Wafer cassette transfer system between different workstations

Abstract

The application discloses a wafer box transfer system between different workstations and relates to the technical field of wafer transfer. The wafer box transfer system comprises a sky rail, which is horizontally and transversely extended; a track vehicle, which is arranged on the sky rail along the extension direction of the sky rail and is movable; a grabbing and conveying assembly, which is arranged at the lower end of the track vehicle and is used for grabbing or releasing a wafer box; a conveying assembly, which is arranged below the sky rail and comprises a conveying seat and two single-sided conveying belts symmetrically arranged on the conveying seat, and the two single-sided conveying belts are used for jointly conveying the wafer box; and a receiving assembly, which is arranged on the conveying seat and has a height-adjustable height-adjusting end used for receiving the wafer box from the grabbing and conveying assembly. The wafer box transfer system has high transfer efficiency and good transfer stability.

Description

A wafer cassette transfer system between different workstations Technical Field

[0001] This invention relates to the field of wafer transfer technology, and more specifically to a wafer cassette transfer system between different workstations. Background Technology

[0002] In semiconductor production lines, the efficiency and stability of wafer transfer between different workstations determine the overall production yield and capacity. Therefore, the industry widely adopts automated material handling systems such as overhead conveyor systems (OHS) to achieve unmanned, high-cleanliness wafer cassette handling.

[0003] The core architecture of this type of system typically includes an overhead rail system laid along the factory layout, a high-speed railcar moving along the overhead rail system, and a gripping and conveying assembly suspended below the railcar. During operation, the railcar precisely transports the gripping and conveying assembly and the wafer cassette it carries to the target workstation, whereupon the gripping and conveying assembly performs a vertical descent to place the wafer cassette onto the workstation's transfer platform.

[0004] However, this seemingly mature solution has revealed several contradictions in practice: if efficiency is prioritized in the component handling process, the sudden stop after a rapid descent will cause impact. This impact force can induce microscopic vibrations, displacement, and even particulate contamination of the wafer through the wafer cassette, posing a direct threat to yield. Conversely, if speed is sacrificed for safety and an extremely slow descent process is adopted, the time for a single transfer will increase significantly.

[0005] Secondly, existing cushioning measures often lack intelligence. Some systems attempt to add passive shock absorbers such as rubber pads or springs at the placement point. However, these devices can only mitigate the impact after it occurs, and cannot effectively intervene before the impact takes place. More importantly, their fixed damping characteristics cannot adapt to wafer cassettes of different weights or with different drop speeds.

[0006] Therefore, it is necessary to provide a wafer cassette transfer system between different workstations to solve the above problems. Summary of the Invention

[0007] To address the above problems, the present invention provides the following technical solution: a wafer cassette transfer system between different workstations, comprising:

[0008] The sky track is laid out horizontally;

[0009] A track vehicle is mounted on the overhead rail and is movable along the extension direction of the overhead rail;

[0010] A gripping and conveying component, located at the lower end of the railcar, is used to grip or release wafer cassettes;

[0011] A transport assembly is disposed below the overhead track, and the transport assembly includes a transport base and two single-sided transport belts symmetrically disposed on the transport base. The two single-sided transport belts are used to jointly transport the wafer cassette.

[0012] A receiving component is disposed on the conveyor base and has a height-adjustable height adjustment end for receiving wafer cassettes from the gripping and conveying component.

[0013] Furthermore, preferably, the gripping and conveying component includes:

[0014] The gripper seat is fixed below the railcar;

[0015] Two symmetrically arranged slide rails are horizontally fixed below the gripping and conveying seat and perpendicular to the overhead rail;

[0016] The slide block is slidably mounted on the slide rail.

[0017] The four-bar linkage is mounted on the slide block and is powered by a cylinder for deflection.

[0018] The claw body is installed on the deflection end of the four-bar linkage, and two clamping parts are provided on the claw body.

[0019] Furthermore, preferably, the receiving component includes:

[0020] A receiving base is fixed on the transmitting base;

[0021] A telescopic cylinder, which is fixed on the receiving base;

[0022] A receiving plate is fixed to the telescopic end of the telescopic cylinder;

[0023] The receiving plate is equipped with multiple first shock absorbers.

[0024] Furthermore, as a preferred embodiment, a second shock absorber is fixed on the receiving base.

[0025] Furthermore, as a preferred embodiment, the bottom of the receiving plate is fixed with multiple sliding rods, which slide through the receiving base, and the multiple sliding rods are connected together to form a whole.

