Test equipment and test system
By setting movable limiting parts and limiting mating parts in the testing equipment, the problem of insufficient relative positional accuracy between the semiconductor chip testing machine and the test board is solved, achieving higher mating accuracy and stability, and reducing processing difficulty and cost.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-06
- Publication Date
- 2026-03-10
AI Technical Summary
The high precision requirements for the relative position between existing semiconductor chip testing equipment and test boards increase processing difficulty and make connection errors and jamming problems more likely.
By setting movable limiting parts and limiting mating parts in the testing equipment, the moving part is allowed to move relative to the main body to adjust the relative position of the limiting part and the limiting mating part, thereby improving the mating accuracy. Furthermore, the motion accuracy is improved by using structures such as guide rails, ball rollers, or pulley grooves.
The machining accuracy requirements of the limiting part and the limiting mating part have been reduced, the relative positional accuracy and connection stability between the test piece and the test equipment have been improved, and the machining difficulty and cost have been reduced.
Smart Images
Figure CN121633773A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of chip testing, and in particular to a testing device and a testing system. BACKGROUND
[0002] A semiconductor chip testing machine usually needs to connect the internal testing resources of the machine with the chip through a chip testing board to complete the required testing items. The connection between the testing machine and the testing board can be that metal probes and printed circuit boards (PCBs) are in contact through vias and pads, wherein the metal probes can be arranged on the testing machine, the printed circuit board can be used as the testing board, and the number of channels connected between the testing machine and the testing board is large, usually more than ten thousand, and the relative position accuracy between the testing machine and the testing board is required to be high. SUMMARY
[0003] Embodiments of the present application provide a testing device and a testing system, which are used to improve the relative position accuracy between the testing device and the testing piece.
[0004] The first aspect of the embodiments of the present application provides a testing device for testing a to-be-tested object located on a testing piece, and the testing device comprises:
[0005] a main body part;
[0006] at least one moving part, which is installed on the main body part;
[0007] The moving part can move relative to the main body part in a plane perpendicular to the height direction of the testing device, and the moving part comprises a body part and at least one limiting part arranged on the body part, the body part is provided with a first connector, and the first connector is used for electrical connection with the testing piece.
[0008] During the connection between the testing device and the testing piece, the moving part can move relative to the main body part to adjust the relative position of the moving part and the main body part, so that the limiting part can be limited and matched with a limiting matching part arranged on the testing piece.
[0009] The relative position accuracy between the test equipment and the test piece can be improved by the limiting part and the limiting matching part. The limiting part and the first connector are arranged on the moving part, so that the limiting part and the first connector can move relative to the main body of the test equipment. When the test piece is matched, the moving part can move relative to the main body, so that the relative position between the moving part and the main body can be adjusted, the limiting part on the moving part can be matched with the limiting matching part on the test piece, the machining accuracy requirement of the limiting matching part can be reduced, the limiting part and the limiting matching part can be matched, and the smoothness of the test piece can be improved. When the relative position between the limiting matching part and the limiting part deviates, the moving part can be adjusted to adapt the position of the limiting matching part, so that the limiting part and the limiting matching part can be matched, and the smoothness of the test piece can be improved. In addition, the limiting part and the first connector are arranged on the moving part, so that the relative position between the first connector and the limiting part will not change during the movement of the moving part. The second connector and the limiting matching part are arranged on the test piece and are relatively fixed, so that the relative position between the second connector and the limiting matching part will not change. Therefore, when the limiting part moves to the position where the limiting part can be matched with the limiting matching part, the relative position between the first connector and the second connector is relatively fixed, so that the first connector and the second connector can be connected, the smoothness of the test piece can be improved, and the relative position between the test piece and the test equipment can be limited by the limiting part and the limiting matching part, so that the influence of the machining difficulty of the test piece on the matching accuracy caused by the increase of the size of the test piece can be reduced, and the relative position accuracy between the test piece and the test equipment can be improved.
[0010] In a possible implementation, the limiting part protrudes away from the main body relative to the body part.
[0011] The limiting part and the limiting matching part can be matched by the above design. The test piece is usually in a plate structure, and the limiting part in a protruding structure arranged on the test equipment can help reduce the size of the test piece.
[0012] In a possible implementation, the limiting part comprises a first limiting section and a second limiting section connected with each other, the second limiting section is connected with the body part, and the first limiting section is located on the side of the second limiting section away from the body part.
[0013] The cross-sectional area of the first limiting section gradually increases in the direction close to the second limiting section.
