Bagging equipment for semiconductor wafer box

Abstract

The invention discloses bagging equipment for semiconductor wafer cassettes, and relates to the technical field of semiconductor wafer production, and the bagging equipment comprises packaging equipment which comprises a wafer cassette pushing mechanism used for pushing clamped semiconductor wafer cassettes into packaging bags after bag opening is completed; the clamping assembly is fixed on the wafer box pushing mechanism and comprises a fixing plate fixed at the pushing end of the wafer box pushing mechanism, an air cylinder is arranged on one side of the fixing plate, a bolt piece is fixed on one side of the air cylinder and matched with the fixing plate, and a nut piece is installed on the bolt piece. A lubricating system of the device does not need manual intervention, a channel is automatically opened during bolt mounting and automatically closed during bolt dismounting, and liquid leakage waste is avoided; continuous lubrication ensures smooth movement of the piston rod, dynamic quantity increasing lubrication adjusts the oil quantity according to the operation state of equipment, part abrasion caused by insufficient lubrication is prevented, pollution and waste caused by excessive lubricating oil are avoided, the service life of the air cylinder can be prolonged after long-term use, and the maintenance cost of the equipment is reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer manufacturing technology, and in particular to a bagging device for semiconductor wafer cassettes. Background Technology

[0002] In semiconductor wafer production, wafer boxes need to be sealed and packaged by a packaging machine to prevent contamination from dust and moisture and to ensure wafer quality. A pusher structure is required when packaging semiconductor wafer boxes.

[0003] However, in practical applications, there are still some unresolved issues. The following are some common problems of bagging equipment used for semiconductor wafer boxes: First, the installation of the clamping components is cumbersome. The bolt connection between the cylinder and the plate requires multiple turns of rotation to lock, which is time-consuming to disassemble and assemble. Moreover, long-term use can easily cause the bolts to reverse and loosen due to vibration. Second, the lubrication system requires manual intervention. When the cylinder piston rod moves back and forth, lubricating oil needs to be added manually at regular intervals. The operation is cumbersome and easy to miss, which affects the smooth operation of the equipment. Summary of the Invention

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0005] In view of the problems existing in the above and / or existing bagging equipment for semiconductor wafer cassettes, the present invention is proposed.

[0006] Therefore, the problem to be solved by this invention is how to solve the problems of cumbersome installation of clamping components, loose bolts, and insufficient manual intervention and control of the lubrication system.

[0007] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a bagging device for semiconductor wafer cassettes, comprising: a packaging device including a wafer cassette pushing mechanism for pushing a clamped semiconductor wafer cassette into a packaged bag after opening; a clamping assembly fixed to the wafer cassette pushing mechanism, including a fixing plate fixed to the pushing end of the wafer cassette pushing mechanism, a cylinder provided on one side of the fixing plate, a bolt fixed on one side of the cylinder, the bolt cooperating with the fixing plate, a nut installed on the bolt, a lubrication mechanism installed on the cylinder and one of the bolts, the lubrication mechanism cooperating with the fixing plate and a slide table respectively, the bolt including a bolt fixed to one side of the cylinder; and the lubrication mechanism including an oil tank fixed to the top of the cylinder, a switch installed on the oil tank and one of the bolts, the switch cooperating with the fixing plate, a lubricating element and a triggering element installed on the cylinder respectively, the lubricating element cooperating with the switch and the triggering element respectively.

[0008] As a preferred embodiment of the bagging equipment for semiconductor wafer boxes described in this invention, wherein: a slide is fixed to the piston rod end of the cylinder, and the slide slides on the cylinder; a connecting plate is fixed to one side of the slide; a clamping block is fixed to one end of the connecting plate; a mounting hole for cooperating with a bolt is opened on one side of the fixing plate; a through groove and a threaded groove are respectively opened on the surface of the bolt, and the through groove and the threaded groove are connected; a limiting groove is opened in the inner wall of the through groove; a groove is opened inside the bolt; and the through groove, the threaded groove and the limiting groove all cooperate with a nut.

[0009] As a preferred embodiment of the bagging device for semiconductor wafer cassettes described in this invention, the nut component includes a nut sleeved on the surface of a bolt, the inner wall of the nut being fixed with threads, and the threads respectively engaging with a through groove and a threaded groove, a collar being fixed on one side of the nut, and a limiting block and an unlocking ring sliding on the collar respectively, the limiting block engaging with the limiting groove and the unlocking ring respectively.

[0010] As a preferred embodiment of the bagging device for semiconductor wafer cassettes according to the present invention, wherein: a square groove is formed inside the collar, a square block is fixed on the surface of the limiting block and slides in the square groove, a spring piece is fixed between the surface of the square block and the inner wall of the square groove, an anti-detachment groove is formed on the surface of the collar, an anti-detachment block is fixed on the inner wall of the unlocking ring and slides in the anti-detachment groove, and a spring piece is fixed between the surface of the unlocking ring and the surface of the nut.

[0011] As a preferred embodiment of the bagging device for semiconductor wafer cassettes described in this invention, wherein: one end of the limiting block is provided with surface one, surface two and surface three respectively, surface one and surface two are respectively engaged with bolts, surface three is respectively engaged with limiting groove and bolts, and the other end of the limiting block is provided with unlocking groove, and the unlocking groove is engaged with unlocking ring.

[0012] As a preferred embodiment of the bagging equipment for semiconductor wafer cassettes according to the present invention, the packaging equipment further includes a frame, on which a bag hopper assembly, a bag picking mechanism, an edge-removing assembly, a detection mechanism, a packaging table, a bag opening assembly, a heat sealing mechanism, a bag sorting assembly, and a conveying mechanism are respectively installed, and the wafer cassette pushing mechanism is installed on the frame.

