Cleaning method for ultrahigh vacuum equipment parts

Abstract

The invention discloses a cleaning method for ultrahigh vacuum equipment parts. The process comprises cleaning modes of different types of parts. According to the method, parts are classified according to sizes and materials, then the parts are sequentially subjected to water washing dust removal, cleaning agent ultrasonic cleaning, clear water washing, clear water ultrasonic cleaning, clear water washing, nitrogen blow-drying and alcohol ultrasonic cleaning, then the parts are subjected to nitrogen blow-drying and drying in a drying oven, and finally the parts are sealed and packaged through aluminum foil paper or a preservative film. The method is high in universality and suitable for various materials of ultrahigh vacuum parts, including stainless steel, aluminum alloy, PEEK, aluminum oxide ceramic and the like, equipment is simple and easy to purchase, and the problem of oil stains in the ultrahigh vacuum equipment parts can be solved.

Description

Technical Field

[0001] This invention relates to the field of parts cleaning, and more particularly to a cleaning method for parts of ultra-high vacuum equipment. Background Technology

[0002] Maintaining the cleanliness of the chamber is crucial when using mass spectrometry in conjunction with ultra-high vacuum equipment (such as scanning tunneling microscopes). If dust or grease enters the chamber during assembly, it will be detected as tightly packed alkyl chains approximately 3 nm in length in the scanning tunneling microscope images. Therefore, removing these alkyl chains requires a complete and thorough cleaning of the newly processed parts. Since the properties of parts made from different materials vary, slightly different cleaning procedures need to be developed. Traditional methods of ultrasonic cleaning with water or alcohol alone are insufficient to completely remove oil and grease from the surface of the parts.

[0003] Therefore, in order to improve the cleaning quality of ultra-high vacuum parts, there is an urgent need for a thorough cleaning method to clean ultra-high vacuum parts. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing ultra-high vacuum cleaning solutions by providing a method for deep cleaning parts of ultra-high vacuum equipment. This method can solve the problem of residual oil stains inside the ultra-high vacuum chamber.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A cleaning method for parts of ultra-high vacuum equipment includes the following steps; 1) Preparation before cleaning: Prepare the necessary equipment and tools for cleaning, including cleaning solution, anhydrous ethanol, nitrile gloves, large water storage tank, large ultrasonic machine, small ultrasonic machine, plastic wrap, aluminum foil, nitrogen cylinder, etc. 2) Parts classification: Classify the disassembled parts according to size and material so that different washing methods can be used later; 3) Water washing to remove dust: Use a water hose to rinse the surface of the parts to wash away the floating dust. 4) Ultrasonic cleaning with cleaning agent: Prepare the cleaning solution by mixing the cleaning agent with water according to the ratio indicated in the instructions, or by preparing the cleaning solution according to the ratio of cleaning agent: water = 1:10. Then pour the cleaning solution into the ultrasonic cleaner and put the parts into the ultrasonic cleaner for ultrasonic cleaning. 5) Rinse with clean water: Take the parts out of the ultrasonic cleaner and rinse the surface of the parts with tap water to remove any residual cleaning agent. 6) Ultrasonic cleaning with clean water: Pour clean water into the ultrasonic cleaner and place the parts into the ultrasonic cleaner for ultrasonic cleaning; 7) Clean water rinsing: Remove the parts from the ultrasonic cleaner and rinse the surface of the parts with tap water. 8) Nitrogen drying: Hang the parts up and use nitrogen to blow away any residual water on the surface to prevent water stains from remaining; 9) Alcohol ultrasonic cleaning: Pour anhydrous ethanol into the ultrasonic cleaner and place the parts into the ultrasonic cleaner for ultrasonic cleaning. 10) Nitrogen drying: Hang the parts up and use nitrogen to blow away any residual anhydrous ethanol on the surface to avoid leaving any marks; 11) Oven drying: Transfer the blow-dried parts into an oven for further drying; 12) Packaging: Immediately wrap the dried parts with aluminum foil or plastic wrap to prevent dust and oil from contaminating the cleaned parts.

