A triboelectric self-sensing drug delivery piezoelectric pump, flow monitoring device and method

By introducing triboelectric self-sensing technology into the piezoelectric insulin pump, and using triboelectric sensors on the actuator and the inner wall of the pump body to monitor flow, the problems of complexity and wearability of flow monitoring in the prior art are solved, and accurate real-time flow monitoring and safe drug delivery are achieved.

CN121648388BActive Publication Date: 2026-05-26BEIJING INST OF NANOENERGY & NANOSYST
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INST OF NANOENERGY & NANOSYST
Filing Date
2026-02-06
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Current piezoelectric insulin pumps rely on external devices for flow monitoring, which makes the system complex and cumbersome to operate, making it difficult to achieve miniaturization and wearability. They also lack real-time flow monitoring methods, affecting drug administration safety and control accuracy.

Method used

By employing triboelectric self-sensing technology, a first friction part is set on the actuating component and a second friction part is set on the inner wall of the pump body. The flow rate is monitored by using a triboelectric sensor to output an electrical signal, thereby realizing self-sensing and real-time monitoring of the flow rate. The sensor is designed in a single-electrode mode to reduce wire connections and reduce the resistance effect on the actuating component.

Benefits of technology

It enables long-term, continuous, and accurate flow monitoring without significantly altering the device's structural dimensions, improving the drug delivery safety and control precision of wearable drug delivery piezoelectric pumps, simplifying the operation process, and reducing the risk of electrical connection failures.

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Abstract

This application provides a triboelectric self-sensing piezoelectric pump for drug delivery, a flow monitoring device, and a method, relating to the field of fluid transport and flow monitoring. A first friction part of a triboelectric sensor is disposed on an actuating component, and a second friction part is disposed on the inner wall of the pump body. When the actuating component vibrates to control the change in pump chamber volume, driving liquid to flow out through the inlet channel and pump chamber from the outlet channel, the first friction part passively follows the actuating component in synchronous vibration, synchronously changing the gap between the first and second friction parts. An electrical signal corresponding to the vibration of the actuating component is output from the second friction part, and this electrical signal can be calibrated as the corresponding liquid flow rate. This enables long-term, continuous, and accurate flow monitoring of wearable piezoelectric pumps, thereby improving the drug delivery safety and control accuracy of wearable piezoelectric pumps used in medical applications.
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Description

Technical Field

[0001] This application relates to the field of fluid transport and flow monitoring technology, and in particular to a triboelectric self-sensing drug delivery piezoelectric pump, flow monitoring device and method. Background Technology

[0002] Piezoelectric micropumps are widely used in many fields such as biomedicine, cooling systems, chemical analysis, and microfluidics due to their significant advantages, including fast response, low power consumption, low noise, and immunity to electromagnetic interference. For example, in the treatment of diabetes, the use of piezoelectrically driven micro-insulin pumps (piezoelectric insulin pumps) for continuous and precise drug delivery has become an important development direction.

[0003] However, current flow monitoring in piezoelectric insulin pumps primarily relies on external electronic scales for weighing or external flow meters. While these methods can achieve indirect or direct monitoring of fluid flow, their accuracy depends on the precision of the external measuring equipment. The systems are complex, cumbersome to operate, and costly, and they are difficult to integrate compactly with the micropump itself, hindering the miniaturization, integration, and wearability of insulin pumps. Especially in applications requiring long-term wear and real-time closed-loop controlled insulin release, the lack of an integrable real-time flow monitoring method can affect drug delivery safety and control accuracy. Therefore, there is an urgent need for a compact insulin pump that can be worn long-term and provides real-time flow monitoring. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this application provides a triboelectric self-sensing drug delivery piezoelectric pump, a flow monitoring device, and a method to at least solve the problem that wearable piezoelectric pumps cannot continuously monitor flow over long periods.

[0005] In a first aspect, embodiments of this application provide a triboelectric self-sensing drug delivery piezoelectric pump, comprising: a pump body and a single-electrode triboelectric sensor; the pump body includes: a pump chamber, an actuating component sealed and covering the open end of the pump chamber, an inlet channel and an outlet channel connected to the pump chamber;

[0006] The triboelectric sensor includes a first friction part and a second friction part disposed opposite to the first friction part and with a clearance fit; the first friction part is disposed on the side of the actuating component facing away from the pump cavity, and the second friction part is disposed on the inner wall of the pump body located on the side of the first friction part;

[0007] The actuator is used to vibrate under the action of an external drive signal, so that the volume of the pump chamber alternately increases or decreases, driving the liquid to flow out from the outlet channel through the inlet channel and the pump chamber; the triboelectric sensor is used to passively follow the synchronous vibration of the actuator through the first friction part, and synchronously change the gap between the first friction part and the second friction part, so as to output an electrical signal corresponding to the vibration of the actuator from the second friction part; the electrical signal is used to determine the flow rate of the liquid flowing out from the outlet channel.

[0008] By placing the first friction element of the triboelectric sensor on the actuating component and the second friction element on the inner wall of the pump body, when the actuating component controls the change in pump chamber volume, driving liquid to flow out from the outlet channel through the inlet channel and pump chamber, the actuating component simultaneously drives the gap between the first and second friction elements to change. This allows the triboelectric sensor to sample the vibration of the actuating component and output a corresponding electrical signal, which can be calibrated as the corresponding liquid flow rate. The triboelectric sensor can be very small, allowing it to be integrated into wearable devices without significantly altering their structural dimensions. This makes it suitable for miniaturized, integrated, and wearable applications, enabling long-term, continuous, and accurate flow monitoring of wearable drug delivery piezoelectric pumps, thereby improving the drug delivery safety and control accuracy of wearable drug delivery piezoelectric pumps used in medicine.

[0009] It should be noted that the first friction part is located on the side of the actuating component facing away from the pump cavity, while the second friction part is located on the inner wall of the pump body. The triboelectric sensor is a single-electrode model. When outputting an electrical signal from the triboelectric sensor via a wire, only one wire needs to be directly connected to the second friction part along the inner wall of the pump body. The first friction part located on the actuating component does not require an additional wire connection, thereby reducing the external traction on the actuating component and the wiring complexity related to the actuating component. The actuating component is a continuously vibrating component; the fewer external electrical connections involved, the lower the probability of faults such as electrical connection breaks, and the safer and more stable the operation. Moreover, the first and second friction parts are gap-fitted; the triboelectric sensor is not entirely attached to the actuating component, only the first friction part is attached, thereby reducing the resistance to the vibration of the actuating component.

[0010] Furthermore, the area of ​​the first friction part is smaller than the area of ​​the actuating component.

[0011] It should be noted that the triboelectric sensor does not directly monitor the surface deformation of the actuating component. Instead, it indirectly monitors the direction, amplitude, and frequency of the deformation through the gap between the first and second friction parts. Therefore, the area of ​​the first friction part attached to the surface of the actuating component can be smaller than the area of ​​the actuating component, and the first friction part does not need to cover all or most of the area of ​​the actuating component. The smaller the area of ​​the first friction part attached to the actuating component, the less resistance the first friction part provides to the vibration of the actuating component. Thus, using a triboelectric sensor to monitor the vibration of the actuating component can significantly reduce the resistance to the vibration of the actuating component caused by the sensor being attached to the surface of the actuating component. This can maintain the original vibration capability and power consumption of the actuating component as much as possible, without significantly inhibiting the vibration capability or significantly increasing its power consumption.

[0012] Preferably, the area of ​​the first friction part is larger than the area of ​​the second friction part. The first friction part is attached to the surface of the actuating component. When the actuating component deforms, the first friction part will also deform. If the area of ​​the first friction part is less than or equal to the area of ​​the second friction part, the projected area of ​​the first friction part on the second friction part will become smaller, that is, the interaction area between the first and second friction parts will become smaller, which will lead to a smaller output electrical signal. The fact that the area of ​​the first friction part is larger than the area of ​​the second friction part ensures that even after the first friction part deforms with the actuating component, the gap between the first and second friction parts can always change at the maximum interaction area, thereby ensuring that the triboelectric sensor stably outputs an electrical signal with a sufficient amplitude.

[0013] It should be noted that the areas of both the first and second friction parts are greater than or equal to the minimum friction part area. The minimum friction part area is the minimum area required to ensure the signal-to-noise ratio (SNR) of the triboelectric sensor is greater than 20 dB. However, the areas of the first and second friction parts cannot be reduced indefinitely. In practical implementation, the areas of the first and second friction parts should be reduced as much as possible while maintaining a SNR greater than 20 dB for the triboelectric sensor. This is to minimize the adverse effects on the actuating components while ensuring the triboelectric sensor stably outputs an electrical signal with sufficient amplitude and SNR.

[0014] Furthermore, the pump body is made of metal; an insulating layer is provided between the second friction part and the pump body.

[0015] An insulating layer is needed to isolate the second friction element from the metal pump body. This prevents the charge induced by the second friction element from leaking through the metal pump body and also prevents external electric fields or other interference from affecting the electrical signal of the triboelectric sensor through the conductive pump body. This ensures a stable electrical signal output from the triboelectric sensor.

[0016] Furthermore, the insulation layer is specifically an oxide layer obtained by oxidation treatment on the inner surface of the pump body.

[0017] The oxide layer obtained by the oxidation treatment of the pump body's inner surface acts as an insulating layer. Compared to other independent insulating materials such as insulating films or sheets, the oxide layer provides insulation while adding almost no thickness to the pump body surface, meaning it does not increase the overall thickness of the pump body. Furthermore, covering the entire inner surface of the pump body corresponding to the space where the triboelectric sensor is located with an oxide layer completely prevents the triboelectric sensor from releasing the charge induced on the first and second friction parts through the air or nearby pump body components. This provides a more stable working environment for the triboelectric sensor, improving its operational stability without increasing the overall thickness of the pump body.

[0018] Furthermore, the first friction part includes: an insulating film and a first friction film;

[0019] The second friction part includes: a second friction film and a conductive electrode sheet;

[0020] One side of the insulating film is attached to the surface of the actuating component facing away from the pump cavity;

[0021] One side of the first friction film is attached to the other side of the insulating film;

[0022] One side of the second friction film is opposite to the other side of the first friction film and is fitted with a gap.

[0023] One side of the conductive electrode sheet is attached to the other side of the second friction film;

[0024] The conductive electrode sheet is disposed on the inner wall of the pump body on the side of the first friction part through the other side of the conductive electrode sheet, and is electrically insulated from the pump body;

[0025] Among them, the first friction film and the second friction film are two materials that exhibit opposite polarities after friction.

