Capacitance film vacuum gauge

Abstract

The invention relates to the technical field of vacuum gauges, and discloses a capacitor film vacuum gauge. The capacitance film vacuum gauge comprises a bottom plate, a heat preservation structure, a heating structure, a capacitor and a heat insulation shell. A penetrating hole is formed in the bottom plate; the heat preservation structure is installed on the bottom plate. A heat preservation cavity is formed in the heat preservation structure; the heating structure is installed in the heat preservation cavity. A containing cavity is formed in the heating structure, the lower end face of the heating structure abuts against the lower end face of the heat preservation cavity, and a first gap is formed between the outer side face of the heating structure and the inner side wall of the heat preservation cavity; the capacitor is mounted in the accommodating cavity; a gauge tube of the capacitor penetrates through the penetrating hole and extends in the direction away from the bottom plate. The heat insulation shell wraps the heat preservation structure, and a second gap is formed between the heat insulation shell and the outer side face of the heat preservation structure. The lower end of the heat-insulating shell is connected with the bottom plate. Accurate control and stable maintenance of the working temperature of the capacitor are realized, and the measurement stability and precision of the vacuum gauge in high-temperature and variable-temperature environments are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum gauges, in particular to a capacitive diaphragm vacuum gauge. BACKGROUND

[0002] The capacitive diaphragm vacuum gauge is a high-precision sensor based on the change of capacitance to accurately measure pressure. The core principle is that the diaphragm deforms slightly under the pressure in the vacuum chamber. When the pressure changes, the distance between the diaphragm and the fixed electrode changes, causing a corresponding change in the capacitance value. The capacitance signal is converted into a voltage signal through a special electronic circuit, and finally the real-time monitoring of the pressure in the system is realized. Due to its excellent measurement performance, this type of vacuum gauge has been widely used in photovoltaic, semiconductor, aerospace and energy chemical industries which have very high requirements for vacuum environment.

[0003] At present, the capacitive diaphragm vacuum gauge on the market mostly uses a parallel plate capacitor composed of a pressure sensing diaphragm and a fixed electrode as a sensing unit. The initial capacitance value of this structure itself is small, resulting in a very small capacitance change caused by pressure change. Within a certain temperature range, such vacuum gauges show very high sensitivity, stability and measurement accuracy. However, when the equipment is working in a high temperature environment, the temperature inside the measurement chamber and the vacuum chamber will rise rapidly. The rapid change of temperature not only changes the stress state of the pressure sensing diaphragm, but also affects the capacitance characteristics of the fixed electrode, thereby significantly reducing the measurement accuracy of the vacuum gauge and limiting its reliable application in high temperature working conditions.

[0004] Therefore, how to improve the stability and measurement accuracy of capacitive diaphragm vacuum gauges in high temperature and variable temperature environments is a problem that needs to be solved in the industry. SUMMARY

[0005] The present application provides a capacitive diaphragm vacuum gauge to solve one of the technical problems existing in the prior art, and to achieve the purpose of improving the stability and measurement accuracy of capacitive diaphragm vacuum gauges in high temperature and variable temperature environments.

[0006] The present application provides a capacitive diaphragm vacuum gauge, comprising: a bottom plate, a through hole is formed on the bottom plate; a heat preservation structure is installed on the bottom plate, and a heat preservation cavity is formed in the heat preservation structure; a heating structure is installed in the heat preservation cavity, a receiving cavity is formed in the heating structure, and a first gap is formed between the outer side of the heating structure and the inner side wall of the heat preservation cavity; a capacitor is installed in the receiving cavity, and the rule tube of the capacitor extends away from the bottom plate through the through hole; The heat insulation shell is wrapped around the outside of the heat insulation structure and forms a second gap with the outer side of the heat insulation structure; the heat insulation shell is connected to the base plate.

