Automatic measurement method and device for gas-type atomic gas chamber

Abstract

The invention discloses a gas type atomic gas chamber automatic measurement method and device, and belongs to the technical field of atomic gas chamber measurement. The measuring method comprises the steps of system initialization, air chamber feeding and positioning, appearance detection, air pressure and purity measurement, result judgment and sorting, data storage, report generation and the like, and the full-automatic process is achieved. Wherein unqualified air chambers can be screened out in advance before appearance detection, non-invasive laser absorption spectrometry is adopted for air pressure and purity measurement, and the internal states of the air chambers are prevented from being damaged. The corresponding device is composed of an automatic feeding mechanism, an automatic transfer mechanism, an appearance detection module, an air pressure and purity measurement module, a central control module, an automatic sorting mechanism and a data storage module, and all the modules work cooperatively. According to the invention, the measurement efficiency and accuracy are obviously improved, the skill requirements on operators are reduced, the data traceability is ensured, and the damage of the air chamber in the measurement process is effectively avoided.

Description

Technical Field

[0001] This invention relates to the field of atomic gas chamber measurement technology, and specifically to an automatic measurement method and apparatus for gas-type atomic gas chambers. Background Technology

[0002] Atomic gas cells are core sensing components in quantum sensors and quantum precision measurement devices such as atomic magnetometers, atomic gyroscopes, and atomic clocks. Atomic gas cells are typically made of glass or quartz and filled with alkali metal atoms or inert gas atoms, with buffer gases added to modulate atomic collision characteristics. The core function of an atomic gas cell is to provide a controllable atomic ensemble environment for detecting physical quantities such as magnetic fields, inertia, and time and frequency. Based on the type of gas filled inside, atomic gas cells can be divided into alkali metal type atomic gas cells and gas type atomic gas cells. Alkali metal type atomic gas cells are filled with alkali metal vapors such as rubidium or cesium, while gas type atomic gas cells are filled with inert gases such as helium. Gas type atomic gas cells are widely used in high-precision quantum sensors such as helium optically pumped magnetometers and helium gyroscopes. Currently, apart from miniature atomic gas cells produced using microelectromechanical systems (MEMS) technology, which exhibit good consistency, other types of atomic gas cells show individual and batch variations in mass production. These differences are mainly reflected in key parameters such as the appearance quality of the gas cell, internal gas pressure, and gas purity. In terms of appearance, defects such as cracks, bubbles, or interface deformation may occur in glass or quartz gas cells during manufacturing and packaging. Regarding gas pressure, deviations in the internal gas pressure can affect atomic collision frequencies and optical resonance characteristics. As for purity, impurities mixed into the gas inside the cell can interfere with atomic energy level transitions and signal detection. Because these parameter differences directly affect the performance indicators of quantum sensors, in the mass production of products such as magnetometers, the performance of each atomic gas cell needs to be tested individually beforehand to assess its usability.

[0003] Currently, the detection of atomic gas chambers generally employs a manually constructed optical platform. Operators need to manually adjust the position and angle of optical components such as lasers, polarizers, waveplates, and photodetectors to build an optical system for measuring gas pressure and purity. During measurement, operators need to manually place the gas chamber at a designated position in the optical path, activate the laser, and acquire the transmitted light signal using an oscilloscope. Then, they manually read and calculate the gas pressure and purity parameters. For visual inspection, operators need to visually inspect the surface of the gas chamber or use a microscope to manually determine the presence of defects such as cracks and bubbles. For different measurement parameters, it is often necessary to transfer the gas chamber one by one to different measuring devices; for example, transferring the gas chamber to a pressure gauge to measure gas pressure, to a gas chromatograph to measure purity, and to a helium mass spectrometer leak detector to measure sealing. This manual measurement method has the following technical problems.

[0004] First, manual measurement methods demand a high level of skill from operators, requiring a strong background in atomic physics and optics. Setting up the optical platform necessitates precise adjustment of the spatial position and angle of each optical element to ensure the laser beam correctly passes through the gas chamber and is received by the photodetector. Manual placement of the gas chamber requires operators to determine if its orientation and position meet measurement requirements. Manual interpretation of measurement data requires operators to understand the physical meaning of absorption lines and perform complex calculations. Each measurement involves a tedious debugging process, making the measurement of a single gas chamber time-consuming. Second, the detection of different parameters needs to be performed independently on different equipment, resulting in a fragmented parameter detection process. Appearance inspection, pressure measurement, and purity measurement require different instruments, necessitating multiple transfers of the gas chamber between these devices. During manual transfer, glass or quartz gas chambers are easily damaged by collisions or drops. Changes in environmental conditions during transfer, such as fluctuations in temperature and humidity, can lead to errors in pressure or purity measurement results. The additional time required for transferring gas chambers between different devices reduces overall measurement efficiency. Due to the dispersed nature of the measurement equipment, it is difficult to achieve continuous and automated measurement processes.

[0005] Third, manual recording of measurement data presents the problem of poor data traceability. Operators typically record measurement data manually in paper or spreadsheet forms, and omissions or transcription errors are prone to occur during the recording process.

[0006] Fourth, manual measurement methods are inefficient and have poor compatibility. Traditional methods can only measure one chamber at a time, making it impossible to perform parallel or continuous measurements of a batch of chambers. When the production line needs to screen a large number of chambers, the low efficiency of manual measurement becomes a bottleneck. For chambers of different specifications, such as those with different diameters and lengths, the fixtures and optical paths of the measuring equipment need to be readjusted, a time-consuming process that relies on the operator's experience. The lack of a universal measurement solution makes it difficult to adapt to the needs of batch and multi-specification chamber testing, failing to meet the requirements of rapid, large-scale chamber screening on the production line.

[0007] Fifth, traditional methods for measuring gas pressure and purity often employ invasive techniques. Gas pressure measurements require connecting a pressure sensor to the inside of the gas chamber via an interface, or extracting a portion of the gas for pressure detection; these operations can alter the internal pressure within the chamber. Purity measurements typically require extracting a certain amount of gas sample for analysis using a gas chromatograph or mass spectrometer; this extraction reduces the total gas volume inside the chamber, affecting its lifespan. Invasive measurements can also introduce leakage risks at the chamber interface, compromising its seal. Furthermore, extracting large volumes of gas can waste gas resources and increase measurement costs.

[0008] Sixth, the visual inspection process fails to establish a reasonable workflow connection with parameter measurement. In traditional measurement processes, visual inspection and parameter measurement are often separate, or visual inspection is performed after parameter measurement. When unqualified air chambers are only discovered and removed after pressure and purity measurements are completed, these air chambers have already consumed the working time of the precision measuring equipment, resulting in a waste of measurement resources. As a relatively simple and quick screening method, visual inspection's value is not fully realized, and it cannot effectively improve overall measurement efficiency.

