A needle device and die bonder

Abstract

The application belongs to the technical field of semiconductor product production, and particularly relates to a ejector pin device and die bonder, which comprises an ejector rod, an ejector pin assembly and an ejector pin sleeve, and is characterized in that the ejector pin assembly comprises a fixed sleeve connected with the ejector rod, a plurality of ejector pin bases capable of adjusting self-rotation angle are arranged around an axis in the fixed sleeve, an ejector pin sleeve is eccentrically mounted on the ejector pin base, the ejector pin sleeve is provided with a variable-diameter structure in the axial direction and a needle rod outlet at an upper end, a clamping assembly is slidably mounted in the ejector pin sleeve, and the clamping assembly clamps the ejector pin. The application can keep the height consistency of the multiple ejector pins within a preset range after long-term use, the revolution of the ejector pin base balances the wear difference caused by different stations, two ejector pin sleeves are symmetrically mounted on the central axis of the ejector pin base, the ejector pin on the working position and the standby ejector pin can be alternately operated, and the continuous operation efficiency of the equipment is significantly improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor product manufacturing technology, and in particular to a pin device and a die bonder. Background Technology

[0002] Die bonders are important equipment in the production of semiconductor products, mainly used for automated and rapid chip placement;

[0003] In existing ejector pin devices, when there are multiple ejector pins, the wear of the pins will vary slightly due to slight differences in their operating conditions during actual use. When the differences are significant, if the pins are not aligned at the top, the height of the pin tops will be inconsistent. During the chip ejection operation, the height deviation of the pin tops will cause the force applied by each pin to be unevenly distributed, which can easily cause the chip to shift position or be damaged on the surface when it is peeled off from the blue film, seriously affecting the product yield.

[0004] Furthermore, multiple ejector pins are located in different work positions, and there are slight differences in the working conditions of the ejector pins in different work positions. These slight differences will lead to different wear rates of the ejector pins. In the existing ejector pin assembly, the working position of the ejector pin is fixed. Therefore, as the number of ejector pins working is accumulated, the preset million ejection times are often not used. Due to the continuous differentiation of the wear rate of the ejector pins in different work positions, a significant height difference will eventually be formed, which will require early replacement.

[0005] In addition, a calibration step is required before the equipment is processed. The goal is to make the centers of the nozzle, the ejector pin, and the wafer on a vertical line. For a conventional single ejector pin assembly, the center alignment of the ejector pin can be completed by moving the tip of the ejector pin to the center of the camera crosshair during calibration.

[0006] However, when using multiple ejector pins, in order to ensure that the chip is subjected to uniform force when ejecting it, the ejector pins are often evenly distributed on the edges and corners of the chip, without a corresponding center point. Therefore, a tedious centering and calibration operation must be performed before each processing. The calibration process is not only time-consuming and lengthy, but also difficult to achieve high precision requirements, which restricts production efficiency and process stability. Summary of the Invention

[0007] The present invention provides a pin device and a die bonder, which aim to solve at least one of the above-mentioned technical problems.

[0008] This invention provides the following technical solution:

[0009] On one hand, this invention provides an ejector pin device, including an ejector rod, an ejector pin assembly, and an ejector suction sleeve. The ejector pin assembly includes a fixed sleeve connected to the ejector rod. Multiple ejector pin seats with adjustable rotation angles are arranged around an axis within the fixed sleeve. An ejector pin sleeve is eccentrically mounted on each ejector pin seat. The ejector pin sleeve has a variable diameter structure in the axial direction and a needle rod outlet at its upper end. A clamping assembly is slidably mounted within the ejector pin sleeve, clamping an ejector pin. The clamping assembly can radially contract or expand due to the diameter change of the variable diameter structure. The clamping assembly holds the needle bar tightly during contraction and releases it during expansion. A first elastic element is provided at the lower part of the needle bar, so that the needle bar moves upward under the action of the first elastic element when the clamping assembly releases the needle bar. The clamping assembly is connected to a guide rod that passes through the ejector pin seat. A guide assembly is provided at the lower part of the ejector pin seat. The end of the guide rod cooperates with the guide surface of the guide assembly, so that when the guide rod slides circumferentially along the guide surface, it drives the clamping assembly to move axially within the ejector pin sleeve. An abutment is provided at the upper part of the ejector pin seat, which is used to axially limit the ejector pin after release.

[0010] Preferably, the top suction sleeve is sealed to the upper end of the fixed sleeve, and the top suction sleeve is also provided with a negative pressure adsorption hole and a needle hole. A negative pressure valve is provided on the side wall of the top suction sleeve, and the negative pressure valve is connected to the negative pressure source through the air passage.

[0011] Preferably, the variable diameter structure includes a first diameter section, a tapered transition section, and a second diameter section. The clamping assembly includes a base and a plurality of clamping arms evenly distributed around the base. The clamping arms are radially slidably connected to the base. Each clamping arm is provided with a second elastic element that provides a radial opening force, so that the clamping arm has a tendency to open radially. The top of the clamping arm is provided with a tapered mating surface that is adapted to the tapered transition section.

[0012] Preferably, the size of the needle bar outlet is adapted to the outer diameter of the needle bar, a needle groove adapted to the needle bar is provided at the center of the base, the first elastic element is located in the needle groove, and the lower end of the needle bar of the ejector pin extends into the needle groove.

[0013] Preferably, the two ends of the second elastic element are connected to the adjacent sidewalls of the adjacent clamping arms, and the adjacent sidewalls are set at an angle to the sliding trajectory of the clamping arms, so that a component of the force of the second elastic element is located on the sliding trajectory of the clamping arms and is oriented away from the center of the base platform.

[0014] Preferably, a planetary gear mechanism is installed inside the fixed sleeve, and the ejector seat serves as a planetary gear, so that the ejector seat rotates on its own axis while revolving around the sun.

[0015] Preferably, the planetary gear mechanism further includes a sun gear, the central axis of which coincides with the central axis of the fixed sleeve, a positioning sight is installed on the upper end of the sun gear, and a positioning hole is provided through the center of the top suction sleeve.

[0016] Preferably, the planetary gear mechanism further includes a planet carrier, the main shaft of which is connected to the output end of the rotary driver. When the rotary driver is running, the planet carrier drives the ejector seat to revolve around the sun gear, which rotates synchronously on its own axis. The ejector seat meshes with the internal gear ring to achieve the rotation of the ejector seat. The lower end of the fixed sleeve is sealed to the housing of the rotary driver, and the rotary driver is connected to the ejector rod.

[0017] Preferably, the ejector pin seat is equipped with two ejector pin sleeves that are symmetrically distributed along the central axis. The guide surface of the guide assembly consists of a first guide inclined surface, a second guide inclined surface, and a transition horizontal surface. The transition horizontal surface is located between the first guide inclined surface and the second guide inclined surface. The first guide inclined surface is used to guide the clamping assembly to slide axially within the ejector pin sleeve and to realize the radial contraction or opening of the clamping assembly. The second guide inclined surface is used to guide the clamping assembly to slide axially within the ejector pin sleeve to adjust the axial position of the ejector pin. The transition horizontal surface is used to guide the ejector pin to move horizontally into or out of the lower part of the abutment member.