[0014] By gradually increasing the sectional area of the first limiting section in the direction close to the second limiting section, the first limiting section can form a guide structure. When the limiting portion and the limiting matching portion are matched, the first limiting section can first extend into the limiting matching portion. Since the size of the end of the first limiting section away from the second limiting section is small, the first limiting section can be easily extended into the limiting matching portion, and the matching difficulty of the limiting portion and the limiting matching portion can be reduced. After the first limiting section extends into the limiting matching portion, the test piece can continue to move in the direction close to the test equipment, i.e., along the limiting portion. The matching of the limiting portion and the limiting matching portion can limit the relative position between the test piece and the test equipment during the movement of the test piece. The side wall of the limiting matching portion can abut and slide along the side wall of the first limiting section to match with the second limiting section.
[0015] In a possible implementation, the moving portion is provided with at least two limiting portions, and each limiting portion is sequentially arranged in a plane perpendicular to the height direction of the test equipment.
[0016] By arranging multiple limiting portions, the relative position accuracy between the moving portion and the test piece can be improved, and the matching accuracy of the first connector located on the moving portion and the second connector located on the test piece can be improved. The stability of the connection between the first connector and the second connector can be improved, the occurrence of OS problems can be reduced, and the actual use requirements can be better met.
[0017] In a possible implementation, the main body portion is provided with a mounting groove on the side close to the moving portion. The mounting groove is recessed away from the moving portion, and the moving portion is mounted in the mounting groove.
[0018] By arranging the mounting groove on the main body portion, the moving portion can be limited, and the relative position accuracy between the moving portion and the main body portion can be improved. The moving portion can move in the mounting groove, and the possibility that the moving portion moves out of the main body portion due to large-scale movement can be reduced, and the actual use requirements can be better met.
[0019] In a possible implementation, the main body portion is provided with two mounting grooves, and the mounting grooves are located on opposite sides of the main body portion along the length direction of the test equipment.
[0020] The test equipment includes two moving portions, and the moving portions are respectively mounted in the corresponding mounting grooves.
[0021] By such a design, the first connector can be dispersedly arranged on each moving portion, so that the number of the first connector arranged on a single moving portion can be reduced, the size requirement of the moving portion can be reduced, the size of the moving portion can be reduced, the processing accuracy of the moving portion can be improved, and the processing difficulty can be reduced.
[0022] In a possible implementation, along the length direction of the main body part, the length of the mounting groove is a, the length of the moving part is b, and 0mm
[0023] Along the width direction of the main body part, the width of the mounting groove is c, the width of the moving part is d, and 0mm
[0024] By setting a margin in the mounting groove, the moving part can move to cooperate with the limiting part of the test piece. When the difference between the size of the mounting groove and the size of the moving part is greater than 1mm, the moving part can move in a relatively large range. After the limiting part and the limiting part cooperate, the moving part can still move in a relatively large range, so that the test piece is prone to shake relative to the test equipment, thereby affecting the stability of the connection between the first connector and the second connector, and thereby affecting the test result.
[0025] In a possible implementation, one of the main body part and the moving part is provided with a guide rail, and the other is provided with a moving piece, the moving piece cooperates with the guide rail and can move along the guide rail.
[0026] The moving part can move along the guide rail relative to the main body part, which is conducive to improving the movement accuracy of the moving part.
[0027] In a possible implementation, the moving part is provided with a ball roller on the side facing the main body part, and the ball roller is in contact with the main body part.
[0028] By providing a ball roller on the moving part, the moving part can move relative to the main body part.
[0029] In a possible implementation, one of the main body part and the moving part is provided with a pulley, and the other is provided with a sliding groove, the pulley cooperates with the sliding groove and can move along the sliding groove.
[0030] The moving part cooperates with the main body part through the pulley and the sliding groove, which is conducive to improving the movement accuracy of the moving part relative to the main body part.
[0031] The application also provides a test system, which comprises a test piece provided with a to-be-tested object and the test equipment.
[0032] The test piece is provided with a limiting part, and at least part of the limiting part of the test equipment extends into the limiting part when the test piece is arranged on the test equipment.