[0026] Furthermore, as a preferred embodiment, multiple mounting plates are fixed on the two sides of the receiving plate perpendicular to the transmitting component, and each mounting plate is provided with a limit component.

[0027] Furthermore, preferably, the limiting component includes:

[0028] The telescopic rod is fixedly embedded into the mounting plate and parallel to the single-sided conveyor belt;

[0029] A rotating wheel seat is fixed to the output end of the telescopic rod, and shaft seats are provided at both ends of the rotating wheel seat;

[0030] The damping wheel is mounted on the wheel seat via a rotating shaft, and the shaft extends through the wheel seat into the seat.

[0031] Furthermore, preferably, the bearing includes:

[0032] A base body is fixed to the side of the rotating wheel seat, and the base body is provided with a first chamber and a second chamber;

[0033] The magnetic ring is fixedly embedded in the first chamber;

[0034] The shaft extends into the first chamber and a magnetic block is fixed to the extended portion. The magnetic block and the magnetic ring have magnetic damping.

[0035] Furthermore, as a preferred embodiment, the shaft is a stepped shaft, with sealing rings between the steps to separate the first chamber and the second chamber. The shaft also extends into the second chamber, and a paddle is fixed to the extended portion. The second chamber is filled with a shear thickener.

[0036] Furthermore, preferably, the conveyor is provided with a detection component, the detection component comprising:

[0037] The detection seat is fixed on the transfer seat;

[0038] An adjusting cylinder is fixed to the detection seat, and the adjusting cylinder has an output end perpendicular to the single-sided conveyor belt;

[0039] A detector is fixed to the output end of the regulating cylinder, and the detector is used to detect whether the receiving plate has reached the target position below the grabbing and conveying assembly.

[0040] Compared with the prior art, the present invention provides a wafer cassette transfer system between different workstations, which has the following advantages:

[0041] In this invention, the impact-prone vertical lifting action is separated from the rapidly moving gripping component and handed over to the receiving component. The first shock absorber in the receiving component is responsible for the impact of the wafer cassette falling, while the second shock absorber is responsible for the impact of the entire receiving platform descending into place. This fundamentally eliminates the impact risk to the wafer caused by the gripping component's sudden vertical stop. At the same time, the gripping component does not need to wait for the time-consuming vertical placement process, thereby significantly shortening the single transfer cycle and significantly improving the overall production efficiency.

[0042] In this invention, a damping wheel with a dual damping mechanism is introduced. In this damping wheel, there is magnetic attraction damping between the magnetic block and the magnetic ring, thereby providing stable basic damping. In addition, the part of the shaft of the damping wheel that extends into the second chamber is fixed with a blade, and the second chamber is filled with a shear thickener. Therefore, by using the blade and the shear thickener in combination, the damping force can be adjusted in real time according to the falling speed of the wafer box, realizing the leap from passive energy absorption to active intervention. Attached Figure Description

[0043] Figure 1 is a schematic diagram of the overall structure of a wafer cassette transfer system between different workstations;

[0044] Figure 2 is a three-dimensional structural diagram of the gripping and conveying component;

[0045] Figure 3 is a three-dimensional structural diagram of the transmission component;

[0046] Figure 4 is a three-dimensional structural diagram of the receiving component;

[0047] Figure 5 is a schematic diagram of the planar structure of the limiting component;

[0048] Figure 6 is a schematic cross-sectional view of the bearing seat;

[0049] Figure 7 is a three-dimensional structural diagram of the detection component;

[0050] In the diagram: 1. Ceiling rail; 2. Railcar; 3. Grab and deliver assembly; 4. Conveyor assembly; 5. Receiving assembly; 6. Detection assembly; 31. Grab and deliver seat; 32. Slide rail; 33. Slide seat; 34. Four-bar linkage; 35. Cylinder; 36. Claw body; 41. Conveyor seat; 42. Single-sided conveyor belt; 51. Receiving seat; 52. Telescopic cylinder; 53. Slide rod; 54. Receiving plate; 55. Mounting plate; 56. Limiting assembly; 57. First shock absorber; 58. Second shock absorber; 561. Telescopic rod; 562. Rotary wheel seat; 563. Damping wheel; 564. Shaft seat; 565. Shaft body; 566. Leaf blade; 567. Magnetic block; 5641. Seat body; 5642. Magnetic ring; 5643. Shear thickener; 5644. Sealing ring; 61. Detection seat; 62. Adjusting cylinder; 63. Detector. Detailed Implementation

[0051] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms are interchangeable where appropriate; this is merely a way of distinguishing objects with the same attributes in the embodiments of this application. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion, so that a process, method, system, product, or apparatus that comprises a series of elements is not necessarily limited to those elements, but may include other elements not explicitly listed or inherent to those processes, methods, products, or apparatuses.

