Anti-collision control method for gantry device in semiconductor detection equipment

Abstract

The invention provides an anti-collision control method for a gantry device in semiconductor detection equipment, and relates to the field of semiconductors, and the method comprises the steps: obtaining the current position of each gantry, and at least one target position to which the gantry device is to move in sequence according to the original target trajectory of the gantry device; calculating the relative distance between the two gantries based on the first gantry position and the second gantry position; the relative distance comprises a current relative distance calculated based on the current positions of the two gantries and a predicted relative distance calculated based on the current position of one of the two gantries and the target position of the other gantry; and based on the relative distance between the two gantries, executing the following anti-collision detection control strategy: if the current relative distance is greater than a set safety threshold value and the predicted relative distance is less than or equal to the set safety threshold value, controlling one of the two gantries to stop moving, and controlling the other gantry to move according to an original target track, and the risk of collision between the two gantries is reduced.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor technology, and particularly relates to a collision prevention control method for a gantry device in a semiconductor inspection equipment. BACKGROUND

[0002] In a semiconductor manufacturing process such as but not limited to a semiconductor display, it is usually necessary to use a semiconductor inspection equipment to detect defects of a semiconductor device after a certain process is completed, so as to determine whether the process requirements are met, count the yield of the process, or analyze the causes of defects, etc. A gantry device is usually provided in the semiconductor inspection equipment, and the gantry device usually includes two or more gantries, which move on the same gantry rail to drive the cameras, illumination light sources, etc. provided on the gantries to move. In the related art, a certain collision prevention control strategy is usually used to prevent the two gantries from colliding with each other during movement. However, the collision risk of the collision prevention control strategy in the related art is very high. SUMMARY

[0003] The main purpose of the present disclosure is to provide a collision prevention control method for a gantry device in a semiconductor inspection equipment, so as to reduce the risk of collision between two gantries.

[0004] In order to achieve the above-mentioned purpose, the first aspect of the present disclosure provides a collision prevention control method for a gantry device in a semiconductor inspection equipment, the gantry device including a gantry rail and two gantries capable of moving towards each other or moving away from each other along the extension direction of the gantry rail, and the collision prevention control method includes: obtaining the current position of each of the two gantries, and at least one target position to be moved to in turn according to the original target trajectory of each gantry; defining any one of the current position of a first gantry of the two gantries and at least one target position to be moved to in turn according to the original target trajectory of the first gantry as a first gantry position; defining any one of the current position of a second gantry of the two gantries and at least one target position to be moved to in turn according to the original target trajectory of the second gantry as a second gantry position; based on the first gantry position and the second gantry position, calculating the relative distance between the two gantries; the relative distance includes a current relative distance calculated based on the current positions of the two gantries, and a predicted relative distance calculated based on the current position of one of the two gantries and the target position of the other gantry; based on the relative distance between the two gantries, executing the following collision prevention detection control strategy: If the current relative distance is greater than the set safety threshold and the predicted relative distance is less than or equal to the set safety threshold, control one of the two gantries to suspend movement, and control the other gantry to move according to the original target trajectory thereof.

[0005] In some embodiments of the present disclosure, the anti-collision detection control strategy further comprises: if the current relative distance is less than or equal to the set safety threshold, immediately control both gantries to stop moving.

[0006] In some embodiments of the present disclosure, the anti-collision detection control strategy further comprises: if both the current relative distance and the predicted relative distance are greater than the set safety threshold, control both gantries to move according to the original target trajectory thereof.

[0007] In some embodiments of the present disclosure, the at least one target position comprises: a first target position to which each gantry moves based on the current position thereof; The predicted relative distance comprises: a first predicted relative distance calculated based on the current position of the first gantry and the first target position of the second gantry; If the current relative distance is greater than the set safety threshold and the first predicted relative distance is less than or equal to the set safety threshold, control the first gantry to move according to the original target trajectory thereof, and control the second gantry to suspend movement.

[0008] In some embodiments of the present disclosure, the predicted relative distance comprises: a second predicted relative distance calculated based on the first target position of the first gantry and the current position of the second gantry; If the current relative distance is greater than the set safety threshold and the second predicted relative distance is less than or equal to the set safety threshold, control the second gantry to suspend movement, and control the first gantry to move according to the original target trajectory thereof.

[0009] In some embodiments of the present disclosure, the at least one target position further comprises: a second target position to which each gantry moves after moving to the first target position; The predicted relative distance comprises: a third predicted relative distance calculated based on the current position of the first gantry and the second target position of the second gantry; If the current relative distance is greater than the set safety threshold and the third predicted relative distance is less than or equal to the set safety threshold, control the first gantry to move according to the original target trajectory thereof, and control the second gantry to suspend movement.

[0010] In some embodiments of the present disclosure, the predicted relative distance comprises: a fourth predicted relative distance calculated based on the second target position of the first gantry and the current position of the second gantry; If the current relative distance is greater than the set safety threshold and the fourth predicted relative distance is less than or equal to the set safety threshold, control the second gantry to suspend movement, and control the first gantry to move according to the original target trajectory thereof.

[0011] In some embodiments of the present disclosure, the gantry device comprises a grating ruler, a first scale formed based on the grating ruler, and a first reading head arranged on the first gantry and used for reading the first scale to determine a current position coordinate of the first gantry; The gantry device further comprises a second scale formed based on the grating ruler, and a second reading head arranged on the second gantry and used for reading the second scale to determine a current position coordinate of the second gantry; The scale marks of the first scale and the second scale are in opposite order, and the interval between the first zero scale of the first scale and the second zero scale of the second scale defines a set effective stroke of the two gantries. The anti-collision control method further comprises: if the current position coordinate of the first gantry reaches the set effective stroke, controlling the first gantry to stop moving immediately; and if the current position coordinate of the second gantry reaches the set effective stroke, controlling the second gantry to stop moving immediately.

