Measurement precision automatic calibration management system applied to micro-displacement sensor

Abstract

The invention belongs to the technical field of micro-displacement sensor management and control, and particularly relates to a measurement precision automatic calibration management system applied to a micro-displacement sensor, which comprises a multi-dimensional data acquisition module, a phase-locked voltage reference calibration module, a micro-displacement error dynamic correction module, an atomic clock level precision verification module and a calibration result feedback adjustment module. Key data are comprehensively captured through a multi-dimensional data acquisition module, a phase-locked voltage reference calibration module dynamically corrects voltage drift with an atomic clock as a reference, a micro-displacement error dynamic correction module counteracts measurement deviation caused by environmental interference and element characteristic changes, and an atomic clock level precision verification module accurately judges the calibration effect. And the calibration result feedback adjustment module adjusts parameters according to errors in a grading manner, and the intelligent storage management module performs layered and partitioned storage and safety monitoring, so that automation, high-precision calibration and long-term management and control of the measurement precision of the micro-displacement sensor are realized, and the use requirements of complex working scenes are met.

Description

Technical Field

[0001] This invention relates to the field of micro-displacement sensor control technology, specifically to an automatic calibration and management system for the measurement accuracy of micro-displacement sensors. Background Technology

[0002] As a core sensing component in precision manufacturing, aerospace, and industrial control, the measurement accuracy of micro-displacement sensors directly determines the reliability of system data and operational safety. Calibration technology, as a key means to ensure the long-term stable output of sensors, has become a core support for the high-quality development of the industry.

[0003] As applications extend to more complex operating conditions, sensors face multiple challenges such as temperature fluctuations, component aging, and electromagnetic interference. Traditional methods that rely on manual operation or single-parameter calibration are no longer sufficient to meet the demands for high precision, automation, and long-term effectiveness. Intelligent, end-to-end calibration management technology has become an urgent need for the industry.

[0004] For example, Chinese invention patent CN119085474A discloses a "calibration method for a sliding resistive displacement sensor". The technical solution of this invention is to control a motor to drive the sensor slider to move at a set interval, collect displacement-voltage corresponding data to construct a calibration dataset, and query the dataset based on the current voltage value to calculate the actual displacement. Compared with the traditional manual calibration mode, it effectively improves calibration efficiency and basic measurement accuracy, so as to solve the error problem caused by poor linear uniformity of the sliding resistive sensor.

[0005] However, in practical applications, this technical solution relies on a motor encoder to provide displacement reference and does not introduce ultra-high precision reference sources such as atomic clocks. This makes it difficult to offset the system's own drift error, and the calibration reference accuracy is limited. Furthermore, the interference compensation dimension is singular, focusing only on the correspondence between displacement and voltage, without considering the coupling interference between external environment and component characteristics such as temperature fluctuations and capacitance changes. The calibration effect is easily attenuated under complex working conditions, and there is a lack of dynamic closed-loop control mechanism, making it impossible to dynamically adjust calibration parameters according to the real-time error during sensor operation. It is also difficult to cope with the accuracy drift caused by component aging and cannot balance calibration accuracy, automation level, and scenario adaptability. Therefore, a solution is proposed. Summary of the Invention

[0006] The purpose of this invention is to provide an automatic calibration and management system for measurement accuracy applied to micro-displacement sensors, so as to solve the above-mentioned technical defects.

[0007] To achieve the above objectives, the present invention provides the following technical solution: an automatic calibration and management system for the measurement accuracy of micro-displacement sensors, comprising a multi-dimensional data acquisition module, a phase-locked voltage reference calibration module, a micro-displacement error dynamic correction module, an atomic clock-level accuracy verification module, and a calibration result feedback and adjustment module;

[0008] The multi-dimensional data acquisition module captures the phase-locked voltage signal, ambient temperature signal, fitting capacitor value signal and atomic clock reference frequency signal in real time during the operation of the micro-displacement sensor. The phase-locked voltage reference calibration module uses the atomic clock reference frequency as a reference to perform drift correction and reference calibration on the acquired phase-locked voltage signal and outputs a standardized phase-locked voltage value.

