Ozone concentration measurement device, ozone concentration measurement method, and ozone generation system

Abstract

An ozone concentration measurement device (100) for measuring the concentration of ozone in a gas to be measured inside a container (8) is provided with: a photoelectric sensor (4) in which a light-emitting unit (2) for irradiating light, a light-receiving unit (3) for receiving light, and a signal processing unit (1) for transmitting and receiving a light-emitting signal to the light-emitting unit (2) and a light-receiving signal from the light-receiving unit (3) are integrally formed; a light-projecting optical fiber (5) that is connected to the light-emitting unit (2) and introduces light into the container; a light-receiving optical fiber (6) that guides light that has passed through the inside of the container (8) to the light-receiving unit (3); and a calculation unit (9) that calculates the ozone concentration of the gas to be measured on the basis of the light reception signal from the signal processing unit (1).

Description

Technical Field

[0001] This disclosure relates to an ozone concentration measuring device, an ozone concentration measuring method, and an ozone generation system. Background Technology

[0002] Ozone is widely used in water treatment, deodorization, semiconductor manufacturing, sterilization, and virus inactivation. In the industrial application of ozone, it is necessary to measure the concentration of the supplied ozone, requiring a simple and highly accurate ozone concentration measuring device. For example, an ozone concentration measuring device has been disclosed as follows: As a method for measuring a high concentration of ozone (200 g / Nm3 or more) generated from an ozone generator, light from a visible light source is irradiated onto ozone in a light-shielded container, and the absorbance of the ozone is measured using a light-receiving element placed opposite it, thereby measuring the ozone concentration (see, for example, Patent Document 1).

[0003] Patent Document 1: Japanese Patent Application Publication No. 2012-132827 Summary of the Invention

[0004] The problem the invention aims to solve

[0005] In conventional ozone concentration measuring devices, a pair of light-transmitting windows are placed in a light-shielded container, with light path lengths ranging from several centimeters to tens of centimeters. Visible light with wavelengths from 550 nm to 630 nm is irradiated from a visible light source located outside one light-transmitting window onto the other. A light-receiving element mounted outside the other light-transmitting window with its light-receiving surface facing the visible light source is used to detect the ozone absorbance. However, since the visible light source and the light-receiving element are located in locations that at least separate the light path lengths, the following problems exist: the measured absorbance is unstable due to the temperature difference between them and the slight noise induced in the electrical wiring connecting them, leading to decreased accuracy in ozone concentration measurement. Furthermore, placing the visible light source and the light-receiving element separately outside the pair of light-transmitting windows requires a power supply to drive them, resulting in a complex and large-scale device.

[0006] This disclosure discloses techniques for solving problems as described above, with the aim of providing an ozone concentration measuring device, an ozone concentration measuring method, and an ozone generation system using the above in a small and simple structure that can measure ozone concentration with high accuracy.

[0007] Solution for solving the problem

[0008] The ozone concentration measuring device disclosed herein is an ozone concentration measuring device for measuring the ozone concentration of a test gas inside a container, comprising:

[0009] A photoelectric sensor integrally comprises a light-emitting part for irradiating light, a light-receiving part for receiving the light, and a signal processing part for transmitting and receiving light-emitting signals to the light-emitting part and light-receiving signals from the light-receiving part;

[0010] An optical fiber for projecting light is connected to the light-emitting part to guide the light into the interior of the container;

[0011] An optical fiber for receiving light guides the light that has passed through the interior of the container to the light-receiving part; and

[0012] The calculation unit calculates the ozone concentration of the gas being measured based on the light signal received by the signal processing unit.

[0013] Furthermore, the ozone concentration measurement method disclosed herein is an ozone concentration measurement method for measuring the ozone concentration of the gas to be measured inside a container, comprising:

[0014] The photoelectric sensor preparation process involves preparing a photoelectric sensor, which integrally forms a light-emitting part for irradiating light, a light-receiving part for receiving the light, and a signal processing part for transmitting and receiving light-emitting signals to the light-emitting part and light-receiving signals from the light-receiving part.

[0015] The process of preparing the optical fiber for light projection involves preparing the optical fiber for light projection, which is connected to the light-emitting part and guides the light into the interior of the container.

[0016] The process of preparing a light-receiving optical fiber involves preparing a light-receiving optical fiber that will guide the light that has passed through the interior of the container to the light-receiving section; and

[0017] The calculation process calculates the ozone concentration of the gas being measured based on the light-received signal from the signal processing unit.

[0018] In addition, the ozone generation system disclosed herein has the following features:

[0019] An ozone generator that generates ozone and sends it to the outside as the gas being measured.

[0020] The ozone concentration measuring device introduces the gas to be measured from the ozone generator into the container and measures the ozone concentration of the gas to be measured; and

[0021] The control unit controls the ozone generator based on the measurement result of the ozone concentration of the gas being measured by the ozone concentration measuring device.

[0022] The effects of the invention

[0023] According to the ozone concentration measuring device, ozone concentration measuring method and ozone generation system disclosed in this disclosure, ozone concentration can be measured with high precision in a small and simple structure. Attached Figure Description

[0024] Figure 1 This is a diagram showing the structure of the ozone concentration measuring device based on Embodiment 1.