[0012] In some embodiments of the present disclosure, the target position coordinate of the first gantry is determined based on the first scale, so that the position coordinate of the first gantry is determined based on the first scale; and the target position coordinate of the second gantry is determined based on the second scale, so that the position coordinate of the second gantry is determined based on the first scale. Based on the first gantry position and the second gantry position, the relative distance between the two gantries is calculated, including: subtracting the difference between the first gantry position coordinate and the second gantry position coordinate from the set effective stroke to obtain the relative distance between the two gantries.

[0013] In some embodiments of the present disclosure, the current position of each of the two gantries and at least one target position to be moved in turn according to the original target trajectory are periodically obtained, and the first gantry position and the second gantry position are periodically updated. Based on the latest obtained first gantry position and second gantry position, the relative distance between the two gantries is calculated. Based on the latest calculated relative distance between the two gantries, the anti-collision detection control strategy is executed again.

[0014] The second aspect of the present disclosure provides a computer readable storage medium, which stores computer instructions for making a computer execute the anti-collision control method of the gantry device in the semiconductor detection device provided in any one of the first aspect.

[0015] The third aspect of the present disclosure provides an electronic device, comprising: at least one processor; and a memory connected with the at least one processor in communication; wherein the memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor to make the at least one processor execute the anti-collision control method of the gantry device in the semiconductor detection device according to any one of the first aspect.

[0016] In the anti-collision control method of the gantry device in the semiconductor detection device provided by the embodiments of the present disclosure, the current positions of each of the two gantries and at least one target position to be moved in turn according to the respective original target trajectories are obtained, and the current relative distance and the predicted relative distance between the two gantries are calculated, wherein the predicted relative distance is calculated based on the current position of one of the two gantries and the target position of the other gantry, so that when the current relative distance is greater than the set safety threshold and the predicted relative distance is less than or equal to the set safety threshold, one of the two gantries is controlled to pause movement and then move after a time delay, and the other gantry moves according to its original target trajectory, thereby reducing the risk of collision between the two gantries. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the specific embodiments or related art of the present disclosure, the drawings needed in the specific embodiments or related art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present disclosure, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0018] Figure 1 The flowchart of the anti-collision control method of the gantry device in the semiconductor detection device provided by an embodiment of the present disclosure is shown in the figure. Figure 2 The flowchart of the anti-collision control method of the gantry device in the semiconductor detection device provided by another embodiment of the present disclosure is shown in the figure. Figure 3 The top view schematic block diagram of the gantry device in the semiconductor detection device provided by an embodiment of the present disclosure is shown in the figure. Figure 4 The cross-sectional view schematic block diagram of part of the structure of the gantry device in the semiconductor detection device provided by an embodiment of the present disclosure is shown in the figure. Figure 5 The schematic diagram of the scale and the read head in the grating ruler in the semiconductor detection device provided by an embodiment of the present disclosure is shown in the figure. Figure 6 The control schematic block diagram of the first gantry and the second gantry in the semiconductor detection device provided by an embodiment of the present disclosure is shown in the figure. Figure 7This is a schematic flowchart of an anti-collision control method for a gantry device in a semiconductor testing apparatus provided in another embodiment of the present disclosure; Figure 8 A block diagram of an electronic device provided in an embodiment of this disclosure.

[0019] Figure label: 10-First Dragon Gate 11-First Moving Particle 12-First Float 13-First Reading Head 20-Second Dragon Gate 21-Second Moving Particle 22-Second Float 23-Second Reading Head 30-Gantry guide rail; 31-Magnetic rail; 32-Auxiliary rail 40 - Grating Ruler; 41 - First Scale Ruler; 42 - Second Scale Ruler Detailed Implementation

[0020] To enable those skilled in the art to better understand the present disclosure, the technical solutions of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present disclosure, and not all embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present disclosure.

[0021] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0022] In this disclosure, the terms “upper,” “lower,” “left,” “right,” “front,” “rear,” “top,” “bottom,” “inner,” “outer,” and “middle,” etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are primarily for the purpose of better describing this disclosure and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0023] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain circumstances to indicate a dependency or connection. Those skilled in the art can understand the specific meaning of these terms in this disclosure according to the specific circumstances.

[0024] Furthermore, the terms "set up," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection via an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this disclosure according to the specific circumstances.

[0025] It should be noted that, unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other. This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0026] The main defects of the anti-collision control technology of the related technologies are as follows: (1) Static threshold anti-collision, which relies on a fixed safety distance threshold and a fixed safety area is preset; the safety redundancy is too large at low speed (waste of travel) and the threshold is insufficient at high speed (easy to collide); (2) Single sensor monitoring, using a shared position sensor (grating ruler) to collect position information, the relative position between the two moving parts cannot be directly measured, affecting the efficient judgment of motion state, and is prone to misjudgment or omission, resulting in collision; (3) Lagging response mechanism, the traditional control logic adopts the serial process of "monitoring-judgment-execution", without establishing a prediction model, braking is delayed in emergency situations, and the risk of collision is extremely high; (4) Insufficient coordination between the two moving parts, without considering the motion coupling relationship between the two moving parts (speed difference and priority process mechanism when moving towards each other), individual control is prone to coordination conflict, resulting in defects, leading to the phenomenon of "mutual deadlock" and indefinite suspension of operation.