[0009] The micro-displacement error dynamic correction module combines interference factors to dynamically correct the original micro-displacement calculated based on the phase-locked voltage. The atomic clock-level accuracy verification module uses the ultra-high precision benchmark provided by the atomic clock to verify the corrected micro-displacement in real time and determine whether it meets the preset accuracy requirements, and outputs the verification results. The calibration result feedback adjustment module dynamically adjusts the sensor phase-locked loop circuit parameters and various calibration coefficients according to the accuracy verification results.

[0010] Furthermore, the multi-dimensional data acquisition module integrates a high-precision voltage acquisition unit, a platinum resistance temperature sensing unit, a capacitance detection unit, and a frequency receiving unit to acquire the dual-channel phase-locked voltage output by the sensor phase-locked loop circuit in real time. Among them, the basic phase-locked voltage PDv1 when the measured capacitor is not connected, and the measured phase-locked voltage PDv2 after the measured capacitor is connected.

[0011] It also collects the real-time temperature T of the sensor's working environment, the real-time capacitance C of the fitting capacitor, and the reference frequency f1 output by the atomic clock; after the raw data is converted into digital signals by the built-in analog-to-digital converter, it is synchronously transmitted to the phase-locked voltage reference calibration module and the micro-displacement error dynamic correction module in the form of a standardized data stream.

[0012] Furthermore, the phase-locked voltage reference calibration module receives the basic phase-locked voltage PDv1, the measured phase-locked voltage PDv2, and the atomic clock reference frequency f1 transmitted by the multi-dimensional data acquisition module. It calls the pre-stored theoretical reference frequency f0 of the phase-locked loop circuit, establishes a phase-locked voltage reference system based on the atomic clock reference frequency, and calculates the phase-locked voltage drift deviation value. Here, ΔPDv1=PDv1-PDv0, ΔPDv2=PDv2-PDv0, and PDv0 is the standard phase-locked voltage corresponding to the theoretical reference frequency f0 of the phase-locked loop circuit.

[0013] A reference calibration coefficient k1 is introduced to correct the drift deviation, k1=1+(f1-f0) / f0, where f1 is the reference frequency provided by the atomic clock in real time; the standardized phase-locked voltage values ​​PDv1s and PDv2s are calculated by formula, where PDv1s=PDv1-ΔPDv1×k1, PDv2s=PDv2-ΔPDv2×k1; the calibrated standardized phase-locked voltage values ​​are transmitted to the micro-displacement error dynamic correction module and the atomic clock-level accuracy verification module, respectively.

[0014] Furthermore, the micro-displacement error dynamic correction module calculates the original micro-displacement d0 based on the principle of the reverse measurement method. The calculation formula is as follows:

[0015] d0 = k2 × |PDv2s - PDv1s|;

[0016] Where k2 is the phase-locked voltage to micro-displacement conversion coefficient;

[0017] Introducing a temperature correction factor kT, the calculation formula is as follows:

[0018] kT = 1 + α × (T - T0), where α is the temperature coefficient of the fitted capacitance, T0 is the standard operating temperature of the sensor, and T is the ambient temperature acquired in real time; introducing the capacitance correction coefficient kC, the calculation formula is:

[0019] kC = C0 / C, where C0 is the standard capacitance value of the fitted capacitor and C is the real-time acquired capacitance value of the fitted capacitor.

[0020] The corrected micro-displacement d is obtained through the dynamic error correction formula:

[0021] d = d0 × kT × kC;

[0022] The corrected micro-displacement d is transmitted to the atomic clock-level precision verification module for precision verification.

[0023] Furthermore, the phase-locked voltage-micro-displacement conversion coefficient k2 is obtained through calibration of a standard displacement stage. The standard displacement stage is set to a known micro-displacement Δd, and the corresponding phase-locked voltage difference ΔPDv=|PDv2s-PDv1s| is collected. Then k2=Δd / ΔPDv.

