Gas supply device

Abstract

The gas supply device (10) supplies gas to a biological sample, and is provided with: a pressure regulating valve (82); the pressure regulating valve is provided with an inlet port (122) through which gas flows in, an outlet port (124) through which the gas flows out, a discharge port (126) through which the gas is discharged to the outside, and a main valve (132) which regulates the pressure of the gas flowing through a flow path (150) according to pilot pressure. And an exhaust valve (134) that discharges the gas in the flow path from the exhaust port in accordance with the pilot pressure. A pilot pressure adjustment solenoid valve (84) that adjusts the pilot pressure; and a throttle flow path (50) that restricts the flow rate of the gas to a predetermined flow rate.

Description

Technical Field

[0001] This invention relates to a gas supply device. Background Technology

[0002] International Publication No. 2018 / 070464 discloses a pressure-type flow control device for supplying gas used in semiconductor manufacturing. This pressure-type flow control device has a common inlet for gas to flow in from a gas supply source and a common outlet for gas to flow out to the process chamber of a semiconductor manufacturing apparatus. A first flow path and a second flow path are provided between the common inlet and the common outlet. Each of the first and second flow paths is equipped with a control valve and a throttling section. The first flow path is used to supply a large flow rate of gas, and the second flow path is used to supply a small flow rate of gas. By controlling the control valves, the gas flows only in one of the flow paths.

[0003] According to the pressure flow control device disclosed in International Publication No. 2018 / 070464, when the flow rate through the throttling section is very small, residual gas can easily remain upstream of the throttling section. This residual gas may affect the use of the device at the gas supply destination. For example, consider the case where the pressure flow control device disclosed in International Publication No. 2018 / 070464 is used to supply a gas such as air to a biological sample in a bioreactor at a very small flow rate. In this case, even after the control valve is closed, the residual gas will continue to be output at a very small flow rate for a long time. Therefore, it is desirable to be able to quickly output the residual gas. Summary of the Invention

[0004] The purpose of this invention is to solve the above-mentioned technical problems.

[0005] One aspect of the present invention is a gas supply device for supplying gas to a biological sample, comprising:

[0006] A pressure regulating valve has an inlet port, an outlet port, a discharge port, a main valve, and a vent valve. The inlet port allows gas from a gas supply source to flow in, the outlet port allows the gas to flow out, and the discharge port allows the gas to be discharged to the outside of the gas supply device. The main valve regulates the pressure of the gas flowing in a flow path connecting the inlet port to the outlet port according to a pilot pressure. The vent valve discharges the gas in the flow path from the discharge port according to the pilot pressure. A pilot pressure regulating solenoid valve regulates the pilot pressure. A throttling flow path limits the flow rate of the gas flowing out of the outlet port to a predetermined flow rate and outputs the predetermined flow rate of gas for gas supply.

[0007] According to the present invention, it is possible to rapidly output the gas remaining in a gas supply device having a throttling flow path that limits the gas flow rate to a small flow rate. Attached Figure Description

[0008] The above-mentioned objectives, features, and advantages will be readily understood through the description of the following embodiments with reference to the accompanying drawings.

[0009] Figure 1 This is a diagram illustrating a gas supply device and the control circuit that controls it.

[0010] Figure 2 This is a schematic diagram showing the pressure regulating section.

[0011] Figure 3 This is a diagram showing the throttling layer stack.

[0012] Figure 4 This is an enlarged view of the throttling laminate.

[0013] Figure 5 This is a diagram showing the structure of the throttling laminate.

[0014] Figure 6A It is a diagram used to illustrate a rectangular cross-section of a throttling flow path. Figure 6B It is a diagram showing a rectangular cross-section of the throttling flow path. Figure 6C It is a diagram used to illustrate the width of the throttling flow path. Detailed Implementation

[0015] Figure 1 This diagram illustrates a gas supply device 10 and a control circuit 20 that controls it. The gas supply device 10 supplies gas to a biological sample contained in a bioreactor (not shown). The gas supplied to the biological sample is a gas that is not problematic even if it is discharged to the outside of the gas supply device 10, such as air containing oxygen, nitrogen, and carbon dioxide.

[0016] The gas supply device 10 restricts the flow rate of gas flowing into it from a gas supply source (not shown) to a minute flow rate for supplying gas to the biological sample. This minute flow rate includes, for example, a flow rate from 0.01 [mL / min] to 1000 [mL / min]. The gas supply device 10 outputs the gas with the restricted flow rate to the bioreactor for supplying gas to the biological sample.

[0017] The control circuit 20 has a processor such as a CPU (Central Processing Unit) and memories such as RAM (Random Access Memory) and ROM (Read Only Memory). The control circuit 20 controls the gas supply device 10 by executing a program stored in the memory, based on instruction signals from a host device (not shown). The host device is, for example, a PLC (Programmable Logic Controller).