[0027] Example 1 To address at least some of the aforementioned problems, this disclosure provides a collision avoidance control method for a gantry device in a semiconductor testing apparatus, wherein, with reference to Figure 3The gantry device includes a gantry guide rail 30 and two gantry gates that can move towards or away from each other along the extension direction of the gantry guide rail 30. These two gantry gates are a first gantry gate 10 and a second gantry gate 20. Exemplarily, this semiconductor inspection equipment can be a defect detection device for semiconductor display panels, thereby performing visual defect detection on the semiconductor display panels during the semiconductor display panel manufacturing process. Exemplarily, the gantry device can be a motion transmission device in semiconductor process and inspection intelligent equipment that pursues high speed, high precision, and high dynamic coordination. Exemplarily, the gantry device can include at least two gantry gates, including a first gantry gate 10 and a second gantry gate 20. Devices such as, but not limited to, cameras and lighting sources can be installed on the first gantry gate 10 and the second gantry gate 20 to realize the semiconductor inspection function.

[0028] Due to the requirements of semiconductor testing scenarios, gantry cranes need to meet high-speed, high-precision, and bidirectional dynamic coordination requirements. A gantry crane can be implemented using a linear motor driven by two movers sharing a single stator magnetic rail 31. For example, the gantry guide rail 30 may include parallel and spaced magnetic rails 31 and auxiliary rails 32. The crossbeam of the first gantry 10 is driven by a first mover 11 (e.g., ...) that spans the magnetic rails 31 and auxiliary rails 32. Figure 3 In the text, mover 1 represents the first mover 11) and float 12 (as shown in the image). Figure 3 Float 1 in the middle represents the first float 12) synchronously driven, and the crossbeam of the second gantry 20 is driven by the second mover 21 (as shown in the image) which is connected across the magnetic rail 31 and the auxiliary rail 32 respectively. Figure 3 In the text, "mover 2" refers to the second mover 21 and the second float 22 (as shown in the image). Figure 3 In the diagram, float 2 represents the second float 22) driven synchronously. The first mover 11 and the second mover 21 can be linear motor movers. The first mover 11 and the second mover 21 share the same stator magnetic rail 31. In this way, the two gantry cranes can move freely in both directions along the extension direction of the gantry guide rail 30. This may result in the two gantry cranes moving towards each other and thus approaching each other, or moving away from each other and thus moving away from each other. During the movement of the two gantry cranes, there is a risk of collision.

[0029] like Figure 1 As shown, the collision avoidance control method provided in this embodiment aims to improve the risk of collision between two gantry gates. The collision avoidance control method mainly includes the following steps: Step S110: Obtain the current position of each of the two gantry gates, and at least one target position to be moved to according to their original target trajectory; Step S120: Define the current position of the first gate 10 among the two gates, and any one of the at least one target position that the first gate 10 will move to in sequence according to the original target trajectory of the first gate 10 as the position of the first gate 10; Step S130: Define the current position of the second gate 20 among the two gates, and any one of the at least two target positions that the second gate 20 will move to in sequence according to the original target trajectory of the second gate 20 as the position of the second gate 20; Step S140: Based on the positions of the first gate 10 and the second gate 20, calculate the relative distance between the two gates; the relative distance includes the current relative distance calculated based on the current positions of the two gates, and the predicted relative distance calculated based on the current position of one of the two gates and the target position of the other gate; Step S150: Based on the relative distance between the two gates, execute the following collision avoidance detection control strategy: if the current relative distance is greater than the set safety threshold and the predicted relative distance is less than or equal to the set safety threshold, then control one of the two gates to stop moving, and the other gate moves according to its original target trajectory.

[0030] In the above scheme, by obtaining the current position of each of the two gates and the at least one target position to which it will move according to its original target trajectory, and calculating the current relative distance and the predicted relative distance between the two gates, the predicted relative distance is calculated based on the current position of one of the two gates and the target position of the other gate. If the current relative distance is greater than a set safety threshold and the predicted relative distance is less than or equal to the set safety threshold, it indicates that there is a potential collision risk. The risk can be warned, and one of the two gates can be controlled to pause its movement and wait for a period of time before moving again. The other gate moves according to its original target trajectory, thereby reducing the risk of collision between the two gates.

[0031] The inventors of this disclosure have discovered that in different processes, especially when high-dynamic, random planar coordinate motion control of two gantry mechanisms is required, simply monitoring and judging the real-time current positions of the first gantry 10 and the second gantry 20 is insufficient to completely prevent collisions. Therefore, a forward-looking collision prediction mechanism is introduced for safety assessment. This mechanism not only acquires the current position of each of the two gantry mechanisms but also acquires at least one target position that each gantry is to move to sequentially according to its original target trajectory. This allows for the acquisition of the current position of each gantry, the next target position it is about to move to, and even the next target position after that. By predictively forecasting 2-3 target positions in advance, and when the current relative distance is greater than a set safety threshold and the predicted relative distance is less than or equal to the set safety threshold, one of the two gantry mechanisms is paused for a delay before resuming movement. The other gantry continues its original target trajectory. This advance delay reduces the risk of collision between the two gantry mechanisms.

