Device for reducing interference of focusing external light source of GDS microscopic system

Abstract

The invention relates to a device for reducing interference of a GDS microscopic system on a focus tracking external light source. A connecting seat is fixed on one side of a mounting shell; the vertical surface of the sliding seat is slidably connected with the connecting seat, and the horizontal surface is located at one end of the mounting shell away from the camera; an objective lens is mounted on the horizontal plane of the sliding seat; the objective lens, the imaging barrel lens and the camera are located on the same axis, and the sliding direction of the sliding seat is parallel to the axis; the focusing sensor is connected to one side of the mounting shell, a short-pass dichroscope is fixed in the mounting shell, the short-pass dichroscope is used for reflecting laser emitted by the focusing sensor to the objective lens, and the laser is reflected by a shot object and then is reflected by the short-pass dichroscope to the focusing sensor. According to the invention, the interference condition of an external light source is effectively solved, the interference is effectively reduced by more than 80%, the overall detection virtual focus condition is reduced by more than 50%, the detection yield of equipment is improved, and the discharge of over-detection conditions caused by virtual focus is reduced.

Description

Technical Field

[0001] This invention relates to the field of microscopy, and more specifically, to a device for reducing interference from external light sources in GDS microscopy systems when tracking focus. Background Technology

[0002] In the current production of mobile phone module factories, a good product inspection environment is required. Before the inner screen of the mobile phone is laminated, a good product inspection of the inner screen is required to eliminate interference from defective products. Different focus tracking inspection systems are used in the good product inspection. When using this focus tracking module, the following situation occurs: external light sources cause certain interference to the laser of the focus tracking module, causing defocusing during focus tracking. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a device for reducing interference from external light sources in GDS microscopy systems for focusing. Without affecting the focusing performance of the module, the device effectively solves the problem of interference from external light sources, effectively reducing interference by more than 80%, reducing the overall detection of out-of-focus issues by more than 50%, improving the equipment's inspection yield, and reducing the number of defective products discharged due to out-of-focus issues.

[0004] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: A device for reducing interference from external light sources when tracking focus in a GDS microscope system includes a mounting housing, a camera, a focus sensor, a slider, and a controller. An imaging tube lens is fixed inside the mounting housing, and the camera is connected to the end of the mounting housing opposite to the imaging tube lens; A connecting seat is fixed to one side of the mounting housing; the sliding seat has an L-shaped structure, its vertical surface is slidably connected to the connecting seat, and its horizontal surface is located at the end of the mounting housing away from the camera; and an objective lens is mounted on the horizontal surface of the sliding seat; the objective lens, the imaging tube lens and the camera are located on the same axis, and the sliding direction of the sliding seat is parallel to the axis. The focus sensor is connected to one side of the mounting housing. A short-pass dichroic mirror is fixed inside the mounting housing. The short-pass dichroic mirror is used to reflect the laser emitted by the focus sensor to the objective lens. The laser is reflected by the photographed object and then reflected by the short-pass dichroic mirror back to the focus sensor. The controller is electrically connected to the focus sensor and the sliding base, and adjusts the position of the sliding base on the connecting base according to the light signal from the focus sensor.

[0005] The beneficial effects of this invention are as follows: the laser is emitted perpendicularly to the mounting housing by the laser in the focusing sensor, is reflected by the short-pass dichroic mirror and enters the objective lens, is reflected by the photographed object and returns to the focusing sensor along the original optical path, the sensor in the focusing sensor receives the reflected light signal and calculates the distance between the objective lens and the photographed object, and feeds it back to the controller to control the sliding seat to move to the focusing position to complete automatic focusing, effectively solving the problem of interference from external light sources, effectively reducing interference by more than 80%, reducing the overall detection of out-of-focus issues by more than 50%, improving the equipment's inspection yield, and reducing the number of defective products discharged due to out-of-focus issues.

[0006] Based on the above technical solution, the present invention can be further improved as follows.

[0007] Furthermore, the laser emitting end of the focusing sensor is provided with a focusing filter to block light other than the laser emitted from the focusing sensor.