[0018] On the other hand, the present invention provides a die bonder that includes the above-described ejector pin device.

[0019] It should be understood that the above general description and the following detailed description are merely exemplary and do not limit the invention.

[0020] Compared with conventional ejector pin devices, the ejector pin device provided by this invention can drive the ejector pin to move from the working position to the calibration position by driving the ejector pin seat to rotate, and simultaneously complete the release action, so that the ejector pin abuts against the lower surface of the abutment member under the elastic force of the first elastic element, realizing automatic calibration and alignment of the ejector pin height. Then, it can be reset by driving the ejector pin seat to rotate. During the reset process, the aligned ejector pin will be held tightly. Through the above actions, the top height of multiple ejector pins can be kept consistent within the preset range after long-term use, avoiding excessive differences in the top height of the ejector pins that may cause displacement when the chip is lifted, significantly improving the chip packaging yield and equipment operation stability.

[0021] Compared with conventional ejector pin devices, the ejector pin device provided by the present invention can adjust the rotation angle of the ejector pin holder while adjusting the revolution angle. The revolution of the ejector pin holder enables each ejector pin to move periodically between different workstations, further balancing the wear rate differences caused by different workstations, ensuring that the wear degree of all ejector pins tends to be consistent, thereby maintaining the consistency of the ejector pin top height, avoiding positional displacement or surface damage of the chip during ejection, and significantly improving product yield.

[0022] Compared with conventional ejector devices, the ejector device provided by this invention has two ejector sleeves symmetrically installed on the ejector seat, which allows the working ejector in the working position and the spare ejector in the calibration position to work alternately, significantly improving the continuous operation efficiency of the equipment; the precise timing control of the ejector ejection and retraction action can be used to realize the position switching between the spare ejector and the working ejector during the ejection and retraction of the workpiece.

[0023] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0024] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0025] Figure 1 This is one of the three-dimensional structural schematic diagrams of the push rod, push pin assembly and push suction sleeve provided in an embodiment of the present invention;

[0026] Figure 2 This is a cross-sectional structural diagram of the push rod, push pin assembly, and push suction sleeve provided in an embodiment of the present invention;

[0027] Figure 3 for Figure 2 One of the enlarged schematic diagrams at point A in the middle;

[0028] Figure 4 This is a second three-dimensional structural schematic diagram of the push rod, push pin assembly, and push suction sleeve provided in an embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram of the structure of the top suction sleeve and the fixing sleeve provided in an embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram of the structure of the abutment and fixing sleeve provided in an embodiment of the present invention;

[0031] Figure 7 This is a schematic diagram of the internal structure of the fixing sleeve provided in an embodiment of the present invention;

[0032] Figure 8 This is a schematic diagram of a planetary mechanism structure provided in an embodiment of the present invention;

[0033] Figure 9 This is a schematic diagram of the ejector seat, ejector pin, and ejector sleeve structure provided in an embodiment of the present invention;

[0034] Figure 10 This is a three-dimensional structural diagram of the ejector seat and guide assembly provided in an embodiment of the present invention;

[0035] Figure 11 This is a three-dimensional structural diagram of the ejector sleeve, ejector pin, and guide rod provided in an embodiment of the present invention;

[0036] Figure 12 This is a cross-sectional structural diagram of the ejector sleeve, ejector pin, and guide rod provided in an embodiment of the present invention;

[0037] Figure 13 for Figure 12 Enlarged diagram of section B;

[0038] Figure 14 This is an exploded structural diagram of the ejector sleeve, ejector pin, and guide rod provided in an embodiment of the present invention;

[0039] Figure 15 This is a cross-sectional view of the clamping mechanism and guide rod provided in an embodiment of the present invention;

[0040] Figure 16 This is a schematic diagram of the cross-sectional structure of the ejector sleeve provided in an embodiment of the present invention;

[0041] Figure 17 for Figure 2 Second enlarged schematic diagram of point A in the middle;

[0042] Figure 18 for Figure 2 The third enlarged schematic diagram of point A in the middle;

[0043] Figure 19 for Figure 18 Enlarged diagram of point C in the middle.

[0044] Figure label:

[0045] 1. Top suction sleeve; 2. Fixed sleeve; 3. Rotary driver; 4. Top rod; 5. Positioning hole; 6. Needle hole; 7. Negative pressure suction hole; 8. Abutment; 9. Planetary carrier; 10. Internal gear ring; 11. Sun gear; 12. Ejector pin seat; 13. Guide assembly; 14. Ejector pin sleeve; 15. Ejector pin; 16. Guide rod; 17. Second guide ramp; 18. Transition horizontal surface; 19. First guide ramp; 20. Base platform; 21. First elastic element; 22. Guide rail; 23. Clamping arm; 24. Conical mating surface; 25. Needle bar outlet; 26. Second elastic element; 27. Needle groove; 28. Second diameter section; 29. ​​Conical transition section; 30. First diameter section; 31. Positioning sight; 32. Third elastic element; 33. Limiting ring. Detailed Implementation

[0046] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0047] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0048] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0049] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0050] Furthermore, the technical solutions of the various embodiments of the present invention can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0051] To better understand the purpose, function, and specific design of this invention, the invention will be described in further detail below with reference to the accompanying drawings.

[0052] In existing ejector pin devices, when there are multiple ejector pins 15, the wear degree of each ejector pin 15 will vary slightly due to slight differences in their operating conditions during actual use. When the difference is significant, if the tops of the ejector pins 15 are not aligned, the height of the tops of the ejector pins 15 will be inconsistent. When performing chip ejection operations, the height deviation of the tops of the ejector pins 15 will cause the force applied by each ejector pin 15 to be unevenly distributed, which can easily cause the chip to shift position or be damaged on the blue film, seriously affecting the product yield.

[0053] Therefore, as Figures 1-19 As shown, the present invention provides a push pin device, including a push rod 4, a push pin assembly and a push suction sleeve 1;

[0054] The push rod 4, as the support and transmission component of the entire device, can be designed as a solid or hollow structure. The upper end of the push rod 4 is used to connect the ejector pin assembly, and the lower end is used to connect the external drive mechanism (die bonder cam mechanism) to provide the axial movement required for ejection or resetting.

[0055] The ejector pin assembly is a key part for performing chip ejection operations. It integrates multiple ejector pins 15 and is responsible for aligning these ejector pins 15 so that the ejector pins 15 can complete a high degree of consistency calibration after working a preset number of times, ensuring that the coplanar error of the tips of each ejector pin 15 is less than a preset threshold during each ejection.