[0032] The aforementioned anti-collision control method enables the two gantry gates to meet the requirements of process randomness and dynamism. This allows the two gantry gates to move randomly and synchronously towards or in opposite directions according to the overall equipment process, thus forming a minimum safety threshold zone (not static) that can dynamically move along with the two gantry gates. "Dynamic" means that while the first gantry gate 10 is retracting, the second gantry gate 20 can cross into the area of ​​the first gantry gate 10; similarly, the first gantry gate 10 can also dynamically cross into the area of ​​the second gantry gate 20. Therefore, traditional anti-collision control strategies, due to speed differences and static safety zone settings, cannot achieve collision control in this scenario, resulting in a very high risk of collision. The aforementioned anti-collision control method allows the two gantry gates to move randomly and synchronously towards or in opposite directions according to process requirements, reducing the risk of collision and thus meeting the usage requirements.

[0033] The following is in conjunction with the appendix Figures 1 to 7 The anti-collision control method of the gantry device in the semiconductor testing equipment disclosed herein is described in detail.

[0034] It should be noted that the aforementioned position of the first gate 10 can refer to the current position of the first gate 10, or it can refer to any one of the at least one target position that the first gate 10 will sequentially move to according to its original target trajectory. In other words, the position of the first gate 10 is not limited to its current position. Similarly, the aforementioned position of the second gate 20 can refer to the current position of the second gate 20, or it can refer to any one of the at least one target position that the second gate 20 will sequentially move to according to its original target trajectory. In other words, the position of the second gate 20 is not limited to its current position.

[0035] It should also be noted that in the above calculation of the relative distance between the two gates based on the positions of the first gate 10 and the second gate 20, the relative distance is the relative distance between the two gates automatically calculated based on the input positions of the first gate 10 and the second gate 20.

[0036] For example, when the current position of the first gate 10 is taken as the position of the first gate 10, and the current position of the second gate 20 is taken as the position of the second gate 20 (that is, the current relative distance calculated based on the current positions of the two gates), the physical meaning of the relative distance between the two gates calculated based on the position of the first gate 10 is: the current distance between the two gates, that is, the relative distance at this time is the current relative distance.

[0037] For example, when taking the current position of one of the two gates as its position and the target position of the other gate as its position, the calculated relative distance does not represent the current distance between the two gates. Instead, it represents the distance between the two gates assuming one gate remains stationary while the other moves to its target position. Therefore, this relative distance is defined as a predicted relative distance, not necessarily the actual distance. Specifically, when taking the current position of the first gate 10 as its position and one of the target positions of the second gate 20 as its position, the calculated relative distance is the distance between the two gates assuming the first gate 10 remains stationary while the second gate 20 moves to its target position. Or, when taking the current position of the second gate 20 as its position and one of the target positions of the first gate 10 as its position, the calculated relative distance is the distance between the two gates assuming the second gate 20 remains stationary while the first gate 10 moves to its target position.

[0038] For example, refer to Figure 2 The collision avoidance detection and control strategy can also include: if the current relative distance is less than or equal to a set safety threshold, it indicates a high risk of collision, and an emergency risk warning can be issued to immediately stop the movement of the two gantry gates. This reduces the risk of a collision between the two gantry gates.

[0039] For example, refer to Figure 2 The collision avoidance detection and control strategy may also include: if both the current relative distance and the predicted relative distance are greater than the set safety threshold, it means that there is no risk of collision. The two gantry can be controlled to move normally according to their original target trajectories, so as to execute the semiconductor process actions as planned and improve execution efficiency.

[0040] For example, the aforementioned target position may include: the first target position that each gate will move to based on its current position, that is, obtaining the target position that each gate at its current position is about to move to, which is defined as the first target position. Specifically, the first target position of the first gate 10 when it moves according to its original target trajectory is obtained, and the first target position of the second gate 20 when it moves according to its original target trajectory is obtained.

[0041] At this point, the predicted relative distance can include: a first predicted relative distance calculated based on the current position of the first gate 10 and the first target position of the second gate 20. That is, the predicted relative distance at this point refers to the distance between the two gates when the first gate 10 remains stationary and the second gate 20 moves to its corresponding first target position. At this point, if the current relative distance is greater than the set safety threshold and the first predicted relative distance is less than or equal to the set safety threshold, it indicates that there is a potential collision risk when both the first gate 10 and the second gate 20 move according to their original target trajectories. Therefore, the first gate 10 can be controlled to move according to its original target trajectory while the second gate 20 stops moving. This not only makes the second gate 20 pause and wait to "avoid" the first gate 10, thereby reducing the risk of collision between the two gates, but also ensures that when one of the two gates needs to move according to its original target trajectory while the other gate stops moving, the first gate 10 can be prioritized to move according to its original target trajectory while the second gate 20 stops moving. This ensures that the first gate 10 can complete its movement within the target time according to its original target trajectory as much as possible, so as to ensure that the process performed by the first gate 10 is completed on time.

[0042] For example, the predicted relative distance may further include a second predicted relative distance calculated based on the first target position of the first gate 10 and the current position of the second gate 20. That is, the predicted relative distance here refers to the distance between the two gates when the second gate 20 remains stationary and the first gate 10 moves to its corresponding first target position. If the current relative distance is greater than a set safety threshold, and the second predicted relative distance is less than or equal to the set safety threshold, it indicates a potential collision risk when both the first gate 10 and the second gate 20 move along their respective original target trajectories. Therefore, the second gate 20 can be controlled to pause its movement, while the first gate 10 moves along its original target trajectory, thus allowing the second gate 20 to pause and wait to "avoid" the first gate 10, thereby reducing the risk of a collision between the two gates.