[0033] The embodiment of the present application provides a test device and a test system, the test device comprises a main body part and at least one moving part, the moving part is installed on the main body part and can move relative to the main body part in a plane perpendicular to the height direction of the test device, the moving part comprises a body part and at least one limiting part arranged on the body part, the body part is provided with a first connector, and the first connector is used for electrically connecting with a test piece. When the test device is connected with the test piece, the moving part can move relative to the main body part, so that the limiting part and a limiting matching part of the test piece are limited and matched. By arranging the limiting part and the limiting matching part, the matching precision of the limiting part and the limiting matching part can be improved, the limiting part is arranged on the moving part, so that the test device and the test piece can be matched conveniently, the matching difficulty of the test device and the test piece is reduced, the position precision requirement of the limiting part and the limiting matching part is reduced, the processing difficulty and the processing cost are reduced, and this is beneficial to reducing the processing difficulty and the processing cost. BRIEF DESCRIPTION OF DRAWINGS
[0034] Figure 1 A schematic view of a first embodiment of a test system provided by the present application;
[0035] Figure 2 A schematic view of a first connection part and a second connection part provided by the present application;
[0036] Figure 3 A schematic view of a first embodiment of a test piece and a test device provided by the present application;
[0037] Figure 4 A schematic view of a first embodiment of a test piece provided by the present application;
[0038] Figure 5 A schematic view of a second embodiment of a test piece provided by the present application;
[0039] Figure 6 A schematic view of a second embodiment of a test system provided by the present application; Figure 3 A partial enlarged view of a position I;
[0040] Figure 7 A schematic view of a second embodiment of a test system provided by the present application;
[0041] Figure 8 A schematic view of a test piece and a test device provided by the present application;
[0042] Figure 9 A bottom view of a test piece and a test device provided by the present application;
[0043] Figure 10 A schematic view of a third embodiment of a test device provided by the present application;
[0044] Figure 11 A schematic view of a fourth embodiment of a test device provided by the present application;
[0045] Figure 12 FIG. 5 is a schematic view of a fifth embodiment of the test device provided in the present application.
[0046] 1-test device, 11-body part, 111-mounting groove, 112-guide rail, 113-sliding groove, 12-moving part, 121-body part, 122-limiting part, 122a-first limiting section, 122b-second limiting section, 123-moving piece, 124-roller, 125-pulley, 13-first connector, 131-first connecting part, 14-resource board card, 15-chassis;
[0047] 2-test piece, 21-device under test, 22-limiting fitting part, 23-second connector, 231-second connecting part; 24-placing area. DETAILED DESCRIPTION
[0048] In order to better understand the technical solutions of the present application, the embodiments of the present application will be described in detail below with reference to the accompanying drawings.
[0049] It should be clear that the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0050] The terms used in the embodiments of the present application are only for the purpose of describing the specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of the present application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise.
[0051] The test device of the semiconductor chip usually needs to pass through the test piece to connect the test resource inside the test device with the device under test (DUT) of the test piece to complete each required test item. The chip test board usually includes a probe card (PC) and a load board (LB), and the device under test is usually a chip. In order to meet the test requirements of different devices under test, the test device needs to have a certain universality, and the test piece needs to be frequently replaced according to different devices under test.
[0052] The test equipment and the test piece can be connected by metal probes and printed circuit boards (PCBs) through vias and pads. The metal probes can be placed on the test equipment, and the PCB can be used as a test piece to place the object under test. The number of channels connecting the test equipment and the test piece usually exceeds 10,000, which places very high demands on the relative positioning between the test equipment and the test piece, and each channel must make normal contact.
[0053] like Figure 1 As shown, Figure 1 This is a schematic diagram of a first embodiment of the testing system provided in this application. In one possible implementation, the testing system includes a testing device 1 and a test piece 2. The test piece 2 has a test object 21 disposed on it, and the testing device 1 is used to test the test object 21. The testing device 1 includes a main body 11, and the main body 11 is provided with a first connector 13. The test object 21 is disposed on the test piece 2, and the test piece 2 is provided with a second connector 23. The test object 21 can be a chip, and the test piece 2 can be a test board, etc. In use, the test piece 2 with the test object 21 is disposed on the testing device 1. The first connector 13 of the testing device 1 is electrically connected to the second connector 23 of the test piece 2 to establish a communication connection. The first connector 13 can be a cable connector, etc., and the second connector 23 is a structure that can achieve an electrical connection with the first connector 13. The test equipment 1 may further include a chassis 15, which is connected to the main body 11. The chassis 15 is equipped with a resource board 14, which stores test resources and is electrically connected to a first connector 13. When the first connector 13 and the second connector 23 are electrically connected, the resource board 14 can be electrically connected to the object under test 21 via the first connector 13 and the second connector 23, thereby performing tests on the object under test 21 based on the information stored in the resource board 14. Figure 2 As shown, Figure 2 This is a schematic diagram of the cooperation between the first connecting part 131 and the second connecting part 231 provided in the embodiments of this application. The main body 11 may be provided with a plurality of first connectors 13, each first connector 13 may be provided with a plurality of first connecting parts 131, and each second connector 23 may be provided with a plurality of second connecting parts 231. When the test piece 2 is placed on the test device 1, the first connecting part 131 of each first connector 13 can be electrically connected with the second connecting part 231 of the corresponding second connector 23, so that the resource board 14 is connected to the test object 21 located on the test piece 2, so as to test the test object 21. Figure 2 The direction of the middle arrow indicates the direction of movement of the first connecting part 131 relative to the second connecting part 231 when the test piece 2 and the test equipment 1 are connected. The first connecting part 131 can be a structure such as a spring pin, and the second connecting part 231 can be a hole structure.