[0025] Figure 2 It means Figure 1 A cross-sectional view of the container section of the ozone concentration measuring device shown.

[0026] Figure 3 This is a cross-sectional view showing the structure of the container portion of the ozone concentration measuring device based on Embodiment 2.

[0027] Figure 4 This is a cross-sectional view showing the structure of other container parts of the ozone concentration measuring device based on Embodiment 2.

[0028] Figure 5 This is a diagram showing the light emission pattern of the light-emitting part of the photoelectric sensor in the ozone concentration measuring device based on Embodiment 3.

[0029] Figure 6 This is a diagram showing the structure of the ozone concentration measuring device based on Embodiment 4.

[0030] Figure 7 This is a diagram showing the structure of the ozone concentration measuring device based on Embodiment 5.

[0031] Figure 8 This is a diagram showing the structure of the ozone generation system based on Embodiment 6.

[0032] Figure 9 This is a diagram showing the structure of the ozone generation system based on Embodiment 7.

[0033] Figure 10 This is a block diagram illustrating other examples of photoelectric sensors based on implementation methods.

[0034] Figure 11 This is a block diagram illustrating an example of the hardware structure of the control unit and the arithmetic unit based on an implementation method. Detailed Implementation

[0035] Hereinafter, preferred embodiments of the ozone concentration measuring device, ozone concentration measuring method, and ozone generation system disclosed herein will be described with reference to the figures. Furthermore, identical symbols will be used for identical content and equivalent parts, and detailed descriptions will be omitted where appropriate. Similarly, throughout all embodiments, repeated descriptions of structures and operations with the same symbols will be omitted where appropriate.

[0036] Implementation method 1.

[0037] Figure 1 This is a diagram showing the structure of the ozone concentration measuring device based on Embodiment 1. Figure 2 It means Figure 1 A cross-sectional view of the container section of the ozone concentration measuring device shown.

[0038] like Figure 1 As shown, the ozone concentration measuring device 100 includes a photoelectric sensor 4, a light-emitting optical fiber 5, a light-receiving optical fiber 6, a container (also called a cell) 8 containing the gas to be measured 7, and a processing unit 9. The photoelectric sensor 4 has a light-emitting part 2, a light-receiving part 3, and a signal processing unit 1 integrally formed within a housing 40. The light-emitting part 2 irradiates visible light 10. In particular, from the viewpoints of wavelength, brightness, and stability, a red light-emitting diode composed of an AlInGAP (aluminum, indium, gallium, phosphorus) quartz crystal is preferred, enabling high-precision measurement of ozone concentration. Furthermore, the visible light 10 includes light with wavelengths of at least 500 nm and less than 700 nm. This is the wavelength with the largest absorption cross-section for ozone, enabling high-precision measurement of ozone concentration.

[0039] The light-receiving part 3 receives visible light 10. Within the photoelectric sensor 4, the light-emitting part 2 and the light-receiving part 3 are arranged parallel to the central axis of the container 8. The signal processing unit 1 sends a light emission signal to cause the light-emitting part 2 to emit visible light 10 at a preset intensity, and receives a light-receiving signal from the light-receiving part 3 that receives the visible light 10. An optical fiber 5 is connected to one end of the container 8 and the light-emitting part 2, guiding the visible light 10 emitted from the light-emitting part 2 into the container 8 from one end. An optical fiber 6 is connected to the other end of the container 8 and the light-receiving part 3, receiving the visible light 10 that has passed through the container 8 from the other end and guiding it to the light-receiving part 3.

[0040] As the photoelectric sensor 4 thus formed, a digital fiber optic sensor can be used, for example. Similar to the photoelectric sensor 4 based on this disclosure, the digital fiber optic sensor includes a light-emitting part 2, a light-receiving part 3, and a signal processing part 1 inside the housing 40, and has a structure for connecting them to an optical fiber. Furthermore, similar to this disclosure, the signal processing part 1 has the function of adjusting the light emission intensity of the light-emitting part 2 and outputting the light intensity signal of the light-receiving part 3 to the outside, thus making it preferably applicable to the ozone concentration measuring device 100 of this disclosure. Moreover, by using this digital fiber optic sensor as the photoelectric sensor 4, it is easy to obtain a miniaturized, low-cost, and highly stable photoelectric sensor 4, which is extremely effective in forming an ozone concentration measuring device 100 based on this disclosure that can accurately measure ozone concentration with a miniaturized and simple structure.

[0041] like Figure 2 As shown, container 8 is formed from a hollow tubular component, here formed from a straight tube, for example, from a stainless steel tube. Furthermore, the inner wall is subjected to electrolytic polishing or bright annealing treatments, resulting in high reflectivity to visible light 10. Therefore, ozone concentration can be measured with high precision using a simple structure without the need for optical components such as lenses or collimators.

