Air injection module and active air injection system

Abstract

The invention discloses a jet module and an active jet system. The gas injection module is provided with a device body, a conveying cavity and an annular gas flow generation cavity are formed in the device body, one end of the device body is provided with a gas flow input part, the other end of the device body is provided with a gas flow output part, and the side edge of the device body extends outwards to form a gas guide-in part. The conveying cavity, the airflow input part and the airflow output part are communicated with one another, and the conveying cavity, the annular airflow generating cavity and the gas leading-in part are communicated with one another. The annular airflow generating cavity is provided with a side connecting part and a nozzle part, the side connecting part and the nozzle part are communicated with each other, the side connecting part is connected to the gas leading-in part, the nozzle part is connected to the conveying cavity, the nozzle part is configured to be used for generating pushing airflow towards the conveying cavity in a preset path, and a preset included angle is formed between the preset path and the center axis of the device body. The air injection module and the active air injection system can replace a known pipeline heating belt, and the problem of pipeline blockage is effectively solved.

Description

TECHNICAL FIELD

[0001] The present application relates to a jet module and an active jet system, in particular, to a jet module and an active jet system for replacing a known pipe heating belt and capable of generating a jet flow at a specific angle. BACKGROUND

[0002] In the high-tech manufacturing industry, fine dusts are collected before and after the exhaust gas treatment process. In the semiconductor manufacturing equipment, a wet scrubber is used to filter the fine dusts, and a pipe is used to transport the dust-containing exhaust gas. However, the dusts in the exhaust gas will accumulate on the pipe wall over time, causing the pipe to be blocked. Therefore, a plurality of heating belts are arranged on the pipe to prevent the dusts accumulated on the pipe wall from being easily agglomerated and adhered to the pipe wall.

[0003] However, the heating belts not only increase the manufacturing cost, but also cannot completely eliminate the need for pipe cleaning.

[0004] Therefore, how to overcome the above-mentioned defects through structural design improvement has become one of the important issues that the industry wants to solve. SUMMARY

[0005] The technical problem to be solved by the present application is to provide a jet module and an active jet system to overcome the deficiencies of the prior art.

[0006] To solve the above technical problems, one of the technical solutions adopted by the present application is to provide a jet module having a device body, the device body having a conveying cavity and an annular jet flow generating cavity inside, one end of the device body having a jet flow input portion, the other end of the device body having a jet flow output portion, the side of the device body extending outward to form a gas inlet portion, the conveying cavity, the jet flow input portion and the jet flow output portion being in communication with each other, the conveying cavity, the annular jet flow generating cavity and the gas inlet portion being in communication with each other. The jet flow input portion is configured to connect to a first external working device, the jet flow output portion is configured to connect to a second external working device, and the gas inlet portion is configured to connect to an external gas source device. The annular jet flow generating cavity has a side joint portion and at least one nozzle portion, the side joint portion and the at least one nozzle portion being in communication with each other, the side joint portion being connected to the gas inlet portion, and the at least one nozzle portion being connected to the conveying cavity. The at least one nozzle portion is configured to generate a pushing jet flow in a predetermined path toward the conveying cavity, the predetermined path having a predetermined included angle with the central axis of the device body, and the predetermined included angle is between 0-89 degrees.

[0007] To address the aforementioned technical problems, another technical solution adopted by the present invention is to provide an active jet system, comprising at least one jet module, at least one air supply module, and a control module. The at least one jet module has a device body, the interior of which includes a delivery chamber and an annular airflow generating chamber. One end of the device body has an airflow input section, and the other end has an airflow output section. A gas inlet section extends outward from the side of the device body. The delivery chamber, the airflow input section, and the airflow output section are interconnected, as are the delivery chamber, the annular airflow generating chamber, and the gas inlet section. The at least one air supply module is connected to the gas inlet section. The control module is connected to the air supply module and is configured to control the air supply module to supply driving airflow to the jet module continuously or intermittently. The airflow input section is configured to connect to a first external working device, and the airflow output section is configured to connect to a second external working device. The annular airflow generating cavity has a side connection and at least one nozzle. The side connection and the at least one nozzle communicate with each other. The side connection is connected to the gas inlet, and the at least one nozzle is connected to the delivery cavity. The at least one nozzle is configured to generate a pushing airflow toward the delivery cavity along a predetermined path. The predetermined path has a predetermined angle with the central axis of the device body, and the predetermined angle is between 0 and 89 degrees.