[0054] like Figure 3 As shown, Figure 3 This is a schematic diagram of a first embodiment of the cooperation between the test piece 2 and the test device 1 provided in this application. In one possible implementation, to improve the relative positional accuracy of the test piece 2 and the test device 1, so that the first connector 13 and the second connector 23 can be accurately connected, a limiting part 122 can usually be provided in the test device 1, and a limiting mating part 22 can be provided in the test piece. During the connection process between the test device 1 and the test piece 2, the limiting part 122 and the limiting mating part 22 engage to limit the relative position of the test device 1 and the test piece 2. The limiting part 122 can be a protrusion, and the limiting mating part 22 can be a recess. In use, at least a portion of the limiting part 122 of the test device 1 can extend into the limiting mating part 22 of the test piece 2 to limit the relative position between the test piece 2 and the test device 1, thereby improving the relative positional accuracy between the test piece 2 and the test device 1, which is beneficial to improving the connection accuracy between the first connector 13 and the second connector 23. The limiting part 122 can be a positioning pin or a positioning post, and the limiting mating part 22 can be a limiting hole, a limiting groove, or other structures.
[0055] With the development of technology, the test object 21 has increased requirements for test resources. Simultaneously, to accommodate the size of the test object 21 and / or improve test efficiency, it is necessary to increase the placement area 24 of the test piece 2 for placing the test object 21, so as to accommodate larger test objects 21, and / or, simultaneously place multiple test objects 21 in the placement area 24 of the test piece 2. For example... Figure 4 As shown, Figure 4 This is a schematic diagram of the first embodiment of the test piece 2 provided in this application. In one possible implementation, the size of the placement area 24 along the length direction X of the test piece 2 is m. To adapt to testing requirements, the placement area 24 can accommodate larger test objects 21, or can simultaneously place more test objects 21 in the placement area 24 for testing. Figure 5 As shown, Figure 5 This is a schematic diagram of the second embodiment of the test piece 2 provided in this application. Figure 5The test piece 2 shown has a placement area 24 with a dimension of n along its length X, where n > m. This design increases the overall dimension of the test piece 2 along its length X, resulting in a larger volume. This increased volume affects the positioning accuracy of the limiting fit part 22. For the same accuracy level, a larger overall size of the test piece 2 increases the difficulty of setting the limiting fit part 22. Therefore, increasing the size of the test piece 2 increases processing difficulty and cost. Furthermore, the increased processing difficulty can lead to a decrease in the processing accuracy of the test piece 2, which in turn affects the positional accuracy of the limiting fit part 22. Figure 6 As shown, when the positional accuracy of the limiting fitting part 22 decreases, fitting errors are likely to occur between the limiting fitting part 22 of the test piece 2 and the limiting part 122 of the test device 1, affecting the fitting accuracy between the limiting part 122 and the limiting fitting part 22. This can lead to jamming and difficulty in picking up and putting down the test piece 2, reducing the relative positional accuracy between the test piece 2 and the test device 1, and even causing misalignment between the limiting part 122 and the limiting fitting part 22, making it impossible for them to fit together. Figure 6 The grid lines represent the areas where interference occurs between the test piece 2 and the limiting part 122. It should be noted that... Figure 6 For illustrative purposes only. In actual products, when interference occurs between test piece 2 and limiting part 122, the limiting mating part 22 of test piece 2 may fail to mate with the limiting part 122. Due to the interference between the limiting part 122 and the limiting mating part 22, the relative positional accuracy between test piece 2 and test device 1 decreases, or even fails to mate. This can easily lead to the first connecting part 131 of the first connector 13 failing to connect with the corresponding second connecting part 231 of the second connector 23, resulting in incorrect connection between the first connector 13 and the second connector 23, leading to short circuits, open circuits, and other open short circuit (OS) problems. Furthermore, the higher the mating accuracy between the limiting part 122 and the limiting mating part 22, the smaller the gap between them during mating. A smaller gap makes it easier for jamming or other issues to occur during placement and removal, leading to difficulties in placement and removal. When the placement and removal of test piece 2 are performed manually, the operator can adjust the force and speed according to the specific circumstances, slowly placing or removing test piece 2 from test equipment 1. However, when the placement and removal of test piece 2 are performed by automated equipment, the smoothness of the placement and removal is required to be relatively high.