[0043] For example, at least one target position may further include: the second target position to which each gantry moves after the first target position. That is, the next target position after the first target position to which each gantry in its current position is about to move is obtained, and this target position is defined as the second target position. Specifically, the second target position of the first gantry 10 when it moves according to its original target trajectory is obtained, and the second target position of the second gantry 20 when it moves according to its original target trajectory is obtained.

[0044] At this point, the predicted relative distance can include a third predicted relative distance calculated based on the current position of the first gate 10 and the second target position of the second gate 20. That is, the predicted relative distance here refers to the distance between the two gates when the first gate 10 remains stationary and the second gate 20 moves to its corresponding second target position. At this point, if the current relative distance is greater than the set safety threshold and the third predicted relative distance is less than or equal to the set safety threshold, it indicates that there is a potential collision risk when both the first gate 10 and the second gate 20 are moving according to their original target trajectories. Therefore, the first gate 10 can be controlled to move according to its original target trajectory while the second gate 20 suspends its movement. This allows the second gate 20 to pause and wait to "avoid" the first gate 10, thereby reducing the risk of a collision between the two gates. Furthermore, when one of the two gates needs to move according to its original target trajectory while the other gate suspends its movement, the first gate 10 is prioritized to move according to its original target trajectory while the second gate 20 suspends its movement. This ensures that the first gate 10 can complete its movement within the target time according to its original target trajectory as much as possible, thereby ensuring that the procedures performed by the first gate 10 are completed on time.

[0045] For example, the predicted relative distance may include a fourth predicted relative distance calculated based on the second target position of the first gate 10 and the current position of the second gate 20. That is, the predicted relative distance here refers to the distance between the two gates when the second gate 20 remains stationary and the first gate 10 moves to its corresponding second target position. If the current relative distance is greater than a set safety threshold, and the fourth predicted relative distance is less than or equal to the set safety threshold, it indicates a potential collision risk when both the first gate 10 and the second gate 20 move along their respective original target trajectories. Therefore, the second gate 20 can be controlled to pause its movement, while the first gate 10 moves along its original target trajectory, thus allowing the second gate 20 to pause and wait to "avoid" the first gate 10, thereby reducing the risk of a collision between the two gates.

[0046] In some embodiments, reference Figure 4 The gantry device may include a grating ruler 40, which determines the positions of the first gantry 10 and the second gantry 20. At this time, reference... Figure 4 and Figure 5The gantry device may include a first scale 41 formed based on a grating ruler 40, and a first reading head 13 (also called a sensor probe) disposed on the first gantry 10 and used to read the first etched scale to determine the current position coordinates of the first gantry 10. The gantry device may also include a second scale 42 formed based on the grating ruler 40, and a second reading head 23 (also called a sensor probe) disposed on the second gantry 20 and used to read the second scale 42 to determine the current position coordinates of the second gantry 20.

[0047] Among them, reference Figure 5 The scale markings on the first scale 41 and the second scale 42 are in reverse order. For example, refer to... Figure 5 The positive direction of the graduation marks on the first scale 41 is from left to right, while the positive direction of the graduation marks on the second scale 42 is from right to left. At this time, refer to... Figure 3 , Figure 4 and Figure 5 The movement direction of the two gantry is defined according to the extension direction of the grating ruler 40: the movement direction of the two gantry is positive in the middle and negative at both ends.

[0048] refer to Figure 5 The distance between the first zero mark of the first scale 41 and the second zero mark of the second scale 42 can be defined as the set effective travel range of the two gantry gates. That is, the first gantry gate 10 and the second gantry gate 20 can only move within this set effective travel range. Once they exceed this range, there is a risk of collision between the gantry gates and other structures of the gantry device (e.g., other gantry gates besides the first gantry gate 10 and the second gantry gate 20). For example, refer to... Figure 5 The first zero mark of the first scale 41 is located on the left, and the second zero mark of the second scale 42 is located on the right. The distance between the first zero mark of the first scale 41 and the second zero mark of the second scale 42 is 9 units. At this time, the effective travel is set to 9 units.

[0049] At this point, the collision avoidance control method may further include: if the current position coordinates of the first gantry 10 reach a set effective travel distance, controlling the first gantry 10 to immediately stop moving; and if the current position coordinates of the second gantry 20 reach a set effective travel distance, controlling the second gantry 20 to immediately stop moving. This reduces the risk of collisions between the first gantry 10 and the second gantry 20 and other structures in the gantry device (e.g., other gantry structures besides the first gantry 10 and the second gantry 20).

[0050] For example, refer to Figure 5The target position coordinates of the first gantry 10 are determined based on the first etching ruler, thereby determining the position coordinates of the first gantry 10 based on the first scale 41. That is, when calculating the position of the first gantry 10, not only is the current position of the first gantry 10 obtained by reading the first scale 41 through the first reading head 13, but the target position of the first gantry 10 is also determined based on the scale markings of the first scale 41. Thus, the target position in the original target trajectory of the first gantry 10 is determined and calculated using the scale markings represented by the first scale 41, thereby simplifying the conversion difficulty.

[0051] For example, refer to Figure 5 The target position coordinates of the second gate 20 are determined based on the second scale 42, thereby determining the position coordinates of the second gate 20 based on the first scale 41. That is, when calculating the position of the second gate 20, not only is the current position of the second gate 20 obtained by reading the second scale 42 through the second reading head 23, but the target position of the second gate 20 is also marked and determined based on the scale markings of the second scale 42. Thus, the target position in the original target trajectory of the second gate 20 is determined and calculated using the scale markings represented by the second scale 42, thereby simplifying the conversion difficulty.

