RTR vacuum plasma treatment and film coating integrated device

Abstract

The invention discloses an RTR vacuum plasma treatment and film coating integrated device, which belongs to the technical field of RTR film coating, and comprises a treatment mechanism for carrying out plasma treatment and rolling on a product material, the processing mechanism is provided with a feeding mechanism used for feeding a material roll wound with a product material and a protective film and a discharging mechanism used for discharging the processed product material, and the discharging mechanism is provided with two loading and unloading modules. According to the invention, a plurality of process steps of unwinding, old film stripping, plasma treatment, new film lamination, winding and the like are integrated, and a product material is immediately laminated with a clean protective film after plasma surface activation is completed, so that the risk that the treated active surface is polluted by dust and water or oxidized in the transfer process is avoided; through the feeding mechanism, the carrying module, the discharging mechanism and the loading and unloading module, automatic loading, unloading, transferring and roll changing of material rolls including raw material rolls and finished product recycling rolls are achieved.

Description

Technical Field

[0001] This invention relates to the field of RTR coating technology, and in particular to an integrated device for RTR vacuum plasma treatment and coating. Background Technology

[0002] In the manufacturing process of roll products such as thin films, flexible circuit boards, and special composite materials, it is often necessary to perform plasma cleaning, activation, etching and other treatments on their surfaces to improve their hydrophilicity, adhesion or other surface properties. After the treatment is completed, in order to protect the treated clean surface from environmental pollution, oxidation or physical damage, it is usually necessary to immediately carry out a coating operation in a vacuum or controlled environment.

[0003] Existing technical solutions typically suffer from the following shortcomings: After plasma treatment is completed in one piece of equipment, the product roll needs to be removed and transferred to another laminating equipment. During this process, the active surface after plasma treatment is exposed to the air, making it highly susceptible to dust and moisture absorption or oxidation, leading to a decline in surface performance and affecting the subsequent lamination quality and the final product performance. In the stages of feeding, threading, and changing rolls, most operations rely on manual labor, which is not only inefficient and labor-intensive, but also increases the risk of contamination and process instability in vacuum or clean environments where frequent personnel intervention increases the risk of contamination. When changing raw material rolls to be treated or collecting finished rolls that have been laminated, manual or mechanical changes usually require long downtime, severely impacting production continuity and overall efficiency.

[0004] Therefore, there is an urgent need to develop a highly automated and integrated device that can seamlessly combine vacuum plasma treatment with the coating process, complete the entire process in a continuous and controlled environment, and achieve full automation from raw material roll loading, old protective film peeling, plasma treatment, new protective film lamination to finished roll unloading, in order to solve the problems of low efficiency, easy pollution and poor continuity in the existing technology. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention discloses a highly automated and integrated device that seamlessly combines vacuum plasma treatment with coating processes, completing the entire process in a continuous, controlled environment. This device automates the entire process from raw material roll loading, old protective film peeling, plasma treatment, new protective film lamination, to finished product roll unloading. The technical solution adopted by this invention is: an integrated RTR vacuum plasma treatment and coating device, comprising a processing mechanism for plasma treatment and winding of the product material. The processing mechanism includes a film feeding box, and is equipped with an infeed mechanism for feeding the roll containing the product material and protective film, and an outfeed mechanism for discharging the processed product material. The outfeed mechanism is equipped with two loading and unloading modules. The processing mechanism includes a plasma treatment zone fixedly installed on a film feeding box, a film take-up box fixedly installed on the plasma treatment zone, an unwinding shaft rotatably installed inside the film feeding box, a motor for driving the unwinding shaft to rotate inside the film feeding box, a take-up shaft rotatably installed inside the film take-up box, a motor for driving the take-up shaft to rotate inside the take-up box, a material roll outside the unwinding shaft, and a rewind roll outside the take-up shaft.

[0006] Furthermore, the processing mechanism also includes a film-tearing roll rotatably installed in a film-feeding box, a tensioning electric cylinder fixedly installed in the film-feeding box, a tension roller fixedly installed on the output end of the tensioning electric cylinder, two alignment rollers rotatably installed in a film-receiving box, a film roll shaft rotatably installed in the film-receiving box, a film roll disposed outside the film roll shaft, a tension roller rotatably installed in the film-receiving box, a motor for driving the alignment rollers and the film roll to rotate respectively in the film-receiving box, and two distributing rollers rotatably installed in the film-feeding box, a motor for driving the film-tearing roll and the distributing rollers to rotate respectively in the film-feeding box.

[0007] Furthermore, the plasma treatment zone is equipped with multiple electrode plates, and the product material is wound around the outside of the material roll. The product material is covered with a protective film. In use, the product material and the protective film are passed between two distributing rollers, the end of the protective film is fixed on the tear film roll, the product material is passed around the outside of the tension roller, and then the product material is passed between multiple electrode plates. Then the product material is passed between two straightening rollers, and the protective film on the film roll is pulled out and passed between the two straightening rollers together with the product material. After the protective film and the product material are bonded together, they are passed around the tension recovery roller and fixed on the recovery roll.

[0008] Furthermore, each of the film feeding box and the film receiving box is fixedly equipped with an ejector cylinder. The output end of the ejector cylinder on the film feeding box is located next to the material roll, and the output end of the ejector cylinder on the film receiving box is located next to the recovery roll.

[0009] After the feeding mechanism places the material roll onto the unwinding shaft and the delivery mechanism places the recovery roll onto the take-up shaft, the product material and protective film on the outside of the material roll are first passed between two separating rollers by a robotic arm or manually inside the film feeding box. Then, the protective film and product material are torn apart, and the end of the protective film is fixed on the tearing roll. The protective film passes through the outside of the tension roller and then through multiple sets of electrode plates. Then, the protective film on the film roll is pulled out by a robotic arm or manually inside the take-up box, and the protective film and product material are passed together between two straightening rollers. The two straightening rollers bond the product material and protective film together, and then the product material and protective film are fixed on the take-up roll after passing around the take-up tension roller.

[0010] The unwinding shaft, film tearing roll, film roll shaft, alignment roller, tension roller, and take-up shaft rotate. The film tearing roll winds up the protective film on the outside of the product material on the roll. When the product material passes through the plasma treatment zone and electrode plate, it undergoes plasma treatment. The film roll shaft feeds the film roll out, and the alignment roller laminates the plasma-treated product material and protective film together. Then, the take-up roll winds up the laminated product material and protective film together.

[0011] Furthermore, the feeding mechanism includes an infeed conveyor frame disposed next to the film feeding box, a connecting frame fixedly installed on the infeed conveyor frame, a plurality of power rollers disposed on the connecting frame, a motor for driving the power rollers to rotate disposed on the connecting frame, an infeed conveyor belt disposed on the infeed conveyor frame, and an infeed motor for driving the infeed conveyor belt to rotate disposed on the infeed conveyor frame.

[0012] Furthermore, the feeding mechanism conveys a carrying module, which includes a moving platform, a side support plate and a lower tray fixedly installed on the moving platform, a lifting plate slidably installed inside the moving platform, a lifting block fixedly installed on the lifting plate, an inner plate fixedly installed on the lifting plate, an inner column fixedly installed on the inner plate, and an ejection plate slidably installed outside the inner column.

