Product platform

Abstract

This invention belongs to the field of platform technology and discloses a product carrying platform. In this invention, the product carrying platform can control the horizontal movement of a carrier plate along the X-axis, the horizontal movement along the Y-axis, and the rotational movement around the Z-axis through a first motion mechanism and a second motion mechanism. This allows for precise control of the posture of the product placed on the carrier plate, thereby quickly and accurately adjusting the product to the target workstation. Since this invention only requires one layer of drive structure to give the product carrying platform three degrees of freedom of movement, it can significantly reduce the height of the product carrying platform, thereby reducing the longitudinal space occupied by the platform. This facilitates the compact design of the overall equipment structure and promotes the miniaturization and integration of packaging equipment.

Description

Technical Field

[0001] This invention relates to the field of platform technology, and more particularly to a product carrying platform. Background Technology

[0002] In the semiconductor manufacturing industry, packaging is a critical process in chip production, directly impacting chip performance and reliability. The product carrier platform used to hold the wafers is a core component of the packaging equipment, and its motion precision and structural rationality play a decisive role in the stability and efficiency of the packaging process.

[0003] As semiconductor packaging technology advances towards higher density and miniaturization, the requirements for wafer positioning accuracy during the packaging process are becoming increasingly stringent. To meet the wafer's position adjustment needs during packaging operations, the product carrier platform typically needs to possess multi-degree-of-freedom motion capabilities. Among these, horizontal movement along the X-axis, horizontal movement along the Y-axis, and rotational movement around the Z-axis (i.e., three-degree-of-freedom motion) are the fundamental functions for achieving precise wafer positioning. Through the coordinated movement of these three degrees of freedom, it is ensured that the wafer can quickly and accurately reach the target workstation, thereby matching the processing requirements of the packaging equipment and ensuring the smooth progress of subsequent processes.

[0004] In existing technologies, to achieve the aforementioned three degrees of freedom motion, the structural design of the product's support platform often adopts a "layered stacking" approach. Specifically, existing technologies typically use an X-axis sliding slide as a base, and then stack a Y-axis sliding slide on top of it to achieve two-dimensional movement of the platform in the XY plane through the combination of the two slides. At the same time, to meet the rotation requirements around the Z-axis, a rotary platform composed of crossed roller bearings needs to be further stacked on top of the above two slides, thus ultimately forming a three-layer motion platform structure.

[0005] However, since the X-axis moving slide, Y-axis moving slide, and cross roller bearing rotary platform each have a certain height, the overall height of the product carrying platform formed by the stacking of the three moving platforms is relatively high, thus occupying more longitudinal space inside the packaging equipment. This limits the compact design of the overall structure of the equipment and is not conducive to the development of packaging equipment towards miniaturization and integration. Summary of the Invention

[0006] The purpose of this invention is to provide a product carrying platform to solve the problem that the overall height of the product carrying platform formed by the stacking of three motion platforms is relatively high, thus occupying more vertical space inside the packaging equipment, thereby limiting the compact design of the overall structure of the equipment and hindering the development of packaging equipment towards miniaturization and integration.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] The product platform includes:

[0009] A carrier plate and a base, wherein a first motion mechanism is mounted on one side of the carrier plate along the X-axis, and a second motion mechanism is mounted on one side of the carrier plate along the Y-axis; wherein:

[0010] The first motion mechanism includes a first plate, a second plate, a first rotating shaft, and a first drive module. The first plate is slidably connected to the base along the X-axis direction. The first drive module is configured to drive the first plate to move along the X-axis direction. The second plate is rotatably connected to the first plate through the first rotating shaft. The axis of the first rotating shaft extends along the Z-axis direction. The carrier plate is slidably connected to the second plate along a first direction. The X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other.

[0011] The second motion mechanism includes a third plate, a fourth plate, a second rotating shaft, and a second drive module. The third plate is slidably connected to the base along the Y-axis direction. The second drive module is configured to drive the third plate to move along the Y-axis direction. The fourth plate is rotatably connected to the third plate through the second rotating shaft. The axis of the second rotating shaft extends along the Z-axis direction. The carrier plate is slidably connected to the fourth plate along a second direction.

[0012] The carrier plate has an upright position and a deflected position after rotating around the Z-axis. In the upright position, the first direction is the Y-axis direction and the second direction is the X-axis direction.