[0013] As a preferred embodiment of the bagging equipment for semiconductor wafer cassettes according to the present invention, the switching component includes a first bent pipe connected to one side of the oil tank, one end of the first bent pipe being fixed to one of the bolts and connected to the tank body; a second bent pipe being fixed to the cylinder, one end of the second bent pipe being fixed to one of the bolts and connected to the tank body; a connecting pipe being connected to the other end of the second bent pipe; both ends of the connecting pipe being connected to a lubricating component; a valve core sliding inside the tank, the valve core having a valve hole; a drive column sliding on the bolt, the drive column being fixed to the surface of the valve core; the drive column cooperating with a fixing plate; a spring sheet three being fixed between the surface of the valve core and the inner wall of the tank body; and a one-way valve being provided at the end of the first bent pipe near the oil tank.

[0014] As a preferred embodiment of the bagging device for semiconductor wafer cassettes according to the present invention, the lubricating component includes a ring fixed to one side of a cylinder, and the ring is connected to one end of a connecting pipe. A movable groove is provided on the inner wall of the ring, and a column slides in the movable groove. A channel is provided inside the column, and one end of the column extends to the outside of the ring and is embedded with a steel ball. A sponge column is filled in the channel, and the surface of the sponge column contacts the surface of the steel ball. A positioning groove is provided on the inner wall of the movable groove, and a positioning block is fixed on the surface of the column and slides in the positioning groove. A spring sheet is fixed between the surface of the positioning block and the inner wall of the positioning groove.

[0015] As a preferred embodiment of the bagging device for semiconductor wafer cassettes described in this invention, the triggering element includes a housing fixed to one side of a cylinder by a support plate. A rotating column is rotatably mounted on the housing. A first bevel gear is fixedly sleeved on one end surface of the rotating column. A protrusion is fixed on one side of the first bevel gear. A cylinder is fixed to one side of the housing by a support rod, and the cylinder is connected to the end of a second bent tube away from the bolt. A square rod slides on the housing and the cylinder. A piston slides on the inner wall of the cylinder, and the piston is fixed to one end of the square rod located in the inner cavity of the cylinder. A spring is sleeved on one end surface of the square rod, and the two ends of the spring are respectively fixed to the piston surface and the inner wall of the cylinder. A roller is fixed to the other end of the square rod, and the roller cooperates with the protrusion.

[0016] As a preferred embodiment of the bagging device for semiconductor wafer cassettes according to the present invention, wherein: a rotating tube is rotatably mounted on the housing, a ratchet is fixed at one end of the rotating tube located in the inner cavity of the housing, a second bevel gear is fixed on one side of the outer ring of the ratchet, and the second bevel gear meshes with a first bevel gear, a long rod slides along the inner wall of the rotating tube and the second bevel gear, a guide groove is formed on the surface of the long rod, a steel ball is embedded in the inner wall of the rotating tube, and the steel ball slides in the guide groove, a guide rod slides on the housing, a connecting block is fixed at one end of the guide rod and the long rod, a second spring is sleeved at one end of the guide rod located in the inner cavity of the housing, and the two ends of the second spring are respectively fixed to the surface of the connecting block and the inner wall of the housing.

[0017] The beneficial effects of this invention are as follows: 1. Through the bolt and nut structure of "through slot positioning + slight rotation locking", the cylinder can be installed without multiple rotations, which greatly shortens the disassembly and assembly time and reduces the difficulty of operation for maintenance personnel. At the same time, the anti-reverse design of the limit block avoids the bolt from loosening due to long-term vibration, reducing the number of equipment downtimes. Compared with traditional bolt connections, the maintenance efficiency is significantly improved, which is suitable for the needs of semiconductor production lines for rapid equipment maintenance and reduces production delays caused by maintenance.

[0018] 2. The lubrication system of the device requires no manual intervention. The channel opens automatically when the bolts are installed and closes automatically when they are disassembled, avoiding leakage and waste. Continuous lubrication ensures smooth piston rod movement. Dynamic lubrication adjusts the oil volume according to the equipment's operating status, which not only prevents component wear caused by insufficient lubrication, but also avoids pollution and waste caused by excessive lubricating oil. Long-term use can extend the service life of the cylinder and reduce equipment maintenance costs. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a perspective view of packaging equipment used for bagging semiconductor wafer cassettes.

[0021] Figure 2 A perspective view of the bag hopper assembly and handling mechanism of a bagging equipment for semiconductor wafer cassettes.

[0022] Figure 3 This is a perspective view of the wafer cassette feeding mechanism used in a bagging device for semiconductor wafer cassettes.

[0023] Figure 4 A perspective view of the mounting plate and cylinder of a bagging device for semiconductor wafer cassettes.

[0024] Figure 5 A partial sectional perspective view of the mounting plate of a bagging device used for semiconductor wafer cassettes.

[0025] Figure 6 Bagging equipment for semiconductor wafer cassettes Figure 5 Enlarged view of region A in the middle.

[0026] Figure 7 This is a partial cross-sectional plan view of the ring sleeve used in a bagging device for semiconductor wafer cassettes.

[0027] Figure 8 Bagging equipment for semiconductor wafer cassettes Figure 7 Enlarged view of region B in the middle.

[0028] Figure 9 Cross-sectional stereoscopic view of a partial structure of a bagging device for semiconductor wafer cassettes. Figure 1 .

[0029] Figure 10 Bagging equipment for semiconductor wafer cassettes Figure 9 Enlarged view of region C.

[0030] Figure 11 Bagging equipment for semiconductor wafer cassettes Figure 9 Enlarged view of region D in the middle.

[0031] Figure 12 A partial cross-sectional plan view of the ratchet and rotating tube of a bagging device used for semiconductor wafer cassettes.

[0032] Figure 13 Cross-sectional stereoscopic view of a partial structure of a bagging device for semiconductor wafer cassettes. Figure 2 .

[0033] Figure 14 This is a partial sectional plan view of the fixing plate and bolts used in the bagging equipment for semiconductor wafer cassettes.

[0034] Figure 15 Bagging equipment for semiconductor wafer cassettes Figure 14 Enlarged view of region E in the middle.

