Manufacturing method of magnetic particle detection device based on array amorphous wire

Abstract

The invention provides a manufacturing method of a magnetic particle detection device based on array amorphous wires, and relates to the field of manufacturing of micro-electro-mechanical biological magnetic sensors. According to the invention, firstly, the amorphous wires are used as a magnetic sensitive material, accurate installation of the amorphous wires is realized through the grooves in the wafer, and the amorphous wires are arranged into an array structure, so that the detection sensitivity is improved, and meanwhile, the problem that the detection area of the amorphous wire magnetic sensitive material is relatively small in biological detection application is solved; then obtaining an array amorphous wire sensitive unit through photoetching, electroplating, packaging and cutting processes; secondly, winding an induction coil on the amorphous wire sensing unit, receiving an induction voltage of the array amorphous wire sensing unit under the giant magneto-impedance effect, outputting a voltage signal, and realizing conversion of an electric signal by magnetic change; finally, the biological tissue solution to be detected with the magnetic particles is conveyed to the array amorphous wire sensitive unit through the bonding micro-fluidic channel, and magnetic particle detection of the biological tissue solution is achieved.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical biomagnetic sensor integration, and more particularly to a method for manufacturing a magnetic particle detection device based on an array of amorphous filaments. Background Technology

[0002] Magnetic particle-based biomolecular magnetic detection technology is an important detection method and technology in biomedical diagnostics. Achieving high-sensitivity and high-reliability magnetic signal capture is the core of this technology. Giant magnetoresistance (GMI) sensors have significant application value in the field of magnetic particle-based biodetection. Traditional GMI sensors typically use amorphous thin strips or multilayer films as sensing elements, followed by winding induction coils. The concentration of magnetic particles is detected by measuring the change in impedance under an alternating excitation magnetic field as a function of an external static magnetic field. However, the sensitivity of these sensors using amorphous thin strips or multilayer films is often limited by factors such as the material's own magnetic noise and demagnetization effects caused by geometry. Performance improvements have reached a bottleneck, making it difficult to meet the urgent need for ultrasensitive detection of extremely low concentrations of biomarkers.

[0003] Compared to soft magnetic materials such as amorphous ribbons and multilayer films, amorphous filaments possess superior soft magnetic properties, providing a new opportunity for the development of high-sensitivity biomagnetic sensors. Current research and products largely focus on GMI magnetic sensors using a single amorphous filament as the magnetic core. However, single-filament GMI magnetic sensors face two challenges in biosensor applications: firstly, the detection sensitivity needs further improvement; and secondly, the detection area is relatively small. Therefore, to address the urgent need for biomagnetic detection, amorphous filament-based GMI magnetic sensing technology needs to further improve the detection sensitivity of amorphous filament magnetic sensors and overcome the challenge of small detection area for filamentous materials, thus driving the development of magnetic particle detection technology towards higher sensitivity, lower cost, and higher integration. Summary of the Invention

