Processing system equipment and processing method for forming silver electrode on ceramic and application of processing system equipment and processing method

Abstract

The invention belongs to the technical field of electronic component manufacturing, and provides processing system equipment for forming a silver electrode on ceramic, a processing method and application of the processing system equipment. The processing system equipment comprises a ceramic conveying device, an electrostatic spraying device and a developing device; wherein the electrostatic spraying device is provided with a silver-ammonia solution inlet, a reducing agent solution inlet and a shower nozzle, and a silver-ammonia solution and a reducing agent solution are sprayed out through a plurality of spraying holes after being mixed in the shower nozzle; from the center to the edge of the shower type nozzle, the spraying holes are arranged from dense to sparse; and the developing device drives reduction of silver ions to form a silver electrode which is thick in the middle and gradually thinned towards the edge. The electrode formed through the machining system equipment has low requirements for the cleanliness and roughness of the ceramic surface, the electrode of a specific structure can be formed, the middle thickness is higher, the breakdown strength can be improved, the stability is improved, and the service life is prolonged.

Description

Technical Field

[0001] This invention belongs to the field of electronic component manufacturing technology, and relates to a processing system, processing method and application for forming silver electrodes on ceramics. Background Technology

[0002] Capacitors are among the most widely used passive components in modern electronic devices, used to store and release electrical energy. Ceramic capacitors, due to their excellent electrical performance, high reliability, and miniaturization, are widely used in various fields, such as communications, consumer electronics, and automotive electronics. The basic structure of a ceramic capacitor typically includes a ceramic dielectric layer and a metal electrode layer disposed on its surface.

[0003] Electrode fabrication is a crucial step in the manufacturing process of ceramic capacitors. The quality of the electrodes directly affects the overall performance of the capacitor, such as capacitance, loss factor, and breakdown voltage. Traditional electrode fabrication methods mainly include screen printing and physical vapor deposition (PVD) sputtering.

[0004] Screen printing refers to the process of transferring conductive paste onto a ceramic substrate through a screen template to form the desired electrode pattern. This method has the advantages of simple process and low cost, but its efficiency is relatively low, especially for high-density and fine-grained patterns, requiring multiple printing cycles to achieve the desired effect. Furthermore, it is prone to overflowing from the electrode area during printing, resulting in irregular electrode shapes and affecting subsequent electrical performance. In addition, screen printing has high requirements for the viscosity and rheological properties of the paste, making it difficult to guarantee consistency between different batches of paste, increasing the difficulty of quality control during production.

[0005] PVD sputtering refers to the process of sputtering target atoms onto a substrate surface in a vacuum environment to form a uniform metal thin film. This method offers high precision and uniformity, meeting the requirements for high-density and fine-linewidth electrodes. However, PVD equipment is expensive, requiring significant upfront investment and increasing production costs. Furthermore, the adhesion between the PVD sputtered electrode and the ceramic substrate is highly dependent on the cleanliness and surface roughness of the ceramic surface. Improper ceramic surface treatment can lead to poor adhesion between the electrode and the substrate, affecting the long-term stability of the capacitor. Simultaneously, the PVD sputtering process is complex and requires strict environmental conditions (such as vacuum level and temperature), increasing operational difficulty and maintenance costs.

[0006] More importantly, while screen printing and PVD sputtering excel in certain aspects, they typically only produce planar electrodes. However, the current-carrying point of a ceramic capacitor is usually located at its center. This means that the common breakdown point for planar electrodes is the center. Therefore, to improve the breakdown strength of the electrode portion, the thickness at the center needs to be increased. However, existing screen printing or PVD sputtering methods cannot directly achieve a design that is thicker at the center and thinner at the edges, and thickening the electrode overall to improve breakdown strength would lead to a significant increase in material and processing costs.