[0052] Example: In this embodiment of the invention, please refer to Figures 1-7, a wafer cassette transfer system between different workstations is provided, including:

[0053] Skyrail 1 is laid out horizontally;

[0054] The track vehicle 2 is mounted on the overhead track 1 along the extension direction of the overhead track 1 and is movable;

[0055] The gripping and conveying component 3 is located at the lower end of the railcar 2 and is used to grip or release the wafer cassette.

[0056] The conveying component 4 is disposed below the overhead track 1, and the conveying component 4 includes a conveying base 41 and two single-sided conveying belts 42 symmetrically disposed on the conveying base 41. The two single-sided conveying belts 42 are used to jointly convey the wafer cassette.

[0057] The receiving component 5 is disposed on the conveying base 41 and has a height-adjustable height adjustment end for receiving the wafer cassette from the gripping and conveying component 3.

[0058] During implementation, the railcar 2 moves along the horizontally laid-out overhead rail 1, transporting the grabbing and conveying component 3 located below it to the top of the target workstation. When the grabbing and conveying component 3 carries the wafer cassette to the designated position, its movement is horizontal and it stops at the target point.

[0059] In addition, a receiving component 5 is added in this embodiment. The receiving component 5 is set on the conveying seat 41 of the conveying component 4 and has a height-adjustable end. Before the grabbing component 3 arrives, the height-adjustable end of the receiving component 5 will rise to a preparatory position. This preparatory position is located directly below the grabbing component 3 and at just the right distance so that the grabbing component 3 does not need to make any vertical movement.

[0060] Once the grabbing and conveying component 3 has moved horizontally into position, its vertical speed is zero, at which point it can directly release the wafer cassette. The wafer cassette will fall a very short distance and be smoothly caught by the height adjustment end of the receiving component 5, which is already in place below. At this point, the grabbing and conveying component 3 has completed its task and can immediately move to the next task point without waiting for the wafer cassette to be placed onto the conveying component 4.

[0061] The height adjustment end of the receiving component 5 performs a vertical descent action, smoothly placing the received wafer cassette onto the two single-sided conveyor belts 42 of the conveying component 4. Finally, the conveying component 4 starts, and through the coordinated action of the two single-sided conveyor belts 42, it conveys the wafer cassette to the inside or outside of the workstation.

[0062] It should be explained that in the prior art, the gripping and placing actions are directly performed by the gripping and conveying component 3. When it stops abruptly at the designated position, it will generate a large vertical impact force. This impact force will be transmitted to the wafer through the wafer cassette, causing micro-damage or contamination. However, this solution fundamentally avoids the problem of the gripping and conveying component 3 stopping abruptly by transferring the vertical descent action from the gripping and conveying component 3 to the receiving component 5. Due to the special design of the wafer cassette, the sudden stop of the horizontal movement of the gripping and conveying component 3 will not have a significant impact on the wafer in the wafer cassette, because a conventional wafer cassette will support and restrict the outer periphery of the wafer.

[0063] In addition, the vertical descent task is completed in parallel or sequentially by the receiving component 5. This collaborative division of labor significantly reduces the time occupied by the grabbing and conveying component 3, thereby accelerating the transfer cycle of a single wafer cassette and improving overall production efficiency.

[0064] In other words, the grabbing and conveying component 3 can focus on rapid, long-distance horizontal movement, while the receiving component 5 focuses on short-distance, high-precision, and smooth lifting and lowering. This functional separation makes the control of each part more pure and efficient, which helps to improve the operational stability and reliability of the entire system.

[0065] Of course, the height adjustment end should not come into contact with the wafer cassette when the gripping and conveying component 3 reaches the designated position, as this may cause interference problems. Therefore, the height adjustment end should maintain a certain distance from the wafer cassette.