[0006] In step 2), the parts are classified into two categories according to size: large parts and small parts. Parts whose length, width, and height sum to 500 mm or more are defined as large parts, and parts whose length, width, and height sum to 500 mm or less are defined as small parts. For round parts, the sum of diameter + diameter + height is defined as large parts, and for spherical parts, the sum of diameter × 3 is defined as large parts. Parts are also classified according to material, including stainless steel parts, PEEK parts, aluminum alloy parts, ceramic parts, and parts made of other materials.

[0007] During the ultrasonic cleaning process in steps 4), 6), and 9), large parts should be suspended using cable ties or wires to avoid contact with the inner wall of the large ultrasonic cleaner, while small parts can be placed directly into the small ultrasonic cleaner.

[0008] During the ultrasonic cleaning process in steps 4), 6), and 9), the ultrasonic power density for stainless steel and PEEK parts is controlled at 5~30W / L, and the ultrasonic time is 15~20min. For aluminum alloy, ceramic, and other materials, the ultrasonic power density is controlled at 3~15W / L, and the ultrasonic time is controlled at 15~20min.

[0009] In step 4), the ultrasonic cleaning agent is selected from one or more of the following: Kuorun brand KR-FX01 ultrasonic rust-preventive cleaning agent, Shengjiayi SY-401B ultrasonic cleaning agent, Qiqi QQ-303 ultrasonic cleaning agent, or Chaoqiangshi JX-401B ultrasonic cleaning agent.

[0010] The nitrogen in steps 8) and 10) should not be replaced with air.

[0011] The oven temperature in step 11) should be determined according to the type of parts. The drying temperature range for stainless steel parts is 40-50 degrees Celsius, and the baking time is 30-50 minutes. The drying temperature range for aluminum alloy parts is 30-40 degrees Celsius, and the baking time is 20-30 minutes. The drying temperature range for PEEK parts, ceramic parts, and parts made of other materials is 28-30 degrees Celsius, and the baking time is 20-30 minutes.

[0012] In step 11), the arrangement of the parts when they are placed in the oven should ensure that the smallest contact surface of the parts touches the bottom of the oven. In step 12), the dried parts should be packaged as soon as possible and should not be exposed to the outside for a long time.

[0013] The advantages of this invention are: (1) The cleaning process is highly versatile and applicable to a variety of materials for ultra-high vacuum parts, including stainless steel, aluminum alloy, PEEK and alumina ceramics.

[0014] (2) The required equipment is simple, mainly consisting of an ultrasonic cleaner and an oven, and the equipment is easy to purchase; (3) The cleaning effect is good and the time is short. The scanning tunneling microscope showed that there was no alkyl chain. The cleaning of one set takes about 90 minutes. Attached Figure Description

[0015] The accompanying drawings further illustrate the present invention, but the content of the drawings does not constitute any limitation on the present invention.

[0016] Figure 1 This is a process flow diagram of the cleaning method for the ultra-high vacuum equipment of the present invention.

[0017] Figure 2 The images show the deposition patterns obtained by scanning tunneling microscopy before and after cleaning the parts in Example 1. The left image shows the presence of alkyl chains in the mass spectrometer chamber before cleaning, while the right image shows the absence of alkyl chains in the mass spectrometer chamber after cleaning.