[0035] Figure 16 Bagging equipment for semiconductor wafer cassettes Figure 14 Enlarged view of the F region.

[0036] Figure 17 A three-dimensional view showing the bolts and nuts separated in a bagging device used for semiconductor wafer cassettes.

[0037] Figure 18 This is a partial plan view of the limiting block and limiting groove of the bagging equipment used for semiconductor wafer cassettes.

[0038] Figure 19 Three-dimensional positioning blocks for bagging equipment used in semiconductor wafer cassettes Figure 1 .

[0039] Figure 20 Three-dimensional positioning blocks for bagging equipment used in semiconductor wafer cassettes Figure 2 .

[0040] Figure 21 A perspective view of the bag-taking mechanism and bag-opening assembly of a bagging device for semiconductor wafer cassettes.

[0041] Figure 22A perspective view of the heat sealing mechanism and bag-sorting assembly of a bagging equipment for semiconductor wafer cassettes.

[0042] Figure 23 For the overall three-dimensional packaging equipment used in semiconductor wafer cassettes Figure 1 .

[0043] Figure 24 For the overall three-dimensional packaging equipment used in semiconductor wafer cassettes Figure 2 .

[0044] Figure 25 A partial perspective view of a bagging device used for semiconductor wafer cassettes.

[0045] Figure 26 A perspective view of the feeding and unloading components and the labeling and desiccant placement mechanism of a bagging equipment for semiconductor wafer cassettes.

[0046] Figure 27 This is a perspective view of the feeding module, CCD inspection module, and disassembly module of a bagging equipment used for semiconductor wafer cassettes.

[0047] Figure 28 A 3D view of the labeling machine module, desiccant feeding module, and transfer robot of a bagging equipment for semiconductor wafer cassettes.

[0048] In the diagram: 1. Packaging equipment; 11. Wafer box feeding mechanism; 12. Bag hopper assembly; 13. Bag picking mechanism; 14. Edge stripping assembly; 15. Detection mechanism; 16. Packaging table; 17. Bag opening assembly; 18. Heat sealing mechanism; 19. Bag sorting assembly; 110. Frame; 111. Handling mechanism; 2. Clamping assembly; 21. Fixing plate; 22. Cylinder; 23. Slide table; 24. Connecting plate; 25. Clamping block; 26. Bolt; 27. Nut; 28. Lubrication mechanism; 261. Bolt; 262. Through groove; 263. Threaded groove; 264. Limiting groove; 265. Groove body; 2 71. Nut; 272. Thread; 273. Collar; 274. Limiting block; 275. Unlocking ring; 276. Square groove; 277. Square block; 278. Spring piece one; 279. Anti-detachment groove; 2710. Anti-detachment block; 2711. Spring piece two; 2741. Surface one; 2742. Surface two; 2743. Surface three; 2744. Unlocking groove; 281. Oil tank; 282. Switch; 283. Lubricating component; 284. Trigger; 2821. First bend; 2822. Second bend; 2823. Connecting pipe; 2824. Valve core; 2825. Valve hole; 2826. Drive Moving column; 2827, spring three; 2828, one-way valve; 2829, slide groove; 28210, slider; 2831, ring sleeve; 2832, moving groove; 2833, column; 2834, channel; 2835, steel ball; 2836, sponge column; 2837, positioning groove; 2838, positioning block; 2839, spring four; 2841, housing; 2842, rotating column; 2843, first bevel gear; 2844, protrusion; 2845, cylinder; 2846, square rod; 2847, piston; 2848, spring one; 2849, roller; 28410, rotating tube 28411, Ratchet; 28412, Second Bevel Gear; 28413, Long Rod; 28414, Guide Groove; 28415, Steel Ball; 28416, Guide Rod; 28417, Connecting Block; 28418, Spring II; 3. Feeding and Disassembly Assembly Components; 31, Machine Base I; 32, Feeding Module; 33, CCD Detection Module; 34, Disassembly Module; 35, Material Frame; 36, Disassembly Robot; 4. Labeling and Desiccant Placement Mechanism; 41, Machine Base II; 42, Labeling Machine Module; 43, Desiccant Feeding Module; 44, Transfer Robot; 45, NG Unloading Module. Detailed Implementation

[0049] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0050] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0051] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0052] Example 1, referring to Figures 1-5 This is the first embodiment of the present invention. This embodiment provides a bagging device for semiconductor wafer cassettes. The bagging device for semiconductor wafer cassettes includes a packaging device 1 and a clamping assembly 2.

[0053] Specifically, the packaging equipment 1 includes a frame 110, on which are respectively installed a wafer cassette pushing mechanism 11, a bag hopper assembly 12, a bag picking mechanism 13, an edge-removing assembly 14, a detection mechanism 15, a packaging table 16, a bag opening assembly 17, a heat sealing mechanism 18, a bag sorting assembly 19, and a handling mechanism 111. The wafer cassette pushing mechanism 11, the bag hopper assembly 12, the bag picking mechanism 13, the edge-removing assembly 14, the detection mechanism 15, the packaging table 16, the bag opening assembly 17, the heat sealing mechanism 18, the bag sorting assembly 19, and the handling mechanism 111 are all existing technologies. The working principle of this part is also existing technology, which can be clearly understood by those skilled in the art, and will not be described in detail here.

[0054] Specifically, the clamping assembly 2 is fixed to the wafer cassette pusher mechanism 11, including a fixing plate 21 fixed to the pushing end of the wafer cassette pusher mechanism 11. A cylinder 22 is provided on one side of the fixing plate 21. A slide 23 is fixed to the piston rod end of the cylinder 22, and the slide 23 slides on the cylinder 22. The cylinder 22 and the slide 23 can be combined to form an existing slide cylinder, which is prior art. The working principle of this part is also prior art, which can be clearly understood by those skilled in the art, and will not be described in detail here. A connecting plate 24 is fixed to one side of the slide 23. A clamping block 25 is fixed to one end of the connecting plate 24. A bolt 26 is fixed to one side of the cylinder 22, and the bolt 26 cooperates with the fixing plate 21. A nut 27 is installed on the bolt 26. A lubrication mechanism 28 is installed on the cylinder 22 and one of the bolts 26, and the lubrication mechanism 28 cooperates with the fixing plate 21 and the slide 23 respectively.

