rod, and the two ends of the second spring are fixed between the bottom surface of the groove and the sliding block; one end of the expansion arm is hingedly connected to the sliding block, and the other end of the expansion arm is hingedly connected to a scraper.

[0011] Preferably, a contraction groove is formed in the inner side of the expansion arm; a flexible rod is fixed to the inner side of the scraper, one end of the flexible rod is fixed to the scraper, and the other end of the flexible rod penetrates through the side wall of the contraction groove; a third spring is sleeved on the flexible rod, and the two ends of the third spring are fixed between the scraper and the contraction groove.

[0012] Preferably, a partition plate is fixed to the top of the sleeve; a first spring is fixed between the partition plate and the bottom plate, the first spring is sleeved outside the rotating shaft, four corner supporting rods are fixed to the partition plate, and the supporting rods penetrate through the bottom plate.

[0013] Preferably, a rod is fixedly connected to the bottom of the connecting seat, and a slot is provided at the top of the connecting column corresponding to the rod; a through hole is provided on the side wall of the connecting column corresponding to the slot, and the through hole and the slot are perpendicularly intersecting; a rod is slidably connected in the through hole; when the sleeve pushes the bearing part to move upward and contact the bracket, the connecting seat is squeezed and pressed tightly against the connecting column, and the expansion arm is unfolded in conjunction with the hinge arm, so that the scraper is in contact with the inner wall of the waste discharge pipe.

[0014] Preferably, a rope is fixed to the top of the support rod, with one end of the rope fixed to the top of the support rod and the other end fixed to the end of the clamp rod; when the expansion arm is obstructed during retraction, the bearing part and the sleeve elastically separate, the rope is passively tightened and the clamp rod is pulled out, so that the connecting seat is separated from the connecting seat, and then the expansion arm can retract.

[0015] Preferably, a fourth spring is fixedly connected to the bottom of the connecting seat, and the two ends of the fourth spring are fixedly connected between the connecting seat and the connecting post.

[0016] Preferably, the connecting column and the rotating shaft are connected via a spline drive.

[0017] The beneficial effects of this invention are as follows: 1. The automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace, as described in this invention, utilizes a retractable and expandable expansion arm. Under the drive of the sleeve, it can enter the waste discharge pipe from the shrink tube, thereby cleaning any adhering impurities that may be present on the inner wall of the waste discharge pipe without stopping the machine. In addition, the expansion arm can retract when entering the shrink tube from the waste discharge pipe and expand fully when it cooperates with the abutment bracket at the top of the waste discharge pipe, thereby achieving effective cleaning of the inner wall of the waste discharge pipe. Furthermore, because the expansion arm can retract and expand, the opening size at the connection between the shrink tube and the waste discharge pipe can be reduced, thereby improving the sealing effect and reducing the risk. 2. The automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace, as described in this invention, achieves locking between the connecting column and the connecting seat by opening an insertion hole on the insertion rod and by inserting the locking rod into the insertion hole under the action of spring force. When the sleeve pushes the bearing part and the expansion arm to move upward, the connecting seat can be passively pressed against the connecting seat after contacting the abutment bracket, so that the insertion rod enters the locking groove and is locked under the action of the locking rod, thereby locking the expansion angle of the expansion arm, so as to achieve scraping and cleaning of the inner wall of the waste discharge pipe when the sleeve moves. Attached Figure Description

[0018] The invention will now be further described with reference to the accompanying drawings.

[0019] Figure 1 This is a perspective view of the present invention; Figure 2 This is a top view of the present invention; Figure 3 yes Figure 2Sectional view at point AA; Figure 4 yes Figure 3 A magnified view of a portion of the image; Figure 5 This is a perspective view of the dust removal module in this invention; Figure 6 yes Figure 5 Enlarged view of point a in the image; Figure 7 This is a top view of the dust removal module in this invention; Figure 8 yes Figure 7 Sectional view at point BB in the middle; In the diagram: 1. Waste discharge pipe; 11. Inlet; 12. Outlet; 13. Abutment bracket; 2. Cylinder; 21. Support plate; 22. Corrugated pipe; 3. Fixing frame; 4. Shrinkage pipe; 5. Dust removal module; 51. Rotating shaft; 52. Sleeve; 521. Support rod; 522. First spring; 523. Rope; 524. Partition plate; 525. Clamping rod; 53. Bearing part; 531. Base plate; 532. Connecting column; 533. Connecting seat; 534. Groove; 535. Sliding rod; 536. Second spring; 537. Sliding block; 538. Through hole; 539. Insert rod; 54. Expansion arm; 541. Scraper; 543. Third spring; 544. Flexible rod; 55. Hinge arm; 56. Fourth spring. Detailed Implementation

