Transport equipment simulation method and device in semiconductor manufacturing system

Abstract

The invention relates to a method and a device for simulating carrying equipment in a semiconductor manufacturing system. The method comprises the steps that a carrying instruction sent by an upper system is received, and a target path is determined based on the carrying instruction and a pre-loaded virtual simulation environment; calling operation logic of a first operation shaft corresponding to the carrying equipment simulator based on the target path, and controlling target carrying equipment in the carrying equipment simulator to move; in the moving process of the target carrying equipment, a distance interval where the distance between the target carrying equipment and an obstacle is located is obtained; and the speed corresponding to the distance interval is obtained to serve as the target speed, and the target carrying equipment is controlled to move based on the target speed. By adopting the method, the simulation accuracy can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a method and apparatus for simulating handling equipment in a semiconductor manufacturing system. Background Technology

[0002] Automated Material Handling Systems (AMHS) are a critical component of wafer fab production in the semiconductor industry, improving production efficiency and product yield through automated material handling. With the continuous advancement of domestic semiconductor technology, the importance of AMHS systems is becoming increasingly prominent.

[0003] In traditional technologies, AMHS simulation systems are software tools specifically designed for modeling, simulating, analyzing, and optimizing actual or planned AMHS systems. They are an indispensable component in designing and operating efficient AMHS systems. By creating a virtual "digital twin" environment, they enable engineers to gain a deep understanding, predict, and optimize complex AMHS behaviors without risk or cost.

[0004] However, the simulation of the AMHS system differs from the real AMHS system, resulting in simulation results that are not applicable to the real AMHS system and a low simulation accuracy. Summary of the Invention

[0005] Therefore, it is necessary to provide a simulation method and apparatus for handling equipment in a semiconductor manufacturing system that can improve the simulation accuracy in response to the above-mentioned technical problems.

[0006] In a first aspect, this application provides a simulation method for handling equipment in a semiconductor manufacturing system, applied to a handling equipment simulator; the method includes:

[0007] Receive the transport instructions sent by the host system, and determine the target path based on the transport instructions and the pre-loaded virtual simulation environment;

[0008] Based on the target path, the operation logic of the first running axis corresponding to the handling equipment simulator is invoked to control the movement of the target handling equipment in the handling equipment simulator;

[0009] During the movement of the target transport equipment, the distance range between the target transport equipment and the obstacle is obtained;

[0010] The speed corresponding to the distance range is obtained as the target speed, and the target handling device is controlled to move based on the target speed.

[0011] Secondly, this application also provides a simulation device for handling equipment in a semiconductor manufacturing system, applied to a handling equipment simulator; the device includes:

[0012] The receiving module is used to receive the transport instructions sent by the host system and determine the target path based on the transport instructions and the pre-loaded virtual simulation environment.

[0013] The mobile simulation module is used to call the running logic of the first running axis corresponding to the handling equipment simulator based on the target path, and control the movement of the target handling equipment in the handling equipment simulator;

[0014] The distance interval determination module is used to obtain the distance interval between the target transport equipment and the obstacle during the movement of the target transport equipment;

[0015] The speed simulation module is used to obtain the speed corresponding to the distance range as the target speed, and control the movement of the target transport device based on the target speed.

[0016] Thirdly, this application also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method in any of the above embodiments.

[0017] Fourthly, this application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the methods in any of the above embodiments.

[0018] Fifthly, this application also provides a computer program product, including a computer program that, when executed by a processor, implements the steps of the method in any of the above embodiments.

[0019] The aforementioned semiconductor manufacturing system's material handling equipment simulation method, apparatus, equipment, medium, and program product receive material handling instructions sent by a host system and determine a target path based on the material handling instructions and a pre-loaded virtual simulation environment. Based on the target path, it invokes the operating logic of the first running axis corresponding to the material handling equipment simulator to control the movement of the target material handling equipment in the simulator. During the movement of the target material handling equipment, it obtains the distance range between the target material handling equipment and obstacles. It obtains the speed corresponding to the distance range as the target speed and controls the movement of the target material handling equipment based on the target speed. In this way, by simulating the operation of real material handling equipment through the material handling equipment simulator and determining the target speed of the target material handling equipment based on the actual operating speed of the material handling equipment, it ensures that the material handling equipment simulator is consistent with the real material handling equipment, thereby guaranteeing the simulation accuracy. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the drawings used in the description of the embodiments of this application or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is an application environment diagram of a full-on-loop simulation system for a semiconductor manufacturing system in one embodiment;

[0022] Figure 2 This is a flowchart illustrating a semiconductor manufacturing system simulation method in one embodiment;

[0023] Figure 3 This is a schematic diagram of the monitoring service corresponding to the MSTC simulation subsystem in one embodiment.

[0024] Figure 4 This is a schematic diagram of the monitoring service corresponding to the traffic control simulation subsystem in one embodiment;

[0025] Figure 5 This is a schematic diagram of the monitoring service corresponding to the storage device management simulation subsystem in one embodiment.

[0026] Figure 6 This is a schematic diagram of the monitoring service corresponding to the algorithm simulation subsystem in one embodiment;

[0027] Figure 7 This is a schematic diagram of the monitoring service corresponding to the handling equipment simulation subsystem in one embodiment;

[0028] Figure 8 This is a schematic diagram of one-click start in one embodiment;

[0029] Figure 9 This is a flowchart illustrating a simulation method for handling equipment in a semiconductor manufacturing system, as shown in one embodiment.

[0030] Figure 10 A flowchart illustrating the steps for calculating the second distance between target handling devices in one embodiment;

[0031] Figure 11 A flowchart illustrating the control based on the operating logic of a first operating axis in one embodiment;

[0032] Figure 12 This is a simulation flowchart of pausing or canceling a handling task for a handling device in one embodiment;

[0033] Figure 13 This is a simulation flowchart illustrating the steps of the pickup process in one embodiment;

[0034] Figure 14 This is a simulation flowchart illustrating the steps of the goods release process in one embodiment.

[0035] Figure 15 This is a flowchart of the one-click configuration steps in one embodiment;

[0036] Figure 16 This is a flowchart illustrating a manufacturing execution system simulation method in a semiconductor manufacturing system, as shown in one embodiment.

[0037] Figure 17 This is a schematic diagram illustrating the relationship between the various regions included in the virtual environment map in one embodiment;

[0038] Figure 18 This is a schematic diagram of the task generation steps in one embodiment;

[0039] Figure 19 This is a schematic diagram of the task assignment steps in one embodiment;

[0040] Figure 20 This is a schematic diagram illustrating the relationship between the process area and the handling task in one embodiment;

[0041] Figure 21 This is a schematic diagram illustrating the relationship between the bay area and the handling task in one embodiment;

[0042] Figure 22 This is a schematic diagram illustrating the relationship between the equipment and the handling task in one embodiment;

[0043] Figure 23 This is a schematic diagram illustrating the relationship between the handling equipment and the handling task in one embodiment;

[0044] Figure 24 This is a schematic diagram of a manufacturing execution system simulation device in a semiconductor manufacturing system, as shown in one embodiment.

[0045] Figure 25 This is an internal structural diagram of a computer device in one embodiment. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. It should be noted that the terms "first," "second," etc., used in this application can be used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish between the first element and the second element. The terms "comprising" and "having," and any variations thereof, used in this application, are intended to cover non-exclusive inclusion. The term "multiple" used in this application refers to two or more. The term "and / or" used in this application refers to one of the solutions, or any combination of multiple solutions.

[0047] The manufacturing execution system simulation method in the semiconductor manufacturing system provided in this application embodiment can be applied to, for example... Figure 1 The semiconductor manufacturing system shown is a fully in-the-loop simulation system. The software layer directly reuses the software of the real semiconductor manufacturing system, including the Material Control Simulation Subsystem (MCS): sharing the same source code, configuration, and database as the actual MCS, running in a container or virtual machine; the Traffic Control Simulation Subsystem (TCU): implementing deadlock prevention logic consistent with the real system (such as Dijkstra-based path planning); and the MSTC Simulation Subsystem (MSTC): sharing the same origin as the actual material handling equipment scheduling system, supporting hot-swappable scheduling algorithms. The hardware layer develops corresponding equivalent simulators, including a material handling equipment simulator and a storage device simulator. The material handling equipment simulator maintains the same overall characteristics as the real material handling equipment, including vehicle mechanical dimensions, vehicle control program communication simulation (communication with the MSTC), vehicle motion simulation (acceleration and deceleration), interface simulation, TCU communication simulation, and obstacle detection simulation. The storage device simulator maintains the same overall characteristics as the real storage device, including robot arm motion simulation, port (loading port) motion simulation, storage location management, and retrieval / placement action simulation. In addition, the communication layer uses actual communication methods, such as real industrial communication protocols and industrial WiFi 6 network technology, so that each layer is consistent with reality, thus ensuring the correctness of the simulation.

[0048] In other embodiments, the all-in-the-loop simulation system for semiconductor manufacturing systems also includes a simulation platform. On this platform, a monitoring service can schedule various simulation subsystems within the semiconductor manufacturing system. These subsystems include an MSTC simulation subsystem, a traffic control simulation subsystem (TCU), a material handling equipment simulation subsystem, a storage device management simulation subsystem, and an algorithm simulation subsystem. Each subsystem is deployed on a different server, and each subsystem is configured with a corresponding monitoring service. In some optional embodiments, the monitoring service and the subsystems can be deployed on different servers, for example, the monitoring service on a Windows server and the subsystems on a Linux server. In other embodiments, the monitoring service and the subsystems can be deployed on the same server. In some optional embodiments, the monitoring service is deployed entirely on a Windows server, and the subsystems included in the semiconductor manufacturing system can be deployed on either a Windows server or a Linux server. Specifically, the monitoring service uses a WCF service to provide an interface. The WCF service is configured with program directories, program names, etc., and the monitoring service calls the corresponding interfaces of each simulation subsystem to control each simulation subsystem. The material handling equipment simulation subsystem is used to control the material handling equipment simulator.

[0049] In practical applications, the simulation platform can receive simulation tasks and activate various simulation subsystems based on these tasks. Subsequently, the platform schedules the software-layer systems and hardware-layer simulators based on the simulation tasks to ultimately complete the simulation. For example, the simulation platform can send simulation tasks to the MES system. The MES system generates material handling tasks based on the virtual environment map corresponding to the simulation tasks, including at least one of the process areas, bay areas, and equipment in the virtual environment map. These tasks are then sent to the Material Control Simulation Subsystem (MCS). The MES system then processes the material handling tasks corresponding to the simulation tasks by reusing the actual software to schedule the hardware simulators. The hardware simulators reproduce the characteristics of the actual hardware through configuration. The hardware simulators execute the material handling tasks and communicate with the systems containing the reused actual software during execution. Finally, the simulation results are obtained through the processing of the hardware simulators and software. The hardware simulators include material handling equipment simulators and storage device simulators.

[0050] Referring to Figure 1, a monitoring service is deployed on the server corresponding to the MSTC simulation subsystem. The interface address of the monitoring service corresponding to the transport equipment scheduling subsystem is configured in the simulation platform's configuration file. Specifically, the monitoring service deployed on the server corresponding to the MSTC simulation subsystem may include at least one of the following: MSTC start interface, MSTC stop interface, map update interface, configuration query interface, and configuration modification interface.

[0051] The material handling equipment simulation subsystem comprises multiple sub-monitoring services, each corresponding to a central monitoring service and multiple sub-monitoring services. Each monitoring service is deployed on a different server, and the central monitoring service is used to schedule the sub-monitoring services. The central monitoring service includes at least one of the following: a first start interface, a first stop interface, a first map update interface, a first configuration query interface, and a first configuration modification interface. The sub-monitoring services include at least one of the following: a second start interface, a second stop interface, a maximum number of vehicles to start interface, a second map update interface, a second configuration query interface, and a second configuration modification interface.

[0052] A monitoring service is deployed on another server corresponding to the traffic control simulation subsystem. The interface address of the monitoring service corresponding to the traffic control simulation subsystem is configured in the simulation platform's configuration file. Specifically, the monitoring service deployed on the server corresponding to the traffic control simulation subsystem may include at least one of the following: TCU start interface, TCU stop interface, and map import interface.

