Sensor calibration device and substrate cleaning machine

Abstract

The invention provides a sensor calibration device and a substrate cleaning machine. The sensor calibration device comprises a supporting rod, a fixing rod, a sensor and an adjusting assembly. The supporting rod comprises a fixing end, a mounting end and a mounting channel linearly extending from the end face of the mounting end to the fixing end, and the fixing rod is inserted into the mounting channel and limited to linearly slide only in the extending direction of the mounting channel. The sensor is mounted at one end of the fixing rod extending out of the mounting channel. The adjusting assembly comprises an inner rotating part and an outer rotating part, outer threads are arranged on the periphery of the inner rotating part, an inner threaded hole is formed in the outer rotating part, and the inner threaded hole of the outer rotating part is matched with the outer threads of the inner rotating part. And the adjusting assembly is configured as follows: the inner rotating part is sleeved and fixed on the fixed rod, the outer rotating part is lapped on the end surface of the mounting end of the supporting rod, and the sensor is moved to an expected height through rotation of the outer rotating part and rotation feeding cooperation of the inner rotating part and the outer rotating part. According to the scheme, the height of the sensor can be adjusted in a rotary feeding mode, so that the mounting precision and calibration precision of the sensor are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of substrate cleaning equipment, in particular to a sensor calibration device and a substrate cleaning machine. BACKGROUND

[0002] In semiconductor manufacturing, substrate cleaning is a key link to ensure the yield of subsequent processes. The existing substrate cleaning equipment mainly removes contaminants such as particles, metal ions and organic matter on the substrate surface by physical and chemical means. Physical means: using a high-speed rotating brush head or high-pressure spraying to strip the particles under mechanical force. Chemical means: using acid, alkali or organic solvent to further dissolve the residual impurities to obtain an atomic clean surface.

[0003] To ensure that the brush head or nozzle and the substrate surface always maintain a constant and precise gap, the equipment is arranged with a vertical position substrate level sensor inside the machine. The sensor can feedback the substrate height, and the control system dynamically adjusts the vertical stroke accordingly, so as to avoid scratching due to too close distance, or causing cleaning dead angle due to too far distance.

[0004] However, in the substrate cleaning equipment, the traditional sensor fixing method has the following defects: long-term operation or machine vibration can easily cause the sensor to produce micro-drift in the height direction, causing detection error; after micro-drift occurs, the existing sensor mounting structure only reserves rough adjustment margin, and manual calibration needs to be repeated by repeatedly disassembling the sensor, which is tedious and inefficient, and the repeated disassembly by human beings can introduce secondary installation error, which is difficult to meet the strict requirements of advanced processes on the positioning accuracy of the sensor. SUMMARY

[0005] The purpose of the present application is to provide a sensor calibration device and a substrate cleaning machine, which can adjust the height of the sensor by rotating feeding, so as to improve the installation accuracy and calibration accuracy of the sensor on the substrate cleaning machine, and ensure the reliability and consistency of the substrate related process.

[0006] In a first aspect, a sensor calibration device is provided, comprising a support rod, a fixed rod, a sensor and an adjustment assembly.

[0007] The support rod comprises a fixed end, a mounting end and a mounting channel extending linearly from the mounting end end face to the fixed end, the fixed rod is inserted into the mounting channel and is limited to linear sliding along the extension direction of the mounting channel. The sensor is mounted at one end of the fixed rod extending out of the mounting channel. The adjustment assembly comprises an inner rotating piece and an outer rotating piece, the outer thread is arranged on the outer periphery of the inner rotating piece, the inner rotating piece is provided with an inner threaded hole, and the inner threaded hole of the outer rotating piece is matched with the outer thread of the inner rotating piece.

[0008] The adjusting assembly is configured as follows: the inner rotating part is sleeved and fixed on the fixed rod, and the outer rotating part is arranged on the end face of the mounting end of the support rod; the sensor is moved to the desired height by rotating the outer rotating part and through the rotation feeding cooperation of the inner rotating part and the outer rotating part.

[0009] In an embodiment, the cross-sectional shape of the fixed rod is the same as that of the mounting channel and is a polygon in nested cooperation.