[0055] Two sets of clamping components 2 are installed on a fixed plate 21. The clamping blocks 25 on the two sets of clamping components 2 move closer or further apart to clamp and unlock the semiconductor wafer box. Then, the clamped semiconductor wafer box is pushed into the packaging bag after the bag has been opened by the wafer box pushing mechanism 11. Then, the clamping is released to remove the clamping components 2 from the packaging bag. Then, the packaging bag is heat-sealed by the heat sealing mechanism 18 to complete the automatic packaging of the semiconductor wafer box. A cylinder 22 is provided with four bolts 26, which are distributed at the four corners on one side of the cylinder 22.

[0056] With the cooperation of bolt 26 and nut 27, cylinder 22 can be quickly installed on fixing plate 21. Simply pass bolt 26 through the mounting hole on fixing plate 21, align nut 271 with bolt 26, put nut 27 on bolt 26 and move it, and then slightly rotate nut 27 with a wrench to connect it to bolt 26 and achieve a tight contact between nut 27 and fixing plate 21. After fixing, nut 27 cannot be reversed, thus playing a role in preventing detachment. The anti-detachment restriction can be manually released during later disassembly.

[0057] With the lubrication mechanism 28 in place, during the installation of the cylinder 22 while the bolt 26 is fixed to the fixing plate 21, the lubrication oil pipeline of the lubrication mechanism 28 can be opened, and the piston rod of the cylinder 22 can be lubricated during its movement without manual operation. Furthermore, the lubrication function can be intermittently and actively triggered according to the frequency and stroke of the piston rod. When the bolt 26 is removed from the fixing plate 21, the lubrication oil pipeline of the lubrication mechanism 28 can be closed to prevent lubricating oil leakage and waste after disassembly.

[0058] Example 2, refer to Figures 4 to 20 This is the second embodiment of the present invention, which is based on the previous embodiment.

[0059] Specifically, the bolt component 26 includes a bolt 261 fixed to one side of the cylinder 22. The fixing plate 21 has a mounting hole on one side that mates with the bolt 261. The surface of the bolt 261 has a through groove 262 and a threaded groove 263, and the through groove 262 and the threaded groove 263 are connected. The inner wall of the through groove 262 has a limiting groove 264. The bolt 261 has a groove 265 inside. The through groove 262, the threaded groove 263 and the limiting groove 264 all mate with the nut component 27.

[0060] The opening portion of the through groove 262 occupies one-sixth of the outer ring of the bolt 261, the opening portion of the threaded groove 263 occupies five-sixths of the outer ring of the bolt 261, and there are several limiting grooves 264, which are distributed in a circumferential array on the inner wall of the through groove 262. The diameter of the mounting hole is slightly larger than the diameter of the bolt 261, so that the bolt 261 can pass through smoothly when it is installed on the fixing plate 21.

[0061] Specifically, the nut component 27 includes a nut 271 sleeved on the surface of the bolt 261. The inner wall of the nut 271 is fixed with a thread 272, and the thread 272 is respectively engaged with the through groove 262 and the thread groove 263. A collar 273 is fixed on one side of the nut 271. A limit block 274 and an unlocking ring 275 slide on the collar 273 respectively. The limit block 274 is engaged with the limit groove 264 and the unlocking ring 275 respectively.

[0062] The inner diameter of the nut 271 is matched with the outer diameter of the bolt 261. The thread 272 occupies one-seventh of the inner wall of the nut 271. With this setting, when the nut 271 needs to be connected to the bolt 261, the thread 272 in the nut 271 is aligned with the through groove 262 on the bolt 261. Then, the nut 271 is directly put on the bolt 261 and moved until it is about to contact the fixing plate 21. Then, the nut 271 is rotated with a wrench to screw the thread 272 into the thread groove 263 on the bolt 261, thereby realizing the connection between the bolt 261 and the nut 271 and quickly fixing the cylinder 22 to the fixing plate 21.

[0063] There are several limiting blocks 274 arranged in a circular array on the collar 273. The limiting blocks 274 pass through the collar 273 and slide to it. After the nut 271 is connected to the bolt 261, there is always one limiting block 274 that can be inserted into the limiting groove 264, thereby preventing the collar 273 and the nut 271 from being loosened due to reverse rotation. With the setting of the unlocking ring 275, when it is necessary to remove the nut 271 from the bolt 261, the unlocking ring 275 is moved on the collar 273, thereby squeezing the limiting block 274 to move it away from the bolt 261, thereby releasing the anti-loosening positioning. Then, the nut 271 is slightly rotated with a wrench so that the thread 272 corresponds to the through groove 262 and then moved, so that the nut 271 can be removed from the bolt 261.

[0064] Specifically, a square groove 276 is provided inside the collar 273, and a square block 277 is fixed on the surface of the limiting block 274. The square block 277 slides in the square groove 276. The square block 277 and the square groove 276 can guide and limit the limiting block 274, allowing it to move within a certain range. A spring piece 278 is fixed between the surface of the square block 277 and the inner wall of the square groove 276. With the setting of the spring piece 278, the square block 277 deforms when it moves with the limiting block 274, providing a force for the subsequent reset of the limiting block 274.

[0065] The collar 273 has an anti-detachment groove 279 on its surface, and an anti-detachment block 2710 is fixed to the inner wall of the unlocking ring 275. The anti-detachment block 2710 slides in the anti-detachment groove 279. The anti-detachment groove 279 and the anti-detachment block 2710 can limit the unlocking ring 275, allowing it to move a certain distance on the collar 273 without detaching from the surface of the collar 273. A second spring piece 2711 is fixed between the surface of the unlocking ring 275 and the surface of the nut 271. With the setting of the second spring piece 2711, when the unlocking ring 275 moves on the collar 273, it deforms, providing a force for the subsequent reset of the unlocking ring 275.