[0056] The top suction sleeve 1 is sleeved outside the ejector pin assembly to provide negative pressure adsorption function. It is used to adsorb the back of the blue film while the ejector pin 15 ejects the chip to suppress its deformation, thereby assisting in the stable separation of the chip and the blue film.

[0057] The ejector assembly further includes a fixed sleeve 2 connected to the ejector rod 4. Exemplarily, the fixed sleeve 2 is a hollow cylindrical structure, with its lower end connected to the ejector rod 4 so that the axial movement of the ejector rod 4 can be transmitted to the fixed sleeve 2, and its upper end is sealed to the suction sleeve 1 to form a sealed base for the negative pressure cavity.

[0058] The fixed sleeve 2 has multiple adjustable ejector pin seats 12 arranged around its axis. The number of ejector pin seats 12 corresponds to the number of ejector pins 15 to be preset. The ejector pin seats 12 are evenly arranged around the axis of the fixed sleeve 2, that is, the central angles of adjacent ejector pin seats 12 are equal, ensuring that the ejector pins 15 on the ejector pin seats 12 have symmetry and balance in spatial distribution. Specifically, in this embodiment, a total of 4 ejector pin seats 12 are provided, evenly distributed at 90°. In addition, the ejector pin seats 12 are respectively mounted on their own fixed shafts, which are parallel to the axis of the fixed sleeve 2. The ejector pin seats 12 can be rotatably connected to the fixed shafts through bearings, ensuring that they can rotate freely around their own axis when subjected to force. The rotation of the ejector pin seats 12 can be achieved by an external driving mechanism, or by cooperating with a specific structure inside the fixed sleeve 2 to passively rotate under specific conditions.

[0059] An ejector sleeve 14 is eccentrically mounted on the ejector seat 12. The eccentric mounting causes the ejector seat 12 to rotate by a preset angle, changing the position of the ejector sleeve 14. This causes the ejector sleeve 14 to move the internal ejector pin 15 from the working position to the calibration position. At the calibration position, the height of the top of the ejector pin 15 is aligned and calibrated, thus adjusting the height of the top of the ejector pin 15. Alternatively, the ejector pin 15 can be moved from the calibration position to the working position, completing the reset action after the top height of the ejector pin 15 has been calibrated.

[0060] The ejector sleeve 14 has a variable diameter structure in the axial direction and a needle bar outlet 25 at the upper end. The needle bar outlet 25 is located at the top of the ejector sleeve 14 and is used to pass through the interior of the ejector sleeve 14 for the ejector pin 15 to pass through. The variable diameter structure can be a conical inner cavity or a stepped inner cavity to ensure that when the clamping assembly moves axially, it can perform radial contraction or expansion at a preset position, so as to coordinate with the position adjustment of the ejector pin 15 to perform the action of clamping and releasing the needle bar. A clamping assembly is slidably installed inside the ejector sleeve 14. The clamping assembly clamps the ejector pin 15. The clamping assembly can be radially contracted or opened by the diameter change of the variable diameter structure. When the clamping assembly contracts, it clamps the needle bar, and when it opens, it releases the needle bar. The clamping assembly is provided with a first elastic element 21 at the lower part of the needle bar. The first elastic element 21 is a compression spring. One end of the spring abuts against the bottom surface of the needle bar, and the other end is connected to the clamping assembly, so that when the clamping assembly releases the needle bar, the needle bar moves upward under the action of the first elastic element 21.

[0061] Specifically, when the ejector sleeve 14 drives the ejector pin 15 from the working position to the calibration position and rotates to the lower part of the abutment 8, the clamping assembly expands to release the needle bar, allowing the ejector pin 15 to be released at the lower part of the abutment 8. The compressed spring releases its elastic potential energy, pushing the needle bar upward so that the top of the ejector pin 15 abuts against the abutment 8 to complete the calibration. When the ejector sleeve 14 drives the ejector pin 15 from the calibration position to the working position and is located at the lower part of the abutment 8, the clamping assembly expands to hold the needle bar. At the same time, since the action of holding the needle bar is achieved by the clamping assembly moving axially within the ejector sleeve 14, in order to avoid the ejector pin 15 colliding with the abutment 8, the holding action needs to be completed just as the ejector pin 15 is released from the abutment 8.

[0062] The clamping assembly is connected to a guide rod 16 that passes through the pin seat 12. The guide rod 16 is a slender rod with its upper end fixedly connected to the bottom of the clamping assembly and its lower end can be set as a circular end face to cooperate with the guide assembly 13.

[0063] A guide assembly 13 is provided at the lower part of the ejector seat 12. The shape of the guide assembly 13 is not limited. A guide surface with a smooth axial height change is provided on it along the moving trajectory of the guide rod 16. When the guide rod 16 rotates with the ejector seat 12, the guide rod 16 is always in contact with the guide surface. The end of the guide rod 16 cooperates with the guide surface of the guide assembly 13 so that when the guide rod 16 slides along the guide surface, it drives the clamping assembly to move axially within the ejector sleeve 14. Specifically, the axial height change of the guide surface is transmitted to the clamping assembly by the guide rod 16. When the height of the guide surface increases, the guide rod 16 drives the clamping assembly to move upward. When the height of the guide surface remains unchanged, the guide rod 16 and the clamping assembly remain stationary in the axial direction. When the height of the guide surface decreases, the guide rod 16 drives the clamping assembly to move downward.

[0064] The upper part of the ejector pin seat 12 is provided with an abutment member 8. The abutment member 8 is used to limit the ejector pin 15 after release, so that one end of the ejector pin 15 is always located in the clamping end of the clamping assembly. Specifically, the shape of the abutment member 8 can be an annular baffle or a limiting pin, which is fixed on the fixed sleeve 2. The abutment member 8 is used to limit the ejector pin 15 after release, so that the ejector pin 15 can be aligned at the top under the action of the first elastic member 21 without completely disengaging from the clamping assembly. When the ejector pin 15 is released and moves upward, its upper end will abut against the lower surface of the abutment member 8, thereby limiting the further upward movement of the ejector pin 15. Specifically, in this embodiment, the above-mentioned abutment member 8 is an annular baffle structure, which is fixedly connected to the upper end face of the fixed sleeve 2.

[0065] Furthermore, such as Figures 18-19As shown, in order to ensure that the guide rod 16 is always in close contact with the guide surface, a third elastic element 32 is sleeved on the guide rod 16. One end of the elastic element 32 abuts against the lower part of the ejector pin seat 12, and the other end abuts against the limiting ring 33 on the guide rod 16, providing a continuous axial force to ensure that the bottom of the guide rod 16 is always pressed against the guide surface, avoiding movement sluggishness or positioning deviation due to gaps. The preload of the third elastic element 32 is precisely calibrated to ensure reliable contact without hindering the smooth circumferential sliding of the guide rod 16 along the guide surface. The third elastic element 32 is a helical compression spring.

