Vacuum coating equipment and vacuum coating method

Abstract

The invention relates to the field of vacuum coating, and discloses vacuum coating equipment which comprises a vacuum coating chamber, a base is arranged in the vacuum coating chamber, a rotating disc which is vertically arranged and can rotate is arranged on the base, and a hanging mechanism comprises a plurality of hanging components which are arranged on the upper surface of the rotating disc and are distributed in an array mode in the circumferential direction. The suspension component comprises a fixing seat fixedly arranged on the upper surface of the rotating disc, a mounting hole is coaxially formed in the upper closed end of the fixing seat, a connecting nozzle is arranged on the outer circle face of the fixing seat, a main shaft is sleeved with the mounting hole, the interior of the main shaft is hollow, a side hole communicated with the fixing seat is formed in the outer circle face of the main shaft, and a core shaft is arranged in the main shaft through a support body. The lower end of the mandrel is located below the rotating disc and provided with a gear, an outer gear ring is fixedly arranged on the base, the outer gear ring is coaxially located below the rotating disc, the gear is meshed with the outer gear ring, and the mandrel is in power connection with the main shaft through a speed reducer.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, specifically to a vacuum coating equipment and a vacuum coating method. Background Technology

[0002] Vacuum plating is required in the production of small components for digital products such as mobile phones and smartwatches. Currently, sputtering deposition is commonly used to apply vacuum plating to these components. Furthermore, the components need to be cleaned, destaticated, and hung sequentially before vacuum coating. Hanging refers to suspending the components on the support. In existing technologies, holes on the components are generally used to hang them on hanging rods or hooks. However, this suspension method has some shortcomings. Specifically: When designing the vacuum coating, the suspension system of the components must ensure maximum loading capacity. Therefore, it is necessary to frequently hang the components one by one on the hooks. Since the small components of digital products are small in size and have small holes, care must be taken when suspending them to avoid damage. Frequent careful operation can easily lead to fatigue and errors. During the vacuum coating process after suspension, since the components are placed on the support in a suspended manner, and in order to improve the uniformity of vacuum coating, sputtering coating generally requires driving the support to rotate and revolve. During the rotation and revolve, the components will shake. Not only are adjacent components prone to collision, but the final coating result can also be affected.

[0003] Based on the above, the present invention proposes a vacuum coating equipment and a vacuum coating method. Summary of the Invention

[0004] To address the problems mentioned in the background above, the present invention provides a vacuum coating apparatus and a vacuum coating method.

[0005] To achieve the above-mentioned technical objectives, the technical solution adopted by the present invention is as follows.

[0006] A vacuum coating equipment includes a vacuum coating chamber, an opening of which is provided with a door, a base is provided inside the vacuum coating chamber, a rotating disk with its axis arranged vertically and capable of rotation is provided on the base, and a suspension mechanism provided inside the vacuum coating chamber includes suspension components provided on the upper surface of the rotating disk, and multiple suspension components are arranged in an array along the circumference of the rotating disk. The suspension component includes a fixed seat, the lower open end of which is fixedly mounted on the upper surface of the rotating disk, the upper closed end of which is coaxially provided with a mounting hole, the outer circular surface of which is provided with a connector, the mounting hole is fitted with a main shaft, the main shaft is hollow inside, and the outer circular surface of the main shaft is provided with a side hole communicating with the fixed seat. The spindle is mounted inside the main shaft via a support body. The lower end of the spindle is located below the rotating disk and is equipped with a gear. An external gear ring is fixedly mounted on the base. The external gear ring is coaxially located below the rotating disk and meshes with the gear. The spindle and the main shaft are connected by a reducer.

[0007] Furthermore, a motor is installed on the base, and a rotating shaft extends coaxially from the lower surface of the rotating disk. The rotating shaft and the motor are connected by a power connector.

[0008] Furthermore, a suspension assembly is provided on the outer circular surface of the main shaft. Multiple suspension assemblies are arranged in an array along the vertical direction. The suspension assembly includes multiple suspension units distributed in an array along the circumferential direction of the main shaft.