[0018] The gas supply device 10 includes a pressure regulating unit 30, a filter 40, a throttling flow path 50, and a switching solenoid valve 60. The pressure regulating unit 30 includes a pressure regulating valve 82 and a pilot pressure regulating solenoid valve 84 for regulating the pilot pressure of the pressure regulating valve 82. As the pilot pressure regulated by the pilot pressure regulating solenoid valve 84 increases, the main valve of the pressure regulating valve 82 opens, and the pressure regulating valve 82 regulates the pressure of the gas from the gas supply source according to the pilot pressure. The pressure-regulated gas flows through the flow path within the pressure regulating valve 82 and flows out of the pressure regulating valve 82, flowing towards the filter 40 and the throttling flow path 50.

[0019] As the pilot pressure decreases, the main valve of the pressure regulating valve 82 closes. In this case, the flow of gas from the gas supply source into the pressure regulating valve 82 is cut off. As the pilot pressure decreases further, the vent valve of the pressure regulating valve 82 opens, and the gas in the flow path within the pressure regulating valve 82 is discharged from the pressure regulating valve 82 to the outside of the gas supply device 10.

[0020] Furthermore, as described later, any residual gas between the pressure regulating valve 82 and the switching solenoid valve 60 is also discharged from the pressure regulating valve 82 to the outside of the gas supply device 10 through the opening of the vent valve of the pressure regulating valve 82. The structure of the pressure regulating valve 82 and the discharge of residual gas between the pressure regulating valve 82 and the switching solenoid valve 60 will be explained using... Figure 2 To be described later.

[0021] As previously described, the pilot pressure regulating solenoid valve 84 regulates the pilot pressure of the pressure regulating valve 82. The pilot pressure regulating solenoid valve 84 includes a gas supply solenoid valve 84s and a gas exhaust solenoid valve 84e. The control circuit 20 controls the gas supply solenoid valve 84s, causing it to supply gas to the pilot chamber of the pressure regulating valve 82. This causes the pilot pressure to rise. Figure 1 In the example shown, the gas supply solenoid valve 84s supplies a portion of the gas flowing from the gas supply source into the pressure regulating valve 82 to the pilot chamber. Alternatively, the gas supply solenoid valve 84s can also supply gas from other gas supply sources to the pilot chamber.

[0022] Control circuit 20 controls exhaust solenoid valve 84e, causing it to discharge gas from the pilot chamber of pressure regulating valve 82. This reduces the pilot pressure. Figure 1 In the example shown, the gas supply solenoid valve 84s discharges the gas in the pilot chamber to the outside of the gas supply device 10. Alternatively, the gas in the pilot chamber can also be discharged to the outside of the gas supply device 10 together with the gas discharged through the exhaust valve of the pressure regulating valve 82.

[0023] The gas flowing from the pressure regulating valve 82 flows through the connecting flow path 90 from the pressure regulating valve 82 to the throttling flow path 50, and towards the filter 40 and the throttling flow path 50. The filter 40 is disposed in the connecting flow path 90 to remove dust from the gas flowing through the connecting flow path 90. This prevents blockage of the narrow throttling flow path 50.

[0024] The gas supply device 10 has one or more throttling paths 50 downstream of the pressure regulating valve 82 and the filter 40. Figure 1 In the example shown, five throttling channels 50a, 50b, 50c, 50d, and 50e are provided. Each throttling channel 50 limits the flow rate of gas exiting the pressure regulating valve 82 to a specified flow rate within a specified range corresponding to each throttling channel 50. In this embodiment, the specified range corresponding to each throttling channel 50 is included within a throttling range equivalent to a very small flow rate, from 0.01 [mL / min] to 1000 [mL / min].

[0025] The specified ranges corresponding to the five throttling flow paths 50a, 50b, 50c, 50d, and 50e are different from each other. For example, throttling flow path 50a limits the gas flow rate to a specified flow rate within the range of 0.01 [mL / min] to 0.1 [mL / min] in the aforementioned throttling range. Throttling flow path 50b limits the gas flow rate to a specified flow rate within the range of 0.1 [mL / min] to 1 [mL / min] in the aforementioned throttling range. Throttling flow path 50c limits the gas flow rate to a specified flow rate within the range of 1 [mL / min] to 10 [mL / min] in the aforementioned throttling range.

[0026] Throttling flow path 50d limits the gas flow rate to a specified flow rate within the aforementioned throttling range, from 10 [mL / min] to 100 [mL / min]. Throttling flow path 50e limits the gas flow rate to a specified flow rate within the aforementioned throttling range, from 100 [mL / min] to 1000 [mL / min]. Each throttling flow path 50 can output gas at a specified flow rate within the corresponding specified range for supplying gas to biological samples.

[0027] The specific flow rate can be set to any value based on the gas pressure adjusted according to the pilot pressure of the aforementioned pressure regulating valve 82. That is, to achieve the gas supply at the specified flow rate, a throttling flow path 50 corresponding to a specified range containing the specified flow rate is first determined. Then, by appropriately setting the pilot pressure of the pressure regulating valve 82, gas is output from the determined throttling flow path 50 at the specified flow rate. By increasing the pilot pressure, the specified flow rate can be increased.