[0013] Furthermore, the carrying module also includes a lower electric cylinder fixedly installed on the moving platform. A lifting column is fixedly installed on the output end of the lower electric cylinder. A lower rotating rod is rotatably installed on the moving platform. A lower horizontal groove is provided on the lower rotating rod. The lifting column slides in the lower horizontal groove. A side rotating rod is rotatably installed on the lower rotating rod. An upper rotating rod is rotatably installed on the side rotating rod. The upper rotating rod is rotatably installed with the moving platform and with the lifting block.

[0014] Furthermore, the carrying module also includes an outer rotating plate rotatably mounted on the moving platform, a lower rotating block rotatably mounted on the outer rotating plate, the lower rotating block being rotatably mounted to the moving platform through a waist hole, a top rotating rod rotatably mounted on the outer rotating plate, an inner rotating rod rotatably mounted on the top rotating rod, an inner rotating rod having an inner sliding groove provided on the inner rotating rod, the inner rotating rod being rotatably mounted to the inner plate through the inner sliding groove, an inner sliding disc rotatably mounted on the inner rotating rod, an inner sliding rod fixedly mounted on the inner sliding disc, an inner spring being provided between the inner sliding disc and the inner plate, two outer locking blocks rotatably mounted on the inner column, an inner pull rod rotatably mounted on the outer locking blocks, and the inner pull rod being rotatably mounted to the top of the inner sliding rod.

[0015] Furthermore, the carrying module also includes a lifting support fixedly installed on the ejection plate, a side top column fixedly installed on the lifting support, the side top column sliding along the moving platform, a lifting guide column fixedly installed on the lifting support, a vertical sliding groove provided on the moving platform, a lifting slider slidably installed in the vertical sliding groove, the lifting guide column and the lifting slider slidably installed, and a return spring provided between the lifting support and the lifting slider.

[0016] When the material roll is placed on the inner column, under normal conditions, the two outer clamping blocks are in the open state. At this time, first press down the lower end of the lower rotating block. The lower rotating block rotates relative to the moving table, which drives the outer rotating plate to rotate, which in turn drives the top rotating rod to rotate. The top rotating rod drives the inner sliding plate and the inner sliding rod to slide along the inner column through the inner rotating rod. This drives the outer clamping blocks to rotate relative to the inner column through the inner pull rod. The inner spring is compressed. At this time, it passes through the two outer clamping blocks and fits on the outside of the inner column. Then, the lower rotating block is released, and the inner spring rebounds, causing the two outer clamping blocks to rotate outward to cover the outside of the material roll and prevent the material roll from falling out.

[0017] At this point, the material roll falls onto the two lifting supports. Then, the lower electric cylinder retracts, causing the lower rotating rod to rotate. This rotates the upper rotating rod via the side rotating rod, which in turn causes the lifting block and lifting plate to descend. This, in turn, causes the inner plate, the ejection plate, and the lifting supports to descend, so that the lower half of the material roll falls onto the lower pallet and the side support plate, which then support the material roll.

[0018] The motor drives the conveyor belt to rotate, transporting the carrying module placed on the conveyor belt. The carrying module is then transported to the power roller, which rotates to continue transporting the carrying module.

[0019] Furthermore, the delivery mechanism includes a side conveyor frame located in the film delivery box, on which multiple horizontal conveyor rollers are rotatably mounted, and a motor for driving the horizontal conveyor rollers to rotate is provided on the conveyor frame. A delivery frame is provided next to the film receiving box, on which a delivery transmission belt is rotatably mounted, and a delivery motor for driving the delivery transmission belt to rotate is provided on the delivery frame.

[0020] Furthermore, the loading and unloading module includes a fixed frame fixedly installed on the conveyor frame, a traversing frame slidably installed on the fixed frame, a cylinder for driving the traversing frame to slide along the fixed frame inside the fixed frame, a traversing upright fixedly installed on the traversing frame, a top motor fixedly installed on the traversing upright, a lifting screw rotatably installed on the traversing upright, the motor shaft of the top motor being fixedly installed with the lifting screw, a lifting platform slidably installed on the traversing upright, the lifting platform and the lifting screw forming a threaded transmission, multiple idlers rotatably installed on the lifting platform, a motor for driving the idlers to rotate on the lifting platform, a pushing electric cylinder fixedly installed on the lifting platform, a pushing block fixedly installed on the output end of the pushing electric cylinder, a pressing electric cylinder fixedly installed on the lifting platform, a pressing plate fixedly installed on the output end of the pressing electric cylinder, and a retraction electric cylinder fixedly installed on the lifting platform, a retraction block fixedly installed on the output end of the retraction electric cylinder.

[0021] Initially, the lifting platform is in the raised position. First, the processed coil needs to be removed from the unwinding shaft. The power roller transports the carrying module to the idler roller of the loading / unloading module located next to the connecting frame. The idler roller then rotates, centering the carrying module. Next, the top motor drives the lifting screw to rotate, causing the lifting platform to descend. Then, the retracting electric cylinder extends, causing the retracting block to extend and press down on the lower end of the lower rotating block. The lower rotating block rotates relative to the moving platform, causing the outer rotating plate to rotate, which in turn causes the top rotating rod to rotate. The top rotating rod, through the inner rotating rod, drives the inner sliding plate and inner sliding rod to slide along the inner column, thereby causing the outer locking block to rotate relative to the inner column through the inner pull rod. The spring is compressed, and then the lower pressure cylinder retracts, causing the lower pressure plate to descend, which in turn rotates the side rotating rod, thereby causing the upper rotating rod to rotate and the lifting block, lifting plate, inner plate, ejection plate, and lifting support to rise. This causes the side top column to lift the material roll from the lower tray and side support plate. Then, the electric cylinder in the fixed frame extends, causing the transverse frame to slide along the fixed frame, so that the outer clamping block contacts the unwinding shaft. Then, the ejection electric cylinder in the film feeding box extends, pushing the material roll on the unwinding shaft to the outside of the inner column. Then, the push-in electric cylinder retracts, and the return spring rebounds, causing the ejection plate, side top column, and lifting support to return to their initial positions, completing the removal of the processed material roll from the unwinding shaft.

[0022] Next, the next roll carrying the product material needs to be placed outside the unwinding shaft. The power roller transports the carrying module to the idler roller of the loading / unloading module located next to the connecting frame. Then, the idler roller rotates to center the carrying module. Then, the top motor drives the lifting screw to rotate, causing the lifting platform to descend. Then, the retraction cylinder extends, causing the retraction block to extend and press the lower end of the lower rotating block. The lower rotating block rotates relative to the moving platform, causing the outer rotating plate to rotate, which in turn causes the top rotating rod to rotate. The top rotating rod drives the inner sliding plate and inner sliding rod to slide along the inner column through the inner rotating rod, thereby causing the outer locking block to rotate relative to the inner column through the inner pull rod. The inner spring is compressed. Then, the lower pressing cylinder retracts, causing the lower pressing plate to descend, causing the side rotating rod to rotate, which in turn drives the upper rotating rod to rotate, causing the lifting block, lifting plate, inner plate, ejection plate and lifting support to rise, so that the side top column... The coil is lifted from the lower tray and side support plate. Then, the electric cylinder inside the fixed frame extends, causing the traversing frame to slide along the fixed frame, so that the outer locking block contacts the unwinding shaft. Then, the pushing electric cylinder extends, pushing the side top column, lifting support, and ejection plate outward through the pushing block. The return spring is compressed, and the ejection plate pushes the coil on the lifting support to the outside of the unwinding shaft. Then, the pressing electric cylinder rises, causing the lower pressure plate to rise. The lower electric cylinder retracts, causing the lower rotating rod to rotate. Through the side rotating rod, the upper rotating rod rotates, thereby causing the lifting block and lifting plate to descend, thereby causing the inner plate, ejection plate, and lifting support to descend, so that the lifting support disengages from the coil, leaving the coil outside the unwinding shaft. Then, the pushing electric cylinder retracts, and the return spring rebounds, causing the ejection plate, side top column, and lifting support to return to their initial positions, completing the placement of the coil outside the unwinding shaft.

