Chip-inverted detection micro-light microscope

Abstract

This invention discloses a chip inversion detection microscopy, comprising a microscopy body, a housing, and a sample stage disposed within the housing. A probe stage is disposed beside the sample stage, and a probe holder is disposed on the probe stage. A base is detachably disposed on the sample stage, and a cantilever is disposed on the base; an observation slot is formed on the cantilever. When chip inversion analysis is required, the base is placed on the sample stage, forming a suspended structure through the cantilever on the base. Subsequently, the chip to be tested is placed on the cantilever portion, exposing the chip to the observation slot on the cantilever portion. Thus, the microscope used for pinning the chip can extend into the observation space below the cantilever portion, thereby providing a pinning field of view of the chip for the probe extending into the observation space. Compared with the prior art, this invention does not require modification of the sample stage of the microscopy, and the manufacturing cost of the base and cantilever is lower.

Description

Technical Field

[0001] This invention relates to the field of chip analysis technology, and in particular, to a chip inverted detection micromicroscope. Background Technology

[0002] EMMI (Electronic Microscopy with Inverted Chip Failure Analysis) is a key analytical technique for advanced packaged chips. This method involves inverting the chip so that its back side faces upwards. Utilizing the transparency of the silicon substrate to infrared light, it detects weak photon emission signals generated by defects from the back side. This effectively avoids signal obstruction by the multilayer metal wiring on the front side, enabling precise location of defects such as leakage current and gate oxide breakdown. This technique is particularly suitable for scenarios where front-side location is impossible, and is an important means of achieving high-precision failure analysis.

[0003] Currently, Chinese patent CN120721749A discloses a back-punching imaging device for EMMI & Obrich defect localization, including a bottom-suspended fixing mechanism and a cylindrical microscope mechanism disposed next to the fixing mechanism. The chip under test is fixed to the observation window of the fixing mechanism, exposing the front of the chip downwards to the observation window. The observation end of the cylindrical microscope mechanism extends into the fixing mechanism and faces the observation window, thereby providing the imaging field required for pin puncture, making back-side pin puncture detection on the chip simpler.

[0004] However, the fixing mechanism in the above-mentioned patented technology is a non-standard device. The sample stage of commonly available micro-microscopes does not have a suspended structure, and applying the above-mentioned patented technology requires a large cost. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a chip inverted detection micro-microscope.

[0006] The objective of this invention is achieved through the following technical solution:

[0007] A chip inverted detection low-light microscope includes a microscope body, which includes a housing and a sample stage disposed within the housing. A probe stage is disposed beside the sample stage, and a probe holder is disposed on the probe stage. The microscope is characterized in that: a base is detachably disposed on the sample stage, and a cantilever is disposed on the base. The cantilever extends radially away from the sample stage. The cantilever includes an overlapping portion and a cantilevered portion. An observation slot is formed on the cantilevered portion, and an observation space is formed below the cantilevered portion for the observation microscope to extend into. The probe of the probe holder extends into the observation space.

[0008] Preferably, the observation channel is an oblong channel.

[0009] Preferably, the shape of the base is adapted to the shape of the sample stage.

[0010] Preferably, the overlapping portion is detachably disposed from the base.

[0011] Preferably, a pad is provided on the base, and the overlapping portion is detachably disposed from the pad.

[0012] Preferably, a first transfer mechanism is provided on the base, and a fixing seat for fixing the chip under test is provided on the transfer end of the first transfer mechanism, the fixing seat being opposite to the observation channel; a second transfer mechanism is provided on the probe stage, and the probe seat is disposed on the transfer end of the second transfer mechanism; the first transfer mechanism and the second transfer mechanism are adapted to be able to perform synchronous transfer, during which the fixing seat and the probe seat are relatively stationary, so as to drive the chip on the fixing seat and the probe of the probe seat to move synchronously closer to the sample stage.

[0013] Preferably, the observation channel extends to the overlapping portion.

[0014] Preferably, the observation channel includes a straight portion away from the sample stage and a bent portion close to the sample stage, the bent portion extending toward the axis of the sample stage; the fixing base and the probe holder are both laterally spring-loaded and fitted together, and both the base and the probe holder are provided with cam mechanisms. As the first transfer mechanism and the second transfer mechanism perform their transfer actions, the fixing base and the probe holder gradually approach the corresponding cam mechanism and move laterally under the push of the cam mechanism, thereby driving the chip on the fixing base and the probe of the probe holder to remain opposite to the observation channel.

