Gas output device and test system with same

Abstract

The invention provides a gas output device and a test system with the same, the gas output device comprises a gas container, a first flow controller, a second flow controller, a flowmeter and a switch valve, the gas container is connected with an inflation gas path, a test gas path and an exhaust gas path, the inflation gas path is used for connecting a gas source, and the test gas path is used for connecting a gas outlet. The testing gas circuit is used for being connected with the gas circuit element, the first flow controller is arranged on the inflation gas circuit, the second flow controller is arranged on the exhaust gas circuit, the flowmeter is arranged on the testing gas circuit, and the switch valve is arranged on the testing gas circuit. According to the gas output device in the embodiment of the invention, the application scene of stable pressure can be simulated, and the application scenes of pressure rise and pressure drop can also be simulated, so that the gas path element can be tested in various application scenes, and the performance evaluation result of the gas path element is more comprehensive.

Description

Technical Field

[0001] This application relates to the field of gas circuit component testing technology, and in particular to a gas output device and a testing system having the same. Background Technology

[0002] Some production equipment uses gas circuit components, such as gas mass flow meters, gas mass flow controllers, and gas pressure reducing valves. These gas circuit components need to undergo performance testing before being installed in the equipment. During the testing process, a gas output device provides gas at a preset pressure to simulate the application environment in which the gas circuit component will be used. The performance parameters of the gas circuit component are obtained under this scenario, thereby evaluating the performance of the gas circuit component.

[0003] Gas output devices in related technologies can only simulate application scenarios with stable pressure output, which makes the evaluation results of gas circuit components insufficient. Summary of the Invention

[0004] This application provides a gas output device and a testing system thereon, which aims to enable the gas output device to simulate a wider range of application scenarios, so as to make the performance evaluation results of the gas circuit components more comprehensive.

[0005] The specific technical solution is as follows: An embodiment of the first aspect of this application provides a gas output device for providing gas to a gas path component to be tested. The gas output device includes a gas container, a first flow controller, a second flow controller, a flow meter, and a switching valve. The gas container is respectively connected to an inflation gas path, a test gas path, and an exhaust gas path. The inflation gas path is used to connect to a gas source, the test gas path is used to connect to the gas path component, the first flow controller is disposed in the inflation gas path, the second flow controller is disposed in the exhaust gas path, the flow meter is disposed in the test gas path, and the switching valve is disposed in the test gas path.

[0006] The gas output device in this embodiment includes a gas container connected to an inflation path, a test path, and an exhaust path. The inflation path inflates the gas container, and the test path connects to a gas circuit component to be tested. The inflation path is equipped with a first flow controller, the exhaust path with a second flow controller, and the test path with a flow meter. This configuration allows control of the gas flow rate entering and exiting the gas container via the first and / or second flow controllers, thereby controlling the pressure of the gas output from the gas output device. When the gas flow rate entering and exiting the gas container is equal, the pressure in the gas container remains constant. In this case, the gas output device can output gas at a stable pressure via the test path to simulate a stable pressure application scenario. When the gas flow rate entering and exiting the gas container is greater than the gas flow rate exiting the gas container, the pressure in the gas container rises. In this case, the gas output device can output gas at an increased pressure via the test path to simulate a pressure increase application scenario. When the gas flow rate entering the gas container is less than the gas flow rate exiting the gas container, the pressure in the gas container will drop. At this time, the gas output device can simulate the application scenario of pressure drop by testing the gas output pressure of the gas path. Therefore, the gas output device in this embodiment can simulate application scenarios with stable pressure, as well as application scenarios with pressure rise and pressure drop. This allows the gas path components to be tested under various application scenarios, thereby making the performance evaluation results of the gas path components more comprehensive.

[0007] In some embodiments, there are multiple test gas paths, each of which is equipped with a flow meter and a switching valve.

[0008] The test gas path has multiple connections, allowing multiple gas path components to be tested to be connected simultaneously. This enables the gas output device to supply gas to multiple gas path components at the same time, facilitating simultaneous testing of multiple gas path components and thus improving testing efficiency.