[0020] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0021] like Figures 1 to 8 As shown in the embodiment of the present invention, an automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace includes a shrink tube 4 connected to the bottom of a waste discharge pipe 1, and an ash removal module 5 movable within the waste discharge pipe 1 and the shrink tube 4; the ash removal module 5 is coaxial with the shrink tube 4, and an abutment bracket 13 is provided at the top of the waste discharge pipe 1. The dust removal module 5 includes a rotating shaft 51, a sleeve 52, a bearing part 53, and an expansion arm 54; the sleeve 52 is sleeved on the outside of the rotating shaft 51, and the bearing part 53 is elastically connected to the top of the sleeve 52; the expansion arm 54 is hinged to the outer wall of the bearing part 53. It also includes a drive module, which drives the sleeve 52 from the contraction tube 4 into the waste discharge tube 1. The drive module includes a cylinder 2 fixed to the fixed frame 3 and a support plate 21 fixed to the output end of the cylinder 2. The rotating shaft 51 is rotatably connected to the support plate 21. A corrugated pipe 22 is also fixed between the support plate 21 and the fixed frame 3. Both ends of the corrugated pipe 22 are sealed to the fixed frame 3 and the support plate 21. The bottom of the contraction tube 4 is sealed to the fixed frame 3. The bottom of the sleeve 52 is set on the support plate 21. When the cylinder 2 is started, the distance between the support plate 21 and the fixed frame 3 decreases. The sleeve 52 enters the waste discharge tube 1 from the contraction tube 4 under the drive of the support plate 21. After contacting the abutment bracket 13, the expansion arm 54 unfolds to clean the inner wall of the waste discharge tube 1.

[0022] In the existing technology, the scraping part is driven into the vacuum pipe by the telescopic cylinder driving the central rod, which achieves the cleaning of the inner wall of the vacuum pipe. However, due to the limitation of the size of the scraping part, the opening size at the connection between the cleaning pipe and the vacuum pipe must be set to be large. That is, in order to accommodate the scraping part, the opening of the cleaning pipe has to be made large, which obviously increases the sealing difficulty and risk. In this embodiment, the connection between the shrink tube 4 and the waste discharge pipe 1 is recessed, thereby reducing the size of the opening at the connection between the shrink tube 4 and the waste discharge pipe 1. Combined with the foldable and retractable dust removal module 5, the dust removal module 5 can smoothly pass through the relatively small opening between the shrink tube 4 and the waste discharge pipe 1, thus improving the sealing effect and reducing risk. Specifically, in actual use, the drive module drives the sleeve 52 from the shrink tube 4 into the waste discharge pipe 1. Before the sleeve 52 drives the bearing part 53 to reach the top of the waste discharge pipe 1 (before contacting the abutment bracket 13), the expansion arm 54 remains in a retracted state. Only after the bearing part 53 contacts the abutment bracket 13 will the expansion arm 54 unfold. With the compression of the bearing part 53 and the abutment bracket 13, the expansion arm 54 expands outward as much as possible until it abuts against the inner wall of the waste discharge pipe 1. At this point, the expansion arm 54 is fully expanded, and the position of the expansion arm 54 and the bearing part 53 at this time is defined as the upper stop position. Subsequently, the sleeve 52 drives the bearing part 53 to move downward. The expansion arm 54 maintains its expanded posture and, driven by the sleeve 52, can progressively clean the inner wall of the waste discharge pipe 1. Based on the above, using the retractable expansion arm 54, the waste discharge pipe 1 can be entered from the shrink tube 4 under the drive of the sleeve 52, thus cleaning any adhering impurities that may exist on the inner wall of the waste discharge pipe 1 without stopping the machine. In addition, the expansion arm 54 can retract when entering the shrink tube 4 from the waste discharge pipe 1, and can fully expand at the top of the waste discharge pipe 1 in cooperation with the abutment bracket 13, thus effectively cleaning the inner wall of the waste discharge pipe 1. Furthermore, since the expansion arm 54 can retract and expand, the opening size at the connection between the shrink tube 4 and the waste discharge pipe 1 can be reduced, thereby improving the sealing effect and reducing the risk. In this embodiment, the bellows 22 is used for sealing, and the cylinder 2 is used to drive the adjustment of the distance between the support plate 21 and the fixing frame 3, that is, the axial displacement of the sleeve 52 is achieved based on the cylinder 2. In addition, the cylinder 2 can also be replaced by other similar devices, such as the telescopic cylinder disclosed in the prior art. Furthermore, in this embodiment, the rotating shaft 51 drives the bearing part 53 to rotate, so that the expansion arm 54 rotates while scraping against the wall, which can effectively clean the dead corners caused by pipe welds, depressions and other structures, and the dust removal effect is far superior to simple straight scraping. The rotational motion causes the contact point between the end of the expansion arm 54 and the inner wall of the pipe to change continuously, avoiding repeated wear of the fixed scraper at the same position, significantly extending the dust removal part and service life. In addition, the shearing force brought by the rotation is more conducive to peeling off the firmly bonded volatiles.