[0053] A monitoring service is deployed on the server corresponding to the storage device management simulation subsystem. The interface address of the monitoring service corresponding to the storage device management simulation subsystem is configured in the simulation platform's configuration file. Specifically, the monitoring service deployed on the server corresponding to the storage device management simulation subsystem may include at least one of the following: stk startup interface, stk shutdown interface, and stk configuration file synchronization interface.

[0054] A monitoring service is deployed on the server corresponding to the algorithm simulation subsystem. The interface address of the monitoring service for the algorithm simulation subsystem is configured in the simulation platform's configuration file. Specifically, the monitoring service deployed on the server corresponding to the algorithm simulation subsystem may include at least one of the following: algorithm start interface, algorithm stop interface, configuration query interface, and configuration modification interface.

[0055] For details regarding the specific functionalities implemented by the aforementioned interfaces, please refer to the following text.

[0056] This application focuses on describing simulation methods for semiconductor manufacturing systems. In one exemplary embodiment, such as... Figure 2 As shown, a simulation monitoring method for a semiconductor manufacturing system is provided, which can be applied to... Figure 1 The following steps, 202 to 210, are used as an example of the simulation platform in the example.

[0057] S202: Receive simulation task, which includes the number of handling devices.

[0058] The simulation platform allows configuration of simulation tasks, such as setting the number of moving devices. The number of moving devices is used to determine the target sub-monitoring service to be started.

[0059] In other alternative embodiments, the number of simulations can be set, the map can be configured, each simulation subsystem can be configured, and simulation commands can be selected, etc., without specific limitations.

[0060] S204: Based on the simulation task, call the pre-configured monitoring services. Each monitoring service corresponds to a simulation subsystem in the semiconductor manufacturing system.

[0061] The simulation platform's configuration file pre-stores the addresses of each interface of each monitoring service. Each simulation subsystem is configured with at least one monitoring service, and one monitoring service corresponds to one simulation subsystem. For example, if the simulation subsystem is deployed on one server, only one monitoring service needs to be configured. If the simulation subsystem is deployed on at least two servers, one monitoring service needs to be deployed on each server. One of the multiple monitoring services is the overall monitoring service, which can be called by the simulation platform. The sub-monitoring service to be called is determined based on the simulation platform's call.

[0062] S206: Start each simulation subsystem by calling the startup interface of each simulation subsystem through the monitoring service.

[0063] Generally, after receiving a simulation task, it is necessary to start each simulation subsystem. The startup interface of each simulation subsystem is called through the interface address of the startup interface of each monitoring service stored in the configuration file of the simulation platform, and then the method of the startup interface is implemented to start each simulation subsystem.

[0064] For example, the simulation subsystem includes the MSTC simulation subsystem, the traffic control simulation subsystem, the storage device management simulation subsystem, and the algorithm simulation subsystem. Combined with... Figure 3 As shown, Figure 3 This is a schematic diagram of the monitoring service corresponding to the MSTC simulation subsystem in one embodiment. The monitoring service deployed on the server corresponding to the MSTC simulation subsystem may include an mstc startup interface. The mstc startup interface is used to determine the program directory to be started through the configuration file directory address of the MSTC simulation subsystem in the configuration file of the monitoring service. After starting the program by calling the method corresponding to the mstc startup interface, it will return a process identifier. Combined with... Figure 4 As shown, Figure 4 This is a schematic diagram of the monitoring service corresponding to the traffic control simulation subsystem in one embodiment. The monitoring service deployed on the server corresponding to the traffic control simulation subsystem may include a TCU startup interface. The TCU startup interface starts the traffic control simulation subsystem through the SSH and configured Linux host address, port, account, password, TCU startup command, and other related parameters in the monitoring service configuration file. Combined with... Figure 5 As shown,Figure 5 This is a schematic diagram of a monitoring service corresponding to a storage device management simulation subsystem in one embodiment. The monitoring service deployed on the server corresponding to the storage device management simulation subsystem may include an STK startup interface. The STK startup interface is used to determine the program directory to be started through the directory address of the storage device management simulation subsystem's configuration file in the monitoring service's configuration file. After starting the program by calling the method corresponding to the STK startup interface, it will return a process identifier. Combined with... Figure 6 As shown, Figure 6 This is a schematic diagram of the monitoring service corresponding to the algorithm simulation subsystem in one embodiment. The monitoring service deployed on the server corresponding to the algorithm simulation subsystem may include an algorithm startup interface. The algorithm startup interface is used to determine the algorithm program to be started through the configuration file directory address of the algorithm simulation subsystem in the configuration file of the monitoring service. After starting the algorithm by calling the method corresponding to the algorithm startup interface, a process identifier will be returned.

[0065] S208: When the monitoring service is the overall monitoring service, the target sub-monitoring service is determined based on the number of handling equipment through the overall monitoring service, and the startup interface of each handling equipment simulation subsystem is called through the target sub-monitoring service to start the handling equipment simulation subsystem.

[0066] The material handling equipment simulation subsystem includes multiple OHT simulators. These simulators simulate the movement, picking up, and placing of materials by the material handling equipment. One OHT simulator can typically control N material handling devices. Therefore, to support M material handling devices, M / N OHT simulators are needed, where M / N is the rounded-up value. Different OHT simulators can be deployed on different servers. For ease of understanding, [the following is a more detailed explanation]. Figure 7 As shown, Figure 7This diagram illustrates the monitoring service corresponding to the handling equipment simulation subsystem in one embodiment. A central monitoring service is deployed on one server, controlling which specific sub-monitoring service is called. This central monitoring service is configured with the service addresses of each sub-monitoring service. Other servers deploy sub-monitoring services, and each of these servers also deploys a handling equipment simulation subsystem. Each handling equipment simulation subsystem includes at least one OHT simulator; for example, one server can deploy three OHT simulators, each of which can control N virtual handling equipment. The central monitoring service may include a first startup interface, which determines the target sub-monitoring service to be launched based on the number of handling equipment and the number of handling equipment each sub-monitoring service can launch. Then, the target sub-monitoring service calls the second startup interface of each handling equipment simulation subsystem to launch the handling equipment simulation subsystem, i.e., to launch at least one corresponding OHT simulator. The process identifier of each launched OHT simulator is saved to the simulation platform for subsequent shutdown of the OHT simulator. For example, suppose we need to start 600 OHTs and deploy 3 servers, each server has two OHT simulators, each OHT sub-monitoring service is configured with one OHT simulator to start a maximum of 100 OHTs, and one server can control a maximum of 200 OHTs. Then the OHT overall monitoring service will calculate which OHT sub-monitoring service's second start interface to call based on the number of vehicles started and the maximum number of vehicles returned by each sub-monitoring service. It will call the second start interfaces of the 3 OHT sub-monitoring services respectively, passing in the parameters of 200 vehicles. After receiving the parameters, the OHT sub-monitoring services will start the corresponding OHT simulators.

[0067] S210: Execute simulation tasks through the various simulation subsystems that are started.

[0068] Combination Figure 8 As shown, Figure 8 This is a schematic diagram of one-click startup in one embodiment, in which the simulation platform starts each simulation subsystem through various monitoring services to lay the foundation for the execution of simulation tasks.

[0069] The simulation monitoring method in the aforementioned semiconductor manufacturing system receives a simulation task, which carries the number of handling equipment. Based on the simulation task, it calls pre-configured monitoring services, each corresponding to a simulation subsystem in the semiconductor manufacturing system. The monitoring services then call the startup interfaces of each simulation subsystem to start them. If the monitoring service is a general monitoring service, it determines target sub-monitoring services based on the number of handling equipment and calls the startup interfaces of each handling equipment simulation subsystem through these target sub-monitoring services to start them. The started simulation subsystems then execute the simulation task. This configuration allows the monitoring services to automatically start each simulation subsystem and determine the target sub-monitoring services to be started based on the number of handling equipment, thus starting the corresponding number of target sub-monitoring services without having to start all sub-monitoring services. This reduces resource consumption and improves simulation efficiency.

[0070] In some optional embodiments, after startup, the corresponding simulation task is executed. Specifically, the simulation task includes simulation information. The simulation task is executed through the started simulation subsystems, including: determining the transport equipment simulator and storage device simulator to be scheduled through the started MSTC simulation subsystem, wherein the transport equipment simulator and the storage device simulator are simulated and generated by the transport equipment simulation subsystem; executing the simulation programs corresponding to the transport equipment simulator and the storage device simulator, and controlling the transport equipment simulator and the storage device simulator through the algorithm simulation subsystem and the traffic control simulation subsystem during the execution process; and generating simulation results when the simulation task is determined to be completed based on the simulation information.

[0071] The MSTC simulation subsystem is used to determine the transport equipment simulators and storage device simulators to be scheduled based on a scheduling algorithm. It then schedules the transport equipment in the corresponding transport equipment simulation subsystem and the storage device in the corresponding storage device simulation subsystem, and executes the corresponding simulation programs to simulate the hardware of the transport equipment and storage device simulators. Furthermore, it controls the transport equipment simulators and storage device simulators through an algorithm simulation subsystem and a traffic control simulation subsystem to simulate the software. Thus, through software and hardware simulation, the simulation results are ultimately obtained. The simulation results may include the time required for a fixed number of transport equipment to perform a corresponding task, or the number of transport equipment required to perform a certain task within a certain time period. No specific limitations are made here; those skilled in the art can set simulation objectives as needed to obtain corresponding simulation results.

[0072] In some alternative embodiments, to improve the accuracy of the simulation, a full-on-loop simulation method for a semiconductor manufacturing system is provided, which can be applied to... Figure 1Taking a semiconductor manufacturing system's all-in-the-loop simulation system as an example, this process includes receiving simulation tasks. By reusing actual software, the corresponding material handling tasks are processed to schedule a hardware simulator. The hardware simulator replicates the characteristics of the actual hardware through configuration. The hardware simulator executes the material handling tasks and communicates with the systems containing the reused actual software during the execution of these tasks using actual communication methods.

[0073] The simulation task is a user-configured task received by the simulation platform. This simulation task can be the time required for a fixed number of handling devices to perform the handling task corresponding to a certain virtual environment map, or the number of handling devices required to complete the handling task corresponding to a certain virtual environment map within a preset time period. Those skilled in the art can set the corresponding simulation task as needed, without making specific limitations here.

[0074] Each material handling task corresponding to a simulation task is generated by the MES system based on a virtual environment map corresponding to the simulation task. This virtual environment map includes at least two process areas, each process area includes at least one bay area, and each bay area includes at least one piece of equipment. Thus, the MES system can generate material handling tasks based on at least one of the process areas, bay areas, and equipment in the virtual environment map, and then distribute these tasks to the Material Control Simulation Subsystem (MCS). The MCS then sends the material handling tasks to the corresponding MSTC simulation subsystem, which schedules the corresponding hardware simulator to execute the material handling tasks. For details on the generation of material handling tasks, please refer to the following text.

[0075] The hardware simulator reproduces the characteristics of actual hardware through configuration. The hardware simulator includes a handling equipment simulator and a storage device simulator. For specific limitations of the handling equipment simulator and the storage device simulator, please refer to the above text, which will not be repeated here.

[0076] The communication involved in the hardware simulator's handling of the transport task is conducted through actual communication methods, and the systems in which each actual software resides reuse systems from real semiconductor manufacturing systems, thereby ensuring the consistency of software and communication with the real system.

[0077] For example, the communication layer can use actual communication methods, such as real industrial communication protocols and industrial WiFi 6 network technology.

[0078] Material Control Simulation Subsystem (MCS): It has the same source code, configuration, and database as the actual MCS, and runs in a container or virtual machine.

[0079] Traffic Control Simulation Subsystem (TCU): A real system that implements deadlock prevention logic (such as Dijkstra-based path planning) consistent with the real system.

[0080] MSTC Simulation Subsystem (MSTC): It shares the same origin as the actual overhead crane scheduling simulation subsystem and supports hot-swappable scheduling algorithms.

[0081] The aforementioned all-in-the-loop simulation method for semiconductor manufacturing systems receives simulation tasks; by reusing actual software, it processes the various transport tasks corresponding to the simulation tasks to schedule a hardware simulator. The hardware simulator reproduces the characteristics of the actual hardware through configuration; the hardware simulator executes the transport tasks, and during the execution of the transport tasks, it communicates with the systems containing the reused actual software through actual communication methods. In this way, all the software reuses the actual software, the hardware implements the characteristics of the actual hardware through configuration, and the communication also adopts the actual communication methods. Thus, the configuration in the simulation system is completely the same as that in the actual system, ensuring the correctness of the simulation.