[0007] The capacitive thin-film vacuum gauge provided by the present invention further includes: A heat dissipation shell is wrapped around the outside of the heat insulation shell and connected to the base plate; a third gap is formed between the heat dissipation shell and the heat insulation shell; the thermal conductivity of the heat dissipation shell is greater than that of the heat insulation shell.

[0008] According to the capacitive thin-film vacuum gauge provided by the present invention, there is a fourth gap between the outer side of the capacitor and the inner sidewall of the receiving cavity, and the fourth gap is filled with a thermally conductive material.

[0009] According to the capacitive thin-film vacuum gauge provided by the present invention, one of the capacitors and the receiving cavity has a protrusion and the other has a groove; the protrusion is fitted into the groove.

[0010] According to the capacitive thin-film vacuum gauge provided by the present invention, the heating structure includes: The mounting body has an internal receiving cavity constructed along its own axial direction; the upper end of the mounting body has a first opening; the mounting body abuts against the insulation cavity; A cover is installed on the upper end of the mounting body to seal the first opening; A heating element is installed on the mounting body.

[0011] According to the capacitive thin-film vacuum gauge provided by the present invention, the heating element is laid on the outer side of the mounting body.

[0012] According to the capacitive thin-film vacuum gauge provided by the present invention, the mounting body has a mounting hole constructed along its own radial direction, and the mounting hole is used to mount a temperature sensing element.

[0013] According to the capacitive thin-film vacuum gauge provided by the present invention, the heat insulation structure includes: The insulation body has an internal insulation cavity; the upper end of the insulation body has a second opening. An insulation cover is disposed on the insulation body and is used to close the second opening.

[0014] According to the capacitive thin-film vacuum gauge provided by the present invention, the materials of the heat-insulating body and the heat-insulating cover are selected from at least one of aluminum silicate ceramic fiber, aerogel and polyurethane foam.

[0015] According to the capacitive thin-film vacuum gauge provided by the present invention, the heat insulation shell is made of stainless steel and the base plate is made of plastic.

[0016] The capacitive thin-film vacuum gauge provided by this invention can actively heat and maintain the capacitor at a constant preset temperature by setting a heating structure around the capacitor. This eliminates the problem of changes in the stress state of the pressure-sensing diaphragm and the capacitance characteristics of the fixed plate caused by changes in the external ambient temperature, and can effectively solve the temperature drift problem mentioned in the background art. The heating structure is surrounded by an insulation structure, forming a primary insulation layer to prevent excessive heat loss. The existence of the first gap (between the heating structure and the insulation structure) reduces the direct contact area between the two, and heat transfer mainly occurs through air (with low thermal conductivity), greatly reducing heat conduction from the heating structure to the insulation structure, effectively locking heat inside the heating structure, and improving heating efficiency and temperature control stability. The insulation shell and the second gap (between the insulation structure and the insulation shell) constitute the second and third thermal barriers. This further reduces the loss of internal heat to the outside and enhances the overall insulation performance. At the same time, the insulation shell also isolates the external ambient temperature fluctuations, preventing them from affecting the stability of the internal temperature field, and preventing operators from being burned by contact with the high-temperature insulation structure. In summary, this embodiment achieves precise control and stable maintenance of the capacitor's operating temperature, thereby improving the measurement stability and accuracy of the vacuum gauge in high-temperature and variable-temperature environments. Simultaneously, this structure effectively reduces equipment energy consumption and enhances operational safety. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 This is one of the cross-sectional structural schematic diagrams of the capacitive thin-film vacuum gauge provided by the present invention.

[0019] Figure 2 yes Figure 1 The diagram shows a three-dimensional structure of the capacitor and heating structure of the capacitive thin-film vacuum gauge provided in the image.

[0020] Figure 3 yes Figure 2 A cross-sectional structural diagram.

[0021] Figure 4 This is the second cross-sectional structural schematic diagram of the capacitive thin-film vacuum gauge provided by the present invention.

[0022] Figure 5 This is the third cross-sectional structural schematic diagram of the capacitive thin-film vacuum gauge provided by the present invention.