[0023] like Figures 1 to 3As shown, the top of the waste discharge pipe 1 is the inlet 11, the bottom is the outlet 12, and the waste discharge pipe 1 has an L-shaped structure. The shrink pipe 4 is connected to the bend in the middle of the waste discharge pipe 1. The section of the waste discharge pipe 1 from the inlet 11 to the bend in the middle is coaxial with the shrink pipe 4 and the dust removal module 5. The section of the waste discharge pipe 1 from the bend in the middle to the outlet 12 intersects with the extension line of the shrink pipe 4. The abutment bracket 13 is fixedly connected to the inlet 11 of the waste discharge pipe 1.

[0024] like Figures 3 to 6 As shown, the supporting part 53 includes a base plate 531, a connecting column 532, and a connecting seat 533; the base plate 531 is elastically connected to the top of the sleeve 52, the connecting column 532 is fixedly connected above the base plate 531, and the connecting seat 533 is elastically connected above the connecting column 532; the expansion arm 54 is hinged to the side wall of the connecting column 532, and a hinge arm 55 is provided between the side wall of the expansion arm 54 and the connecting seat 533, and the expansion arm 54 and the connecting seat 533 are hinged through the hinge arm 55.

[0025] In this embodiment, when the sleeve 52 drives the bearing part 53 to enter the waste discharge pipe 1 from the shrink tube 4, the elastic connection between the base plate 531 and the sleeve 52 squeezes the bearing part 53 into the waste discharge pipe 1. At this time, the expansion arm 54 is in a contracted state. When the sleeve 52 continues to squeeze the bearing part 53, the expansion arm 54 moves upward until the connecting seat 533 contacts the abutting bracket 13. Since the connecting seat 533 and the expansion arm 54 are hinged by the hinge arm 55, when the connecting seat 533 is subjected to the reaction force and gradually approaches and adheres to the top of the connecting column 532, the expansion arm 54 is affected and expands, thereby abutting against the inner wall of the waste discharge pipe 1. With the sleeve 52 driving, the inner wall of the waste discharge pipe 1 can be cleaned. When it is necessary to retract the bearing part 53 and the expansion arm 54 into the shrink tube 4, the expansion arm 54 can be deflected inward by compression to achieve shrinkage until the expansion arm 54 can enter the connection between the shrink tube 4 and the waste discharge pipe 1 and smoothly enter the shrink tube 4. In this embodiment, the purpose of elastically connecting the connecting seat 533 and the connecting post 532 is that when no external force is applied to the connecting seat 533, the connecting seat 533 can move away from the connecting post 532 under the action of elastic force, so that the expansion arm 54 is subjected to an inward pulling force under the cooperation of the hinge arm 55, which is conducive to the contraction of the expansion arm 54.

[0026] like Figures 3 to 6As shown, a groove 534 is provided on the side wall of the connecting column 532; a sliding rod 535 is fixedly connected to the base plate 531 corresponding to the groove 534, and a slider 537 is slidably connected to the sliding rod 535. The slider 537 retracts into the groove 534. A second spring 536 is sleeved on the sliding rod 535, and the two ends of the second spring 536 are respectively fixed between the bottom surface of the groove 534 and the slider 537; one end of the expansion arm 54 is hinged to the slider 537, and the other end of the expansion arm 54 is hinged to a scraper 541.

[0027] As described above, in this embodiment, one end of the expansion arm 54 is hinged to the slider 537, and the other end is hinged to the scraper 541. When the connecting seat 533 is squeezed and approaches the connecting post 532, the expansion arm 54 will expand outward and drive the scraper 541 to adhere to the inner wall of the waste discharge pipe 1. After the expansion arm 54 has expanded, the sleeve 52 drives the expansion arm 54 to move freely up and down in the waste discharge pipe 1 to clean the inside of the waste discharge pipe 1. It is worth noting that in this embodiment, in order to cooperate with the connecting seat 533 to retract the expansion arm 54, a second spring 536 is also provided between the slider 537 and the groove 534. It can be understood that the second spring 536 is used to drive the slider 537 to slide downward. When the connecting seat 533 is squeezed and the expansion arm 54 expands outward, the slider 537 slides upward. At this time, the second spring 536 is in a compressed state. When the connecting seat 533 separates from the connecting post 532, the expansion arm 54 can quickly return to its original position under the action of the second spring 536.