[0008] The advantage of adopting the above-mentioned further solution is that by filtering out external light sources through the focus-tracking filter, only the laser emitted from the focus sensor can be reflected on the short-pass dichroic mirror.

[0009] Furthermore, a light source assembly is connected to one side of the mounting housing to provide an illumination path for the subject being photographed.

[0010] The advantage of adopting the above-mentioned further solution is that it provides an internal light source through the light source assembly, thereby reducing interference from external light sources.

[0011] Furthermore, the light source assembly includes a light source housing, a coaxial light source, and a reflector; The light source housing has a hollow L-shaped structure, with its horizontal end connected to one side of the mounting housing. The coaxial light source is fixed to the vertical end of the light source housing, and the reflector is connected to the bend of the light source housing.

[0012] The beneficial effect of adopting the above-mentioned further scheme is that the coaxial light source guides the light to the objective lens through a mirror, so that the light shines perpendicularly and uniformly onto the sample surface. For flat, smooth surfaces, the light will return directly along its original path, appearing as a bright area in the image; while for areas with scratches, dents, particles, or patterns, the light will be scattered, appearing as a dark field in the image. This makes the microscopic defects and geometric features of the surface exceptionally clear.

[0013] Furthermore, a biconvex lens and an aperture stop are provided inside the housing of the light source, located between the coaxial light source and the reflector, with the biconvex lens positioned between the coaxial light source and the aperture stop.

[0014] The beneficial effect of adopting the above-mentioned further scheme is that the biconvex lens can convert the diverging LED light into a parallel beam, and the aperture stop, as an adjustable aperture, physically limits the diameter of the beam. By reducing the aperture stop diameter, the numerical aperture of the illumination can be reduced.

[0015] Furthermore, a plano-convex lens is provided at the connection between the light source housing and the mounting housing, and the illumination light path emitted by the coaxial light source enters the mounting housing through the plano-convex lens.

[0016] The beneficial effect of adopting the above-mentioned further solution is that it can collect all the light rays coming out of the light source housing and guide them more efficiently to fill the objective lens aperture in the mounting housing, reduce light loss at the edge of the field of view, and further optimize the uniformity of illumination.

[0017] Furthermore, a semi-transparent mirror is fixed inside the mounting housing. The illumination light path is reflected by the semi-transparent mirror to the objective lens, and then reflected by the object being photographed and transmitted through the semi-transparent mirror to the camera for imaging.

[0018] The beneficial effect of adopting the above-mentioned further scheme is that the illumination light path is reflected vertically downwards, making it completely coincide with the imaging light path. The light shines on the sample surface absolutely perpendicularly, which makes the illumination non-directional, completely eliminating shadows caused by the angle of illumination, and achieving the best effect for the manifestation of isotropic surface features.

[0019] Furthermore, the short-pass dichroic mirror is located between the semi-transparent mirror and the objective lens, and the wavelength emitted by the coaxial light source is greater than the wavelength that the short-pass dichroic mirror can filter.

[0020] The advantage of adopting the above-mentioned further solution is that it ensures that the focusing sensor can only receive the laser emitted by itself, and the signal-to-noise ratio is maximized.

[0021] Furthermore, the light source housing and the mounting housing are fixed on the same mounting plate, and the light source housing and the mounting housing are fixedly connected by a clamp.

[0022] The beneficial effect of adopting the above-mentioned further solution is that the entire system moves as a whole, the relative positions between the internal components are firmly locked, the external vibration is effectively suppressed from being transmitted to the optical components, and all components expand or contract in tandem under the same temperature field, maintaining the initial alignment state of the optical path.

[0023] Furthermore, an adjustment component is provided at the connection between the camera and the mounting housing to adjust the distance between the camera and the mounting housing.