[0023] Figure 6This is the fourth cross-sectional structural schematic diagram of the capacitive thin-film vacuum gauge provided by the present invention.

[0024] Figure label: 100. Base plate; 200. Insulation structure; 210. Insulation body; 220. Insulation cover; 300. Heating structure; 301. Receiving cavity; 302. Mounting hole; 310. Mounting body; 320. Mounting cover; 330. Heating element; 400. Capacitor; 410. Gauge; 420. Protrusion; 500. Insulation shell; 600. Heat sink casing. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0026] In the description of this specification, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are used only for the convenience of describing this specification. They do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this specification. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] In the description of this specification, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this invention based on the specific circumstances.

[0028] In this specification, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0029] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the embodiments of this specification. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0030] In the embodiments of this specification, "at least one" means one or more, and "more than one" means two or more. "And / or" describes the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone.

[0031] The following is combined Figures 1 to 6 The capacitive thin-film vacuum gauge provided by the present invention will be described.

[0032] like Figure 1 As shown, a specific embodiment of the present invention provides a capacitive thin-film vacuum gauge. The capacitive thin-film vacuum gauge includes a base plate 100, a heat insulation structure 200, a heating structure 300, a capacitor 400, and a heat insulation shell 500.

[0033] The base plate 100 has mounting holes. The base plate 100 can provide a mounting base for the insulation structure 200, heating structure 300, capacitor 400 and heat insulation shell 500. The mounting holes are for the gauge tube 410 of capacitor 400 to pass through.

[0034] The insulation structure 200 is installed on the base plate 100; the insulation structure 200 has an internal insulation cavity. In other words, the insulation structure 200 is installed on the base plate 100, and the base plate 100 provides the installation foundation for the insulation structure 200. The insulation structure 200 has an internal insulation cavity.

[0035] A heating structure 300 is installed in the insulation cavity. The heating structure 300 has an internal receiving cavity 301, and a first gap is formed between the outer surface of the heating structure 300 and the inner wall of the insulation cavity. A capacitor 400 is installed in the receiving cavity 301; the gauge tube 410 of the capacitor 400 extends away from the base plate 100 through a through hole. In other words, the heating structure 300 is installed inside the insulation cavity, and the capacitor 400 is installed inside the receiving cavity 301. The heating structure 300 can be used to adjust and maintain the temperature inside the receiving cavity 301, creating a suitable working environment for the capacitor 400. The lower end face of the heating structure 300 abuts against the lower end face of the insulation cavity, improving the installation stability of the heating structure 300 and the insulation structure 200. A first gap is formed between the outer side of the heating structure 300 and the inner wall of the insulation cavity. The design of the first gap can reduce the contact area between the heating structure 300 and the insulation structure 200, greatly reduce heat loss, reduce the rate of temperature change in the containment cavity 301, and help maintain temperature stability.

[0036] The heat insulation shell 500 surrounds the exterior of the insulation structure 200, forming a second gap between them. The lower end of the heat insulation shell 500 is connected to the base plate 100. In other words, the heat insulation shell 500 covers the exterior of the insulation structure 200, and its lower end is connected to the base plate 100. The base plate 100 and the heat insulation shell 500 enclose an installation space within which the insulation structure 200 is located. Simultaneously, a second gap is formed between the inner surface of the heat insulation shell 500 and the outer surface of the insulation structure 200. The cooperation between the heat insulation shell 500 and the base plate 100 increases the overall sealing of the device, ensuring that the insulation structure 200 and other components are within the installation space formed by the heat insulation shell 500 and the base plate 100, thus reducing electromagnetic interference from the external environment to the insulation structure 200, the heating structure 300, and the capacitor 400. The second gap formed between the heat insulation shell 500 and the heat insulation structure 200 can work together with the heat insulation shell 500 to provide double heat insulation, reduce heat loss, improve the heat insulation performance of the heat insulation structure 200, and prevent operators from directly contacting the heat insulation structure 200 to avoid burns.