[0028] like Figures 3 to 6 As shown, a shrinkage groove is provided on the inner side of the expansion arm 54; a flexible rod 544 is fixedly connected to the inner side of the scraper 541, and one end of the flexible rod 544 is fixedly connected to the scraper 541, and the other end passes through the side wall of the shrinkage groove. A third spring 543 is sleeved on the flexible rod 544, and the two ends of the third spring 543 are fixedly connected between the scraper 541 and the shrinkage groove.

[0029] To ensure that the inner wall of the waste discharge pipe 1 can be cleaned based on the scraper 541 after the expansion arm 54 is extended, and further, to prevent the scraper 541 from scratching the inner wall of the waste discharge pipe 1, it is necessary to ensure that the scraper 541 is as parallel as possible to the inner wall of the waste discharge pipe 1. In this embodiment, under the action of the third spring 543 and the flexible rod 544, the scraper 541 can maintain an inclined state in the initial state (without external force). Specifically, the scraper 541 is inclined downward toward the inner wall of the waste discharge pipe 1 and upward toward the side wall of the connecting column 532. Based on this, when the expansion arm 54 is extended, the lower part of the scraper 541 will first contact the inner wall of the waste discharge pipe 1, and under continuous pressure, the scraper 541 will be parallel to the inner wall of the waste discharge pipe 1. Thus, in the subsequent cleaning process, the inner wall of the waste discharge pipe 1 will not be excessively squeezed and cut, causing damage to the inner wall of the waste discharge pipe 1.

[0030] like Figures 3 to 6 As shown, a partition plate 524 is fixedly connected to the top of the sleeve 52; a first spring 522 is fixedly connected between the partition plate 524 and the bottom plate 531, and the first spring 522 is sleeved on the outside of the rotating shaft 51; support rods 521 are fixedly connected to the four corners of the partition plate 524, and the support rods 521 penetrate the bottom plate 531.

[0031] like Figures 7 to 8 As shown, the bottom of the connecting seat 533 is fixedly connected to the insertion rod 539, and the top of the connecting column 532 is provided with a slot corresponding to the insertion rod 539; the side wall of the connecting column 532 is provided with a through hole 538 corresponding to the slot, and the through hole 538 is perpendicular to the slot; a locking rod 525 is slidably connected in the through hole 538; when the sleeve 52 pushes the bearing part 53 to move upward and contact the bracket 13, the connecting seat 533 is squeezed and pressed tightly against the connecting column 532, and the expansion arm 54 is unfolded in cooperation with the hinge arm 55, so that the scraper 541 is attached to the inner wall of the waste discharge pipe 1.

[0032] It is worth noting that in the above embodiment, after the sleeve 52 drives the bearing part 53 and the expansion arm 54 upward into the waste discharge pipe 1, the expansion arm 54 is initially in a contracted state. Only when the connecting seat 533 contacts the abutting bracket 13, and the connecting seat 533 is subjected to a reverse force and gradually approaches the connecting post 532, will the expansion arm 54 begin to expand outward. During this process, the connecting seat 533 gradually approaches the connecting post 532, and the insertion rod 539 at the bottom of the connecting seat 533 will be inserted into the slot at the top of the connecting post 532. The bottom of the insertion rod 539 is provided with an inclined surface facing the locking rod 525, and the locking rod 525 is pre-inserted into the through hole 538 by the spring force. It is foreseeable that when the insertion rod 539 is inserted into the slot as the connecting seat 533 gradually moves downward, the inclined surface on the side of the insertion rod 539 will squeeze the locking rod 525, causing the locking rod 525 to spring back. The spring force causes the rod to move outward. After the rod 539 is inserted into place, the locking rod 525 will abut against the surface of the rod 539. If the surface of the rod 539 is provided with a socket, the locking rod 525 will be inserted into the socket under the action of the spring force. In this embodiment, since the expansion arm 54 needs to maintain the expansion angle after expansion so as to scrape and clean the inner wall of the waste pipe 1 when it moves with the sleeve 52, the rod 539 needs to have a socket, and the locking rod 525 can be inserted into the socket under the action of the spring force to lock the connecting post 532 and the connecting seat 533. That is, when the sleeve 52 pushes the bearing part 53 and the expansion arm 54 to move upward, the connecting seat 533 can be passively pressed against the connecting seat 533 after contacting the abutment bracket 13, so that the rod 539 passes into the slot and is locked under the action of the locking rod 525 to lock the expansion angle of the expansion arm 54.

[0033] likeFigures 3 to 8 As shown, a rope 523 is fixed to the top of the support rod 521, with one end of the rope 523 fixed to the top of the support rod 521 and the other end fixed to the end of the clamp rod 525. When the expansion arm 54 is obstructed during retraction, the bearing part 53 and the sleeve 52 elastically separate, the rope 523 is passively tightened and the clamp rod 525 is pulled out, causing the connecting seat 533 to separate from the connecting seat 533, after which the expansion arm 54 can retract.