[0028] Downstream of filter 40, connecting flow path 90 includes five connecting flow paths 90a, 90b, 90c, 90d, and 90e that branch toward five throttling flow paths 50. The five connecting flow paths 90a, 90b, 90c, 90d, and 90e are respectively connected to the five throttling flow paths 50a, 50b, 50c, 50d, and 50e.

[0029] A switching solenoid valve 60 is connected to a throttling flow path 50 and outputs gas from the throttling flow path 50. The gas supply device 10 has one switching solenoid valve 60, or multiple switching solenoid valves 60 depending on the number of throttling flow paths 50 to which the switching solenoid valve 60 is connected. When the gas supply device 10 has multiple throttling flow paths 50, the switching solenoid valve 60 outputs gas from any one of the throttling flow paths 50. Furthermore, when only one throttling flow path 50 is provided, only one switching solenoid valve 60 may be provided, or none may be provided. Figure 1 In the example shown, five switching solenoid valves 60a, 60b, 60c, 60d, and 60e are set.

[0030] Each switching solenoid valve 60 is located downstream of the connected throttling flow path 50, and switches whether gas is output from the throttling flow path 50. The control circuit 20 can control each switching solenoid valve 60 to switch each switching solenoid valve 60 from the open state to the closed state, or from the closed state to the open state.

[0031] The switching solenoid valve 60 opens to output gas from the throttling flow path 50. This gas flows through the flow path 100 from the throttling flow path 50 to the switching solenoid valve 60, and through the flow path within the switching solenoid valve 60, flowing towards the bioreactor and exiting from the gas supply device 10. The switching solenoid valve 60 closes to cut off the gas output from the throttling flow path 50.

[0032] The switching solenoid valve 60 is connected to the throttling flow path 50 via the interval flow path 100. For example... Figure 1 As shown, five interval flow paths 100a, 100b, 100c, 100d, and 100e are shown as interval flow path 100.

[0033] Specifically, switching solenoid valve 60a is connected to throttling flow path 50a via interval flow path 100a. Switching solenoid valve 60b is connected to throttling flow path 50b via interval flow path 100b. Switching solenoid valve 60c is connected to throttling flow path 50c via interval flow path 100c. Switching solenoid valve 60d is connected to throttling flow path 50d via interval flow path 100d. Switching solenoid valve 60e is connected to throttling flow path 50e via interval flow path 100e.

[0034] Furthermore, the output flow path 110 includes five output flow paths 110a, 110b, 110c, 110d, and 110e, respectively connected downstream of the five switching solenoid valves 60. The five output flow paths 110a, 110b, 110c, 110d, and 110e merge into one. The gas flowing through the merged output flow path 110 is output from the gas supply device 10.

[0035] With one switching solenoid valve 60 in the open state and all other switching solenoid valves 60 in the closed state, gas can be output from the throttling flow path 50 connected to the switching solenoid valve 60 in the open state. The gas output from the throttling flow path 50 flows through the switching solenoid valve 60 in the open state and the output flow path 110, and is output from the gas supply device 10. The gas output from the gas supply device 10 is supplied to the bioreactor.

[0036] For example, when switching solenoid valve 60a is in the open state and the other switching solenoid valves 60b, 60c, 60d, and 60e are all in the closed state, gas can be output from the throttling flow path 50a. In this case, the gas from the throttling flow path 50a is output after flowing through switching solenoid valve 60a and output flow path 110a. When the output of gas from the throttling flow path 50a is stopped and the output of gas from the throttling flow path 50b is started, the following process is performed.

[0037] First, control circuit 20 controls switching solenoid valve 60a, switching it from the open state to the closed state. This stops the output of gas from throttling flow path 50a. Next, control circuit 20 controls switching solenoid valve 60b, switching it from the closed state to the open state. This resumes the output of gas from throttling flow path 50b. Since each throttling flow path 50 for output gas is equipped with a switching solenoid valve 60, the output of gas limited to a specified flow rate can be easily controlled.

[0038] Thus, the switching solenoid valve 60 can output gas at a specified flow rate from either of the throttling paths 50. That is, the switching solenoid valve 60 can switch the specified flow rate within a throttling range from 0.01 [mL] to 1000 [mL] and output the switched specified flow rate of gas. Therefore, the gas flow rate can be easily switched to a specified flow rate suitable for supplying gas to biological samples.

[0039] Figure 2 This diagram schematically shows the pressure regulating unit 30. The pressure regulating valve 82 of the pressure regulating unit 30 has an inlet port 122, an outlet port 124, a discharge port 126, a main valve 132, a vent valve 134, and a diaphragm 142. Gas from the gas supply source flows into the inlet port 122.