[0026] The first and second friction parts are fitted with a clearance. The second friction part does not directly hinder the vibration of the actuating component, while the first friction part consists of only two thin films: an insulating film and a first friction film, thus reducing the resistance to the vibration of the actuating component. The other side of the conductive electrode plate is connected to the inner wall of the pump body. The wire sampling the electrical signal of the triboelectric sensor only needs to be connected to the conductive electrode plate. The wire connecting the conductive electrode plate can be directly attached to the pump body, which is beneficial for the wiring and fixation, reducing the risk of the wire breaking off from the conductive electrode plate due to movement. The triboelectric sensor only needs one wire connected to the conductive electrode plate to obtain the sampled electrical signal, thus not increasing the number of wires led out from the actuating component, and therefore not pulling and hindering the vibration of the actuating component. The fewer wires led out from the actuating component also reduces the number of electrical connection points between the wires and the actuating component, thereby reducing the probability of open circuit failure at electrical connection points due to continuous vibration of the actuating component, and improving the overall working stability.

[0027] Furthermore, the mating gap between the second friction film and the first friction film is 200 micrometers to 1 millimeter.

[0028] The gap between the second friction diaphragm and the first friction diaphragm can be set by controlling the distance from the inner wall of the pump body where the conductive electrode plate is located to the open end of the pump cavity. This application does not limit the design method of the gap between the second friction diaphragm and the first friction diaphragm. For example, those skilled in the art can accurately design the gap between the second friction diaphragm and the first friction diaphragm by designing a three-dimensional assembly drawing including the pump cavity, the first friction part, the second friction part, and the actuating component in three-dimensional modeling software. If the gap between the second friction diaphragm and the first friction diaphragm is too large, it will easily lead to the electrical signal output by the triboelectric sensor being too weak, unstable, and difficult to detect. If the gap is too small, it will easily limit the vibration amplitude of the actuating component. Setting it to 200 micrometers to 1 millimeter can ensure that the triboelectric sensor outputs a stable electrical signal without limiting the amplitude of the actuating component. For example, when the gap is set to 1 mm, the amplitude of the actuating component during normal operation can be 100 micrometers. In order for the triboelectric sensor to output an electrical signal stably, a larger start-up drive signal can be provided to the actuating component when it is initially powered on, so that the actuating component pushes the first friction part and the second friction part into contact with a larger amplitude, so as to induce sufficient charge in the first and second friction parts. Then, during normal operation, a normal drive signal (which is smaller than the start-up drive signal) is provided, so that the first and second friction parts do not directly contact each other during normal operation, but only the gap changes. This ensures that the triboelectric sensor outputs an electrical signal stably, and does not cause the amplitude of the actuating component to be limited by the second friction part.

[0029] Furthermore, the thickness of the first friction film, the second friction film, and the conductive electrode sheet is 40 micrometers to 60 micrometers; the thickness of the insulating film is 100 micrometers to 130 micrometers.

[0030] A thickness of 100 to 130 micrometers in the insulating film provides sufficient insulation without significantly increasing the resistance to vibration of the actuating components. Excessively thin first friction films, second friction films, and conductive electrode sheets increase the processing cost of the corresponding films or electrodes. A thickness of 40 to 60 micrometers is easier to process and obtain, while simultaneously meeting the requirements for friction-generated charge in triboelectric sensors and also exhibiting good flexibility.

[0031] Furthermore, the pump body also includes: a pump cover, a first annular sealing ring, and a second annular sealing ring;

[0032] A groove is provided on the end face of the pump cover facing the open end of the pump cavity; a conductive electrode is disposed in the groove through the other side of the conductive electrode; a first through hole is provided on the pump cover for the wires of the triboelectric sensor and the actuating component to pass through; a first annular groove is provided on the inner edge of the groove for the installation of a first annular sealing ring; a second annular groove is provided on the outer periphery of the open end of the pump cavity for the installation of a second annular sealing ring; wherein, the first annular sealing ring and the second annular sealing ring have the same diameter and are coaxially arranged; the actuating component is sandwiched between the first annular sealing ring and the second annular sealing ring and is pressed against the open end of the pump cavity by the pump cover.

[0033] The conductive electrode plate and the second friction diaphragm are disposed in a groove on the pump cover. The actuating component is sandwiched between the first and second annular sealing rings. The pump cover presses the first and second annular sealing rings together, thereby sealing the actuating component against the open end of the pump cavity, forming a complete cavity. The end face of the pump cover fits tightly with the end face of the open end of the pump cavity, ensuring that the gap between the second friction diaphragm in the groove on the pump cover and the first friction diaphragm on the actuating component meets the design requirements. A first through hole is provided on the pump cover for the wires of the triboelectric sensor and the actuating component to pass through, facilitating the deployment of the wiring. In particular, since the conductive electrode plate and its connecting wires are both disposed on the pump cover, they can be operated as a single unit during assembly and disassembly, avoiding damage to the wires by pulling them. The pump body assembly structure provided in this embodiment is simple, has a good sealing effect, can improve assembly efficiency, and simplifies the operational complexity of maintaining and replacing the friction sensor or actuating component.

[0034] Furthermore, the pump body also includes: a pump chamber layer for setting up the pump cavity, inlet channel, and outlet channel; the pump cover and the pump chamber layer are provided with multiple corresponding threaded holes; the pump cover and the pump chamber layer are tightly connected by multiple threaded components engaging with the multiple threaded holes. The engagement of the multiple threaded components and threaded holes enables a tight and even sealing connection between the pump cover and the pump chamber layer.

[0035] The specific types of drug delivery piezoelectric pumps include, but are not limited to, valveless drug delivery piezoelectric pumps, passive valve drug delivery piezoelectric pumps, and / or active valve drug delivery piezoelectric pumps. This application does not limit the specific type of drug delivery piezoelectric pump. The application scenarios described in the embodiments of this application are for the purpose of more clearly illustrating the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions provided by the embodiments of this application. As those skilled in the art will understand, with the emergence of new application scenarios, the technical solutions provided by the embodiments of this application are also applicable to similar technical problems.

[0036] As a specific embodiment of this application, the drug delivery piezoelectric pump is a valveless drug delivery piezoelectric pump, which can be used as a valveless piezoelectric insulin pump. The valveless drug delivery piezoelectric pump drives the pump chamber volume to alternately increase or decrease through an actuating component. Combined with the inlet and outlet channels of an asymmetric flow resistance structure (such as a conical flow channel or a flow-resisting flow), it generates a unidirectional net flow rate. It does not require a traditional mechanical valve, has a simpler structure, faster response, and fewer failures.

[0037] As a specific embodiment of this application, the drug delivery piezoelectric pump is a passive valve drug delivery piezoelectric pump. An inlet valve is provided on the inlet channel, and an outlet valve is provided on the outlet channel.

[0038] Specifically, when the actuating component causes the volume of the pump chamber to increase, the inlet valve is opened and the outlet valve is closed, so that liquid is drawn into the pump chamber through the inlet valve; when the actuating component causes the volume of the pump chamber to decrease, the inlet valve is closed and the outlet valve is opened, so that liquid is discharged from the pump chamber through the outlet valve.

[0039] Each time the actuating component moves, the corresponding inlet and outlet valves will passively and synchronously move under the pressure difference between the pump chamber and the inlet and outlet channels, strictly controlling the amount of liquid flowing into or out of the pump chamber each time. This makes the correlation between the liquid inflow and outflow volume and the vibration amplitude of the actuating component more stringent, and the corresponding electrical signal of the triboelectric sensor will also be more stringently correlated with the liquid inflow and outflow volume. Therefore, combining the triboelectric sensor with a drug delivery piezoelectric pump with inlet and outlet valves can improve the accuracy of flow prediction.

[0040] Furthermore, the pump chamber layer includes: a sub-pump chamber layer for setting up the pump chamber and a channel layer for setting up the inlet channel and the outlet channel;

[0041] The sub-pump chamber layer includes: an inlet valve actuation cavity and an outlet valve mounting groove disposed at one end of the sub-pump chamber layer facing the channel layer, a first sub-inlet channel connecting the inlet valve actuation cavity and the pump chamber, a first sub-outlet channel connecting the outlet valve mounting groove and the pump chamber, and a third annular groove disposed around the inlet valve actuation cavity.

[0042] The channel layer includes: an inlet valve mounting groove and an outlet valve actuation cavity disposed at one end of the channel layer facing the sub-pump cavity layer; a second sub-inlet channel connecting the inlet valve mounting groove and the outside of the pump body; a second sub-outlet channel connecting the outlet valve actuation cavity and the outside of the pump body; and a fourth annular groove disposed around the outlet valve actuation cavity.

[0043] The pump body also includes: a third annular sealing ring disposed in the third annular groove and a fourth annular sealing ring disposed in the fourth annular groove;

[0044] The inlet valve is installed in the inlet valve mounting slot, and the outlet valve is installed in the outlet valve mounting slot.

[0045] The inlet valve's actuating cavity and inlet valve mounting groove are aligned with their geometric centers, and the third annular sealing ring is pressed against the edge of the inlet valve; the outlet valve's actuating cavity and outlet valve mounting groove are aligned with their geometric centers, and the fourth annular sealing ring is pressed against the edge of the outlet valve.

[0046] The sub-pump chamber layer is located between the pump cover and the channel layer. The pump cover, sub-pump chamber layer and channel layer are tightly connected by multiple threaded components and multiple threaded holes. The pump chamber is located in the middle of the end of the sub-pump chamber layer facing the pump cover.

[0047] The pump body consists of three structural modules stacked and tightly connected in sequence: a pump cover, a sub-pump chamber layer, and a channel layer. The triboelectric sensor and actuation components are located in the pump cover and sub-pump chamber layer, while the inlet and outlet valves are positioned between the sub-pump chamber layer and the channel layer, and are sealed by corresponding sealing rings. When maintenance or replacement of components is required, it is not necessary to disassemble the entire pump body; only the two structural modules containing the component to be replaced need to be removed, facilitating maintenance.

[0048] As a specific embodiment of this application, the drug delivery piezoelectric pump is an active valve drug delivery piezoelectric pump. An inlet chamber is connected in series on the inlet channel, and an inlet hydraulic valve is installed and sealed at the open end of the inlet chamber. An outlet chamber is connected in series on the outlet channel, and an outlet hydraulic valve is installed and sealed at the open end of the outlet chamber.