[0034] Correspondingly, when the bearing part 53 and the expansion arm 54 need to be retracted into the contraction tube 4, the expansion angle of the expansion arm 54 is also locked due to the locking of the connecting seat 533 and the connecting post 532. At this time, the expansion arm 54 cannot smoothly enter the contraction tube 4 from the waste discharge tube 1 when it is not retracted. Considering that the bearing part 53 and the expansion arm 54 need to freely shuttle between the waste discharge tube 1 and the contraction tube 4 as the sleeve 52 pulls / pushes, the bearing part 53 and the sleeve 52 are set as an elastic connection, and the connection is achieved based on the first spring 522 and the support rod 521. When the sleeve 52 pushes the bearing part 53 from the contraction tube 4 into the waste discharge tube 1, the support rod 521 plays a connecting role, while the first spring 522 provides a buffering role. When the sleeve 52 pulls the bearing part 53 from the waste discharge tube 1 into the contraction tube 4, At this time, the expansion arm 54 is in an expanded and locked state. Therefore, when the sleeve 52 is pulled into the contraction tube 4, it will encounter resistance. At this time, the bearing part 53 and the sleeve 52 will elastically separate, that is, the gap will widen. However, under the connection of the first spring 522 and the support rod 521, they will not actually separate. However, when the support rod 521 slides, it will pull the locking rod 525 based on the rope 523, so that the locking rod 525 will separate from the insertion hole. When the locking rod 525 is completely separated from the insertion hole, the sleeve 52 will pull the bearing part 53 again. Since the connecting seat 533 and the connecting post 532 are no longer locked at this time, when the expansion arm 54 is squeezed at the connection between the contraction tube 4 and the waste discharge tube 1, the second spring 536 can realize the rapid reset and contraction of the expansion arm 54, so as to smoothly enter the contraction tube 4.

[0035] like Figures 3 to 8 As shown, a fourth spring 56 is fixedly connected to the bottom of the connecting seat 533, and the two ends of the fourth spring 56 are fixedly connected between the connecting seat 533 and the connecting post 532.

[0036] In this embodiment, the fourth spring 56 and the second spring 536 have similar functions, both used to drive the expansion arm 54 to quickly retract and reset without external force. It can be understood that in this embodiment, the fourth spring 56 is located between the connecting seat 533 and the connecting post 532. That is, as in the above embodiment, when the expansion arm 54 is obstructed from retracting, the rope 523 pulls out the locking rod 525. At this time, the insertion rod 539 is no longer limited. Under the action of the fourth spring 56, it can help the connecting seat 533 and the connecting post 532 to quickly separate. The quick separation of the connecting seat 533 and the connecting post 532 can be achieved by the action of the hinge arm 55 and the cooperation of the second spring 536 to pull the expansion arm 54 to quickly retract and reset.

[0037] like Figures 1 to 3 As shown, the connecting column 532 and the rotating shaft 51 are connected by a spline drive.

[0038] In this embodiment, the connecting column 532 and the rotating shaft 51 are connected by a spline drive, which enables the expansion arm 54 to rotate and clean inside the waste discharge pipe 1. Compared with linear scraping, rotational cleaning can effectively clean the dead corners caused by pipe welds, dents and other structures. It is worth noting that since the connecting column 532 and the sleeve 52 are connected by a support rod 521, when the connecting column 532 rotates, the sleeve 52 will also move accordingly. Therefore, the sleeve 52 and the support plate 21 are rotatably connected.