[0008] One of the beneficial effects of the present invention is that the jet module and active jet system provided by the present invention can replace the known pipe heating belt through the above-mentioned technical solution and effectively solve the pipe blockage problem.

[0009] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are for reference and illustration only and are not intended to limit the present invention. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the active jet system according to the first embodiment of the present invention.

[0011] Figure 2 This is a functional block diagram of the active jet system according to the first embodiment of the present invention.

[0012] Figure 3 This is a first cross-sectional schematic diagram of the jet module according to the first embodiment of the present invention.

[0013] Figure 4 This is a second cross-sectional schematic diagram of the jet module according to the first embodiment of the present invention.

[0014] Figure 5This is a schematic diagram of the active jet system according to the second embodiment of the present invention.

[0015] Figure 6 This is a functional block diagram of the active jet system according to the second embodiment of the present invention.

[0016] The attached diagram is described below:

[0017] Z: Active jet system

[0018] M, M1, M2, M3: Jet Module

[0019] M1: device body

[0020] M10: Delivery cavity

[0021] M11: Annular airflow generating cavity

[0022] M110: Side connection part

[0023] M111: Nozzle section

[0024] M112: Main cavity

[0025] M112a: Feather coverts

[0026] M112b: Shoulder area

[0027] M2: Gas Inlet Section

[0028] M3: Gas Output Section

[0029] M4: Airflow Inlet Section

[0030] 1: Gas supply module

[0031] 10: Connecting pipes

[0032] 2: Control Module

[0033] U1: First external working equipment

[0034] U2: Second external working equipment

[0035] U3: External air supply device

[0036] CA: Central Axis

[0037] DA: Driving airflow

[0038] MP: Process Gas

[0039] PA: Propelling airflow

[0040] PG: Pre-determined angle

[0041] PR: Pre-determined path

[0042] TG: Pre-set tilt angle

[0043] EP: External Pipeline Detailed Implementation

[0044] The following specific embodiments illustrate the implementation of the "jet module and active jet system" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated beforehand. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0045] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the associated listed items.

[0046] [First Embodiment]

[0047] Please see Figures 1 to 4 The figures above are a structural schematic diagram of the active jet system according to the first embodiment of the present invention, a functional block diagram of the active jet system, a first cross-sectional schematic diagram of the jet module, and a second cross-sectional schematic diagram of the jet module. As shown in the figures above, the first embodiment of the present invention provides an active jet system Z, which may include at least one jet module M, at least one air supply module 1, and a control module 2.

[0048] Cooperate Figures 1 to 4As shown, the jet module M may have a device body M1. The device body M1 may contain a conveying chamber M10 and an annular airflow generating chamber M11. One end of the device body M1 may have an airflow input section M2, and the other end may have an airflow output section M3. A gas inlet section M4 may extend outward from the side of the device body M1. The conveying chamber M10, the airflow input section M2, and the airflow output section M3 may communicate with each other. The conveying chamber M10, the annular airflow generating chamber M11, and the gas inlet section M4 may also communicate with each other. The airflow input section M2 may be configured to connect to a first external working device U1, and the airflow output section M3 may be configured to connect to a second external working device U2. The annular airflow generating cavity M11 may have a side connection part M110 and at least one nozzle part M111. The side connection part M110 and the nozzle part M111 may communicate with each other. The side connection part M110 is connected to the gas inlet part M4, and the nozzle part M111 is connected to the conveying cavity M10. The nozzle part M111 may be configured to generate a pushing airflow PA towards the conveying cavity M10 along a predetermined path PR. The predetermined path PR may have a predetermined angle PG between it and the central axis CA of the device body M1. The predetermined angle PG may be between 0 and 89 degrees.

[0049] For example, the shape of the device body M1 can be geometric, such as square or rounded trapezoid, but is not limited thereto. The conveying cavity M10 can be located at the center of the device body M1, and the annular airflow generating cavity M11 surrounds and encircles the conveying cavity M10; wherein, the conveying cavity M10 can be a hollow structure. One end of the device body M1 can extend outward to form an airflow inlet M2, and the other end of the device body M1 can extend outward to form an airflow outlet M3. The airflow inlet M2, airflow outlet M3, and gas inlet M4 can be hollow tubular structures. The airflow inlet M2 can be connected to the airflow outlet M3 through the conveying cavity M10, and the gas inlet M4 can be connected to the conveying cavity M10 through the annular airflow generating cavity M11. The diameter or aperture of the nozzle M111 can be between 0.01 and 3 mm, preferably 0.1 mm. Furthermore, the predetermined included angle PG is preferably between 0 and 10 degrees, and most preferably 0 degrees. The first external operating device U1 and the second external operating device U2 can be a turbo pump, dry pump, local scrubber, combustion exhaust gas removal device, plasma exhaust gas removal device, or central scrubber (e.g., a wet scrubbing tower) in semiconductor equipment, but are not limited thereto; the airflow inlet M2 can be connected to the first external operating device U1 by connecting to the external pipe EP, and the airflow outlet M3 can be connected to the second external operating device U2 by connecting to the external pipe EP.