[0082] In some optional embodiments, the hardware simulator includes a handling equipment simulator; the method further includes configuring the handling equipment simulator, specifically including: receiving a first configuration instruction for the handling equipment simulator; configuring at least one of the following based on the first configuration instruction: communication instructions between the handling equipment simulator and the multiplexed overhead crane scheduling simulation subsystem, communication instructions with the multiplexed traffic control simulation subsystem, operating logic, and position detection logic, wherein the communication instructions between the handling equipment simulator and the multiplexed overhead crane scheduling simulation subsystem are used to realize the interaction between the multiplexed handling equipment simulator and the overhead crane scheduling simulation subsystem; the communication instructions between the handling equipment simulator and the multiplexed traffic control simulation subsystem are used to realize the interaction between the handling equipment simulator and the multiplexed traffic control simulation subsystem; the operating logic of the handling equipment simulator is used to control each target handling equipment corresponding to the handling equipment simulator to simulate the operation of real semiconductor handling equipment; the position detection logic of the handling equipment simulator is used to broadcast the position information of the target handling equipment to other target handling equipment via multicast.

[0083] In order to ensure that the characteristics of each handling device in the handling equipment simulator are consistent with those of the real handling equipment, this application configures the handling equipment simulator through configuration, mainly including:

[0084] First, communication with the crane scheduling simulation subsystem: Specifically, based on the communication between the real handling equipment and the crane scheduling system, communication with the crane scheduling simulation subsystem MSTC is achieved through a data distribution service, wherein the data distribution service may include FASTDDS, and other data distribution services may also be included in other embodiments.

[0085] Second, communication with the reused traffic control simulation subsystem: Specifically, this can be achieved through an interface that handles operations related to the material handling equipment simulator and the traffic control simulation subsystem (TCU), including detecting communication status, initializing TCU objects, path sorting, calculating TCU information, and distance calculation. The code involves multiple methods related to TCU path, command, and segment calculations, covering TCU information assembly and retrieval, as well as determining road and curve distances. This interface also supports asynchronous operations, such as starting and stopping TCU tasks, ensuring effective management of material handling paths and processes within the AMHS environment.

[0086] Third, the operating logic: The movement of the conveying equipment includes the movement of multiple axes. In this application, the X-axis is used to simulate movement, the Y-axis is used to simulate the mechanical movement of the gripper extending and retracting, the Z-axis is used to simulate the mechanical movement of rising and falling, and the G-axis is used to simulate the mechanical movement of the gripper grasping and releasing. The configuration of the operating logic for each axis can be combined with the content of each operating logic below. For example, the main logic for the X-axis is designed, which mainly includes vehicle detection ahead, precise positioning, start and stop, and three-stage speed for straight travel and speed for curves. S0 stage (no vehicle ahead): obtain the maximum speed - and calculate the maximum speed allowed in this stage; S1 stage (6000~3600): travel at the calculated speed of 3300; S2 stage (3600~2000): decelerate to a speed of 500; S3 stage (2000~800): travel at a calculated speed of 300. The main logic for the Y-axis is designed, and the movement is configured by calculating the extension and retraction time. The main logic for the Z-axis is designed, and the movement is configured by calculating the extension and retraction time. The main logic for the G-axis is designed, and the movement is configured by calculating the pick-up and put-down time. In other embodiments, the movement of the handling equipment can also involve the R-axis, which is used to simulate the rotation of the gripper and can be configured by calculating the rotation time.

[0087] Fourth, the location detection logic: This is used to broadcast the location information of the target handling device to other target handling devices via multicast. Other target handling devices receive this information via UDP multicast and perform location detection.

[0088] After the above configuration, the material handling equipment simulator can simulate real material handling equipment. If the real material handling equipment changes, parameters can be added or modified in the material handling equipment simulator. In this way, the performance of the upper-layer MSTC system and the rationality of the scheduling algorithm can be greatly simulated and tested in high-performance testing.

[0089] This application provides a detailed description of a simulation method for handling equipment in a semiconductor manufacturing system. In one exemplary embodiment, such as... Figure 9 As shown, a simulation method for handling equipment in a semiconductor manufacturing system is provided, which can be applied to...Figure 1 The following steps are used as an example of a material handling equipment simulator, including steps 902 to 908. Wherein:

[0090] S902: Receives the transport instructions sent by the host system and determines the target path based on the transport instructions and the pre-loaded virtual simulation environment.

[0091] The upper-level system can be a crane scheduling simulation subsystem. The pre-loaded virtual simulation environment includes a virtual environment map, which includes tracks. The crane scheduling simulation subsystem sends a transport instruction to the transport equipment simulator. The transport equipment simulator can determine the target path corresponding to the transport instruction based on the transport instruction and the pre-loaded virtual simulation environment. The determination method can be to reuse the actual target path generation logic so as to be the same as the actual processing in the system.

[0092] Specifically, the wafer fab's Manufacturing Execution System (MES) or Material Control System (MCS) sends a handling instruction (e.g., take a wafer cassette from the STK01 port of the storage facility and transport it to Station A station) to the overhead crane scheduling simulation subsystem, which is the brain of AMHS, through the SEMI standard SECS / GEM protocol.

[0093] The overhead crane scheduling simulation subsystem receives and parses the instructions, and selects the most suitable idle handling equipment from the handling equipment simulator based on its internal scheduling algorithm. Subsequently, the overhead crane scheduling simulation subsystem sends the formatted handling instructions (including information such as pick-up point, unloading point, and route) to the corresponding handling equipment simulator via the FastDDS communication protocol.

[0094] After receiving the handling instruction, the handling equipment simulator parses the instruction and plans the optimal path, i.e. the target path, based on the pre-loaded virtual simulation environment.

[0095] S904: Based on the target path, call the running logic of the first running axis corresponding to the handling equipment simulator to control the movement of the target handling equipment in the handling equipment simulator.

[0096] The material handling equipment simulator initiates its X-axis (first operating axis) operation logic to simulate real speed changes and begins controlling the corresponding target material handling equipment to move along the planned path. The X-axis operation logic is the logic during movement, including positioning and obstacle distance detection logic, distance-based segmented speed control logic, control logic for different track types, and task cancellation logic, etc.

[0097] S906: During the movement of the target transport equipment, obtain the distance range between the target transport equipment and the obstacle.

[0098] The obstacle refers to other target transport devices located ahead of the target transport device. The distance between the target transport device and the obstacle is the distance between the two target transport devices. During the movement of the target transport device, segmented speed control can be performed based on the distance. The speed varies depending on the distance range. In some optional embodiments, the distance range may include (6000, 3600), (3600, 2000), and (2000, 800). In other embodiments, the distance range may include other values, which are not specifically limited here.

[0099] After obtaining the distance between the target transport device and the obstacle, the distance is compared with the endpoint values ​​of each pre-set distance interval to determine the distance interval in which the target transport device and the obstacle are located.

[0100] S908: Obtain the speed corresponding to the distance range as the target speed, and control the movement of the target handling equipment based on the target speed.

[0101] Different distance ranges correspond to different target speeds; the larger the distance range, the greater the speed. In this embodiment, the target speed is determined based on the distance range, and then the target transport equipment is controlled to move according to the target speed.

[0102] In practical applications, the following stages are defined: S0 (no vehicle ahead): The maximum speed is acquired, and the maximum permissible speed within this segment is calculated to control the target transport equipment to move at the maximum speed; S1 (6000~3600): The equipment travels at the calculated speed of 3300; S2 (3600~2000): The equipment decelerates to a speed of 500; S3 (2000~800): The equipment travels at the calculated speed of 300. In other embodiments, the distance can be divided into other numbers of distance intervals, and a target speed can be configured for each distance interval. The aforementioned simulation method for handling equipment in a semiconductor manufacturing system receives handling instructions from a host system and determines the target path based on the instructions and a pre-loaded virtual simulation environment. Based on the target path, it calls the operating logic of the first running axis corresponding to the handling equipment simulator to control the movement of the target handling equipment in the simulator. During the movement of the target handling equipment, it obtains the distance range between the target handling equipment and obstacles. It then obtains the speed corresponding to the distance range as the target speed and controls the movement of the target handling equipment based on this target speed. In this way, the method simulates the operation of real handling equipment through the handling equipment simulator, and determines the target speed of the target handling equipment based on the actual operating speed of the handling equipment, thereby ensuring consistency between the handling equipment simulator and the real handling equipment and guaranteeing the accuracy of the simulation.

[0103] In some of these alternative embodiments, combined with Figure 10As shown, before obtaining the distance range between the target handling equipment and the obstacle, the following steps are also included:

[0104] S1002: Determine the current position of the target handling equipment in the virtual simulation environment.

[0105] S1004: Determine the first direction of movement of the target handling equipment based on the current position.

[0106] The current position of the target handling equipment in the virtual simulation environment can be determined based on barcodes on the virtual simulation map. The virtual simulation map contains multiple barcodes, and the barcode type differs depending on the first direction of movement.

[0107] This way, the barcode corresponding to the current position of the target handling equipment in the virtual simulation environment can be obtained. Based on the type of barcode, the corresponding movement direction can be determined. For example, the first movement direction can include horizontal and vertical directions. Based on the type of barcode, it can be determined whether the first movement direction is horizontal or vertical.

[0108] S1006: Based on the first distance between each target transport device with the same first direction of movement, determine whether each target transport device is located on the same track.

[0109] The target handling equipment is divided into lateral moving target handling equipment and longitudinal moving target handling equipment based on the first moving direction, and then the first distance between the target handling equipment in each group is calculated.

[0110] In some optional embodiments, to improve accuracy, determining whether each target transport device is located on the same track based on a first distance between each target transport device with the same first direction of movement includes: determining the target coordinates of each target transport device at its current position based on the first direction of movement of the target transport devices; integerizing each target coordinate and determining a first distance between each target transport device based on the integerized target coordinates; determining that each target transport device is located on the same track if the first distance is less than a distance threshold; and determining that each target transport device is located on a different track if the first distance is greater than or equal to the distance threshold.

[0111] When the direction of movement is lateral, the first distance between each laterally moving target handling device can be determined. For example, in the XY plane, the ordinate y of each laterally moving target handling device is obtained as the target coordinate, and then the difference between each ordinate y is calculated as the first distance. This includes first integerizing the target coordinate, that is, integerizing the ordinate y, for example, integerizing 1.02 into 1. Finally, the first distance between each target handling device is determined based on the integerized target coordinates.

[0112] When the direction of movement is longitudinal, the first distance between each longitudinally moving target handling device can be determined. For example, in the XY plane, the ordinate x of each longitudinally moving target handling device is obtained as the target coordinate, and then the difference between each ordinate x is calculated as the first distance. This includes first integerizing the target coordinate, that is, integerizing the ordinate x, for example, integerizing 5.9 into 6. Finally, the first distance between each target handling device is determined based on the integerized target coordinates.

[0113] If the first distance is less than the distance threshold, it is determined that each target transport device is located on the same track; otherwise, it is determined that each target transport device is not located on the same track.

[0114] S1008: When there are at least two target transport devices on the same track and the second movement direction of at least two target transport devices is the same, obtain the second distance between the target transport device and the target transport device adjacent to it in front. The second distance between the target transport device and the target transport device adjacent to it in front is used to determine the distance range between the target transport device and the obstacle.

[0115] There are at least two target transport devices located on the same track, meaning that there is a road connection between these two target transport devices.

[0116] The first direction of movement includes each of the second directions of movement. For example, when the first direction of movement is horizontal, the second direction of movement can be forward horizontal and reverse horizontal; when the second direction of movement is vertical, the second direction of movement can be forward vertical and reverse vertical.

[0117] Therefore, the second moving direction of the target transport equipment with road association is obtained. If the second moving directions are the same, the movement between the two may affect each other. Therefore, it is necessary to obtain the second distance between the target transport equipment and the adjacent target transport equipment in front as the distance between the target transport equipment and the obstacle. This distance is used to determine the distance range, so as to facilitate the subsequent control of the speed of the target transport equipment.

[0118] If the second movement directions of the target transport devices that are associated with roads are different, their movements will not affect each other, so there is no need to calculate the distance between them.