[0040] With the main valve 132 of the pressure regulating valve 82 in the open state, a flow path 150 is formed connecting the inlet port 122 to the outlet port 124. Gas flowing into the inlet port 122 flows through the flow path 150 within the pressure regulating valve 82 and exits from the outlet port 124. The flow path 150 includes an inflow path 150a from the inlet port 122 to the main valve 132 and an outflow path 150b from the main valve 132 to the outlet port 124. Gas exiting from the outlet port 124 is directed towards the filter 40 and the throttling flow path 50 at a pressure adjusted according to the opening degree of the main valve 132.

[0041] The main valve 132 regulates the pressure of the gas flowing in the flow path 150 based on the pilot pressure regulated by the pilot pressure regulating solenoid valve 84. Figure 2 In the middle, both the main valve 132 and the exhaust valve 134 are closed.

[0042] When the valve core 132d of the main valve 132 is pushed against the valve seat 132s by the rebound force of the elastic body 132e, the main valve 132 is closed. As described later, when the main valve 132 is pushed by the diaphragm 142, causing the valve core 132d to separate from the valve seat 132s, the main valve 132 is opened. When the main valve 132 is open, the gas flowing in from the inlet port 122 flows out from the outlet port 124.

[0043] When the vent valve 134 is pressed against the main valve 132 by the diaphragm 142, the vent valve 134 is closed. As described later, when the vent valve 134 is pulled away from the main valve 132 by the diaphragm 142, the vent valve 134 opens. When the vent valve 134 is open, the gas in the pressure regulating valve 82 flows through the vent passage 134p formed in the main valve 132 and is discharged from the discharge port 126.

[0044] A solenoid valve 84s supplies gas to the pilot chamber 160 within the pressure regulating valve 82. A diaphragm 142 is disposed in the pilot chamber 160. When the gas volume in the pilot chamber 160 increases, the pilot pressure rises. Based on the pilot pressure, the diaphragm 142 pushes the main valve 132, thereby opening the main valve 132. The pressure of the gas flowing through the flow path 150 is regulated by the opening degree of the main valve 132, which corresponds to the pilot pressure.

[0045] The exhaust solenoid valve 84e discharges gas from the pilot chamber 160 of the pressure regulating valve 82 to the outside of the gas supply device 10. When the gas in the pilot chamber 160 decreases, the pilot pressure decreases, and the diaphragm 142 resets. Due to the decrease in pilot pressure, the diaphragm 142 is pulled back, and the main valve 132 of the pressure regulating valve 82 closes, thereby cutting off the flow of gas from the gas supply source to the inlet port 122. When the inlet port 122 is open, the gas from the gas supply source stops at the inflow path 150a. When the inlet port 122 is closed, the gas from the gas supply source stops outside the inlet port 122.

[0046] When the pilot pressure decreases further, the diaphragm 142 pulls the exhaust valve 134 of the pressure regulating valve 82 according to the pilot pressure. As a result, the exhaust valve 134 opens. The exhaust valve 134 discharges the gas in the flow path 150, etc., from the exhaust port 126 to the outside of the gas supply device 10 according to the pilot pressure.

[0047] With exhaust valve 134 open, the gas in flow path 150, the gas in connecting flow path 90, the gas in throttling flow path 50, and the gas in interval flow path 100 are all discharged from exhaust port 126. With inlet port 122 open, the gas in flow path 150 flowing through outlet path 150b is discharged. Gas discharge is complete when the pressure in each flow path is reduced to atmospheric pressure. Furthermore, even if the gas supplied to the biological sample is released into the atmosphere, it generally will not cause problems.

[0048] Because the pressure regulating valve 82 has an exhaust valve 134, the remaining gas in the flow path 150 and the connecting flow path 90 will not be output from the throttling flow path 50, which is limited to a small flow rate, but will be directly discharged. Therefore, gas can be discharged in a short time. That is, the gas remaining in the gas supply device 10 can be discharged quickly.

[0049] Figure 3 This is a diagram showing the throttling layer stack 180. Figure 3 In the example shown, five throttling laminates 180 and five switching solenoid valves 60 are secured to the protrusion 200c of the flow path block 200 by a fixing member 190. The fixing member 190 is, for example, a screw. Figure 3 In the example shown, two screws are used as fixing components 190. Each switching solenoid valve 60 has a through hole 60T for the fixing component 190 to be inserted and screwed in. Each throttling layer plate 180 has a through hole 180T for the fixing component 190 to be inserted in. A groove 200T for the fixing component 190 to be screwed in is formed in the protrusion 200c of the flow path block 200.

[0050] Each throttling flow path 50 is formed inside each throttling layer plate 180. (See below for reference.) Figure 5 The throttling laminate 180 is formed by stacking multiple thin metal plates. A connecting flow path 90 is formed within the flow path block 200. A filter 40 disposed within the connecting flow path 90 is located within the flow path block 200. Five connecting flow paths 90a, 90b, 90c, 90d, and 90e, branching from the connecting flow path 90, are formed within the protrusion 200c of the flow path block 200. The throttling laminate 180 is clamped between the switching solenoid valve 60 and the flow path block 200.