[0023] Subsequently, both the carrying module carrying the freshly removed material roll and the carrying module without a material roll arrive at the delivery conveyor belt. Then, the delivery conveyor belt reverses, causing the carrying module carrying the material roll to arrive at the idler roller.

[0024] The lifting platform then descends, and the carrying module is conveyed to the horizontal conveyor roller via the idler roller. The horizontal conveyor roller conveys the carrying module to the loading and unloading module located next to the delivery frame. The loading and unloading module drives the carrying module to be lifted. When the carrying module without a material roll reaches the outside of the take-up shaft, the retraction electric cylinder extends, causing the retraction block to extend and press the lower end of the lower rotating block. The lower rotating block rotates relative to the moving platform, causing the outer rotating plate to rotate, which in turn causes the top rotating rod to rotate. The top rotating rod drives the inner sliding plate and inner sliding rod to slide along the inner column via the inner rotating rod, thereby causing the outer locking block to rotate relative to the inner column via the inner pull rod. The inner spring is compressed, and the ejection electric cylinder located in the take-up box extends, pushing the recycle roll on the take-up shaft to the outside of the inner column of the carrying module. Then the carrying module reaches the delivery conveyor belt, and the carrying module is delivered by the delivery conveyor belt, realizing the removal of the recycle roll with the product material wound on the outside of the take-up shaft.

[0025] Then, the next carrying module moves the roll of material that has just been taken from the film feeding box to the take-up shaft. The carrying module then uses the taken-up roll as a new recycling roll to wrap around the outside of the take-up shaft. After that, the carrying module leaves from the delivery conveyor belt, and so on.

[0026] First, a carrying module removes the processed roll that was originally located outside the unwinding shaft. Then, the next carrying module places the roll with unprocessed product material and protective film wrapped around it on the unwinding shaft. Then, the carrying module removes the recycle roll from the take-up shaft. Finally, another carrying module with a roll places the newly removed roll outside the take-up shaft as a new recycle roll.

[0027] The beneficial effects of this invention compared with the prior art are: (1) This invention integrates multiple process steps such as unwinding, old film peeling, plasma treatment, new film lamination, and winding. After the product material is activated by plasma, it is immediately laminated with a clean protective film, eliminating the risk of the treated active surface being contaminated by dust or moisture or oxidized during the transfer process; (2) This invention realizes the automatic loading, unloading, transfer and replacement of material rolls, including raw material rolls and finished product recycling rolls, through the feeding mechanism, carrying module, delivery mechanism and loading and unloading module. The precise cooperation between the loading and unloading module and the carrying module can automatically complete a series of actions such as taking and unloading rolls, locking, alignment and pushing, reducing production preparation time and downtime; (3) The carrying module set in this invention serves as the carrier of the material rolls and integrates adaptive mechanisms such as inner column, outer card block and lifting tray. It can safely and stably carry and fix material rolls of different specifications. Through the standard conveyor line and the movable loading and unloading module, the carrying module can circulate between the loading area, the core work station of the processing area and the unloading area. It has a high degree of automation and good continuity. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0029] Figure 2 This is a schematic diagram of the processing mechanism structure of the present invention. Figure 1 .

[0030] Figure 3 This is a schematic diagram of the processing mechanism structure of the present invention. Figure 2 .

[0031] Figure 4 This is a schematic diagram of the feeding mechanism structure of the present invention. Figure 1 .

[0032] Figure 5 This is a schematic diagram of the carrying module structure of the present invention. Figure 1 .

[0033] Figure 6 This is a schematic diagram of the carrying module structure of the present invention. Figure 2 .

[0034] Figure 7 This is a schematic diagram of the carrying module structure of the present invention. Figure 3 .

[0035] Figure 8 This is a schematic diagram of the carrying module structure of the present invention. Figure 4 .

[0036] Figure 9 This is a schematic diagram of the delivery mechanism of the present invention.

[0037] Figure 10 This is a schematic diagram of the loading and unloading module structure of the present invention. Figure 1 .

[0038] Figure 11 This is a schematic diagram of the loading and unloading module structure of the present invention. Figure 2 .

[0039] Figure 12 This is a schematic diagram of the loading and unloading module structure of the present invention. Figure 3 .

[0040] Reference numerals: 101-Film feeding box; 102-Film taking box; 103-Plasma treatment area; 104-Electrode plate; 105-Material roll; 106-Unwinding shaft; 107-Tearing roll; 108-Tension roller; 109-Tensioning cylinder; 110-Product material; 111-Protective film; 112-Recycle roll; 113-Film roll; 114-Correction roller; 115-Tension roller; 116-Exiting cylinder; 117-Rewinding shaft; 118- Film roll; 119-Distribution roller; 201-Infeed conveyor frame; 202-Infeed conveyor belt; 203-Infeed motor; 204-Connecting frame; 205-Power roller; 206-Moving table; 207-Side support plate; 208-Lower electric cylinder; 209-Lower rotating rod; 210-Lifting column; 211-Lower transverse groove; 212-Side rotating rod; 213-Upper rotating rod; 214-Lifting block; 215-Lifting plate; 216-Lower rotating block; 217-Outer rotating plate ; 218-Top rotating rod; 219-Inner rotating rod; 220-Inner sliding groove; 221-Inner sliding plate; 222-Inner sliding rod; 223-Inner spring; 224-Inner column; 225-Outer locking block; 226-Inner pull rod; 227-Inner plate; 228-Lower tray; 229-Ejection plate; 230-Side top column; 231-Lifting guide column; 232-Vertical sliding groove; 233-Reset spring; 234-Lifting slider; 235-Lifting support; 301 - Fixed frame; 302 - Conveyor frame; 303 - Horizontal conveyor roller; 304 - Delivery frame; 305 - Delivery motor; 306 - Delivery drive belt; 307 - Horizontal frame; 308 - Horizontal vertical frame; 309 - Top motor; 310 - Lifting screw; 311 - Lifting platform; 312 - Idler roller; 313 - Push-in electric cylinder; 314 - Push-in block; 315 - Downward electric cylinder; 316 - Downward pressure plate; 317 - Retraction electric cylinder; 318 - Retraction block. Detailed Implementation

[0041] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings.