[0009] Therefore, there is an urgent need for a multi-parameter integrated, fully automated, high-precision, and traceable atomic gas chamber measurement solution to address the problems existing in current technologies and meet the demand for rapid, accurate, and automated detection of gas-type atomic gas chambers. Summary of the Invention

[0010] To address the problems existing in the background art, the present invention provides 1. an automatic measurement method for a gas-type atomic gas chamber, characterized by comprising the following steps:

[0011] S1: System initialization, start the central control module, and perform zero-point calibration and parameter setting for each measurement module;

[0012] S2: Air chamber feeding and positioning. The automatic feeding mechanism sends the air chamber to be tested to the positioning fixture, and the air chamber attitude is detected by the photoelectric sensor and adjusted to the preset position.

[0013] S3: Appearance inspection. An automatic transfer mechanism grabs the air chamber and transfers it to the appearance inspection module. An industrial camera captures images of the air chamber, and an image recognition algorithm determines whether the appearance is qualified.

[0014] S4: Pressure and purity measurement. The qualified gas chamber is transferred to the pressure / purity measurement module. The absorption spectrum data is collected by laser absorption spectroscopy, and the internal pressure value and gas purity of the gas chamber are calculated.

[0015] S5: Result determination and sorting. The central control module determines the air chamber level based on the measurement data, and the automatic transfer mechanism sends the air chamber into the corresponding sorting area.

[0016] S6: Data storage and report generation. The measurement data is stored in the database, and a test report is generated after batch measurements are completed.

[0017] Furthermore, S1 specifically includes: loading the gas chamber to be tested onto the vibratory feeder unit; starting the central control module to perform zero-point calibration of the pressure sensor; adjusting the focus of the industrial camera; returning the robotic arm to zero and positioning; and loading preset air pressure range and purity threshold parameters.

[0018] Furthermore, S2 specifically includes: starting the vibratory feeder feeding unit to transport the air chambers one by one to the positioning fixture through vibration; the photoelectric attitude sensor detects the spatial attitude of the air chambers; if the detected air chamber attitude deviation exceeds a preset threshold, the vibratory feeder readjusts the air chamber position; after the attitude calibration is completed, a grab signal is sent to the central control module.

[0019] Furthermore, S3 specifically includes: the robotic arm moving to the positioning fixture position, the gripper grasping the air chamber; transferring the air chamber to the shooting position of the appearance inspection module; the industrial camera shooting the side surface and two end interfaces of the air chamber to obtain multi-angle images; the image recognition algorithm analyzing the images to identify defects such as cracks, bubbles, and interface deformation; if a defect is identified, it is determined to be unqualified in appearance, and the robotic arm directly sends the air chamber to the unqualified sorting area to end the measurement process of the air chamber.

[0020] Furthermore, the pressure measurement steps in S4 are as follows: a robotic arm transfers a qualified air chamber to the pressure measurement module; a tunable laser emits a laser beam of a specific wavelength, which passes through the air chamber; a high-resolution spectrometer acquires the transmission spectrum to obtain the absorption spectrum; and the absorption spectrum is fitted with a Voigt function to extract the full width at half maximum (FWHM) of the absorption peak. According to the formula Calculate the internal air pressure of the chamber, where The pressure value is in MPa. The full width at half maximum (FWHM) of the measured absorption peak (MHz); Natural linewidth (MHz); The pressure broadening factor is (MHz / Torr).

[0021] Furthermore, the purity measurement step in S4 is as follows: a tunable laser scans the surface containing... and The characteristic absorption wavelength band; high-resolution spectrometers collected data in different wavelength ranges. and Identify the absorption peaks; calculate the peak areas of the two absorption peaks; determine the gas purity based on the peak area ratio.

[0022] Furthermore, S5 specifically includes: the central control module receiving air pressure measurement values. and purity measurement value ;Will With preset air pressure range Compare; put With preset purity threshold The comparison is performed; the decision logic is: if and If it is deemed qualified; or If the parameters are deemed unqualified, or if the measurement data shows abnormal fluctuations, it is determined that a re-inspection is required. The robotic arm then sends the air chamber into the corresponding sorting area based on the determination result.

[0023] This invention also provides an automatic measuring device for a gas-type atomic gas chamber, comprising:

[0024] An automatic feeding mechanism includes a vibratory feeder unit and an air chamber positioning fixture. The vibratory feeder unit is used to accommodate and transport the air chamber. The air chamber positioning fixture is located at the discharge end of the vibratory feeder unit and is equipped with a photoelectric attitude sensor.

[0025] An automated transfer mechanism includes a robotic arm and grippers, with the grippers mounted at the end of the robotic arm for grasping and transferring air chambers;

[0026] The appearance inspection module includes an industrial camera and a light source, which are positioned around the air chamber to acquire images of the air chamber.

[0027] The air pressure / purity measurement module includes a tunable laser, a high-resolution spectrometer, and a constant temperature control unit. The tunable laser and the high-resolution spectrometer are respectively located on both sides of the air chamber placement position, and the constant temperature control unit is used to control the air chamber temperature.

[0028] The central control module includes a controller and a display screen. The controller is electrically connected to the automatic feeding mechanism, automatic transfer mechanism, appearance inspection module, and air pressure / purity measurement module via a communication bus to coordinate the action sequence of each module.

[0029] The automated sorting mechanism includes multiple sorting zones, each set within the working range of the robotic arm;

[0030] The data storage module, electrically connected to the central control module, is used to store measurement data and generate test reports.

[0031] Preferably, the inner wall of the vibratory feeder unit is covered with a soft buffer layer; the photoelectric attitude sensor is positioned above the positioning fixture to detect the attitude of the air chamber; the gripper is made of soft material and has a built-in force sensor, which is electrically connected to the controller.

[0032] Preferably, the appearance inspection module further includes an image processing unit, which is electrically connected to an industrial camera and a controller; the multiple sorting areas include a qualified area, an appearance defective area, a parameter defective area, and a re-inspection area; each sorting area is equipped with a photoelectric counting sensor, which is electrically connected to the controller; the data storage module includes an industrial computer and a database, which is electrically connected to the controller.

[0033] The beneficial effects achieved by this invention are as follows:

[0034] First, this invention employs streamlined control to achieve full automation of gas chamber measurement. Pre-measurement of the appearance avoids wasted time in subsequent measurements, while spectroscopic measurement enables non-invasive detection. Automatic judgment eliminates the subjectivity of manual interpretation, and data storage ensures full traceability. This method eliminates the cumbersome operations required by traditional manual measurement, such as manually setting up an optical platform, adjusting the optical path, transferring gas chambers, and interpreting data. This significantly shortens the measurement time for a single gas chamber and improves the efficiency of batch measurements. The appearance inspection step, placed before precision measurement, can pre-screen gas chambers with defects such as cracks and bubbles, preventing these defective products from occupying the working time of subsequent pressure and purity measurement modules, thus improving overall measurement efficiency and saving measurement resources. Spectroscopic measurement of pressure and purity is non-invasive; the laser beam only needs to pass through the gas chamber to obtain absorption spectral data, without opening the chamber or extracting the internal gas. This avoids the pressure changes and gas losses inside the chamber caused by gas extraction in traditional methods, maintaining the original state of the gas chamber and eliminating the risk of contamination that may be introduced by opening the chamber.

