Metal ceramic package shell push-pull force test device

Abstract

The present application relates to push-pull force testing machine technical field, specifically disclose a kind of metal ceramic packaging shell push-pull force testing device, comprising: push-pull force testing machine, push cutter mechanism and calibration mechanism, push cutter mechanism is set in the middle of push-pull force testing machine, calibration mechanism is set in the middle of the front side of push-pull force testing machine, the push cutter mechanism includes: installation cylinder, moving groove, positioning sliding slot, push cutter, probe, first spring, first rack, positioning assembly and stroke detection component.This device fundamentally overcomes artificial operation dependence, positioning accuracy and repeatability is difficult to guarantee, cannot be diagnosed in line test posture and equipment state is difficult to maintain etc. Core shortcomings, thereby significantly improve the accuracy, efficiency, consistency and long-term reliability of metal ceramic packaging shell push-pull force test.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of push-pull force testing machines, in particular to a metal ceramic packaging shell push-pull force testing device. BACKGROUND

[0002] Metal ceramic packaging shells are widely used in aerospace, national defense electronics, high-end optoelectronic devices, and high-power semiconductors due to their excellent airtightness, high thermal conductivity, and outstanding high-frequency performance. To ensure the mechanical integrity of the internal structure of the packaging (such as the adhesion of the chip to the shell base and the sealing of the pins to the ceramic body) in long-term service environments, strict push-pull force testing must be performed on the packaging shell. This test aims to quantitatively evaluate the bonding strength of the solder joints, adhesive layers, or sealing interfaces by applying a controllable push or pull force to the specified location. It is a core quality assurance method for eliminating process defects, optimizing manufacturing parameters, and predicting long-term reliability.

[0003] The existing metal ceramic packaging shell push-pull force testing device is typically composed of a precision mechanical sensor, a high-rigidity transmission mechanism, a visual alignment system, and a special testing tool (such as a push knife). Its basic working principle is as follows: the measured shell is fixed on a clamp, guided by a visual system (such as a microscope or a CCD camera), and the operator manually aligns the tip of the push knife with the side edge of the chip to be tested. Then, the driving mechanism pushes the push knife to move in the pre-set direction (usually horizontal), making it contact and push the chip until the adhesive layer between the chip and the base fails in shear. In this process, the mechanical sensor records the changes in push force and displacement in real time, and the final peak force value is the key indicator of the adhesive strength.

[0004] In chip push force testing, to accurately evaluate the shear strength of solder or adhesive, the push knife is required to apply a push force to the chip side in a completely horizontal direction, and the action point height should be strictly located at the designed position of the chip and base adhesive interface. The push force direction should be completely horizontal to ensure that the force is purely shear force, avoiding the generation of non-axial force components that lift or press the chip. However, in actual equipment, due to the cumulative errors of mechanical transmission chains (such as lead screws and guide rails), the parallelism deviation of moving parts, and the slight deformation of the equipment rack during long-term use, the actual motion trajectory of the push knife is difficult to maintain absolute parallelism with the ideal horizontal plane. In addition, the installation inclination of the measured metal ceramic shell in the clamp also introduces an angle deviation. These factors together result in a small angle between the push force direction and the horizontal plane, generating a vertical component force. For high-precision testing, this non-axial force component will interfere with the measurement of the true shear force, causing the measured force value to deviate from the theoretical value and affecting the accurate judgment of the adhesive strength.

[0005] More importantly, the accurate height position of the pusher on the side of the chip is one of the decisive parameters affecting the effectiveness of the test results. If the pusher is too low (too close to the bottom of the chip), the pusher will press and even scratch the lower packaging base during the shearing process, resulting in abnormal friction resistance, which will make the measured push force value too high and cannot truly reflect the strength of the bonding interface. On the contrary, if the pusher is too high (too close to the top of the chip), it may not effectively act on the entire area of the bonding layer, or even cause the pusher to slip off the top of the chip, resulting in invalid test or low measured force value that cannot represent the complete bonding strength. Therefore, accurately positioning the tip of the pusher to a preset and constant height relative to the bottom surface of the packaging cavity before testing is a necessary condition to ensure the accuracy, effectiveness and repeatability of the test results.

[0006] The metal ceramic packaging shell push-pull force test device in the prior art has the following significant deficiencies when dealing with the above challenges: first, the device generally lacks online and real-time pusher verticality detection and feedback mechanism, and the operator usually relies on factory calibration and static leveling of the device, which cannot timely diagnose and correct the angle deviation caused by mechanical deformation or sample clamping before each test, so that the interference of non-axial force component cannot be identified and eliminated at the source; second, the height positioning of the pusher is extremely dependent on manual operation and experience, and the operator needs to manually adjust the falling position of the pusher through the microscope visual system to make the relative relationship between the pusher and the side of the chip and the bottom surface of the cavity meet the requirements. This process is not only low in efficiency, but also easily affected by subjective judgment of the operator, visual fatigue and environmental light, and it is difficult to ensure the height consistency of each positioning, thereby directly leading to the increase of dispersion of test results and the decrease of repeatability. SUMMARY

[0007] The purpose of the present application is to solve the problems of inaccurate height positioning of the pusher and low efficiency caused by relying on manual alignment, and the interference of non-axial force component affecting the test accuracy caused by the lack of online verticality detection, and a metal ceramic packaging shell push-pull force test device is proposed.

