Piezoelectric ceramic fast steering mirror driving control system

Abstract

The invention discloses a piezoelectric ceramic fast steering mirror driving control system which comprises a signal conditioning module, a signal modulation module, an isolation enhancement module, a power output module and a feedback module. The signal conditioning module receives a control signal input from the outside and a feedback signal output by the feedback module, performs closed-loop processing to obtain a conditioning signal and outputs the conditioning signal to the signal modulation module; the signal modulation module carries out modulation processing on the conditioning signal to obtain a modulation signal and outputs the modulation signal to the isolation enhancement module; the isolation enhancement module enhances the driving capability of the modulation signal, obtains a driving signal and outputs the driving signal to the power output module; the power output module uses the driving signal to drive the piezoelectric ceramic fast reflecting mirror; the feedback module receives an output signal of the piezoelectric ceramic fast reflecting mirror, carries out signal processing to obtain a feedback signal, and outputs the feedback signal to the signal conditioning module. The system is high in driving capability, high in efficiency and high in integration level, effectively reduces the power and size of a driving control system, and has an important application value.

Description

Technical Field

[0001] This invention relates to the field of space optical communication, and in particular to a piezoelectric ceramic fast-reflecting mirror drive control system. Background Technology

[0002] A fast steering mirror (FSM) is a high-precision optical deflection control device. Its core function is to achieve rapid and accurate beam deflection, possessing microradian resolution (μrad), millisecond-level response speed (ms), and bandwidth exceeding kilohertz (kHz). It is a key component in the field of space optical communication. In the context of space optical communication applications, for the FSM to fulfill its core functions, the designed piezoelectric ceramic drive controller must not only possess capabilities such as fast dynamic response, high resolution, and large driving force, but also be small in size, highly efficient, and generate little heat. However, current technology has not yet proposed a drive control technology that can simultaneously meet these stringent requirements. With the future development of space optical communication towards miniaturization, there is an urgent need for a high-performance piezoelectric ceramic fast steering mirror drive control technology that meets the aforementioned application requirements.

[0003] Piezoelectric ceramics require high-voltage drive (approximately 100V / μm). In piezoelectric ceramic fast reflectors, hybrid integrated circuits, such as PA92 and PB58, are commonly used. These integrated circuits mostly employ high-voltage linear amplification principles, thus offering advantages in high control precision. Furthermore, drive control systems designed based on these integrated circuits are simple to implement and exhibit stable performance. However, these integrated circuits not only have limited output power (affecting drive capability) but also low efficiency. High-power applications require heat dissipation measures, leading to an increase in the size of the drive control system. This conflicts with the miniaturization requirements in the field of space optical communication. Therefore, if this type of drive control technology continues to be used, the development of miniaturization in the field of space optical communication will be severely limited.

[0004] To address the issue of high power consumption and low efficiency in drive control systems, which leads to increased system size, traditional linear amplification-based solutions are no longer suitable. Therefore, it is necessary to improve existing technologies and propose a novel piezoelectric ceramic fast-reflecting mirror drive control technology that simultaneously meets the requirements for drive power, system efficiency, control accuracy, response speed, and size.

[0005] The statements herein provide only background information in relation to this invention and do not necessarily constitute prior art. Summary of the Invention

[0006] The purpose of this invention is to provide a piezoelectric ceramic fast-reflecting mirror drive control system to solve the problem that the requirements of existing drive control systems in terms of control accuracy, system efficiency, and system size cannot be met simultaneously.