[0050] Furthermore, the cross-section of the annular airflow generating cavity M11 can be wing-shaped, and the annular airflow generating cavity M11 can be a hollow annular structure; the annular airflow generating cavity M11 can also have a main cavity M112, and the main cavity M112 can have a feather region M112a and a shoulder region M112b. The feather region M112a can connect the side connection part M110 and the shoulder region M112b, and the shoulder region M112b can connect at least one nozzle part M111. The cross-section of the feather region M112a can be conical, and the cross-section of the shoulder region M112b can be C-shaped or hook-shaped, but is not limited thereto. Moreover, the device body M1, corresponding to the feather region M112a, can have a predetermined inclination angle TG between the inner wall surface of the conveying cavity M10 adjacent to the central axis CA, and the predetermined inclination angle TG can be between 5 and 30 degrees, preferably 8 degrees or 16 degrees (e.g., ...). Figure 4 (as shown), 19 degrees, 26.5 degrees, 30 degrees (as shown) Figure 3 (as shown), but not limited to this.

[0051] Next, in coordination Figure 1 and Figure 2 As shown, at least one gas supply module 1 is connected to the gas inlet section M4. For example, the gas supply module 1 may be a gas supply device in a semiconductor device, which can provide general air or special gas (such as inert gas, but not limited thereto). The gas supply module 1 may have a connecting pipe 10 connected to the gas inlet section M4.

[0052] Next, in coordination Figure 2 As shown, the control module 2 can be electrically connected to the gas supply module 1. The control module 2 can be configured to control the gas supply module 1 to supply the driving airflow DA to the jet module M in a continuous or intermittent manner. For example, the control module 2 can be a central control device or a computer device. In other preferred embodiments, the control module 2 can also be connected to the first external working device U1 and the second external working device U2, and receive information (e.g., signals related to gas delivery parameters) provided by the first external working device U1, the second external working device U2, or both.

[0053] Therefore, when the gas inlet section M4 receives the driving airflow DA provided by the gas supply module 1, and the airflow input section M2 receives the process gas MP provided by the first external working device U1, the annular airflow generating chamber M11 can generate a pushing airflow PA towards the delivery chamber M10 through at least one nozzle section M111, so that the pushing airflow PA drives the process gas MP to flow towards the airflow output section M3. Specifically, when the gas inlet section M4 receives the driving airflow DA provided by the gas supply module 1, the annular airflow generating chamber M111 can guide the driving airflow DA into the covert region M112a through the side connection section M110; wherein the driving airflow DA can sequentially flow through the covert region M112a and the shoulder region M112b, and flow towards the delivery chamber M10 through at least one nozzle section M111 along a predetermined path PR, forming the pushing airflow PA.

[0054] For example, coordination Figures 1 to 4 As shown, the active jet system Z of the present invention can be applied to semiconductor process equipment and replace the pipe heating belt in existing semiconductor process equipment. Therefore, when the active jet system Z of the present invention is in operation, it can receive the process gas MP (e.g., harmful gas with fine dust (such as exhaust gas), but not limited thereto) provided by the first external working device U1 through the jet module M. Then, the control module 2 can control the gas supply module 1 to supply the driving airflow DA (e.g., airflow of inert gas, but not limited thereto) to the jet module M; at this time, after the driving airflow DA enters the annular airflow generating cavity M11 through the gas inlet M4, it can sequentially flow through the feather region M112a and the shoulder region M112b, and generate a swirling flow in the annular airflow generating cavity M11 (i.e., flow in the annular airflow generating cavity M11 in a vortex manner), and then be sprayed into the delivery cavity M10 through the nozzle part M111. The nozzle M111 can spray a driving airflow DA into the delivery cavity M10 via a predetermined path PR (i.e., a specific injection direction, a predetermined injection direction), thereby forming a pushing airflow PA; wherein the pushing airflow PA can be an annular airflow.