[0009] In some embodiments, there are multiple inflation air passages, and each inflation air passage is provided with a first flow controller.

[0010] The system has multiple inflation channels, allowing for the addition of more channels to meet the required inflation flow rate when one channel is insufficient. This ensures that the gas flow rate entering the gas container reaches the desired level, thus enabling the gas output device to deliver pressures over a wider range.

[0011] In some embodiments, there are multiple exhaust gas paths, and each exhaust gas path is provided with a second flow controller.

[0012] There are multiple exhaust gas passages. When opening one exhaust gas passage cannot meet the exhaust flow requirement, the number of exhaust gas passages can be increased to ensure that the gas flow rate discharged from the gas container reaches the required flow rate. This allows the gas output device to output a wider pressure range.

[0013] In some embodiments, the flow meter is a laminar flow meter, and the first flow controller and the second flow controller are laminar flow controllers.

[0014] Compared to traditional thermal flow meters, laminar flow meters have a faster response time. Therefore, when a laminar flow meter is used, and both the first and second flow controllers are laminar flow controllers, the pressure of the gas output from the gas output device can be controlled more quickly and accurately.

[0015] In some embodiments, the gas output device further includes a control unit electrically connected to the first flow controller, the second flow controller, and the flow meter.

[0016] When the gas output device is working, the flow information acquired by the flow meter is transmitted to the control unit. The control unit can control the first flow controller and / or the second flow controller according to the flow information of the flow meter, thereby controlling the pressure of the gas output by the gas output device to meet the pressure scenario required for the test.

[0017] In some embodiments, the gas output device further includes a pressure sensor connected to the gas container for measuring the pressure of the gas container, and the control unit is also electrically connected to the pressure sensor.

[0018] The pressure sensor is used to monitor the pressure of the gas container in real time. When the pressure of the gas container deviates from the preset pressure value, the control unit can control the first flow controller and / or the second flow controller to bring the pressure of the gas container back to the preset pressure value, so that the gas output device can output gas according to the preset pressure value and maintain a stable pressure.

[0019] In some embodiments, the gas output device has a first operating mode in which the control unit is configured to control the first flow controller based on the flow rate value obtained by the flow meter, so that the input flow rate of the inflation gas path is equal to the output flow rate of the test gas path.

[0020] The first operating mode is a stable pressure output mode. When the gas output device is adjusted to the first operating mode, after the switch valve is opened, the gas in the gas container is output through the test gas path. At the instant the gas passes through the test gas path, the flow meter obtains the flow rate value of the test gas path and transmits the flow rate information to the control unit. The control unit controls the first flow controller according to the flow rate value obtained by the flow meter to ensure that the input flow rate of the filling gas path is equal to the output flow rate of the test gas path. For the gas container, the flow rate entering the gas container is consistent with the flow rate exiting the gas container. In this way, the pressure of the gas container remains unchanged, so that the gas output device maintains a stable pressure.

[0021] In some embodiments, the gas output device further includes a pressure sensor connected to the gas container, and the control unit is also electrically connected to the pressure sensor; when the gas output device is in a first operating mode, the control unit is further configured to control the first flow controller and / or the second flow controller to increase or decrease the pressure of the gas container when the pressure value of the pressure sensor is less than or greater than a preset pressure value.

[0022] If the performance of the gas path element under test is poor, it may cause flow fluctuations in the test gas path, resulting in a deviation between the pressure in the gas container and the preset pressure value. This will affect the output accuracy of the gas output device. To avoid this situation, the gas output device is also equipped with a pressure sensor connected to the gas container. The pressure sensor is used to monitor the pressure in the gas container in real time. The control unit is electrically connected to the pressure sensor. When the pressure value detected by the pressure sensor is less than or greater than the preset pressure value, the control unit can control the first flow controller and / or the second flow controller to increase or decrease the pressure in the gas container, thereby returning it to the preset pressure value. This improves the output accuracy of the gas output device.

[0023] In some embodiments, the gas output device has a second operating mode in which the control unit is configured to control the first flow controller and the second flow controller based on the flow rate value obtained by the flow meter, so that the difference between the gas flow rate entering the gas container and the gas flow rate output from the gas container is a fixed value.