[0066] Furthermore, in order to improve fault tolerance and prevent the ejector pin 15 from colliding with the abutment member 8, so that the ejector pin 15 can enter or exit the abutment member 8 horizontally, the guide assembly 13 is provided with a horizontal guide surface at the position where the ejector pin 15 moves into or out of the abutment member 8, so that the ejector pin 15 will not have axial displacement when moving into or out of the abutment member 8, thereby avoiding direct collision between the top of the ejector pin 15 and the abutment member 8.

[0067] In summary, the ejector pin device provided by the present invention, by setting multiple self-rotating ejector pin seats 12, enables the ejector pin 15 to move from the working position to the calibration position after a preset number of uses, such as 50,000 times, 100,000 times, or other preset number of uses, by driving the ejector pin seat 12 to rotate. At the same time, the ejector pin 15 is released, so that the ejector pin 15 contacts the lower surface of the abutment member 8 under the elastic force of the first elastic member 21, realizing automatic calibration and alignment of the top height of the ejector pin 15. Subsequently, it can be reset by driving the ejector pin seat 12 to rotate. During the reset process, the aligned ejector pin 15 is held tightly. Through the above actions, the top height of multiple ejector pins 15 can be kept within a preset range after long-term use, avoiding excessive differences in the top height of the ejector pins 15 that could cause the chip to shift, thus significantly improving the chip packaging yield and the stability of equipment operation.

[0068] In some embodiments, such as Figures 2-4 As shown, the top suction sleeve 1 is sealed to the upper end of the fixed sleeve 2 to prevent external dust or foreign objects from entering the guide assembly 13 and the moving area of ​​the ejector pin 15, while forming a sealed space to facilitate the formation of a negative pressure environment. The top suction sleeve 1 is also provided with a negative pressure adsorption hole 7 and a needle hole 6. The negative pressure adsorption hole 7 is used to apply negative pressure adsorption force to the blue film to ensure that the blue film remains flat and stable during the movement of the ejector pin 15. The needle hole 6 provides an axial passage for the ejector pin 15. A negative pressure valve is provided on the side wall of the top suction sleeve 1. The negative pressure valve is used to adjust and control the intensity of negative pressure adsorption in real time. The negative pressure valve is connected to the negative pressure source through the air passage.

[0069] In some embodiments, such as Figure 14As shown, the variable diameter structure includes a first diameter section 30, a tapered transition section 29, and a second diameter section 28. The clamping assembly includes a base 20 and a plurality of clamping arms 23 evenly distributed around the base 20. The clamping arms 23 are radially slidably connected to the base 20. Each clamping arm 23 is provided with a second elastic element 26 that provides a radial opening force, so that the clamping arm 23 has a tendency to open radially. The top of the clamping arm 23 is provided with a tapered mating surface 24 that is adapted to the tapered transition section 29.

[0070] Specifically, the variable diameter structure consists of a first diameter segment 30, a tapered transition segment 29, and a second diameter segment 28. The first diameter segment 30 and the second diameter segment 28 refer to the portions of the variable diameter structure with constant diameters, and their diameters are different. The tapered transition segment 29 is a tapered portion with a gradually changing diameter, used to guide the radial contraction or expansion of the clamping assembly. Specifically, in this embodiment, the first diameter segment 30 is a cylindrical body with a diameter of R, and the second diameter segment 28 is a cylindrical body with a diameter of r, where R is greater than r. The inner side of the tapered transition segment 29 is an inner conical surface, with one end connected to the upper end of the first diameter segment 30 and the other end connected to the lower end of the second diameter segment 28. The first diameter segment 30, the tapered transition segment 29, and the second diameter segment 28 provide an axis.

[0071] Furthermore, the lengths of the first diameter segment 30 and the second diameter segment 28 are adapted to the overall length of the base platform 20 and the clamping assembly, as well as the axial displacement height. Specifically, when the clamping assembly moves to the lower limit position, it must be completely within the first diameter segment 30 to ensure that the clamping arm 23 can radially expand to release the ejector pin 15. When the clamping assembly moves to the upper limit position, the upper end of the clamping assembly contacts the inner top of the ejector pin sleeve 14. That is, when the ejector pin 15 is in the working position, the ejector pin 15 is held tightly by the clamping assembly, the upper end of the clamping assembly is limited by the ejector pin sleeve 14, and the lower end of the clamping assembly is limited by the guide assembly 13 through the guide rod 16.

[0072] The clamping assembly includes a base 20 and multiple clamping arms 23 evenly distributed around the base 20. The base 20, serving as the base of the clamping assembly, provides support and connection for the multiple clamping arms 23 and can be a disc-shaped structure. The even distribution of the multiple clamping arms 23 ensures that the force applied to the ejector pin 15 is balanced, avoiding damage or misalignment of the ejector pin 15 due to single-point force. The number of clamping arms 23 can be set according to actual needs, such as three or four. The clamping arms 23 are radially slidingly connected to the base 20, allowing the clamping arms 23 to move freely in the radial direction, thereby clamping or releasing the ejector pin 15 according to the change in diameter structure. The specific connection method can be achieved through the cooperation of the sliding guide rail 22. Each clamping arm 23 is provided with a second elastic element 26, which provides a radial opening force, so that the clamping arm 23 can automatically open outward to release the ejector pin 15 when there is no external constraint. The second elastic element 26 can be in the form of a tension spring, compression spring, etc. In addition, the top of the clamping arm 23 is provided with a tapered mating surface 24 that is adapted to the tapered transition section 29. This mating surface is usually designed to have the same taper as the tapered transition section 29 to ensure that the clamping arm 23 can smoothly and accurately contract or open radially when the clamping assembly moves axially. This mating surface can be an outer conical surface.

[0073] For example, in this embodiment, the base platform 20 is a disc-shaped structure. The top of the base platform 20 is provided with four guide rails 22 arranged radially, and the four guide rails 22 are evenly spaced at 90 degrees. Each guide rail 22 is equipped with a clamping arm 23. The lower end of the clamping arm 23 is provided with a sliding groove adapted to the guide rail 22. The four clamping arms 23 are slidably connected to the guide rails 22 through the sliding grooves. The main body of the clamping arm 23 is a fan-shaped column. The top of the clamping arm 23 is provided with a conical mating surface 24 adapted to the conical transition section 29, i.e., an outer conical surface. The side of the clamping arm 23 facing the center of the base platform 20 has an arc-shaped clamping surface. When the clamping assembly grips the needle bar, the arc-shaped clamping surface is completely in contact with the needle bar.

[0074] Through the above technical solution, when the clamping assembly moves axially within the ejector sleeve 14, the tapered mating surface 24 at the top of its clamping arm 23 precisely matches the tapered transition section 29 of the variable diameter structure, ensuring that the clamping arm 23 can smoothly and uniformly contract or open radially. Simultaneously, the clamping assembly consists of a base 20 and multiple clamping arms 23 evenly distributed around the base 20, connected radially to ensure the stability and synchronization of the clamping arms 23 during movement. Each clamping arm 23 is equipped with a second elastic element 26, providing a continuous radial opening tendency, allowing the clamping arm 23 to automatically and quickly open when releasing the ejector pin 15, and when clamping the ejector pin 15, under the constraint of the variable diameter structure, to apply a uniform clamping force to the needle bar.