[0042] Example: Reference Figures 1-12 An integrated RTR vacuum plasma treatment and coating device includes a processing mechanism for plasma treatment and winding of product material 110. The processing mechanism includes a film feeding box 101. The processing mechanism is provided with an infeeding mechanism for feeding in a roll 105 wrapped with product material 110 and protective film 111 and an outfeeding mechanism for sending out the processed product material 110. The outfeeding mechanism is provided with two loading and unloading modules. The processing mechanism includes a plasma processing zone 103 fixedly installed on a film feeding box 101, a film taking box 102 fixedly installed on the plasma processing zone 103, an unwinding shaft 106 rotatably installed inside the film feeding box 101, a motor for driving the unwinding shaft 106 to rotate inside the film feeding box 101, a take-up shaft 117 rotatably installed inside the film taking box 102, a motor for driving the take-up shaft 117 to rotate inside the take-up box 102, a material roll 105 outside the unwinding shaft 106, and a rewind roll 112 outside the take-up shaft 117.

[0043] like Figure 2 , Figure 3 As shown, the processing mechanism also includes a tear-off roll 107 rotatably installed in the film feeding box 101, a tensioning cylinder 109 fixedly installed in the film feeding box 101, a tension roller 108 fixedly installed on the output end of the tensioning cylinder 109, two correction rollers 114 rotatably installed in the film taking box 102, a film roll shaft 118 rotatably installed in the film taking box 102, a film roll 113 disposed outside the film roll shaft 118, a tension roller 115 rotatably installed in the film taking box 102, a motor for driving the correction rollers 114 and the film roll 113 to rotate respectively in the film taking box 102, two distribution rollers 119 rotatably installed in the film feeding box 101, and a motor for driving the tear-off roll 107 and the distribution rollers 119 to rotate respectively in the film feeding box 101.

[0044] like Figure 2 , Figure 3 As shown, multiple electrode plates 104 are arranged in the plasma treatment zone 103. Product material 110 is wound around the material roll 105, and a protective film 111 covers the product material 110. In use, the product material 110 and the protective film 111 are passed between two distributing rollers 119. The end of the protective film 111 is fixed on the tear film roll 107. The product material 110 is passed around the outside of the tension roller 108. Then the product material 110 is passed between multiple electrode plates 104. Then the product material 110 is passed between two straightening rollers 114. The protective film 111 on the film roll 113 is pulled out and passed together with the product material 110 between the two straightening rollers 114. After the protective film 111 and the product material 110 are bonded together, they are passed around the tension roller 115 and fixed on the recovery roll 112.

[0045] like Figure 2 , Figure 3 As shown, a push-out electric cylinder 116 is fixedly installed on both the film feeding box 101 and the film receiving box 102. The output end of the push-out electric cylinder 116 on the film feeding box 101 is located next to the material roll 105, and the output end of the push-out electric cylinder 116 on the film receiving box 102 is located next to the recovery roll 112.

[0046] When the feeding mechanism places the material roll 105 onto the unwinding shaft 106 and the feeding mechanism places the recovery roll 112 onto the take-up shaft 117, the product material 110 and protective film 111 on the outside of the material roll 105 are first passed between two separating rollers 119 by a robot inside the film feeding box 101 or manually. Then, the protective film 111 and the product material 110 are torn apart, and the end of the protective film 111 is fixed on the tearing roll 107. The protective film 111 passes through the outside of the tension roller 108 and then through multiple sets of electrode plates 104. Then, the protective film 111 on the film roll 113 is pulled out by a robot inside the take-up box 102 or manually. The protective film 111 and the product material 110 are passed together between two correction rollers 114. The two correction rollers 114 bond the product material 110 and the protective film 111 together. Then, the product material 110 and the protective film 111 are fixed on the recovery roll 112 by passing around the take-up tension roller 115.

[0047] The unwinding shaft 106, the film tearing roll 107, the film roll shaft 118, the alignment roller 114, the tension roller 115, and the take-up shaft 117 rotate. The film tearing roll 107 takes up the protective film 111 on the outside of the product material 110 on the material roll 105. When the product material 110 passes through the plasma treatment zone 103 and the electrode plate 104, it undergoes plasma treatment. The film roll shaft 118 sends out the film roll 113. The alignment roller 114 laminates the plasma-treated product material 110 and the protective film 111. Then, the take-up roll 112 takes up the laminated product material 110 and the protective film 111.

[0048] like Figures 4-8 As shown, the feeding mechanism includes an infeed conveyor frame 201 located next to the film feeding box 101. A connecting frame 204 is fixedly installed on the infeed conveyor frame 201. Multiple power rollers 205 are provided on the connecting frame 204. A motor for driving the power rollers 205 to rotate is provided on the connecting frame 204. An infeed conveyor belt 202 is provided on the infeed conveyor frame 201. An infeed motor 203 for driving the infeed conveyor belt 202 to rotate is fixedly installed on the infeed conveyor frame 201.

[0049] like Figures 4-8 As shown, the feeding mechanism conveys a carrying module, which includes a moving table 206. A side support plate 207 and a lower tray 228 are fixedly installed on the moving table 206. A lifting plate 215 is slidably installed inside the moving table 206. A lifting block 214 is fixedly installed on the lifting plate 215. An inner plate 227 is fixedly installed on the lifting plate 215. An inner column 224 is fixedly installed on the inner plate 227. An ejector plate 229 is slidably installed outside the inner column 224.

[0050] like Figures 4-8As shown, the carrying module also includes a lower electric cylinder 208 fixedly installed on the moving platform 206. A lifting column 210 is fixedly installed on the output end of the lower electric cylinder 208. A lower rotating rod 209 is rotatably installed on the moving platform 206. A lower horizontal groove 211 is provided on the lower rotating rod 209. The lifting column 210 slides in the lower horizontal groove 211. A side rotating rod 212 is rotatably installed on the lower rotating rod 209. An upper rotating rod 213 is rotatably installed on the side rotating rod 212. The upper rotating rod 213 is rotatably installed with the moving platform 206 and with the lifting block 214.

[0051] like Figures 4-8 As shown, the carrying module also includes an outer rotating plate 217 rotatably mounted on the moving platform 206. A lower rotating block 216 is rotatably mounted on the outer rotating plate 217. The lower rotating block 216 is rotatably mounted to the moving platform 206 through a waist hole. A top rotating rod 218 is rotatably mounted on the outer rotating plate 217. An inner rotating rod 219 is rotatably mounted on the top rotating rod 218. An inner sliding groove 220 is provided on the inner rotating rod 219. The inner rotating rod 219 is rotatably mounted to the inner plate 227 through the inner sliding groove 220. An inner sliding disk 221 is rotatably mounted on the inner rotating rod 219. An inner sliding rod 222 is fixedly mounted on the inner sliding disk 221. An inner spring 223 is provided between the inner sliding disk 221 and the inner plate 227. Two outer locking blocks 225 are rotatably mounted on the inner column 224. An inner pull rod 226 is rotatably mounted on the outer locking blocks 225. The inner pull rod 226 is rotatably mounted to the top of the inner sliding rod 222.

[0052] like Figures 4-8 As shown, the carrying module also includes a lifting support 235 fixedly installed on the ejection plate 229. A side top column 230 is fixedly installed on the lifting support 235 and slides along the moving platform 206. A lifting guide column 231 is fixedly installed on the lifting support 235. A vertical slide groove 232 is provided on the moving platform 206. A lifting slider 234 is slidably installed in the vertical slide groove 232. The lifting guide column 231 and the lifting slider 234 are slidably installed. A return spring 233 is provided between the lifting support 235 and the lifting slider 234.