[0004] To address the problems in the prior art, this invention provides a method for manufacturing a magnetic particle detection device based on arrayed amorphous wires. This invention first uses amorphous wires as the magnetic sensitive material, achieving precise mounting of the amorphous wires through grooves on a wafer, and arranging the amorphous wires into an array structure to improve detection sensitivity, while overcoming the challenge of small detection area in biological detection applications. Then, through photolithography, electroplating, encapsulation, and cutting processes, arrayed amorphous wire sensitive units are obtained. Next, induction coils are wound around the amorphous wire sensitive units to receive the induced voltage under the giant magnetoresistance effect, outputting a voltage signal to realize the conversion of magnetic change into an electrical signal. Finally, by bonding microfluidic channels, a biological tissue solution containing magnetic particles is delivered to the arrayed amorphous wire sensitive units, achieving the detection of magnetic particles in the biological tissue solution. The technical solution is as follows: This invention provides a method for manufacturing a magnetic particle detection device based on arrayed amorphous wires, the method comprising: S1. Using a glass substrate, the substrate structure of the magnetic particle detection device is obtained through pretreatment. S2. Based on the substrate structure of the magnetic particle detection device, an amorphous wire is embedded into the substrate structure of the magnetic particle detection device to obtain the first-stage amorphous wire sensor module. S3. Based on the first-stage amorphous filament sensor module, the amorphous filament is fixed on the first-stage amorphous filament sensor module by spin-coating non-photosensitive polyimide to obtain the second-stage amorphous filament sensor module. S4. Based on the second-stage amorphous wire sensor module, the end of the amorphous wire is exposed by spin coating positive photoresist, photolithography, and etching to obtain the third-stage amorphous wire sensor module. S5. Based on the third-stage amorphous filament sensor module, the non-photosensitive polyimide is baked at high temperature in an oxygen-free environment to imidize the non-photosensitive polyimide, thereby obtaining the fourth-stage amorphous filament sensor module. S6. Based on the fourth-stage amorphous wire sensor module, the amorphous wire sensor module is obtained through electroplating and photolithography processes. S7. Based on the amorphous filament sensor module, the first-stage array amorphous filament sensing unit is obtained through a cutting process; S8. Based on the first-stage array amorphous filament sensitive unit, a second-stage array amorphous filament sensitive unit is obtained by winding an induction coil. S9. Based on the second-stage array amorphous filament sensitive unit, a magnetic particle detection device based on an amorphous filament array is obtained by bonding microfluidic channels.

[0005] Optionally, a glass substrate is used in S1, and the substrate structure of the magnetic particle detection device is obtained through pretreatment, including: S11. Select a glass substrate as the substrate structure of the magnetic particle detection device, clean the substrate structure with acetone, isopropanol and deionized water and blow dry to obtain the first stage glass substrate. S12. Based on the first-stage glass substrate, a dicing machine is used to process parallel grooves at specific intervals on the first-stage glass substrate to obtain the second-stage glass substrate. S13. Based on the second-stage glass substrate, the substrate structure of the magnetic particle detection device is obtained by cleaning with deionized water.

[0006] Optionally, the substrate structure of the magnetic particle detection device in S2 has parallel trenches, and amorphous wires are embedded in the parallel trenches; Optionally, S6 obtains the amorphous wire sensor module based on the fourth-stage amorphous wire sensor module through electroplating and photolithography processes, including: S61. Based on the fourth-stage amorphous filament sensor module, the fifth-stage amorphous filament sensor module is obtained by magnetron sputtering electroplating of the seed layer. S62. Based on the fifth-stage amorphous wire sensor module, an electrode pattern connecting the pads and the end of the amorphous wire is formed by spin coating positive photoresist, exposure, and development, thus obtaining the sixth-stage amorphous wire sensor module. S63. Based on the sixth-stage amorphous wire sensor module, the pad is electrically connected to the end of the amorphous wire by electroplating to obtain the seventh-stage amorphous wire sensor module. S64. Based on the seventh-stage amorphous filament sensor module, the amorphous filament sensor module is obtained by removing the residual photoresist and seed layer.

[0007] Optionally, the pads in S63 are used for electrical connection with the amorphous wire end, through which a high-frequency current is input to excite the seventh-stage amorphous wire sensor module.

[0008] Optionally, the induction coil in S8 is used to receive the voltage induced by the amorphous filament sensing unit of the first-stage array under the giant magnetoresistance effect and output a voltage signal.

[0009] Optionally, the microfluidic channel in the S9 is located above the amorphous filament sensing unit of the second-stage array.

