Glass processing method and glass substrate

Abstract

The invention discloses a glass processing method which comprises the following steps: S1, glass to be processed is fixedly sealed on a processing platform, and the surface of the processing platform is made of nonmetal; and S2, grinding the to-be-processed glass, and processing the to-be-processed glass to obtain the required glass substrate. The invention also discloses a glass substrate. The invention provides a glass processing method, which not only can effectively avoid the generation of back defects in the plane grinding process of a glass substrate, but also can simplify the operation flow and improve the processing efficiency and precision.

Description

Technical Field

[0001] This invention relates to the field of precision grinding technology, and more particularly to a glass processing method and a glass substrate. Background Technology

[0002] A photomask typically consists of a photomask substrate and a light-shielding film. The most important raw material is the photomask substrate. Due to its stable chemical properties, high optical transmittance, and low coefficient of thermal expansion, quartz glass has become the mainstream raw material for photomask preparation in recent years. The photomask substrate has high requirements for performance in terms of light transmittance and stability. It must have a flat surface and be free of defects inside and on both surfaces.

[0003] Currently, surface grinding is generally used to quickly reduce the flatness of substrates. However, existing surface grinding machines almost always use metal platforms. When processing glass, the glass is placed directly on the worktable. Because the glass is in direct contact with the metal platform, vibration or movement during processing can easily cause chipping or scratches on the back of the glass, resulting in back-side defects and a low product yield. To address this issue, a scratch-resistant film is typically applied to the back of the substrate. Specifically, the substrate is first placed flat on the platform, and the scratch-resistant film is slowly applied to the substrate, removing any air bubbles. After application, grinding begins with the film-side down. While this method effectively prevents back-side defects during processing, it is time-consuming and requires precise operation. Improper operation, such as uneven film application or air bubbles, can affect grinding accuracy, preventing the glass flatness from being reduced to the expected level, thus defeating the purpose of grinding. Summary of the Invention

[0004] In view of the above-mentioned shortcomings of the prior art, the present invention provides a glass processing method that can effectively avoid back defects in glass substrates during planar grinding, and can simplify the operation process and improve processing efficiency and accuracy.

[0005] To achieve the above objectives, the embodiments of the present invention adopt the following technical solutions:

[0006] A glass processing method, the glass processing method comprising the following steps:

[0007] Step S1: Fix and seal the glass to be processed on the processing platform, wherein the surface material of the processing platform is non-metallic;

[0008] Step S2: Grind the glass to be processed to obtain the desired glass substrate.

[0009] According to one aspect of the invention, the processing platform is a nylon sheet.

[0010] According to one aspect of the present invention, a preprocessing step is further included before step S1, the preprocessing comprising the following steps:

[0011] Clean the processing platform and the surface of the glass to be processed until the surface is clean.

[0012] According to one aspect of the present invention, the flatness of the pre-treated processing platform and / or the glass to be processed is ≤20μm, preferably 3μm.

[0013] According to one aspect of the invention, in step S1, the fixing seal includes the following operation: applying an adhesive to the edge of the glass to be processed to isolate the back of the glass to be processed from the outside.

[0014] According to one aspect of the present invention, the adhesive is an adhesive with high curing strength and easy removal, preferably 502 glue.

[0015] According to one aspect of the invention, in step S2, the process includes:

[0016] Cleaning of the glass to be processed and / or the processing platform;

[0017] And / or, remove adhesive.

[0018] According to one aspect of the present invention, in step S2, the grinding process includes a rough grinding stage and a fine grinding stage, wherein the grinding allowance in the fine grinding stage is 0.02 to 0.03 mm, and the single feed rate is 0.0001 to 0.001 mm.

[0019] According to one aspect of the present invention, the working environment of the glass processing method is at a temperature of 21-23°C.

[0020] A glass substrate, wherein the glass substrate is obtained by the glass processing method described above.

[0021] According to one aspect of the invention, the flatness of the glass substrate is ≤20μm.

[0022] The advantages of this invention are as follows: A glass processing method involves applying an adhesive to the edges of the glass to be processed and fixing it to a processing platform. The adhesive wraps around the glass edges, achieving stress-free, stable, and uniform fixation of the glass. This effectively avoids stress concentration problems that may occur with traditional clamping methods and significantly reduces deformation or edge chipping caused by uneven stress. Furthermore, isolating the back of the glass from the outside effectively prevents dust, debris, and other small particles from entering and causing scratches. Therefore, this glass processing method simplifies the operation process, improves production efficiency, and greatly enhances the rigidity of the workpiece system. It also reduces the elastic deformation of the glass during grinding, allowing the glass to maintain a more stable posture during fine grinding, reducing processing errors caused by vibration or elastic deformation, thereby achieving a significant improvement in grinding accuracy. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of a glass processing method according to the present invention.