[0037] In this embodiment, by providing a heating structure 300 around the capacitor 400, the capacitor 400 can be actively heated and maintained at a constant preset temperature. This eliminates the problem of changes in the stress state of the pressure-sensitive diaphragm and the capacitance characteristics of the fixed plate caused by changes in the external ambient temperature, effectively solving the temperature drift problem mentioned in the background art. The heating structure 300 is surrounded by the insulation structure 200, forming a primary insulation layer to prevent significant heat loss. The presence of the first gap (between the heating structure 300 and the insulation structure 200) reduces the direct contact area between them, allowing heat transfer mainly through air (with low thermal conductivity), greatly reducing heat conduction from the heating structure 300 to the insulation structure 200, effectively locking heat inside the heating structure 300, and improving heating efficiency and temperature control stability. The insulation shell 500 and the second gap (between the insulation structure 200 and the insulation shell 500) constitute the second and third thermal barriers. This further reduces the loss of internal heat to the outside and enhances the overall insulation performance. Meanwhile, the heat insulation shell 500 also isolates fluctuations in the external ambient temperature, preventing them from affecting the stability of the internal temperature field and preventing operators from being burned by contact with the high-temperature insulation structure 200. In summary, this embodiment achieves precise control and stable maintenance of the operating temperature of the capacitor 400, thereby improving the measurement stability and accuracy of the vacuum gauge in high-temperature and variable-temperature environments. At the same time, this structure can also effectively reduce equipment energy consumption and improve operational safety.

[0038] Optionally, the first gap can be filled with air, which has low thermal conductivity and can further reduce heat loss.

[0039] Optionally, the second gap can be filled with air, which has low thermal conductivity and can provide insulation.

[0040] Optionally, the heat insulation shell 500 can be made of a material with low thermal conductivity, such as stainless steel or cast iron.

[0041] Optionally, the base plate 100 has a connecting cylinder, and the heating structure 300 is installed inside the connecting cylinder. The outer side of the connecting cylinder is threadedly assembled with the heat insulation shell 500. This increases the overall sealing of the structure and also forms a shielding effect, reducing electromagnetic interference from the external environment.

[0042] Preferably, the heat insulation shell 500 is made of stainless steel. Although stainless steel is a metal, its thermal conductivity is much lower than that of metals such as aluminum and copper, making it one of the less thermally conductive metal materials. Using it as the heat insulation shell 500 can, while ensuring structural strength, also play a role in preventing heat from being conducted outwards.

[0043] Optionally, the base plate 100 may be made of a material with low thermal conductivity. For example, the base plate 100 may be made of plastic. The plastic may be at least one of polyethylene plastic, polypropylene plastic, polyvinyl chloride plastic, polyethylene terephthalate plastic, and polyoxymethylene (POM) plastic. Plastic is a typical thermal insulator with extremely low thermal conductivity. Making the base plate 100 a plastic material can effectively cut off the path of internal heat conduction to the mounting platform through the base, avoiding a large amount of heat loss from the bottom of the equipment, which is of great significance for maintaining the stability and energy efficiency of the entire temperature control system.

[0044] Preferably, the base plate 100 is made of polyoxymethylene (POM) plastic, which has the characteristics of low processing cost, high hardness and low thermal conductivity.

[0045] In some embodiments of the present invention, the capacitive thin-film vacuum gauge further includes a heat sink 600; the heat sink 600 is wrapped around the outside of the heat insulation shell 500 and connected to the heat insulation shell 500; a third gap is formed between the heat sink 600 and the heat insulation shell 500; the thermal conductivity of the heat sink 600 is greater than that of the heat insulation shell 500. In other words, based on the above embodiments, the heat sink 600 is sleeved on the outside of the heat insulation shell 500, and may not be directly installed on the base plate 100, but is connected to the heat insulation shell 500 by screws or other connecting parts. At the same time, a third gap is reserved between the heat sink 600 and the heat insulation shell 500. By providing a heat sink 600 on the outside of the heat insulation shell 500, the heat sink 600 can work together with the heat insulation shell 500 to provide heat insulation. The thermal conductivity of the heat dissipation shell 600 is greater than that of the heat insulation shell 500, enabling the heat dissipation shell 600 to also serve a heat dissipation function. This improves the heat dissipation capacity of the outer surface of the device (i.e., the outer side of the heat dissipation shell 600) and prevents the surface temperature of the shell from becoming too high and causing burns to the operator when the preset temperature is high. The third gap provides another layer of insulation, which can reduce heat loss.