[0053] When the material roll 105 is placed on the inner column 224, under normal conditions, the two outer locking blocks 225 are in the open state. At this time, the lower end of the lower rotating block 216 is pressed down first. The lower rotating block 216 rotates relative to the moving table 206, which drives the outer rotating plate 217 to rotate, which in turn drives the top rotating rod 218 to rotate. The top rotating rod 218 drives the inner sliding plate 221 and the inner sliding rod 222 to slide along the inner column 224 through the inner rotating rod 219. This causes the outer locking blocks 225 to rotate relative to the inner column 224 through the inner pull rod 226. The inner spring 223 is compressed. At this time, it passes through the two outer locking blocks 225 and is fitted on the outside of the inner column 224. Then the lower rotating block 216 is released, and the inner spring 223 rebounds, causing the two outer locking blocks 225 to rotate outward to move the outer side of the material roll 105 and prevent the material roll 105 from falling out.

[0054] At this time, the material roll 105 falls on the two lifting supports 235. Then, the lower electric cylinder 208 retracts, driving the lower rotating rod 209 to rotate. This rotates the upper rotating rod 213 through the side rotating rod 212, thereby driving the lifting block 214 and the lifting plate 215 to descend. This causes the inner plate 227, the push plate 229, and the lifting supports 235 to descend, so that the lower half of the material roll 105 falls onto the lower tray 228 and the side support plate 207, which support the material roll 105.

[0055] The motor 203 drives the conveyor belt 202 to rotate, transporting the carrying module placed on the conveyor belt 202. The carrying module is then transported to the power roller 205, which rotates to continue transporting the carrying module.

[0056] like Figures 9-12 As shown, the delivery mechanism includes a side conveyor frame 302 located in the film delivery box 101. Multiple horizontal conveyor rollers 303 are rotatably mounted on the conveyor frame 302. A motor for driving the horizontal conveyor rollers 303 to rotate is provided on the conveyor frame 302. A delivery frame 304 is provided next to the film receiving box 102. A delivery transmission belt 306 is rotatably mounted on the delivery frame 304. A delivery motor 305 for driving the delivery transmission belt 306 to rotate is provided on the delivery frame 304.

[0057] like Figures 9-12 As shown, the loading and unloading module includes a fixed frame 301 fixedly mounted on the conveyor frame 302. A transverse frame 307 is slidably mounted on the fixed frame 301. A cylinder for driving the transverse frame 307 to slide along the fixed frame 301 is provided inside the fixed frame 301. A transverse upright 308 is fixedly mounted on the transverse upright 307. A top motor 309 is fixedly mounted on the transverse upright 308. A lifting screw 310 is rotatably mounted on the transverse upright 308. The motor shaft of the top motor 309 is fixedly mounted to the lifting screw 310. A lifting platform 311 is slidably mounted on the transverse upright 308. 1. A threaded drive is formed with the lifting screw 310. Multiple idler rollers 312 are rotatably mounted on the lifting platform 311. A motor for driving the idler rollers 312 to rotate is provided on the lifting platform 311. A push-in electric cylinder 313 is fixedly mounted on the lifting platform 311. A push-in block 314 is fixedly mounted on the output end of the push-in electric cylinder 313. A down-pressing electric cylinder 315 is fixedly mounted on the lifting platform 311. A down-pressing plate 316 is fixedly mounted on the output end of the down-pressing electric cylinder 315. A retraction electric cylinder 317 is fixedly mounted on the lifting platform 311. A retraction block 318 is fixedly mounted on the output end of the retraction electric cylinder 317.

[0058] In the initial state, the lifting platform 311 is in the raised state. First, the processed material roll 105 needs to be removed from the unwinding shaft 106. The power roller 205 transports the carrying module to the loading and unloading module support roller 312 located next to the connecting frame 204. Then, the support roller 312 rotates to center the carrying module. Subsequently, the top motor 309 drives the lifting screw 310 to rotate, causing the lifting platform 311 to descend. Then, the retraction cylinder 317 extends, causing the retraction block 318 to extend and press down the lower end of the lower rotating block 216. The lower rotating block 216 rotates relative to the moving platform 206, causing the outer rotating plate 217 to rotate, which in turn causes the top rotating rod 218 to rotate. The top rotating rod 218 drives the inner sliding plate 221 and the inner sliding rod 222 to slide along the inner column 224 through the inner rotating rod 219. This, in turn, drives the outer locking block 225 to rotate relative to the inner column 224 through the inner pull rod 226. The inner spring 223 is compressed. The retraction of the lower pressure cylinder 315 causes the lower pressure plate 316 to descend, which in turn causes the side rotating rod 212 to rotate, thereby causing the upper rotating rod 213 to rotate. This causes the lifting block 214, lifting plate 215, inner plate 227, ejection plate 229, and lifting support 235 to rise, so that the side top column 230 lifts the material roll 105 from the lower tray 228 and side support plate 207. Then, the electric cylinder in the fixing frame 301 extends, causing the transverse frame 307 to slide along the fixing frame 301, so that the outer clamping block 225 contacts the unwinding shaft 106. Then, the ejection electric cylinder 116 in the film feeding box 101 extends, pushing the material roll 105 on the unwinding shaft 106 to the outside of the inner column 224. Then, the push-in electric cylinder 313 retracts, and the return spring 233 rebounds, so that the ejection plate 229, side top column 233, and lifting support 235 return to their initial positions, completing the removal of the processed material roll 105 from the unwinding shaft 106.

[0059] Next, the next roll 105 carrying the product material 110 wound around it needs to be placed outside the unwinding shaft 106. The power roller 205 transports the carrying module to the loading / unloading module support roller 312 located next to the connecting frame 204. Then, the support roller 312 rotates to center the carrying module. Then, the top motor 309 drives the lifting screw 310 to rotate, causing the lifting platform 311 to descend. Then, the retraction cylinder 317 extends, causing the retraction block 318 to extend and press down the lower end of the lower rotating block 216. The lower rotating block 216 rotates relative to the moving platform 206, causing the outer rotating plate 217 to rotate. The top rotating rod 218 rotates, and the top rotating rod 218 drives the inner sliding plate 221 and inner sliding rod 222 to slide along the inner column 224 via the inner rotating rod 219. This causes the outer locking block 225 to rotate relative to the inner column 224 via the inner pull rod 226, compressing the inner spring 223. Subsequently, the lower pressing electric cylinder 315 retracts, causing the lower pressing plate 316 to descend, which rotates the side rotating rod 212, thereby driving the upper rotating rod 213 to rotate. This causes the lifting block 214, lifting plate 215, inner plate 227, ejection plate 229, and lifting support 235 to rise, so that the side top column 230 can lift the material coil 105. The material roll 105 is lifted from the lower tray 228 and side tray 207. Then, the electric cylinder inside the fixing frame 301 extends, causing the traversing frame 307 to slide along the fixing frame 301, making the outer locking block 225 contact the unwinding shaft 106. Next, the pushing electric cylinder 313 extends, pushing the side top column 230, lifting support 235, and ejection plate 229 outwards via the pushing block 314. The return spring 233 is compressed, pushing the material roll 105 located on the lifting support 235 to the outside of the unwinding shaft 106 via the ejection plate 229. Then, the pressing electric cylinder 315 rises, causing the lower pressing plate 316 to rise. The electric cylinder 208 retracts, causing the lower rotating rod 209 to rotate. This, in turn, causes the upper rotating rod 213 to rotate via the side rotating rod 212. This, in turn, causes the lifting block 214 and the lifting plate 215 to descend, which in turn causes the inner plate 227, the push plate 229, and the lifting support 235 to descend. This causes the lifting support 235 to detach from the material roll 105, leaving the material roll 105 outside the unwinding shaft 106. Then, the electric cylinder 313 is pushed in to retract, and the return spring 233 rebounds, causing the push plate 229, the side top column 230, and the lifting support 235 to return to their initial positions, thus completing the placement of the material roll 105 outside the unwinding shaft 106.