[0007] In summary, although existing electrode fabrication methods meet the requirements of ceramic capacitors to a certain extent, many problems still need to be solved. In particular, how to achieve a design where the electrode is thicker at the center and gradually thinner at the edges while ensuring capacitor performance has become an important research and development direction with practical significance. Summary of the Invention

[0008] In view of the problems existing in the prior art, the purpose of this invention is to provide a processing system, processing method, and application for forming a silver electrode on ceramics. The processing system includes a ceramic conveying device, an electrostatic spraying device, and a developing device. The electrostatic spraying device has a silver ammonia solution inlet, a reducing agent solution inlet, and a spray nozzle. The silver ammonia solution and the reducing agent solution are mixed in the spray nozzle and then sprayed out through several nozzles. From the center to the edge of the spray nozzle, the nozzles are arranged in a decreasing density. The developing device drives the reduction of silver ions, forming a silver electrode that is thicker in the middle and gradually thins towards the edge. The electrode formation using this processing system has lower requirements for the cleanliness and roughness of the ceramic surface and can form electrodes with specific structures. The higher thickness in the middle is beneficial for improving breakdown strength, stability, and service life.

[0009] To achieve this objective, the present invention adopts the following technical solution:

[0010] In a first aspect, the present invention provides a processing system apparatus for forming silver electrodes on ceramics, including a ceramic conveying device, an electrostatic spraying device, and a developing device;

[0011] The ceramic conveying device is equipped with a ceramic sheet feeding port, which is used to sequentially convey the ceramic sheets to the electrostatic spraying device and the developing device.

[0012] The electrostatic spraying device has a silver ammonia solution inlet, a reducing agent solution inlet, and a shower-type nozzle. After the silver ammonia solution and the reducing agent solution are mixed in the shower-type nozzle, they are sprayed out through a number of spray holes to form an electrostatic spraying layer on the ceramic sheet. From the center to the edge of the shower-type nozzle, the spray holes are arranged in a manner from dense to sparse.

[0013] The developing device is used to apply reaction conditions to the electrostatic spray coating on the ceramic sheet to drive the reduction of silver ions and form a silver electrode.

[0014] The various devices in the processing system equipment described in this invention are designed based on the principle of the silver mirror reaction occurring in a silver ammonia solution (containing diammine silver hydroxide, or silver ammonia complex ions). To form a specific silver electrode that is thicker in the middle and gradually thins towards the edges, the nozzle in the electrostatic spraying device is improved by using a specific shower-type nozzle with several spray holes arranged in a denser center and sparser edges. This allows a specific electrostatic spray layer to be formed on the ceramic sheet after passing through the electrostatic spraying device. After development by a developing device to deposit silver, a silver electrode with a specific structure can be formed. Unlike the PVD sputtering method and its preparation, or the screen printing method and its equipment used in the prior art, the processing system equipment described in this invention does not have strict requirements on the cleanliness and roughness of the ceramic sheet surface when forming the electrode, while still ensuring good adhesion between the silver electrode and the ceramic sheet. This specific structure of the silver electrode is beneficial for improving breakdown strength, thereby enhancing stability and service life. At the same time, this method can achieve large-scale automated production, and the simple process has certain cost advantages.

[0015] The following are preferred technical solutions of the present invention, but are not intended to limit the technical solutions provided by the present invention. The technical objectives and beneficial effects of the present invention can be better achieved and realized through the following technical solutions.

[0016] As a preferred technical solution of the present invention, the diameter of each ejection hole is selected from 0.2~0.5mm.

[0017] Preferably, the total number of ejection holes is 10 to 30.

[0018] Preferably, the total number of spray holes closest to the center of the shower head is 4 to 10.

[0019] Preferably, the number of spray holes decreases at a rate of 1 to 5 per mm from the center to the edge of the shower head.

[0020] Preferably, the electrostatic spraying device has at least two arrayed shower-type nozzles to simultaneously electrostatically spray multiple ceramic sheets.

[0021] As a preferred technical solution of the present invention, the processing system equipment further includes a ceramic sheet cleaning device, wherein the ceramic conveying device first conveys the loaded ceramic sheets to the ceramic sheet cleaning device for cleaning.

[0022] Preferably, the ceramic tile cleaning device includes an ultrasonic device and / or a spray device.

[0023] As a preferred technical solution of the present invention, the processing system equipment further includes a ceramic sheet surface modification device, wherein the ceramic conveying device conveys the ceramic sheet to the ceramic sheet surface modification device before conveying the ceramic sheet to the electrostatic spraying device.

[0024] Preferably, the ceramic sheet surface modification device includes a plasma generator and / or an ultraviolet-ozone generator.

[0025] Preferably, the electrostatic spraying device includes a ceramic sheet positioning mechanism, which is used to match the position of the ceramic sheet with the position of the spray head, and then spraying is performed through the shower-type spray head.