[0035] Secondly, the automatic gas chamber measuring device of this invention integrates an automatic feeding mechanism, an automatic transfer mechanism, an appearance inspection module, a pressure / purity measurement module, a central control module, an automatic sorting mechanism, and a data storage module into a single system through modular design. The inner wall of the vibratory feeder unit of the automatic feeding mechanism is covered with a soft buffer layer to prevent damage from gas chamber collisions. The positioning fixture is equipped with a photoelectric attitude sensor to automatically detect and adjust the gas chamber's attitude. The innovation of the automatic transfer mechanism lies in the use of soft material for the grippers and the inclusion of a built-in force sensor, which monitors the gripping force in real time and feeds it back to the controller to achieve dynamic adjustment of the gripping force. The innovation of the appearance inspection module lies in the multi-angle positioning of the industrial camera and light source around the gas chamber's location, with the image processing unit using an image recognition algorithm to automatically analyze defects. The innovation of the pressure / purity measurement module lies in the placement of a tunable laser and a high-resolution spectrometer on both sides of the gas chamber to form a transmission measurement system, with a constant temperature control unit stabilizing the gas chamber temperature to eliminate the influence of temperature on the measurement. The innovation of the central control module lies in the controller's electrical connection to each module via a communication bus to achieve coordinated control of the action sequence, and the built-in customizable pass / fail threshold library to adapt to the technical requirements of different types of gas chambers. The beneficial effects of these innovative devices are reflected in several aspects. The soft buffer layer on the inner wall of the vibratory feeder effectively prevents the glass air chamber from cracking or breaking due to collisions during vibration conveying, improving the integrity rate of the air chamber during loading and conveying. The photoelectric attitude sensor automatically detects the air chamber's attitude and triggers the adjustment mechanism when the deviation exceeds a threshold, ensuring that the air chamber is in the correct position and attitude before issuing a grasping signal. This improves the success rate of subsequent robotic arm grasping and avoids grasping failures or air chamber drops caused by incorrect air chamber attitude.

[0036] Third, this invention incorporates a force sensor built into the gripper to monitor the clamping force in real time and form a closed-loop control with the controller. When the clamping force exceeds a preset threshold, the controller immediately instructs the gripper to adjust the pressure. This prevents the air chamber from slipping due to insufficient clamping force, while also avoiding damage to the glass air chamber due to excessive clamping force, thus improving the safety and reliability of the transfer process. The appearance inspection module employs a multi-angle shooting system, with multiple industrial cameras capturing images of the side surface and end interfaces of the air chamber from different positions, covering the entire outer surface of the air chamber. This avoids missing defect areas that might be missed by shooting from a single angle, improving the comprehensiveness and accuracy of appearance defect detection. The image recognition algorithm automatically analyzes the images and identifies various types of defects such as cracks, bubbles, and interface deformation, eliminating the subjectivity and fatigue effects of manual visual inspection and improving the consistency and reliability of defect identification. The pressure / purity measurement module employs a transmission measurement system comprised of a tunable laser and a high-resolution spectrometer. The laser beam passes through the gas chamber, and the transmission spectrum is measured to obtain absorption lines. Pressure and purity are calculated based on the principle of pressure broadening and the difference in isotopic absorption wavelengths. This measurement method does not contact the interior of the gas chamber, maintaining its airtightness and the original state of the internal gas. It also offers high measurement accuracy and speed. A constant temperature control unit stabilizes the gas chamber temperature within a small range near a set value, eliminating the influence of temperature fluctuations on the gas absorption linewidth and ensuring the accuracy and repeatability of the pressure measurement.

[0037] Fourth, this invention features a central control module that connects all functional modules via a communication bus. This enables coordinated timing of actions in the feeding, transfer, detection, measurement, and sorting stages. Each module operates sequentially according to controller instructions, automatically triggering the next stage upon completion of the previous one, forming a continuous, assembly-line measurement process. This avoids efficiency reduction caused by excessive waiting time between modules. The controller's built-in customizable pass / fail threshold library allows operators to set parameters such as pressure range and purity thresholds according to the technical requirements of different types of gas chambers. The same device can be adapted to the measurement needs of gas chambers of different specifications and applications by modifying parameters, improving the device's versatility and applicability, eliminating the need to purchase multiple sets of dedicated measurement equipment for different types of gas chambers. The automatic sorting mechanism includes four sorting areas: a pass / fail area, an appearance failure area, a parameter failure area, and a re-inspection area. Each sorting area is located within the working range of the robotic arm. The robotic arm directly sends the gas chambers into the corresponding sorting area based on the judgment results, achieving automatic classification and storage after measurement, facilitating subsequent classification processing and statistical analysis. Photoelectric counting sensors in each sorting area automatically count the number of air chambers in each area, eliminating the need for manual counting and improving the efficiency and accuracy of statistics. This also provides real-time data for batch quality analysis. The data storage module stores each air chamber's unique number, measured parameters, judgment results, and measurement time in the database, achieving a binding storage of measurement data with air chamber numbers. It supports querying historical data by date, batch, or air chamber number, providing a complete data chain for traceability analysis of quality issues. When a problem occurs in a particular air chamber during subsequent use, its measured parameters and judgment results can be retrieved from the database using its unique number. This allows for analysis of the cause of the problem and assessment of the quality status of other air chambers in the same batch, improving the precision of quality management. Attached Figure Description

[0038] Figure 1 This is a block diagram of the gas-type atomic gas chamber automatic measuring device of the present invention;

[0039] Figure 2 This is a layout diagram of the automatic measuring device for gas-type atomic gas chambers of the present invention;

[0040] Figure 3 This is a flowchart of the automatic measurement method for gas-type atomic gas chambers of the present invention. Detailed Implementation

[0041] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. In addition, the forms of the various structures described in the following embodiments are merely illustrative. The present invention is not limited to the structures described in the following embodiments. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] Reference Figures 1-2 The automatic measuring device for gas-type atomic gas chambers provided by this invention includes an automatic feeding mechanism, an automatic transfer mechanism, an appearance inspection module, a gas pressure / purity measurement module, a central control module, an automatic sorting mechanism, and a data storage module. All modules work in coordination through the central control module to achieve a fully automated process from feeding and inspection of the gas chambers to sorting.

