Target diffusion welding strength test sample

Abstract

The invention discloses a target diffusion welding strength test sample, which comprises a back plate and a target blank, the lower part of the back plate and the upper part of the target blank are welded to form a welding seam, the central part of the back plate is provided with an upper through hole for penetrating through a pressure head of a press machine, the upper through hole vertically penetrates through the back plate, the outer diameter of the back plate is greater than the outer diameter of the target blank, and an annular cushion block is sleeved outside the target blank. The upper portion of the annular cushion block abuts against the lower portion of the back plate in a matched mode. Pressure is applied to the target blank through a press machine, and the back plate is disconnected from the target blank along with the pressure increase of the press machine, so that the welding strength is calculated according to the pressure of the press machine and the area of a welding seam, and the tensile stress of a target diffusion welding strength test sample is changed into opposite stress during testing; a tensile machine does not need to be used for clamping and fixing the target diffusion welding strength test sample, so that the metal material tensile test standard is met; clamping and dismounting are not needed, and the testing process is simplified; during machining, only drilling and welding are needed, and the machining difficulty is lowered.

Description

Technical Field

[0001] This invention relates to the field of target welding tensile specimen technology, and in particular to a target diffusion welding strength test specimen. Background Technology

[0002] Diffusion bonding of target materials refers to a welding method in which a target material and a backing plate form a metallurgical bonding layer through interatomic diffusion under high temperature and high pressure. Compared with electron beam welding, diffusion bonding has a larger bonding area and higher bonding strength than brazing, making it the future direction of target material welding. Semiconductor targets are the most commonly used target materials for diffusion bonding. To characterize the welding quality, tensile tests are performed on the diffused target materials to measure the welding strength.

[0003] Traditional tensile testing involves welding two "T"-shaped workpieces together to form an "I"-shaped specimen. During testing, both ends of the specimen are fixed to a tensile testing machine to determine the tensile force the weld joint can withstand. According to GB / T 228.1-2010, the standard for tensile testing of metallic materials, the clamping portion of the traditional "I"-shaped tensile testing machine for this specimen is 40-80mm on each side, with a parallel length of 60-100mm, resulting in a total specimen length of 160-200mm. However, when testing target materials, especially semiconductor targets, [further details are needed]. Semiconductor target blanks are disc-shaped with a diameter of 300-450 mm and a thickness of 6-15 mm; backplates are disc-shaped with a diameter of 450-550 mm and a thickness of 8-20 mm. Therefore, for disc-shaped target blanks and backplates with a total thickness of no more than 60 mm, it is difficult to process them into traditional "I"-shaped tensile specimens. Even if they are processed into "I"-shaped tensile specimens, they cannot meet the GBT228.1-2010 standard for tensile testing of metallic materials, resulting in inaccurate test results. Therefore, it is necessary to improve this process. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide a target material diffusion welding strength test specimen that solves the problem that the clamping part of the tensile testing machine is insufficient to meet the tensile testing standards for metallic materials. It is suitable for target material thickness, improves testing accuracy, and facilitates processing.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a target material diffusion welding strength test sample, comprising a back plate and a target blank, wherein the lower part of the back plate is welded to the upper part of the target blank to form a weld, and an upper through hole for the press head of the press machine to pass through is provided in the center of the back plate, the upper through hole vertically penetrates the back plate, the outer diameter of the back plate is larger than the outer diameter of the target blank, and an annular pad is fitted on the outside of the target blank, the upper part of the annular pad abutting against the lower part of the back plate.

[0006] In a further technical solution, both the back plate and the target blank are circular in shape, the weld is an annular weld, the inner diameter of the upper perforation is set to D1, and the outer diameter of the target blank is set to D2, where D2 is greater than D1.

[0007] In a further technical solution, when the back plate and the target blank are disconnected, the press applies pressure F to the target blank, and the weld strength between the back plate and the target blank is... .

[0008] In a further technical solution, a pressure-bearing groove with an upward opening is provided in the center of the target blank. The pressure-bearing groove is aligned with the upper through hole in the vertical direction. The inner diameter of the pressure-bearing groove is the same as the inner diameter D1 of the upper through hole. The distance between the bottom of the pressure-bearing groove and the back plate is H1, where H1 is 0.5~5mm.

[0009] In a further technical solution, a circular protrusion is provided at the center of the target blank. The circular protrusion is inserted into the upper through hole. The distance between the upper end face of the circular protrusion and the back plate is H2, where H2 is 0.5~5mm.