[0024] The advantage of adopting the above-mentioned further solution is that it can be used to fine-tune the distance between the camera and the imaging tube. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the device provided by the present invention for reducing interference from external light sources in a GDS microscope system for focusing. Figure 2 This is a schematic diagram of the internal structure of the device provided by the present invention for reducing interference from external light sources in a GDS microscope system for focusing. The attached diagram lists the components represented by each number as follows: 1. Coaxial light source; 2. Biconvex lens; 3. Aperture stop; 4. Mirror; 5. Plano-convex lens; 6. Semi-transparent mirror; 7. Objective lens; 8. Imaging tube lens; 9. Camera; 10. Adjustment assembly; 11. Sliding base; 12. Connecting base; 13. Hoop; 14. Focusing sensor; 15. Mounting plate. Detailed Implementation

[0026] The principles and features of the present invention are described below. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0027] according to Figure 1 and Figure 2 As shown, this application provides a device for reducing interference from external light sources when tracking focus in a GDS microscope system, including a mounting housing, a camera 9, a focus sensor 14, a sliding base 11, and a controller.

[0028] An imaging tube lens 8 is fixed inside the mounting housing, and the camera 9 is connected to the end of the mounting housing opposite to the imaging tube lens 8.

[0029] A connecting seat 12 is fixed to one side of the mounting housing; the sliding seat 11 has an L-shaped structure, its vertical surface is slidably connected to the connecting seat 12, and its horizontal surface is located at the end of the mounting housing away from the camera 9; and an objective lens 7 is mounted on the horizontal surface of the sliding seat 11; the objective lens 7, the imaging tube lens 8 and the camera 9 are located on the same axis, and the sliding direction of the sliding seat 11 is parallel to the axis.

[0030] The focus sensor 14 is connected to one side of the mounting housing. A short-pass dichroic mirror is fixed inside the mounting housing. The short-pass dichroic mirror is used to reflect the laser emitted by the focus sensor 14 to the objective lens 7. The laser is reflected by the photographed object and then reflected by the short-pass dichroic mirror back to the focus sensor 14.

[0031] The controller is electrically connected to the focus sensor 14 and the sliding seat 11, and adjusts the position of the sliding seat 11 on the connecting seat 12 according to the light signal of the focus sensor 14.

[0032] Many existing focusing systems rely on ambient light or the imaging optical path itself for analysis, making them highly susceptible to interference from the color of the subject, changes in ambient light intensity, or specific external light sources (such as indoor lighting or sunlight), leading to focusing failure or inaccuracy. This application's embodiment uses an independent focusing sensor 14 and a laser of a specific wavelength as the active focusing light source. Specifically, according to... Figure 1 As shown, the laser is emitted perpendicularly to the mounting housing by the laser in the focus sensor 14, reflected by the short-pass dichroic mirror, enters the objective lens 7, and is reflected back to the focus sensor 14 along the original optical path after being reflected by the object being photographed. The sensor inside the focus sensor 14 receives the reflected light signal and calculates the distance between the objective lens 7 and the object being photographed, feeding back to the controller to control the sliding seat 11 to move to the focusing position to complete automatic focusing. This effectively solves the problem of interference from external light sources, effectively reducing interference by more than 80%, reducing the overall detection of out-of-focus issues by more than 50%, improving the equipment's inspection yield, and reducing the number of defective products rejected due to out-of-focus issues. In this embodiment, the short-pass dichroic mirror only reflects the specific short-wavelength laser emitted by the focus sensor 14, while allowing most other wavelengths of light (including external interference light and the imaging light of the sample) to pass through. The focus sensor 14 only "sees" the laser signal it emits and that is reflected back by the object, almost completely ignoring the interference of external ambient light, achieving stable focusing under strong light or unstable lighting conditions.

[0033] The focusing sensor 14 detects the position or shape (light signal) of the laser spot in real time. The controller compares the detected signal with a preset "focus" standard value. The controller drives the sliding base 11 to move the objective lens 7 back and forth to eliminate errors and verify the focusing effect again through the sensor. The whole system constitutes a typical closed-loop control system. Furthermore, since the focusing system operates independently, it can be performed simultaneously with the camera 9's exposure, readout, and image processing. This means that the system can predict and adjust the focus for the next frame while the camera 9 is capturing the previous frame, greatly improving the overall throughput and response speed of the system.

[0034] Based on the above technical solution, the present invention can be further improved as follows.