[0018] Figure 3 The image shows the deposition pattern obtained by scanning tunneling microscopy after cleaning the parts in Comparative Example 1. As can be seen from the image, alkyl chains still exist in the mass spectrometer cavity after cleaning using the method in Comparative Example 1. Detailed Implementation

[0019] Example 1 The cleaning method of this invention is used to clean a soft-landing preparative mass spectrometer component and its deposition chamber. 1) Preparation before cleaning: Prepare the necessary equipment and tools for cleaning, including KR-FX01 ultrasonic rust-preventive cleaner, anhydrous ethanol, nitrile gloves, large water tank, 1 large ultrasonic machine, 1 small ultrasonic machine, cling film, aluminum foil, and nitrogen cylinder. 2) Parts Classification: The disassembled parts were classified into 5 large parts and 37 small parts. The 5 large parts were all stainless steel. The 37 small parts were further divided by material: 23 small stainless steel parts, 3 aluminum alloy parts, 10 PEEK parts, and 1 alumina ceramic part, to facilitate different cleaning methods later. Before cleaning, a deposition target was placed inside the cavity and left for 30 minutes. Afterward, the target surface was scanned using a scanning tunneling microscope. Figure 2 As shown in the left figure, alkyl chains are present on the surface of the cavity.

[0020] 3) Water washing to remove dust: Rinse the surface of each part with tap water for 2 minutes until the surface dust is removed; 4) Ultrasonic Cleaning with Cleaning Agent: Use Kuorun brand KR-FX01 ultrasonic rust-preventive cleaning agent. Prepare the cleaning solution by mixing the cleaning agent and water at a ratio of 1:10. Pour the cleaning solution into two ultrasonic cleaning machines. Place large stainless steel parts into the large ultrasonic cleaning machine using cable ties, and place small stainless steel and PEEK parts directly into the small ultrasonic cleaning machine. Set both ultrasonic cleaning machines to an ultrasonic power density of 20W / L and perform ultrasonic cleaning for 20 minutes, avoiding a water temperature exceeding 50 degrees Celsius. Separately, place aluminum alloy and alumina ceramic parts into the small ultrasonic cleaning machine and set the ultrasonic power density to 10W / L for 20 minutes, avoiding a water temperature exceeding 30 degrees Celsius. If the water temperature exceeds 30 degrees Celsius, pause cleaning and resume cleaning only after the water temperature drops to 25 degrees Celsius.

[0021] 5) Rinse with clean water: Take the parts out of the ultrasonic cleaner and rinse the surface of the parts with tap water for 2 minutes to remove the cleaning agent remaining on the surface of the parts. 6) Ultrasonic Cleaning with Clean Water: Pour clean water into two ultrasonic cleaners. Hang large stainless steel parts in the large ultrasonic cleaner using cable ties, and place small stainless steel and PEEK parts directly into the small ultrasonic cleaner. Set the ultrasonic power density to 20W / L and perform ultrasonic cleaning for 20 minutes, avoiding water temperature exceeding 50 degrees Celsius. Separately, place aluminum alloy and alumina ceramic parts into the ultrasonic cleaner, set the ultrasonic power density to 10W / L and perform ultrasonic cleaning for 20 minutes, avoiding water temperature exceeding 30 degrees Celsius. If the water temperature exceeds 30 degrees Celsius, stop cleaning and continue cleaning when the water temperature drops to 25 degrees Celsius.

[0022] 7) Rinse with water: Take the parts out of the ultrasonic cleaner and rinse the surface of the parts with tap water for 2 minutes.

[0023] 8) Nitrogen drying: Hang the parts up and use nitrogen from the nitrogen cylinder to dry the water remaining on the surface of the parts to prevent water stains from being left.

[0024] 9) Alcohol Ultrasonic Cleaning: Pour anhydrous ethanol into two ultrasonic cleaners. Hang large stainless steel parts in the large ultrasonic cleaner using cable ties, and place small stainless steel parts and PEEK parts in the small ultrasonic cleaner. Set both ultrasonic cleaners to an ultrasonic power density of 20W / L and perform ultrasonic cleaning for 20 minutes, avoiding water temperature exceeding 50 degrees Celsius during the process. Separately, place aluminum alloy parts and alumina ceramic parts into the ultrasonic cleaner, set the ultrasonic power density to 10W / L and perform ultrasonic cleaning for 20 minutes, avoiding water temperature exceeding 30 degrees Celsius during the process. If the water temperature exceeds 30 degrees Celsius, stop cleaning and wait for the water temperature to drop to 25 degrees Celsius before continuing cleaning.