[0119] In the above embodiments, the position of the target transport equipment corresponding to the transport equipment simulator and the distance between it and the target transport equipment in front are obtained through the above simulation logic. Once a vehicle in the same direction on the same track is detected in front, it will seamlessly implement the segmented speed control logic mentioned above, automatically adjust the speed to maintain a safe distance, and realistically reproduce the following, deceleration and waiting behavior in traffic flow.

[0120] In some alternative embodiments, combined with Figure 11 As shown,Figure 11 A flowchart illustrating control based on the operating logic of a first operating axis in one embodiment; controlling the movement of a target transport device in the transport device simulator by calling the operating logic of the first operating axis corresponding to the transport device simulator based on the target path, including: when it is determined that the target transport device enters a new track based on the target path, determining the type of track where the target transport device is located based on the position of the target transport device; and controlling the movement of the target transport device based on the type of track where the target transport device is located.

[0121] Continue to combine Figure 11 As shown, the operating logic for the first running axis includes determining whether the target transport device has entered a new track. If so, the track type is determined. Different track types correspond to different control logic, and the movement of the target transport device is controlled based on the track type. Here, the movement simulates that of a real transport device. Furthermore, after entering a new track, the attributes of the new track, including its maximum running speed, can be obtained to facilitate subsequent control of the target transport device's movement on the track.

[0122] In some optional embodiments, controlling the movement of the transport equipment simulator based on the type of track includes: if the track on which the target transport equipment is located is a curve, determining the type of curve and controlling the target transport equipment to move at a constant speed according to the curve speed corresponding to the curve type; if the track on which the target transport equipment is located is a straight track and there are no obstacles in front of the target transport equipment, controlling the target transport equipment to move at the speed corresponding to the track; if the track on which the target transport equipment is located is a straight track and there are obstacles in front of the target transport equipment, continuing to execute the step of obtaining the distance interval between the target transport equipment and the obstacle.

[0123] Among them, the combination Figure 11 As shown, when the track type is a curve, the device moves at a constant speed according to the curve speed. For example, the length of the curve is calculated, and the time to exit the curve is determined based on the curve length and the constant speed. After waiting for this time, the position of the target transport device in the virtual environment map is updated. In other optional embodiments, the curve may include S-curves, Y-curves, and N-curves. Different curve types correspond to different speeds, and the constant speed of the target transport device can be controlled based on the speed corresponding to the curve type.

[0124] If the track is a straight track and there are no obstacles in front of the target transport equipment, then it will move at the track's maximum operating speed.

[0125] When the track is a straight track and there is an obstacle in front of the target transport equipment, the above-mentioned processing can be used. For example, the distance range between the target transport equipment and the obstacle can be determined, the speed corresponding to the distance range can be obtained as the target speed, and the movement of the target transport equipment can be controlled based on the target speed. For example, the distance range may include (6000, 3600), (3600, 2000), and (2000, 800). Different distance ranges correspond to different target speeds. The larger the distance range, the greater the speed. In other embodiments, the distance range may also be other values. No specific limitation is made here. In this way, the movement of the target transport equipment is controlled based on the distance range between the target transport equipment and the obstacle until the target transport equipment stops, and the detection of whether there is an obstacle in front continues.

[0126] In some optional embodiments, the method further includes: determining the operating axis of the target transport device based on its current position and operating status in the virtual simulation environment; if the operating axis is a first operating axis, continuing to execute the step of calling the operating logic of the first operating axis corresponding to the transport device simulator based on the target path to control the movement of the target transport device in the transport device simulator; if the operating axis is a second operating axis, calling the operating logic of the second operating axis corresponding to the transport device simulator to control the extension and retraction time of the target transport device, wherein the operating logic of the second operating axis is an extension and retraction offset determined based on the extension and retraction time of the target transport device; if the operating axis is a third operating axis, calling the operating logic of the third operating axis corresponding to the transport device simulator to control the lifting and lowering time of the target transport device, wherein the operating logic of the third operating axis is a lifting and lowering offset determined based on the lifting and lowering time of the target transport device; if the operating axis is a fourth operating axis, calling the operating logic of the fourth operating axis corresponding to the transport device simulator to control the pick-up and put-down time of the target transport device, wherein the operating logic of the fourth operating axis is a gripper offset determined based on the pick-up and put-down time of the target transport device.

[0127] The location of the target handling equipment can be determined based on positioning information in a virtual environment map. For example, the virtual environment map includes a positioning barcode. The location of the target handling equipment is determined by the target handling equipment and the positioning barcode. If the target handling equipment is located on a track, then the running axis of the target handling equipment is the first running axis, such as the X-axis. If the target equipment is located at the location of a storage device, then the running axis is determined based on the target handling equipment and its operating state. For example, the operating state includes a picking state, a placing state, and the gripper state formed by the state changes of the gripper, which is the end effector of the target handling equipment, when performing picking and placing tasks. The gripper state includes an extended state, a retracted state, a lowered state, an raised state, a picking state, and a placing state. First, the order of gripper state changes is determined based on the picking or placing state, and then the corresponding running axis is determined based on the order of gripper state changes.

[0128] The target operation logic differs for each of the four axes. For example, the first axis, the X-axis, involves movement logic, including positioning and obstacle distance detection, distance-based segmented speed control, control logic for different track types, and task cancellation logic. The second axis, the Y-axis, includes gripper extension and retraction logic. The third axis, the Z-axis, includes gripper descent and ascent logic. The fourth axis, the G-axis, includes gripper picking and gripper placing logic.

[0129] Furthermore, the operation logic is configured during the configuration process. For example, the operation logic of the second operating axis is based on the extension and retraction time of the gripper of the target handling equipment, which determines the extension and retraction offset; the operation logic of the third operating axis is based on the lifting and lowering time of the gripper of the target handling equipment, which determines the lifting and lowering offset; and the operation logic of the fourth operating axis is based on the pick-up and put-down time of the gripper of the target handling equipment, which determines the gripper offset. In this way, the simulated extension and retraction amount is configured by the extension and retraction time, thereby simulating the gripper of the real handling equipment. Taking the operation logic of the second operating axis as an example, the extension and retraction amount of the gripper corresponding to the second operating axis in a predetermined direction is first obtained. Then, the extension and retraction offset of the second operating axis is determined based on the configured extension and retraction offset. Thus, the extension and retraction time of the Y-axis can be determined based on the extension and retraction offset and the extension and retraction speed of the Y-axis. After waiting for the extension and retraction time, the extension and retraction amount of the Y-axis is set to the original extension and retraction amount plus the extension and retraction offset. The processing of the third operating axis, etc., is similar and will not be described in detail here.

[0130] After determining the running axis and the target running logic, the operation of the target handling equipment is simulated based on the target running logic.

[0131] To facilitate understanding, let's take the picking process as an example. When the handling equipment is in the picking state, the gripper is in the retracted state. The operating axis is then designated as the second operating axis, i.e., the Y-axis. By controlling this second operating axis, the gripper is extended. After the gripper is extended, the operating axis is designated as the third operating axis, i.e., the Z-axis, to control the gripper to descend. After the gripper descends to the specified position, the operating axis becomes the fourth operating axis, i.e., the G-axis, to control the gripper to grab the goods. After the gripper completes picking, the operating axis becomes the third operating axis, i.e., the Z-axis, to control the gripper to rise. After the gripper rises, the operating axis becomes the second operating axis, i.e., the Y-axis, to control the gripper to retract, thus completing the entire picking process.

[0132] In some optional embodiments, after determining the operating axis of the target handling device based on its current position and operating status in the virtual simulation environment, the method further includes: when the current position is a pick-up / placement position, controlling the handling device simulator corresponding to the target handling device to communicate with the storage device simulator through actual hardware communication.

[0133] During the picking and placing of goods, the handling equipment simulator corresponding to the target handling equipment needs to communicate with the storage device simulator to synchronously simulate the complete E84 signal handshake process between the device port and the storage device. The total time of the picking operation is the sum of the time spent on these detailed steps.

[0134] The handling equipment simulator updates its status to loaded after picking up the goods, and then carries the simulated wafer cassette to the corresponding platform. During transportation, it continues to execute the operating logic corresponding to the X-axis.

[0135] Upon arrival at the destination platform, the unloading simulation process is executed to complete the cargo release. After the task is completed, the handling equipment simulator reports task completion to the overhead crane scheduling simulation subsystem via a data distribution service, such as the FastDDS interface.

[0136] In addition, it should be noted that during the entire simulation process, all key states of the target handling equipment corresponding to the handling equipment simulator (such as position, speed, and loading status) are reported to the overhead crane scheduling simulation subsystem in real time, forming a complete data closed loop.

[0137] In the above embodiments, the target operation logic is determined based on the location and operating status of different target handling devices in order to simulate the target handling devices.

[0138] In some optional embodiments, the method further includes: before the target transport equipment reaches the branch control area, controlling the transport equipment simulator corresponding to the target transport equipment to send a right-of-way request to the reused traffic control simulation subsystem via actual hardware communication, wherein the control logic version of the traffic control simulation subsystem is determined based on the simulation configuration; if the right-of-way request result returned by the traffic control simulation subsystem is approved, controlling the target transport equipment to decelerate through the branch control area; if the right-of-way request result returned by the traffic control simulation subsystem is not approved, controlling the target transport equipment to reach the deceleration position and begin decelerating until reaching the parking point, and waiting for the right-of-way request result returned by the traffic control simulation subsystem to be approved, controlling the target transport equipment to decelerate through the branch control area, wherein the parking point is located before the end of the track where the target transport equipment is located.

[0139] Before the target transport equipment reaches the branch control area, the transport equipment simulator corresponding to the target transport equipment sends a right-of-way request to the reused traffic control simulation subsystem via actual communication. This application uses actual communication and reuses a real traffic control system to obtain the traffic control simulation subsystem, thus ensuring that the software and communication layers are the same as in reality. The traffic control simulation subsystem determines whether to grant permission to the target transport equipment based on the reused software algorithm. If permission is granted, the target transport equipment is controlled to decelerate through the branch control area; if permission is denied, it is determined whether the target transport equipment has reached the deceleration position. If not, it moves at the original speed; otherwise, it decelerates until it reaches the parking point and waits for the right-of-way request result returned by the traffic control simulation subsystem to be "pass". When the result is "pass", the target transport equipment is controlled to decelerate through the branch control area. The parking point is before the end of the current track, that is, when the target transport equipment stops, the front and rear of the vehicle are within the range of the last barcode and the first barcode of the current track.

[0140] In some optional embodiments, controlling the target transport device to decelerate through the branch control area includes: when the target transport device reaches the end of the track where the target transport device is located, controlling the target transport device to decelerate to a target speed until the target transport device passes through the track where the target transport device is located, and taking the curve in the branch control area as a new track, and continuing to perform the step of determining the type of track where the transport device simulator is located based on the position of the transport device simulator; when the target transport device has not reached the end of the track where the target transport device is located, continuing to detect whether there is an obstacle in front of the target transport device.

[0141] When the target transport device reaches the end of the track, it continues to control the target transport device to decelerate to the target speed, for example, to 1 meter per second. In other embodiments, the target speed can be other values. The device passes through the current track at the target speed and determines whether there are other obstacles ahead. If there are no other obstacles, it enters a new track and continues to execute the control logic for entering the new track described above.

[0142] In the above embodiments, the operation logic of the configured handling equipment simulator is used to ensure that the operation of the target handling equipment corresponding to the handling equipment simulator is consistent with the operation of the real handling equipment, thereby ensuring the accuracy of the simulation.

[0143] In some of these alternative embodiments, combined with Figure 12 As shown, Figure 12 This is a simulation flowchart of pausing or canceling a handling task using a handling device in one embodiment. In this embodiment, the method further includes:

[0144] S1202: If the target transport equipment receives an instruction to cancel or pause its transport task and is located on a curve, then the target transport equipment is controlled to continue moving.

[0145] The instruction to cancel or pause the handling task is received when the target handling equipment is on a curve. It is necessary to control the target handling equipment to drive out of the curve in order to avoid affecting the normal movement of other handling equipment, so as to drive out of the curve and reach the straight road, and then control it according to the control logic of the straight road.

[0146] S1204: When the target transport equipment receives an instruction to cancel the transport task and the target transport equipment is located on a straight path, determine whether the target transport equipment can decelerate to a stop on the straight path.