[0010] Compared with the prior art, the technical solution of the present invention has at least the following beneficial effects: The above-mentioned solution achieves precise positioning, fixation, and array arrangement of amorphous filaments by designing parallel trenches on the glass substrate, thereby increasing the effective detection area of ​​the sensing unit, improving detection sensitivity, and overcoming the problem of small detection area of ​​amorphous filament magnetic materials in biological detection applications. On the other hand, the design of MEMS technology and integrated microfluidic channels improves the repeatability and process controllability of the magnetic particle detection device manufacturing, ensuring mass production and consistency of indicators. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a flowchart of an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention; Figure 2 This is a three-dimensional structural schematic diagram of the magnetic particle detection device combined with the magnetic detection of biological pathogens, according to an embodiment of the manufacturing method of the magnetic particle detection device based on array amorphous wires of the present invention. Figure 3 This is a flowchart of the glass substrate pretreatment process in an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention. Figure 4 A schematic diagram of a glass substrate from an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention; Figure 5 A schematic diagram of the grooves cut on the surface of a glass substrate in an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention; Figure 6 A schematic diagram of embedding amorphous wires in a trench in a glass substrate, according to an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention. Figure 7 A schematic diagram illustrating the method for manufacturing a magnetic particle detection device based on arrayed amorphous wires according to the present invention, showing how amorphous wires are fixed in a glass groove using non-photosensitive polyimide; Figure 8 A flowchart of the electroplating and photolithography process in an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention; Figure 9 A schematic diagram illustrating the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention, showing how an electroplating process is used to electrically connect the ends of the amorphous wires to the pads. Figure 10 A schematic diagram of the winding induction coil in an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention; Figure 11 This is a schematic diagram illustrating the integration of a magnetic particle detection device by bonding a microfluidic channel to a sensitive unit, as described in an embodiment of the manufacturing method of the magnetic particle detection device based on an array of amorphous wires of the present invention. The labels in the figure are as follows: 1. Glass substrate; 2. Pad; 3. Non-photosensitive polyimide; 4. Amorphous filament; 5. Biosolution; 6. Induction coil; 7. Microfluidic channel; 11. Trench. Detailed Implementation

[0013] The technical solution of the present invention will now be described with reference to the accompanying drawings.

[0014] In embodiments of the present invention, words such as "exemplarily," "for example," etc., are used to indicate that something is an example, illustration, or description. Any embodiment or design described as "exemplary" in the present invention should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of the word "exemplary" is intended to present the concept in a concrete manner. Furthermore, in embodiments of the present invention, the meaning expressed by "and / or" can be both, or either one.

[0015] To make the technical problems, technical solutions and advantages of the present invention clearer, a detailed description will be given below in conjunction with the accompanying drawings and specific embodiments.

[0016] Figure 1 This is a flowchart illustrating an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention. Figure 2 This is a three-dimensional structural schematic diagram of the magnetic particle detection device combined with the magnetic detection of pathogenic bacteria, as an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention. The manufacturing process of the magnetic particle detection device includes: S1. Using glass substrate 1, the substrate structure of the magnetic particle detection device is obtained through pretreatment; Specifically, such as Figure 3 The flowchart shown here illustrates the pretreatment process of glass substrate 1 in an embodiment of the manufacturing method of the magnetic particle detection device based on arrayed amorphous wires of the present invention, including: S11, Select glass substrate 1 as shown Figure 4 As shown, the substrate structure of the magnetic particle detection device is cleaned with acetone, isopropanol, and deionized water and then dried to obtain the first-stage glass substrate.

[0017] S12. Based on the first-stage glass substrate, use a dicing machine to cut 12 parallel grooves 11 on the surface of the glass substrate 1. The grooves are 100µm wide and deep. Every four grooves form an array structure. The groove spacing within a single array structure is 2mm, and the spacing between adjacent array structures is 1cm. Figure 5 As shown, the second-stage glass substrate is obtained; S13. Based on the second-stage glass substrate, the substrate structure of the magnetic particle detection device is obtained by cleaning with deionized water.

[0018] S2. Based on the substrate structure of the magnetic particle detection device, amorphous wire 4 is embedded into the substrate structure of the magnetic particle detection device to obtain the first-stage amorphous wire sensor module. Specifically, the substrate structure of the magnetic particle detection device has parallel trenches 11, and amorphous wires 4 are embedded in these parallel trenches 11. Embedding the amorphous wires 4 in the glass substrate trenches yields the first-stage amorphous wire sensor module, such as... Figure 6 As shown.