[0042] T-shaped connecting tubes 11A and 11B are respectively provided at both ends of the container 8. In the connecting tube 11A at one end of the container 8, the first socket 11A1 connects to one end of the container 8, the second socket 11A2 connects to the optical fiber 5 for transmitting light via the optical fiber connector 12A, and the third socket 11A3 serves as the inlet of the gas to be measured 7. In the connecting tube 11B at the other end of the container 8, the first socket 11B1 connects to the other end of the container 8, the second socket 11B2 connects to the optical fiber 6 for receiving light via the optical fiber connector 12B, and the third socket 11B3 serves as the outlet of the gas to be measured 7. The connecting tubes 11A and 11B are preferably made of materials with excellent ozone resistance, such as stainless steel or fluororesin.

[0043] Fiber optic connectors 12A and 12B are made of materials with ozone resistance and visible light transmittance, such as preferably glass or translucent fluororesin. Thus, with the light-emitting fiber 5 and the light-receiving fiber 6 connected to the connecting tubes 11A and 11B via fiber optic connectors 12A and 12B, direct exposure of the light-emitting fiber 5 and the light-receiving fiber 6 to ozone in the gas being measured 7 is suppressed, and degradation of the light-emitting fiber 5 and the light-receiving fiber 6 is inhibited. Therefore, long-term stable measurement of ozone concentration is possible. Furthermore, the light-emitting fiber 5 and the light-receiving fiber 6 do not necessarily need to be made of chemically resistant materials, allowing the use of inexpensive and universally available fibers. This reduces the cost of the apparatus.

[0044] Furthermore, the measuring unit is composed of container 8, connecting pipes 11A and 11B, and fiber optic connectors 12A and 12B, thus allowing for a highly airtight structure. Therefore, ozone concentration can be stably measured even under positive or negative pressure conditions. Additionally, the measuring unit, composed of container 8, connecting pipes 11A and 11B, and fiber optic connectors 12A and 12B, can be constructed using only heat-resistant components. Therefore, ozone concentration in the measured gas can be measured over a wide temperature range.

[0045] The arithmetic unit 9 calculates the ozone concentration based on the light signal (light intensity) transmitted from the photoelectric sensor 4 using equation (1) described later. The arithmetic unit 9 can be any device with such calculation capabilities. For example, a PC (personal computer), microcontroller, PLC (Programmable Logic Controller), or FPGA (Field Programmable Gate Array) could be used.

[0046] Next, the method for measuring ozone concentration using the ozone concentration measuring device 100 of Embodiment 1 configured as described above will be explained. First, the gas to be measured 7 is continuously introduced from the third inlet 11A3 of the connecting pipe 11A at one end of the container 8 and discharged from the third inlet 11B3 of the connecting pipe 11B at the other end of the container 8, so that the container 8 is always filled with the gas to be measured 7.

[0047] Next, a photoelectric sensor preparation process is performed for photoelectric sensor 4, which integrally forms a light-emitting part 2 for irradiating light, a light-receiving part 3 for receiving light, and a signal processing unit 1 for transmitting and receiving light emission signals to the light-emitting part 2 and light reception signals from the light-receiving part 3. Then, a light-emitting fiber preparation process is performed for light-emitting fiber 5, which is connected to the light-emitting part 2 to guide light into the interior of the container 8. Next, a light-receiving fiber preparation process is performed for light-receiving fiber 6, which guides the light that has passed through the interior of the container 8 to the light-receiving part 3.

[0048] Next, in the photoelectric sensor 4, based on the emission signal from the signal processing unit 1, the emission unit 2 irradiates visible light 10 with a set emission intensity. The visible light 10 is then transmitted from one end of the container 8 via the projection fiber optic cable 5 and through the fiber optic connector 12A into the interior of the container 8. The visible light 10, introduced into the container 8, propagates while being repeatedly reflected off the inner wall of the container 8, and reaches the light-receiving fiber optic cable 6 via the fiber optic connector 12B at the other end of the container 8. The light intensity is measured by the light-receiving unit 3 and transmitted to the signal processing unit 1. Then, the calculation unit 9 performs a calculation process based on the light intensity signal from the signal processing unit 1 to determine the ozone concentration of the gas 7 to be measured, as shown below.

[0049] When ozone is absent in the gas 7 to be measured within container 8, visible light 10 is not absorbed by the gas 7 to be measured, and the intensity of visible light 10 measured by the light-receiving unit 3 does not decrease. On the other hand, when ozone is present in the gas 7 to be measured within container 8, visible light 10 is absorbed by the ozone, and the intensity of visible light 10 measured by the light-receiving unit 3 decreases. The calculation unit 9 calculates the ozone concentration in the gas 7 to be measured within container 8 using equation (1) shown below, based on the ratio of these intensity measurements transmitted from the photoelectric sensor 4.

[0050] [Number 1]

[0051]

[0052] Here, I0 is the light intensity in the absence of ozone, I is the light intensity in the presence of ozone, and ε is the ozone absorption coefficient (dm). 2 / mol), L is the optical path length (dm), C O3 Ozone concentration (g / m³) 3 The ozone absorption coefficient ε is a physical property value, and the optical path length L is a constant determined by the size of container 8. Therefore, the ozone concentration can be calculated by the above equation (1) based on the light intensity in the absence of ozone and the presence of ozone.