[0026] Preferably, the ceramic plate positioning mechanism includes at least one of a photoelectric sensor, a laser rangefinder, and a vision sensor.

[0027] As a preferred technical solution of the present invention, the electrostatic spraying device includes a spraying status detection mechanism for detecting the formed electrostatic spraying layer.

[0028] Preferably, the ceramic conveying device has a branch for unloading non-compliant electrostatically coated ceramic sheets or returning them to a ceramic sheet cleaning device for cleaning.

[0029] Preferably, the coating status detection mechanism includes at least one of an ultrasonic thickness gauge, a laser sensor, an infrared sensor, or a vision sensor.

[0030] As a preferred embodiment of the present invention, the developing apparatus includes a heat treatment device and / or an ultraviolet curing device. That is, the reaction conditions for the reduction of silver ions include heating and / or ultraviolet light irradiation.

[0031] As a preferred technical solution of the present invention, the processing system equipment further includes an automatic control device, which is electrically connected to the ceramic conveying device, the electrostatic spraying device, and the developing device to control the coordinated operation of each device and realize automated production.

[0032] As a preferred embodiment of the present invention, the ceramic conveying device has a ceramic sheet feeding port to feed the ceramic sheet that has been formed into an electrode by the developing device.

[0033] Secondly, the present invention provides a processing method for forming a silver electrode on ceramic. The processing method uses the processing system equipment described in the first aspect, electrostatically spraying a silver ammonia solution and a reducing agent solution onto a ceramic sheet through a shower-type nozzle, and then developing the solution to cause a reduction reaction of silver ions to form an electrode. The electrode is thicker at the center and gradually thins towards the edge.

[0034] Thirdly, the present invention provides a ceramic inductor, the ceramic inductor comprising a ceramic dielectric layer and electrode layers formed on opposite surfaces of the ceramic dielectric layer, the ceramic inductor being manufactured according to the processing method described in the second aspect.

[0035] Compared with existing technical solutions, the present invention has at least the following beneficial effects:

[0036] When forming electrodes on ceramic sheets using the processing system equipment described in this invention, the requirements for the cleanliness and roughness of the ceramic sheet surface are not stringent, while still ensuring good adhesion between the silver electrode and the ceramic sheet. This specific structure of the silver electrode is beneficial for improving breakdown strength, thereby enhancing stability and service life. Simultaneously, this method enables large-scale automated production, has a simple process, and offers certain cost advantages, which is conducive to promoting the further high-quality production of ceramic-based electronic components such as ceramic capacitors. Attached Figure Description

[0037] Figure 1 This is a top view of the shower head in Example 1, showing the spray nozzle.

[0038] Figure 2 This is a schematic diagram of the electrostatic spraying of ceramic discs by a shower head in Example 1.

[0039] Figure 3 This is a schematic diagram of the processing system equipment for forming silver electrodes on ceramics in Example 1.

[0040] In the diagram: 10-Ceramic conveying device, 11-Branch, 20-Electrostatic spraying device, 21-Spray nozzle, 22-Spray hole, 23-Substrate, 30-Developing device, 40-Ceramic sheet cleaning device, 50-Ceramic sheet surface modification device, 60-Automatic control device, 70-Ceramic sheet, 71-Ceramic inductor, 80-Silver ammonia solution flow path, 90-Reducing agent solution flow path. Detailed Implementation

[0041] The technical solution of the present invention will be further illustrated below through specific embodiments.

[0042] Those skilled in the art will understand that the embodiments described are merely illustrative of the invention and should not be construed as limiting the invention.

[0043] In some specific embodiments, the present invention provides a processing system for forming silver electrodes on ceramics. The main feature of the processing system is that it is based on the principle of the silver mirror reaction of silver ammonia solution (containing diammonium silver hydroxide, or silver ammonia complex ion), and uses a specific shower-type nozzle to electrostatically spray the silver ammonia solution. After development, a silver electrode with a thick center and gradually thinning towards the edge is directly prepared. The processing system includes a ceramic conveying device, an electrostatic spraying device, and a developing device.

[0044] The ceramic conveying device is provided with a ceramic sheet feeding port, and the electrostatic spraying device and the developing device are connected in sequence along the conveying direction of the ceramic sheet.