[0024] Furthermore, the atomic clock-level accuracy verification module receives the corrected micro-displacement d and the atomic clock reference frequency f1, and calculates the atomic clock-level theoretical measurement accuracy limit dlimit. The calculation formula is as follows:

[0025] dlimit=10 -19 ×(f1 / fref);

[0026] Where fref is the reference frequency of the atomic clock;

[0027] 10 -19 This serves as the reference coefficient for atomic clock-level precision.

[0028] The pre-stored standard micro-displacement true value dtrue is called, and the actual measurement error ε=|d-dtrue| is calculated using the accuracy verification formula. If ε≤d_limit, the calibration is deemed qualified, and a "calibration valid" signal and the actual measurement accuracy ε are output. If ε>d_limit, the calibration is deemed unqualified, and a "calibration invalid" signal and the error deviation value Δε=ε-dlimit are output. The verification result is then transmitted to the calibration result feedback adjustment module.

[0029] Furthermore, the specific operation process of the calibration result feedback adjustment module includes:

[0030] It receives the verification results transmitted by the atomic clock-level precision verification module. When it receives the "calibration valid" signal, it keeps the current phase-locked loop circuit parameters and calibration coefficients unchanged, and at the same time feeds back the "maintain sampling parameters" signal to the multi-dimensional data acquisition module.

[0031] When a "calibration invalid" signal and an error exceeding the tolerance value Δε are received, the relevant parameters are adjusted according to the magnitude of Δε, and the adjusted parameters are transmitted to the phase-locked voltage reference calibration module and the micro-displacement error dynamic correction module respectively for the next round of calibration calculation.

[0032] Furthermore, the specific process of adjusting the relevant parameters according to the magnitude of Δε is as follows:

[0033] If Δε≤0.5nm, only the reference calibration coefficient k1 is adjusted, and the adjustment formula is k1s=k1×(1-Δε / dtrue);

[0034] If 0.5nm<Δε≤2nm, k1 and the phase-locked voltage-micro-displacement conversion coefficient k2 are adjusted synchronously; where k1s=k1×(1-Δε / dtrue), k2s=k2×(1-Δε / dtrue);

[0035] If Δε>2nm, in addition to adjusting k1 and k2, the bias voltage of the varactor diode in the phase-locked loop circuit is adjusted through the built-in signal conditioning unit so that the capacitance adjustment range of the varactor diode is adapted to the current error condition.

[0036] Furthermore, it also includes an intelligent storage management module, which adopts a hierarchical storage structure, receives all data transmitted from each module, and adds timestamps and sensor number tags to all data, storing it in partitions according to "raw data - calibration parameters - verification results - adjustment parameters".

[0037] Furthermore, the intelligent storage management module is also used to analyze storage security. This analysis determines whether to generate a storage risk alarm, and when such an alarm is generated, it notifies the relevant administrators. The specific analysis process is as follows:

[0038] The corresponding storage device is monitored, and the temperature of the storage device and the humidity of the surrounding environment are collected. The difference between the temperature and the corresponding preset suitable temperature standard value is calculated and the absolute value is taken to obtain the temperature safety hazard value. The difference between the humidity and the corresponding preset suitable humidity standard value is calculated and the absolute value is taken to obtain the humidity safety hazard value.

[0039] The system collects the vibration amplitude of the storage device and the dust concentration of the surrounding environment, and marks them as vibration safety hazard values ​​and dust safety hazard values, respectively. The storage safety hazard value is calculated by weighting and summing the temperature safety hazard value, humidity safety hazard value, vibration safety hazard value and dust safety hazard value. The storage safety hazard value is compared with the preset storage safety hazard threshold. If the storage safety hazard value exceeds the preset storage safety hazard threshold, a storage risk alarm signal is generated.

[0040] Compared with the prior art, the beneficial effects of the present invention are:

[0041] 1. In this invention, key data is comprehensively captured by a multi-dimensional data acquisition module, the phase-locked voltage reference calibration module dynamically corrects voltage drift with an atomic clock as a reference, the micro-displacement error dynamic correction module effectively offsets measurement deviations caused by environmental interference and changes in component characteristics, the atomic clock-level precision verification module accurately determines the calibration effect, and the calibration result feedback adjustment module adjusts parameters according to error levels to ensure that the sensor measurement accuracy continuously meets the standards, which is conducive to improving the stability, accuracy and controllability of the micro-displacement sensor measurement accuracy.