[0024] The second operating mode is an output mode where the pressure changes at a fixed slope, which can be implemented in two ways. One is a pressure increase with a fixed slope, achieved by increasing the pressure in the gas container at a fixed rate. Specifically, the control unit can control the first and second flow controllers to ensure that the gas flow rate entering the gas container is greater than the gas flow rate exiting the gas container, and maintain the difference between the two at a fixed value. This allows the pressure output by the gas output device to increase at a fixed slope. The other is a pressure decrease with a fixed slope, achieved by decreasing the pressure in the gas container at a fixed rate. Specifically, the control unit can control the first and second flow controllers to ensure that the gas flow rate entering the gas container is less than the gas flow rate exiting the gas container, and maintain the difference between the two at a fixed value. This allows the pressure output by the gas output device to decrease at a fixed slope. In summary, in the second operating mode, the gas output device can output gas with a pressure change at a fixed slope, thereby simulating application scenarios with pressure variations.

[0025] Furthermore, if the flow rate of the tested gas circuit unit is relatively small, the amount of gas discharged per unit time is limited. In this case, without activating the exhaust gas circuit, it is difficult to achieve a large pressure drop by relying solely on the inflation gas circuit and the gas output of the test gas circuit. This means that by introducing the exhaust gas circuit and adjusting the flow relationship between the inflation gas circuit, the exhaust gas circuit, and the test gas circuit using the first and second flow controllers, pressure changes with a large slope can be achieved.

[0026] In some embodiments, the gas output device has a third operating mode in which the control unit is configured to control the first flow controller and the second flow controller based on the flow rate value obtained by the flow meter, such that the difference between the gas flow rate entering the gas container and the gas flow rate output from the gas container alternately becomes positive and negative.

[0027] When the gas flow rate entering the gas container is greater than the gas flow rate exiting the gas container, the difference is positive, and the pressure in the gas container increases accordingly. When the gas flow rate entering the gas container is less than the gas flow rate exiting the gas container, the difference is negative, and the pressure in the gas container decreases accordingly. Therefore, when the difference between the gas flow rate entering and exiting the gas container alternates between positive and negative values, the pressure in the gas container alternates between rising and falling. Thus, when the gas output device is in its third operating mode, it can output gas with alternating pressure increases and decreases, thereby simulating an application scenario with regular pressure fluctuations.

[0028] An embodiment of the second aspect of this application provides a testing system for testing the performance of gas path components, the testing system including the gas output device in any of the above embodiments.

[0029] The testing system in this application embodiment is based on the same inventive concept as the gas output device in the above embodiments. Therefore, the testing system in this application embodiment can obtain the beneficial effects of the gas output device in the corresponding embodiments. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of a gas output device provided in an embodiment of this application; Figure 2 This is a schematic diagram of the structure of a gas output device provided in another embodiment of this application; Figure 3 This is a schematic diagram of the structure of a gas output device provided in another embodiment of this application; Figure 4 This is a schematic diagram of the structure of a gas output device provided in another embodiment of this application; Figure 5 A graph showing the change of gas pressure over time in the first operating mode of the gas output device provided in the embodiments of this application; Figure 6 A graph showing the change of gas pressure over time in the second operating mode of the gas output device provided in this application embodiment (with a positive slope). Figure 7 A graph showing the change in gas pressure over time in the second operating mode of the gas output device provided in this application embodiment (with a negative slope). Figure 8 A graph showing the change in gas pressure over time in the third operating mode of the gas output device provided in this application embodiment.