[0051] The switching solenoid valve 60 has a main body 60m and a solenoid part 60s. Furthermore, the main body 60m of the switching solenoid valve 60 houses a valve in the gas flow path disposed within the switching solenoid valve 60. The solenoid part 60s of the switching solenoid valve 60 controls the opening and closing of the valve within the main body 60m. The throttling layer stack 180 is clamped by the solenoid part 60s of the switching solenoid valve 60 and the protrusion 200c of the flow path block 200.

[0052] The connecting flow path 90 branches into five within the flow path block 200. One of the five connecting flow paths branching from the connecting flow path 90, connecting flow path 90a, includes an outlet 90ac formed in the protrusion 200c of the flow path block 200. Gas flowing from the outlet port 124 of the pressure regulating valve 82 and passing through the filter 40, which flows through connecting flow path 90a, reaches outlet 90ac.

[0053] Figure 4This is an enlarged view of the throttling laminate 180a. The throttling laminate 180a has a recess 90ao formed on one side of the throttling laminate 180a facing the flow path block 200. Gas reaching the outlet 90ac flows into the recess 90ao. The recess 90ao is formed at a position coinciding with the outlet 90ac. That is, the recess 90ao corresponds to the downstream end of the connecting flow path 90a with the branch point as the upstream end. The upstream end of the throttling flow path 50a is formed on a portion of the peripheral wall of the recess 90ao.

[0054] The throttling laminate 180a has a recess 100ai formed on the side of the throttling laminate 180a facing the switching solenoid valve 60. Gas flowing through the throttling flow path 50a flows into the recess 100ai. A downstream end of the throttling flow path 50a is formed on a portion of the peripheral wall of the recess 100ai. The recess 100ai corresponds to the upstream end of the interval flow path 100a. Gas reaching the recess 100ai flows through the interval flow path 100a until it reaches the downstream end of the interval flow path 100a formed in the main body 60m of the switching solenoid valve 60a.

[0055] When the switching solenoid valve 60a is in the open state, the gas flowing into the main body 60m of the switching solenoid valve 60a from the downstream end of the interval flow path 100a flows into the output flow path 110a. The output flow path 110a includes a through hole 110ai of the throttling layer plate 180a and an inlet 110ac formed in the protrusion 200c of the flow path block 200. The gas flowing through the through hole 110ai and flowing into the flow path block 200 from the inlet 110ac flows through the output flow path 110 containing the output flow path 110a and is output from the gas supply device 10.

[0056] Figure 5 This is a diagram showing the structure of the throttling laminate 180. The throttling laminate 180 is formed by stacking multiple metal sheets 212. The stacked multiple metal sheets 212 are integrated by thermal diffusion bonding to form the throttling laminate 180. Figure 5 A throttling laminate 180 is shown, consisting of seven thin metal plates 212a, 212b, 212c, 212d, 212e, 212f, and 212g stacked in this order. A flow path block 200 is opposite to thin metal plate 212a. A switching solenoid valve 60 is opposite to thin metal plate 212g.

[0057] The aforementioned recess 90ao is formed by the circular through hole 90aoa of the metal sheet 212a, the circular through hole 90aob of the metal sheet 212b, the circular through hole 90aoc of the metal sheet 212c, the circular through hole 90aod of the metal sheet 212d, the circular through hole 90aoe of the metal sheet 212e, the circular through hole 90aof of the metal sheet 212f, and the metal sheet 212g.

[0058] That is, a metal sheet 212g without through holes at the positions where the through holes 90aoa, 90aob, 90aoc, 90aod, 90aoe, and 90aof overlap with each other is stacked on metal sheets 212a, 212b, 212c, 212d, 212e, and 212f. This forms the recess 90ao.

[0059] The metal sheet 212b also has through holes 50ab in both straight and curved shapes. Metal sheets 212a and 212c, which do not have through holes at the locations of the through holes 50ab, are stacked with metal sheet 212b in between. This forms part of a throttling flow path 50a. In the metal sheet 212b, the straight and curved through holes 50ab are connected to circular through holes 90aob. This forms the upstream end of the aforementioned throttling flow path 50a.

[0060] Metal sheet 212c also has through holes 50ac in both straight and curved shapes. Metal sheets 212b and 212d, which do not have through holes at the locations of the through holes 50ac, are stacked with metal sheet 212c in between. This forms part of the throttling flow path 50a. Metal sheet 212e also has through holes 50ae in both straight and curved shapes. Metal sheets 212d and 212f, which do not have through holes at the locations of the through holes 50ae, are stacked with metal sheet 212e in between. This forms part of the throttling flow path 50a.

[0061] The metal sheet 212f also has through holes 50af in both straight and curved shapes. Metal sheets 212e and 212g, which do not have through holes at the locations of the through holes 50af, are stacked on top of each other, separated by the metal sheet 212f. This forms part of the throttling flow path 50a.

