Suction head seat, suction mechanism, laminating head and packaging equipment

Abstract

The invention discloses a suction head seat, a suction mechanism, a laminating head and packaging equipment, and relates to the technical field of semiconductor manufacturing. The suction head seat comprises a first seat body, a second seat body and a locking piece. The first seat body is movably arranged on the second seat body. One of the first seat body and the second seat body is used for being connected with the main shaft, and the other is used for being connected with the suction jig. The locking piece is arranged on at least one of the first seat body and the second seat body, and the locking piece has a first state and a second state. Under the condition that the locking piece is in the first state, the first seat body can rotate around the first axis and the second axis relative to the second seat body; the first axis and the second axis intersect or are in different planes. When the locking piece is in the second state, the locking piece is connected with the first base body and the second base body and limits the first base body to rotate around the first axis and the second axis relative to the second base body. After the suction head seat is used for the fitting head, the suction plane can still be kept parallel to the fitting platform after the angle of the suction mechanism is switched.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically, to a suction head holder, a suction mechanism, a bonding head, and a packaging device. Background Technology

[0002] The bonding head is the core component of the mounting equipment. It integrates the functions of picking up, turning, and placing, and is mainly used to achieve the precision assembly of some small products such as camera components, fingerprint components, and chips.

[0003] The aforementioned functions of the bonding head are primarily achieved through the cooperation of the suction mechanism and the steering motor. In related technologies, the suction mechanism and the steering motor are connected via a main shaft. During the bonding process, the suction plane of the suction mechanism needs to be parallel to the bonding platform. Specifically, the bonding head in related technologies can adjust the angle between the main shaft and the bonding platform to compensate for assembly errors between the suction mechanism and the main shaft, thereby ensuring that the suction plane is parallel to the bonding platform. However, each time the angle of the suction mechanism is switched, the suction plane and the bonding platform will no longer be parallel, requiring readjustment of the main shaft to restore parallelism. Summary of the Invention

[0004] This invention discloses a suction head holder, a suction mechanism, a bonding head, and a packaging device to solve the technical problem of needing to readjust the spindle after the angle of the suction mechanism changes.

[0005] To solve the above problems, the present invention adopts the following technical solution: In a first aspect, some embodiments of this application provide a suction head holder. This suction head holder can be applied to a laminating head. The laminating head includes a spindle and a suction fixture, and the suction head holder is used to connect the spindle and the suction fixture. The suction head holder includes a first body, a second body, and a locking member. The first body is movably disposed on the second body. Of the first and second bodies, one is used to connect to the spindle, and the other is used to connect to the suction fixture. The locking member is disposed on at least one of the first and second bodies, and the locking member has a first state and a second state. When the locking member is in the first state, the first body can rotate relative to the second body about a first axis and a second axis; the first axis and the second axis intersect or are not planar. When the locking member is in the second state, the locking member is connected to both the first and second bodies, and restricts the rotation of the first body relative to the second body about the first and second axes.

[0006] The technical solution adopted in this invention can achieve the following beneficial effects: In the suction head holder provided in this application, exemplarily, a first seat body is used to connect to the main shaft. The first and second seats body can rotate relative to each other around a first axis and a second axis, adjusting the angle between them to compensate for assembly errors between the main shaft and the suction head holder, as well as assembly errors between the suction head holder and the suction fixture, thus ensuring that the suction plane of the suction fixture is perpendicular to the main shaft. In this way, after the main shaft and the bonding platform are adjusted to be perpendicular, each time the suction fixture is replaced or repaired, it is only necessary to adjust the suction plane of the suction fixture to be perpendicular to the main shaft via the suction head holder. Furthermore, even after changing the angle of the suction fixture by rotating the main shaft, it is still possible to ensure that the suction plane of the suction fixture is parallel to the bonding platform.

[0007] Secondly, this application provides a suction mechanism. The suction mechanism includes a suction fixture, specifically a suction head holder, as provided in this application. The suction mechanism is connected to the suction head holder.

[0008] In some designs, at least one of the suction fixture and the suction head holder is provided with a first magnetic element, and the suction fixture and the suction head holder are magnetically connected by the first magnetic element.

[0009] In some designs, the suction fixture and the suction head holder each have a connecting hole and a connecting protrusion, with the connecting protrusion located at least partially inside the connecting hole and sealingly engaging with it.

[0010] Thirdly, this application also provides a bonding head. This bonding head includes the suction mechanism provided in this application.