[0075] In some embodiments, such as Figures 11-16As shown, the size of the needle bar outlet 25 is adapted to the outer diameter of the needle bar, and a needle groove 27 adapted to the needle bar is provided at the center of the base 20. The first elastic element 21 is located in the needle groove 27, and the lower end of the needle bar of the ejector pin 15 extends into the needle groove 27.

[0076] Specifically, the size of the needle bar outlet 25 is adapted to the outer diameter of the needle bar so that the radial position of the needle bar of the ejector pin 15 can be constrained when it passes through the needle bar outlet 25. In practice, this can be achieved by precision machining the needle bar outlet 25 of the ejector pin sleeve 14 to maintain a very small clearance between its inner diameter and the outer diameter of the needle bar, thereby effectively limiting radial wobble of the needle bar. Alternatively, a high-precision guide bushing can be provided at the needle bar outlet 25, with its inner diameter tightly fitted to the outer diameter of the needle bar to provide stable radial support.

[0077] Meanwhile, a needle groove 27 adapted to the needle bar is provided at the center of the base 20 to provide radial constraint on the lower end of the needle bar. In practice, a groove matching the shape and size of the lower end of the needle bar, such as a cylindrical hole, can be machined at the geometric center of the base 20. The needle groove 27 can accommodate the lower end of the needle bar, thereby constraining the lower end of the needle bar in the radial direction.

[0078] Furthermore, the first elastic element 21 is located within the needle groove 27 to ensure that the upward thrust it applies to the needle bar acts along the axial direction of the needle bar, avoiding the generation of skew forces. For example, a compression spring can be placed at the bottom of the needle groove 27, with its upper end abutting against the lower end of the needle bar. The diameter of the spring matches the inner diameter of the needle groove 27 to ensure that the spring remains stable during compression and rebound, and applies force uniformly along the axial direction.

[0079] Finally, the lower end of the needle bar of the ejector pin 15 extends into the needle groove 27, achieving radial constraint on the lower end of the needle bar. Specifically, the lower end of the needle bar is designed to match the shape of the needle groove 27. In this embodiment, both the needle bar and the needle groove 27 are cylindrical. This insertion fit ensures that when the clamping assembly releases the needle bar, the ejector pin 15 can reliably contact the first elastic element 21 to move stably along a preset axial path.

[0080] Through the above technical solution, the size of the needle bar outlet 25 is adapted to the outer diameter of the needle bar, effectively reducing the radial clearance of the needle bar at the outlet of the ejector sleeve 14, thereby significantly suppressing the radial wobble of the needle bar during axial movement. Simultaneously, a needle groove 27 adapted to the needle bar is provided at the center of the base platform 20, providing radial constraint to the lower end of the needle bar and ensuring stable upward movement of the needle bar in the released state. The first elastic element 21 is located within the needle groove 27, ensuring that the upward thrust it applies to the needle bar always acts along the axial direction of the needle bar, preventing tilting or deviation of the needle bar due to uneven force. These improvements work synergistically to ensure that the needle bar of the ejector 15 does not experience radial displacement during clamping and release.

[0081] In some embodiments, such as Figures 14-15 As shown, the two ends of the second elastic member 26 are connected to the adjacent sidewalls of the adjacent clamping arm 23. The adjacent sidewalls are set at an angle to the sliding trajectory of the clamping arm 23, so that a component of the force of the second elastic member 26 is located on the sliding trajectory of the clamping arm 23 and is directed away from the center of the base platform 20.

[0082] Specifically, the second elastic element 26 is an elastic element capable of providing a radial opening force, which causes the clamping arms 23 to tend to open outward when not subject to external radial constraint. The second elastic element 26 can be implemented in various forms; for example, it can be one or more compression springs, each end of which is connected to the adjacent sidewalls of adjacent clamping arms 23 to provide the required elastic opening force. The adjacent sidewalls of adjacent clamping arms 23 refer to the opposing sides between two adjacent clamping arms 23 in the clamping assembly. These adjacent sidewalls are the direct points of application for the radial opening force exerted by the second elastic element 26. For example, grooves, protrusions, or through holes can be provided on these adjacent sidewalls to fix or support the ends of the second elastic element 26.

[0083] Specifically, in this embodiment, such as Figure 15 As shown, spring seats are fixed on opposite sides of adjacent clamping arms 23. The second elastic element 26 is a compression spring. The two ends of the second elastic element 26 are respectively connected to the spring seats on opposite sides. When the clamping arm 23 moves from the larger diameter first diameter section 30 through the tapered transition section 29 into the smaller diameter second diameter section 28, the second elastic element 26 is compressed and stores elastic potential energy. When the clamping arm 23 moves from the smaller diameter second diameter section 28 through the tapered transition section 29 into the larger diameter first diameter section 30, the second elastic element 26 releases the stored elastic potential energy, pushing the adjacent clamping arms 23 to open outward synchronously until the outer side wall of the clamping arm 23 contacts the inner side wall of the first diameter section 30. At this time, the distance at the center of the clamping arms 23 increases, causing the arc-shaped clamping surface of the clamping arm 23 facing the center of the base platform 20 to separate from the needle bar surface, thereby realizing the release action of the ejector pin 15.

[0084] In some embodiments, such as Figures 6-8 As shown, a planetary gear mechanism is installed inside the fixed sleeve 2, and the ejector seat 12 serves as a planetary gear, so that the ejector seat 12 will rotate on its own axis and also revolve around the sun.

[0085] Specifically, a planetary gear mechanism is a transmission device consisting of a sun gear 11, planet gears, a planet carrier 9, and an internal gear ring 10. Its characteristic is that at least one gear (planet gear) rotates around its own axis while also revolving around another central axis.

[0086] In this embodiment, a planetary gear mechanism is integrated and installed inside the fixed sleeve 2. This mechanism includes a central sun gear 11, multiple planet gears, and an internal gear ring 10. The internal gear ring 10 can be fixed inside the fixed sleeve 2 or integrally formed with the inner wall of the fixed sleeve 2. The sun gear 11 is located on the central axis of the fixed sleeve 2 and is driven by an external drive mechanism. The planet gears are rotatably mounted on the planet carrier 9 and mesh with the sun gear 11 and the internal gear ring 10. Installing the planetary gear mechanism inside the fixed sleeve 2 aims to provide a stable transmission basis for the compound movement of the ejector seat 12 and ensure the compactness of the entire device.