[0147] S1206: When the target transport equipment can decelerate to a stop on a straight track, control the target transport equipment to decelerate to a stop.

[0148] S1208: If the target transport equipment cannot decelerate to a stop on a straight track, control the target transport equipment to continue traveling until the target transport equipment is on a straight track and can decelerate to a stop, then control the target transport equipment to decelerate to a stop.

[0149] If the instruction to cancel or pause the transport task is received when the target transport equipment is on a straight path, then it is determined whether the remaining distance of the straight path is sufficient for the target transport equipment to decelerate to a stop. If so, the target transport equipment is controlled to decelerate to a stop. Otherwise, the target transport equipment is controlled to continue traveling to another straight path, and if it is possible to decelerate to a stop, the target transport equipment is controlled to decelerate to a stop.

[0150] The above embodiments provide the simulation logic of the material handling equipment simulator, so that the material handling equipment simulator can simulate the operation of real material handling equipment, laying the foundation for simulation accuracy.

[0151] In some optional embodiments, the hardware simulator includes a storage device simulator; the method further includes: receiving a second configuration instruction for the storage device simulator; configuring at least one of the robot arm motion logic, loading port motion logic, and pick-and-place logic of the storage device simulator based on the second configuration instruction; the robot arm motion logic includes the movement speed of the robot arm along each axis and the time spent on picking and placing goods; the loading port motion logic includes the combination of movement of the loading port along each axis, the movement speed along each axis, the time spent, and the movement distance.

[0152] In order to ensure that the characteristics of each storage device in the storage device simulator are consistent with those of the actual handling equipment, this application configures the storage device simulator through configuration, mainly including:

[0153] First, the robot's motion logic includes the robot's movement speed along each axis and the time spent picking up and placing goods. For example, each axis includes: X-axis (forward and backward movement), Y-axis (up and down movement), and Z-axis (picking up and placing). A single picking up or placing of goods consists of picking up along the Z-axis + moving along the X and Y axes + placing up along the Z-axis. The following parameters need to be configured: average movement speed of the X-axis, average movement speed of the Y-axis, picking up time along the Z-axis, and placing time along the Z-axis.

[0154] Second, the port motion logic includes the following: Port motion encompasses the X-axis (forward / backward translation), Y-axis (lifting / lowering), and R-axis (rotation), along with the distance and duration of each axis's movement. Depending on the port design, the X, Y, and R axis motion combinations differ: 1) Only X-axis motion, no R-axis motion; 2) No Y-axis motion; 3) Simultaneous X and R axis motion; 4) X-axis motion completes before R-axis motion begins, or vice versa; 5) No R-axis motion; 6) No Y-axis motion; 7) Simultaneous X and R axis motion. The X-axis motion needs to be configured to match the port design, with different lengths. X-axis motion is simulated at a constant speed, while R-axis motion is simulated with configurable durations. The parameters include X-axis distance, X-axis speed, Y-axis time, and R-axis time. In practical applications, the motion combination for each axis is configured first, and then at least one of the following parameters is set for each axis within that combination: distance, time, and speed, to simulate real-world motion.

[0155] Third, the picking and placing logic includes the aforementioned robotic arm motion logic and loading port motion logic. Each step of the picking and placing logic can be configured, and the robotic arm motion logic and loading port motion logic can be called during the process to simulate picking and placing goods. For details, please refer to the following text.

[0156] In this embodiment, the process of picking up and placing goods can be simulated through simple configuration, and the accuracy of the simulation is guaranteed.

[0157] In one alternative embodiment, the simulation of the pickup process can be found in [reference needed]. Figure 13 The system executes material handling tasks via a hardware simulator and communicates with the reused software systems during the process. This includes: sending a loading port ready message to the reused material control system via the storage device simulator and receiving outbound instructions from the reused material control system; executing robot arm motion logic and loading port motion logic based on the outbound instructions; and sending a picking completion message to the reused material control system via the storage device simulator. This picking completion message instructs the reused material control system to send a material handling task to the reused crane scheduling simulation subsystem. The material handling task instructs the reused crane scheduling simulation subsystem to send a material handling instruction to the material handling equipment simulator. The material handling instruction instructs the corresponding target material handling equipment in the material handling equipment simulator to move to the loading port to simulate the picking process.

[0158] The storage device simulator sends a loading port ready message to the reused material control system to facilitate outbound delivery, i.e., the loading port is idle and waiting for the wafer cassette to be placed; the reused material control system sends an outbound command to the storage device simulator, and the communication between the storage device simulator and the reused material control system adopts the real communication method.

[0159] The storage device simulator executes the robotic arm's motion logic, which includes picking up goods along the Z-axis, moving along the X and Y axes, and placing goods along the Z-axis. Then, the storage device simulator executes the loading port motion logic to reach the loading port. It then sends a picking completion message to the reused material control system, which in turn sends a handling task to the reused overhead crane scheduling simulation subsystem. The overhead crane scheduling simulation subsystem sends handling instructions to the handling equipment simulator, which then executes the simulation logic described above to reach the loading port and complete the outbound process.

[0160] In one alternative embodiment, the simulation of the delivery process can be found in [reference needed]. Figure 14The system executes handling tasks through a hardware simulator and communicates with the systems containing the reused actual software during the execution of the handling tasks. This includes: receiving handling tasks sent by the reused material control system to the reused overhead crane scheduling simulation subsystem. The handling tasks are used to instruct the reused overhead crane scheduling simulation subsystem to control the corresponding target handling equipment in the handling equipment simulator to move to the loading port and control the target handling equipment to simulate the unloading process; after the target handling equipment unloading process is simulated, the system receives the warehousing instruction sent by the reused material control system to the storage equipment simulator, and executes the robot arm motion logic and loading port motion logic of the storage equipment simulator based on the warehousing instruction to put the goods into the warehouse.

[0161] The unloading process requires transporting the wafer cassettes to the corresponding storage device locations. Therefore, the reused material control system sends a handling task to the reused overhead crane scheduling simulation subsystem. The reused overhead crane scheduling simulation subsystem can then schedule the corresponding handling equipment simulator to execute the handling task, transporting the wafer cassettes to the location of the corresponding storage device simulator. Then, based on the communication between the handling equipment simulator and the storage device simulator, the wafer cassettes in the target handling equipment are moved into the storage device. Subsequently, the storage device simulator uses the robot arm motion logic and loading port motion logic to realize the wafer cassette entry into the warehouse, thus completing the unloading process.

[0162] In the above embodiments, the communication between the storage device simulator and each software system adopts the real communication method, and the communication between the storage device simulator and the handling equipment simulator also adopts the real communication method. In the simulation, the storage device simulator uses the robot arm motion logic and the loading port motion logic to simulate the real storage device. Since the robot arm motion logic and the loading port motion logic are configured to realize the overall characteristics of the real storage device, the simulation accuracy can be greatly improved.

[0163] In some optional embodiments, the target sub-monitoring service is determined based on the number of handling equipment through the overall monitoring service, including: obtaining the number of handling equipment to be started for each pre-configured handling equipment simulation subsystem through the overall monitoring service corresponding to the overall handling equipment simulation system; determining the number of handling equipment simulation subsystems to be started based on the number of handling equipment and the number of handling equipment to be started for each handling equipment simulation subsystem; and determining the corresponding target sub-monitoring service based on the number of handling equipment simulation subsystems to be started.

[0164] Among them, the combination Figure 7As shown, the overall monitoring service can obtain the number of transport equipment to be started for each transport equipment simulation subsystem by calling the maximum number of vehicles to be started interface in the sub-monitoring service. The number of vehicles to be started for each transport equipment simulation subsystem can be the same or different; generally, this number is a fixed value given a certain amount of server resources. Based on the number of transport equipment and the number of vehicles to be started for each transport equipment simulation subsystem, the overall monitoring service determines the number of transport equipment simulation subsystems to be started. For example, if the number of transport equipment is 300 and the number of vehicles to be started for each transport equipment simulation subsystem is 100, then 3 transport equipment simulation subsystems need to be started. The target sub-monitoring service corresponding to these 3 transport equipment simulation subsystems is determined, and the corresponding transport equipment simulation subsystem is started through this target sub-monitoring service. The transport equipment simulation subsystems are started in different processes, and the process identifiers of the started transport equipment simulation subsystems are recorded for easy shutdown later.

[0165] In some optional embodiments, the startup interface of each simulation subsystem is called through the monitoring service to start each simulation subsystem, including: when the simulation subsystem is a storage device simulation subsystem, obtaining the storage device simulator directory configured in the storage device simulation subsystem through the monitoring service, wherein the storage device simulator directory includes at least one configuration file corresponding to a storage device simulator; and starting the corresponding storage device simulators in sequence through the configuration files in the storage device simulator directory.

[0166] Combination Figure 5 As shown, one of the storage device simulators is a container for multiple storage devices, such as at least two storage devices. In some optional embodiments, a storage device simulator includes a container for three storage devices. In other embodiments, it can also be other values, without specific limitations. The storage device emulation subsystem includes a storage device simulator directory, which contains at least one configuration file corresponding to a storage device simulator. For example, a server includes at least one storage device simulator directory, which contains configuration files for at least one storage device. In some optional embodiments, the server includes five storage device simulator directories, each containing configuration files for three storage devices, thereby enabling the startup of 15 storage devices.

[0167] Optionally, the STK startup interface starts the corresponding storage device simulators sequentially according to the storage device simulator directory configured by the monitoring service and the configuration files in the storage device simulator directory, and saves the process identifier of the started storage device simulator. This process identifier can be used to shut down the storage device simulator later.

[0168] The above embodiments provide the startup process for different simulation subsystems, which can achieve one-click startup without manually starting each simulation subsystem one by one, greatly improving startup efficiency.

[0169] In this application, each simulation subsystem is started before the simulation begins using a one-click start method, ensuring that each simulation subsystem can operate normally during the simulation. Similarly, after the simulation ends, each simulation subsystem can be shut down using a one-click shutdown method. Specifically, in some optional embodiments, the method further includes: after starting the simulation subsystem through each startup interface, recording the process identifier returned by each startup interface through each monitoring service; after each started simulation subsystem executes the simulation task, including: calling the shutdown interface corresponding to each simulation subsystem through the monitoring service, and shutting down the started simulation subsystem based on the process identifier through the shutdown interface.

[0170] In some optional embodiments, after the simulation tasks are performed by the started simulation subsystems, the following steps are taken: if the simulation subsystems and the monitoring service are deployed on different servers, the start-up simulation subsystems are shut down by calling the shutdown interface through the configuration information of the simulation subsystems configured in the monitoring service.

[0171] When the simulation subsystem and monitoring service are deployed on the same server, after the simulation subsystem is started by each startup interface, the process identifier returned by each startup interface is recorded by each monitoring service. For details on the limitations of the process identifier, please refer to the above text.

[0172] If it is necessary to shut down the simulation subsystem, the corresponding shutdown interface can be called to shut it down based on the process identifier.

[0173] For example, the mstc shutdown interface can be called to shut down the MSTC emulation subsystem using the process identifier saved by the system after startup.

[0174] Call the first shutdown interface of the OHT general monitoring service to obtain the process identifier of the handling equipment simulation subsystem started by the second startup interface, and then call the corresponding second shutdown interface based on the process identifier to shut down the handling equipment simulation subsystem.

[0175] Call the stk shutdown interface to shut down the corresponding storage device management simulation subsystem using the process identifier saved by the stk startup interface. For example, determine the started storage device simulator based on the process identifier of the started storage device simulator, and then shut down each storage device simulator.

[0176] Call the algorithm shutdown interface to shut down the corresponding algorithm simulation subsystem by using the process identifier saved by the algorithm startup interface.

[0177] When the simulation subsystem and the monitoring service are deployed on different servers, taking the traffic control simulation subsystem mentioned above as an example, the configuration file of the monitoring service stores the configuration information of the simulation subsystem, such as SSH and configured Linux host addresses, ports, accounts, passwords, and commands to disable TCU. Through this configuration information, the traffic control simulation subsystem deployed on other servers can be shut down.

[0178] In the above embodiments, the shutdown of each simulation subsystem can also be achieved based on the shutdown interface provided by the monitoring service.