[0011] Fourthly, this application also provides a packaging device, which further includes the bonding head provided in this application. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a schematic diagram of the bonding head provided in some embodiments of this application; Figure 2 yes Figure 1 Enlarged view of point A in the middle; Figure 3 This is a schematic diagram of the suction mechanism provided in some embodiments of this application. Figure 1 ; Figure 4 This is an explosion illustration of the suction mechanism provided in some embodiments of this application. Figure 1 ; Figure 5 This is a schematic diagram of the suction mechanism provided in some embodiments of this application. Figure 2 ; Figure 6 This is an explosion illustration of the suction mechanism provided in some embodiments of this application. Figure 2 ; Figure 7 This is a partial structural schematic diagram of the suction mechanism provided in some embodiments of this application; Figure 8 This is a front view of the suction mechanism provided in some embodiments of this application; Figure 9 This is a top view of the suction mechanism provided in some embodiments of this application. Figure 1 ; Figure 10 This is a top view of the suction mechanism provided in some embodiments of this application. Figure 2 ; Figure 11 This is provided by some embodiments of this application. Figure 10 Schematic diagram of the cross section at point AA; Figure 12 This is provided by some embodiments of this application. Figure 10 Schematic diagram of the cross section at point BB; Figure 13 This is provided by some embodiments of this application. Figure 10 Schematic diagram of the cross section at point CC; Figure 14 This is provided by some embodiments of this application. Figure 10 Schematic diagram of the cross section at point DD; Figure 15 This is a schematic diagram of the first seat provided in some embodiments of this application. Figure 1 ; Figure 16 This is a schematic diagram of the first seat provided in some embodiments of this application. Figure 2 (The dashed line indicates the structure of the first channel); Figure 17 This is a schematic diagram of the second seat provided in some embodiments of this application. Figure 1 ; Figure 18 This is a schematic diagram of the second seat provided in some embodiments of this application. Figure 2 (The dashed line indicates the structure of the second channel).

[0014] Explanation of reference numerals in the attached figures: 10-Adhesive head; 100-Main spindle; 200-Suction fixture; 300-Suction head seat; 301-Mounting groove; 302-Conical wall; 303-Accommodation notch; 310-First seat; 311-First channel; 311a-First section; 311b-Second section; 311c-Third section; 320-Second seat; 321-First positioning groove; 322-Second channel; 322a-Fourth section; 322b- Fifth segment; 322c - Sixth segment; 330 - Locking element; 340 - First magnetic element; 350 - Connecting protrusion; 360a - First support element; 360b - Second support element; 370a - First adjusting element; 371 - Spherical support part; 370b - Second adjusting element; 380 - Support pad; 390 - Elastic element; 3100 - Scale; 3110 - Connecting tube; 400 - Suction mechanism; 401 - Connecting hole. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be described in detail below. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0016] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0017] The following is in conjunction with the appendix Figures 1 to 18 The suction head holder, suction mechanism, bonding head, and packaging equipment provided in this application will be described in detail through specific embodiments and application scenarios.

[0018] Reference Figure 1 and Figure 2 This application provides a suction head holder 300 that can be applied to a bonding head 10. The bonding head 10 includes a spindle 100 and a suction fixture 200. The suction head holder 300 is used to connect the spindle 100 and the suction fixture 200. In some embodiments, the suction head holder 300 can mate with the shaft holes of the spindle 100 and the suction fixture 200, respectively.

[0019] Reference Figure 2 The suction head holder 300 includes a first seat 310, a second seat 320, and a locking member 330. Exemplarily, the first seat 310 and the second seat 320 are distributed along the axial direction of the main shaft 100. The first seat 310 is movably disposed on the second seat 320. One of the first seat 310 and the second seat 320 is used to connect to the main shaft 100, and the other is used to connect to the suction fixture 200. Exemplarily, the first seat 310 is connected to the main shaft 100, and the second seat 320 is connected to the suction fixture 200.

[0020] The locking member 330 is disposed in at least one of the first seat 310 and the second seat 320, and the locking member 330 has a first state and a second state.

[0021] With the locking member 330 in the first state, the first seat 310 can rotate relative to the second seat 320 about a first axis and a second axis. The first axis and the second axis may intersect or be non-planar. For example, Figure 4 and Figure 5 The thin dashed line corresponding to L1 indicates the first axis. The thin dashed line corresponding to L2 indicates the second axis.

[0022] For example, a support point is provided between the first seat 310 and the second seat 320, and the first seat 310 and the second seat 320 rotate about a first axis L1 and a second axis L2 about the support point located between the first seat 310 and the second seat 320. Optionally, the first axis L1 and the second axis L2 intersect at the support point between the first seat 310 and the second seat 320.

[0023] In some embodiments, one of the first seat 310 and the second seat 320 may be provided with a protrusion, and the other may be provided with a support portion corresponding to the protrusion, so that a support point is formed between the first seat 310 and the second seat 320 through the protrusion and the support portion. For example, the protrusion may be a spherical protrusion, and the support portion may be a spherical groove that rotatably engages with the spherical protrusion. Specifically, the center of the spherical protrusion is the support point between the first seat 310 and the second seat 320.

[0024] In some embodiments, a first rotating shaft and a second rotating shaft may be provided between the first base 310 and the second base 320, wherein the first rotating shaft is disposed along a first axis L1 and the second rotating shaft is disposed along a second axis L2. Specifically, the first base 310 and the second base 320 may be rotatably hinged through the first rotating shaft and the second rotating shaft.