[0010] In an embodiment, the inner rotating part of the sensor calibration device is in a cylindrical shape, and an outer thread is arranged on the outer periphery of the inner rotating part; the inner rotating part is provided with a rectangular slot penetrating in the axial direction and open on one side wall; three side walls of the rectangular slot are respectively provided with first jackscrew holes; and first jackscrews are arranged in the first jackscrew holes; at least one wall surface of the fixed rod is in abutment with the three side walls of the rectangular slot; and in use, the rectangular slot of the inner rotating part cooperates with the fixed rod, and the first jackscrews are tightened to tightly press the side wall of the fixed rod.

[0011] In an embodiment, the outer rotating part of the sensor calibration device comprises a first split part and a second split part; the first split part is provided with a first semicircular slot with an inner thread; and the second split part is provided with a second semicircular slot with an inner thread; after the first split part and the second split part are fixed in abutment, the first semicircular slot and the second semicircular slot are split to form an inner threaded hole.

[0012] In an embodiment, the side wall of the inner rotating part is provided with a plurality of shallow slots distributed along the circumferential direction, and each shallow slot extends in the axial direction; the first split part and / or the second split part are provided with second jackscrew holes penetrating into the inner threaded hole, and the second jackscrew holes are used to arrange second jackscrews; during the adjustment of the height of the sensor, the outer rotating part is rotated to lift the sensor to the desired height, and the second jackscrew holes are correspondingly arranged in one of the shallow slots; the front end of the second jackscrew penetrates through the second jackscrew hole and is screwed into the shallow slot to limit the relative rotation of the outer rotating part and the inner rotating part.

[0013] In an embodiment, the split end face of the first semicircular slot is provided with a recess, and the split end face of the second semicircular slot is provided with a protrusion; when the first semicircular slot and the second semicircular slot are split and abutted, the protrusion is inserted into the recess.

[0014] In an embodiment, the adjusting assembly further comprises a locking structure arranged on the side wall of the support rod, which is used to lock or release the position of the fixed rod in the mounting channel; after the adjusting assembly adjusts the sensor to the desired position, the locking structure is configured to lock the position of the fixed rod in the mounting channel.

[0015] In an embodiment, the locking structure comprises a fastening jackscrew; the side wall of the support rod close to the mounting end is provided with a fastening threaded hole penetrating into the inside of the mounting channel, and the fastening jackscrew is arranged in the fastening threaded hole.

[0016] In an implementable solution, the surface of the fixing rod is provided with first scale lines distributed along the axial direction thereof.

[0017] In an implementable solution, the locking structure comprises a locking screw; the sidewall of the support rod is provided with a guide groove extending along the axial direction and penetrating into the inside of the mounting channel; the bottom sidewall of the fixing rod is provided with a threaded hole; the locking screw is threadedly matched with the threaded hole through the guide groove.

[0018] In an implementable solution, the edge of the guide groove is provided with second scale lines distributed along the axial direction.

[0019] In an implementable solution, the pitch of the external thread of the inner rotating part is 0.4 mm, the pitch of the internal thread of the internal thread hole of the outer rotating part is 0.4 mm; when the outer rotating part rotates by 1 / 4 turn, the inner rotating part is raised or lowered by 0.1 mm.

[0020] The second aspect also provides a substrate cleaning machine comprising a machine table and the aforementioned sensor calibration device, wherein the sensor calibration device is mounted on the machine table.

[0021] Compared with the prior art, the beneficial effects of the present application at least include: when the sensor calibration device of the present application is used to calibrate the height of the sensor, the inner rotating part is sleeved and fixed on the fixing rod, the outer rotating part is arranged on the end face of the mounting end of the support rod, the outer rotating part is rotated by a predetermined angle, the inner rotating part is raised or lowered by rotating the outer rotating part through the cooperation of the external thread of the inner rotating part and the internal thread of the internal thread hole of the outer rotating part, the fixing rod is raised or lowered, and then the height of the sensor is adjusted, and the adjustment is completed after the desired height precision is reached. Due to the threaded cooperation adjustment of the outer rotating part and the inner rotating part, compared with the rough adjustment by manual disassembly and assembly, the rotation feeding precision is higher, and therefore the installation precision and calibration precision of the sensor on the substrate cleaning machine table can be improved, and the reliability and consistency of the substrate related process can be ensured. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0023] Figure 1 It is a perspective view of a first sensor calibration device shown in the embodiments of the present application.

