Unmanned device and method integrating aspheric surface machining and full-process online detection

Abstract

The invention relates to the technical field of aspheric surface processing and detection, in particular to a device and a method integrating aspheric surface processing and full-flow detection and integrating aspheric surface processing and full-flow online detection. The method integrating aspheric surface processing, full-process detection and aspheric surface processing and full-process online detection comprises the following steps: initializing the whole device; executing a grinding stage and a polishing modification stage; in the grinding stage or the polishing modification stage, a projector is controlled based on a computer to project a fringe image to a processing mirror, or a liquid crystal display is controlled to display the fringe image, so that the processing mirror forms a virtual image based on a mirror reflection principle; switching the stripe image based on computer control, enabling the phase shift of the stripe in the stripe image, and collecting a deformation image through a camera after each phase shift; and finally, processing track data is obtained based on the deformation image and is applied to the mechanical arm processing device, so that the processing of the processing mirror is realized. The surface shape detection does not need a compensator, the whole process is automatic, personnel participation is not needed, the position of the detection device does not need to be changed, and the machining mirror does not need to be frequently disassembled.

Description

Technical Field

[0001] This invention relates to the field of aspherical surface processing and testing technology, specifically to an apparatus and method that integrates aspherical surface processing and online testing throughout the entire process. Background Technology

[0002] High-precision machining of aspherical components relies on high-precision surface shape inspection technology. Currently, mainstream aspherical inspection methods can be divided into two categories: surface contour inspection methods and optical inspection methods. Different inspection methods are typically used at different stages of aspherical component machining, depending on the required surface shape accuracy and surface roughness. 1) In the aspherical grinding stage: the surface deviation and surface roughness of aspherical components are very large. At this time, contour detection methods such as coordinate measuring machines and contour meters are used to detect the surface shape. 2) In the aspherical polishing and shaping stage, the surface deviation and roughness are relatively small. Optical detection methods can be used. The most commonly used detection methods are laser interferometers and reverse surface shape detection.

[0003] Combining the above-mentioned detection methods can cover the entire process of aspherical surface processing, but it still has some drawbacks: First, the contour detection methods are all based on point scanning, so the time required for full-aperture detection is long, and this time increases with the size of the surface being inspected. Second, using an interferometer for detection requires the design of a dedicated compensator for the surface being inspected, which increases the cost of surface shape detection. Moreover, when using an interferometer for detection, it is necessary to ensure that the interferometer, compensator, and the mirror being inspected are placed in specific positions, resulting in complex optical path adjustment and dependence on the experience of the inspectors. Finally, the instruments used in both detection methods are large in size and weight, making it difficult to couple with the aspherical surface processing process. Operators need to frequently remove the mirror being processed from the worktable, resulting in low processing efficiency and making it unsuitable for large-scale mass production of optical components.

[0004] Therefore, those skilled in the art urgently need to provide a simple structure for aspherical processing and inspection, which is convenient for mass production applications and reduces the problem of manual inspection and disassembly of processed mirrors. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defects existing in the prior art, thereby providing an apparatus and method that integrates aspherical surface processing and online detection throughout the entire process.

[0006] The device integrates aspherical surface processing and full-process online inspection, including: a workbench, a robotic arm processing device and a computer, as well as: a detection device mounting frame with vertical telescopic function, and an in-situ detection device installed on the top surface of the detection device mounting frame and slidably connected to the top surface of the detection device mounting frame. The in-situ detection device consists of a projector, an LCD display, a camera, and an in-situ detection bracket. The LCD display is fixed to the bottom surface of the in-situ detection bracket. The projector and camera are both mounted on the horizontal slide groove on the top surface of the in-situ detection bracket. Specifically, the projector is fixed to one end of the horizontal slide groove via a first vertical slide groove, and the camera is slidably connected to the horizontal slide groove via a second vertical slide groove. The computer is connected to both the robotic arm processing device and the in-situ detection device, so that under the control of the computer, the action point of the in-situ detection device and the action point of the robotic arm processing device are both located on the processing mirror on the worktable.

[0007] Preferably, it also includes: a geometric position positioning and detection device composed of multiple standard conical holes; Multiple standard conical holes are opened on the connecting plate of the in-situ detection device, and the positions of the standard conical holes are opposite to the four fixed corners of the LCD display fixed on the bottom surface of the connecting plate.