[0025] In some embodiments, when the locking member 330 is in the second state, the locking member 330 is connected to the first seat 310 and the second seat 320 respectively, and restricts the first seat 310 from rotating relative to the second seat 320 about the first axis L1 and the second axis L2. For example, the locking member 330 can be used to fix the first seat 310 and the second seat 320 relative to each other.

[0026] In optional solutions, the locking element 330 can be, but is not limited to, screws, bolts, pins, and / or clips.

[0027] It should be noted that in related technologies, the suction mechanism and the spindle are generally fitted through a shaft hole. To facilitate assembly and disassembly, a clearance fit is typically used between the suction mechanism and the spindle, and they are secured with pins or screws. Therefore, after the suction mechanism and the spindle are assembled, it is difficult to ensure that the suction mechanism and the spindle are coaxial.

[0028] In the above embodiments, the suction head holder 300 can be used to adjust the suction plane of the suction fixture 200 to be perpendicular to the spindle 100. This ensures that the suction plane of the suction fixture 200 is parallel to the bonding platform during the rotation of the spindle 100, thereby improving the bonding process quality and yield. Furthermore, because the suction head holder 300 can compensate for assembly errors between the suction fixture 200 and the suction head holder 300, and between the suction head holder 300 and the spindle 100, this solution helps reduce the fitting accuracy between the suction fixture 200 and the suction head holder 300, as well as between the suction head holder 300 and the spindle 100, thus reducing the manufacturing and assembly difficulty of the bonding head 10.

[0029] In some embodiments, during the assembly of the bonding head 10, the spindle 100 is first adjusted so that it is perpendicular to the bonding platform. Then, the first seat 310 and the second seat 320 in the suction head holder 300 are adjusted so that the suction plane of the suction fixture 200 on the suction head holder 300 is perpendicular to the spindle 100.

[0030] In some embodiments, the suction head holder 300 further includes a first support member 360a. The first support member 360a is disposed between the first seat 310 and the second seat 320. At least one of the first seat 310 and the second seat 320 is rotatably engaged with the first support member 360a, and the first seat 310 is rotatable relative to the second seat 320 about a first axis L1 and a second axis L2 centered on the first support member 360a. Exemplarily, the first support member 360a may be fixed or integrally disposed with one of the first seat 310 and the second seat 320. In some embodiments, the first support member 360a is disposed independently relative to the first seat 310 and the second seat 320. Optionally, the first support member 360a may be rotatably engaged with both the first seat 310 and the second seat 320.

[0031] In some embodiments, the first support member 360a can be rotatably engaged with the first seat 310, and the first seat 310 can rotate relative to the first support member 360a about a first axis L1. The first support member 360a can be rotatably engaged with the second seat 320, and the second seat 320 can rotate relative to the first support member 360a about a second axis L2.

[0032] In some embodiments, the first support member 360a may be ball-jointed to the first seat 310 and the second seat 320, respectively. For example, the first support member 360a may be a sphere.

[0033] In some embodiments, the first axis L1 is perpendicular to the second axis L2. In this embodiment, no component of rotation about the second axis is generated during the adjustment of the first seat 310 relative to the second seat 320 around the first axis, which helps to reduce the adjustment difficulty of the suction head seat 300.

[0034] In some embodiments, the first support member 360a is spherical. The first seat 310 and / or the second seat 320 have a mounting groove 301, the first support member 360a is at least partially located within the mounting groove 301, and the first support member 360a is rotatably engaged with the inner wall of the mounting groove 301. Exemplarily, the mounting groove 301 can be, but is not limited to, a spherical groove or a conical groove.

[0035] The first support member 360a is spherical, which allows the first seat 310 and the second seat 320 to rotate around the center of the sphere of the first support member 360a around the first axis L1 and the second axis L2, which helps to simplify the assembly structure of the first seat 310 and the second seat 320.

[0036] In some embodiments, the suction head holder 300 further includes a first adjusting member 370a. The first adjusting member 370a is disposed on one of the first seat 310 and the second seat 320, and supported on the other of the first seat 310 and the second seat 320. The support point formed by the first adjusting member 370a between the first seat 310 and the second seat 320 is located outside the second axis L2, that is, the second axis L2 does not pass through the support point formed by the first adjusting member 370a between the first seat 310 and the second seat 320.

[0037] Specifically, by adjusting the length of the portion of the first adjusting member 370a between the first seat 310 and the second seat 320, the first seat 310 and the second seat 320 are rotatable about the second axis L2. For example, refer to... Figure 12 The first adjusting member 370a is threadedly connected to the first seat 310, and the length of the portion of the first adjusting member 370a between the first seat 310 and the second seat 320 can be increased or decreased by rotating the first adjusting member 370a relative to the first seat 310.