[0049] The actuating component is used to change the volume of the pump chamber to generate a pressure difference. The inlet hydraulic valve and the outlet hydraulic valve achieve phase difference control through alternating opening or closing actions. In conjunction with the change in the volume of the pump chamber, liquid is drawn in from the inlet channel and discharged from the outlet channel.

[0050] Specifically, the pump body also includes: an inlet chamber valve cover, an outlet chamber valve cover, a fifth annular sealing ring, a sixth annular sealing ring, a seventh annular sealing ring, and an eighth annular sealing ring;

[0051] The inlet chamber valve cover is provided with an inlet hydraulic valve actuation cavity that is aligned and fitted with the inlet chamber; the outlet chamber valve cover is provided with an outlet hydraulic valve actuation cavity that is aligned and fitted with the outlet chamber.

[0052] The outer periphery of the open end of the liquid inlet chamber is provided with a fifth annular groove for installing the fifth annular sealing ring, and the inner edge of the hydraulic valve actuation chamber is provided with a sixth annular groove for installing the sixth annular sealing ring.

[0053] The outer periphery of the open end of the liquid outlet chamber is provided with a seventh annular groove for installing the seventh annular sealing ring, and the inner edge of the hydraulic valve actuation chamber is provided with an eighth annular groove for installing the eighth annular sealing ring.

[0054] The hydraulic solenoid valve is sandwiched between the fifth and sixth annular sealing rings and is pressed against the open end of the inlet chamber by the inlet chamber valve cover;

[0055] The hydraulic solenoid valve is sandwiched between the seventh and eighth annular sealing rings and is pressed against the open end of the outlet chamber by the outlet chamber valve cover.

[0056] By controlling the timing between the actuating components, the inlet hydraulic solenoid valve, and the outlet hydraulic solenoid valve, the output flow rate of each action is kept stable. The electrical signal generated by the triboelectric sensor for each action has a stable correspondence with the corresponding liquid flow rate, thus improving the accuracy of the triboelectric sensor in monitoring the flow rate.

[0057] Secondly, embodiments of this application provide a triboelectric self-sensing drug delivery piezoelectric pump flow monitoring device, comprising: a drug delivery piezoelectric pump as described above and a processor;

[0058] The processor is electrically connected to the actuation component of the drug delivery piezoelectric pump to drive the actuation component to change the volume of the pump chamber;

[0059] The processor is electrically connected to the triboelectric sensor of the drug delivery piezoelectric pump to sample the electrical signal from the triboelectric sensor and convert the electrical signal into the corresponding liquid flow rate.

[0060] Thirdly, embodiments of this application provide a method for monitoring the flow rate of a triboelectric self-sensing drug delivery piezoelectric pump, employing the aforementioned triboelectric self-sensing drug delivery piezoelectric pump flow rate monitoring device, the method comprising:

[0061] A drive signal is output to the actuator to drive the actuator to vibrate, causing the volume of the pump chamber to alternately expand or shrink, driving the liquid to flow out from the outlet channel through the inlet channel and the pump chamber;

[0062] Collect the electrical signal output by the triboelectric sensor, and extract the voltage amplitude and / or frequency pulse number from the electrical signal;

[0063] The corresponding flow rate is obtained by converting the voltage amplitude and / or frequency pulse number.

[0064] Specifically, based on the voltage amplitude and / or frequency pulse count, the corresponding flow rate is obtained, including:

[0065] Input the voltage amplitude and / or frequency pulse count into the preset fitting formula to obtain the flow rate;

[0066] The preset fitting formula is obtained by fitting multiple sets of historically collected voltage amplitude and / or frequency pulse counts and corresponding flow data, with voltage amplitude and / or frequency pulse counts as independent variables and flow rate as dependent variable.

[0067] The flow monitoring method in this application includes monitoring methods such as voltage amplitude method and / or frequency pulse. It monitors the vibration of the actuating component using a triboelectric sensor, converts the vibration of the actuating component into an electrical signal, and uses the voltage amplitude and frequency pulse count of this electrical signal to monitor the flow rate, thus realizing a self-sensing flow monitoring function. This method is applicable to piezoelectric micropumps with structures such as passive valve piezoelectric insulin pumps, valveless piezoelectric insulin pumps, and active valve piezoelectric insulin pumps, and has a certain degree of versatility. Attached Figure Description

[0068] Figure 1 This is a cross-sectional view of a triboelectric self-sensing drug delivery piezoelectric pump, one of the embodiments of this application;

[0069] Figure 2 This is an exploded view of the assembly of the pump cover and the second friction part from a bottom angle, representing one embodiment of this application.

[0070] Figure 3 This is an exploded view of the assembly of the actuating component, insulating film, and first friction film according to one embodiment of this application.

[0071] Figure 4 This is a top-view isometric view of the sub-pump chamber layer in one of the embodiments of this application;

[0072] Figure 5 This is a bottom-view isometric view of the sub-pump chamber layer in one of the embodiments of this application;

[0073] Figure 6 This is a top-view isometric view of the channel layer in one of the embodiments of this application;

[0074] Figure 7 This is a schematic diagram of the structure of a triboelectric self-sensing drug delivery piezoelectric pump, one of the embodiments of this application;

[0075] Figure 8 This is a schematic diagram of a wheel-type structure for an inlet valve and an outlet valve, one of the embodiments of this application;

[0076] Figure 9 This is an exploded view of the assembly of a passive valve drug delivery piezoelectric pump, one of the embodiments of this application;

[0077] Figure 10 This is an exploded view of the assembly of a valveless drug delivery piezoelectric pump, one of the embodiments of this application;

[0078] Figure 11 This is an exploded view of the assembly of an active valve drug delivery piezoelectric pump, one of the embodiments of this application;

[0079] Figure 12 This is a schematic diagram of the architecture of a triboelectric self-sensing drug delivery piezoelectric pump flow monitoring device, one of the embodiments of this application;

[0080] Figure 13 This is a flowchart of a triboelectric self-sensing drug delivery piezoelectric pump flow monitoring method, which is one of the embodiments of this application.

[0081] Figure label:

[0082] 1-Pump body; 100-Threaded component; 2-Triboelectric sensor; 11-Pump chamber; 12-Actuating component; 121-Copper substrate; 122-Piezoelectric ceramic vibrator; 13-Inlet channel; 131-Inlet valve; 132-Inlet hydraulic valve; 14-Outlet channel; 141-Outlet valve; 142-Outlet hydraulic valve; 15-Pump cover; 151-Groove; 152-First annular groove; 153-First annular seal; 154-Second annular groove; 155-Second annular seal; 156-First through hole; 16-Pump chamber layer; 17-Sub-pump chamber layer; 171-Inlet valve actuation cavity; 172-Outlet valve mounting groove; 173-First sub-inlet channel; 174-First sub-outlet channel; 175-Third annular groove; 176-Third annular sealing ring; 18-Channel layer; 181-Inlet valve mounting groove; 182-Outlet valve actuation cavity; 183-Second sub-inlet channel; 184-Second sub-outlet channel; 185-Fourth annular groove; 186-Fourth annular sealing ring; 190-Eighth annular groove; 191-Inlet chamber valve cover; 192-Inlet hydraulic solenoid valve actuation cavity; 193-Outlet chamber valve cover; 194-Outlet hydraulic solenoid valve actuation cavity; 195-Fifth annular sealing ring; 196-Sixth annular sealing ring; 197-Seventh annular sealing ring; 198-Eighth annular sealing ring; 199-Sixth annular groove; 20-Insulating film; 21-First friction film; 22-Second friction film; 23-Conductive electrode sheet; 24-First friction part; 25-Second friction part; 200-Drug delivery piezoelectric pump; 201-Processor. Detailed Implementation

[0083] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this application. Obviously, the described embodiments are only some embodiments of the technical solutions of this application, and not all embodiments. Based on the embodiments recorded in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the technical solutions of this application.

[0084] Triboelectric self-sensing technology, based on the coupling effect of triboelectric charging and electrostatic induction, can convert mechanical energy generated by processes such as mechanical motion, interface contact, or fluid disturbance into electrical signals without the need for an external power source. By identifying and calibrating the voltage amplitude, frequency pulses, and variation patterns of the triboelectric signals, self-sensing monitoring of various physical quantities such as vibration, rotational speed, displacement, and flow rate can be achieved. This technology features simple structure, ease of miniaturization, and deep integration with the structure of the object being measured, making it highly suitable for integration into microfluidics and wearable medical devices as a self-powered or low-power sensing unit.

[0085] Based on the aforementioned advantages, combining triboelectric self-sensing technology with drug delivery piezoelectric pumps, especially micropumps, allows for real-time monitoring of the output flow rate of the drug delivery piezoelectric pump or micropump. For example, combining it with a piezoelectric insulin pump is an effective way to achieve real-time flow monitoring during insulin administration. By rationally arranging triboelectric functional materials and electrode structures within the pump cavity or at key locations in the flow channel, triboelectric signals related to fluid flow rate or pumping frequency can be generated during the operation of the piezoelectric insulin pump due to cavity deformation, diaphragm vibration, or interfacial contact and separation caused by fluid reciprocating flow, as well as fluid scouring, without significantly altering the pump structure and operating mode. After appropriate calibration, the pumping flow rate can be monitored online and in real-time by detecting the voltage amplitude or frequency pulse characteristics of this triboelectric signal, eliminating the need for an additional external flow meter or weighing device, thereby significantly improving the system's integration and reliability.

[0086] Therefore, there is an urgent need to achieve miniaturization and integration of wearable drug delivery piezoelectric pumps, especially micropumps, and on this basis, to achieve high-precision, real-time monitoring of the flow rate during the use of wearable drug delivery piezoelectric pumps, especially micropumps (e.g., insulin infusion).

[0087] To achieve stable and accurate flow output while enabling self-sensing and online monitoring of the flow rate, embodiments of this application provide a triboelectric self-sensing drug delivery piezoelectric pump. Figure 1 This is a cross-sectional view of a triboelectric self-sensing drug delivery piezoelectric pump, one of the embodiments of this application, as shown. Figure 1 As shown, the triboelectric self-sensing drug delivery piezoelectric pump includes: a pump body 1 and a single-electrode triboelectric sensor 2;

[0088] Pump body 1 includes: pump chamber 11, actuating component 12 that seals and covers the open end of pump chamber 11, liquid inlet channel 13 and liquid outlet channel 14 connected to pump chamber 11;

[0089] The triboelectric sensor 2 includes a first friction part 24 and a second friction part 25 disposed opposite to the first friction part 24 and in clearance fit; the first friction part 24 is disposed on the side of the actuating member 12 facing away from the pump cavity 11, and the second friction part 25 is disposed on the inner wall of the pump body 1 located on the side of the first friction part 24.