[0008] A method integrating aspherical surface machining, full-process inspection, and online inspection is proposed, utilizing a device that integrates these three processes. Specifically, the method includes the following steps: S1. Initialization of a device integrating aspherical surface processing and full-process online detection; S2. Perform the grinding and polishing / shaping stages according to actual needs; In the grinding or polishing stage, a striped image is first projected onto the processing mirror using a computer-controlled projector, or a striped image is displayed on a liquid crystal display, so that the processing mirror forms a virtual image based on the principle of mirror reflection. Then, based on computer control, the stripe image is switched to cause a phase shift in the stripes in the stripe image, and after each phase shift, the deformation image is captured by the camera; Finally, the deformed image is input into a surface reconstruction algorithm pre-built according to actual needs to obtain three-dimensional point cloud data describing the surface shape of the processed mirror. Then, based on the three-dimensional point cloud data and the preset trajectory generation method, the processing trajectory data is obtained and applied to the robotic arm processing device to realize the processing of the processed mirror.

[0009] Preferably, the grinding stage specifically includes: A1. Surface shape detection is performed using a projector and camera to obtain three-dimensional point cloud data that describes the surface shape of the processed mirror, which serves as the real-time surface shape detection result during the grinding stage; A2. Calculate the first deviation between the real-time surface shape detection result and the ideal surface shape during the grinding stage, and determine whether the first deviation is less than the preset first threshold T1; A3. If the result of step A2 is negative, the robotic arm processing device will execute the corresponding obtained grinding processing trajectory based on the real-time surface shape detection result of the grinding stage, and repeat steps A1 to A3 until the result of step A2 is positive, and then execute the polishing and shaping stage.

[0010] Preferably, the polishing and shaping stage specifically includes: B1. Surface shape detection is performed using a combination of an LCD display and a camera to obtain three-dimensional point cloud data that describes the surface shape of the processed mirror, which serves as the real-time surface shape detection result during the polishing and shaping stage. B2. Calculate the second deviation between the real-time surface shape detection result and the ideal surface shape during the polishing and shaping stage, and determine whether the second deviation is less than the preset second threshold T2; B3. If the result of step B2 is negative, the robotic arm processing device will execute the corresponding polishing and shaping processing trajectory based on the real-time surface shape detection result of the polishing and shaping stage, and repeat steps B1 to B3 until the result of step B2 is positive, and the processing mirror is completed.

[0011] Preferably, the initialization of the device integrating aspherical surface processing and full-process online inspection in step S1 includes: The in-situ detection device is adjusted and calibrated, the robotic arm processing device is reset, the threshold is set, the stripe image parameters are set, and the processing mirror is fixed.

[0012] Preferably, the in-situ detection device position adjustment and calibration specifically includes the following steps: S101. Fix the in-situ detection device on the detection device mounting bracket and adjust the horizontal and vertical positions so that the in-situ detection device is placed near the center of the best fitting sphere of the processing mirror; S102. Adjust the camera position so that the processing mirror is located in the center of the camera's field of view, and ensure that the image projected by the projector and the image reflected by the liquid crystal display on the processing mirror can be completely captured by the camera, thus completing the position adjustment; S103. Use a three-dimensional spatial point position measuring tool to measure the three-dimensional spatial position of the geometric position positioning device, and calculate the spatial positions of the projector, LCD display and camera to complete the position calibration.

[0013] The technical solution of this invention has the following advantages: The method of the present invention can achieve full automation without any human intervention: the present invention can cover all stages of grinding, polishing and shaping of aspherical mirrors. After the target surface shape of each processing stage is set, the computer program can automatically control the operation of the detection device and the robotic arm, without human intervention throughout the process.