[0053] Furthermore, an example is shown here where the gas to be measured 7 is introduced from the connecting tube 11A on the side of the light-emitting optical fiber 5 and exited from the connecting tube 11B on the side of the light-receiving optical fiber 6. However, there is no restriction on the flow direction of the gas to be measured 7. Even if the gas to be measured 7 flows in the opposite direction, such as being introduced from the connecting tube 11B on the side of the light-receiving optical fiber 6 and exited from the connecting tube 11A on the side of the light-emitting optical fiber 5, the ozone concentration of the gas to be measured 7 can still be measured.

[0054] Furthermore, the optical path length of container 8 is arbitrarily determined based on the ozone concentration of the gas 7 to be measured and the required measurement accuracy. However, it is preferable to be 10 cm or more and 100 cm or less. This is because if the optical path length is set to 10 cm or less, sufficient light absorption of ozone will not occur within container 8, and the measurement accuracy of ozone concentration may decrease. On the other hand, if the optical path length is set to 100 cm or more, when a high concentration of ozone is present in the gas 7 to be measured, the light absorption of ozone will be too large, making it difficult to measure, and the device will become too large, leading to limitations in the installation location.

[0055] Furthermore, while this embodiment 1 shows an example of using a straight stainless steel tube as the container 8, it is not limited to this as long as it contains the gas to be measured 7 and can be used to measure ozone concentration using visible light 10. For example, the container 8 may also be a metal can-shaped structure. Alternatively, a container 8 with high ozone tolerance and high visible light reflectance characteristics may be used, for example, by forming a metal film on the outer periphery of a glass tube.

[0056] According to the ozone concentration measuring device of Embodiment 1 configured as described above,

[0057] An ozone concentration measuring device for measuring the ozone concentration of the gas to be measured inside a container includes:

[0058] A photoelectric sensor integrally comprises a light-emitting part for irradiating light, a light-receiving part for receiving the light, and a signal processing part for transmitting and receiving light-emitting signals to the light-emitting part and light-receiving signals from the light-receiving part;

[0059] An optical fiber for projecting light is connected to the light-emitting part to guide the light into the interior of the container;

[0060] An optical fiber for receiving light guides the light that has passed through the interior of the container to the light-receiving part; and

[0061] The arithmetic unit calculates the ozone concentration of the gas being measured based on the light signal received by the signal processing unit.

[0062] Therefore, since the light-emitting part and the light-receiving part of the photoelectric sensor are formed as a single unit, it is not easy for a temperature difference to be generated between the two parts, and the decrease in the measurement accuracy of ozone concentration caused by changes in light intensity and light sensitivity due to temperature difference can be suppressed.

[0063] Furthermore, since the light-emitting part and the light-receiving part of the photoelectric sensor are formed as a single unit, the device structure can be made small and simplified.

[0064] Furthermore, since only the optical fibers for transmitting and receiving light are connected on the container side, no electrical wiring is required on the container side, eliminating the need for electrical wiring installation. Moreover, the ozone concentration can be measured with high accuracy and stability without being affected by temperature changes in wiring resistance or electromagnetic noise in the light-emitting and light-receiving parts.

[0065] Furthermore, since only the optical fiber for transmitting light and the optical fiber for receiving light are connected on the container side, the structure of the container and its surroundings becomes simplified and smaller, enabling the ozone concentration measuring device to be placed in a narrow space.

[0066] Furthermore, according to the ozone concentration measuring device of Embodiment 1 configured as described above,

[0067] The container is formed from a hollow tubular component.

[0068] The optical fiber for light projection is disposed at one end of the container.

[0069] The light-receiving optical fiber is located at the other end of the container.

[0070] Therefore, containers can be formed with a simple structure, light propagation becomes easy, and ozone concentration can be measured with high precision using a low-cost and simplified structure.

[0071] Furthermore, according to the ozone concentration measuring device of Embodiment 1 configured as described above,

[0072] A T-shaped connecting tube with a first socket, a second socket, and a third socket is provided on one end and the other end of the container, respectively.

[0073] The connecting tube on one end of the container is connected to the first socket of the container, and the optical fiber for light projection is connected to the second socket. The third socket serves as the inlet for the gas to be measured.

[0074] The connecting tube at the other end of the container is connected to the other end of the container at the first socket, and the light-receiving optical fiber is connected to the second socket. The third socket serves as the outlet for the gas to be measured.

[0075] Therefore, it is possible to easily and conveniently set up each optical fiber to the container, and to introduce and export the gas to be measured using connecting tubes, and to construct it with a simple structure.

[0076] Furthermore, it can suppress the degradation of each optical fiber and can stably measure ozone concentration over a long period of time.

[0077] Furthermore, according to the ozone concentration measurement method of Embodiment 1 as described above,

[0078] An ozone concentration measurement method for measuring the ozone concentration of the gas to be measured inside a container includes:

[0079] The photoelectric sensor preparation process involves preparing a photoelectric sensor, which integrally forms a light-emitting part for irradiating light, a light-receiving part for receiving the light, and a signal processing part for transmitting and receiving light-emitting signals to the light-emitting part and light-receiving signals from the light-receiving part.