[0090] Among them, the actuator 12 is used to vibrate under the action of an external drive signal, so that the volume of the pump chamber 11 alternately increases or decreases, driving the liquid to flow out from the outlet channel 14 through the inlet channel 13 and the pump chamber 11;

[0091] The triboelectric sensor 2 is used to passively follow the synchronous vibration of the actuating component 12 through the first friction part 24, and synchronously change the gap between the first friction part 24 and the second friction part 25, so as to output an electrical signal corresponding to the vibration of the actuating component 12 from the second friction part 25; the electrical signal is used to determine the flow rate of liquid flowing out from the liquid outlet channel 14.

[0092] The embodiments of this application can integrate triboelectric sensors into various drug delivery piezoelectric pumps, including but not limited to valveless drug delivery piezoelectric pumps, passive valve drug delivery piezoelectric pumps, and / or active valve drug delivery piezoelectric pumps, so as to at least solve the problem of universal integration of triboelectric sensors in various drug delivery piezoelectric pumps.

[0093] The triboelectric self-sensing drug delivery piezoelectric pump has various specific applications. For example, the triboelectric self-sensing drug delivery piezoelectric pump of this application can be used for wearable infusion of liquid components, including but not limited to insulin, growth hormone, or pain management drugs. However, the embodiments of this application are not limited to this. Any liquid delivered by the triboelectric self-sensing drug delivery piezoelectric pump of this application falls within the protection scope of this application.

[0094] In one specific embodiment of this application, a triboelectric self-sensing piezoelectric drug delivery pump is used for insulin infusion, providing a triboelectric self-sensing piezoelectric insulin pump that can achieve stable and accurate drug delivery while enabling self-sensing and online monitoring of flow rate. The triboelectric self-sensing piezoelectric insulin pump includes, but is not limited to, three structures: a passive valve piezoelectric insulin pump, a valveless piezoelectric insulin pump, or an active valve piezoelectric insulin pump.

[0095] The actuating component 12 can be made of various materials and have various structures. For example, the materials of the actuating component 12 include, but are not limited to, piezoelectric fibers, piezoelectric single crystals, piezoelectric composite materials, piezoelectric polymers, or piezoelectric ceramics, which convert electrical energy into mechanical vibration. The structure of the actuating component 12 includes, for example, a single piezoelectric crystal structure, a double piezoelectric crystal structure, or a multi-layer curved structure. However, the embodiments of this application are not limited to these. Any component that can be used to seal the open end of the pump cavity to form a cavity for containing liquid, and which vibrates and changes the volume of the pump cavity under the drive of an external driving signal, falls within the protection scope of this application.

[0096] By placing the first friction part 24 of the triboelectric sensor 2 on the actuating component 12 and the second friction part 25 on the inner wall of the pump body 1, when the actuating component 12 controls the volume change of the pump chamber 11, driving the liquid to flow out from the outlet channel 14 through the inlet channel 13 and the pump chamber 11, the actuating component 12 simultaneously drives the gap change of the first friction part 24 and the second friction part 25. This allows the triboelectric sensor 2 to sample the vibration of the actuating component 12 and output a corresponding electrical signal, which can be calibrated as the corresponding liquid flow rate. The triboelectric sensor can be very small and can be integrated into wearable devices without significantly changing the structural size of the wearable device. This makes it suitable for miniaturized, integrated, and wearable applications. It enables long-term, continuous, and accurate flow monitoring for wearable drug delivery piezoelectric pumps, thereby improving the drug delivery safety and control accuracy of wearable drug delivery piezoelectric pumps used in medicine, and at least solving the problem of long-term, continuous flow monitoring in wearable drug delivery piezoelectric pumps.

[0097] The materials and structures of the first friction part 24 and the second friction part 25 can be varied. Any first friction part 24 and second friction part 25 that can exhibit opposite polarities after contact or friction are within the scope of protection of this application.

[0098] It should be noted that the first friction part 24 is disposed on the side of the actuating component 12 facing away from the pump chamber 11, and the second friction part 25 is disposed on the inner wall of the pump body 1. The triboelectric sensor 2 operates in single-electrode mode. When an electrical signal is output from the triboelectric sensor 2 via a wire, only one wire needs to be directly connected to the second friction part 25 along the inner wall of the pump body 1. The first friction part 24 disposed on the actuating component 12 does not need to be connected to an additional wire, thereby reducing the external traction on the actuating component 12 and the wiring complexity related to the actuating component 12. The actuating component 12 is a continuously vibrating component. The fewer external electrical connections involved, the lower the probability of faults such as electrical connection breaks, and the safer and more stable the operation. Furthermore, the first friction part 24 and the second friction part 25 are in a gap fit. The triboelectric sensor 2 is not entirely attached to the actuating component 12; only the first friction part 24 is attached to the actuating component 12. In addition, the driving voltage of the actuating component is generally between tens of volts and hundreds of volts, while the electric field voltage between the first friction part 24 and the second friction part 25 generated by the triboelectric sensor is only a few tenths of a volt, which will not have a significant impact on the driving of the actuating component or its impact can be ignored. The electric field force formed by the charge induced between the first friction part 24 and the second friction part 25 is negligible relative to the mechanical vibration capability of the actuating component 12, thereby further reducing the resistance to the vibration of the actuating component 12.

[0099] Preferably, the first friction part 24 is made of a flexible material, which is attached to the surface of the actuating component 12 to reduce the resistance to the vibration of the actuating component 12.

[0100] The first friction part 24 can be placed at multiple locations on the surface of the actuating component 12, and does not necessarily have to be placed at the center. Placing the first friction part 24 at different locations will result in different amplitude sampling of the actuating component 12. Therefore, it is understandable that different parameters need to be used to obtain the correct flow rate data when converting the flow rate later. Preferably, the first friction part 24 is placed at the position of maximum amplitude of the actuating component 12. For example, the first friction part 24 is placed at the center of the actuating component 12.

[0101] Preferably, the area of ​​the first friction part 24 is smaller than the area of ​​the actuating part 12.

[0102] It should be noted that the triboelectric sensor 2 does not directly monitor the surface deformation of the actuating component 12, but indirectly monitors the direction, amplitude, and frequency of the deformation of the actuating component 12 through the gap between the first friction part 24 and the second friction part 25. Therefore, the area of ​​the first friction part 24 attached to the surface of the actuating component 12 can be smaller than the area of ​​the actuating component 12, and the first friction part 24 does not need to cover all or most of the area of ​​the actuating component 12. The smaller the area of ​​the first friction part 24 attached to the actuating component 12, the smaller the resistance to the vibration of the actuating component 12 when the actuating component 12 vibrates. Therefore, using the triboelectric sensor 2 to monitor the vibration of the actuating component 12 can significantly reduce the resistance to the vibration of the actuating component 12 caused by the sensor being attached to the surface of the actuating component 12, and can maintain the original vibration capability and power consumption of the actuating component 12 as much as possible, without significantly suppressing the vibration capability of the actuating component 12 or significantly increasing its power consumption.

[0103] The area of ​​the first friction part 24 is smaller than the area of ​​the actuating member 12. When the actuating member 12 vibrates, the smaller the area of ​​the first friction part 24 attached to the actuating member 12, the smaller the resistance to the vibration of the actuating member 12. This helps to maintain the original vibration capability and power consumption of the actuating member 12 as much as possible, without significantly suppressing the vibration capability of the actuating member 12 or significantly increasing its power consumption. When the actuating member 12 has a multi-layer structure, such as Figure 3 As shown, the first friction portion 24 is disposed on the outermost layer of the multi-layer structure of the actuating member 12, facing away from the pump chamber 11, and the area of ​​the first friction portion 24 is smaller than the area of ​​the outermost layer. For example, Figure 1 This is a cross-sectional view of a triboelectric self-sensing drug delivery piezoelectric pump, one of the embodiments of this application, as shown. Figure 1 and Figure 3As shown, when the actuating component 12 includes a copper substrate 121 for sealing and covering the open end of the pump chamber and a piezoelectric ceramic oscillator 122 disposed on the surface of the copper substrate, the copper substrate 121 covers the open end of the pump chamber 11, the piezoelectric ceramic oscillator 122 is attached to the side of the copper substrate 121 facing away from the pump chamber 11, the area of ​​the first friction part 24 is smaller than the area of ​​the piezoelectric ceramic oscillator 122, and it is attached to the surface of the piezoelectric ceramic oscillator 122.

[0104] Preferably, the area of ​​the first friction part 24 is larger than the area of ​​the second friction part 25. The first friction part 24 is attached to the surface of the actuating component 12. When the actuating component 12 deforms, the first friction part 24 will also deform. If the area of ​​the first friction part 24 is less than or equal to the area of ​​the second friction part 25, the projected area of ​​the first friction part 24 on the second friction part 25 will become smaller, that is, the interaction area between the first friction part 24 and the second friction part 25 will become smaller, which will lead to a smaller output electrical signal. The fact that the area of ​​the first friction part 24 is larger than the area of ​​the second friction part 25 can ensure that even after the first friction part 24 deforms with the actuating component 12, the first friction part 24 and the second friction part 25 can always change the gap with the maximum interaction area, thereby ensuring that the triboelectric sensor 2 stably outputs an electrical signal with a sufficient amplitude.

[0105] It should be noted that the areas of the first friction part 24 and the second friction part 25 are greater than or equal to the minimum area of ​​the friction part. The minimum area of ​​the friction part is the minimum area of ​​the first friction part 24 and the second friction part 25 required to ensure that the signal-to-noise ratio of the triboelectric sensor 2 is greater than 20 dB. However, the areas of the first friction part 24 and the second friction part 25 cannot be reduced indefinitely. If the areas of the first friction part 24 and the second friction part 25 are too small, the signal-to-noise ratio of the triboelectric sensor 2 will be too low. In practical implementation, while ensuring that the signal-to-noise ratio of the triboelectric sensor 2 is greater than 20 dB, the areas of the first friction part 24 and the second friction part 25 should be reduced as much as possible. This is to minimize the adverse effects on the vibration of the actuating component 12 while ensuring that the triboelectric sensor 2 stably outputs an electrical signal with sufficient amplitude and signal-to-noise ratio.