[0014] This invention enables in-situ inspection: The in-situ inspection device for surface shape inspection only needs to be placed directly above the worktable. When inspecting the processed mirror, the robotic arm only needs to be moved to any position that will not obstruct the workpiece, without disassembling or moving the workpiece. This invention enables full-process automation: This invention can cover all stages of grinding, polishing, and shaping of aspherical mirrors. After setting the target surface shape for each processing stage, the computer program can automatically control the operation of the inspection device and robotic arm, requiring no human intervention throughout the process. This invention also enables rapid full-diameter inspection of aspherical mirrors: The core working principle of the inspection device is to reflect a specially designed stripe image onto the surface of the aspherical workpiece. The stripe image is deformed after being modulated by the aspherical workpiece. The full-diameter surface shape information can be obtained by demodulating the deformed stripes using a computer. Furthermore, in actual inspection, only 8 deformed stripe images are needed to complete image demodulation, thus achieving a very high inspection speed. This invention is applicable to various surface shape detection and processing: the detection device of this invention does not require a compensator similar to that in interference; it only requires the camera to capture a reflective surface that completely covers the fringe image to perform surface shape detection. There are no requirements for the aspherical parameters of the reflective surface. On the other hand, the robotic arm processing device in this invention has multiple degrees of freedom and can realize the processing of various aspherical parameters. Attached Figure Description

[0015] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 A schematic diagram illustrating the principle of a method that integrates aspherical surface processing and full-process online inspection. Figure 2 This is a schematic diagram of the in-situ detection device. Figure 3 A schematic diagram of the machining process using a robotic arm processing device; Figure 4 This is a schematic diagram of the method flow in Example 2.

[0017] Explanation of reference numerals in the attached figures: 100-Computer, 101-Detection device mounting bracket, 102-In-situ detection device, 103-Robotic arm processing device, 104-Workbench; 201-Connecting plate, 202-LCD display support, 203-LCD display, 204-LCD display baffle, 205-Camera, 206-Slider, 2071-First vertical slide, 2072-Second vertical slide, 2081-First triangular support, 2082-Second triangular support, 209-Angular displacement stage, 210-Horizontal slide, 211-Projector, 212-Standard conical hole; 301-Robotic arm body, 302-Motor, 303-Tool head, 304-Workbench. Detailed Implementation

[0018] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0020] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0021] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0022] Example 1 like Figure 1The device integrating aspherical surface processing and full-process online testing includes: a workbench 104, a robotic arm processing device 103, a computer 100, a testing device mounting frame 101 with vertical telescopic function, and an in-situ testing device 102 installed on the top surface of the testing device mounting frame 101 and slidably connected to the top surface of the testing device mounting frame 101. The in-situ detection device 102 consists of a projector 211, an LCD display 203, a camera 205, and an in-situ detection bracket. The LCD display 203 is fixed to the bottom surface of the in-situ detection bracket. The projector 211 and the camera 205 are both mounted on the horizontal slide groove 210 on the top surface of the in-situ detection bracket. Specifically, the projector 211 is fixed to one end of the horizontal slide groove 210 through the first vertical slide groove 2071, and the camera 205 is slidably connected to the horizontal slide groove 210 through the second vertical slide groove 2072. The computer 100 is connected to the robotic arm processing device 103 and the in-situ detection device 102 respectively, so that under the control of the computer 100, the action point of the in-situ detection device 102 and the action point of the robotic arm processing device 103 are both located on the processing mirror on the worktable 104.

[0023] Specifically: In this embodiment, the in-situ detection bracket is composed of a connecting plate 201, a liquid crystal display support 202, a liquid crystal display baffle 204, a slider 206, a first vertical slide 2071, a second vertical slide 2072, a first triangular support 2081, an angular displacement stage 209, and a horizontal slide 210. like Figure 2 As shown, a horizontal groove 210 is provided on the top surface of the connecting plate 201; In actual testing, in order to meet the imaging requirements, it is necessary to adjust the relative positions of the camera 205, the projector 211, and the LCD display 203 separately. Through the cooperation of these three components, the horizontal, vertical, and tilt adjustments of the camera can be achieved. A first vertical slide 2071 is fixed at one end of the horizontal slide 210, and the first vertical slide 2071 and the horizontal slide 210 are connected by a first triangular support 2081 to form a triangular stable structure; the projector 211 is slidably connected to the first vertical slide 2071 based on the slider built into the back. An angular displacement stage 209 is slidably connected on a horizontal slide rail 210; a second vertical slide rail 2072 is fixed on the angular displacement stage 209, and the second vertical slide rail 2072 and the angular displacement stage 209 are connected by a second triangular support 2082 to form a triangular stable structure; a slider 206 is fixed on one side of the camera 205; the slider is adapted to the second vertical slide rail 2072 so that the camera 205 slides on the second vertical slide rail 2072; The LCD display baffle 204 is fixedly connected to the connecting plate 212 on the side away from the projector 211 to prevent damage to the LCD display 203 from the movement of the camera 205; the LCD display 203 is fixed to the bottom surface of the connecting plate 212 by a Z-shaped display support 202.