[0007] To achieve the above objectives, the present invention provides a piezoelectric ceramic fast reflector drive control system, comprising: a signal conditioning module, a signal modulation module, an isolation enhancement module, a power output module, and a feedback module; the signal conditioning module is connected to the signal modulation module and the feedback module, receives a control signal input from an external source and a feedback signal output from the feedback module, performs closed-loop processing to obtain a conditioned signal, and outputs it to the signal modulation module; the signal modulation module is also connected to the isolation enhancement module, modulates the conditioned signal to obtain a modulated signal, and outputs it to the isolation enhancement module; the isolation enhancement module is also connected to the power output module, enhances the driving capability of the modulated signal, obtains a driving signal, and outputs it to the power output module; the power output module is also connected to the piezoelectric ceramic fast reflector, uses the driving signal to drive the piezoelectric ceramic fast reflector; the feedback module is also connected to the piezoelectric ceramic fast reflector, receives the output signal of the piezoelectric ceramic fast reflector, performs signal processing to obtain a feedback signal, and outputs it to the signal conditioning module.

[0008] Optionally, the control signal and feedback signal input to the signal conditioning module are digital signals or analog signals; correspondingly, the closed-loop processing is implemented through discrete digital processing or continuous analog processing; correspondingly, the modulation processing is implemented through discrete digital processing or continuous analog processing.

[0009] Optionally, the closed-loop processing is performed based on a PID method, and the signal conditioning module is equipped with a PID controller, whose control law is as follows: In the formula, It is the output signal of the PID controller. It is a proportionality coefficient. It is the integration time constant. It is the differential time constant. It is the deviation between the control signal and the feedback signal.

[0010] Optionally, the modulation process is performed using a PWM-based method.

[0011] Optionally, when the closed-loop processing is implemented through analog processing, the signal conditioning module includes a subtraction circuit and an analog PI controller. The subtraction circuit performs a subtraction operation on the input control signal and the feedback signal to obtain an error signal. The analog PI controller performs an analog PI operation on the error signal to obtain the output conditioning signal. When closed-loop processing is implemented through digital processing, a main controller is set in the signal conditioning module, and signal processing is integrated into the main controller, which is a DSP, ARM, or FPGA.

[0012] Optionally, when the modulation processing is implemented through analog processing, the signal modulation module includes a comparator, which compares the triangular wave signal with the input conditioning signal to generate a PWM signal, which is the modulation signal output by the signal modulation module. When modulation processing is implemented through digital processing, a main controller is set in the signal modulation module, and signal processing is integrated into the main controller, which is a DSP, ARM, or FPGA.

[0013] Optionally, the isolation enhancement module enables the drive signal output to the power output module to be driven by gate circuits, and at the same time serves to achieve isolation between the front-end module and the back-end module.

[0014] Optionally, the isolation enhancement module includes a half-bridge driver integrated circuit chip.

[0015] Optionally, the power output module adopts a half-bridge topology based on power MOSFETs, which consists of two power MOSFETs connected in a totem pole manner, and an LC low-pass filter is set after the output of the half-bridge topology.

[0016] Optionally, the feedback module performs signal processing on the output signal of the piezoelectric ceramic fast reflector according to the input requirements of the signal conditioning module. The signal processing includes gain adjustment and signal format conversion.

[0017] Compared with the prior art, the present invention has at least the following advantages: (1) The drive control system of the present invention is based on PWM (Pulse Width Modulation) to achieve switching drive of piezoelectric ceramic fast reflector and power output based on half bridge topology of power MOSFET. This makes the drive control system highly efficient, reaching more than 90%.

[0018] (2) The drive control system of the present invention is based on PID (proportional, integral, derivative) to realize closed-loop control processing of piezoelectric ceramic fast reflector, which improves the stability and accuracy of output power and the control accuracy is better than 3μrad (microradian).

[0019] (3) The power output part of the drive control system of the present invention is based on discrete devices, which has a simple circuit structure, eliminates the need for heat dissipation design, and has a high degree of integration, effectively reducing the size of the drive control system and the cost of hardware development. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the drive control system of the present invention; Figure 2 This is a schematic diagram of the signal conditioning module of the present invention; Figure 3 This is a schematic diagram of the signal modulation module of the present invention; Figure 4 This is a schematic diagram of the power output module of the present invention. Detailed Implementation

[0021] The piezoelectric ceramic fast-reflecting mirror drive control system proposed in this invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, only for the purpose of conveniently and clearly illustrating the embodiments of this invention. Please refer to the drawings to make the objectives, features, and advantages of this invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and objectives achieved by this invention, should still fall within the scope of the technical content disclosed in this invention.