[0008] To achieve the above purpose, the present application provides the following technical scheme: a metal ceramic packaging shell push-pull force test device, comprising: a push-pull force testing machine, a pusher mechanism and a calibration mechanism, the pusher mechanism is arranged in the middle of the push-pull force testing machine, and the calibration mechanism is arranged in the middle of the front side of the push-pull force testing machine.

[0009] The push knife mechanism comprises a mounting cylinder, a moving groove, a positioning sliding groove, a push knife, a probe, a first spring, a first rack, a positioning assembly and a stroke detection assembly, the mounting cylinder is detachably arranged in the middle of the push-pull force testing machine, the inner cavity of the mounting cylinder is provided with an up-down penetrating moving groove in the middle, the inner cavity of the moving groove is provided with up-down penetrating positioning sliding grooves on the left and right sides in the up-down direction, the push knife is arranged in the middle of the bottom end of the mounting cylinder, the probe is slidably and adaptively inserted into the inner cavity of the mounting cylinder at the rear side, the bottom end of the probe is slidably extended out of the bottom end of the mounting cylinder, the bottom end of the probe is below the bottom end of the push knife, the first spring is sleeved on the outer wall of the probe, the bottom end of the first spring is clamped on the outer wall of the probe, the top end of the first spring is clamped on the inner wall of the mounting cylinder, the first rack is arranged at the top end of the probe, the positioning assembly is arranged in the inner cavity of the mounting cylinder, and the stroke detection assembly is arranged in the inner cavity of the mounting cylinder.

[0010] Further, the positioning assembly comprises a gear, a second rack, a sliding groove and a positioning sliding block, the gear is rotatably arranged in the inner cavity of the mounting cylinder at the top by a connecting shaft, the gear is engaged with the first rack, the outer wall of the second rack is slidably and adaptively inserted into the inner cavity of the moving groove in the middle, the second rack is engaged with the gear, the front side of the second rack is provided with a sliding groove in the up-down direction, the number of the positioning sliding blocks is two, and the two positioning sliding blocks are arranged on the left and right sides of the second rack, respectively, and the outer walls of the two positioning sliding blocks are slidably and adaptively inserted into the inner cavities of the two positioning sliding grooves, respectively.

[0011] Further, the positioning assembly further comprises an electric telescopic rod, a first light shield, a first photoelectric switch and a first receiver, the electric telescopic rod is arranged at the top front side of the second rack, the front side of the first light shield is slidably and adaptively inserted into the inner cavity of the sliding groove, the bottom end of the first light shield is slidably extended out of the inner cavity of the sliding groove, the top end of the first light shield is arranged at the bottom end of the electric telescopic rod, the first photoelectric switch is arranged at the bottom end of the inner cavity of the mounting cylinder, the first photoelectric switch is electrically connected with the push-pull force testing machine, the first receiver is arranged at the bottom end of the inner cavity of the mounting cylinder, the signal receiving end of the first receiver and the signal emitting end of the first photoelectric switch are in position correspondence, and the first light shield is between the first photoelectric switch and the first receiver.

[0012] Further, according to the thickness of the test object, the first light shield is driven by the electric telescopic rod to slide along the sliding groove, and the distance between the bottom end of the push knife and the inner cavity bottom end of the metal ceramic package shell is preset.

[0013] Further, the stroke detection assembly comprises a first guide rod, a first contact, a linear stroke sensor, a connecting plate, a second spring and a second contact. The first guide rod is arranged at the top end of the first rack. The first contact is arranged at the top end of the first rack. The linear stroke sensor is arranged at the top rear side of the inner cavity of the mounting cylinder. The linear stroke sensor is electrically connected with the push-pull force testing machine. The connecting plate is arranged at the top end of the linear stroke sensor. The connecting plate is slidably and adaptively fitted on the outer wall top end of the first guide rod. The second spring is fitted on the outer wall top end of the linear stroke sensor. The bottom end of the second spring is clamped on the outer wall of the linear stroke sensor. The top end of the second spring is clamped on the bottom end of the connecting plate. The second contact is arranged at the bottom end of the connecting plate. The second contact corresponds to the position of the first contact. The second contact is electrically connected with the linear stroke sensor.

[0014] Further, the bottom end of the probe is adaptively and rollably inserted with a ball.

[0015] Further, the vertical state of the push knife and the metal ceramic packaging shell is determined by detecting the displacement of the upward movement of the probe and the displacement of the downward movement of the mounting cylinder through the linear stroke sensor.

[0016] Further, the calibration mechanism comprises a main frame, a second light shield, a through hole, a pressing plate, a second guide rod, a third spring, a second photoelectric switch and a second receiver. The main frame is detachably arranged at the front middle part of the push-pull force testing machine. The second light shield is slidably and adaptively inserted into the inner cavity of the main frame. The bottom end of the second light shield is slidably extended out of the bottom end of the main frame. The front and rear through hole is arranged at the top front side of the second light shield. The pressing plate is arranged at the top end of the second light shield. The position of the pressing plate corresponds to the position of the push knife. The number of the second guide rod is two. The two second guide rods are respectively arranged at the left and right middle parts of the pressing plate. The bottom end of the two second guide rods is slidably extended out of the bottom end of the main frame. The third spring is fitted on the outer wall of the second guide rod. The bottom end of the third spring is clamped on the inner cavity bottom end of the main frame. The top end of the third spring is clamped on the bottom end of the pressing plate. The second photoelectric switch is arranged at the inner cavity bottom front side of the main frame. The position of the second photoelectric switch corresponds to the position of the through hole. The distance between the emitter of the second photoelectric switch and the through hole is equal to the distance between the bottom end of the probe and the bottom end of the push knife. The second receiver is arranged at the inner cavity bottom rear side of the main frame. The position of the second receiver corresponds to and matches the position of the second photoelectric switch. The pressure sensor is arranged at the top middle part of the main frame. The position of the pressure sensor corresponds to the position of the probe. The distance between the top end of the pressure sensor and the top end of the pressing plate is equal to the distance between the bottom end of the probe and the bottom end of the push knife.