[0031] The attached figures are labeled as follows: 1. Gas output device; 2. Gas circuit components; 10. Gas containers; 20. Inflation air path; 30. Test the air circuit; 40. Exhaust air passage; 50. First flow controller; 60. Second flow controller; 70. Flow meter; 80. Switch valve; 90. Pressure sensor; 100. Control Unit. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0033] In the description of this application, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the accompanying drawings are only for illustrative purposes and should not be construed as limiting this application. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as implying or suggesting relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0036] As mentioned in the background section, gas output devices in related technologies can only simulate application scenarios with stable pressure output, which makes the evaluation results of gas circuit components insufficient. Specifically, gas output devices in related technologies can output gas at a stable pressure, thereby obtaining the performance parameters of gas circuit components under stable pressure environments. However, some gas circuit components also face pressure changes during actual applications. Therefore, obtaining the performance indicators of gas circuit components under pressure variation scenarios is also necessary, allowing for a more comprehensive evaluation of the performance of gas circuit components.

[0037] Based on the above, the applicant of this application has proposed the technical solution described in this application. Specifically, a gas output device is proposed, wherein the gas container is connected to an inflation gas path, a test gas path, and an exhaust gas path. The inflation gas path is used to connect to a gas source, and the test gas path is used to connect to a gas path component to be tested. The inflation gas path is equipped with a first flow controller, the exhaust gas path is equipped with a second flow controller, and the test gas path is equipped with a flow meter and a switching valve.

[0038] With this configuration, the gas flow rate entering the gas container and the gas flow rate exiting the gas container can be controlled by the first flow controller and / or the second flow controller, thereby controlling the pressure of the gas output by the gas output device.

[0039] Specifically, when the gas flow rate entering the gas container is equal to the gas flow rate exiting the gas container, the pressure in the gas container remains constant. In this case, the gas output device can output gas at a stable pressure through the test gas path to simulate a stable pressure application scenario. When the gas flow rate entering the gas container is greater than the gas flow rate exiting the gas container, the pressure in the gas container will rise. In this case, the gas output device can output gas at a rising pressure through the test gas path to simulate a pressure rise application scenario. When the gas flow rate entering the gas container is less than the gas flow rate exiting the gas container, the pressure in the gas container will drop. In this case, the gas output device can output gas at a decreasing pressure through the test gas path to simulate a pressure drop application scenario.

[0040] Therefore, the gas output device in this technical solution can simulate both stable pressure application scenarios and pressure rise and fall application scenarios. This allows the gas circuit components to be tested under various scenarios, resulting in a more comprehensive performance evaluation of the gas circuit components.

[0041] The above is the core idea of ​​this application. The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0042] like Figure 1 , Figure 2As shown, an embodiment of the first aspect of this application provides a gas output device 1 for supplying gas to a gas path component 2 to be tested. The gas output device 1 includes a gas container 10, a first flow controller 50, a second flow controller 60, a flow meter 70, and a switching valve 80. The gas container 10 is connected to an inflation gas path 20, a test gas path 30, and an exhaust gas path 40. The inflation gas path 20 is connected to a gas source, and the test gas path 30 is connected to the gas path component 2. The first flow controller 50 is located in the inflation gas path 20, the second flow controller 60 is located in the exhaust gas path 40, the flow meter 70 is located in the test gas path 30, and the switching valve 80 is located in the test gas path 30.

[0043] Specifically, the gas container 10 is used to store the test gas. The gas container 10 can be made of metal, ensuring airtightness while withstanding high pressure. The gas container 10 is connected to an inflation passage 20, a test passage 30, and an exhaust passage 40. The inflation passage 20 connects to a gas source, allowing the gas source to inflate the gas container 10 when the gas source is turned on. The exhaust passage 40 is used for venting gas; that is, the gas in the gas container 10 can be discharged through the exhaust passage 40. The exhaust passage 40 can be connected to the external atmosphere or to a waste gas recovery device. The test passage 30 connects to the gas path element 2 to be tested. Exemplarily, the gas path element 2 can be a gas mass flow meter, a gas mass flow controller, a gas pressure reducing valve, etc. Of course, the gas path element 2 can also be other devices or components capable of allowing gas to pass through and producing physical or chemical effects on the gas.

[0044] A flow meter 70 is installed in the test gas path 30, and the flow meter 70 can acquire the flow rate of the test gas path 30 in real time. A first flow controller 50 is installed in the inflation gas path 20, and the first flow controller 50 can control the flow rate of the inflation gas path 20. A second flow controller 60 is installed in the exhaust gas path 40, and the second flow controller 60 can control the flow rate of the exhaust gas path 40.