[0052] refer to Figure 4 Considering the limitations of sensor position monitoring, the first mover 11 and the second mover 21 of the two gantry motors share the same grating ruler 40. During operation, the first reading head 13 of the first mover 11 and the second reading head 23 of the second mover 21 can only obtain their own current positions, and cannot obtain their relative positions. At this time, reference... Figure 5 Based on the positions of the first gate 10 and the second gate 20, the relative distance between the two gates can be calculated, which may include: subtracting the coordinates of the first gate 10 and the second gate 20 from the set effective travel distance, and using the difference as the relative distance between the two gates.

[0053] For example, define a valid trip as D. Max This refers to the maximum range of movement for the first gate 10 and the second gate 20. The coordinates of the first gate 10 are defined as P1, the coordinates of the second gate 20 are defined as P2, and the relative distance D between the two gates is... Ref It can be calculated using the following formula: D Ref =D Max -(P1+P2)= D Max -P1-P2 For example, the position coordinate P1 of the first gantry 10 can refer to the current position coordinate P1 of the first gantry 10. cur It can also refer to the coordinates P1 of the first target position in the first gantry 10. next1It can also refer to the coordinates P1 of the second target position in the first gantry 10. next2 The coordinates P2 of the second gate 20 can refer to the current coordinates P2 of the second gate 20. cur It can also refer to the coordinates P2 of the first target position in the second gantry 20. next1 It can also refer to the coordinates P2 of the second target position in the second gate 20. next2 .

[0054] For example, refer to Figure 5 Set valid route D Max Given 9 units, the coordinates of the first gate 10 (P1) are 3 units apart, and the coordinates of the second gate 20 (P2) are 2 units apart. Then, the relative distance D between the positions of the first gate 10 and the second gate 20 is... Ref This equals: 9 units - 3 coordinate points - 2 coordinate points = 4 units, meaning the relative distance between the two gates is 4 units. The relative distance D between the two gates... Ref It can refer to the current relative distance or the predicted relative distance.

[0055] Compared to directly measuring the relative distance between two gantry gates by setting a laser sensor between them, the above-described method in this embodiment of the present disclosure obtains the distance indirectly by using the position information read by the readily available grating ruler 40. This not only eliminates the need for a laser sensor, thus reducing costs, but also improves the accuracy of relative distance determination by leveraging the high sensitivity of the grating ruler 40.

[0056] For example, when acquiring the current position of each of the two gates and the at least one target position to which it will move according to its original target trajectory, the current position of each of the two gates and the at least one target position to which it will move according to its original target trajectory can be acquired periodically. For example, a detection period of 10ms can be used, and the current position of each of the two gates and the at least one target position to which it will move according to its original target trajectory can be acquired once in each detection period. After acquiring the current position of each of the two gates and the at least one target position to which it will move according to its original target trajectory, the positions of the first gate 10 and the second gate 20 are periodically updated based on the latest acquired position information. This allows the positions of the first gate 10 and the second gate 20 to be dynamically adjusted according to the gate position and the original target trajectory.

[0057] For example, after each update of the positions of the first gate 10 and the second gate 20, the relative distance between the two gates can be calculated based on the latest obtained positions of the first gate 10 and the second gate 20, thereby updating the relative distance information between the two gates in real time. Based on the latest calculated relative distance between the two gates, the collision avoidance detection control strategy is executed again. In this way, the movement state of the first gate 10 and the second gate 20 can be adjusted and controlled in real time. For example, if the calculation result of the previous detection cycle indicates that the first gate 10 is moving along its original target trajectory and the second gate 20 has stopped moving, the calculation result of the next detection cycle may indicate that the potential risk has been eliminated, thus allowing the second gate 20 to continue moving, thereby maintaining the continuity of control.

[0058] In application, dynamic safety thresholds can be constructed. Clear and explicit safety logic rules are the gold standard for successfully controlling whether a collision risk will occur during synchronous random motion of the mover. Therefore, in order to maximize collision safety control, the following safety control rules (collision detection control strategy) are hereby established: A. Current position coordinates P1 of the first gate 10 cur <D Max And the current position coordinates of the second gantry 20 are P2 cur <D Max ; B. The relative distance between the first gate 10 and the second gate 20. Ref Set the safety threshold D safe .

[0059] B can include the following sub-rules: B1.D Max –(P1 cur +P2 cur )>D safe B2.D Max –(P1 cur +P2 next1 )>D safe B3.D Max –(P1 next1 +P2 cur )>D safe B4. D Max –(P1 cur +P2 next2 )>D safe B5.D Max –(P1 next2 +P2 cur )>D safe Based on the principles of the above dynamic threshold security model, risk levels can be classified sequentially, and corresponding control strategies can be implemented: If A&B1 through B5 all pass, it is determined that there is no risk of collision, and the first gate 10 and the second gate 20 move normally according to their original target trajectories. If both A and B1 pass, but at least some of B2 to B5 fail, it is judged as a potential risk, a risk warning is issued, and one of the gantry gates is controlled to delay and wait before moving again according to the above-mentioned collision avoidance control strategy, while the other gantry gate moves according to its original target trajectory. If A or B1 fails to pass, it is determined to be a high collision risk, and at least one of the gantry gates is controlled to stop moving immediately according to the above-mentioned collision avoidance control strategy.