[0042] 2. In this invention, by adopting a hierarchical and partitioned storage structure, timestamps and sensor number tags are added to all data to facilitate subsequent retrieval and traceability. At the same time, by monitoring the security risks of the storage environment and issuing timely warnings, data storage security is ensured, providing strong support for subsequent data analysis and traceability. Attached Figure Description

[0043] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings;

[0044] Figure 1 This is a system block diagram of Embodiment 1 of the present invention;

[0045] Figure 2 This is a system block diagram of Embodiment 2 of the present invention. Detailed Implementation

[0046] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0047] Example 1: As Figure 1 As shown, the automatic calibration management system for measurement accuracy of micro-displacement sensors proposed in this invention includes a multi-dimensional data acquisition module, a phase-locked voltage reference calibration module, a micro-displacement error dynamic correction module, an atomic clock-level accuracy verification module, and a calibration result feedback adjustment module.

[0048] The multi-dimensional data acquisition module captures the phase-locked voltage signal, ambient temperature signal, fitting capacitor value signal, and atomic clock reference frequency signal in real time during the operation of the micro-displacement sensor, providing continuous and comprehensive raw data support for subsequent calibration processes and laying the foundation for accurate calibration. Specifically, the multi-dimensional data acquisition module integrates a high-precision voltage acquisition unit (accuracy ≤0.001V), a platinum resistance temperature sensing unit (measurement range -20℃~80℃, accuracy ±0.1℃), a capacitance detection unit (measurement range 1~100pF, accuracy ±0.01pF), and a frequency receiving unit.

[0049] The system acquires dual-channel phase-locked voltages from the sensor's phase-locked loop circuit in real time. These include the base phase-locked voltage PDv1 when the measured capacitor is not connected, and the measured phase-locked voltage PDv2 when the measured capacitor is connected. It also acquires the real-time temperature T of the sensor's operating environment, the real-time capacitance C of the fitted capacitor, and the reference frequency f1 output by the atomic clock. The raw data is converted into digital signals by the built-in analog-to-digital converter and then synchronously transmitted in a standardized data stream format to the phase-locked voltage reference calibration module and the micro-displacement error dynamic correction module, providing the original data source for reference calibration and error analysis.

[0050] The phase-locked voltage reference calibration module uses the atomic clock reference frequency as a reference to perform drift correction and reference calibration on the acquired phase-locked voltage signal, eliminate the systematic error caused by voltage drift in the phase-locked loop circuit, and output a standardized phase-locked voltage value, providing a stable basis for the accurate calculation of micro-displacement.

[0051] Specifically, the phase-locked voltage reference calibration module first receives the basic phase-locked voltage PDv1, the measured phase-locked voltage PDv2, and the atomic clock reference frequency f1 transmitted by the multi-dimensional data acquisition module, and then calls the pre-stored theoretical reference frequency f0 of the phase-locked loop circuit (determined by circuit design parameters, for example, f0=10MHz) to establish a phase-locked voltage reference system based on the atomic clock reference frequency.

[0052] Calculate the phase-locked voltage drift deviation value:

[0053] Wherein, ΔPDv1 = PDv1 - PDv0;

[0054] ΔPDv2 = PDv2 - PDv0;

[0055] It should be noted that PDv0 is the standard phase-locked voltage corresponding to f0, which is stored inside the module after being pre-calibrated by the atomic clock, for example, PDv0=5V;

[0056] A reference calibration coefficient k1 is introduced to correct the drift deviation. This coefficient is dynamically adjusted based on the deviation between the atomic clock frequency and the theoretical frequency to ensure the real-time performance of the reference calibration. The formula is as follows:

[0057] k1 = 1 + (f1 - f0) / f0;

[0058] Where f1 is the reference frequency provided in real time by the atomic clock;

[0059] Finally, the standardized phase-locked voltage values ​​PDv1s and PDv2s are calculated using the formula:

[0060] Wherein, PDv1s = PDv1 - ΔPDv1 × k1;

[0061] PDv2s = PDv2 - ΔPDv2 × k1;

[0062] The calibrated standardized phase-locked voltage values ​​are transmitted to the micro-displacement error dynamic correction module and the atomic clock-level accuracy verification module, respectively.