[0009] Furthermore, the outer circular surface of the spindle is provided with a suspension hole along the radial direction; The suspension unit includes a hollow shaft installed in the suspension hole. One end of the connecting shaft is located inside the main shaft and forms a power connection with the spindle. The other end of the connecting shaft is located outside the main shaft and is equipped with a connecting valve. The valve body of the connecting valve is provided with a connecting shell on the side opposite to the connecting shaft. The connecting shell has openings at both ends, with one opening connected to the valve body and the other opening equipped with a pump body. The open end of the pump body is equipped with a pump cover, and the closed end is equipped with a negative pressure hole. The pump cover is connected to the connecting shell, and the pump cover and the connecting shell are connected through the connecting hole. A suction nozzle is provided at the orifice of the negative pressure hole. The side of the valve body is equipped with a valve hole two that communicates with the connecting shell.

[0010] Furthermore, the side of the valve housing is provided with a valve hole one that communicates with the connecting shaft, and a valve hole two that communicates with valve hole one. A valve core is slidably disposed inside the valve housing. Initially, the valve core moves vertically. A spring is disposed below the valve core. A valve shaft extends from the upper end of the valve core, and the upper end of the valve shaft extends out of the valve housing. An annular groove is disposed on the outer circular surface of the valve core. Initially, the annular groove is located above the valve hole.

[0011] Furthermore, a piston is fitted inside the pump housing, and a spring is provided on the side of the piston away from the suction nozzle. A piston rod is provided at the end of the piston, and the end of the piston rod extends into the connecting housing and is provided with a protruding pin. A locking unit is provided inside the connecting housing. When the distance between the piston and the nozzle reaches its maximum value, the locking unit engages with the protruding pin to restrict the movement of the piston rod.

[0012] Furthermore, the upper surface of the connecting shell is provided with a guide hole, and the locking unit includes a guide rod that is slidably disposed in the guide hole. One end of the guide rod is located inside the connecting shell and is provided with an inner frame, and the other end is located outside the connecting shell and is provided with a button. A spring is provided below the inner frame. The inner frame is provided with a limit hole on the side facing the piston. The limit hole includes a vertical section. Initially, the vertical section is arranged vertically. The upper end of the vertical section is provided with a horizontal section arranged horizontally on the side facing the piston. An inlet and outlet section is provided through the horizontal section on the side facing the piston. The end opening of the inlet and outlet section is composed of two inclined walls. The distance between the two inclined walls decreases along the direction of piston movement and from the pump housing to the valve housing. Initially, spring two is not compressed, the distance between the piston and the nozzle is at its minimum, and the height of the protrusion is between the highest and lowest points of the lowest inclined wall.

[0013] A vacuum coating method using a vacuum coating equipment: Step 1: Open the door and hang the parts one by one on the suspension mechanism: First, the compressor connected to the end of the connector is started, creating a negative pressure environment inside the spindle. Then, attach the parts to the suction nozzle, press the corresponding valve shaft to connect the pump housing, connecting housing, valve housing, connecting shaft and main shaft. Under the negative pressure environment of the main shaft, the piston moves backward away from the suction nozzle, thereby achieving negative pressure adsorption of the parts through the suction nozzle. When the piston reaches its maximum backward distance, the negative pressure adsorption is completed and the piston movement is restricted by the locking unit. Then release the hand, and the connection between the main shaft and the valve housing is canceled. This completes the negative pressure adsorption suspension of a part. Step 2: Close the chamber door and proceed with the vacuum coating operation; Step 3: After vacuum coating is completed, open the chamber door and remove the components one by one: First, the compressor creates a positive pressure inside the spindle; Then, the worker holds the part in one hand and presses the button and valve shaft simultaneously with the other hand, causing the locking unit to release the restriction on the piston. At the same time, the pump housing, connecting housing, valve housing, connecting shaft and main shaft are connected. Since the main shaft is under positive pressure, the suspension unit resets and releases the suction of the part. The worker then removes the part and releases the pressure.

[0014] In step two, the rotating disk rotates along with the suspension mechanism. At the same time, with the cooperation of the gear, the external gear ring, and the reducer, the suspension unit rotates around the axis of the main shaft and the axis of the connecting shaft.