[0106] The areas of the first friction part 24 and the second friction part 25 can be selected between the minimum area of ​​the friction part and the area of ​​the actuating component 12. Preferably, the area of ​​the second friction part 25 can use the minimum area of ​​the friction part. In specific implementation, the area of ​​the first friction part 24 can be determined based on the constraint that the projection of the first friction part 24 onto the second friction part 25 is greater than or equal to the area of ​​the second friction part 25 when the actuating component 12 has its maximum amplitude.

[0107] In some specific embodiments, the pump body 1 can be made of insulating material or metal material, etc. The insulating material is usually a non-metallic material. When the pump body 1 is composed of multiple parts, they need to be assembled together and sealed. Some non-metallic materials may not be able to withstand the locking force or connection force applied to achieve the sealing connection and may deform or be damaged.

[0108] Preferably, the pump body 1 is made of metal, which can withstand stronger locking or connecting forces. In this case, an insulating layer is required between the second friction part 25 and the pump body 1. An insulating layer is needed to isolate the second friction part 25 from the metal pump body 1 to prevent the charge induced by the second friction part 25 from leaking through the metal pump body, and to prevent interference from external electric fields from affecting the electrical signal of the triboelectric sensor through the conductive pump body. This ensures a stable electrical signal output from the triboelectric sensor 2. The insulating layer includes an insulating diaphragm or sheet, or an oxide layer on the surface of the metal material. Preferably, the insulating layer is an oxide layer obtained by oxidizing the inner surface of the pump body 1. The oxide layer obtained by oxidizing the inner surface of the pump body acts as an insulating layer. Compared to other independent insulating materials such as insulating films or sheets, the oxide layer provides insulation while almost not increasing the thickness of the pump body 1 surface, meaning it does not increase the overall thickness of the pump body 1. Furthermore, covering the inner surface of the pump body 1 corresponding to the space where the triboelectric sensor 2 is located with an oxide layer can completely prevent the triboelectric sensor 2 from releasing the charge induced on the first friction part 24 and the second friction part 25 through the air, the nearby pump body 1, etc., thereby providing a more stable working environment for the triboelectric sensor 2 and improving the working stability of the triboelectric sensor 2 without increasing the overall thickness of the pump body 1.

[0109] In some embodiments of this application, Figure 1 This is a cross-sectional view of a triboelectric self-sensing drug delivery piezoelectric pump, one of the embodiments of this application, as shown. Figure 1 and Figure 3 As shown, the first friction part 24 includes: an insulating film 20 and a first friction film 21; as Figure 1 and Figure 2 As shown, the second friction part 25 includes: a second friction film 22 and a conductive electrode sheet 23; one side of the insulating film 20 is attached to the surface of the actuating component 12 facing away from the pump cavity 11; one side of the first friction film 21 is attached to the other side of the insulating film 20; one side of the second friction film 22 is opposite to the other side of the first friction film 21 and is in clearance fit; one side of the conductive electrode sheet 23 is attached to the other side of the second friction film 22; the conductive electrode sheet 23 is disposed on the inner wall of the pump body 1 located on one side of the first friction part 24 through the other side of the conductive electrode sheet 23, and is electrically insulated from the pump body 1; wherein, the first friction film 21 and the second friction film 22 are two materials that exhibit opposite polarities after friction.

[0110] like Figure 1As shown, the first friction part 24 and the second friction part 25 are in clearance fit. The second friction part 25 does not directly hinder the vibration of the actuating component, while the first friction part 24 is composed of only two thin films, namely the insulating film 20 and the first friction film 21, which can reduce the resistance to the vibration of the actuating component 12.

[0111] like Figure 2 As shown, the other side of the conductive electrode plate 23 is connected to the inner wall of the pump body 1. The wire sampling the electrical signal of the triboelectric sensor 2 only needs to be connected to the conductive electrode plate 23. The wire connected to the conductive electrode plate 23 can be directly attached to the pump body 1, which is beneficial for the wiring and fixation of the wire and reduces the risk of disconnection from the conductive electrode plate 23 due to wire movement. The triboelectric sensor 2 only needs one wire connected to the conductive electrode plate 23 to obtain the sampled electrical signal, thus not increasing the number of wires led out from the actuator 12, and thus not pulling and hindering the vibration of the actuator 12. The fewer wires led out from the actuator 12 also reduces the number of electrical connection points between the wires and the actuator 12, thereby reducing the probability of open circuit failure due to continuous vibration of the actuator 12 and improving the overall working stability.

[0112] The other side of the conductive electrode 23 is connected to the inner wall of the pump body 1. When the pump body 1 is made of insulating material, the conductive electrode 23 can be directly attached to the inner wall of the pump body 1. When the pump body 1 is made of metal, an insulating layer needs to be provided between the conductive electrode 23 and the inner wall of the pump body 1. The insulating layer can be a thin film or sheet of insulating material, or an oxide layer obtained by oxidation on the inner surface of the pump body 1. The material of the conductive electrode 23 can be various. For example, the material of the conductive electrode 23 includes, but is not limited to, conductive metals such as gold, silver, or copper, or conductive materials such as graphite or graphene. However, the embodiments of this application are not limited to these. Any material that can export the electrical signal of the triboelectric sensor falls within the protection scope of this application.

[0113] The materials of the first friction film 21 and the second friction film 22 can be various. For example, the first friction film 21 can be an FEP (fluorinated ethylene propylene copolymer) film, and the second friction film 22 can be a nylon film, etc. However, the embodiments of this application are not limited to this. Any two materials that exhibit opposite polarities after friction, respectively as the first friction film 21 and the second friction film 22, fall within the protection scope of this application.

[0114] Preferably, the fit gap between the second friction film 22 and the first friction film 21 is 200 micrometers to 1 millimeter. The gap between the second friction film 22 and the first friction film 21 can be set by controlling the distance from the inner wall of the pump body 1 where the conductive electrode plate 23 is located to the open end of the pump cavity 11. This application embodiment does not limit the design method of the gap between the second friction film 22 and the first friction film 21. Exemplarily, those skilled in the art can accurately design the gap between the second friction film 22 and the first friction film 21 by designing a three-dimensional assembly drawing including the pump body 1 (including the pump cavity), the first friction part 24, the second friction part 25, and the actuating component 12 in three-dimensional model design software.

[0115] If the gap between the second friction film 22 and the first friction film 21 is too large, the electrical signal output by the triboelectric sensor 2 will be too weak, unstable, and difficult to detect. If the gap is too small, it will limit the vibration amplitude of the actuator 12. Setting the gap to 200 micrometers to 1 millimeter, such as 200, 300, 400, 500, 600, 700, 800, 900, or 1000 micrometers, can ensure that the triboelectric sensor 2 outputs a stable electrical signal without limiting the amplitude of the actuator 12.

[0116] For example, when the gap is set to 1 mm, the amplitude of the actuator 12 during normal operation can be 100 micrometers. In order for the triboelectric sensor 2 to output an electrical signal stably, a larger start-up drive signal can be provided to the actuator 12 when it is initially powered on, so that the actuator 12 pushes the first friction part 24 and the second friction part 25 into contact with a larger amplitude, so as to induce sufficient charge in the first friction part 24 and the second friction part 25. After that, during normal operation, a normal drive signal (which is smaller than the start-up drive signal) is provided, so that during normal operation, the first friction part 24 and the second friction part 25 do not directly contact each other, but only the gap changes. This ensures that the triboelectric sensor 2 outputs an electrical signal stably, and does not cause the amplitude of the actuator 12 to be limited by the second friction part 25.

[0117] Preferably, the thickness of the first friction film 21, the second friction film 22, and the conductive electrode sheet 23 is 40 to 60 micrometers; the thickness of the insulating film 20 is 100 to 130 micrometers. An insulating film thickness of 20 to 130 micrometers, such as 100, 110, 120, or 130 micrometers, provides sufficient insulation without significantly increasing the resistance to vibration of the actuating component 12. Excessively thin first friction film 21, second friction film 22, and conductive electrode sheet 23 would increase the processing cost of the corresponding films or electrodes. A thickness of 40 to 60 micrometers, such as 40, 45, 50, 55, or 60 micrometers, is easy to process and obtain, while simultaneously meeting the requirements for the friction-generated charge of the triboelectric sensor 2 and also exhibiting good flexibility.

[0118] In some embodiments of this application, such as Figure 1 As shown, the pump body 1 also includes: a pump cover 15, a first annular sealing ring 153 and a second annular sealing ring 155; a groove 151 is provided on the end face of the pump cover 15 facing the open end of the pump cavity 11; the conductive electrode plate 23 is disposed in the groove 151 through the other side of the conductive electrode plate 23. Figure 2 This is an exploded view of the pump cover and the second friction part assembled, taken from a bottom angle, according to one embodiment of this application; Figure 1 and 2 As shown, the pump cover 15 is provided with a first through hole 156, which is used for the wires of the triboelectric sensor 2 and the actuator 12 to pass through; the inner edge of the groove 151 is provided with a first annular groove 152, which is used to install a first annular sealing ring 153; the outer periphery of the open end of the pump chamber 11 is provided with a second annular groove 154, which is used to install a second annular sealing ring 155; wherein, the first annular sealing ring 153 and the second annular sealing ring 155 have the same diameter and are coaxially arranged; the actuator 12 is sandwiched between the first annular sealing ring 153 and the second annular sealing ring 155, and is pressed against the open end of the pump chamber 11 by the pump cover 15.

[0119] like Figure 2 As shown, the conductive electrode 23 and the second friction film 22 are disposed on the inner wall of the groove 151 on the pump cover 15. The actuating component 12 is sandwiched between the first annular sealing ring 153 and the second annular sealing ring 155. The pump cover 15 presses the first annular sealing ring 153 and the second annular sealing ring 155, thereby pressing and sealing the actuating component 12 against the open end of the pump cavity 11, forming a complete cavity. The end face of the pump cover 15 fits tightly with the end face of the open end of the pump cavity 11, ensuring that the gap between the second friction film 22 in the groove 151 on the pump cover 15 and the first friction film 21 on the actuating component 12 meets the design requirements. A first through hole 156 is provided on the pump cover 15 for the wires of the triboelectric sensor 2 and the actuating component 12 to pass through, facilitating the deployment of the wiring. In particular, the conductive electrode 23 and its connecting wires are disposed on the pump cover 15, allowing for integrated operation during disassembly and assembly, avoiding damage to the wires by pulling them. The pump body assembly structure provided in this application embodiment is simple and has a good sealing effect, which can improve assembly efficiency and simplify the operation complexity when maintaining and replacing friction sensors or actuation components.