[0080] The process of preparing the optical fiber for light projection involves preparing the optical fiber for light projection, which is connected to the light-emitting part to guide the light into the interior of the container.

[0081] The process of preparing a light-receiving optical fiber involves preparing a light-receiving optical fiber that will guide the light that has passed through the interior of the container to the light-receiving section; and

[0082] The calculation process involves calculating the ozone concentration of the gas being measured based on the light-received signal from the signal processing unit.

[0083] Therefore, it can suppress the decrease in the accuracy of ozone concentration measurement caused by changes in luminous intensity and photosensitive sensitivity due to temperature difference, and can perform high-precision and stable ozone concentration measurement without being affected by temperature changes in wiring resistance and electromagnetic noise.

[0084] Implementation method 2.

[0085] Figure 3 and Figure 4 This is a cross-sectional view showing the structure of the container portion of the ozone concentration measuring device based on Embodiment 2. (As shown...) Figure 3 As shown, in this embodiment, the following aspects differ from Embodiment 1 described above: In addition to the straight tube portion 80, the container 8 also has a bent tube portion 13. Furthermore, as other examples, such as... Figure 4 As shown, in addition to the straight tube section 80, the container 8 also has two bent tube sections 13A and 13B.

[0086] The inner wall of container 8 is formed to increase the reflectivity of visible light 10, thereby allowing the visible light 10, which is emitted from the projection fiber 5, to propagate towards the receiving fiber 6 after multiple reflections on the inner wall of container 8. Therefore, even if... Figure 3 or Figure 4 As shown, in addition to the straight pipe section 80, there are also bent pipe sections 13, 13A, and 13B. Visible light 10 can also propagate through repeated reflections, and the ozone concentration can be measured in the same way as in Embodiment 1 described above.

[0087] Thus, by incorporating bends 13, 13A, and 13B into the container 8, the shape flexibility of the ozone concentration measuring device 100 can be increased. For example, by appropriately forming the bends 13, 13A, and 13B in the form of piping along an existing ozone generator, the installation flexibility can be increased. Furthermore, by incorporating the bends 13, 13A, and 13B, the container 8 can have a shorter optical path length due to terrain variations, enabling even a relatively small ozone concentration measuring device 100 to perform high-precision ozone concentration measurements. Moreover, Figure 3 and Figure 4 The bends 13, 13A, and 13B are right angles, but the bending angle does not necessarily have to be a right angle and can be determined arbitrarily. For example, the same effect can be achieved by bending it into a ring shape or a spiral shape.

[0088] The ozone concentration measuring device according to Embodiment 2, configured as described above, achieves the same effect as Embodiment 1 described above, and

[0089] The container is formed by a straight tube section and a curved tube section.

[0090] The optical fiber for light projection is disposed at one end of the container.

[0091] The light-receiving optical fiber is located at the other end of the container.

[0092] Therefore, it can increase the degree of freedom in the shape of the ozone concentration measuring device.

[0093] Implementation method 3.

[0094] Figure 5 This is a diagram showing the light emission pattern of the light-emitting part 2 of the photoelectric sensor 4 in the ozone concentration measuring device based on Embodiment 3.

[0095] In this embodiment, the emission pattern of visible light 10 from the light-emitting unit 2 of the photoelectric sensor 4 is pulse-modulated. The structure and operation are otherwise the same as in the embodiments described above. If the light-emitting unit 2 emits light continuously, the temperature may rise. Generally, the luminous intensity of the light-emitting unit 2 (light-emitting element) is temperature-dependent with respect to wavelength; therefore, if the temperature of the light-emitting unit 2 rises during continuous ozone concentration measurement, the measurement accuracy may decrease. According to this embodiment, pulse modulation of the light emission of the light-emitting unit 2 results in intermittent emission, thus suppressing heat generation compared to continuous emission and preventing a decrease in the measurement accuracy of ozone concentration due to temperature increases.

[0096] Implementation method 4.

[0097] Figure 6 This diagram illustrates the structure of the ozone concentration measuring device based on Embodiment 4. In this embodiment, it differs from the aforementioned embodiments in the following ways: the photoelectric sensor 4 and the arithmetic unit 9 of the ozone concentration measuring device 100 are formed as an instrument unit 14, while the container 8 side is provided as a measuring unit 15, and these are formed separately. For this configuration, the light-emitting optical fiber 5 and the light-receiving optical fiber 6 are each composed of multiple optical fibers 51, 52 and 61, 62. Furthermore, connecting portions 511, 512 and 611, 612 are provided to connect each optical fiber. Additionally, connecting portions 511, 611 are provided within the instrument unit 14.

[0098] In this configuration, the instrument unit 14 and the measuring unit 15 are connected via connection points 511, 512, 611, and 612 of the light-emitting optical fiber 5 and the light-receiving optical fiber 6, thus making them structurally independent. Therefore, the instrument unit 14 and the measuring unit 15 can be installed separately. This allows for installation even in confined spaces with limited room for ozone concentration measurement. Furthermore, the measuring unit 15 does not contain any electrical equipment; the measuring unit 15 and the instrument unit 14 are connected solely via optical fibers 5 and 6.

