Bernoulli suction cup with multiple annular grooves

Abstract

The invention belongs to the technical field of wafer processing equipment manufacturing, and particularly relates to a Bernoulli sucking disc with multiple annular grooves, which comprises a disc body and a cushion block, the multiple annular grooves and straight grooves are arrayed on the upper surface of the disc body around the center circumference of the disc body, and one end of each cushion block and one end of each straight groove are communicated with the annular grooves. The upper surface of the cushion block is higher than the upper surface of the disc body, an air inlet mechanism is arranged on the lower surface of the disc body, an air outlet hole of the air inlet mechanism is communicated with the annular groove, and the axis of the air outlet hole and the length line of the straight groove do not intersect in the plane parallel to the upper surface of the disc body. The projection of the air outlet hole on the plane vertical to the length line of the straight groove is positioned in any cross section on the straight groove; the problem of how to absorb the ultrathin wafer by adopting the positive pressure device is solved.

Description

Technical Field

[0001] This application belongs to the field of wafer processing equipment manufacturing technology, specifically a Bernoulli chuck with multiple annular grooves. Background Technology

[0002] In the wafer manufacturing process, very thin wafers need to be held in place, usually using chucks. However, when traditional chucks provide negative pressure, the wafer needs to be in complete contact with the chuck. This method works fine for ordinary wafers, but it can easily break ultra-thin wafers. Summary of the Invention

[0003] The purpose of this application is to address the shortcomings of existing technologies by designing a Bernoulli chuck with multiple annular grooves by setting pads and annular grooves on the chuck body. This design allows the wafer to float during adsorption and not make full contact with the chuck, thus making it less likely to break the wafer and solving the problem of how to adsorb ultrathin wafers.

[0004] The above-mentioned technical objective of this application is achieved through the following technical solution: A Bernoulli suction cup with multiple annular grooves includes a disc body and a pad. Multiple annular grooves, straight grooves, and the pad are arranged in an array around the central circumference of the disc body on its upper surface. One end of each straight groove connects to the annular groove, and the other end extends outward from the disc body towards its circumference. The upper surface of the pad is higher than the upper surface of the disc body. An air intake mechanism is provided on the lower surface of the disc body. The air outlet of the air intake mechanism connects to the annular groove. The axis of the air outlet does not intersect the length line of the straight groove in a plane parallel to the upper surface of the disc body. The projection of the air outlet onto a plane perpendicular to the length line of the straight groove lies within a cross-section of any point on the straight groove.

[0005] Preferably, the annular groove is open, and the width of the opening of the annular groove is greater than the width of the bottom of the annular groove.

[0006] Preferably, the cross-sectional shape of the end of the straight groove facing the annular groove is smaller than the cross-sectional shape of the rest of the straight groove.

[0007] Preferably, the air intake mechanism includes a first air storage chamber, a second air storage chamber, a connecting air passage, and a cover plate. Each first air storage chamber is located within a ring formed by one of the annular grooves. Each first air storage chamber communicates with its corresponding annular groove through an air outlet. The opening of the first air storage chamber is located on the lower surface of the disc body. The second air storage chamber is located at the center of the lower surface of the disc body, and its opening is also located on the lower surface of the disc body. The connecting air passage is located on the lower surface of the disc body, with one end connected to the first air storage chamber and the other end connected to the second air storage chamber. The cover plate tightly covers the lower surface of the disc body. The cover plate is coaxial with the disc body. The projection of the cover plate on the lower surface of the disc body surrounds the projections of the first air storage chamber, the second air storage chamber, and the connecting air passage on the lower surface of the disc body. A through hole is provided in the center of the cover plate, and the projection of the through hole on the lower surface of the disc body is located within the projection of the second air storage chamber on the lower surface of the disc body.

[0008] Preferably, the cover plate is fixedly connected to the disc body by bolts.

[0009] Preferably, there is a predetermined distance between the extension line of the straight groove and the center of the upper surface of the disk body.

[0010] Preferably, the disk body is provided with four annular grooves and four straight grooves.

[0011] Preferably, the axis of the air outlet is parallel to the length line of the straight groove.

[0012] The beneficial effects of this application are: This application designs a Bernoulli chuck with multiple annular grooves by setting pads and annular grooves on the chuck body. This allows the wafer to float during adsorption and not come into complete contact with the chuck, thus making it less likely to break the wafer and solving the problem of how to adsorb ultra-thin wafers. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this application; Figure 2 This is an exploded view of this application; Figure 3 This application is intended to illustrate the connection relationship between the first gas storage chamber, the second gas storage chamber, and the connecting gas path; Figure 4 This is a data diagram illustrating the verification of the diameter of the vent and the height of the pad in this application; Figure 5 This is a cross-sectional view showing the bolts in this application; Figure 6This is a record sheet for the test data of this application; Figure 7 This is a schematic diagram of the structure when the wafer is adsorbed in this application.