[0025] 10) Nitrogen drying: Suspend the parts and use nitrogen from the nitrogen cylinder to dry the surface of any residual anhydrous ethanol; 11) Oven Drying: Transfer the dried parts into the oven. Large and small stainless steel parts are placed in the oven at 45°C for 40 minutes until all moisture evaporates; aluminum alloy parts are placed in the oven at 35°C for 30 minutes until all moisture evaporates; PEEK parts and alumina ceramic parts are placed in the oven at 30°C for 30 minutes until all moisture evaporates. When placing the parts into the oven, ensure the smallest contact surface of the part is in contact with the bottom of the oven. After cleaning and assembling the parts, place a deposition target inside the cavity. After 30 minutes, remove it and scan the surface of the deposition target using a scanning tunneling microscope. Figure 2 As shown in the left figure, there are almost no alkyl chains inside the mass spectrometer chamber.

[0026] 12) Packaging: Immediately after removing the parts from the oven, wrap them with aluminum foil or plastic wrap to prevent dust and oil from contaminating the cleaned parts.

[0027] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications made to the present invention by those skilled in the art without departing from the spirit of the present invention shall fall within the protection scope of the present invention.

[0028] Comparative Example 1 The same equipment parts as in Example 1 are cleaned using traditional cleaning methods. The specific process is as follows: 1) Preparation before cleaning: Prepare the necessary equipment and tools for cleaning, including White Cat brand dishwashing liquid, nitrile gloves, 1 large ultrasonic machine, and 1 small ultrasonic machine; 2) Ultrasonic Cleaning with Dishwashing Liquid: Dilute White Cat brand dishwashing liquid with water at a ratio of 1:100. Pour the prepared cleaning solution into two ultrasonic cleaners. Hang large stainless steel parts with cable ties and place them in the large ultrasonic cleaner. Place small stainless steel parts and PEEK parts in the small ultrasonic cleaner. Set both ultrasonic cleaners to an ultrasonic power density of 20W / L and perform ultrasonic cleaning for 15 minutes, avoiding water temperature exceeding 50 degrees Celsius. Place aluminum alloy parts and alumina ceramic parts in the small ultrasonic cleaner and set the ultrasonic power density to 20W / L for 5 minutes, avoiding water temperature exceeding 30 degrees Celsius. If the water temperature exceeds 30 degrees Celsius, stop cleaning and continue cleaning when the water temperature drops to 25 degrees Celsius.

[0029] 3) Clean water rinsing: Remove the parts from the ultrasonic cleaner and clean the surface with a water hose; 4) Ultrasonic cleaning with clean water: Pour clean water into two ultrasonic cleaners respectively. Place large stainless steel parts into the large ultrasonic cleaner and small stainless steel parts and PEEK parts into the small ultrasonic cleaner. Set the ultrasonic power density to 20W / L and perform ultrasonic cleaning for 15 minutes. Place aluminum alloy parts and alumina ceramic parts into the ultrasonic cleaner and set the ultrasonic power density to 20W / L and perform ultrasonic cleaning for 5 minutes.

[0030] 5) Air dry: Transfer the cleaned parts to aluminum foil and wait for them to air dry naturally.

[0031] After cleaning and assembling the parts, a deposition target was placed inside the cavity and left for 30 minutes. Then, it was removed, and the surface of the deposition target was scanned using a scanning tunneling microscope. Figure 3 As shown, although the number of alkyl chains inside the mass spectrometer cavity has decreased, there are still obvious alkyl chains present, resulting in poor cleaning effect.