[0060] For example, refer to Figure 6 The anti-collision control method for the gantry device in the semiconductor testing equipment described above can be implemented through software or program control. For example, refer to... Figure 6 The collision avoidance control method can be embedded into the dynamic safety threshold association and scheduling background thread module via software or program. This module is coupled to the motion control program of the first gantry 10 and the motion control program of the second gantry 20, thereby controlling the two gantry in the aforementioned manner. Specifically, the dynamic safety threshold association and scheduling background thread module generates motion control commands for the two gantry using the aforementioned collision avoidance detection control strategy, and sends them to the corresponding motion control programs of each gantry. Each gantry's motion control program controls the movement of its corresponding gantry based on the received motion control commands, thereby executing the aforementioned collision avoidance detection control strategy.

[0061] For example, refer to Figure 7 When the semiconductor testing equipment starts up, it periodically acquires process data and motion parameters to determine if a start signal has been received. Upon receiving the start signal, it performs ACK signal feedback and variable reset, and executes input parameter verification. If the verification fails, an alarm is triggered; if the verification is successful, the first gantry 10 and the second gantry 20 are started. After the first gantry 10 and the second gantry 20 are started, the aforementioned collision control method is used to perform dynamic safety threshold verification, thereby executing the aforementioned safety strategy mechanism to control the movement of the two gantry until the semiconductor process is completed.

[0062] From the above description, it can be seen that the present disclosure achieves the following technical effects: (1) High collision avoidance accuracy, by integrating multi-dimensional dynamic parameters to construct a threshold model, avoiding the adaptability defects of static thresholds, reasonable safety redundancy in high-speed scenarios, and improved travel utilization in low-speed scenarios; (2) Fast response speed, by establishing a risk prediction mechanism, and by combining high-speed data acquisition and parallel control logic, the collision avoidance response time is shortened to less than 5ms, solving the lag problem of traditional serial processes; (3) Strong coordination, by considering the relative motion relationship between the two movers, adopting a coordinated braking strategy, avoiding conflicts of individual control, and improving the coordination of the two movers' operation; (4) Wide adaptability, by using model adaptive optimization and scenario-based templates, it can adapt to the application requirements of different loads, speeds, and environments, and has strong compatibility; (5) Balance safety and efficiency, by ensuring collision avoidance safety while reducing unnecessary braking and stopping, improving the overall operating efficiency of the equipment, and extending the service life of the motor.

[0063] In response to the existing equipment structure and process requirements, and to address the issues of poor static threshold adaptability, incomplete parameter consideration, slow response, and insufficient coordination in single-magnetic-track dual-moving gantry anti-collision technology, the embodiments disclosed above abandon the idea of ​​velocity-acceleration differentiation and ultimately establish position (distance) as the sole judgment dimension. This provides an anti-collision control method that integrates indirect position measurement, dynamic movement of the safety zone, forward-looking safety prediction (defensive protection), risk classification, and strategies. This multi-mechanism collaborative anti-collision control method ultimately improves the dynamic anti-collision accuracy and response speed, while taking into account both operational efficiency and safety.

[0064] Example 2 This disclosure also provides an anti-collision control device for a gantry device in a semiconductor testing equipment. The device includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores a computer program executable by the at least one processor, the computer program being executed by the at least one processor to cause the at least one processor to perform the anti-collision control method for the gantry device in the semiconductor testing equipment provided in any of the first aspects.

[0065] The specific methods of execution of each unit in the above device embodiments have been described in detail in Embodiment 1 of the method, and will not be elaborated here.

[0066] Example 3 This disclosure provides a computer-readable storage medium storing computer instructions for causing a computer to execute the anti-collision control method for a gantry device in a semiconductor testing apparatus provided in any of the first aspects.

[0067] Example 4 This disclosure provides an electronic device, such as...Figure 8 As shown, the electronic device includes: at least one processor 81; and a memory 82 communicatively connected to at least one processor 81; wherein the memory 82 stores a computer program executable by at least one processor 81, the computer program being executed by at least one processor 81 to cause at least one processor 81 to perform the anti-collision control method of the gantry device in the semiconductor testing equipment provided in any one of the first aspects.

[0068] refer to Figure 8 The electronic device includes one or more processors 81 and a memory 82. Figure 8 Taking a processor 81 as an example, the electronic device may also include an input device 83 and an output device 84. The processor 81, memory 82, input device 83, and output device 84 can be connected via a bus or other means. Figure 8 Taking the example of a connection between China and Israel via a bus.

[0069] Processor 81 can be a central processing unit (CPU), or it can be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or combinations of the above types of chips. The general-purpose processor can be a microprocessor or any conventional processor.

[0070] The memory 82, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as the program instructions / modules corresponding to the construction method in the embodiments of this disclosure. The processor 81 executes various functional applications and data processing of the server by running the non-transitory software programs, instructions, and modules stored in the memory 82, thereby implementing the anti-collision control method of the gantry device in the semiconductor testing equipment of the above method embodiments.

[0071] The memory 82 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created by the use of the processing device operated by the server. Furthermore, the memory 82 may include high-speed random access memory and may also include non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some embodiments, the memory 82 may optionally include memory remotely located relative to the processor 81, and these remote memories can be connected to a network connection device via a network. Examples of such networks include, but are not limited to, the Internet, intranets, local area networks, motion communication networks, and combinations thereof.

[0072] Input device 83 can receive input numerical or character information, and generate key signal inputs related to user settings and function control of the server's processing device. Output device 84 may include display devices such as a display screen.