[0063] The micro-displacement error dynamic correction module combines interference factors such as ambient temperature drift and capacitance value changes to dynamically correct the original micro-displacement calculated based on phase-locked voltage, thereby offsetting measurement deviations caused by changes in the external environment and component characteristics, and improving the stability and accuracy of measurement precision.

[0064] Specifically, the micro-displacement error dynamic correction module receives the temperature T and capacitance C transmitted by the multi-dimensional data acquisition module, as well as PDv1s and PDv2s output by the phase-locked voltage reference calibration module. First, it calculates the original micro-displacement d0 based on the phase-locked voltage measurement principle. The calculation formula is as follows:

[0065] d0 = k2 × |PDv2s - PDv1s|;

[0066] Where k2 is the phase-locked voltage-micro-displacement conversion coefficient (unit: nm / V); it should be noted that the phase-locked voltage-micro-displacement conversion coefficient k2 is obtained through standard displacement stage calibration: set the standard displacement stage to a known micro-displacement Δd, collect the corresponding phase-locked voltage difference ΔPDv=|PDv2s-PDv1s|, then k2=Δd / ΔPDv (for example, when ΔPDv=2V, k2=5nm / V);

[0067] Considering that changes in ambient temperature can cause the fitting capacitance value to drift, a temperature correction factor kT is introduced, and its calculation formula is as follows:

[0068] kT = 1 + α × (T - T0);

[0069] Where α is the temperature coefficient of the fitted capacitance (in °C). -1 The value is obtained from experiments on the properties of capacitor materials, for example, α = 2 × 10⁻⁶. -4 ℃ -1 T0 is the standard operating temperature of the sensor (set to 25℃); T is the ambient temperature collected in real time.

[0070] Meanwhile, to eliminate the error caused by changes in the capacitance value itself, a capacitance correction coefficient kC is introduced, calculated as follows:

[0071] kC = C0 / C;

[0072] Where C0 is the standard capacitance value of the fitted capacitor (unit pF, pre-stored as 10pF after calibration); C is the real-time acquired capacitance value of the fitted capacitor.

[0073] The corrected micro-displacement d is obtained through the dynamic error correction formula:

[0074] d = d0 × kT × kC;

[0075] The corrected micro-displacement d is transmitted to the atomic clock-level precision verification module for precision verification.

[0076] The atomic clock-level precision verification module uses the ultra-high precision benchmark provided by the atomic clock to verify the corrected micro-displacement in real time and determine whether it meets the preset precision requirements. It outputs the verification results (pass / fail and error out-of-tolerance value), providing a clear basis for subsequent parameter adjustment and helping to ensure that the measurement accuracy reaches the ultra-high standard.

[0077] Specifically, the atomic clock-level precision verification module receives the corrected micro-displacement d transmitted by the micro-displacement error dynamic correction module and the atomic clock reference frequency f1 transmitted by the multi-dimensional data acquisition module. It first calculates the atomic clock-level theoretical measurement precision limit dlimit using the following formula:

[0078] dlimit=10 -19×(f1 / fref);

[0079] Where fref is the reference frequency of the atomic clock (set to 10). 9 Hz (determined by the atomic clock hardware parameters).

[0080] 10-19 is the reference coefficient for atomic clock-level precision;

[0081] Then, the pre-stored standard micro-displacement true value dtrue (i.e., the micro-displacement amount that actually needs to be performed during the current calibration, for example, dtrue=5nm) is called, and the actual measurement error ε=|d-dtrue| is calculated through the accuracy verification formula.