[0055] Next, when the propellant airflow PA is injected into the delivery chamber M10, it flows towards the airflow output section M3 along the predetermined path PR (i.e., the predetermined injection direction). Simultaneously, the propellant airflow PA entrains and draws in the process gas MP introduced from the airflow input section M2, combining with the process gas MP to form a strong and stable airflow that flows towards the airflow output section M3. Finally, the propellant airflow PA completely propels and carries the process gas MP into the second external working device U2, ensuring that dust from the process gas MP does not remain in the external pipeline EP.

[0056] It is worth mentioning that the control module 2 of the present invention can control the air supply module 1 to continuously supply the driving airflow DA to the jet module M according to the built-in program or manual operation, or control the air supply module 1 to supply the driving airflow DA to the jet module M in an intermittent manner (for example, supplying gas every 5 seconds, but not limited thereto). Furthermore, the flow rate of the driving airflow PA generated by the jet module M can be between 1 and 600 SLM.

[0057] Therefore, the active jet system Z of the present invention can provide an active annular airflow by using a jet module M, an air supply module 1, and a control module 2 arranged between the first external working device U1 and the second external working device U2 through the above technical solution. The jet module M provides a driving airflow PA to drive the process gas MP to flow completely to the second external working device U2, thereby avoiding dust in the process gas MP from remaining in the external pipe EP. At the same time, it can also replace the existing semiconductor process of solving pipe blockage by heating the pipe with a heating band, thereby significantly reducing manufacturing costs and equipment maintenance costs.

[0058] In addition, based on the above content, in conjunction with Figures 1 to 4 As shown, the present invention further provides a jet module M, which may have a device body M1. The device body M1 may have a conveying cavity M10 and an annular airflow generating cavity M11 inside. One end of the device body M1 may have an airflow input section M2, and the other end of the device body M1 may have an airflow output section M3. The side of the device body M1 may extend outward to form a gas inlet section M4. The conveying cavity M10, the airflow input section M2 and the airflow output section M3 may communicate with each other. The conveying cavity M10, the annular airflow generating cavity M11 and the gas inlet section M4 may also communicate with each other. The airflow input section M2 may be configured to connect to a first external working device U1, the airflow output section M3 may be configured to connect to a second external working device U2, and the gas inlet section M4 may be configured to connect to an external air source device U3 (which may be the same as the air source supply module 1, for example, a gas supply device in a semiconductor device, which can provide general air or special gases (e.g., inert gases, but is not limited thereto)). The annular airflow generating cavity M11 may have a side connection M110 and at least one nozzle M111. The side connection M110 and the at least one nozzle M111 communicate with each other. The side connection M110 may be connected to the gas inlet M4. The at least one nozzle M111 may be connected to the conveying cavity M10. The at least one nozzle M111 may be configured to generate a pushing airflow PA towards the conveying cavity M10 along a predetermined path PR. The predetermined path PR may have a predetermined angle PG between it and the central axis CA of the device body M1. The predetermined angle PG may be between 0 and 89 degrees.

[0059] However, the examples given above are merely one possible embodiment and are not intended to limit the invention.

[0060] [Second Embodiment]

[0061] Please see Figure 5 and Figure 6 The diagrams shown are a structural schematic diagram and a functional block diagram of the active jet system according to the second embodiment of the present invention, respectively. Please refer to both diagrams. Figures 1 to 4 As shown in the figure, the active jet system Z of this embodiment is generally similar to the active jet system Z of the above embodiment. Therefore, the arrangement or operation of the same components will not be described again here. The difference between this embodiment and the first embodiment is that, in this embodiment, the active jet system Z may further include multiple jet modules M. The airflow input section M2 of one jet module M can be connected to the first external working device U1, the airflow output section M3 of one jet module M can be connected to the airflow input section M2 of another jet module M, the airflow output section M3 of another jet module M can be connected to the second external working device U2, and the gas inlet section M4 of the multiple jet modules M can be connected to at least one gas supply module 1.

[0062] For example, coordination Figures 3 to 6 As shown, the active jet system Z can also be configured with multiple jet modules M1, M2, and M3 at equal or unequal intervals between the first external working device U1 and the second external working device U2. Each jet module M1, M2, and M3 can be individually connected to an air supply module 1, or multiple jet modules M1, M2, and M3 can be connected to the same air supply module 1. Therefore, when the distance between the first external working device U1 and the second external working device U2 is too long (i.e., the external pipeline EP is long), or when the external pipeline EP between the first external working device U1 and the second external working device U2 is not a straight pipeline but consists of straight and curved pipelines, a jet module M can be installed at different positions along the pipeline path of the external pipeline EP. Then, the control module 2 controls the mode (e.g., continuous or intermittent) of the air supply module 1 to supply the driving airflow DA, thereby driving multiple jet modules M1, M2, and M3 to relay the process gas MP from the first external working device U1 to the second external working device U2.