[0017] Further, the outer wall of the main frame is further provided with a warning light. The warning light is electrically connected with the second photoelectric switch.

[0018] Further, after the push-pull force testing machine drives the installation cylinder to move downward to contact the pressure sensor and the pressing plate respectively by the probe and the pusher, the installation cylinder continues to move downward by a specified distance, and whether the second photoelectric switch and the second receiver are collinear with the through hole is judged by whether the warning light is on or not, so as to calibrate the distance between the bottom of the probe and the pusher.

[0019] Compared with the prior art, the application has the following beneficial effects:

[0020] (1) The first light shield with a preset position is linked with the photoelectric switch, so that the preset of the stop point of the pusher is realized, and the initial distance between the bottom of the pusher and the bottom of the packaging cavity can be quickly and accurately set according to different chip thicknesses or test specifications without repeated manual adjustment, thereby improving the efficiency and standardization of test setting.

[0021] (2) The probe contacts the surface of the measured object before the pusher, the linear stroke sensor is used to measure the upward displacement of the probe in real time, and the displacement of the downward instruction of the host is compared, so that whether the pusher axis is perpendicular to the measured surface before the push force is applied can be detected in real time and quantitatively, thereby identifying and warning the non-axial force interference caused by clamping inclination or mechanical deviation at the source, ensuring the purity of the test force and improving the effectiveness and accuracy of the data.

[0022] (3) The vertical displacement of the probe is converted into the synchronous movement of the second rack through the gear and rack transmission mechanism, so that when the first light shield is moved downward to block the photoelectric switch, the host immediately stops moving, and the physical contact event is converted into an accurate electrical signal stop instruction, the automatic and highly repeatable positioning of the test starting point is realized, the influence of manual visual alignment error and transmission mechanism idle stroke is completely eliminated, and the consistency of the starting condition of each test is ensured.

[0023] (4) The independent calibration mechanism can simultaneously calibrate the fixed distance between the pusher and the probe by using the pressure sensor and the second photoelectric switch, and provides a convenient and reliable self-calibration method, which can periodically verify and maintain the accuracy of the core geometric parameters, effectively compensate for the mechanical wear or drift caused by long-term use, and ensure the stability and reliability of long-term measurement of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort based on these drawings.

[0025] Figure 1 It is a structural schematic diagram of the present application;

[0026] Figure 2 It is a structural schematic diagram of the push knife mechanism;

[0027] Figure 3 It is a structural schematic diagram of the inner cavity of the mounting cylinder;

[0028] Figure 4 It is an exploded view of the push knife mechanism;

[0029] Figure 5 It is a structural schematic diagram of the calibration mechanism;

[0030] Figure 6 It is an exploded view of the calibration mechanism;

[0031] Figure 7 It is an enlarged view of A of Figure 4 ;

[0032] Figure 8 It is an enlarged view of B of Figure 4 ;

[0033] Figure 9 It is an enlarged view of C of Figure 4 ;

[0034] Figure 10 It is an enlarged view of D of Figure 4 .

[0035] The components represented by the respective numbers in the drawings are listed as follows: 1, push-pull force testing machine; 2, push knife mechanism; 201, mounting cylinder; 202, moving groove; 203, positioning sliding groove; 204, push knife; 205, probe; 206, first spring; 207, ball; 208, first rack; 209, first guide rod; 210, first contact point; 211, linear stroke sensor; 212, connecting plate; 213, second spring; 214, second contact point; 215, gear; 216, second rack; 217, sliding groove; 218, positioning sliding block; 219, electric telescopic rod; 220, first light shield; 221, first photoelectric switch; 222, first receiver; 3, calibration mechanism; 301, main frame; 302, second light shield; 303, penetrating hole; 304, pressing plate; 305, second guide rod; 306, third spring; 307, second photoelectric switch; 308, second receiver; 309, pressure sensor. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work are within the protection scope of the present application.

[0037] Reference Figures 1-10 A cermet packaging shell push-pull force test device includes a push-pull force testing machine 1, a push knife mechanism 2 and a calibration mechanism 3. The push-pull force testing machine 1 is a prior art, which is the power and control core of the device. The push-pull force testing machine 1 is internally integrated with a precision driving system and a high-resolution mechanical sensor, which is used to provide stable and controllable linear motion for the testing process, and to accurately collect and record the force value and displacement data in real time during the testing process. The push knife mechanism 2 is arranged at the middle part of the push-pull force testing machine 1. The push knife mechanism 2 is a key functional module for performing testing. The core function of the push knife mechanism 2 is to realize automatic and accurate positioning of the measured object, real-time perpendicularity judgment, and to ensure that the push knife starts to apply testing force at the preset accurate height. The calibration mechanism 3 is arranged at the front middle part of the push-pull force testing machine 1. The calibration mechanism 3 is an auxiliary calibration module for ensuring the long-term measurement accuracy of the device. The main function of the calibration mechanism 3 is to periodically and quickly verify and calibrate the fixed distance between the bottom end of the push knife 204 and the bottom end of the probe 205 in the push knife mechanism 2, and to calibrate the trigger force of the probe, so as to ensure the accuracy of the reference of the entire testing system and the consistency of the results.