[0099] Therefore, for example, the instrument unit 14 can be installed in a low electromagnetic noise environment and indoors where it can be sheltered from wind and rain, while the measuring unit 15 can be installed at the location to be measured, for example, outdoors. Furthermore, the instrument unit 14 can be installed in the same location as the control unit of other devices, such as an ozone generation system. In addition, an example is shown here where two optical fibers 51, 52, 61, and 62 are used for the light-emitting fiber 5 and the light-receiving fiber 6, respectively; however, this is not a limitation, and three or more optical fibers can be used, each forming a connection.

[0100] In addition, by providing the connecting parts 511 and 611 on the instrument part 14, it is easy to install and remove the connecting parts 511, 512, 611, and 612, and it is possible to suppress changes in light intensity caused by the movement or bending of the optical fibers 51, 52, 61, and 62.

[0101] The ozone concentration measuring device according to Embodiment 4, configured as described above, achieves the same effect as the embodiments described above, and

[0102] The optical fiber for transmitting light and the optical fiber for receiving light are each formed of multiple optical fibers and have a connecting part that connects the optical fibers.

[0103] Therefore, the computing unit and photoelectric sensor side can be structurally separated from the container side via optical fiber, allowing only the computing unit and photoelectric sensor side to be installed in a low electromagnetic noise environment and indoors where they can be sheltered from wind and rain. Furthermore, the computing unit can be integrated with the control unit of other devices.

[0104] Implementation method 5.

[0105] Figure 7 This diagram illustrates the structure of the ozone concentration measuring device based on Embodiment 5. In this embodiment, the instrument unit 14 has multiple photoelectric sensors 4A, 4B, and 4C, each of which has an independent measuring unit 15A, 15B, and 15C, connected via optical fibers 5 and 6. The structure is otherwise identical to that of Embodiment 4 described above.

[0106] In this embodiment, when measuring ozone concentration at multiple locations, or when measuring ozone concentration generated from multiple ozone generators, independent measuring units 15A, 15B, and 15C can be provided. Measurements are taken by individual photoelectric sensors 4A, 4B, and 4C, and the data is aggregated by the instrument unit 14, resulting in a simplified structure for the ozone generation system. Furthermore, since the calculation unit 9 can be consolidated into one unit, a less expensive structure can be achieved compared to having independent calculation units 9 in multiple measuring units 15.

[0107] The ozone concentration measuring device according to Embodiment 5, configured as described above, achieves the same effect as the embodiments described above, and

[0108] Equipped with multiple of the aforementioned photoelectric sensors,

[0109] Each of the aforementioned photoelectric sensors comprises a light-emitting optical fiber, a light-receiving optical fiber, and a container.

[0110] The calculation unit calculates the ozone concentration of the gas being measured for each of the containers connected to each of the photoelectric sensors.

[0111] Therefore, it can be easily and inexpensively constructed when measuring ozone concentration at multiple locations, as well as when measuring ozone concentration generated from multiple ozone generators.

[0112] Implementation method 6.

[0113] Figure 8 This is a diagram showing the structure of the ozone generation system based on Embodiment 6. (As shown) Figure 8 As shown, in the ozone generation system, a raw gas 23 containing oxygen is supplied from the raw gas source 20 to the ozone generator 21. Furthermore, the ozone generated by the ozone generator 21 is supplied as the measured gas 7 through the ozone piping 25 to the ozone application device 26. The ozone generation system also includes a control unit 22 for controlling the ozone generator 21. The ozone concentration measuring device 100 collects the measured gas 7 in a container 8 in the form of an ozone branch flowing in the ozone piping 25 as the measured gas 7, measures its ozone concentration, and then returns it to the ozone piping 25. Furthermore, the ozone concentration measuring device 100 may not necessarily require... Figure 8 In that case, by branching from ozone pipe 25, container 8 itself can also be used as ozone pipe 25, and the same can be done.

[0114] Based on the ozone concentration information measured by the ozone concentration measuring device 100, the control unit 22 performs feedback control on the operating conditions of the ozone generator 21 to stably supply ozone at a preset ozone concentration. Furthermore, the ozone generation conditions controlled may include the power supplied to the ozone generator 21, the flow rate of the raw material gas 23, and the composition of the raw material gas 23, but are not limited to any conditions related to the operation of the ozone generator 21.

[0115] The ozone generation system utilizes an ozone concentration measuring device 100, which can accurately measure ozone concentration with a small and simple structure, to measure the ozone concentration generated by the ozone generator 21 in real time. Furthermore, by performing feedback control on the ozone generator 21 based on the measured ozone concentration information, a pre-set ozone concentration can be stably supplied to the ozone-using device 26.

[0116] The ozone generating system according to Embodiment 6, configured as described above, includes:

[0117] An ozone generator that generates ozone and sends it to the outside as the gas being measured.

[0118] The ozone concentration measuring device introduces the gas to be measured from the ozone generator into the container and measures the ozone concentration of the gas to be measured; and

[0119] The control unit controls the ozone generator based on the measurement result of the ozone concentration of the gas being measured by the ozone concentration measuring device.