[0039] Working principle: The connection between the shrink tube 4 and the waste discharge pipe 1 is recessed, thereby reducing the size of the opening at the connection point. Combined with the foldable and retractable dust removal module 5, this allows the dust removal module 5 to freely pass through the relatively small opening between the shrink tube 4 and the waste discharge pipe 1, thus improving the sealing effect and reducing risk. Specifically, in actual use, the drive module drives the sleeve 52 from the shrink tube 4 into the waste discharge pipe 1. Before the sleeve 52 drives the bearing part 53 to reach the top of the waste discharge pipe 1 (before contacting the abutment bracket 13), the expansion arm 54 remains retracted. Only after the bearing part 53 contacts the abutment bracket 13 will the expansion arm 54 unfold. With the compression of the bearing part 53 and the abutment bracket 13, the expansion arm 54 expands outward as much as possible until it abuts against the inner wall of the waste discharge pipe 1. At this point, the expansion arm 54 is fully expanded. The position of the expansion arm 54 and the bearing part 53 at this moment is defined as the upper stop position. Subsequently, the sleeve 52 drives the bearing part 53 to move downward. The expansion arm 54 maintains its expanded posture and, driven by the sleeve 52, can progressively clean the inner wall of the waste discharge pipe 1. Based on the above, using the retractable expansion arm 54, the waste discharge pipe 1 can be entered from the shrink tube 4 under the drive of the sleeve 52, thus cleaning any adhering impurities that may exist on the inner wall of the waste discharge pipe 1 without stopping the machine. In addition, the expansion arm 54 can retract when entering the shrink tube 4 from the waste discharge pipe 1, and can fully expand at the top of the waste discharge pipe 1 in cooperation with the abutment bracket 13, thus effectively cleaning the inner wall of the waste discharge pipe 1. Furthermore, since the expansion arm 54 can retract and expand, the opening size at the connection between the shrink tube 4 and the waste discharge pipe 1 can be reduced, thereby improving the sealing effect and reducing the risk. In this embodiment, the bellows 22 is used for sealing, and the cylinder 2 is used to drive the adjustment of the distance between the support plate 21 and the fixing frame 3, that is, the axial displacement of the sleeve 52 is achieved based on the cylinder 2. In addition, the cylinder 2 can also be replaced by other similar devices, such as the telescopic cylinder disclosed in the prior art. Furthermore, in this embodiment, the rotating shaft 51 drives the bearing part 53 to rotate, so that the expansion arm 54 rotates while scraping against the wall, which can effectively clean the dead corners caused by pipe welds, depressions and other structures, and the dust removal effect is far superior to simple straight scraping. The rotational motion causes the contact point between the end of the expansion arm 54 and the inner wall of the pipe to change continuously, avoiding repeated wear of the fixed scraper at the same position, significantly extending the dust removal part and service life. In addition, the shearing force brought by the rotation is more conducive to peeling off the firmly bonded volatiles.

[0040] When the sleeve 52 drives the bearing part 53 to enter the waste discharge pipe 1 from the contraction tube 4, the elastic connection between the base plate 531 and the sleeve 52 compresses the bearing part 53 into the waste discharge pipe 1. At this time, the expansion arm 54 is in a contracted state. As the sleeve 52 continues to compress the bearing part 53, the expansion arm 54 moves upward until the connecting seat 533 contacts the abutting bracket 13. Since the connecting seat 533 and the expansion arm 54 are hinged by the hinge arm 55, when the connecting seat 533 is subjected to a reaction force and gradually approaches and abuts against the top of the connecting column 532, the expansion arm 54 is affected and expands, thereby abutting against the inner wall of the waste discharge pipe 1. This, combined with the drive of the sleeve 52, can achieve... Cleaning the inner wall of the waste discharge pipe 1; when it is necessary to retract the bearing part 53 and the expansion arm 54 into the contraction pipe 4, the expansion arm 54 can be deflected inward by compression to achieve contraction until the expansion arm 54 can enter the connection between the contraction pipe 4 and the waste discharge pipe 1 and smoothly enter the contraction pipe 4; in this embodiment, the purpose of elastically connecting the connecting seat 533 and the connecting column 532 is that when no external force is applied to the connecting seat 533, the connecting seat 533 can move away from the connecting column 532 under the action of elastic force, so that under the cooperation of the hinge arm 55, the expansion arm 54 is subjected to an inward pulling force, which is conducive to the contraction of the expansion arm 54.