[0045] The switching valve 80 is located in the test gas path 30. When the switching valve 80 is open, the gas in the gas container 10 can be output through the test gas path 30 and pass through the gas path element 2. When the switching valve 80 is closed, the gas in the gas container 10 cannot be output through the test gas path 30.

[0046] The gas output device 1 in this embodiment includes a gas container 10 connected to an inflation gas path 20, a test gas path 30, and an exhaust gas path 40. The inflation gas path 20 inflates the gas container 10, and the test gas path 30 connects to a gas path element 2 to be tested. The inflation gas path 20 is equipped with a first flow controller 50, the exhaust gas path 40 is equipped with a second flow controller 60, and the test gas path 30 is equipped with a flow meter 70. This configuration allows the flow rate of gas entering and exiting the gas container 10 to be controlled by the first flow controller 50 and / or the second flow controller 60, thereby controlling the pressure of the gas output device 1. When the flow rate of gas entering and exiting the gas container 10 is equal, the pressure of the gas container 10 remains constant. In this case, the gas output device 1 can output gas at a stable pressure through the test gas path 30 to simulate a stable pressure application scenario. When the gas flow rate entering the gas container 10 is greater than the gas flow rate exiting the gas container 10, the pressure in the gas container 10 will rise. At this time, the gas output device 1 can output gas with increased pressure through the test gas path 30, thus simulating a pressure-rising application scenario. When the gas flow rate entering the gas container 10 is less than the gas flow rate exiting the gas container 10, the pressure in the gas container 10 will drop. At this time, the gas output device 1 can output gas with decreased pressure through the test gas path 30, thus simulating a pressure-falling application scenario. Therefore, the gas output device 1 in this embodiment can simulate both stable pressure application scenarios and pressure-rising and pressure-falling application scenarios. This allows the gas path component 2 to be tested under various application scenarios, resulting in a more comprehensive performance evaluation of the gas path component 2.

[0047] like Figure 2 As shown, in some embodiments, there are multiple test gas paths 30, and each test gas path 30 is equipped with a flow meter 70 and a switching valve 80.

[0048] The number of test gas paths 30 is multiple, so that multiple gas path components 2 to be tested can be connected at the same time. This allows the gas output device 1 to provide gas to multiple gas path components 2 at the same time, so as to test multiple gas path components 2 at the same time, thereby improving the testing efficiency.

[0049] It is understandable that multiple test gas paths 30 are connected to the gas container 10, which means that pressure changes in the gas container 10 will be directly reflected in each test gas path 30. In other words, at the same time, each gas path element 2 connected to the test gas path 30 is in the same pressure environment.

[0050] like Figure 2As shown, in some embodiments, there are multiple inflation air passages 20, and each inflation air passage 20 is provided with a first flow controller 50.

[0051] The number of inflation air passages 20 is multiple. This allows for the number of inflation air passages 20 that can be opened to meet the required inflation flow rate when opening one passage is insufficient, thus increasing the number of passages to be opened to ensure the gas flow rate entering the gas container 10 reaches the desired level. Consequently, the gas output device 1 can output a wider pressure range.

[0052] like Figure 2 As shown, in some embodiments, there are multiple exhaust gas passages 40, and each exhaust gas passage 40 is provided with a second flow controller 60.

[0053] There are multiple exhaust gas passages 40. When opening one exhaust gas passage 40 is insufficient to meet the exhaust flow rate requirement, the number of exhaust gas passages 40 can be increased to ensure that the gas flow rate discharged from the gas container 10 reaches the required flow rate. This allows the gas output device 1 to output a wider pressure range.

[0054] In some embodiments, the flow meter 70 is a laminar flow meter, and the first flow controller 50 and the second flow controller 60 are laminar flow controllers.

[0055] A laminar flow meter is a device designed to measure fluid flow rate based on the Hagen-Poiseuille Law. It incorporates a laminar flow element, which converts the turbulent flow of the fluid into a stable laminar flow state. In laminar flow, the pressure difference generated as the fluid passes through the laminar flow element is proportional to the volumetric flow rate. Thus, the fluid flow rate can be calculated by measuring the pressure difference across the laminar flow section.