[0038] In the preferred embodiment, the first axis L1 passes through the support point formed by the first adjusting member 370a. In this way, the first adjusting member 370a is only used to adjust the rotation of the first seat 310 relative to the second seat 320 around the second axis L2, thereby reducing the adjustment difficulty of the suction head seat 300.

[0039] In some embodiments, the suction head holder 300 further includes a second adjusting member 370b. The second adjusting member 370b is disposed on one of the first seat 310 and the second seat 320, and supported on the other of the first seat 310 and the second seat 320. The support point formed by the second adjusting member 370b between the first seat 310 and the second seat 320 is located outside the first axis L1, that is, the first axis L1 does not pass through the support point formed by the second adjusting member 370b between the first seat 310 and the second seat 320.

[0040] Specifically, by adjusting the length of the portion of the second adjusting member 370b between the first seat 310 and the second seat 320, the first seat 310 and the second seat 320 are rotatable about the first axis L1. For example, refer to... Figure 11 The second adjusting member 370b is threadedly connected to the first seat 310, and the length of the portion of the first adjusting member 370a between the first seat 310 and the second seat 320 can be increased or decreased by rotating the second adjusting member 370b relative to the first seat 310.

[0041] In the preferred embodiment, the second axis L2 passes through the support point formed by the second adjusting member 370b. Thus, the second adjusting member 370b is only used to adjust the rotation of the first seat 310 relative to the second seat 320 around the second axis L2, thereby reducing the difficulty of adjusting the suction head seat 300.

[0042] In some embodiments, the first axis L1 and the second axis L2 intersect at the support point formed between the first support 360a and the first base 310 and the second base 320.

[0043] Reference Figure 11 and Figure 12The first end of the locking member 330 is threaded into the second seat 320. The second end of the locking member 330 is clearance-fitted into the first seat 310. In the second state, the locking member 330 is axially limited to the first seat 310, restricting its movement away from the second seat 320. In the first state, the locking member 330 is released from the axial limit, allowing the first seat 310 to move towards or away from the second seat 320. Specifically, before adjusting and calibrating the relative position of the first seat 310 and the second seat 320, the locking member 330 is first adjusted to the first state. Specifically, the locking member 330 can be switched between the first and second states by rotating it.

[0044] In some embodiments, the first axis L1 intersects with or is not in plane with the axis of the main shaft 100. For example, the first axis L1 is substantially perpendicular to the axis of the main shaft 100. In some embodiments, the second axis L2 intersects with or is not in plane with the axis of the main shaft 100. For example, the second axis L2 is substantially perpendicular to the axis of the main shaft 100. This embodiment is advantageous for quickly adjusting the parallelism between the suction plane and the contact plane.

[0045] Reference Figure 10 The suction head holder 300 includes two locking members 330. One locking member 330 is located between the first adjusting member 370a and the first supporting member 360a, and the other is located between the second adjusting member 370b and the first supporting member 360a. Exemplarily, the support point formed by the first supporting member 360a between the first base 310 and the second base 320 is the first support point. The point where the first adjusting member 370a rests on the second base 320 is the second support point. The point where the second adjusting member 370b rests on the second base 320 is the third support point. Exemplarily, one locking member 330 passes through the line connecting the first and second support points, and the other locking member 330 passes through the line connecting the first and third support points.

[0046] In some embodiments, the locking element 330 is a bolt. Specifically, see [reference needed]. Figure 11The first seat 310 has a mounting hole, and the locking member 330 is clearance-fitted with the mounting hole. The screw of the locking member 330 can pass through the mounting hole and threadedly engage with the second seat 320. Specifically, when the locking member 330 is in the second state, the first end of the locking member 330 abuts against the side of the first seat 310 opposite to the second seat 320, and the second end is threadedly engaged with the second seat 320. For example, when the locking member 330 is in the second state, the first end of the locking member 330 releases its abutment from the side of the first seat 310 opposite to the second seat 320, and the second end is threadedly engaged with the second seat 320, allowing the first seat 310 and the second seat 320 to have a relatively far apart or close together movement space.

[0047] In some embodiments, the suction head holder 300 further includes a second support member 360b. The second support member 360b and the first support member 360a are distributed on opposite sides of the locking member 330. The second support member 360b is threadedly engaged with the first seat 310. One end of the second support member 360b can be supported on the second seat 320 and limit the proximity of the first seat 310 and the second seat 320. In this embodiment, the second support member 360b helps to improve the force balance between the first seat 310 and the second seat 320, and improves the reliability of the assembly of the first seat 310 and the second seat 320.

[0048] In some designs, the first adjusting member 370a is threadedly engaged with the first seat 310. The first end of the first adjusting member 370a is supported on the second seat 320 in the axial direction, and the second seat 320 can be rotated relative to the first seat 310 about the second axis L2 by rotating the first adjusting member 370a.