[0120] Therefore, ozone concentration can be measured with a simple structure, and the ozone generator can be controlled to achieve a preset ozone concentration based on the measured ozone concentration, and an ozone generation system can be easily constructed.

[0121] Implementation method 7.

[0122] Figure 9 This diagram illustrates the structure of the ozone generation system based on Embodiment 7. In this embodiment, the gas to be measured, introduced into the ozone usage device 26 via the upstream ozone piping 251, is designated as the first gas to be measured 7A. A measuring unit 15A is provided for measuring the ozone concentration of the first gas to be measured 7A. Furthermore, the gas to be measured, discharged from the ozone usage device 26 via the downstream ozone piping 252, is designated as the second gas to be measured 7B. A measuring unit 15B is provided for measuring the ozone concentration of the second gas to be measured 7B. The measuring units 15A and 15B are connected to the instrument unit 14 via optical fibers 5 and 6, respectively. The ozone concentration measuring device 100 comprises the measuring unit 15A, the measuring unit 15B, and the instrument unit 14.

[0123] The ozone concentration measuring device 100 measures the ozone concentration of the measuring unit 15A (i.e., the ozone concentration of the first measured gas 7A upstream of the ozone-using device 26) and the ozone concentration of the measuring unit 15B (i.e., the ozone concentration of the second measured gas downstream of the ozone-using device 26), and sends these signals to the control unit 22. The control unit 22 performs feedback control on the operating conditions of the ozone generator 21 based on the received ozone concentration information. Other structures and operations are the same as in Embodiment 6 described above.

[0124] As an ozone-using device 26, a water treatment tank is exemplified, for example. In this embodiment, by simultaneously measuring the ozone concentration on both the upstream and downstream sides of the water treatment tank, the ozone consumption can be calculated, enabling highly controlled processes that minimize the amount of ozone leaking downstream. Furthermore, the instrument unit 14 can be shared between the two measuring units 15A and 15B, thus allowing for the measurement of ozone concentration at both locations with a compact and simple structure.

[0125] The ozone generating system according to Embodiment 7, configured as described above, includes:

[0126] An ozone generator that generates ozone and sends it to the outside as the first gas to be measured;

[0127] The ozone-using device introduces the first gas to be measured from the ozone generator to use the ozone, and discharges a second gas to be measured as the gas to be measured.

[0128] The aforementioned ozone concentration measuring device introduces the first gas to be measured, which is introduced into the ozone-using equipment, into the container to measure the ozone concentration of the first gas to be measured; and introduces the second gas to be measured, which is discharged from the ozone-using equipment, into a container different from the first container to measure the ozone concentration of the second gas to be measured; and

[0129] The control unit controls the ozone generator based on the ozone concentration measurement results of the first and second measured gases from the ozone concentration measuring device.

[0130] Therefore, ozone concentration can be measured with a simple structure before and after the ozone usage device, thus enabling the construction of an ozone generation system that can be controlled according to the amount of ozone used to optimize the ozone output of the ozone generator.

[0131] An ozone generation system can be constructed that can produce a pre-set concentration of the gas to be measured (ozone gas) with a simple structure.

[0132] Furthermore, the above embodiments show examples where the light-emitting part 2 and the light-receiving part 3 of the photoelectric sensor 4 are arranged parallel to the central axis of the container 8, but this is not a limitation; other arrangements may also be made as follows. Figure 10 As shown, the light-emitting part 2 and the light-receiving part 3 are arranged perpendicularly to the central axis of the container 8. This allows the photoelectric sensor 4 to be miniaturized, increasing its installation flexibility.

[0133] Furthermore, the arithmetic unit 9 and the control unit 22, as in Figure 11 The hardware shown in the example comprises a processor 200 and a storage device 300. The storage device, not shown, includes volatile storage devices such as random access memory (RAM) and non-volatile auxiliary storage devices such as flash memory. Alternatively, a hard disk drive can be used as an auxiliary storage device instead of flash memory. The processor 200 executes a program input from the storage device 300. In this case, the program is input to the processor 200 from the auxiliary storage device via the volatile storage device. Furthermore, the processor 200 can output data such as calculation results to the volatile storage device of the storage device 300, or it can store data in the auxiliary storage device via the volatile storage device.

[0134] This disclosure describes various exemplary embodiments and examples; however, the various features, methods, and functions described in one or more embodiments are not limited to the application of specific embodiments and can be applied to embodiments alone or in various combinations. Therefore, numerous variations not illustrated are conceivable within the scope of the technology disclosed in this specification. These include, for example, variations of at least one structural element, additions, omissions, and extraction of at least one structural element combined with structural elements of other embodiments.