[0046] In this implementation, the heat insulation shell 500 and the third gap continue to provide further insulation, reducing the heat transferred to the outermost layer. Despite the multiple layers of insulation, some heat will still be conducted to the outer layer when the internal temperature is high. The heat dissipation shell 600 uses a high thermal conductivity material (such as aluminum alloy), whose large surface area and excellent thermal conductivity can quickly dissipate this heat into the surrounding air. This prevents heat from accumulating on the equipment surface, thereby significantly reducing the shell temperature and preventing burns to operators.

[0047] Optionally, the upper end of the heat sink 600 is connected to the upper end of the heat insulation shell 500 via a connector. To further improve connection stability, the sidewall of the heat sink 600 can also be connected to the sidewall of the heat insulation shell 500 via a connector.

[0048] Furthermore, the heat sink 600 is made of aluminum alloy. The heat sink 600 can effectively block the interference of external air temperature changes on internal components. At the same time, the use of aluminum alloy material can enhance its heat dissipation capacity, reduce the surface temperature of the shell, and avoid unnecessary injury to operators due to the outer surface being too hot under high internal working conditions.

[0049] Optionally, a sealing ring is installed between the bottom of the heat sink 600 and the base plate 100 to further improve the overall sealing performance of the device.

[0050] In some embodiments of the present invention, a fourth gap is formed between the outer surface of the capacitor 400 and the inner wall of the receiving cavity 301, and the fourth gap is filled with a thermally conductive material. In other words, the capacitor 400 and the receiving cavity 301 of the heating structure 300 are in a clearance fit, which not only facilitates the assembly of the capacitor 400 into the receiving cavity 301 of the heating structure 300, but also facilitates the removal of the capacitor 400 from the receiving cavity 301. Filling the fourth gap with a thermally conductive material allows the capacitor 400 and the heating structure 300 to form a tight fit, increasing the contact area between the capacitor 400 and the heating structure 300, improving heat transfer efficiency, and the good thermal conductivity of the thermally conductive material can also improve the uniformity of heat distribution.

[0051] Optional thermally conductive materials include, but are not limited to, thermal grease.

[0052] In some embodiments of the present invention, one of the capacitor 400 and the receiving cavity 301 has a protrusion 420, and the other has a groove; the protrusion 420 is fitted into the groove. Specifically, the bottom of the capacitor 400 has a protrusion 420, and the bottom of the receiving cavity 301 has a groove; or, the bottom of the capacitor 400 has a groove, and the bottom of the receiving cavity 301 has a protrusion 420. Through the engagement of the protrusion 420 and the groove, a larger contact surface area is created compared to the contact of two planes. According to the law of thermal conduction, the amount of heat transferred is proportional to the contact area; therefore, this design can more efficiently conduct heat from the bottom of the heating structure 300 to the bottom of the capacitor 400. This structure also serves as a mechanical positioning mechanism, preventing the capacitor 400 from rotating or translating within the receiving cavity 301, ensuring the accuracy and stability of its installation position.

[0053] Optionally, a boss structure (i.e., a protrusion 420) is formed around the bottom of the capacitor 400 surrounding the guide tube 410, and a corresponding annular recess structure (i.e., a groove) is formed at the bottom of the receiving cavity 301. This design not only increases the contact area but also improves the installation stability of the capacitor 400 and the heating structure 300.