[0038] Specifically, the push knife mechanism 2 comprises: a mounting cylinder 201, a moving groove 202, a positioning sliding groove 203, a push knife 204, a probe 205, a first spring 206, a ball 207, a first rack 208, a positioning assembly and a stroke detection assembly. The mounting cylinder 201 is detachably arranged in the middle of the push-pull force testing machine 1. The inner cavity of the mounting cylinder 201 is provided with an up-down penetrating moving groove 202 in the middle. The inner cavity of the moving groove 202 is provided with up-down penetrating positioning sliding grooves 203 on the left and right sides in the up-down direction. The mounting cylinder 201 is the core support and installation base of the push knife mechanism 2, which is directly connected with the push-pull force testing machine 1. The push knife 204 is arranged in the middle of the bottom end of the mounting cylinder 201. The push knife 204 is a rigid tool for final execution of the shear test. The probe 205 is slidably and adaptively inserted into the inner cavity of the mounting cylinder 201. The bottom end of the probe 205 is slidably extended out of the bottom end of the mounting cylinder 201. The bottom end of the probe 205 is below the bottom end of the push knife 204. The distance from the bottom end of the probe 205 to the bottom end of the push knife 204 is known and fixed. The probe 205 is a core sensing component for realizing pre-contact and position sensing. The first spring 206 is sleeved on the outer wall of the probe 205. The bottom end of the first spring 206 is clamped to the outer wall of the probe 205. The top end of the first spring 206 is clamped to the inner wall of the mounting cylinder 201. The first spring 206 is a rotary spring which is elastically deformed after being extruded or stretched by external force and returns to the initial state after the external force is removed. The first spring 206 can provide a reset elastic force for the probe 205 and buffer the impact in the instant of contact, thereby protecting the precision components. The ball 207 is rollably and adaptively inserted into the bottom end of the probe 205. The ball 207 can convert the sliding friction of the bottom end of the probe 205 with the surface of the measured object into rolling friction, greatly reducing the contact resistance, avoiding scratching the measured object and ensuring the sensitivity and accuracy of displacement feedback. The first rack 208 is arranged at the top end of the probe 205. The first rack 208 can directly convert the vertical linear motion of the probe 205 into the input of the gear 215 transmission, which is the starting key component of mechanical motion conversion and transmission. The positioning assembly is arranged in the inner cavity of the mounting cylinder 201. The core function of the positioning assembly is to accurately convert the vertical displacement of the probe 205 into the linear motion of the second rack 216 through the gear and rack transmission, and finally realize the end positioning and control of the test stroke. The stroke detection assembly is arranged in the inner cavity of the mounting cylinder 201. The core function of the stroke detection assembly is to accurately and real-timely measure the actual rising displacement of the probe 205 when it is lifted up. This displacement is the direct original data for calculating the perpendicularity of the push knife 204.

[0039] Specifically, the positioning assembly comprises a gear 215, a second rack 216, a sliding groove 217, a positioning slider 218, an electric telescopic rod 219, a first light shield 220, a first photoelectric switch 221 and a first receiver 222. The gear 215 is rotatably arranged at the top of the inner cavity of the mounting cylinder 201 through a connecting shaft. The gear 215 is engaged with the first rack 208. The gear 215 is a core transmission part for motion conversion. The outer wall of the middle part of the second rack 216 is slidably and adaptively inserted into the inner cavity of the moving groove 202. The second rack 216 is engaged with the gear 215. The front side of the second rack 216 is provided with the sliding groove 217 in the up-down direction. The second rack 216 is an execution part for motion transmission and positioning, which can convert the rotary motion of the gear 215 into the vertical linear motion of the second rack 216 along the moving groove 202 again, realizing the secondary conversion and transmission of the motion direction. The number of the positioning sliders 218 is two. The two positioning sliders 218 are arranged on the left and right sides of the second rack 216 respectively. The outer walls of the middle parts of the two positioning sliders 218 are slidably and adaptively inserted into the inner cavities of the two positioning sliding grooves 203 respectively. The positioning sliders 218 can ensure that the second rack 216 does not deflect or shake during the motion process, but only moves along a strict vertical track, thereby ensuring the accuracy of the end positioning. The electric telescopic rod 219 is arranged at the top front side of the second rack 216. The electric telescopic rod 219 is a prior art. The electric telescopic rod 219 is a programmable micro linear driver. According to the thickness of the test object, the first light shield 220 is driven to slide along the sliding groove 217 by the electric telescopic rod 219. The distance between the bottom end of the preset push knife 204 and the bottom end of the inner cavity of the metal ceramic packaging shell is preset, so as to flexibly and accurately preset the stroke end position of the push knife. The front side of the first light shield 220 is slidably and adaptively inserted into the inner cavity of the sliding groove 217. The bottom end of the first light shield 220 is slidably extended out of the inner cavity of the sliding groove 217. The top end of the first light shield 220 is arranged at the bottom end of the electric telescopic rod 219. The first light shield 220 is a photoelectric control trigger part for shielding light, thereby generating a positioning control signal. The first photoelectric switch 221 is arranged at the bottom end of the inner cavity of the mounting cylinder 201. The first photoelectric switch 221 is electrically connected with the push-pull force testing machine 1. The first photoelectric switch 221 is a prior art. The first receiver 222 is arranged at the bottom end of the inner cavity of the mounting cylinder 201. The signal receiving end of the first receiver 222 corresponds to the signal transmitting end of the first photoelectric switch 221 in position. The first light shield 220 is located between the first photoelectric switch 221 and the first receiver 222. The first receiver 222 is a prior art, which will not be described in detail. The first receiver 222 and the first photoelectric switch 221 constitute a reflective photoelectric sensor, which can accurately trigger an instruction to immediately stop driving downward, thereby realizing automatic positioning.