[0063] Furthermore, control module 2 can control the air supply module 1 corresponding to jet module M1 to first supply the driving airflow DA to jet module M1, while the air supply modules 1 corresponding to jet modules M2 and M3 temporarily do not supply the driving airflow DA. Then, after a certain period of time (e.g., after 5 seconds, but not limited to this), control module 2 controls the air supply module 1 corresponding to jet module M2 to first supply the driving airflow DA to jet module M2, while controlling the air supply modules 1 corresponding to jet modules M1 and M3 to temporarily not supply the driving airflow DA; at this time, the process gas MP has been driven to jet module M2 by the driving airflow PA generated by jet module M1, and then driven to jet module M3 by the driving airflow PA generated by jet module M2. Next, after a certain interval (e.g., 5 seconds, but not limited to this), the control module 2 controls the air supply module 1 corresponding to the jet module M3 to first supply the driving airflow DA to the jet module M3. At the same time, the control module 2 controls the air supply module 1 corresponding to the jet modules M1 and M2 to temporarily stop supplying the driving airflow DA. At this time, the process gas MP has been driven to the jet module M3 by the driving airflow PA generated by the jet module M2, and then driven to the second external working device U2 by the driving airflow PA generated by the jet module M3.

[0064] However, the control module 2 can control the air supply module 1 corresponding to the jet modules M1, M2, and M3 to continuously supply the driving airflow DA to the jet modules M1, M2, and M3, so as to drive the jet modules M1, M2, and M3 to generate the driving airflow PA, thereby driving the process gas MP provided by the first external working device U1 to the second external working device U2.

[0065] It is worth mentioning that the flow rate of the propulsive airflow PA generated by M1, M2, and M3 of the active jet system Z of the present invention can be between 1 and 600 SLM.

[0066] However, the examples given above are merely one possible embodiment and are not intended to limit the invention.

[0067] [Beneficial Effects of the Examples]

[0068] One of the beneficial effects of the present invention is that the jet module M and the active jet system Z provided by the present invention can replace the known pipe heating belt and effectively solve the pipe blockage problem through the above-mentioned technical solutions.

[0069] Furthermore, the active jet system Z of the present invention, through the above-described technical solution, utilizes a jet module M, an air supply module 1, and a control module 2 arranged between the first external working device U1 and the second external working device U2 to provide an active annular airflow. The jet module M provides a specific direction (i.e., a predetermined path PR) driving airflow PA to completely drive the process gas MP to the second external working device U2, thereby preventing dust in the process gas MP from remaining in the external pipeline EP, solving the pipeline blockage problem in the semiconductor industry, and eliminating the need for additional power supply. At the same time, it can also replace the existing method of solving pipeline blockage by heating the pipeline with a heating tape in semiconductor processes. In the future, pipelines will not need heating tapes, thereby significantly reducing manufacturing costs and equipment maintenance costs.

[0070] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of protection of the claims of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the scope of protection of the claims of the present invention.

Claims

1. A jet module, characterized in that The device body has an internal delivery cavity and an annular gas flow generating cavity, one end of the device body has a gas flow input portion, the other end of the device body has a gas flow output portion, the side of the device body extends outward to form a gas guide portion, the delivery cavity, the gas flow input portion and the gas flow output portion are in communication with each other, the delivery cavity, the annular gas flow generating cavity and the gas guide portion are in communication with each other; The gas flow input portion is configured to connect a first external working device, the gas flow output portion is configured to connect a second external working device, and the gas guide portion is configured to connect an external gas source device; The annular gas flow generating cavity has a side joint portion and at least one nozzle portion, the side joint portion and the at least one nozzle portion are in communication with each other, the side joint portion is connected to the gas guide portion, and the at least one nozzle portion is connected to the delivery cavity, the at least one nozzle portion is configured to generate a driving gas flow in a predetermined path toward the delivery cavity, the predetermined path has a predetermined included angle with the central axis of the device body, and the predetermined included angle is between 0-89 degrees.