[0014] The components are: 1. Disk body; 2. Pad; 3. Annular groove; 4. Straight groove; 5. Air outlet; 6. First air storage chamber; 7. Second air storage chamber; 8. Connecting air passage; 9. Cover plate; 10. Through hole; 11. Wafer; 12. Bolt; 13. Protrusion. Detailed Implementation

[0015] like Figure 1-7 As shown, a Bernoulli suction cup with multiple annular grooves includes a disc body 1 and a pad 2. Multiple annular grooves 3, straight grooves 4, and pad 2 are arranged in a circular array around the center of the disc body 1 on its upper surface. One end of each straight groove 4 connects to the annular groove 3, and the other end extends outwards towards the circumference of the disc body 1. The upper surface of the pad 2 is higher than the upper surface of the disc body 1. An air intake mechanism is provided on the lower surface of the disc body 1. The air outlet 5 of the air intake mechanism connects to the annular groove 3. The axis of the air outlet 3 does not intersect the length line of the straight groove 4 in a plane parallel to the upper surface of the disc body 1. The projection of the air outlet 3 onto the plane perpendicular to the length line of the straight groove 4 is located within a cross-section of any point on the straight groove 4.

[0016] In this embodiment, during use, after placing the wafer 11 on the pad 2, airflow enters from the air inlet mechanism and then exits from the air outlet 5, thereby creating a negative pressure on the surface of the disk body 1, which in turn attracts the wafer 11. One end of the straight groove 4 extends beyond the circumference of the disk body 1, which is to guide the airflow out, so that the airflow is parallel to the upper surface of the disk body 1. The axis of the air outlet 3 and the length line of the straight groove 4 do not intersect in a plane parallel to the upper surface of the disk body 1, which is to prevent the airflow from the air outlet 3 from hitting the side wall of the straight groove 4, thereby making more efficient use of the airflow. The projection of the air outlet 3 on the plane perpendicular to the length line of the straight groove 4 is located in the cross-section of any point on the straight groove 4, in order to maximize the use of the air outlet 3 and make the air outlet 3 fully utilized.

[0017] As a preferred embodiment, the annular groove 3 is open-ended, with the width of the opening greater than the width of the bottom of the annular groove 3. This design aims to ensure that, even when some airflow exits from the annular groove 3, the open shape allows the airflow to flow along the groove wall, preventing it from directly impacting the wafer 11 and causing it to detach from the disk body 1.

[0018] As a preferred embodiment, the cross-sectional shape of the end of the straight groove 4 facing the annular groove 3 is smaller than the cross-sectional shape of the rest of the straight groove 4. This design causes the airflow to exhibit a jet-like phenomenon in the straight groove 4, thereby carrying away the air from the surface of the disk body 1, and thus allowing the wafer 11 to adhere to the surface of the disk body 1.

[0019] In a preferred embodiment, the air intake mechanism includes a first air storage chamber 6, a second air storage chamber 7, a connecting air passage 8, and a cover plate 9. Each first air storage chamber 6 is located within an annular space formed by one of the annular grooves 3. Each first air storage chamber 6 communicates with its corresponding annular groove 3 via an air outlet 6. The opening of the first air storage chamber 6 is located on the lower surface of the disk body 1. The second air storage chamber 7 is located at the center of the lower surface of the disk body 1, and its opening is also located on the lower surface of the disk body 1. The connecting air passage 8 is located on the lower surface of the disk body 1. Above, one end of the connecting air passage 8 is connected to the first air storage chamber 6, and the other end is connected to the second air storage chamber 7. A cover plate 9 seals over the lower surface of the disk body 1. The cover plate 9 is coaxial with the disk body 1. The projection of the cover plate 9 on the lower surface of the disk body 1 surrounds the projections of the first air storage chamber 6, the second air storage chamber 7, and the connecting air passage 8 on the lower surface of the disk body 1. A through hole 10 is provided in the center of the cover plate 9, and the projection of the through hole 10 on the lower surface of the disk body 1 is located within the projection of the second air storage chamber 7 on the lower surface of the disk body 1. With this configuration, the airflow enters the second air storage chamber 7 from the through hole 10, then passes through the connecting air passage 8 and is stored in the first air storage chamber 6. This results in a higher air pressure in the first air storage chamber 6, which is then more powerful and pressurized when ejected from the air outlet 5, thus having a greater effect on removing air from the surface of the disk body 1. The cover plate 9 is designed to make the first air storage chamber 6, the second air storage chamber 7, and the connecting air passage 8 each form a sealed space. At the same time, this design also makes it easier to manufacture the first air storage chamber 6, the second air storage chamber 7, and the connecting air passage 8 during processing.

[0020] As a preferred embodiment, the cover plate 9 is fixedly connected to the disc body 1 by bolts 12. Specifically, the disc body 1 has a first screw hole located away from the first air storage chamber 6, the second air storage chamber 7, the connecting air passage 8, and the annular groove 3. The cover plate 9 has a second screw hole located away from the first air storage chamber 6, the second air storage chamber 7, the connecting air passage 8, the annular groove 3, and the through hole 10. The bolts 12 pass through the second screw hole and engage with the first screw hole, thereby locking the cover plate 9 and the disc body 1 together.