[0062] A throttling flow path 50a with a rectangular cross-section is formed by stacking metal sheets 212a, 212b, 212c, 212d, 212e, 212f, and 212g, with a flow path width D and flow path length L corresponding to the aforementioned specified flow rate. The specified flow rate can be easily achieved by appropriately designing the flow path width D and flow path length L. The calculation of the flow path width D on the rectangular cross-section perpendicular to the flow direction of the gas flowing within the throttling flow path 50a will be performed using... Figure 6A , Figure 6B , Figure 6C This will be described later. Furthermore, the flow rate is specified to vary with the pilot pressure of the pressure regulating valve 82. Other throttling flow paths 50b, 50c, 50d, and 50e are also formed in the same manner as throttling flow path 50a.

[0063] The aforementioned recess 100ai is formed by circular through holes 100aif and 100aig of metal sheets 212e and 212f. Specifically, metal sheet 212e, which does not have through holes at the positions where through holes 100aif and 100aig overlap, is stacked on top of metal sheets 212f and 212g. This forms the recess 100ai.

[0064] The aforementioned through hole 110ai is formed by the circular through hole 110aia of the metal sheet 212a, the circular through hole 110aib of the metal sheet 212b, the circular through hole 110aic of the metal sheet 212c, the circular through hole 110aid of the metal sheet 212d, the circular through hole 110aie of the metal sheet 212e, the circular through hole 110aif of the metal sheet 212f, and the circular through hole 110aig of the metal sheet 212g.

[0065] That is, metal sheets 212a, 212b, 212c, 212d, 212e, 212f, and 212g are stacked so that through holes 110aia, 110aib, 110aic, 110aid, 110aie, 110aif, and 110aig overlap each other. Thus, through hole 110ai is formed.

[0066] The aforementioned through hole 180T is formed by the circular through hole 180Ta of the metal sheet 212a, the circular through hole 180Tb of the metal sheet 212b, the circular through hole 180Tc of the metal sheet 212c, the circular through hole 180Td of the metal sheet 212d, the circular through hole 180Te of the metal sheet 212e, the circular through hole 180Tf of the metal sheet 212f, and the circular through hole 180Tg of the metal sheet 212g.

[0067] That is, metal sheets 212a, 212b, 212c, 212d, 212e, 212f, and 212g are stacked so that through holes 180Ta, 180Tb, 180Tc, 180Td, 180Te, 180Tf, and 180Tg overlap each other. Thus, through hole 180 is formed.

[0068] As described above, the fixing component 190 is inserted into the through hole 180T of the throttling layer plate 180, which is sandwiched between the switching solenoid valve 60 and the protrusion 200c of the flow path block 200. The fixing component 190 is screwed into the through hole 60T of the switching solenoid valve 60 and the groove 200T of the protrusion 200c. That is, the switching solenoid valve 60 and the throttling layer plate 180, which has a throttling flow path 50 connected to the switching solenoid valve 60, are fastened to each other by the fixing component 190 and fixed to the flow path block 200.

[0069] exist Figure 3 In the example shown, the solenoid portion 60s of the switching solenoid valve 60, the protrusion 200c of the flow path block 200, and the throttling layer plate 180 sandwiched between them are fixed together. Specifically, the main body 60m of the switching solenoid valve 60, the solenoid portion 60s of the switching solenoid valve 60, the throttling layer plate 180, and the protrusion 200c of the flow path block 200 are fixed to each other in this order. This ensures the rigidity of the relatively thin throttling layer plate 180.

[0070] Because the switching solenoid valve 60 is fastened to the throttling layer plate 180, the length of the flow path 100 from the throttling flow path 50 to the switching solenoid valve 60 can be kept short. As a result, the gas supply device 10 can be miniaturized. In the case of a long flow path 100, even if all the switching solenoid valves 60 are closed to stop the gas supply from the gas supply device 10 to the biological sample, a considerable amount of gas will still remain in the flow path 100.

[0071] When the exhaust valve 134 of the pressure regulating valve 82 is open, the gas in the flow path 150, the gas in the connecting flow path 90, the gas in the throttling flow path 50, and the gas in the interval flow path 100 are all discharged from the discharge port 126. However, because the gas flow rate is limited to a very small flow rate by the throttling flow path 50, it takes a relatively long time for the gas in the interval flow path 100 to be completely discharged. Furthermore, when the switching solenoid valve 60 is in the open state, the gas in the interval flow path 100 can be output from the output flow path 110. However, in this case, an overrush phenomenon may occur, where a large amount of gas is output to the bioreactor at high pressure. This could lead to the death of biological samples, etc.

[0072] In this embodiment, since the length of the interval flow path 100 can be shortened, the time required for the gas in the interval flow path 100 to be completely discharged can be shortened.