[0022] This invention proposes a piezoelectric ceramic fast-reflecting mirror drive control system, such as... Figure 1 As shown, the drive control system includes a signal conditioning module 1, a signal modulation module 2, an isolation enhancement module 3, a power output module 4, and a feedback module 5.

[0023] The signal conditioning module 1 is connected to the signal modulation module 2 and the feedback module 5. It receives control signals input from an external source and feedback signals output from the feedback module 5, performs closed-loop processing to obtain a conditioned signal, and outputs it to the signal modulation module 2. The signal modulation module 2 is also connected to the isolation enhancement module 3. It receives the conditioned signal output from the signal conditioning module 1, performs modulation processing to obtain a modulated signal, and outputs it to the isolation enhancement module 3. The isolation enhancement module 3 is also connected to the power output module 4, receiving the modulated signal output from the signal modulation module 2. The signal is enhanced by modulating the signal to obtain a driving signal, which is then output to the power output module 4. The power output module 4 is also connected to the piezoelectric ceramic fast reflector 6, and uses the driving signal to drive the piezoelectric ceramic fast reflector 6, providing a high-voltage, high-current, and low-ripple driving voltage to the piezoelectric ceramic fast reflector 6. The feedback module 5 is also connected to the piezoelectric ceramic fast reflector 6, receives the output signal of the piezoelectric ceramic fast reflector 6, processes the signal to obtain a feedback signal, and outputs the feedback signal to the signal conditioning module 1 to complete the closed-loop control of the piezoelectric ceramic fast reflector 6.

[0024] The signal conditioning module 1 is used to realize the closed-loop control processing of the piezoelectric ceramic fast reflector 6. Specifically, the signal conditioning module 1 receives the control signal input from the outside and the feedback signal output by the feedback module 5, performs closed-loop processing on the control signal and the feedback signal, and then outputs the conditioning signal obtained after closed-loop processing to the signal modulation module 2.

[0025] Furthermore, the signals (including control signals and feedback signals) input to the signal conditioning module 1 can be either digital signals or analog signals.

[0026] Furthermore, the closed-loop processing is based on the PID (proportional-integral-derivative) method, which can be implemented through either discrete digital processing or continuous analog processing. The signal conditioning module 1 is equipped with a PID controller, whose control law is as follows: In the formula, It is the output signal of the PID controller. It is a proportionality coefficient. It is the integration time constant. It is the differential time constant. It is the deviation between the control signal and the feedback signal.

[0027] The closed-loop control of the piezoelectric ceramic fast-reflecting mirror 6 based on PID can improve the stability and accuracy of the output power, with a control precision better than 3μrad (microradian).

[0028] In a preferred embodiment, both the control signal and the feedback signal input to the signal conditioning module 1 are analog signals, and closed-loop processing is implemented through analog processing. For example... Figure 2 As shown, the signal conditioning module 1 includes operational amplifiers A1 and A2, resistors R1 to R7, and capacitor C1.

[0029] The operational amplifier A1 and its peripheral resistors R1~R4 are configured to form a subtraction circuit. This subtraction circuit performs a subtraction operation on the input control signal and the feedback signal to obtain an error signal, which is then sent to the analog PI controller (proportional-integral controller). Specifically, the control signal enters the non-inverting input terminal of the operational amplifier A1 through resistor R2, the feedback signal enters the inverting input terminal of the operational amplifier A1 through resistor R1, the non-inverting input terminal of the operational amplifier A1 is grounded through resistor R3, and the inverting input terminal of the operational amplifier A1 is connected to the output terminal of the operational amplifier A1 through a parallel branch of resistor R4.

[0030] Preferably, R1=R2=R3=R4. In this case, the subtraction circuit is unity gain, meaning it only performs difference operations.

