Crystal bar tray barrier strip tightening machine

Abstract

The invention belongs to the technical field of wafer processing equipment, and particularly provides a crystal bar tray barrier strip tightening machine which comprises a lower frame body, an equipment cabin, a barrier strip screw tightening mechanism and a roller conveying device, and the barrier strip screw tightening mechanism comprises a second linear motor, an assembling frame, a lifting module, a connecting frame, a horizontal frame, a transmission mechanism, a wrench assembly and a power mechanism; the device further comprises a gantry frame, a first linear motor, a visual unit and a third linear motor. Automatic equipment is adopted to replace manual operation, manpower is saved, and labor intensity is greatly reduced; the actions of the barrier strip screw loosening and tightening mechanisms are standardized, the multiple barrier strip screw loosening and tightening mechanisms can perform loosening and tightening operation on screws at the same time, the uniformity of loosening and tightening operation postures is guaranteed, the barrier strip assembling stability is guaranteed, and meanwhile follow-up procedure work is facilitated; camera vision positioning is adopted, a common auxiliary coordinate calculation system in the market is matched, and the position of the screw can be accurately positioned.

Description

Technical Field

[0001] This invention belongs to the technical field of wafer processing equipment, and specifically provides a crystal rod tray retainer tightening machine. Background Technology

[0002] Wafer fabs require ingot storage bins. Considering differences in process technology, equipment, and production capacity, these bins typically need to accommodate ingots ranging from 100mm to 550mm in diameter. Therefore, the bin's retaining bars are usually adjustable. (See reference...) Figure 7 A standard material box typically consists of a base and baffles, with the baffles secured by screws. During crystal ingot placement, the box's center of gravity must match that of the crystal ingot to ensure stability. Therefore, when adjusting the material box, both baffles must be adjusted simultaneously; that is, each adjustment requires tightening or loosening four screws.

[0003] Reference Figure 8 To fully consider the space utilization and stability of the material box, the length of the baffle is usually not greater than the diameter of the crystal rod, and the baffle needs to be in close contact with the crystal rod to fix it. In other words, the crystal rod will block most of the operating space directly above the screw.

[0004] Currently, most commercially available automated screw tightening and loosening equipment is based on six-axis robotic arms. However, there is not enough operating space at the screw location of the crystal bar box for the six-axis robotic arm to operate smoothly, and the six-axis robotic arm is prone to colliding with the crystal bar during its swing.

[0005] Therefore, the tightening and loosening of screws and adjustment of guide bars in the crystal rod cassette still heavily relies on manual operation, which is monotonous and labor-intensive. Furthermore, during the screw tightening process, multiple screws are tightened one by one. If one screw is loose, tightening the screw on the other side can cause a slight deflection of the guide bar. This means that during the positioning of the guide bar, whether manually or with a six-axis robotic arm, it is easy to encounter situations where the posture cannot be kept consistent, interfering with subsequent transportation and storage and potentially leading to material loss. Summary of the Invention

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a crystal rod tray retainer tightening machine, including a lower frame, an equipment compartment, a retainer screw tightening mechanism and a roller conveying device. Multiple retainer screw tightening mechanisms and roller conveying devices are assembled on the upper surface of the lower frame, wherein the roller conveying device is located in the middle of the upper surface of the lower frame, and multiple retainer screw tightening mechanisms are distributed on the left and right sides of the roller conveying device. The interior of the lower frame is the equipment compartment. The stop bar screw tightening mechanism includes a second linear motor, an assembly frame, a lifting module, a connecting frame, a horizontal frame, a transmission mechanism, a wrench assembly, and a power mechanism. The assembly frame is mounted on the output structure of the second linear motor. The lifting module is fixedly installed on the side wall of the assembly frame. The connecting frame is fixedly installed on the output structure of the lifting module. One end of the horizontal frame is assembled with the connecting frame. The wrench assembly is rotatably mounted on the other end of the horizontal frame. The power mechanism is assembled on the horizontal frame and connected to the wrench assembly through the transmission mechanism. The wrench assembly extends above the roller conveyor.

[0007] Furthermore, the stop bar screw tightening mechanism also includes a limit switch and a flexible compensation mechanism. The connecting frame and the horizontal frame are connected by the flexible compensation mechanism, and the limit switch is fixedly installed on the connecting frame.