[0120] In some embodiments of this application, such as Figure 1 , Figure 9 , Figure 10 and Figure 11As shown, the pump body 1 further includes: a pump chamber layer 16 for setting the pump chamber 11, the inlet channel 13, and the outlet channel 14; the pump cover 15 and the pump chamber layer 16 are provided with a plurality of corresponding threaded holes; the pump cover 15 and the pump chamber layer 16 are tightly connected by a plurality of threaded components 100 engaging with the plurality of threaded holes. The engagement of the plurality of threaded components 100 and the threaded holes enables a tight and even sealing connection between the pump cover 15 and the pump chamber layer 16. The application scenarios described in the embodiments of this application are for the purpose of more clearly illustrating the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions provided by the embodiments of this application. It is known to those skilled in the art that with the emergence of new application scenarios, the technical solutions provided by the embodiments of this application are also applicable to similar technical problems. The specific types of drug delivery piezoelectric pumps include, but are not limited to, valveless drug delivery piezoelectric pumps, passive valve drug delivery piezoelectric pumps, and / or active valve drug delivery piezoelectric pumps, etc. This application does not limit the specific types of drug delivery piezoelectric pumps.

[0121] As a specific embodiment of this application, such as Figure 10 As shown, the type of drug delivery piezoelectric pump is a valveless drug delivery piezoelectric pump, which can be used as a valveless piezoelectric insulin pump. The valveless drug delivery piezoelectric pump drives the pump chamber 11 to alternately increase or decrease in volume via the actuator 12. Combined with the asymmetric flow resistance structure of the inlet channel 13 and outlet channel 14 (such as a conical flow channel or a flow-blocking flow path), it generates a unidirectional net flow rate. It eliminates the need for traditional mechanical valves, resulting in a simpler structure, faster response, and fewer malfunctions. The cooperative structure of the pump cover 15, triboelectric sensor 2, actuator 12, and pump chamber 11 in the valveless drug delivery piezoelectric pump of this embodiment can be referred to the aforementioned... Figure 1 and Figure 2 The explanation is provided below and will not be repeated here.

[0122] As a specific embodiment of this application, such as Figure 1 and 9 As shown, the drug delivery piezoelectric pump is specifically a passive valve drug delivery piezoelectric pump. The mating structure of the pump cover 15, triboelectric sensor 2, actuating component 12, and pump chamber 11 in the passive valve drug delivery piezoelectric pump of this embodiment can be referred to the aforementioned... Figure 1 and Figure 2 The explanation is provided below and will not be repeated here.

[0123] In this embodiment of the application, an inlet valve 131 is provided on the inlet channel 13, and an outlet valve 141 is provided on the outlet channel 14. When the actuator 12 is activated, causing the volume of the pump chamber 11 to increase, the inlet valve 131 is opened and the outlet valve 141 is closed, so that liquid is drawn into the pump chamber 11 through the inlet valve 131. When the actuator 12 is activated, causing the volume of the pump chamber 11 to decrease, the inlet valve 131 is closed and the outlet valve 141 is opened, so that liquid is discharged from the pump chamber 11 through the outlet valve 141.

[0124] The inlet valve 131 and the outlet valve 141 have various specific structures, and their specific structures can be the same or different. For example, the inlet valve 131 and the outlet valve 141 can be as follows: Figure 8 The wheel valve structure shown is not limited to this embodiment. Any structure that can control the opening and closing of the inlet and outlet channels under the pressure change of the pump chamber to control the liquid being drawn in from the inlet channel, passing through the pump chamber, and flowing out from the outlet channel falls within the protection scope of this application. In this embodiment, each time the actuating component 12 is activated, the corresponding inlet valve 131 and outlet valve 141 will passively and synchronously operate under the pressure difference between the pump chamber 11 and the inlet and outlet channels, strictly controlling the amount of liquid flowing into or out of the pump chamber 11 each time. This makes the correlation between the liquid inflow and outflow volume and the vibration amplitude of the actuating component 12 more stringent, and the corresponding electrical signal of the triboelectric sensor 2 will also be more stringently correlated with the liquid inflow and outflow volume. Thus, by combining the triboelectric sensor 2 with the drug delivery piezoelectric pump with the inlet valve 131 and outlet valve 141, the accuracy of flow prediction can be improved.

[0125] Specifically, such as Figure 1 and Figure 9 As shown, the pump chamber layer 16 includes: a sub-pump chamber layer 17 for setting up the pump chamber 11 and a channel layer 18 for setting up the inlet channel 13 and the outlet channel 14;

[0126] like Figure 1 , Figure 4 and Figure 5 As shown, the sub-pump chamber layer 17 includes: an inlet valve actuation cavity 171 and an outlet valve mounting groove 172 disposed at one end of the sub-pump chamber layer 17 facing the channel layer 18, a first sub-inlet channel 173 connecting the inlet valve actuation cavity 171 and the pump chamber 11, a first sub-outlet channel 174 connecting the outlet valve mounting groove 172 and the pump chamber 11, and a third annular groove 175 disposed around the inlet valve actuation cavity 171;

[0127] like Figure 6 As shown, the channel layer 18 includes: an inlet valve mounting groove 181 and an outlet valve actuation cavity 182 disposed at one end of the channel layer 18 facing the sub-pump cavity layer 17, a second sub-inlet channel 183 connecting the inlet valve mounting groove 181 and the outside of the pump body 1, a second sub-outlet channel 184 connecting the outlet valve actuation cavity 182 and the outside of the pump body 1, and a fourth annular groove 185 disposed around the outlet valve actuation cavity 182;

[0128] Pump body 1 also includes: a third annular sealing ring 176 disposed in the third annular groove 175 and a fourth annular sealing ring 186 disposed in the fourth annular groove 185;

[0129] The inlet valve 131 is installed in the inlet valve mounting groove 181, and the outlet valve 141 is installed in the outlet valve mounting groove 172.

[0130] The inlet valve actuating cavity 171 and the inlet valve mounting groove 181 are aligned at their geometric centers, and the third annular sealing ring 176 is pressed against the edge of the inlet valve 131; the outlet valve actuating cavity 182 and the outlet valve mounting groove 172 are aligned at their geometric centers, and the fourth annular sealing ring 186 is pressed against the edge of the outlet valve 141; wherein, as Figure 7 As shown, the sub-pump chamber layer 17 is disposed between the pump cover 15 and the channel layer 18. The pump cover 15, the sub-pump chamber layer 17, and the channel layer 18 are tightly connected by multiple threaded components 100 and multiple threaded holes. The pump chamber 11 is disposed in the middle of the end of the sub-pump chamber layer 17 facing the pump cover 15. Smooth through holes or threaded holes can be provided on the pump cover 15 and the sub-pump chamber layer 17 to engage with the threaded components 100, and threaded holes can be provided on the channel layer 18 to engage with the threaded components 100.

[0131] like Figure 1 As shown, the second sub-inlet channel 183, the inlet valve mounting groove 181, the inlet valve 131, the third annular sealing ring 176, the inlet valve actuation cavity 171 and the first sub-inlet channel 173 constitute the inlet channel 13;

[0132] like Figure 1 As shown, the first sub-outlet channel 174, the outlet valve mounting groove 172, the outlet valve 141, the fourth annular sealing ring 186, the outlet valve actuation cavity 182, and the second sub-outlet channel 184 constitute the outlet channel 14.

[0133] like Figure 7 As shown, the pump body 1 is composed of three structural modules: a pump cover 15, a sub-pump chamber layer 17, and a channel layer 18, which are stacked and tightly connected in sequence. The triboelectric sensor and actuating components are located between the pump cover 15 and the sub-pump chamber layer 17. The inlet valve 131 and the outlet valve 141 are located between the sub-pump chamber layer 17 and the channel layer 18, and are sealed by corresponding sealing rings. Disassembly and assembly are simple and convenient for maintenance or replacement of components.

[0134] The following embodiment is a specific example of this application and is not intended to limit the scope of protection of this application. In this embodiment, the drug delivery piezoelectric pump is specifically a passive valve piezoelectric insulin pump, wherein, as Figure 1 and Figure 9As shown, the actuating component 12 is specifically a piezoelectric vibrator, the inlet valve 131 and the outlet valve 141 are specifically wheel valves, the sealing rings involved in various parts of the pump body 1 are specifically sealing rubber rings, and the threaded component 100 that mates with the threaded hole for tightly connecting the pump cover 15, the sub-pump chamber layer 17 and the channel layer 18 is specifically a screw or bolt. The triboelectric sensor 2 is attached between the pump cover 15 and the piezoelectric vibrator. The piezoelectric vibrator is sealed and pre-tightened by a large sealing rubber ring (the first annular sealing ring 153 and the second annular sealing ring 155). The inlet valve 131 and the outlet valve 141 are respectively installed in the sub-pump chamber layer 17 and the channel layer 18 of the pump body 1, and are pre-tightened and sealed by small sealing rubber rings (the third annular sealing ring 176 and the fourth annular sealing ring 186). The screws pre-tighten the pump body 1, tightly connecting the pump cover 15, the sub-pump chamber layer 17 and the channel layer 18.

[0135] like Figure 7 As shown, the pump body mainly consists of a pump cover 15, a sub-pump chamber layer 17, and a channel layer 18. Threaded holes are provided at the four corners of the pump body for use with threaded components (such as screws or bolts) to seal and pre-tighten the pump body. Figure 1 As shown, the channel layer 18 serves as the pump inlet and outlet water layer. The second sub-inlet channel 183 of the channel layer 18 is used to draw liquid from the outside, and the second sub-outlet channel 184 of the channel layer 18 is used to discharge liquid to the outside. The inlet valve mounting groove 181 is used to place the inlet valve 131, and the third annular groove 175 is used to place the small sealing rubber ring 176. The sub-pump chamber layer 17 has an outlet valve mounting groove 172 at one end facing the channel layer 18 for placing the outlet valve 141, and a fourth annular groove 185 for placing the small sealing rubber ring 186. The pump chamber 11 at one end of the sub-pump chamber layer 17 facing the pump cover 15 is used to store the liquid inside the pump, and the second annular groove 154 is used to place the large sealing rubber ring 155. The first annular groove 152 of the pump cover 15 is used to place the large sealing rubber ring 153, and the groove 151 is used to attach the second friction part 25 of the triboelectric sensor. Figure 2 and Figure 9 As shown, the first through hole 156 is used to guide the wires of the triboelectric sensor 2 and / or the actuating component 12. The pump body 1 is oxidized to form an oxide layer on its inner surface, making the surface non-conductive. The outer surface of the pump body 1 can also be oxidized to form an oxide layer. Among them, the inlet valve mounting groove 181 and the outlet valve mounting groove 172 are circular grooves; the recess 151 is a circular cavity.