[0082] If ε≤d_limit, the calibration is deemed qualified, and a "calibration valid" signal and the actual measurement accuracy ε are output; if ε>d_limit, the calibration is deemed unqualified, and a "calibration invalid" signal and the error deviation Δε=ε-dlimit are output; and the verification results (including signal type, ε, Δε) are transmitted to the calibration result feedback adjustment module.

[0083] The calibration result feedback and adjustment module dynamically adjusts the sensor's phase-locked loop circuit parameters and calibration coefficients based on the accuracy verification results, constructing a closed-loop mechanism of "acquisition-calibration-verification-adjustment" to ensure that the sensor's measurement accuracy continuously and stably meets the standards. Specifically, the operation process of the calibration result feedback and adjustment module is as follows:

[0084] The system receives the verification results transmitted by the atomic clock-level precision verification module. When it receives the "calibration valid" signal, it keeps the current phase-locked loop circuit parameters (including varactor diode bias voltage and phase detector operating threshold) and calibration coefficients (k1, k2, kT, kC) unchanged. At the same time, it feeds back the "maintain sampling parameters" signal to the multi-dimensional data acquisition module to ensure the stable operation of the acquisition process.

[0085] When a "calibration invalid" signal and an error exceeding the tolerance value Δε are received, the relevant parameters are adjusted according to the magnitude of Δε: if Δε≤0.5nm, only the reference calibration coefficient k1 is adjusted, and the adjustment formula is k1s=k1×(1-Δε / dtrue).

[0086] If 0.5nm<Δε≤2nm, k1 and the phase-locked voltage-micro-displacement conversion coefficient k2 are adjusted synchronously; where k1s=k1×(1-Δε / dtrue), k2s=k2×(1-Δε / dtrue);

[0087] If Δε > 2nm, in addition to adjusting k1 and k2 (as described above), the bias voltage of the varactor diode in the phase-locked loop circuit is adjusted by the built-in signal conditioning unit (adjustment range is ±0.1V, step size is 0.01V) so that the capacitance adjustment range of the varactor diode is adapted to the current error situation; and the adjusted parameters are transmitted to the phase-locked voltage reference calibration module and the micro-displacement error dynamic correction module respectively for the next round of calibration calculation.

[0088] Example 2: Figure 2 As shown, the difference between this embodiment and Embodiment 1 is that it also includes an intelligent storage management module. The intelligent storage management module adopts a hierarchical storage structure and receives all data transmitted by each module, including the raw data (PDv1, PDv2, T, C, f2) from the multi-dimensional data acquisition module, the output data (k1, PDv1s, PDv2s) from the phase-locked voltage reference calibration module, the output data (kT, kC, d0, d) from the micro-displacement error dynamic correction module, the verification information (ε, Δε, verification result signal) from the atomic clock-level precision verification module, and the adjustment parameters (adjusted k1, k2, bias voltage values) from the calibration result feedback adjustment module.

[0089] All data is timestamped (accurate to milliseconds) and labeled with sensor number, and stored in partitions of "raw data - calibration parameters - verification results - adjustment parameters". It supports retrieval by time, sensor number, calibration result type and other conditions.

[0090] Furthermore, the intelligent storage management module is also used to analyze storage security. This analysis determines whether to generate storage risk alarms. When a storage risk alarm is generated, the relevant administrators are notified to take timely corrective measures, ensuring the storage devices are in a safe state. This significantly reduces data storage risks and provides strong support for subsequent data analysis and traceability. The specific analysis process is as follows:

[0091] The corresponding storage devices are monitored, and the temperature of the storage devices and the humidity of the surrounding environment are collected. The difference between the temperature and the corresponding preset suitable temperature standard value is calculated and the absolute value is taken to obtain the temperature safety hazard value. The difference between the humidity and the corresponding preset suitable humidity standard value is calculated and the absolute value is taken to obtain the humidity safety hazard value. The vibration amplitude of the storage devices and the dust concentration of the surrounding environment are also collected and marked as vibration safety hazard value and dust safety hazard value, respectively.