[0066] Specifically, one end of the limiting block 274 is provided with face 2741, face 2742 and face 2743 respectively. Face 2741 and face 2742 are both engaged with bolt 261, and face 2743 is engaged with limiting groove 264 and bolt 261 respectively. The other end of the limiting block 274 is provided with unlocking groove 2744, and unlocking groove 2744 is engaged with unlocking ring 275.

[0067] Faces 2741, 2742, and 2743 are all inclined planes. With this design, when the nut 271 needs to be moved or removed from the bolt 261, the pressure from the bolt 261 on faces 2741 and 2742 allows the limiting block 274 to move on the collar 273 without affecting the normal movement of the nut 271 on the bolt 261 or the operation. At the same time, when rotating the nut 271 to move the collar 273 and the limiting block 274, the pressure from the bolt 261 on face 2743 allows the limiting block 274 to move on the collar 273 without affecting the connection between the nut 271 and the bolt 261.

[0068] The inner wall of the limiting groove 264 is provided with a slope, so that the rotation can continue unaffected when the limiting block 274 is inserted into it. However, the non-sloping setting at the corresponding position during reverse rotation can achieve the function of preventing reverse rotation. The unlocking groove 2744 is provided with a slope, and one end of the unlocking ring 275 is chamfered to match the slope on the unlocking groove 2744. With this setting, when the moving unlocking ring 275 presses the limiting block 274, the limiting block 274 can be moved away from the bolt 261.

[0069] Example 3, referring to Figures 4 to 15 This is the third embodiment of the present invention, which is based on the first two embodiments.

[0070] Specifically, the lubrication mechanism 28 includes an oil tank 281 fixed to the top of the cylinder 22. An on / off element 282 is installed on the oil tank 281 and one of the bolts 261, and the on / off element 282 cooperates with the fixed plate 21. A lubricating element 283 and a trigger element 284 are respectively installed on the cylinder 22, and the lubricating element 283 cooperates with the on / off element 282 and the trigger element 284 respectively.

[0071] By using the on / off switch 282, after the bolt 261 with it installed is inserted into the fixing plate 21, the oil tank 281 can be connected to the lubricating component 283 and the trigger component 284, thus enabling the lubrication operation to be started. The lubricating component 283 can lubricate the piston rod during its reciprocating movement, ensuring the smoothness of the piston rod's movement and providing protection. The trigger component 284 can intermittently and actively trigger the function of increasing lubrication according to the frequency and stroke of the piston rod, without the need for manual operation intervention.

[0072] Specifically, the switching component 282 includes a first bend 2821 connected to one side of the oil tank 281. One end of the first bend 2821 is fixed to one of the bolts 261 and is connected to the groove 265. A second bend 2822 is fixed to the cylinder 22. One end of the second bend 2822 is fixed to one of the bolts 261 and is connected to the groove 265. The other end of the second bend 2822 is connected to a connecting pipe 2823. The two ends of the connecting pipe 2823 are respectively connected to... The lubricating component 283 is connected, and the valve core 2824 slides in the groove 265. The valve core 2824 has a valve hole 2825. The drive column 2826 slides on the bolt 261 and is fixed to the surface of the valve core 2824. The drive column 2826 cooperates with the fixing plate 21. A spring sheet 2827 is fixed between the surface of the valve core 2824 and the inner wall of the groove 265. A one-way valve 2828 is provided at the end of the first bend 2821 near the oil tank 281.

[0073] A seal is made between the valve core 2824 and the groove 265. One end of the drive column 2826 and one side of the mounting hole are chamfered. With this setting, when the bolt 261 is inserted into the mounting hole on the fixing plate 21, the drive column 2826 is squeezed by the fixing plate 21 and moves into the groove 265, thereby driving the valve core 2824 to move in the groove 265, so that the valve hole 2825 is connected to one end of the first bend 2821. This allows the lubricating oil in the oil tank 281 to enter the lubrication component 283 through the first bend 2821, the valve hole 2825, the groove 265, the second bend 2822, and the connecting pipe 2823 to lubricate the piston rod.

[0074] By setting the spring 2827, the valve core 2824 deforms when it moves in the groove 265, providing force for the subsequent reset of the valve core 2824 and drive column 2826. When the bolt 261 is released from the fixing plate 21, the first bend 2821 is closed, stopping the supply of lubricating oil. By setting the one-way valve 2828, the lubricating oil in the oil tank 281 can enter the first bend 2821, and the lubricating oil in the first bend 2821 cannot flow back into the oil tank 281.

[0075] Specifically, the lubricating component 283 includes a ring 2831 fixed to one side of the cylinder 22, and the ring 2831 is connected to one end of the connecting pipe 2823. The inner wall of the ring 2831 is provided with a moving groove 2832, and a column 2833 slides in the moving groove 2832. A channel 2834 is provided inside the column 2833. One end of the column 2833 extends to the outside of the ring 2831 and is embedded with a steel ball 2835. The channel 2834 is filled with a sponge column 2836, and the surface of the sponge column 2836 contacts the surface of the steel ball 2835. The inner wall of the moving groove 2832 is provided with a positioning groove 2837. A positioning block 2838 is fixed on the surface of the column 2833 and slides in the positioning groove 2837. A spring piece 2839 is fixed between the surface of the positioning block 2838 and the inner wall of the positioning groove 2837.

[0076] The column 2833 and the moving groove 2832 are sealed. The steel ball 2835 rotates at one end of the column 2833. There are several steel balls 2835 and columns 2833, which are distributed in a circumferential array. There are two rings 2831, which are distributed and sleeved on the surfaces of the two piston rods. The surface of the steel ball 2835 is in contact with the surface of the piston rod.