[0035] Preferably, in this embodiment, the laser emitting end of the focus sensor 14 is provided with a focus-tracking filter (not shown in the figure) to block light other than the laser emitted from the focus sensor 14. Stray light may exist within the installation environment where the focus sensor 14 is located. This light may originate from reflections from other parts of the system, or ambient light may enter the system through gaps.

[0036] A focus-tracking filter (usually a narrow-band bandpass filter) is placed at the laser emitter, acting like a "purifier" to ensure that only laser light of a specific wavelength emitted by the focus sensor 14 can enter the subsequent optical path. The focus-tracking filter prevents stray light of any other wavelength from being "mistakenly" emitted as the focus laser, thus ensuring the purity of the focus beam from the emission source.

[0037] Preferably, in this embodiment, a light source assembly is also connected to one side of the mounting housing to provide an illumination path for the object being photographed. The internal light source provided by the light source assembly reduces interference from external light sources.

[0038] Preferably, in an embodiment, the light source assembly includes a light source housing, a coaxial light source 1, and a reflector 4.

[0039] The light source housing has a hollow L-shaped structure, with its horizontal end connected to one side of the mounting housing. The coaxial light source 1 is fixed to the vertical end of the light source housing, and the reflector 4 is connected to the bend of the light source housing.

[0040] The coaxial light source 1 guides light to the objective lens 7 via the reflector 4, ensuring the light is perpendicularly and uniformly illuminating the sample surface. For flat, smooth surfaces, the light returns directly along its original path, appearing as a bright area in the image; however, for areas with scratches, dents, particles, or patterns, the light is scattered, appearing as a dark field in the image. This makes the surface's microscopic imperfections and geometric features exceptionally clear. The light source is fixedly mounted as a modular component on the main housing, making it part of the system rather than a separate external device. This improves the rigidity and stability of the entire system, reduces the risk of light path misalignment due to vibration, and ensures long-term consistency in illumination. The illumination source provides a broad spectrum of visible light (or a specific wavelength), while the focusing system uses a laser of a specific wavelength, strictly isolated by a focusing filter and a short-pass dichroic mirror. Therefore, both can operate simultaneously without interfering with each other; the illumination system provides high-quality images to the camera 9, while the focusing system operates independently and reliably.

[0041] Preferably, in an embodiment, a biconvex lens 2 and an aperture stop 3 are further provided inside the light source housing between the coaxial light source 1 and the reflector 4, with the biconvex lens 2 disposed between the coaxial light source 1 and the aperture stop 3.

[0042] The light emitted by the coaxial light source 1 (usually an LED or filament) is divergent. If used directly, the light will strike the reflector 4 and objective lens 7 at different angles, resulting in uneven illumination and producing halos or hot spots in the final image. The biconvex lens 2, acting as a collimating lens, converts the divergent LED light into a parallel beam. Parallel light ensures that the entire field of view receives illumination of uniform intensity, providing the camera 9 with an image with a uniform background color, which is a prerequisite for accurate measurement and comparison. The collimated light can pass through subsequent optical elements more efficiently, reducing losses caused by light scattering.

[0043] Even after collimation, the beam may still be too wide, illuminating the periphery of objective lens 7 or the inner wall of the lens barrel, generating unwanted stray light and reducing image contrast. The aperture stop 3, as an adjustable aperture, physically limits the beam diameter. By reducing the aperture stop diameter, the numerical aperture of illumination can be reduced, which directly brings two benefits: a smaller illumination angle means that the sample can be clearly imaged over a larger height range, effectively suppressing diffuse reflection light and making specular reflection features more prominent, especially beneficial for observing scratches, edges, etc. Furthermore, it can prevent invalid light rays from the beam edges, preventing them from reflecting within the system and forming ghost images, further improving the signal-to-noise ratio.

[0044] Preferably, in an embodiment, a plano-convex lens 5 is provided at the connection between the light source housing and the mounting housing, and the illumination light path emitted by the coaxial light source 1 enters the mounting housing through the plano-convex lens 5.