[0136] The triboelectric sensor 2 includes a copper electrode, an FEP film, a nylon film, and an insulating film. Specifically, the conductive electrode 23 of the triboelectric sensor is a copper electrode, the first friction film 21 is an FEP film, and the second friction film 22 is a nylon film. On one hand, the insulating film 20 is attached to the side of the piezoelectric vibrator facing away from the pump chamber 11, and the FEP film is attached to the insulating film 20. On the other hand, the copper electrode is attached to the inner surface of the groove 151 of the pump cover 15, and the nylon film is attached to the copper electrode.

[0137] The piezoelectric vibrator serves as the driving source and is pre-tightened by the large sealing rubber ring 155 on the side of the sub-pump chamber layer 17 and the large sealing rubber ring 153 on the side of the pump cover 15, concentric with the pump chamber 11. The inlet valve 131 and outlet valve 141, with their wheel-type valve structure, are used to control the inflow and outflow of liquid.

[0138] As a specific embodiment of this application, such as Figure 11 As shown, the drug delivery piezoelectric pump is specifically an active valve drug delivery piezoelectric pump. The mating structure of the pump cover 15, triboelectric sensor 2, actuating component 12, and pump chamber 11 in the active valve drug delivery piezoelectric pump of this embodiment can be referred to the aforementioned... Figure 1 and Figure 2 The explanation is provided below and will not be repeated here.

[0139] In this embodiment of the application, an inlet chamber is connected in series on the inlet channel 13, and an inlet hydraulic valve 132 is installed and sealed at the open end of the inlet chamber. An outlet chamber is connected in series on the outlet channel 14, and an outlet hydraulic valve 142 is installed and sealed at the open end of the outlet chamber.

[0140] The actuating component 12 is used to change the volume of the pump chamber 11 to generate a pressure difference. The inlet hydraulic valve 132 and the outlet hydraulic valve 142 achieve phase difference control through alternating opening and closing actions. In conjunction with the volume change of the pump chamber 11, liquid is drawn in from the inlet channel 13 and discharged from the outlet channel 14. Through the timing control between the actuating component, the inlet hydraulic valve, and the outlet hydraulic valve, the output flow rate of each action remains stable. The electrical signal generated by the triboelectric sensor for each action has a stable correspondence with the corresponding liquid flow rate, thus improving the accuracy of the triboelectric sensor in monitoring the flow rate.

[0141] The phase control timing of the actuating component 12, the inlet hydraulic valve 132, and the outlet hydraulic valve 142 is illustrated using a specific embodiment. In this embodiment, the actuating component 12, the inlet hydraulic valve 132, and the outlet hydraulic valve 142 can all be piezoelectric vibrators. The pump chamber is always connected to the inlet and outlet chambers. The inlet hydraulic valve 132 opens (opens) or closes the inlet channel 13 by deformation, simultaneously increasing or decreasing the volume of the inlet chamber. The outlet hydraulic valve 142 opens (opens) or closes the outlet channel 14 by deformation, simultaneously increasing or decreasing the volume of the inlet chamber. The control signal of the active valve drug delivery piezoelectric pump is a three-phase signal with a phase difference. One phase signal controls the actuating component, which serves as the pump power source; one phase signal controls the inlet hydraulic valve 132, which serves as the inlet valve; and one phase signal controls the outlet hydraulic valve 142, which serves as the outlet valve. Initially, the inlet hydraulic valve 132 closes and blocks the inlet channel 13, and the outlet hydraulic valve 142 closes and blocks the outlet channel 14. The actuating component remains unchanged. Driven by a drive signal, the inlet hydraulic valve 132 opens, connecting the inlet channel 13 to the pump chamber 11. Simultaneously, the deformation of the inlet hydraulic valve 132 increases the volume of the inlet chamber, allowing liquid to enter from the inlet channel 13. Subsequently, the actuator deforms, increasing the volume of the pump chamber 11, and the liquid in the inlet chamber flows into the pump chamber 11. Then, the inlet hydraulic valve 132 closes, blocking the inlet channel 13 to prevent backflow of the liquid already in the inlet chamber. The outlet hydraulic valve 142 opens, and the actuator deforms in the opposite direction, reducing the volume of the pump chamber 11. Liquid flows from the pump chamber 11 to the outlet chamber, exiting through the outlet channel 14. Then, the outlet hydraulic valve 142 closes. During the closing process, the reduced volume of the outlet chamber further compresses the liquid in the outlet chamber, allowing it to continue flowing out until the outlet hydraulic valve 142 is completely closed, at which point the liquid stops flowing. Repeating this process, the active valve drug delivery piezoelectric pump can achieve flow delivery functionality. It should be noted that there are various phase control sequences for the actuating component 12, the inlet hydraulic solenoid valve 132, and the outlet hydraulic solenoid valve 142. The embodiments of this application are not limited to these. Any control sequence that can achieve phase difference control by alternating opening or closing actions of the inlet hydraulic solenoid valve 132 and the outlet hydraulic solenoid valve 142 in conjunction with the volume change of the pump chamber 11 caused by the actuating component 12, so that liquid is drawn in from the inlet channel 13 and discharged from the outlet channel 14, falls within the protection scope of this application.

[0142] Specifically, such as Figure 11 As shown, the pump body 1 also includes: an inlet chamber valve cover 191, an outlet chamber valve cover 193, a fifth annular sealing ring 195, a sixth annular sealing ring 196, a seventh annular sealing ring 197, and an eighth annular sealing ring 198.

[0143] The inlet chamber valve cover 191 is provided with an inlet hydraulic solenoid valve actuation cavity 192 that is aligned and fitted with the inlet chamber; the outlet chamber valve cover 193 is provided with an outlet hydraulic solenoid valve actuation cavity 194 that is aligned and fitted with the outlet chamber.

[0144] The outer periphery of the open end of the liquid inlet chamber is provided with a fifth annular groove for installing the fifth annular seal ring 195, and the inner edge of the hydraulic valve actuation chamber 192 is provided with a sixth annular groove 199 for installing the sixth annular seal ring 196.

[0145] The outer periphery of the open end of the liquid outlet chamber is provided with a seventh annular groove for installing the seventh annular seal ring 197, and the inner edge of the hydraulic valve actuation chamber 194 is provided with an eighth annular groove 190 for installing the eighth annular seal ring 198.

[0146] The hydraulic solenoid valve 132 is sandwiched between the fifth annular seal ring 195 and the sixth annular seal ring 196, and is pressed against the open end of the inlet chamber by the inlet chamber valve cover 191.

[0147] The hydraulic solenoid valve 142 is sandwiched between the seventh annular sealing ring 197 and the eighth annular sealing ring 198, and is pressed against the open end of the outlet chamber by the outlet chamber valve cover 193. The inlet chamber valve cover 191 and the outlet chamber valve cover 193 can be separate or integrated.

[0148] Secondly, such as Figure 12 As shown, this application provides a triboelectric self-sensing drug delivery piezoelectric pump flow monitoring device, including: a drug delivery piezoelectric pump 200 as described above and a processor 201;

[0149] The processor 201 is electrically connected to the actuator 12 of the drug delivery piezoelectric pump 200 and is used to drive the actuator 12 to change the volume of the pump chamber 11.

[0150] The processor 201 is electrically connected to the triboelectric sensor 2 of the drug delivery piezoelectric pump 200, and is used to sample the electrical signal of the triboelectric sensor 2 and convert the electrical signal into the corresponding liquid flow rate.

[0151] Thirdly, such as Figure 13 As shown, this application provides a method for monitoring the flow rate of a triboelectric self-sensing drug delivery piezoelectric pump, which is employed by the aforementioned triboelectric self-sensing drug delivery piezoelectric pump flow rate monitoring device. The method includes:

[0152] Step S300: Output a drive signal to the actuator to drive the actuator to vibrate, causing the volume of the pump chamber to alternately expand or shrink, driving the liquid to flow out from the outlet channel through the inlet channel and the pump chamber.

[0153] Step S301: Acquire the electrical signal output by the triboelectric sensor, and extract the voltage amplitude and / or frequency pulse number from the electrical signal;

[0154] Step S302: Based on the voltage amplitude and / or frequency pulse count, the corresponding flow rate is obtained.

[0155] In a specific embodiment of this application, step S302, converting the voltage amplitude and / or frequency pulse number to obtain the corresponding flow rate, includes:

[0156] Input the voltage amplitude and / or frequency pulse count into the preset fitting formula to obtain the flow rate;

[0157] The preset fitting formula is obtained by fitting multiple sets of historically collected voltage amplitude and / or frequency pulse counts and corresponding flow data, with voltage amplitude and / or frequency pulse counts as independent variables and flow rate as dependent variable.

[0158] The following describes the embodiments of this application using a piezoelectric insulin pump as a specific example. These embodiments are not intended to limit the technical solutions of this application. The flow monitoring method of this application includes monitoring methods such as voltage amplitude method and / or frequency pulse. The specific implementation method is as follows: The parameters of the driver (processor) used to drive the actuating component are set. The driver controls the piezoelectric vibrator (actuating component 12) to vibrate. The deformation of the piezoelectric vibrator (actuating component 12) changes the pressure inside the pump chamber 11, causing the valve to open and close, thus allowing liquid to enter and exit the piezoelectric insulin pump and complete the flow delivery. On the other hand, it changes the distance between the two friction materials (first friction part 24 and second friction part 25), thereby changing the potential and generating a triboelectric signal. Because of the continuous movement of the piezoelectric vibrator (actuating component 12) during operation, a continuous alternating current signal is generated. The voltage amplitude and frequency pulse count of this signal are used to monitor the flow rate of the piezoelectric insulin pump, realizing the self-sensing monitoring function of the piezoelectric insulin pump's flow rate. This method is applicable to piezoelectric micropumps with structures such as passive valve piezoelectric insulin pumps, valveless piezoelectric insulin pumps, and active valve piezoelectric insulin pumps, and has a certain degree of versatility. As an optional embodiment, the triboelectric sensor monitors the vibration amplitude or frequency of the piezoelectric oscillator (actuator 12), converts it into an electrical signal, and obtains the monitored voltage amplitude and frequency pulse count. The monitoring data is then transmitted to the data processing board (processor). The data processing board (or processor) performs fitting processing on the voltage amplitude or frequency pulse data to obtain flow data, which is displayed through the flow display window to achieve the purpose of real-time flow monitoring.