[0015] Preferably, the base of the first transfer mechanism is provided with a vertically movable detection bar, and the transfer end of the second transfer mechanism is provided with a detection rod, the end of which extends and abuts against the bottom surface of the detection bar. The detection bar is parallel to the transfer direction of the transfer end of the first transfer mechanism. The base is provided with a straightening mechanism, and the execution end of the straightening mechanism is coupled to the cantilever end of the base of the first transfer mechanism. As the first transfer mechanism and the second transfer mechanism perform their transfer actions, the detection rod slides along the detection bar. The execution end of the straightening mechanism is adapted to lift the cantilever end of the base of the first transfer mechanism when the detection bar bounces, until the detection bar returns to its initial position.

[0016] Preferably, the straightening mechanism includes a lifting column disposed below the cantilevered end of the base of the first transfer mechanism; or, the straightening mechanism includes a winding roller and a straightening rope wound around the winding roller, the end of the straightening rope being tied above the cantilevered end of the base of the first transfer mechanism.

[0017] The beneficial effects of this invention are:

[0018] 1. When chip inverted analysis is required, a base is placed on the sample stage, with a cantilever forming a suspended structure. The chip under test is then placed on the cantilever portion of the cantilever, exposing the chip to an observation channel in the cantilever. This allows a microscope used for pinning the chip to extend into the observation space below the cantilever, providing a pinning field of view of the chip for the probe inserted into the observation space. Compared to existing technologies, this invention does not require modification of the sample stage of the micro-light microscope, and the manufacturing cost of the base and cantilever is lower.

[0019] 2. By utilizing the synchronous transfer of the first and second transfer mechanisms, the chip and probe can move synchronously towards the sample stage after the pin insertion is completed. This eliminates the need for significant adjustments to the relative position of the micro-microscope's observation module and the sample stage, which facilitates subsequent detection operations such as frontal failure analysis of the chip. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of an embodiment;

[0021] Figure 2 for Figure 1 Enlarged view of part A;

[0022] Figure 3 This is a structural schematic diagram of one embodiment of the cantilever;

[0023] Figure 4 This is a structural schematic diagram of another embodiment of the cantilever;

[0024] Figure 5 This is a schematic diagram of the structure of the first transfer mechanism and the second transfer mechanism;

[0025] Figure 6 This is a schematic diagram of the lifting column structure;

[0026] Figure 7 This is a schematic diagram of the straightening rope.

[0027] Reference numerals: 1. Microscope body; 2. Compartment; 3. Sample stage; 4. Probe stage; 5. Probe mount; 6. Base; 7. Cantilever; 8. Overlapping part; 9. Cantilever part; 10. Observation slot; 11. Observation space; 12. Pad; 13. First transfer mechanism; 14. Fixing base; 15. Second transfer mechanism; 16. Straight part; 17. Bending part; 18. Cam mechanism; 19. Detection strip; 20. Detection rod; 21. Straightening mechanism; 22. Cantilever end; 23. Lifting column; 24. Rewinding roller; 25. Straightening rope; 26. One-way valve; 27. Observation module; 28. Observation microscope. Detailed Implementation

[0028] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] like Figures 1 to 7 As shown, a chip inverted inspection microscopy includes a microscopy body 1. For example, the microscopy body 1 may include a housing 2, an observation module 27 vertically arranged opposite each other within the housing 2, a sample stage 3, and a probe station 4 disposed beside the sample stage 3. In conventional chip front-side failure analysis, the chip to be inspected can be placed on the sample stage 3. Then, the relative position of the observation module 27 and the sample stage 3 is adjusted so that the lens is focused on the chip under test. The probes on the probe holders 5 on the probe station 4 are connected to the chip from top to bottom, and then the EMMI inspection process begins.

[0030] In short, the EMMI inspection process and principle of the chip are as follows: In the darkroom environment of the machine compartment 2, a bias voltage is applied to the chip. The chip is scanned through different magnification objectives of the observation module 27. The system performs long exposures and eventually displays abnormal bright spots on the image. These bright spots correspond to the potential defect locations.

[0031] See Figure 2 , Figure 3 , Figure 4 To facilitate the insertion of probes for chip inversion detection, a base 6 is detachably provided on the sample stage 3, and a cantilever 7 extending radially away from the sample stage 3 is provided on the base 6. The cantilever 7 may specifically include an overlapping portion 8 and a cantilever portion 9, wherein the overlapping portion 8 overlaps with the sample stage 3 when viewed from the top projection direction of the sample stage 3, while the cantilever portion 9 extends from the side wall of the sample stage 3.