[0179] In some optional embodiments, this application can also configure each simulation subsystem with one click, specifically, in combination with Figure 15 As shown, Figure 15 This is a flowchart of a one-click configuration step in one embodiment, which includes:

[0180] S1502: Receive configuration query command.

[0181] S1504: Based on the configuration query command, the monitoring service calls the configuration query interface to obtain the configuration information of the corresponding simulation subsystem and display the configuration information.

[0182] The simulation platform can display query buttons for each simulation subsystem and receive configuration query commands through these buttons. For example, the MSTC simulation subsystem's configuration query interface is used to read files from the MSTC simulation subsystem's configuration file directory address in the monitoring service's configuration file, and then return the results to the simulation platform, which displays them on the interface. The simulation platform can read the MSTC simulation subsystem's configuration information through the MSTC simulation subsystem's monitoring service's configuration query interface. Specifically, the simulation platform's configuration file stores the address of the MSTC simulation subsystem's monitoring service's configuration query interface. By calling this interface through this address, and considering that the monitoring service's configuration file includes the MSTC simulation subsystem's configuration file directory address, the platform can read the files (configuration information) from the directory, return this configuration information to the simulation platform, and display it.

[0183] The simulation platform can also read the configuration information of the algorithm simulation subsystem through the query configuration interface of the monitoring service of the algorithm simulation subsystem. For example, it can read the file according to the algorithm configuration file directory configured by the monitoring service and display it in the interface of the simulation platform.

[0184] S1506: Update the configuration information and call the configuration modification interface through the monitoring service to save the updated configuration information to the corresponding configuration file of the simulation subsystem.

[0185] The MSTC simulation subsystem's configuration modification interface is used to update the configuration file via the MSTC simulation subsystem's configuration file directory address on the monitoring service's configuration file. When the simulation platform calls the interface, it passes in the new configuration data for updating. After the configuration information is updated, the MSTC simulation subsystem's configuration modification interface can be called to update the MSTC simulation subsystem's configuration file with the updated configuration information.

[0186] Similarly, the simulation platform can also update the configuration information in the configuration file of the algorithm simulation subsystem through the configuration modification interface of the monitoring service of the algorithm simulation subsystem.

[0187] In some optional embodiments, the updated configuration information is saved to the configuration file corresponding to the simulation subsystem by calling the configuration modification interface through the monitoring service. This includes: if the simulation subsystem has a general monitoring service, calling the first configuration modification interface through the general monitoring service, and calling the sub-monitoring services corresponding to each handling equipment simulation subsystem through the first configuration modification interface; and saving the updated configuration information to the configuration file corresponding to the handling equipment simulation subsystem through the second configuration modification interface corresponding to each sub-monitoring service.

[0188] In the case where the simulation subsystem corresponds to the main monitoring service, since the configuration files assigned to the transportation equipment simulation subsystem are the same, it is only necessary to call the query configuration interface of a sub-monitoring service to obtain the configuration information in the configuration file of the transportation equipment simulation subsystem and display the configuration information on the interface.

[0189] When updating configuration information, the first configuration modification interface is called through the main monitoring service. The first configuration modification interface calls the second configuration modification interface of each sub-monitoring service to save the updated configuration information to the corresponding configuration file of the handling equipment simulation subsystem. In other words, the first configuration modification interface of the main monitoring service is mainly to implement the call of the second configuration modification interface to update the configuration information to each handling equipment simulation subsystem.

[0190] In some optional embodiments, the method further includes: configuring the configuration file of the storage device subsystem through a configuration interface; and calling the synchronization configuration file interface corresponding to the storage device subsystem through a monitoring service to update the configuration files in each storage device simulator directory configured in the storage device simulation subsystem based on the configured configuration files.

[0191] The monitoring service configures the directory of the STK emulator. If there are multiple directories, they are separated by commas. The configuration information passed in through the synchronization configuration file interface is used to update the configuration files in each directory in turn. In order to improve the update speed, it can be updated all at once. For example, if there are 3 directories and each directory contains 3 configuration files, then there are 9 configuration files. The service will update 3 configuration files to each directory in turn.

[0192] In the above embodiments, the simulation subsystem can be configured with one click through the various interfaces of the monitoring service, simplifying operations and improving processing efficiency.

[0193] In some optional embodiments, the method further includes: receiving a map update instruction carrying an updated map; when the simulation subsystem and the monitoring service are deployed on the same server, calling the map update interface through the monitoring service to store the updated map in the configuration file of the simulation subsystem; when the simulation subsystem and the monitoring service are deployed on different servers, calling the import map interface through the monitoring service to update the map configuration information in the configuration file of the simulation subsystem, the map configuration information being used to instruct the simulation subsystem to read the updated map.

[0194] In this scenario, the simulation subsystems and monitoring services are deployed on the same server. Examples include the MSTC simulation subsystem, the material handling equipment simulation subsystem, the storage device management simulation subsystem, and the algorithm simulation subsystem. In this case, the map update interface of the monitoring service can be directly called to store the updated map in the corresponding configuration file of each simulation subsystem. It should be noted that for the material handling equipment simulation subsystem, it first calls the first map update interface of the main monitoring service, which then calls the second map update interface of the sub-monitoring service to store the updated map in the configuration file of each material handling equipment simulation subsystem.

[0195] When the simulation subsystem and monitoring service are deployed on different servers, such as the Traffic Control Simulation Subsystem (TCU), the monitoring service of the TCU calls the map import interface to update the map configuration information in the simulation subsystem's configuration file. This map configuration information includes the map name and path, and also needs to include the access path information of the traffic control simulation subsystem, such as SSH and the configured Linux host address, port, account, and password. The traffic control simulation subsystem is accessed through the access path information, and then the map configuration information is updated to the traffic control simulation subsystem's configuration file. Thus, the traffic control simulation subsystem can read and update the map based on the map name and path in the configuration file.

[0196] In the above embodiments, the maps in each simulation subsystem are updated with one click through various monitoring services, laying the foundation for the correct operation of subsequent simulations.

[0197] In one exemplary embodiment, such as Figure 16 As shown, a manufacturing execution system simulation method is provided in a semiconductor manufacturing system, which is applied to... Figure 1 The following explanation uses the MES (Manufacturing Execution System) system as an example, including steps 1602 to 1606. Wherein:

[0198] S1602: Obtain a virtual environment map, which includes at least two process regions, each process region including at least one bay region, and each bay region including at least one device.

[0199] Combination Figure 17 As shown, Figure 17 This is a schematic diagram illustrating the relationship between the regions included in a virtual environment map in one embodiment. The virtual environment map includes at least two process regions, each process region includes at least one bay region, and each bay region includes at least one device.

[0200] The manufacturing execution system simulation can set up multiple process regions at the same level, also referred to as process areas. Each process region includes multiple bay areas, and each bay area includes multiple devices, which may include machines, storage devices, and cache devices. In some optional embodiments, the cache device is an over-the-air cache device.

[0201] This application may also include a process time configuration step, that is, configuring the process time corresponding to different process areas. Optionally, the process time may be configured differently than uniformly, so as to achieve production line capacity balance.

[0202] S1604: Generate a handling task based on at least one of the process area, bay area, and equipment in the virtual environment map.

[0203] The transport task can be generated based on at least one of the process area, bay area, and equipment in the virtual environment map.

[0204] In some optional embodiments, process constraints are obtained based on the order of processes corresponding to process regions in the virtual environment map; bay region constraints are generated based on the task weights of each bay region, with the task weights being proportional to the number of transport tasks corresponding to the bay region; device constraints are generated based on the device type and task status of each device, where device types include machines, cache devices, and storage devices, and task statuses include idle and running states; transport tasks can be generated based on at least one of the process constraints, bay region constraints, and device constraints, and specific limitations can be found below.

[0205] In some of these alternative embodiments, combined with Figure 18 As shown, the process of generating material handling tasks includes: generating material handling tasks for each process area, each bay area, and each piece of equipment in a balanced manner based on the order of process areas, bay areas, and equipment.

[0206] In this application, the generation of transport tasks based on at least one of process areas, bay areas, and equipment in the virtual environment map is mainly to balance the number of transport tasks corresponding to each process area, bay area, and equipment, so that the number of transport tasks in each process area, bay area, and equipment is as equal as possible. This avoids situations where some process areas, bay areas, and equipment have many transport tasks while others have no transport tasks, thereby maximizing the utilization of process areas, bay areas, and equipment in the virtual environment map.

[0207] In some optional embodiments, the balanced generation of handling tasks for each process area, bay area, and device can be achieved by selecting the starting process area, bay area, and device based on the number of handling tasks corresponding to each process area, bay area, and device when determining them. Similarly, when determining the destination process area, bay area, and device, the number of destination process areas, bay areas, and devices should also be considered. Optionally, the area with the fewest handling tasks or the area with fewer than a threshold number of handling tasks can be selected.

[0208] In practical applications, initially, equipment in the bay areas of a process region can be determined through polling, and corresponding transport tasks are generated. Subsequently, as transport tasks are executed, process regions with fewer transport tasks are identified, followed by bay areas with fewer transport tasks within those process regions, and finally, equipment with fewer transport tasks within the identified bay areas, and transport tasks are generated for that equipment. Optionally, the number of transport tasks generated each time can be controlled to balance the transport tasks across process regions, bay areas, and equipment.

[0209] S1606: Issue the generated transport task.

[0210] After generating a transport task, the transport task can be sent to the simulation subsystem. For example, the MES system can directly send the transport task to the transport equipment scheduling simulation subsystem, or the MES system can first send the transport task to the MCS system, and then the MCS system can send the transport task to the transport equipment scheduling simulation subsystem so that the transport equipment scheduling simulation subsystem can perform simulation based on these transport tasks.

[0211] In some optional embodiments, after generating a transport task, the method further includes: caching the transport task in a cache queue; and issuing the generated transport task, including: based on at least one of the process area, bay area, and equipment in the virtual environment map, obtaining transport tasks evenly from the cache queue and issuing them to the corresponding task processing system.

[0212] The transport tasks generated by MES are not directly sent to the MCS or MSTC systems. Instead, they are cached in a cache queue to avoid impacting the MCS or MSTC systems. Optionally, when the task volume is less than the task volume threshold, transport tasks may not be sent, or they may be sent directly. When the task volume is greater than or equal to the task volume threshold, the transport tasks are cached in the cache queue, and subsequent transport tasks are retrieved from the cache queue for delivery.

[0213] Furthermore, in order to ensure the balanced execution of subsequent tasks as much as possible, this application also distributes the transfer tasks evenly. That is, based on at least one of the process area, bay area and equipment in the virtual environment map, the transfer tasks are evenly obtained from the cache queue and distributed to the corresponding task processing system, which may include the MCS system or the MSTC system.

[0214] Specifically combined Figure 19 As shown, at the beginning, a certain number of transport tasks can be sent to each process area in turn by polling. As the tasks are executed, the process area to which each transport task is to be sent can be determined based on the task volume of each process area. For example, process areas with fewer transport tasks can be obtained and transport tasks can be sent to that process area first.

[0215] At the beginning, a certain number of transport tasks can be sent to each bay area in turn through polling. As the tasks are executed, the bay area to which each transport task is to be sent can be determined based on the task volume of each bay area. For example, the bay area with fewer transport tasks can be obtained and the transport tasks can be sent to that bay area first.

[0216] At the beginning, a certain number of handling tasks can be sent to each device in turn through polling. As the tasks are executed, the devices to be sent handling tasks can be determined based on the task load of each device. For example, the device with fewer handling tasks can be selected and the handling tasks can be sent to that device first.

[0217] In practical applications, initially, equipment in the bay areas of a process region can be determined through polling, and corresponding transport tasks are issued sequentially. As transport tasks are executed, process regions with fewer transport tasks are identified, then bay areas within those process regions with fewer transport tasks are identified, and finally, equipment in the identified bay areas with fewer transport tasks is identified, and its corresponding transport task is issued. Optionally, the number of transport tasks issued each time can be controlled to balance the transport tasks across process regions, bay areas, and equipment.

[0218] The aforementioned semiconductor manufacturing system's manufacturing execution system simulation method acquires a virtual environment map, which includes at least two process regions, each process region including at least one bay region, and each bay region including at least one device. Based on at least one of the process regions, bay regions, and devices in the virtual environment map, a transport task is generated. The generated transport task is then issued. This method, which generates the corresponding transport task based on the virtual environment map rather than randomly setting it by the user, ensures the accuracy of the transport task and thus improves the simulation accuracy.