[0077] Through the setting of the sponge column 2836, the lubricating oil flowing into the ring 2831 enters the channel 2834, and then the sponge column 2836 is wetted. Under the action of the piston rod moving and driving the steel ball 2835 to rotate, the steel ball 2835 transfers the lubricating oil transferred to it by the sponge column 2836 to the piston rod, thereby realizing the lubrication operation. The lubrication amount is very small each time, which can ensure the lubrication of the piston rod. The lubricating oil in the oil tank 281 can meet the needs of long-term use. The positioning groove 2837 and the positioning block 2838 can guide and limit the column 2833. Through the setting of the spring plate 2839, the force is applied to the column 2833, so that the steel ball 2835 keeps in contact with the piston rod at all times.

[0078] Specifically, the trigger 284 includes a housing 2841 fixed to one side of the cylinder 22 by a support plate. A rotating column 2842 is rotatably mounted on the housing 2841. A first bevel gear 2843 is fixedly sleeved on one end of the rotating column 2842. A protrusion 2844 is fixed to one side of the first bevel gear 2843. A cylinder 2845 is fixed to one side of the housing 2841 by a support rod, and the cylinder 2845 is connected to the end of the second bent tube 2822 away from the bolt 261. The housing 2841 and the cylinder 2845 are connected to each other. A square rod 2846 slides on the cylinder 2845, and a piston 2847 slides on the inner wall of the cylinder 2845. The piston 2847 is fixed to one end of the square rod 2846 located in the inner cavity of the cylinder 2845. A spring 2848 is sleeved on one end of the square rod 2846, and the two ends of the spring 2848 are fixed to the surface of the piston 2847 and the inner wall of the cylinder 2845, respectively. A roller 2849 is fixed to the other end of the square rod 2846, and the roller 2849 cooperates with the protrusion 2844.

[0079] The rotating column 2842 is rotatably connected to the housing 2841 via a damping bearing. The piston 2847 and the cylinder 2845 are sealed. With the setting of the protrusion 2844, when the lubrication pipe is open, the chamber formed by the piston 2847 and the cylinder 2845 is also filled with lubricating oil. When the second bevel gear 28412 drives the protrusion 2844 to rotate once, it can squeeze the roller 2849 to move it and the square rod 2846, thereby driving the piston 2847 to move inside the cylinder 2845 and press out the lubricating oil inside the cylinder 2845. Due to the one-way design of the one-way valve 2828, the lubricating oil can enter the sponge column 2836 to increase the wetting amount, and a small amount is discharged from the gap between the steel ball 2835 and the column 2833, which plays a backflushing role and avoids dust blockage.

[0080] With the spring 2848 in place, the piston 2847 is stretched and deformed as it moves with the square rod 2846, providing a force for the subsequent reset of the piston 2847. During the reset process of the piston 2847, a small amount of lubricating oil in the oil tank 281 can be drawn into the lubrication pipe.

[0081] Specifically, a rotating tube 28410 is mounted on the housing 2841. A ratchet 28411 is fixed to one end of the rotating tube 28410 located inside the housing 2841. A second bevel gear 28412 is fixed to one side of the outer ring of the ratchet 28411, and the second bevel gear 28412 meshes with a first bevel gear 2843. A long rod 28413 slides along the inner wall of the rotating tube 28410 and the second bevel gear 28412. A guide groove 28414 is formed on the surface of the long rod 28413. A steel ball 28415 is embedded in the inner wall of the rotating tube 28410, and the steel ball 28415 slides in the guide groove 28414. A guide rod 28416 slides on the housing 2841. A connecting block 28417 is fixed to one end of the guide rod 28416 and the long rod 28413. A spring 28418 is sleeved on one end of the guide rod 28416 located in the inner cavity of the housing 2841, and the two ends of the spring 28418 are respectively fixed to the surface of the connecting block 28417 and the inner wall of the housing 2841.

[0082] The rotating tube 28410 is rotatably connected to the housing 2841 via bearings. With the setting of steel balls 28415 and guide grooves 28414, when the slide table 23 moves back and forth with the piston rod, it can press the long rod 28413 and guide rod 28416 to move. The movement of the long rod 28413 causes the steel balls 28415 to move within the guide grooves 28414, thereby causing the rotating tube 28410 to rotate. This causes the ratchet 28411 and the second bevel gear 28412 to rotate by a certain angle, thus realizing the rotation of the first bevel gear 2843. It takes multiple rotations of the second bevel gear 28412 to make the first bevel gear 2843 rotate once, causing the protrusion 2844 to press the roller 2849 and the square rod 2846 to move.

[0083] With the ratchet 28411 in place, when the long rod 28413 moves into the housing 2841, the rotation of the rotating tube 28410 can drive the second bevel gear 28412 to rotate. When the long rod 28413 moves out of the housing 2841, the rotation of the rotating tube 28410 will not cause the second bevel gear 28412 to rotate, and thus will not cause the first bevel gear 2843 to rotate. Based on the moving frequency and stroke of the long rod 28413, the frequency of the protrusion 2844 pressing the roller 2849 and the square rod 2846 can be dynamically triggered. With the cooperation of the guide rod 28416 and the connecting block 28417 and the long rod 28413, the long rod 28413 can be prevented from rotating during movement.

[0084] With the spring 28418 in place, when the long rod 28413 moves into the housing 2841 and drives the connecting block 28417 to move, it undergoes tensile deformation, providing a force for the reset of the long rod 28413, the connecting block 28417 and the guide rod 28416, while also buffering the slide table 23.

[0085] The inner wall of the groove 265 is provided with a sliding groove 2829. A slider 28210 is fixed on the surface of the drive column 2826 and slides in the sliding groove 2829. The slider 28210 and the sliding groove 2829 guide and limit the drive column 2826 and the valve core 2824 so that they will not rotate when moving.