[0015] Compared with the prior art, the beneficial effects of this invention are as follows: This solution uses negative pressure adsorption suspension components, and its technical advantages are: Technical effect 1: The operator only needs to place the parts close to the suction nozzle and press the valve shaft to achieve negative pressure adsorption suspension. Compared with the existing technology that uses the holes of the parts themselves to achieve suspension, the suspension method of this solution is simple, convenient and quick to operate, and will not cause damage to the parts. In the subsequent vacuum coating process, the revolution and rotation will not cause the parts to shake, ensuring the reliability and stability of vacuum coating, thereby indirectly improving the quality of vacuum coating. Technical Effect 2: In this solution, when a certain component is suspended by negative pressure adsorption, the connection between the other suspension units and the main shaft is cancelled. Only the suspension unit currently being suspended is connected to the main shaft. Therefore, the negative pressure environment in the main shaft can be applied to the suspension unit currently being suspended, thus improving the negative pressure adsorption effect and thereby improving the stability of the suspension. It is easy to imagine that if all the nozzles of the suspension units are directly connected to the main shaft, then the negative pressure environment of the main shaft is simultaneously connected to all the nozzles, the negative pressure performance is dispersed, and a more powerful compressor is needed to meet the stability of negative pressure adsorption, resulting in higher energy consumption. Conversely, this case does not have this problem. Technical effect 3: In this solution, the existence of the locking unit can restrict the movement of the piston after the adsorption suspension is completed, thereby ensuring the stability of the negative pressure adsorption. Furthermore, after all the parts are suspended, there is no need to maintain the negative pressure environment inside the main shaft, meaning the equipment can stop running, further reducing energy consumption. In this solution, during vacuum coating, the motor starts, enabling the suspension unit to rotate around the axis of the rotating disk along with the components, i.e., to revolve. At the same time, the suspension unit can rotate around the axis of the main shaft, i.e., to rotate on its own axis. Simultaneously, the suspension unit can rotate around the axis of the connecting shaft, i.e., to rotate on its own axis. Its technical advantage is that by combining the revolution, rotation on its own axis, and rotation on its own axis, the uniformity during vacuum coating can be further improved, i.e., the quality of vacuum coating can be improved. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the rotating disk and suspension mechanism; Figure 3 This is a cross-sectional view of the rotating disk; Figure 4 This is a structural schematic diagram of the suspension component; Figure 5 This is a sectional view of the suspension component; Figure 6 This is a sectional view of the mounting base, spindle, and mandrel. Figure 7 This is a structural schematic diagram of the suspension unit 205; Figure 8 This is a sectional view of the suspension unit 205; Figure 9 This is a schematic diagram of the piston, piston rod, and locking unit; Figure 10 This is a front view of the internal frame.

[0017] The labels in the attached diagram are: 100. Vacuum coating chamber; 101. Chamber door; 102. Rotary disc; 103. Rotating shaft; 104. Motor; 105. Power connector; 106. External gear ring; 107. Gear; 200. Suspension mechanism; 201. Fixed base; 2011. Connector; 202. Main shaft; 203. Mandrel; 204. Reducer; 205. Suspension unit; 206. Connecting shaft; 207. Valve housing; 208. Valve core; 20 9. Spring 1; 210. Valve shaft; 211. Annular groove; 212. Connecting housing; 213. Pump housing; 214. Suction nozzle; 215. Piston; 216. Piston rod; 2161. Protruding pin; 217. Spring 2; 218. Connecting hole; 219. Guide rod; 220. Inner frame; 221. Button; 222. Spring 3; 223. Limiting hole; 2231. Vertical section; 2232. Horizontal section; 2233. Inlet / outlet section. Detailed Implementation

[0018] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0019] In the attached diagram of this scheme, 'a' refers to the component to be vacuum coated.

[0020] Reference Figures 1-10 A vacuum coating equipment includes a vacuum coating chamber 100. The opening of the vacuum coating chamber 100 is provided with a door 101, which can be achieved by existing technology and will not be described in detail. One of the core aspects of this solution is the suspension mechanism 200 set in the vacuum coating chamber 100. As for other vacuum coating-related technologies, they can all be achieved by existing technology and will not be described in detail.

[0021] Reference Figure 2 and Figure 3 A base is provided inside the vacuum coating chamber 100. A rotating disk 102 with a motor 104 arranged vertically on the base is provided. A rotating shaft 103 extends coaxially from the lower surface of the rotating disk 102. The rotating shaft 103 and the motor 104 are connected by a power connector 105.

[0022] An external gear ring 106 is fixedly mounted on the base, and the external gear ring 106 is coaxially located below the rotating disk 102.

[0023] The suspension mechanism 200 includes suspension members disposed on the upper surface of the rotating disk 102. Furthermore, multiple suspension members are arranged in an array along the circumferential direction of the rotating disk 102.