[0056] A laminar flow controller includes a flow measurement module and a flow regulation element. The flow measurement module is equivalent to a laminar flow meter, and the flow regulation element is, for example, a flow regulating valve.

[0057] Compared to traditional thermal flow meters, laminar flow meters have a faster response speed. Therefore, when laminar flow meter 70 is used and laminar flow controllers are used for the first flow controller 50 and the second flow controller 60, the pressure state of the gas output by gas output device 1 can be controlled more quickly and accurately.

[0058] Taking the scenario where the gas output device 1 outputs a stable pressure as an example, after the switch valve 80 on the test gas path 30 is opened, the flow meter 70 obtains the flow rate value of the test gas path 30. This flow rate value can be used as the set value for the inflation gas path 20 to control the first flow controller 50, so that the inflation gas path 20 inflates the gas container 10 at the same flow rate. For the gas container 10, the input flow rate is equal to the output flow rate, which keeps the pressure constant, thus ensuring that the gas output by the gas output device 1 maintains a stable pressure. Since the laminar flow meter 70 has a very high response speed, it can immediately obtain the flow rate of the test gas path 30 after the switch valve 80 is opened. Almost simultaneously, the first flow controller 50 can also complete the flow rate regulation of the inflation gas path 20, enabling the gas output device 1 to provide gas with a stable pressure within milliseconds after the switch valve 80 is opened.

[0059] like Figure 3 , Figure 4 As shown, in some embodiments, the gas output device 1 further includes a control unit 100, which is electrically connected to the first flow controller 50, the second flow controller 60, and the flow meter 70.

[0060] When the gas output device 1 is working, the flow information acquired by the flow meter 70 is transmitted to the control unit 100. The control unit 100 can control the first flow controller 50 and / or the second flow controller 60 according to the flow information of the flow meter 70, thereby controlling the pressure of the gas output by the gas output device 1 to meet the pressure scenario required for the test.

[0061] like Figure 3 , Figure 4 As shown, in one embodiment, the gas output device 1 further includes a pressure sensor 90 connected to the gas container 10. The pressure sensor 90 is used to measure the pressure of the gas container 10, and the control unit 100 is also electrically connected to the pressure sensor 90.

[0062] The pressure sensor 90 is used to monitor the pressure of the gas container 10 in real time. When the pressure of the gas container 10 deviates from the preset pressure value, the control unit 100 can control the first flow controller 50 and / or the second flow controller 60 to bring the pressure of the gas container 10 back to the preset pressure value, so that the gas output device 1 can output gas according to the preset pressure value and maintain a stable pressure.

[0063] In one embodiment, the gas output device 1 has a first operating mode in which the control unit 100 is configured to control the first flow controller 50 based on the flow value obtained by the flow meter 70, so that the input flow of the inflation gas path 20 is equal to the output flow of the test gas path 30.

[0064] Before opening the switch valve 80 for testing, the control unit 100 can control the first flow controller 50 or the second flow controller 60 according to the preset pressure value set by the user, so as to inflate or vent the gas container 10, thereby making the pressure of the gas container 10 reach the preset pressure value.

[0065] Please refer to Figure 5 The first operating mode is a stable pressure output mode. When the gas output device 1 is adjusted to the first operating mode, after the switch valve 80 is opened, the gas in the gas container 10 is output through the test gas path 30. At the instant the gas passes through the test gas path 30, the flow meter 70 obtains the flow rate value of the test gas path 30 and transmits the flow rate information to the control unit 100. The control unit 100 controls the first flow controller 50 according to the flow rate value obtained by the flow meter 70, so that the input flow rate of the filling gas path 20 is equal to the output flow rate of the test gas path 30. For the gas container 10, the flow rate entering the gas container 10 is consistent with the flow rate output from the gas container 10. In this way, the pressure of the gas container 10 remains unchanged, so that the gas output by the gas output device 1 maintains a stable pressure.