[0219] In some optional embodiments, generating a transport task includes: determining the sequence of processes corresponding to process regions in a virtual environment map; determining two adjacent process regions based on the sequence of processes; using the first process region as the starting process region and the second process region as the destination process region among the two adjacent process regions; and generating a transport task based on the starting process region and the destination process region.

[0220] Combination Figure 20 As shown, Figure 20 This is a schematic diagram illustrating the relationship between process regions and transport tasks in one embodiment. In this embodiment, the processes corresponding to the process regions in the virtual environment map have a sequential order. The transport task can only proceed from the previous process region to the next process region between two adjacent process regions based on the sequential order of the processes. That is, the previous process region between two adjacent process regions is taken as the starting process region, and the next process region is taken as the destination process region.

[0221] Combination Figure 20Assuming the virtual environment map includes six process regions, and the wafer cell cycles through process regions 1 to 2, 2 to 3, 3 to 4, 4 to 5, and 5 to 6, the generated transport tasks include those corresponding to process regions 1 to 2, 2 to 3, 3 to 4, 4 to 5, 5 to 6, and 6 to 1. It will not generate transport tasks corresponding to process regions 1 to 3, 1 to 4, 1 to 5, 1 to 6, or 1 to 1. In other words, this application cannot generate transport tasks across process regions or in reverse order.

[0222] In the above embodiments, generating corresponding transport tasks based on the sequence of process regions can avoid generating incorrect transport tasks and ensure the accuracy of transport tasks.

[0223] In some optional embodiments, generating a transport task includes: obtaining the task weight value of each bay area in the starting process region and the task weight value of each bay in the target process region; generating transport tasks corresponding to each bay area in a balanced manner based on the task weight values ​​of each bay area in the starting process region and the task weight values ​​of each bay area in the target process region, wherein the task weight value is proportional to the number of transport tasks generated corresponding to the bay area.

[0224] To achieve a balance in handling tasks, the task weight value in this application is used to identify the amount of handling tasks in the bay area. When there are associated handling tasks in the bay area, the corresponding task weight value is not 0, and the task weight value is proportional to the number of handling tasks generated in the bay area. Generally, for each additional associated handling task in a bay area, the corresponding task weight value increases by 1. Other methods can also be used in other embodiments, and no specific limitation is made here.

[0225] In this embodiment, combined with Figure 21 As shown, Figure 21This is a schematic diagram illustrating the relationship between bay areas and transport tasks in one embodiment. After determining the starting process area and the target process area, the task weight values ​​of each bay area in the starting process area and the task weight values ​​of each bay area in the target process area can be obtained. Optionally, a bay area in the starting process area whose task weight value meets a first requirement is selected as the starting bay area, and a bay area in the target process area whose task weight value meets a second requirement is selected as the target bay area to generate the corresponding transport task. The first and second requirements can each be at least one with the smallest task weight value; other requirements can also be set in other embodiments.

[0226] Assuming we need to generate 6 transport tasks, how would we generate these 6 tasks? Figure 20 The distribution ensures that the task weight values ​​of the Bay areas under each process are balanced. The purpose of this is to prevent the handling tasks from being overly concentrated in a certain Bay of a certain process, which would cause traffic congestion.

[0227] In some optional embodiments, generating a transport task includes: determining the device type and task status of each device in the bay area; and generating a transport task based on the device type and task status.

[0228] The device types include EQ (Equipment Controller), OHB / OHBP (Cache Devices), and STOCKER (Storage Devices). Task states include idle and running states. The task state indicates whether a virtual wafer cell is being processed within the device; if so, the task state is running; otherwise, it is idle.

[0229] In this application, a transport task is generated based on the device type and task status, so that the virtual wafer box can be directly transported to the target destination, or while the target destination is in the execution state, it can be transported to other intermediate destinations first, and then transported from the intermediate destinations to the target destination later.

[0230] After determining the starting bay area of ​​the initial process area, the starting equipment in the starting bay area is then determined. The starting equipment can be determined based on the equipment type and task status of each equipment in the starting bay area, while also considering the balance of handling tasks among the equipment. After determining the starting equipment, the optional equipment type of the destination equipment is determined based on the equipment type of the starting equipment. Then, the optional equipment corresponding to the optional equipment type is obtained from the target bay area of ​​the destination process area based on the optional equipment type. Finally, the target equipment is determined based on the task status of the optional equipment and the number of handling tasks corresponding to each optional equipment, so as to achieve a balance of handling tasks.

[0231] In some optional embodiments, a transport task is generated based on device type and task status, including: when the starting location is a machine in the starting bay area and there are idle machines in the target bay area, a transport task is generated from the machine in the starting bay area to the machine in the target bay area; when the starting location is a machine in the starting bay area and all machines in the target bay area are in an executing state, but there is an idle cache device, a transport task is generated from the machine in the starting bay area to the cache device in the target bay area; when the starting location is a machine in the starting bay area and both the machine in the target bay area and the cache device are in an executing state, but there is an idle storage device, a transport task is generated from the machine in the starting bay area to the storage device in the target bay area; when the starting location is a cache device in the starting bay area and there are idle machines in the target bay area, a transport task is generated from the cache device in the starting bay area to the machine in the target bay area; when the starting location is a storage device in the starting bay area and there are idle machines in the target bay area, a transport task is generated from the storage device in the starting bay area to the machine in the target bay area.

[0232] Among them, combined Figure 22 As shown, the rules for generating transport tasks in this embodiment include at least one of the following: firstly, generating transport tasks from machine EQ to machine EQ; secondly, generating transport tasks from machine EQ to cache device OHB / OHBP; thirdly, generating transport tasks from machine EQ to storage device STOCKER; generating transport tasks from cache device OHB / OHBP to machine EQ; and generating transport tasks from storage device STOCKER to machine EQ.

[0233] Assuming that storage device Store1 has a virtual wafer box, when machine EQ1 becomes idle, the MES simulator will generate a transfer task from storage device Store1 to machine EQ1. After machine EQ1 is manufactured, the MES simulator will generate a transfer task from machine EQ1 to storage device Store2. If machine EQ2 is being manufactured at this time, the MES simulator will generate a transfer task from storage device Store2 to machine EQ2 after machine EQ2 is manufactured. If machine EQ2 is also idle when machine EQ1 is manufactured, the MES simulator will directly generate a transfer task from machine EQ1 to machine EQ2.

[0234] The above describes the relationship between each handling task and the equipment. Based on the equipment type and task status, the corresponding equipment can be selected. In addition, it should be noted that after determining the available equipment, it is also necessary to balance the handling tasks of each equipment. That is, based on the number of handling tasks of the available equipment, the equipment with the fewest tasks should be selected to avoid the situation where some equipment has no handling tasks to perform, while other handling equipment has a large number of handling tasks.

[0235] In some optional embodiments, generating a transport task includes: when each machine in the starting bay area has items to be transported and each machine in the destination bay area is in an execution state, generating a transport task from each machine in the starting bay area to each cache device in the destination bay area, and the transport tasks are evenly distributed among the cache devices in each destination bay area; when there is a machine in the destination bay area that is idle, generating a transport task from a cache device in the destination bay area to an idle machine in the destination bay area, and the idle machine in the destination bay area is closest to the cache device in the destination bay area.

[0236] Among them, the combination Figure 23 As shown, if all machines in the destination bay area of ​​the destination process area are in the execution state, then a transfer task from each machine in the starting bay area to each cache device in the destination bay area can be generated first. Subsequently, when there are machines in the destination bay area that are in an idle state, a transfer task from the cache device in the destination bay area to the machine in the idle state in the destination bay area can be generated. The machine in the idle state in the destination bay area is closest to the cache device in the destination bay area.

[0237] For ease of understanding, combined with Figure 23Machines EQ1, EQ2, EQ3, and EQ4 are completed. Machines EQ5, EQ6, EQ7, and EQ8 are currently being manufactured. Cache devices OHB1, OHB2, OHB3, and OHB4 have available storage slots. At this point, the MES simulator will generate four transport routes: Machine EQ1-Cache Device OHB3, Machine EQ2-Cache Device OHB2, Machine EQ3-Cache Device OHB1, and Machine EQ4-Cache Device OHB4. This ensures that tasks are evenly distributed across the cache devices OHB in each bay, minimizing task concentration in a few cache devices OHB in any bay. After machines EQ5, EQ6, EQ7, and EQ8 are completed, the MES simulator will generate the following transport routes: Cache Device OHB1-Machine EQ5, Cache Device OHB2-Machine EQ6, and Cache Device OHB3. - For the transfer of machine EQ7 and buffer device OHB4-machine EQ8, the principle for machine EQ to select buffer device OHB at this time is to select the nearest available buffer device OHB in this Bay area.

[0238] In the above embodiments, for the purpose of balancing, a transport task is first generated from each machine in the starting bay area to each buffer device in the destination bay area, and then a transport task is generated from the buffer device in the destination bay area to the machine in the destination bay area that is idle. This avoids the situation where all machines in the starting bay area are unusable, and also provides goods in advance for the manufacturing in the destination bay area, laying the foundation for improving manufacturing efficiency.

[0239] It should be understood that although the steps in the flowcharts of the above embodiments are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the above embodiments may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages in other steps. It is understood that the steps in different embodiments can be freely combined as needed, and all non-contradictory solutions formed by such combinations are within the scope of protection of this application.

[0240] Based on the same inventive concept, this application also provides a manufacturing execution system simulation apparatus for implementing the manufacturing execution system simulation method in the semiconductor manufacturing system described above. The solution provided by this apparatus is similar to the implementation scheme described in the above method. Therefore, the specific limitations of one or more embodiments of the manufacturing execution system simulation apparatus in the semiconductor manufacturing system provided below can be found in the limitations of the manufacturing execution system simulation method in the semiconductor manufacturing system described above, and will not be repeated here.

[0241] In one exemplary embodiment, such as Figure 24 As shown, a simulation device for handling equipment in a semiconductor manufacturing system is provided, comprising: a receiving module 2401, a movement simulation module 2402, a distance interval determination module 2403, and a speed simulation module 2404, wherein:

[0242] The receiving module 2401 is used to receive the transport instructions sent by the host system and determine the target path based on the transport instructions and the pre-loaded virtual simulation environment.

[0243] The mobile simulation module 2402 is used to call the running logic of the first running axis corresponding to the transport equipment simulator based on the target path, and control the movement of the target transport equipment in the transport equipment simulator;

[0244] The distance interval determination module 2403 is used to obtain the distance interval between the target transport equipment and the obstacle during the movement of the target transport equipment;

[0245] The speed simulation module 2404 is used to obtain the speed corresponding to the distance interval as the target speed, and control the movement of the target transport device based on the target speed.

[0246] In some optional embodiments, the above-described apparatus further includes: a distance acquisition module, configured to determine the current position of the target transport device in the virtual simulation environment; determine a first movement direction of the target transport device based on the current position; determine whether each target transport device is located on the same track based on a first distance between each target transport device with the same first movement direction; and, if at least two target transport devices are located on the same track and at least two target transport devices have the same second movement direction, acquire a second distance between the target transport device and the target transport device adjacent to it in front, wherein the second distance between the target transport device and the target transport device adjacent to it in front is used to determine the distance interval between the target transport device and the obstacle, wherein the first movement direction includes each of the second movement directions.

[0247] In some optional embodiments, the distance acquisition module is further configured to determine the target coordinates of each target transport device in its current position based on the first moving direction of the target transport device; to integerize each target coordinate and determine a first distance between each target transport device based on the integerized target coordinates; to determine that each target transport device is located on the same track if the first distance is less than a distance threshold; and to determine that each target transport device is located on a different track if the first distance is greater than or equal to the distance threshold.

[0248] In some optional embodiments, the aforementioned motion simulation module 2402 is further configured to, when determining that the target transport device enters a new track based on the target path, determine the type of track on which the target transport device is located based on the position of the target transport device; and control the movement of the target transport device based on the type of track on which the target transport device is located.