[0024] Reference Figures 4-6 The suspension component includes a fixed seat 201. The lower open end of the fixed seat 201 is fixedly mounted on the upper surface of the rotating disk 102. The upper closed end of the fixed seat 201 is coaxially provided with a mounting hole. The outer circular surface of the fixed seat 201 is provided with a nozzle 2011, through which air can be drawn from the fixed seat 201.

[0025] The main spindle 202 is fitted inside the mounting hole. The main spindle 202 is hollow inside, and the outer surface of the main spindle 202 is provided with a side hole that communicates with the fixed seat 201.

[0026] A spindle 203 is installed inside the main spindle 202 via a support body. The lower end of the spindle 203 is located below the rotating disk 102 and is equipped with a gear 107, which meshes with the external gear ring 106.

[0027] The spindle 203 and the main spindle 202 are connected by a reducer 204.

[0028] Therefore, when the motor 104 drives the rotating disk 102 to rotate, the suspension component rotates together with the rotating disk 102, that is, the suspension component revolves. At the same time, with the cooperation of the external gear ring 106 and the gear 107, the spindle 203 will rotate. The effect of this rotation will be explained in detail later. Meanwhile, the spindle 203 drives the main shaft 202 to rotate through the reducer 204, that is, the suspension component rotates on its own axis.

[0029] The outer circular surface of the spindle 202 is provided with a suspension assembly, and multiple suspension assemblies are arranged in an array along the vertical direction.

[0030] The suspension assembly includes multiple suspension units 205 arranged in an array along the circumferential direction of the main shaft 202.

[0031] Reference Figures 7-10 The outer circular surface of the spindle 202 is provided with a suspension hole along the radial direction.

[0032] The suspension unit 205 includes a connecting shaft 206 installed in the suspension hole. One end of the connecting shaft 206 is located inside the main shaft 202 and forms a power connection with the spindle 203. The other end of the connecting shaft 206 is located outside the main shaft 202 and is provided with a connecting valve.

[0033] Furthermore, the connecting shaft 206 is a hollow shaft, and the connecting valve includes a valve housing 207. The side of the valve housing 207 is provided with a valve hole that communicates with the connecting shaft 206. A valve core 208 is slidably disposed inside the valve housing 207. Initially, the valve core 208 moves vertically. A spring 209 is disposed below the valve core 208. A valve shaft 210 extends from the upper end of the valve core 208. The upper end of the valve shaft 210 extends out of the valve housing 207. An annular groove 211 is provided on the outer circular surface of the valve core 208. Initially, the annular groove 211 is located above the valve hole. When the valve shaft 210 is pressed, and a finger contacts the upper surface of the valve housing 207, the valve shaft 210 reaches its maximum downward movement distance. At this time, the spring 209 is compressed, and the annular groove 211 communicates with the valve hole, that is, the valve housing 207 and the connecting shaft 206 are connected.

[0034] A connecting shell 212 is provided on the side of the valve housing 207 away from the connecting shaft 206. The connecting shell 212 has openings at both ends, one opening is connected to the valve housing 207, and the other opening is provided with a pump housing 213. The open end of the pump housing 213 is provided with a pump cover, and the closed end is provided with a negative pressure hole. The pump cover is connected to the connecting shell 212, and the pump cover and the connecting shell 212 are connected through a connecting hole 218. A suction nozzle 214 is provided at the opening of the negative pressure hole. A second valve hole is provided on the side of the valve housing 207, which is connected to the connecting shell 212. The second valve hole is connected to the first valve hole. Therefore, pressing the valve shaft 210 can make the main shaft 202 and the suction nozzle 214 connected, and releasing the pressure will make the connection disappear.

[0035] A piston 215 is fitted inside the pump housing 213. A spring 217 is provided on the side of the piston 215 away from the suction nozzle 214. A piston rod 216 is provided at the end of the piston 215. The end of the piston rod 216 extends into the connecting housing 212 and is provided with a protruding pin 2161.

[0036] A locking unit is provided inside the connecting housing 212. When the distance between the piston 215 and the suction nozzle 214 reaches the maximum value, the locking unit cooperates with the protrusion 2161 to restrict the movement of the piston rod 216, that is, to restrict the movement of the piston 215.