[0092] The stored safety hazard value is obtained by weighted summation of temperature, humidity, vibration, and dust safety hazard values. Specifically, each of these values ​​is assigned a pre-defined weighting coefficient, and then each value is multiplied by its corresponding weighting coefficient. The sum of these four products is then marked as the stored safety hazard value.

[0093] It should be noted that the higher the value of the storage security risk value, the higher the overall risk of the current data storage. The storage security risk value is compared with the preset storage security risk threshold. If the storage security risk value exceeds the preset storage security risk threshold, it indicates that the overall risk of the current data storage is relatively high, and a storage risk alarm signal is generated.

[0094] The working principle of this invention is as follows: During use, the multi-dimensional data acquisition module comprehensively captures key data such as phase-locked voltage, temperature, capacitance value, and atomic clock reference frequency, providing comprehensive and reliable raw support for calibration. The phase-locked voltage reference calibration module dynamically corrects voltage drift with the atomic clock as a reference, eliminating systematic errors. The micro-displacement error dynamic correction module introduces temperature and capacitance dual correction coefficients to effectively offset measurement deviations caused by environmental interference and changes in component characteristics. The atomic clock-level accuracy verification module relies on an ultra-high precision reference to accurately determine the calibration effect. The calibration result feedback adjustment module adjusts parameters according to error levels to ensure that the sensor measurement accuracy continuously meets the standards. Furthermore, the intelligent storage management module, through hierarchical and partitioned storage and security monitoring, ensures data traceability and reduces storage risks, realizing automated, high-precision calibration and long-term control of micro-displacement sensor measurement accuracy. This avoids the problems of traditional calibration relying on manual labor, weak anti-interference ability, and insufficient accuracy, adapting to the needs of complex working scenarios.

[0095] In the technical solution of this invention, the threshold, preset value, preset range, etc., are set for result comparison and analysis to determine whether it is good or bad. The magnitude of these values ​​is set and stored based on a combination of large-scale model analysis of sample data and human experience. It can also be appropriately adjusted based on seasonal or common-sense influence conditions. Similarly, the preset weight coefficients, influence factors, etc., are set based on the magnitude of the influence of each parameter on the result, and the specific values ​​are allocated to ultimately reflect the influence on the result. This is also set and stored based on a combination of large-scale model analysis of sample data and human experience. It can also be appropriately adjusted based on seasonal or common-sense influence conditions.

[0096] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, enabling those skilled in the art to better understand and utilize it. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. An automatic calibration and management system for the measurement accuracy of micro-displacement sensors, characterized in that, It includes a multi-dimensional data acquisition module, a phase-locked voltage reference calibration module, a micro-displacement error dynamic correction module, an atomic clock-level precision verification module, and a calibration result feedback adjustment module; The multi-dimensional data acquisition module captures the phase-locked voltage signal, ambient temperature signal, fitting capacitor value signal and atomic clock reference frequency signal in real time during the operation of the micro-displacement sensor. The phase-locked voltage reference calibration module uses the atomic clock reference frequency as a reference to perform drift correction and reference calibration on the acquired phase-locked voltage signal and outputs a standardized phase-locked voltage value. The dynamic correction module for micro-displacement error combines interference factors to dynamically correct the original micro-displacement calculated based on phase-locked voltage. The atomic clock-level precision verification module uses the ultra-high precision benchmark provided by the atomic clock to verify the corrected micro-displacement in real time and output the verification results. The calibration result feedback adjustment module dynamically adjusts the sensor phase-locked loop circuit parameters and various calibration coefficients based on the accuracy verification results.

2. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 1, characterized in that, The multi-dimensional data acquisition module acquires the dual-channel phase-locked voltage output by the sensor phase-locked loop circuit in real time, including the basic phase-locked voltage PDv1 when the measured capacitor is not connected, and the measured phase-locked voltage PDv2 when the measured capacitor is connected. It also collects the real-time temperature T of the sensor's working environment, the real-time capacitance C of the fitting capacitor, and the reference frequency f1 output by the atomic clock; after the raw data is converted into digital signals by the built-in analog-to-digital converter, it is synchronously transmitted to the phase-locked voltage reference calibration module and the micro-displacement error dynamic correction module in the form of a standardized data stream.

3. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 2, characterized in that, The phase-locked voltage reference calibration module receives the basic phase-locked voltage PDv1, the measured phase-locked voltage PDv2 and the atomic clock reference frequency f1, calls the pre-stored theoretical reference frequency f0 of the phase-locked loop circuit, and calculates the phase-locked voltage drift deviation value. A reference calibration coefficient k1 is introduced to correct the drift deviation, and the standardized phase-locked voltage values ​​PDv1s and PDv2s are obtained by calculation. The calibrated standardized phase-locked voltage values ​​are transmitted to the micro-displacement error dynamic correction module and the atomic clock-level accuracy verification module, respectively.

4. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 3, characterized in that, The micro-displacement error dynamic correction module retrieves the phase-locked voltage-micro-displacement conversion coefficient k2, calculates the original micro-displacement d0 based on the phase-locked voltage-micro-displacement measurement principle, introduces the temperature correction coefficient kT and the capacitance correction coefficient kC, and obtains the corrected micro-displacement d through the dynamic error correction formula. The corrected micro-displacement d is then transmitted to the atomic clock-level precision verification module for precision verification.

5. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 4, characterized in that, The phase-locked voltage-micro-displacement conversion coefficient k2 is obtained through the calibration of a standard displacement stage. The standard displacement stage is set to a known micro-displacement Δd, and the corresponding phase-locked voltage difference ΔPDv is collected. Then k2 = Δd / ΔPDv.

6. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 4, characterized in that, The atomic clock-level accuracy verification module receives the corrected micro-displacement d and the atomic clock reference frequency f1, calculates the atomic clock-level theoretical measurement accuracy limit dlimit, calls the pre-stored standard micro-displacement true value dtrue, and calculates the actual measurement error ε through the accuracy verification formula. If ε≤d_limit, the calibration is deemed qualified, and a "calibration valid" signal and the actual measurement accuracy ε are output; if ε>d_limit, the calibration is deemed unqualified, and a "calibration invalid" signal and the error deviation value Δε are output; and the verification result is transmitted to the calibration result feedback adjustment module.

7. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 6, characterized in that, The specific operation process of the calibration result feedback adjustment module includes: When a "calibration valid" signal is received, the current phase-locked loop circuit parameters and calibration coefficients are kept unchanged, and a "maintain sampling parameters" signal is fed back to the multi-dimensional data acquisition module. When a "calibration invalid" signal and an error exceeding the tolerance value Δε are received, the relevant parameters are adjusted according to the magnitude of Δε, and the adjusted parameters are transmitted to the phase-locked voltage reference calibration module and the micro-displacement error dynamic correction module respectively.

8. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 7, characterized in that, The specific process for adjusting the relevant parameters according to the magnitude of Δε is as follows: If Δε≤0.5nm, only the reference calibration coefficient k1 is adjusted; if 0.5nm<Δε≤2nm, k1 and the phase-locked loop voltage-micro-displacement conversion coefficient k2 are adjusted simultaneously; if Δε>2nm, in addition to adjusting k1 and k2, the varactor diode bias voltage of the phase-locked loop circuit is adjusted through the built-in signal conditioning unit.

9. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 1, characterized in that, It also includes an intelligent storage management module, which adopts a hierarchical storage structure, receives all data transmitted from each module, adds timestamps and sensor number tags to all data, and stores it in partitions according to "raw data - calibration parameters - verification results - adjustment parameters".

10. The automatic calibration management system for measurement accuracy applied to micro-displacement sensors according to claim 9, characterized in that, The intelligent storage management module is also used to analyze storage security and notify relevant administrators when storage risk warnings are generated. The specific analysis process is as follows: The corresponding storage devices are monitored, and the storage safety hazard value is calculated by weighting and summing the temperature safety hazard value, humidity safety hazard value, vibration safety hazard value and dust safety hazard value. If the storage safety hazard value exceeds the preset storage safety hazard threshold, a storage risk alarm signal is generated.

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