[0008] Furthermore, the flexible compensation mechanism includes a base plate, an elastic telescopic column, a linear sliding mechanism, and spring assemblies. The base plate is assembled to the bottom of the connecting frame via the elastic telescopic column. The linear sliding mechanism of the base plate is fixedly installed on the surface of the base plate. Multiple spring assemblies are assembled at the edge of the upper surface of the base plate and are symmetrically distributed at both ends of the linear sliding mechanism. The horizontal frame is connected to the sliding structure of the linear sliding mechanism and abuts against the multiple spring assemblies.

[0009] Furthermore, the crystal rod tray retainer tightening machine further includes a gantry frame, a first linear motor, a vision unit, and a third linear motor. The gantry frame is mounted on the surface of the lower frame, and the crossbeam of the gantry frame is located directly above the roller conveyor. The first linear motor is installed on the crossbeam of the gantry frame, the third linear motor is mounted on the output structure of the first linear motor, and the vision unit is mounted on the output structure of the third linear motor.

[0010] Furthermore, the crystal rod tray baffle tightening machine also includes a four-way positioning mechanism, which is fixedly installed on the surface of the lower frame. The four-way positioning mechanism consists of three sets of thrust output units. Two sets of thrust output units are distributed on both sides of the feed direction of the roller conveyor, and one set of thrust output units is distributed at the end of the feed direction.

[0011] Furthermore, the crystal rod tray retainer tightening machine also includes a laser rangefinder sensor, which is mounted on the output structure of the first linear motor.

[0012] The beneficial effects of using this invention are: Replacing manual operations with automated equipment saves manpower and significantly reduces labor intensity. The operation of the stop bar screw tightening mechanism is standardized, and multiple stop bar screw tightening mechanisms can simultaneously tighten and loosen the screws, ensuring the uniformity of the tightening and loosening operation posture, ensuring the stability of the stop bar assembly, and facilitating subsequent processes. Using camera vision positioning, combined with commonly available auxiliary coordinate calculation systems, the screw position can be accurately located; The flexible compensation mechanism enables the stop bar screw tightening mechanism to have self-adaptive capabilities, adds a fault-tolerant mechanism to the action of the stop bar screw tightening mechanism, and avoids rigid collisions between the stop bar screw tightening mechanism and the crystal rod. Using laser ranging, combined with conventional torque limiting, can effectively prevent damage to materials. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is the front view of the present invention; Figure 3 This is a top view of the present invention; Figure 4 This is the left view of the present invention; Figure 5 This is a schematic diagram of the structure of the retaining bar screw tightening mechanism of the present invention; Figure 6 This is a schematic diagram of the flexible compensation mechanism of the present invention; Figure 7 This is a schematic diagram of the structure of the crystal rod box and crystal rod assembly; Figure 8 Left view of the crystal rod box and crystal rod assembly; The reference numerals in the figures include: 1. Lower frame; 2. Equipment compartment; 3. Gantry frame; 301. First linear motor; 4. Vision unit; 5. Third linear motor; 6. Air source input detection port; 7. Stop bar screw tightening and loosening mechanism; 701. Second linear motor; 702. Assembly frame; 703. Lifting module; 704. Connecting frame; 705. Horizontal frame; 706. Transmission mechanism; 707. Wrench assembly; 708. Power mechanism; 709. Limit switch; 710. Flexible compensation mechanism; 7101. Base plate; 7102. Elastic telescopic column; 7103. Linear sliding mechanism; 7104. Spring assembly; 8. Roller conveyor device; 9. Four-way positioning mechanism; 901. Axial thrust output unit; 902. Radial thrust output unit; 10. Laser rangefinder sensor; 11. Box body; 12. Screw; 13. Baffle; 14. Crystal rod. Detailed Implementation

[0014] The present invention will now be described in detail with reference to the accompanying drawings.