[0037] Furthermore, refer to Figure 9 and Figure 10 The upper surface of the connecting shell 212 is provided with a guide hole. The locking unit includes a guide rod 219 that is slidably disposed in the guide hole. One end of the guide rod 219 is located inside the connecting shell 212 and is provided with an inner frame 220, and the other end is located outside the connecting shell 212 and is provided with a button 221. A spring 222 is provided below the inner frame 220.

[0038] The inner frame 220 is provided with a limiting hole 223 on the side facing the piston 215. Furthermore, the limiting hole 223 includes a vertical section 2231. Initially, the vertical section 2231 is arranged vertically. The upper end of the vertical section 2231 is provided with a horizontal section 2232 arranged horizontally on the side facing the piston 215. An inlet / outlet section 2233 is provided through the horizontal section 2232 on the side facing the piston 215. The end opening of the inlet / outlet section 2233 is composed of two inclined walls. The distance between the two inclined walls decreases along the moving direction of the piston 215 and from the pump housing 213 to the valve housing 207.

[0039] Initially, spring 217 is uncompressed, the distance between piston 215 and nozzle 214 is at its minimum, and the height of pin 2161 is between the highest and lowest points of the lowermost inclined wall. That is, during the movement of piston 215 away from nozzle 214, pin 2161 can contact the lowermost inclined wall, causing the inner frame 220 to move downwards and spring 222 to be compressed. When the distance between piston 215 and nozzle 214 reaches its maximum, pin 2161 passes through inlet / outlet section 2233 and horizontal section 2232 and is located within vertical section 2231. At this time, spring 222 releases its elastic force, causing the inner frame 220 to move upwards. Therefore, pin 2161 is hooked within vertical section 2231. Figure 9 As shown, at this time, the movement of piston rod 216 and piston 215 is restricted.

[0040] Working principle of the invention: Step 1: Open room door 101; Step Two: Suspend each component one by one onto the suspension mechanism 200. Specifically: First, attach the parts to the nozzle 214. Note that the end of the connector 2011 is connected to the compressor. Start the compressor before use to create a negative pressure environment inside the spindle 202. Then, press the corresponding valve shaft 210 to connect the pump housing 213, connecting housing 212, valve housing 207, connecting shaft 206 and main shaft 202. Therefore, under the negative pressure environment of the main shaft 202, the piston 215 moves backward away from the suction nozzle 214, thereby achieving negative pressure adsorption of the parts through the suction nozzle 214. When the backward distance of the piston 215 reaches the maximum, the negative pressure adsorption is completed. At this time, the movement of the piston 215 is restricted by the locking unit. Then, release the button, and the connection between the main shaft 202 and the valve housing 207 is canceled. This completes the negative pressure adsorption suspension of one component. Repeat this process until all components are suspended. Its technological advantages lie in: Technical effect 1: The operator only needs to place the parts close to the suction nozzle 214 and press the valve shaft 210 to achieve negative pressure adsorption suspension. Compared with the existing technology that uses the holes of the parts themselves to achieve suspension, the suspension method of this solution is simple, convenient and quick to operate, and will not cause damage to the parts. In addition, during the subsequent vacuum coating process, the revolution and rotation will not cause the parts to shake, ensuring the reliability and stability of vacuum coating, thereby indirectly improving the quality of vacuum coating. Technical Effect 2: In this solution, when a certain component is suspended by negative pressure adsorption, the connection between the other suspension units 205 and the main shaft 202 is cancelled. Only the suspension unit 205 currently being suspended is connected to the main shaft 202. Therefore, the negative pressure environment in the main shaft 202 can be fully applied to the suspension unit 205 currently being suspended, thereby improving the negative pressure adsorption effect and thus improving the stability of the suspension. It is easy to imagine that if all the suction nozzles 214 of the suspension units 205 are directly connected to the main shaft 202, then the negative pressure environment of the main shaft 202 is simultaneously connected to all the suction nozzles 214. The negative pressure performance is dispersed, requiring a more powerful compressor to meet the stability of negative pressure adsorption, resulting in higher energy consumption. Conversely, this case does not have this problem. Technical effect 3: In this solution, the existence of the locking unit can restrict the movement of piston 215 after the adsorption suspension is completed, thereby ensuring the stability of negative pressure adsorption. Furthermore, after all parts are suspended, there is no need to maintain the negative pressure environment inside the main shaft 202, meaning the equipment can stop running, further reducing energy consumption. Step 3: Close chamber door 101 and proceed with vacuum coating operation; When the motor 104 starts, the suspension unit 205, along with the parts, rotates around the axis of the rotating disk 102, i.e., it revolves around the center line. At the same time, the suspension unit 205 can rotate around the axis of the main shaft 202, i.e., it rotates on its own axis. At the same time, the suspension unit 205 can rotate around the axis of the connecting shaft 206, i.e., it rotates on its own axis. Its technological advantage lies in its ability to further improve the uniformity of vacuum coating, that is, to improve the quality of vacuum coating. Step 4: After vacuum coating is completed, open chamber door 101 and remove the components one by one. Specifically: The compressor creates a positive pressure state inside the spindle 202; The worker holds the part in one hand and presses button 221 and valve shaft 210 simultaneously with the other hand. It should be noted that button 221 and valve shaft 210 are close to each other, so they can be pressed by one hand at the same time. After pressing, the locking unit releases the restriction on piston 215, and at the same time, pump housing 213, connecting housing 212, valve housing 207, connecting shaft 206 and main shaft 202 are connected. Since the main shaft 202 is under positive pressure, the suspension unit 205 will reset and release the suction of the part. Then, the worker releases and removes the part. Repeat this process until all parts are removed.