[0024] Figure 2 It is a perspective view of a second sensor calibration device shown in the embodiments of the present application. Figure 1 It is a perspective view of the second sensor calibration device after removing the adjustment assembly.

[0025] Figure 3 is an exploded structural view of the adjustment assembly. Figure 2

[0026] Figure 4 is a partial enlarged view of A in the adjustment assembly. Figure 1

[0027] Figure 5 is an assembly view of the adjustment assembly.

[0028] Figure 6 is an exploded view of the adjustment assembly. Figure 5

[0029] Figure 7a and Figure 7b is a component structural view of the outer rotating member.

[0030] Figure 8 is a schematic view of setting a scale mark on the fixed rod.

[0031] Figure 9 is a perspective view of a second sensor calibration device shown in the embodiments of the present application.

[0032] Figure 10 is a perspective view of the sensor calibration device without the adjustment assembly in the adjustment assembly. Figure 9

[0033] is an exploded structural view of the adjustment assembly. Figure 11 Figure 10

[0034] Figure 12 is a schematic view of setting a scale mark on the support rod.

[0035] Figure 13 is a perspective view of a third sensor calibration device shown in the embodiments of the present application.

[0036] In the figure: 10, sensor calibration device; 1, support rod; 101, fixed end; 102, mounting end; 11, mounting channel; 12, guide groove; 13, second scale line; 2, fixed rod; 21, threaded hole; 22, first scale line; 3, locking structure; 31, fastening jackscrew; 32, locking screw; 4, sensor; 5, inner rotating member; 51, external thread; 52, rectangular groove; 53, first jackscrew; 54, shallow groove; 6, outer rotating member; 61, internal threaded hole; 62, second jackscrew; 601, first split member; 6011, first semicircular groove; 6012, recessed portion; 602, second split member; 6021, second semicircular groove; 6022, protruding portion. DETAILED DESCRIPTION

[0037] ​​​​​In order to make the purposes, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0039] As shown in Figures 1 to 4 The present embodiment first provides a sensor calibration device 10, which comprises a support rod 1, a fixed rod 2, a sensor 4, and an adjusting assembly.

[0040] The support rod 1 comprises a fixed end 101, a mounting end 102, and a mounting channel 11 extending linearly from the end face of the mounting end 102 to the fixed end 101. The fixed rod 2 is inserted into the mounting channel 11 and is limited to linear sliding along the extension direction of the mounting channel 11, and the sensor 4 is mounted at one end of the fixed rod 2 extending out of the mounting channel 11. It should be noted that “linear sliding along the extension direction of the mounting channel 11” means that the fixed rod 2 will not produce rotational displacement around the axis after being inserted into the mounting channel 11, and only has linear displacement in the axial direction. The sensor 4 can be a laser sensor, an ultrasonic sensor, etc.

[0041] The adjusting assembly comprises an inner rotating part 5 and an outer rotating part 6. The outer rotating part 5 is provided with an outer thread 51, the outer rotating part 6 is provided with an inner thread hole 61, and the inner thread hole 61 of the outer rotating part 6 cooperates with the outer thread 51 of the inner rotating part 5. The adjusting assembly is configured such that the inner rotating part 5 is sleeved and fixed on the fixed rod 2, the outer rotating part 6 is arranged on the end face of the mounting end 102 of the support rod 1, the sensor 4 is moved to the desired height by rotating the outer rotating part 6 and through the rotational feeding cooperation of the inner rotating part 5 and the outer rotating part 6.

[0042] It should be noted that the desired height of the sensor 4 is determined according to the actual application scene. When the sensor 4 is at the desired height, it can accurately feedback the height of the substrate, so that the control system dynamically adjusts the vertical stroke accordingly, thereby avoiding scratching due to too close distance or process dead angle due to too far distance.