[0013] Preferably, the carrier plate is provided with two second motion mechanisms on one side along the Y-axis direction, and the two second motion mechanisms are arranged at intervals along the X-axis direction.

[0014] Preferably, the transmission connection position between the first motion mechanism and the carrier plate is located on the side of the carrier plate away from the second motion mechanism along the Y-axis direction.

[0015] Preferably, a sliding stage is installed between the carrier plate and the base, the sliding stage allowing the carrier plate to slide relative to the base in any direction perpendicular to the Z-axis.

[0016] Preferably, the sliding stage includes:

[0017] A support base is fixedly connected to the base and supported between the carrier plate and the base; the support base has a cavity inside.

[0018] A sliding block is fixedly connected to the carrier plate and housed in the cavity;

[0019] A first sliding plate is housed in the cavity and supported along the Z-axis between the top of the sliding block and the top wall of the cavity. A plurality of first balls are embedded inside the first sliding plate, and the first balls abut against the top of the sliding block and the top wall of the cavity.

[0020] The second slide plate is housed in the cavity and supported along the Z-axis between the bottom of the sliding block and the bottom wall of the cavity. The second slide plate is fitted with a plurality of second balls, which abut against the bottom of the sliding block and the bottom wall of the cavity.

[0021] Preferably, a plurality of sliding stages are installed between the carrier plate and the base.

[0022] Preferably, the first drive module includes:

[0023] The first connecting plate is fixedly connected to the first plate.

[0024] The first driving element is configured to drive the first connecting plate to move along the X-axis direction.

[0025] Preferably, the second drive module includes:

[0026] The second connecting plate is fixedly connected to the third plate.

[0027] The second driving element is configured to drive the second connecting plate to move along the Y-axis direction.

[0028] Preferably, the base has an internal cavity, and the carrier plate is disposed in the cavity;

[0029] The base is provided with a first through hole, the first connecting plate passes through the first through hole along the X-axis and is inserted into the receiving cavity, the first plate is fixedly connected to one end of the first connecting plate inserted into the receiving cavity, and a first baffle is fixedly connected to one end of the first connecting plate extending out of the base, and a first corrugated pipe is installed between the first baffle and the base, the first corrugated pipe is sleeved on the outer periphery of the first connecting plate and covers the outer periphery of the first through hole;

[0030] The base is provided with a second through hole, the second connecting plate passes through the second through hole along the Y-axis and is inserted into the receiving cavity, the third plate is fixedly connected to one end of the second connecting plate inserted into the receiving cavity, one end of the second connecting plate extending out of the base is fixedly connected to a second baffle, a second corrugated pipe is installed between the second baffle and the base, the second corrugated pipe is sleeved on the outer periphery of the second connecting plate and covers the outer periphery of the second through hole.

[0031] Preferably, the first motion mechanism further includes a first displacement detector, which is configured to detect the motion stroke of the first connecting plate;

[0032] The second motion mechanism further includes a second displacement detector configured to detect the motion stroke of the second connecting plate.

[0033] The beneficial effects of this invention are:

[0034] In this invention, the product carrier platform can control the horizontal movement of the carrier plate along the X-axis, the horizontal movement along the Y-axis, and the rotational movement around the Z-axis through the first and second motion mechanisms. This allows for precise control of the product's position and orientation on the carrier plate, enabling the product to be quickly and accurately positioned at the target workstation. Since this invention requires only one drive structure to give the product carrier platform three degrees of freedom, it significantly reduces the height of the product carrier platform, thereby reducing its longitudinal space requirements. This facilitates a more compact overall design and promotes the miniaturization and integration of packaging equipment. Attached Figure Description

[0035] Figure 1 This is one of the structural schematic diagrams of the product carrying platform in the embodiments of the present invention;

[0036] Figure 2 This is the second schematic diagram of the product carrier platform in this embodiment of the invention;

[0037] Figure 3 This is a schematic diagram of the carrier plate in an embodiment of the present invention;

[0038] Figure 4 This is a schematic diagram of the structure of the carrier plate, the first motion mechanism and the second motion mechanism in an embodiment of the present invention;

[0039] Figure 5 This is a top view of the carrier plate, the first motion mechanism, and the second motion mechanism in an embodiment of the present invention;

[0040] Figure 6 This is a schematic diagram of the sliding table in an embodiment of the present invention;

[0041] Figure 7 It is along Figure 6 Sectional view of line AA in the middle;

[0042] Figure 8 This is one of the structural schematic diagrams of the sliding table excluding the support base in an embodiment of the present invention;

[0043] Figure 9This is the second schematic diagram of the sliding table structure excluding the support base in this embodiment of the invention.