[0066] In this situation, when the wafer cassette is released by the gripping and conveying component 3, the wafer cassette may still vibrate under the influence of gravity as it lands on the surface of the height adjustment end, potentially leading to adverse consequences. Therefore, in this embodiment, the specific structure of the receiving component 5 has been optimized. Specifically,

[0067] The receiving component 5 includes:

[0068] The receiving base 51 is fixed on the transmitting base 41;

[0069] Telescopic cylinder 52, which is fixed on the receiving base 51;

[0070] The receiving plate 54 is fixed to the telescopic end of the telescopic cylinder 52;

[0071] The receiving plate 54 is equipped with multiple first shock absorbers 57.

[0072] The first shock absorber 57 can provide shock absorption for the wafer cassette falling on the surface of the receiving plate 54.

[0073] In addition, a second shock absorber 58 is fixed on the receiving base 51, which provides a gentle limit for the downward movement of the receiving plate 54.

[0074] The impact of the wafer cassette falling is not directly borne by the rigid plane, but first acts on multiple first shock absorbers 57 arranged on the receiving plate 54. These first shock absorbers 57 absorb most of the initial impact kinetic energy of the wafer cassette through their own compression deformation, thereby reducing the oscillation intensity transmitted to the wafer itself.

[0075] After the wafer cassette is stably received, the telescopic cylinder 52 fixed to the receiving base 51 begins to operate, driving the receiving plate 54 and the wafer cassette on it to descend vertically together, completing the placement onto the transfer assembly 4. At the end of this descent process, to prevent the receiving plate 54 from rigidly colliding with the transfer base 41 or other fixed components, the second shock absorber 58 fixed to the receiving base 51 begins to function. They provide a gentle limit to the downward stroke of the receiving plate 54, ensuring a smooth end to the entire descent process.

[0076] In other words, the first shock absorber 57 is responsible for handling the impact of the wafer cassette falling, while the second shock absorber 58 is responsible for handling the impact when the entire receiving platform descends into position. This tiered shock handling design can keep the oscillation at an extremely low level.

[0077] Preferably, the bottom of the receiving plate 54 is fixed with a plurality of sliding rods 53, which slide through the receiving base 51, and the plurality of sliding rods 53 are connected together to form a whole.

[0078] In this embodiment, multiple mounting plates 55 are fixed on the two sides of the receiving plate 54 perpendicular to the transmitting component 4, and each mounting plate 55 is provided with a limit component 56.

[0079] By setting the limiting component 56, the falling position of the wafer box can be restricted, ensuring that the first shock absorber 57 can act evenly on the wafer box.

[0080] The limiting component 56 includes:

[0081] The telescopic rod 561 is fixedly embedded in the mounting plate 55 and parallel to the single-sided conveyor belt 42;

[0082] A rotating wheel seat 562 is fixed to the output end of the telescopic rod 561, and a shaft seat 564 is provided at both ends of the rotating wheel seat 562;

[0083] The damping wheel 563 is rotatably mounted on the wheel seat 562 via a shaft 565, and the shaft 565 extends through the wheel seat 562 into the shaft seat 564.

[0084] First, during the preparation stage, the horizontal position of the rotating wheel seat 562 and the damping wheel 563 can be changed by adjusting the telescopic rod 561 on the mounting plate 55 according to the size of the wafer cassette to be processed. This ensures that the outer edge of the damping wheel 563 can just contact the side wall of the wafer cassette.

[0085] After the wafer cassette is released by the gripping and conveying component 3, it begins to fall. Its sidewall contacts the positioned damping wheel 563. At this point, the wafer cassette's gravitational potential energy begins to convert into the rotational kinetic energy of the damping wheel 563. Crucially, the rotation of the damping wheel 563 is not undamped free rotation, but rather possesses rotational damping. This damping generates a tangential resistance opposite to the direction of the wafer cassette's fall. This resistance acts on the wafer cassette, significantly slowing its descent and transforming it from a free-fall state into a slow, controlled descent.

[0086] This active deceleration process occurs before, or at least simultaneously with, the first shock absorber 57 on the wafer cell contact receiver plate 54, thus providing effective intervention at the very front of the impact.

[0087] It is worth noting that traditional shock absorbers passively absorb energy only after an impact occurs. However, the damping wheel 563 in this design actively dissipates the falling kinetic energy of the wafer cassette before the impact occurs. This constitutes a triple protection system: the damping wheel 563 actively decelerates, the first shock absorber 57 passively buffers, and the second shock absorber 58 provides final buffering, thus protecting the internal wafer.