[0049] Reference Figure 6 , Figure 7 and Figure 12 During the debugging process, the height of the first adjusting member 370a protruding from the surface of the first seat 310 adjacent to the second seat 320 can be adjusted by rotating the first adjusting member 370a, so that the first seat 310 can rotate relative to the second seat 320 around the second axis L2.

[0050] In some embodiments, the second adjusting member 370b is threadedly engaged with the first seat 310, and the first end of the second adjusting member 370b is supported on the second seat 320 in the axial direction. The second seat 320 can be rotated relative to the first seat 310 around the first axis L1 by rotating the first adjusting member 370a.

[0051] Reference Figure 6 , Figure 7 and Figure 11During the debugging process, the height of the second adjusting member 370b protruding from the surface of the first seat 310 adjacent to the second seat 320 can be adjusted by rotating the second adjusting member 370b, so that the first seat 310 can rotate relative to the second seat 320 around the first axis L1.

[0052] In some embodiments, the mounting groove 301 has a conical wall 302, and the first support 360a has a spherical surface that supports the conical wall 302. (Refer to...) Figure 11 and Figure 12 Both the first base 310 and the second base 320 are provided with mounting grooves 301. The first support member 360a is supported in the mounting grooves 301 of the first base 310 and the second base 320, respectively.

[0053] In the above embodiments, the surface of the mounting groove 301 that mates with the first support member 360a is a conical surface, which can accommodate first support members 360a with various radial dimensions, thus reducing the manufacturing difficulty of the mounting groove 301 and the first support member 360a. Furthermore, first support members 360a with different radial dimensions can be selected according to the adjustable range of the suction head seat 300.

[0054] In some embodiments, the first end of the first adjusting member 370a in the axial direction has a spherical support portion 371. (Refer to...) Figure 12 For example, the first axis L1 passes through the center of the spherical support portion 371 of the first adjusting member 370a and the center of the spherical support portion 360a. The above embodiment is beneficial in keeping the position of the first axis L1 from moving relative to the second seat 320 during adjustment, so as to adjust the suction plane to be parallel to the bonding platform.

[0055] In some embodiments, the first axial end of the second adjusting member 370b has a spherical support portion 371. (Refer to...) Figure 11 For example, the second axis L2 passes through the center of the spherical support portion 371 of the second adjusting member 370b and the center of the spherical support portion 360a. The above embodiment is beneficial in keeping the position of the second axis L2 from moving relative to the second seat 320 during adjustment, so as to adjust the suction plane to be parallel to the bonding platform.

[0056] In some embodiments, the suction head holder 300 further includes a support pad 380. The support pad 380 is fixedly disposed on the second seat 320. The first end of the second adjusting member 370b abuts against the support pad 380 in the axial direction. Exemplarily, the second seat 320 has a slot for receiving the support pad 380 on the side adjacent to the first seat 310, and the support pad 380 is recessed into the surface of the second seat 320 adjacent to the first seat 310. In some embodiments, the hardness of the support pad 380 is greater than the hardness of the second seat 320 to improve the wear resistance of the support pad 380. Optionally, the support pad 380 is detachably connected to the second seat 320. Specifically, when the wear of the support pad 380 reaches a preset level, only the support pad 380 needs to be replaced.

[0057] In some embodiments, the second seat 320 has a first positioning groove 321. The first positioning groove 321 extends perpendicularly to the second axis L2, and the first adjustment member 370a is at least partially located within the first positioning groove 321 and is configured to move relative to the first positioning groove 321 along the extending direction of the first positioning groove 321.

[0058] The first positioning groove 321 helps prevent the first seat 310 from rotating relative to the second seat 320 about an axis passing through the center of the first support member 360a and intersecting with the first plane. The first plane is a plane parallel to the first axis L1 and the second axis L2. (Refer to...) Figure 6 , Figure 7 and Figure 12 For example, the first positioning groove 321 helps to prevent the first seat 310 from rotating relative to the second seat 320 about an axis perpendicular to the end face of the second seat 320 adjacent to the first seat 310.

[0059] In some embodiments, the suction head holder 300 further includes an elastic element 390. One end of the elastic element 390 is connected to the first seat 310 and the other end is connected to the second seat 320, and the elastic element 390 can be applied such that the first seat 310 and the second seat 320 are relatively close to each other.

[0060] In the above embodiments, the elastic element 390 can not only temporarily fix the first seat 310 and the second seat 320, but also adapt to the positional changes of the first seat 310 and the second seat 320 during the adjustment process, which is beneficial to maintaining the relative position of the first seat 310 and the second seat 320 during the adjustment process of the suction head seat 300.

[0061] In some embodiments, at least one of the first seat 310 and the second seat 320 is provided with a second magnetic attracting member, and the other is provided with a second magnetic attracting part corresponding to the second magnetic attracting member, and the first seat 310 and the second seat 320 can approach each other under the action of the second magnetic attracting member and the second magnetic attracting part.