[0044] In the picture:

[0045] 1. Carrier plate; 11. Third slide rail; 12. Fourth slide rail;

[0046] 2. Base; 21. Receiving cavity; 22. First through hole; 23. Second through hole; 24. First slide rail; 25. Second slide rail;

[0047] 3. First motion mechanism; 31. First plate; 32. Second plate; 33. First rotating shaft; 34. First drive module; 341. First connecting plate; 342. First drive component; 343. First baffle; 344. First bellows; 35. First displacement detector;

[0048] 4. Second motion mechanism; 41. Third plate; 42. Fourth plate; 43. Second rotating shaft; 44. Second drive module; 441. Second connecting plate; 442. Second drive component; 443. Second baffle; 444. Second bellows; 45. Second displacement detector;

[0049] 5. Sliding platform; 51. Support base; 511. Cavity; 512. Through hole; 52. Sliding block; 521. Boss; 53. First sliding plate; 531. First ball bearing; 54. Second sliding plate; 541. Second ball bearing. Detailed Implementation

[0050] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0051] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0052] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0053] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0054] Please see Figures 1 to 9 This embodiment provides a product carrier platform, which includes a carrier plate 1 and a base 2. The carrier plate 1 is used to hold products, specifically, in this embodiment, the carrier plate 1 is used to hold wafers. Moreover, a first motion mechanism 3 is installed on one side of the carrier plate 1 along the X-axis, and a second motion mechanism 4 is installed on one side of the carrier plate 1 along the Y-axis.

[0055] The first motion mechanism 3 includes a first plate 31, a second plate 32, a first rotating shaft 33, and a first drive module 34. The first plate 31 is slidably connected to the base 2 along the X-axis direction. The first drive module 34 is configured to drive the first plate 31 to move along the X-axis direction. The second plate 32 is rotatably connected to the first plate 31 through the first rotating shaft 33. The axis of the first rotating shaft 33 extends along the Z-axis direction. The carrier plate 1 is slidably connected to the second plate 32 along the first direction. The X-axis direction, Y-axis direction, and Z-axis direction are perpendicular to each other.

[0056] The second motion mechanism 4 includes a third plate 41, a fourth plate 42, a second rotating shaft 43, and a second drive module 44. The third plate 41 is slidably connected to the base 2 along the Y-axis direction. The second drive module 44 is configured to drive the third plate 41 to move along the Y-axis direction. The fourth plate 42 is rotatably connected to the third plate 41 through the second rotating shaft 43. The axis of the second rotating shaft 43 extends along the Z-axis direction. The carrier plate 1 is slidably connected to the fourth plate 42 along the second direction.

[0057] As shown above, the carrier plate 1 has an upright orientation and a deflected orientation after rotating around the Z-axis. In the upright orientation, the first direction is the Y-axis direction and the second direction is the X-axis direction.

[0058] Thus, with the help of the first motion mechanism 3 and the second motion mechanism 4, the carrier plate 1 can achieve horizontal movement along the X-axis, horizontal movement along the Y-axis, and rotational movement around the Z-axis.

[0059] Specifically, the first plate 31 and the second plate 32 have a first initial position and a second initial position, respectively. When the first plate 31 is in the first initial position and the second plate 32 is in the second initial position, the carrier plate 1 is in an upright position.

[0060] Based on the foregoing, in the upright position, the first direction is the Y-axis direction, and the second direction is the X-axis direction. Therefore, when the first drive module 34 drives the first plate 31 to move along the X-axis direction, the carrier plate 1 can move relative to the second motion mechanism 4 along the X-axis direction, thereby adjusting the position of the carrier plate 1 in the X-axis direction. Similarly, when the second drive module 44 drives the third plate 41 to move along the Y-axis direction, the carrier plate 1 can move relative to the first motion mechanism 3 along the Y-axis direction, thereby adjusting the position of the carrier plate 1 in the Y-axis direction.