[0087] For example, in this embodiment, the inner wall of the fixed sleeve 2 is integrally formed with an internal gear ring 10. The main shaft of the planetary carrier 9 is rotatably connected to the fixed sleeve 2 through a bearing. Four fixed shafts are connected to the main shaft. The ejector seat 12 is designed as a planetary gear and is installed on the fixed shafts respectively. Specifically, the ejector seat 12 can be designed as a component with a gear structure. This gear structure meshes with the sun gear 11 and the internal gear ring 10 in the planetary gear mechanism, so that it revolves around the main shaft under the drive of the planetary carrier 9, and rotates on its own axis. The sun gear 11 is installed at the upper end of the main shaft. The gear teeth on the side wall of the ejector seat 12 mesh with the internal gear ring 10 and the sun gear 11.

[0088] Through the above technical solution, the rotation of the ejector pin holder 12 allows the ejector pin 15 to switch from the working position to the calibration position for top height calibration. After calibration, it can switch back to the working position to continue working, thus ensuring that the top height of the ejector pin 15 is flush. At the same time, the revolution of the ejector pin holder 12 allows each ejector pin 15 to move periodically between different workstations, further balancing the wear differences caused by different workstations, ensuring that the wear degree of all ejector pins 15 tends to be consistent, thereby maintaining the consistency of the top height of the ejector pin 15, avoiding positional displacement or surface damage of the chip during ejection, and significantly improving product yield.

[0089] In some embodiments, such as Figures 5-8As shown, the planetary gear mechanism also includes a sun gear 11, the central axis of which coincides with the central axis of the fixed sleeve 2, a positioning sight 31 is installed on the upper end of the sun gear 11, and a positioning hole 5 is provided through the center of the top suction sleeve 1.

[0090] Specifically, the spindle of the sun gear 11 coincides with the axis of the fixed sleeve 2, aiming to ensure that the rotational center axis of the sun gear 11, the core component of the planetary gear mechanism, is precisely aligned with the central axis of the fixed sleeve 2, the main structure of the entire ejector device. In practice, this can be achieved by high-precision machining of the mating surfaces of the fixed sleeve 2 and the sun gear 11, for example, by using precision bearings or bushings to support the spindle of the sun gear 11, and ensuring that its installation position is strictly consistent with the central axis of the fixed sleeve 2.

[0091] Meanwhile, a positioning sight 31 is mounted on the upper end of the sun gear 11. The positioning sight 31 is a visual mark or physical feature set on the upper end of the sun gear 11, and its function is to provide a clear and easily identifiable central reference point. The positioning sight 31 can be implemented in various forms. For example, a crosshair, concentric circles, or a specific geometric pattern can be etched, printed, or laser-marked on the upper surface of the sun gear 11 as a visual sight. Alternatively, a tiny protrusion, groove, or a detachable positioning pin can be integrated into the upper end of the sun gear 11 as a physical positioning point to facilitate accurate identification and alignment by optical inspection equipment (such as industrial cameras) or mechanical probes.

[0092] In addition, a positioning hole 5 is provided through the center of the top suction sleeve 1. The positioning hole 5 is a hole located at the geometric center of the top suction sleeve 1. The positioning hole 5 is a through hole, which serves as a channel for the camera to capture the positioning sight 31.

[0093] Specifically, in this embodiment, the main axis of the planet carrier 9, i.e. the central axis of the sun gear 11, coincides with the central axis of the fixed sleeve 2. The positioning sight 31 is a protruding structure, which is the end of the main axis that passes through the sun gear 11.

[0094] The aforementioned main shaft coincides with the central axis of the fixed sleeve 2, ensuring the structural center consistency of the entire ejector pin assembly. Based on this, the positioning reticle 31 provides a clearly visible visual reference point, enabling optical inspection equipment (such as a camera) to quickly and accurately identify the center position of the device. Therefore, although multiple ejector pins 15 are provided in this invention, the alignment method for a single ejector pin 15 can also be applied, significantly shortening calibration time and improving calibration accuracy. This effectively enhances the production efficiency and process stability of the die bonder, avoids chip position shifts or surface damage caused by misalignment, and ultimately improves product yield.

[0095] In some embodiments, such as Figures 1-4As shown, the planetary gear mechanism also includes a planet carrier 9. The main shaft of the planet carrier 9 is connected to the output end of the rotary driver 3. When the rotary driver 3 is running, the planet carrier 9 drives the ejector seat 12 to revolve around the sun gear 11 and rotates synchronously on its own axis. The ejector seat 12 meshes with the internal gear ring 10 to realize the rotation of the ejector seat 12. The lower end of the fixed sleeve 2 is sealed to the housing of the rotary driver 3. The rotary driver 3 is connected to the ejector rod 4.

[0096] Specifically, the spindle of the planetary carrier 9 is connected to the output end of the rotary drive 3 to ensure that the rotational power of the rotary drive 3 is transmitted to the planetary carrier 9 so that the ejector pin 15 can perform calibration. This connection can take various forms; for example, the spindle of the planetary carrier 9 can be connected to the output end of the rotary drive 3 via a key or spline connection.

[0097] The rotary driver 3 includes a reducer and a drive motor. The reducer is a worm gear reducer, which allows the planet carrier 9 to rotate a specific angle, such as 90 degrees, before self-locking. The drive motor is preferably a stepper motor or a servo motor, which works with a high-resolution encoder to achieve closed-loop feedback, ensuring that the revolution angle of the planet carrier 9 is strictly synchronized with the rotation phase of the sun gear 11. Its output end is rigidly coupled to the main shaft of the planet carrier 9 through a precision coupling to eliminate transmission backlash.

[0098] Meanwhile, the lower end of the fixed sleeve 2 is sealed to the housing of the rotary actuator 3. This is to effectively prevent external dust, moisture, and other contaminants from entering the device, protecting the gear mechanism from corrosion. Simultaneously, ensuring a sealed lower end of the fixed sleeve 2 helps create a negative pressure environment. The sealing connection can be achieved by, but is not limited to, using an O-ring or gasket between the lower end of the fixed sleeve 2 and the housing of the rotary actuator 3 for static sealing.

[0099] Furthermore, the rotary actuator 3 is connected to the push rod 4. By directly or indirectly fixing the rotary actuator 3 to the push rod 4, the entire drive assembly and the push rod 4 form a whole, enhancing the overall structural coordination and response speed. For example, the rotary actuator 3 can be mechanically fixed to the push rod 4 through a threaded connection or direct integrated installation.

[0100] When the rotary drive 3 is running, the planet carrier 9 rotates under the drive of the rotary drive 3, the ejector seat 12 on the planet carrier 9 revolves around the sun gear 11 and rotates synchronously on its own axis. At the same time, the ejector seat 12 meshes with the internal gear ring 10 to realize the rotation of the ejector seat 12.

[0101] The ejector seat 12 revolves around the main shaft axis, allowing the ejector 15 to move between different work positions. This enables the ejector 15 to operate under different working conditions, thereby offsetting the differences in wear rate caused by different working conditions and improving the consistency of the top height of the ejector 15.