[0060] Subsequently, both the carrying module carrying the newly removed roll 105 and the carrying module not carrying the roll 105 arrive at the delivery conveyor belt 306. Then, the delivery conveyor belt 306 reverses, causing the carrying module carrying the roll 105 to arrive at the idler roller 312.

[0061] Subsequently, the lifting platform 311 descends, and the carrying module is conveyed to the horizontal conveyor roller 303 via the idler roller 312. The horizontal conveyor roller 303 conveys the carrying module to the loading and unloading module located next to the delivery frame 304. The loading and unloading module drives the carrying module to be lifted. When the carrying module without the material roll 105 reaches the outside of the take-up shaft 117, the retraction cylinder 317 extends, driving the retraction block 318 to extend and press the lower end of the lower rotating block 216. The lower rotating block 216 rotates relative to the moving platform 206, driving the outer rotating plate 217 to rotate, driving the top rotating rod 218 to rotate. The top rotating rod 218 passes through the inner... The rotating rod 219 drives the inner sliding plate 221 and the inner sliding rod 222 to slide along the inner column 224, thereby driving the outer locking block 225 to rotate relative to the inner column 224 through the inner pull rod 226. The inner spring 223 is compressed, and the push-out electric cylinder 116 located in the take-up box 102 extends, pushing the take-up roll 112 on the take-up shaft 117 to the outside of the inner column 224 of the carrying module. Then the carrying module reaches the delivery transmission belt 306, and the carrying module is delivered by the delivery transmission belt 306, so as to remove the take-up roll 112 of the product material 110 that has been wound on the outside of the take-up shaft 117.

[0062] Then the next carrying module moves the material roll 105 that has just been taken from the film feeding box 101 to the side of the take-up shaft 117. The carrying module uses the taken-up material roll 105 as a new take-up roll 112 and puts it on the outside of the take-up shaft 117. Then the carrying module leaves from the delivery conveyor belt 306, and so on.

[0063] First, a carrying module removes the processed roll 105 that was originally located outside the unwinding shaft 106. Then, the next carrying module places the roll 105, which is wrapped with unprocessed product material 110 and protective film 111, on the unwinding shaft 106. Then, the carrying module removes the recycle roll 112 from the winding shaft 117. Then, another carrying module with the roll 105 places the newly removed roll 105 outside the winding shaft 117 as a new recycle roll 112.

[0064] The working principle of the RTR vacuum plasma treatment and coating integrated device disclosed in this invention is as follows: When the feeding mechanism places the material roll 105 on the unwinding shaft 106, and the feeding mechanism places the recovery roll 112 on the take-up shaft 117, the product material 110 and the protective film 111 on the outside of the material roll 105 are first passed between the two separating rollers 119 by the robotic arm inside the film feeding box 101 or manually. Then, the protective film 111 and the product material 110 are torn apart, and the end of the protective film 111 is fixed to the tearing roll 1. On 07, the protective film 111 passes through the outside of the tension roller 108, then through multiple sets of electrode plates 104. Then, the protective film 111 on the film roll 113 is pulled out by the robot or manually in the film take-up box 102. The protective film 111 and the product material 110 are passed together between two correction rollers 114. The two correction rollers 114 are used to bond the product material 110 and the protective film 111. Then, the protective film 111 is passed around the tension roller 115 and the ends of the product material 110 and the protective film 111 are fixed on the take-up roll 112. The unwinding shaft 106, the film tearing roll 107, the film roll shaft 118, the alignment roller 114, the tension roller 115, and the take-up shaft 117 rotate. The film tearing roll 107 takes up the protective film 111 on the outside of the product material 110 on the material roll 105. When the product material 110 passes through the plasma treatment zone 103 and the electrode plate 104, it undergoes plasma treatment. The film roll shaft 118 sends out the film roll 113. The alignment roller 114 laminates the plasma-treated product material 110 and the protective film 111. Then, the take-up roll 112 takes up the laminated product material 110 and the protective film 111.

[0065] When the material roll 105 is placed on the inner column 224, under normal conditions, the two outer locking blocks 225 are in the open state. At this time, the lower end of the lower rotating block 216 is pressed down first. The lower rotating block 216 rotates relative to the moving table 206, which drives the outer rotating plate 217 to rotate, which in turn drives the top rotating rod 218 to rotate. The top rotating rod 218 drives the inner sliding plate 221 and the inner sliding rod 222 to slide along the inner column 224 through the inner rotating rod 219. This causes the outer locking blocks 225 to rotate relative to the inner column 224 through the inner pull rod 226. The inner spring 223 is compressed. At this time, it passes through the two outer locking blocks 225 and is fitted on the outside of the inner column 224. Then the lower rotating block 216 is released, and the inner spring 223 rebounds, causing the two outer locking blocks 225 to rotate outward to move the outer side of the material roll 105 and prevent the material roll 105 from falling out. At this point, the material roll 105 falls onto the two lifting supports 235. Then, the lower electric cylinder 208 retracts, causing the lower rotating rod 209 to rotate. This, in turn, drives the upper rotating rod 213 to rotate via the side rotating rod 212, thereby causing the lifting block 214 and lifting plate 215 to descend. This, in turn, causes the inner disc 227, the ejector disc 229, and the lifting supports 235 to descend, allowing the lower half of the material roll 105 to fall onto the lower pallet 228 and the side support plate 207, which support the material roll 105. The feed motor 203 drives the feed conveyor belt 202 to rotate, transporting the carrying module placed on the feed conveyor belt 202. The carrying module is then transported to the power roller 205, which rotates to continue transporting the carrying module.