[0061] When the first drive module 34 drives the first plate 31 to move along the X-axis, and the second drive module 44 drives the third plate 41 to move along the Y-axis, the carrier plate 1 can slide relative to the second plate 32 along the first direction and relative to the fourth plate 42 along the second direction. Moreover, the second plate 32 can rotate relative to the first plate 31 around the axis of the first rotating shaft 33, and the fourth plate 42 can rotate relative to the third plate 41 around the axis of the second rotating shaft 43. Therefore, this embodiment can control the rotation direction and rotation angle of the carrier plate 1 around the Z-axis by controlling the first plate 31 to move forward or backward along the X-axis and controlling its movement stroke, and controlling the third plate 41 to move forward or backward along the Y-axis and controlling its movement stroke.

[0062] Based on the above, in this embodiment, the product carrier platform can control the horizontal movement of the carrier plate 1 along the X-axis, the horizontal movement along the Y-axis, and the rotational movement around the Z-axis through the first motion mechanism 3 and the second motion mechanism 4, thereby precisely controlling the posture of the product placed on the carrier plate 1 and quickly and accurately adjusting the product to the target workstation. Since this embodiment only requires one layer of drive structure to enable the product carrier platform to have three degrees of freedom of movement, this embodiment can significantly reduce the height of the product carrier platform, thereby reducing the longitudinal space occupied by the product carrier platform, which is conducive to the compact design of the overall structure of the equipment, and thus facilitates the development of packaging equipment towards miniaturization and integration.

[0063] It is understandable that bearings are installed at both the first rotating shaft 33 and the second rotating shaft 43 to ensure smooth rotation.

[0064] Furthermore, it is worth noting that in this embodiment, two second motion mechanisms 4 are provided on one side of the carrier plate 1 along the Y-axis direction. The two second motion mechanisms 4 are arranged at intervals along the X-axis direction. Thus, when it is necessary to drive the carrier plate 1 to rotate around the Z-axis, according to the required rotation direction, the third plate 41 of one of the second motion mechanisms 4 moves backward along the Y-axis direction, and the third plate 41 of the other second motion mechanism 4 moves forward along the Y-axis direction, which facilitates driving the carrier plate 1 to rotate.

[0065] Moreover, the transmission connection position between the first motion mechanism 3 and the carrier plate 1 is located on the side of the carrier plate 1 away from the second motion mechanism 4 along the Y-axis direction. Therefore, when it is necessary to drive the carrier plate 1 to rotate around the Z-axis, the first motion mechanism 3 can apply a force to the carrier plate 1 to rotate on the side of the carrier plate 1 away from the second motion mechanism 4 along the Y-axis direction, thereby further facilitating the rotation of the carrier plate 1.

[0066] For example, in this embodiment, the base 2 is provided with a first slide rail 24 and a second slide rail 25. The first slide rail 24 extends along the X-axis direction and the second slide rail 25 extends along the Y-axis direction. Each of the two second motion mechanisms 4 is provided with a corresponding second slide rail 25. The first plate 31 is slidably connected to the first slide rail 24 and the third plate 41 is slidably connected to the second slide rail 25, thereby realizing that the first plate 31 is slidably connected to the base 2 along the X-axis direction and the third plate 41 is slidably connected to the base 2 along the Y-axis direction.

[0067] Furthermore, a third slide rail 11 and a fourth slide rail 12 are fixedly connected to the carrier plate 1. Each of the two second motion mechanisms 4 is correspondingly provided with a fourth slide rail 12. The third slide rail 11 extends along a first direction, and the fourth slide rail 12 extends along a second direction. The carrier plate 1 is slidably connected to the second plate 32 via the third slide rail 11, and to the fourth plate 42 via the fourth slide rail 12. Based on the above, in the upright position, the third slide rail 11 extends along the Y-axis, and the fourth slide rail 12 extends along the X-axis, with the center lines of the two fourth slide rails 12 coinciding. This allows the carrier plate 1 to be slidably connected to the second plate 32 along the first direction and to the fourth plate 42 along the second direction.