[0249] In some optional embodiments, the aforementioned motion simulation module 2402 is further configured to: determine the type of curve when the track on which the target transport device is located is a curve, and control the target transport device to move at a constant speed according to the curve speed corresponding to the curve type; control the target transport device to move at the speed corresponding to the track on which the target transport device is located when the track on which the target transport device is located is a straight track and there are no obstacles in front of the target transport device; and continue to execute the step of obtaining the distance interval between the target transport device and the obstacle when the track on which the target transport device is located is a straight track and there are obstacles in front of the target transport device.

[0250] In some optional embodiments, the aforementioned mobile simulation module 2402 is further configured to determine the operating axis of the target transport device based on the current position and operating status of the target transport device in the virtual simulation environment; if the operating axis is a first operating axis, continue to execute the step of calling the operating logic of the first operating axis corresponding to the transport device simulator based on the target path to control the movement of the target transport device in the transport device simulator; if the operating axis is a second operating axis, call the operating logic of the second operating axis corresponding to the transport device simulator to control the extension and retraction time of the target transport device, wherein the operating logic of the second operating axis is an extension and retraction offset determined based on the extension and retraction time of the target transport device; if the operating axis is a third operating axis, call the operating logic of the third operating axis corresponding to the transport device simulator to control the lifting and lowering time of the target transport device, wherein the operating logic of the third operating axis is a lifting and lowering offset determined based on the lifting and lowering time of the target transport device; if the operating axis is a fourth operating axis, call the operating logic of the fourth operating axis corresponding to the transport device simulator to control the pick-up and put-down time of the target transport device, wherein the operating logic of the fourth operating axis is a gripper offset determined based on the pick-up and put-down time of the target transport device.

[0251] In some optional embodiments, the above-mentioned device further includes: a communication simulation module, used to control the handling equipment simulator corresponding to the target handling equipment to communicate with the storage device simulator through actual hardware communication when the current position is a pick-up and place position.

[0252] In some optional embodiments, the above-mentioned device further includes: a branch road simulation module, configured to control the transport equipment simulator corresponding to the target transport equipment to send a right-of-way request to the reused traffic control simulation subsystem via actual hardware communication before the target transport equipment reaches the branch road control area, wherein the control logic version of the traffic control simulation subsystem is determined based on the simulation configuration; if the right-of-way request result returned by the traffic control simulation subsystem is approved, control the target transport equipment to decelerate through the branch road control area; if the right-of-way request result returned by the traffic control simulation subsystem is not approved, control the target transport equipment to reach the deceleration position and begin deceleration until reaching the parking point, and wait for the right-of-way request result returned by the traffic control simulation subsystem to be approved, and then control the target transport equipment to decelerate through the branch road control area, wherein the parking point is located before the end of the track on which the target transport equipment is located.

[0253] In some optional embodiments, the aforementioned branch simulation module is further configured to, when the target transport device reaches the end of the track where the target transport device is located, control the target transport device to decelerate to a target speed until the target transport device passes through the track where the target transport device is located, and use the curve of the branch control area as a new track to continue executing the step of determining the type of track where the transport device simulator is located based on the position of the transport device simulator; and when the target transport device has not reached the end of the track where the target transport device is located, continue to detect whether there are obstacles in front of the target transport device.

[0254] In some optional embodiments, the above-described apparatus further includes: a task simulation module, configured to: control the target transport device to continue moving when the transport device simulator receives an instruction to cancel the transport task of the target transport device and the target transport device is located on a curve; determine whether the target transport device can decelerate to a stop on a straight road when the transport device simulator receives an instruction to cancel the transport task of the target transport device and the target transport device is located on a straight road; control the target transport device to decelerate to a stop when the target transport device can decelerate to a stop on the straight road; and control the target transport device to continue moving when the target transport device cannot decelerate to a stop on the straight road, until the target transport device is located on a straight road and can decelerate to a stop, then control the target transport device to decelerate to a stop.

[0255] The modules in the handling equipment simulation device of the aforementioned semiconductor manufacturing system can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in or independent of the processor in a computer device, or stored in the memory of a computer device as software, so that the processor can call and execute the operations corresponding to each module.

[0256] In one exemplary embodiment, a computer device is provided, which may be a server, and its internal structure diagram may be as follows: Figure 25As shown, the computer device includes a processor, memory, input / output interfaces (I / O), and a communication interface. The processor, memory, and I / O interfaces are connected via a system bus, and the communication interface is also connected to the system bus via the I / O interfaces. The processor provides computational and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system, computer programs, and a database. The internal memory provides an environment for the operation of the operating system and computer programs stored in the non-volatile storage media. The database stores the data involved in the aforementioned methods. The I / O interfaces are used for exchanging information between the processor and external devices. The communication interface is used for communicating with external terminals via a network connection. When the computer program is executed by the processor, it implements a manufacturing execution system simulation method in a semiconductor manufacturing system.

[0257] Those skilled in the art will understand that Figure 25 The structures shown are merely block diagrams of some structures related to the present application and do not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than shown in the figures, or combine certain components, or have different component arrangements. In one embodiment, a computer device is also provided, including a memory and a processor. The memory stores a computer program, and the processor executes the computer program to implement the steps in the above-described method embodiments. In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored, and the computer program, when executed by a processor, implements the steps in the above-described method embodiments. In one embodiment, a computer program product is provided, including a computer program, which, when executed by a processor, implements the steps in the above-described method embodiments.

[0258] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one of relational databases and non-relational databases. Non-relational databases may include blockchain-based distributed databases, etc., and are not limited thereto. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, artificial intelligence (AI) processors, etc., and are not limited thereto. The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this application. The above embodiments only illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the appended claims.

Claims

1. A simulation method for handling equipment in a semiconductor manufacturing system, characterized in that, Applied to a handling equipment simulator; the method includes: Receive the transport instructions sent by the host system, and determine the target path based on the transport instructions and the pre-loaded virtual simulation environment; Based on the target path, the operation logic of the first running axis corresponding to the handling equipment simulator is invoked to control the movement of the target handling equipment in the handling equipment simulator; During the movement of the target transport equipment, the distance range between the target transport equipment and the obstacle is obtained; The speed corresponding to the distance range is obtained as the target speed, and the target handling device is controlled to move based on the target speed.

2. The method according to claim 1, characterized in that, Before obtaining the distance range between the target transport device and the obstacle, the method further includes: Determine the current position of the target handling equipment in the virtual simulation environment; Determine the first direction of movement of the target handling equipment based on the current position; Based on the first distance between each of the target transport devices that have the same first direction of movement, it is determined whether each of the target transport devices is located on the same track; When at least two of the target transport devices are located on the same track and the second movement direction of at least two of the target transport devices is the same, a second distance is obtained between the target transport device and the target transport device adjacent to it in front. The second distance between the target transport device and the target transport device adjacent to it in front is used to determine the distance range between the target transport device and the obstacle, wherein the first movement direction includes each of the second movement directions.

3. The method according to claim 2, characterized in that, Determining whether the target transport devices are located on the same track based on the first distance between them, which are in the same first direction of movement, includes: Based on the first moving direction of the target handling equipment, determine the target coordinates of each target in the current position of each target handling equipment with the same first moving direction; The coordinates of each target are integerized, and a first distance of each target handling device is determined based on the integerized coordinates of each target. If the first distance is less than the distance threshold, it is determined that each of the target transport devices is located on the same track; If the first distance is greater than or equal to the distance threshold, it is determined that each of the target transport devices is located on a different track.

4. The method according to any one of claims 1 to 3, characterized in that, The step of invoking the operating logic of the first running axis corresponding to the transport equipment simulator based on the target path to control the movement of the target transport equipment in the transport equipment simulator includes: If the target transport equipment is determined to enter a new track based on the target path, the type of track where the target transport equipment is located is determined based on the position of the target transport equipment. The movement of the target transport equipment is controlled based on the type of track on which the target transport equipment is located.

5. The method according to claim 4, characterized in that, The method of controlling the movement of the target transport equipment based on the type of track on which the target transport equipment is located includes: If the track where the target transport equipment is located is a curve, determine the type of the curve and control the target transport equipment to move at a constant speed according to the curve speed corresponding to the curve type; When the track on which the target transport equipment is located is a straight track and there are no obstacles in front of the target transport equipment, the target transport equipment is controlled to move at the speed corresponding to the track on which the target transport equipment is located. If the track where the target transport device is located is a straight track and there is an obstacle in front of the target transport device, continue to execute the step of obtaining the distance range between the target transport device and the obstacle.

6. The method according to claim 5, characterized in that, The method further includes: The operating axis of the target transport equipment is determined based on its current position and operating status in the virtual simulation environment; If the running axis is the first running axis, continue to execute the running logic based on the target path to call the first running axis corresponding to the handling equipment simulator, and control the movement of the target handling equipment in the handling equipment simulator; When the running axis is the second running axis, the running logic of the second running axis corresponding to the handling equipment simulator is called to control the extension and retraction time of the target handling equipment. The running logic of the second running axis is the extension and retraction offset determined based on the extension and retraction time of the target handling equipment. When the operating axis is the third operating axis, the operating logic of the third operating axis corresponding to the transport equipment simulator is called to control the lifting and lowering time of the target transport equipment. The operating logic of the third operating axis is the lifting and lowering offset determined based on the lifting and lowering time of the target transport equipment. When the running axis is the fourth running axis, the running logic of the fourth running axis corresponding to the handling equipment simulator is called to control the pick-up and put-down time of the target handling equipment. The running logic of the fourth running axis is the gripper offset determined based on the pick-up and put-down time of the target handling equipment.

7. The method according to claim 6, characterized in that, After determining the operating axis of the target transport device based on its current position and operating status in the virtual simulation environment, the method further includes: When the current position is a pick-up / place-out location, the control system communicates with the storage device simulator corresponding to the target handling device through actual hardware communication.

8. The method according to claim 4, characterized in that, The method further includes: Before the target transport equipment arrives at the branch control area, the transport equipment simulator corresponding to the target transport equipment sends a right-of-way request to the reused traffic control simulation subsystem through actual hardware communication. The control logic version of the traffic control simulation subsystem is determined based on the simulation configuration. If the right-of-way application result returned by the traffic control simulation subsystem is approved, the target transport equipment is controlled to decelerate and pass through the branch road control area; If the right-of-way application result returned by the traffic control simulation subsystem is not approved, the target transport equipment is controlled to reach the deceleration position and begin to decelerate until it reaches the parking point. When the right-of-way application result returned by the traffic control simulation subsystem is approved, the target transport equipment is controlled to decelerate and pass through the branch road control area. The parking point is located before the end of the track on which the target transport equipment is located.

9. The method according to claim 8, characterized in that, The control of the target transport equipment to decelerate through the branch road control area includes: When the target transport equipment reaches the end of the track where the target transport equipment is located, the target transport equipment is controlled to decelerate to the target speed until the target transport equipment passes through the track where the target transport equipment is located, and the curve of the branch control area is taken as the new track, and the step of determining the type of track where the transport equipment simulator is located based on the position of the transport equipment simulator is continued; If the target transport device has not reached the end of the track where the target transport device is located, continue to detect whether there is an obstacle in front of the target transport device.

10. The method according to any one of claims 1 to 3, characterized in that, The method further includes: If the transport equipment simulator receives an instruction to cancel or pause the transport task of the target transport equipment and the target transport equipment is located on a curve, then the simulator controls the target transport equipment to continue moving. When the transport equipment simulator receives an instruction to cancel or pause the transport task of the target transport equipment and the target transport equipment is located on a straight path, it determines whether the target transport equipment can decelerate to a stop on the straight path; If the target transport device is able to decelerate to a stop on the straight track, control the target transport device to decelerate to a stop; If the target transport device cannot decelerate to a stop on the straight road, control the target transport device to continue traveling until the target transport device is on the straight road and can decelerate to a stop, then control the target transport device to decelerate to a stop.

11. A simulation device for handling equipment in a semiconductor manufacturing system, characterized in that, Applied to a handling equipment simulator; the device includes: The receiving module is used to receive the transport instructions sent by the host system and determine the target path based on the transport instructions and the pre-loaded virtual simulation environment. The mobile simulation module is used to call the running logic of the first running axis corresponding to the handling equipment simulator based on the target path, and control the movement of the target handling equipment in the handling equipment simulator; The distance interval determination module is used to obtain the distance interval between the target transport equipment and the obstacle during the movement of the target transport equipment; The speed simulation module is used to obtain the speed corresponding to the distance range as the target speed, and control the movement of the target transport device based on the target speed.

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