[0032] An observation slot 10 is provided through the cantilevered portion 9. For example, the observation slot 10 can be a waist-shaped slot and extend along the cantilevered portion 9. As a result, an observation space 11 is formed below the cantilevered portion 9 for the observation microscope 28 to extend into. For example, the observation microscope 28 can be a cylindrical microscope.

[0033] During chip inversion failure analysis, the base 6 can be placed on the sample stage 3, and then the chip under test can be placed on the cantilever portion 9 of the cantilever 7, with the front of the chip exposed downwards to the observation slot 10 on the cantilever portion 9. At this time, the observation limiting mirror extending into the observation space 11 can take an image of the front of the chip, so that the probes on the probe holder 5 can be connected to the chip from bottom to top, and then the EMMI detection stage can begin.

[0034] In some embodiments, the base 6 may be configured to have a shape substantially the same as the sample stage 3, which allows the base 6 to have the greatest possible mass, for example, so that the base 6 can be placed directly on the sample stage 3 without involving other disassembly structures. Of course, it is not excluded that the base 6 may be detachably connected to the sample stage 3 by means of, for example, bolts or clips.

[0035] A pad 12 is preferably provided on the end face of the base 6, and the overlapping portion 8 of the cantilever 7 is detachably connected to the pad 12, thereby realizing the detachability of the cantilever 7 relative to the base 6. On the one hand, the height of the cantilever 7 can be increased by the pad 12, thereby raising the height of the observation space 11 and making it easier to receive the insertion of the observation microscope 28; on the other hand, the detachability of the cantilever 7 and the base 6 makes the overall structure easier to manufacture and assemble, for example, it also facilitates the replacement of the cantilever 7. Preferably, the overlapping portion 8 of the cantilever 7 can be detached from the pad 12 by bolt fastening.

[0036] See Figure 4 In a possible example, the cantilever 7 is a straight rod, and the cantilever 7 extends outward toward the chamber 2 in a substantially collinear manner with the axis of the sample stage 3. For example, the extension direction of the cantilever 7 is also substantially parallel to the Y-axis direction of the micro-microscope, which facilitates the placement of the chip on the cantilever 7 and also facilitates the positioning and pinning of the probe on the chip.

[0037] However, due to the limitations of the internal structure of existing low-light microscopes, when the cantilever 7 is arranged in the above manner, its lower part may be obstructed, making it difficult to place and install the observation microscope 28. For alternative configurations, see [link to other configurations]. Figure 3 The cantilever 7 can preferably be in the shape of a bent rod, which allows the cantilevered part 9 of the cantilever 7 to remain parallel to the Y-axis direction of the micro-microscope. At the same time, the cantilevered part 9 is misaligned with the components of the micro-microscope below, so that the observation microscope 28 can be installed and extended into the observation space 11.

[0038] See Figure 5 In some embodiments, the base 6 is preferably further provided with a first transfer mechanism 13, and the transfer end of the first transfer mechanism 13 is further provided with a fixing seat 14 for fixing the chip under test, and the fixing seat 14 is opposite to the observation channel 10, so that the chip fixed on the fixing seat 14 can be exposed to the observation channel 10. For example, the fixing seat 14 can be a snap-on clamping mechanism, and the glass slide with the chip under test can be snapped onto the fixing seat 14.

[0039] The probe stage 4 is preferably equipped with a second transfer mechanism 15, and the probe seat 5 is disposed on the transfer end of the second transfer mechanism 15. The first transfer mechanism 13 and the second transfer mechanism 15 may have the same or different structures; for example, both transfer mechanisms may be lead screw type transfer mechanisms. Of course, it is also possible for the transfer mechanism to be pneumatic or hydraulic.

[0040] After the chip under test is fixed to the mounting base 14, unlike the above embodiment, the relative position of the observation module 27 and the sample stage 3 does not need to be adjusted. Instead, the mounting base 14 and the probe base 5 are moved synchronously towards the sample stage 3 in a relatively stationary posture by controlling the first transfer mechanism 13 and the second transfer mechanism 15 to transfer synchronously. This allows the chip and the probe to move synchronously towards the sample stage 3 while maintaining connection, until the chip enters the observation field of the observation module 27.