[0040] Specifically, the stroke detection assembly comprises a first guide rod 209, a first contact 210, a linear stroke sensor 211, a connecting plate 212, a second spring 213 and a second contact 214. The first guide rod 209 is arranged at the top end of the first rack 208, and can provide accurate vertical guidance for the connecting plate 212, ensuring that the movement axis of the connecting plate 212 is strictly consistent with the movement axis of the first rack 208, avoiding lateral deviation and introducing measurement errors. The first contact 210 is arranged at the top end of the first rack 208, and is one electrode of a circuit switch. When in contact with the second contact 214, it will connect the starting circuit of the linear stroke sensor 211. The linear stroke sensor 211 is arranged at the top rear side of the inner cavity of the mounting cylinder 201, and is electrically connected with the push-pull force testing machine 1. The linear stroke sensor 211 is a prior art, which detects the upward displacement of the probe 205 and compares it with the downward displacement of the mounting cylinder 201 to determine the vertical state of the push knife 204 and the metal ceramic packaging shell. The linear stroke sensor 211 can measure the absolute displacement of its top end relative to the body in real time with a resolution of microns, and transmit the data to the control system of the push-pull force testing machine 1 in real time. The connecting plate 212 is arranged at the top end of the linear stroke sensor 211, and is slidably fitted on the top end of the outer wall of the first guide rod 209. The connecting plate 212 is a bridge for displacement transmission and electrical connection. The second spring 213 is sleeved on the top end of the outer wall of the linear stroke sensor 211, the bottom end of the second spring 213 is clamped on the outer wall of the linear stroke sensor 211, and the top end of the second spring 213 is clamped on the bottom end of the connecting plate 212. The second spring 213 is a rotary spring, which can elastically deform after being pressed or stretched by external force, and return to the initial state after the external force is removed. The second spring 213 can provide a flexible and constant pre-tightening force for the linear stroke sensor 211. The second contact 214 is connected to the bottom end of the connecting plate 212, and the positions of the second contact 214 and the first contact 210 correspond to each other. The second contact 214 is electrically connected with the linear stroke sensor 211, and is the other electrode of the circuit switch.

[0041] Specifically, the calibration mechanism 3 comprises a main frame 301, a second light shield 302, a penetration hole 303, a pressing plate 304, a second guide rod 305, a third spring 306, a second photoelectric switch 307 and a second receiver 308. The main frame 301 is detachably arranged at the middle part of the front side of the push-pull force testing machine 1. The outer wall of the main frame 301 is provided with warning lights. The main frame 301 is a rigid support base and a shell of the calibration mechanism 3. The warning lights integrated on the outer wall of the main frame 301 are used to provide intuitive calibration state indication. The second light shield 302 is slidably and adaptively inserted into the inner cavity of the main frame 301. The bottom end of the second light shield 302 slidably extends out of the bottom end of the main frame 301. The front side top part of the second light shield 302 is provided with a front and rear penetrating hole 303. The penetration hole 303 on the top part of the second light shield 302 is a precise positioning light transmission hole. The position accuracy of the penetration hole 303 directly determines the accuracy of distance calibration. The pressing plate 304 is arranged at the top end of the second light shield 302. The position of the pressing plate 304 corresponds to the position of the push knife 204. The number of the second guide rods 305 is two. The two second guide rods 305 are respectively arranged at the left and right middle parts of the pressing plate 304. The bottom ends of the two second guide rods 305 are slidably extended out of the bottom end of the main frame 301. The second guide rods 305 can ensure that the combined body of the pressing plate 304 and the second light shield 302 can only smoothly slide in a strictly vertical direction when being stressed, preventing any lateral deviation from affecting the calibration accuracy. The third spring 306 is sleeved on the outer wall of the second guide rod 305. The bottom end of the third spring 306 is clamped to the bottom end of the inner cavity of the main frame 301. The top end of the third spring 306 is clamped to the bottom end of the pressing plate 304. The third spring 306 is a rotary spring. After being extruded or stretched by external force, the third spring 306 elastically deforms. After the external force is removed, the third spring 306 returns to the initial state. The third spring 306 can provide the pressing plate 304 with constant upward reset elastic force, automatically resets the pressing plate 304 after calibration, and provides buffering and stable support force during the calibration pressing process. The second photoelectric switch 307 is arranged at the front side of the bottom end of the inner cavity of the main frame 301. The position of the second photoelectric switch 307 corresponds to the position of the penetration hole 303. The warning lights and the second photoelectric switch 307 are electrically connected. The distance between the emitter of the second photoelectric switch 307 and the penetration hole 303 is equal to the distance between the bottom end of the probe 205 and the bottom end of the push knife 204. The second photoelectric switch 307 is a prior art. The second receiver 308 is arranged at the rear side of the bottom end of the inner cavity of the main frame 301. The position of the second receiver 308 corresponds to and matches the position of the second photoelectric switch 307. The second receiver 308 is a prior art. The second receiver 308 and the second photoelectric switch 307 constitute a reflection type photoelectric sensor. The pressure sensor 309 is arranged at the middle part of the top end of the main frame 301. The position of the pressure sensor 309 corresponds to the position of the probe 205. The distance between the top end of the pressure sensor 309 and the top end of the pressing plate 304 is equal to the distance between the bottom end of the probe 205 and the bottom end of the push knife 204. The pressure sensor 309 is a prior art.The pressure sensor 309 can accurately sense and measure the tiny pressure generated when the probe 205 contacts. After the push-pull force testing machine 1 drives the installation cylinder 201 to move downward to contact the pressure sensor 309 and the pressing plate 304 respectively, the probe 205 and the push knife 204 continue to move downward by a specified distance. Whether the second photoelectric switch 307 and the second receiver 308 are collinear with the through hole 303 is judged by whether the warning light is on or off, and then the distance between the bottom of the probe 205 and the push knife 204 is calibrated.