[0068] Furthermore, a sliding table 5 is installed between the carrier plate 1 and the base 2. The sliding table 5 allows the carrier plate 1 to slide relative to the base 2 in any direction perpendicular to the Z-axis. That is, the sliding table 5 allows the carrier plate 1 to slide relative to the base 2 in any horizontal direction. Thus, the sliding table 5 can support the carrier plate 1 on the one hand, and ensure the stability and smoothness of the carrier's movement on the other hand, avoiding problems such as jamming or deviation.

[0069] For example, the sliding table 5 includes a support base 51, a sliding block 52, a first sliding plate 53, and a second sliding plate 54. The support base 51 is fixedly connected to the base 2 and supported between the carrier plate 1 and the base 2. A cavity 511 is provided inside the support base 51. The sliding block 52 is fixedly connected to the carrier plate 1 and accommodated within the cavity 511. Specifically, a boss 521 is provided on the top of the sliding block 52, and a through hole 512 is provided on the top of the support base 51. The boss 521 protrudes through the through hole 512 and is fixedly connected to the carrier plate 1. It is understood that the size of the through hole 512 is larger than the size of the boss 521, thereby allowing the boss 521 to move in any horizontal direction within the boss 521.

[0070] As described above, the first sliding plate 53 is housed in the cavity 511 and supported along the Z-axis between the top of the sliding block 52 and the top wall of the cavity 511. A plurality of first ball bearings 531 are embedded inside the first sliding plate 53, and the first ball bearings 531 abut against the top of the sliding block 52 and the top wall of the cavity 511. The second sliding plate 54 is housed in the cavity 511 and supported along the Z-axis between the bottom of the sliding block 52 and the bottom wall of the cavity 511. A plurality of second ball bearings 541 are embedded inside the second sliding plate 54, and the second ball bearings 541 abut against the bottom of the sliding block 52 and the bottom wall of the cavity 511.

[0071] Therefore, when the carrier plate 1 moves relative to the base 2, the first ball 531 rolls along the top cavity wall of the cavity 511, and the second ball 541 rolls along the bottom cavity wall of the cavity 511. The first ball 531 and the second ball 541 cooperate to reduce friction and make the sliding smoother.

[0072] It is worth noting that several sliding platforms 5 are installed between the carrier plate 1 and the base 2, which can fully support the carrier plate 1, thereby ensuring the stability of the carrier plate 1 during movement, and making the movement of the carrier plate 1 more stable and precise.

[0073] For example, in this embodiment, six sliding platforms 5 are installed between the carrier plate 1 and the base 2, and the six sliding platforms 5 are arranged around the center of the carrier plate 1. Of course, in other optional embodiments, other numbers of sliding platforms 5 may be provided, and the positions of each sliding platform 5 may be arranged in other ways, depending on factors such as the size, weight and movement requirements of the carrier plate 1. This embodiment does not impose specific limitations on this.

[0074] Furthermore, the first drive module 34 includes a first connecting plate 341 and a first drive member 342. The first connecting plate 341 is fixedly connected to the first plate 31, and the first drive member 342 is configured to drive the first connecting plate 341 to move along the X-axis direction, thereby driving the first plate 31 to move along the X-axis direction.

[0075] The first driving component 342 can be a combination structure of a motor and a lead screw. The rotation of the motor drives the lead screw to rotate, which in turn drives the first connecting plate 341, which is threaded with the lead screw, to move linearly along the X-axis. This embodiment does not impose specific limitations on this.

[0076] Similarly, the second drive module 44 includes a second connecting plate 441 and a second drive member 442. The second connecting plate 441 is fixedly connected to the third plate 41. The second drive member 442 is configured to drive the second connecting plate 441 to move along the Y-axis direction, thereby driving the third plate 41 to move along the Y-axis direction.

[0077] The second driving component 442 can also adopt a similar combination structure of motor and lead screw, so that the second connecting plate 441 can move forward or backward in the Y-axis direction by the forward and reverse rotation of the motor. This embodiment does not impose any specific restrictions on this.

[0078] In addition, the first motion mechanism 3 also includes a first displacement detector 35, which is configured to detect the motion stroke of the first connecting plate 341, thereby detecting the movement stroke of the first plate 31 in the X-axis direction.