[0062] In some alternative embodiments, the suction head holder 300 includes a plurality of elastic elements 390. (See also...) Figure 6 For example, some elastic elements 390 are distributed between the first support member 360a and the first adjusting member 370a, and some elastic elements 390 are distributed between the first support member 360a and the second adjusting member 370b. In this embodiment, the elastic force generated by the elastic elements 390 can enable the first support member 360a, the first adjusting member 370a and the second adjusting member 370b to better support the first seat 310 and / or the second seat 320, thereby improving the assembly reliability of the first seat 310 and the second seat 320 during the adjustment process.

[0063] For example, elastic members 390 between the first support member 360a and the first adjusting member 370a are spaced apart along the first axis L1. Elastic members 390 between the first support member 360a and the second adjusting member 370b are spaced apart along the second axis L2.

[0064] In some embodiments, the suction head holder 300 also includes a scale 3100. The scale 3100 is disposed on the first seat 310 or the second seat 320, and can be used to mark the distance between the first seat 310 and the second seat 320. In this embodiment, the scale 3100 can be used to measure the distance between the first seat 310 and the second seat 320 to roughly determine the parallelism between the suction plane of the suction fixture 200 and the bonding platform during coarse adjustment. After roughly determining that the suction plane of the suction fixture 200 is substantially parallel to the bonding platform using the scale 3100, the first adjusting member 370a and / or the second adjusting member 370b can be further refined, which helps to improve the adjustment efficiency of adjusting the suction plane to be parallel to the bonding platform.

[0065] For example, the suction head holder 300 includes two scales 3100. Both scales 3100 are disposed on the side wall of the first base 310, with one scale 3100 adjacent to the first adjusting member 370a and the other adjacent to the second adjusting member 370b. Specifically, during the adjustment of the first adjusting member 370a, this embodiment is advantageous in reducing the reading of the scale 3100 adjacent to the second adjusting member 370b.

[0066] In some embodiments, the suction head holder 300 further includes a connecting tube 3110, and the first seat 310 has a first channel 311. A first end of the first channel 311 is used to communicate with the spindle 100, and a second end of the first channel 311 penetrates the side wall of the first seat 310 and communicates with the first end of the connecting tube 3110. The second seat 320 has a second channel 322, a first end of the second channel 322 penetrates the side wall of the second seat 320 and communicates with the second end of the connecting tube 3110; the second end of the second channel 322 is used to communicate with the suction fixture 200.

[0067] In the above embodiment, the air passage between the first seat 310 and the second seat 320 is connected by a connecting pipe 3110. This allows the deformation of the connecting pipe 3110 to accommodate the relative movement of the first seat 310 and the second seat 320, thereby achieving a static seal in the air passage connecting the spindle 100 and the suction fixture 200, which in turn helps to improve the reliability of the air passage connecting the suction fixture 200.

[0068] Reference Figure 15 and Figure 16 In some embodiments, the first channel 311 includes a first segment 311a, a second segment 311b, and a third segment 311c that are connected in sequence. Exemplarily, the first segment 311a has an end face perpendicular to the side of the first seat 310 away from the second seat 320. Optionally, at least a portion of the spindle 100 is located within the first segment 311a and is sealed to fit within it.

[0069] In an optional embodiment, the second segment 311b is perpendicularly connected to the first segment 311a. The axis of the third segment 311c is skewed from the axis of the second segment 311b, and the angle between the axis of the third segment 311c and the axis of the second segment 311b is an acute angle. For example, the axes of the third segment 311c and the second segment 311b are both perpendicular to the axis of the first segment 311a.

[0070] In the above embodiment, the angle between the axis of the third segment 311c and the axis of the second segment 311b is an acute angle, which is beneficial to increasing the flow area of ​​the second segment 311b and the third segment 311c during the processing to form them.

[0071] It should be noted that, for ease of processing, the first channel 311 can be processed in segments. For example, after processing, the end of the second segment 311b that is away from the first segment 311a can be sealed.

[0072] Reference Figure 17 and Figure 18 In some embodiments, the second channel 322 includes a fourth segment 322a, a fifth segment 322b, and a sixth segment 322c that are connected in sequence. Exemplarily, the fourth segment 322a is perpendicular to the end face of the second seat 320 on the side away from the first seat 310. In some embodiments, the end of the fourth segment 322a away from the fifth segment 322b is used to communicate with the suction fixture 200. The end of the sixth segment 322c away from the fifth segment 322b is used to communicate with the connecting tube 3110.

[0073] It should be noted that, for ease of processing, the second channel 322 can be processed in segments. For example, after processing, the end of the fifth segment 322b furthest from the fourth segment 322a can be sealed. In some embodiments, the sixth segment 322c can also be processed in segments, and the end of the sixth segment 322c furthest from the connecting pipe 3110 can be sealed.