[0066] In the initial state, the lifting platform 311 is in the raised state. First, the processed material roll 105 needs to be removed from the unwinding shaft 106. The power roller 205 transports the carrying module to the loading and unloading module support roller 312 located next to the connecting frame 204. Then, the support roller 312 rotates to center the carrying module. Subsequently, the top motor 309 drives the lifting screw 310 to rotate, causing the lifting platform 311 to descend. Then, the retraction cylinder 317 extends, causing the retraction block 318 to extend and press down the lower end of the lower rotating block 216. The lower rotating block 216 rotates relative to the moving platform 206, causing the outer rotating plate 217 to rotate, which in turn causes the top rotating rod 218 to rotate. The top rotating rod 218 drives the inner sliding plate 221 and the inner sliding rod 222 to slide along the inner column 224 through the inner rotating rod 219. This, in turn, drives the outer locking block 225 to rotate relative to the inner column 224 through the inner pull rod 226. The inner spring 223 is compressed. The retraction of the lower pressure cylinder 315 causes the lower pressure plate 316 to descend, which in turn causes the side rotating rod 212 to rotate, thereby causing the upper rotating rod 213 to rotate. This causes the lifting block 214, lifting plate 215, inner plate 227, ejection plate 229, and lifting support 235 to rise, so that the side top column 230 lifts the material roll 105 from the lower tray 228 and side support plate 207. Then, the electric cylinder in the fixing frame 301 extends, causing the transverse frame 307 to slide along the fixing frame 301, so that the outer clamping block 225 contacts the unwinding shaft 106. Then, the ejection electric cylinder 116 in the film feeding box 101 extends, pushing the material roll 105 on the unwinding shaft 106 to the outside of the inner column 224. Then, the push-in electric cylinder 313 retracts, and the return spring 233 rebounds, so that the ejection plate 229, side top column 233, and lifting support 235 return to their initial positions, completing the removal of the processed material roll 105 from the unwinding shaft 106.

[0067] Next, the next roll 105 carrying the product material 110 wound around it needs to be placed outside the unwinding shaft 106. The power roller 205 transports the carrying module to the loading / unloading module support roller 312 located next to the connecting frame 204. Then, the support roller 312 rotates to center the carrying module. Then, the top motor 309 drives the lifting screw 310 to rotate, causing the lifting platform 311 to descend. Then, the retraction cylinder 317 extends, causing the retraction block 318 to extend and press down the lower end of the lower rotating block 216. The lower rotating block 216 rotates relative to the moving platform 206, causing the outer rotating plate 217 to rotate. The top rotating rod 218 rotates, and the top rotating rod 218 drives the inner sliding plate 221 and inner sliding rod 222 to slide along the inner column 224 via the inner rotating rod 219. This causes the outer locking block 225 to rotate relative to the inner column 224 via the inner pull rod 226, compressing the inner spring 223. Subsequently, the lower pressing electric cylinder 315 retracts, causing the lower pressing plate 316 to descend, which rotates the side rotating rod 212, thereby driving the upper rotating rod 213 to rotate. This causes the lifting block 214, lifting plate 215, inner plate 227, ejection plate 229, and lifting support 235 to rise, so that the side top column 230 can lift the material coil 105. The material roll 105 is lifted from the lower tray 228 and side tray 207. Then, the electric cylinder inside the fixing frame 301 extends, causing the traversing frame 307 to slide along the fixing frame 301, making the outer locking block 225 contact the unwinding shaft 106. Next, the pushing electric cylinder 313 extends, pushing the side top column 230, lifting support 235, and ejection plate 229 outwards via the pushing block 314. The return spring 233 is compressed, pushing the material roll 105 located on the lifting support 235 to the outside of the unwinding shaft 106 via the ejection plate 229. Then, the pressing electric cylinder 315 rises, causing the lower pressing plate 316 to rise. The electric cylinder 208 retracts, causing the lower rotating rod 209 to rotate. This, in turn, causes the upper rotating rod 213 to rotate via the side rotating rod 212. This, in turn, causes the lifting block 214 and the lifting plate 215 to descend, which in turn causes the inner plate 227, the push plate 229, and the lifting support 235 to descend. This causes the lifting support 235 to detach from the material roll 105, leaving the material roll 105 outside the unwinding shaft 106. Then, the electric cylinder 313 is pushed in to retract, and the return spring 233 rebounds, causing the push plate 229, the side top column 230, and the lifting support 235 to return to their initial positions, thus completing the placement of the material roll 105 outside the unwinding shaft 106.

[0068] Subsequently, both the carrying module carrying the newly removed coil 105 and the carrying module without coil 105 reach the delivery conveyor belt 306. The delivery conveyor belt 306 then reverses, causing the carrying module carrying coil 105 to reach the idler roller 312. The lifting platform 311 then descends, conveying the carrying module to the horizontal conveyor roller 303 via the idler roller 312. The horizontal conveyor roller 303 conveys the carrying module to the loading / unloading module located next to the delivery frame 304. The loading / unloading module lifts the carrying module. When the carrying module without coil 105 reaches the outside of the take-up shaft 117, the retraction cylinder 317 extends, causing the retraction block 318 to extend and press down the lower end of the lower rotating block 216. The lower rotating block 216 rotates relative to the moving platform 206, causing the outer rotating plate 217 to rotate, which in turn causes the top rotating rod 218 to rotate. The top rotating rod 218 rotates through the inner... The rotating rod 219 drives the inner sliding plate 221 and the inner sliding rod 222 to slide along the inner column 224, thereby driving the outer locking block 225 to rotate relative to the inner column 224 through the inner pull rod 226. The inner spring 223 is compressed, and the push-out electric cylinder 116 located in the take-up box 102 extends, pushing the take-up roll 112 on the take-up shaft 117 to the outside of the inner column 224 of the carrying module. Then the carrying module reaches the delivery transmission belt 306, and the carrying module is delivered by the delivery transmission belt 306, so as to remove the take-up roll 112 of the product material 110 that has been wound on the outside of the take-up shaft 117.

[0069] Then the next carrying module moves the material roll 105 that has just been taken from the film feeding box 101 to the side of the take-up shaft 117. The carrying module uses the taken-up material roll 105 as a new take-up roll 112 and puts it on the outside of the take-up shaft 117. Then the carrying module leaves from the delivery conveyor belt 306, and so on.

[0070] First, a carrying module removes the processed roll 105 that was originally located outside the unwinding shaft 106. Then, the next carrying module places the roll 105, which is wrapped with unprocessed product material 110 and protective film 111, on the unwinding shaft 106. Then, the carrying module removes the recycle roll 112 from the winding shaft 117. Then, another carrying module with the roll 105 places the newly removed roll 105 outside the winding shaft 117 as a new recycle roll 112.

[0071] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the present invention based on the technical solution and inventive concept of the present invention should be covered within the scope of protection of the present invention.

Claims

1. An integrated RTR vacuum plasma treatment and coating device, comprising a processing mechanism for plasma treatment and winding of product material (110), characterized in that: The processing mechanism includes a film feeding box (101), and is provided with a feeding mechanism for feeding in a roll (105) wrapped with product material (110) and protective film (111) and an output mechanism for outputting the processed product material (110). The output mechanism is provided with two loading and unloading modules. The processing mechanism includes a plasma processing zone (103) fixedly installed on a film feeding box (101), a film taking box (102) fixedly installed on the plasma processing zone (103), an unwinding shaft (106) rotatably installed inside the film feeding box (101), a motor for driving the unwinding shaft (106) to rotate inside the film feeding box (101), a taking box (117) rotatably installed inside the film taking box (102), a motor for driving the taking box (117) to rotate inside the taking box (102), a material roll (105) outside the unwinding shaft (106), and a rewind roll (112) outside the taking box (117).