[0041] It is understood that in this embodiment, the sample stage 3 and the observation module 27 are not prone to significant offset. For example, after the chip inversion failure analysis is completed, the base 6 is removed from the sample stage 3, and the chip being tested on the front can be directly fixed to the sample stage 3. Then, by slightly adjusting the relative position of the observation module 27 and the sample stage 3, the chip can be brought into the observation field of the observation module 27.

[0042] In a preferred example, the observation slot 10 is adapted to extend to the overlapping portion 8, which allows the chip and probe to move further into the sample stage 3. This also allows the sample stage 3 and the observation module 27 to remain substantially concentric, thus facilitating subsequent frontal failure analysis and detection of the chip.

[0043] Furthermore, by setting up the first transfer mechanism 13 and the second transfer mechanism 15, the length of the cantilevered part 9 of the cantilever 7 will no longer be limited by the relative position adjustment range of the observation module 27 and the sample stage 3, thereby further expanding the size and applicable range of the observation space 11 formed by the cantilevered part 9, making it simpler and more convenient to insert pins on the back of the chip.

[0044] In the example of the bent rod-shaped cantilever 7, the observation channel 10 may include a straight portion 16 away from the sample stage 3 and a bent portion 17 close to the sample stage 3, with the bent portion 17 extending toward the axis of the sample stage 3. The fixed base 14 and the probe holder 5 are both laterally elastically fitted by springs or other elastic elements, and cam mechanisms 18 are also provided on both the base 6 and the probe stage 4. This disclosure can have the following exemplary usage process:

[0045] 1. Place the base 6 on the sample stage 3, and then fix the chip to be tested to the mounting base 14;

[0046] 2. Control the first transfer mechanism 13 and the second transfer mechanism 15 to drive the fixed seat 14 and the probe seat 5 to move synchronously toward the center of the sample stage 3 (i.e., the observation module 27), during which time the two gradually approach their respective cam mechanisms 18.

[0047] 3. The fixing seat 14 and the probe seat 5 move to the end of the straight section 16 so that the chip enters. At the same time, the fixing seat 14 and the probe seat 5 abut against the corresponding cam mechanism 18 and move laterally under the push of the cam mechanism 18, so that the chip and the probe can move along the bent section 17.

[0048] During the movement of the chip, the chip remains opposite to the observation slot 10 until it enters the center of the sample stage 3. At this point, the top surface of the chip is exposed to the observation field of the observation module 27, while the bottom surface of the chip remains stably connected to the probe, so that the chip inversion failure analysis can be performed stably.

[0049] For example, the cam mechanism 18 can be a cam groove or a cam ramp. For the fixed seat 14, the side wall of the bent portion 17 can be configured as its corresponding cam mechanism 18. Furthermore, the fixed seat 14 and the probe seat 5 can also be provided with cam rods or cam followers that are adapted to the cam mechanism 18.

[0050] See Figure 5 , Figure 6 In some embodiments, a vertically movable detection strip 19 is adapted to be provided on the base of the first transfer mechanism 13, and the detection strip 19 has a length extending along the transfer direction of the transfer end of the first transfer mechanism 13, and the setting posture of the detection strip 19 is parallel to the transfer direction of the transfer end of the first transfer mechanism 13; and a detection rod 20 is also correspondingly provided on the transfer end of the second detection mechanism, wherein the detection rod 20 extends toward one side of the first transfer mechanism 13, and the detection rod 20 is particularly adapted to abut against the bottom surface of the detection strip 19.

[0051] It can be imagined that as the aforementioned fixed seat 14 and probe seat 5 are synchronously transferred, the detection rod 20 will slide along the detection strip 19. At this time, if the parallelism of the first transfer mechanism 13 does not tilt, the detection rod 20 will maintain a constant height of contact with the detection strip 19, for example, the detection strip 19 will maintain a constant initial pressed position. However, if the parallelism of the first transfer mechanism 13 tilts, the detection rod 20 will contact and push the tilted detection strip 19 as it slides, which will cause the detection strip 19 to bounce. This can be used to determine the occurrence of the tilt of the first transfer mechanism 13.

[0052] Because the second transfer mechanism 15 is mounted on the probe station 4, and the probe station 4 provides a better mounting surface for the second transfer mechanism 15, the parallelism of the second transfer mechanism 15 is more easily guaranteed compared to the parallelism of the first transfer mechanism 13. Due to its unique feature of being at least partially mounted on the cantilever 7, the first transfer mechanism 13 tends to tilt towards the end of the cantilever portion 9 due to the bending moment of the cantilever 7. This tilting causes asynchrony between the mounting base 14 and the probe base 5 in the transfer direction, ultimately leading to instability in the connection between the chip and the probe.