[0010] In a further technical solution, the inner diameter D1 of the upper perforation is 10~50mm, and the outer diameter D2 of the target blank is 20~60mm.

[0011] The advantages of this invention compared to existing technologies are as follows: By opening an upper perforation in the back plate, the target blank is welded to the lower part of the back plate. During the welding strength test, the target diffusion welding strength test sample is fixed on the annular pad. The pressure head of the press passes through the upper perforation and presses against the target blank, applying pressure to the target blank. At this time, the back plate is fixed against the annular pad, and the target blank generates an interaction force with the back plate under the action of the press. As the pressure of the press increases until the back plate and the target blank break, the welding strength is calculated based on the pressure of the press and the area of ​​the weld. During the test, the tensile force of the target diffusion welding strength test sample is changed to the opposing force, eliminating the need to use a tensile testing machine to clamp and fix the target diffusion welding strength test sample, thereby meeting the tensile testing standards for metallic materials and improving the test accuracy. No clamping and disassembly are required during the test, simplifying the test process. When processing the target diffusion welding strength test sample, only drilling and welding are required, reducing the processing difficulty. Attached Figure Description

[0012] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0013] Figure 1 This is a schematic diagram of the structure of the present invention;

[0014] Figure 2 This is a cross-sectional view of the target blank with a pressure-bearing groove according to the present invention;

[0015] Figure 3 This is the invention Figure 2 Enlarged view of part A;

[0016] Figure 4 This is a schematic diagram of the target material diffusion welding strength test sample during testing according to the present invention;

[0017] Figure 5 This is a cross-sectional view of the target blank with circular protrusions according to the present invention.

[0018] In the picture:

[0019] 1. Back panel, 11. Perforations;

[0020] 2 target blanks, 21 pressure-bearing grooves, 22 circular protrusions;

[0021] 3. Welds;

[0022] 4. Circular pads;

[0023] 5 pressure heads. Detailed Implementation

[0024] The following are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention.

[0025] A target material diffusion welding strength test sample, such as Figures 1 to 5 As shown, it includes a back plate 1 and a target blank 2. The lower part of the back plate 1 is welded to the upper part of the target blank 2 to form a weld 3. The center of the back plate 1 is provided with an upper through hole 11 for the press head 5 of the press to pass through. The upper through hole 11 vertically penetrates the back plate 1. The outer diameter of the back plate 1 is larger than the outer diameter of the target blank 2. An annular pad 4 is sleeved on the outside of the target blank 2. The upper part of the annular pad 4 abuts against the lower part of the back plate 1.

[0026] Traditional target diffusion welding strength test specimens need to be machined into an "I" shape, and then the two ends are clamped and fixed on a tensile testing machine. The tensile testing machine applies outward tensile force to both ends of the target diffusion welding strength test specimen. However, for semiconductor targets, the thickness is relatively thin, making it difficult to machine into an "I" shape. Even if it is machined into an "I" shape, it is difficult to meet the clamping length specified in the tensile testing standards for metallic materials, leading to errors in the test results or even making the test impossible. This invention, however, by opening an upper through hole 11 on the back plate 1, and welding the target blank 2 to the lower part of the back plate 1, allows for easier welding strength testing. Figure 4As shown, the target diffusion welding strength test sample is fixed on the annular pad 4. The pressure head 5 of the press passes through the upper through hole 11 and presses against the target blank 2, applying pressure to the target blank 2. At this time, the back plate 1 is fixed against the annular pad 4, and the target blank 2 generates an interaction force with the back plate 1 under the action of the press. As the pressure of the press increases, the back plate 1 is separated from the target blank 2. The welding strength is calculated based on the pressure of the press and the area of ​​the weld 3. During the test, the tensile force of the target diffusion welding strength test sample is changed to the opposing force, eliminating the need to use a tensile testing machine to clamp and fix the target diffusion welding strength test sample, thus meeting the tensile test standards for metallic materials and improving the test accuracy. No clamping and disassembly are required during the test, simplifying the test process. When processing the target diffusion welding strength test sample, only drilling and welding are required, reducing the processing difficulty.

[0027] Specifically, both the backplate 1 and the target blank 2 are circular in shape, the weld 3 is an annular weld 3, the inner diameter of the upper through hole 11 is set to D1, and the outer diameter of the target blank 2 is set to D2, where D2 is greater than D1. The semiconductor target material is originally circular in shape and does not require secondary processing. When processing the target material diffusion welding strength test sample, only the backplate 1 needs to be drilled. When it is necessary to process the dimensions of the backplate 1 and the target blank 2, the processing can be completed using a lathe, which is convenient.