[0043] The automatic feeding mechanism includes a vibratory feeder unit and a chamber positioning fixture. The vibratory feeder unit accommodates a batch of chambers to be tested and transports them one by one via vibration. To prevent damage to the glass chambers due to impact during vibration, the inner wall of the vibratory feeder unit is lined with a soft cushioning layer. The chamber positioning fixture is located at the discharge end of the vibratory feeder unit and receives the chambers transported from the vibratory feeder. A photoelectric attitude sensor is mounted above the positioning fixture to detect the spatial attitude of the chambers. The photoelectric attitude sensor determines the orientation and positional deviation of the chamber interface by emitting a light beam and receiving the reflected signal.

[0044] The automated transfer mechanism consists of a robotic arm and grippers. The robotic arm employs a SCARA structure with multiple degrees of freedom, its working range covering the positions of the feeding mechanism, various measurement modules, and sorting mechanisms. The grippers, mounted at the end of the robotic arm, are made of soft material to prevent damage to the air chamber surface during gripping. A built-in force sensor in the grippers monitors the gripping force in real time. The force sensor is electrically connected to the controller; when the detected gripping force exceeds a preset threshold, the controller instructs the grippers to automatically adjust the pressure to prevent air chamber rupture.

[0045] The appearance inspection module includes an industrial camera, a light source, and an image processing unit. The industrial camera and light source are positioned around the air chamber to create a multi-angle shooting environment. The light source typically uses a ring-shaped LED light source to provide uniform illumination and eliminate shadow interference. The industrial camera captures images of the side surface and end interfaces of the air chamber from different angles. The image processing unit is electrically connected to the industrial camera and controller, receiving and analyzing the acquired image data.

[0046] The gas pressure / purity measurement module includes a tunable laser, a high-resolution spectrometer, and a temperature control unit. The tunable laser and high-resolution spectrometer are positioned on opposite sides of the gas chamber, forming an optical transmission measurement system. The tunable laser emits a laser beam of a specific wavelength, which passes horizontally through the interior of the gas chamber. The high-resolution spectrometer, located opposite the laser, receives the transmitted light and performs spectral analysis. The temperature control unit maintains a stable gas chamber temperature, as temperature variations affect the linewidth of gas absorption lines, thus impacting measurement accuracy. The temperature control unit maintains the gas chamber temperature within a small range near a set value through heating or cooling.

[0047] The central control module includes a controller and a display screen. The controller uses an industrial-grade PLC or embedded computer and has multiple input / output interfaces. The controller is electrically connected to the automatic feeding mechanism, automatic transfer mechanism, appearance inspection module, and air pressure / purity measurement module via RS485 bus or Ethernet communication bus to achieve data exchange and command issuance. The display screen is a touch screen that displays the measurement progress, the status of each module, and measurement data in real time. Operators can set measurement parameters and view results via the touch screen.

[0048] The automated sorting mechanism includes multiple sorting zones, specifically a qualified zone, an appearance defective zone, a parameter defective zone, and a re-inspection zone. Each sorting zone is strategically positioned within the working range of the robotic arm for efficient and rapid transport. Each sorting zone is equipped with a photoelectric counting sensor, which is electrically connected to the controller. When an air chamber is placed in a sorting zone, the photoelectric counting sensor detects an obstruction signal and sends a counting signal to the controller, which then counts the number of air chambers in each sorting zone.

[0049] The data storage module is electrically connected to the central control module and includes an industrial computer and a database. The industrial computer is electrically connected to the controller and receives data uploaded by each measurement module. The database uses a relational database and stores information such as the unique number of each gas chamber, the measured values ​​of each parameter, the judgment result, and the measurement time.

[0050] Reference Figure 3 This invention designs an automatic measurement method for gas-type atomic gas chambers based on the aforementioned device, specifically including the following steps: In the S1 system initialization step, the operator loads a batch of gas chambers to be tested onto the vibratory feeder unit. After starting the central control module, the controller first initializes each measurement module. For the pressure sensor, zero-point calibration is performed to eliminate drift error. During the zero-point calibration process, the pressure sensor measures under no pressure or known standard pressure conditions, and the deviation between the measured value and the standard value is recorded as the zero-point error, which is automatically deducted in subsequent measurements. The industrial camera performs focus adjustment, adjusting the lens position through an automatic focus algorithm to achieve optimal image clarity. The robotic arm returns to zero positioning, i.e., drives each joint to move to the preset initial position, establishing a coordinate system reference. The controller loads preset pressure range and purity threshold parameters from the configuration file or database. These parameters are preset according to the technical requirements of different types of gas chambers; for example, the pressure range can be set to a specific interval, and the purity threshold can be set to not be lower than a certain value.

[0051] In the S2 air chamber loading and positioning step, the controller activates the vibratory feeder unit. The vibratory feeder generates vibration through electromagnetic vibration or eccentric wheel drive, with adjustable vibration frequency and amplitude. Under the action of vibration, the air chambers move one by one towards the discharge port along the spiral track of the vibratory feeder. When an air chamber reaches the positioning fixture, the photoelectric attitude sensor begins to detect the spatial attitude of the air chamber. The photoelectric attitude sensor calculates the tilt angle and interface orientation of the air chamber by emitting a beam of light and measuring the position and intensity of the reflected light. If the detected air chamber attitude deviation exceeds a preset threshold, it indicates that the air chamber is not in the correct position or the attitude does not meet the grasping requirements. At this time, the controller instructs the vibratory feeder to adjust the vibration parameters or activates the attitude adjustment mechanism to rotate or move the air chamber to the correct attitude by changing the vibration frequency or applying an auxiliary pushing force. After the attitude calibration is completed, the photoelectric attitude sensor detects that the air chamber attitude deviation is within the threshold range and sends a grasping signal to the central control module. This design avoids the tedious operation of manually placing air chambers through automatic attitude detection and adjustment, while ensuring the success rate of subsequent robotic arm grasping.