[0045] The electrostatic spraying device has a silver ammonia solution inlet, a reducing agent solution inlet, and a shower-type nozzle. The silver ammonia solution and the reducing agent solution are mixed in the shower-type nozzle and then sprayed out through a number of spray holes. From the center to the edge of the shower-type nozzle, the spray holes are arranged in a manner from dense to sparse.

[0046] The developing device is used to apply reaction conditions to the electrostatic spray coating on the ceramic sheet to drive the reduction of silver ions and form a silver electrode.

[0047] In one embodiment, the diameter of each ejection orifice is selected from 0.2 to 0.5 mm, such as 0.2 mm, 0.25 mm, 0.3 mm, 0.35 mm, 0.4 mm, 0.45 mm or 0.5 mm, but is not limited to the listed values. Other unlisted values ​​within the above range are also applicable.

[0048] In one embodiment, the total number of ejection holes is 10 to 30, such as 10, 12, 14, 16, 18, 20, 23, 25, 28 or 30, but is not limited to the listed values. Other unlisted values ​​within the above range are also applicable.

[0049] In one embodiment, the total number of spray holes closest to the center of the shower head is 4 to 10, such as 4, 5, 6, 7, 8, 9 or 10.

[0050] In one embodiment, the number of spray holes decreases at a rate of 1 to 5 per mm from the center to the edge of the shower head, for example, 1 per mm, 2 per mm, 3 per mm, 4 per mm, or 5 per mm.

[0051] In one embodiment, the area covered by all the nozzles (i.e., the area of ​​the shower head) matches the area of ​​the electrode to be formed; further, they are equal.

[0052] In one embodiment, the electrostatic spraying device has a plurality of (at least two) shower-type nozzles arranged in an array to simultaneously electrostatically spray multiple ceramic sheets.

[0053] It should be noted that, in addition to the spray holes, the shower head also has other necessary structures. For example, the shower head of the present invention is used to mix silver ammonia solution and reducing agent solution. It belongs to a type of dual-fluid nozzle and should have corresponding fluid channels, mixing chambers, high-voltage electrodes, adjustment mechanisms, etc.

[0054] In one embodiment, the processing system equipment further includes a ceramic sheet cleaning device, wherein the ceramic conveying device first conveys the loaded ceramic sheets to the ceramic sheet cleaning device for cleaning.

[0055] In one embodiment, the ceramic tile cleaning device includes an ultrasonic device and / or a spray device.

[0056] In one embodiment, the processing system equipment further includes a ceramic sheet surface modification device, wherein the ceramic sheet is first conveyed to the ceramic sheet surface modification device before the ceramic conveying device conveys the ceramic sheet to the electrostatic spraying device.

[0057] In one embodiment, the ceramic sheet surface modification device is positioned after the ceramic sheet cleaning device and before the electrostatic spraying device.

[0058] In one embodiment, the ceramic sheet surface modification device includes a plasma generator and / or an ultraviolet-ozone generator.

[0059] In one embodiment, the electrostatic spraying device includes a ceramic sheet positioning mechanism for matching the position of the ceramic sheet with the position of the spray head, and then spraying is performed through the shower-type spray head.

[0060] In one embodiment, the ceramic plate positioning mechanism includes at least one of a photoelectric sensor, a laser rangefinder, and a vision sensor.

[0061] In one embodiment, the electrostatic spraying apparatus includes a spraying status detection mechanism for detecting whether the formed electrostatic spraying layer has a distribution characteristic of being thick in the middle and gradually thinning towards the edge, and outputting an instruction to transport the qualified ceramic sheet to the developing apparatus.

[0062] In one embodiment, the ceramic conveying device has a branch for unloading non-compliant electrostatically coated ceramic sheets or returning them to a ceramic sheet cleaning device for cleaning.

[0063] In one embodiment, the coating status detection mechanism includes at least one of an ultrasonic thickness gauge, a laser sensor, an infrared sensor, or a vision sensor.

[0064] In one embodiment, the developing apparatus includes a heat treatment device and / or an ultraviolet curing device. That is, the reaction conditions for the reduction of silver ions include heating and / or ultraviolet light irradiation.

[0065] In one embodiment, the processing system equipment further includes an automatic control device, which is electrically connected to the ceramic conveying device, the electrostatic spraying device, and the developing device, etc., to control the coordinated operation of each device and realize automated production.

[0066] In one embodiment, after the electrodes are formed by the developing apparatus, the ceramic conveying device feeds the ceramic sheet with the electrodes.