[0045] When light enters the air medium of the mounting housing from the air medium of the light source housing, although the medium is the same, the junction acts as a physical interface. Without any optical elements, the beam edge may be slightly distorted due to diffraction and other factors. More importantly, it is impossible to perform final wavefront correction on the previously collimated beam. The plano-convex lens 5 acts as a field lens here, placed at the image plane or intermediate aperture of the optical path. Its main function is to deflect the direction of the principal ray, allowing it to better fill the apertures of subsequent optical elements (such as the dichroic mirror and objective lens 7), rather than primarily for focusing or collimation. It can collect all the light rays from the light source housing and guide them more efficiently to fill the aperture of objective lens 7 within the mounting housing, reducing light loss at the edge of the field of view and further optimizing the uniformity of illumination.

[0046] Furthermore, the connection between the light source housing and the mounting housing is a mechanical interface, which may contain gaps, allowing dust, smoke, and other contaminants to easily enter the core optical path and contaminate precision optical components such as the dichroic mirror and reflector 4. The plano-convex lens 5 (even though its lens function is secondary) physically seals this interface at this point. This effectively protects the more expensive and delicate optical components within the mounting housing, improving the long-term stability and reliability of the system and reducing maintenance costs and failure rates.

[0047] Preferably, in the embodiment, a semi-transparent mirror 6 is also fixed inside the mounting housing. The illumination light path is reflected to the objective lens 7 via the semi-transparent mirror 6, and then reflected by the object being photographed and transmitted through the semi-transparent mirror 6 to the camera 9 for imaging.

[0048] Even with collimated light from the previous light source components, weak, directional shadows can still occur if the light is incident obliquely from the side, failing to achieve optimal uniformity. The semi-transparent mirror 6, positioned at a 45-degree angle in the imaging light path, reflects the illumination light vertically downwards, ensuring complete overlap with the imaging light path. The light strikes the sample surface perpendicularly, eliminating any directionality in the illumination and completely removing shadows caused by the angle of illumination. This achieves optimal results for revealing isotropic surface features. Under vertical illumination, a smooth, flat surface acts like a mirror, reflecting the light back along its original path, appearing as a bright white in the image. Any minute scratches, dents, particles, or contaminants scatter the light, preventing it from returning to the objective lens 7, thus appearing as clear black features in the image. This "bright background, dark features" imaging mechanism provides unparalleled defect detection capabilities and image contrast, making it particularly suitable for detecting microscopic imperfections on smooth surfaces.

[0049] Preferably, in this embodiment, the short-pass dichroic mirror is located between the semi-transparent mirror 6 and the objective lens 7, and the wavelength emitted by the coaxial light source 1 is greater than the wavelength that the short-pass dichroic mirror can filter. If the illumination light contains short-wavelength components that can be reflected by the short-pass dichroic mirror, this portion of the light will be reflected back to the focus sensor 14 along with the focusing laser, forming strong background noise that completely drowns out the weak laser signal, causing the focusing system to fail. Since all the illumination light passes through the short-pass dichroic mirror, no beam can enter the focus sensor 14 through this path. This ensures that the focus sensor 14 can only receive the laser emitted by itself, achieving an optimal signal-to-noise ratio.

[0050] Focusing optical path: Focusing sensor 14 → Short-pass dichroic mirror (reflection) → Objective lens 7 → Sample.

[0051] Illumination path: Coaxial light source 1 → Semi-transparent mirror 6 (reflection) → Short-pass dichroic mirror (transmission) → Objective lens 7 → Sample.

[0052] Imaging optical path: Sample → Objective lens 7 → Short-pass dichroic mirror (transmission) → Semi-transparent mirror 6 (transmission) → Camera 9.

[0053] All optical paths are efficiently shared in physical space, yet perfectly separated in the spectrum.

[0054] Preferably, in the embodiment, the light source housing and the mounting housing are fixed on the same mounting plate 15, and the light source housing and the mounting housing are fixedly connected by a clamp 13.

[0055] The entire system moves as a whole, and the relative positions of the internal components are firmly locked, which can effectively suppress the transmission of external vibrations to the optical components. All components expand or contract in tandem under the same temperature field, maintaining the initial alignment of the optical path.