[0054] In some embodiments of the present invention, the mounting body 310 of the heating structure 300 has a mounting hole 302 formed radially thereon; the mounting hole 302 is used to mount a temperature sensing element. Specifically, the mounting hole 302 is arranged near the receiving cavity 301. In this way, the temperature sensing element can be brought as close as possible to the object being measured (i.e., the capacitor 400). The accuracy of temperature control depends on the accuracy of temperature feedback. Placing the temperature sensing element as close as possible to the controlled object (capacitor 400) through the mounting hole 302 can most accurately reflect the actual operating temperature of the capacitor 400. The control system compares this accurate temperature reading with a preset value, thereby precisely controlling the start / stop or power of the heating structure 300, ultimately controlling the temperature fluctuation of the capacitor 400 within a very small range, ensuring the measurement accuracy of the vacuum gauge.

[0055] Optionally, the temperature sensing element can be bonded to the mounting hole 302 using thermally conductive silicone. The temperature sensing element feeds back the temperature of the capacitor 400 to the electronic circuit, allowing control of the heating structure 300 by comparing it with a preset temperature. For example, if the detected temperature is lower than the preset temperature, the heating structure 300 continues heating. If the detected temperature is not lower than the preset temperature, the heating structure 300 stops heating to ensure the capacitor 400 is in a relatively stable temperature environment. Furthermore, the capacitor 400 can be operated in different temperature environments by adjusting the preset temperature.

[0056] Optionally, the temperature sensing element includes, but is not limited to, a temperature sensor.

[0057] In some embodiments of the present invention, the heating mechanism includes a mounting body 310, a mounting cover 320, and a heating element 330.

[0058] The mounting body 310 has a receiving cavity 301 constructed along its own axial direction; the upper end of the mounting body 310 has a first opening. A mounting cover 320 is mounted on the upper end of the mounting body 310 to seal the first opening. The mounting cover 320 also has a first wire-passing hole for the electrodes of the capacitor 400 to pass through. A heating element 330 is mounted on the mounting body 310.

[0059] In this embodiment, the separate design of the mounting body 310 and the mounting cover 320 simplifies the process of placing or removing the capacitor 400 into the receiving cavity 301, greatly facilitating production assembly and subsequent maintenance and replacement. When the heating element 330 is mounted on the mounting body 310, heat is first conducted to the entire mounting body 310, making it a uniform heat source, and then transferred inward from the mounting body 310 to the capacitor 400. This "heating the carrier first, then heating the core from the carrier" method effectively avoids localized overheating and achieves comprehensive heating of the capacitor 400.

[0060] Furthermore, the heating element 330 is laid on the outer side of the mounting body 310. In other words, the outer side of the mounting body 310 is covered with the heating element 330, at which time the heating element 330 realizes synchronous heating of the outer side of the mounting body 310, realizing more uniform encapsulated heating of the capacitor 400.

[0061] Optionally, the heating element 330 includes a heating resistance wire, which is coiled on the outer side of the mounting body 310 to form a heating film. The heating resistance wire is connected to an external circuit, which controls the flow of current through the heating resistance wire. Heating is achieved when current flows through the heating resistance wire. Heating stops when no current flows through the heating resistance wire.

[0062] In some embodiments of the present invention, the heat insulation structure 200 includes a heat insulation body 210 and a heat insulation cover 220. The heat insulation body 210 has an internal heat insulation cavity; the upper end of the heat insulation body 210 has a second opening. The heat insulation cover 220 is disposed on the heat insulation body 210 and is used to close the second opening. In this embodiment, the separate design of the heat insulation body 210 and the heat insulation cover 220 also facilitates the installation of the internal heating structure 300. The heat insulation cover 220 also has a second wire passage hole for the electrodes of the capacitor 400 to pass through.