[0067] In some specific embodiments, the present invention provides a processing method for forming a silver electrode on ceramic. The processing method uses the processing system equipment provided in the above embodiments to electrostatically spray a silver ammonia solution and a reducing agent solution onto a ceramic sheet through a shower-type nozzle, and then develops it to cause a reduction reaction of silver ions to form an electrode. The electrode is thicker at the center and gradually thins towards the edge.

[0068] Example 1

[0069] This embodiment provides a processing system for forming silver electrodes on ceramics, including a ceramic conveying device 10, a ceramic sheet cleaning device 40, a ceramic sheet surface modification device 50, an electrostatic spraying device 20, a developing device 30, and an automatic control device.

[0070] like Figure 3 As shown, the ceramic conveying device 10 is provided with a ceramic sheet loading port and a ceramic sheet unloading port, and conveys the ceramic sheet 70 sequentially to the ceramic sheet cleaning device 40, the ceramic sheet surface modification device 50, the electrostatic spraying device 20, and the developing device 30, and then unloads the ceramic sheet 70 (i.e., the ceramic inductor 71) that has formed an electrode in the developing device 30. Figure 3 The black arrow in the middle indicates the conveying direction of ceramic sheet 70;

[0071] The ceramic sheet cleaning device 40 includes a spraying device; the ceramic sheet surface modification device 50 includes an ultraviolet-ozone generator.

[0072] The electrostatic spraying device 20 has a silver ammonia solution inlet, a reducing agent (using glucose) solution inlet, a shower-type spray head 21, a ceramic disc positioning mechanism, and a spraying status detection mechanism; the ceramic disc positioning mechanism includes laser ranging to match the position of the ceramic disc 70 with the position of the spray head, such as... Figure 2As shown, the silver ammonia solution and the reducing agent solution are mixed in the shower head 21 (dual-feed type, i.e., the shower head 21 should have corresponding silver ammonia solution flow paths 80 and reducing agent solution flow paths 90), and sprayed out through several spray holes 22; as Figure 1 As shown, from the center to the edge of the shower head 21, the spray holes 22 are arranged in a manner from dense to sparse; the diameter of each spray hole 22 is selected from 0.35mm; the total number of spray holes 22 is 17; the total number of spray holes 22 closest to the center of the shower head 21 is 8; the electrostatic spraying device 20 has at least two arrayed shower heads 21 to simultaneously perform electrostatic spraying on multiple ceramic sheets 70; the shower head 21 can be grounded and needs to be matched with a substrate 23 for connecting negative pressure; the ceramic sheet 70 is placed on the substrate 23 with the top surface to be sprayed facing the shower head 21; the spraying status detection mechanism includes a vision sensor for detecting the formed electrostatic spraying layer; the ceramic conveying device 10 has a branch 11 for returning ceramic sheets 70 with non-compliant electrostatic spraying layers to the ceramic sheet cleaning device 40 for cleaning.

[0073] The developing apparatus 30 includes a heating device for applying reaction conditions to the electrostatic spray coating on the ceramic sheet 70 to increase the temperature, drive the reduction of silver ions, and form a silver electrode.

[0074] The automatic control device is electrically connected to the ceramic conveying device 10, the ceramic sheet cleaning device 40, the ceramic sheet surface modification device 50, the electrostatic spraying device 20, and the developing device 30 to control the coordinated operation of each device and realize automated production.

[0075] This embodiment provides a method for forming silver electrodes on ceramics using the aforementioned processing system equipment. The ceramic conveying device 10 is used to load ceramic sheets 70 and sequentially convey them to a ceramic sheet cleaning device 40 for cleaning, to a ceramic sheet surface modification device 50 for hydrophilic surface modification, and to an electrostatic spraying device 20 to electrostatically spray silver ammonia solution and reducing agent solution onto the ceramic sheets 70 through a shower-type spray nozzle 21. After the electrodes are formed in a developing device 30 with a center thickness that gradually decreases towards the edges, the ceramic sheet 70 with silver electrodes (i.e., ceramic inductor 71) is unloaded, completing the manufacturing process.

[0076] The aforementioned processing method can be used to mass-produce ceramic inductors, which include a ceramic dielectric layer (ceramic sheet) and electrode layers (silver electrodes) formed on the opposite surface of the ceramic dielectric layer. The electrode layers are characterized by being thicker in the center and gradually thinning towards the edges, which can effectively improve breakdown strength, stability, and service life.