Claims

1. A cleaning method for parts of ultra-high vacuum equipment, characterized in that: Includes the following steps; 1) Preparation before cleaning: Prepare the necessary equipment and tools for cleaning. 2) Parts classification: Classify the disassembled parts according to their size and material; 3) Water washing to remove dust: Use a water hose to rinse the surface of the parts to wash away the floating dust. 4) Ultrasonic cleaning with cleaning agent: Prepare a cleaning solution by mixing the cleaning agent with water according to the ratio indicated in the instructions, then pour the cleaning solution into the ultrasonic cleaner and place the parts into the ultrasonic cleaner for ultrasonic cleaning. 5) Rinse with clean water: Remove the parts from the ultrasonic cleaner and rinse the surface of the parts with tap water to remove any residual cleaning agent. 6) Ultrasonic cleaning with clean water: Pour clean water into the ultrasonic cleaner and place the parts into the ultrasonic cleaner for ultrasonic cleaning; 7) Rinse with clean water: Remove the parts from the ultrasonic cleaner and rinse the surface of the parts with tap water; 8) Nitrogen drying: Suspend the parts and use nitrogen to dry any remaining water on the surface; 9) Alcohol ultrasonic cleaning: Pour anhydrous ethanol into the ultrasonic cleaner and place the parts into the ultrasonic cleaner for ultrasonic cleaning. 10) Nitrogen drying: Suspend the parts and use nitrogen to dry the surface of any residual anhydrous ethanol; 11) Oven drying: Transfer the blow-dried parts into an oven for further drying; 12) Packaging: Immediately seal the dried parts with aluminum foil or plastic wrap.

2. The cleaning method according to claim 1, characterized in that: The necessary equipment and tools for cleaning include cleaning agents, anhydrous ethanol, nitrile gloves, a large water storage tank, an ultrasonic cleaner, plastic wrap, aluminum foil, and nitrogen cylinders.

3. The cleaning method according to claim 1, characterized in that: In step 2), the parts are classified into two categories according to size: large parts and small parts. Large parts are those with a sum of length, width and height greater than or equal to 500mm, and small parts are those with a sum of length, width and height less than 500mm. They are also classified according to material: stainless steel parts, PEEK parts, aluminum alloy parts, ceramic parts and parts made of other materials.

4. The cleaning method according to claim 1 or 3, characterized in that: During the ultrasonic cleaning process in steps 4), 6), and 9), large parts are suspended into the ultrasonic cleaner using cable ties or wires to avoid contact with the inner wall of the ultrasonic cleaner, while small parts are placed directly into the ultrasonic cleaner.

5. The cleaning method according to claim 1 or 3, characterized in that: During the ultrasonic cleaning process in steps 4), 6), and 9), the ultrasonic power density for stainless steel and PEEK parts is controlled at 5~30W / L, and the ultrasonic time is 15~20min. For aluminum alloy, ceramic, and other materials, the ultrasonic power density is controlled at 3~15W / L, and the ultrasonic time is controlled at 15~20min.

6. The cleaning method according to claim 1, characterized in that: In step 4), the ultrasonic cleaning agent is selected from one or more of the following: Kuorun brand KR-FX01 ultrasonic rust-preventive cleaning agent, Shengjiayi SY-401B ultrasonic cleaning agent, Qiqi QQ-303 ultrasonic cleaning agent, and Chaoqiangshi JX-401B ultrasonic cleaning agent.

7. The cleaning method according to claim 1, characterized in that: The oven baking temperature and time in step 11) depend on the material of the parts. For stainless steel parts, the drying temperature range is 40~50 degrees Celsius and the baking time is 30~50 minutes. For aluminum alloy parts, the drying temperature range is 30~40 degrees Celsius and the baking time is 20~30 minutes. For PEEK parts, ceramic parts and other materials, the drying temperature range is 28~30 degrees Celsius and the baking time is 20~30 minutes.

8. The cleaning method according to claim 1, characterized in that: In step 11), when placing the parts into the oven, ensure that the smallest contact surface of the parts touches the bottom of the oven.

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