[0041] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A vacuum coating device, comprising a vacuum coating chamber (100), a chamber door (101) is arranged at an opening of the vacuum coating chamber (100), a base is arranged in the vacuum coating chamber (100), and a rotary disc (102) with a vertical arrangement of an axis of rotation and capable of rotation is arranged on the base, characterized in that, The hanging mechanism (200) arranged in the vacuum coating chamber (100) comprises a hanging component arranged on the upper surface of the rotating disc (102), and a plurality of the hanging components are arranged along the circumferential direction of the rotating disc (102); The hanging component comprises a fixing seat (201), the lower opening end of the fixing seat (201) is fixedly arranged on the upper surface of the rotating disc (102), the upper closed end of the fixing seat (201) is coaxially provided with a mounting hole, the outer circumferential surface of the fixing seat (201) is provided with a connecting nozzle (2011), a main shaft (202) is sleeved in the mounting hole, the main shaft (202) is hollow, and the outer circumferential surface of the main shaft (202) is provided with a side hole in communication with the fixing seat (201); The main shaft (202) is provided with a mandrel (203) through a support body, the lower end of the mandrel (203) is located below the rotating disc (102) and is provided with a gear (107), an outer gear ring (106) is fixedly arranged on the base, the outer gear ring (106) is coaxially located below the rotating disc (102), the gear (107) is engaged with the outer gear ring (106), and the mandrel (203) and the main shaft (202) are power-connected through a speed reducer (204).

2. The vacuum coating apparatus according to claim 1, wherein The base is provided with a motor (104), the lower surface of the rotating disc (102) is coaxially extended with a rotating shaft (103), and the rotating shaft (103) and the motor (104) are power-connected through a power connecting piece (105).

3. The vacuum coating apparatus of claim 1, wherein the vacuum coating apparatus is a vacuum deposition apparatus. The outer circumferential surface of the main shaft (202) is provided with a hanging assembly, a plurality of the hanging assemblies are arranged along the vertical direction, and the hanging assembly comprises a plurality of hanging units (205) arranged along the circumferential direction of the main shaft (202).

4. The vacuum coating apparatus of claim 3, wherein The outer circumferential surface of the main shaft (202) is provided with a hanging hole in the radial direction; The hanging unit (205) comprises a connecting shaft (206) in the shape of a hollow shaft arranged in the hanging hole, one end of the connecting shaft (206) is located in the main shaft (202) and is power-connected with the mandrel (203), the other end of the connecting shaft (206) is located outside the main shaft (202) and is provided with a connecting valve, the valve shell (207) of the connecting valve is provided with a connecting shell (212) on the side away from the connecting shaft (206), the connecting shell (212) is open at both ends and one end is connected with the valve shell (207) and the other end is provided with a pump shell (213), the opening end of the pump shell (213) is provided with a pump cover, the closed end is provided with a negative pressure hole, the pump cover is connected with the connecting shell (212) and the pump cover and the connecting shell (212) are communicated through a connecting hole (218), a suction nozzle (214) is arranged at the opening of the negative pressure hole, and the side surface of the valve shell (207) is provided with a valve hole two in communication with the connecting shell (212).