[0077] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0078] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0079] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A processing system apparatus for forming a silver electrode on a ceramic, characterized by, The system comprises a ceramic conveying device, an electrostatic spraying device and a developing device; The ceramic conveying device is provided with a loading port for ceramic sheets, which is used to sequentially convey the ceramic sheets to the electrostatic spraying device and the developing device; The electrostatic spraying device is provided with a silver-ammonia solution inlet, a reducing agent solution inlet and a shower-type spray head, the silver-ammonia solution and the reducing agent solution are mixed in the shower-type spray head and then sprayed out through a plurality of spray holes to form an electrostatic spraying layer on the ceramic sheet; The spray holes are arranged from the center to the edge of the shower-type spray head in a manner from dense to sparse; The developing device is used to apply a reaction condition to the electrostatic spraying layer on the ceramic sheet to drive the reduction of silver ions and form a silver electrode.

2. The system for processing silver electrode formation on ceramic according to claim 1, wherein The diameter of each spray hole is selected from 0.2 to 0.5 mm; Preferably, the total number of the spray holes is 10 to 30; Preferably, the total number of the spray holes closest to the center of the shower-type spray head is 4 to 10; Preferably, the decreasing speed of the number of the spray holes from the center to the edge of the shower-type spray head is 1 to 5 per mm; Preferably, the electrostatic spraying device is provided with at least two arrayed shower-type spray heads to simultaneously electrostatically spray a plurality of ceramic sheets.

3. The system for processing silver electrode formation on ceramic according to claim 1, wherein The processing system device further comprises a ceramic sheet cleaning device, and the ceramic conveying device first conveys the loaded ceramic sheets to the ceramic sheet cleaning device for cleaning; Preferably, the ceramic sheet cleaning device comprises an ultrasonic device and / or a spraying device.

4. The system for processing silver electrode formation on ceramic according to claim 1, wherein The processing system device further comprises a ceramic sheet surface modification device, and the ceramic conveying device first conveys the ceramic sheets to the ceramic sheet surface modification device before conveying the ceramic sheets to the electrostatic spraying device; Preferably, the ceramic sheet surface modification device comprises a plasma generating device and / or an ultraviolet-ozone generating device; Preferably, the electrostatic spraying device comprises a ceramic sheet positioning mechanism, which is used to match the position of the ceramic sheet with the position of the spray head, and then the ceramic sheet is sprayed through the shower-type spray head; Preferably, the ceramic sheet positioning mechanism comprises at least one of a photoelectric sensor, a laser range finder or a visual sensor.

5. The system for processing silver electrode formation on ceramic according to claim 1, wherein The electrostatic spraying device comprises a spraying state detection mechanism, which is used to detect the formed electrostatic spraying layer; Preferably, the ceramic conveying device is provided with a branch, which is used to unload the ceramic sheets with the electrostatic spraying layer not meeting the requirements or return the ceramic sheets to the ceramic sheet cleaning device for cleaning; Preferably, the spraying state detection mechanism comprises at least one of an ultrasonic thickness gauge, a laser sensor, an infrared sensor or a visual sensor.

6. The system for processing silver electrodes on ceramic according to claim 1, wherein The developing device comprises a heat treatment device and / or an ultraviolet curing device.

7. The system for processing silver electrodes on ceramic according to claim 1, wherein The processing system device further comprises an automatic control device, which is electrically connected with the ceramic conveying device, the electrostatic spraying device and the developing device to control the coordinated operation of the devices and realize automatic production.

8. The system for processing silver electrodes on ceramic according to claim 1, wherein The ceramic conveying device is provided with a ceramic sheet unloading port to unload the ceramic sheets with the electrodes formed by the developing device.

9. A processing method for forming a silver electrode on a ceramic, characterized by, The processing method uses the processing system device of any one of claims 1-8 to electrostatically spray silver-ammonia solution and reducing agent solution on the ceramic sheet through a shower head, and then develop to make silver ions undergo reduction reaction to form an electrode, the center of the electrode is thick and gradually thins towards the edge.

10. A ceramic inductor, characterized by, The ceramic inductor comprises a ceramic dielectric layer and electrode layers formed on opposite surfaces of the ceramic dielectric layer, and is prepared according to the processing method of claim 9.

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