[0074] In some embodiments, both the first seat 310 and the second seat 320 are provided with receiving notches 303. Exemplarily, the receiving notches 303 are provided on the sidewalls of the first seat 310 and the second seat 320. Optionally, the connecting tube 3110 is provided within the receiving notches 303, which helps to reduce the size of the suction head seat 300.

[0075] In some embodiments, this application provides a suction mechanism. The suction mechanism 400 includes a suction fixture 200 and a suction head holder 300 as provided in embodiments of this application. The suction mechanism 400 has the same beneficial effects as the suction head holder 300 provided in this application, which will not be elaborated further here.

[0076] For example, the suction mechanism 400 is connected to the suction head holder 300. In this embodiment, the suction plane of the suction fixture 200 can be adjusted to be parallel to the bonding platform via the suction head holder 300. It should be noted that when the suction plane is parallel to the bonding platform, the axis of the main shaft 100 is parallel to or coincides with the axis of the suction fixture 200. Specifically, when the axis of the main shaft 100 is parallel to the axis of the suction fixture 200, a first gap is measured, which is the distance between the axis of the main shaft 100 and the axis of the suction fixture 200. Specifically, after each angle switch of the suction mechanism 400, the offset of the suction fixture 200 after the angle switch can be obtained by the rotation angle of the main shaft 100 and the first gap, and the main shaft 100 is controlled to move in a plane perpendicular to the axis of the main shaft 100 so that the suction fixture 200 is aligned with the bonding platform.

[0077] Reference Figure 14 In some embodiments, at least one of the suction fixture 200 and the suction head holder 300 is provided with a first magnetic element 340, and the suction fixture 200 and the suction head holder 300 are magnetically connected by the first magnetic element 340. For example, the first magnetic element 340 can be a magnet.

[0078] In some embodiments, the suction fixture 200 and the suction head seat 300 are provided with a connection hole 401 and a connection protrusion 350, the connection protrusion 350 being at least partially located in the connection hole 401 and sealingly engaged with the connection hole 401.

[0079] Optionally, the suction head holder 300 includes a plurality of first magnetic elements 340, and the plurality of first magnetic elements 340 are spaced apart around the connecting protrusion 350. Specifically, the plurality of first magnetic elements 340 are evenly distributed around the connecting protrusion 350.

[0080] In some alternative embodiments, one of the suction fixture 200 and the suction head holder 300 is provided with a slot, and the other is provided with a locking pin, the axis of which is parallel to the axis of the connecting protrusion 350. At least a portion of the exemplary locking pin is located within the slot to restrict rotation of the suction fixture 200 relative to the suction head holder 300 about the axis of the connecting protrusion 350.

[0081] In some embodiments, this application also provides an adhesive head. The adhesive head 10 includes the suction mechanism 400 provided in the embodiments of this application, and the adhesive head 10 has the same beneficial effects as the suction mechanism 400 provided in this application, which will not be described in detail here.

[0082] In some embodiments, this application also provides a packaging device. This packaging device includes the bonding head 10 provided in this application and has corresponding technical effects, which will not be elaborated upon here.

[0083] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0084] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A suction head seat, characterized in that, The suction head seat can be applied to a laminating head (10) comprising a main shaft (100) and a suction jig (200), and the suction head seat (300) is used to connect the main shaft (100) and the suction jig (200); The suction head seat (300) comprises a first seat body (310), a second seat body (320) and a locking member (330), the first seat body (310) is movably arranged in the second seat body (320), one of the first seat body (310) and the second seat body (320) is used to be connected with the main shaft (100), and the other is used to be connected with the suction jig (200); the locking member (330) is arranged in at least one of the first seat body (310) and the second seat body (320), and the locking member (330) has a first state and a second state, When the locking member (330) is in the first state, the first seat body (310) can rotate relative to the second seat body (320) around a first axis and a second axis; the first axis intersects with the second axis or is in different planes; When the locking member (330) is in the second state, the locking member (330) is connected with the first seat body (310) and the second seat body (320) respectively, and limits the first seat body (310) to rotate relative to the second seat body (320) around the first axis and the second axis.

2. The suction head seat according to claim 1, characterized in that Further comprising a first support member (360a) arranged between the first seat body (310) and the second seat body (320), at least one of the first seat body (310) and the second seat body (320) is rotationally matched with the first support member (360a), and the first seat body (310) can rotate relative to the second seat body (320) around the first axis and the second axis with the first support member (360a) as the center; And / or, the first axis is perpendicular to the second axis; And / or, the first axis intersects with or is in different planes with the axis of the main shaft (100), and the second axis intersects with or is in different planes with the axis of the main shaft (100).

3. The suction head seat according to claim 2, characterized in that The first support member (360a) is spherical, the first seat body (310) and / or the second seat body (320) has a mounting groove (301), the first support member (360a) is at least partially located in the mounting groove (301), and the first support member (360a) is rotationally matched with the inner wall of the mounting groove (301).