[0019] S3. Based on the first-stage amorphous filament sensor module, spin-coat 60µm non-photosensitive polyimide 3 on the surface, and fix the amorphous filament 4 on the first-stage amorphous filament sensor module to obtain the second-stage amorphous filament sensor module. S4. Based on the second-stage amorphous wire sensor module, spin-coating with 10µm of AZ4620 positive photoresist, followed by exposure and development, with an exposure dose of 600mJ / cm². 2 The development time is 4 min to 4 min 30 s, exposing the four ends of the amorphous wire, thus obtaining the third-stage amorphous wire sensor module; S5. Based on the third-stage amorphous filament sensor module, the non-photosensitive polyimide 3 is baked at high temperature in an oxygen-free environment (350℃) for 6-9 hours to complete imidization, thus obtaining the fourth-stage amorphous filament sensor module. Figure 7 As shown; S6. Based on the fourth-stage amorphous wire sensor module, the amorphous wire sensor module is obtained through electroplating and photolithography processes. Specifically, S6, based on the fourth-stage amorphous wire sensor module, obtains the flowchart of the amorphous wire sensor module through electroplating and photolithography processes, as shown below. Figure 8 ,include: S61. Based on the fourth-stage amorphous filament sensor module, a fifth-stage amorphous filament sensor module is obtained by magnetron sputtering electroplating of a Cr(600A) / Cu(2000A) seed layer. S62. Based on the fifth-stage amorphous wire sensor module, 10um AZ4620 positive photoresist is spin-coated, exposed, and developed to form an electrode pattern connecting the pad 2 and the end of the amorphous wire 4, thus obtaining the sixth-stage amorphous wire sensor module. S63. Based on the sixth-stage amorphous wire sensor module, perform copper electroplating for 240 seconds, controlling the copper plating thickness to 10µm. Electrically connect the pad 2 to the end of the amorphous wire 4 to obtain the seventh-stage amorphous wire sensor module. Figure 9 As shown; Furthermore, through the electrical connection between the pad 2 and the end of the amorphous wire 4, a high-frequency current is input from the pad 2 to excite the seventh-stage amorphous wire sensor module.

[0020] S64. Based on the seventh-stage amorphous filament sensor module, the amorphous filament sensor module is obtained by removing the residual photoresist and Cr / Cu seed layer.

[0021] S7. Based on the amorphous filament sensor module, the first-stage array amorphous filament sensing unit is obtained through a cutting process. The unit size after cutting is 20mm in length and 12mm in width. S8. Based on the first-stage array amorphous wire sensing unit, winding induction coil 6 with 60 turns yields the second-stage array amorphous wire sensing unit as follows: Figure 10 As shown; Furthermore, the induction coil 6 is used to receive the voltage induced by the seventh-stage amorphous filament sensor module under the giant magnetoresistance effect and output a voltage signal.

[0022] S9. Based on the second-stage array amorphous filament sensing unit, a magnetic particle detection device based on an amorphous filament array is obtained by bonding microfluidic channels 7, as shown in the schematic diagram. Figure 11 As shown.

[0023] Furthermore, the microfluidic channel 7 is located above the second-stage array amorphous filament sensing unit and is used to deliver the biological solution 5 containing magnetic particles to the second-stage array amorphous filament sensing unit.

[0024] This invention first uses amorphous wires as the magnetic sensitive material, achieving precise mounting of the amorphous wires through grooves on the wafer and arranging them into an array structure to improve detection sensitivity, while overcoming the challenge of small detection area in biological detection applications. Then, through photolithography, electroplating, encapsulation, and cutting processes, arrayed amorphous wire sensitive units are obtained. Next, induction coils are wound around the amorphous wire sensitive units to receive the induced voltage under the giant magnetoresistance effect and output a voltage signal, realizing the conversion of magnetic change into electrical signal. Finally, by bonding microfluidic channels, the biological tissue solution to be detected, containing magnetic particles, is delivered to the arrayed amorphous wire sensitive units, realizing the detection of magnetic particles in biological tissue solutions.

[0025] It is understood that the present invention has been described through the above embodiments and should not be construed as limiting the implementation and scope of the present invention. Those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of the present invention. Furthermore, under the teachings of the present invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of the present invention.