[0031] Operational amplifier A2, along with its peripheral resistors R5-R7 and capacitor C1, constitutes an analog PI controller. This controller performs analog PI calculations on the error signal output from the subtraction circuit, achieving closed-loop processing of the control and feedback signals. Specifically, the error signal enters the inverting input of operational amplifier A2 through resistor R5. Simultaneously, a parallel branch of resistor R7 and a parallel branch consisting of resistor R6 and capacitor C1 connected in series are provided between the inverting input and output of operational amplifier A2. The non-inverting input of operational amplifier A2 is grounded. The parameters of the analog PI controller are determined by resistors R6 and R7, and capacitor C1.

[0032] Furthermore, operational amplifiers A1 and A2 are both powered by a ±15V bipolar power supply, and the analog input range of the control signal is 0 to 5V, and the analog input range of the feedback signal is 0 to 5V.

[0033] In summary, the subtraction circuit obtains the error signal, the analog PI controller performs PI operation on the error signal to obtain the output conditioning signal, and by changing the resistance values ​​of resistors R6 and R7 and the capacitance value of capacitor C1, the parameters of the PI controller can be adjusted to complete the closed-loop processing.

[0034] The signal modulation module 2 receives the conditioning signal output by the signal conditioning module 1, modulates it to obtain a modulated signal, and outputs it to the isolation enhancement module 3.

[0035] Furthermore, the modulation process is based on PWM (Pulse Width Modulation), and its specific implementation can be either discrete digital processing or continuous analog processing.

[0036] In a preferred embodiment, the signal input to the signal modulation module 2 (i.e., the conditioning signal output by the signal conditioning module 1) is an analog signal, and the modulation processing is implemented through analog processing. Figure 3 As shown, the signal modulation module 2 includes a comparator.

[0037] The input signal (i.e., the conditioning signal) enters the inverting input of the comparator, and the triangular wave signal enters the non-inverting input of the comparator. The comparator compares the triangular wave signal with the input signal to generate a series of rectangular modulation pulses with a duty cycle proportional to the amplitude of the input signal, i.e., the PWM signal (i.e., the modulation signal output by the signal modulation module 2), and sends it to the isolation enhancement module 3.

[0038] Preferably, the frequency of the triangular wave signal is much higher than the frequency of the input signal, for example, the frequency of the triangular wave signal is 10 times the maximum frequency of the input signal, specifically 10kHz.

[0039] In another preferred embodiment, the signal conditioning module 1 and the signal modulation module 2 achieve closed-loop processing and modulation processing through digital processing. In this case, the input and output signals of both modules are digital signals, and the signal processing and algorithms can be integrated into the main controller. The main controller is a DSP (Digital Signal Processor), ARM (Advanced RISC Machine), or FPGA (Field-Programmable Gate Array).

[0040] Specifically, the isolation enhancement module 3 receives the modulation signal output by the signal modulation module 2, enhances the driving capability of the modulation signal to obtain a driving signal, and outputs it to the power output module 4. Specifically, the isolation enhancement module 3 enables the driving signal output to the power output module 4 to have gate circuit driving capability, while simultaneously achieving isolation between the front-end and rear-end modules.

[0041] Preferably, the isolation enhancement module 3 is provided with a half-bridge driver integrated circuit chip, and the half-bridge driver integrated circuit chip is of model IR2110S.

[0042] The power output module 4 receives the drive signal output by the isolation enhancement module 3 and is connected to the piezoelectric ceramic fast reflector 6. The drive signal is used to drive the piezoelectric ceramic fast reflector 6, which can provide a high voltage, high current and low ripple drive voltage to the piezoelectric ceramic fast reflector 6.

[0043] Preferably, the power output module 4 adopts a half-bridge topology based on power MOSFETs. This half-bridge topology consists of two power MOSFETs connected in a totem-pole manner, and the output terminal of the half-bridge topology is located at the connection point of the two power MOSFETs. The power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) is a transistor used as a high-speed, high-power switch. During operation, the two power MOSFETs switch alternately.