[0043] In the embodiment, the outer thread 51 of the inner rotating part 5 and the inner thread of the inner threaded hole 61 of the outer rotating part 6 can be set to 0.4 mm, and when the outer rotating part 6 rotates 1 / 4 turn each time, the inner rotating part 5 can be raised or lowered by 0.1 mm, and since the inner rotating part 5 is fixedly sleeved with the fixed rod 2, the fixed rod 2 can be adjusted in the raising and lowering direction with a precision of 0.1 mm. In the embodiment, when the outer rotating part 6 rotates 1 / 2 turn each time, the fixed rod 2 can be adjusted in the raising and lowering direction with a precision of 0.2 mm. In the embodiment, in order to increase the adjustment precision of the sensor 4 height, the outer rotating part 6 can also be rotated 1 / 8 turn each time, and the fixed rod 2 can be adjusted in the raising and lowering direction with a precision of 0.05 mm. In other embodiments, other thread pitches and / or rotation numbers can also be designed according to the precision requirements. In the embodiment, the sensor calibration device of the embodiment further comprises a locking structure 3 arranged at the side wall of the support rod 1, which is used to lock or release the position of the fixed rod 2 in the mounting channel 11. After the locking structure 3 locks the fixed rod 2, the fixed rod 2 cannot slide in the mounting channel 11, and the position is locked. After the locking structure 3 releases the fixed rod 2, the fixed rod 2 can freely slide in the mounting channel 11.

[0044] Therefore, when the sensor height calibration is performed, the sensor calibration device of the embodiment can first release the fixed rod 2 through the locking structure 3, and then adjust the fixed rod 2 to be close to the target height. Then, the outer rotating part 6 is rotated, and the inner rotating part 5 is raised or lowered by rotating the outer rotating part 6 through the cooperation of the outer thread 51 of the inner rotating part 5 and the inner thread of the inner threaded hole 61 of the outer rotating part 6, and the fixed rod 2 is raised or lowered, thereby adjusting the height of the sensor 4 to the desired height precision, and then locking the position of the fixed rod 2 through the locking structure 3 to complete the adjustment. Since the outer rotating part 6 and the inner rotating part 5 are adjusted through the thread cooperation, compared with the rough adjustment by manual disassembly and assembly, the rotation feed precision is higher, and therefore the installation precision and calibration precision of the sensor 4 on the substrate cleaning machine can be improved, and the reliability and consistency of the substrate related process can be ensured.

[0045] In an embodiment, the cross-sectional shape of the fixed rod 2 and the cross-sectional shape of the mounting channel 11 are the same and nested polygonal shapes, so as to limit the fixed rod 2 to slide linearly along the extension direction of the mounting channel 11. For example, as shown in FIG. 1, the cross-sectional shape of the fixed rod 2 and the cross-sectional shape of the mounting channel 11 are both quadrilaterals. Alternatively, a guide strip in the axial direction can be arranged on the surface of the fixed rod 2, and a guide groove in the axial direction can be arranged in the mounting channel 11, and when the fixed rod 2 is inserted into the mounting channel 11, the guide strip cooperates with the guide groove to limit the fixed rod 2 to slide linearly along the extension direction of the mounting channel 11. Figure 3

[0046] ​In an embodiment, the inner rotating part 5 can be always sleeved on the fixed rod 2 and fastened by the top screw, and the outer rotating part 6 can also be always assembled with the inner rotating part 5. When the position of the inner rotating part 5 on the fixed rod 2 needs to be changed, the top screw is loosened to change the position of the inner rotating part 5 on the fixed rod 2.

[0047] In a preferred embodiment, the inner rotating part 5 and the outer rotating part 6 are preferably designed as a detachable structure.

[0048] Specifically, as shown in Figure 4 , Figure 5 and Figure 6 , the inner rotating part 5 is in a cylindrical shape, and an outer thread 51 is arranged on the outer periphery of the inner rotating part 5. The inner rotating part 5 is provided with a rectangular slot 52 which is axially through and has an open side wall on one side. Three side walls of the rectangular slot 52 are respectively provided with a first top screw hole, and a first top screw 53 is installed in the first top screw hole. At least one wall surface of the side wall of the fixed rod 2 is arranged to fit the three side walls of the rectangular slot 52. In use, the rectangular slot 52 of the inner rotating part 5 cooperates with the fixed rod 2, and the first top screw 53 is tightened to tightly fix the side wall of the fixed rod 2, thereby completing the installation of the inner rotating part 5 on the fixed rod 2.