[0063] Optionally, after the insulation body 210 and the insulation cover 220 are assembled, aluminum silicate ceramic fiber slurry is applied and bonded along the joint gaps to form an integral structure of the insulation body 210 and the insulation cover 220, which facilitates assembly and fixation, and at the same time plays a sealing role, which reduces internal heat loss and reduces temperature fluctuations caused by changes in external air temperature.

[0064] Optionally, the lower end of the insulation body 210 has an opening, which is then connected and fixed to the mounting body 310 of the heating body by screws.

[0065] Furthermore, the insulation body 210 and the insulation cover 220 are made of at least one of aluminosilicate ceramic fiber, aerogel, and polyurethane foam. Aluminosilicate ceramic fiber, aerogel, and polyurethane foam are all recognized as top-tier insulation materials with extremely low thermal conductivity. Using these materials to manufacture the insulation structure 200 can minimize heat loss from the internal heating structure 300 to the outside, thereby maintaining a stable high internal temperature with lower energy consumption.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A capacitive thin-film vacuum gauge, characterized in that, include: A base plate (100) having through holes; A thermal insulation structure (200) is installed on the base plate (100); the thermal insulation structure (200) has an internal thermal insulation cavity; A heating structure (300) is installed in the heat preservation cavity; the heating structure (300) has an internal cavity (301) and a first gap is formed between the outer side of the heating structure (300) and the inner wall of the heat preservation cavity; A capacitor (400) is installed in the receiving cavity (301); the gauge tube (410) of the capacitor (400) extends through the mounting hole in a direction away from the base plate (100); The heat insulation shell (500) is wrapped around the outside of the heat insulation structure (200) and forms a second gap with the outer side of the heat insulation structure (200); the heat insulation shell (500) is connected to the base plate (100).

2. The capacitive thin-film vacuum gauge according to claim 1, characterized in that, Also includes: A heat dissipation shell (600) is wrapped around the outside of the heat insulation shell (500) and connected to the heat insulation shell (500); a third gap is formed between the heat dissipation shell (600) and the heat insulation shell (500); the thermal conductivity of the heat dissipation shell (600) is greater than that of the heat insulation shell (500).

3. The capacitive thin-film vacuum gauge according to claim 1, characterized in that, There is a fourth gap between the outer side of the capacitor (400) and the inner wall of the receiving cavity (301), and the fourth gap is filled with a thermally conductive material.

4. The capacitive thin-film vacuum gauge according to claim 1, characterized in that, One of the capacitor (400) and the receiving cavity (301) has a protrusion (420) and the other has a groove; the protrusion (420) is fitted into the groove.

5. The capacitive thin-film vacuum gauge according to claim 1, characterized in that, The heating structure (300) includes: The mounting body (310) has the receiving cavity (301) constructed inside along its own axial direction; the upper end of the mounting body (310) has a first opening; the mounting body (310) abuts against the heat insulation cavity; The mounting cover (320) is installed on the upper end of the mounting body (310) to seal the first opening; A heating element (330) is installed on the mounting body (310).

6. The capacitive thin-film vacuum gauge according to claim 5, characterized in that, The heating element (330) is laid on the outer side of the mounting body (310).

7. The capacitive thin-film vacuum gauge according to claim 5, characterized in that, The mounting body (310) has a mounting hole (302) along its radial direction, and the mounting hole (302) is used to mount a temperature sensing element.

8. The capacitive thin-film vacuum gauge according to claim 1, characterized in that, The thermal insulation structure (200) includes: The insulation body (210) has the insulation cavity inside; the upper end of the insulation body (210) has a second opening; An insulation cover (220) is disposed on the insulation body (210) for sealing the second opening.

9. The capacitive thin-film vacuum gauge according to claim 8, characterized in that, The materials of the insulation body (210) and the insulation cover (220) are selected from at least one of aluminum silicate ceramic fiber, aerogel and polyurethane foam.

10. The capacitive thin-film vacuum gauge according to any one of claims 1 to 9, characterized in that, The heat insulation shell (500) is made of stainless steel, and the base plate (100) is made of plastic.

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