[0056] like Figure 7 As shown, Figure 7This is a schematic diagram of a second embodiment of the testing system provided in this application. In one possible implementation, the testing device 1 may include a main body 11 and at least one moving part 12. The moving part 12 is mounted on the main body 11 and is capable of moving relative to the main body 11 in a plane perpendicular to the height direction of the testing device 1, that is, the moving part 12 can move relative to the main body 11 along the length direction X and / or width direction Y of the testing device 1. The moving part 12 includes a body 121 and at least one limiting part 122. The protrusion can serve as the limiting part 122 and is provided on the body 121 to facilitate cooperation with the test piece 2. The body 121 is provided with a first connector 13, which is used for electrical connection with the second connector 23 of the test piece 2. The protrusion serving as the limiting part 122 is used to cooperate with the limiting mating part 22 of the test piece 2. Figure 8 As shown, Figure 8 This is a schematic diagram illustrating the cooperation between the test piece 2 and the test device 1 provided in this embodiment. The test piece 2 is provided with a limiting fitting portion 22, which can be a recess. In use, at least a portion of the limiting portion 122 can extend into the limiting fitting portion 22 of the test piece 2 to limit the relative position between the test device 1 and the test piece 2. During the connection process between the test device 1 and the test piece 2, the moving part 12 can move relative to the main body 11. By adjusting the position of the moving part 12, the position of the limiting portion 122 can be adjusted so that the limiting portion 122 can cooperate with the limiting fitting portion 22 provided on the test piece 2.
[0057] By setting the limiting part 122 and the limiting mating part 22, the relative positional accuracy between the mating test equipment 1 and the test piece 2 can be improved. By providing the limiting part 122 and the first connector 13 to the moving part 12, the limiting part 122 and the first connector 13 can move relative to the main body 11 of the testing device 1. When cooperating with the test piece 2, since the moving part 12 can move relative to the main body 11, the relative position of the moving part 12 and the main body 11 can be adjusted so that the limiting part 122 located on the moving part 12 can cooperate with the limiting mating part 22 located on the test piece 2. This reduces the machining accuracy requirements of the limiting mating part 22 and facilitates the cooperation between the limiting part 122 and the limiting mating part 22. When the relative position between the limiting mating part 22 and the limiting part 122 is offset, the moving part 12 can be adjusted so that the limiting part 122 adapts to the position of the limiting mating part 22, so that the limiting part 122 and the limiting mating part 22 cooperate. The limiting part 122 can adapt to the position of the limiting mating part 22, thereby improving the smoothness of picking up and placing the test piece 2. Furthermore, since both the limiting part 122 and the first connector 13 are located on the moving part 12, the relative positions of the first connector 13 and the limiting part 122 do not change during the movement of the moving part 12. The second connector 23 and the limiting mating part 22 are both relatively fixedly located on the test piece 2, and their relative positions also do not change. Therefore, when the limiting part 122 moves to engage with the limiting mating part 22, the relative positions of the first connecting part 131 and the second connector 23 are also relatively determined, allowing the first connector 13 to connect with the second connector 23. This improves the smoothness of picking up and placing the test piece 2, and also restricts the relative position between the test piece 2 and the testing device 1 through the engagement of the limiting part 122 and the limiting mating part 22. This helps reduce the impact of the increased processing difficulty caused by the larger size of the test piece 2 on the fitting accuracy, thereby improving the relative positional accuracy between the test piece 2 and the testing device 1.
[0058] The solution provided in this application embodiment can be used to adjust the position of the limiting part 122 when the test piece 2 is used in conjunction with the test equipment 1, so as to facilitate the cooperation between the limiting part 122 and the limiting mating part 22, thereby reducing the impact of the increase in the size of the test piece 2 on the processing accuracy. The limiting part 122 can move within a certain range and can better cooperate with the limiting mating part 22, thereby reducing the positional accuracy requirements of the limiting mating part 22 and helping to reduce the processing difficulty.
[0059] In one possible implementation, the limiting portion 122 protrudes away from the main body portion 11 relative to the main body portion 121.
[0060] This design facilitates the engagement of the limiting part 122 with the limiting mating part 22. The test piece 2 is typically a plate-like structure, and placing the protruding limiting part 122 in the test equipment 1 helps to reduce the volume of the test piece 2.
[0061] like Figure 8 As shown, in one possible implementation, the limiting portion 122 includes a first limiting segment 122a and a second limiting segment 122b connected to each other, wherein the second limiting segment 122b is connected to the body portion 121, and the first limiting segment 122a is located on the side of the second limiting segment 122b away from the body portion 121. Along the direction approaching the second limiting segment 122b, the cross-sectional area of the first limiting segment 122a gradually increases. The first limiting segment 122a can be approximately a conical structure.