[0049] Further, as shown in Figure 5 , Figure 6 , Figure 7a and Figure 7b , the outer rotating part 6 includes a first split part 601 and a second split part 602. The first split part 601 is provided with a first half-circular slot 6011 having an internal thread, and the second split part 602 is provided with a second half-circular slot 6021 having an internal thread. After the first split part 601 and the second split part 602 are fixed by the bolt and the threaded hole structure, the first half-circular slot 6011 and the second half-circular slot 6021 are split to form an internal thread hole 61.

[0050] It should be noted that the inner rotating part 5 and the outer rotating part 6 are designed as a detachable structure, which can be used for the adjustment of multiple sensors 4.

[0051] In an embodiment, as shown in Figure 5 and Figure 6 , the side wall of the inner rotating part 5 can be provided with a plurality of shallow grooves 54 distributed in the circumferential direction, and each shallow groove 54 extends in the axial direction. The first split part 601 and / or the second split part 602 is provided with a second top screw hole which penetrates into the internal thread hole 61, and the second top screw hole is used to install a second top screw 62. During the adjustment of the sensor height, the outer rotating part 6 is rotated to lift the sensor 4 to the desired height, and the second top screw hole is correspondingly positioned with one of the shallow grooves 54. The front end of the second top screw 62 penetrates through the second top screw hole and is screwed into the shallow groove 54 to limit the relative rotation of the outer rotating part 6 and the inner rotating part 5.

[0052] For example, in the non-use state, i.e. the inner sleeve 5 and the outer sleeve 6 are not installed on the fixed rod 2, the inner sleeve 5 and the outer sleeve 6 can be assembled together, and then the front end of the second jack screw 62 is screwed into the shallow groove 54 to prevent mutual rotation and separation of the two.

[0053] For example, in the non-use state, i.e. the inner sleeve 5 and the outer sleeve 6 are not installed on the fixed rod 2, the inner sleeve 5 and the outer sleeve 6 can be assembled together, and then the front end of the second jack screw 62 is screwed into the shallow groove 54 to prevent mutual rotation and separation of the two.

[0054] In an embodiment, as shown in Figure 7a and Figure 7b The split end surface of the first semicircular groove 6011 can be provided with a recess 6012, and the split end surface of the second semicircular groove 6021 can be provided with a protrusion 6022. When the first semicircular groove 6011 and the second semicircular groove 6021 are split and connected, the protrusion 6022 is inserted into the recess 6012. The provision of the protrusion 6022 and the recess 6012 can facilitate accurate alignment of the first split part 601 and the second split part 602, and reduce subsequent misalignment errors, to ensure the thread continuity of the inner threaded hole 61 after the first semicircular groove 6011 and the second semicircular groove 6021 are split.

[0055] In an embodiment, as shown in Figures 1 to 4 The locking structure 3 can include a fastening jack screw 31, and the side wall of the support rod 1 near the mounting end 102 is provided with a fastening threaded hole penetrating into the inside of the mounting channel 11, and the fastening jack screw 31 is installed in the fastening threaded hole. By rotating the fastening jack screw 31 in a first direction, the fastening jack screw 31 is screwed into the mounting channel 11 to tightly press the fixed rod 2, achieving position locking of the fixed rod 2 in the mounting channel 11. By rotating the fastening jack screw 31 in a second direction, the fastening jack screw 31 is screwed outwards to release the fixed rod 2, so that the fixed rod 2 can freely slide in the mounting channel 11.

[0056] The fastening jack screw 31 is loosened, and the fixed rod 2 is pulled to achieve rough height adjustment of the fixed rod 2. Then, after rough adjustment is completed, the fastening jack screw 31 is tightened. The inner sleeve 5 is sleeved on the fixed rod 2, the outer sleeve 6 is assembled on the inner sleeve 5, and the outer sleeve 6 is arranged on the end surface of the mounting end 102 of the support rod 1. Then, the first jack screw 53 on the inner sleeve 5 is tightened to tightly press the side wall of the fixed rod 2, completing the fixation of the inner sleeve 5 and the fixed rod 2. Then, the fastening jack screw 31 is loosened, the outer sleeve 6 is rotated, and the fixed rod 2 and the sensor 4 are precisely adjusted under the rotation feeding cooperation of the inner sleeve 5 and the outer sleeve 6. After being adjusted to the desired height, the fastening jack screw 31 is tightened, and then the outer sleeve 6 and the inner sleeve 5 are disassembled in sequence.