[0042] Working principle:

[0043] Step one, when in use, first, the calibration mechanism 3 is detached from the push-pull force testing machine 1, the clamp is fixed on the push-pull force testing machine 1, the metal ceramic packaging shell that needs to be tested is fixed on the clamp, and the metal ceramic packaging shell is ensured to be in a horizontal state. The first contact 210 is connected with the external power supply. Since the distance between the bottom of the probe 205 and the bottom of the push knife 204 is known and fixed, the distance between the bottom of the push knife 204 and the bottom of the inner cavity of the metal ceramic packaging shell can be adjusted according to the thickness of the test object such as the chip installed in the inner cavity of the metal ceramic packaging shell. Start the electric telescopic rod 219, and use the electric telescopic rod 219 to push the first light shield 220 to slide up and down along the inner cavity of the sliding groove 217 until the bottom of the first light shield 220 extends out of the bottom of the second rack 216 by an appropriate length.

[0044] Step two, the installation cylinder 201 drives the push knife 204 and the probe 205 to move by the push-pull force testing machine 1, until the installation cylinder 201 drives the push knife 204 to move to the appropriate position, then the push-pull force testing machine 1 drives the push knife 204 to move downward, because the bottom end of the probe 205 is below the bottom end of the push knife 204, and then with the downward movement of the installation cylinder 201, the bottom end of the probe 205 will first contact the inner cavity bottom end of the metal ceramic packaging shell, the installation cylinder 201 continues to move downward, and then the inner cavity bottom end of the metal ceramic packaging shell will push the probe 205 to slide upward along the inner cavity of the installation cylinder 201, the probe 205 sliding upward along the inner cavity of the installation cylinder 201 will extrude the first spring 206 to elastically deform, and drive the first rack 208 to move upward, the first rack 208 moving upward will drive the gear 215 to rotate and drive the second rack 216 to move downward along the inner cavity of the moving slot 202, at the same time, the first rack 208 moving upward will drive the first guide rod 209 and the first contact 210 to move upward, the first guide rod 209 moving upward will cause the connecting plate 212 to slide downward along the outer wall of the first guide rod 209, until the first contact 210 and the second contact 214 are in contact, at this time the circuit is connected, and then the linear displacement sensor 211 is started, at this time the probe 205 continues to push the first rack 208 to move upward, which can drive the connecting plate 212 to move upward by the first rack 208, and stretch the second spring 213 to elastically deform, at the same time, the linear displacement sensor 211 can detect the distance value of the top end moving, and compare the distance value of the top end moving detected by the linear displacement sensor 211 with the distance value of the installation cylinder 201 moving downward driven by the push-pull force testing machine 1, because when the probe 205 axis is not perpendicular to the metal ceramic packaging shell (there is an angle θ), the installation cylinder 201 moves downward along its axis direction ΔL, the upward movement amount ΔH of the probe 205 (in the vertical direction) will satisfy the relationship: ΔH=ΔL×cosθ, as long as θ≠0, ΔH<ΔL, therefore when ΔH=ΔL, it can be determined that the push knife 204 is perpendicular to the metal ceramic packaging shell, when ΔH<ΔL, it can be determined that the push knife 204 is not perpendicular to the metal ceramic packaging shell, by comparing the downward movement instruction displacement (ΔL) of the installation cylinder 201 with the actual upward displacement (ΔH) of the probe 205 in real time, the non-perpendicular state and its severity can be directly and quantitatively detected;

[0045] Step three, when detecting the push knife 204 and metal ceramic package shell in the vertical state, the installation cylinder 201 continues to move down, so as to make the probe 205 push the first rack 208 to move up, and then the first shutter 220 can be driven to move down through the gear 215, until the first shutter 220 moves to between the first photoelectric switch 221 and the first receiver 222, the first photoelectric switch 221 can be shielded by the first shutter 220, so that the first receiver 222 can prevent receiving the signal emitted by the first photoelectric switch 221, at this time the push-pull force testing machine 1 stops driving the installation cylinder 201 to move down, at this time the distance between the bottom end of the push knife 204 and the bottom end of the metal ceramic package shell inner cavity is the set distance, so that the push knife 204 can test the chip and other test objects in the metal ceramic package shell inner cavity by push force, when the test is completed, the opposite direction movement as above can make the device restore to the initial state;