[0062] By gradually increasing the cross-sectional area of the first limiting segment 122a along the direction closer to the second limiting segment 122b, the first limiting segment 122a can form a guide structure. When the limiting part 122 and the limiting mating part 22 are engaged, the first limiting segment 122a can first extend into the limiting mating part 22. Since the size of the end of the first limiting segment 122a away from the second limiting segment 122b is smaller, it is easier to extend the first limiting segment 122a into the limiting mating part 22, which can reduce the difficulty of engaging the limiting part 122 and the limiting mating part 22. After the first limiting segment 122a extends into the limiting mating part 22, the test piece 2 can continue to move towards the test equipment 1, that is, move along the limiting part 122. The cooperation between the limiting part 122 and the limiting mating part 22 can limit the relative position between the test piece 2 and the test equipment 1 during the movement of the test piece 2. The side wall of the limiting mating part 22 can abut against the side wall of the first limiting segment 122a and slide along the side wall of the first limiting segment 122a until it engages with the second limiting segment 122b.
[0063] The sidewall of the first limiting segment 122a can be a slope, an arc surface or other structure, so that the sidewall of the limiting mating part 22 can slide relative to the sidewall of the first limiting segment 122a after it comes into contact with the sidewall of the first limiting segment 122a, which helps to improve the smoothness of mating and is more in line with actual use requirements.
[0064] In one possible implementation, the moving part 12 may be provided with at least two limiting parts 122, which are arranged in a plane along the height direction of the vertical testing device 1, that is, each limiting part 122 may be arranged sequentially along the length direction X or the width direction Y of the testing device 1. Figure 9 This is a bottom view of the test piece 2 and test equipment 1 provided in the embodiments of this application, with the dashed lines representing the obscured structures. Figure 9In the illustrated scheme, each moving part 12 can be provided with two limiting parts 122, and correspondingly, the test piece 2 is provided with two limiting mating parts 22, with each limiting part 122 mating with its corresponding limiting mating part 22. Depending on the requirements, the number of limiting parts 122 provided in each moving part 12 can also be three, four, or more, and the number of limiting mating parts 22 corresponds to the number of limiting parts 122.
[0065] By setting multiple limiting parts 122, the relative positional accuracy between the moving part 12 and the test piece 2 can be improved, thereby improving the fitting accuracy of the first connector 13 located on the moving part 12 and the second connector 23 located on the test piece 2. This can improve the stability of the connection between the first connector 13 and the second connector 23, reduce the possibility of OS and other problems, and better meet the actual usage requirements.
[0066] like Figure 7 As shown, in one possible embodiment, the main body 11 is provided with a mounting groove 111 on the side facing the moving part 12, and the mounting groove 111 is recessed on the side away from the moving part 12, and the moving part 12 is mounted in the mounting groove 111.
[0067] By providing a mounting groove 111 in the main body 11, the moving part 12 can be limited, improving the relative positional accuracy between the moving part 12 and the main body 11. The moving part 12 can move within the mounting groove 111, reducing the possibility of the moving part 12 detaching from the main body 11 due to large-scale movement, which better meets actual usage requirements.
[0068] like Figure 7 As shown, in one possible implementation, the main body 11 may be provided with two mounting slots 111, located on opposite sides of the main body 11 along the length direction X of the testing device 1. The testing device 1 may include two moving parts 12, each of which is mounted in a corresponding mounting slot 111.
[0069] This design allows the first connectors 13 to be distributed among the moving parts 12, thereby reducing the number of first connectors 13 on a single moving part 12, lowering the size requirements for the moving parts 12, reducing the size of the moving parts 12, improving the machining accuracy of the moving parts 12, and reducing the machining difficulty.
[0070] In one possible implementation, along the length direction X of the main body 11, the length of the mounting groove 111 is a, and the length of the moving part 12 is b, where a and b satisfy 0 mm < ab ≤ 2 mm, and / or, along the width direction Y of the main body 11, the width of the mounting groove 111 is c, and the length of the moving part 12 is d, where c and d satisfy 0 mm < cd ≤ 2 mm. That is, the movement range of the moving part 12 is between 0 and 2 mm. The size of ab can be 0.1 mm, 0.2 mm, 0.4 mm, 0.6 mm, 0.8 mm, 1.0 mm, 1.2 mm, 1.4 mm, 1.6 mm, 1.8 mm, 2.0 mm, etc. The size of cd can be 0.1 mm, 0.2 mm, 0.4 mm, 0.6 mm, 0.8 mm, 1.0 mm, 1.2 mm, 1.4 mm, 1.6 mm, 1.8 mm, 2.0 mm, etc. In one possible implementation, along the length direction X of the main body 11, the length of the mounting groove 111 is 12 mm, and the length of the moving part 12 is 10 mm.