[0057] In an embodiment, as shown in Figure 8As shown, the surface of the fixing rod 2 can be provided with a first scale line 22 distributed along the axial direction thereof. Before the rotational feeding adjustment of the inner rotating part 5 and the outer rotating part 6, the height of the fixing rod 2 can be preliminarily and roughly adjusted by observing the first scale line 22.

[0058] In an embodiment, as shown in Figure 9 , Figure 10 and Figure 11 , the locking structure 3 can include a locking screw 32. The side wall of the support rod 1 can be provided with a guide groove 12 extending along the axial direction and penetrating into the inside of the mounting channel 11, and the bottom side wall of the fixing rod 2 is provided with a threaded hole 21, and the locking screw 32 is threadedly matched with the threaded hole 21 through the guide groove 12.

[0059] Wherein, the rough height adjustment of the fixing rod 2 is achieved by loosening the locking screw 32 and by rotating the locking screw 32. Then, after the rough adjustment is completed, the locking screw 32 is tightened. The inner rotating part 5 is sleeved on the fixing rod 2, the outer rotating part 6 is assembled on the inner rotating part 5, and the outer rotating part 6 is arranged on the end face of the mounting end 102 of the support rod 1. Then, the first jackscrew 53 on the inner rotating part 5 is tightened to tightly press the side wall of the fixing rod 2, and the fixing of the inner rotating part 5 and the fixing rod 2 is completed. Then, the locking screw 32 is loosened, the outer rotating part 6 is rotated, and the precise adjustment of the height of the fixing rod 2 and the sensor 4 is achieved through the rotational feeding cooperation of the inner rotating part 5 and the outer rotating part 6. After the height is adjusted to the desired height, the locking screw 32 is tightened, and then the outer rotating part 6 and the inner rotating part 5 are sequentially disassembled.

[0060] In an embodiment, as shown in Figure 12 , the second scale line 13 arranged in the axial direction can be arranged at the edge of the guide groove 12. Before the rotational feeding adjustment of the inner rotating part 5 and the outer rotating part 6, the height of the fixing rod 2 can be preliminarily and roughly adjusted by observing the relative position of the second scale line 13 and the locking screw 32.

[0061] In an embodiment, as shown in Figure 13 , the locking structure 3 can simultaneously include the aforementioned fastening jackscrew 31 and the locking screw 32, so that through the double locking structure, the micro-drift of the sensor 4 in the height direction is reduced as much as possible in the long-term operation or the vibration of the machine, so as to improve the position stability of the sensor 4.

[0062] In addition, the embodiment of the present application also provides a substrate cleaning machine, which includes a machine and the aforementioned sensor calibration device 10, and the sensor calibration device 10 is mounted on the machine.

[0063] The above merely provides part of embodiments of the present application but are not intended to limit the present application. Changes can be made for the embodiments of the present application by those skilled in the art without departing from the spirit and principle of the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall fall into the scope of protection of the present application.

Claims

1. A sensor calibration apparatus, characterized by, The utility model relates to a support rod (1) including a fixed end (101), a mounting end (102) and a mounting channel (11) extending linearly from the end face of the mounting end (102) to the fixed end (101), a fixed rod (2) inserted into the mounting channel (11) and limited to linear sliding along the extension direction of the mounting channel (11), a sensor (4) mounted at one end of the fixed rod (2) extending out of the mounting channel (11), an adjusting assembly including an inner rotating part (5) and an outer rotating part (6), the outer rotating part (6) is provided with an inner threaded hole (61), and the inner threaded hole (61) of the outer rotating part (6) is matched with the outer thread (51) of the inner rotating part (5), wherein the adjusting assembly is configured such that the inner rotating part (5) is sleeved and fixed on the fixed rod (2), the outer rotating part (6) is arranged on the end face of the mounting end (102) of the support rod (1), the sensor (4) is moved to a desired height by rotating the outer rotating part (6) and under the rotary feeding cooperation of the inner rotating part (5) and the outer rotating part (6). The cross-sectional shape of the fixed rod (2) and the cross-sectional shape of the mounting channel (11) are the same and nested polygonal. The inner rotating part (5) is cylindrical, the outer thread (51) is arranged on the outer periphery of the inner rotating part (5), the inner rotating part (5) is provided with a rectangular groove (52) penetrating in the axial direction and open on one side wall, and first jackscrews (53) are arranged in first jackscrew holes respectively arranged on three side walls of the rectangular groove (52). The side wall of the fixed rod (2) is provided with a wall surface matched with the three side walls of the rectangular groove (52). In use, the rectangular groove (52) of the inner rotating part (5) is matched with the fixed rod (2), and the first jackscrews (53) are tightened to tightly press the side wall of the fixed rod (2). The outer rotating part (6) includes a first split part (601) and a second split part (602), the first split part (601) is provided with a first semicircular groove (6011) with an inner thread, and the second split part (602) is provided with a second semicircular groove (6021) with an inner thread.