[0135] Explanation of reference numerals in the attached figures

[0136] 1: Signal Processing Unit; 10: Visible Light; 100: Ozone Concentration Measuring Device; 11A: Connecting Pipe; 11B: Connecting Pipe; 12A: Fiber Optic Connector; 12B: Fiber Optic Connector; 13: Bend Section; 13A: Bend Section; 13B: Bend Section; 14: Instrumentation Unit; 15: Measurement Unit; 15A: Measurement Unit; 15B: Measurement Unit; 15C: Measurement Unit; 2: Light Emitting Unit; 20: Raw Material Gas Source; 21: Ozone Generator; 22: Control Unit; 23: Raw Material Gas; 25: Ozone Piping; 251: Ozone Piping; 25 2: Ozone piping; 26: Ozone application equipment; 3: Light receiving unit; 4: Photoelectric sensor; 4A: Photoelectric sensor; 4B: Photoelectric sensor; 4C: Photoelectric sensor; 40: Housing; 5: Fiber optic cable for projection; 51: Fiber optic cable; 511: Connecting part; 512: Connecting part; 52: Fiber optic cable; 6: Fiber optic cable for light receiving; 61: Fiber optic cable; 611: Connecting part; 612: Connecting part; 62: Fiber optic cable; 7: Gas to be measured; 7A: First gas to be measured; 7B: Second gas to be measured; 8: Container; 80: Straight pipe section; 9: Calculation unit.

Claims

1. An ozone concentration measuring device for measuring the ozone concentration of a gas to be measured inside a container, the ozone concentration measuring device comprising: A photoelectric sensor integrally comprises a light-emitting part for irradiating light, a light-receiving part for receiving the light, and a signal processing part for transmitting and receiving light-emitting signals to the light-emitting part and light-receiving signals from the light-receiving part; An optical fiber for projecting light is connected to the light-emitting part to guide the light into the interior of the container; The light-receiving optical fiber guides the light that has passed through the interior of the container to the light-receiving part; as well as The calculation unit calculates the ozone concentration of the gas being measured based on the light signal received by the signal processing unit.

2. The ozone concentration measuring device according to claim 1, wherein, The container is formed from a hollow tubular component. The optical fiber for light projection is disposed at one end of the container. The light-receiving optical fiber is located at the other end of the container.

3. The ozone concentration measuring device according to claim 2, wherein, The container is formed by a straight tube section and a curved tube section. The optical fiber for light projection is disposed at one end of the container. The light-receiving optical fiber is located at the other end of the container.

4. The ozone concentration measuring device according to any one of claims 1 to 3, wherein, The optical fiber for transmitting light and the optical fiber for receiving light are each formed of multiple optical fibers and have a connecting part that connects the optical fibers.

5. The ozone concentration measuring device according to any one of claims 1 to 4, wherein, The arrangement of the light-emitting part and the light-receiving part in the photoelectric sensor is such that they are arranged parallel to the central axis of the container or perpendicular to the central axis of the container.

6. The ozone concentration measuring device according to any one of claims 1 to 5, wherein, A T-shaped connecting tube with a first socket, a second socket, and a third socket is provided on one end and the other end of the container, respectively. The connecting tube on one end of the container is connected to the first socket of the container, and the optical fiber for light projection is connected to the second socket. The third socket serves as the inlet for the gas to be measured. The connecting tube on the other end of the container is connected to the other end of the container at the first socket, and the light-receiving optical fiber is connected at the second socket. The third socket becomes the outlet of the gas to be measured.

7. The ozone concentration measuring device according to any one of claims 1 to 6, wherein, Equipped with multiple of the aforementioned photoelectric sensors, Each of the aforementioned photoelectric sensors comprises a light-emitting optical fiber, a light-receiving optical fiber, and a container. The calculation unit calculates the ozone concentration of the gas being measured for each of the containers connected to each of the photoelectric sensors.

8. An ozone generation system, comprising: An ozone generator that produces ozone and sends it to the outside as the gas being measured. The ozone concentration measuring device according to any one of claims 1 to 7 introduces the gas to be measured from the ozone generator into the container and measures the ozone concentration of the gas to be measured; and The control unit controls the ozone generator based on the measurement result of the ozone concentration of the gas being measured by the ozone concentration measuring device.

9. An ozone generation system, comprising: An ozone generator that generates ozone and sends it to the outside as the first gas to be measured; The ozone-using device introduces the first gas to be measured from the ozone generator to use the ozone, and discharges a second gas to be measured as the gas to be measured. The ozone concentration measuring device of claim 7, wherein the first gas to be measured, introduced into the ozone-using device, is introduced into the container to measure the ozone concentration of the first gas to be measured, and the second gas to be measured, discharged from the ozone-using device, is introduced into a container different from the container to measure the ozone concentration of the second gas to be measured; and The control unit controls the ozone generator based on the measurement results of the ozone concentration of the first and second measured gases from the ozone concentration measuring device.

10. A method for determining ozone concentration, comprising determining the ozone concentration of a gas to be measured inside a container, the method comprising: The photoelectric sensor preparation process involves preparing a photoelectric sensor, which integrally forms a light-emitting part for irradiating light, a light-receiving part for receiving the light, and a signal processing part for transmitting and receiving light-emitting signals to the light-emitting part and light-receiving signals from the light-receiving part. The process of preparing the optical fiber for light projection involves preparing the optical fiber for light projection, which is connected to the light-emitting part and guides the light into the interior of the container. The process of preparing the optical fiber for receiving light involves preparing the optical fiber for receiving light, which guides the light that has passed through the interior of the container to the light receiving part. as well as The calculation process calculates the ozone concentration of the gas being measured based on the light-received signal from the signal processing unit.

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