[0015] Reference Figures 1-5 A crystal rod tray retainer tightening machine includes a lower frame 1, an equipment compartment 2, retainer screw tightening mechanism 7, and a roller conveying device 8. Multiple retainer screw tightening mechanisms 7 and roller conveying devices 8 are assembled on the upper surface of the lower frame 1. The roller conveying device 8 is located in the middle of the upper surface of the lower frame 1, and multiple retainer screw tightening mechanisms 7 are distributed on the left and right sides of the roller conveying device 8. The interior of the lower frame 1 is the equipment compartment 2. The stop bar screw tightening mechanism 7 includes a second linear motor 701, an assembly frame 702, a lifting module 703, a connecting frame 704, a horizontal frame 705, a transmission mechanism 706, a wrench assembly 707, and a power mechanism 708. The assembly frame 702 is mounted on the output structure of the second linear motor 701. The lifting module 703 is fixedly installed on the side wall of the assembly frame 702. The connecting frame 704 is fixedly installed on the output structure of the lifting module 703. One end of the horizontal frame 705 is assembled with the connecting frame 704. The wrench assembly 707 is rotatably mounted on the other end of the horizontal frame 705. The power mechanism 708 is assembled on the horizontal frame 705 and connected to the wrench assembly 707 through the transmission mechanism 706. The wrench assembly 707 extends above the roller conveyor 8.

[0016] Referring to the coordinate system in the figure, the electrical control structure is located in the equipment compartment 2. The second linear motor 701 can drive the assembly frame 702 and the components connected to it to move in the X direction, and the lifting module 703 can drive the connecting frame 704 and the components connected to it to move in the Z direction.

[0017] Among them, the wrench assembly 707 adopts a mature electric wrench design and has a torque limiting function to protect the screw 12.

[0018] Specific workflow: Box 11 is conveyed to the central position of the equipment by roller conveyor 8; Adjust the position of the box 11 so that the X coordinate of the screw 12 is aligned with the stop bar screw tightening mechanism 7; The wrench assembly 707 of the stop bar screw tightening mechanism 7 extends under the drive of the second linear motor 701 and engages with the corresponding screw 12; The wrench assembly 707 rotates the screw 12 in the forward direction under the drive of the power mechanism 708; The wrench assembly 707 extends or retracts under the drive of the second linear motor 701 to adjust the position of the stop bar 13; The wrench assembly 707 rotates the screw 12 in the opposite direction under the drive of the power mechanism 708.

[0019] During operation, the wrench assembly 707 enters from the Y direction, which can avoid the problem of collision with the crystal rod 14 in the Z direction. Moreover, the Z direction displacement range of the wrench assembly 707 is small, which can perfectly match the gap between the crystal rod 14 and the stop bar 13.

[0020] The stop bar screw tightening mechanism 7 also includes a limit switch 709 and a flexible compensation mechanism 710. The connecting frame 704 and the horizontal frame 705 are connected by the flexible compensation mechanism 710, and the limit switch 709 is fixedly installed on the connecting frame 704. The flexible compensation mechanism 710 is used to protect the wrench assembly 707 and prevent the wrench assembly 707 from rigidly colliding with the screw 12 or nut. When the wrench assembly 707 comes into contact with the screw 12 or nut, the horizontal frame 705 will deflect under the protection of the flexible compensation mechanism 710. When the deflection exceeds the range allowed for the wrench assembly 707 to be properly fitted into the screw 12 or nut, the limit switch 709 is triggered and the system issues an alarm.

[0021] The lower frame 1 is equipped with an air source input detection port 6.

[0022] Specifically, the flexible compensation mechanism 710 includes a base plate 7101, an elastic telescopic column 7102, a linear sliding mechanism 7103, and a spring assembly 7104. The base plate 7101 is mounted on the bottom of the connecting frame 704 via the elastic telescopic column 7102. The linear sliding mechanism 7103 of the base plate 7101 is fixedly installed on the surface of the base plate 7101. Multiple spring assemblies 7104 are mounted on the edge of the upper surface of the base plate 7101 and are symmetrically distributed at both ends of the linear sliding mechanism 7103. A horizontal frame 705 is connected to the sliding structure of the linear sliding mechanism 7103 and abuts against the multiple spring assemblies 7104. When the horizontal frame 705 slides along the linear sliding mechanism 7103, it applies pressure or tension to the spring assembly 7104.

[0023] Under the protection of the flexible compensation mechanism 710, when the wrench assembly 707 is subjected to external force, the horizontal frame 705 can swing in the X and Z directions.

[0024] A crystal rod tray retainer tightening machine further includes a gantry frame 3, a first linear motor 301, a vision unit 4, and a third linear motor 5. The gantry frame 3 is mounted on the surface of the lower frame 1, and the crossbeam of the gantry frame 3 is located directly above the roller conveyor 8. The first linear motor 301 is installed on the crossbeam of the gantry frame 3, the third linear motor 5 is mounted on the output structure of the first linear motor 301, and the vision unit 4 is mounted on the output structure of the third linear motor 5.