[0046] Step four, when the device is used for a period of time, the distance between the bottom end of the probe 205 and the bottom end of the push knife 204 needs to be detected and calibrated, the calibration mechanism 3 is horizontally installed at the front side of the middle part of the push-pull force testing machine 1, and the main frame 301 is located below the push knife 204, the position of the probe 205 corresponds to the position of the pressure sensor 309, the position of the pressing plate 304 corresponds to the position of the push knife 204, the installation cylinder 201 is driven downward by the push-pull force testing machine 1 until the probe 205 and the pressure sensor 309 are in contact, and the bottom end of the push knife 204 is in contact with the top end of the pressing plate 304, and then the installation cylinder 201 is continuously driven downward by the push-pull force testing machine 1, that is, the first spring 206 is extruded to be elastically deformed, so that the pressure sensor 309 senses the pressure value, and the pressure sensor 309 transmits the signal to the push-pull force testing machine 1, at this time, the installation cylinder 201 is continuously driven downward by the push-pull force testing machine 1 for a certain distance between the bottom end of the probe 205 and the bottom end of the push knife 204, at the same time, the push knife 204 will push the pressing plate 304 to move downward, the pressing plate 304 moves downward to push the second light shield plate 302 and the second guide rod 305 to move downward, and extrude the third spring 306 to be elastically deformed, with the downward movement of the installation cylinder 201, until the installation cylinder 201 is continuously driven downward by the push-pull force testing machine 1 for a certain distance, the push-pull force testing machine 1 stops driving the installation cylinder 201 to move, at this time, whether the warning light is on is observed, when the warning light is on, it means that the emitter of the second photoelectric switch 307, the second receiver 308 and the through hole 303 are on the same horizontal line, at this time, it means that the distance between the bottom end of the probe 205 and the bottom end of the push knife 204 does not change, otherwise, if the distance between the bottom end of the probe 205 and the bottom end of the push knife 204 changes, the emitter of the second photoelectric switch 307 and the second receiver 308 are not on the same horizontal line as the through hole 303, and then the signal emitted by the second photoelectric switch 307 is blocked by the second light shield plate 302, so that the warning light does not emit light.

[0047] In summary, the device fundamentally overcomes the core shortcomings of strong dependence on manual operation, difficulty in guaranteeing positioning accuracy and repeatability, inability to diagnose the test posture online, and difficulty in maintaining the equipment state, thereby significantly improving the accuracy, efficiency, consistency and long-term reliability of the push-pull force test of the metal ceramic packaging shell.

[0048] The preferred embodiments of the application disclosed above are only used to help explain the application. The preferred embodiments do not describe all the details and limit the application to the specific embodiments. Obviously, many modifications and changes can be made according to the content of the specification. The specification selects and describes these embodiments in order to better explain the principles and practical applications of the application, so that those skilled in the art can well understand and utilize the application. The application is limited by the claims and their entire scope and equivalents.

Claims

1. A cermet package push-pull force testing device, characterized by, Include: Push-pull force testing machine (1); Pushing knife mechanism (2), the pushing knife mechanism (2) is arranged in the middle part of push-pull force testing machine (1); Calibration mechanism (3), the calibration mechanism (3) is arranged in the middle part of the front side of push-pull force testing machine (1); The pushing knife mechanism (2) comprises: Mounting cylinder (201), the mounting cylinder (201) is detachably arranged in the middle part of push-pull force testing machine (1), the inner cavity middle part of the mounting cylinder (201) is provided with a moving slot (202) that penetrates up and down, the inner cavity left and right sides of the moving slot (202) are provided with up and down penetrating positioning sliding slot (203) along the up and down direction; Pushing knife (204), the pushing knife (204) is arranged in the middle part of the bottom end of mounting cylinder (201); Probe (205), the probe (205) is slidably inserted into the inner cavity rear side of mounting cylinder (201), the bottom end of the probe (205) is slidably extended out of the bottom end of mounting cylinder (201), the bottom end of the probe (205) is below the bottom end of pushing knife (204); First spring (206), the first spring (206) is sleeved on the outer wall of the probe (205), the bottom end of the first spring (206) is clamped on the outer wall of the probe (205), and the top end of the first spring (206) is clamped on the inner wall of the mounting cylinder (201); First rack (208), the first rack (208) is arranged at the top end of the probe (205); Positioning assembly, the positioning assembly is arranged in the inner cavity of mounting cylinder (201); Stroke detection assembly, the stroke detection assembly is arranged in the inner cavity of mounting cylinder (201); The positioning assembly comprises: Gear (215), the gear (215) is rotatably arranged in the inner cavity top of mounting cylinder (201) through the connecting shaft, and the gear (215) is engaged with the first rack (208); Second rack (216), the outer wall middle part of the second rack (216) is slidably and adaptively inserted into the inner cavity of the moving slot (202), the second rack (216) is engaged with the gear (215), and the front side of the second rack (216) is provided with a sliding slot (217) along the up and down direction; Positioning slider (218), the number of the positioning slider (218) is two, and the left and right sides of the second rack (216) are respectively provided with two positioning sliders (218), and the outer wall middle parts of the two positioning sliders (218) are respectively slidably and adaptively inserted into the inner cavities of the two positioning sliding slots (203); Electric telescopic rod (219), the electric telescopic rod (219) is arranged at the top front side of the second rack (216); First light shield (220), the front side of the first light shield (220) is slidably and adaptively inserted into the inner cavity of the sliding slot (217), the bottom end of the first light shield (220) is slidably extended out of the inner cavity of the sliding slot (217), and the top end of the first light shield (220) is arranged at the bottom end of the electric telescopic rod (219); A first photoelectric switch (221) is arranged at the bottom of the inner cavity of the mounting cylinder (201), and the first photoelectric switch (221) is electrically connected with the push-pull force testing machine (1); A first receiver (222) is arranged at the bottom of the inner cavity of the mounting cylinder (201), and the signal receiving end of the first receiver (222) corresponds to the signal transmitting end of the first photoelectric switch (221), and the first light shield plate (220) is located between the first photoelectric switch (221) and the first receiver (222).