[0159] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0160] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to this application. It should be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart illustrations and / or block diagrams. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0161] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0162] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0163] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A triboelectric self-sensing drug delivery piezoelectric pump, characterized in that, include: Pump body and single-electrode mode triboelectric sensor; The pump body includes: a pump chamber, an actuating component that seals and covers the open end of the pump chamber, an inlet channel and an outlet channel connected to the pump chamber; The triboelectric sensor includes a first friction part and a second friction part disposed opposite to the first friction part and with a clearance fit; the first friction part is disposed on the side of the actuating component facing away from the pump cavity, and the second friction part is disposed on the inner wall of the pump body located on the side of the first friction part; The actuating component is used to vibrate under the action of an external driving signal, so that the volume of the pump chamber alternately increases or decreases, driving the liquid to flow out from the outlet channel through the inlet channel and the pump chamber; The triboelectric sensor is used to passively follow the synchronous vibration of the actuating component via the first friction part, synchronously changing the gap between the first and second friction parts, so as to output an electrical signal from the second friction part corresponding to the vibration of the actuating component; the electrical signal is used to determine the liquid flow rate from the liquid outlet channel; The area of ​​the first friction part is larger than the area of ​​the second friction part, and the area of ​​the first friction part is smaller than the area of ​​the actuating component. The area of ​​the second friction part is set as the minimum area of ​​the friction part. The area of ​​the first friction part is determined based on the constraint that the projection of the first friction part onto the second friction part is greater than or equal to the area of ​​the second friction part when the actuating component has its maximum amplitude. The minimum area of ​​the friction part is the minimum area of ​​both the first and second friction parts when the signal-to-noise ratio of the triboelectric sensor is greater than 20 dB. The triboelectric self-sensing drug delivery piezoelectric pump is specifically a triboelectric self-sensing drug delivery wearable micro piezoelectric pump.

2. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 1, characterized in that, The pump body is made of metal. An insulating layer is provided between the second friction part and the pump body.

3. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 2, characterized in that, The insulating layer is specifically an oxide layer obtained by oxidation treatment on the inner surface of the pump body.

4. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 1, characterized in that, The first friction part includes: an insulating film and a first friction film; The second friction part includes: a second friction film and a conductive electrode sheet; One side of the insulating film is attached to the surface of the actuating component facing away from the pump cavity; One side of the first friction film is attached to the other side of the insulating film; One side of the second friction film is opposite to the other side of the first friction film and is in clearance fit; One side of the conductive electrode sheet is attached to the other side of the second friction film; The conductive electrode plate is disposed on the inner wall of the pump body located on the side of the first friction part through the other side of the conductive electrode plate, and is electrically insulated from the pump body; The first friction film and the second friction film are two materials that exhibit opposite polarities after friction.

5. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 4, characterized in that, The fit gap between the second friction film and the first friction film is 200 micrometers to 1 millimeter.

6. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 4, characterized in that, The thickness of the first friction film, the second friction film, and the conductive electrode sheet is 40 micrometers to 60 micrometers; the thickness of the insulating film is 100 micrometers to 130 micrometers.

7. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 4, characterized in that, The pump body also includes: a pump cover, a first annular sealing ring, and a second annular sealing ring; The pump cover has a groove on its end face facing the open end of the pump chamber; the conductive electrode is disposed in the groove through the other side of the conductive electrode; the pump cover has a first through hole for the wires of the triboelectric sensor and the actuation component to pass through. The inner edge of the groove is provided with a first annular groove, which is used to install the first annular sealing ring. A second annular groove is provided around the open end of the pump chamber, and the second annular groove is used to install the second annular sealing ring; The first annular sealing ring and the second annular sealing ring have the same diameter and are coaxially arranged; the actuating component is sandwiched between the first annular sealing ring and the second annular sealing ring, and is pressed against the open end of the pump cavity by the pump cover.

8. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 7, characterized in that, The pump body further includes: a pump cavity layer for providing the pump cavity, the inlet channel and the outlet channel; The pump cover and the pump cavity layer are provided with a plurality of corresponding threaded holes; the pump cover and the pump cavity layer are tightly connected by a plurality of threaded components that cooperate with the plurality of threaded holes.

9. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 8, characterized in that, An inlet valve is provided on the inlet channel, and an outlet valve is provided on the outlet channel; Specifically, when the actuating component causes the volume of the pump chamber to increase, the inlet valve is turned on and the outlet valve is turned off, so that liquid is drawn into the pump chamber through the inlet valve; when the actuating component causes the volume of the pump chamber to decrease, the inlet valve is turned off and the outlet valve is turned on, so that liquid is discharged from the pump chamber through the outlet valve.

10. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 9, characterized in that, The pump chamber layer includes: a sub-pump chamber layer for setting the pump chamber and a channel layer for setting the inlet channel and the outlet channel; The sub-pump chamber layer includes: an inlet valve actuation cavity and an outlet valve mounting groove disposed at one end of the sub-pump chamber layer facing the channel layer, a first sub-inlet channel connecting the inlet valve actuation cavity and the pump chamber, a first sub-outlet channel connecting the outlet valve mounting groove and the pump chamber, and a third annular groove disposed around the inlet valve actuation cavity. The channel layer includes: an inlet valve mounting groove and an outlet valve actuation cavity disposed at one end of the channel layer facing the sub-pump cavity layer; a second sub-inlet channel connecting the inlet valve mounting groove and the outside of the pump body; a second sub-outlet channel connecting the outlet valve actuation cavity and the outside of the pump body; and a fourth annular groove disposed around the outlet valve actuation cavity. The pump body further includes: a third annular sealing ring disposed in the third annular groove and a fourth annular sealing ring disposed in the fourth annular groove; The inlet valve is disposed in the inlet valve mounting slot, and the outlet valve is disposed in the outlet valve mounting slot; The inlet valve actuating cavity and the inlet valve mounting groove are aligned with their geometric centers, and the third annular sealing ring is pressed against the edge of the inlet valve; the outlet valve actuating cavity and the outlet valve mounting groove are aligned with their geometric centers, and the fourth annular sealing ring is pressed against the edge of the outlet valve. The sub-pump chamber layer is disposed between the pump cover and the channel layer, and the pump cover, the sub-pump chamber layer and the channel layer are tightly connected by the plurality of threaded components and the plurality of threaded holes; the pump chamber is disposed in the middle of one end of the sub-pump chamber layer facing the pump cover.

11. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 8, characterized in that, An inlet chamber is connected in series on the inlet channel, and an inlet hydraulic valve is installed and sealed at the open end of the inlet chamber. An outlet chamber is connected in series on the outlet channel, and an outlet hydraulic valve is installed and sealed at the open end of the outlet chamber. The actuating component is used to change the volume of the pump chamber to generate a pressure difference. The inlet hydraulic valve and the outlet hydraulic valve achieve phase difference control by alternating opening or closing actions. In conjunction with the change in the volume of the pump chamber, liquid is drawn in from the inlet channel and discharged from the outlet channel.

12. The triboelectric self-sensing drug delivery piezoelectric pump as described in claim 11, characterized in that, The pump body also includes: an inlet chamber valve cover, an outlet chamber valve cover, a fifth annular sealing ring, a sixth annular sealing ring, a seventh annular sealing ring, and an eighth annular sealing ring; The inlet chamber valve cover is provided with an inlet hydraulic valve actuation cavity aligned with the inlet chamber; the outlet chamber valve cover is provided with an outlet hydraulic valve actuation cavity aligned with the outlet chamber. The outer periphery of the open end of the liquid inlet chamber is provided with a fifth annular groove for installing the fifth annular sealing ring, and the inner edge of the hydraulic valve actuation chamber is provided with a sixth annular groove for installing the sixth annular sealing ring. The outer periphery of the open end of the liquid outlet chamber is provided with a seventh annular groove for installing the seventh annular sealing ring, and the inner edge of the hydraulic valve actuation chamber is provided with an eighth annular groove for installing the eighth annular sealing ring. The hydraulic inlet valve is sandwiched between the fifth and sixth annular sealing rings and is pressed against the open end of the inlet chamber by the inlet chamber valve cover. The hydraulic valve is sandwiched between the seventh and eighth annular sealing rings and is pressed against the open end of the outlet chamber by the outlet chamber valve cover.

13. A triboelectric self-sensing drug delivery piezoelectric pump flow monitoring device, characterized in that, include: The drug delivery piezoelectric pump and processor as described in any one of claims 1 to 12; The processor is electrically connected to the actuation component of the drug delivery piezoelectric pump and is used to drive the actuation component to change the volume of the pump chamber; The processor is electrically connected to the triboelectric sensor of the drug delivery piezoelectric pump, and is used to sample the electrical signal of the triboelectric sensor and convert the electrical signal into a corresponding liquid flow rate.

14. A method for monitoring the flow rate of a triboelectric self-sensing drug delivery piezoelectric pump, characterized in that, The method employed by the triboelectric self-sensing drug delivery piezoelectric pump flow monitoring device as described in claim 13 includes: A drive signal is output to the actuator to drive the actuator to vibrate, causing the volume of the pump chamber to alternately expand or shrink, driving the liquid to flow out from the outlet channel through the inlet channel and the pump chamber; The electrical signal output by the triboelectric sensor is acquired, and the voltage amplitude and / or frequency pulse number are extracted from the electrical signal. The corresponding flow rate is obtained by converting the voltage amplitude and / or the frequency pulse number.

15. The triboelectric self-sensing drug delivery piezoelectric pump flow monitoring method as described in claim 14, characterized in that, The step of converting the voltage amplitude and / or the frequency pulse number to obtain the corresponding flow rate includes: The voltage amplitude and / or the frequency pulse count are input into a preset fitting formula to obtain the flow rate; The preset fitting formula is obtained by fitting multiple sets of historically collected voltage amplitude and / or frequency pulse counts and corresponding flow data, with voltage amplitude and / or frequency pulse counts as independent variables and flow rate as dependent variable.