[0073] Figure 6A This is a diagram illustrating the rectangular cross-section S of the throttling flow path 50. The rectangular cross-section S is a cross-sectional view that cuts off the throttling flow path 50a perpendicular to the flow direction F of the gas flowing within the throttling flow path 50 with a flow path length L. Figure 6AThe diagram shows the width W, height H, perimeter P, and area A of the rectangular section S.

[0074] Figure 6B This is a diagram representing the rectangular cross-section S of the throttling flow path 50. The perimeter P of the rectangular cross-section S is represented by mathematical formula (1) based on the width W and height H of the rectangular cross-section S. The area A of the rectangular cross-section S is represented by mathematical formula (2) based on the width W and height H of the rectangular cross-section S.

[0075]

[0076] Figure 6C This is a diagram used to illustrate the flow path width D of the throttling flow path 50. Figure 6C The circular cross-section SR of the equivalent flow path 50R, which is equivalent to the throttling flow path 50, is shown. Generally, the diameter of the circular cross-section SR, which has the same perimeter P and area A as the rectangular cross-section S, is called the equivalent diameter of the rectangular cross-section S. In this embodiment, the equivalent diameter of the rectangular cross-section S is used as the flow path width D of the throttling flow path 50. Therefore, the flow path width D of the throttling flow path 50 is represented by mathematical formula (3). Using mathematical formulas (1), (2), and (3), the flow path width D of the throttling flow path 50 is represented by mathematical formula (4).

[0077]

[0078] The specified flow rate limited by each throttling flow path 50 depends on the flow path width D and flow path length L of the throttling flow path 50, as well as the pilot pressure of the pressure regulating valve 82. That is, the flow path width D and flow path length L of each throttling flow path 50 are determined. The narrower the flow path width D, the greater the influence of the inner wall of the throttling flow path 50, and therefore the smaller the specified flow rate. By appropriately designing the flow path width D, a throttling flow path 50 can be formed that can output a small flow rate of gas suitable for supplying gas to biological samples.

[0079] Furthermore, the longer the flow path length L, the greater the influence of the inner wall of the throttling flow path 50, thus requiring a smaller flow rate. By appropriately designing the flow path length L, a throttling flow path 50 can be formed that can output a small flow rate of gas suitable for supplying gas to biological samples. When the flow path width D is the same value in any throttling flow path 50, the flow path length L of each throttling flow path 50 can be designed using the value obtained by multiplying the flow path width D by N.

[0080] In the design of the flow path length L of the throttling flow path 50a to minimize the flow rate, for example, N = 7000 is used. That is, the flow path length L of the throttling flow path 50a is designed to satisfy L = 7000·D. As a result, the flow rate of the gas output from the throttling flow path 50a can be limited to a specified flow rate within a specified range from 0.01 [mL / min] to 0.1 [mL / min].

[0081] In the design of the flow path length L of the throttling flow path 50e, which specifies the maximum flow rate, for example, N = 500. That is, the flow path length L of the throttling flow path 50e is designed to satisfy L = 500·D. As a result, the gas flow rate output from the throttling flow path 50e can be limited to a specified flow rate within a specified range from 100 [mL / min] to 1000 [mL / min].

[0082] As described above, the throttling flow path 50 is used to output a specified flow rate of gas for supplying gas to a biological sample. Therefore, the flow path length L of the throttling flow path 50 is preferably a value of at least 500 times the flow path width D. This allows the throttling flow path 50 to output a specified flow rate of gas suitable for supplying gas to a biological sample.

[0083] In response to the above-mentioned disclosures, the following additional notes are hereby disclosed.

[0084] (Note 1)

[0085] A gas supply device 10 for supplying gas to biological samples is characterized by comprising: a pressure regulating valve 82 having an inlet port 122, an outlet port 124, a discharge port 126, a main valve 132, and an exhaust valve 134. The inlet port receives gas from a gas supply source, the outlet port receives the gas, and the discharge port discharges the gas to the outside of the gas supply device. The main valve regulates the pressure of the gas flowing through a flow path 150 connecting the inlet port to the outlet port according to a pilot pressure. The exhaust valve discharges the gas in the flow path from the discharge port according to the pilot pressure. A pilot pressure regulating solenoid valve 84 regulates the pilot pressure. A throttling flow path 50 limits the flow rate of the gas flowing from the outlet port to a predetermined flow rate and outputs the predetermined flow rate of gas for gas supply. With this structure, residual gas within the gas supply device can be rapidly output.

[0086] (Note 2)

[0087] In the gas supply device described in Appendix 1, the throttling flow path may be formed in the throttling laminate 180 with a flow path width D and flow path length L corresponding to the specified flow rate, and the throttling laminate is formed by stacking thin metal plates 212. With this structure, the specified flow rate can be easily achieved.

[0088] (Note 3)

[0089] In the gas supply device described in Appendix 2, the longer the flow path length, the smaller the specified flow rate. Based on this structure, by appropriately designing the flow path length, a throttling flow path can be formed that can output a small flow rate of gas suitable for supplying gas to biological samples.