[0066] like Figure 3 , Figure 4 As shown, in one embodiment, the gas output device 1 further includes a pressure sensor 90 connected to the gas container 10, and the control unit 100 is also electrically connected to the pressure sensor 90. When the gas output device 1 is in a first operating mode, the control unit 100 is further configured to control the first flow controller 50 and / or the second flow controller 60 to increase or decrease the pressure in the gas container 10 when the pressure value of the pressure sensor 90 is less than or greater than a preset pressure value.

[0067] If the performance of the gas path element under test is poor, it may cause flow fluctuations in the test gas path 30, resulting in a deviation between the pressure of the gas container 10 and the preset pressure value. This would affect the output accuracy of the gas output device 1. To avoid this situation, the gas output device 1 is also equipped with a pressure sensor 90 connected to the gas container 10. The pressure sensor 90 is used to monitor the pressure of the gas container 10 in real time. The control unit 100 is electrically connected to the pressure sensor 90. When the pressure value detected by the pressure sensor 90 is less than or greater than the preset pressure value, the control unit 100 can control the first flow controller 50 and / or the second flow controller 60 to increase or decrease the pressure of the gas container 10, thereby returning it to the preset pressure value. This improves the output accuracy of the gas output device 1.

[0068] In one embodiment, the gas output device 1 has a second operating mode in which the control unit 100 is configured to control the first flow controller 50 and the second flow controller 60 based on the flow rate value obtained by the flow meter 70, so that the difference between the gas flow rate entering the gas container 10 and the gas flow rate output from the gas container 10 is a fixed value.

[0069] Please refer to Figure 6 , Figure 7 The second operating mode is an output mode where the pressure changes at a fixed slope, which can be implemented in two ways. One way is a pressure increase with a fixed slope (please refer to...). Figure 6 This can be achieved by increasing the pressure in the gas container 10 at a fixed rate. Specifically, the control unit 100 can control the first flow controller 50 and the second flow controller 60 to ensure that the gas flow rate entering the gas container 10 is greater than the gas flow rate exiting the gas container 10, and to maintain the difference between the two at a fixed value. This allows the pressure output by the gas output device 1 to increase at a fixed slope. Another scenario involves a pressure decrease at a fixed slope (see [reference]). Figure 7 This can be achieved by reducing the pressure in the gas container 10 at a fixed rate. Specifically, the control unit 100 can control the first flow controller 50 and the second flow controller 60 to ensure that the gas flow rate entering the gas container 10 is less than the gas flow rate output from the gas container 10, and to keep the difference between the two a fixed value. In this way, the pressure output by the gas output device 1 decreases at a fixed slope. In summary, in the second operating mode, the gas output device 1 can output gas with pressure changing at a fixed slope, thereby simulating the application scenario of pressure variation.

[0070] It is understood that the gas flow rate output from the gas container 10 includes both the gas flow rate discharged through the exhaust gas path 40 and the gas flow rate output through the test gas path 30. Therefore, when controlling the first flow controller 50 and the second flow controller 60, the flow rate value obtained by the flow meter 70 must also be included in the calculation.

[0071] Furthermore, if the flow rate of the tested gas circuit unit is small, the amount of gas discharged per unit time is limited. In this case, without activating the exhaust gas circuit 40, it is difficult to achieve a large pressure drop by relying solely on the inflation gas circuit 20 and the gas output of the test gas circuit 30. This means that by introducing the exhaust gas circuit 40 and adjusting the flow relationship between the inflation gas circuit 20, the exhaust gas circuit 40, and the test gas circuit 30 through the first flow controller 50 and the second flow controller 60, a pressure change with a large slope can be achieved.

[0072] In one embodiment, the gas output device 1 has a third operating mode in which the control unit 100 is configured to control the first flow controller 50 and the second flow controller 60 based on the flow rate value obtained by the flow meter 70, so that the difference between the gas flow rate entering the gas container 10 and the gas flow rate output from the gas container 10 alternately becomes positive and negative.