[0025] Furthermore, a crystal rod tray retainer tightening machine also includes a four-way positioning mechanism 9, which is fixedly installed on the surface of the lower frame 1; The four-way positioning mechanism 9 consists of three sets of thrust output units. Two sets of thrust output units are distributed on both sides of the feed direction of the roller conveyor 8 (taking the coordinate system in the figure as an example, the X direction is the feed and discharge direction), and one set of thrust output units is distributed at the end of the feed direction.

[0026] Preferably, the two sides of the roller conveyor 8 in the feeding direction are Y-direction thrust output units 901, and the thrust output unit at the end of the feeding direction is X-direction thrust output unit 902.

[0027] Furthermore, a crystal rod tray retainer tightening machine also includes a laser rangefinder 10, which is mounted on the output structure of the first linear motor 5.

[0028] The above content is only a preferred embodiment of the present invention. For those skilled in the art, many changes can be made in the specific implementation and application scope based on the concept of the present invention. As long as these changes do not depart from the concept of the present invention, they all fall within the protection scope of the present invention.

Claims

1. A crystal bar pallet stopper tightening machine characterized by: The device comprises a lower frame, a device cabin, a baffle screw tensioning mechanism and a roller conveying device, a plurality of baffle screw tensioning mechanisms and roller conveying devices are assembled on the upper surface of the lower frame, the roller conveying device is located in the middle of the upper surface of the lower frame, a plurality of baffle screw tensioning mechanisms are distributed on the left and right sides of the roller conveying device, and the inside of the lower frame is the device cabin. The baffle screw tensioning mechanism comprises a second linear motor, an assembly frame, a lifting module, a connecting frame, a horizontal frame, a transmission mechanism, a wrench assembly and a power mechanism, the assembly frame is arranged on the output structure of the second linear motor, the lifting module is fixedly installed on the side wall of the assembly frame, the connecting frame is fixedly installed on the output structure of the lifting module, one end of the horizontal frame is assembled with the connecting frame, the wrench assembly is rotatably installed on the other end of the horizontal frame, the power mechanism is assembled on the horizontal frame and connected with the wrench assembly through the transmission mechanism, and the wrench assembly extends above the roller conveying device.

2. A crystal bar pallet stopper tightening machine according to claim 1, wherein: The baffle screw tensioning mechanism further comprises a limit switch and a flexible compensation mechanism, the connecting frame and the horizontal frame are connected through the flexible compensation mechanism, and the limit switch is fixedly installed on the connecting frame.

3. A crystal bar pallet stopper tightening machine according to claim 2, wherein: The flexible compensation mechanism comprises a bottom plate, an elastic telescopic column, a linear sliding mechanism and a spring assembly, the bottom plate is assembled at the bottom of the connecting frame through the elastic telescopic column, the linear sliding mechanism of the bottom plate is fixedly installed on the surface of the bottom plate, a plurality of spring assemblies are assembled at the edges of the upper surface of the bottom plate, the plurality of spring assemblies are symmetrically distributed at the two ends of the linear sliding mechanism, the horizontal frame is connected with the sliding structure of the linear sliding mechanism, and the horizontal frame abuts against the plurality of spring assemblies.

4. A crystal bar pallet stopper screwing machine according to any one of claims 1 to 3, characterized in that: The device further comprises a gantry frame, a first linear motor, a vision unit and a third linear motor, the gantry frame is assembled on the surface of the lower frame, the cross beam of the gantry frame is located directly above the roller conveying device, the first linear motor is arranged on the cross beam of the gantry frame, the third linear motor is assembled on the output structure of the first linear motor, and the vision unit is assembled on the output structure of the third linear motor.

5. A crystal bar pallet stopper screwing machine according to any one of claims 1 to 3, characterized in that: The device further comprises a four-way positioning mechanism, the four-way positioning mechanism is fixedly installed on the surface of the lower frame. The four-way positioning mechanism is composed of three groups of thrust output units, two groups of thrust output units are distributed on the two sides of the roller conveying device in the feeding direction, and one group of thrust output units is distributed at the end position in the feeding direction.

6. A crystal bar pallet stopper screwing machine according to any one of claim 4, characterized in that: The device further comprises a laser ranging sensor, and the laser ranging sensor is assembled on the output structure of the first linear motor.

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