[0079] Accordingly, the second motion mechanism 4 also includes a second displacement detector 45, which is configured to detect the motion stroke of the second connecting plate 441, thereby detecting the movement stroke of the third plate 41 in the Y-axis direction.

[0080] As described above, this embodiment enables precise control of the movement of the carrier plate 1 by setting the first displacement detector 35 and the second displacement detector 45, thereby allowing for more accurate adjustment of the product's posture.

[0081] For example, in this embodiment, the first displacement detector 35 and the second displacement detector 45 are both grating ruler detection structures. Since the specific structure and working principle of the first displacement detector 35 and the second displacement detector 45 are existing technologies, this embodiment will not elaborate on them.

[0082] Additionally, it is worth noting that since the wafer needs to be in a vacuum-sealed environment during the packaging process, the base 2 has an internal accommodating cavity 21, and the carrier plate 1 is disposed within the accommodating cavity 21. Furthermore, the packaging equipment also includes a cover, which, in actual production, covers the base 2, thereby forming a vacuum-sealed cavity 21.

[0083] Based on the above, a first through hole 22 is provided on the base 2, the first connecting plate 341 passes through the first through hole 22 along the X-axis direction and is inserted into the receiving cavity 21, and the first plate 31 is fixedly connected to one end of the first connecting plate 341 inserted into the receiving cavity 21. That is, the first plate 31, the second plate 32 and the first rotating shaft 33 are all provided in the receiving cavity 21.

[0084] Furthermore, a first baffle 343 is fixedly connected to one end of the first connecting plate 341 extending from the base 2. A first corrugated pipe 344 is installed between the first baffle 343 and the base 2. The first corrugated pipe 344 is sleeved on the outer periphery of the first connecting plate 341 and covers the outer periphery of the first perforation 22. The first corrugated pipe 344 can seal the first perforation 22, thereby sealing and protecting the internal space of the base 2. Moreover, when the first connecting plate 341 moves along the X-axis, the first corrugated pipe 344 can undergo expansion and contraction deformation to prevent obstruction of the movement of the first connecting plate 341, thereby ensuring that the first drive module 34 can drive the first plate 31 to move along the X-axis.

[0085] Correspondingly, a second through hole 23 is also provided on the base 2. The second connecting plate 441 passes through the second through hole 23 along the Y-axis and is inserted into the receiving cavity 21. The third plate 41 is fixedly connected to one end of the second connecting plate 441 inserted into the receiving cavity 21. That is, the third plate 41, the fourth plate 42 and the second rotating shaft 43 are also provided in the receiving cavity 21.

[0086] Furthermore, a second baffle 443 is fixedly connected to one end of the second connecting plate 441 that extends out of the base 2. A second corrugated pipe 444 is installed between the second baffle 443 and the base 2. The second corrugated pipe 444 is sleeved on the outer periphery of the second connecting plate 441 and covers the outer periphery of the second perforation 23. The second corrugated pipe 444 can seal the second perforation 23, thereby sealing and protecting the internal space of the base 2. Moreover, when the second connecting plate 441 moves along the Y-axis, the second corrugated pipe 444 can expand and contract to prevent obstruction of the movement of the second connecting plate 441, thereby ensuring that the second drive module 44 can drive the third plate 41 to move along the Y-axis.

[0087] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A product carrier platform, characterized in that, include: A carrier plate (1) and a base (2), wherein a first motion mechanism (3) is mounted on one side of the carrier plate (1) along the X-axis, and a second motion mechanism (4) is mounted on one side of the carrier plate (1) along the Y-axis; wherein: The first motion mechanism (3) includes a first plate (31), a second plate (32), a first rotating shaft (33), and a first drive module (34). The first plate (31) is slidably connected to the base (2) along the X-axis direction. The first drive module (34) is configured to drive the first plate (31) to move along the X-axis direction. The second plate (32) is rotatably connected to the first plate (31) through the first rotating shaft (33). The axis of the first rotating shaft (33) extends along the Z-axis direction. The carrier plate (1) is slidably connected to the second plate (32) along a first direction. The X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other. The second motion mechanism (4) includes a third plate (41), a fourth plate (42), a second rotating shaft (43), and a second drive module (44). The third plate (41) is slidably connected to the base (2) along the Y-axis direction. The second drive module (44) is configured to drive the third plate (41) to move along the Y-axis direction. The fourth plate (42) is rotatably connected to the third plate (41) through the second rotating shaft (43). The axis of the second rotating shaft (43) extends along the Z-axis direction. The carrier plate (1) is slidably connected to the fourth plate (42) along the second direction. The carrier plate (1) has an upright position and a deflected position after rotating around the Z-axis. In the upright position, the first direction is the Y-axis direction and the second direction is the X-axis direction.