2. The cermet package push-pull force test apparatus of claim 1, wherein According to the thickness of the test object, the first light shield plate (220) is driven to slide along the sliding groove (217) by the electric telescopic rod (219), and the distance between the bottom end of the preset push knife (204) and the bottom end of the inner cavity of the metal ceramic packaging shell is preset.

3. The cermet package push-pull force test apparatus of claim 2, wherein The stroke detection assembly comprises: A first guide rod (209) is arranged at the top end of the first rack (208); A first contact (210) is arranged at the top end of the first rack (208); A linear stroke sensor (211) is arranged at the top rear side of the inner cavity of the mounting cylinder (201), and the linear stroke sensor (211) is electrically connected with the push-pull force testing machine (1); A connecting plate (212) is arranged at the top end of the linear stroke sensor (211), and the connecting plate (212) is slidably and adaptively connected to the top end of the outer wall of the first guide rod (209); A second spring (213) is connected to the top end of the outer wall of the linear stroke sensor (211), the bottom end of the second spring (213) is connected to the outer wall of the linear stroke sensor (211), and the top end of the second spring (213) is connected to the bottom end of the connecting plate (212); A second contact (214) is arranged at the bottom end of the connecting plate (212), and the second contact (214) corresponds to the position of the first contact (210), and the second contact (214) is electrically connected with the linear stroke sensor (211).

4. The cermet package push-pull force test apparatus of claim 3, wherein The bottom end of the probe (205) is rollably and adaptively connected with the ball (207).

5. The cermet package push-pull force test apparatus of claim 4, wherein, The vertical state of the push knife (204) and the metal ceramic packaging shell is determined by comparing the displacement of the upward movement of the probe (205) with the displacement of the downward movement of the mounting cylinder (201) through the linear stroke sensor (211).

6. The cermet package push-pull force test apparatus of claim 5, wherein, The calibration mechanism (3) comprises: A main frame (301) is detachably arranged at the front middle part of the push-pull force testing machine (1); A second light shield plate (302) is slidably and adaptively connected to the inner cavity of the main frame (301), the bottom end of the second light shield plate (302) is slidably extended out of the bottom end of the main frame (301), and a through hole (303) penetrating front and back is arranged at the front top part of the second light shield plate (302); A pressing plate (304) is arranged at the top end of the second light shielding plate (302), and the position of the pressing plate (304) corresponds to the position of the pusher (204); Two second guide rods (305) are arranged at the middle portions of the left and right sides of the pressing plate (304), and the bottom ends of the two second guide rods (305) extend out of the bottom end of the main frame (301) in a slidable manner; A third spring (306) is sleeved on the outer wall of the second guide rod (305), the bottom end of the third spring (306) is clamped on the bottom end of the inner cavity of the main frame (301), and the top end of the third spring (306) is clamped on the bottom end of the pressing plate (304); A second photoelectric switch (307) is arranged at the front side of the bottom end of the inner cavity of the main frame (301), the position of the second photoelectric switch (307) corresponds to the position of the penetrating hole (303), and the distance between the emitter of the second photoelectric switch (307) and the penetrating hole (303) is equal to the distance between the bottom end of the probe (205) and the bottom end of the pusher (204); A second receiver (308) is arranged at the rear side of the bottom end of the inner cavity of the main frame (301), the position of the second receiver (308) corresponds to the position of the second photoelectric switch (307), and the second receiver (308) is matched with the second photoelectric switch (307); A pressure sensor (309) is arranged at the middle portion of the top end of the main frame (301), the position of the pressure sensor (309) corresponds to the position of the probe (205), and the distance between the top end of the pressure sensor (309) and the top end of the pressing plate (304) is equal to the distance between the bottom end of the probe (205) and the bottom end of the pusher (204).

7. The cermet package push-pull force test apparatus of claim 6, wherein, The outer wall of the main frame (301) is further provided with a warning light, and the warning light is electrically connected with the second photoelectric switch (307).

8. The cermet package push-pull force test apparatus of claim 7, wherein, When the push-pull force testing machine (1) drives the mounting cylinder (201) to move downward to the positions where the probe (205) and the pusher (204) respectively contact the pressure sensor (309) and the pressing plate (304), the mounting cylinder (201) continues to move downward by a specified distance, and whether the second photoelectric switch (307) and the second receiver (308) are collinear with the penetrating hole (303) is judged by whether the warning light emits light, so that the distance between the bottom ends of the probe (205) and the pusher (204) is calibrated.

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