[0025] Figure 1 In the middle, 1. Grinding machine worktable; 2. Machining platform; 3. Glass to be processed; 4. Adhesive; 5. Iron block. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] like Figure 1 As shown, a glass processing method includes the following steps:

[0028] Step S1: Fix and seal the glass 3 to be processed onto the processing platform 2, wherein the table surface of the processing platform 2 is made of non-metallic material;

[0029] Step S2: Grind the glass to be processed 3 to obtain the required glass substrate.

[0030] In practical applications, the glass to be processed 3 is fixedly sealed on the processing platform 2, achieving stress-free, stable, and uniform fixation of the glass. This effectively avoids stress concentration problems that may occur with traditional clamping methods, significantly reducing deformation or chipping caused by uneven stress. Furthermore, isolating the back of the glass substrate from the outside effectively prevents dust, debris, and other small particles from entering and causing scratches. Therefore, this glass processing method simplifies the operation process, improves production efficiency, and greatly enhances the rigidity of the workpiece system. It also reduces the elastic deformation of the glass during grinding, allowing the glass to maintain a more stable posture during fine grinding, reducing processing errors caused by vibration or elastic deformation, thereby achieving a significant improvement in grinding accuracy.

[0031] In practical applications, to ensure the precision of the grinding process, the flatness of both sides of the processing platform 2 is no greater than 20μm, preferably 3μm, to minimize the impact on the flatness of the glass 3 to be processed. Furthermore, to improve operational convenience and flexibility, the processing platform 2 is larger than the glass 3 to be processed, facilitating positioning and fixation. To prevent deformation, the thickness of the processing platform 2 is no less than 20mm to provide sufficient rigidity and stability. Further, to prevent scratches on the glass 3 to be processed, the hardness of the processing platform 2 is less than that of the glass 3. Specifically, the processing platform 2 can be made of nylon. Using nylon not only provides good wear resistance but also has a much lower hardness than glass, ensuring that the glass will not be scratched by wear during long-term use. It is also easy to clean and does not easily attract dust particles.

[0032] In practical applications, in order to ensure a stable and precise connection between the nylon sheet and the grinding machine worktable 1, the nylon sheet and the grinding machine worktable 1 can be clamped and fixed by iron blocks 5. Other fastening methods can also be selected according to the actual situation, and no restrictions are imposed here.

[0033] In practical applications, a pretreatment process is included before step S1. This pretreatment includes the following steps: cleaning the surfaces of the processing platform 2 and the glass to be processed 3 until the surfaces are completely clean. After pretreatment, the flatness of the processing platform 2 and / or the glass to be processed 3 is ≤20μm.

[0034] In practical applications, step S1, the fixing and sealing includes the following operation: applying adhesive 4 to the edge of the glass 3 to be processed to isolate the back of the glass 3 from the outside. The back of the glass 3 is the contact surface between the glass 3 and the processing platform 2.

[0035] In practical applications, the adhesive 4 penetrates to a depth of more than 1 / 3 of the thickness of the glass 3 to be processed, thereby significantly improving the bonding strength between the glass and the nylon sheet and preventing relative movement due to external forces during processing.

[0036] In practical applications, in step S2, the process includes:

[0037] Cleaning of the glass to be processed 3 and / or the processing platform 2;

[0038] And / or, remove adhesive 4.

[0039] In practical applications, the adhesive 4 is selected as an adhesive with high curing strength and easy removal, preferably 502 glue. Other adhesives 4 can also be selected according to the actual situation, such as UV glue. When using UV glue, it is cured by UV lamp irradiation and removed by soaking in warm water.

[0040] In practical applications, step S2 includes a rough grinding stage and a fine grinding stage. The fine grinding stage has a grinding allowance of 0.02–0.03 mm, ensuring a good grinding effect while reducing the risk of surface scratches. Furthermore, the single feed rate in the fine grinding stage is 0.0001–0.001 mm. Specifically, the fine grinding stage uses a grinding wheel, and parameters such as the axial feed rate, table speed, and grinding time can be adjusted according to the glass, equipment, or grinding wheel specifications.

[0041] In practical applications, the coefficients of thermal expansion of nylon sheets and glass differ significantly. Excessive temperature variations can negatively impact grinding accuracy. Therefore, the working environment temperature for precision grinding is strictly set between 21℃ and 23℃. This effectively limits dimensional changes caused by differences in material thermal expansion, thus significantly reducing the adverse effects of temperature fluctuations on processing accuracy. Such precise temperature control ensures a stable relative dimensional relationship between the nylon sheet and the glass to be processed during the process, thereby improving the accuracy and consistency of the grinding process.

[0042] A glass substrate, wherein the glass substrate is obtained by the glass processing method described above.

[0043] In practical applications, the flatness of the glass substrate is ≤20μm.

[0044] A photomask includes the glass substrate and a light-shielding film.