[0021] As a preferred embodiment, a predetermined distance is set between the extension line of the straight groove 4 and the center of the upper surface of the disk body 1. This arrangement ensures that the straight groove 4 leaves a sufficient length on the upper surface of the disk body 1, thereby maximizing its utilization and providing better adsorption for the wafer 11.

[0022] As a preferred embodiment, the disk body 1 is provided with four annular grooves 3 and four straight grooves 4. This design makes the wafer more stable when it is adsorbed.

[0023] As a preferred embodiment, the axis of the air outlet 3 is parallel to the length line of the straight groove 4. This arrangement is more aesthetically pleasing and also makes better use of airflow.

[0024] As a preferred method, such as Figure 3 and Figure 5 As shown, the annular groove 3 consists of a frustum-shaped protrusion 13 and an open cavity. The protrusion 13 is coaxially arranged within the cavity. The upper part of the first gas storage chamber 6 is located at the larger end of the protrusion 13, and the air outlet 5 is located on the circumferential surface of the protrusion 13. This arrangement facilitates manufacturing and reduces the difficulty of the process. In particular, when machining the upper part of the first gas storage chamber 6, there is no concern about misalignment damaging the annular groove 3.

[0025] As a preferred method, according to Figure 4 and Figure 6 It was found that when the distance between the pad 2 and the disk body 1 is 0.2mm and the diameter of the air hole is 1mm, all data are optimal. Compared with the air hole with a diameter of 0.8mm, the air hole with a diameter of 1mm is superior in all aspects of picking and placing accuracy, with the only difference being a 0.014mm difference in repeatability in the X-axis direction. However, in this field, accuracy within ±0.1mm is acceptable, and of course, the closer the accuracy is to 0, the better. Therefore, in manufacturing, the result of "the distance between the pad 2 and the disk body 1 is 0.2mm and the diameter of the air hole is 1mm" is adopted.

Claims

1. A Bernoulli suction cup having multiple annular grooves, characterized in that, The device includes a disk body (1) and a pad (2). On the upper surface of the disk body (1), there are multiple annular grooves (3), straight grooves (4), and pads (2) arranged around the center circumference of the disk body (1). One end of the straight groove (4) is connected to the annular groove (3), and the other end extends out of the disk body (1) towards the circumferential surface of the disk body (1). The upper surface of the pad (2) is higher than the upper surface of the disk body (1). An air intake mechanism is provided on the lower surface of the disk body (1). The air outlet (5) of the air intake mechanism is connected to the annular groove (3). The axis of the air outlet (3) and the length line of the straight groove (4) do not intersect in a plane parallel to the upper surface of the disk body (1). The projection of the air outlet (3) on the plane perpendicular to the length line of the straight groove (4) is located in the cross-section of any point on the straight groove (4).

2. A Bernoulli suction cup with multiple annular grooves according to claim 1, characterized in that: The annular groove (3) is open, and the width of the opening of the annular groove (3) is greater than the width of the bottom of the annular groove (3).

3. A Bernoulli suction cup with multiple annular grooves according to claim 1, characterized in that: The cross-sectional shape of the straight groove (4) at one end facing the annular groove (3) is smaller than the cross-sectional shape of the rest of the straight groove (4).

4. A Bernoulli suction cup with multiple annular grooves according to claim 1, characterized in that: The air intake mechanism includes a first air storage chamber (6), a second air storage chamber (7), a connecting air passage (8), and a cover plate (9). Each first air storage chamber (6) is located within an annular groove (3). Each first air storage chamber (6) communicates with its corresponding annular groove (3) through an air outlet (6). The opening of the first air storage chamber (6) is located on the lower surface of the disk body (1). The second air storage chamber (7) is located at the center of the lower surface of the disk body (1), and its opening is also located on the lower surface of the disk body (1). The connecting air passage (8) is located on the lower surface of the disk body (1). One end of the air passage (8) is connected to the first air storage chamber (6), and the other end is connected to the second air storage chamber (7). The cover plate (9) is sealed and covered on the lower surface of the disk body (1). The cover plate (9) is coaxial with the disk body (1). The projection of the cover plate (9) on the lower surface of the disk body (1) surrounds the projection of the first air storage chamber (6), the second air storage chamber (7), and the connecting air passage (8) on the lower surface of the disk body (1). The cover plate (9) has a through hole (10) in the center. The projection of the through hole (10) on the lower surface of the disk body (1) is located within the projection of the second air storage chamber (7) on the lower surface of the disk body (1).

5. A Bernoulli suction cup with multiple annular grooves according to claim 4, characterized in that: The cover plate (9) is fixedly connected to the disc body (1) by bolts.

6. A Bernoulli suction cup with multiple annular grooves according to claim 1, characterized in that: There is a predetermined distance between the extension line of the length line of the straight groove (4) and the center of the upper surface of the disk body (1).

7. A Bernoulli suction cup with multiple annular grooves according to claim 1, characterized in that: The disk body (1) is provided with four annular grooves (3) and four straight grooves (4).

8. A Bernoulli suction cup with multiple annular grooves according to claim 1, characterized in that: The axis of the air outlet (3) is parallel to the length line of the straight groove (4).

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