2. The sensor calibration device of claim 1, wherein, After the first split part (601) and the second split part (602) are fixed in abutment, the first semicircular groove (6011) and the second semicircular groove (6021) are split to form the inner threaded hole (61).

3. The sensor calibration device of claim 2, wherein, The side wall of the inner rotating part (5) is provided with a plurality of shallow grooves (54) distributed along the circumferential direction, and each shallow groove (54) extends in the axial direction. The first split part (601) and / or the second split part (602) are provided with a second jackscrew hole penetrating into the inner threaded hole (61), and the second jackscrew hole is used for mounting a second jackscrew (62). ​ 4. The sensor calibration device of claim 3, wherein, ​ ​ 5. The sensor calibration device of claim 4, wherein, ​ ​ During the adjustment of the sensor height, rotating the outer rotating part (6) makes the sensor (4) ascend or descend to the desired height, and makes the second set screw hole correspond to one of the shallow grooves (54) in position, the front end of the second set screw (62) passes through the second set screw hole and is screwed into the shallow groove (54) to limit the relative rotation of the outer rotating part (6) and the inner rotating part (5).

6. The sensor calibration device of claim 4, wherein, A recess (6012) is arranged on the spliced end face of the first semicircular groove (6011), and a protrusion (6022) is arranged on the spliced end face of the second semicircular groove (6021); When the first semicircular groove (6011) and the second semicircular groove (6021) are spliced and connected, the protrusion (6022) is inserted into the recess (6012).

7. The sensor calibration device of claim 1, wherein, The locking structure (3) is arranged on the side wall of the support rod (1) and is used for locking or releasing the position of the fixing rod (2) in the mounting channel (11); after the adjusting assembly adjusts the sensor (4) to the desired position, the locking structure (3) is configured to lock the position of the fixing rod (2) in the mounting channel (11).

8. The sensor calibration device of claim 7, wherein, The locking structure (3) comprises a fastening set screw (31). The side wall of the support rod (1) near the mounting end (102) is provided with a fastening threaded hole penetrating into the inside of the mounting channel (11), and the fastening set screw (31) is installed in the fastening threaded hole.

9. The sensor calibration device of claim 1, wherein, A first scale line (22) is arranged on the surface of the fixing rod (2) and is distributed along the axial direction.

10. The sensor calibration device of claim 7, wherein, The locking structure (3) comprises a locking screw (32). The side wall of the support rod (1) is provided with a guide groove (12) extending in the axial direction and penetrating into the inside of the mounting channel (11), and the bottom side wall of the fixing rod (2) is provided with a threaded hole (21); The locking screw (32) is screwed with the threaded hole (21) through the guide groove (12).

11. The sensor calibration device of claim 10, wherein, A second scale line (13) is arranged on the edge of the guide groove (12) and is distributed in the axial direction.

12. The sensor calibration device of claim 1, wherein, The pitch of the external thread (51) of the inner rotating part (5) is 0.4 mm, and the pitch of the internal thread of the internal threaded hole (61) of the outer rotating part (6) is 0.4 mm; when the outer rotating part (6) rotates 1 / 4 turn, the inner rotating part (5) is raised or lowered by 0.1 mm.

13. A substrate cleaning machine, characterized by, The sensor calibration device comprises a machine table and a sensor calibration device as claimed in any one of claims 1-12, and the sensor calibration device is installed on the machine table.

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