2. The product carrier platform according to claim 1, characterized in that, The carrier plate (1) is provided with two second motion mechanisms (4) on one side along the Y-axis direction, and the two second motion mechanisms (4) are arranged at intervals along the X-axis direction.

3. The product carrier platform according to claim 2, characterized in that, The transmission connection position between the first motion mechanism (3) and the carrier plate (1) is located on the side of the carrier plate (1) away from the second motion mechanism (4) along the Y-axis direction.

4. The product carrier platform according to claim 1, characterized in that, A sliding table (5) is installed between the carrier plate (1) and the base (2), and the sliding table (5) allows the carrier plate (1) to slide relative to the base (2) in any direction perpendicular to the Z-axis.

5. The product carrier platform according to claim 4, characterized in that, The sliding table (5) includes: The support base (51) is fixedly connected to the base (2) and supported between the carrier plate (1) and the base (2). The support base (51) has a cavity (511) inside. A sliding block (52) is fixedly connected to the carrier plate (1) and housed in the cavity (511); The first sliding plate (53) is housed in the cavity (511) and supported along the Z-axis between the top of the sliding block (52) and the top cavity wall of the cavity (511). The first sliding plate (53) is fitted with a plurality of first balls (531), which abut against the top of the sliding block (52) and the top cavity wall of the cavity (511). The second slide plate (54) is housed in the cavity (511) and supported along the Z-axis between the bottom of the sliding block (52) and the bottom wall of the cavity (511). The second slide plate (54) is fitted with a plurality of second balls (541), which abut against the bottom of the sliding block (52) and the bottom wall of the cavity (511).

6. The product carrier platform according to claim 4, characterized in that, A plurality of sliding platforms (5) are installed between the carrier plate (1) and the base (2).

7. The product carrier platform according to claim 1, characterized in that, The first drive module (34) includes: The first connecting plate (341) is fixedly connected to the first plate (31); The first drive element (342) is configured to drive the first connecting plate (341) to move along the X-axis direction.

8. The product carrier platform according to claim 7, characterized in that, The second drive module (44) includes: The second connecting plate (441) is fixedly connected to the third plate (41); The second drive element (442) is configured to drive the second connecting plate (441) to move along the Y-axis direction.

9. The product carrier platform according to claim 8, characterized in that, The base (2) has an internal cavity (21), and the carrier plate (1) is disposed in the cavity (21); The base (2) is provided with a first through hole (22). The first connecting plate (341) passes through the first through hole (22) along the X-axis and is inserted into the receiving cavity (21). The first plate (31) is fixedly connected to one end of the first connecting plate (341) inserted into the receiving cavity (21). The first baffle (343) is fixedly connected to one end of the first connecting plate (341) extending out of the base (2). A first corrugated pipe (344) is installed between the first baffle (343) and the base (2). The first corrugated pipe (344) is sleeved on the outer periphery of the first connecting plate (341) and covers the outer periphery of the first through hole (22). The base (2) is provided with a second through hole (23). The second connecting plate (441) passes through the second through hole (23) along the Y-axis and is inserted into the receiving cavity (21). The third plate (41) is fixedly connected to one end of the second connecting plate (441) inserted into the receiving cavity (21). The second connecting plate (441) is fixedly connected to one end of the base (2) with a second baffle (443). A second corrugated pipe (444) is installed between the second baffle (443) and the base (2). The second corrugated pipe (444) is sleeved on the outer periphery of the second connecting plate (441) and covers the outer periphery of the second through hole (23).

10. The product carrier platform according to claim 8, characterized in that, The first motion mechanism (3) further includes a first displacement detector (35), which is configured to detect the motion stroke of the first connecting plate (341); The second motion mechanism (4) further includes a second displacement detector (45), which is configured to detect the motion stroke of the second connecting plate (441).

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