[0041] One end of the expansion arm 54 is hinged to the slider 537, and the other end is hinged to the scraper 541. When the connecting seat 533 is compressed and approaches the connecting post 532, the expansion arm 54 will expand outward and drive the scraper 541 to adhere to the inner wall of the waste discharge pipe 1. After the expansion arm 54 has fully expanded, the sleeve 52 drives the expansion arm 54 to move freely up and down within the waste discharge pipe 1, thereby cleaning the inside of the waste discharge pipe 1. It is worth noting that in this embodiment, in order to cooperate with the connecting seat 533 to retract the expansion arm 54, a second spring 536 is also provided between the slider 537 and the groove 534. It can be understood that the second spring 536 is used to drive the slider 537 to slide downward, and the connecting... When the connecting seat 533 is compressed, causing the expansion arm 54 to unfold outward, the slider 537 slides upward. At this time, the second spring 536 is in a compressed state. After the connecting seat 533 separates from the connecting post 532, the expansion arm 54 can quickly return to its original position under the action of the second spring 536. When the sleeve 52 drives the bearing part 53 and the expansion arm 54 upward into the waste discharge pipe 1, the expansion arm 54 is initially in a contracted state. Only when the connecting seat 533 contacts the abutment bracket 13, and the connecting seat 533 is subjected to a reverse force and gradually approaches the connecting post 532, will the expansion arm 54 begin to expand outward. During this process, the connecting seat 533 gradually approaches the connecting post 532. 32. The insertion rod 539 at the bottom of the connecting seat 533 will be inserted into the slot at the top of the connecting post 532. The bottom of the insertion rod 539 has an inclined surface facing the locking rod 525, and the locking rod 525 is pre-inserted into the through hole 538 under the action of spring force. It is foreseeable that when the insertion rod 539 is inserted into the slot as the connecting seat 533 moves downward, the inclined surface of the insertion rod 539 will squeeze the locking rod 525, causing the locking rod 525 to move outward against the spring force. After the insertion rod 539 is inserted into place, the locking rod 525 will abut against the surface of the insertion rod 539. If the surface of the insertion rod 539 is provided with a hole, the locking rod 525 will be inserted into the hole under the action of spring force. In this embodiment, since the expansion arm 54 needs to maintain a constant expansion angle after expansion in order to scrape and clean the inner wall of the waste pipe 1 as it moves with the sleeve 52, an insertion hole needs to be opened on the insertion rod 539, and the locking rod 525 can be inserted into the insertion hole under the action of spring force to lock the connecting post 532 and the connecting seat 533. That is, when the sleeve 52 pushes the bearing part 53 and the expansion arm 54 to move upward, the connecting seat 533 can be passively pressed against the connecting seat 533 after contacting the abutment bracket 13, so that the insertion rod 539 is inserted into the slot and locked under the action of the locking rod 525 to lock the expansion angle of the expansion arm 54.

[0042] When the bearing portion 53 and the expansion arm 54 need to be retracted into the contraction tube 4, the expansion angle of the expansion arm 54 is also locked due to the locking of the connecting seat 533 and the connecting post 532. At this time, the expansion arm 54 cannot smoothly enter the contraction tube 4 from the waste discharge pipe 1 when not retracted. Considering the need for the bearing portion 53 and the expansion arm 54 to freely shuttle between the waste discharge pipe 1 and the contraction tube 4 as the sleeve 52 pulls / pushes, the bearing portion 53 and the sleeve 52 are configured as an elastic connection, based on the first spring 522 and the support rod 521. When the sleeve 52 pushes the bearing portion 53 from the contraction tube 4 into the waste discharge pipe 1, the support rod 521 acts as a connector, while the first spring 522 provides a buffer. When the sleeve 52 pulls the bearing portion 53 from the waste discharge pipe 1 into the contraction tube 4, at this time… When the expansion arm 54 is in an expanded and locked state, the sleeve 52 will encounter resistance when it is pulled into the contraction tube 4. At this time, the bearing part 53 and the sleeve 52 will elastically separate, that is, the gap will widen. However, under the connection of the first spring 522 and the support rod 521, they will not actually separate. But when the support rod 521 slides, it will pull the locking rod 525 based on the rope 523, so that the locking rod 525 will separate from the insertion hole. When the locking rod 525 is completely separated from the insertion hole, the sleeve 52 will pull the bearing part 53 again. Since the connecting seat 533 and the connecting post 532 are no longer locked at this time, when the expansion arm 54 is squeezed at the connection between the contraction tube 4 and the waste discharge tube 1, the second spring 536 can realize the rapid reset and contraction of the expansion arm 54, so as to smoothly enter the contraction tube 4.

[0043] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace, characterized in that: It includes a shrink tube (4) connected to the bottom of the waste discharge pipe (1) and a dust removal module (5) movable in the waste discharge pipe (1) and the shrink tube (4); the dust removal module (5) is coaxial with the shrink tube (4) and the top of the waste discharge pipe (1) is provided with an abutment bracket (13). The dust removal module (5) includes a rotating shaft (51), a sleeve (52), a bearing part (53), and an expansion arm (54); the sleeve (52) is sleeved on the outside of the rotating shaft (51), and the bearing part (53) is elastically connected to the top of the sleeve (52); the expansion arm (54) is hinged to the outer wall of the bearing part (53). It also includes a drive module for driving the sleeve (52) from the contraction tube (4) into the waste discharge tube (1); the drive module includes a cylinder (2) fixed to the fixed frame (3), and a support plate (21) fixed to the output end of the cylinder (2); the rotating shaft (51) is rotatably connected to the support plate (21); a corrugated pipe (22) is also fixed between the support plate (21) and the fixed frame (3); both ends of the corrugated pipe (22) are connected to the fixed frame (3). All the trays (21) are sealed together, and the bottom of the shrink tube (4) is sealed to the fixed frame (3); the bottom of the sleeve (52) is set on the tray (21); when the cylinder (2) is started, the distance between the tray (21) and the fixed frame (3) is reduced, and the sleeve (52) enters the waste discharge pipe (1) through the shrink tube (4) under the drive of the tray (21), and after contacting the abutment bracket (13), the expansion arm (54) is opened to clean the inner wall of the waste discharge pipe (1).