[0073] When the gas flow rate entering gas container 10 is greater than the gas flow rate exiting gas container 10, the difference is positive, and correspondingly, the pressure in gas container 10 increases. When the gas flow rate entering gas container 10 is less than the gas flow rate exiting gas container 10, the difference is negative, and correspondingly, the pressure in gas container 10 decreases. Therefore, when the difference between the gas flow rate entering gas container 10 and the gas flow rate exiting gas container 10 alternates between positive and negative values, the pressure in gas container 10 alternates between increasing and decreasing (see reference). Figure 8 Therefore, when the gas output device 1 is in the third working mode, the gas output device 1 can output gas with alternating pressure rises and falls, thereby simulating the application scenario of regular pressure fluctuations.

[0074] It is understandable that by designing the control curves (pressure value change curves over time) of the first flow controller 50 and the second flow controller 60, more complex pressure waveforms can be output, including the sum of the above waveforms, sine waveforms, and other pressure waveforms.

[0075] An embodiment of the second aspect of this application provides a testing system for testing the performance of a gas path component 2. The testing system includes the gas output device 1 in any of the above embodiments.

[0076] The testing system in this application embodiment is based on the same inventive concept as the gas output device 1 in the above embodiment. Therefore, the testing system in this application embodiment can obtain the beneficial effects of the gas output device 1 in the corresponding embodiment.

[0077] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A gas output device for providing a gas to a gas path element to be tested, characterized in that The gas output device comprises: a gas container connected with a charging gas path, a testing gas path and an exhaust gas path respectively, the charging gas path is used for connecting a gas source, and the testing gas path is used for connecting the gas path element; a first flow controller arranged in the charging gas path; a second flow controller arranged in the exhaust gas path; a flow meter arranged in the testing gas path; a switch valve arranged in the testing gas path.

2. The gas output device according to claim 1, characterized by The number of the testing gas paths is plural, and each of the testing gas paths is provided with one flow meter and one switch valve.

3. The gas output device according to claim 1, characterized by The number of the charging gas paths is plural, and each of the charging gas paths is provided with one first flow controller; and / or, the number of the exhaust gas paths is plural, and each of the exhaust gas paths is provided with one second flow controller.

4. The gas output device according to claim 1, characterized by The flow meter is a laminar flow meter, and the first flow controller and the second flow controller are laminar flow controllers.

5. The gas output device according to claim 1, characterized by The gas output device further comprises a control unit electrically connected with the first flow controller, the second flow controller and the flow meter.

6. The gas output device according to claim 5, characterized by The gas output device further comprises a pressure sensor connected with the gas container, the pressure sensor is used for measuring the pressure of the gas container, and the control unit is further electrically connected with the pressure sensor.

7. The gas output device according to claim 5, characterized by The gas output device has a first working mode, and in the case that the gas output device is in the first working mode, the control unit is configured to control the first flow controller according to the flow value obtained by the flow meter, so that the input flow of the charging gas path is equal to the output flow of the testing gas path.

8. The gas output device according to claim 7, characterized by The gas output device further comprises a pressure sensor connected with the gas container, the control unit is further electrically connected with the pressure sensor; In the case that the gas output device is in the first working mode, the control unit is further configured to control the first flow controller and / or the second flow controller when the pressure value of the pressure sensor is less than or greater than a preset pressure value, so as to increase or decrease the pressure of the gas container.

9. The gas output device according to claim 5, characterized by The gas output device has a second working mode, and in the case that the gas output device is in the second working mode, the control unit is configured to control the first flow controller and the second flow controller according to the flow value obtained by the flow meter, so that the difference between the gas flow entering the gas container and the gas flow output from the gas container is a fixed value.

10. The gas output device according to claim 5, characterized by The gas output device has a third working mode, and in the case that the gas output device is in the third working mode, the control unit is configured to control the first flow controller and the second flow controller according to the flow value obtained by the flow meter, so that the difference between the gas flow entering the gas container and the gas flow output from the gas container alternately has positive value and negative value.

11. A test system for testing the performance of an air path component, the test system comprising: The testing system comprises the gas output device according to any one of claims 1 to 10.

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