[0071] By setting a margin in the mounting groove 111, the moving part 12 can move to cooperate with the limiting fitting part 22 of the test piece 2. When the difference between the size of the mounting groove 111 and the size of the moving part 12 is greater than 2 mm, the range of movement of the moving part 12 is relatively large. After the limiting part 122 and the limiting fitting part 22 cooperate, the moving part 12 can still move within a large range, which makes the test piece 2 prone to large shaking relative to the test equipment 1, thereby affecting the stability of the connection between the first connector 13 and the second connector 23, and thus affecting the test results.
[0072] In the solution provided in this application embodiment, the position of the first connector 13 located on the moving part 12 can be finely adjusted. When the testing equipment 1 is used in conjunction with a test piece 2 of the same model or size, the position of the moving part 12 can be adjusted to match the position of the test piece 2, thereby reducing the impact of reduced processing accuracy caused by the increase in the size of the test piece 2. When there is a deviation in the position of the limiting fitting part 22 on the test piece 2, the moving part 12 can be finely adjusted according to the position of the limiting fitting part 22. Since the positions of the moving part 12 and the first connector 13 are relatively fixed, the position of the first connector 13 can be adjusted simultaneously so that the test piece 2 can better cooperate with the testing equipment 1. When the first connector 13 and the limiting part 122 are both fixedly arranged in the main body 11, since the limiting part 122 is provided on both sides of the main body 11, and the test piece 2 is provided with two corresponding limiting mating parts 22, during mating, not only is the relative positional accuracy between the limiting part 122 and the limiting mating part 22 required to be high, but the relative positional accuracy between each limiting part 122 and the relative positional accuracy between each limiting mating part 22 are also required to be high. Taking the test device 1 including two limiting parts 122 and the test piece 2 provided with two limiting mating parts 22 as an example, during mating, the two limiting parts 122 and the two limiting mating parts 22 need to meet the positioning accuracy requirements at the same time. It is necessary not only to limit the relative position between the limiting part 122 and the corresponding limiting mating part 22, but also to limit the relative position between the limiting parts 122 and the relative position between the limiting mating parts 22 in order to achieve smooth picking and placing. In the solution provided by the embodiments of this application, since each moving part 12 can move relatively independently, the positions of the two limiting parts 122 can be adjusted independently. Therefore, the positions of the limiting parts 122 located on each moving part 12 can be matched with the corresponding limiting mating parts 22. The relative positional accuracy requirements between the limiting parts 122 are low. While improving the relative positional accuracy between the test piece 2 and the test equipment 1 through the limiting parts 122 and the limiting mating parts 22, the accuracy requirements for the limiting parts 122 and the limiting mating parts 22 can also be reduced. This helps to reduce the processing difficulty, thereby reducing the cost and better meeting the actual use needs.
[0073] like Figure 10 The diagram shown is a schematic diagram of the third embodiment of the test device 1 provided in this application. In one possible implementation, one of the main body 11 and the moving part 12 is provided with a guide rail 112, and the other is provided with a moving member 123. The moving member 123 cooperates with the guide rail 112 and can move along the guide rail 112. Figure 10 In the scheme shown, the movable member 123 is provided on the side of the movable part 12 facing the main body 11. The guide rail 112 can be provided on the inner wall of the mounting groove 111 of the main body 11. The movable part 12 is installed on the main body 11 by the cooperation of the movable member 123 and the guide rail 112.
[0074] The ability of the moving part 12 to move relative to the main body 11 along the guide rail 112 helps to improve the movement accuracy of the moving part 12.
[0075] The guide rail 112 can be a linear guide rail, which has the advantages of high precision, high rigidity, good repeatability, smooth movement, and long service life. The moving part 12 can move repeatedly along the linear guide rail to cooperate with the limiting mating part 22 of different test pieces 2.
[0076] like Figure 11 As shown, Figure 11 This is a schematic diagram of a fourth embodiment of the test device 1 provided in this application. In one possible implementation, a ball roller 124 is provided on the side of the moving part 12 facing the main body part 11.
[0077] By providing a ball roller 124 in the moving part 12, it is easy for the moving part 12 to move relative to the main body 11.
[0078] The ball roller 124 has the advantages of low coefficient of friction, high load capacity, high motion accuracy, and long service life.
[0079] like Figure 12 As shown, Figure 12 This is a schematic diagram of the fifth embodiment of the test device 1 provided in this application. In one possible implementation, one of the main body 11 and the moving part 12 is provided with a pulley 125 and the other is provided with a slide groove 113. The pulley 125 cooperates with the slide groove 113 and can move along the slide groove 113.