[0024] In this embodiment, the device that integrates aspherical surface processing and full-process online inspection also includes: a geometric position positioning and inspection device composed of multiple standard conical holes 212; Multiple standard tapered holes 212 are formed on the connecting plate 201 of the in-situ detection device 102, and the positions of the standard tapered holes 212 are opposite to the four fixed corners of the liquid crystal display 203 fixed to the bottom surface of the connecting plate 201. Specifically, in this embodiment... Figure 2 As shown, there are four standard tapered holes 212, which are respectively set on the four fixed corners of the display support 202 used to fix the liquid crystal display 203.

[0025] like Figure 3 The robotic arm processing device 103 shown includes a robotic arm body 301 and an end effector. The end effector includes a motor 302, a tool spindle, and a tool head 303. The processing of the processing mirror is achieved through the six-degree-of-freedom movement of the robotic arm body and the rotation of the motor.

[0026] Example 2 like Figure 4 A method integrating aspherical surface machining, full-process inspection, and online inspection is applied in Example 1, using a device integrating aspherical surface machining, full-process inspection, and online inspection. Specifically, it includes the following steps: S1. Initialization of a device integrating aspherical surface processing and full-process online detection; S2. Perform the grinding and polishing / shaping stages according to actual needs; In the grinding or polishing stage, the computer 100 controls the projector 211 to project a stripe image onto the processing mirror, or controls the liquid crystal display 203 to display a stripe image, so that the processing mirror forms a virtual image based on the principle of mirror reflection. Then, based on the computer 100, the stripe image is switched to make the stripes in the stripe image undergo phase shift, and after each phase shift, the deformation image is captured frame by frame by the camera 205. Finally, the deformed image is input into a surface reconstruction algorithm pre-built according to actual needs to obtain three-dimensional point cloud data describing the surface shape of the processing mirror. Then, based on the three-dimensional point cloud data and the preset trajectory generation method, processing trajectory data is obtained and applied to the robotic arm processing device 103 to realize the processing of the processing mirror.

[0027] Specifically: The grinding stage specifically includes: A1. Using a projector 211 and a camera 205 together, surface shape detection is performed to obtain three-dimensional point cloud data that describes the surface shape of the processed mirror as the real-time surface shape detection result during the grinding stage; A2. Calculate the first deviation between the real-time surface shape detection result and the ideal surface shape during the grinding stage, and determine whether the first deviation is less than the preset first threshold T1; A3. If the result of step A2 is negative, the robotic arm processing device 103 will execute the corresponding grinding processing trajectory based on the real-time surface shape detection result of the grinding stage, and repeat steps A1 to A3 until the result of step A2 is positive, and then execute the polishing and shaping stage.

[0028] The polishing and shaping stage specifically includes: B1. The surface shape is detected by using the LCD display 203 and the camera 205 to obtain three-dimensional point cloud data describing the surface shape of the processed mirror as the real-time surface shape detection result during the polishing and shaping stage; B2. Calculate the second deviation between the real-time surface shape detection result and the ideal surface shape during the polishing and shaping stage, and determine whether the second deviation is less than the preset second threshold T2; B3. If the result of step B2 is negative, the robotic arm processing device 103, based on the real-time surface shape detection result of the polishing and shaping stage, executes the corresponding polishing and shaping processing trajectory, and repeats steps B1 to B3 until the result of step B2 is positive, and the processing mirror is completed. Figure 3 This is a schematic diagram of online machining using the robotic arm machining device 103. The end of the robotic arm body 301 is fixed to the tool head 303 via a flange. A pressure plate is used to fix the workpiece onto the worktable 304. During operation, the computer 100 generates a robotic arm motion data file and inputs it into the robotic arm machining device. This controls the motion trajectory of the robotic arm body 301 to achieve rotary motion. The motor 303 in the end effector is connected to the tool spindle via a bevel gear, driving the tool head 303 to rotate. Machining is achieved through the coordinated rotation of the robotic arm body 301 and the tool head 303; further details are omitted here.