[0102] Meanwhile, since the ejector seat 12 meshes with the sun gear 11 and the internal gear ring 10 as a planetary gear, it also rotates around its axis during its revolution. This rotates the ejector 15 from the working position to the calibration position, or vice versa, thus completing the consistency calibration action at the top of the ejector 15.

[0103] In some embodiments, such as Figures 7-10 As shown, two ejector sleeves 14 symmetrically distributed along the central axis are installed on the ejector seat 12. The guide surface of the guide assembly 13 is composed of a first guide slope 19, a second guide slope 17, and a transition horizontal surface 18. The transition horizontal surface 18 is located between the first guide slope 19 and the second guide slope 17. The first guide slope 19 is used to guide the clamping assembly to slide axially within the ejector sleeve 14 and realize the radial contraction or opening of the clamping assembly. The second guide slope 17 is used to guide the clamping assembly to slide axially within the ejector sleeve 14 to adjust the axial position of the ejector 15. The transition horizontal surface 18 is used to guide the ejector 15 to move horizontally into or out of the lower part of the abutment member 8. When the guide rod 16 contacts the transition horizontal surface 18, the clamping assembly is in a state of holding the needle rod.

[0104] Specifically, in the aforementioned ejector device, two ejector sleeves 14 are mounted on the ejector seat 12, and these two ejector sleeves 14 are symmetrically distributed along the central axis. This allows the two ejector sleeves 14 to alternately enter the working area when the ejector seat 12 rotates, thereby enabling the ejector pins 15 to be used in rotation. For example, two precisely symmetrical mounting holes can be pre-machined on the ejector seat 12, and the ejector sleeves 14 are fixed in these holes by press-fitting or threaded connection to ensure their eccentric and symmetrical mounting positions.

[0105] In addition, the guide surface of the guide assembly 13 is composed of a first guide ramp 19, a second guide ramp 17, and a transition horizontal surface 18.

[0106] The first guide ramp 19 is used to guide the clamping assembly to slide axially within the ejector sleeve 14 and to achieve radial contraction or opening of the clamping assembly. The first guide ramp 19 is part of the guide surface, and its main function is that when the guide rod 16 slides along it, the clamping assembly is moved axially within the ejector sleeve 14 by the force of the ramp. At the same time, this axial movement will cause the clamping arm 23 of the clamping assembly to undergo radial displacement, thereby realizing the clamping or releasing operation of the needle bar.

[0107] For example, the first guide ramp 19 can be designed as a spiral groove or a gradually curved surface with a specific inclination angle. When the guide rod 16 slides in the groove or on the curved surface, its axial displacement is converted into the radial movement of the clamping assembly through mechanical coupling. Alternatively, the first guide ramp 19 can be a plane with a specific slope. When the guide rod 16 slides on the plane, the change in its axial position will cause the radial constraint on the clamping arm 23 to contract or expand. The clamping arm 23 always maintains a tendency to expand radially. Therefore, when the radial constraint contracts, the clamping arm 23 overcomes the tendency to expand radially and contracts radially. When the radial constraint expands, the clamping arm 23 will expand radially under the tendency to expand radially.

[0108] Meanwhile, the second guide slope 17 is used to guide the clamping assembly to slide axially within the ejector sleeve 14 to adjust the axial position of the ejector pin 15.

[0109] The second guide ramp 17 is another part of the guide surface. Its main function is to precisely control the axial movement of the clamping assembly within the ejector sleeve 14 when the guide rod 16 slides along it. At this time, the clamping arm 23 of the clamping assembly will not be displaced radially, and the clamping assembly will always hold the ejector 15 tightly, thereby achieving fine adjustment of the working height of the ejector 15. For example, the second guide ramp 17 can be designed as a curved surface or plane with a stable tilt angle that connects with the first guide ramp 19, ensuring that when the guide rod 16 slides along the second guide ramp 17, the clamping assembly can move up and down within the second diameter section 28. When the guide rod 16 moves to the highest position of the second guide ramp 17, the top of the clamping assembly contacts the top of the ejector sleeve 14, so that the ejector 15 reaches the required working position.

[0110] The transition horizontal surface 18 is a transition area consisting of two fan-shaped planar areas. Its length is sufficient to allow the guide rod 16 to smoothly enter and exit the abutment member 8 during function switching, thus avoiding axial displacement that could cause a collision with the abutment member 8.

[0111] like Figure 10 As shown, in this embodiment, the guide component 13 is a cylindrical guide wheel, and its top annular surface serves as the guide surface. The guide surface is an annular surface continuously enclosed by the first guide inclined surface 19, the transition horizontal surface 18, the second guide inclined surface 17, and the transition horizontal surface 18.

[0112] When the ejector pin 15 moves from the working position to the calibration position, the guide rod 16 moves from the second guide ramp 17 to the first guide ramp 19 via the transition horizontal plane 18;

[0113] Among them, the guide rod 16 moves from the high position to the low position of the second guide slope 17, the clamping assembly only moves axially within the second diameter section 28, the clamping arm 23 does not undergo radial displacement, and the ejector pin 15 is always in a clamping state.

[0114] After the guide rod 16 moves from the second guide slope 17 into the transition horizontal plane 18, it moves towards the first diameter section 30. The clamping assembly does not move axially, and the clamping arm 23 does not move radially. Only the ejector pin 15 moves horizontally from one side of the abutment 8 into the lower part of the abutment 8.

[0115] After the ejector pin 15 moves into the lower part of the abutment member 8, the guide rod 16 moves from the transition horizontal surface 18 into the high position of the first guide slope 19. When the guide rod 16 moves from the high position to the low position on the first guide slope 19, the clamping assembly completes the axial movement from the second diameter section 28 into the first diameter section 30. At the same time, the clamping arm 23 also expands radially to release the ejector pin 15. The ejector pin 15 moves upward under the action of axial elastic force until it contacts the lower surface of the abutment member 8, so that the ejector pin 15 reaches the calibration position.

[0116] When the ejector pin 15 moves from the calibration position to the working position, the guide rod 16 moves from the first guide ramp 19 through the transition horizontal plane 18 to the second guide ramp 17.

[0117] Specifically, the guide rod 16 moves from a low position to a high position on the first guide ramp 19, and the clamping assembly completes the axial movement from the first diameter section 30 into the second diameter section 28. At the same time, the clamping arm 23 also retracts radially to hold the ejector pin 15 tightly.

[0118] After the clamping assembly completes the action of clamping the ejector pin 15, the guide rod 16 moves from the first guide inclined surface 19 into the transition horizontal surface 18. At this time, the clamping assembly no longer moves axially, and the clamping arm 23 does not produce radial displacement, so that the ejector pin 15 can move horizontally out from the lower part of the abutment 8 in a horizontal posture.