4. The tip seat of claim 3, wherein The suction head seat further comprises a first adjusting member (370a), the first adjusting member (370a) is arranged in one of the first seat body (310) and the second seat body (320) and supported on the other of the first seat body (310) and the second seat body (320), and the support point of the first adjusting member (370a) between the first seat body (310) and the second seat body (320) is located outside the second axis.

5. The suction head seat according to claim 4, characterized in that The suction head base further comprises a second adjusting member (370b) arranged on one of the first base body (310) and the second base body (320) and supported on the other of the first base body (310) and the second base body (320), and a supporting point formed between the first base body (310) and the second base body (320) by the second adjusting member (370b) is located outside the first axis; And / or, the first axis passes through a supporting point formed by the first adjusting member (370a).

6. The tip seat of claim 5, wherein The first end of the locking member (330) is in threaded connection with the second base body (320), and the second end of the locking member (330) is in clearance fit with the first base body (310), When the locking member (330) is in the second state, the locking member (330) is in axial location fit with the first base body (310) and limits the movement of the first base body (310) away from the second base body (320); When the locking member (330) is in the first state, the locking member (330) is out of axial location fit with the first base body (310), and the first base body (310) can move towards or away from the second base body (320).

7. The suction head seat according to claim 6, characterized in that Two locking members (330) are included, one of which is located between the first adjusting member (370a) and the first supporting member (360a), and the other of which is located between the second adjusting member (370b) and the first supporting member (360a); And / or, a second supporting member (360b) is further included, which is distributed on the opposite side of the locking member (330) from the first supporting member (360a), the second supporting member (360b) is in threaded connection with the first base body (310), and one end of the second supporting member (360b) can be supported on the second base body (320) and limit the mutual approach of the first base body (310) and the second base body (320).

8. Tip seat according to any one of claims 5 to 7, characterized in that The first adjusting member (370a) is in threaded connection with the first base body (310), the first end of the first adjusting member (370a) in the axial direction is supported on the second base body (320), and the second base body (320) can be driven to rotate relative to the first base body (310) around the second axis by rotating the first adjusting member (370a); And / or, the second adjusting member (370b) is in threaded connection with the first base body (310), the first end of the second adjusting member (370b) in the axial direction is supported on the second base body (320), and the second base body (320) can be driven to rotate relative to the first base body (310) around the first axis by rotating the first adjusting member (370a); And / or, the mounting groove (301) has a tapered wall surface (302), and the first supporting member (360a) has a spherical surface supported on the tapered wall surface (302); And / or, the first end of the first adjusting member (370a) in the axial direction has a spherical support portion (371); And / or, the first end of the second adjusting member (370b) in the axial direction has a spherical support portion (371); And / or, the second seat body (320) has a first positioning slot (321) in a direction perpendicular to the second axis, the first adjusting member (370a) is at least partially located in the first positioning slot (321), and the first adjusting member (370a) is limited to move along the extension direction of the first positioning slot (321) relative to the first positioning slot (321); And / or, further comprising a support pad (380) fixedly arranged on the second seat body (320), and the first end of the second adjusting member (370b) in the axial direction abuts against the support pad (380); And / or, further comprising an elastic member (390) connected to one end of the first seat body (310) and the other end of the second seat body (320), and the elastic member (390) can act on the first seat body (310) and the second seat body (320) to move closer to each other; And / or, further comprising a scale (3100) arranged on the first seat body (310) or the second seat body (320), and the scale (3100) can be used to mark the distance between the first seat body (310) and the second seat body (320).

9. Tip seat according to any one of claims 1 to 7, characterized in that: Further comprising a connecting pipe (3110), the first seat body (310) has a first channel (311), the first end of the first channel (311) is used to communicate with the main shaft (100), the second end of the first channel (311) penetrates the side wall of the first seat body (310) and communicates with the first end of the connecting pipe (3110); the second seat body (320) has a second channel (322), the first end of the second channel (322) penetrates the side wall of the second seat body (320) and communicates with the second end of the connecting pipe; the second end of the second channel (322) is used to communicate with the suction jig (200).

10. A suction mechanism characterized by comprising: The suction mechanism comprises the suction jig (200) and the suction head seat (300) according to any one of claims 1 to 9, and the suction mechanism (400) is connected with the suction head seat.

11. The suction mechanism according to claim 10, wherein At least one of the suction jig (200) and the suction head seat (300) is provided with a first magnetic member (340), and the suction jig (200) and the suction head seat (300) are connected by magnetic attraction through the first magnetic member (340); And / or, one of the suction jig (200) and the suction head seat (300) is provided with a connecting hole (401), and the other is provided with a connecting protrusion (350), the connecting protrusion (350) is at least partially located in the connecting hole (401) and sealingly matched with the connecting hole (401).

12. A conformable head characterized by, The suction mechanism according to claim 10 or 11.

13. A packaging apparatus, characterized by The fitting head according to claim 12.

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