2. The automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace according to claim 1, characterized in that: The top of the waste discharge pipe (1) is the inlet (11) and the bottom is the outlet (12). The waste discharge pipe (1) has an L-shaped structure. The shrink pipe (4) is connected to the bend in the middle of the waste discharge pipe (1). The section of the waste discharge pipe (1) from the inlet (11) to the bend in the middle is coaxial with the shrink pipe (4) and the dust removal module (5). The section of the waste discharge pipe (1) from the bend in the middle to the outlet (12) intersects with the extension line of the shrink pipe (4). The abutment bracket (13) is fixed to the inlet (11) of the waste discharge pipe (1).

3. The automatic ash removal device for facilitating the cleaning of the bottom of a monocrystalline silicon furnace according to claim 2, characterized in that: The bearing part (53) includes a base plate (531), a connecting column (532) and a connecting seat (533); the base plate (531) is elastically connected to the top of the sleeve (52), the connecting column (532) is fixed above the base plate (531), and the connecting seat (533) is elastically connected above the connecting column (532); the expansion arm (54) is hinged to the side wall of the connecting column (532), and a hinge arm (55) is provided between the side wall of the expansion arm (54) and the connecting seat (533), and the expansion arm (54) and the connecting seat (533) are hinged through the hinge arm (55).

4. The automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace according to claim 3, characterized in that: The connecting column (532) has a groove (534) on its side wall; a sliding rod (535) is fixedly connected to the bottom plate (531) corresponding to the groove (534), and a slider (537) is slidably connected to the sliding rod (535). The slider (537) is retracted in the groove (534). A second spring (536) is sleeved on the sliding rod (535), and the two ends of the second spring (536) are respectively fixed between the bottom surface of the groove (534) and the slider (537); one end of the expansion arm (54) is hinged to the slider (537), and the other end of the expansion arm (54) is hinged to a scraper (541).

5. An automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace according to claim 4, characterized in that: The expansion arm (54) has a shrinkage groove on its inner side; a flexible rod (544) is fixedly connected to the inner side of the scraper (541), and one end of the flexible rod (544) is fixedly connected to the scraper (541), and the other end passes through the side wall of the shrinkage groove. A third spring (543) is sleeved on the flexible rod (544), and both ends of the third spring (543) are fixedly connected between the scraper (541) and the shrinkage groove.

6. An automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace according to claim 5, characterized in that: A partition plate (524) is fixedly connected to the top of the sleeve (52); a first spring (522) is fixedly connected between the partition plate (524) and the bottom plate (531), and the first spring (522) is sleeved on the outside of the rotating shaft (51). Support rods (521) are fixedly connected to the four corners of the partition plate (524), and the support rods (521) penetrate the bottom plate (531).

7. An automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace according to claim 6, characterized in that: The bottom of the connecting seat (533) is fixedly connected to the insert rod (539), and the top of the connecting column (532) is provided with a slot corresponding to the insert rod (539); the side wall of the connecting column (532) is provided with a through hole (538) corresponding to the slot, and the through hole (538) is perpendicular to the slot; a locking rod (525) is slidably connected in the through hole (538); when the sleeve (52) pushes the bearing part (53) to move upward and contact the bracket (13), the connecting seat (533) is squeezed and tightly attached to the connecting column (532), and the expansion arm (54) is unfolded in conjunction with the hinge arm (55), so that the scraper (541) is attached to the inner wall of the waste discharge pipe (1).

8. An automatic ash removal device for facilitating the cleaning of the bottom of a monocrystalline silicon furnace according to claim 7, characterized in that: A rope (523) is fixed to the top of the support rod (521), with one end of the rope (523) fixed to the top of the support rod (521) and the other end fixed to the end of the clamp rod (525). When the expansion arm (54) is obstructed during contraction, the bearing part (53) and the sleeve (52) are elastically separated, and the rope (523) is passively tightened to pull out the clamp rod (525), causing the connecting seat (533) to separate from the connecting seat (533), after which the expansion arm (54) can be contracted.

9. An automatic ash cleaning device for facilitating the cleaning of the bottom of a monocrystalline silicon furnace according to claim 8, characterized in that: A fourth spring (56) is fixedly connected to the bottom of the connecting seat (533), and the two ends of the fourth spring (56) are fixedly connected between the connecting seat (533) and the connecting post (532).

10. An automatic ash removal device for easy cleaning of the bottom of a monocrystalline silicon furnace according to claim 9, characterized in that: The connecting column (532) and the rotating shaft (51) are connected by a spline drive.

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