[0053] For this, see Figure 6 , Figure 7 In this disclosure, a straightening mechanism 21 is preferably provided on the base 6, and the straightening mechanism 21 is adapted to have its actuating end coupled to the cantilever end 22 of the base of the first transfer mechanism 13. For example, when the detection bar 19 bounces, the actuating end of the straightening mechanism 21 responds and lifts the cantilever end 22 of the base of the first transfer mechanism 13, which causes the first transfer mechanism 13 to gradually return from the inclined state to the parallel state, and the detection bar 19 returns to its initial position under the action of the elastic element; then the actuating end of the straightening mechanism 21 stops actuating, thereby maintaining the relatively stable parallel state of the first transfer mechanism 13.

[0054] For example, before chip placement and probes, the synchronous transfer of the first transfer mechanism 13 and the second transfer mechanism 15 can be pre-run to pre-adjust the parallelism of the first transfer mechanism 13. This adjustment is completed during the synchronous transfer action of the first transfer mechanism 13 and the second transfer mechanism 15, which greatly improves the ease of use and accuracy of this disclosure.

[0055] See Figure 6In some embodiments, the straightening mechanism 21 may include a lifting column 23 disposed below the cantilevered end 22 of the base of the first transfer mechanism 13. For example, the lifting column 23 may be electrically or hydraulically operated. A limit switch or photoelectric sensor (not shown) may also be provided on the base of the first transfer mechanism 13 to sense whether the detection bar 19 has bounced. When the detection bar 19 bounces, the sensor receives the signal and transmits it to the controller (not shown). Subsequently, the controller controls the motor of the lifting column 23 to run, and the lifting column 23 lifts the cantilevered end 22 of the base of the first transfer mechanism 13. When the detection bar 19 returns to its original position, the sensor receives the signal, and the controller controls the motor to stop running. In a hydraulically operated solution, for example, the controller can control the lifting stroke of the lifting column 23 by controlling the start and stop of the pump (not shown).

[0056] In a possible example, the base of the first transfer mechanism 13 may be constructed with a spring-loaded cavity (not shown), and the detection strip 19 is sealed and slidably fitted within the spring-loaded cavity. For example, a return spring (not shown) connected to the detection strip 19 may also be provided within the spring-loaded cavity. Furthermore, the spring-loaded cavity is connected to the hydraulic chamber of the aforementioned lifting column 23 via a pipe. In this example, the fixed base 14 can be controlled to move from the center of the sample stage 3 to the end of the cantilever 7 during a trial run. During this process, if the first transfer mechanism 13 is in an inclined state, the detection rod 20 will press the detection strip 19, causing the fluid in the spring-loaded cavity to be filled into the hydraulic chamber of the lifting column 23 through the one-way valve 26 in the pipe. Subsequently, the lifting column 23 is ejected, causing the first transfer mechanism 13 to gradually return to a parallel state.

[0057] See Figure 7 Alternatively, the adjustment mechanism may include a take-up roller 24 and a straightening rope 25 wound around the take-up roller 24, with the end of the straightening rope 25 tied above the cantilever end 22 of the base of the first transfer mechanism 13. Similar to the above process, the sensor responds to the springing of the detection bar 19 and sends a signal. The controller then controls the start and stop of the motor of the take-up roller 24 to further wind the straightening rope 25 onto the take-up roller 24. This causes the straightening rope 25 to exert a pulling force on the cantilever end 22 of the base of the first transfer mechanism 13, thereby gradually restoring the first transfer mechanism 13 to a parallel state. Preferably, the take-up roller 24 can be mounted on the outside of the sample stage 3 via a cantilever bracket, thus minimizing interference with the observation module 27.

[0058] The synchronicity of the first transfer mechanism 13 and the second transfer mechanism 15 can be ensured, for example, through closed-loop control of the lead screw transfer mechanism by a servo motor. This technology is known in the prior art and will not be elaborated upon in this disclosure. Alternatively, the lead screws of the first transfer mechanism 13 and the second transfer mechanism 15 can be synchronously driven by a synchronous belt to ensure the synchronous and consistent movement of the fixed seat 14 and the probe seat 5. Furthermore, the cam trajectory design of the aforementioned cam mechanism 18 can be calculated by those skilled in the art, for example, based on the angle between the bent portion 17 and the straight portion 16. This is something that those skilled in the art should know and understand, and therefore will not be elaborated upon further.