[0044] Furthermore, an LC low-pass filter, composed of an inductor and a capacitor, is connected after the output of the half-bridge topology for signal demodulation to generate the final output voltage. Furthermore, the DC input voltage of the power output module 4 is the supply voltage of the power MOSFET-based half-bridge topology, and the output voltage of the power output module 4 shares the same reference ground as the DC input voltage.

[0045] Specifically, such as Figure 4 As shown, the power output module 4 includes power MOSFETs Q1 and Q2, and an inductor L. Power MOSFETs Q1 and Q2 are connected in series, with power MOSFET Q1 connected to the positive power supply and power MOSFET Q2 grounded, forming a half-bridge topology. Its output terminal is located at the connection point of the two power MOSFETs. An inductor L is connected after the output terminal of the half-bridge topology. Since the piezoelectric ceramic fast reflector 6 acts as a capacitive load, the filter capacitor is omitted in the LC filter circuit. The piezoelectric ceramic fast reflector 6 utilizes its own capacitive characteristics to form an LC filter effect together with the inductor L.

[0046] The power output module 4 receives the drive signal output from the isolation enhancement module 3, amplifies it through a half-bridge topology based on power MOSFETs, and then eliminates its high-frequency spectrum by LC filtering, thereby achieving signal demodulation and power amplification, and providing high-power, high-current drive output to the piezoelectric ceramic fast reflector 6.

[0047] Preferably, power MOSFET Q1 is an NMOS and power MOSFET Q2 is a PMOS; the driving voltage of the piezoelectric ceramic fast reflector 6 is determined by the DC input voltage of the positive power supply of the power output module 4, and is generally greater than 100V.

[0048] The power output module 4 adopts a half-bridge topology based on power MOSFETs, and together with the signal modulation module 2, it realizes the switching drive of the piezoelectric ceramic fast reflector 6. This power output method makes the drive control system highly efficient, reaching more than 90%.

[0049] The feedback module 5 is used to receive the output signal of the piezoelectric ceramic fast reflector 6, perform signal processing, and output the feedback signal to the signal conditioning module 1.

[0050] Specifically, since the output signal of the piezoelectric ceramic fast reflector 6 is a differential signal, the feedback module 5 needs to first perform a subtraction operation on it, and then amplify its gain. Based on the input requirements of the signal conditioning module 1, the feedback module 5 performs signal processing on the output signal of the piezoelectric ceramic fast reflector 6, including subtraction, gain adjustment, and signal format conversion. Then, the processed feedback signal is output to the signal conditioning module 1 to complete the closed loop, enabling the drive control system to have a very fast response speed.

[0051] The feedback module 5 includes an operational amplifier, and the above signal processing of the feedback module 5 is all based on the operational amplifier.

[0052] The piezoelectric ceramic fast reflector 6 contains an internal angle position sensor that provides real-time feedback on the deflection angle of the fast reflector, enabling closed-loop precise drive control of the piezoelectric ceramic fast reflector. This angle position sensor is based on the Wheatstone bridge principle and is implemented using strain gauges. The output signal of the Wheatstone bridge is the output signal of the piezoelectric ceramic fast reflector 6, which is a pair of weak, differential analog signals.

[0053] Therefore, the output signal of the piezoelectric ceramic fast-reflecting mirror 6 represents the real-time deflection angle of the fast-reflecting mirror. The feedback signal formed after processing by the feedback module 5 also reflects the real-time deflection angle of the fast-reflecting mirror. Thus, calculating the difference between the feedback signal and the control signal in the signal conditioning module 1 is equivalent to calculating the deviation between the real-time deflection angle of the fast-reflecting mirror and the desired deflection angle. Subsequently, based on the deviation between the control signal and the feedback signal, the output of the drive signal is adjusted, and then applied to the piezoelectric ceramic fast-reflecting mirror 6 to precisely adjust the deflection angle of the fast-reflecting mirror. This achieves closed-loop control of the piezoelectric ceramic fast-reflecting mirror 6.