2. The integrated RTR vacuum plasma treatment and coating device according to claim 1, characterized in that: The processing mechanism also includes a tear-off roll (107) rotatably installed in a film feeding box (101), a tensioning cylinder (109) fixedly installed in the film feeding box (101), a tension roller (108) fixedly installed on the output end of the tensioning cylinder (109), two correction rollers (114) rotatably installed in a film receiving box (102), a film roll shaft (118) rotatably installed in the film receiving box (102), a film roll (113) is provided outside the film roll shaft (118), a tension roller (115) rotatably installed in the film receiving box (102), a motor for driving the correction roller (114) and the film roll (113) to rotate respectively in the film receiving box (102), two distribution rollers (119) rotatably installed in the film feeding box (101), and a motor for driving the tear-off roll (107) and the distribution roller (119) to rotate respectively in the film feeding box (101).

3. The integrated RTR vacuum plasma treatment and coating device according to claim 2, characterized in that: Multiple electrode plates (104) are provided in the plasma treatment zone (103). Product material (110) is wound around the material roll (105), and a protective film (111) covers the product material (110). In use, the product material (110) and the protective film (111) are passed between two distributing rollers (119), the end of the protective film (111) is fixed on the film-tearing roll (107), the product material (110) is wrapped around the outside of the tension roller (108), and then the product material (110) is passed between the multiple electrode plates (104), and then the product material (110) is passed between two straightening rollers (114). The protective film (111) on the film roll (113) is pulled out and passed through the two correction rollers (114) together with the product material (110). After the protective film (111) and the product material (110) are bonded together, they pass around the tension roller (115) and are fixed on the take-up roll (112). Each of the film feeding box (101) and the film taking box (102) is fixedly installed with an electric cylinder (116). The output end of the electric cylinder (116) on the film feeding box (101) is located next to the material roll (105), and the output end of the electric cylinder (116) on the film taking box (102) is located next to the take-up roll (112).

4. The integrated RTR vacuum plasma treatment and coating device according to claim 1, characterized in that: The feeding mechanism includes an infeeding conveyor frame (201) located next to the film feeding box (101). A connecting frame (204) is fixedly installed on the infeeding conveyor frame (201). Multiple power rollers (205) are provided on the connecting frame (204). A motor for driving the power rollers (205) to rotate is provided on the connecting frame (204). An infeeding conveyor belt (202) is provided on the infeeding conveyor frame (201). An infeeding motor (203) for driving the infeeding conveyor belt (202) to rotate is fixedly installed on the infeeding conveyor frame (201).

5. The integrated RTR vacuum plasma treatment and coating device according to claim 4, characterized in that: The feeding mechanism conveys a carrying module, which includes a moving platform (206), a side support plate (207) and a lower tray (228) fixedly installed on the moving platform (206), a lifting plate (215) slidably installed inside the moving platform (206), a lifting block (214) fixedly installed on the lifting plate (215), an inner plate (227) fixedly installed on the lifting plate (215), an inner column (224) fixedly installed on the inner plate (227), and an ejection plate (229) slidably installed outside the inner column (224).

6. The integrated RTR vacuum plasma treatment and coating device according to claim 5, characterized in that: The carrying module also includes a lower electric cylinder (208) fixedly installed on the mobile platform (206). A lifting column (210) is fixedly installed on the output end of the lower electric cylinder (208). A lower rotating rod (209) is rotatably installed on the mobile platform (206). A lower horizontal groove (211) is provided on the lower rotating rod (209). The lifting column (210) slides in the lower horizontal groove (211). A side rotating rod (212) is rotatably installed on the lower rotating rod (209). An upper rotating rod (213) is rotatably installed on the side rotating rod (212). The upper rotating rod (213) is rotatably installed on the mobile platform (206). The upper rotating rod (213) is rotatably installed on the lifting block (214).

7. The integrated RTR vacuum plasma treatment and coating device according to claim 6, characterized in that: The carrying module also includes an outer rotating plate (217) rotatably mounted on a mobile platform (206). A lower rotating block (216) is rotatably mounted on the outer rotating plate (217). The lower rotating block (216) is rotatably mounted to the mobile platform (206) through a waist hole. A top rotating rod (218) is rotatably mounted on the outer rotating plate (217). An inner rotating rod (219) is rotatably mounted on the top rotating rod (218). An inner sliding groove (220) is provided on the inner rotating rod (219). The inner rotating rod (219) passes through the inner sliding groove (220). 220) is rotatably mounted to the inner plate (227). An inner slide plate (221) is rotatably mounted on the inner rotating rod (219). An inner slide rod (222) is fixedly mounted on the inner slide plate (221). An inner spring (223) is provided between the inner slide plate (221) and the inner plate (227). Two outer locking blocks (225) are rotatably mounted on the inner column (224). An inner pull rod (226) is rotatably mounted on the outer locking blocks (225). The inner pull rod (226) is rotatably mounted to the top of the inner slide rod (222).

8. The integrated RTR vacuum plasma treatment and coating device according to claim 7, characterized in that: The carrying module also includes a lifting support (235) fixedly installed on the ejection plate (229). A side top column (230) is fixedly installed on the lifting support (235). The side top column (230) slides along the moving platform (206). A lifting guide column (231) is fixedly installed on the lifting support (235). A vertical slide groove (232) is provided on the moving platform (206). A lifting slider (234) is slidably installed in the vertical slide groove (232). The lifting guide column (231) and the lifting slider (234) are slidably installed. A return spring (233) is provided between the lifting support (235) and the lifting slider (234).

9. The integrated RTR vacuum plasma treatment and coating device according to claim 1, characterized in that: The delivery mechanism includes a side conveyor frame (302) located in the film delivery box (101), a plurality of horizontal conveyor rollers (303) are rotatably mounted on the conveyor frame (302), and a motor for driving the horizontal conveyor rollers (303) to rotate is provided on the conveyor frame (302). A delivery frame (304) is provided next to the film receiving box (102), and a delivery transmission belt (306) is rotatably mounted on the delivery frame (304). A delivery motor (305) for driving the delivery transmission belt (306) to rotate is provided on the delivery frame (304).

10. The integrated RTR vacuum plasma treatment and coating device according to claim 9, characterized in that: The loading and unloading module includes a fixed frame (301) fixedly mounted on a conveyor frame (302), a traversing frame (307) slidably mounted on the fixed frame (301), a cylinder for driving the traversing frame (307) to slide along the fixed frame (301) is provided inside the fixed frame (301), a traversing upright frame (308) is fixedly mounted on the traversing frame (307), a top motor (309) is fixedly mounted on the traversing upright frame (308), a lifting screw (310) is rotatably mounted on the traversing upright frame (308), the motor shaft of the top motor (309) is fixedly mounted to the lifting screw (310), and a lifting platform (311) is slidably mounted on the traversing upright frame (308). 1) A threaded drive is formed with the lifting screw (310). Multiple rollers (312) are rotatably installed on the lifting platform (311). A motor for driving the rollers (312) to rotate is provided on the lifting platform (311). A push-in electric cylinder (313) is fixedly installed on the lifting platform (311). A push-in block (314) is fixedly installed on the output end of the push-in electric cylinder (313). A down-pressing electric cylinder (315) is fixedly installed on the lifting platform (311). A down-pressing plate (316) is fixedly installed on the output end of the down-pressing electric cylinder (315). A retraction electric cylinder (317) is fixedly installed on the lifting platform (311). A retraction block (318) is fixedly installed on the output end of the retraction electric cylinder (317).

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