5. The vacuum coating apparatus of claim 4, wherein The side surface of the valve shell (207) is provided with a valve hole one in communication with the connecting shaft (206), and the valve hole two and the valve hole one are communicated; A valve core (208) is slidably arranged in the valve shell (207), initially, the moving direction of the valve core (208) is vertically arranged, a spring (209) is arranged below the valve core (208), a valve shaft (210) extends from the upper end of the valve core (208), the upper end of the valve shaft (210) extends out of the valve shell (207), an annular groove (211) is arranged on the outer cylindrical surface of the valve core (208), initially, the annular groove (211) is located above the valve hole (1).

6. A vacuum coating apparatus according to claim 4 or 5, wherein A piston (215) is sleeved in the pump shell (213), a spring (217) is arranged on the side of the piston (215) away from the suction nozzle (214), a piston rod (216) is arranged at the end of the piston (215), the distal end of the piston rod (216) extends into the connecting shell (212) and is provided with a protruding pin (2161); A locking unit is arranged in the connecting shell (212), when the distance between the piston (215) and the suction nozzle (214) reaches the maximum value, the locking unit cooperates with the protruding pin (2161), which can limit the movement of the piston rod (216).

7. The vacuum coating machine of claim 6, wherein the first and second rotary bodies are connected to each other by a shaft. The upper surface of the connecting shell (212) is provided with a guide hole, the locking unit includes a guide rod (219) slidably arranged in the guide hole, one end of the guide rod (219) is located in the connecting shell (212) and is provided with an inner frame body (220), the other end of the guide rod (219) is located outside the connecting shell (212) and is provided with a button (221), a spring (222) is arranged below the inner frame body (220); The side of the inner frame body (220) facing the piston (215) is provided with a limiting hole (223), the limiting hole (223) includes a vertical section (2231), initially, the vertical section (2231) is vertically arranged, the upper end of the vertical section (2231) is provided with a horizontal section (2232) arranged horizontally, the side of the horizontal section (2232) facing the piston (215) is provided with an access section (2233) penetratingly arranged, the opening of the distal end of the access section (2233) is composed of two inclined walls, the distance between the two inclined walls decreases along the moving direction of the piston (215) and is directed to the direction of the valve shell (207) by the pump shell (213); Initially, the spring (217) is not compressed, the distance between the piston (215) and the suction nozzle (214) is the minimum value, the height of the protruding pin (2161) is between the highest point and the lowest point of the lowermost inclined wall.

8. The vacuum coating method of the vacuum coating equipment according to claim 6, characterized in that, The method comprises the following steps: Step one, open the room door (101), and hang the spare parts one by one on the hanging mechanism (200): First, the compressor device connected with the end of the suction nozzle (2011) is started, so that the main shaft (202) is in a negative pressure environment; Then, the spare parts are attached to the suction nozzle (214), the corresponding valve shaft (210) is pressed, the pump shell (213), the connecting shell (212), the valve shell (207), the connecting shaft (206) and the main shaft (202) are communicated, under the action of the negative pressure environment of the main shaft (202), the piston (215) moves backward away from the suction nozzle (214), thereby realizing the negative pressure adsorption of the spare parts through the suction nozzle (214), when the backward distance of the piston (215) reaches the maximum, the negative pressure adsorption is completed, and at this time, the movement of the piston (215) is limited through the locking unit, then the hand is released, the communication of the main shaft (202) and the valve shell (207) is cancelled, and thus the negative pressure adsorption of a spare part is completed; Step two, close the chamber door (101) to perform the vacuum coating operation; Step three, after the vacuum coating is completed, the chamber door (101) is opened, and the spare parts are taken out one by one: Firstly, the main shaft (202) is in a positive pressure state through the compressor; Then, the worker holds the spare part with one hand and presses the button (221) and the valve shaft (210) with the other hand, the locking unit cancels the limitation on the piston (215), the pump shell (213), the connecting shell (212), the valve shell (207), the connecting shaft (206) and the main shaft (202) are communicated, and the suspension unit (205) is reset to cancel the adsorption of the spare part, the worker takes away the spare part and releases the pressing.

9. The vacuum coating method of claim 8, wherein, In the vacuum coating operation of step two, the rotating disc (102) rotates with the suspension mechanism (200), at the same time, under the cooperation of the gear (107), the outer gear ring (106) and the speed reducer (204), the suspension unit (205) rotates around the axis of the main shaft (202) and the connecting shaft (206).

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