[0090] (Note 4)

[0091] In the gas supply device described in Appendix 2, the narrower the flow path width, the smaller the specified flow rate. Based on this structure, by appropriately designing the flow path length, a throttling flow path can be formed that outputs a small flow rate of gas suitable for supplying gas to biological samples.

[0092] (Note 5)

[0093] In the gas supply device described in Appendix 2, the length of the flow path may be at least 500 times the width of the flow path. With this configuration, a specified flow rate of gas suitable for supplying gas to biological samples can be output from the throttling flow path.

[0094] (Note 6)

[0095] In any of the gas supply devices described in Appendices 1 to 5, the device may have multiple throttling paths, each with a different specified flow rate. The gas supply device also includes a switching solenoid valve 60 connected to the multiple throttling paths and outputting gas from any one of them. With this configuration, the gas flow rate can be easily switched to a specified flow rate suitable for supplying gas to biological samples.

[0096] (Note 7)

[0097] In the gas supply device described in Appendix 6, there may be multiple switching solenoid valves, each of which is connected to a plurality of throttling flow paths. With this structure, it is easy to control the output of gas with its flow rate limited to a specified flow rate.

[0098] (Postscript 8)

[0099] In the gas supply device described in Appendix 6, the switching solenoid valve may be capable of switching the specified flow rate within a throttling range from 0.01 [mL] to 1000 [mL] by outputting the gas from any of the throttling paths, and outputting the gas at the switched specified flow rate. With this configuration, the gas flow rate can be easily switched to a specified flow rate suitable for supplying gas to biological samples.

[0100] (Note 9)

[0101] In any of the gas supply devices described in Appendices 2 to 5, a switching solenoid valve may also be included, which is connected to the throttling flow path and outputs the gas from the throttling flow path. The switching solenoid valve and the throttling layer stack are fastened together. With this structure, the time required for the complete discharge of gas from the throttling flow path to the switching solenoid valve can be shortened.

[0102] (Postscript 10)

[0103] In any of the gas supply devices described in Appendices 1 to 5, a filter 40 may also be included, which is disposed in the connecting flow path 90 for gas flow from the outlet port to the throttling flow path, to remove dust from the gas. With this structure, clogging of the narrow throttling flow path can be prevented.

[0104] Furthermore, the present invention is not limited to the above disclosure and various structures can be adopted without departing from the spirit of the present invention.

Claims

1. A gas supply device (10) for supplying gas to a biological sample, characterized in that, have: A pressure regulating valve (82) has an inlet port (122), an outlet port (124), a discharge port (126), a main valve (132), and an exhaust valve (134). The inlet port allows gas from a gas supply source to flow in, the outlet port allows the gas to flow out, and the discharge port allows the gas to be discharged to the outside of the gas supply device. The main valve regulates the pressure of the gas flowing in the flow path (150) connecting the inlet port to the outlet port according to the pilot pressure. The exhaust valve discharges the gas in the flow path from the discharge port according to the pilot pressure. A pilot pressure regulating solenoid valve (84) regulates the pilot pressure. as well as A throttling flow path (50) restricts the flow rate of the gas flowing out of the outlet port to a specified flow rate and uses the specified flow rate of the gas output for gas supply.

2. The gas supply device according to claim 1, characterized in that, The throttling flow path is formed in the throttling laminate (180) with a flow path width (D) and flow path length (L) corresponding to the specified flow rate, and the throttling laminate is formed by stacking metal sheets (212).

3. The gas supply device according to claim 2, characterized in that, The longer the flow path length, the smaller the specified flow rate.

4. The gas supply device according to claim 2, characterized in that, The narrower the flow path width, the smaller the specified flow rate.

5. The gas supply device according to claim 2, characterized in that, The flow path length is at least 500 times the flow path width.

6. The gas supply device according to any one of claims 1 to 5, characterized in that, Having multiple throttling flow paths, Since the specified flow rate of each of the multiple throttling paths is different, The gas supply device also includes a switching solenoid valve (60) connected to a plurality of the throttling paths and outputting the gas from any one of the throttling paths.

7. The gas supply device according to claim 6, characterized in that, It has multiple switching solenoid valves, Each of the multiple switching solenoid valves is connected to one of the multiple throttling flow paths.

8. The gas supply device according to claim 6, characterized in that, The switching solenoid valve can switch the specified flow rate within a throttling range from 0.01 [mL] to 1000 [mL] by outputting the gas from any of the throttling paths, and output the gas at the switched specified flow rate.

9. The gas supply device according to any one of claims 2 to 5, characterized in that, It also includes a switching solenoid valve, which is connected to the throttling flow path and outputs the gas from the throttling flow path. The switching solenoid valve and the throttling plate are fastened together.

10. The gas supply device according to any one of claims 1 to 5, characterized in that, It also includes a filter (40) configured in the connecting flow path (90) for the gas to flow from the outlet port to the throttling flow path, to remove dust from the gas.

Images