[0059] The above description is merely a preferred embodiment of the present invention. It should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the concept described herein through the above teachings or related technologies or knowledge. Modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. A chip inverted detection microscopy, comprising a microscopy body (1), the microscopy body (1) comprising a chamber (2) and a sample stage (3) disposed within the chamber (2), a probe stage (4) disposed beside the sample stage (3), and a probe holder (5) disposed on the probe stage (4), characterized in that: A base (6) is detachably provided on the sample stage (3), and a cantilever (7) is provided on the base (6). The cantilever (7) extends radially away from the sample stage (3). The cantilever (7) includes an overlapping portion (8) and a cantilever portion (9). An observation slot (10) is provided on the cantilever portion (9). An observation space (11) is formed below the cantilever portion (9) for the observation microscope to extend into. The probe of the probe holder (5) extends into the observation space (11). When viewed from the top projection direction of the sample stage (3), the overlapping part (8) overlaps with the sample stage (3), while the cantilever part (9) extends from the side wall of the sample stage (3).

2. The chip inverted detection micromicroscope according to claim 1, characterized in that: The observation channel (10) is a waist-shaped channel.

3. The chip inverted detection micromicroscope according to claim 1, characterized in that: The shape of the base (6) is adapted to the shape of the sample stage (3).

4. The chip inverted detection micromicroscope according to claim 1, characterized in that: The overlapping portion (8) is detachably mounted from the base (6).

5. The chip inverted detection micromicroscope according to claim 4, characterized in that: A pad (12) is provided on the base (6), and the overlapping part (8) and the pad (12) are detachably disposed.

6. The chip inverted detection micromicroscope according to any one of claims 1-5, characterized in that: The base (6) is provided with a first transfer mechanism (13), and the transfer end of the first transfer mechanism (13) is provided with a fixing seat (14) for fixing the chip under test, and the fixing seat (14) is opposite to the observation channel (10); The probe station (4) is provided with a second transfer mechanism (15), and the probe seat (5) is provided on the transfer end of the second transfer mechanism (15); The first transfer mechanism (13) and the second transfer mechanism (15) are adapted to perform synchronous transfer, during which the fixture (14) and the probe holder (5) are relatively stationary, so as to drive the chip on the fixture (14) and the probe on the probe holder (5) to move synchronously closer to the sample stage (3).

7. The chip inverted detection micromicroscope according to claim 6, characterized in that: The observation channel (10) extends to the overlapping portion (8).

8. The chip inverted detection micromicroscope according to claim 6, characterized in that: The observation channel (10) includes a straight portion (16) away from the sample stage (3) and a bent portion (17) close to the sample stage (3), the bent portion (17) extending toward the axis of the sample stage (3). The fixed base (14) and the probe base (5) are both laterally elastically adapted, and the base (6) and the probe stage (4) are both provided with cam mechanisms (18). As the first transfer mechanism (13) and the second transfer mechanism (15) perform their transfer actions, the fixed base (14) and the probe base (5) gradually approach the corresponding cam mechanism (18) and move laterally under the push of the cam mechanism (18), thereby driving the chip on the fixed base (14) and the probe of the probe base (5) to remain opposite to the observation channel (10).

9. The chip inverted detection micromicroscope according to claim 6, characterized in that: The base of the first transfer mechanism (13) is provided with a vertically movable detection bar (19), and the transfer end of the second transfer mechanism (15) is provided with a detection rod (20). The end of the detection rod (20) extends and abuts against the bottom surface of the detection bar (19). The detection bar (19) is parallel to the transfer direction of the transfer end of the first transfer mechanism (13). A straightening mechanism (21) is provided on the base (6), and the execution end of the straightening mechanism (21) is coupled to the cantilever end (22) of the base of the first transfer mechanism (13); As the first transfer mechanism (13) and the second transfer mechanism (15) perform their transfer actions, the detection rod (20) slides along the detection strip (19); the execution end of the straightening mechanism (21) is adapted to lift the cantilever end (22) of the base of the first transfer mechanism (13) when the detection strip (19) bounces, until the detection strip (19) is reset to its initial position.

10. The chip inverted detection micromicroscope according to claim 9, characterized in that: The straightening mechanism (21) includes a lifting column (23) disposed below the cantilevered end (22) of the base of the first transfer mechanism (13); or, The straightening mechanism (21) includes a take-up roller (24) and a straightening rope (25) wound around the take-up roller (24), the end of which is tied above the cantilever end (22) of the base of the first transfer mechanism (13).

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