[0052] In the S3 appearance inspection step, after receiving the signal to be gripped, the robotic arm moves to the positioning fixture. The robotic arm's motion trajectory is calculated and planned by the controller based on the position coordinates, using linear interpolation or articulated interpolation to ensure smooth movement and avoid collisions. The grippers open and descend above the air chamber, then close to grip the air chamber. During gripping, force sensors monitor the gripping force in real time. If the gripping force is too small, the air chamber may slip; if the gripping force is too large, it may damage the air chamber. Based on the force sensor feedback, the controller dynamically adjusts the degree of gripping closure to keep the gripping force within an appropriate range. The robotic arm transfers the air chamber to the shooting position of the appearance inspection module. This position is precisely calibrated to ensure that the air chamber is centered in the camera's field of view at the appropriate distance. The industrial camera images the side surface and the two end interfaces of the air chamber. The side surface usually requires rotating the air chamber or using multiple cameras to shoot from different angles to cover the entire circumference. The two end interfaces are photographed separately, focusing on the interface shape and the integrity of the sealing surface. The image processing unit receives the acquired image data and runs image recognition algorithms for analysis. The image recognition algorithm first preprocesses the image, including grayscale conversion, filtering and denoising, and edge enhancement. Then, it extracts features such as edge contours, texture features, and grayscale distribution. By comparing the image with a pre-trained defect model, it identifies defects such as cracks, bubbles, and interface deformation. Cracks appear as thin, elongated dark lines, bubbles appear as circular or elliptical areas of abnormal grayscale, and interface deformation appears as irregular contours. If any defect is identified, the image processing unit determines that the appearance is unacceptable and sends the determination result to the controller. The controller instructs the robotic arm to directly deliver the air chamber to the appearance-unacceptable sorting area, ending the measurement process for that air chamber. If no defect is identified, the appearance is deemed acceptable, and the air chamber proceeds to subsequent measurement steps. This appearance inspection step, placed before pressure and purity measurements, can preemptively screen out appearance-unacceptable air chambers, avoiding unnecessary work in subsequent precision measurement modules and improving overall measurement efficiency.

[0053] In the S4 pressure and purity measurement step, a robotic arm transfers a qualified gas chamber to the pressure / purity measurement module. The chamber is placed on a dedicated fixture on the measurement module, which keeps it fixed and accurately positioned. The temperature control unit activates, stabilizing the chamber temperature at the set value. Once the temperature stabilizes, pressure measurement begins. A tunable laser emits a laser beam of a specific wavelength, corresponding to the absorption lines of helium atoms, typically around 1083 nm. The laser beam passes horizontally through the interior of the chamber, interacting with the helium atoms. When the laser wavelength matches the energy level transition wavelength of the helium atoms, the helium atoms absorb photons, resulting in a decrease in the intensity of the transmitted light. A high-resolution spectrometer, located opposite the laser, receives the transmitted light and measures the intensity distribution at different wavelengths, thus obtaining the absorption spectrum. The absorption spectrum exhibits peak characteristics; the peak position corresponds to the absorption wavelength, and the shape and width of the peak contain information such as gas pressure and temperature. The absorption spectrum is then fitted using a Voigt function. The Voigt function, a convolution of a Gaussian function and a Lorentz function, describes the shape of an absorption line exhibiting both Doppler and pressure broadening. By fitting the Voigt function, the full width at half maximum (FWHM) of the absorption peak can be accurately extracted. The full width at half maximum (FWHM) is defined as the wavelength or frequency width at which the absorption peak height is half the peak value. The internal pressure of the chamber is calculated using the following formula: ;in: This is the air pressure value (unit: MPa). The full width at half maximum (FWHM) of the measured absorption peak (unit: MHz); Natural linewidth (unit: MHz) refers to the inherent width of a spectral line determined by the spontaneous emission lifetime of atoms under zero pressure conditions; The pressure broadening factor (unit: MHz / Torr) refers to the increase in the full width at half maximum (FWHM) of a spectral line caused by a unit increase in pressure. Its value is related to the type of gas and temperature. The formula is based on the principle of pressure broadening: the higher the gas pressure inside the chamber, the higher the frequency of interatomic collisions. These collisions shorten the energy level lifetime, leading to increased spectral line broadening. The gas pressure value can be obtained by measuring the spectral line broadening, subtracting the natural linewidth, and then dividing by the pressure broadening factor. This method does not require direct contact with the inside of the chamber, making it a non-invasive measurement and avoiding the risk of gas leakage.

[0054] Purity measurements are also performed in the same measurement module. Tunable laser scanning includes… 4 He and 3 He is a band of wavelengths that are characteristic of absorption. 4 He and 3 He is one of the two isotopes of helium. Due to the difference in the mass of their atomic nuclei, their hyperfine energy level structures differ, resulting in slightly different wavelengths of their absorption spectral lines. 4 The absorption wavelength of He is approximately 1083.034 nm. 3The absorption wavelength of He is approximately 1083.25 nm. High-resolution spectrometers collected [data / samples]. 4 He and 3 The absorption peak of He was observed, and the spectral data of the two absorption peaks were obtained. The peak areas of the two absorption peaks were calculated. The peak areas were obtained by numerical integration of the absorption peak curves and reflected the atomic number of the corresponding isotopes. The gas purity was determined based on the peak area ratio. Gas purity is usually referred to as... 4 The proportion of He in total helium or 3 The proportion of He is determined based on application requirements. The peak area ratio is directly proportional to the atomic number ratio, and by combining this with corrections for parameters such as absorption cross-section, the purity value can be calculated. This spectroscopic analysis method offers high measurement accuracy and is also a non-invasive measurement method.

[0055] In the S5 result judgment and sorting steps, after the air pressure and purity measurements are completed, the measurement data is uploaded to the central control module via the communication bus. The central control module receives the air pressure measurement value. and purity measurement value .Will With preset air pressure range Compare them. and These are the lower and upper limits of the air pressure, respectively, preset according to the technical requirements of the air chamber. With preset purity threshold Compare them. This represents the minimum required purity value. The judgment logic is: if... and This indicates that the air pressure and purity meet the requirements, and it is judged to be qualified. or If at least one parameter fails to meet the standard, the air chamber is deemed unqualified. If abnormal fluctuations occur in the measurement data, such as large deviations in multiple measurements or sudden changes in measurement values, it may be due to interference during the measurement process or inherent instability in the air chamber itself, and is therefore deemed to require re-inspection. The controller generates a transfer instruction based on the judgment result. After receiving the instruction, the robotic arm grabs the air chamber from the measurement module and sends it to the corresponding sorting area. Qualified air chambers are sent to the qualified area, unqualified air chambers to the unqualified appearance area, unqualified air chambers to the unqualified parameter area, and air chambers requiring re-inspection to the re-inspection area. A photoelectric counting sensor detects and counts air chambers as they enter the sorting area, and the statistical data is updated to the controller in real time. This automatic judgment and sorting mechanism eliminates the subjectivity of manual judgment, and the judgment standards are uniform and traceable.

[0056] In the S6 data storage and report generation process, the industrial computer in the data storage module receives measurement data transmitted from the controller. For each air chamber, it records its unique number, air pressure measurement value, purity measurement value, appearance judgment result, comprehensive judgment result, and measurement time. The unique number is usually identified by a barcode or QR code and is bound to the air chamber's factory serial number, enabling full traceability. The data is stored in a structured format in the database for easy subsequent querying and analysis. When the batch of air chambers is measured, i.e., all air chambers in the vibratory feeder unit have been measured or the preset batch quantity has been reached, the data storage module automatically generates a test report. The test report includes batch information, pass rate statistics, average and standard deviation of each parameter, and statistical classification of non-conformity reasons. The report can be exported as a PDF for manual review or uploaded to the enterprise's MES system or quality management system via a network interface for information management. This data storage and report generation function provides data support for quality traceability and process improvement.