[0086] Example 4, refer to Figures 21-28 This is the fourth embodiment of the present invention, which is based on the first three embodiments.

[0087] Specifically, it also includes a feeding and disassembly assembly component 3, which is set on one side of the packaging equipment 1. It includes a machine base 31, on which a feeding module 32, a CCD detection module 33, a disassembly assembly module 34, a material frame 35, and a disassembly robot 36 are respectively installed. All of these are existing technologies, and the working principle of this part is also existing technology. Those skilled in the art can clearly understand it, so it will not be described in detail here.

[0088] Specifically, it also includes a labeling and desiccant placement mechanism 4, which is located on one side of the packaging equipment 1 and the feeding and disassembly assembly 3. This includes a second machine 41 located on one side of the first machine 31. The second machine 41 is equipped with a labeling machine module 42, a desiccant feeding module 43, a transfer robot 44, and an NG unloading module 45, all of which are existing technologies. The working principle of this part is also existing technology, which can be clearly understood by those skilled in the art, and will not be described in detail here.

[0089] During use, the clamping assembly 2 is installed and prevented from loosening: the bolt 261 of the cylinder 22 is passed through the mounting hole on the fixing plate 21, the drive column 2826 is squeezed and drives the valve core 2824 to move, opening the lubrication pipe; the nut 271 is put into the through groove 262 of the bolt 261, and a slight rotation makes the thread 272 engage with the thread groove 263. The limit block 274 is inserted into the limit groove 264 under the action of the spring piece 278, preventing the nut 271 from reversing, thus completing the quick installation; when disassembling, the unlocking ring 275 is moved to squeeze the limit block 274 out of the limit groove 264, and the nut 271 is rotated in the opposite direction to the position of the through groove 262, and the nut 271 can be removed.

[0090] Automatic lubrication and dynamic control: Lubricating oil in the oil tank 281 enters the ring 2831 of the lubricating component 283 through the opened valve core 2824 and the bend pipe. The steel ball 2835 of the column 2833 rotates with the piston rod, spreading the lubricating oil absorbed by the sponge column 2836 onto the surface of the piston rod to achieve continuous lubrication. The piston rod moves and pushes the long rod 28413 with the cooperation of the slide table 23. Through the steel ball 28415 and the guide groove 28414, the rotating tube 28410 is driven to rotate. The ratchet 28411 and the bevel gear drive cause the protrusion 2844 to squeeze the piston 2847, intermittently squeezing out lubricating oil to the sponge column 2836 to achieve increased lubrication. When the bolt 261 is removed, the valve core 2824 resets and closes the pipeline to stop the oil supply.

[0091] Fully automated packaging process: The feeding module 32 sends the wafer box to the CCD inspection module 33. After the qualified wafer box is disassembled by the disassembly robot 36, it is transferred to the labeling machine module 42 for labeling and the desiccant feeding module 43 for desiccant. Then, the handling mechanism 111 sends the wafer box to the packaging table 16. The bag picking mechanism 13 picks up the bag, the bag opening component 17 opens the bag, the wafer box pushing mechanism 11 drives the clamping component 2 to push the wafer box into the bag, the heat sealing mechanism 18 heat seals, and the bag sorting component 19 sorts the packaging bag to complete the fully automated packaging.

[0092] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A bagging apparatus for semiconductor wafer cassettes, characterized by: The utility model relates to a packaging equipment (1) which comprises a wafer box pushing mechanism (11) for pushing a clamped semiconductor wafer box into a bagging bag with bag opening completed. The clamping assembly (2) is fixed to the wafer box pushing mechanism (11) and comprises a fixed plate (21) fixed to the pushing end of the wafer box pushing mechanism (11), one side of the fixed plate (21) is provided with a pneumatic cylinder (22), one side of the pneumatic cylinder (22) is fixed with a bolt piece (26), the bolt piece (26) is matched with the fixed plate (21), a nut piece (27) is installed on the bolt piece (26), a lubricating mechanism (28) is installed on the pneumatic cylinder (22) and one of the bolt pieces (26), the lubricating mechanism (28) is matched with the fixed plate (21) and a sliding table (23) respectively, and the bolt piece (26) comprises a bolt (261) fixed to one side of the pneumatic cylinder (22). The lubricating mechanism (28) comprises an oil tank (281) fixed to the top of the pneumatic cylinder (22), a switch piece (282) is installed on the oil tank (281) and one of the bolts (261), the switch piece (282) is matched with the fixed plate (21), a lubricating piece (283) and a trigger piece (284) are respectively installed on the pneumatic cylinder (22), and the lubricating piece (283) is matched with the switch piece (282) and the trigger piece (284) respectively. The sliding table (23) is fixed to the piston rod end of the pneumatic cylinder (22) and slides on the pneumatic cylinder (22), one side of the sliding table (23) is fixed with a connecting plate (24), one end of the connecting plate (24) is fixed with a clamping block (25), one side of the fixed plate (21) is provided with a mounting hole matched with the bolt (261), through grooves (262) and screw grooves (263) are respectively formed in the surface of the bolt (261), the through grooves (262) and the screw grooves (263) are communicated, a limiting groove (264) is formed in the inner wall of the through grooves (262), a groove body (265) is formed in the interior of the bolt (261), and the through grooves (262), the screw grooves (263) and the limiting groove (264) are matched with the nut piece (27).

2. The bagging apparatus for semiconductor wafer boxes of claim 1, wherein: The nut piece (27) comprises a nut (271) sleeved on the surface of the bolt (261), a screw thread (272) is fixed to the inner wall of the nut (271), the screw thread (272) is matched with the through grooves (262) and the screw grooves (263) respectively, a sleeve ring (273) is fixed to one side of the nut (271), a limiting block (274) and an unlocking ring (275) slide on the sleeve ring (273) respectively, and the limiting block (274) is matched with the limiting groove (264) and the unlocking ring (275) respectively.