2. The jet module of claim 1, wherein, When the gas guide portion receives the driving gas flow provided by the external gas source device, and the gas flow input portion receives the process gas provided by the first external working device, the annular gas flow generating cavity generates the driving gas flow through the at least one nozzle portion toward the delivery cavity, so that the driving gas flow drives the process gas to flow toward the gas flow output portion; wherein the driving gas flow is an annular gas flow.

3. The jet module of claim 1, wherein, The predetermined included angle is between 0-10 degrees; wherein the delivery cavity is located at the center of the device body, and the annular gas flow generating cavity surrounds the delivery cavity; wherein the flow rate of the driving gas flow generated by the gas jetting module ranges from 1-600 SLM.

4. The jet module of claim 1, wherein, The cross section of the annular gas flow generating cavity is in the shape of a wing; the annular gas flow generating cavity also has a main cavity portion, the main cavity portion has a feathering area and a shoulder area, the feathering area connects the side joint portion and the shoulder area, and the shoulder area connects the at least one nozzle portion; the cross section of the feathering area is in the shape of a cone, and the cross section of the shoulder area is in the shape of a C or a hook.

5. The jet module of claim 4, wherein, When the gas guide portion receives the driving gas flow provided by the external gas source device, the annular gas flow generating cavity guides the driving gas flow into the feathering area through the side joint portion; wherein the driving gas flow sequentially flows through the feathering area and the shoulder area, and then flows in the predetermined path toward the delivery cavity through the at least one nozzle portion and forms the driving gas flow.

6. An active air jet system characterized in that, Comprise: at least one jet module having a device body, an inner portion of the device body having a delivery cavity and a ring-shaped flow generating cavity, one end of the device body having a flow input portion, another end of the device body having a flow output portion, a side of the device body extending outwardly to form a gas introduction portion, the delivery cavity, the flow input portion and the flow output portion being in communication with each other, the delivery cavity, the ring-shaped flow generating cavity and the gas introduction portion being in communication with each other; at least one gas supply module connected to the gas introduction portion; and a control module connected to the gas supply module, the control module being configured to control the gas supply module to supply a driving flow to the jet module in a continuous manner or an intermittent manner; wherein the flow input portion is configured to be connected to a first external working equipment, and the flow output portion is configured to be connected to a second external working equipment; wherein the ring-shaped flow generating cavity has a side connection portion and at least one nozzle portion, the side connection portion and the at least one nozzle portion being in communication with each other, the side connection portion being connected to the gas introduction portion, and the at least one nozzle portion being connected to the delivery cavity, the at least one nozzle portion being configured to generate a pushing flow toward the delivery cavity in a predetermined path, the predetermined path having a predetermined included angle with a central axis of the device body, the predetermined included angle being between 0 and 89 degrees. Further comprising a plurality of the jet modules, the flow input portion of one of the jet modules being connected to the first external working equipment, the flow output portion of one of the jet modules being connected to the flow input portion of another of the jet modules, the flow output portion of another of the jet modules being connected to the second external working equipment, and the gas introduction portions of the plurality of the jet modules being connected to the at least one gas supply module.

7. The active jet system of claim 6, wherein, When the gas introduction portion receives the driving flow supplied by the at least one gas supply module, and the flow input portion receives a process gas supplied by the first external working equipment, the ring-shaped flow generating cavity generates the pushing flow toward the delivery cavity through the at least one nozzle portion, so that the pushing flow drives the process gas to flow toward the flow output portion; wherein the pushing flow is a ring-shaped flow; and wherein a flow rate of the pushing flow generated by the jet module ranges from 1 to 600 SLM.

8. The active jet system of claim 6, wherein, The predetermined included angle is between 0 and 10 degrees; wherein the delivery cavity is located at the center of the device body, and the ring-shaped flow generating cavity surrounds the delivery cavity; wherein a cross section of the ring-shaped flow generating cavity is in a shape of a feather; and wherein the ring-shaped flow generating cavity further has a main cavity portion, the main cavity portion having a plume area and a shoulder area, the plume area connecting the side connection portion and the shoulder area, and the shoulder area connecting the at least one nozzle portion, a cross section of the plume area being in a shape of a cone, and a cross section of the shoulder area being in a shape of a C or a hook.

9. The active jet system of claim 6, wherein, ​ 10. The active jet system of claim 9, wherein, When the gas inlet part receives the driving airflow provided by the at least one gas supply module, the annular airflow generating cavity guides the driving airflow into the feather covering area through the side joint part; wherein the driving airflow sequentially flows through the feather covering area and the shoulder area, and flows into the conveying cavity in the predetermined path by the at least one nozzle part and forms the pushing airflow.

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