[0057] Example 1: This example uses the batch measurement of helium atom gas chambers for helium optical pump magnetometers as an example to explain in detail the construction and configuration of the device and the implementation process of the measurement method of the present invention, and provides actual measurement data.

[0058] The device configuration used in this embodiment is as follows: The automatic feeding mechanism adopts a vibratory feeder unit with a diameter of 300mm. The inner wall of the vibratory feeder is covered with a 5mm thick soft silicone buffer layer to prevent the glass air chamber from cracking due to collision during vibration conveying. The positioning fixture adopts a V-groove structure, the width of which is adapted to the 30mm diameter air chamber. A flexible support pad is set at the bottom of the V-groove to avoid stress concentration caused by hard contact between the air chambers. An OMRONE3Z photoelectric attitude sensor is installed above the positioning fixture at a height of 50mm above the positioning fixture, with the beam emission angle vertically downward, used to detect the orientation and positional deviation of the air chamber interface.

[0059] The automated transfer mechanism utilizes an EPSON LS3 SCARA robotic arm, which has four degrees of freedom, a working radius of 400 mm, and a repeatability of 0.02 mm. A custom-designed gripper for the air chamber is mounted at the end of the robotic arm. The gripper incorporates an ATI Nano17 force sensor with a measurement range of 0 N to 50 N and a resolution of 0.01 N. The gripping force is programmed to be 5 N via PLC, a force that has been verified through multiple tests to ensure that the air chamber will not slip out without damaging the glass air chamber.

[0060] The appearance inspection module uses a Hikvision MV-CA020-10GM industrial camera with a 2-megapixel resolution, 30fps frame rate, and a 16mm fixed-focus lens. The camera is mounted in three positions: to the side-front, side-rear, and directly above the air chamber, forming a multi-angle shooting system. A ring-shaped LED light source is installed around the air chamber, with a color temperature of 5000K and a power of 20W, providing a uniform, shadow-free lighting environment. The image processing unit employs a deep learning-based defect recognition algorithm. During algorithm training, 1000 images of air chambers containing defects such as cracks, bubbles, and interface deformation are used as defect samples, and 2000 images of qualified air chambers are used as normal samples. After training, the algorithm achieves a recognition accuracy of 99.2% on the test set, with a single image processing time of less than 0.5 seconds.

[0061] The pressure / purity measurement module employs a tunable semiconductor laser with a linewidth of less than 1MHz. The laser wavelength can be tuned within the range of 1082nm to 1084nm, covering the absorption spectral band of helium atoms. The temperature control unit uses a TEC cooler combined with a PID temperature controller to stabilize the gas chamber temperature at 25℃, with temperature fluctuations controlled within ±0.1℃. The measurement module contains a dedicated fixture made of quartz material to prevent the introduction of additional absorption and scattering.

[0062] The central control module uses a Siemens S7-1200 PLC as the controller. The PLC is equipped with an SM1231 analog input module and an SM1232 analog output module, used for acquiring sensor data and outputting control signals, respectively. The PLC communicates with each functional module via an RS485 bus with a baud rate set to 115200bps. The touchscreen display is a 10-inch color touchscreen with a resolution of 1024×600 pixels. Pass / fail threshold parameters are set on the touchscreen interface: the acceptable air pressure range is set to 0.4MPa to 0.6MPa, and the purity threshold is set to no less than 99.995%. During PLC programming, the timing of each module's actions is optimized to keep the switching time between modules within 3 seconds, avoiding unnecessary waiting and efficiency reduction.

[0063] The automated sorting mechanism includes four sorting zones, each measuring 200mm x 200mm. A buffer tray with a sponge padding layer is installed at the bottom of each zone to prevent damage from falling air chambers. A KEYENCE PZ-V31 photoelectric counting sensor is installed at the entrance of each sorting zone. The sensor uses a through-beam design; when the air chamber blocks the light beam, it generates a counting pulse signal and uploads it to the PLC.

[0064] The data storage module uses an industrial computer configured with an Intel Core i5 processor, 8GB of RAM, and a 256GB solid-state drive. The database uses MySQL 8.0, and a gas chamber measurement record table is created within it. The table structure includes fields for a unique gas chamber number, gas pressure measurement value, purity measurement value, appearance judgment result, comprehensive judgment result, and measurement time. Based on this device configuration, this embodiment measured 50 helium atom gas chambers in batches. These gas chambers were used in a helium optical pump magnetometer, with a diameter of 35mm and a length of 46mm, and were filled with helium. The measurement process is as follows.

[0065] The operator loads 50 test chambers into the vibratory feeder unit. After starting the device, the PLC executes the initialization program. The pressure sensor performs zero-point calibration under atmospheric pressure conditions. The deviation between the measured value and the standard atmospheric pressure is 0.0008 kPa, which is recorded and automatically compensated for in subsequent measurements. The industrial camera performs autofocus, adjusting the lens position by analyzing image sharpness indicators. After focusing, the image sharpness evaluation function reaches its maximum value. Each joint of the robotic arm returns to zero, moving to a preset zero-point position during the return process. The zero-point position is confirmed by the origin sensor. The PLC loads preset parameters from the configuration file, with a qualified air pressure range of 0.4 MPa to 0.6 MPa and a purity threshold of not less than 99.995%.

[0066] The PLC starts the vibratory feeder unit, and the vibratory feeder begins operation at a vibration frequency of 50Hz. Under the action of vibration, the first air chamber moves along the spiral track towards the discharge port, and after about 8 seconds, the air chamber reaches the positioning fixture. The photoelectric attitude sensor detects the air chamber's attitude, and the detection result shows that the air chamber interface is facing upwards, with an attitude deviation of 0.2mm. The deviation is within the preset threshold of 0.5mm, and the attitude is judged to be qualified. The photoelectric attitude sensor sends a grasping signal to the PLC.

[0067] After receiving the grasping signal, the robotic arm moves from its initial position to above the positioning fixture. The movement takes 2 seconds. Upon arrival, the gripper opens to a width of 45mm, descends to 10mm above the air chamber, and then closes until the gripping force reaches 5N. A force sensor monitors the gripping force in real time; when the gripping force reaches the set value of 5N, the gripper stops closing. The robotic arm then lifts the air chamber and transfers it to the appearance inspection module, a transfer that takes 3 seconds.

[0068] After the air chamber reaches the shooting position, three industrial cameras take pictures sequentially. The front side camera captures the front half of the side surface of the air chamber, the rear side camera captures the rear half of the side surface, and the top camera captures the upper interface. Each camera has an exposure time of 20ms, with a shooting interval of 0.5 seconds, for a total shooting time of approximately 2 seconds. The image processing unit receives the three images and runs a defect recognition algorithm. After preprocessing the images, the algorithm extracts edge and texture features and compares them with a defect model. The recognition results show that the air chamber has no cracks or bubbles, and the interface shape is regular, thus it is judged to be aesthetically acceptable.