[0119] After the ejector pin 15 is completely removed from the lower part of the abutment member 8, the guide rod 16 moves from the transition horizontal plane 18 into the lower position of the second guide ramp 17, and then slides from the lower position of the second guide ramp 17 to the higher position. During this process, the clamping assembly has completely entered the second diameter section 28 and only moves axially. The clamping arm 23 does not produce radial displacement. When the guide rod 16 moves to the higher position of the second guide ramp 17, the top of the clamping assembly contacts the top of the ejector pin sleeve 14 so that the ejector pin 15 reaches the working position.

[0120] Through the above technical solution, two ejector sleeves 14 are symmetrically installed on the central axis of the ejector seat 12, so that the ejector 15 in the working position and the spare ejector 15 can work alternately, which significantly improves the continuous operation efficiency of the equipment. The precise timing control of the ejector 15's ejection and retraction action can be used to realize the entire process of switching between the working ejector 15 and the spare ejector 15 during the ejection and retraction of the workpiece. In addition, by setting the second guide slope 17, there is a height difference between the working position ejector 15 and the calibration position ejector 15. Therefore, the interference of the calibration position ejector 15 on the ejection and retraction action of the working position ejector 15 can be avoided. By setting the transition horizontal surface 18, the top of the ejector 15 will not collide with the abutment 8 when the ejector 15 switches from the calibration position to the working position.

[0121] On the other hand, the present invention provides a die bonder that includes the above-described ejector pin device.

[0122] Specifically, the die bonder is equipped with a pin base, a micro-motion platform is connected to the pin base, a cam mechanism is installed on the upper part of the micro-motion platform, and the aforementioned pin device is installed on the upper part of the cam mechanism.

[0123] The ejector pin base supports the entire ejector pin assembly and provides basic support; the micro-motion platform adjusts the horizontal position; and the cam mechanism drives the ejector rod 4 to move up and down. Furthermore, the die bonder can connect the ejector pin assembly's control system to the die bonder's central control system via an electrical interface and communication protocol. Specifically, the control system of the rotary driver 3 and the negative pressure valve are connected to the central control system, enabling precise control and coordinated operation of the ejector pin assembly. For example, the die bonder's main controller can send commands to the ejector pin assembly to control the rotation of the rotary driver 3, thereby controlling the rotation and revolution of the ejector pin base 12. This adjusts the top height and position of the ejector pins 15, ensuring uniform wear rate and consistent top height across multiple ejector pins 15 during long-term use, preventing chip misalignment or damage caused by inconsistent ejector pin heights.

[0124] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. In the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A ejector device comprising a ejector rod, a ejector pin assembly and a ejector sleeve, characterized in that, The ejector pin assembly includes a fixed sleeve connected to the ejector rod. Multiple ejector pin seats with adjustable rotation angles are arranged around an axis within the fixed sleeve. An ejector pin sleeve is eccentrically mounted on each ejector pin seat. The ejector pin sleeve has a variable diameter structure in the axial direction and a needle rod outlet at its upper end. A clamping assembly is slidably mounted within the ejector pin sleeve, clamping the ejector pin. The clamping assembly can radially contract or expand due to the diameter change of the variable diameter structure. When contracted, the clamping assembly grips the needle rod; when expanded, it releases the needle rod. The clamping assembly has a first elastic element at the lower part of the needle bar, so that the needle bar moves upward under the action of the first elastic element when the clamping assembly releases the needle bar; the clamping assembly is connected to a guide rod that passes through the ejector pin seat, and a guide assembly is provided at the lower part of the ejector pin seat. The end of the guide rod cooperates with the guide surface of the guide assembly, so that when the guide rod slides circumferentially along the guide surface, it drives the clamping assembly to move axially within the ejector pin sleeve; an abutment is provided at the upper part of the ejector pin seat, and the abutment is used to axially limit the ejector pin after release.

2. A thimble assembly as defined in claim 1, wherein The top suction sleeve is sealed to the upper end of the fixed sleeve. The top suction sleeve is also provided with a negative pressure adsorption hole and a needle hole. A negative pressure valve is provided on the side wall of the top suction sleeve. The negative pressure valve is connected to the negative pressure source through the air passage.

3. The ejector pin device according to claim 2, characterized in that, The variable diameter structure includes a first diameter section, a tapered transition section, and a second diameter section. The clamping assembly includes a base and a plurality of clamping arms evenly distributed around the base. The clamping arms are radially slidably connected to the base. Each clamping arm is provided with a second elastic element that provides a radial opening force. The top of each clamping arm is provided with a tapered mating surface that is adapted to the tapered transition section.

4. A thimble assembly as defined in claim 3, wherein: The needle bar outlet size of the ejector sleeve is adapted to the outer diameter of the needle bar. A needle groove adapted to the needle bar is provided at the center of the base. The first elastic element is located in the needle groove, and the lower end of the ejector needle bar extends into the needle groove.

5. A thimble assembly as defined in claim 4, wherein: The second elastic element is connected at both ends to the adjacent sidewall of the adjacent clamping arm. The adjacent sidewall is set at an angle to the sliding trajectory of the clamping arm, so that a component of the force of the second elastic element is located on the sliding trajectory of the clamping arm and is oriented away from the center of the base.

6. A ejector assembly as defined in claim 2 wherein: A planetary gear mechanism is installed inside the fixed sleeve, and the ejector seat serves as a planetary gear, so that the ejector seat can adjust its rotation angle while simultaneously adjusting its revolution angle.

7. A thimble assembly as defined in claim 6, wherein: The planetary gear mechanism also includes a sun gear, the central axis of which coincides with the central axis of the fixed sleeve. A positioning sight is installed on the upper end of the sun gear, and a positioning hole is provided through the center of the top suction sleeve.

8. A thimble assembly as defined in claim 7, wherein: The planetary gear mechanism also includes a planet carrier, the main shaft of which is connected to the output end of the rotary driver. When the rotary driver is running, the planet carrier drives the ejector seat to revolve around the sun gear, which rotates synchronously on its own axis. The ejector seat meshes with the internal gear ring to achieve the rotation of the ejector seat. The lower end of the fixed sleeve is sealed to the housing of the rotary driver. The rotary driver is connected to the ejector rod.

9. A ejector assembly as defined in claim 2 wherein: The ejector pin seat is equipped with two ejector pin sleeves that are symmetrically distributed along the central axis. The guide surface of the guide assembly consists of a first guide inclined surface, a second guide inclined surface, and a transition horizontal surface. The transition horizontal surface is located between the first guide inclined surface and the second guide inclined surface. The first guide inclined surface is used to guide the clamping assembly to slide axially within the ejector pin sleeve and to realize the radial contraction or opening of the clamping assembly. The second guide inclined surface is used to guide the clamping assembly to slide axially within the ejector pin sleeve to adjust the axial position of the ejector pin. The transition horizontal surface is used to guide the ejector pin to move horizontally into or out of the lower part of the abutment member.

10. A die bonder, characterized by comprising: It includes the ejector device according to any one of claims 1-9.

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