[0045] Example 1

[0046] ① Place an 800×1000×25mm nylon sheet on the grinding machine worktable 1 and clamp it securely with iron block 5; ② Prepare a piece of roughly ground glass with a flatness of less than 20μm on both sides and dimensions of 700×800×8mm. Clean the surface of the nylon sheet and the surface of the glass to be ground. Place the glass with the previously ground side down on the nylon sheet; ③ Apply a ring of 502 glue around the glass, immersing it to more than 1 / 3 of the glass thickness; ④ After the glue has cured... Using a 1000-mesh resin diamond grinding wheel, fine grinding is initiated with a grinding allowance of 0.02mm, a single feed rate of 0.001mm, an axial feed rate of 400mm / min, a table speed of 28m / min, and a grinding time of 45min. ⑤ After processing, the grinding fluid and debris on the glass and nylon sheet are cleaned. ⑥ The 502 glue is removed with acetone, the glass and nylon sheet are released from their fastening, and the nylon sheet and glass are wiped clean. The processing is now complete.

[0047] Test results:

[0048] Under darkroom conditions, the glass was visually inspected at a distance of 15cm from the light source using a high-intensity 120,000 Lux inspection lamp. The back of the processed glass was free of defects, identical to the unprocessed glass, and the flatness of both sides remained below 20μm after processing.

[0049] Example 2

[0050] ① Place an 800×1000×25mm nylon sheet on the grinding machine worktable 1 and clamp it securely with iron block 5; ② Prepare a piece of roughly ground glass with both sides flattened to below 20μm, measuring 520×800×10mm. Clean the surface of the nylon sheet and the surface of the glass to be ground, placing the previously ground glass face down on the nylon sheet; ③ Apply a ring of hydrolytic UV adhesive around the glass, immersing it to at least 1 / 3 of the glass thickness; ④ After the adhesive cures... Using a 1000-mesh resin diamond grinding wheel, begin fine grinding with a grinding allowance of 0.03mm, a single feed rate of 0.0001mm, an axial feed rate of 400mm / min, a table speed of 28m / min, and a grinding time of 45min; ⑤ After processing, clean the grinding fluid and debris from the glass and nylon sheet; ⑥ Soak in warm water for 20 minutes to remove the hydrolyzed UV adhesive, release the glass and nylon sheet from their fasteners, wipe the nylon sheet and glass clean, and the processing is complete.

[0051] Test results:

[0052] Under darkroom conditions, the glass was visually inspected at a distance of 15cm from the light source using a high-intensity 120,000 Lux inspection lamp. The back of the processed glass was free of defects, identical to the unprocessed glass, and the flatness of both sides remained below 20μm after processing.

[0053] The advantages of this invention are as follows: A glass processing method involves applying an adhesive to the edges of the glass to be processed and fixing it to a processing platform. The adhesive wraps around the glass edges, achieving stress-free, stable, and uniform fixation of the glass. This effectively avoids stress concentration problems that may occur with traditional clamping methods and significantly reduces deformation or edge chipping caused by uneven stress. Furthermore, isolating the back of the glass from the outside effectively prevents dust, debris, and other small particles from entering and causing scratches. Therefore, this glass processing method simplifies the operation process, improves production efficiency, and greatly enhances the rigidity of the workpiece system. It also reduces the elastic deformation of the glass during grinding, allowing the glass to maintain a more stable posture during fine grinding, reducing processing errors caused by vibration or elastic deformation, thereby achieving a significant improvement in grinding accuracy.

[0054] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A glass processing method, the glass processing method comprising the following steps: Step S1: Fix and seal the glass to be processed on the processing platform, wherein the surface material of the processing platform is non-metallic; Step S2: Grind the glass to be processed to obtain the desired glass substrate.

2. The glass processing method according to claim 1, characterized in that, The processing platform is made of nylon sheet.

3. The glass processing method according to claim 2, characterized in that, Pre-processing is included before step S1, and the pre-processing includes the following steps: Clean the processing platform and the surface of the glass to be processed.

4. A glass processing method according to claim 3, characterized in that, After pretreatment, the flatness of the processing platform and / or the glass to be processed is ≤20μm.

5. A glass processing method according to claim 3, characterized in that, In step S1, the fixing and sealing includes the following operation: applying adhesive to the edge of the glass to be processed to isolate the contact surface between the glass to be processed and the processing platform from the outside.

6. A glass processing method according to claim 3, characterized in that, The adhesive is 502 glue.

7. A glass processing method according to claim 3, characterized in that, In step S2, the process includes: Cleaning of the glass to be processed and / or the processing platform; And / or, remove adhesive.

8. A glass processing method according to claim 1, characterized in that, In step S2, the grinding process includes a fine grinding stage, wherein the grinding allowance in the fine grinding stage is 0.02 to 0.03 mm, and the single feed rate is 0.0001 to 0.001 mm.

9. A glass processing method according to claim 1, characterized in that, The working environment temperature for the glass processing method is 21-23℃.

10. A glass substrate, characterized in that, The glass substrate is obtained by the glass processing method described in any one of claims 1-9.

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