[0088] Specifically, the bearing 564 includes:

[0089] The seat 5641 is fixed to the side of the wheel seat 562, and the seat 5641 is provided with a first chamber and a second chamber;

[0090] Magnetic ring 5642 is fixedly embedded in the first chamber;

[0091] The shaft 565 extends into the first chamber and a magnetic block 567 is fixed to the extended portion. The magnetic block 567 and the magnetic ring 5642 have magnetic damping.

[0092] In addition, the shaft 565 is a stepped shaft, and a sealing ring 5644 is provided between the steps to separate the first chamber and the second chamber. The shaft 565 also extends into the second chamber, and a paddle 566 is fixed to the extended part. The second chamber is filled with a shear thickener 5643.

[0093] The magnetic ring 5642 is actually a composite structure, consisting of a non-magnetic ring as a base with multiple magnets embedded inside. These magnets are discretely distributed along the circumference of the ring, rather than being a continuous magnetic material.

[0094] In addition, the magnetic block 567, which is fixed to the shaft 565 and rotates therewith, is set to attract each other with the magnets embedded in the ring.

[0095] As the wafer cassette falls, causing the damping wheel to rotate, the magnetic block 567 on the shaft 565 also rotates. During rotation, the magnetic block 567 passes sequentially over each fixed magnet on the ring. Due to the continuous attractive force between them, the magnetic block 567 experiences a "dragging" force as it moves, meaning it is always attracted to the nearest fixed magnet. To continue rotating away from its current position, this magnetic attraction must be overcome, a process that requires energy.

[0096] The energy consumed comes directly from the kinetic energy of the falling wafer box. Therefore, every time the wafer box falls a short distance, its kinetic energy must be used to overcome the attraction between the magnets, thus achieving a contactless energy consumption process, which produces a damping effect.

[0097] In addition, shear thickener 5643 is a non-Newtonian fluid, and its viscosity increases sharply with the increase of shear rate (in this case, the rotational speed of the blade).

[0098] When the wafer cassette descends slowly: the deflector 566 rotates at a low speed, and the shear thickener 5643 is a low-viscosity liquid, generating very little damping force, which hardly affects the smooth positioning of the wafer cassette.

[0099] As the wafer cassette falls rapidly, the deflector 566 rotates at high speed, exerting a strong shearing force on the shear thickener 5643. At this moment, the fluid's viscosity increases dramatically, even exhibiting near-solid-state characteristics, thus generating significant rotational resistance. This resistance reacts to the wafer cassette through the shaft 565 and damping wheel 563, rapidly reducing its speed.

[0100] In other words, traditional fixed dampers cannot handle impacts of varying intensities. If the damping is too weak, it cannot cope with sudden high-speed drops; if the damping is too strong, it hinders normal, slow placement. The damping wheel 563 in this solution, however, can adjust its damping force according to the falling speed of the wafer cassette.

[0101] Furthermore, through the superposition of two damping mechanisms, the damping wheel 563 can provide effective braking within a certain speed range.

[0102] In this embodiment, the grabbing and conveying component 3 includes:

[0103] The gripper seat 31 is fixed below the railcar 2;

[0104] Two symmetrically arranged slide rails 32 are horizontally fixed below the gripping and conveying seat 31 and perpendicular to the overhead rail 1;

[0105] The slide block 33 is slidably disposed on the slide rail 32;

[0106] The four-bar linkage 34 is correspondingly mounted on the slide block 33 and is deflected by the cylinder 35;

[0107] The claw body 36 is installed on the deflection end of the four-bar linkage 34, and two clamping members are provided on the claw body 36.

[0108] A four-bar linkage 34 is mounted on the slide 33, and the power source of this mechanism is a cylinder 35. When clamping is required, the piston rod of the cylinder 35 extends, providing a deflection force to the four-bar linkage 34. The four-bar linkage 34 converts the linear motion of the cylinder 35 into rotational or oscillating motion at its deflection end.

[0109] The claw 36 is mounted on this deflection end, so as the four-bar linkage 34 moves, the claw 36 opens and closes. Finally, the two grippers fixed to the claw 36 synchronously retract inward, firmly clamping the outer wall of the wafer cassette from both sides, completing the gripping action. The release process is the reverse operation of the above actions.

[0110] In this embodiment, a detection component 6 is provided on the conveyor base 41, and the detection component 6 includes:

[0111] The detection seat 61 is fixed to the transfer seat 41;

[0112] An adjusting cylinder 62 is fixed to the detection seat 61, and the adjusting cylinder 62 has an output end that is perpendicular to the single-sided conveyor belt 42.