[0054] In summary, the drive control system of this invention uses PWM modulation to drive the piezoelectric ceramic fast reflector. Furthermore, it employs PID control for closed-loop control of the piezoelectric ceramic fast reflector and utilizes discrete components for power output, resulting in a simple circuit structure. This eliminates the need for heat dissipation design, leading to high integration and efficiency, and effectively reducing the size and hardware development cost of the drive control system. It can be widely applied to various space optical communication systems, exhibiting good adaptability and significant application value.

[0055] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0056] In the description of this invention, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0057] In the description of this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0058] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0059] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A piezoelectric ceramic fast-reflecting mirror drive control system, characterized in that, include: Signal conditioning module, signal modulation module, isolation enhancement module, power output module, and feedback module; The signal conditioning module is connected to the signal modulation module and the feedback module. It receives the control signal input from the outside and the feedback signal output from the feedback module, performs closed-loop processing to obtain the conditioning signal and outputs it to the signal modulation module. The signal modulation module is also connected to the isolation enhancement module to perform modulation processing on the conditioning signal, obtain a modulated signal, and output it to the isolation enhancement module; The isolation enhancement module is also connected to the power output module to enhance the driving capability of the modulation signal, obtain a driving signal and output it to the power output module; The power output module is also connected to the piezoelectric ceramic fast reflector, and the drive signal is used to drive the piezoelectric ceramic fast reflector. The feedback module is also connected to a piezoelectric ceramic fast reflector, receives the output signal of the piezoelectric ceramic fast reflector, processes the signal to obtain a feedback signal, and outputs it to the signal conditioning module.

2. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 1, characterized in that, The control signals and feedback signals input to the signal conditioning module are digital signals or analog signals; correspondingly, the closed-loop processing is implemented through discrete digital processing or continuous analog processing; correspondingly, the modulation processing is implemented through discrete digital processing or continuous analog processing.

3. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 2, characterized in that, The closed-loop processing is performed using a PID method. The signal conditioning module is equipped with a PID controller, and its control law is as follows: In the formula, It is the output signal of the PID controller. It is a proportionality coefficient. It is the integration time constant. It is the differential time constant. It is the deviation between the control signal and the feedback signal.

4. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 2, characterized in that, The modulation process is performed using a PWM method.

5. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 3, characterized in that, When closed-loop processing is implemented through analog processing, the signal conditioning module includes a subtraction circuit and an analog PI controller. The subtraction circuit performs a subtraction operation on the input control signal and the feedback signal to obtain an error signal. The analog PI controller performs an analog PI operation on the error signal to obtain the output conditioning signal. When closed-loop processing is implemented through digital processing, a main controller is set in the signal conditioning module, and signal processing is integrated into the main controller, which is a DSP, ARM, or FPGA.

6. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 4, characterized in that, When the modulation process is implemented through analog processing, the signal modulation module includes a comparator, which compares the triangular wave signal with the input conditioning signal to generate a PWM signal, which is the modulation signal output by the signal modulation module. When modulation processing is implemented through digital processing, a main controller is set in the signal modulation module, and signal processing is integrated into the main controller, which is a DSP, ARM, or FPGA.

7. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 1, characterized in that, The isolation enhancement module enables the drive signal output to the power output module to be driven by gate circuits, and at the same time, it is used to achieve isolation between the front-end module and the back-end module.

8. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 7, characterized in that, The isolation enhancement module includes a half-bridge driver integrated circuit chip.

9. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 1, characterized in that, The power output module adopts a half-bridge topology based on power MOSFETs. The half-bridge topology consists of two power MOSFETs connected in a totem pole manner, and an LC low-pass filter is set after the output of the half-bridge topology.

10. The piezoelectric ceramic fast-reflecting mirror drive control system as described in claim 1, characterized in that, The feedback module processes the output signal of the piezoelectric ceramic fast reflector according to the input requirements of the signal conditioning module. The signal processing includes gain adjustment and signal format conversion.

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