[0028] Specifically, when the back plate 1 and the target blank 2 are disconnected, the press applies pressure F to the target blank 2, and the weld strength between the back plate 1 and the target blank 2 is... The press is equipped with a pressure sensor. When the back plate 1 and the target blank 2 are disconnected, the maximum pressure value on the pressure sensor, i.e., pressure F, is read. The welding strength is calculated by using pressure F and the calculated area of ​​the annular weld 3. The calculation method is simple and accurate and is not affected by the clamping force of the stretching machine.

[0029] Specifically, the target blank 2 has an upward-facing pressure-bearing groove 21 at its center. The pressure-bearing groove 21 is vertically aligned with the upper through hole 11. The inner diameter of the pressure-bearing groove 21 is the same as the inner diameter D1 of the upper through hole 11. The distance between the bottom of the pressure-bearing groove 21 and the back plate 1 is H1, which is 0.5~5mm. The pressure groove 21 limits the pressure head 5 of the press, preventing lateral displacement of the target material diffusion welding strength test sample, thus further improving the test accuracy. H1 is selected according to the thickness of the target blank 2 and the back plate 1. Preferably, H1 is 1~3mm.

[0030] Specifically, a circular protrusion 22 is provided at the center of the target blank 2, and the circular protrusion 22 is inserted into the upper through hole 11. The distance between the upper end face of the circular protrusion 22 and the back plate 1 is H2, which is 0.5~5mm. By contacting the pressure head 5 with the circular protrusion 22, the thickness of the force-bearing point of the target blank 2 is increased, thereby improving the pressure-bearing capacity of the target blank 2. H2 is selected according to the thickness of the target blank 2 and the back plate 1. Preferably, H2 is 1~3mm.

[0031] Specifically, the inner diameter D1 of the upper perforation 11 is 10~50mm, and the outer diameter D2 of the target blank 2 is 20~60mm. Preferably, the inner diameter D1 of the upper perforation 11 is 20~40mm, and the outer diameter D2 of the target blank 2 is 30~50mm.

[0032] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A target diffusion bond strength test coupon, characterized by: The application relates to a target plate, which comprises a back plate (1) and a target blank (2), the lower part of the back plate (1) is welded with the upper part of the target blank (2) to form a weld joint (3), the central part of the back plate (1) is provided with an upper through hole (11) for penetrating a pressure head (5) of a press, the upper through hole (11) vertically penetrates the back plate (1), the outer diameter of the back plate (1) is larger than the outer diameter of the target blank (2), and the outer part of the target blank (2) is sleeved with an annular cushion block (4), and the upper part of the annular cushion block (4) is abuttingly matched with the lower part of the back plate (1).

2. The target diffusion bond strength test coupon of claim 1, wherein: The back plate (1) and the target blank (2) are circular in shape, the weld joint (3) is an annular weld joint (3), the inner diameter of the upper through hole (11) is D1, the outer diameter of the target blank (2) is D2, and D2 is larger than D1.

3. A target diffusion bond strength test coupon according to claim 2, wherein: The press has a pressure F on the target blank (2) when the back plate (1) and the target blank (2) are disconnected, the welding strength between the back plate (1) and the target blank (2) is .

4. The target diffusion bond strength test coupon of claim 2, wherein: The central part of the target blank (2) is provided with a pressure-bearing groove (21) which is open upwards, the pressure-bearing groove (21) is vertically aligned with the upper through hole (11), the inner diameter of the pressure-bearing groove (21) is the same as the inner diameter D1 of the upper through hole (11), the distance between the groove bottom of the pressure-bearing groove (21) and the back plate (1) is H1, and H1 is 0.5-5 mm.

5. The target diffusion bond strength test coupon of claim 2, wherein: The central part of the target blank (2) is provided with a circular protruding block (22) which is upwardly protruding, the circular protruding block (22) is inserted into the upper through hole (11), the distance between the upper end face of the circular protruding block (22) and the back plate (1) is H2, and H2 is 0.5-5 mm.

6. A test specimen for testing the strength of a diffusion bond of a target material according to claim 4 or 5, characterized in that: The inner diameter D1 of the upper through hole (11) is 10-50 mm, and the outer diameter D2 of the target blank (2) is 20-60 mm.

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