[0029] Furthermore, in this embodiment, a sinusoidal stripe image is selected as the stripe image; It should be noted that, in practical applications, the processed mirrors include, but are not limited to, optical aspherical mirrors, spherical mirrors, and plane mirrors; The initialization of the device integrating aspherical surface machining and full-process online inspection in step S1 includes: The in-situ detection device 102 is adjusted and calibrated, the robotic arm processing device 103 is reset, the threshold is set, the stripe image parameter is set, and the processing mirror is fixed.

[0030] It should be noted that when inspection is required, the robotic arm body 301 moves to an appropriate position to ensure it does not obstruct the processing mirror. The reasons for setting the first threshold T1 and the second threshold T2 are as follows: For the first threshold T1: when the processing mirror deviates significantly from the ideal surface design parameters, its surface is relatively rough; the computer 100 controls the projector 211 to project a stripe image onto the processing mirror, the camera 205 captures a deformed stripe image, and the computer 100 demodulates the surface shape information of the reflecting mirror based on the deformed stripes in the deformed image. For the second threshold T2: when the surface shape of the processed mirror is close to the pre-design parameter: the second threshold T2, its surface is also relatively smooth; the computer 100 controls the liquid crystal display 203 to display a stripe image, the mirror to be processed reflects the stripe image displayed on the liquid crystal display 203, the camera 205 images the reflected image, and the computer 100 demodulates the reflected image to obtain the surface shape information of the processed mirror at this time. After the detection is completed, the three-dimensional surface shape information of the processed mirror generated by the surface shape detection result of the real-time polishing and shaping stage is imported into the data processing software stored in the computer 100 and output to the robotic arm processing program. The processing program is input to the robotic arm controller through the Ethernet / IP bus, and the robotic arm processing process is started by the PLC controller to complete one round of detection and processing. The above steps are repeated until the surface shape detection result of the processed mirror meets the preset target.

[0031] This allows the entire process of manufacturing and inspecting the reflector to be carried out online without human intervention, thus improving manufacturing efficiency.

[0032] It should be noted that the processing trajectory obtained by solving the surface shape detection results is an existing technology and is widely used. Therefore, operators can use it according to actual needs, and we will not go into too much detail about it.

[0033] Example 3 Based on Example 2, this embodiment further discloses the position adjustment and calibration of the in-situ detection device 102, specifically including the following steps: S101. Fix the in-situ detection device 102 on the detection device mounting bracket 101, and adjust the horizontal and vertical positions so that the in-situ detection device 102 is placed near the center of the best fitting sphere of the processing mirror. S102. Adjust the position of the camera 205 so that the processing mirror is located at the center of the field of view of the camera 205, and ensure that the image projected by the projector 211 and the image reflected by the liquid crystal display 203 of the processing mirror can be completely captured by the camera 205, thus completing the position adjustment. S103. Use a three-dimensional spatial point position measuring tool to measure the three-dimensional spatial position of the geometric position positioning device, and calculate the spatial positions of the projector 211, LCD display 203, and camera 205 to complete the position calibration. Specifically: In practical applications, a three-dimensional spatial point measuring tool such as an articulated arm or laser tracker is used to accurately measure the positions of the four standard conical holes 212. This allows for the rapid determination of the spatial positions of the three components by understanding their relative positions to the camera 205, LCD display 203, and projector 211.

[0034] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A device integrating aspherical surface machining and full-process online inspection, comprising: The workbench (104), robotic arm processing device (103) and computer (100) are characterized in that they further include: a detection device mounting bracket (101) with vertical telescopic function, and an in-situ detection device (102) installed on the top surface of the detection device mounting bracket (101) and slidably connected to the top surface of the detection device mounting bracket (101). The in-situ detection device (102) consists of a projector (211), a liquid crystal display (203), a camera (205), and an in-situ detection bracket. The liquid crystal display (203) is fixed to the bottom surface of the in-situ detection bracket. The projector (211) and the camera (205) are both installed on the horizontal slide groove (210) on the top surface of the in-situ detection bracket. Specifically, the projector (211) is fixed to one end of the horizontal slide groove (210) through the first vertical slide groove (2071), and the camera (205) is slidably connected to the horizontal slide groove (210) through the second vertical slide groove (2072). The computer (100) is connected to the robotic arm processing device (103) and the in-situ detection device (102) respectively, so that under the control of the computer (100), the action point of the in-situ detection device (102) and the action point of the robotic arm processing device (103) are both located on the processing mirror on the worktable (104).