[0056] Preferably, in an embodiment, an adjustment component 10 is provided at the connection between the camera 9 and the mounting housing for adjusting the distance between the camera 9 and the mounting housing.

[0057] The imaging sensor of camera 9 must be precisely located on the focal plane of the imaging lens group; otherwise, the image will be blurry. Manufacturing and assembly tolerances make this difficult to guarantee absolutely. An adjustment component 10 (such as a focusing thread, precision slide, etc.) is provided at the connection between camera 9 and the mounting housing to fine-tune the distance between camera 9 and imaging tube lens 8.

[0058] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0059] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0060] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0061] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0062] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0063] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A device for reducing interference from external light sources in a GDS microscope system for focusing, characterized in that, Includes a mounting housing (16), a camera (9), a focus sensor (14), a sliding mount (11), and a controller; An imaging tube lens (8) is fixed inside the mounting housing (16), and the camera (9) is connected to the end of the mounting housing (16) opposite to the imaging tube lens (8); A connecting seat (12) is fixed to one side of the mounting housing (16); the sliding seat (11) has an L-shaped structure, its vertical surface is slidably connected to the connecting seat (12), and its horizontal surface is located at the end of the mounting housing (16) away from the camera (9); and an objective lens (7) is mounted on the horizontal surface of the sliding seat (11); the objective lens (7), the imaging tube lens (8) and the camera (9) are located on the same axis, and the sliding direction of the sliding seat (11) is parallel to the axis. The focus sensor (14) is connected to one side of the mounting housing (16). A short-pass dichroic mirror is fixed inside the mounting housing (16). The short-pass dichroic mirror is used to reflect the laser emitted by the focus sensor (14) to the objective lens (7). The laser is reflected by the object being photographed and then reflected by the short-pass dichroic mirror back to the focus sensor (14). The controller is electrically connected to the focus sensor (14) and the sliding seat (11), and adjusts the position of the sliding seat (11) on the connecting seat (12) according to the light signal of the focus sensor (14).

2. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 1, is characterized in that... The laser emitting end of the focus sensor (14) is provided with a focus-tracking filter to block light other than the laser emitted from the focus sensor (14).

3. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 1 or 2, is characterized in that... A light source assembly is also connected to one side of the mounting housing (16) to provide an illumination path for the photographed object.

4. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 3, is characterized in that... The light source assembly includes a light source housing, a coaxial light source (1), and a reflector (4). The light source housing has a hollow L-shaped structure, and its horizontal end is connected to one side of the mounting housing (16). The coaxial light source (1) is fixed at the end of the vertical end of the light source housing, and the reflector (4) is connected to the bend of the light source housing.

5. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 4, is characterized in that... The housing of the light source is also provided with a biconvex lens (2) and an aperture stop (3) located between the coaxial light source (1) and the reflector (4). The biconvex lens (2) is located between the coaxial light source (1) and the aperture stop (3).

6. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 5, is characterized in that... A plano-convex lens (5) is provided at the connection between the light source housing and the mounting housing (16), and the illumination light path emitted by the coaxial light source (1) enters the mounting housing (16) through the plano-convex lens (5).

7. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 6, is characterized in that... The mounting housing (16) also has a semi-transparent mirror (6) fixed inside. The illumination light path is reflected by the semi-transparent mirror (6) to the objective lens (7), and then reflected by the object being photographed and transmitted through the semi-transparent mirror (6) to the camera (9) to form an image.

8. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 7, is characterized in that... The short-pass dichroic mirror is located between the semi-transparent mirror (6) and the objective lens (7), and the wavelength emitted by the coaxial light source (1) is greater than the wavelength that the short-pass dichroic mirror can filter.

9. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 4, is characterized in that... The light source housing and the mounting housing (16) are fixed on the same mounting plate (15), and the light source housing and the mounting housing (16) are fixedly connected by a clamp (13).

10. The device for reducing interference from external light sources in a GDS microscope system for focusing, as described in claim 1, is characterized in that... An adjustment component (10) is provided at the connection between the camera (9) and the mounting housing (16) for adjusting the distance between the camera (9) and the mounting housing (16).

Images