3. The bagging apparatus for semiconductor wafer boxes of claim 2, wherein: ​ 4. The bagging apparatus for semiconductor wafer boxes of claim 3, wherein: The sleeve ring (273) is internally provided with a square groove (276), the limiting block (274) is fixedly provided with a square block (277) on the surface, and the square block (277) slides in the square groove (276), the surface of the square block (277) and the inner wall of the square groove (276) are fixedly provided with elastic sheets (278), the surface of the sleeve ring (273) is provided with an anti-dropping groove (279), the inner wall of the unlocking ring (275) is fixedly provided with an anti-dropping block (2710), and the anti-dropping block (2710) slides in the anti-dropping groove (279), the surface of the unlocking ring (275) and the surface of the nut (271) are fixedly provided with elastic sheets (2711).

5. The bagging apparatus for semiconductor wafer boxes of claim 3, wherein: The limiting block (274) is provided with a face one (2741), a face two (2742) and a face three (2743) at one end, the face one (2741) and the face two (2742) are matched with the bolt (261), the face three (2743) is matched with the limiting groove (264) and the bolt (261), and the other end of the limiting block (274) is provided with an unlocking groove (2744) matched with the unlocking ring (275).

6. The bagging apparatus for semiconductor wafer boxes of claim 1, wherein: The packaging equipment (1) further comprises a frame body (110), the frame body (110) is respectively provided with a bag warehouse assembly (12), a bag taking mechanism (13), an edge removing assembly (14), a detection mechanism (15), a packaging table (16), a bag opening assembly (17), a heat sealing mechanism (18), a bag arranging assembly (19) and a carrying mechanism (111), and the wafer box pushing mechanism (11) is installed on the frame body (110).

7. The bagging apparatus for semiconductor wafer boxes of claim 1, wherein: The on-off piece (282) comprises a first elbow pipe (2821) communicated with one side of the oil tank (281), one end of the first elbow pipe (2821) is fixed on one of the bolts (261), and the first elbow pipe (2821) is communicated with the groove body (265), the second elbow pipe (2822) is fixed on the cylinder (22), one end of the second elbow pipe (2822) is fixed on one of the bolts (261), and the second elbow pipe (2822) is communicated with the groove body (265), the other end of the second elbow pipe (2822) is communicated with a communication pipe (2823), the two ends of the communication pipe (2823) are respectively communicated with the lubricating pieces (283), the valve core (2824) slides in the groove body (265), the valve hole (2825) is formed in the valve core (2824), the driving column (2826) slides on the bolt (261), and the driving column (2826) is fixed on the surface of the valve core (2824), the driving column (2826) is matched with the fixed plate (21), the elastic sheets (2827) are fixed between the surface of the valve core (2824) and the inner wall of the groove body (265), and the one-way valve (2828) is arranged at the end of the first elbow pipe (2821) close to the oil tank (281).

8. The bagging apparatus for semiconductor wafer boxes of claim 7, wherein: The lubricating part (283) comprises a ring sleeve (2831) fixed to one side of the cylinder (22), and the ring sleeve (2831) is communicated with one end of the communicating pipe (2823), a moving groove (2832) is arranged on the inner wall of the ring sleeve (2831), a column body (2833) is slidably arranged in the moving groove (2832), a channel (2834) is arranged in the column body (2833), one end of the column body (2833) extends to the outside of the ring sleeve (2831) and is embedded with a steel ball (2835), the channel (2834) is filled with a sponge column (2836), the surface of the sponge column (2836) is in contact with the surface of the steel ball (2835), a positioning groove (2837) is arranged on the inner wall of the moving groove (2832), a positioning block (2838) is fixed to the surface of the column body (2833) and slidably arranged in the positioning groove (2837), and a spring sheet four (2839) is fixed between the surface of the positioning block (2838) and the inner wall of the positioning groove (2837).

9. The bagging apparatus for semiconductor wafer boxes of claim 8, wherein: The triggering part (284) comprises a shell (2841) fixed to one side of the cylinder (22) through a supporting plate, a rotating column (2842) is rotatably arranged on the shell (2841), a first bevel gear (2843) is fixedly arranged on one end surface of the rotating column (2842), a protruding block (2844) is fixedly arranged on one side of the first bevel gear (2843), a cylinder (2845) is fixed to one side of the shell (2841) through a supporting rod, the cylinder (2845) is communicated with one end of the second elbow pipe (2822) away from the bolt (261), a square rod (2846) is slidably arranged on the shell (2841) and the cylinder (2845), a piston (2847) is slidably arranged on the inner wall of the cylinder (2845), and one end of the square rod (2846) is fixed to the piston (2847) in the inner cavity of the cylinder (2845), a spring one (2848) is sleeved on one end surface of the square rod (2846), and the two ends of the spring one (2848) are fixed to the surface of the piston (2847) and the inner wall of the cylinder (2845) respectively, and a roller (2849) is fixed to the other end of the square rod (2846), and the roller (2849) is matched with the protruding block (2844).

10. The bagging apparatus for semiconductor wafer boxes of claim 9, wherein: The shell (2841) rotates on the pipe (28410), one end of the pipe (28410) is fixed with a ratchet (28411) in the cavity of the shell (2841), one side of the outer ring of the ratchet (28411) is fixed with a second bevel gear (28412), and the second bevel gear (28412) is engaged with the first bevel gear (2843), the pipe (28410) and the second bevel gear (28412) are slidably provided with a long rod (28413), the surface of the long rod (28413) is provided with a guide groove (28414), the inner wall of the pipe (28410) is embedded with a steel ball (28415), and the steel ball (28415) slides in the guide groove (28414), the shell (2841) is slidably provided with a guide rod (28416), one end of the guide rod (28416) and the long rod (28413) is fixedly provided with a connecting block (28417), one end of the guide rod (28416) is sleeved with a spring two (28418) in the cavity of the shell (2841), and the two ends of the spring two (28418) are fixed to the surface of the connecting block (28417) and the inner wall of the shell (2841) respectively.

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