2. The device for integrating aspherical surface processing, full-process inspection, and online inspection according to claim 1, characterized in that, Also includes: A geometric position positioning and detection device consisting of multiple standard conical holes (212); Multiple standard conical holes (212) are provided on the connecting plate (201) of the in-situ detection device (102), and the positions of the standard conical holes (212) are opposite to the four fixed corners of the liquid crystal display (203) fixed on the bottom surface of the connecting plate (201).

3. A method integrating aspherical surface machining and full-process online inspection, characterized in that: The device described in claim 2, which integrates aspherical surface processing and full-process online inspection, is applied. Specifically, the following steps are included: S1. Initialization of a device integrating aspherical surface processing and full-process online detection; S2. Perform the grinding and polishing / shaping stages according to actual needs; In the grinding or polishing stage, the computer (100) controls the projector (211) to project a stripe image onto the processing mirror, or controls the liquid crystal display (203) to display the stripe image, so that the processing mirror forms a virtual image based on the principle of mirror reflection. Then, based on the computer (100) control, the stripe image is switched to make the stripes in the stripe image undergo phase shift, and after each phase shift, the deformation image is acquired by the camera (205); Finally, the deformed image is input into the surface reconstruction algorithm pre-built according to actual needs to obtain three-dimensional point cloud data describing the surface shape of the processing mirror. Then, based on the three-dimensional point cloud data and the preset trajectory generation method, the processing trajectory data is obtained and applied to the robotic arm processing device (103) to realize the processing of the processing mirror.

4. The method for integrating aspherical surface machining, full-process inspection, and online inspection according to claim 3, characterized in that, The grinding stage specifically includes: A1. Using a projector (211) and a camera (205) to perform surface shape detection, the three-dimensional point cloud data used to describe the surface shape of the processed mirror is used as the real-time surface shape detection result in the grinding stage; A2. Calculate the first deviation between the real-time surface shape detection result and the ideal surface shape during the grinding stage, and determine whether the first deviation is less than the preset first threshold T1; A3. If the result of step A2 is negative, the robotic arm processing device (103) will execute the corresponding obtained grinding processing trajectory based on the real-time surface shape detection result of the grinding stage, and repeat steps A1 to A3 until the result of step A2 is positive, and then execute the polishing and shaping stage.

5. The method for integrating aspherical surface machining, full-process inspection, and online inspection according to claim 4, characterized in that, The polishing and shaping stage specifically includes: B1. Using a liquid crystal display (203) and a camera (205) to perform surface shape detection, three-dimensional point cloud data describing the surface shape of the processed mirror is obtained as the real-time surface shape detection result during the polishing and shaping stage; B2. Calculate the second deviation between the real-time surface shape detection result and the ideal surface shape during the polishing and shaping stage, and determine whether the second deviation is less than the preset second threshold T2; B3. If the result of step B2 is negative, the robotic arm processing device (103) will execute the corresponding polishing and shaping processing trajectory based on the real-time surface shape detection result of the polishing and shaping stage, and repeat steps B1 to B3 until the result of step B2 is positive, and the processing mirror is completed.

6. The method for integrating aspherical surface machining, full-process inspection, and online inspection according to claim 5, characterized in that, The initialization of the device integrating aspherical surface machining and full-process online inspection in step S1 includes: The in-situ detection device (102) is adjusted and calibrated, the robotic arm processing device (103) is reset, the threshold is set, the stripe image parameter is set, and the processing mirror is fixed.

7. The method for integrating aspherical surface machining, full-process inspection, and online inspection according to claim 6, characterized in that, The position adjustment and calibration of the in-situ detection device (102) specifically includes the following steps: S101. Fix the in-situ detection device (102) on the detection device mounting bracket (101) and adjust the horizontal and vertical positions so that the in-situ detection device (102) is placed near the center of the best fitting sphere of the processing mirror; S102. Adjust the position of the camera (205) so that the processing mirror is located at the center of the field of view of the camera (205), and ensure that the image projected by the projector (211) and the image reflected by the liquid crystal display (203) of the processing mirror can be completely captured by the camera (205) to complete the position adjustment; S103. Use a three-dimensional spatial point position measuring tool to measure the three-dimensional spatial position of the geometric position positioning device, and calculate the spatial positions of the projector (211), liquid crystal display (203) and camera (205) to complete the position calibration.

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