[0113] The detector 63 is fixed to the output end of the regulating cylinder 62. The detector 63 is used to detect whether the receiving plate 54 has reached the target position below the grabbing and conveying assembly 3.

[0114] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A wafer cassette transfer system between different workstations, characterized in that, include: The overhead track (1) is laid out horizontally; A track vehicle (2) is mounted on the overhead rail (1) along the extension direction of the overhead rail (1) and is movable; a gripping and conveying assembly (3) is mounted at the lower end of the track vehicle (2) and is used to grip or release wafer cassettes; a conveying assembly (4) is mounted below the overhead rail (1), and the conveying assembly (4) includes a conveying base (41) and two single-sided conveyor belts (42) symmetrically arranged on the conveying base (41), the two single-sided conveyor belts (42) being used to jointly convey wafer cassettes; a receiving assembly (5) is mounted on the conveying base (41) and has a height-adjustable height adjustment end for receiving wafer cassettes from the gripping and conveying assembly (3); the receiving assembly (5) includes: a receiving base (51) fixed on the conveying base (41); Telescopic cylinder (52) is fixed on the receiving seat (51); receiving plate (54) is fixed on the telescopic end of the telescopic cylinder (52); multiple first shock absorbers (57) are arranged on the receiving plate (54); and a second shock absorber (58) is fixed on the receiving seat (51).

2. The wafer cassette transfer system between different workstations according to claim 1, characterized in that, The gripping assembly (3) includes: a gripping seat (31) fixed below the railcar (2); two symmetrically arranged slide rails (32) horizontally fixed below the gripping seat (31) and perpendicular to the overhead rail (1); a slide block (33) correspondingly slidably disposed on the slide rails (32); a four-bar linkage (34) correspondingly disposed on the slide block (33) and provided with deflection power by a cylinder (35); and a claw body (36) correspondingly installed on the deflection end of the four-bar linkage (34), wherein two clamping parts are provided on the claw body (36).

3. The wafer cassette transfer system between different workstations according to claim 1, characterized in that, Multiple sliding rods (53) are fixed to the bottom of the receiving plate (54). The sliding rods (53) slide through the receiving base (51), and the multiple sliding rods (53) are connected together to form a whole.

4. The wafer cassette transfer system between different workstations according to claim 1, characterized in that, Multiple mounting plates (55) are fixed on the two sides of the receiving plate (54) perpendicular to the transmitting component (4), and each mounting plate (55) is provided with a limit component (56).

5. The wafer cassette transfer system between different workstations according to claim 4, characterized in that, The limiting component (56) includes: a telescopic rod (561), which is fixedly embedded in the mounting plate (55) and parallel to the single-sided conveyor belt (42); a rotating wheel seat (562), which is fixed to the output end of the telescopic rod (561), and the two ends of the rotating wheel seat (562) are provided with bearing seats (564); and a damping wheel (563), which is rotatably mounted on the rotating wheel seat (562) via a shaft (565), and the shaft (565) passes through the rotating wheel seat (562) and extends into the bearing seat (564).

6. The wafer cassette transfer system between different workstations according to claim 5, characterized in that, The bearing seat (564) includes: a seat body (5641) fixed to the side of the wheel seat (562), wherein the seat body (5641) is provided with a first chamber and a second chamber; a magnetic ring (5642) fixedly embedded in the first chamber; the shaft body (565) extends into the first chamber and a magnetic block (567) is fixed to the extended part, wherein the magnetic block (567) and the magnetic ring (5642) have magnetic attraction damping.

7. The wafer cassette transfer system between different workstations according to claim 6, characterized in that, The shaft (565) is a stepped shaft, with a sealing ring (5644) between the steps to separate the first chamber and the second chamber. The shaft (565) also extends into the second chamber, and a paddle (566) is fixed to the extended part. The second chamber is filled with a shear thickener (5643).

8. The wafer cassette transfer system between different workstations according to claim 1, characterized in that, The conveyor seat (41) is provided with a detection component (6), which includes: a detection seat (61) fixed on the conveyor seat (41); an adjustment cylinder (62) fixed on the detection seat (61), the adjustment cylinder (62) having an output end perpendicular to the single-sided conveyor belt (42); and a detector (63) fixed on the output end of the adjustment cylinder (62), the detector (63) being used to detect whether the receiving plate (54) has reached the target position below the gripping and conveying component (3).

Images