[0069] The robotic arm transfers the gas chamber to the pressure / purity measurement module, a transfer that takes 3 seconds. The gas chamber is then placed on a quartz clamp, which automatically secures it. The temperature control unit activates, the TEC cooling element begins operating, and the temperature sensor monitors the gas chamber temperature in real time. After approximately 30 seconds, the gas chamber temperature stabilizes at 25°C.

[0070] A tunable laser emits a laser beam with a wavelength of 1083 nm, a laser power of 5 mW, and a beam diameter of 2 mm. The laser beam passes horizontally through a gas cell and interacts with helium atoms within the cell. A high-resolution spectrometer receives the transmitted light, measuring the wavelength from 1082.8 nm to 1083.2 nm in a scan step of 0.0002 nm, with a scan time of approximately 5 seconds. The spectrometer obtains absorption spectral data, showing an absorption peak at 1083.034 nm.

[0071] The absorption spectrum was fitted using Voigt function by spectral analysis software. The fitting process employed a nonlinear least squares method, iteratively calculating the optimal fitting parameters. After fitting, the full width at half maximum (FWHM) Δν of the absorption peak was extracted; the measured value was 58 MHz. The natural linewidth Δν0 was taken as 1.6 MHz based on literature data. The pressure broadening factor α was taken as 10 MHz / Torr based on the value of helium atoms at 25 °C. The gas pressure was calculated using the formula:

[0072] ;

[0073] Converting Torr units to MPa units, with a conversion factor of 1 Torr equal to 0.000133 MPa, the calculation yields:

[0074] ;

[0075] In the actual measurement, the spectrometer was directly calibrated to MPa, and the measurement result showed an air pressure of 0.52 MPa. This air pressure value is within the acceptable range of 0.4 MPa to 0.6 MPa, and is therefore deemed to meet the standard. The air pressure data was uploaded to the PLC via RS485 bus.

[0076] Purity measurements are performed within the same measurement module. The tunable laser wavelength scanning range is extended to 1082.8 nm to 1083.5 nm, covering... 4 He and 3 The absorption wavelength of He. The spectrometer collected data at 1083.034 nm. 4 He absorption peak and at 1083.25 nm 3 He absorption peaks. Spectroscopic analysis software integrates the two absorption peaks separately and calculates the peak areas. 4 The peak area of ​​the He absorption peak is 850 units. 3 The peak area of ​​the He absorption peak is 0.3 units. Purity was calculated based on the peak area ratio and the absorption cross-section correction factor. The calculation results show... 4 The purity of He is 99.997%, and the main impurities are... 3 He and trace amounts of N2, with N2 content of 0.002%. The purity value of 99.997% is higher than the threshold of 99.995%, and the purity is deemed to meet the standard. The purity data is uploaded to the PLC via RS485 bus.

[0077] The PLC receives the air pressure measurement value P1 = 0.52 MPa and the purity measurement value η = 99.997%. The PLC executes the judgment logic program to determine whether P1 is within the range of 0.4 MPa to 0.6 MPa, and the judgment result is yes. It also determines whether η is greater than or equal to 99.995%, and the judgment result is yes. Since both parameters meet the standards, the PLC determines that the air chamber is qualified. The PLC generates a transfer instruction, which instructs the air chamber to be sent to the qualified sorting area.

[0078] After receiving the transfer command, the robotic arm grasps the air chamber from the measurement module and transfers it to the qualified sorting area, a process that takes 4 seconds. The robotic arm gently places the air chamber onto the buffer tray in the qualified area, releases the gripper, and returns to its initial position. The photoelectric counting sensor detects the air chamber entering and generates a counting pulse signal, which is then uploaded to the PLC. The PLC increments the count value in the qualified area by 1.

[0079] The industrial computer in the data storage module receives measurement data transmitted from the PLC. The data record includes the unique chamber number He-20240501-001, measured air pressure of 0.52 MPa, measured purity of 99.997%, appearance assessment result of "qualified," overall assessment result of "qualified," and measurement time of 10:00:03 AM on May 1, 2024. The data is inserted into the chamber measurement record table of the MySQL database using SQL statements.

[0080] The above process is the complete measurement flow for the first air chamber. From the moment the air chamber is delivered to the positioning fixture to its placement in the sorting area, the total time is approximately 35 seconds. While the first air chamber is being measured, the vibratory feeder continues to transport the second air chamber to the positioning fixture, achieving continuous measurement in an assembly line manner.

[0081] During the measurement of 50 air chambers in batches, the visual inspection stage identified two air chambers with micro-cracks. These two air chambers were directly sent to the visually defective sorting area without further pressure and purity measurements. The remaining 48 air chambers passed the visual inspection and proceeded to the pressure and purity measurement stage. Of these 48 air chambers, 46 air chambers met the standards for both pressure and purity and were deemed qualified and sent to the qualified area. Two air chambers had a purity measurement value of 99.993%, which was lower than the threshold of 99.995%, and were deemed unqualified and sent to the unqualified area.

[0082] After measuring all 50 chambers, the total time was approximately 30 minutes. The data storage module automatically generated a batch test report. The report showed that the batch number was 20240501, the total number of chambers measured was 50, the number of qualified chambers was 46, and the pass rate was 92%. Two chambers failed the appearance test, accounting for 4%. Two chambers failed the parameter test, accounting for 4%. The average value of the air pressure measurement was 0.51 MPa, and the standard deviation was 0.03 MPa. The average value of the purity measurement was 99.996%, and the standard deviation was 0.001%. The report also analyzed the reasons for the failures: the two chambers that failed the appearance test had cracks on their side surfaces, and the two chambers that failed the parameter test had purity slightly below the threshold. The report was exported in PDF format and saved to the local hard drive, and simultaneously uploaded to the factory's MES system via a network interface.