[0073] One or more modules are stored in memory 82, and when executed by one or more processors 81, they perform actions such as... Figure 1 The method is shown. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, and although a logical order is shown in the flowchart, in some cases the steps shown or described may be performed in a different order than that shown here.

[0074] Those skilled in the art will understand that all or part of the processes in the above method embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it can include the processes described in the above method embodiments. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), random access memory (RAM), flash memory (FM), hard disk drive (HDD), or solid-state drive (SSD), etc.; the storage medium can also include combinations of the above types of memory.

[0075] Although embodiments of the present disclosure have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present disclosure, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A collision avoidance control method for a gantry device in a semiconductor inspection apparatus, characterized by, The portal device comprises portal guides and two portals capable of moving towards or away from each other along the extension direction of the portal guides, and the anti-collision control method comprises: acquiring the current position of each portal of the two portals and at least one target position to be moved to in turn according to the original target trajectory of each portal; defining any one of the current position of a first portal of the two portals and at least one target position to be moved to in turn according to the original target trajectory of the first portal as a first portal position; defining any one of the current position of a second portal of the two portals and at least two target positions to be moved to in turn according to the original target trajectory of the second portal as a second portal position; calculating the relative distance between the two portals based on the first portal position and the second portal position; the relative distance comprises a current relative distance calculated based on the current positions of the two portals and a predicted relative distance calculated based on the current position of one of the two portals and the target position of the other portal; based on the relative distance between the two portals, the anti-collision detection control strategy is executed as follows: if the current relative distance is greater than the set safety threshold and the predicted relative distance is less than or equal to the set safety threshold, one of the two portals is controlled to pause movement and the other portal is controlled to move according to its original target trajectory.

2. The collision avoidance control method according to claim 1, characterized by, The anti-collision detection control strategy further comprises: if the current relative distance is less than or equal to the set safety threshold, the two portals are immediately controlled to stop moving.

3. The collision avoidance control method according to claim 1, characterized by, The anti-collision detection control strategy further comprises: if the current relative distance and the predicted relative distance are both greater than the set safety threshold, the two portals are controlled to move according to their original target trajectories.

4. The collision avoidance control method according to claim 1, characterized by, The at least one target position comprises a first target position to be moved to first based on the current position of each portal; The predicted relative distance comprises a first predicted relative distance calculated based on the current position of the first portal and the first target position of the second portal; if the current relative distance is greater than the set safety threshold and the first predicted relative distance is less than or equal to the set safety threshold, the first portal is controlled to move according to its original target trajectory and the second portal is controlled to pause movement.

5. The collision avoidance control method according to claim 4, characterized by, The predicted relative distance comprises a second predicted relative distance calculated based on the first target position of the first portal and the current position of the second portal; if the current relative distance is greater than the set safety threshold and the second predicted relative distance is less than or equal to the set safety threshold, the second portal is controlled to pause movement and the first portal is controlled to move according to its original target trajectory.

6. The collision avoidance control method according to claim 4 or 5, characterized by, The at least one target position further comprises a second target position to be moved to after the first target position is moved to by each portal; The predicted relative distance comprises a third predicted relative distance calculated based on the current position of the first portal and the second target position of the second portal; If the current relative distance is greater than the set safety threshold, and the third predicted relative distance is less than or equal to the set safety threshold, the first gantry is controlled to move according to its original target trajectory, and the second gantry is controlled to pause movement.

7. The collision avoidance control method according to claim 6, characterized by, The predicted relative distance includes a fourth predicted relative distance calculated based on the second target position of the first gantry and the current position of the second gantry. If the current relative distance is greater than the set safety threshold, and the fourth predicted relative distance is less than or equal to the set safety threshold, the second gantry is controlled to pause movement, and the first gantry is controlled to move according to its original target trajectory.

8. The collision avoidance control method according to claim 1, characterized by, The gantry device includes a grating ruler, a first scale ruler formed based on the grating ruler, and a first reading head arranged on the first gantry and used for reading the first scale ruler to determine the current position coordinates of the first gantry. The gantry device further includes a second scale ruler formed based on the grating ruler, and a second reading head arranged on the second gantry and used for reading the second scale ruler to determine the current position coordinates of the second gantry. The scale marks of the first scale ruler and the second scale ruler are in opposite order, and the interval between the first zero scale of the first scale ruler and the second zero scale of the second scale ruler defines the set effective stroke of the two gantries. The anti-collision control method further includes: if the current position coordinates of the first gantry reach the set effective stroke, the first gantry is immediately controlled to stop movement; and if the current position coordinates of the second gantry reach the set effective stroke, the second gantry is immediately controlled to stop movement.

9. The collision avoidance control method according to claim 8, characterized by, The target position coordinates of the first gantry are determined based on the first scale ruler, so that the position coordinates of the first gantry are determined based on the first scale ruler; and the target position coordinates of the second gantry are determined based on the second scale ruler, so that the position coordinates of the second gantry are determined based on the first scale ruler. Based on the first gantry position and the second gantry position, the relative distance between the two gantries is calculated, including: subtracting the difference between the first gantry position coordinates and the second gantry position coordinates from the set effective stroke to obtain the relative distance between the two gantries.

10. The collision avoidance control method according to claim 1, characterized by, The current position of each of the two gantries and at least one target position to be moved according to the original target trajectory are periodically acquired, and the first gantry position and the second gantry position are periodically updated. Based on the latest first gantry position and the latest second gantry position, the relative distance between the two gantries is calculated. Based on the latest calculated relative distance between the two gantries, the anti-collision detection control strategy is executed again.

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