Claims

1. A method for manufacturing a magnetic particle detection device based on arrayed amorphous wires, characterized in that, The method includes: S1. Using a glass substrate, the substrate structure of the magnetic particle detection device is obtained through pretreatment. S2. Based on the substrate structure of the magnetic particle detection device, an amorphous wire is embedded into the substrate structure of the magnetic particle detection device to obtain the first-stage amorphous wire sensor module. S3. Based on the first-stage amorphous filament sensor module, the amorphous filament is fixed on the first-stage amorphous filament sensor module by spin-coating non-photosensitive polyimide to obtain the second-stage amorphous filament sensor module. S4. Based on the second-stage amorphous wire sensor module, the amorphous wire end is exposed by spin coating positive photoresist, photolithography, and etching to obtain the third-stage amorphous wire sensor module. S5. Based on the third-stage amorphous filament sensor module, the non-photosensitive polyimide is baked at high temperature in an oxygen-free environment to imidize the non-photosensitive polyimide, thereby obtaining the fourth-stage amorphous filament sensor module. S6. Based on the fourth-stage amorphous wire sensor module, the amorphous wire sensor module is obtained through electroplating and photolithography processes; S7. Based on the amorphous filament sensor module, the first-stage array amorphous filament sensing unit is obtained through a cutting process; S8. Based on the first stage array amorphous filament sensitive unit, a second stage array amorphous filament sensitive unit is obtained by winding an induction coil. S9. Based on the second-stage array amorphous filament sensitive unit, a magnetic particle detection device based on an amorphous filament array is obtained by bonding microfluidic channels.

2. The method for manufacturing the magnetic particle detection device based on arrayed amorphous wires according to claim 1, characterized in that, In step S1, a glass substrate is used. Through pretreatment, the substrate structure of the magnetic particle detection device is obtained, including: S11. Select a glass substrate as the substrate structure of the magnetic particle detection device, clean the substrate structure with acetone, isopropanol and deionized water and blow dry to obtain the first stage glass substrate. S12. Based on the first stage glass substrate, a dicing machine is used to process parallel grooves at specific intervals on the first stage glass substrate to obtain the second stage glass substrate. S13. Based on the second-stage glass substrate, the substrate structure of the magnetic particle detection device is obtained by cleaning with the deionized water.

3. The method for manufacturing the magnetic particle detection device based on arrayed amorphous wires according to claim 1, characterized in that, The substrate structure of the magnetic particle detection device in S2 has parallel trenches, and amorphous wires are embedded in the parallel trenches.

4. The method for manufacturing the magnetic particle detection device based on arrayed amorphous wires according to claim 1, characterized in that, S6, based on the fourth-stage amorphous wire sensor module, obtains the amorphous wire sensor module through electroplating and photolithography processes, including: S61. Based on the fourth-stage amorphous filament sensor module, the fifth-stage amorphous filament sensor module is obtained by magnetron sputtering electroplating of the seed layer. S62. Based on the fifth-stage amorphous wire sensor module, an electrode pattern connecting the pads and the ends of the amorphous wire is formed by spin coating positive photoresist, exposure, and development, thus obtaining the sixth-stage amorphous wire sensor module. S63. Based on the sixth-stage amorphous wire sensor module, the pads are electrically connected to the ends of the amorphous wires by electroplating to obtain the seventh-stage amorphous wire sensor module. S64. Based on the seventh-stage amorphous filament sensor module, the amorphous filament sensor module is obtained by removing the residual photoresist and seed layer.

5. The method for manufacturing the magnetic particle detection device based on arrayed amorphous wires according to claim 4, characterized in that, The pads in S63 are used for electrical connection with the ends of the amorphous wire. High-frequency current is input through the pads to excite the seventh-stage amorphous wire sensor module.

6. The method for manufacturing the magnetic particle detection device based on arrayed amorphous wires according to claim 1, characterized in that, The induction coil in S8 is used to receive the voltage induced by the amorphous filament sensitive unit of the first stage array under the giant magnetoresistance effect and output a voltage signal.

7. The method for manufacturing the magnetic particle detection device based on arrayed amorphous wires according to claim 1, characterized in that, The microfluidic channel in S9 is located above the amorphous filament sensing unit of the second-stage array.

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