[0083] In terms of measurement efficiency, this embodiment takes approximately 35 seconds to measure a single air chamber, while traditional manual measurement methods require operators to manually set up the optical platform, adjust the optical path, collect data, and manually interpret the readings, taking approximately 30 minutes per air chamber. Measuring a batch of 50 air chambers is completed within 30 minutes, whereas the traditional method would take approximately 25 hours. Regarding measurement accuracy, the robotic arm's repeatability is 0.02 mm, ensuring consistent air chamber positioning within the measurement module. The pressure sensor's zero-point calibration error is 0.0008 kPa, far less than the measurement range, guaranteeing accurate air pressure measurement. The standard deviation of air pressure measurement for qualified products among the 50 air chambers is 0.03 MPa, with a repeatability of approximately 5.9%, meeting the requirements for batch screening. In terms of resource utilization, the appearance inspection step is placed before air pressure and purity measurements, allowing two appearance-unqualified air chambers to be pre-screened, thus avoiding the use of subsequent precision measurement module time and preventing a waste of approximately 70 seconds of measurement time. Purity measurement employs spectral analysis, a non-invasive method that eliminates the need to extract gas from the chamber, thus avoiding gas loss and the risk of chamber seal failure. For quality management, measurement data for each chamber is linked to its unique number and stored in a database, enabling full traceability. Database queries allow for tracing the measurement time, value, and outcome of any chamber, providing a basis for quality issue analysis and process improvement. Batch test reports are automatically generated and uploaded to the MES system, achieving integration with the enterprise's information system and improving management efficiency. In terms of operational convenience, the entire measurement process requires only the operator to load the chamber onto the vibratory feeder and start the device; all subsequent operations are completed automatically without manual intervention, reducing the skill requirements for operators and minimizing subjective errors introduced by manual operation.

[0084] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An automatic measurement method for a gas-type atomic gas chamber, characterized in that... Includes the following steps: S1: System initialization, start the central control module, and perform zero-point calibration and parameter setting for each measurement module; S2: Air chamber feeding and positioning. The automatic feeding mechanism sends the air chamber to be tested to the positioning fixture, and the air chamber attitude is detected by the photoelectric sensor and adjusted to the preset position. S3: Appearance inspection. An automatic transfer mechanism grabs the air chamber and transfers it to the appearance inspection module. An industrial camera captures images of the air chamber, and an image recognition algorithm determines whether the appearance is qualified. S4: Pressure and purity measurement. The qualified gas chamber is transferred to the pressure / purity measurement module. The absorption spectrum data is collected by laser absorption spectroscopy, and the internal pressure value and gas purity of the gas chamber are calculated. S5: Result determination and sorting. The central control module determines the air chamber level based on the measurement data, and the automatic transfer mechanism sends the air chamber into the corresponding sorting area. S6: Data storage and report generation. The measurement data is stored in the database, and a test report is generated after batch measurements are completed.

2. The method according to claim 1, characterized in that, S1 specifically includes: loading the gas chamber to be tested into the vibratory feeder unit; starting the central control module to perform zero-point calibration of the pressure sensor; adjusting the focus of the industrial camera; returning the robotic arm to zero and positioning; and loading preset air pressure range and purity threshold parameters.

3. The method according to claim 1, characterized in that, S2 specifically includes: starting the vibratory feeder feeding unit to transport the air chambers one by one to the positioning fixture through vibration; photoelectric attitude sensor to detect the spatial attitude of the air chambers; if the detected air chamber attitude deviation exceeds a preset threshold, the vibratory feeder readjusts the air chamber position; after the attitude calibration is completed, a grab signal is sent to the central control module.

4. The method according to claim 1, characterized in that, S3 specifically includes: the robotic arm moves to the positioning fixture position and the gripper picks up the air chamber; the air chamber is transferred to the shooting position of the appearance inspection module; the industrial camera takes pictures of the side surface and two end interfaces of the air chamber to obtain multi-angle images; the image recognition algorithm analyzes the images to identify defects such as cracks, bubbles, and interface deformation; if a defect is identified, it is determined that the appearance is unqualified, and the robotic arm directly sends the air chamber to the appearance unqualified sorting area to end the measurement process of the air chamber.

5. The method according to claim 1, characterized in that, The pressure measurement steps in S4 are as follows: a robotic arm transfers a qualified air chamber to the pressure measurement module; a tunable laser emits a laser beam of a specific wavelength, which passes through the air chamber; a high-resolution spectrometer collects the transmission spectrum to obtain the absorption spectrum; and the absorption spectrum is fitted with a Voigt function to extract the full width at half maximum (FWHM) of the absorption peak. According to the formula Calculate the internal air pressure of the chamber, where The pressure value is in MPa. The full width at half maximum (FWHM) of the measured absorption peak (MHz); Natural linewidth (MHz); The pressure broadening factor is (MHz / Torr).

6. The method according to claim 1, characterized in that, The purity measurement step in S4 is as follows: a tunable laser scans the surface containing... and The characteristic absorption wavelength band; high-resolution spectrometers collected data in different wavelength ranges. and Identify the absorption peaks; calculate the peak areas of the two absorption peaks; determine the gas purity based on the peak area ratio.

7. The method according to claim 1, characterized in that, Specifically, S5 includes: a central control module receiving air pressure measurement values. and purity measurement value ;Will With preset air pressure range Compare; put With preset purity threshold The comparison is performed; the decision logic is: if... and If it is deemed qualified; or If the parameters are deemed unqualified, or if the measurement data shows abnormal fluctuations, it is determined that a re-inspection is required. The robotic arm then sends the air chamber into the corresponding sorting area based on the determination result.

8. An automatic measuring device for a gas-type atomic gas cell used to implement the method as described in any one of claims 1-7, characterized in that, include: An automatic feeding mechanism includes a vibratory feeder unit and an air chamber positioning fixture. The vibratory feeder unit is used to accommodate and transport the air chamber. The air chamber positioning fixture is located at the discharge end of the vibratory feeder unit and is equipped with a photoelectric attitude sensor. An automated transfer mechanism includes a robotic arm and grippers, with the grippers mounted at the end of the robotic arm for grasping and transferring air chambers; The appearance inspection module includes an industrial camera and a light source, which are positioned around the air chamber to acquire images of the air chamber. The air pressure / purity measurement module includes a tunable laser, a high-resolution spectrometer, and a constant temperature control unit. The tunable laser and the high-resolution spectrometer are respectively located on both sides of the air chamber placement position, and the constant temperature control unit is used to control the air chamber temperature. The central control module includes a controller and a display screen. The controller is electrically connected to the automatic feeding mechanism, automatic transfer mechanism, appearance inspection module, and air pressure / purity measurement module via a communication bus to coordinate the action sequence of each module. The automated sorting mechanism includes multiple sorting zones, each set within the working range of the robotic arm; The data storage module, electrically connected to the central control module, is used to store measurement data and generate test reports.

9. The apparatus according to claim 8, characterized in that: The inner wall of the vibratory feeder unit is covered with a soft buffer layer; the photoelectric attitude sensor is set above the positioning fixture to detect the attitude of the air chamber; the gripper is made of soft material and has a built-in force sensor, which is electrically connected to the controller.

10. The apparatus according to claim 8, characterized in that: The appearance inspection module also includes an image processing unit, which is electrically connected to an industrial camera and a controller; the multiple sorting areas include a qualified area, an appearance defective area, a parameter defective area, and a re-inspection area; each sorting area is equipped with a photoelectric counting sensor, which is electrically connected to the controller; the data storage module includes an industrial computer and a database, which is electrically connected to the controller.

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