[0080] The moving part 12 cooperates with the main body 11 through a pulley and groove, which helps to improve the motion accuracy of the moving part 12 relative to the main body 11.
[0081] The combination of pulleys and grooves has the advantages of saving effort, reducing friction, and providing high flexibility.
[0082] Based on the testing device 1 involved in the above embodiments, this application also provides a testing system. The testing system includes a testing device 1 and a test piece 2 on which a test object 21 is disposed. The testing device 1 can be any of the testing devices 1 involved in the above embodiments. The test piece 2 is provided with a limiting fit portion 22, and the moving part 12 of the testing device 1 is provided with a limiting part 122. In use, the test piece 2 is disposed on the testing device 1, and at least a portion of the limiting part 122 extends into the limiting fit portion 22 to limit the relative position between the test piece 2 and the testing device 1, thereby improving the relative fit accuracy between the first connecting part 131 located on the moving part 12 and the second connecting part 231 located on the test piece 2.
[0083] In use, the test object 21 can be placed on the test piece 2. The test object 21 can be a chip, and the test piece 2 can be a test board. A placement area 24 is provided in the middle of the test piece 2, and one or more test objects 21 are placed in the placement area 24. The test piece 2 is also provided with multiple second connectors 23, which are distributed on both sides of the placement area 24. The test piece 2 is placed on the test device 1, and the position of the moving part 12 is finely adjusted so that the limiting part 122 located on the moving part 12 can extend into the limiting mating part 22 of the test piece 2 to limit the relative position of the test piece 2 with respect to the test device 1. The test device 1 can include two moving parts 12, which are located on opposite sides of the test device 1 along the length direction X. Each moving part 12 is provided with a limiting part 122 for mating with the limiting part of the test piece 2. Furthermore, each moving part 12 can move independently relative to the main body 11 to change its relative position with the main body 11, thereby reducing the requirement for the relative positional accuracy between the limiting part 122 and the limiting mating part 22.
Claims
1. A test apparatus for testing an object to be tested located at a test piece, characterized by, The test device comprises: a main body part; at least one moving part mounted on the main body part; wherein the moving part is movable relative to the main body part in a plane perpendicular to the height direction of the test device, the moving part comprises a body part and at least one limiting part provided on the body part, the body part is provided with a first connector for electrically connecting with the test piece; during the connection of the test device with the test piece, the moving part is movable relative to the main body part to adjust the relative position of the moving part and the main body part, so that the limiting part can be limitedly matched with a limiting matching part provided on the test piece.
2. The test apparatus of claim 1, wherein, The limiting part protrudes relative to the body part in a direction away from the main body part.
3. The test apparatus of claim 2, wherein, The limiting part comprises a first limiting section and a second limiting section connected with each other, the second limiting section is connected with the body part, and the first limiting section is located on a side of the second limiting section away from the body part; In a direction close to the second limiting section, the cross-sectional area of the first limiting section gradually increases.
4. The test apparatus of claim 3, wherein, The moving part is provided with at least two limiting parts, and each limiting part is sequentially arranged in a plane perpendicular to the height direction of the test device.
5. The test apparatus of claim 1, wherein, The side of the main body part facing the moving part is provided with a mounting groove recessed in a direction away from the moving part, and the moving part is mounted in the mounting groove.
6. The test apparatus of claim 5, wherein, The main body part is provided with two mounting grooves, and the mounting grooves are located on opposite sides of the main body part in the length direction of the test device. The test device comprises two moving parts, and the moving parts are respectively mounted in the corresponding mounting grooves.
7. The test apparatus of claim 6, wherein, In the length direction of the main body part, the length of the mounting groove is a, the length of the moving part is b, and 0mm In the width direction of the main body part, the width of the mounting groove is c, the width of the moving part is d, and 0mm 8. The testing apparatus of any one of claims 1 to 7, wherein, One of the main body part and the moving part is provided with a guide rail, and the other is provided with a moving part, the moving part is matched with the guide rail and can move along the guide rail.
9. The test apparatus according to any one of claims 1 to 7, characterized in that, The side of the moving part facing the main body part is provided with a ball roller, and the ball roller is in contact with the main body part.
10. The test apparatus of any one of claims 1 to 7, wherein, One of the main body part and the moving part is provided with a pulley, and the other is provided with a sliding groove, the pulley is matched with the sliding groove and can move along the sliding groove.
11. A test system, characterized by The test system comprises a test piece provided with a to-be-tested object and the test device according to any one of claims 1-10; wherein the test piece is provided with a limiting matching part, and when the test piece is arranged on the test device, at least part of the limiting part of the test device extends into the limiting matching part.